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Tests from pcg32, twice as fast and almost the same as the original ranlux.

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salman
2026-06-19 18:20:56 +02:00
parent c721259556
commit a19dd6b96b
156 changed files with 10354 additions and 10238 deletions
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tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.out
+73 -71
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@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:55
Start: 19.Jun. 2026 18:18:13
End: 18.Jun. 2026 09:55:56
End: 19.Jun. 2026 18:18:13
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 5000 projectiles 0 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
7888 0 0 0 0 0 0 0 0
7930 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,97 +110,98 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4476 ENERGY=0.4476E+07 EV
BACKSCATTERED PARTICLES= 524 ENERGY=0.1334E+06 EV
IMPLANTED PARTICLES= 4525 ENERGY=0.4525E+07 EV
BACKSCATTERED PARTICLES= 475 ENERGY=0.1199E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5056
PARTICLES with neg. E= 56
TRIED PARTICLES= 5076
PARTICLES with neg. E= 76
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4476 4476
IMPLANTED PARTICLES (LAYER 1)= 4525 4525
IMPLANTED PARTICLES (LAYER 2)= 4476 0
IMPLANTED PARTICLES (LAYER 2)= 4525 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.001
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.506
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.000
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.494
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5351E+01 2.5309E+03 3.8377E-01 2.6215E+00 5.0308E+01 7.5196E-01 4.8171E+01 2.7066E-02
SPREAD 6.9381E+01 1.3999E+03 6.3886E-01 3.2564E+00 3.7416E+01 5.5925E-01 3.1432E+01 4.0213E-02
PATHLENGTH 2.3340E+02 3.0389E+03 -4.4591E-01 3.3482E+00 5.5126E+01 8.2397E-01 6.9604E+01 3.9404E-02
ELASTIC LOSS 1.3570E+01 3.4833E+01 5.9020E+00 1.3186E-03
INEL. LOSS 1.0308E+03 1.8106E+05 4.2552E+02 9.5066E-02
PENETRATION 9.5888E+01 2.6004E+03 3.7352E-01 2.6126E+00 5.0994E+01 7.5807E-01 4.9090E+01 2.8410E-02
SPREAD 6.8879E+01 1.4309E+03 6.0430E-01 2.9906E+00 3.7827E+01 5.6233E-01 3.0012E+01 3.2866E-02
PATHLENGTH 2.3206E+02 3.1085E+03 -4.3907E-01 3.2404E+00 5.5754E+01 8.2883E-01 6.9168E+01 3.4820E-02
ELASTIC LOSS 1.3272E+01 3.1964E+01 5.6537E+00 1.2494E-03
INEL. LOSS 1.0210E+03 1.8304E+05 4.2783E+02 9.4548E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.3125E-01 3.3250E-01 1.6745E+01 4.8077E+02 5.7663E-01 8.2298E-04 1.0395E-02 6.2046E-01
WEAK EL.LOSS 4.6172E-03 4.7299E-05 2.1531E+00 7.3017E+00 6.8774E-03 9.8156E-06 1.6946E-07 5.2362E-03
INELAST.LOSS 9.9492E+00 3.7198E+01 2.1868E-01 2.0934E+00 6.0990E+00 8.7047E-03 5.5514E-02 2.1169E-03
SUBTHR.LOSS 1.3091E-01 3.2159E-01 1.5632E+01 3.9869E+02 5.6709E-01 8.0937E-04 9.1531E-03 4.3741E-01
ELAST.LOSS 1.2869E-01 3.0466E-01 1.5682E+01 4.0680E+02 5.5196E-01 7.8593E-04 8.7389E-03 4.6643E-01
WEAK EL.LOSS 4.6435E-03 4.7759E-05 2.1437E+00 7.2445E+00 6.9108E-03 9.8402E-06 1.6993E-07 5.2010E-03
INELAST.LOSS 9.9223E+00 3.7179E+01 2.2166E-01 2.0913E+00 6.0975E+00 8.6821E-03 5.5303E-02 2.1151E-03
SUBTHR.LOSS 1.2869E-01 3.0466E-01 1.5682E+01 4.0680E+02 5.5196E-01 7.8593E-04 8.7389E-03 4.6643E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5351E+01 1.1623E+04 1.6397E+06 2.5615E+08 4.3229E+10 7.7579E+12
PENETRATION 9.5888E+01 1.1795E+04 1.6792E+06 2.6466E+08 4.5107E+10 8.1950E+12
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 233 0.5206E-01 4 9.4449E+05 8.2685E+03 8.1236E+03 1.3384E+02 7.9897E+03 1.0155E+02 4
20.- 40. 422 0.9428E-01 4 9.3841E+05 9.9746E+03 9.7410E+03 0.0000E+00 9.7410E+03 0.0000E+00 0
40.- 60. 589 0.1316E+00 10 8.5622E+05 1.0773E+04 1.0466E+04 3.0111E+01 1.0436E+04 2.2967E+01 1
60.- 80. 614 0.1372E+00 19 7.1447E+05 1.0300E+04 9.9778E+03 0.0000E+00 9.9778E+03 0.0000E+00 0
80.- 100. 637 0.1423E+00 31 5.3407E+05 8.6689E+03 8.3487E+03 0.0000E+00 8.3487E+03 0.0000E+00 0
100.- 120. 593 0.1325E+00 74 3.8225E+05 6.8875E+03 6.5963E+03 0.0000E+00 6.5963E+03 0.0000E+00 0
120.- 140. 491 0.1097E+00 121 2.4755E+05 5.1476E+03 4.9036E+03 0.0000E+00 4.9036E+03 0.0000E+00 0
140.- 160. 406 0.9071E-01 185 1.4317E+05 3.2657E+03 3.0832E+03 0.0000E+00 3.0832E+03 0.0000E+00 0
160.- 180. 230 0.5139E-01 287 7.2324E+04 1.8872E+03 1.7789E+03 0.0000E+00 1.7789E+03 0.0000E+00 0
180.- 200. 143 0.3195E-01 403 3.3365E+04 9.0939E+02 8.4655E+02 0.0000E+00 8.4655E+02 0.0000E+00 0
200.- 220. 71 0.1586E-01 512 1.2772E+04 4.1379E+02 3.8170E+02 0.0000E+00 3.8170E+02 0.0000E+00 0
220.- 240. 32 0.7149E-02 629 4.1228E+03 1.5166E+02 1.3856E+02 0.0000E+00 1.3856E+02 0.0000E+00 0
240.- 260. 12 0.2681E-02 722 1.0205E+03 4.5449E+01 4.1023E+01 0.0000E+00 4.1023E+01 0.0000E+00 0
260.- 280. 3 0.6702E-03 615 6.2549E+01 4.6410E+00 3.8731E+00 0.0000E+00 3.8731E+00 0.0000E+00 0
280.- 300. 0 0.0000E+00 402 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
300.- 320. 0 0.0000E+00 266 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
320.- 340. 0 0.0000E+00 129 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 229 0.5061E-01 1 9.4075E+05 8.0467E+03 7.9011E+03 0.0000E+00 7.9011E+03 0.0000E+00 0
20.- 40. 469 0.1036E+00 2 9.4852E+05 1.0034E+04 9.7870E+03 0.0000E+00 9.7870E+03 0.0000E+00 0
40.- 60. 568 0.1255E+00 10 8.4414E+05 1.0216E+04 9.9183E+03 0.0000E+00 9.9183E+03 0.0000E+00 0
60.- 80. 601 0.1328E+00 25 6.9882E+05 9.7784E+03 9.4626E+03 0.0000E+00 9.4626E+03 0.0000E+00 0
80.- 100. 604 0.1335E+00 52 5.4476E+05 8.7122E+03 8.3960E+03 0.0000E+00 8.3960E+03 0.0000E+00 0
100.- 120. 610 0.1348E+00 82 3.8986E+05 7.0432E+03 6.7453E+03 0.0000E+00 6.7453E+03 0.0000E+00 0
120.- 140. 529 0.1169E+00 124 2.5003E+05 5.0428E+03 4.7867E+03 0.0000E+00 4.7867E+03 0.0000E+00 0
140.- 160. 364 0.8044E-01 182 1.4360E+05 3.2386E+03 3.0683E+03 0.0000E+00 3.0683E+03 0.0000E+00 0
160.- 180. 281 0.6210E-01 246 7.9801E+04 2.1112E+03 1.9818E+03 0.0000E+00 1.9818E+03 0.0000E+00 0
180.- 200. 145 0.3204E-01 459 3.3315E+04 9.2822E+02 8.6576E+02 0.0000E+00 8.6576E+02 0.0000E+00 0
200.- 220. 77 0.1702E-01 563 1.3668E+04 3.9672E+02 3.6270E+02 0.0000E+00 3.6270E+02 0.0000E+00 0
220.- 240. 32 0.7072E-02 608 4.6394E+03 1.3755E+02 1.2618E+02 0.0000E+00 1.2618E+02 0.0000E+00 0
240.- 260. 8 0.1768E-02 711 1.7720E+03 6.2611E+01 5.8112E+01 0.0000E+00 5.8112E+01 0.0000E+00 0
260.- 280. 8 0.1768E-02 585 3.0113E+02 1.6924E+01 1.4408E+01 0.0000E+00 1.4408E+01 0.0000E+00 0
280.- 300. 0 0.0000E+00 451 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
300.- 320. 0 0.0000E+00 233 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
320.- 340. 0 0.0000E+00 123 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 50 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 14 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
440.- SUT 0 0.0000E+00
440.- 460. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- SUT 0 0.0000E+00
4476 1.0000E+00 4476 4.8843E+06 6.6698E+04 6.4431E+04 1.6395E+02 6.4267E+04 1.2452E+02 5
4525 1.0000E+00 4525 4.8940E+06 6.5765E+04 6.3474E+04 0.0000E+00 6.3474E+04 0.0000E+00 0
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 3.1480E+05 2.6834E+03 0.0000E+00 2.6834E+03 6.2969E+05 5.4402E+03 1.3384E+02 5.3063E+03 0 4
20.- 40. 3.0957E+05 3.0120E+03 0.0000E+00 3.0120E+03 6.2885E+05 6.7290E+03 0.0000E+00 6.7290E+03 0 0
40.- 60. 2.8560E+05 3.2059E+03 0.0000E+00 3.2059E+03 5.7062E+05 7.2603E+03 3.0111E+01 7.2302E+03 0 1
60.- 80. 2.3725E+05 3.0150E+03 0.0000E+00 3.0150E+03 4.7722E+05 6.9629E+03 0.0000E+00 6.9629E+03 0 0
80.- 100. 1.7880E+05 2.6287E+03 0.0000E+00 2.6287E+03 3.5527E+05 5.7201E+03 0.0000E+00 5.7201E+03 0 0
100.- 120. 1.2746E+05 1.8583E+03 0.0000E+00 1.8583E+03 2.5479E+05 4.7380E+03 0.0000E+00 4.7380E+03 0 0
120.- 140. 8.1669E+04 1.4006E+03 0.0000E+00 1.4006E+03 1.6588E+05 3.5030E+03 0.0000E+00 3.5030E+03 0 0
140.- 160. 4.6600E+04 9.0954E+02 0.0000E+00 9.0954E+02 9.6572E+04 2.1737E+03 0.0000E+00 2.1737E+03 0 0
160.- 180. 2.4490E+04 5.3897E+02 0.0000E+00 5.3897E+02 4.7834E+04 1.2400E+03 0.0000E+00 1.2400E+03 0 0
180.- 200. 1.0826E+04 2.4643E+02 0.0000E+00 2.4643E+02 2.2539E+04 6.0012E+02 0.0000E+00 6.0012E+02 0 0
200.- 220. 4.1607E+03 9.2769E+01 0.0000E+00 9.2769E+01 8.6114E+03 2.8893E+02 0.0000E+00 2.8893E+02 0 0
220.- 240. 1.5486E+03 3.8853E+01 0.0000E+00 3.8853E+01 2.5742E+03 9.9702E+01 0.0000E+00 9.9702E+01 0 0
240.- 260. 3.9539E+02 1.0502E+01 0.0000E+00 1.0502E+01 6.2507E+02 3.0521E+01 0.0000E+00 3.0521E+01 0 0
260.- 280. 1.7782E+01 1.3350E+00 0.0000E+00 1.3350E+00 4.4768E+01 2.5381E+00 0.0000E+00 2.5381E+00 0 0
0.- 20. 3.1254E+05 2.6369E+03 0.0000E+00 2.6369E+03 6.2821E+05 5.2642E+03 0.0000E+00 5.2642E+03 0 0
20.- 40. 3.1576E+05 2.9815E+03 0.0000E+00 2.9815E+03 6.3276E+05 6.8054E+03 0.0000E+00 6.8054E+03 0 0
40.- 60. 2.8293E+05 3.0552E+03 0.0000E+00 3.0552E+03 5.6121E+05 6.8630E+03 0.0000E+00 6.8630E+03 0 0
60.- 80. 2.3376E+05 2.9404E+03 0.0000E+00 2.9404E+03 4.6506E+05 6.5223E+03 0.0000E+00 6.5223E+03 0 0
80.- 100. 1.7950E+05 2.4502E+03 0.0000E+00 2.4502E+03 3.6526E+05 5.9459E+03 0.0000E+00 5.9459E+03 0 0
100.- 120. 1.2931E+05 1.9878E+03 0.0000E+00 1.9878E+03 2.6055E+05 4.7575E+03 0.0000E+00 4.7575E+03 0 0
120.- 140. 8.2513E+04 1.3987E+03 0.0000E+00 1.3987E+03 1.6752E+05 3.3880E+03 0.0000E+00 3.3880E+03 0 0
140.- 160. 4.7107E+04 8.6809E+02 0.0000E+00 8.6809E+02 9.6496E+04 2.2002E+03 0.0000E+00 2.2002E+03 0 0
160.- 180. 2.5954E+04 5.2644E+02 0.0000E+00 5.2644E+02 5.3847E+04 1.4554E+03 0.0000E+00 1.4554E+03 0 0
180.- 200. 1.0818E+04 2.3157E+02 0.0000E+00 2.3157E+02 2.2497E+04 6.3419E+02 0.0000E+00 6.3419E+02 0 0
200.- 220. 4.4681E+03 1.0671E+02 0.0000E+00 1.0671E+02 9.2002E+03 2.5599E+02 0.0000E+00 2.5599E+02 0 0
220.- 240. 1.4529E+03 4.0252E+01 0.0000E+00 4.0252E+01 3.1865E+03 8.5925E+01 0.0000E+00 8.5925E+01 0 0
240.- 260. 6.3302E+02 1.8790E+01 0.0000E+00 1.8790E+01 1.1390E+03 3.9322E+01 0.0000E+00 3.9322E+01 0 0
260.- 280. 9.4896E+01 3.4210E+00 0.0000E+00 3.4210E+00 2.0623E+02 1.0987E+01 0.0000E+00 1.0987E+01 0 0
280.- 300. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.6232E+06 1.9642E+04 0.0000E+00 1.9642E+04 3.2611E+06 4.4789E+04 1.6395E+02 4.4625E+04 0 5
1.6268E+06 1.9246E+04 0.0000E+00 1.9246E+04 3.2671E+06 4.4228E+04 0.0000E+00 4.4228E+04 0 0
DAMAGE IN LAYER 1 : 6.4431E+04
DAMAGE IN LAYER 1 : 6.3474E+04
DAMAGE IN LAYER 2 : 0.0000E+00
1
@@ -207,18 +209,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.0480E-01 ENERGY REFL.COEF.= 2.6688E-02 REL.MEAN ENERGY = 2.5466E-01 MEAN ENERGY = 2.5466E+02
PART.REFL.COEF.= 9.5000E-02 ENERGY REFL.COEF.= 2.3979E-02 REL.MEAN ENERGY = 2.5241E-01 MEAN ENERGY = 2.5241E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.5466E+02 6.3484E+04 1.8273E+00 7.3315E+00 2.5196E+02 1.1007E+01 6.9784E+03 1.8820E-01
PATHLENGTH 9.4975E+01 3.7083E+03 5.0645E-01 2.7761E+00 6.0896E+01 2.6602E+00 2.1589E+02 7.6825E-02
ELASTIC LOSS 1.1373E+01 5.3378E+01 7.3060E+00 1.3943E-02
INEL. LOSS 5.1633E+02 1.4105E+05 3.7556E+02 7.1672E-01
ENERGY 2.5241E+02 6.5796E+04 1.7889E+00 6.4771E+00 2.5651E+02 1.1769E+01 7.0653E+03 1.5328E-01
PATHLENGTH 1.0344E+02 4.0892E+03 3.3502E-01 2.2601E+00 6.3947E+01 2.9341E+00 2.1062E+02 7.3053E-02
ELASTIC LOSS 1.2020E+01 5.3044E+01 7.2831E+00 1.5333E-02
INEL. LOSS 5.7652E+02 1.5914E+05 3.9892E+02 8.3983E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.5466E+02 1.2833E+05 9.4244E+07 8.8229E+10 9.7151E+13 1.1923E+17
LOGENERGY 2.1534E+00 4.9494E+00 1.1818E+01 2.9048E+01 7.3078E+01 1.8744E+02
PATHLENGTH 9.4975E+01 1.2729E+04 2.0276E+06 3.6369E+08 7.1259E+10 1.4934E+13
ENERGY 2.5241E+02 1.2951E+05 9.6098E+07 8.7736E+10 9.1009E+13 1.0283E+17
LOGENERGY 2.1477E+00 4.9194E+00 1.1714E+01 2.8732E+01 7.2197E+01 1.8518E+02
PATHLENGTH 1.0344E+02 1.4789E+04 2.4634E+06 4.5105E+08 8.8335E+10 1.8215E+13
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -226,5 +228,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 4 6 8 8 19 14 26 15 29 36 35 60 49 37 57 55 66
0.000 0.000 0.000 0.153 0.229 0.305 0.305 0.725 0.534 0.992 0.573 1.107 1.374 1.336 2.290 1.870 1.412 2.176 2.099 2.519
0 0 2 5 6 8 7 16 16 27 32 27 37 34 35 42 39 41 41 60
0.000 0.000 0.084 0.211 0.253 0.337 0.295 0.674 0.674 1.137 1.347 1.137 1.558 1.432 1.474 1.768 1.642 1.726 1.726 2.526
tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.rge
+14 -13
View File
@@ -1,18 +1,18 @@
DEPTH PARTICLES
10.0000 233
30.0000 422
50.0000 589
70.0000 614
90.0000 637
110.0000 593
130.0000 491
150.0000 406
170.0000 230
190.0000 143
210.0000 71
10.0000 229
30.0000 469
50.0000 568
70.0000 601
90.0000 604
110.0000 610
130.0000 529
150.0000 364
170.0000 281
190.0000 145
210.0000 77
230.0000 32
250.0000 12
270.0000 3
250.0000 8
270.0000 8
290.0000 0
310.0000 0
330.0000 0
@@ -21,3 +21,4 @@
390.0000 0
410.0000 0
430.0000 0
450.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
1.00 0.45 0.00 15.00 5000 4476 524 0 5056 56 0.9535E+02 0.5031E+02 0.2547E+03 0.2520E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4476 0
1.00 0.45 0.00 15.00 5000 4525 475 0 5076 76 0.9589E+02 0.5099E+02 0.2524E+03 0.2565E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4525 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.out
+120 -118
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:56
Start: 19.Jun. 2026 18:18:14
End: 18.Jun. 2026 09:55:59
End: 19.Jun. 2026 18:18:15
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
32125 0 0 0 0 0 0 0 0
32088 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4979 ENERGY=0.5477E+08 EV
BACKSCATTERED PARTICLES= 21 ENERGY=0.6767E+05 EV
IMPLANTED PARTICLES= 4978 ENERGY=0.5476E+08 EV
BACKSCATTERED PARTICLES= 22 ENERGY=0.7735E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,153 +122,154 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 569 569
IMPLANTED PARTICLES (LAYER 1)= 567 567
IMPLANTED PARTICLES (LAYER 2)= 4410 4410
IMPLANTED PARTICLES (LAYER 2)= 4411 4411
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 406.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.059
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.231
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 406.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.267
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 6.8512E+02 2.1290E+04 -1.1341E+00 4.5827E+00 1.4591E+02 2.0678E+00 5.7110E+02 3.8773E-02
SPREAD 2.8371E+02 2.0041E+04 4.2543E-01 2.7133E+00 1.4157E+02 2.0063E+00 3.7176E+02 2.7072E-02
PATHLENGTH 9.9888E+02 1.3636E+03 -1.2931E-01 3.1602E+00 3.6927E+01 5.2332E-01 2.8402E+01 3.5465E-02
ELASTIC LOSS 2.6485E+01 3.0767E+02 1.7540E+01 3.5229E-03
INEL. LOSS 1.0971E+04 2.0284E+05 4.5038E+02 9.0455E-02
PENETRATION 6.8228E+02 2.1436E+04 -1.1348E+00 4.7066E+00 1.4641E+02 2.0751E+00 5.8494E+02 4.2991E-02
SPREAD 2.8131E+02 1.9684E+04 4.5144E-01 2.7960E+00 1.4030E+02 1.9885E+00 3.7388E+02 2.8399E-02
PATHLENGTH 9.9834E+02 1.3681E+03 -1.3862E-01 3.2983E+00 3.6987E+01 5.2423E-01 2.9395E+01 4.0065E-02
ELASTIC LOSS 2.7010E+01 3.2354E+02 1.7987E+01 3.6133E-03
INEL. LOSS 1.0965E+04 2.0609E+05 4.5397E+02 9.1196E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.5644E-02 8.2880E-01 8.5845E+01 1.4661E+04 9.1038E-01 6.3827E-04 7.0356E-02 1.1727E+01
WEAK EL.LOSS 5.6003E-04 3.9803E-06 7.0538E+00 7.1279E+01 1.9951E-03 1.3988E-06 2.3395E-08 2.7425E-02
INELAST.LOSS 2.6928E+01 1.1817E+02 -1.0274E+00 2.7261E+00 1.0871E+01 7.6214E-03 1.0885E-01 1.4008E-03
SUBTHR.LOSS 5.7860E-02 2.6891E-01 2.6704E+01 9.7963E+02 5.1856E-01 3.6359E-04 5.8982E-03 2.5947E-01
ELAST.LOSS 6.6924E-02 8.4994E-01 7.2533E+01 8.8044E+03 9.2192E-01 6.4656E-04 5.5928E-02 4.9066E+00
WEAK EL.LOSS 5.6077E-04 3.9800E-06 7.0678E+00 7.1762E+01 1.9950E-03 1.3991E-06 2.3480E-08 2.7610E-02
INELAST.LOSS 2.6924E+01 1.1819E+02 -1.0264E+00 2.7237E+00 1.0872E+01 7.6244E-03 1.0883E-01 1.4007E-03
SUBTHR.LOSS 5.9085E-02 2.8722E-01 2.6585E+01 9.6326E+02 5.3593E-01 3.7588E-04 6.2489E-03 2.4891E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 6.8512E+02 4.9068E+05 3.6183E+08 2.7271E+11 2.0919E+14 1.6284E+17
PENETRATION 6.8228E+02 4.8695E+05 3.5793E+08 2.6902E+11 2.0586E+14 1.5992E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.6089E+06 1.8582E+03 1.8566E+03 7.8167E+02 1.0750E+03 5.4924E+02 9
20.- 40. 0 0.0000E+00 0 1.6205E+06 1.4115E+03 1.4099E+03 3.2317E+02 1.0867E+03 2.3992E+02 4
40.- 60. 0 0.0000E+00 0 1.6332E+06 1.4822E+03 1.4805E+03 3.3405E+02 1.1465E+03 2.4372E+02 5
60.- 80. 3 0.6025E-03 0 1.6454E+06 1.4410E+03 1.4379E+03 2.7192E+02 1.1660E+03 2.0756E+02 6
80.- 100. 7 0.1406E-02 0 1.6598E+06 1.6586E+03 1.6543E+03 4.8024E+02 1.1740E+03 3.4394E+02 7
100.- 120. 5 0.1004E-02 0 1.6658E+06 2.0662E+03 2.0614E+03 5.9601E+02 1.4653E+03 4.2796E+02 8
120.- 140. 9 0.1808E-02 0 1.6874E+06 2.2278E+03 2.2213E+03 8.6286E+02 1.3585E+03 6.2651E+02 13
140.- 160. 3 0.6025E-03 0 1.6860E+06 1.5842E+03 1.5804E+03 2.5445E+02 1.3259E+03 1.9151E+02 5
160.- 180. 10 0.2008E-02 0 1.6942E+06 2.4466E+03 2.4398E+03 8.2609E+02 1.6138E+03 6.1232E+02 14
180.- 200. 15 0.3013E-02 0 1.7144E+06 2.4216E+03 2.4127E+03 7.2855E+02 1.6842E+03 5.4864E+02 13
200.- 220. 6 0.1205E-02 0 1.7171E+06 2.0944E+03 2.0882E+03 4.3704E+02 1.6512E+03 3.2829E+02 8
220.- 240. 7 0.1406E-02 0 1.7102E+06 2.7769E+03 2.7705E+03 8.4522E+02 1.9253E+03 6.2737E+02 13
240.- 260. 18 0.3615E-02 0 1.7207E+06 2.2555E+03 2.2449E+03 6.2276E+02 1.6222E+03 4.6331E+02 11
260.- 280. 13 0.2611E-02 0 1.7159E+06 2.5284E+03 2.5185E+03 6.4935E+02 1.8691E+03 4.7682E+02 10
280.- 300. 18 0.3615E-02 0 1.6983E+06 2.5666E+03 2.5530E+03 3.8956E+02 2.1635E+03 2.9752E+02 10
300.- 320. 19 0.3816E-02 0 1.7071E+06 2.5703E+03 2.5590E+03 5.0109E+02 2.0579E+03 3.8043E+02 12
320.- 340. 17 0.3414E-02 0 1.6949E+06 3.0579E+03 3.0459E+03 5.5009E+02 2.4958E+03 4.0919E+02 10
340.- 360. 24 0.4820E-02 0 1.6908E+06 3.3606E+03 3.3442E+03 5.9759E+02 2.7467E+03 4.4478E+02 11
360.- 380. 24 0.4820E-02 0 1.6683E+06 3.5042E+03 3.4874E+03 9.2097E+02 2.5664E+03 6.8603E+02 17
380.- 400. 43 0.8636E-02 0 1.6596E+06 3.7261E+03 3.7022E+03 6.4047E+02 3.0617E+03 4.8511E+02 14
400.- 420. 53 0.1064E-01 0 1.6354E+06 4.0302E+03 3.9983E+03 5.7348E+02 3.4248E+03 4.2347E+02 10
420.- 440. 53 0.1064E-01 0 1.6135E+06 4.2314E+03 4.2017E+03 7.1292E+02 3.4888E+03 5.3706E+02 16
440.- 460. 50 0.1004E-01 0 1.5865E+06 4.5325E+03 4.4991E+03 8.0780E+02 3.6913E+03 6.0130E+02 16
460.- 480. 77 0.1546E-01 0 1.5537E+06 4.6726E+03 4.6286E+03 5.6335E+02 4.0653E+03 4.2246E+02 12
480.- 500. 95 0.1908E-01 0 1.5173E+06 5.1659E+03 5.1146E+03 7.8372E+02 4.3309E+03 5.8792E+02 17
500.- 520. 87 0.1747E-01 0 1.3303E+06 3.4676E+03 3.4497E+03 1.3903E+02 3.3106E+03 1.0757E+02 4
520.- 540. 84 0.1687E-01 0 1.2688E+06 3.5874E+03 3.5698E+03 1.9198E+02 3.3778E+03 1.4781E+02 5
540.- 560. 104 0.2089E-01 0 1.2235E+06 3.5249E+03 3.5043E+03 1.0215E+02 3.4022E+03 7.9107E+01 3
560.- 580. 126 0.2531E-01 0 1.1790E+06 4.0475E+03 4.0235E+03 1.6012E+02 3.8634E+03 1.2432E+02 5
580.- 600. 151 0.3033E-01 0 1.1276E+06 4.0369E+03 4.0085E+03 9.9279E+01 3.9092E+03 7.6968E+01 3
600.- 620. 192 0.3856E-01 0 1.0660E+06 4.4350E+03 4.3999E+03 3.5459E+01 4.3644E+03 2.7413E+01 1
620.- 640. 181 0.3635E-01 0 9.8356E+05 4.6058E+03 4.5698E+03 6.9615E+01 4.5002E+03 5.3856E+01 2
640.- 660. 244 0.4901E-01 0 9.0798E+05 4.5794E+03 4.5364E+03 0.0000E+00 4.5364E+03 0.0000E+00 0
660.- 680. 287 0.5764E-01 0 8.2603E+05 4.4723E+03 4.4216E+03 0.0000E+00 4.4216E+03 0.0000E+00 0
680.- 700. 287 0.5764E-01 0 7.3810E+05 4.8628E+03 4.8107E+03 0.0000E+00 4.8107E+03 0.0000E+00 0
700.- 720. 285 0.5724E-01 0 6.2550E+05 4.3740E+03 4.3204E+03 0.0000E+00 4.3204E+03 0.0000E+00 0
720.- 740. 311 0.6246E-01 0 5.1681E+05 3.8283E+03 3.7726E+03 0.0000E+00 3.7726E+03 0.0000E+00 0
740.- 760. 325 0.6527E-01 0 4.2831E+05 3.5080E+03 3.4517E+03 0.0000E+00 3.4517E+03 0.0000E+00 0
760.- 780. 331 0.6648E-01 0 3.4135E+05 3.1012E+03 3.0431E+03 0.0000E+00 3.0431E+03 0.0000E+00 0
780.- 800. 341 0.6849E-01 0 2.6328E+05 2.6997E+03 2.6427E+03 0.0000E+00 2.6427E+03 0.0000E+00 0
800.- 820. 286 0.5744E-01 0 1.8621E+05 2.1544E+03 2.1050E+03 0.0000E+00 2.1050E+03 0.0000E+00 0
820.- 840. 275 0.5523E-01 0 1.2295E+05 1.5782E+03 1.5349E+03 0.0000E+00 1.5349E+03 0.0000E+00 0
840.- 860. 196 0.3937E-01 0 7.4086E+04 1.0396E+03 1.0071E+03 0.0000E+00 1.0071E+03 0.0000E+00 0
860.- 880. 163 0.3274E-01 4 3.8313E+04 6.1205E+02 5.8800E+02 0.0000E+00 5.8800E+02 0.0000E+00 0
880.- 900. 91 0.1828E-01 31 1.7855E+04 3.0118E+02 2.8709E+02 0.0000E+00 2.8709E+02 0.0000E+00 0
900.- 920. 31 0.6226E-02 72 6.5349E+03 1.0835E+02 1.0363E+02 0.0000E+00 1.0363E+02 0.0000E+00 0
920.- 940. 18 0.3615E-02 183 3.0430E+03 5.0697E+01 4.8078E+01 0.0000E+00 4.8078E+01 0.0000E+00 0
940.- 960. 5 0.1004E-02 419 1.3894E+03 1.9508E+01 1.8556E+01 0.0000E+00 1.8556E+01 0.0000E+00 0
960.- 980. 7 0.1406E-02 747 8.5421E+02 1.7143E+01 1.6206E+01 0.0000E+00 1.6206E+01 0.0000E+00 0
980.- 1000. 1 0.2008E-03 1066 7.5694E+01 1.8754E+00 1.7300E+00 0.0000E+00 1.7300E+00 0.0000E+00 0
1000.- 1020. 1 0.2008E-03 1069 5.6335E+00 2.0560E-01 1.4427E-01 0.0000E+00 1.4427E-01 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 739 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 420 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 172 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 42 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 12 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 3 0.6027E-03 0 1.6117E+06 1.5269E+03 1.5236E+03 3.5349E+02 1.1701E+03 2.5759E+02 5
20.- 40. 1 0.2009E-03 0 1.6234E+06 1.7533E+03 1.7511E+03 6.3698E+02 1.1142E+03 4.7766E+02 11
40.- 60. 3 0.6027E-03 0 1.6392E+06 1.7955E+03 1.7925E+03 7.4327E+02 1.0492E+03 5.3633E+02 10
60.- 80. 1 0.2009E-03 0 1.6400E+06 1.4999E+03 1.4975E+03 1.1428E+02 1.3832E+03 8.7487E+01 2
80.- 100. 6 0.1205E-02 0 1.6560E+06 2.4391E+03 2.4348E+03 1.0324E+03 1.4024E+03 7.6098E+02 15
100.- 120. 8 0.1607E-02 0 1.6678E+06 2.1768E+03 2.1716E+03 8.4712E+02 1.3245E+03 6.1633E+02 12
120.- 140. 6 0.1205E-02 0 1.6752E+06 1.8471E+03 1.8418E+03 4.3693E+02 1.4049E+03 3.2015E+02 7
140.- 160. 6 0.1205E-02 0 1.6894E+06 1.9725E+03 1.9675E+03 3.6994E+02 1.5976E+03 2.8461E+02 8
160.- 180. 7 0.1406E-02 0 1.7024E+06 2.5759E+03 2.5707E+03 9.5377E+02 1.6169E+03 6.9232E+02 14
180.- 200. 8 0.1607E-02 0 1.6986E+06 2.2648E+03 2.2588E+03 5.2899E+02 1.7298E+03 3.8773E+02 8
200.- 220. 11 0.2210E-02 0 1.6993E+06 2.5764E+03 2.5683E+03 7.1072E+02 1.8576E+03 5.2982E+02 12
220.- 240. 9 0.1808E-02 0 1.7111E+06 1.9976E+03 1.9896E+03 1.1292E+02 1.8767E+03 8.5968E+01 3
240.- 260. 16 0.3214E-02 0 1.7205E+06 2.7002E+03 2.6907E+03 7.2057E+02 1.9701E+03 5.2840E+02 10
260.- 280. 4 0.8035E-03 0 1.7190E+06 2.7101E+03 2.7039E+03 6.5898E+02 2.0450E+03 4.8551E+02 11
280.- 300. 15 0.3013E-02 0 1.7151E+06 2.3039E+03 2.2931E+03 4.7273E+02 1.8204E+03 3.6026E+02 10
300.- 320. 14 0.2812E-02 0 1.7019E+06 2.7830E+03 2.7734E+03 5.6587E+02 2.2075E+03 4.1138E+02 9
320.- 340. 19 0.3817E-02 0 1.6893E+06 2.9650E+03 2.9513E+03 7.4079E+02 2.2105E+03 5.4344E+02 13
340.- 360. 31 0.6227E-02 0 1.6799E+06 3.3752E+03 3.3582E+03 9.4946E+02 2.4088E+03 7.0249E+02 16
360.- 380. 39 0.7834E-02 0 1.6663E+06 3.0778E+03 3.0539E+03 4.1138E+02 2.6425E+03 3.0703E+02 8
380.- 400. 50 0.1004E-01 0 1.6643E+06 4.2402E+03 4.2124E+03 9.5857E+02 3.2538E+03 7.1516E+02 17
400.- 420. 40 0.8035E-02 0 1.6410E+06 3.7912E+03 3.7639E+03 5.8868E+02 3.1752E+03 4.4071E+02 11
420.- 440. 62 0.1245E-01 0 1.6259E+06 4.3531E+03 4.3196E+03 9.7652E+02 3.3431E+03 7.2737E+02 19
440.- 460. 65 0.1306E-01 0 1.5875E+06 4.3736E+03 4.3367E+03 3.0528E+02 4.0314E+03 2.2886E+02 7
460.- 480. 72 0.1446E-01 0 1.5516E+06 4.6988E+03 4.6563E+03 4.2920E+02 4.2270E+03 3.2299E+02 9
480.- 500. 71 0.1426E-01 0 1.5382E+06 5.0820E+03 5.0376E+03 4.2165E+02 4.6159E+03 3.1767E+02 10
500.- 520. 85 0.1708E-01 0 1.3237E+06 3.8108E+03 3.7932E+03 2.6763E+02 3.5255E+03 2.0771E+02 8
520.- 540. 90 0.1808E-01 0 1.2788E+06 3.6653E+03 3.6467E+03 3.4724E+01 3.6120E+03 2.6869E+01 1
540.- 560. 122 0.2451E-01 0 1.2374E+06 3.9735E+03 3.9508E+03 2.4693E+02 3.7039E+03 1.9090E+02 7
560.- 580. 153 0.3074E-01 0 1.1891E+06 4.3430E+03 4.3155E+03 1.0713E+02 4.2084E+03 8.2795E+01 3
580.- 600. 148 0.2973E-01 0 1.1233E+06 4.6301E+03 4.6006E+03 2.5672E+02 4.3439E+03 1.9815E+02 7
600.- 620. 177 0.3556E-01 0 1.0412E+06 4.4444E+03 4.4120E+03 0.0000E+00 4.4120E+03 0.0000E+00 0
620.- 640. 191 0.3837E-01 0 9.7334E+05 4.3756E+03 4.3392E+03 0.0000E+00 4.3392E+03 0.0000E+00 0
640.- 660. 232 0.4661E-01 0 8.9845E+05 4.4859E+03 4.4433E+03 0.0000E+00 4.4433E+03 0.0000E+00 0
660.- 680. 266 0.5344E-01 0 8.1217E+05 4.7399E+03 4.6911E+03 0.0000E+00 4.6911E+03 0.0000E+00 0
680.- 700. 305 0.6127E-01 0 7.2037E+05 4.1862E+03 4.1322E+03 0.0000E+00 4.1322E+03 0.0000E+00 0
700.- 720. 314 0.6308E-01 0 6.3820E+05 4.3443E+03 4.2875E+03 0.0000E+00 4.2875E+03 0.0000E+00 0
720.- 740. 336 0.6750E-01 0 5.5185E+05 4.4301E+03 4.3695E+03 0.0000E+00 4.3695E+03 0.0000E+00 0
740.- 760. 345 0.6930E-01 0 4.2232E+05 3.6284E+03 3.5687E+03 0.0000E+00 3.5687E+03 0.0000E+00 0
760.- 780. 324 0.6509E-01 0 3.2754E+05 3.0565E+03 3.0007E+03 0.0000E+00 3.0007E+03 0.0000E+00 0
780.- 800. 296 0.5946E-01 0 2.4472E+05 2.3996E+03 2.3483E+03 0.0000E+00 2.3483E+03 0.0000E+00 0
800.- 820. 262 0.5263E-01 0 1.7819E+05 2.0613E+03 2.0166E+03 0.0000E+00 2.0166E+03 0.0000E+00 0
820.- 840. 260 0.5223E-01 0 1.1932E+05 1.5404E+03 1.4991E+03 0.0000E+00 1.4991E+03 0.0000E+00 0
840.- 860. 192 0.3857E-01 0 7.1400E+04 1.0054E+03 9.7377E+02 0.0000E+00 9.7377E+02 0.0000E+00 0
860.- 880. 138 0.2772E-01 7 4.0829E+04 6.2100E+02 5.9984E+02 0.0000E+00 5.9984E+02 0.0000E+00 0
880.- 900. 84 0.1687E-01 35 2.0992E+04 3.4233E+02 3.2883E+02 0.0000E+00 3.2883E+02 0.0000E+00 0
900.- 920. 64 0.1286E-01 73 9.2520E+03 1.7731E+02 1.6841E+02 0.0000E+00 1.6841E+02 0.0000E+00 0
920.- 940. 20 0.4018E-02 177 2.4381E+03 4.7071E+01 4.4569E+01 0.0000E+00 4.4569E+01 0.0000E+00 0
940.- 960. 5 0.1004E-02 406 6.2240E+02 1.1654E+01 1.1039E+01 0.0000E+00 1.1039E+01 0.0000E+00 0
960.- 980. 2 0.4018E-03 802 2.7607E+02 7.0769E+00 6.7499E+00 0.0000E+00 6.7499E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 1031 1.4705E+01 8.8550E-01 8.3624E-01 0.0000E+00 8.3624E-01 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 1070 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 763 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 398 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 158 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 46 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- SUT 0 0.0000E+00
1180.- 1200. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- SUT 0 0.0000E+00
4979 1.0000E+00 4979 5.4783E+07 1.3469E+05 1.3355E+05 1.5852E+04 1.1769E+05 1.1779E+04 294
4978 1.0000E+00 4978 5.4740E+07 1.3721E+05 1.3607E+05 1.5954E+04 1.2011E+05 1.1835E+04 283
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3800E+05 5.9262E+02 1.4337E+02 4.4925E+02 1.0709E+06 1.2640E+03 6.3830E+02 6.2572E+02 2 7
20.- 40. 5.3956E+05 7.5459E+02 2.6810E+02 4.8649E+02 1.0809E+06 6.5530E+02 5.5064E+01 6.0023E+02 3 1
40.- 60. 5.4194E+05 5.1827E+02 3.7046E+01 4.8122E+02 1.0912E+06 9.6227E+02 2.9701E+02 6.6526E+02 1 4
60.- 80. 5.3987E+05 6.7658E+02 1.7839E+02 4.9819E+02 1.1055E+06 7.6137E+02 9.3534E+01 6.6784E+02 4 2
80.- 100. 5.5097E+05 5.7917E+02 7.6241E+01 5.0293E+02 1.1088E+06 1.0751E+03 4.0400E+02 6.7110E+02 2 5
100.- 120. 5.5310E+05 7.6818E+02 1.5763E+02 6.1055E+02 1.1127E+06 1.2932E+03 4.3838E+02 8.5479E+02 3 5
120.- 140. 5.6545E+05 8.4889E+02 3.3193E+02 5.1696E+02 1.1220E+06 1.3724E+03 5.3093E+02 8.4150E+02 8 5
140.- 160. 5.6211E+05 7.1255E+02 1.3310E+02 5.7945E+02 1.1239E+06 8.6781E+02 1.2136E+02 7.4645E+02 2 3
160.- 180. 5.6406E+05 9.7877E+02 2.7924E+02 6.9953E+02 1.1301E+06 1.4611E+03 5.4685E+02 9.1423E+02 5 9
180.- 200. 5.7400E+05 1.1889E+03 4.7034E+02 7.1853E+02 1.1404E+06 1.2239E+03 2.5821E+02 9.6565E+02 8 5
200.- 220. 5.7071E+05 9.2697E+02 2.3120E+02 6.9577E+02 1.1464E+06 1.1613E+03 2.0584E+02 9.5543E+02 5 3
220.- 240. 5.6700E+05 1.2190E+03 4.8860E+02 7.3039E+02 1.1432E+06 1.5515E+03 3.5662E+02 1.1949E+03 8 5
240.- 260. 5.7436E+05 8.6266E+02 2.5054E+02 6.1212E+02 1.1463E+06 1.3823E+03 3.7222E+02 1.0101E+03 5 6
260.- 280. 5.6888E+05 9.7887E+02 2.5023E+02 7.2864E+02 1.1470E+06 1.5396E+03 3.9912E+02 1.1405E+03 5 5
280.- 300. 5.7182E+05 1.1585E+03 1.6984E+02 9.8861E+02 1.1265E+06 1.3946E+03 2.1972E+02 1.1749E+03 4 6
300.- 320. 5.7482E+05 9.9274E+02 1.6999E+02 8.2275E+02 1.1323E+06 1.5663E+03 3.3110E+02 1.2352E+03 4 8
320.- 340. 5.6787E+05 1.1410E+03 1.6605E+02 9.7494E+02 1.1271E+06 1.9049E+03 3.8405E+02 1.5209E+03 4 6
340.- 360. 5.6877E+05 1.2468E+03 1.8675E+02 1.0601E+03 1.1220E+06 2.0974E+03 4.1084E+02 1.6866E+03 4 7
360.- 380. 5.5942E+05 1.1718E+03 2.2362E+02 9.4817E+02 1.1089E+06 2.3156E+03 6.9735E+02 1.6182E+03 4 13
380.- 400. 5.5474E+05 1.5962E+03 3.0944E+02 1.2868E+03 1.1049E+06 2.1060E+03 3.3102E+02 1.7749E+03 7 7
400.- 420. 5.4739E+05 1.4360E+03 8.2669E+01 1.3533E+03 1.0880E+06 2.5623E+03 4.9082E+02 2.0715E+03 2 8
420.- 440. 5.3786E+05 1.5569E+03 2.3180E+02 1.3251E+03 1.0756E+06 2.6448E+03 4.8112E+02 2.1637E+03 6 10
440.- 460. 5.3361E+05 1.5100E+03 1.5087E+02 1.3592E+03 1.0529E+06 2.9891E+03 6.5693E+02 2.3322E+03 4 12
460.- 480. 5.1669E+05 1.6442E+03 1.3747E+02 1.5067E+03 1.0370E+06 2.9844E+03 4.2588E+02 2.5586E+03 3 9
480.- 500. 5.0463E+05 1.6581E+03 1.7124E+02 1.4869E+03 1.0073E+06 3.4316E+03 6.1248E+02 2.8191E+03 4 13
500.- 520. 4.5642E+04 9.2562E+01 0.0000E+00 9.2562E+01 8.7817E+04 1.8504E+02 0.0000E+00 1.8504E+02 0 0
0.- 20. 5.3847E+05 5.5993E+02 1.0274E+02 4.5719E+02 1.0733E+06 9.6367E+02 2.5075E+02 7.1292E+02 2 3
20.- 40. 5.3795E+05 8.1611E+02 3.8792E+02 4.2819E+02 1.0855E+06 9.3503E+02 2.4906E+02 6.8596E+02 6 5
40.- 60. 5.4443E+05 6.2174E+02 1.6867E+02 4.5307E+02 1.0948E+06 1.1707E+03 5.7460E+02 5.9614E+02 2 8
60.- 80. 5.4008E+05 5.8319E+02 1.1428E+02 4.6892E+02 1.1000E+06 9.1430E+02 0.0000E+00 9.1430E+02 2 0
80.- 100. 5.4514E+05 1.0984E+03 5.0549E+02 5.9293E+02 1.1109E+06 1.3364E+03 5.2691E+02 8.0950E+02 9 6
100.- 120. 5.5315E+05 8.6471E+02 2.3043E+02 6.3428E+02 1.1146E+06 1.3069E+03 6.1670E+02 6.9021E+02 3 9
120.- 140. 5.5560E+05 7.7451E+02 1.2874E+02 6.4576E+02 1.1196E+06 1.0673E+03 3.0819E+02 7.5909E+02 3 4
140.- 160. 5.5736E+05 9.2775E+02 3.3253E+02 5.9522E+02 1.1321E+06 1.0398E+03 3.7404E+01 1.0024E+03 7 1
160.- 180. 5.6267E+05 1.0185E+03 2.9146E+02 7.2707E+02 1.1397E+06 1.5522E+03 6.6231E+02 8.8988E+02 5 9
180.- 200. 5.6699E+05 7.3216E+02 6.9542E+01 6.6262E+02 1.1317E+06 1.5266E+03 4.5944E+02 1.0672E+03 1 7
200.- 220. 5.7664E+05 1.0715E+03 3.4496E+02 7.2651E+02 1.1227E+06 1.4969E+03 3.6575E+02 1.1311E+03 7 5
220.- 240. 5.7423E+05 8.7925E+02 3.2972E+01 8.4628E+02 1.1369E+06 1.1103E+03 7.9943E+01 1.0304E+03 1 2
240.- 260. 5.7563E+05 9.9721E+02 2.0342E+02 7.9379E+02 1.1449E+06 1.6935E+03 5.1715E+02 1.1763E+03 3 7
260.- 280. 5.7618E+05 8.8255E+02 1.2713E+02 7.5543E+02 1.1428E+06 1.8214E+03 5.3186E+02 1.2895E+03 3 8
280.- 300. 5.7516E+05 1.0675E+03 3.1575E+02 7.5172E+02 1.1399E+06 1.2256E+03 1.5697E+02 1.0687E+03 6 4
300.- 320. 5.7603E+05 9.4511E+02 6.8951E+01 8.7616E+02 1.1259E+06 1.8283E+03 4.9692E+02 1.3313E+03 1 8
320.- 340. 5.6171E+05 9.4702E+02 1.1335E+02 8.3367E+02 1.1276E+06 2.0043E+03 6.2744E+02 1.3768E+03 3 10
340.- 360. 5.6084E+05 1.2159E+03 3.4336E+02 8.7254E+02 1.1190E+06 2.1423E+03 6.0610E+02 1.5362E+03 7 9
360.- 380. 5.5620E+05 1.1651E+03 1.6726E+02 9.9787E+02 1.1101E+06 1.8888E+03 2.4412E+02 1.6447E+03 4 4
380.- 400. 5.5280E+05 1.5405E+03 3.7434E+02 1.1662E+03 1.1115E+06 2.6719E+03 5.8423E+02 2.0877E+03 7 10
400.- 420. 5.4368E+05 1.3369E+03 2.3050E+02 1.1064E+03 1.0973E+06 2.4270E+03 3.5818E+02 2.0688E+03 5 6
420.- 440. 5.4054E+05 1.5764E+03 2.7827E+02 1.2982E+03 1.0854E+06 2.7432E+03 6.9824E+02 2.0450E+03 6 13
440.- 460. 5.3009E+05 1.4965E+03 3.1343E+01 1.4651E+03 1.0574E+06 2.8402E+03 2.7394E+02 2.5663E+03 1 6
460.- 480. 5.2157E+05 1.6672E+03 1.3051E+02 1.5367E+03 1.0300E+06 2.9891E+03 2.9869E+02 2.6904E+03 3 6
480.- 500. 5.1151E+05 1.9177E+03 6.9495E+01 1.8482E+03 1.0214E+06 3.0762E+03 3.5215E+02 2.7240E+03 2 8
500.- 520. 4.5468E+04 1.3754E+02 3.3808E+01 1.0373E+02 8.9299E+04 1.9045E+02 0.0000E+00 1.9045E+02 1 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3893E+07 2.6811E+04 5.2957E+03 2.1515E+04 2.7740E+07 4.2753E+04 9.7587E+03 3.2994E+04 107 164
1.3880E+07 2.6841E+04 5.1972E+03 2.1644E+04 2.7764E+07 4.3962E+04 9.8771E+03 3.4085E+04 100 158
DAMAGE IN LAYER 1 : 6.9311E+04
DAMAGE IN LAYER 1 : 7.0519E+04
DAMAGE IN LAYER 2 : 6.4235E+04
DAMAGE IN LAYER 2 : 6.5549E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.2000E-03 ENERGY REFL.COEF.= 1.2303E-03 REL.MEAN ENERGY = 2.9294E-01 MEAN ENERGY = 3.2223E+03
PART.REFL.COEF.= 4.4000E-03 ENERGY REFL.COEF.= 1.4064E-03 REL.MEAN ENERGY = 3.1965E-01 MEAN ENERGY = 3.5161E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.2223E+03 1.0557E+07 1.0618E+00 2.7055E+00 3.2492E+03 7.0903E+02 3.0087E+06 4.4721E-01
PATHLENGTH 5.4353E+02 6.6570E+04 -6.8109E-01 2.1796E+00 2.5801E+02 5.6303E+01 1.5778E+04 3.8410E-01
ELASTIC LOSS 1.3422E+02 3.8268E+03 6.1861E+01 2.9458E+00
INEL. LOSS 7.5859E+03 1.1258E+07 3.3553E+03 1.5977E+02
ENERGY 3.5161E+03 9.4957E+06 5.1846E-01 1.8866E+00 3.0815E+03 6.5698E+02 1.9062E+06 3.5179E-01
PATHLENGTH 5.1679E+02 6.2168E+04 -1.9602E-01 1.7294E+00 2.4934E+02 5.3159E+01 1.1320E+04 3.2644E-01
ELASTIC LOSS 1.2504E+02 1.9671E+03 4.4352E+01 2.0160E+00
INEL. LOSS 7.1673E+03 9.2335E+06 3.0387E+03 1.3812E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.2223E+03 2.0941E+07 1.7194E+11 1.5366E+15 1.4316E+19 1.3660E+23
LOGENERGY 3.2675E+00 1.0901E+01 3.7099E+01 1.2862E+02 4.5360E+02 1.6244E+03
PATHLENGTH 5.4353E+02 3.6199E+05 2.5742E+08 1.8950E+11 1.4293E+14 1.0999E+17
ENERGY 3.5161E+03 2.1859E+07 1.5880E+11 1.2407E+15 1.0153E+19 8.5816E+22
LOGENERGY 3.2672E+00 1.1011E+01 3.8069E+01 1.3436E+02 4.8208E+02 1.7528E+03
PATHLENGTH 5.1679E+02 3.2924E+05 2.3137E+08 1.7135E+11 1.3094E+14 1.0212E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -275,5 +277,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 2 0 0 0 3 1 0 4 0 0 2 1 1 3 4 0
0.000 0.000 0.000 0.000 1.905 0.000 0.000 0.000 2.857 0.952 0.000 3.810 0.000 0.000 1.905 0.952 0.952 2.857 3.810 0.000
0 0 0 0 0 0 0 1 1 4 0 2 2 1 1 1 6 0 2 1
0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.909 0.909 3.636 0.000 1.818 1.818 0.909 0.909 0.909 5.455 0.000 1.818 0.909
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.rge
+51 -50
View File
@@ -1,55 +1,55 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 0
70.0000 3
90.0000 7
110.0000 5
130.0000 9
150.0000 3
170.0000 10
190.0000 15
210.0000 6
230.0000 7
250.0000 18
270.0000 13
290.0000 18
310.0000 19
330.0000 17
350.0000 24
370.0000 24
390.0000 43
410.0000 53
430.0000 53
450.0000 50
470.0000 77
490.0000 95
510.0000 87
530.0000 84
550.0000 104
570.0000 126
590.0000 151
610.0000 192
630.0000 181
650.0000 244
670.0000 287
690.0000 287
710.0000 285
730.0000 311
750.0000 325
770.0000 331
790.0000 341
810.0000 286
830.0000 275
850.0000 196
870.0000 163
890.0000 91
910.0000 31
930.0000 18
10.0000 3
30.0000 1
50.0000 3
70.0000 1
90.0000 6
110.0000 8
130.0000 6
150.0000 6
170.0000 7
190.0000 8
210.0000 11
230.0000 9
250.0000 16
270.0000 4
290.0000 15
310.0000 14
330.0000 19
350.0000 31
370.0000 39
390.0000 50
410.0000 40
430.0000 62
450.0000 65
470.0000 72
490.0000 71
510.0000 85
530.0000 90
550.0000 122
570.0000 153
590.0000 148
610.0000 177
630.0000 191
650.0000 232
670.0000 266
690.0000 305
710.0000 314
730.0000 336
750.0000 345
770.0000 324
790.0000 296
810.0000 262
830.0000 260
850.0000 192
870.0000 138
890.0000 84
910.0000 64
930.0000 20
950.0000 5
970.0000 7
990.0000 1
1010.0000 1
970.0000 2
990.0000 0
1010.0000 0
1030.0000 0
1050.0000 0
1070.0000 0
@@ -58,3 +58,4 @@
1130.0000 0
1150.0000 0
1170.0000 0
1190.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
11.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.6851E+03 0.1459E+03 0.3222E+04 0.3249E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 569 4410
11.00 0.45 0.00 15.00 5000 4978 22 0 5000 0 0.6823E+03 0.1464E+03 0.3516E+04 0.3082E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 567 4411
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.out
+128 -126
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:57
Start: 19.Jun. 2026 18:18:14
End: 18.Jun. 2026 09:55:59
End: 19.Jun. 2026 18:18:15
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
36494 0 0 0 0 0 0 0 0
36397 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4984 ENERGY=0.6479E+08 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.7402E+05 EV
IMPLANTED PARTICLES= 4975 ENERGY=0.6468E+08 EV
BACKSCATTERED PARTICLES= 25 ENERGY=0.1278E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,161 +122,162 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 253 253
IMPLANTED PARTICLES (LAYER 1)= 282 282
IMPLANTED PARTICLES (LAYER 2)= 4731 4731
IMPLANTED PARTICLES (LAYER 2)= 4693 4693
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 462.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.064
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.275
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 461.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.064
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.276
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 8.1652E+02 2.6798E+04 -1.3682E+00 5.6412E+00 1.6370E+02 2.3188E+00 8.1776E+02 4.9296E-02
SPREAD 3.2531E+02 2.7511E+04 4.8053E-01 2.7823E+00 1.6586E+02 2.3494E+00 5.2024E+02 2.6351E-02
PATHLENGTH 1.1524E+03 1.4971E+03 -1.9638E-01 3.3101E+00 3.8692E+01 5.4806E-01 3.2230E+01 3.9826E-02
ELASTIC LOSS 2.7770E+01 3.9629E+02 1.9907E+01 3.9942E-03
INEL. LOSS 1.2980E+04 2.0237E+05 4.4986E+02 9.0261E-02
PENETRATION 8.1209E+02 2.6631E+04 -1.1956E+00 4.8366E+00 1.6319E+02 2.3137E+00 7.3955E+02 4.2448E-02
SPREAD 3.2496E+02 2.7107E+04 4.5005E-01 2.6691E+00 1.6464E+02 2.3342E+00 4.9651E+02 2.4893E-02
PATHLENGTH 1.1517E+03 1.4640E+03 -1.1981E-01 3.1918E+00 3.8263E+01 5.4247E-01 3.0729E+01 3.9689E-02
ELASTIC LOSS 2.7692E+01 3.7626E+02 1.9397E+01 3.8990E-03
INEL. LOSS 1.2971E+04 2.0307E+05 4.5063E+02 9.0579E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.0455E-02 8.9861E-01 9.2137E+01 1.4409E+04 9.4795E-01 6.2359E-04 7.0956E-02 6.6680E+00
WEAK EL.LOSS 4.4407E-04 2.7233E-06 7.0329E+00 7.2745E+01 1.6502E-03 1.0856E-06 1.5174E-08 3.4953E-02
INELAST.LOSS 2.8051E+01 1.1153E+02 -1.2348E+00 3.1873E+00 1.0561E+01 6.9471E-03 1.0850E-01 1.4704E-03
SUBTHR.LOSS 5.2386E-02 2.5191E-01 2.8282E+01 1.0940E+03 5.0191E-01 3.3019E-04 5.4789E-03 2.6830E-01
ELAST.LOSS 6.0979E-02 1.0129E+00 1.0423E+02 1.8522E+04 1.0065E+00 6.6258E-04 9.0753E-02 9.5845E+00
WEAK EL.LOSS 4.4657E-04 2.7812E-06 7.1441E+00 7.5489E+01 1.6677E-03 1.0979E-06 1.5802E-08 3.5852E-02
INELAST.LOSS 2.8053E+01 1.1150E+02 -1.2353E+00 3.1884E+00 1.0559E+01 6.9515E-03 1.0859E-01 1.4718E-03
SUBTHR.LOSS 5.2506E-02 2.5303E-01 2.8226E+01 1.0873E+03 5.0302E-01 3.3118E-04 5.4907E-03 2.6342E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 8.1652E+02 6.9350E+05 6.0402E+08 5.3614E+11 4.8322E+14 4.4116E+17
PENETRATION 8.1209E+02 6.8612E+05 5.9525E+08 5.2686E+11 4.7391E+14 4.3212E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2006E-03 0 1.5711E+06 1.0977E+03 1.0960E+03 2.5577E+02 8.4024E+02 1.8988E+02 4
20.- 40. 3 0.6019E-03 0 1.5852E+06 1.2886E+03 1.2860E+03 2.9672E+02 9.8927E+02 2.1745E+02 5
40.- 60. 3 0.6019E-03 0 1.5977E+06 1.8228E+03 1.8192E+03 5.2634E+02 1.2928E+03 3.9484E+02 9
60.- 80. 3 0.6019E-03 0 1.6072E+06 1.7986E+03 1.7964E+03 7.1022E+02 1.0862E+03 5.0400E+02 8
80.- 100. 5 0.1003E-02 0 1.6172E+06 1.5017E+03 1.4980E+03 3.6629E+02 1.1317E+03 2.7653E+02 7
100.- 120. 3 0.6019E-03 0 1.6390E+06 1.4416E+03 1.4385E+03 3.3789E+02 1.1006E+03 2.5194E+02 7
120.- 140. 3 0.6019E-03 0 1.6445E+06 1.8497E+03 1.8467E+03 6.5379E+02 1.1929E+03 4.6047E+02 6
140.- 160. 6 0.1204E-02 0 1.6517E+06 1.5020E+03 1.4976E+03 3.0816E+02 1.1895E+03 2.3334E+02 6
160.- 180. 4 0.8026E-03 0 1.6832E+06 1.8772E+03 1.8736E+03 5.2457E+02 1.3490E+03 3.8035E+02 6
180.- 200. 4 0.8026E-03 0 1.6898E+06 1.9197E+03 1.9158E+03 5.7618E+02 1.3396E+03 4.3051E+02 10
200.- 220. 7 0.1404E-02 0 1.6947E+06 2.2675E+03 2.2620E+03 1.0223E+03 1.2397E+03 7.2857E+02 11
220.- 240. 4 0.8026E-03 0 1.7009E+06 2.0613E+03 2.0570E+03 7.1498E+02 1.3420E+03 4.9709E+02 6
240.- 260. 10 0.2006E-02 0 1.7034E+06 1.9964E+03 1.9905E+03 5.0874E+02 1.4817E+03 3.7821E+02 9
260.- 280. 6 0.1204E-02 0 1.7178E+06 1.7645E+03 1.7589E+03 2.9086E+02 1.4680E+03 2.2156E+02 7
280.- 300. 5 0.1003E-02 0 1.7210E+06 2.6693E+03 2.6641E+03 9.7218E+02 1.6919E+03 7.2878E+02 18
300.- 320. 7 0.1404E-02 0 1.7313E+06 2.3126E+03 2.3065E+03 6.2690E+02 1.6796E+03 4.6661E+02 11
320.- 340. 17 0.3411E-02 0 1.7272E+06 2.7338E+03 2.7233E+03 8.1645E+02 1.9068E+03 5.9566E+02 12
340.- 360. 15 0.3010E-02 0 1.7168E+06 2.5811E+03 2.5717E+03 6.8028E+02 1.8915E+03 4.9156E+02 10
360.- 380. 11 0.2207E-02 0 1.7116E+06 2.5828E+03 2.5744E+03 8.0552E+02 1.7689E+03 5.8963E+02 11
380.- 400. 15 0.3010E-02 0 1.7164E+06 2.7833E+03 2.7733E+03 6.6944E+02 2.1038E+03 4.9511E+02 11
400.- 420. 11 0.2207E-02 0 1.7068E+06 2.6900E+03 2.6793E+03 7.9094E+02 1.8884E+03 5.6913E+02 9
420.- 440. 23 0.4615E-02 0 1.7044E+06 2.8154E+03 2.8021E+03 4.3529E+02 2.3668E+03 3.2806E+02 9
440.- 460. 24 0.4815E-02 0 1.7097E+06 3.2470E+03 3.2316E+03 7.1044E+02 2.5212E+03 5.2762E+02 13
460.- 480. 31 0.6220E-02 0 1.7180E+06 3.3533E+03 3.3326E+03 6.1883E+02 2.7138E+03 4.6582E+02 13
480.- 500. 32 0.6421E-02 0 1.6912E+06 3.7421E+03 3.7225E+03 8.5733E+02 2.8652E+03 6.2676E+02 15
500.- 520. 34 0.6822E-02 0 1.4634E+06 2.6168E+03 2.6093E+03 4.5324E+02 2.1560E+03 3.4642E+02 10
520.- 540. 34 0.6822E-02 0 1.4439E+06 2.7328E+03 2.7260E+03 5.8426E+02 2.1418E+03 4.4775E+02 14
540.- 560. 38 0.7624E-02 0 1.4328E+06 3.0590E+03 3.0498E+03 4.0231E+02 2.6475E+03 3.0740E+02 9
560.- 580. 66 0.1324E-01 0 1.4163E+06 2.9872E+03 2.9759E+03 4.5731E+02 2.5186E+03 3.5052E+02 11
580.- 600. 55 0.1104E-01 0 1.3798E+06 3.2145E+03 3.2027E+03 3.4398E+02 2.8587E+03 2.6491E+02 9
600.- 620. 84 0.1685E-01 0 1.3481E+06 3.0262E+03 3.0112E+03 2.2843E+02 2.7828E+03 1.7445E+02 5
620.- 640. 75 0.1505E-01 0 1.3167E+06 3.3563E+03 3.3404E+03 2.3750E+02 3.1029E+03 1.8254E+02 6
640.- 660. 104 0.2087E-01 0 1.2812E+06 3.7666E+03 3.7475E+03 2.1765E+02 3.5299E+03 1.6804E+02 6
660.- 680. 104 0.2087E-01 0 1.2486E+06 3.6471E+03 3.6272E+03 2.2659E+02 3.4006E+03 1.7450E+02 6
680.- 700. 109 0.2187E-01 0 1.2027E+06 3.6273E+03 3.6050E+03 1.3183E+02 3.4732E+03 1.0222E+02 4
700.- 720. 137 0.2749E-01 0 1.1498E+06 4.0487E+03 4.0227E+03 1.0056E+02 3.9222E+03 7.7915E+01 3
720.- 740. 166 0.3331E-01 0 1.0832E+06 3.7873E+03 3.7570E+03 1.0821E+02 3.6488E+03 8.3520E+01 3
740.- 760. 166 0.3331E-01 0 1.0237E+06 4.2009E+03 4.1701E+03 3.4393E+01 4.1357E+03 2.6625E+01 1
760.- 780. 165 0.3311E-01 0 9.4200E+05 4.0156E+03 3.9847E+03 3.0254E+01 3.9544E+03 2.3547E+01 1
780.- 800. 224 0.4494E-01 0 8.8430E+05 4.3833E+03 4.3417E+03 3.0690E+01 4.3110E+03 2.3872E+01 1
800.- 820. 246 0.4936E-01 0 7.8601E+05 4.2223E+03 4.1792E+03 0.0000E+00 4.1792E+03 0.0000E+00 0
820.- 840. 264 0.5297E-01 0 7.1557E+05 4.2349E+03 4.1860E+03 0.0000E+00 4.1860E+03 0.0000E+00 0
840.- 860. 288 0.5778E-01 0 6.2668E+05 4.0829E+03 4.0293E+03 0.0000E+00 4.0293E+03 0.0000E+00 0
860.- 880. 295 0.5919E-01 0 5.3468E+05 3.9229E+03 3.8699E+03 0.0000E+00 3.8699E+03 0.0000E+00 0
880.- 900. 354 0.7103E-01 0 4.3794E+05 3.4658E+03 3.4082E+03 0.0000E+00 3.4082E+03 0.0000E+00 0
900.- 920. 304 0.6100E-01 0 3.5965E+05 3.3418E+03 3.2863E+03 0.0000E+00 3.2863E+03 0.0000E+00 0
920.- 940. 333 0.6681E-01 0 2.7491E+05 2.7165E+03 2.6600E+03 0.0000E+00 2.6600E+03 0.0000E+00 0
940.- 960. 275 0.5518E-01 0 2.0387E+05 2.3130E+03 2.2645E+03 0.0000E+00 2.2645E+03 0.0000E+00 0
960.- 980. 261 0.5237E-01 0 1.3537E+05 1.6282E+03 1.5863E+03 0.0000E+00 1.5863E+03 0.0000E+00 0
980.- 1000. 204 0.4093E-01 0 8.3514E+04 1.2370E+03 1.2037E+03 0.0000E+00 1.2037E+03 0.0000E+00 0
1000.- 1020. 153 0.3070E-01 6 4.4316E+04 6.5674E+02 6.3314E+02 0.0000E+00 6.3314E+02 0.0000E+00 0
1020.- 1040. 87 0.1746E-01 17 2.4405E+04 3.7195E+02 3.5788E+02 0.0000E+00 3.5788E+02 0.0000E+00 0
1040.- 1060. 48 0.9631E-02 48 1.1307E+04 1.8533E+02 1.7808E+02 0.0000E+00 1.7808E+02 0.0000E+00 0
1060.- 1080. 33 0.6621E-02 117 6.2674E+03 1.0894E+02 1.0397E+02 0.0000E+00 1.0397E+02 0.0000E+00 0
1080.- 1100. 16 0.3210E-02 248 2.5305E+03 5.3699E+01 5.1263E+01 0.0000E+00 5.1263E+01 0.0000E+00 0
1100.- 1120. 7 0.1404E-02 510 6.0072E+02 1.4313E+01 1.3457E+01 0.0000E+00 1.3457E+01 0.0000E+00 0
1120.- 1140. 1 0.2006E-03 845 1.4510E+02 3.1699E+00 2.9979E+00 0.0000E+00 2.9979E+00 0.0000E+00 0
1140.- 1160. 1 0.2006E-03 1034 6.7089E+01 1.8755E+00 1.7282E+00 0.0000E+00 1.7282E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 986 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 0 0.0000E+00 0 1.5706E+06 1.5059E+03 1.5045E+03 5.1537E+02 9.8913E+02 3.7930E+02 8
20.- 40. 2 0.4020E-03 0 1.5798E+06 2.2300E+03 2.2280E+03 1.2705E+03 9.5756E+02 8.9088E+02 12
40.- 60. 1 0.2010E-03 0 1.5962E+06 1.4276E+03 1.4256E+03 3.5543E+02 1.0702E+03 2.6646E+02 6
60.- 80. 0 0.0000E+00 0 1.6102E+06 1.5492E+03 1.5476E+03 6.0784E+02 9.3972E+02 4.4823E+02 9
80.- 100. 1 0.2010E-03 0 1.6133E+06 1.3691E+03 1.3667E+03 4.0809E+02 9.5863E+02 2.9302E+02 6
100.- 120. 3 0.6030E-03 0 1.6244E+06 1.6191E+03 1.6168E+03 4.6639E+02 1.1504E+03 3.5428E+02 10
120.- 140. 5 0.1005E-02 0 1.6451E+06 1.4853E+03 1.4819E+03 4.1303E+02 1.0689E+03 3.0883E+02 6
140.- 160. 1 0.2010E-03 0 1.6646E+06 1.9626E+03 1.9601E+03 7.5930E+02 1.2008E+03 5.5156E+02 11
160.- 180. 2 0.4020E-03 0 1.6706E+06 2.0099E+03 2.0066E+03 6.1984E+02 1.3868E+03 4.3278E+02 7
180.- 200. 8 0.1608E-02 0 1.6772E+06 1.5000E+03 1.4947E+03 3.4464E+02 1.1501E+03 2.6161E+02 7
200.- 220. 8 0.1608E-02 0 1.6887E+06 1.7510E+03 1.7453E+03 4.7211E+02 1.2731E+03 3.5109E+02 5
220.- 240. 5 0.1005E-02 0 1.6912E+06 2.4157E+03 2.4114E+03 1.1311E+03 1.2803E+03 8.2129E+02 14
240.- 260. 7 0.1407E-02 0 1.7041E+06 2.1701E+03 2.1650E+03 6.9264E+02 1.4724E+03 4.8866E+02 8
260.- 280. 9 0.1809E-02 0 1.7255E+06 2.3669E+03 2.3598E+03 8.0975E+02 1.5501E+03 5.9688E+02 12
280.- 300. 6 0.1206E-02 0 1.7163E+06 2.1547E+03 2.1495E+03 6.5049E+02 1.4990E+03 4.7912E+02 10
300.- 320. 7 0.1407E-02 0 1.7325E+06 2.3660E+03 2.3593E+03 6.1774E+02 1.7415E+03 4.6092E+02 10
320.- 340. 16 0.3216E-02 0 1.7125E+06 2.3262E+03 2.3174E+03 6.9349E+02 1.6239E+03 5.1012E+02 10
340.- 360. 16 0.3216E-02 0 1.7339E+06 3.1102E+03 3.1000E+03 1.1135E+03 1.9865E+03 8.1158E+02 17
360.- 380. 14 0.2814E-02 0 1.7264E+06 2.7812E+03 2.7712E+03 7.7788E+02 1.9933E+03 5.6660E+02 12
380.- 400. 13 0.2613E-02 0 1.7423E+06 2.8545E+03 2.8434E+03 8.1931E+02 2.0241E+03 6.0342E+02 13
400.- 420. 29 0.5829E-02 0 1.7308E+06 2.6572E+03 2.6409E+03 5.4260E+02 2.0983E+03 3.9772E+02 9
420.- 440. 27 0.5427E-02 0 1.7164E+06 3.1831E+03 3.1671E+03 6.6519E+02 2.5019E+03 4.9060E+02 12
440.- 460. 26 0.5226E-02 0 1.7053E+06 3.2474E+03 3.2303E+03 7.3395E+02 2.4963E+03 5.3655E+02 12
460.- 480. 34 0.6834E-02 0 1.6824E+06 3.1895E+03 3.1680E+03 5.3099E+02 2.6370E+03 3.9736E+02 11
480.- 500. 42 0.8442E-02 0 1.6684E+06 3.4977E+03 3.4759E+03 7.7010E+02 2.7058E+03 5.7109E+02 13
500.- 520. 31 0.6231E-02 0 1.4512E+06 2.5480E+03 2.5403E+03 3.1277E+02 2.2276E+03 2.3876E+02 7
520.- 540. 47 0.9447E-02 0 1.4466E+06 3.0013E+03 2.9919E+03 4.9601E+02 2.4959E+03 3.8002E+02 12
540.- 560. 50 0.1005E-01 0 1.4397E+06 2.7420E+03 2.7323E+03 8.6642E+01 2.6457E+03 6.6240E+01 2
560.- 580. 51 0.1025E-01 0 1.4050E+06 3.2589E+03 3.2482E+03 5.4552E+02 2.7027E+03 4.1816E+02 13
580.- 600. 61 0.1226E-01 0 1.3775E+06 2.7605E+03 2.7483E+03 7.1514E+01 2.6768E+03 5.5258E+01 2
600.- 620. 65 0.1307E-01 0 1.3433E+06 3.2341E+03 3.2212E+03 3.4740E+02 2.8738E+03 2.6595E+02 8
620.- 640. 71 0.1427E-01 0 1.3215E+06 3.1466E+03 3.1317E+03 1.2024E+02 3.0115E+03 9.2408E+01 3
640.- 660. 99 0.1990E-01 0 1.2833E+06 3.5119E+03 3.4933E+03 3.5020E+02 3.1431E+03 2.6929E+02 9
660.- 680. 114 0.2291E-01 0 1.2529E+06 3.8967E+03 3.8757E+03 1.5024E+02 3.7255E+03 1.1578E+02 4
680.- 700. 121 0.2432E-01 0 1.2219E+06 3.9142E+03 3.8904E+03 1.3390E+02 3.7565E+03 1.0377E+02 4
700.- 720. 136 0.2734E-01 0 1.1505E+06 4.1267E+03 4.1010E+03 1.4057E+02 3.9604E+03 1.0866E+02 4
720.- 740. 161 0.3236E-01 0 1.0879E+06 4.1088E+03 4.0781E+03 0.0000E+00 4.0781E+03 0.0000E+00 0
740.- 760. 198 0.3980E-01 0 1.0290E+06 4.1187E+03 4.0832E+03 3.0174E+01 4.0530E+03 2.3488E+01 1
760.- 780. 179 0.3598E-01 0 9.7113E+05 4.3477E+03 4.3134E+03 0.0000E+00 4.3134E+03 0.0000E+00 0
780.- 800. 223 0.4482E-01 0 8.9158E+05 4.4440E+03 4.4027E+03 0.0000E+00 4.4027E+03 0.0000E+00 0
800.- 820. 264 0.5307E-01 0 8.0182E+05 4.3924E+03 4.3445E+03 0.0000E+00 4.3445E+03 0.0000E+00 0
820.- 840. 289 0.5809E-01 0 7.0740E+05 4.4078E+03 4.3570E+03 0.0000E+00 4.3570E+03 0.0000E+00 0
840.- 860. 280 0.5628E-01 0 6.1775E+05 4.3423E+03 4.2902E+03 0.0000E+00 4.2902E+03 0.0000E+00 0
860.- 880. 289 0.5809E-01 0 5.0811E+05 3.7732E+03 3.7209E+03 0.0000E+00 3.7209E+03 0.0000E+00 0
880.- 900. 316 0.6352E-01 0 4.1657E+05 3.4689E+03 3.4144E+03 0.0000E+00 3.4144E+03 0.0000E+00 0
900.- 920. 321 0.6452E-01 0 3.3348E+05 3.0023E+03 2.9481E+03 0.0000E+00 2.9481E+03 0.0000E+00 0
920.- 940. 280 0.5628E-01 0 2.5203E+05 2.4531E+03 2.4039E+03 0.0000E+00 2.4039E+03 0.0000E+00 0
940.- 960. 253 0.5085E-01 0 1.7985E+05 1.8988E+03 1.8561E+03 0.0000E+00 1.8561E+03 0.0000E+00 0
960.- 980. 222 0.4462E-01 0 1.2182E+05 1.4271E+03 1.3910E+03 0.0000E+00 1.3910E+03 0.0000E+00 0
980.- 1000. 188 0.3779E-01 1 8.2875E+04 1.0642E+03 1.0331E+03 0.0000E+00 1.0331E+03 0.0000E+00 0
1000.- 1020. 160 0.3216E-01 4 5.3015E+04 7.9526E+02 7.6955E+02 0.0000E+00 7.6955E+02 0.0000E+00 0
1020.- 1040. 107 0.2151E-01 10 2.8919E+04 4.4482E+02 4.2897E+02 0.0000E+00 4.2897E+02 0.0000E+00 0
1040.- 1060. 67 0.1347E-01 40 1.3602E+04 2.1510E+02 2.0563E+02 0.0000E+00 2.0563E+02 0.0000E+00 0
1060.- 1080. 25 0.5025E-02 106 5.5784E+03 9.4632E+01 9.0490E+01 0.0000E+00 9.0490E+01 0.0000E+00 0
1080.- 1100. 14 0.2814E-02 287 2.3455E+03 4.0227E+01 3.8033E+01 0.0000E+00 3.8033E+01 0.0000E+00 0
1100.- 1120. 10 0.2010E-02 524 9.4284E+02 1.5831E+01 1.4707E+01 0.0000E+00 1.4707E+01 0.0000E+00 0
1120.- 1140. 1 0.2010E-03 889 1.0601E+02 2.1345E+00 1.9523E+00 0.0000E+00 1.9523E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 1033 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 932 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 666 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 340 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 117 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 40 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 313 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 120 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 45 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- SUT 0 0.0000E+00
1340.- 1360. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- SUT 0 0.0000E+00
4984 1.0000E+00 4984 6.4822E+07 1.4073E+05 1.3970E+05 1.8664E+04 1.2104E+05 1.3804E+04 322
4975 1.0000E+00 4975 6.4728E+07 1.4173E+05 1.4070E+05 1.9566E+04 1.2113E+05 1.4408E+04 319
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.2318E+05 4.5198E+02 8.8912E+01 3.6306E+02 1.0479E+06 6.4403E+02 1.6686E+02 4.7718E+02 1 3
20.- 40. 5.2560E+05 3.7910E+02 0.0000E+00 3.7910E+02 1.0596E+06 9.0689E+02 2.9672E+02 6.1017E+02 0 5
40.- 60. 5.2834E+05 8.1250E+02 3.1833E+02 4.9416E+02 1.0693E+06 1.0067E+03 2.0801E+02 7.9867E+02 6 3
60.- 80. 5.3976E+05 6.8454E+02 2.3171E+02 4.5283E+02 1.0675E+06 1.1119E+03 4.7851E+02 6.3336E+02 4 4
80.- 100. 5.4258E+05 7.2211E+02 1.9948E+02 5.2263E+02 1.0746E+06 7.7593E+02 1.6681E+02 6.0911E+02 4 3
100.- 120. 5.4234E+05 5.9814E+02 7.8639E+01 5.1950E+02 1.0967E+06 8.4031E+02 2.5925E+02 5.8107E+02 2 5
120.- 140. 5.5053E+05 7.1835E+02 2.5018E+02 4.6817E+02 1.0940E+06 1.1283E+03 4.0361E+02 7.2471E+02 4 2
140.- 160. 5.4682E+05 7.2086E+02 1.8443E+02 5.3642E+02 1.1049E+06 7.7678E+02 1.2373E+02 6.5305E+02 4 2
160.- 180. 5.6055E+05 7.4197E+02 1.7747E+02 5.6450E+02 1.1227E+06 1.1316E+03 3.4710E+02 7.8450E+02 2 4
180.- 200. 5.6667E+05 8.2036E+02 3.0563E+02 5.1474E+02 1.1231E+06 1.0954E+03 2.7055E+02 8.2489E+02 4 6
200.- 220. 5.6396E+05 7.8086E+02 2.9114E+02 4.8972E+02 1.1307E+06 1.4811E+03 7.3111E+02 7.4998E+02 4 7
220.- 240. 5.6833E+05 6.7537E+02 1.3571E+02 5.3966E+02 1.1326E+06 1.3816E+03 5.7927E+02 8.0236E+02 2 4
240.- 260. 5.6627E+05 7.0278E+02 2.0576E+02 4.9702E+02 1.1372E+06 1.2877E+03 3.0298E+02 9.8471E+02 5 4
260.- 280. 5.7235E+05 7.0811E+02 1.4865E+02 5.5946E+02 1.1455E+06 1.0508E+03 1.4221E+02 9.0856E+02 4 3
280.- 300. 5.7054E+05 1.0836E+03 4.1843E+02 6.6520E+02 1.1505E+06 1.5805E+03 5.5375E+02 1.0267E+03 7 11
300.- 320. 5.7456E+05 8.9653E+02 2.2760E+02 6.6893E+02 1.1568E+06 1.4100E+03 3.9930E+02 1.0107E+03 4 7
320.- 340. 5.7419E+05 9.9915E+02 2.8186E+02 7.1729E+02 1.1530E+06 1.7241E+03 5.3458E+02 1.1895E+03 5 7
340.- 360. 5.7230E+05 8.6491E+02 1.2210E+02 7.4281E+02 1.1445E+06 1.7068E+03 5.5818E+02 1.1486E+03 2 8
360.- 380. 5.6947E+05 1.1214E+03 3.4949E+02 7.7190E+02 1.1421E+06 1.4530E+03 4.5603E+02 9.9697E+02 5 6
380.- 400. 5.6950E+05 1.1151E+03 2.3433E+02 8.8078E+02 1.1469E+06 1.6582E+03 4.3511E+02 1.2231E+03 4 7
400.- 420. 5.6414E+05 9.0713E+02 2.0776E+02 6.9937E+02 1.1426E+06 1.7722E+03 5.8318E+02 1.1890E+03 3 6
420.- 440. 5.7167E+05 1.0877E+03 1.6479E+02 9.2290E+02 1.1327E+06 1.7145E+03 2.7050E+02 1.4440E+03 3 6
440.- 460. 5.7642E+05 1.1022E+03 1.8469E+02 9.1748E+02 1.1333E+06 2.1295E+03 5.2575E+02 1.6037E+03 4 9
460.- 480. 5.7249E+05 1.2672E+03 2.3860E+02 1.0286E+03 1.1455E+06 2.0654E+03 3.8023E+02 1.6852E+03 5 8
480.- 500. 5.6210E+05 1.1295E+03 1.0171E+02 1.0278E+03 1.1259E+06 2.5670E+03 7.5562E+02 1.8114E+03 3 12
500.- 520. 5.5391E+04 1.5522E+02 4.8080E+01 1.0714E+02 1.0800E+05 1.3745E+02 0.0000E+00 1.3745E+02 1 0
0.- 20. 5.2778E+05 6.0101E+02 2.0561E+02 3.9540E+02 1.0428E+06 9.0349E+02 3.0976E+02 5.9373E+02 3 5
20.- 40. 5.2385E+05 8.5332E+02 4.8012E+02 3.7320E+02 1.0559E+06 1.3747E+03 7.9036E+02 5.8436E+02 5 7
40.- 60. 5.3529E+05 7.3994E+02 3.2330E+02 4.1664E+02 1.0609E+06 6.8564E+02 3.2127E+01 6.5351E+02 5 1
60.- 80. 5.3041E+05 7.0646E+02 3.4137E+02 3.6509E+02 1.0798E+06 8.4109E+02 2.6646E+02 5.7463E+02 4 5
80.- 100. 5.2925E+05 3.5030E+02 0.0000E+00 3.5030E+02 1.0841E+06 1.0164E+03 4.0809E+02 6.0833E+02 0 6
100.- 120. 5.3948E+05 7.4933E+02 2.6060E+02 4.8873E+02 1.0849E+06 8.6750E+02 2.0578E+02 6.6172E+02 5 5
120.- 140. 5.4588E+05 7.5573E+02 3.0830E+02 4.4744E+02 1.0993E+06 7.2621E+02 1.0473E+02 6.2147E+02 4 2
140.- 160. 5.5392E+05 6.6550E+02 2.3360E+02 4.3190E+02 1.1106E+06 1.2946E+03 5.2570E+02 7.6892E+02 5 6
160.- 180. 5.4721E+05 6.7687E+02 8.0848E+01 5.9602E+02 1.1234E+06 1.3298E+03 5.3900E+02 7.9077E+02 2 5
180.- 200. 5.5507E+05 6.8410E+02 2.2307E+02 4.6104E+02 1.1221E+06 8.1065E+02 1.2157E+02 6.8908E+02 4 3
200.- 220. 5.6281E+05 9.5652E+02 4.7211E+02 4.8441E+02 1.1259E+06 7.8873E+02 0.0000E+00 7.8873E+02 5 0
220.- 240. 5.5686E+05 1.0447E+03 5.7710E+02 4.6762E+02 1.1343E+06 1.3666E+03 5.5398E+02 8.1266E+02 8 6
240.- 260. 5.6964E+05 7.0954E+02 1.0441E+02 6.0512E+02 1.1345E+06 1.4555E+03 5.8823E+02 8.6723E+02 2 6
260.- 280. 5.7687E+05 9.8111E+02 4.0147E+02 5.7963E+02 1.1486E+06 1.3787E+03 4.0828E+02 9.7045E+02 7 5
280.- 300. 5.7663E+05 9.7404E+02 3.0868E+02 6.6536E+02 1.1396E+06 1.1755E+03 3.4180E+02 8.3366E+02 5 5
300.- 320. 5.8233E+05 1.0924E+03 3.7476E+02 7.1767E+02 1.1502E+06 1.2668E+03 2.4298E+02 1.0238E+03 6 4
320.- 340. 5.6988E+05 1.0059E+03 3.3799E+02 6.6789E+02 1.1426E+06 1.3115E+03 3.5551E+02 9.5599E+02 5 5
340.- 360. 5.7238E+05 1.0284E+03 2.5449E+02 7.7392E+02 1.1615E+06 2.0715E+03 8.5897E+02 1.2126E+03 5 12
360.- 380. 5.7790E+05 8.8689E+02 1.2984E+02 7.5705E+02 1.1485E+06 1.8843E+03 6.4804E+02 1.2363E+03 3 9
380.- 400. 5.8209E+05 1.0119E+03 2.6102E+02 7.5091E+02 1.1602E+06 1.8315E+03 5.5829E+02 1.2732E+03 5 8
400.- 420. 5.7452E+05 9.5896E+02 1.7081E+02 7.8816E+02 1.1563E+06 1.6819E+03 3.7179E+02 1.3101E+03 3 6
420.- 440. 5.6844E+05 1.1015E+03 1.1813E+02 9.8337E+02 1.1479E+06 2.0656E+03 5.4706E+02 1.5185E+03 3 9
440.- 460. 5.6465E+05 1.0118E+03 5.4143E+01 9.5762E+02 1.1407E+06 2.2185E+03 6.7981E+02 1.5387E+03 1 11
460.- 480. 5.5145E+05 1.1005E+03 1.9647E+02 9.0400E+02 1.1310E+06 2.0675E+03 3.3451E+02 1.7330E+03 5 6
480.- 500. 5.4988E+05 1.3085E+03 2.1176E+02 1.0967E+03 1.1151E+06 2.1576E+03 5.5834E+02 1.5993E+03 4 9
500.- 520. 5.5010E+04 6.1758E+01 0.0000E+00 6.1758E+01 1.0675E+05 1.1346E+02 0.0000E+00 1.1346E+02 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.4030E+07 2.1247E+04 5.1955E+03 1.6051E+04 2.8088E+07 3.4538E+04 9.9290E+03 2.4609E+04 92 142
1.3979E+07 2.2017E+04 6.4300E+03 1.5587E+04 2.8108E+07 3.4685E+04 1.0351E+04 2.4334E+04 104 146
DAMAGE IN LAYER 1 : 5.5518E+04
DAMAGE IN LAYER 1 : 5.6537E+04
DAMAGE IN LAYER 2 : 8.4187E+04
DAMAGE IN LAYER 2 : 8.4161E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.1388E-03 REL.MEAN ENERGY = 3.5586E-01 MEAN ENERGY = 4.6262E+03
PART.REFL.COEF.= 5.0000E-03 ENERGY REFL.COEF.= 1.9664E-03 REL.MEAN ENERGY = 3.9328E-01 MEAN ENERGY = 5.1127E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 4.6262E+03 8.3161E+06 6.2475E-02 2.2857E+00 2.8838E+03 7.2094E+02 2.3573E+06 2.7494E-01
PATHLENGTH 5.5525E+02 5.4271E+04 4.2178E-01 2.4547E+00 2.3296E+02 5.8240E+01 1.6364E+04 3.5265E-01
ELASTIC LOSS 1.4518E+02 3.5556E+03 5.9629E+01 3.7268E+00
INEL. LOSS 8.0935E+03 8.6554E+06 2.9420E+03 1.8388E+02
ENERGY 5.1127E+03 1.4250E+07 6.2462E-01 2.1693E+00 3.7749E+03 7.5499E+02 3.0819E+06 3.2680E-01
PATHLENGTH 5.3768E+02 7.7278E+04 -2.2511E-01 2.1948E+00 2.7799E+02 5.5598E+01 1.6894E+04 2.6939E-01
ELASTIC LOSS 1.5849E+02 3.8852E+03 6.2332E+01 2.4933E+00
INEL. LOSS 7.8066E+03 1.3915E+07 3.7303E+03 1.4921E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 4.6262E+03 2.9718E+07 2.1593E+11 1.7117E+15 1.4498E+19 1.2879E+23
LOGENERGY 3.4972E+00 1.2452E+01 4.4984E+01 1.6441E+02 6.0639E+02 2.2528E+03
PATHLENGTH 5.5525E+02 3.6257E+05 2.6692E+08 2.1451E+11 1.8351E+14 1.6398E+17
ENERGY 5.1127E+03 4.0390E+07 3.8581E+11 4.0459E+15 4.4479E+19 5.0203E+23
LOGENERGY 3.4886E+00 1.2525E+01 4.5788E+01 1.6945E+02 6.3289E+02 2.3813E+03
PATHLENGTH 5.3768E+02 3.6638E+05 2.7526E+08 2.2033E+11 1.8526E+14 1.6208E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -283,5 +285,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 1 0 0 3 0 1 0 1 1 1 1 0 2 0 3 1 1
0.000 0.000 0.000 1.250 0.000 0.000 3.750 0.000 1.250 0.000 1.250 1.250 1.250 1.250 0.000 2.500 0.000 3.750 1.250 1.250
0 0 0 2 0 1 0 1 0 1 2 1 0 3 4 0 3 3 2 2
0.000 0.000 0.000 1.600 0.000 0.800 0.000 0.800 0.000 0.800 1.600 0.800 0.000 2.400 3.200 0.000 2.400 2.400 1.600 1.600
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.rge
+56 -55
View File
@@ -1,62 +1,62 @@
DEPTH PARTICLES
10.0000 1
30.0000 3
50.0000 3
70.0000 3
90.0000 5
10.0000 0
30.0000 2
50.0000 1
70.0000 0
90.0000 1
110.0000 3
130.0000 3
150.0000 6
170.0000 4
190.0000 4
210.0000 7
230.0000 4
250.0000 10
270.0000 6
290.0000 5
130.0000 5
150.0000 1
170.0000 2
190.0000 8
210.0000 8
230.0000 5
250.0000 7
270.0000 9
290.0000 6
310.0000 7
330.0000 17
350.0000 15
370.0000 11
390.0000 15
410.0000 11
430.0000 23
450.0000 24
470.0000 31
490.0000 32
510.0000 34
530.0000 34
550.0000 38
570.0000 66
590.0000 55
610.0000 84
630.0000 75
650.0000 104
670.0000 104
690.0000 109
710.0000 137
730.0000 166
750.0000 166
770.0000 165
790.0000 224
810.0000 246
830.0000 264
850.0000 288
870.0000 295
890.0000 354
910.0000 304
930.0000 333
950.0000 275
970.0000 261
990.0000 204
1010.0000 153
1030.0000 87
1050.0000 48
1070.0000 33
1090.0000 16
1110.0000 7
330.0000 16
350.0000 16
370.0000 14
390.0000 13
410.0000 29
430.0000 27
450.0000 26
470.0000 34
490.0000 42
510.0000 31
530.0000 47
550.0000 50
570.0000 51
590.0000 61
610.0000 65
630.0000 71
650.0000 99
670.0000 114
690.0000 121
710.0000 136
730.0000 161
750.0000 198
770.0000 179
790.0000 223
810.0000 264
830.0000 289
850.0000 280
870.0000 289
890.0000 316
910.0000 321
930.0000 280
950.0000 253
970.0000 222
990.0000 188
1010.0000 160
1030.0000 107
1050.0000 67
1070.0000 25
1090.0000 14
1110.0000 10
1130.0000 1
1150.0000 1
1150.0000 0
1170.0000 0
1190.0000 0
1210.0000 0
@@ -66,3 +66,4 @@
1290.0000 0
1310.0000 0
1330.0000 0
1350.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
13.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.8165E+03 0.1637E+03 0.4626E+04 0.2884E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 253 4731
13.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.8121E+03 0.1632E+03 0.5113E+04 0.3775E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 282 4693
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.out
+138 -135
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:57
Start: 19.Jun. 2026 18:18:14
End: 18.Jun. 2026 09:56:00
End: 19.Jun. 2026 18:18:15
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
41121 0 0 0 0 0 0 0 0
41047 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4984 ENERGY=0.7476E+08 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.8171E+05 EV
IMPLANTED PARTICLES= 4979 ENERGY=0.7468E+08 EV
BACKSCATTERED PARTICLES= 21 ENERGY=0.1208E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,169 +122,171 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 137 137
IMPLANTED PARTICLES (LAYER 1)= 130 130
IMPLANTED PARTICLES (LAYER 2)= 4847 4847
IMPLANTED PARTICLES (LAYER 2)= 4849 4849
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 520.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.072
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.332
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 520.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.068
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.342
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5277E+02 3.2457E+04 -1.2830E+00 5.2262E+00 1.8016E+02 2.5519E+00 9.4512E+02 4.8505E-02
SPREAD 3.6824E+02 3.6248E+04 5.2151E-01 2.8310E+00 1.9039E+02 2.6968E+00 6.9477E+02 2.7082E-02
PATHLENGTH 1.3143E+03 1.7054E+03 -1.4600E-01 3.1758E+00 4.1296E+01 5.8495E-01 3.5632E+01 3.7301E-02
ELASTIC LOSS 2.8721E+01 3.6966E+02 1.9226E+01 3.8576E-03
INEL. LOSS 1.4972E+04 2.0789E+05 4.5595E+02 9.1482E-02
PENETRATION 9.5263E+02 3.1766E+04 -1.3415E+00 5.6705E+00 1.7823E+02 2.5259E+00 9.7290E+02 5.3384E-02
SPREAD 3.6972E+02 3.5637E+04 4.3459E-01 2.6226E+00 1.8878E+02 2.6753E+00 6.4333E+02 2.5062E-02
PATHLENGTH 1.3140E+03 1.7116E+03 -2.0555E-01 3.4109E+00 4.1372E+01 5.8632E-01 3.7664E+01 4.4207E-02
ELASTIC LOSS 2.8893E+01 3.7487E+02 1.9362E+01 3.8886E-03
INEL. LOSS 1.4970E+04 2.0680E+05 4.5476E+02 9.1335E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.5693E-02 8.6875E-01 9.2966E+01 1.3903E+04 9.3207E-01 5.7752E-04 6.3468E-02 4.9728E+00
WEAK EL.LOSS 3.7616E-04 2.1592E-06 7.0359E+00 7.1932E+01 1.4694E-03 9.1047E-07 1.1268E-08 3.8342E-02
INELAST.LOSS 2.8709E+01 1.0179E+02 -1.4304E+00 3.7392E+00 1.0089E+01 6.2512E-03 1.0438E-01 1.5324E-03
SUBTHR.LOSS 4.7736E-02 2.3172E-01 2.9351E+01 1.1705E+03 4.8137E-01 2.9828E-04 4.9102E-03 2.7044E-01
ELAST.LOSS 5.6596E-02 1.0324E+00 1.2210E+02 2.6195E+04 1.0160E+00 6.2981E-04 1.0357E-01 1.2024E+01
WEAK EL.LOSS 3.7561E-04 2.1477E-06 6.9664E+00 6.9655E+01 1.4655E-03 9.0840E-07 1.1030E-08 3.6249E-02
INELAST.LOSS 2.8710E+01 1.0179E+02 -1.4302E+00 3.7390E+00 1.0089E+01 6.2537E-03 1.0442E-01 1.5327E-03
SUBTHR.LOSS 4.8402E-02 2.4176E-01 2.9200E+01 1.1459E+03 4.9169E-01 3.0480E-04 5.0709E-03 2.5083E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5277E+02 9.4022E+05 9.5016E+08 9.7773E+11 1.0209E+15 1.0792E+18
PENETRATION 9.5263E+02 9.3927E+05 9.4771E+08 9.7332E+11 1.0142E+15 1.0699E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2006E-03 0 1.5265E+06 1.5609E+03 1.5594E+03 7.1642E+02 8.4297E+02 4.9296E+02 6
20.- 40. 1 0.2006E-03 0 1.5326E+06 1.2266E+03 1.2249E+03 4.1023E+02 8.1467E+02 3.0620E+02 7
40.- 60. 0 0.0000E+00 0 1.5425E+06 1.0664E+03 1.0653E+03 1.1548E+02 9.4978E+02 8.1255E+01 1
60.- 80. 0 0.0000E+00 0 1.5579E+06 1.0071E+03 1.0058E+03 1.2083E+02 8.8494E+02 9.0615E+01 2
80.- 100. 3 0.6019E-03 0 1.5713E+06 1.4547E+03 1.4523E+03 5.1324E+02 9.3908E+02 3.7835E+02 6
100.- 120. 1 0.2006E-03 0 1.5801E+06 1.5091E+03 1.5074E+03 4.8413E+02 1.0232E+03 3.5087E+02 7
120.- 140. 1 0.2006E-03 0 1.5875E+06 1.1796E+03 1.1777E+03 1.7989E+02 9.9781E+02 1.3661E+02 4
140.- 160. 3 0.6019E-03 0 1.5964E+06 1.8789E+03 1.8760E+03 9.5954E+02 9.1643E+02 6.9041E+02 12
160.- 180. 3 0.6019E-03 0 1.6132E+06 1.6084E+03 1.6058E+03 4.9231E+02 1.1135E+03 3.5971E+02 7
180.- 200. 0 0.0000E+00 0 1.6241E+06 1.5617E+03 1.5602E+03 4.5680E+02 1.1034E+03 3.2906E+02 6
200.- 220. 2 0.4013E-03 0 1.6376E+06 2.0274E+03 2.0251E+03 1.0243E+03 1.0008E+03 7.2190E+02 10
220.- 240. 4 0.8026E-03 0 1.6444E+06 1.2650E+03 1.2615E+03 2.8440E+02 9.7711E+02 2.1197E+02 6
240.- 260. 6 0.1204E-02 0 1.6599E+06 1.8531E+03 1.8488E+03 5.5896E+02 1.2899E+03 4.0150E+02 7
260.- 280. 5 0.1003E-02 0 1.6734E+06 1.9496E+03 1.9454E+03 6.7282E+02 1.2726E+03 4.9540E+02 9
280.- 300. 3 0.6019E-03 0 1.6769E+06 1.7350E+03 1.7319E+03 3.9289E+02 1.3390E+03 2.9135E+02 6
300.- 320. 6 0.1204E-02 0 1.6775E+06 1.6775E+03 1.6730E+03 4.2740E+02 1.2455E+03 3.1911E+02 7
320.- 340. 6 0.1204E-02 0 1.6987E+06 1.8754E+03 1.8706E+03 6.3772E+02 1.2329E+03 4.7097E+02 12
340.- 360. 4 0.8026E-03 0 1.7015E+06 1.8769E+03 1.8730E+03 6.0909E+02 1.2639E+03 4.4889E+02 8
360.- 380. 6 0.1204E-02 0 1.7160E+06 1.9764E+03 1.9710E+03 4.4744E+02 1.5235E+03 3.2734E+02 7
380.- 400. 18 0.3612E-02 0 1.7184E+06 2.4117E+03 2.4025E+03 7.5063E+02 1.6518E+03 5.5126E+02 12
400.- 420. 5 0.1003E-02 0 1.7225E+06 2.3648E+03 2.3586E+03 8.1002E+02 1.5486E+03 5.8157E+02 12
420.- 440. 9 0.1806E-02 0 1.7384E+06 2.1808E+03 2.1729E+03 6.1767E+02 1.5552E+03 4.5752E+02 11
440.- 460. 16 0.3210E-02 0 1.7524E+06 2.4587E+03 2.4491E+03 7.4149E+02 1.7076E+03 5.4598E+02 11
460.- 480. 13 0.2608E-02 0 1.7479E+06 2.5462E+03 2.5369E+03 6.0627E+02 1.9306E+03 4.4519E+02 9
480.- 500. 21 0.4213E-02 0 1.7573E+06 2.9741E+03 2.9615E+03 9.7174E+02 1.9897E+03 7.2987E+02 19
500.- 520. 15 0.3010E-02 0 1.4793E+06 2.2065E+03 2.2023E+03 4.4764E+02 1.7546E+03 3.3071E+02 8
520.- 540. 21 0.4213E-02 0 1.4627E+06 1.9518E+03 1.9473E+03 2.2210E+02 1.7252E+03 1.6980E+02 5
540.- 560. 30 0.6019E-02 0 1.4681E+06 1.6837E+03 1.6786E+03 9.7346E+01 1.5812E+03 7.5534E+01 3
560.- 580. 18 0.3612E-02 0 1.4838E+06 2.4337E+03 2.4291E+03 6.8156E+02 1.7475E+03 5.1732E+02 14
580.- 600. 24 0.4815E-02 0 1.4770E+06 2.2173E+03 2.2125E+03 3.9361E+02 1.8189E+03 3.0253E+02 10
600.- 620. 34 0.6822E-02 0 1.4580E+06 2.6855E+03 2.6778E+03 4.9339E+02 2.1844E+03 3.7402E+02 10
620.- 640. 44 0.8828E-02 0 1.4499E+06 2.6117E+03 2.6038E+03 4.7064E+02 2.1332E+03 3.5645E+02 9
640.- 660. 42 0.8427E-02 0 1.4460E+06 2.7468E+03 2.7385E+03 3.8587E+02 2.3526E+03 2.9517E+02 9
660.- 680. 47 0.9430E-02 0 1.4360E+06 2.8445E+03 2.8347E+03 5.3880E+02 2.2959E+03 4.1330E+02 13
680.- 700. 57 0.1144E-01 0 1.4231E+06 2.5464E+03 2.5354E+03 3.2157E+02 2.2139E+03 2.4478E+02 7
700.- 720. 51 0.1023E-01 0 1.4157E+06 2.8627E+03 2.8524E+03 1.9017E+02 2.6623E+03 1.4643E+02 5
720.- 740. 68 0.1364E-01 0 1.3808E+06 2.8698E+03 2.8570E+03 2.8142E+02 2.5755E+03 2.1417E+02 6
740.- 760. 60 0.1204E-01 0 1.3317E+06 3.0237E+03 3.0113E+03 4.1974E+02 2.5916E+03 3.2331E+02 11
760.- 780. 86 0.1726E-01 0 1.3240E+06 3.2919E+03 3.2756E+03 2.7972E+02 2.9959E+03 2.1462E+02 7
780.- 800. 93 0.1866E-01 0 1.2929E+06 3.6724E+03 3.6546E+03 3.9725E+02 3.2573E+03 3.0502E+02 10
800.- 820. 103 0.2067E-01 0 1.2550E+06 3.3691E+03 3.3493E+03 2.9462E+02 3.0547E+03 2.2584E+02 7
820.- 840. 135 0.2709E-01 0 1.2225E+06 3.9443E+03 3.9195E+03 1.0123E+02 3.8183E+03 7.8416E+01 3
840.- 860. 136 0.2729E-01 0 1.1723E+06 4.2868E+03 4.2603E+03 3.0178E+02 3.9586E+03 2.3383E+02 9
860.- 880. 161 0.3230E-01 0 1.1021E+06 4.2656E+03 4.2362E+03 1.4323E+02 4.0929E+03 1.1066E+02 4
880.- 900. 157 0.3150E-01 0 1.0248E+06 4.2374E+03 4.2064E+03 1.7498E+02 4.0314E+03 1.3531E+02 5
900.- 920. 190 0.3812E-01 0 9.5485E+05 4.0721E+03 4.0381E+03 1.0663E+02 3.9315E+03 8.2407E+01 3
920.- 940. 208 0.4173E-01 0 8.7881E+05 3.8887E+03 3.8513E+03 0.0000E+00 3.8513E+03 0.0000E+00 0
940.- 960. 227 0.4555E-01 0 8.0355E+05 4.0997E+03 4.0599E+03 0.0000E+00 4.0599E+03 0.0000E+00 0
960.- 980. 199 0.3993E-01 0 7.1836E+05 4.0946E+03 4.0535E+03 0.0000E+00 4.0535E+03 0.0000E+00 0
980.- 1000. 277 0.5558E-01 0 6.3534E+05 3.7577E+03 3.7121E+03 0.0000E+00 3.7121E+03 0.0000E+00 0
1000.- 1020. 245 0.4916E-01 0 5.5126E+05 3.6875E+03 3.6417E+03 0.0000E+00 3.6417E+03 0.0000E+00 0
1020.- 1040. 280 0.5618E-01 0 4.7419E+05 3.6068E+03 3.5567E+03 0.0000E+00 3.5567E+03 0.0000E+00 0
1040.- 1060. 303 0.6079E-01 0 3.9136E+05 3.2304E+03 3.1787E+03 0.0000E+00 3.1787E+03 0.0000E+00 0
1060.- 1080. 274 0.5498E-01 0 3.0973E+05 2.6843E+03 2.6379E+03 0.0000E+00 2.6379E+03 0.0000E+00 0
1080.- 1100. 278 0.5578E-01 0 2.4346E+05 2.3790E+03 2.3305E+03 0.0000E+00 2.3305E+03 0.0000E+00 0
1100.- 1120. 269 0.5397E-01 0 1.7322E+05 1.8851E+03 1.8384E+03 0.0000E+00 1.8384E+03 0.0000E+00 0
1120.- 1140. 213 0.4274E-01 0 1.1763E+05 1.3416E+03 1.3076E+03 0.0000E+00 1.3076E+03 0.0000E+00 0
1140.- 1160. 166 0.3331E-01 0 7.5930E+04 9.5013E+02 9.2310E+02 0.0000E+00 9.2310E+02 0.0000E+00 0
1160.- 1180. 148 0.2970E-01 6 4.7775E+04 7.2670E+02 7.0273E+02 0.0000E+00 7.0273E+02 0.0000E+00 0
1180.- 1200. 92 0.1846E-01 28 2.3510E+04 3.6665E+02 3.5272E+02 0.0000E+00 3.5272E+02 0.0000E+00 0
1200.- 1220. 44 0.8828E-02 46 9.5847E+03 1.5839E+02 1.5131E+02 0.0000E+00 1.5131E+02 0.0000E+00 0
1220.- 1240. 29 0.5819E-02 106 5.1121E+03 8.5857E+01 8.1383E+01 0.0000E+00 8.1383E+01 0.0000E+00 0
1240.- 1260. 14 0.2809E-02 273 1.7297E+03 2.5225E+01 2.3621E+01 0.0000E+00 2.3621E+01 0.0000E+00 0
1260.- 1280. 4 0.8026E-03 521 8.6600E+02 1.1506E+01 1.0833E+01 0.0000E+00 1.0833E+01 0.0000E+00 0
1280.- 1300. 4 0.8026E-03 790 5.6146E+02 1.1079E+01 1.0536E+01 0.0000E+00 1.0536E+01 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 959 1.1941E+02 3.5159E+00 3.4234E+00 0.0000E+00 3.4234E+00 0.0000E+00 0
1320.- 1340. 1 0.2006E-03 917 4.1050E+01 9.0984E-01 7.8735E-01 0.0000E+00 7.8735E-01 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 690 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 386 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 189 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 1 0.2008E-03 0 1.5215E+06 1.4106E+03 1.4093E+03 4.7503E+02 9.3425E+02 3.5210E+02 8
20.- 40. 0 0.0000E+00 0 1.5328E+06 1.4217E+03 1.4203E+03 5.1333E+02 9.0701E+02 3.5920E+02 5
40.- 60. 1 0.2008E-03 0 1.5462E+06 1.5052E+03 1.5035E+03 5.1087E+02 9.9265E+02 3.4276E+02 4
60.- 80. 1 0.2008E-03 0 1.5583E+06 1.8870E+03 1.8847E+03 8.4135E+02 1.0434E+03 6.0358E+02 9
80.- 100. 3 0.6025E-03 0 1.5643E+06 1.9532E+03 1.9510E+03 9.8360E+02 9.6740E+02 6.5937E+02 7
100.- 120. 6 0.1205E-02 0 1.5792E+06 1.4154E+03 1.4115E+03 4.1879E+02 9.9273E+02 2.9301E+02 4
120.- 140. 1 0.2008E-03 0 1.5927E+06 1.1031E+03 1.1014E+03 2.9076E+02 8.1062E+02 2.1800E+02 5
140.- 160. 0 0.0000E+00 0 1.6031E+06 1.7317E+03 1.7300E+03 7.6590E+02 9.6411E+02 5.5649E+02 10
160.- 180. 3 0.6025E-03 0 1.6148E+06 1.6646E+03 1.6617E+03 4.8406E+02 1.1776E+03 3.4012E+02 4
180.- 200. 4 0.8034E-03 0 1.6241E+06 1.6271E+03 1.6243E+03 4.3876E+02 1.1855E+03 3.2440E+02 7
200.- 220. 0 0.0000E+00 0 1.6281E+06 1.2877E+03 1.2854E+03 1.9748E+02 1.0880E+03 1.4791E+02 4
220.- 240. 5 0.1004E-02 0 1.6398E+06 1.4848E+03 1.4818E+03 4.4597E+02 1.0358E+03 3.2957E+02 8
240.- 260. 3 0.6025E-03 0 1.6487E+06 1.7164E+03 1.7130E+03 5.4354E+02 1.1694E+03 4.0169E+02 8
260.- 280. 3 0.6025E-03 0 1.6631E+06 1.5371E+03 1.5340E+03 3.6076E+02 1.1732E+03 2.6653E+02 6
280.- 300. 6 0.1205E-02 0 1.6740E+06 1.7640E+03 1.7598E+03 5.7395E+02 1.1858E+03 4.0426E+02 6
300.- 320. 3 0.6025E-03 0 1.6947E+06 1.9457E+03 1.9418E+03 4.5012E+02 1.4916E+03 3.1804E+02 6
320.- 340. 7 0.1406E-02 0 1.6994E+06 2.1759E+03 2.1710E+03 6.8238E+02 1.4886E+03 4.8340E+02 8
340.- 360. 8 0.1607E-02 0 1.7038E+06 1.7759E+03 1.7701E+03 3.8212E+02 1.3879E+03 2.8006E+02 6
360.- 380. 3 0.6025E-03 0 1.7174E+06 2.4703E+03 2.4663E+03 1.0584E+03 1.4079E+03 7.5418E+02 13
380.- 400. 6 0.1205E-02 0 1.7357E+06 2.4522E+03 2.4466E+03 1.1374E+03 1.3093E+03 8.3214E+02 16
400.- 420. 15 0.3013E-02 0 1.7359E+06 2.4632E+03 2.4550E+03 8.4779E+02 1.6072E+03 6.2085E+02 12
420.- 440. 4 0.8034E-03 0 1.7381E+06 2.5375E+03 2.5312E+03 6.1148E+02 1.9198E+03 4.5424E+02 10
440.- 460. 15 0.3013E-02 0 1.7342E+06 2.2563E+03 2.2472E+03 4.7821E+02 1.7690E+03 3.5611E+02 9
460.- 480. 15 0.3013E-02 0 1.7606E+06 2.1061E+03 2.0963E+03 3.5158E+02 1.7447E+03 2.6694E+02 7
480.- 500. 17 0.3414E-02 0 1.7629E+06 3.2848E+03 3.2740E+03 1.1871E+03 2.0868E+03 8.8615E+02 20
500.- 520. 15 0.3013E-02 0 1.4707E+06 1.7108E+03 1.7068E+03 2.9629E+02 1.4105E+03 2.2269E+02 5
520.- 540. 18 0.3615E-02 0 1.4679E+06 1.9130E+03 1.9089E+03 2.5789E+02 1.6510E+03 1.9543E+02 5
540.- 560. 24 0.4820E-02 0 1.4520E+06 2.0184E+03 2.0135E+03 2.7784E+02 1.7357E+03 2.0943E+02 5
560.- 580. 24 0.4820E-02 0 1.4569E+06 2.0880E+03 2.0831E+03 4.1683E+02 1.6662E+03 3.1796E+02 9
580.- 600. 31 0.6226E-02 0 1.4640E+06 2.5889E+03 2.5827E+03 7.4347E+02 1.8392E+03 5.6373E+02 15
600.- 620. 29 0.5824E-02 0 1.4621E+06 2.6841E+03 2.6778E+03 6.6859E+02 2.0092E+03 5.1093E+02 15
620.- 640. 43 0.8636E-02 0 1.4554E+06 2.4193E+03 2.4119E+03 3.6055E+02 2.0514E+03 2.7551E+02 8
640.- 660. 31 0.6226E-02 0 1.4490E+06 2.5397E+03 2.5319E+03 3.2430E+02 2.2076E+03 2.4534E+02 6
660.- 680. 51 0.1024E-01 0 1.4354E+06 2.8600E+03 2.8505E+03 4.2313E+02 2.4273E+03 3.2034E+02 8
680.- 700. 63 0.1265E-01 0 1.4316E+06 2.8546E+03 2.8434E+03 2.5766E+02 2.5858E+03 1.9553E+02 5
700.- 720. 39 0.7833E-02 0 1.4038E+06 2.7524E+03 2.7433E+03 2.8617E+02 2.4572E+03 2.1768E+02 6
720.- 740. 58 0.1165E-01 0 1.3723E+06 3.1322E+03 3.1204E+03 2.8953E+02 2.8309E+03 2.2221E+02 7
740.- 760. 64 0.1285E-01 0 1.3528E+06 2.9808E+03 2.9683E+03 1.6776E+02 2.8005E+03 1.2854E+02 4
760.- 780. 65 0.1305E-01 0 1.3274E+06 3.3477E+03 3.3343E+03 4.0642E+02 2.9279E+03 3.1036E+02 9
780.- 800. 105 0.2109E-01 0 1.3051E+06 3.5141E+03 3.4949E+03 3.9155E+02 3.1034E+03 3.0113E+02 10
800.- 820. 121 0.2430E-01 0 1.2597E+06 3.6724E+03 3.6502E+03 1.1731E+02 3.5329E+03 9.0298E+01 3
820.- 840. 121 0.2430E-01 0 1.2099E+06 4.0800E+03 4.0565E+03 1.8089E+02 3.8756E+03 1.3969E+02 5
840.- 860. 127 0.2551E-01 0 1.1501E+06 3.8805E+03 3.8549E+03 1.5252E+02 3.7023E+03 1.1752E+02 4
860.- 880. 161 0.3234E-01 0 1.1073E+06 4.1746E+03 4.1438E+03 1.4755E+02 3.9962E+03 1.1383E+02 4
880.- 900. 188 0.3776E-01 0 1.0315E+06 4.2524E+03 4.2190E+03 6.6124E+01 4.1529E+03 5.1269E+01 2
900.- 920. 171 0.3434E-01 0 9.7124E+05 4.4849E+03 4.4515E+03 4.0112E+01 4.4114E+03 3.0844E+01 1
920.- 940. 235 0.4720E-01 0 8.9443E+05 4.6331E+03 4.5917E+03 3.8412E+01 4.5533E+03 2.9593E+01 1
940.- 960. 235 0.4720E-01 0 8.1874E+05 4.3640E+03 4.3205E+03 0.0000E+00 4.3205E+03 0.0000E+00 0
960.- 980. 261 0.5242E-01 0 7.1836E+05 3.9460E+03 3.8992E+03 0.0000E+00 3.8992E+03 0.0000E+00 0
980.- 1000. 265 0.5322E-01 0 6.3031E+05 4.0288E+03 3.9813E+03 0.0000E+00 3.9813E+03 0.0000E+00 0
1000.- 1020. 268 0.5383E-01 0 5.4242E+05 3.7081E+03 3.6601E+03 0.0000E+00 3.6601E+03 0.0000E+00 0
1020.- 1040. 275 0.5523E-01 0 4.5255E+05 3.2460E+03 3.1983E+03 0.0000E+00 3.1983E+03 0.0000E+00 0
1040.- 1060. 273 0.5483E-01 0 3.7675E+05 3.1245E+03 3.0761E+03 0.0000E+00 3.0761E+03 0.0000E+00 0
1060.- 1080. 273 0.5483E-01 0 3.0461E+05 2.7550E+03 2.7079E+03 0.0000E+00 2.7079E+03 0.0000E+00 0
1080.- 1100. 274 0.5503E-01 0 2.2853E+05 2.1562E+03 2.1099E+03 0.0000E+00 2.1099E+03 0.0000E+00 0
1100.- 1120. 223 0.4479E-01 0 1.6900E+05 1.8123E+03 1.7723E+03 0.0000E+00 1.7723E+03 0.0000E+00 0
1120.- 1140. 234 0.4700E-01 2 1.1346E+05 1.2870E+03 1.2511E+03 0.0000E+00 1.2511E+03 0.0000E+00 0
1140.- 1160. 162 0.3254E-01 0 7.4099E+04 9.7069E+02 9.4296E+02 0.0000E+00 9.4296E+02 0.0000E+00 0
1160.- 1180. 130 0.2611E-01 10 4.3500E+04 5.7311E+02 5.5313E+02 0.0000E+00 5.5313E+02 0.0000E+00 0
1180.- 1200. 75 0.1506E-01 21 2.4749E+04 3.8725E+02 3.7432E+02 0.0000E+00 3.7432E+02 0.0000E+00 0
1200.- 1220. 66 0.1326E-01 59 1.2331E+04 2.0075E+02 1.9148E+02 0.0000E+00 1.9148E+02 0.0000E+00 0
1220.- 1240. 29 0.5824E-02 117 5.6457E+03 1.0394E+02 9.9416E+01 0.0000E+00 9.9416E+01 0.0000E+00 0
1240.- 1260. 14 0.2812E-02 247 1.9516E+03 3.3570E+01 3.1650E+01 0.0000E+00 3.1650E+01 0.0000E+00 0
1260.- 1280. 4 0.8034E-03 525 6.8910E+02 1.0181E+01 9.5854E+00 0.0000E+00 9.5854E+00 0.0000E+00 0
1280.- 1300. 3 0.6025E-03 777 3.0529E+02 8.1802E+00 7.7892E+00 0.0000E+00 7.7892E+00 0.0000E+00 0
1300.- 1320. 1 0.2008E-03 959 2.0540E+01 8.2071E-01 6.7532E-01 0.0000E+00 6.7532E-01 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 938 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 692 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 396 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 166 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 50 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- SUT 0 0.0000E+00
1420.- 1440. 0 0.0000E+00 13 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- SUT 0 0.0000E+00
4984 1.0000E+00 4984 7.4778E+07 1.4605E+05 1.4507E+05 2.0745E+04 1.2432E+05 1.5365E+04 362
4979 1.0000E+00 4979 7.4722E+07 1.4828E+05 1.4730E+05 2.1342E+04 1.2596E+05 1.5661E+04 339
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.0784E+05 3.4449E+02 0.0000E+00 3.4449E+02 1.0187E+06 1.2149E+03 7.1642E+02 4.9848E+02 0 6
20.- 40. 5.1285E+05 5.0571E+02 1.8812E+02 3.1759E+02 1.0198E+06 7.1919E+02 2.2211E+02 4.9707E+02 3 4
40.- 60. 5.1391E+05 4.6908E+02 0.0000E+00 4.6908E+02 1.0286E+06 5.9617E+02 1.1548E+02 4.8069E+02 0 1
60.- 80. 5.1757E+05 4.0737E+02 6.1251E+01 3.4612E+02 1.0403E+06 5.9840E+02 5.9579E+01 5.3882E+02 1 1
80.- 100. 5.2260E+05 7.6931E+02 4.1477E+02 3.5454E+02 1.0487E+06 6.8300E+02 9.8471E+01 5.8453E+02 5 1
100.- 120. 5.3106E+05 5.7401E+02 1.7905E+02 3.9496E+02 1.0491E+06 9.3337E+02 3.0508E+02 6.2829E+02 3 4
120.- 140. 5.2631E+05 4.4654E+02 8.7705E+01 3.5883E+02 1.0612E+06 7.3116E+02 9.2182E+01 6.3898E+02 2 2
140.- 160. 5.2972E+05 6.2597E+02 2.2454E+02 4.0143E+02 1.0667E+06 1.2500E+03 7.3500E+02 5.1500E+02 3 9
160.- 180. 5.3830E+05 7.0781E+02 1.7833E+02 5.2948E+02 1.0749E+06 8.9801E+02 3.1398E+02 5.8404E+02 2 5
180.- 200. 5.4787E+05 6.1794E+02 1.2686E+02 4.9108E+02 1.0762E+06 9.4223E+02 3.2995E+02 6.1229E+02 2 4
200.- 220. 5.4403E+05 6.4379E+02 1.7572E+02 4.6808E+02 1.0936E+06 1.3813E+03 8.4855E+02 5.3273E+02 3 7
220.- 240. 5.4862E+05 5.0910E+02 3.2819E+01 4.7628E+02 1.0958E+06 7.5241E+02 2.5158E+02 5.0083E+02 1 5
240.- 260. 5.5857E+05 6.9451E+02 1.1107E+02 5.8345E+02 1.1013E+06 1.1543E+03 4.4790E+02 7.0643E+02 2 5
260.- 280. 5.5622E+05 9.0759E+02 3.7965E+02 5.2793E+02 1.1172E+06 1.0378E+03 2.9317E+02 7.4464E+02 5 4
280.- 300. 5.6395E+05 7.6585E+02 2.0804E+02 5.5781E+02 1.1130E+06 9.6605E+02 1.8485E+02 7.8120E+02 2 4
300.- 320. 5.6043E+05 8.0069E+02 2.6454E+02 5.3615E+02 1.1170E+06 8.7226E+02 1.6287E+02 7.0939E+02 5 2
320.- 340. 5.6276E+05 5.6798E+02 8.1087E+01 4.8689E+02 1.1360E+06 1.3027E+03 5.5664E+02 7.4602E+02 2 10
340.- 360. 5.6805E+05 8.8397E+02 3.3954E+02 5.4443E+02 1.1335E+06 9.8898E+02 2.6955E+02 7.1944E+02 5 3
360.- 380. 5.7210E+05 7.0813E+02 1.1338E+02 5.9475E+02 1.1439E+06 1.2628E+03 3.3406E+02 9.2878E+02 2 5
380.- 400. 5.7300E+05 8.4556E+02 2.1780E+02 6.2775E+02 1.1454E+06 1.5569E+03 5.3282E+02 1.0241E+03 4 8
400.- 420. 5.7998E+05 7.5360E+02 1.3625E+02 6.1735E+02 1.1425E+06 1.6050E+03 6.7377E+02 9.3128E+02 3 9
420.- 440. 5.7631E+05 9.2608E+02 2.7509E+02 6.5099E+02 1.1621E+06 1.2468E+03 3.4257E+02 9.0422E+02 5 6
440.- 460. 5.8487E+05 9.0390E+02 2.6942E+02 6.3448E+02 1.1675E+06 1.5452E+03 4.7207E+02 1.0731E+03 4 7
460.- 480. 5.8547E+05 8.7804E+02 1.0472E+02 7.7332E+02 1.1625E+06 1.6588E+03 5.0155E+02 1.1573E+03 1 8
480.- 500. 5.8575E+05 1.1811E+03 4.5300E+02 7.2810E+02 1.1693E+06 1.7709E+03 5.1874E+02 1.2521E+03 8 11
500.- 520. 5.6854E+04 6.6254E+01 0.0000E+00 6.6254E+01 1.1903E+05 2.6628E+02 1.5523E+02 1.1105E+02 0 1
0.- 20. 5.0548E+05 5.3486E+02 1.7947E+02 3.5539E+02 1.0160E+06 8.7442E+02 2.9556E+02 5.7886E+02 4 4
20.- 40. 5.1488E+05 5.1971E+02 1.0808E+02 4.1163E+02 1.0179E+06 9.0063E+02 4.0525E+02 4.9538E+02 2 3
40.- 60. 5.1642E+05 4.3336E+02 0.0000E+00 4.3336E+02 1.0297E+06 1.0702E+03 5.1087E+02 5.5929E+02 0 4
60.- 80. 5.2399E+05 8.6697E+02 4.5300E+02 4.1397E+02 1.0343E+06 1.0178E+03 3.8835E+02 6.2943E+02 5 4
80.- 100. 5.2242E+05 6.1808E+02 2.2111E+02 3.9697E+02 1.0418E+06 1.3329E+03 7.6249E+02 5.7043E+02 3 4
100.- 120. 5.2893E+05 4.3621E+02 0.0000E+00 4.3621E+02 1.0503E+06 9.7530E+02 4.1879E+02 5.5652E+02 0 4
120.- 140. 5.3005E+05 5.3899E+02 1.8281E+02 3.5618E+02 1.0627E+06 5.6238E+02 1.0794E+02 4.5444E+02 3 2
140.- 160. 5.3220E+05 8.0760E+02 3.4619E+02 4.6141E+02 1.0709E+06 9.2241E+02 4.1971E+02 5.0270E+02 4 6
160.- 180. 5.4301E+05 7.2366E+02 2.1157E+02 5.1209E+02 1.0718E+06 9.3803E+02 2.7250E+02 6.6553E+02 2 2
180.- 200. 5.4712E+05 6.5952E+02 1.8770E+02 4.7182E+02 1.0770E+06 9.6478E+02 2.5107E+02 7.1371E+02 4 3
200.- 220. 5.3761E+05 5.5020E+02 5.2358E+01 4.9784E+02 1.0904E+06 7.3525E+02 1.4512E+02 5.9013E+02 1 3
220.- 240. 5.4541E+05 4.3863E+02 5.1292E+01 3.8734E+02 1.0944E+06 1.0431E+03 3.9468E+02 6.4846E+02 1 7
240.- 260. 5.4935E+05 8.0404E+02 2.9480E+02 5.0923E+02 1.0994E+06 9.0893E+02 2.4874E+02 6.6019E+02 4 4
260.- 280. 5.5935E+05 5.4762E+02 6.8068E+01 4.7955E+02 1.1037E+06 9.8635E+02 2.9270E+02 6.9365E+02 1 5
280.- 300. 5.5660E+05 4.9145E+02 0.0000E+00 4.9145E+02 1.1174E+06 1.2683E+03 5.7395E+02 6.9436E+02 0 6
300.- 320. 5.6658E+05 6.8618E+02 9.8657E+01 5.8753E+02 1.1281E+06 1.2556E+03 3.5146E+02 9.0411E+02 2 4
320.- 340. 5.6425E+05 7.8836E+02 1.6986E+02 6.1851E+02 1.1351E+06 1.3826E+03 5.1252E+02 8.7008E+02 3 5
340.- 360. 5.6876E+05 6.1980E+02 7.5226E+01 5.4457E+02 1.1351E+06 1.1503E+03 3.0689E+02 8.4337E+02 2 4
360.- 380. 5.7720E+05 8.5268E+02 2.6048E+02 5.9220E+02 1.1402E+06 1.6137E+03 7.9794E+02 8.1573E+02 6 7
380.- 400. 5.7876E+05 8.4928E+02 3.2426E+02 5.2502E+02 1.1569E+06 1.5974E+03 8.1313E+02 7.8423E+02 3 13
400.- 420. 5.8275E+05 1.0116E+03 3.1028E+02 7.0128E+02 1.1531E+06 1.4434E+03 5.3752E+02 9.0592E+02 5 7
420.- 440. 5.7092E+05 1.1700E+03 2.7505E+02 8.9500E+02 1.1672E+06 1.3612E+03 3.3642E+02 1.0248E+03 5 5
440.- 460. 5.7586E+05 9.7482E+02 1.8559E+02 7.8923E+02 1.1583E+06 1.2724E+03 2.9262E+02 9.7978E+02 4 5
460.- 480. 5.9245E+05 9.3805E+02 2.2235E+02 7.1570E+02 1.1681E+06 1.1583E+03 1.2923E+02 1.0290E+03 4 3
480.- 500. 5.8758E+05 1.4194E+03 5.8509E+02 8.3430E+02 1.1728E+06 1.8412E+03 6.0203E+02 1.2392E+03 10 10
500.- 520. 5.9012E+04 4.4581E+01 0.0000E+00 4.4581E+01 1.1705E+05 1.0521E+02 0.0000E+00 1.0521E+02 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3825E+07 1.7504E+04 4.6228E+03 1.2882E+04 2.7604E+07 2.7935E+04 9.5342E+03 1.8401E+04 73 132
1.3837E+07 1.8326E+04 4.8633E+03 1.3462E+04 2.7610E+07 2.8682E+04 1.0167E+04 1.8514E+04 78 124
DAMAGE IN LAYER 1 : 4.5116E+04
DAMAGE IN LAYER 1 : 4.6871E+04
DAMAGE IN LAYER 2 : 9.9949E+04
DAMAGE IN LAYER 2 : 1.0043E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.0894E-03 REL.MEAN ENERGY = 3.4045E-01 MEAN ENERGY = 5.1067E+03
PART.REFL.COEF.= 4.2000E-03 ENERGY REFL.COEF.= 1.6107E-03 REL.MEAN ENERGY = 3.8349E-01 MEAN ENERGY = 5.7523E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 5.1067E+03 1.4385E+07 1.0465E+00 3.1655E+00 3.7927E+03 9.4819E+02 5.2920E+06 4.3737E-01
PATHLENGTH 6.5619E+02 7.3244E+04 -9.9347E-01 3.1236E+00 2.7064E+02 6.7659E+01 2.6684E+04 4.2543E-01
ELASTIC LOSS 1.8131E+02 2.1916E+03 4.6814E+01 2.9259E+00
INEL. LOSS 9.7106E+03 1.5088E+07 3.8844E+03 2.4277E+02
ENERGY 5.7523E+03 1.8746E+07 1.6175E-01 1.4442E+00 4.3297E+03 9.4481E+02 2.7265E+06 3.6493E-01
PATHLENGTH 6.2081E+02 1.0124E+05 -2.4812E-02 1.5207E+00 3.1819E+02 6.9434E+01 1.5943E+04 3.4047E-01
ELASTIC LOSS 2.1040E+02 4.2519E+03 6.5207E+01 3.1051E+00
INEL. LOSS 8.9816E+03 1.8920E+07 4.3497E+03 2.0713E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 5.1067E+03 4.0464E+07 4.1065E+11 4.7522E+15 5.9142E+19 7.6826E+23
LOGENERGY 3.5836E+00 1.2959E+01 4.7269E+01 1.7386E+02 6.4450E+02 2.4070E+03
PATHLENGTH 6.5619E+02 5.0383E+05 4.0704E+08 3.3970E+11 2.9024E+14 2.5252E+17
ENERGY 5.7523E+03 5.1835E+07 5.2697E+11 5.6263E+15 6.1774E+19 6.9137E+23
LOGENERGY 3.5477E+00 1.2836E+01 4.7241E+01 1.7640E+02 6.6667E+02 2.5449E+03
PATHLENGTH 6.2081E+02 4.8665E+05 4.2703E+08 3.9626E+11 3.7929E+14 3.7001E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -291,5 +294,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 1 2 2 0 0 1 2 1 1 0 1 0 1 0 0 1 0 2 1
0.000 1.250 2.500 2.500 0.000 0.000 1.250 2.500 1.250 1.250 0.000 1.250 0.000 1.250 0.000 0.000 1.250 0.000 2.500 1.250
0 1 0 1 0 1 0 1 1 0 1 1 3 2 0 3 1 1 2 2
0.000 0.952 0.000 0.952 0.000 0.952 0.000 0.952 0.952 0.000 0.952 0.952 2.857 1.905 0.000 2.857 0.952 0.952 1.905 1.905
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.rge
+60 -58
View File
@@ -1,71 +1,71 @@
DEPTH PARTICLES
10.0000 1
30.0000 1
50.0000 0
70.0000 0
30.0000 0
50.0000 1
70.0000 1
90.0000 3
110.0000 1
110.0000 6
130.0000 1
150.0000 3
150.0000 0
170.0000 3
190.0000 0
210.0000 2
230.0000 4
250.0000 6
270.0000 5
290.0000 3
310.0000 6
330.0000 6
350.0000 4
370.0000 6
390.0000 18
410.0000 5
430.0000 9
450.0000 16
470.0000 13
490.0000 21
190.0000 4
210.0000 0
230.0000 5
250.0000 3
270.0000 3
290.0000 6
310.0000 3
330.0000 7
350.0000 8
370.0000 3
390.0000 6
410.0000 15
430.0000 4
450.0000 15
470.0000 15
490.0000 17
510.0000 15
530.0000 21
550.0000 30
570.0000 18
590.0000 24
610.0000 34
630.0000 44
650.0000 42
670.0000 47
690.0000 57
710.0000 51
730.0000 68
750.0000 60
770.0000 86
790.0000 93
810.0000 103
830.0000 135
850.0000 136
530.0000 18
550.0000 24
570.0000 24
590.0000 31
610.0000 29
630.0000 43
650.0000 31
670.0000 51
690.0000 63
710.0000 39
730.0000 58
750.0000 64
770.0000 65
790.0000 105
810.0000 121
830.0000 121
850.0000 127
870.0000 161
890.0000 157
910.0000 190
930.0000 208
950.0000 227
970.0000 199
990.0000 277
1010.0000 245
1030.0000 280
1050.0000 303
1070.0000 274
1090.0000 278
1110.0000 269
1130.0000 213
1150.0000 166
1170.0000 148
1190.0000 92
1210.0000 44
890.0000 188
910.0000 171
930.0000 235
950.0000 235
970.0000 261
990.0000 265
1010.0000 268
1030.0000 275
1050.0000 273
1070.0000 273
1090.0000 274
1110.0000 223
1130.0000 234
1150.0000 162
1170.0000 130
1190.0000 75
1210.0000 66
1230.0000 29
1250.0000 14
1270.0000 4
1290.0000 4
1310.0000 0
1330.0000 1
1290.0000 3
1310.0000 1
1330.0000 0
1350.0000 0
1370.0000 0
1390.0000 0
@@ -74,3 +74,5 @@
1450.0000 0
1470.0000 0
1490.0000 0
1510.0000 0
1530.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
15.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.9528E+03 0.1802E+03 0.5107E+04 0.3793E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 137 4847
15.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.9526E+03 0.1782E+03 0.5752E+04 0.4330E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 4849
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.out
+145 -145
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:58
Start: 19.Jun. 2026 18:18:15
End: 18.Jun. 2026 09:56:01
End: 19.Jun. 2026 18:18:16
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
46088 0 0 0 0 0 0 0 0
46200 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4986 ENERGY=0.8476E+08 EV
BACKSCATTERED PARTICLES= 14 ENERGY=0.6703E+05 EV
IMPLANTED PARTICLES= 4983 ENERGY=0.8471E+08 EV
BACKSCATTERED PARTICLES= 17 ENERGY=0.7709E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,179 +122,178 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 79 79
IMPLANTED PARTICLES (LAYER 1)= 75 75
IMPLANTED PARTICLES (LAYER 2)= 4907 4907
IMPLANTED PARTICLES (LAYER 2)= 4908 4908
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 584.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.073
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.383
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 585.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.071
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.363
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.1052E+03 4.1100E+04 -1.4905E+00 6.2243E+00 2.0273E+02 2.8711E+00 1.3304E+03 5.7003E-02
SPREAD 4.1607E+02 4.7633E+04 5.3957E-01 2.8040E+00 2.1825E+02 3.0909E+00 9.0606E+02 2.5503E-02
PATHLENGTH 1.4887E+03 1.9988E+03 -2.1252E-01 3.5124E+00 4.4708E+01 6.3315E-01 4.4868E+01 4.3559E-02
ELASTIC LOSS 3.0027E+01 4.3913E+02 2.0955E+01 4.2028E-03
INEL. LOSS 1.6969E+04 2.0388E+05 4.5153E+02 9.0561E-02
PENETRATION 1.1143E+03 3.8909E+04 -1.4722E+00 6.0884E+00 1.9725E+02 2.7943E+00 1.2433E+03 5.7287E-02
SPREAD 4.1158E+02 4.4931E+04 5.1771E-01 2.7608E+00 2.1197E+02 3.0028E+00 8.4462E+02 2.5306E-02
PATHLENGTH 1.4907E+03 2.0100E+03 -2.1924E-01 3.5130E+00 4.4833E+01 6.3512E-01 4.5139E+01 4.8529E-02
ELASTIC LOSS 2.9599E+01 4.1467E+02 2.0363E+01 4.0866E-03
INEL. LOSS 1.6986E+04 2.0641E+05 4.5433E+02 9.1176E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.1828E-02 8.9393E-01 1.1434E+02 2.3278E+04 9.4548E-01 5.5288E-04 7.9752E-02 1.1937E+01
WEAK EL.LOSS 3.2766E-04 1.8181E-06 7.1123E+00 7.1106E+01 1.3484E-03 7.8847E-07 8.9016E-09 3.8458E-02
INELAST.LOSS 2.8987E+01 9.0092E+01 -1.6350E+00 4.4139E+00 9.4917E+00 5.5504E-03 9.7340E-02 1.6093E-03
SUBTHR.LOSS 4.4192E-02 2.1795E-01 3.0450E+01 1.2527E+03 4.6686E-01 2.7302E-04 4.5094E-03 2.6666E-01
ELAST.LOSS 5.1398E-02 9.7934E-01 1.3964E+02 3.4698E+04 9.8962E-01 5.7845E-04 1.0663E-01 1.5262E+01
WEAK EL.LOSS 3.2677E-04 1.8045E-06 7.0632E+00 6.9598E+01 1.3433E-03 7.8519E-07 8.7359E-09 3.7337E-02
INELAST.LOSS 2.8990E+01 8.9934E+01 -1.6382E+00 4.4249E+00 9.4834E+00 5.5432E-03 9.7284E-02 1.6114E-03
SUBTHR.LOSS 4.3723E-02 2.1075E-01 3.1019E+01 1.3136E+03 4.5908E-01 2.6835E-04 4.4634E-03 2.7706E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.1052E+03 1.2626E+06 1.4740E+09 1.7490E+12 2.1031E+15 2.5571E+18
PENETRATION 1.1143E+03 1.2807E+06 1.5025E+09 1.7907E+12 2.1614E+15 2.6365E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2006E-03 0 1.4637E+06 9.3806E+02 9.3675E+02 8.1566E+01 8.5518E+02 5.8827E+01 1
20.- 40. 1 0.2006E-03 0 1.4732E+06 1.2679E+03 1.2663E+03 4.5501E+02 8.1126E+02 3.2788E+02 5
40.- 60. 2 0.4011E-03 0 1.4895E+06 1.1093E+03 1.1078E+03 3.7292E+02 7.3483E+02 2.7009E+02 3
60.- 80. 0 0.0000E+00 0 1.4926E+06 1.2903E+03 1.2888E+03 3.1284E+02 9.7595E+02 2.3544E+02 7
80.- 100. 3 0.6017E-03 0 1.5044E+06 9.6379E+02 9.6153E+02 1.8844E+02 7.7309E+02 1.4450E+02 4
100.- 120. 1 0.2006E-03 0 1.5129E+06 1.9183E+03 1.9166E+03 1.0703E+03 8.4634E+02 7.3890E+02 10
120.- 140. 4 0.8022E-03 0 1.5270E+06 9.1061E+02 9.0751E+02 1.3839E+02 7.6912E+02 1.0565E+02 4
140.- 160. 3 0.6017E-03 0 1.5370E+06 1.3173E+03 1.3148E+03 3.4014E+02 9.7469E+02 2.4958E+02 5
160.- 180. 1 0.2006E-03 0 1.5520E+06 1.5126E+03 1.5110E+03 6.1074E+02 9.0024E+02 4.4814E+02 7
180.- 200. 3 0.6017E-03 0 1.5644E+06 1.3798E+03 1.3772E+03 4.4073E+02 9.3648E+02 3.1198E+02 4
200.- 220. 0 0.0000E+00 0 1.5851E+06 2.0196E+03 2.0179E+03 1.0353E+03 9.8258E+02 7.5078E+02 12
220.- 240. 3 0.6017E-03 0 1.5972E+06 1.0957E+03 1.0934E+03 9.5521E+01 9.9791E+02 7.1958E+01 2
240.- 260. 1 0.2006E-03 0 1.6087E+06 1.2353E+03 1.2334E+03 3.1170E+02 9.2169E+02 2.3360E+02 5
260.- 280. 5 0.1003E-02 0 1.6224E+06 1.4071E+03 1.4034E+03 3.4897E+02 1.0544E+03 2.6427E+02 6
280.- 300. 2 0.4011E-03 0 1.6394E+06 1.5441E+03 1.5417E+03 5.2792E+02 1.0138E+03 3.7347E+02 5
300.- 320. 1 0.2006E-03 0 1.6463E+06 1.8452E+03 1.8432E+03 5.8195E+02 1.2613E+03 4.3104E+02 9
320.- 340. 5 0.1003E-02 0 1.6510E+06 1.4162E+03 1.4128E+03 3.6535E+02 1.0475E+03 2.7444E+02 7
340.- 360. 4 0.8022E-03 0 1.6522E+06 2.0097E+03 2.0059E+03 7.7278E+02 1.2331E+03 5.4688E+02 9
360.- 380. 3 0.6017E-03 0 1.6696E+06 2.2130E+03 2.2095E+03 9.3787E+02 1.2716E+03 6.7963E+02 12
380.- 400. 7 0.1404E-02 0 1.6784E+06 1.4985E+03 1.4949E+03 3.3997E+02 1.1549E+03 2.4335E+02 5
400.- 420. 4 0.8022E-03 0 1.6886E+06 1.8377E+03 1.8325E+03 6.1718E+02 1.2153E+03 4.5860E+02 9
420.- 440. 8 0.1604E-02 0 1.7023E+06 1.8569E+03 1.8518E+03 5.3450E+02 1.3173E+03 3.9243E+02 9
440.- 460. 2 0.4011E-03 0 1.7164E+06 1.9559E+03 1.9525E+03 5.8939E+02 1.3631E+03 4.3279E+02 8
460.- 480. 2 0.4011E-03 0 1.7264E+06 1.6148E+03 1.6109E+03 1.9892E+02 1.4120E+03 1.4875E+02 3
480.- 500. 13 0.2607E-02 0 1.7401E+06 2.3396E+03 2.3325E+03 8.6199E+02 1.4705E+03 6.0954E+02 9
500.- 520. 13 0.2607E-02 0 1.4299E+06 1.8287E+03 1.8256E+03 4.8383E+02 1.3418E+03 3.6086E+02 7
520.- 540. 11 0.2206E-02 0 1.4032E+06 1.8197E+03 1.8171E+03 3.9695E+02 1.4201E+03 2.9351E+02 5
540.- 560. 14 0.2808E-02 0 1.4151E+06 1.6371E+03 1.6340E+03 4.3003E+02 1.2040E+03 3.2479E+02 8
560.- 580. 15 0.3008E-02 0 1.4362E+06 2.0190E+03 2.0159E+03 7.3238E+02 1.2835E+03 5.4944E+02 12
580.- 600. 9 0.1805E-02 0 1.4473E+06 1.8195E+03 1.8172E+03 5.1399E+02 1.3032E+03 3.8633E+02 9
600.- 620. 10 0.2006E-02 0 1.4577E+06 1.8907E+03 1.8880E+03 5.2438E+02 1.3636E+03 3.9912E+02 11
620.- 640. 18 0.3610E-02 0 1.4738E+06 1.8673E+03 1.8633E+03 3.5795E+02 1.5053E+03 2.6774E+02 6
640.- 660. 26 0.5215E-02 0 1.4686E+06 2.2326E+03 2.2274E+03 4.4324E+02 1.7841E+03 3.3592E+02 9
660.- 680. 24 0.4813E-02 0 1.4601E+06 2.1575E+03 2.1525E+03 3.2138E+02 1.8311E+03 2.4203E+02 6
680.- 700. 19 0.3811E-02 0 1.4427E+06 1.8304E+03 1.8260E+03 2.5760E+02 1.5684E+03 1.9326E+02 4
700.- 720. 27 0.5415E-02 0 1.4569E+06 2.2863E+03 2.2810E+03 6.0150E+02 1.6795E+03 4.5401E+02 11
720.- 740. 27 0.5415E-02 0 1.4468E+06 2.1630E+03 2.1571E+03 5.1152E+02 1.6456E+03 3.8986E+02 11
740.- 760. 32 0.6418E-02 0 1.4416E+06 2.2491E+03 2.2425E+03 3.8807E+02 1.8545E+03 2.9522E+02 8
760.- 780. 43 0.8624E-02 0 1.4445E+06 2.4956E+03 2.4873E+03 5.4291E+02 1.9444E+03 4.1271E+02 11
780.- 800. 51 0.1023E-01 0 1.4287E+06 2.3077E+03 2.2986E+03 3.0202E+02 1.9966E+03 2.3114E+02 7
800.- 820. 37 0.7421E-02 0 1.4205E+06 2.6946E+03 2.6866E+03 3.9620E+02 2.2904E+03 3.0240E+02 9
820.- 840. 41 0.8223E-02 0 1.4153E+06 2.7567E+03 2.7481E+03 3.9746E+02 2.3506E+03 3.0192E+02 8
840.- 860. 46 0.9226E-02 0 1.3971E+06 2.6260E+03 2.6163E+03 3.6922E+02 2.2471E+03 2.8164E+02 8
860.- 880. 69 0.1384E-01 0 1.3819E+06 3.0166E+03 3.0040E+03 3.8026E+02 2.6238E+03 2.9283E+02 10
880.- 900. 77 0.1544E-01 0 1.3578E+06 3.1806E+03 3.1667E+03 2.6513E+02 2.9016E+03 2.0425E+02 7
900.- 920. 61 0.1223E-01 0 1.3286E+06 3.0297E+03 3.0168E+03 3.0869E+02 2.7081E+03 2.3749E+02 8
920.- 940. 78 0.1564E-01 0 1.3137E+06 3.6138E+03 3.5985E+03 3.7304E+02 3.2255E+03 2.8467E+02 8
940.- 960. 87 0.1745E-01 0 1.2797E+06 3.2328E+03 3.2158E+03 1.4356E+02 3.0722E+03 1.1088E+02 4
960.- 980. 88 0.1765E-01 0 1.2220E+06 3.5169E+03 3.4986E+03 2.0476E+02 3.2939E+03 1.5725E+02 5
980.- 1000. 127 0.2547E-01 0 1.1747E+06 3.5769E+03 3.5537E+03 2.0473E+02 3.3490E+03 1.5704E+02 5
1000.- 1020. 142 0.2848E-01 0 1.1278E+06 3.7411E+03 3.7154E+03 1.1112E+02 3.6042E+03 8.5719E+01 3
1020.- 1040. 155 0.3109E-01 0 1.0622E+06 3.7111E+03 3.6828E+03 1.1802E+02 3.5648E+03 9.0781E+01 3
1040.- 1060. 159 0.3189E-01 0 1.0046E+06 3.6638E+03 3.6347E+03 6.9265E+01 3.5654E+03 5.3595E+01 2
1060.- 1080. 158 0.3169E-01 0 9.4299E+05 3.9012E+03 3.8710E+03 3.5393E+01 3.8356E+03 2.7364E+01 1
1080.- 1100. 182 0.3650E-01 0 8.7299E+05 3.8502E+03 3.8155E+03 0.0000E+00 3.8155E+03 0.0000E+00 0
1100.- 1120. 227 0.4553E-01 0 7.9378E+05 3.8841E+03 3.8452E+03 0.0000E+00 3.8452E+03 0.0000E+00 0
1120.- 1140. 237 0.4753E-01 0 7.2322E+05 3.8133E+03 3.7690E+03 0.0000E+00 3.7690E+03 0.0000E+00 0
1140.- 1160. 228 0.4573E-01 0 6.3668E+05 3.6905E+03 3.6489E+03 0.0000E+00 3.6489E+03 0.0000E+00 0
1160.- 1180. 233 0.4673E-01 0 5.7348E+05 3.5468E+03 3.5026E+03 0.0000E+00 3.5026E+03 0.0000E+00 0
1180.- 1200. 286 0.5736E-01 0 4.8568E+05 3.3811E+03 3.3342E+03 3.2357E+01 3.3019E+03 2.5113E+01 1
1200.- 1220. 265 0.5315E-01 0 4.1275E+05 3.2571E+03 3.2088E+03 0.0000E+00 3.2088E+03 0.0000E+00 0
1220.- 1240. 298 0.5977E-01 0 3.3149E+05 2.8786E+03 2.8282E+03 0.0000E+00 2.8282E+03 0.0000E+00 0
1240.- 1260. 257 0.5154E-01 0 2.5314E+05 2.3664E+03 2.3225E+03 0.0000E+00 2.3225E+03 0.0000E+00 0
1260.- 1280. 232 0.4653E-01 0 1.9324E+05 1.9367E+03 1.8970E+03 0.0000E+00 1.8970E+03 0.0000E+00 0
1280.- 1300. 190 0.3811E-01 1 1.3534E+05 1.4317E+03 1.3991E+03 0.0000E+00 1.3991E+03 0.0000E+00 0
1300.- 1320. 180 0.3610E-01 1 9.5479E+04 1.1470E+03 1.1181E+03 0.0000E+00 1.1181E+03 0.0000E+00 0
1320.- 1340. 157 0.3149E-01 12 6.4199E+04 8.0551E+02 7.7956E+02 0.0000E+00 7.7956E+02 0.0000E+00 0
1340.- 1360. 109 0.2186E-01 20 3.8067E+04 5.6062E+02 5.4339E+02 0.0000E+00 5.4339E+02 0.0000E+00 0
1360.- 1380. 81 0.1625E-01 43 1.9589E+04 2.9772E+02 2.8616E+02 0.0000E+00 2.8616E+02 0.0000E+00 0
1380.- 1400. 32 0.6418E-02 68 1.0168E+04 1.6334E+02 1.5755E+02 0.0000E+00 1.5755E+02 0.0000E+00 0
1400.- 1420. 28 0.5616E-02 149 4.6725E+03 8.3069E+01 7.9255E+01 0.0000E+00 7.9255E+01 0.0000E+00 0
1420.- 1440. 14 0.2808E-02 337 2.7524E+03 4.3489E+01 4.1436E+01 0.0000E+00 4.1436E+01 0.0000E+00 0
1440.- 1460. 4 0.8022E-03 591 8.5362E+02 1.3145E+01 1.2505E+01 0.0000E+00 1.2505E+01 0.0000E+00 0
1460.- 1480. 1 0.2006E-03 853 5.9211E+02 1.0857E+01 1.0568E+01 0.0000E+00 1.0568E+01 0.0000E+00 0
1480.- 1500. 2 0.4011E-03 913 3.6451E+01 1.1615E+00 9.9420E-01 0.0000E+00 9.9420E-01 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 812 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 581 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 346 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 170 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 63 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 20 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 0 0.0000E+00 0 1.4649E+06 1.0620E+03 1.0610E+03 3.4971E+02 7.1130E+02 2.6143E+02 6
20.- 40. 0 0.0000E+00 0 1.4746E+06 1.1919E+03 1.1909E+03 4.2204E+02 7.6889E+02 2.9441E+02 5
40.- 60. 2 0.4014E-03 0 1.4806E+06 1.2264E+03 1.2247E+03 4.4172E+02 7.8300E+02 3.3114E+02 8
60.- 80. 0 0.0000E+00 0 1.4911E+06 8.1722E+02 8.1606E+02 3.9017E+01 7.7704E+02 3.0414E+01 1
80.- 100. 2 0.4014E-03 0 1.5021E+06 1.2788E+03 1.2768E+03 4.1730E+02 8.5946E+02 3.0877E+02 8
100.- 120. 1 0.2007E-03 0 1.5144E+06 1.3999E+03 1.3984E+03 5.3558E+02 8.6284E+02 3.5996E+02 3
120.- 140. 4 0.8027E-03 0 1.5287E+06 1.7103E+03 1.7077E+03 8.8013E+02 8.2754E+02 5.9114E+02 7
140.- 160. 1 0.2007E-03 0 1.5401E+06 1.7449E+03 1.7431E+03 6.6772E+02 1.0753E+03 4.3378E+02 3
160.- 180. 1 0.2007E-03 0 1.5485E+06 1.2230E+03 1.2214E+03 3.8570E+02 8.3566E+02 2.8410E+02 6
180.- 200. 2 0.4014E-03 0 1.5590E+06 1.3603E+03 1.3583E+03 4.2413E+02 9.3415E+02 3.1103E+02 6
200.- 220. 1 0.2007E-03 0 1.5842E+06 1.5174E+03 1.5155E+03 6.3098E+02 8.8447E+02 4.4416E+02 6
220.- 240. 3 0.6020E-03 0 1.5871E+06 1.4176E+03 1.4147E+03 4.6876E+02 9.4592E+02 3.4375E+02 6
240.- 260. 3 0.6020E-03 0 1.5968E+06 1.5869E+03 1.5847E+03 4.9194E+02 1.0927E+03 3.4769E+02 5
260.- 280. 1 0.2007E-03 0 1.6040E+06 1.3097E+03 1.3077E+03 2.7302E+02 1.0347E+03 2.0801E+02 5
280.- 300. 3 0.6020E-03 0 1.6270E+06 1.5860E+03 1.5836E+03 5.6848E+02 1.0151E+03 3.9488E+02 6
300.- 320. 3 0.6020E-03 0 1.6371E+06 1.4333E+03 1.4301E+03 5.0033E+02 9.2975E+02 3.7484E+02 8
320.- 340. 3 0.6020E-03 0 1.6404E+06 1.6064E+03 1.6036E+03 6.4668E+02 9.5696E+02 4.6282E+02 8
340.- 360. 2 0.4014E-03 0 1.6573E+06 1.3710E+03 1.3683E+03 2.8635E+02 1.0820E+03 2.1346E+02 5
360.- 380. 4 0.8027E-03 0 1.6625E+06 1.9642E+03 1.9606E+03 8.3771E+02 1.1229E+03 6.1233E+02 10
380.- 400. 4 0.8027E-03 0 1.6749E+06 1.9694E+03 1.9657E+03 5.9277E+02 1.3729E+03 4.4380E+02 10
400.- 420. 10 0.2007E-02 0 1.6856E+06 1.6152E+03 1.6085E+03 4.1224E+02 1.1962E+03 3.0267E+02 6
420.- 440. 5 0.1003E-02 0 1.6874E+06 1.7613E+03 1.7575E+03 4.6952E+02 1.2880E+03 3.3214E+02 6
440.- 460. 3 0.6020E-03 0 1.7039E+06 2.1221E+03 2.1184E+03 7.3565E+02 1.3827E+03 5.2033E+02 8
460.- 480. 5 0.1003E-02 0 1.7117E+06 1.8901E+03 1.8857E+03 6.5576E+02 1.2300E+03 4.7732E+02 10
480.- 500. 12 0.2408E-02 0 1.7280E+06 1.7620E+03 1.7547E+03 4.4710E+02 1.3076E+03 3.3099E+02 8
500.- 520. 9 0.1806E-02 0 1.4010E+06 1.6156E+03 1.6129E+03 3.3670E+02 1.2762E+03 2.4979E+02 5
520.- 540. 7 0.1405E-02 0 1.3828E+06 1.4942E+03 1.4924E+03 4.9034E+02 1.0021E+03 3.6136E+02 6
540.- 560. 8 0.1605E-02 0 1.3984E+06 1.7571E+03 1.7551E+03 4.2115E+02 1.3339E+03 3.1291E+02 6
560.- 580. 9 0.1806E-02 0 1.4212E+06 1.3953E+03 1.3931E+03 2.0192E+02 1.1912E+03 1.5484E+02 5
580.- 600. 12 0.2408E-02 0 1.4153E+06 1.5676E+03 1.5652E+03 1.9107E+02 1.3741E+03 1.4459E+02 4
600.- 620. 6 0.1204E-02 0 1.4454E+06 1.7641E+03 1.7619E+03 5.0368E+02 1.2582E+03 3.7826E+02 8
620.- 640. 14 0.2810E-02 0 1.4515E+06 2.0293E+03 2.0260E+03 6.2528E+02 1.4007E+03 4.7103E+02 11
640.- 660. 18 0.3612E-02 0 1.4589E+06 2.2453E+03 2.2419E+03 5.8563E+02 1.6562E+03 4.3910E+02 9
660.- 680. 13 0.2609E-02 0 1.4598E+06 2.0294E+03 2.0256E+03 3.3574E+02 1.6899E+03 2.5354E+02 6
680.- 700. 27 0.5418E-02 0 1.4576E+06 1.9042E+03 1.8994E+03 3.5795E+02 1.5415E+03 2.7145E+02 7
700.- 720. 19 0.3813E-02 0 1.4757E+06 2.2506E+03 2.2458E+03 4.2640E+02 1.8194E+03 3.2030E+02 7
720.- 740. 28 0.5619E-02 0 1.4638E+06 2.6109E+03 2.6048E+03 7.3196E+02 1.8729E+03 5.5216E+02 13
740.- 760. 39 0.7827E-02 0 1.4639E+06 2.1374E+03 2.1305E+03 3.1706E+02 1.8134E+03 2.4196E+02 7
760.- 780. 51 0.1023E-01 0 1.4514E+06 2.2746E+03 2.2652E+03 2.2278E+02 2.0424E+03 1.7046E+02 5
780.- 800. 38 0.7626E-02 0 1.4525E+06 2.8306E+03 2.8224E+03 6.7811E+02 2.1443E+03 5.1607E+02 14
800.- 820. 45 0.9031E-02 0 1.4574E+06 2.6451E+03 2.6358E+03 1.8395E+02 2.4518E+03 1.4018E+02 4
820.- 840. 54 0.1084E-01 0 1.4372E+06 3.0299E+03 3.0195E+03 5.5774E+02 2.4617E+03 4.2081E+02 10
840.- 860. 54 0.1084E-01 0 1.4174E+06 2.5866E+03 2.5756E+03 3.3021E+02 2.2454E+03 2.5332E+02 8
860.- 880. 67 0.1345E-01 0 1.3898E+06 3.0682E+03 3.0561E+03 4.6101E+02 2.5951E+03 3.5152E+02 10
880.- 900. 63 0.1264E-01 0 1.3653E+06 3.0828E+03 3.0692E+03 2.6421E+02 2.8050E+03 2.0206E+02 6
900.- 920. 76 0.1525E-01 0 1.3331E+06 3.1043E+03 3.0908E+03 4.0691E+02 2.6839E+03 3.1375E+02 11
920.- 940. 81 0.1626E-01 0 1.3058E+06 3.5192E+03 3.5028E+03 4.2737E+02 3.0754E+03 3.2889E+02 11
940.- 960. 84 0.1686E-01 0 1.2639E+06 3.1608E+03 3.1445E+03 1.0819E+02 3.0363E+03 8.3558E+01 3
960.- 980. 109 0.2187E-01 0 1.2201E+06 3.5391E+03 3.5199E+03 3.2118E+02 3.1987E+03 2.4812E+02 9
980.- 1000. 96 0.1927E-01 0 1.1527E+06 3.2481E+03 3.2283E+03 1.0486E+02 3.1235E+03 8.1097E+01 3
1000.- 1020. 114 0.2288E-01 0 1.1049E+06 3.3601E+03 3.3387E+03 7.3250E+01 3.2654E+03 5.6549E+01 2
1020.- 1040. 129 0.2589E-01 0 1.0657E+06 3.5208E+03 3.4964E+03 1.5173E+02 3.3447E+03 1.1693E+02 4
1040.- 1060. 151 0.3030E-01 0 9.9347E+05 3.7055E+03 3.6775E+03 8.2919E+01 3.5946E+03 6.3659E+01 2
1060.- 1080. 152 0.3050E-01 0 9.3271E+05 3.2403E+03 3.2114E+03 0.0000E+00 3.2114E+03 0.0000E+00 0
1080.- 1100. 172 0.3452E-01 0 8.8717E+05 3.8055E+03 3.7740E+03 0.0000E+00 3.7740E+03 0.0000E+00 0
1100.- 1120. 200 0.4014E-01 0 8.1008E+05 3.8372E+03 3.8006E+03 0.0000E+00 3.8006E+03 0.0000E+00 0
1120.- 1140. 221 0.4435E-01 0 7.4367E+05 3.9883E+03 3.9476E+03 0.0000E+00 3.9476E+03 0.0000E+00 0
1140.- 1160. 222 0.4455E-01 0 6.7865E+05 3.7052E+03 3.6649E+03 0.0000E+00 3.6649E+03 0.0000E+00 0
1160.- 1180. 253 0.5077E-01 0 6.0950E+05 3.9184E+03 3.8725E+03 0.0000E+00 3.8725E+03 0.0000E+00 0
1180.- 1200. 275 0.5519E-01 0 5.2239E+05 3.4174E+03 3.3681E+03 0.0000E+00 3.3681E+03 0.0000E+00 0
1200.- 1220. 270 0.5418E-01 0 4.3319E+05 3.3548E+03 3.3069E+03 0.0000E+00 3.3069E+03 0.0000E+00 0
1220.- 1240. 296 0.5940E-01 0 3.5587E+05 3.0885E+03 3.0366E+03 0.0000E+00 3.0366E+03 0.0000E+00 0
1240.- 1260. 310 0.6221E-01 0 2.7102E+05 2.5764E+03 2.5250E+03 0.0000E+00 2.5250E+03 0.0000E+00 0
1260.- 1280. 276 0.5539E-01 1 2.0772E+05 2.0789E+03 2.0337E+03 0.0000E+00 2.0337E+03 0.0000E+00 0
1280.- 1300. 220 0.4415E-01 1 1.5369E+05 1.6561E+03 1.6179E+03 0.0000E+00 1.6179E+03 0.0000E+00 0
1300.- 1320. 192 0.3853E-01 5 1.0425E+05 1.2847E+03 1.2520E+03 0.0000E+00 1.2520E+03 0.0000E+00 0
1320.- 1340. 175 0.3512E-01 10 6.7658E+04 8.7310E+02 8.4710E+02 0.0000E+00 8.4710E+02 0.0000E+00 0
1340.- 1360. 95 0.1906E-01 10 3.7125E+04 5.3630E+02 5.2045E+02 0.0000E+00 5.2045E+02 0.0000E+00 0
1360.- 1380. 73 0.1465E-01 32 2.1014E+04 3.0381E+02 2.9228E+02 0.0000E+00 2.9228E+02 0.0000E+00 0
1380.- 1400. 41 0.8228E-02 55 1.0672E+04 1.8145E+02 1.7524E+02 0.0000E+00 1.7524E+02 0.0000E+00 0
1400.- 1420. 26 0.5218E-02 158 4.3916E+03 8.3653E+01 7.9886E+01 0.0000E+00 7.9886E+01 0.0000E+00 0
1420.- 1440. 13 0.2609E-02 324 2.0931E+03 4.4305E+01 4.2362E+01 0.0000E+00 4.2362E+01 0.0000E+00 0
1440.- 1460. 5 0.1003E-02 607 5.9291E+02 1.5252E+01 1.4441E+01 0.0000E+00 1.4441E+01 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 779 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 883 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 859 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 606 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 353 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 192 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 86 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 17 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- SUT 0 0.0000E+00
1680.- SUT 0 0.0000E+00
4986 1.0000E+00 4986 8.4771E+07 1.5253E+05 1.5157E+05 2.2347E+04 1.2922E+05 1.6551E+04 367
4983 1.0000E+00 4983 8.4852E+07 1.5139E+05 1.5044E+05 2.2480E+04 1.2796E+05 1.6514E+04 356
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.9126E+05 3.5361E+02 0.0000E+00 3.5361E+02 9.7247E+05 5.8314E+02 8.1566E+01 5.0157E+02 0 1
20.- 40. 4.9924E+05 5.4650E+02 1.8118E+02 3.6532E+02 9.7397E+05 7.1977E+02 2.7383E+02 4.4594E+02 2 3
40.- 60. 4.9614E+05 5.8281E+02 3.2172E+02 2.6109E+02 9.9338E+05 5.2494E+02 5.1205E+01 4.7374E+02 2 1
60.- 80. 4.9719E+05 5.1162E+02 7.2837E+01 4.3879E+02 9.9542E+05 7.7716E+02 2.4000E+02 5.3716E+02 2 5
80.- 100. 5.0216E+05 5.1147E+02 1.5249E+02 3.5898E+02 1.0023E+06 4.5006E+02 3.5949E+01 4.1412E+02 3 1
100.- 120. 5.0644E+05 5.6672E+02 2.0935E+02 3.5737E+02 1.0065E+06 1.3499E+03 8.6094E+02 4.8896E+02 4 6
120.- 140. 5.0476E+05 3.0089E+02 3.3151E+01 2.6774E+02 1.0223E+06 6.0662E+02 1.0523E+02 5.0138E+02 1 3
140.- 160. 5.0911E+05 5.9986E+02 1.8464E+02 4.1523E+02 1.0279E+06 7.1496E+02 1.5550E+02 5.5946E+02 1 4
160.- 180. 5.1858E+05 7.9027E+02 4.0487E+02 3.8540E+02 1.0334E+06 7.2071E+02 2.0586E+02 5.1484E+02 4 3
180.- 200. 5.2163E+05 5.1167E+02 1.3829E+02 3.7338E+02 1.0428E+06 8.6554E+02 3.0245E+02 5.6309E+02 2 2
200.- 220. 5.3059E+05 9.2466E+02 5.2405E+02 4.0061E+02 1.0545E+06 1.0932E+03 5.1122E+02 5.8197E+02 5 7
220.- 240. 5.3925E+05 4.2671E+02 3.6311E+01 3.9040E+02 1.0579E+06 6.6672E+02 5.9210E+01 6.0751E+02 1 1
240.- 260. 5.3908E+05 5.7671E+02 2.0779E+02 3.6892E+02 1.0696E+06 6.5668E+02 1.0391E+02 5.5277E+02 3 2
260.- 280. 5.3775E+05 6.2348E+02 2.5300E+02 3.7047E+02 1.0846E+06 7.7991E+02 9.5963E+01 6.8395E+02 4 2
280.- 300. 5.3790E+05 5.7268E+02 1.8882E+02 3.8386E+02 1.1015E+06 9.6903E+02 3.3910E+02 6.2993E+02 2 3
300.- 320. 5.4850E+05 8.7705E+02 2.8896E+02 5.8809E+02 1.0978E+06 9.6616E+02 2.9300E+02 6.7316E+02 5 4
320.- 340. 5.5366E+05 6.5498E+02 1.5098E+02 5.0400E+02 1.0973E+06 7.5783E+02 2.1437E+02 5.4345E+02 3 4
340.- 360. 5.5290E+05 7.6587E+02 3.4200E+02 4.2387E+02 1.0993E+06 1.2400E+03 4.3078E+02 8.0920E+02 6 3
360.- 380. 5.4887E+05 7.2750E+02 3.1824E+02 4.0925E+02 1.1208E+06 1.4820E+03 6.1963E+02 8.6237E+02 6 6
380.- 400. 5.6294E+05 4.9436E+02 6.8999E+01 4.2537E+02 1.1154E+06 1.0005E+03 2.7097E+02 7.2954E+02 2 3
400.- 420. 5.5998E+05 9.1563E+02 3.4491E+02 5.7072E+02 1.1286E+06 9.1687E+02 2.7227E+02 6.4459E+02 4 5
420.- 440. 5.6650E+05 7.2395E+02 1.7902E+02 5.4493E+02 1.1358E+06 1.1278E+03 3.5548E+02 7.7232E+02 4 5
440.- 460. 5.6917E+05 8.1101E+02 2.7437E+02 5.3665E+02 1.1472E+06 1.1415E+03 3.1503E+02 8.2649E+02 4 4
460.- 480. 5.7645E+05 6.5358E+02 1.2153E+02 5.3206E+02 1.1500E+06 9.5729E+02 7.7395E+01 8.7990E+02 2 1
480.- 500. 5.7820E+05 8.6395E+02 2.1045E+02 6.5351E+02 1.1599E+06 1.4649E+03 6.5154E+02 8.1337E+02 4 5
500.- 520. 5.8675E+04 1.0904E+02 5.3689E+01 5.5348E+01 1.2111E+05 1.0957E+02 0.0000E+00 1.0957E+02 1 0
0.- 20. 4.8876E+05 5.2636E+02 1.9418E+02 3.3218E+02 9.7610E+05 5.3465E+02 1.5553E+02 3.7912E+02 3 3
20.- 40. 4.9428E+05 4.0805E+02 3.5868E+01 3.7218E+02 9.8036E+05 7.8288E+02 3.8617E+02 3.9671E+02 1 4
40.- 60. 4.9433E+05 6.1735E+02 2.7221E+02 3.4515E+02 9.8631E+05 6.0737E+02 1.6952E+02 4.3786E+02 6 2
60.- 80. 4.9410E+05 4.0496E+02 3.9017E+01 3.6595E+02 9.9697E+05 4.1110E+02 0.0000E+00 4.1110E+02 1 0
80.- 100. 5.0388E+05 3.8143E+02 3.9050E+01 3.4238E+02 9.9819E+05 8.9533E+02 3.7825E+02 5.1708E+02 1 7
100.- 120. 5.0817E+05 5.5610E+02 1.9805E+02 3.5805E+02 1.0062E+06 8.4232E+02 3.3754E+02 5.0479E+02 2 1
120.- 140. 5.1197E+05 4.4519E+02 1.2233E+02 3.2285E+02 1.0167E+06 1.2625E+03 7.5780E+02 5.0468E+02 1 6
140.- 160. 5.1291E+05 4.3631E+02 0.0000E+00 4.3631E+02 1.0271E+06 1.3068E+03 6.6772E+02 6.3903E+02 0 3
160.- 180. 5.1187E+05 4.9868E+02 1.2839E+02 3.7029E+02 1.0367E+06 7.2268E+02 2.5731E+02 4.6537E+02 3 3
180.- 200. 5.1726E+05 5.0486E+02 8.3315E+01 4.2155E+02 1.0417E+06 8.5342E+02 3.4082E+02 5.1260E+02 1 5
200.- 220. 5.2971E+05 5.4384E+02 1.6402E+02 3.7983E+02 1.0545E+06 9.7161E+02 4.6696E+02 5.0465E+02 2 4
220.- 240. 5.3356E+05 8.0340E+02 3.4028E+02 4.6312E+02 1.0535E+06 6.1128E+02 1.2848E+02 4.8280E+02 3 3
240.- 260. 5.3834E+05 5.2371E+02 1.0241E+02 4.2130E+02 1.0585E+06 1.0610E+03 3.8953E+02 6.7144E+02 2 3
260.- 280. 5.3559E+05 6.3636E+02 2.2554E+02 4.1082E+02 1.0684E+06 6.7132E+02 4.7480E+01 6.2384E+02 4 1
280.- 300. 5.4681E+05 5.4370E+02 1.0528E+02 4.3842E+02 1.0802E+06 1.0399E+03 4.6320E+02 5.7667E+02 2 4
300.- 320. 5.5424E+05 6.8979E+02 3.2336E+02 3.6643E+02 1.0829E+06 7.4029E+02 1.7696E+02 5.6332E+02 4 4
320.- 340. 5.4619E+05 5.3354E+02 1.7676E+02 3.5678E+02 1.0942E+06 1.0701E+03 4.6991E+02 6.0018E+02 4 4
340.- 360. 5.5046E+05 4.9464E+02 1.2451E+02 3.7013E+02 1.1068E+06 8.7366E+02 1.6184E+02 7.1183E+02 3 2
360.- 380. 5.5198E+05 9.9559E+02 5.4169E+02 4.5390E+02 1.1105E+06 9.6499E+02 2.9602E+02 6.6897E+02 7 3
380.- 400. 5.5657E+05 8.4173E+02 3.2443E+02 5.1730E+02 1.1183E+06 1.1239E+03 2.6834E+02 8.5561E+02 5 5
400.- 420. 5.5788E+05 6.6697E+02 1.5468E+02 5.1229E+02 1.1278E+06 9.4151E+02 2.5756E+02 6.8395E+02 1 5
420.- 440. 5.6254E+05 5.1850E+02 5.6296E+01 4.6220E+02 1.1249E+06 1.2390E+03 4.1322E+02 8.2580E+02 1 5
440.- 460. 5.6703E+05 6.9299E+02 9.0885E+01 6.0211E+02 1.1369E+06 1.4254E+03 6.4476E+02 7.8061E+02 1 7
460.- 480. 5.7419E+05 7.1182E+02 2.3098E+02 4.8084E+02 1.1375E+06 1.1739E+03 4.2478E+02 7.4912E+02 3 7
480.- 500. 5.7612E+05 6.5060E+02 1.3133E+02 5.1927E+02 1.1503E+06 1.1004E+03 3.1577E+02 7.8459E+02 3 5
500.- 520. 6.2002E+04 6.1303E+01 0.0000E+00 6.1303E+01 1.1663E+05 1.4888E+02 3.7063E+01 1.1181E+02 0 1
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3407E+07 1.5997E+04 5.2616E+03 1.0735E+04 2.6812E+07 2.2643E+04 6.9224E+03 1.5720E+04 77 84
1.3381E+07 1.4688E+04 4.2049E+03 1.0483E+04 2.6688E+07 2.3376E+04 8.4125E+03 1.4964E+04 64 97
DAMAGE IN LAYER 1 : 3.8424E+04
DAMAGE IN LAYER 1 : 3.7857E+04
DAMAGE IN LAYER 2 : 1.1314E+05
DAMAGE IN LAYER 2 : 1.1258E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.8000E-03 ENERGY REFL.COEF.= 7.8853E-04 REL.MEAN ENERGY = 2.8162E-01 MEAN ENERGY = 4.7875E+03
PART.REFL.COEF.= 3.4000E-03 ENERGY REFL.COEF.= 9.0690E-04 REL.MEAN ENERGY = 2.6674E-01 MEAN ENERGY = 4.5345E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 4.7875E+03 2.2272E+07 7.9005E-01 2.1294E+00 4.7193E+03 1.2613E+03 6.3260E+06 5.0253E-01
PATHLENGTH 8.3535E+02 1.3029E+05 -6.0143E-01 2.1768E+00 3.6095E+02 9.6469E+01 3.7774E+04 4.3177E-01
ELASTIC LOSS 2.0071E+02 5.2685E+03 7.2584E+01 5.1846E+00
INEL. LOSS 1.1811E+04 2.2932E+07 4.7887E+03 3.4205E+02
ENERGY 4.5345E+03 1.7418E+07 1.0554E+00 2.5564E+00 4.1735E+03 1.0122E+03 5.2704E+06 5.3771E-01
PATHLENGTH 8.5340E+02 9.1546E+04 -8.0169E-01 2.3717E+00 3.0257E+02 7.3383E+01 2.6004E+04 4.3996E-01
ELASTIC LOSS 2.2965E+02 8.2810E+03 9.1000E+01 5.3529E+00
INEL. LOSS 1.2310E+04 1.7488E+07 4.1819E+03 2.4599E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 4.7875E+03 4.5192E+07 5.1266E+11 6.2348E+15 7.8528E+19 1.0099E+24
LOGENERGY 3.3405E+00 1.1596E+01 4.1452E+01 1.5155E+02 5.6401E+02 2.1291E+03
PATHLENGTH 8.3535E+02 8.2810E+05 8.8114E+08 9.7488E+11 1.1078E+15 1.2851E+18
ENERGY 4.5345E+03 3.7980E+07 4.0691E+11 4.7389E+15 5.6990E+19 6.9676E+23
LOGENERGY 3.4471E+00 1.2110E+01 4.3237E+01 1.5654E+02 5.7388E+02 2.1275E+03
PATHLENGTH 8.5340E+02 8.1984E+05 8.3370E+08 8.7452E+11 9.3671E+14 1.0202E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -301,5 +301,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 0 1 0 0 1 0 1 1 2 1 1 1 1 1 1 0
0.000 0.000 0.000 2.857 0.000 1.429 0.000 0.000 1.429 0.000 1.429 1.429 2.857 1.429 1.429 1.429 1.429 1.429 1.429 0.000
0 0 0 0 2 0 0 0 0 1 2 2 0 1 1 1 3 0 1 3
0.000 0.000 0.000 0.000 2.353 0.000 0.000 0.000 0.000 1.176 2.353 2.353 0.000 1.176 1.176 1.176 3.529 0.000 1.176 3.529
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.rge
+69 -70
View File
@@ -1,79 +1,79 @@
DEPTH PARTICLES
10.0000 1
30.0000 1
10.0000 0
30.0000 0
50.0000 2
70.0000 0
90.0000 3
90.0000 2
110.0000 1
130.0000 4
150.0000 3
150.0000 1
170.0000 1
190.0000 3
210.0000 0
190.0000 2
210.0000 1
230.0000 3
250.0000 1
270.0000 5
290.0000 2
310.0000 1
330.0000 5
350.0000 4
370.0000 3
390.0000 7
410.0000 4
430.0000 8
450.0000 2
470.0000 2
490.0000 13
510.0000 13
530.0000 11
550.0000 14
570.0000 15
590.0000 9
610.0000 10
630.0000 18
650.0000 26
670.0000 24
690.0000 19
710.0000 27
730.0000 27
750.0000 32
770.0000 43
790.0000 51
810.0000 37
830.0000 41
850.0000 46
870.0000 69
890.0000 77
910.0000 61
930.0000 78
950.0000 87
970.0000 88
990.0000 127
1010.0000 142
1030.0000 155
1050.0000 159
1070.0000 158
1090.0000 182
1110.0000 227
1130.0000 237
1150.0000 228
1170.0000 233
1190.0000 286
1210.0000 265
1230.0000 298
1250.0000 257
1270.0000 232
1290.0000 190
1310.0000 180
1330.0000 157
1350.0000 109
1370.0000 81
1390.0000 32
1410.0000 28
1430.0000 14
1450.0000 4
1470.0000 1
1490.0000 2
250.0000 3
270.0000 1
290.0000 3
310.0000 3
330.0000 3
350.0000 2
370.0000 4
390.0000 4
410.0000 10
430.0000 5
450.0000 3
470.0000 5
490.0000 12
510.0000 9
530.0000 7
550.0000 8
570.0000 9
590.0000 12
610.0000 6
630.0000 14
650.0000 18
670.0000 13
690.0000 27
710.0000 19
730.0000 28
750.0000 39
770.0000 51
790.0000 38
810.0000 45
830.0000 54
850.0000 54
870.0000 67
890.0000 63
910.0000 76
930.0000 81
950.0000 84
970.0000 109
990.0000 96
1010.0000 114
1030.0000 129
1050.0000 151
1070.0000 152
1090.0000 172
1110.0000 200
1130.0000 221
1150.0000 222
1170.0000 253
1190.0000 275
1210.0000 270
1230.0000 296
1250.0000 310
1270.0000 276
1290.0000 220
1310.0000 192
1330.0000 175
1350.0000 95
1370.0000 73
1390.0000 41
1410.0000 26
1430.0000 13
1450.0000 5
1470.0000 0
1490.0000 0
1510.0000 0
1530.0000 0
1550.0000 0
@@ -83,4 +83,3 @@
1630.0000 0
1650.0000 0
1670.0000 0
1690.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
17.00 0.45 0.00 15.00 5000 4986 14 0 5000 0 0.1105E+04 0.2027E+03 0.4788E+04 0.4719E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 79 4907
17.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1114E+04 0.1973E+03 0.4535E+04 0.4174E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 75 4908
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.out
+155 -155
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:59
Start: 19.Jun. 2026 18:18:15
End: 18.Jun. 2026 09:56:02
End: 19.Jun. 2026 18:18:17
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 5000 projectiles 2 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
51421 0 0 0 0 0 0 0 0
51499 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4983 ENERGY=0.9468E+08 EV
BACKSCATTERED PARTICLES= 17 ENERGY=0.1371E+06 EV
IMPLANTED PARTICLES= 4984 ENERGY=0.9470E+08 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.1313E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,189 +122,188 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 56 56
IMPLANTED PARTICLES (LAYER 1)= 53 53
IMPLANTED PARTICLES (LAYER 2)= 4927 4927
IMPLANTED PARTICLES (LAYER 2)= 4931 4931
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 653.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.427
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 653.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.454
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.2697E+03 4.8707E+04 -1.5507E+00 6.3902E+00 2.2070E+02 3.1264E+00 1.6019E+03 5.4248E-02
SPREAD 4.6336E+02 5.9426E+04 5.1695E-01 2.7662E+00 2.4377E+02 3.4534E+00 1.1188E+03 2.4635E-02
PATHLENGTH 1.6766E+03 2.3134E+03 -2.1891E-01 3.7334E+00 4.8098E+01 6.8137E-01 5.4184E+01 5.8394E-02
ELASTIC LOSS 3.1617E+01 5.0181E+02 2.2401E+01 4.4955E-03
INEL. LOSS 1.8963E+04 2.0934E+05 4.5754E+02 9.1820E-02
PENETRATION 1.2728E+03 4.8940E+04 -1.6457E+00 6.8918E+00 2.2122E+02 3.1336E+00 1.6827E+03 5.8455E-02
SPREAD 4.6449E+02 5.8431E+04 5.3165E-01 2.7808E+00 2.4172E+02 3.4240E+00 1.1045E+03 2.5211E-02
PATHLENGTH 1.6771E+03 2.2833E+03 -2.2917E-01 3.6962E+00 4.7784E+01 6.7685E-01 5.3107E+01 5.5548E-02
ELASTIC LOSS 3.1606E+01 5.2227E+02 2.2853E+01 4.5853E-03
INEL. LOSS 1.8966E+04 2.0548E+05 4.5330E+02 9.0950E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.9204E-02 1.0677E+00 1.4753E+02 3.7198E+04 1.0333E+00 5.7172E-04 1.1393E-01 1.2944E+01
WEAK EL.LOSS 2.9073E-04 1.5942E-06 7.2668E+00 7.0776E+01 1.2626E-03 6.9863E-07 7.3684E-09 3.3492E-02
INELAST.LOSS 2.8985E+01 7.8251E+01 -1.8399E+00 5.1998E+00 8.8460E+00 4.8946E-03 8.8731E-02 1.6897E-03
SUBTHR.LOSS 4.1072E-02 2.0750E-01 3.1798E+01 1.3573E+03 4.5552E-01 2.5206E-04 4.2286E-03 2.6718E-01
ELAST.LOSS 4.9218E-02 1.1423E+00 1.6901E+02 5.0616E+04 1.0688E+00 5.9129E-04 1.4218E-01 1.9276E+01
WEAK EL.LOSS 2.9036E-04 1.5899E-06 7.3005E+00 7.2152E+01 1.2609E-03 6.9757E-07 7.4192E-09 3.4957E-02
INELAST.LOSS 2.8983E+01 7.8180E+01 -1.8405E+00 5.2024E+00 8.8419E+00 4.8917E-03 8.8665E-02 1.6901E-03
SUBTHR.LOSS 4.1014E-02 2.0837E-01 3.2110E+01 1.3927E+03 4.5647E-01 2.5255E-04 4.3007E-03 2.6930E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.2697E+03 1.6609E+06 2.2159E+09 3.0008E+12 4.1131E+15 5.6952E+18
PENETRATION 1.2728E+03 1.6690E+06 2.2311E+09 3.0261E+12 4.1528E+15 5.7560E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4114E+06 1.2488E+03 1.2479E+03 4.5775E+02 7.9015E+02 3.0110E+02 3
20.- 40. 0 0.0000E+00 0 1.4208E+06 1.1091E+03 1.1082E+03 3.7425E+02 7.3391E+02 2.3386E+02 1
40.- 60. 0 0.0000E+00 0 1.4325E+06 6.6787E+02 6.6692E+02 0.0000E+00 6.6692E+02 0.0000E+00 0
60.- 80. 1 0.2007E-03 0 1.4426E+06 1.7469E+03 1.7456E+03 1.0481E+03 6.9755E+02 7.1792E+02 8
80.- 100. 1 0.2007E-03 0 1.4490E+06 1.1554E+03 1.1540E+03 4.0424E+02 7.4980E+02 2.9596E+02 5
100.- 120. 0 0.0000E+00 0 1.4604E+06 1.3097E+03 1.3087E+03 4.0967E+02 8.9903E+02 2.9772E+02 5
120.- 140. 1 0.2007E-03 0 1.4719E+06 1.0633E+03 1.0618E+03 2.4827E+02 8.1355E+02 1.8648E+02 4
140.- 160. 3 0.6020E-03 0 1.4855E+06 1.2799E+03 1.2778E+03 4.6507E+02 8.1272E+02 3.3744E+02 6
160.- 180. 1 0.2007E-03 0 1.4928E+06 1.2809E+03 1.2795E+03 4.3057E+02 8.4890E+02 3.0971E+02 5
180.- 200. 1 0.2007E-03 0 1.5023E+06 9.0574E+02 9.0411E+02 1.6452E+02 7.3959E+02 1.2682E+02 4
200.- 220. 1 0.2007E-03 0 1.5204E+06 1.7248E+03 1.7232E+03 9.0199E+02 8.2126E+02 6.1548E+02 7
220.- 240. 2 0.4014E-03 0 1.5424E+06 1.4841E+03 1.4821E+03 6.2353E+02 8.5857E+02 4.6584E+02 11
240.- 260. 1 0.2007E-03 0 1.5473E+06 2.1891E+03 2.1873E+03 1.3202E+03 8.6711E+02 9.0067E+02 9
260.- 280. 3 0.6020E-03 0 1.5528E+06 1.7720E+03 1.7695E+03 8.9923E+02 8.7024E+02 6.2514E+02 8
280.- 300. 3 0.6020E-03 0 1.5443E+06 1.4074E+03 1.4049E+03 5.8639E+02 8.1847E+02 4.0872E+02 6
300.- 320. 1 0.2007E-03 0 1.5602E+06 1.3088E+03 1.3071E+03 3.9066E+02 9.1639E+02 2.9276E+02 7
320.- 340. 3 0.6020E-03 0 1.5800E+06 1.2495E+03 1.2472E+03 2.7664E+02 9.7053E+02 2.0409E+02 4
340.- 360. 3 0.6020E-03 0 1.5837E+06 1.3779E+03 1.3756E+03 4.5158E+02 9.2404E+02 3.2856E+02 7
360.- 380. 2 0.4014E-03 0 1.5953E+06 1.1875E+03 1.1849E+03 1.1393E+02 1.0710E+03 8.7789E+01 3
380.- 400. 2 0.4014E-03 0 1.6135E+06 1.2675E+03 1.2652E+03 2.7502E+02 9.9015E+02 2.0620E+02 5
400.- 420. 4 0.8027E-03 0 1.6200E+06 1.5874E+03 1.5841E+03 6.4312E+02 9.4096E+02 4.8107E+02 9
420.- 440. 8 0.1605E-02 0 1.6366E+06 1.5854E+03 1.5807E+03 5.3165E+02 1.0491E+03 3.8262E+02 7
440.- 460. 4 0.8027E-03 0 1.6448E+06 1.5137E+03 1.5100E+03 5.0559E+02 1.0044E+03 3.5412E+02 6
460.- 480. 6 0.1204E-02 0 1.6664E+06 1.8290E+03 1.8244E+03 6.3156E+02 1.1929E+03 4.5524E+02 8
480.- 500. 5 0.1003E-02 0 1.6904E+06 1.9467E+03 1.9428E+03 7.3308E+02 1.2097E+03 5.4323E+02 13
500.- 520. 6 0.1204E-02 0 1.3465E+06 1.4870E+03 1.4852E+03 4.5496E+02 1.0302E+03 3.4482E+02 9
520.- 540. 8 0.1605E-02 0 1.3156E+06 1.5415E+03 1.5396E+03 5.6014E+02 9.7949E+02 4.1672E+02 8
540.- 560. 8 0.1605E-02 0 1.3219E+06 1.2123E+03 1.2106E+03 2.7818E+02 9.3245E+02 2.0590E+02 4
560.- 580. 3 0.6020E-03 0 1.3412E+06 1.3250E+03 1.3238E+03 3.4546E+02 9.7830E+02 2.5503E+02 5
580.- 600. 5 0.1003E-02 0 1.3509E+06 1.4597E+03 1.4583E+03 4.3467E+02 1.0236E+03 3.1916E+02 5
600.- 620. 9 0.1806E-02 0 1.3642E+06 1.6063E+03 1.6043E+03 5.6110E+02 1.0432E+03 4.2547E+02 11
620.- 640. 12 0.2408E-02 0 1.3779E+06 1.7352E+03 1.7325E+03 6.4339E+02 1.0892E+03 4.8100E+02 10
640.- 660. 11 0.2208E-02 0 1.3783E+06 1.4407E+03 1.4383E+03 1.4333E+02 1.2950E+03 1.1067E+02 4
660.- 680. 5 0.1003E-02 0 1.3984E+06 1.4300E+03 1.4283E+03 1.7058E+02 1.2577E+03 1.2869E+02 3
680.- 700. 14 0.2810E-02 0 1.4143E+06 1.3565E+03 1.3536E+03 2.3805E+02 1.1155E+03 1.8045E+02 5
700.- 720. 12 0.2408E-02 0 1.4218E+06 2.0006E+03 1.9976E+03 6.0222E+02 1.3954E+03 4.5532E+02 11
720.- 740. 17 0.3412E-02 0 1.4291E+06 1.7100E+03 1.7069E+03 4.7163E+02 1.2353E+03 3.5149E+02 7
740.- 760. 11 0.2208E-02 0 1.4267E+06 1.9644E+03 1.9615E+03 6.7146E+02 1.2901E+03 5.0319E+02 11
760.- 780. 12 0.2408E-02 0 1.4278E+06 1.4768E+03 1.4737E+03 2.5726E+02 1.2164E+03 1.9661E+02 6
780.- 800. 22 0.4415E-02 0 1.4404E+06 1.7446E+03 1.7407E+03 5.0427E+02 1.2364E+03 3.7936E+02 9
800.- 820. 13 0.2609E-02 0 1.4441E+06 2.2620E+03 2.2588E+03 3.9677E+02 1.8620E+03 3.0092E+02 8
820.- 840. 21 0.4214E-02 0 1.4561E+06 2.1839E+03 2.1796E+03 5.5503E+02 1.6246E+03 4.2090E+02 11
840.- 860. 28 0.5619E-02 0 1.4557E+06 1.7932E+03 1.7875E+03 2.7453E+02 1.5130E+03 2.0912E+02 6
860.- 880. 27 0.5418E-02 0 1.4660E+06 2.3782E+03 2.3724E+03 4.5629E+02 1.9162E+03 3.4386E+02 8
880.- 900. 32 0.6422E-02 0 1.4544E+06 2.5454E+03 2.5390E+03 5.8978E+02 1.9492E+03 4.4623E+02 11
900.- 920. 35 0.7024E-02 0 1.4524E+06 2.1145E+03 2.1080E+03 3.4028E+02 1.7677E+03 2.5691E+02 6
920.- 940. 30 0.6020E-02 0 1.4619E+06 2.2682E+03 2.2611E+03 3.9791E+02 1.8632E+03 3.0595E+02 10
940.- 960. 50 0.1003E-01 0 1.4359E+06 2.4348E+03 2.4261E+03 3.7658E+02 2.0495E+03 2.8496E+02 7
960.- 980. 42 0.8429E-02 0 1.4191E+06 2.5021E+03 2.4935E+03 5.4333E+02 1.9501E+03 4.1319E+02 11
980.- 1000. 47 0.9432E-02 0 1.4056E+06 2.7845E+03 2.7749E+03 5.0506E+02 2.2699E+03 3.8348E+02 10
1000.- 1020. 61 0.1224E-01 0 1.3932E+06 2.8722E+03 2.8609E+03 2.3372E+02 2.6272E+03 1.7792E+02 5
1020.- 1040. 62 0.1244E-01 0 1.3862E+06 3.1388E+03 3.1265E+03 4.8168E+02 2.6448E+03 3.6791E+02 11
1040.- 1060. 60 0.1204E-01 0 1.3607E+06 2.9658E+03 2.9539E+03 1.4776E+02 2.8061E+03 1.1184E+02 3
1060.- 1080. 65 0.1304E-01 0 1.3203E+06 2.7815E+03 2.7686E+03 1.8338E+02 2.5852E+03 1.4009E+02 4
1080.- 1100. 70 0.1405E-01 0 1.2869E+06 3.1637E+03 3.1500E+03 3.7885E+02 2.7712E+03 2.8858E+02 8
1100.- 1120. 83 0.1666E-01 0 1.2388E+06 3.1599E+03 3.1441E+03 2.3981E+02 2.9043E+03 1.8434E+02 6
1120.- 1140. 100 0.2007E-01 0 1.2265E+06 3.4942E+03 3.4758E+03 3.4577E+02 3.1300E+03 2.6628E+02 9
1140.- 1160. 110 0.2208E-01 0 1.1746E+06 3.4427E+03 3.4224E+03 2.6962E+02 3.1527E+03 2.0757E+02 7
1160.- 1180. 99 0.1987E-01 0 1.1427E+06 3.6092E+03 3.5883E+03 1.8390E+02 3.4044E+03 1.4046E+02 4
1180.- 1200. 134 0.2689E-01 0 1.1013E+06 3.5636E+03 3.5378E+03 8.5145E+01 3.4527E+03 6.5270E+01 2
1200.- 1220. 153 0.3070E-01 0 1.0428E+06 4.0205E+03 3.9921E+03 3.3915E+01 3.9582E+03 2.6270E+01 1
1220.- 1240. 177 0.3552E-01 0 9.6830E+05 3.7223E+03 3.6904E+03 1.1427E+02 3.5761E+03 8.8011E+01 3
1240.- 1260. 174 0.3492E-01 0 9.0837E+05 3.8166E+03 3.7847E+03 9.2929E+01 3.6918E+03 7.2257E+01 3
1260.- 1280. 184 0.3693E-01 0 8.3336E+05 3.6730E+03 3.6396E+03 6.3033E+01 3.5766E+03 4.8976E+01 2
1280.- 1300. 212 0.4254E-01 0 7.5250E+05 3.9047E+03 3.8675E+03 6.6844E+01 3.8006E+03 5.1808E+01 2
1300.- 1320. 213 0.4275E-01 0 6.8682E+05 3.6765E+03 3.6368E+03 0.0000E+00 3.6368E+03 0.0000E+00 0
1320.- 1340. 237 0.4756E-01 0 6.2010E+05 3.5886E+03 3.5463E+03 0.0000E+00 3.5463E+03 0.0000E+00 0
1340.- 1360. 269 0.5398E-01 0 5.5143E+05 3.5033E+03 3.4554E+03 0.0000E+00 3.4554E+03 0.0000E+00 0
1360.- 1380. 243 0.4877E-01 0 4.7717E+05 3.2833E+03 3.2387E+03 0.0000E+00 3.2387E+03 0.0000E+00 0
1380.- 1400. 252 0.5057E-01 0 3.8671E+05 2.9454E+03 2.9018E+03 0.0000E+00 2.9018E+03 0.0000E+00 0
1400.- 1420. 241 0.4836E-01 1 3.1794E+05 2.6077E+03 2.5649E+03 0.0000E+00 2.5649E+03 0.0000E+00 0
1420.- 1440. 217 0.4355E-01 0 2.4456E+05 2.0854E+03 2.0483E+03 0.0000E+00 2.0483E+03 0.0000E+00 0
1440.- 1460. 216 0.4335E-01 1 1.8889E+05 1.8487E+03 1.8119E+03 0.0000E+00 1.8119E+03 0.0000E+00 0
1460.- 1480. 229 0.4596E-01 3 1.4540E+05 1.5820E+03 1.5452E+03 0.0000E+00 1.5452E+03 0.0000E+00 0
1480.- 1500. 170 0.3412E-01 4 1.0315E+05 1.2407E+03 1.2108E+03 0.0000E+00 1.2108E+03 0.0000E+00 0
1500.- 1520. 139 0.2789E-01 10 6.3148E+04 8.2522E+02 8.0185E+02 0.0000E+00 8.0185E+02 0.0000E+00 0
1520.- 1540. 107 0.2147E-01 14 3.6552E+04 5.2047E+02 5.0471E+02 0.0000E+00 5.0471E+02 0.0000E+00 0
1540.- 1560. 71 0.1425E-01 24 2.0566E+04 2.8381E+02 2.7268E+02 0.0000E+00 2.7268E+02 0.0000E+00 0
1560.- 1580. 46 0.9231E-02 61 1.2491E+04 2.1422E+02 2.0666E+02 0.0000E+00 2.0666E+02 0.0000E+00 0
1580.- 1600. 24 0.4816E-02 153 5.0051E+03 9.8878E+01 9.5119E+01 0.0000E+00 9.5119E+01 0.0000E+00 0
1600.- 1620. 19 0.3813E-02 275 2.4905E+03 4.1919E+01 3.9207E+01 0.0000E+00 3.9207E+01 0.0000E+00 0
1620.- 1640. 9 0.1806E-02 517 1.2463E+03 2.9883E+01 2.8768E+01 0.0000E+00 2.8768E+01 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 716 2.4873E+02 4.9162E+00 4.8635E+00 0.0000E+00 4.8635E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 844 3.8938E+01 2.2375E-01 2.0054E-01 0.0000E+00 2.0054E-01 0.0000E+00 0
1680.- 1700. 1 0.2007E-03 813 3.8618E+01 1.5318E+00 1.4145E+00 0.0000E+00 1.4145E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 651 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 453 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 275 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 98 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 17 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 0 0.0000E+00 0 1.4059E+06 1.1514E+03 1.1504E+03 5.6170E+02 5.8866E+02 3.8687E+02 6
20.- 40. 0 0.0000E+00 0 1.4129E+06 1.4613E+03 1.4604E+03 7.3171E+02 7.2872E+02 4.7015E+02 5
40.- 60. 1 0.2006E-03 0 1.4216E+06 1.5201E+03 1.5189E+03 6.5580E+02 8.6306E+02 4.3477E+02 6
60.- 80. 2 0.4013E-03 0 1.4357E+06 1.3356E+03 1.3339E+03 7.1336E+02 6.2058E+02 5.1573E+02 9
80.- 100. 2 0.4013E-03 0 1.4513E+06 1.5208E+03 1.5192E+03 8.3975E+02 6.7943E+02 6.0864E+02 9
100.- 120. 0 0.0000E+00 0 1.4550E+06 1.0629E+03 1.0617E+03 3.2029E+02 7.4136E+02 2.4010E+02 7
120.- 140. 1 0.2006E-03 0 1.4640E+06 1.1760E+03 1.1747E+03 4.0622E+02 7.6848E+02 2.9592E+02 4
140.- 160. 4 0.8026E-03 0 1.4759E+06 9.6253E+02 9.5954E+02 1.0556E+02 8.5398E+02 7.4774E+01 1
160.- 180. 2 0.4013E-03 0 1.4875E+06 1.3742E+03 1.3723E+03 5.8238E+02 7.8994E+02 3.8859E+02 4
180.- 200. 1 0.2006E-03 0 1.4963E+06 1.2913E+03 1.2895E+03 4.0637E+02 8.8311E+02 2.9789E+02 7
200.- 220. 0 0.0000E+00 0 1.5092E+06 1.3837E+03 1.3826E+03 4.7359E+02 9.0905E+02 3.3030E+02 5
220.- 240. 2 0.4013E-03 0 1.5198E+06 1.4856E+03 1.4837E+03 6.4278E+02 8.4091E+02 4.3504E+02 5
240.- 260. 2 0.4013E-03 0 1.5316E+06 1.3528E+03 1.3510E+03 4.7344E+02 8.7755E+02 3.3662E+02 4
260.- 280. 1 0.2006E-03 0 1.5454E+06 1.7543E+03 1.7523E+03 8.5074E+02 9.0155E+02 6.0024E+02 9
280.- 300. 3 0.6019E-03 0 1.5556E+06 1.0323E+03 1.0299E+03 1.2853E+02 9.0138E+02 9.7705E+01 3
300.- 320. 2 0.4013E-03 0 1.5740E+06 1.3809E+03 1.3784E+03 6.2025E+02 7.5818E+02 4.1514E+02 6
320.- 340. 4 0.8026E-03 0 1.6018E+06 1.7854E+03 1.7828E+03 7.0138E+02 1.0814E+03 4.9600E+02 6
340.- 360. 2 0.4013E-03 0 1.5945E+06 1.6413E+03 1.6385E+03 5.2072E+02 1.1178E+03 3.7502E+02 6
360.- 380. 3 0.6019E-03 0 1.6006E+06 1.5174E+03 1.5150E+03 4.8888E+02 1.0261E+03 3.5677E+02 5
380.- 400. 2 0.4013E-03 0 1.6035E+06 1.4681E+03 1.4655E+03 3.8261E+02 1.0828E+03 2.8317E+02 7
400.- 420. 2 0.4013E-03 0 1.6226E+06 1.1305E+03 1.1285E+03 1.6473E+02 9.6374E+02 1.2695E+02 4
420.- 440. 1 0.2006E-03 0 1.6540E+06 2.0478E+03 2.0457E+03 9.0075E+02 1.1450E+03 6.3650E+02 10
440.- 460. 4 0.8026E-03 0 1.6504E+06 1.1932E+03 1.1900E+03 2.1754E+02 9.7250E+02 1.6537E+02 4
460.- 480. 5 0.1003E-02 0 1.6551E+06 2.0963E+03 2.0922E+03 7.7655E+02 1.3156E+03 5.6591E+02 9
480.- 500. 7 0.1404E-02 0 1.6659E+06 1.4435E+03 1.4388E+03 4.6146E+02 9.7729E+02 3.4264E+02 8
500.- 520. 4 0.8026E-03 0 1.3222E+06 1.6883E+03 1.6869E+03 6.6811E+02 1.0188E+03 4.8535E+02 9
520.- 540. 11 0.2207E-02 0 1.3134E+06 9.4336E+02 9.4112E+02 0.0000E+00 9.4112E+02 0.0000E+00 0
540.- 560. 4 0.8026E-03 0 1.3246E+06 1.4945E+03 1.4932E+03 5.1860E+02 9.7464E+02 3.8863E+02 8
560.- 580. 5 0.1003E-02 0 1.3426E+06 1.2469E+03 1.2454E+03 2.4077E+02 1.0046E+03 1.8344E+02 5
580.- 600. 4 0.8026E-03 0 1.3603E+06 1.5428E+03 1.5414E+03 3.2110E+02 1.2203E+03 2.3997E+02 5
600.- 620. 14 0.2809E-02 0 1.3670E+06 1.7269E+03 1.7246E+03 5.3020E+02 1.1944E+03 3.9573E+02 8
620.- 640. 11 0.2207E-02 0 1.3735E+06 2.0802E+03 2.0776E+03 1.0043E+03 1.0732E+03 7.4320E+02 13
640.- 660. 16 0.3210E-02 0 1.3717E+06 1.8251E+03 1.8219E+03 4.8289E+02 1.3390E+03 3.5591E+02 6
660.- 680. 14 0.2809E-02 0 1.3857E+06 1.5335E+03 1.5306E+03 3.2545E+02 1.2051E+03 2.4803E+02 7
680.- 700. 11 0.2207E-02 0 1.4060E+06 1.7995E+03 1.7964E+03 5.2863E+02 1.2678E+03 3.9646E+02 9
700.- 720. 21 0.4213E-02 0 1.4253E+06 1.6558E+03 1.6521E+03 3.4351E+02 1.3086E+03 2.6058E+02 7
720.- 740. 17 0.3411E-02 0 1.4289E+06 1.6419E+03 1.6382E+03 3.0371E+02 1.3345E+03 2.3242E+02 7
740.- 760. 8 0.1605E-02 0 1.4286E+06 1.9099E+03 1.9073E+03 4.9099E+02 1.4163E+03 3.6419E+02 7
760.- 780. 15 0.3010E-02 0 1.4439E+06 1.8202E+03 1.8170E+03 4.7700E+02 1.3400E+03 3.5905E+02 8
780.- 800. 18 0.3612E-02 0 1.4489E+06 1.9432E+03 1.9395E+03 4.7366E+02 1.4658E+03 3.5851E+02 9
800.- 820. 11 0.2207E-02 0 1.4554E+06 1.7796E+03 1.7764E+03 2.9431E+02 1.4821E+03 2.2523E+02 7
820.- 840. 25 0.5016E-02 0 1.4511E+06 1.7206E+03 1.7161E+03 2.8734E+02 1.4287E+03 2.1781E+02 6
840.- 860. 23 0.4615E-02 0 1.4588E+06 2.0068E+03 2.0018E+03 4.6335E+02 1.5385E+03 3.4997E+02 9
860.- 880. 27 0.5417E-02 0 1.4484E+06 2.1071E+03 2.1018E+03 3.5554E+02 1.7463E+03 2.7006E+02 7
880.- 900. 21 0.4213E-02 0 1.4620E+06 2.4212E+03 2.4161E+03 5.2092E+02 1.8952E+03 3.9445E+02 10
900.- 920. 32 0.6421E-02 0 1.4497E+06 2.0671E+03 2.0611E+03 3.7082E+02 1.6903E+03 2.8069E+02 7
920.- 940. 21 0.4213E-02 0 1.4408E+06 2.4299E+03 2.4242E+03 4.7732E+02 1.9469E+03 3.6287E+02 10
940.- 960. 34 0.6822E-02 0 1.4401E+06 2.4809E+03 2.4741E+03 3.9055E+02 2.0836E+03 2.9870E+02 9
960.- 980. 36 0.7223E-02 0 1.4242E+06 2.3672E+03 2.3602E+03 1.2488E+02 2.2353E+03 9.5766E+01 3
980.- 1000. 40 0.8026E-02 0 1.4011E+06 2.2599E+03 2.2512E+03 1.4294E+02 2.1082E+03 1.0856E+02 3
1000.- 1020. 49 0.9831E-02 0 1.3836E+06 2.7789E+03 2.7688E+03 3.8377E+02 2.3850E+03 2.9543E+02 10
1020.- 1040. 64 0.1284E-01 0 1.3836E+06 2.8711E+03 2.8594E+03 4.8098E+02 2.3784E+03 3.6934E+02 12
1040.- 1060. 55 0.1104E-01 0 1.3521E+06 3.1955E+03 3.1843E+03 4.6455E+02 2.7197E+03 3.5403E+02 10
1060.- 1080. 54 0.1083E-01 0 1.3291E+06 2.8871E+03 2.8758E+03 2.7804E+02 2.5978E+03 2.1210E+02 6
1080.- 1100. 86 0.1726E-01 0 1.3133E+06 3.1053E+03 3.0899E+03 2.2077E+02 2.8691E+03 1.6877E+02 5
1100.- 1120. 93 0.1866E-01 0 1.2729E+06 3.0814E+03 3.0639E+03 3.3863E+02 2.7253E+03 2.5793E+02 7
1120.- 1140. 108 0.2167E-01 0 1.2218E+06 3.2651E+03 3.2450E+03 2.4205E+02 3.0030E+03 1.8577E+02 6
1140.- 1160. 103 0.2067E-01 0 1.1851E+06 3.5029E+03 3.4835E+03 2.5652E+02 3.2270E+03 1.9796E+02 7
1160.- 1180. 118 0.2368E-01 0 1.1363E+06 3.5974E+03 3.5753E+03 1.9633E+02 3.3790E+03 1.5108E+02 5
1180.- 1200. 104 0.2087E-01 0 1.0891E+06 3.3421E+03 3.3206E+03 1.2290E+02 3.1977E+03 9.4386E+01 3
1200.- 1220. 135 0.2709E-01 0 1.0380E+06 3.7724E+03 3.7470E+03 2.6269E+02 3.4843E+03 2.0249E+02 7
1220.- 1240. 169 0.3391E-01 0 9.7596E+05 3.8278E+03 3.7984E+03 1.1418E+02 3.6842E+03 8.7938E+01 3
1240.- 1260. 169 0.3391E-01 0 9.2484E+05 3.9994E+03 3.9662E+03 3.3629E+01 3.9326E+03 2.6058E+01 1
1260.- 1280. 212 0.4254E-01 0 8.5375E+05 3.8660E+03 3.8277E+03 9.6247E+01 3.7315E+03 7.4724E+01 3
1280.- 1300. 223 0.4474E-01 0 7.7872E+05 3.7933E+03 3.7533E+03 0.0000E+00 3.7533E+03 0.0000E+00 0
1300.- 1320. 236 0.4735E-01 0 7.1160E+05 3.8322E+03 3.7886E+03 3.0113E+01 3.7585E+03 2.3442E+01 1
1320.- 1340. 262 0.5257E-01 0 6.2507E+05 3.8375E+03 3.7928E+03 0.0000E+00 3.7928E+03 0.0000E+00 0
1340.- 1360. 237 0.4755E-01 0 5.4413E+05 3.4805E+03 3.4368E+03 3.5362E+01 3.4015E+03 2.7342E+01 1
1360.- 1380. 274 0.5498E-01 0 4.7517E+05 3.2772E+03 3.2306E+03 0.0000E+00 3.2306E+03 0.0000E+00 0
1380.- 1400. 242 0.4856E-01 0 3.9304E+05 3.0803E+03 3.0368E+03 0.0000E+00 3.0368E+03 0.0000E+00 0
1400.- 1420. 245 0.4916E-01 0 3.1579E+05 2.6424E+03 2.5992E+03 0.0000E+00 2.5992E+03 0.0000E+00 0
1420.- 1440. 242 0.4856E-01 1 2.4690E+05 2.2189E+03 2.1788E+03 0.0000E+00 2.1788E+03 0.0000E+00 0
1440.- 1460. 191 0.3832E-01 2 1.8649E+05 1.8228E+03 1.7878E+03 0.0000E+00 1.7878E+03 0.0000E+00 0
1460.- 1480. 208 0.4173E-01 3 1.3982E+05 1.4525E+03 1.4180E+03 0.0000E+00 1.4180E+03 0.0000E+00 0
1480.- 1500. 183 0.3672E-01 5 9.7680E+04 1.0849E+03 1.0553E+03 0.0000E+00 1.0553E+03 0.0000E+00 0
1500.- 1520. 137 0.2749E-01 9 6.5443E+04 7.8653E+02 7.6434E+02 0.0000E+00 7.6434E+02 0.0000E+00 0
1520.- 1540. 101 0.2026E-01 9 4.2055E+04 5.5230E+02 5.3518E+02 0.0000E+00 5.3518E+02 0.0000E+00 0
1540.- 1560. 82 0.1645E-01 21 2.3999E+04 3.5206E+02 3.3985E+02 0.0000E+00 3.3985E+02 0.0000E+00 0
1560.- 1580. 56 0.1124E-01 60 1.3887E+04 2.1287E+02 2.0454E+02 0.0000E+00 2.0454E+02 0.0000E+00 0
1580.- 1600. 24 0.4815E-02 139 6.1865E+03 9.4452E+01 9.0312E+01 0.0000E+00 9.0312E+01 0.0000E+00 0
1600.- 1620. 13 0.2608E-02 298 2.4255E+03 3.8897E+01 3.7217E+01 0.0000E+00 3.7217E+01 0.0000E+00 0
1620.- 1640. 7 0.1404E-02 494 1.2562E+03 2.3364E+01 2.2460E+01 0.0000E+00 2.2460E+01 0.0000E+00 0
1640.- 1660. 2 0.4013E-03 684 8.8602E+02 1.3374E+01 1.2770E+01 0.0000E+00 1.2770E+01 0.0000E+00 0
1660.- 1680. 2 0.4013E-03 888 1.6695E+02 3.4410E+00 3.2261E+00 0.0000E+00 3.2261E+00 0.0000E+00 0
1680.- 1700. 1 0.2006E-03 784 7.1796E+01 2.0048E+00 1.8502E+00 0.0000E+00 1.8502E+00 0.0000E+00 0
1700.- 1720. 1 0.2006E-03 698 1.5929E+01 5.1138E-01 4.1383E-01 0.0000E+00 4.1383E-01 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 446 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 249 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 121 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 52 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 20 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- SUT 0 0.0000E+00
1880.- SUT 0 0.0000E+00
4983 1.0000E+00 4983 9.4674E+07 1.6167E+05 1.6072E+05 2.6579E+04 1.3414E+05 1.9516E+04 417
4984 1.0000E+00 4984 9.4695E+07 1.6176E+05 1.6081E+05 2.6821E+04 1.3399E+05 1.9621E+04 415
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.7328E+05 3.7796E+02 9.5562E+01 2.8239E+02 9.3810E+05 8.6995E+02 3.6219E+02 5.0776E+02 2 1
20.- 40. 4.7312E+05 2.9403E+02 0.0000E+00 2.9403E+02 9.4765E+05 8.1413E+02 3.7425E+02 4.3988E+02 0 1
40.- 60. 4.8231E+05 2.7818E+02 0.0000E+00 2.7818E+02 9.5019E+05 3.8873E+02 0.0000E+00 3.8873E+02 0 0
60.- 80. 4.8436E+05 6.3567E+02 3.4376E+02 2.9192E+02 9.5822E+05 1.1100E+03 7.0433E+02 4.0564E+02 3 5
80.- 100. 4.8111E+05 6.1548E+02 2.9019E+02 3.2529E+02 9.6788E+05 5.3856E+02 1.1406E+02 4.2451E+02 4 1
100.- 120. 4.8625E+05 7.3356E+02 3.0314E+02 4.3043E+02 9.7412E+05 5.7514E+02 1.0654E+02 4.6861E+02 3 2
120.- 140. 4.8971E+05 4.9496E+02 1.6681E+02 3.2815E+02 9.8217E+05 5.6686E+02 8.1456E+01 4.8540E+02 2 2
140.- 160. 4.9612E+05 3.7912E+02 7.8359E+01 3.0076E+02 9.8940E+05 8.9867E+02 3.8672E+02 5.1195E+02 1 5
160.- 180. 4.9926E+05 5.9973E+02 2.3214E+02 3.6759E+02 9.9356E+05 6.7974E+02 1.9843E+02 4.8130E+02 4 1
180.- 200. 4.9978E+05 4.7964E+02 1.3438E+02 3.4525E+02 1.0025E+06 4.2448E+02 3.0142E+01 3.9433E+02 3 1
200.- 220. 5.0868E+05 7.0422E+02 3.5725E+02 3.4697E+02 1.0117E+06 1.0190E+03 5.4474E+02 4.7429E+02 4 3
220.- 240. 5.1917E+05 6.4570E+02 3.0613E+02 3.3957E+02 1.0232E+06 8.3640E+02 3.1741E+02 5.1900E+02 6 5
240.- 260. 5.1786E+05 6.3085E+02 2.4626E+02 3.8460E+02 1.0295E+06 1.5565E+03 1.0739E+03 4.8251E+02 3 6
260.- 280. 5.1914E+05 6.6961E+02 3.0410E+02 3.6551E+02 1.0337E+06 1.0999E+03 5.9513E+02 5.0473E+02 3 5
280.- 300. 5.1278E+05 4.8892E+02 1.5672E+02 3.3221E+02 1.0315E+06 9.1594E+02 4.2968E+02 4.8626E+02 2 4
300.- 320. 5.1811E+05 6.3308E+02 2.0056E+02 4.3252E+02 1.0421E+06 6.7398E+02 1.9010E+02 4.8387E+02 3 4
320.- 340. 5.2578E+05 4.2443E+02 1.2657E+02 2.9786E+02 1.0542E+06 8.2274E+02 1.5007E+02 6.7268E+02 1 3
340.- 360. 5.3210E+05 4.5821E+02 8.3173E+01 3.7504E+02 1.0516E+06 9.1741E+02 3.6840E+02 5.4900E+02 2 5
360.- 380. 5.2565E+05 4.7595E+02 7.2577E+01 4.0337E+02 1.0696E+06 7.0896E+02 4.1353E+01 6.6760E+02 2 1
380.- 400. 5.3718E+05 5.2425E+02 1.0582E+02 4.1842E+02 1.0764E+06 7.4092E+02 1.6920E+02 5.7172E+02 2 3
400.- 420. 5.4255E+05 1.0421E+03 5.9095E+02 4.5113E+02 1.0774E+06 5.4199E+02 5.2163E+01 4.8983E+02 8 1
420.- 440. 5.4721E+05 5.8773E+02 1.1029E+02 4.7744E+02 1.0894E+06 9.9298E+02 4.2136E+02 5.7162E+02 2 5
440.- 460. 5.4623E+05 4.2375E+02 0.0000E+00 4.2375E+02 1.0986E+06 1.0863E+03 5.0559E+02 5.8068E+02 0 6
460.- 480. 5.5512E+05 5.6620E+02 1.3976E+02 4.2644E+02 1.1113E+06 1.2582E+03 4.9180E+02 7.6645E+02 2 6
480.- 500. 5.5976E+05 7.6328E+02 2.7262E+02 4.9066E+02 1.1291E+06 1.1778E+03 4.6045E+02 7.1730E+02 5 8
500.- 520. 6.0099E+04 3.5966E+01 0.0000E+00 3.5966E+01 1.1748E+05 6.3993E+01 0.0000E+00 6.3993E+01 0 0
0.- 20. 4.6571E+05 2.7660E+02 3.4172E+01 2.4242E+02 9.4017E+05 8.7376E+02 5.2752E+02 3.4623E+02 1 5
20.- 40. 4.7434E+05 3.4739E+02 8.3172E+01 2.6422E+02 9.3853E+05 1.1130E+03 6.4854E+02 4.6450E+02 2 3
40.- 60. 4.6565E+05 4.6135E+02 1.0440E+02 3.5695E+02 9.5598E+05 1.0575E+03 5.5140E+02 5.0611E+02 2 4
60.- 80. 4.7603E+05 6.7543E+02 4.3070E+02 2.4473E+02 9.5971E+05 6.5851E+02 2.8266E+02 3.7584E+02 4 5
80.- 100. 4.8650E+05 7.6893E+02 4.5998E+02 3.0895E+02 9.6483E+05 7.5026E+02 3.7977E+02 3.7048E+02 4 5
100.- 120. 4.8990E+05 3.2144E+02 5.6038E+01 2.6540E+02 9.6514E+05 7.4021E+02 2.6426E+02 4.7595E+02 1 6
120.- 140. 4.9219E+05 5.9361E+02 2.8152E+02 3.1208E+02 9.7185E+05 5.8110E+02 1.2470E+02 4.5640E+02 3 1
140.- 160. 4.8537E+05 3.5382E+02 0.0000E+00 3.5382E+02 9.9055E+05 6.0572E+02 1.0556E+02 5.0017E+02 0 1
160.- 180. 4.9559E+05 4.5241E+02 1.2548E+02 3.2693E+02 9.9194E+05 9.1991E+02 4.5691E+02 4.6300E+02 2 2
180.- 200. 5.0051E+05 4.0522E+02 4.0448E+01 3.6477E+02 9.9578E+05 8.8426E+02 3.6592E+02 5.1834E+02 1 6
200.- 220. 5.0598E+05 5.0674E+02 5.1683E+01 4.5505E+02 1.0032E+06 8.7590E+02 4.2191E+02 4.5399E+02 1 4
220.- 240. 5.0671E+05 4.9070E+02 1.5877E+02 3.3194E+02 1.0131E+06 9.9299E+02 4.8401E+02 5.0897E+02 2 3
240.- 260. 5.0957E+05 5.3338E+02 1.6825E+02 3.6512E+02 1.0220E+06 8.1762E+02 3.0519E+02 5.1243E+02 1 3
260.- 280. 5.1296E+05 5.7788E+02 2.2946E+02 3.4842E+02 1.0324E+06 1.1744E+03 6.2128E+02 5.5312E+02 5 4
280.- 300. 5.2004E+05 4.2255E+02 5.2192E+01 3.7036E+02 1.0355E+06 6.0737E+02 7.6342E+01 5.3102E+02 1 2
300.- 320. 5.2538E+05 3.9102E+02 7.7886E+01 3.1314E+02 1.0486E+06 9.8741E+02 5.4237E+02 4.4504E+02 1 5
320.- 340. 5.2828E+05 7.3583E+02 2.7607E+02 4.5976E+02 1.0736E+06 1.0469E+03 4.2531E+02 6.2163E+02 2 4
340.- 360. 5.3598E+05 7.3633E+02 2.3445E+02 5.0188E+02 1.0585E+06 9.0218E+02 2.8627E+02 6.1591E+02 3 3
360.- 380. 5.3240E+05 7.0837E+02 3.1836E+02 3.9002E+02 1.0682E+06 8.0658E+02 1.7052E+02 6.3606E+02 3 2
380.- 400. 5.3155E+05 6.2181E+02 1.7448E+02 4.4733E+02 1.0719E+06 8.4365E+02 2.0813E+02 6.3552E+02 4 3
400.- 420. 5.4271E+05 4.9270E+02 1.2389E+02 3.6880E+02 1.0799E+06 6.3577E+02 4.0840E+01 5.9494E+02 3 1
420.- 440. 5.5801E+05 6.9105E+02 2.3305E+02 4.5800E+02 1.0960E+06 1.3547E+03 6.6770E+02 6.8696E+02 3 7
440.- 460. 5.4936E+05 5.4500E+02 1.6359E+02 3.8141E+02 1.1011E+06 6.4503E+02 5.3943E+01 5.9109E+02 3 1
460.- 480. 5.5131E+05 1.0603E+03 4.4434E+02 6.1601E+02 1.1038E+06 1.0318E+03 3.3222E+02 6.9963E+02 3 6
480.- 500. 5.5054E+05 5.9317E+02 1.9617E+02 3.9700E+02 1.1143E+06 8.4425E+02 2.6529E+02 5.7895E+02 3 5
500.- 520. 5.8777E+04 1.3577E+02 6.2954E+01 7.2820E+01 1.1754E+05 2.6324E+02 2.0681E+02 5.6438E+01 1 1
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.2893E+07 1.3963E+04 4.7171E+03 9.2455E+03 2.5751E+07 2.1279E+04 8.1695E+03 1.3110E+04 67 84
1.2851E+07 1.3899E+04 4.5815E+03 9.3173E+03 2.5714E+07 2.2014E+04 8.8154E+03 1.3199E+04 59 92
DAMAGE IN LAYER 1 : 3.5144E+04
DAMAGE IN LAYER 1 : 3.5515E+04
DAMAGE IN LAYER 2 : 1.2557E+05
DAMAGE IN LAYER 2 : 1.2529E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.4000E-03 ENERGY REFL.COEF.= 1.4429E-03 REL.MEAN ENERGY = 4.2439E-01 MEAN ENERGY = 8.0634E+03
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.3819E-03 REL.MEAN ENERGY = 4.3185E-01 MEAN ENERGY = 8.2051E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.0634E+03 3.3839E+07 2.8101E-01 1.7324E+00 5.8171E+03 1.4109E+03 7.0238E+06 3.7252E-01
PATHLENGTH 7.4372E+02 1.7379E+05 -1.3671E-01 2.0178E+00 4.1688E+02 1.0111E+02 4.2523E+04 3.2751E-01
ELASTIC LOSS 2.4241E+02 9.4889E+03 9.7411E+01 5.7301E+00
INEL. LOSS 1.0632E+04 3.3805E+07 5.8142E+03 3.4201E+02
ENERGY 8.2051E+03 3.9588E+07 3.6004E-01 1.6659E+00 6.2919E+03 1.5730E+03 8.0761E+06 4.0463E-01
PATHLENGTH 7.3480E+02 2.1592E+05 -1.2062E-01 1.8263E+00 4.6467E+02 1.1617E+02 4.9069E+04 3.5249E-01
ELASTIC LOSS 2.6448E+02 1.4015E+04 1.1839E+02 7.3991E+00
INEL. LOSS 1.0450E+04 4.1144E+07 6.4143E+03 4.0090E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.0634E+03 9.8858E+07 1.3982E+12 2.1196E+16 3.3402E+20 5.3926E+24
LOGENERGY 3.6693E+00 1.3834E+01 5.3144E+01 2.0688E+02 8.1334E+02 3.2222E+03
PATHLENGTH 7.4372E+02 7.2691E+05 7.8922E+08 9.1418E+11 1.1090E+15 1.3930E+18
ENERGY 8.2051E+03 1.0691E+08 1.6165E+12 2.6078E+16 4.3401E+20 7.3445E+24
LOGENERGY 3.6080E+00 1.3588E+01 5.2392E+01 2.0493E+02 8.0960E+02 3.2226E+03
PATHLENGTH 7.3480E+02 7.5585E+05 8.6060E+08 1.0406E+12 1.3162E+15 1.7240E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -311,5 +311,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 1 0 1 0 0 1 2 1 4 2 1 1 1 0 1 0 0
0.000 0.000 1.176 1.176 0.000 1.176 0.000 0.000 1.176 2.353 1.176 4.706 2.353 1.176 1.176 1.176 0.000 1.176 0.000 0.000
0 0 0 1 1 0 0 1 0 0 1 2 2 3 0 1 1 1 1 1
0.000 0.000 0.000 1.250 1.250 0.000 0.000 1.250 0.000 0.000 1.250 2.500 2.500 3.750 0.000 1.250 1.250 1.250 1.250 1.250
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.rge
+73 -74
View File
@@ -1,90 +1,90 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 0
70.0000 1
90.0000 1
50.0000 1
70.0000 2
90.0000 2
110.0000 0
130.0000 1
150.0000 3
170.0000 1
150.0000 4
170.0000 2
190.0000 1
210.0000 1
210.0000 0
230.0000 2
250.0000 1
270.0000 3
250.0000 2
270.0000 1
290.0000 3
310.0000 1
330.0000 3
350.0000 3
370.0000 2
310.0000 2
330.0000 4
350.0000 2
370.0000 3
390.0000 2
410.0000 4
430.0000 8
410.0000 2
430.0000 1
450.0000 4
470.0000 6
490.0000 5
510.0000 6
530.0000 8
550.0000 8
570.0000 3
590.0000 5
610.0000 9
630.0000 12
650.0000 11
670.0000 5
690.0000 14
710.0000 12
470.0000 5
490.0000 7
510.0000 4
530.0000 11
550.0000 4
570.0000 5
590.0000 4
610.0000 14
630.0000 11
650.0000 16
670.0000 14
690.0000 11
710.0000 21
730.0000 17
750.0000 11
770.0000 12
790.0000 22
810.0000 13
830.0000 21
850.0000 28
750.0000 8
770.0000 15
790.0000 18
810.0000 11
830.0000 25
850.0000 23
870.0000 27
890.0000 32
910.0000 35
930.0000 30
950.0000 50
970.0000 42
990.0000 47
1010.0000 61
1030.0000 62
1050.0000 60
1070.0000 65
1090.0000 70
1110.0000 83
1130.0000 100
1150.0000 110
1170.0000 99
1190.0000 134
1210.0000 153
1230.0000 177
1250.0000 174
1270.0000 184
1290.0000 212
1310.0000 213
1330.0000 237
1350.0000 269
1370.0000 243
1390.0000 252
1410.0000 241
1430.0000 217
1450.0000 216
1470.0000 229
1490.0000 170
1510.0000 139
1530.0000 107
1550.0000 71
1570.0000 46
890.0000 21
910.0000 32
930.0000 21
950.0000 34
970.0000 36
990.0000 40
1010.0000 49
1030.0000 64
1050.0000 55
1070.0000 54
1090.0000 86
1110.0000 93
1130.0000 108
1150.0000 103
1170.0000 118
1190.0000 104
1210.0000 135
1230.0000 169
1250.0000 169
1270.0000 212
1290.0000 223
1310.0000 236
1330.0000 262
1350.0000 237
1370.0000 274
1390.0000 242
1410.0000 245
1430.0000 242
1450.0000 191
1470.0000 208
1490.0000 183
1510.0000 137
1530.0000 101
1550.0000 82
1570.0000 56
1590.0000 24
1610.0000 19
1630.0000 9
1650.0000 0
1670.0000 0
1610.0000 13
1630.0000 7
1650.0000 2
1670.0000 2
1690.0000 1
1710.0000 0
1710.0000 1
1730.0000 0
1750.0000 0
1770.0000 0
@@ -93,4 +93,3 @@
1830.0000 0
1850.0000 0
1870.0000 0
1890.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
19.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1270E+04 0.2207E+03 0.8063E+04 0.5817E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 56 4927
19.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1273E+04 0.2212E+03 0.8205E+04 0.6292E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 53 4931
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.out
+86 -84
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:55
Start: 19.Jun. 2026 18:18:13
End: 18.Jun. 2026 09:55:56
End: 19.Jun. 2026 18:18:13
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 5000 projectiles 0 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
14591 0 0 0 0 0 0 0 0
14519 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4853 ENERGY=0.1456E+08 EV
BACKSCATTERED PARTICLES= 147 ENERGY=0.1213E+06 EV
IMPLANTED PARTICLES= 4857 ENERGY=0.1457E+08 EV
BACKSCATTERED PARTICLES= 143 ENERGY=0.1267E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,100 +122,101 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4853 4853
IMPLANTED PARTICLES (LAYER 1)= 4857 4857
IMPLANTED PARTICLES (LAYER 2)= 3362 0
IMPLANTED PARTICLES (LAYER 2)= 3418 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.016
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.976
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 182.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.017
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.988
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 2.2069E+02 5.6640E+03 -4.1399E-01 2.8531E+00 7.5260E+01 1.0803E+00 1.1068E+02 2.5973E-02
SPREAD 1.2783E+02 3.8760E+03 4.1592E-01 2.7779E+00 6.2257E+01 8.9369E-01 7.4188E+01 2.9208E-02
PATHLENGTH 4.2188E+02 1.1917E+03 -1.2663E-01 3.0404E+00 3.4522E+01 4.9555E-01 2.4436E+01 3.5505E-02
ELASTIC LOSS 2.1339E+01 8.6471E+01 9.2990E+00 1.9161E-03
INEL. LOSS 2.9866E+03 1.8880E+05 4.3451E+02 8.9535E-02
PENETRATION 2.1906E+02 5.8087E+03 -4.2100E-01 2.7761E+00 7.6215E+01 1.0936E+00 1.1108E+02 2.4606E-02
SPREAD 1.2860E+02 3.7677E+03 3.4498E-01 2.6500E+00 6.1382E+01 8.8076E-01 6.9445E+01 2.6897E-02
PATHLENGTH 4.2075E+02 1.2657E+03 -1.4347E-01 3.0654E+00 3.5577E+01 5.1049E-01 2.6101E+01 3.6371E-02
ELASTIC LOSS 2.1404E+01 8.7378E+01 9.3476E+00 1.9246E-03
INEL. LOSS 2.9731E+03 1.9989E+05 4.4709E+02 9.2051E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.1565E-01 5.8401E-01 2.8525E+01 1.4339E+03 7.6420E-01 7.9814E-04 2.3089E-02 1.4252E+00
WEAK EL.LOSS 2.7632E-03 3.2150E-05 3.0444E+00 1.2605E+01 5.6701E-03 5.9218E-06 1.1438E-07 5.9493E-03
INELAST.LOSS 1.6144E+01 7.9049E+01 -1.6559E-01 1.7910E+00 8.8910E+00 9.2857E-03 7.3425E-02 1.5402E-03
SUBTHR.LOSS 1.1205E-01 4.2653E-01 1.8606E+01 4.9888E+02 6.5310E-01 6.8212E-04 9.9404E-03 2.4433E-01
ELAST.LOSS 1.1645E-01 5.9432E-01 2.7764E+01 1.3026E+03 7.7092E-01 8.0641E-04 2.2429E-02 1.2301E+00
WEAK EL.LOSS 2.7690E-03 3.2146E-05 3.0433E+00 1.2616E+01 5.6697E-03 5.9307E-06 1.1460E-07 5.9581E-03
INELAST.LOSS 1.6112E+01 7.8896E+01 -1.6288E-01 1.7922E+00 8.8824E+00 9.2912E-03 7.3457E-02 1.5418E-03
SUBTHR.LOSS 1.1271E-01 4.3504E-01 1.8939E+01 5.1744E+02 6.5957E-01 6.8997E-04 1.0342E-02 2.4220E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 2.2069E+02 5.4369E+04 1.4322E+07 3.9631E+09 1.1405E+12 3.3915E+14
PENETRATION 2.1906E+02 5.3798E+04 1.4144E+07 3.9059E+09 1.1213E+12 3.3239E+14
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 21 0.4327E-02 0 1.3585E+06 4.1043E+03 4.0844E+03 5.9306E+02 3.4914E+03 4.4360E+02 13
20.- 40. 56 0.1154E-01 0 1.3650E+06 4.7576E+03 4.7243E+03 5.2789E+02 4.1964E+03 3.9766E+02 12
40.- 60. 69 0.1422E-01 0 1.3668E+06 5.0550E+03 5.0117E+03 4.6088E+02 4.5508E+03 3.4830E+02 11
60.- 80. 88 0.1813E-01 0 1.3604E+06 5.8951E+03 5.8398E+03 4.7733E+02 5.3624E+03 3.5968E+02 12
80.- 100. 126 0.2596E-01 0 1.3300E+06 6.5825E+03 6.5101E+03 3.8596E+02 6.1241E+03 2.9101E+02 10
100.- 120. 168 0.3462E-01 0 1.2856E+06 7.3418E+03 7.2485E+03 4.1980E+02 6.8287E+03 3.1588E+02 11
120.- 140. 195 0.4018E-01 0 1.2188E+06 7.9481E+03 7.8341E+03 2.5706E+02 7.5771E+03 1.9397E+02 7
140.- 160. 260 0.5358E-01 0 1.1245E+06 8.3794E+03 8.2347E+03 8.0536E+01 8.1541E+03 6.0535E+01 2
160.- 180. 334 0.6882E-01 0 1.0233E+06 9.5738E+03 9.3855E+03 9.9811E+01 9.2857E+03 7.5754E+01 3
180.- 200. 452 0.9314E-01 0 8.9962E+05 9.6538E+03 9.4197E+03 0.0000E+00 9.4197E+03 0.0000E+00 0
200.- 220. 456 0.9396E-01 0 7.4759E+05 8.8801E+03 8.6369E+03 0.0000E+00 8.6369E+03 0.0000E+00 0
220.- 240. 517 0.1065E+00 0 6.0420E+05 8.6260E+03 8.3543E+03 0.0000E+00 8.3543E+03 0.0000E+00 0
240.- 260. 518 0.1067E+00 0 4.3733E+05 7.1553E+03 6.8864E+03 0.0000E+00 6.8864E+03 0.0000E+00 0
260.- 280. 506 0.1043E+00 0 3.0681E+05 5.8045E+03 5.5596E+03 0.0000E+00 5.5596E+03 0.0000E+00 0
280.- 300. 405 0.8345E-01 2 1.8677E+05 3.9507E+03 3.7516E+03 0.0000E+00 3.7516E+03 0.0000E+00 0
300.- 320. 313 0.6450E-01 12 1.0185E+05 2.4595E+03 2.3175E+03 0.0000E+00 2.3175E+03 0.0000E+00 0
320.- 340. 183 0.3771E-01 33 4.9853E+04 1.3426E+03 1.2592E+03 0.0000E+00 1.2592E+03 0.0000E+00 0
340.- 360. 112 0.2308E-01 158 2.3435E+04 7.0375E+02 6.5256E+02 0.0000E+00 6.5256E+02 0.0000E+00 0
360.- 380. 54 0.1113E-01 360 7.5808E+03 2.5507E+02 2.3318E+02 0.0000E+00 2.3318E+02 0.0000E+00 0
380.- 400. 14 0.2885E-02 672 1.8993E+03 6.8180E+01 6.1869E+01 0.0000E+00 6.1869E+01 0.0000E+00 0
400.- 420. 4 0.8242E-03 1055 3.7501E+02 1.3805E+01 1.2423E+01 0.0000E+00 1.2423E+01 0.0000E+00 0
420.- 440. 2 0.4121E-03 1070 6.5950E+01 4.1147E+00 3.4922E+00 0.0000E+00 3.4922E+00 0.0000E+00 0
440.- 460. 0 0.0000E+00 846 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 440 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 155 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 27 0.5559E-02 0 1.3541E+06 4.1656E+03 4.1469E+03 7.2371E+02 3.4232E+03 5.4340E+02 16
20.- 40. 63 0.1297E-01 0 1.3711E+06 4.8990E+03 4.8623E+03 7.0736E+02 4.1549E+03 5.3515E+02 17
40.- 60. 77 0.1585E-01 0 1.3707E+06 5.5221E+03 5.4751E+03 6.4620E+02 4.8288E+03 4.8624E+02 15
60.- 80. 100 0.2059E-01 0 1.3511E+06 6.0789E+03 6.0165E+03 4.9732E+02 5.5192E+03 3.7907E+02 14
80.- 100. 133 0.2738E-01 0 1.3162E+06 6.6614E+03 6.5848E+03 4.0020E+02 6.1846E+03 3.0309E+02 11
100.- 120. 167 0.3438E-01 0 1.2766E+06 7.3410E+03 7.2451E+03 2.3695E+02 7.0082E+03 1.7911E+02 6
120.- 140. 213 0.4385E-01 0 1.2061E+06 7.9407E+03 7.8215E+03 1.1703E+02 7.7045E+03 8.8050E+01 3
140.- 160. 248 0.5106E-01 0 1.1382E+06 8.9439E+03 8.8024E+03 3.2899E+01 8.7695E+03 2.4985E+01 1
160.- 180. 352 0.7247E-01 0 1.0090E+06 9.0258E+03 8.8383E+03 3.3284E+01 8.8050E+03 2.5263E+01 1
180.- 200. 400 0.8236E-01 0 8.9233E+05 9.2281E+03 9.0115E+03 3.0266E+01 8.9812E+03 2.3079E+01 1
200.- 220. 465 0.9574E-01 0 7.4231E+05 9.0052E+03 8.7593E+03 0.0000E+00 8.7593E+03 0.0000E+00 0
220.- 240. 533 0.1097E+00 0 5.9426E+05 8.4774E+03 8.1997E+03 0.0000E+00 8.1997E+03 0.0000E+00 0
240.- 260. 509 0.1048E+00 0 4.3887E+05 7.0773E+03 6.8105E+03 0.0000E+00 6.8105E+03 0.0000E+00 0
260.- 280. 490 0.1009E+00 1 2.9744E+05 5.6736E+03 5.4365E+03 0.0000E+00 5.4365E+03 0.0000E+00 0
280.- 300. 411 0.8462E-01 2 1.8178E+05 4.0558E+03 3.8568E+03 0.0000E+00 3.8568E+03 0.0000E+00 0
300.- 320. 291 0.5991E-01 12 1.0173E+05 2.4635E+03 2.3292E+03 0.0000E+00 2.3292E+03 0.0000E+00 0
320.- 340. 192 0.3953E-01 64 5.2131E+04 1.3841E+03 1.2959E+03 0.0000E+00 1.2959E+03 0.0000E+00 0
340.- 360. 126 0.2594E-01 154 2.3774E+04 7.4293E+02 6.8788E+02 0.0000E+00 6.8788E+02 0.0000E+00 0
360.- 380. 45 0.9265E-02 387 5.9647E+03 2.1360E+02 1.9482E+02 0.0000E+00 1.9482E+02 0.0000E+00 0
380.- 400. 10 0.2059E-02 695 1.0164E+03 3.6547E+01 3.2685E+01 0.0000E+00 3.2685E+01 0.0000E+00 0
400.- 420. 5 0.1029E-02 1016 3.0697E+02 1.6176E+01 1.4297E+01 0.0000E+00 1.4297E+01 0.0000E+00 0
420.- 440. 0 0.0000E+00 1087 4.1985E-01 2.8665E-02 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0
440.- 460. 0 0.0000E+00 812 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 418 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 156 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 45 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- SUT 0 0.0000E+00
580.- 600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- SUT 0 0.0000E+00
4853 1.0000E+00 4853 1.4800E+07 1.0855E+05 1.0602E+05 3.3023E+03 1.0272E+05 2.4864E+03 81
4857 1.0000E+00 4857 1.4725E+07 1.0895E+05 1.0642E+05 3.4252E+03 1.0300E+05 2.5874E+03 85
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.5557E+05 1.4368E+03 7.9712E+01 1.3571E+03 9.0289E+05 2.6476E+03 5.1335E+02 2.1343E+03 2 11
20.- 40. 4.5388E+05 1.6486E+03 1.5027E+02 1.4984E+03 9.1115E+05 3.0757E+03 3.7762E+02 2.6980E+03 4 8
40.- 60. 4.5293E+05 1.9645E+03 1.3952E+02 1.8250E+03 9.1385E+05 3.0472E+03 3.2136E+02 2.7259E+03 4 7
60.- 80. 4.5454E+05 1.9964E+03 3.5721E+01 1.9607E+03 9.0587E+05 3.8434E+03 4.4161E+02 3.4017E+03 1 11
80.- 100. 4.4238E+05 2.3330E+03 3.0218E+01 2.3028E+03 8.8765E+05 4.1771E+03 3.5574E+02 3.8213E+03 1 9
100.- 120. 4.2827E+05 2.5356E+03 0.0000E+00 2.5356E+03 8.5731E+05 4.7129E+03 4.1980E+02 4.2931E+03 0 11
120.- 140. 4.0602E+05 2.5894E+03 0.0000E+00 2.5894E+03 8.1280E+05 5.2447E+03 2.5706E+02 4.9877E+03 0 7
140.- 160. 3.7674E+05 2.6931E+03 0.0000E+00 2.6931E+03 7.4780E+05 5.5415E+03 8.0536E+01 5.4610E+03 0 2
160.- 180. 3.3596E+05 2.9576E+03 0.0000E+00 2.9576E+03 6.8730E+05 6.4279E+03 9.9811E+01 6.3281E+03 0 3
180.- 200. 2.9765E+05 3.0338E+03 0.0000E+00 3.0338E+03 6.0197E+05 6.3859E+03 0.0000E+00 6.3859E+03 0 0
200.- 220. 2.4955E+05 2.5735E+03 0.0000E+00 2.5735E+03 4.9804E+05 6.0634E+03 0.0000E+00 6.0634E+03 0 0
220.- 240. 1.9967E+05 2.5070E+03 0.0000E+00 2.5070E+03 4.0453E+05 5.8473E+03 0.0000E+00 5.8473E+03 0 0
240.- 260. 1.4557E+05 2.0893E+03 0.0000E+00 2.0893E+03 2.9177E+05 4.7971E+03 0.0000E+00 4.7971E+03 0 0
260.- 280. 1.0154E+05 1.6792E+03 0.0000E+00 1.6792E+03 2.0527E+05 3.8804E+03 0.0000E+00 3.8804E+03 0 0
280.- 300. 6.1141E+04 1.1296E+03 0.0000E+00 1.1296E+03 1.2563E+05 2.6219E+03 0.0000E+00 2.6219E+03 0 0
300.- 320. 3.4472E+04 6.7523E+02 0.0000E+00 6.7523E+02 6.7377E+04 1.6423E+03 0.0000E+00 1.6423E+03 0 0
320.- 340. 1.5710E+04 3.5948E+02 0.0000E+00 3.5948E+02 3.4143E+04 8.9974E+02 0.0000E+00 8.9974E+02 0 0
340.- 360. 7.4334E+03 1.6335E+02 0.0000E+00 1.6335E+02 1.6002E+04 4.8921E+02 0.0000E+00 4.8921E+02 0 0
360.- 380. 2.4262E+03 5.5587E+01 0.0000E+00 5.5587E+01 5.1547E+03 1.7759E+02 0.0000E+00 1.7759E+02 0 0
380.- 400. 6.6378E+02 1.7883E+01 0.0000E+00 1.7883E+01 1.2355E+03 4.3987E+01 0.0000E+00 4.3987E+01 0 0
400.- 420. 9.6318E+01 1.6786E+00 0.0000E+00 1.6786E+00 2.7869E+02 1.0744E+01 0.0000E+00 1.0744E+01 0 0
420.- 440. 1.7338E+01 4.1269E-01 0.0000E+00 4.1269E-01 4.8613E+01 3.0795E+00 0.0000E+00 3.0795E+00 0 0
0.- 20. 4.4804E+05 1.3741E+03 1.4968E+02 1.2244E+03 9.0609E+05 2.7728E+03 5.7403E+02 2.1988E+03 4 12
20.- 40. 4.6000E+05 1.6978E+03 1.8607E+02 1.5117E+03 9.1109E+05 3.1645E+03 5.2129E+02 2.6432E+03 5 12
40.- 60. 4.5386E+05 1.9388E+03 1.3745E+02 1.8013E+03 9.1681E+05 3.5363E+03 5.0876E+02 3.0275E+03 4 11
60.- 80. 4.5328E+05 2.1452E+03 1.2824E+02 2.0170E+03 8.9779E+05 3.8713E+03 3.6908E+02 3.5022E+03 4 10
80.- 100. 4.3710E+05 2.2575E+03 3.4094E+01 2.2234E+03 8.7905E+05 4.3273E+03 3.6611E+02 3.9612E+03 1 10
100.- 120. 4.2632E+05 2.3770E+03 3.5240E+01 2.3417E+03 8.5026E+05 4.8682E+03 2.0171E+02 4.6664E+03 1 5
120.- 140. 4.0331E+05 2.5136E+03 0.0000E+00 2.5136E+03 8.0282E+05 5.3079E+03 1.1703E+02 5.1909E+03 0 3
140.- 160. 3.7830E+05 2.8527E+03 0.0000E+00 2.8527E+03 7.5989E+05 5.9497E+03 3.2899E+01 5.9168E+03 0 1
160.- 180. 3.3518E+05 2.7628E+03 0.0000E+00 2.7628E+03 6.7386E+05 6.0755E+03 3.3284E+01 6.0422E+03 0 1
180.- 200. 2.9380E+05 2.8077E+03 0.0000E+00 2.8077E+03 5.9853E+05 6.2038E+03 3.0266E+01 6.1735E+03 0 1
200.- 220. 2.4259E+05 2.6196E+03 0.0000E+00 2.6196E+03 4.9973E+05 6.1397E+03 0.0000E+00 6.1397E+03 0 0
220.- 240. 1.9632E+05 2.5112E+03 0.0000E+00 2.5112E+03 3.9793E+05 5.6885E+03 0.0000E+00 5.6885E+03 0 0
240.- 260. 1.4776E+05 2.1222E+03 0.0000E+00 2.1222E+03 2.9111E+05 4.6883E+03 0.0000E+00 4.6883E+03 0 0
260.- 280. 9.7696E+04 1.5764E+03 0.0000E+00 1.5764E+03 1.9974E+05 3.8601E+03 0.0000E+00 3.8601E+03 0 0
280.- 300. 5.9678E+04 1.1219E+03 0.0000E+00 1.1219E+03 1.2210E+05 2.7349E+03 0.0000E+00 2.7349E+03 0 0
300.- 320. 3.3728E+04 6.7248E+02 0.0000E+00 6.7248E+02 6.8004E+04 1.6567E+03 0.0000E+00 1.6567E+03 0 0
320.- 340. 1.7228E+04 3.5739E+02 0.0000E+00 3.5739E+02 3.4903E+04 9.3852E+02 0.0000E+00 9.3852E+02 0 0
340.- 360. 8.0718E+03 2.0314E+02 0.0000E+00 2.0314E+02 1.5702E+04 4.8474E+02 0.0000E+00 4.8474E+02 0 0
360.- 380. 1.9762E+03 5.0995E+01 0.0000E+00 5.0995E+01 3.9885E+03 1.4383E+02 0.0000E+00 1.4383E+02 0 0
380.- 400. 3.0700E+02 1.0313E+01 0.0000E+00 1.0313E+01 7.0943E+02 2.2372E+01 0.0000E+00 2.2372E+01 0 0
400.- 420. 1.2611E+02 4.0839E+00 0.0000E+00 4.0839E+00 1.8086E+02 1.0213E+01 0.0000E+00 1.0213E+01 0 0
420.- 440. 4.1985E-01 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
460.- 480. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
4.9222E+06 3.4441E+04 4.3544E+02 3.4006E+04 9.8781E+06 7.1581E+04 2.8669E+03 6.8714E+04 12 69
4.8947E+06 3.3977E+04 6.7077E+02 3.3306E+04 9.8303E+06 7.2445E+04 2.7544E+03 6.9691E+04 19 66
DAMAGE IN LAYER 1 : 1.0602E+05
DAMAGE IN LAYER 1 : 1.0642E+05
DAMAGE IN LAYER 2 : 0.0000E+00
1
@@ -222,18 +224,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.9400E-02 ENERGY REFL.COEF.= 8.0839E-03 REL.MEAN ENERGY = 2.7496E-01 MEAN ENERGY = 8.2489E+02
PART.REFL.COEF.= 2.8600E-02 ENERGY REFL.COEF.= 8.4499E-03 REL.MEAN ENERGY = 2.9545E-01 MEAN ENERGY = 8.8635E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.2489E+02 5.8790E+05 1.0046E+00 2.9362E+00 7.6674E+02 6.3240E+01 6.7470E+04 1.5483E-01
PATHLENGTH 2.2793E+02 1.1951E+04 -2.3345E-01 2.1539E+00 1.0932E+02 9.0164E+00 1.0588E+03 1.2957E-01
ELASTIC LOSS 3.4002E+01 2.0435E+02 1.4295E+01 9.7247E-02
INEL. LOSS 2.0828E+03 7.5604E+05 8.6950E+02 5.9150E+00
ENERGY 8.8635E+02 6.1152E+05 1.1259E+00 3.4515E+00 7.8200E+02 6.5394E+01 8.0069E+04 1.6306E-01
PATHLENGTH 2.1399E+02 9.9029E+03 -3.5218E-01 2.0818E+00 9.9513E+01 8.3217E+00 8.6132E+02 1.2601E-01
ELASTIC LOSS 3.4934E+01 2.2564E+02 1.5021E+01 1.0504E-01
INEL. LOSS 1.9902E+03 6.5831E+05 8.1137E+02 5.6739E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.2489E+02 1.2683E+06 2.4690E+09 5.3721E+12 1.2462E+16 3.0146E+19
LOGENERGY 2.6567E+00 7.3698E+00 2.1105E+01 6.1927E+01 1.8524E+02 5.6286E+02
PATHLENGTH 2.2793E+02 6.3902E+04 1.9708E+07 6.4537E+09 2.2085E+12 7.8320E+14
ENERGY 8.8635E+02 1.3971E+06 2.8608E+09 6.6994E+12 1.6993E+16 4.5424E+19
LOGENERGY 2.7485E+00 7.7631E+00 2.2443E+01 6.6183E+01 1.9852E+02 6.0424E+02
PATHLENGTH 2.1399E+02 5.5694E+04 1.5809E+07 4.7247E+09 1.4630E+12 4.6533E+14
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -241,5 +243,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 1 4 1 3 6 2 3 10 5 11 9 14 12 15 19 17 15
0.000 0.000 0.000 0.136 0.544 0.136 0.408 0.816 0.272 0.408 1.361 0.680 1.497 1.224 1.905 1.633 2.041 2.585 2.313 2.041
0 0 1 2 4 3 4 4 7 7 7 10 8 13 9 11 10 14 16 13
0.000 0.000 0.140 0.280 0.559 0.420 0.559 0.559 0.979 0.979 0.979 1.399 1.119 1.818 1.259 1.538 1.399 1.958 2.238 1.818
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.rge
+23 -22
View File
@@ -1,26 +1,26 @@
DEPTH PARTICLES
10.0000 21
30.0000 56
50.0000 69
70.0000 88
90.0000 126
110.0000 168
130.0000 195
150.0000 260
170.0000 334
190.0000 452
210.0000 456
230.0000 517
250.0000 518
270.0000 506
290.0000 405
310.0000 313
330.0000 183
350.0000 112
370.0000 54
390.0000 14
410.0000 4
430.0000 2
10.0000 27
30.0000 63
50.0000 77
70.0000 100
90.0000 133
110.0000 167
130.0000 213
150.0000 248
170.0000 352
190.0000 400
210.0000 465
230.0000 533
250.0000 509
270.0000 490
290.0000 411
310.0000 291
330.0000 192
350.0000 126
370.0000 45
390.0000 10
410.0000 5
430.0000 0
450.0000 0
470.0000 0
490.0000 0
@@ -28,3 +28,4 @@
530.0000 0
550.0000 0
570.0000 0
590.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
3.00 0.45 0.00 15.00 5000 4853 147 0 5000 0 0.2207E+03 0.7526E+02 0.8249E+03 0.7667E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4853 0
3.00 0.45 0.00 15.00 5000 4857 143 0 5000 0 0.2191E+03 0.7622E+02 0.8864E+03 0.7820E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4857 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.out
+98 -96
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:55
Start: 19.Jun. 2026 18:18:13
End: 18.Jun. 2026 09:55:57
End: 19.Jun. 2026 18:18:14
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
19519 0 0 0 0 0 0 0 0
19523 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4931 ENERGY=0.2466E+08 EV
BACKSCATTERED PARTICLES= 69 ENERGY=0.1112E+06 EV
IMPLANTED PARTICLES= 4920 ENERGY=0.2460E+08 EV
BACKSCATTERED PARTICLES= 80 ENERGY=0.1048E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,130 +122,131 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4893 4893
IMPLANTED PARTICLES (LAYER 1)= 4880 4880
IMPLANTED PARTICLES (LAYER 2)= 38 38
IMPLANTED PARTICLES (LAYER 2)= 40 40
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 246.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.032
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.165
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 246.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.032
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.192
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 3.3350E+02 8.8527E+03 -7.3592E-01 3.3863E+00 9.4089E+01 1.3399E+00 1.9475E+02 2.9425E-02
SPREAD 1.6909E+02 6.9527E+03 4.7084E-01 2.8104E+00 8.3383E+01 1.1874E+00 1.3322E+02 2.6713E-02
PATHLENGTH 5.6624E+02 9.2962E+02 -1.9113E-02 3.1483E+00 3.0490E+01 4.3419E-01 1.9404E+01 3.7573E-02
ELASTIC LOSS 2.5302E+01 1.3881E+02 1.1782E+01 2.3894E-03
INEL. LOSS 4.9688E+03 1.9721E+05 4.4409E+02 9.0060E-02
PENETRATION 3.3431E+02 9.1123E+03 -7.5591E-01 3.3696E+00 9.5458E+01 1.3609E+00 1.9998E+02 2.8724E-02
SPREAD 1.6707E+02 6.8868E+03 4.1445E-01 2.7291E+00 8.2987E+01 1.1831E+00 1.2911E+02 2.6580E-02
PATHLENGTH 5.6671E+02 9.5456E+02 -2.5698E-02 3.0454E+00 3.0896E+01 4.4047E-01 1.9463E+01 3.6776E-02
ELASTIC LOSS 2.5362E+01 1.4389E+02 1.1996E+01 2.4381E-03
INEL. LOSS 4.9754E+03 2.0238E+05 4.4987E+02 9.1437E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.0248E-01 7.3173E-01 4.2559E+01 3.3094E+03 8.5541E-01 7.7093E-04 3.7931E-02 2.9030E+00
WEAK EL.LOSS 2.0989E-03 2.5392E-05 3.6054E+00 1.6950E+01 5.0390E-03 4.5413E-06 9.1391E-08 6.6069E-03
INELAST.LOSS 2.0081E+01 1.0718E+02 -3.5590E-01 1.8373E+00 1.0353E+01 9.3303E-03 8.8387E-02 1.3821E-03
SUBTHR.LOSS 9.6447E-02 4.0406E-01 2.0685E+01 6.0428E+02 6.3566E-01 5.7291E-04 8.9448E-03 2.2683E-01
ELAST.LOSS 1.0271E-01 7.2104E-01 4.0273E+01 2.8546E+03 8.4914E-01 7.6499E-04 3.4700E-02 2.1798E+00
WEAK EL.LOSS 2.0954E-03 2.5373E-05 3.6104E+00 1.6988E+01 5.0372E-03 4.5380E-06 9.1401E-08 6.6128E-03
INELAST.LOSS 2.0098E+01 1.0722E+02 -3.5686E-01 1.8386E+00 1.0355E+01 9.3286E-03 8.8454E-02 1.3817E-03
SUBTHR.LOSS 9.6721E-02 4.0552E-01 2.0417E+01 5.8991E+02 6.3680E-01 5.7374E-04 8.8662E-03 2.2868E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 3.3350E+02 1.2008E+05 4.5338E+07 1.7726E+10 7.1254E+12 2.9309E+15
PENETRATION 3.3431E+02 1.2087E+05 4.5844E+07 1.8001E+10 7.2652E+12 2.9998E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 11 0.2231E-02 0 1.5492E+06 3.0532E+03 3.0451E+03 8.2965E+02 2.2155E+03 6.0197E+02 12
20.- 40. 16 0.3245E-02 0 1.5566E+06 3.0417E+03 3.0298E+03 5.6968E+02 2.4602E+03 4.2791E+02 13
40.- 60. 16 0.3245E-02 0 1.5565E+06 3.4434E+03 3.4298E+03 7.6258E+02 2.6672E+03 5.6793E+02 14
60.- 80. 19 0.3853E-02 0 1.5535E+06 3.3544E+03 3.3388E+03 4.2557E+02 2.9132E+03 3.2434E+02 10
80.- 100. 40 0.8112E-02 0 1.5478E+06 4.0120E+03 3.9872E+03 8.8231E+02 3.1049E+03 6.5804E+02 18
100.- 120. 54 0.1095E-01 0 1.5243E+06 3.9655E+03 3.9347E+03 5.7570E+02 3.3590E+03 4.2677E+02 11
120.- 140. 58 0.1176E-01 0 1.4981E+06 4.6610E+03 4.6255E+03 6.0779E+02 4.0177E+03 4.5263E+02 12
140.- 160. 70 0.1420E-01 0 1.4653E+06 4.8230E+03 4.7809E+03 4.8910E+02 4.2918E+03 3.6929E+02 11
160.- 180. 91 0.1845E-01 0 1.4388E+06 5.4851E+03 5.4317E+03 6.5516E+02 4.7765E+03 4.9370E+02 16
180.- 200. 98 0.1987E-01 0 1.4015E+06 5.8634E+03 5.8029E+03 3.5793E+02 5.4450E+03 2.6950E+02 9
200.- 220. 136 0.2758E-01 0 1.3442E+06 6.5398E+03 6.4644E+03 5.6264E+02 5.9017E+03 4.2267E+02 13
220.- 240. 164 0.3326E-01 0 1.2907E+06 6.9287E+03 6.8338E+03 2.5397E+02 6.5798E+03 1.9249E+02 7
240.- 260. 196 0.3975E-01 0 1.2183E+06 7.4992E+03 7.3888E+03 2.4261E+02 7.1462E+03 1.8208E+02 6
260.- 280. 267 0.5415E-01 0 1.1271E+06 7.9719E+03 7.8265E+03 1.1231E+02 7.7142E+03 8.4616E+01 3
280.- 300. 320 0.6490E-01 0 1.0305E+06 8.6392E+03 8.4647E+03 1.1202E+02 8.3527E+03 8.4463E+01 3
300.- 320. 355 0.7199E-01 0 8.9625E+05 8.7163E+03 8.5231E+03 0.0000E+00 8.5231E+03 0.0000E+00 0
320.- 340. 402 0.8153E-01 0 7.5570E+05 8.3138E+03 8.1058E+03 0.0000E+00 8.1058E+03 0.0000E+00 0
340.- 360. 418 0.8477E-01 0 6.1982E+05 7.7240E+03 7.4999E+03 0.0000E+00 7.4999E+03 0.0000E+00 0
360.- 380. 451 0.9146E-01 0 4.8513E+05 7.2021E+03 6.9682E+03 0.0000E+00 6.9682E+03 0.0000E+00 0
380.- 400. 474 0.9613E-01 0 3.5429E+05 6.1131E+03 5.8740E+03 0.0000E+00 5.8740E+03 0.0000E+00 0
400.- 420. 439 0.8903E-01 0 2.4152E+05 4.8016E+03 4.5893E+03 0.0000E+00 4.5893E+03 0.0000E+00 0
420.- 440. 318 0.6449E-01 0 1.4047E+05 3.1162E+03 2.9608E+03 0.0000E+00 2.9608E+03 0.0000E+00 0
440.- 460. 224 0.4543E-01 3 7.3988E+04 1.8889E+03 1.7824E+03 0.0000E+00 1.7824E+03 0.0000E+00 0
460.- 480. 183 0.3711E-01 14 3.7284E+04 1.0759E+03 9.9920E+02 0.0000E+00 9.9920E+02 0.0000E+00 0
480.- 500. 73 0.1480E-01 57 1.2583E+04 4.2983E+02 3.9756E+02 0.0000E+00 3.9756E+02 0.0000E+00 0
500.- 520. 27 0.5476E-02 246 3.5126E+03 7.1383E+01 6.6660E+01 0.0000E+00 6.6660E+01 0.0000E+00 0
520.- 540. 8 0.1622E-02 623 5.0010E+02 1.1002E+01 1.0221E+01 0.0000E+00 1.0221E+01 0.0000E+00 0
540.- 560. 3 0.6084E-03 1121 2.4072E+02 5.7635E+00 5.3992E+00 0.0000E+00 5.3992E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1267 2.1469E+01 4.6759E-01 4.2884E-01 0.0000E+00 4.2884E-01 0.0000E+00 0
580.- 600. 0 0.0000E+00 946 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 465 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 144 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 38 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 6 0.1220E-02 0 1.5486E+06 2.7100E+03 2.7028E+03 4.6180E+02 2.2410E+03 3.5044E+02 10
20.- 40. 15 0.3049E-02 0 1.5568E+06 2.8122E+03 2.7998E+03 2.7768E+02 2.5222E+03 2.0642E+02 5
40.- 60. 27 0.5488E-02 0 1.5504E+06 3.2218E+03 3.2061E+03 7.8139E+02 2.4247E+03 5.7603E+02 13
60.- 80. 36 0.7317E-02 0 1.5368E+06 3.6710E+03 3.6495E+03 7.6659E+02 2.8829E+03 5.7589E+02 16
80.- 100. 37 0.7520E-02 0 1.5349E+06 3.9104E+03 3.8855E+03 6.4358E+02 3.2419E+03 4.7769E+02 12
100.- 120. 40 0.8130E-02 0 1.5325E+06 4.4587E+03 4.4327E+03 8.9359E+02 3.5391E+03 6.7317E+02 20
120.- 140. 51 0.1037E-01 0 1.5040E+06 4.3310E+03 4.2971E+03 4.2155E+02 3.8756E+03 3.1969E+02 10
140.- 160. 64 0.1301E-01 0 1.4728E+06 5.1490E+03 5.1092E+03 6.1711E+02 4.4921E+03 4.6544E+02 14
160.- 180. 101 0.2053E-01 0 1.4530E+06 5.6202E+03 5.5656E+03 7.6148E+02 4.8041E+03 5.6672E+02 16
180.- 200. 113 0.2297E-01 0 1.4198E+06 6.5173E+03 6.4504E+03 8.5762E+02 5.5928E+03 6.3932E+02 19
200.- 220. 146 0.2967E-01 0 1.3764E+06 6.5568E+03 6.4747E+03 2.4463E+02 6.2301E+03 1.8696E+02 7
220.- 240. 154 0.3130E-01 0 1.2893E+06 6.7289E+03 6.6380E+03 1.4847E+02 6.4895E+03 1.1191E+02 4
240.- 260. 205 0.4167E-01 0 1.2071E+06 7.4390E+03 7.3263E+03 2.3686E+02 7.0894E+03 1.7811E+02 6
260.- 280. 240 0.4878E-01 0 1.1224E+06 7.7480E+03 7.6139E+03 1.0976E+02 7.5042E+03 8.2910E+01 3
280.- 300. 297 0.6037E-01 0 1.0111E+06 8.6354E+03 8.4741E+03 1.1063E+02 8.3635E+03 8.3456E+01 3
300.- 320. 317 0.6443E-01 0 8.9999E+05 8.5029E+03 8.3233E+03 3.4308E+01 8.2890E+03 2.6002E+01 1
320.- 340. 385 0.7825E-01 0 7.6180E+05 8.2272E+03 8.0210E+03 3.1879E+01 7.9891E+03 2.4248E+01 1
340.- 360. 448 0.9106E-01 0 6.2373E+05 8.1328E+03 7.9003E+03 0.0000E+00 7.9003E+03 0.0000E+00 0
360.- 380. 463 0.9411E-01 0 4.8160E+05 7.1319E+03 6.8937E+03 0.0000E+00 6.8937E+03 0.0000E+00 0
380.- 400. 472 0.9593E-01 0 3.6677E+05 6.3623E+03 6.1213E+03 0.0000E+00 6.1213E+03 0.0000E+00 0
400.- 420. 436 0.8862E-01 0 2.3627E+05 4.6441E+03 4.4305E+03 0.0000E+00 4.4305E+03 0.0000E+00 0
420.- 440. 341 0.6931E-01 0 1.4278E+05 3.0678E+03 2.9053E+03 0.0000E+00 2.9053E+03 0.0000E+00 0
440.- 460. 241 0.4898E-01 2 7.9414E+04 2.0268E+03 1.9166E+03 0.0000E+00 1.9166E+03 0.0000E+00 0
460.- 480. 156 0.3171E-01 14 3.5830E+04 1.0060E+03 9.3386E+02 0.0000E+00 9.3386E+02 0.0000E+00 0
480.- 500. 89 0.1809E-01 56 1.2781E+04 4.0605E+02 3.7119E+02 0.0000E+00 3.7119E+02 0.0000E+00 0
500.- 520. 22 0.4472E-02 244 3.7514E+03 8.1530E+01 7.7013E+01 0.0000E+00 7.7013E+01 0.0000E+00 0
520.- 540. 14 0.2846E-02 608 1.2422E+03 2.5275E+01 2.3272E+01 0.0000E+00 2.3272E+01 0.0000E+00 0
540.- 560. 3 0.6098E-03 1116 3.1018E+02 5.9354E+00 5.6338E+00 0.0000E+00 5.6338E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1225 1.1604E+02 2.8306E+00 2.6952E+00 0.0000E+00 2.6952E+00 0.0000E+00 0
580.- 600. 1 0.2033E-03 973 2.9102E+00 1.3337E-01 9.4219E-02 0.0000E+00 9.4219E-02 0.0000E+00 0
600.- 620. 0 0.0000E+00 480 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 160 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 33 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- SUT 0 0.0000E+00
720.- 740. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- SUT 0 0.0000E+00
4931 1.0000E+00 4931 2.4724E+07 1.2875E+05 1.2617E+05 7.4390E+03 1.1873E+05 5.5584E+03 158
4920 1.0000E+00 4920 2.4762E+07 1.2913E+05 1.2655E+05 7.3989E+03 1.1915E+05 5.5444E+03 160
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1768E+05 9.7284E+02 1.1456E+02 8.5828E+02 1.0315E+06 2.0723E+03 7.1509E+02 1.3572E+03 3 9
20.- 40. 5.2031E+05 1.0585E+03 1.0443E+02 9.5405E+02 1.0363E+06 1.9713E+03 4.6525E+02 1.5061E+03 3 10
40.- 60. 5.1574E+05 1.4046E+03 3.3855E+02 1.0661E+03 1.0407E+06 2.0252E+03 4.2403E+02 1.6011E+03 8 6
60.- 80. 5.2094E+05 1.3760E+03 2.1012E+02 1.1659E+03 1.0326E+06 1.9627E+03 2.1544E+02 1.7473E+03 5 5
80.- 100. 5.1664E+05 1.3415E+03 1.2132E+02 1.2201E+03 1.0312E+06 2.6457E+03 7.6099E+02 1.8847E+03 3 15
100.- 120. 5.1043E+05 1.4000E+03 7.2380E+01 1.3276E+03 1.0139E+06 2.5348E+03 5.0332E+02 2.0315E+03 2 9
120.- 140. 5.0108E+05 1.7333E+03 1.1474E+02 1.6186E+03 9.9698E+05 2.8922E+03 4.9305E+02 2.3991E+03 3 9
140.- 160. 4.8899E+05 1.7639E+03 1.6150E+02 1.6024E+03 9.7630E+05 3.0170E+03 3.2760E+02 2.6894E+03 4 7
160.- 180. 4.7692E+05 1.8934E+03 1.0630E+02 1.7871E+03 9.6191E+05 3.5383E+03 5.4886E+02 2.9895E+03 3 13
180.- 200. 4.6423E+05 2.1045E+03 3.1355E+01 2.0731E+03 9.3724E+05 3.6984E+03 3.2657E+02 3.3719E+03 1 8
200.- 220. 4.4975E+05 2.3611E+03 6.8443E+01 2.2927E+03 8.9441E+05 4.1032E+03 4.9420E+02 3.6090E+03 2 11
220.- 240. 4.3227E+05 2.2407E+03 3.0445E+01 2.2103E+03 8.5838E+05 4.5930E+03 2.2352E+02 4.3695E+03 1 6
240.- 260. 4.0522E+05 2.4160E+03 0.0000E+00 2.4160E+03 8.1310E+05 4.9728E+03 2.4261E+02 4.7302E+03 0 6
260.- 280. 3.7666E+05 2.4949E+03 0.0000E+00 2.4949E+03 7.5048E+05 5.3317E+03 1.1231E+02 5.2193E+03 0 3
280.- 300. 3.4417E+05 2.7913E+03 0.0000E+00 2.7913E+03 6.8634E+05 5.6734E+03 1.1202E+02 5.5614E+03 0 3
300.- 320. 2.9876E+05 2.7165E+03 0.0000E+00 2.7165E+03 5.9749E+05 5.8066E+03 0.0000E+00 5.8066E+03 0 0
320.- 340. 2.5104E+05 2.5438E+03 0.0000E+00 2.5438E+03 5.0465E+05 5.5620E+03 0.0000E+00 5.5620E+03 0 0
340.- 360. 2.0520E+05 2.3344E+03 0.0000E+00 2.3344E+03 4.1462E+05 5.1655E+03 0.0000E+00 5.1655E+03 0 0
360.- 380. 1.6026E+05 2.0651E+03 0.0000E+00 2.0651E+03 3.2487E+05 4.9031E+03 0.0000E+00 4.9031E+03 0 0
380.- 400. 1.1896E+05 1.8215E+03 0.0000E+00 1.8215E+03 2.3533E+05 4.0525E+03 0.0000E+00 4.0525E+03 0 0
400.- 420. 8.0977E+04 1.3920E+03 0.0000E+00 1.3920E+03 1.6054E+05 3.1973E+03 0.0000E+00 3.1973E+03 0 0
420.- 440. 4.6119E+04 8.3804E+02 0.0000E+00 8.3804E+02 9.4353E+04 2.1228E+03 0.0000E+00 2.1228E+03 0 0
440.- 460. 2.4560E+04 5.0543E+02 0.0000E+00 5.0543E+02 4.9428E+04 1.2770E+03 0.0000E+00 1.2770E+03 0 0
460.- 480. 1.2483E+04 2.8338E+02 0.0000E+00 2.8338E+02 2.4801E+04 7.1582E+02 0.0000E+00 7.1582E+02 0 0
480.- 500. 4.1121E+03 1.1403E+02 0.0000E+00 1.1403E+02 8.3520E+03 2.8171E+02 0.0000E+00 2.8171E+02 0 0
500.- 520. 1.0171E+02 3.2236E+00 0.0000E+00 3.2236E+00 2.6257E+02 5.9143E+00 0.0000E+00 5.9143E+00 0 0
0.- 20. 5.1486E+05 1.0721E+03 2.1632E+02 8.5583E+02 1.0338E+06 1.6306E+03 2.4548E+02 1.3851E+03 4 6
20.- 40. 5.1538E+05 1.0649E+03 9.0520E+01 9.7438E+02 1.0414E+06 1.7349E+03 1.8716E+02 1.5478E+03 2 3
40.- 60. 5.1456E+05 1.1280E+03 1.9288E+02 9.3510E+02 1.0358E+06 2.0781E+03 5.8851E+02 1.4896E+03 5 8
60.- 80. 5.1492E+05 1.3796E+03 2.9313E+02 1.0864E+03 1.0219E+06 2.2700E+03 4.7346E+02 1.7965E+03 7 9
80.- 100. 5.0681E+05 1.4653E+03 1.5713E+02 1.3082E+03 1.0281E+06 2.4201E+03 4.8644E+02 1.9337E+03 4 8
100.- 120. 5.0863E+05 1.7589E+03 2.9608E+02 1.4628E+03 1.0239E+06 2.6738E+03 5.9751E+02 2.0763E+03 8 12
120.- 140. 4.9884E+05 1.7609E+03 1.5813E+02 1.6028E+03 1.0051E+06 2.5362E+03 2.6342E+02 2.2728E+03 4 6
140.- 160. 4.8936E+05 1.8486E+03 2.1144E+02 1.6371E+03 9.8343E+05 3.2606E+03 4.0566E+02 2.8550E+03 6 8
160.- 180. 4.8072E+05 2.0130E+03 7.3077E+01 1.9399E+03 9.7228E+05 3.5526E+03 6.8840E+02 2.8642E+03 2 14
180.- 200. 4.7787E+05 2.1644E+03 0.0000E+00 2.1644E+03 9.4191E+05 4.2861E+03 8.5762E+02 3.4284E+03 0 19
200.- 220. 4.5961E+05 2.3311E+03 7.1035E+01 2.2600E+03 9.1677E+05 4.1437E+03 1.7360E+02 3.9701E+03 2 5
220.- 240. 4.3134E+05 2.3922E+03 0.0000E+00 2.3922E+03 8.5796E+05 4.2458E+03 1.4847E+02 4.0973E+03 0 4
240.- 260. 3.9687E+05 2.4265E+03 0.0000E+00 2.4265E+03 8.1026E+05 4.8998E+03 2.3686E+02 4.6630E+03 0 6
260.- 280. 3.7284E+05 2.3985E+03 0.0000E+00 2.3985E+03 7.4956E+05 5.2155E+03 1.0976E+02 5.1057E+03 0 3
280.- 300. 3.3638E+05 2.6301E+03 0.0000E+00 2.6301E+03 6.7468E+05 5.8441E+03 1.1063E+02 5.7334E+03 0 3
300.- 320. 3.0004E+05 2.6123E+03 0.0000E+00 2.6123E+03 5.9996E+05 5.7110E+03 3.4308E+01 5.6767E+03 0 1
320.- 340. 2.5621E+05 2.4674E+03 0.0000E+00 2.4674E+03 5.0558E+05 5.5536E+03 3.1879E+01 5.5217E+03 0 1
340.- 360. 2.0414E+05 2.4392E+03 0.0000E+00 2.4392E+03 4.1959E+05 5.4611E+03 0.0000E+00 5.4611E+03 0 0
360.- 380. 1.6085E+05 2.0462E+03 0.0000E+00 2.0462E+03 3.2075E+05 4.8475E+03 0.0000E+00 4.8475E+03 0 0
380.- 400. 1.2219E+05 1.7378E+03 0.0000E+00 1.7378E+03 2.4458E+05 4.3835E+03 0.0000E+00 4.3835E+03 0 0
400.- 420. 7.8978E+04 1.3191E+03 0.0000E+00 1.3191E+03 1.5730E+05 3.1114E+03 0.0000E+00 3.1114E+03 0 0
420.- 440. 4.7315E+04 8.4491E+02 0.0000E+00 8.4491E+02 9.5469E+04 2.0604E+03 0.0000E+00 2.0604E+03 0 0
440.- 460. 2.6211E+04 5.1854E+02 0.0000E+00 5.1854E+02 5.3203E+04 1.3980E+03 0.0000E+00 1.3980E+03 0 0
460.- 480. 1.1401E+04 2.5344E+02 0.0000E+00 2.5344E+02 2.4429E+04 6.8041E+02 0.0000E+00 6.8041E+02 0 0
480.- 500. 4.0204E+03 9.4733E+01 0.0000E+00 9.4733E+01 8.6432E+03 2.7437E+02 0.0000E+00 2.7437E+02 0 0
500.- 520. 1.3266E+02 4.4402E+00 0.0000E+00 4.4402E+00 2.2936E+02 7.2359E+00 0.0000E+00 7.2359E+00 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.2436E+06 4.1970E+04 1.4741E+03 4.0496E+04 1.6476E+07 8.4122E+04 5.9649E+03 7.8157E+04 38 120
8.2305E+06 4.2172E+04 1.7598E+03 4.0412E+04 1.6527E+07 8.4280E+04 5.6392E+03 7.8641E+04 44 116
DAMAGE IN LAYER 1 : 1.2608E+05
DAMAGE IN LAYER 1 : 1.2644E+05
DAMAGE IN LAYER 2 : 8.2709E+01
DAMAGE IN LAYER 2 : 1.0871E+02
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.3800E-02 ENERGY REFL.COEF.= 4.4473E-03 REL.MEAN ENERGY = 3.2227E-01 MEAN ENERGY = 1.6113E+03
PART.REFL.COEF.= 1.6000E-02 ENERGY REFL.COEF.= 4.1940E-03 REL.MEAN ENERGY = 2.6212E-01 MEAN ENERGY = 1.3106E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.6113E+03 1.6754E+06 9.6981E-01 3.0387E+00 1.2944E+03 1.5583E+02 2.8799E+05 1.9887E-01
PATHLENGTH 2.7819E+02 1.7299E+04 -3.5249E-01 2.1131E+00 1.3152E+02 1.5834E+01 2.1971E+03 1.8131E-01
ELASTIC LOSS 5.7805E+01 7.3947E+02 2.7193E+01 3.9410E-01
INEL. LOSS 3.2259E+03 1.7484E+06 1.3223E+03 1.9163E+01
ENERGY 1.3106E+03 1.3964E+06 8.7869E-01 2.6557E+00 1.1817E+03 1.3212E+02 2.0088E+05 1.9292E-01
PATHLENGTH 3.1656E+02 1.8701E+04 -2.9976E-01 2.1365E+00 1.3675E+02 1.5289E+01 2.2290E+03 1.7249E-01
ELASTIC LOSS 5.4382E+01 5.8157E+02 2.4116E+01 3.0145E-01
INEL. LOSS 3.5387E+03 1.5784E+06 1.2563E+03 1.5704E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.6113E+03 4.2719E+06 1.4386E+10 5.4928E+13 2.2506E+17 9.6148E+20
LOGENERGY 3.0366E+00 9.4010E+00 2.9603E+01 9.4604E+01 3.0627E+02 1.0027E+03
PATHLENGTH 2.7819E+02 9.4689E+04 3.5164E+07 1.3762E+10 5.5843E+12 2.3289E+15
ENERGY 1.3106E+03 3.1141E+06 9.1914E+09 3.0121E+13 1.0486E+17 3.7930E+20
LOGENERGY 2.8631E+00 8.5014E+00 2.5962E+01 8.1052E+01 2.5755E+02 8.3024E+02
PATHLENGTH 3.1656E+02 1.1891E+05 4.8717E+07 2.1063E+10 9.4648E+12 4.3838E+15
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -252,5 +254,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 2 1 1 2 4 6 6 2 6 4 3 4 5 4 5 7 6
0.000 0.000 0.290 0.580 0.290 0.290 0.580 1.159 1.739 1.739 0.580 1.739 1.159 0.870 1.159 1.449 1.159 1.449 2.029 1.739
0 0 0 2 1 1 2 7 3 1 5 6 7 4 3 7 10 6 7 8
0.000 0.000 0.000 0.500 0.250 0.250 0.500 1.750 0.750 0.250 1.250 1.500 1.750 1.000 0.750 1.750 2.500 1.500 1.750 2.000
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.rge
+29 -28
View File
@@ -1,37 +1,38 @@
DEPTH PARTICLES
10.0000 11
30.0000 16
50.0000 16
70.0000 19
90.0000 40
110.0000 54
130.0000 58
150.0000 70
170.0000 91
190.0000 98
210.0000 136
230.0000 164
250.0000 196
270.0000 267
290.0000 320
310.0000 355
330.0000 402
350.0000 418
370.0000 451
390.0000 474
410.0000 439
430.0000 318
450.0000 224
470.0000 183
490.0000 73
510.0000 27
530.0000 8
10.0000 6
30.0000 15
50.0000 27
70.0000 36
90.0000 37
110.0000 40
130.0000 51
150.0000 64
170.0000 101
190.0000 113
210.0000 146
230.0000 154
250.0000 205
270.0000 240
290.0000 297
310.0000 317
330.0000 385
350.0000 448
370.0000 463
390.0000 472
410.0000 436
430.0000 341
450.0000 241
470.0000 156
490.0000 89
510.0000 22
530.0000 14
550.0000 3
570.0000 0
590.0000 0
590.0000 1
610.0000 0
630.0000 0
650.0000 0
670.0000 0
690.0000 0
710.0000 0
730.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
5.00 0.45 0.00 15.00 5000 4931 69 0 5000 0 0.3335E+03 0.9409E+02 0.1611E+04 0.1294E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4893 38
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3343E+03 0.9546E+02 0.1311E+04 0.1182E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4880 40
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.out
+105 -105
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:55
Start: 19.Jun. 2026 18:18:13
End: 18.Jun. 2026 09:55:57
End: 19.Jun. 2026 18:18:14
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
23954 0 0 0 0 0 0 0 0
23902 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4959 ENERGY=0.3471E+08 EV
BACKSCATTERED PARTICLES= 41 ENERGY=0.7242E+05 EV
IMPLANTED PARTICLES= 4947 ENERGY=0.3463E+08 EV
BACKSCATTERED PARTICLES= 53 ENERGY=0.1125E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,139 +122,138 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 3284 3284
IMPLANTED PARTICLES (LAYER 1)= 3258 3258
IMPLANTED PARTICLES (LAYER 2)= 1675 1675
IMPLANTED PARTICLES (LAYER 2)= 1689 1689
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.047
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.263
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.051
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.289
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 4.4522E+02 1.2534E+04 -8.6874E-01 3.8943E+00 1.1196E+02 1.5898E+00 3.0280E+02 3.4538E-02
SPREAD 2.0714E+02 1.0313E+04 4.3449E-01 2.7922E+00 1.0155E+02 1.4421E+00 1.9606E+02 2.7165E-02
PATHLENGTH 7.0548E+02 1.1267E+03 1.1958E-01 2.9992E+00 3.3566E+01 4.7666E-01 2.2623E+01 3.5475E-02
ELASTIC LOSS 2.7109E+01 2.1728E+02 1.4740E+01 2.9724E-03
INEL. LOSS 6.9779E+03 2.0430E+05 4.5199E+02 9.1146E-02
PENETRATION 4.4508E+02 1.2595E+04 -8.3747E-01 3.8142E+00 1.1223E+02 1.5956E+00 3.0041E+02 3.3802E-02
SPREAD 2.0711E+02 1.0412E+04 4.4098E-01 2.7968E+00 1.0204E+02 1.4508E+00 1.9844E+02 2.7761E-02
PATHLENGTH 7.0542E+02 1.1087E+03 1.3878E-01 2.9587E+00 3.3298E+01 4.7341E-01 2.2062E+01 3.5561E-02
ELASTIC LOSS 2.7345E+01 2.3243E+02 1.5246E+01 3.0818E-03
INEL. LOSS 6.9768E+03 1.9965E+05 4.4682E+02 9.0322E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 8.9466E-02 7.6995E-01 4.6154E+01 3.7695E+03 8.7747E-01 7.1310E-04 3.8412E-02 3.1180E+00
WEAK EL.LOSS 1.3855E-03 1.5510E-05 4.7001E+00 2.8207E+01 3.9383E-03 3.2006E-06 6.5746E-08 9.2001E-03
INELAST.LOSS 2.2993E+01 1.2041E+02 -5.5046E-01 1.9945E+00 1.0973E+01 8.9177E-03 9.7586E-02 1.3195E-03
SUBTHR.LOSS 8.2221E-02 3.7690E-01 2.2553E+01 7.0128E+02 6.1392E-01 4.9896E-04 8.1062E-03 2.1951E-01
ELAST.LOSS 9.0980E-02 8.9234E-01 5.4035E+01 5.1635E+03 9.4464E-01 7.6835E-04 5.2150E-02 3.7070E+00
WEAK EL.LOSS 1.3812E-03 1.5431E-05 4.7036E+00 2.8225E+01 3.9282E-03 3.1951E-06 6.5490E-08 9.1939E-03
INELAST.LOSS 2.2999E+01 1.2033E+02 -5.5110E-01 1.9953E+00 1.0970E+01 8.9224E-03 9.7646E-02 1.3209E-03
SUBTHR.LOSS 8.2495E-02 3.7317E-01 2.2017E+01 6.6445E+02 6.1088E-01 4.9692E-04 7.8189E-03 2.0984E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 4.4522E+02 2.1076E+05 1.0378E+08 5.2640E+10 2.7353E+13 1.4506E+16
PENETRATION 4.4508E+02 2.1069E+05 1.0380E+08 5.2711E+10 2.7432E+13 1.4576E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 3 0.6050E-03 0 1.6284E+06 2.2052E+03 2.2013E+03 3.9344E+02 1.8078E+03 2.9255E+02 7
20.- 40. 12 0.2420E-02 0 1.6454E+06 2.3213E+03 2.3134E+03 4.7119E+02 1.8422E+03 3.5586E+02 8
40.- 60. 10 0.2017E-02 0 1.6388E+06 2.6042E+03 2.5966E+03 6.7871E+02 1.9179E+03 4.9540E+02 11
60.- 80. 10 0.2017E-02 0 1.6457E+06 2.6460E+03 2.6378E+03 5.2536E+02 2.1125E+03 3.9674E+02 11
80.- 100. 13 0.2621E-02 0 1.6495E+06 2.3444E+03 2.3346E+03 3.2229E+02 2.0123E+03 2.5032E+02 9
100.- 120. 10 0.2017E-02 0 1.6324E+06 3.0436E+03 3.0348E+03 9.3421E+02 2.1006E+03 6.8956E+02 15
120.- 140. 17 0.3428E-02 0 1.6359E+06 2.8743E+03 2.8618E+03 6.0921E+02 2.2526E+03 4.4962E+02 11
140.- 160. 25 0.5041E-02 0 1.6435E+06 3.7405E+03 3.7239E+03 1.0707E+03 2.6532E+03 7.9668E+02 20
160.- 180. 46 0.9276E-02 0 1.6211E+06 3.7456E+03 3.7196E+03 5.8176E+02 3.1378E+03 4.4726E+02 13
180.- 200. 38 0.7663E-02 0 1.6070E+06 4.0777E+03 4.0510E+03 8.8702E+02 3.1640E+03 6.6328E+02 18
200.- 220. 50 0.1008E-01 0 1.5884E+06 4.0602E+03 4.0323E+03 5.9882E+02 3.4334E+03 4.5104E+02 14
220.- 240. 57 0.1149E-01 0 1.5578E+06 4.2294E+03 4.1937E+03 5.5271E+02 3.6410E+03 4.1884E+02 13
240.- 260. 60 0.1210E-01 0 1.5331E+06 4.7568E+03 4.7183E+03 5.5875E+02 4.1595E+03 4.2609E+02 14
260.- 280. 74 0.1492E-01 0 1.5019E+06 5.0616E+03 5.0165E+03 4.0987E+02 4.6066E+03 3.0816E+02 10
280.- 300. 106 0.2138E-01 0 1.4515E+06 5.9487E+03 5.8894E+03 7.5922E+02 5.1302E+03 5.7218E+02 19
300.- 320. 127 0.2561E-01 0 1.3915E+06 6.1590E+03 6.0884E+03 5.5578E+02 5.5326E+03 4.1670E+02 13
320.- 340. 125 0.2521E-01 0 1.3338E+06 6.4832E+03 6.4069E+03 2.2200E+02 6.1849E+03 1.6832E+02 6
340.- 360. 166 0.3347E-01 0 1.2774E+06 7.3501E+03 7.2529E+03 3.0867E+02 6.9443E+03 2.3284E+02 8
360.- 380. 231 0.4658E-01 0 1.1893E+06 7.1193E+03 6.9944E+03 7.3171E+01 6.9212E+03 5.5273E+01 2
380.- 400. 237 0.4779E-01 0 1.0941E+06 7.8698E+03 7.7361E+03 2.2469E+02 7.5114E+03 1.7005E+02 6
400.- 420. 304 0.6130E-01 0 9.8158E+05 7.8798E+03 7.7171E+03 1.3928E+02 7.5778E+03 1.0544E+02 4
420.- 440. 342 0.6897E-01 0 8.6637E+05 8.3340E+03 8.1507E+03 3.1275E+01 8.1194E+03 2.3811E+01 1
440.- 460. 394 0.7945E-01 0 7.3487E+05 7.7710E+03 7.5663E+03 8.0944E+01 7.4854E+03 6.0730E+01 2
460.- 480. 397 0.8006E-01 0 6.0730E+05 7.4939E+03 7.2790E+03 0.0000E+00 7.2790E+03 0.0000E+00 0
480.- 500. 430 0.8671E-01 0 4.7547E+05 6.8657E+03 6.6521E+03 0.0000E+00 6.6521E+03 0.0000E+00 0
500.- 520. 344 0.6937E-01 0 3.1249E+05 3.1923E+03 3.1262E+03 0.0000E+00 3.1262E+03 0.0000E+00 0
520.- 540. 353 0.7118E-01 0 2.3072E+05 2.5627E+03 2.5036E+03 0.0000E+00 2.5036E+03 0.0000E+00 0
540.- 560. 322 0.6493E-01 0 1.5419E+05 1.9949E+03 1.9404E+03 0.0000E+00 1.9404E+03 0.0000E+00 0
560.- 580. 238 0.4799E-01 0 9.5105E+04 1.3720E+03 1.3320E+03 0.0000E+00 1.3320E+03 0.0000E+00 0
580.- 600. 189 0.3811E-01 4 4.7670E+04 7.2567E+02 6.9826E+02 0.0000E+00 6.9826E+02 0.0000E+00 0
600.- 620. 118 0.2380E-01 13 2.5352E+04 4.2472E+02 4.0624E+02 0.0000E+00 4.0624E+02 0.0000E+00 0
620.- 640. 67 0.1351E-01 85 1.0168E+04 1.9231E+02 1.8298E+02 0.0000E+00 1.8298E+02 0.0000E+00 0
640.- 660. 25 0.5041E-02 311 4.0274E+03 7.5953E+01 7.2138E+01 0.0000E+00 7.2138E+01 0.0000E+00 0
660.- 680. 18 0.3630E-02 733 1.4197E+03 2.9767E+01 2.7405E+01 0.0000E+00 2.7405E+01 0.0000E+00 0
680.- 700. 1 0.2017E-03 1042 1.3461E+02 2.8881E+00 2.7027E+00 0.0000E+00 2.7027E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 1170 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 833 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 496 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 195 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 60 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 15 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 1 0.2021E-03 0 1.6295E+06 2.6724E+03 2.6687E+03 8.2398E+02 1.8447E+03 6.2119E+02 16
20.- 40. 7 0.1415E-02 0 1.6348E+06 2.5644E+03 2.5583E+03 7.7784E+02 1.7805E+03 5.6222E+02 11
40.- 60. 12 0.2426E-02 0 1.6462E+06 2.5546E+03 2.5469E+03 7.1778E+02 1.8291E+03 5.2914E+02 12
60.- 80. 10 0.2021E-02 0 1.6496E+06 2.6654E+03 2.6576E+03 6.7105E+02 1.9865E+03 4.8977E+02 11
80.- 100. 18 0.3639E-02 0 1.6506E+06 3.4851E+03 3.4717E+03 1.0543E+03 2.4174E+03 7.7931E+02 18
100.- 120. 17 0.3436E-02 0 1.6482E+06 3.0395E+03 3.0279E+03 5.8166E+02 2.4462E+03 4.3804E+02 12
120.- 140. 24 0.4851E-02 0 1.6471E+06 3.1102E+03 3.0956E+03 4.9367E+02 2.6020E+03 3.7054E+02 10
140.- 160. 20 0.4043E-02 0 1.6359E+06 3.8526E+03 3.8373E+03 1.1263E+03 2.7109E+03 8.2687E+02 18
160.- 180. 24 0.4851E-02 0 1.6236E+06 3.7349E+03 3.7172E+03 8.1875E+02 2.8985E+03 6.0636E+02 16
180.- 200. 49 0.9905E-02 0 1.5999E+06 3.5792E+03 3.5521E+03 2.9587E+02 3.2562E+03 2.2435E+02 7
200.- 220. 42 0.8490E-02 0 1.5842E+06 4.6310E+03 4.6040E+03 1.1383E+03 3.4657E+03 8.4759E+02 23
220.- 240. 48 0.9703E-02 0 1.5588E+06 4.6493E+03 4.6185E+03 7.3288E+02 3.8856E+03 5.4977E+02 15
240.- 260. 68 0.1375E-01 0 1.5338E+06 4.6861E+03 4.6456E+03 6.8045E+02 3.9652E+03 5.0840E+02 14
260.- 280. 93 0.1880E-01 0 1.4793E+06 4.6446E+03 4.5911E+03 3.1185E+02 4.2792E+03 2.3780E+02 8
280.- 300. 99 0.2001E-01 0 1.4317E+06 5.7856E+03 5.7279E+03 7.0203E+02 5.0259E+03 5.3074E+02 17
300.- 320. 121 0.2446E-01 0 1.3821E+06 6.2546E+03 6.1875E+03 7.6131E+02 5.4262E+03 5.6837E+02 16
320.- 340. 150 0.3032E-01 0 1.3246E+06 6.2494E+03 6.1635E+03 3.7844E+02 5.7850E+03 2.8341E+02 9
340.- 360. 190 0.3841E-01 0 1.2790E+06 7.0546E+03 6.9508E+03 2.5842E+02 6.6924E+03 1.9496E+02 7
360.- 380. 211 0.4265E-01 0 1.1901E+06 7.6217E+03 7.5028E+03 2.4108E+02 7.2617E+03 1.8333E+02 7
380.- 400. 217 0.4386E-01 0 1.0987E+06 7.8974E+03 7.7706E+03 1.0065E+02 7.6699E+03 7.6341E+01 3
400.- 420. 305 0.6165E-01 0 9.9716E+05 8.2265E+03 8.0607E+03 1.5028E+02 7.9104E+03 1.1421E+02 4
420.- 440. 325 0.6570E-01 0 8.5089E+05 8.1099E+03 7.9319E+03 0.0000E+00 7.9319E+03 0.0000E+00 0
440.- 460. 383 0.7742E-01 0 7.2232E+05 7.7254E+03 7.5297E+03 3.0026E+01 7.4997E+03 2.2905E+01 1
460.- 480. 395 0.7985E-01 0 6.0820E+05 7.5397E+03 7.3312E+03 0.0000E+00 7.3312E+03 0.0000E+00 0
480.- 500. 429 0.8672E-01 0 4.7402E+05 6.6950E+03 6.4743E+03 0.0000E+00 6.4743E+03 0.0000E+00 0
500.- 520. 377 0.7621E-01 0 3.1895E+05 3.3557E+03 3.2849E+03 0.0000E+00 3.2849E+03 0.0000E+00 0
520.- 540. 355 0.7176E-01 0 2.3144E+05 2.6485E+03 2.5890E+03 0.0000E+00 2.5890E+03 0.0000E+00 0
540.- 560. 303 0.6125E-01 1 1.4730E+05 1.7766E+03 1.7276E+03 0.0000E+00 1.7276E+03 0.0000E+00 0
560.- 580. 236 0.4771E-01 0 9.1202E+04 1.2822E+03 1.2430E+03 0.0000E+00 1.2430E+03 0.0000E+00 0
580.- 600. 189 0.3820E-01 0 5.1509E+04 7.6899E+02 7.3943E+02 0.0000E+00 7.3943E+02 0.0000E+00 0
600.- 620. 96 0.1941E-01 12 2.5029E+04 4.0093E+02 3.8532E+02 0.0000E+00 3.8532E+02 0.0000E+00 0
620.- 640. 78 0.1577E-01 78 1.2332E+04 2.2374E+02 2.1295E+02 0.0000E+00 2.1295E+02 0.0000E+00 0
640.- 660. 35 0.7075E-02 312 4.7366E+03 8.7428E+01 8.2330E+01 0.0000E+00 8.2330E+01 0.0000E+00 0
660.- 680. 14 0.2830E-02 714 1.2578E+03 2.7084E+01 2.5334E+01 0.0000E+00 2.5334E+01 0.0000E+00 0
680.- 700. 6 0.1213E-02 1090 2.7678E+02 7.1445E+00 6.5566E+00 0.0000E+00 6.5566E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 1138 7.5616E+00 2.4918E-01 2.1383E-01 0.0000E+00 2.1383E-01 0.0000E+00 0
720.- 740. 0 0.0000E+00 859 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 463 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 202 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 67 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- SUT 0 0.0000E+00
880.- SUT 0 0.0000E+00
4959 1.0000E+00 4959 3.4813E+07 1.3756E+05 1.3546E+05 1.0989E+04 1.2447E+05 8.2468E+03 235
4947 1.0000E+00 4947 3.4764E+07 1.3961E+05 1.3752E+05 1.2847E+04 1.2467E+05 9.5656E+03 255
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4037E+05 8.6173E+02 1.4257E+02 7.1917E+02 1.0881E+06 1.3395E+03 2.5088E+02 1.0887E+03 3 4
20.- 40. 5.4372E+05 1.1202E+03 3.4742E+02 7.7283E+02 1.1017E+06 1.1932E+03 1.2377E+02 1.0694E+03 6 2
40.- 60. 5.4888E+05 8.9131E+02 9.9577E+01 7.9173E+02 1.0899E+06 1.7053E+03 5.7913E+02 1.1262E+03 2 9
60.- 80. 5.5282E+05 1.1179E+03 2.3835E+02 8.7953E+02 1.0929E+06 1.5200E+03 2.8701E+02 1.2329E+03 5 6
80.- 100. 5.5019E+05 9.4069E+02 2.5434E+02 6.8634E+02 1.0993E+06 1.3939E+03 6.7949E+01 1.3260E+03 7 2
100.- 120. 5.4075E+05 1.1748E+03 3.4594E+02 8.2884E+02 1.0916E+06 1.8600E+03 5.8827E+02 1.2717E+03 7 8
120.- 140. 5.4009E+05 1.1230E+03 9.7118E+01 1.0259E+03 1.0958E+06 1.7388E+03 5.1210E+02 1.2267E+03 2 9
140.- 160. 5.5086E+05 1.3620E+03 2.7201E+02 1.0900E+03 1.0926E+06 2.3619E+03 7.9865E+02 1.5632E+03 6 14
160.- 180. 5.3848E+05 1.7183E+03 4.7969E+02 1.2387E+03 1.0826E+06 2.0012E+03 1.0207E+02 1.8992E+03 11 2
180.- 200. 5.3706E+05 1.3199E+03 1.8284E+02 1.1371E+03 1.0700E+06 2.7311E+03 7.0419E+02 2.0269E+03 4 14
200.- 220. 5.2248E+05 1.4758E+03 1.2498E+02 1.3508E+03 1.0659E+06 2.5565E+03 4.7384E+02 2.0826E+03 3 11
220.- 240. 5.1699E+05 1.7026E+03 1.9790E+02 1.5047E+03 1.0408E+06 2.4911E+03 3.5481E+02 2.1363E+03 5 8
240.- 260. 5.1506E+05 1.9175E+03 2.8620E+02 1.6313E+03 1.0180E+06 2.8008E+03 2.7255E+02 2.5282E+03 8 6
260.- 280. 5.0121E+05 1.7007E+03 3.3548E+01 1.6671E+03 1.0007E+06 3.3158E+03 3.7632E+02 2.9395E+03 1 9
280.- 300. 4.8183E+05 1.8700E+03 7.2375E+01 1.7976E+03 9.6963E+05 4.0194E+03 6.8685E+02 3.3326E+03 2 17
300.- 320. 4.6120E+05 2.0413E+03 6.1673E+01 1.9797E+03 9.3027E+05 4.0470E+03 4.9411E+02 3.5529E+03 2 11
320.- 340. 4.4702E+05 2.3569E+03 3.3385E+01 2.3235E+03 8.8677E+05 4.0500E+03 1.8862E+02 3.8614E+03 1 5
340.- 360. 4.2187E+05 2.4338E+03 3.1051E+01 2.4028E+03 8.5549E+05 4.8191E+03 2.7762E+02 4.5415E+03 1 7
360.- 380. 3.9521E+05 2.4257E+03 0.0000E+00 2.4257E+03 7.9414E+05 4.5687E+03 7.3171E+01 4.4956E+03 0 2
380.- 400. 3.6896E+05 2.5722E+03 3.3442E+01 2.5388E+03 7.2515E+05 5.1639E+03 1.9125E+02 4.9726E+03 1 5
400.- 420. 3.2733E+05 2.5520E+03 0.0000E+00 2.5520E+03 6.5424E+05 5.1651E+03 1.3928E+02 5.0258E+03 0 4
420.- 440. 2.9015E+05 2.6780E+03 0.0000E+00 2.6780E+03 5.7622E+05 5.4728E+03 3.1275E+01 5.4415E+03 0 1
440.- 460. 2.4198E+05 2.3927E+03 0.0000E+00 2.3927E+03 4.9289E+05 5.1736E+03 8.0944E+01 5.0927E+03 0 2
460.- 480. 2.0348E+05 2.3142E+03 0.0000E+00 2.3142E+03 4.0381E+05 4.9648E+03 0.0000E+00 4.9648E+03 0 0
480.- 500. 1.5484E+05 1.9602E+03 0.0000E+00 1.9602E+03 3.1625E+05 4.6370E+03 0.0000E+00 4.6370E+03 0 0
500.- 520. 8.5904E+03 9.4775E+01 0.0000E+00 9.4775E+01 1.7847E+04 2.3776E+02 0.0000E+00 2.3776E+02 0 0
0.- 20. 5.4128E+05 1.1936E+03 4.2730E+02 7.6634E+02 1.0882E+06 1.4751E+03 3.9668E+02 1.0784E+03 8 8
20.- 40. 5.4193E+05 8.4074E+02 1.1404E+02 7.2669E+02 1.0929E+06 1.7176E+03 6.6380E+02 1.0538E+03 2 9
40.- 60. 5.5227E+05 9.2427E+02 2.4887E+02 6.7541E+02 1.0939E+06 1.6226E+03 4.6891E+02 1.1537E+03 6 6
60.- 80. 5.4861E+05 9.2809E+02 1.1479E+02 8.1330E+02 1.1010E+06 1.7295E+03 5.5625E+02 1.1732E+03 2 9
80.- 100. 5.4832E+05 1.3033E+03 3.6996E+02 9.3333E+02 1.1023E+06 2.1684E+03 6.8431E+02 1.4841E+03 8 10
100.- 120. 5.4294E+05 1.2916E+03 2.3619E+02 1.0554E+03 1.1053E+06 1.7363E+03 3.4547E+02 1.3908E+03 5 7
120.- 140. 5.5491E+05 1.2478E+03 1.5532E+02 1.0925E+03 1.0922E+06 1.8478E+03 3.3835E+02 1.5095E+03 3 7
140.- 160. 5.4550E+05 1.3215E+03 2.8249E+02 1.0390E+03 1.0904E+06 2.5158E+03 8.4385E+02 1.6719E+03 6 12
160.- 180. 5.4252E+05 1.2418E+03 6.1443E+01 1.1804E+03 1.0811E+06 2.4754E+03 7.5731E+02 1.7181E+03 2 14
180.- 200. 5.3231E+05 1.2693E+03 9.8397E+01 1.1709E+03 1.0675E+06 2.2828E+03 1.9747E+02 2.0853E+03 2 5
200.- 220. 5.3174E+05 1.4407E+03 1.9323E+02 1.2475E+03 1.0524E+06 3.1633E+03 9.4509E+02 2.2182E+03 5 18
220.- 240. 5.2111E+05 1.7369E+03 2.1232E+02 1.5246E+03 1.0377E+06 2.8816E+03 5.2056E+02 2.3610E+03 4 11
240.- 260. 5.0599E+05 1.6104E+03 1.3080E+02 1.4796E+03 1.0279E+06 3.0352E+03 5.4965E+02 2.4855E+03 3 11
260.- 280. 4.9652E+05 1.7986E+03 1.4094E+02 1.6576E+03 9.8278E+05 2.7925E+03 1.7092E+02 2.6216E+03 4 4
280.- 300. 4.7250E+05 1.9552E+03 1.9674E+02 1.7585E+03 9.5922E+05 3.7727E+03 5.0529E+02 3.2674E+03 6 11
300.- 320. 4.6490E+05 2.2727E+03 1.0691E+02 2.1658E+03 9.1725E+05 3.9148E+03 6.5440E+02 3.2604E+03 3 13
320.- 340. 4.3891E+05 2.0570E+03 0.0000E+00 2.0570E+03 8.8572E+05 4.1065E+03 3.7844E+02 3.7280E+03 0 9
340.- 360. 4.2511E+05 2.3122E+03 0.0000E+00 2.3122E+03 8.5393E+05 4.6386E+03 2.5842E+02 4.3802E+03 0 7
360.- 380. 3.9242E+05 2.4981E+03 3.0400E+01 2.4677E+03 7.9768E+05 5.0047E+03 2.1068E+02 4.7940E+03 1 6
380.- 400. 3.6768E+05 2.5551E+03 0.0000E+00 2.5551E+03 7.3102E+05 5.2154E+03 1.0065E+02 5.1148E+03 0 3
400.- 420. 3.3181E+05 2.5597E+03 3.3385E+01 2.5263E+03 6.6535E+05 5.5010E+03 1.1689E+02 5.3841E+03 1 3
420.- 440. 2.8596E+05 2.6002E+03 0.0000E+00 2.6002E+03 5.6493E+05 5.3317E+03 0.0000E+00 5.3317E+03 0 0
440.- 460. 2.3882E+05 2.3535E+03 0.0000E+00 2.3535E+03 4.8349E+05 5.1762E+03 3.0026E+01 5.1462E+03 0 1
460.- 480. 2.0171E+05 2.2363E+03 0.0000E+00 2.2363E+03 4.0649E+05 5.0949E+03 0.0000E+00 5.0949E+03 0 0
480.- 500. 1.5553E+05 1.8662E+03 0.0000E+00 1.8662E+03 3.1429E+05 4.5534E+03 0.0000E+00 4.5534E+03 0 0
500.- 520. 8.8336E+03 8.4734E+01 0.0000E+00 8.4734E+01 1.8194E+04 2.4063E+02 0.0000E+00 2.4063E+02 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1301E+07 4.4118E+04 3.3344E+03 4.0784E+04 2.2653E+07 8.1328E+04 7.6546E+03 7.3674E+04 77 158
1.1290E+07 4.3500E+04 3.1535E+03 4.0346E+04 2.2613E+07 8.3994E+04 9.6934E+03 7.4301E+04 71 184
DAMAGE IN LAYER 1 : 1.2517E+05
DAMAGE IN LAYER 1 : 1.2722E+05
DAMAGE IN LAYER 2 : 1.0292E+04
DAMAGE IN LAYER 2 : 1.0297E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 8.2000E-03 ENERGY REFL.COEF.= 2.0691E-03 REL.MEAN ENERGY = 2.5233E-01 MEAN ENERGY = 1.7663E+03
PART.REFL.COEF.= 1.0600E-02 ENERGY REFL.COEF.= 3.2144E-03 REL.MEAN ENERGY = 3.0325E-01 MEAN ENERGY = 2.1227E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.7663E+03 2.5345E+06 1.2140E+00 3.6957E+00 1.5920E+03 2.4863E+02 6.4987E+05 3.2953E-01
PATHLENGTH 4.0317E+02 2.4071E+04 -5.6880E-01 2.4672E+00 1.5515E+02 2.4230E+01 4.5535E+03 2.6727E-01
ELASTIC LOSS 7.6256E+01 8.6197E+02 2.9359E+01 7.1608E-01
INEL. LOSS 5.1178E+03 2.7985E+06 1.6729E+03 4.0801E+01
ENERGY 2.1227E+03 3.6343E+06 9.3506E-01 2.6653E+00 1.9064E+03 2.6186E+02 6.4421E+05 2.5573E-01
PATHLENGTH 3.7439E+02 2.9958E+04 -3.5040E-01 2.2749E+00 1.7308E+02 2.3775E+01 4.6465E+03 1.7920E-01
ELASTIC LOSS 8.1694E+01 1.0422E+03 3.2284E+01 6.0913E-01
INEL. LOSS 4.7215E+03 3.4151E+06 1.8480E+03 3.4868E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.7663E+03 5.6544E+06 2.3839E+10 1.1553E+14 6.0819E+17 3.3856E+21
LOGENERGY 3.0543E+00 9.5175E+00 3.0209E+01 9.7500E+01 3.1944E+02 1.0606E+03
PATHLENGTH 4.0317E+02 1.8662E+05 9.2524E+07 4.7901E+10 2.5536E+13 1.3904E+16
ENERGY 2.1227E+03 8.1402E+06 3.9187E+10 2.0877E+14 1.1713E+18 6.7812E+21
LOGENERGY 3.0590E+00 9.7274E+00 3.1737E+01 1.0551E+02 3.5605E+02 1.2164E+03
PATHLENGTH 3.7439E+02 1.7013E+05 8.4310E+07 4.4163E+10 2.4086E+13 1.3542E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -261,5 +261,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 1 1 1 1 3 1 1 3 0 2 3 2 6 5 5 4
0.000 0.000 0.000 0.976 0.488 0.488 0.488 0.488 1.463 0.488 0.488 1.463 0.000 0.976 1.463 0.976 2.927 2.439 2.439 1.951
0 0 1 4 3 1 0 3 4 2 2 3 2 3 5 2 5 5 3 5
0.000 0.000 0.377 1.509 1.132 0.377 0.000 1.132 1.509 0.755 0.755 1.132 0.755 1.132 1.887 0.755 1.887 1.887 1.132 1.887
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.rge
+33 -34
View File
@@ -1,39 +1,39 @@
DEPTH PARTICLES
10.0000 3
30.0000 12
50.0000 10
10.0000 1
30.0000 7
50.0000 12
70.0000 10
90.0000 13
110.0000 10
130.0000 17
150.0000 25
170.0000 46
190.0000 38
210.0000 50
230.0000 57
250.0000 60
270.0000 74
290.0000 106
310.0000 127
330.0000 125
350.0000 166
370.0000 231
390.0000 237
410.0000 304
430.0000 342
450.0000 394
470.0000 397
490.0000 430
510.0000 344
530.0000 353
550.0000 322
570.0000 238
90.0000 18
110.0000 17
130.0000 24
150.0000 20
170.0000 24
190.0000 49
210.0000 42
230.0000 48
250.0000 68
270.0000 93
290.0000 99
310.0000 121
330.0000 150
350.0000 190
370.0000 211
390.0000 217
410.0000 305
430.0000 325
450.0000 383
470.0000 395
490.0000 429
510.0000 377
530.0000 355
550.0000 303
570.0000 236
590.0000 189
610.0000 118
630.0000 67
650.0000 25
670.0000 18
690.0000 1
610.0000 96
630.0000 78
650.0000 35
670.0000 14
690.0000 6
710.0000 0
730.0000 0
750.0000 0
@@ -43,4 +43,3 @@
830.0000 0
850.0000 0
870.0000 0
890.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
7.00 0.45 0.00 15.00 5000 4959 41 0 5000 0 0.4452E+03 0.1120E+03 0.1766E+04 0.1592E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3284 1675
7.00 0.45 0.00 15.00 5000 4947 53 0 5000 0 0.4451E+03 0.1122E+03 0.2123E+04 0.1906E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3258 1689
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.out
+112 -112
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 18.Jun. 2026 09:55:56
Start: 19.Jun. 2026 18:18:13
End: 18.Jun. 2026 09:55:58
End: 19.Jun. 2026 18:18:14
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 5000 projectiles 1 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -63,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
28043 0 0 0 0 0 0 0 0
27998 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -109,8 +110,8 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4964 ENERGY=0.4468E+08 EV
BACKSCATTERED PARTICLES= 36 ENERGY=0.8224E+05 EV
IMPLANTED PARTICLES= 4979 ENERGY=0.4481E+08 EV
BACKSCATTERED PARTICLES= 21 ENERGY=0.8817E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
@@ -121,146 +122,145 @@
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 1366 1366
IMPLANTED PARTICLES (LAYER 1)= 1363 1363
IMPLANTED PARTICLES (LAYER 2)= 3598 3598
IMPLANTED PARTICLES (LAYER 2)= 3616 3616
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 354.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.217
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 354.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.050
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.245
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.6240E+02 1.6584E+04 -9.1875E-01 3.9700E+00 1.2878E+02 1.8278E+00 4.0565E+02 3.6979E-02
SPREAD 2.4679E+02 1.4767E+04 3.9425E-01 2.7362E+00 1.2152E+02 1.7247E+00 2.7616E+02 2.6608E-02
PATHLENGTH 8.5184E+02 1.3389E+03 2.5027E-02 2.8414E+00 3.6591E+01 5.1935E-01 2.5788E+01 3.0387E-02
ELASTIC LOSS 2.6435E+01 2.8030E+02 1.6742E+01 3.3727E-03
INEL. LOSS 8.9860E+03 2.0772E+05 4.5576E+02 9.1814E-02
PENETRATION 5.6230E+02 1.6327E+04 -9.7242E-01 4.3736E+00 1.2778E+02 1.8108E+00 4.2498E+02 4.2985E-02
SPREAD 2.4441E+02 1.4089E+04 4.1541E-01 2.7296E+00 1.1870E+02 1.6822E+00 2.6260E+02 2.5823E-02
PATHLENGTH 8.5033E+02 1.2683E+03 -2.4036E-02 2.9289E+00 3.5614E+01 5.0472E-01 2.4964E+01 3.2240E-02
ELASTIC LOSS 2.6640E+01 2.7697E+02 1.6642E+01 3.3425E-03
INEL. LOSS 8.9651E+03 1.9947E+05 4.4662E+02 8.9702E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 7.5007E-02 7.9815E-01 5.6236E+01 5.1225E+03 8.9339E-01 6.7078E-04 4.2887E-02 2.9349E+00
WEAK EL.LOSS 8.0689E-04 7.2074E-06 6.3175E+00 5.3150E+01 2.6847E-03 2.0157E-06 3.9079E-08 1.6224E-02
INELAST.LOSS 2.5279E+01 1.2167E+02 -7.8919E-01 2.3181E+00 1.1030E+01 8.2818E-03 1.0488E-01 1.3283E-03
SUBTHR.LOSS 6.6880E-02 3.0973E-01 2.5035E+01 8.6252E+02 5.5654E-01 4.1789E-04 6.8264E-03 2.4881E-01
ELAST.LOSS 7.5338E-02 8.1216E-01 6.7131E+01 8.8289E+03 9.0120E-01 6.7702E-04 5.7326E-02 7.7969E+00
WEAK EL.LOSS 8.0696E-04 7.1934E-06 6.3337E+00 5.3457E+01 2.6821E-03 2.0149E-06 3.9140E-08 1.6317E-02
INELAST.LOSS 2.5248E+01 1.2180E+02 -7.8485E-01 2.3107E+00 1.1036E+01 8.2909E-03 1.0476E-01 1.3268E-03
SUBTHR.LOSS 6.7999E-02 3.2808E-01 2.5180E+01 8.6528E+02 5.7279E-01 4.3033E-04 7.2464E-03 2.3208E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.6240E+02 3.3288E+05 2.0390E+08 1.2819E+11 8.2301E+13 5.3773E+16
PENETRATION 5.6230E+02 3.3251E+05 2.0331E+08 1.2755E+11 8.1724E+13 5.3302E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 2 0.4029E-03 0 1.6471E+06 1.8197E+03 1.8167E+03 5.3467E+02 1.2820E+03 3.9989E+02 11
20.- 40. 3 0.6044E-03 0 1.6503E+06 1.6307E+03 1.6272E+03 2.2626E+02 1.4010E+03 1.6805E+02 5
40.- 60. 2 0.4029E-03 0 1.6608E+06 1.9532E+03 1.9499E+03 5.8738E+02 1.3625E+03 4.4336E+02 10
60.- 80. 2 0.4029E-03 0 1.6677E+06 1.9713E+03 1.9681E+03 5.6473E+02 1.4033E+03 4.1447E+02 9
80.- 100. 3 0.6044E-03 0 1.6884E+06 2.1371E+03 2.1324E+03 5.4241E+02 1.5900E+03 4.0457E+02 10
100.- 120. 11 0.2216E-02 0 1.6893E+06 2.6124E+03 2.6056E+03 8.9382E+02 1.7117E+03 6.6926E+02 16
120.- 140. 11 0.2216E-02 0 1.6964E+06 2.7626E+03 2.7552E+03 9.9846E+02 1.7567E+03 7.2742E+02 14
140.- 160. 17 0.3425E-02 0 1.6878E+06 2.5071E+03 2.4966E+03 7.5090E+02 1.7457E+03 5.5002E+02 11
160.- 180. 10 0.2015E-02 0 1.6881E+06 2.8141E+03 2.8055E+03 7.6661E+02 2.0389E+03 5.7263E+02 13
180.- 200. 13 0.2619E-02 0 1.6902E+06 2.8522E+03 2.8419E+03 5.3696E+02 2.3049E+03 4.0097E+02 11
200.- 220. 17 0.3425E-02 0 1.6919E+06 2.6062E+03 2.5944E+03 4.1439E+02 2.1800E+03 3.1298E+02 8
220.- 240. 17 0.3425E-02 0 1.6863E+06 2.9562E+03 2.9428E+03 4.9216E+02 2.4507E+03 3.7021E+02 10
240.- 260. 34 0.6849E-02 0 1.6827E+06 3.1521E+03 3.1319E+03 7.6496E+02 2.3669E+03 5.6897E+02 14
260.- 280. 29 0.5842E-02 0 1.6580E+06 3.7759E+03 3.7568E+03 8.9416E+02 2.8626E+03 6.6084E+02 16
280.- 300. 45 0.9065E-02 0 1.6402E+06 4.0054E+03 3.9790E+03 6.5931E+02 3.3196E+03 4.9710E+02 14
300.- 320. 45 0.9065E-02 0 1.6228E+06 4.0762E+03 4.0494E+03 5.2915E+02 3.5203E+03 4.0310E+02 14
320.- 340. 42 0.8461E-02 0 1.5941E+06 4.1867E+03 4.1572E+03 5.9133E+02 3.5658E+03 4.3825E+02 11
340.- 360. 73 0.1471E-01 0 1.5549E+06 4.3046E+03 4.2639E+03 4.9133E+02 3.7725E+03 3.7053E+02 12
360.- 380. 75 0.1511E-01 0 1.5188E+06 5.3961E+03 5.3496E+03 7.8223E+02 4.5673E+03 5.8706E+02 17
380.- 400. 95 0.1914E-01 0 1.4673E+06 5.4809E+03 5.4281E+03 9.5814E+02 4.4700E+03 7.2399E+02 23
400.- 420. 116 0.2337E-01 0 1.4373E+06 5.4195E+03 5.3538E+03 3.1251E+02 5.0413E+03 2.3373E+02 7
420.- 440. 139 0.2800E-01 0 1.3797E+06 5.7870E+03 5.7074E+03 3.0508E+02 5.4023E+03 2.3183E+02 8
440.- 460. 155 0.3122E-01 0 1.2979E+06 6.7499E+03 6.6620E+03 3.0434E+02 6.3577E+03 2.2755E+02 7
460.- 480. 173 0.3485E-01 0 1.2165E+06 6.5575E+03 6.4550E+03 2.2287E+02 6.2321E+03 1.6924E+02 6
480.- 500. 237 0.4774E-01 0 1.1277E+06 7.0182E+03 6.8977E+03 2.0696E+02 6.6908E+03 1.5524E+02 5
500.- 520. 214 0.4311E-01 0 9.5564E+05 4.8667E+03 4.8230E+03 7.2652E+01 4.7503E+03 5.4883E+01 2
520.- 540. 250 0.5036E-01 0 8.6706E+05 4.5772E+03 4.5325E+03 3.0685E+01 4.5018E+03 2.3868E+01 1
540.- 560. 272 0.5479E-01 0 7.8330E+05 4.5700E+03 4.5199E+03 0.0000E+00 4.5199E+03 0.0000E+00 0
560.- 580. 298 0.6003E-01 0 6.9188E+05 4.6018E+03 4.5463E+03 0.0000E+00 4.5463E+03 0.0000E+00 0
580.- 600. 343 0.6910E-01 0 5.8601E+05 4.5435E+03 4.4823E+03 0.0000E+00 4.4823E+03 0.0000E+00 0
600.- 620. 352 0.7091E-01 0 4.7322E+05 4.0356E+03 3.9736E+03 0.0000E+00 3.9736E+03 0.0000E+00 0
620.- 640. 324 0.6527E-01 0 3.7297E+05 3.5779E+03 3.5193E+03 0.0000E+00 3.5193E+03 0.0000E+00 0
640.- 660. 355 0.7151E-01 0 2.8028E+05 2.9194E+03 2.8595E+03 0.0000E+00 2.8595E+03 0.0000E+00 0
660.- 680. 352 0.7091E-01 0 2.0008E+05 2.2134E+03 2.1557E+03 0.0000E+00 2.1557E+03 0.0000E+00 0
680.- 700. 278 0.5600E-01 0 1.3080E+05 1.6585E+03 1.6128E+03 0.0000E+00 1.6128E+03 0.0000E+00 0
700.- 720. 208 0.4190E-01 0 7.8782E+04 1.0661E+03 1.0324E+03 0.0000E+00 1.0324E+03 0.0000E+00 0
720.- 740. 160 0.3223E-01 4 4.3768E+04 6.8137E+02 6.5637E+02 0.0000E+00 6.5637E+02 0.0000E+00 0
740.- 760. 105 0.2115E-01 16 2.2906E+04 3.7809E+02 3.6215E+02 0.0000E+00 3.6215E+02 0.0000E+00 0
760.- 780. 47 0.9468E-02 99 8.9378E+03 1.6785E+02 1.6038E+02 0.0000E+00 1.6038E+02 0.0000E+00 0
780.- 800. 23 0.4633E-02 266 3.0156E+03 5.9096E+01 5.5878E+01 0.0000E+00 5.5878E+01 0.0000E+00 0
800.- 820. 13 0.2619E-02 585 1.3151E+03 2.8250E+01 2.6589E+01 0.0000E+00 2.6589E+01 0.0000E+00 0
820.- 840. 1 0.2015E-03 903 2.6805E+02 4.0805E+00 3.7644E+00 0.0000E+00 3.7644E+00 0.0000E+00 0
840.- 860. 3 0.6044E-03 1028 1.3761E+02 2.9453E+00 2.6795E+00 0.0000E+00 2.6795E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 964 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 628 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 305 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 133 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 30 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 6 0.1205E-02 0 1.6363E+06 2.1243E+03 2.1198E+03 6.3121E+02 1.4886E+03 4.6623E+02 8
20.- 40. 6 0.1205E-02 0 1.6448E+06 1.9153E+03 1.9105E+03 5.4010E+02 1.3704E+03 3.8459E+02 6
40.- 60. 4 0.8034E-03 0 1.6560E+06 2.2348E+03 2.2308E+03 7.7818E+02 1.4526E+03 5.4397E+02 8
60.- 80. 3 0.6025E-03 0 1.6583E+06 1.9012E+03 1.8976E+03 3.6674E+02 1.5309E+03 2.6633E+02 5
80.- 100. 4 0.8034E-03 0 1.6712E+06 1.8778E+03 1.8727E+03 4.6268E+02 1.4100E+03 3.4354E+02 8
100.- 120. 11 0.2209E-02 0 1.6777E+06 2.1019E+03 2.0947E+03 5.0416E+02 1.5906E+03 3.6548E+02 6
120.- 140. 7 0.1406E-02 0 1.6764E+06 2.3837E+03 2.3769E+03 4.7740E+02 1.8995E+03 3.5884E+02 10
140.- 160. 14 0.2812E-02 0 1.6759E+06 2.2703E+03 2.2615E+03 4.0967E+02 1.8518E+03 3.0769E+02 7
160.- 180. 9 0.1808E-02 0 1.6823E+06 2.2624E+03 2.2550E+03 4.8780E+02 1.7672E+03 3.6700E+02 9
180.- 200. 12 0.2410E-02 0 1.6896E+06 2.6469E+03 2.6378E+03 5.6285E+02 2.0749E+03 4.2029E+02 11
200.- 220. 17 0.3414E-02 0 1.6765E+06 2.5995E+03 2.5875E+03 6.3735E+02 1.9501E+03 4.8200E+02 14
220.- 240. 17 0.3414E-02 0 1.6712E+06 3.2622E+03 3.2508E+03 9.4766E+02 2.3031E+03 7.0983E+02 19
240.- 260. 19 0.3816E-02 0 1.6635E+06 3.2289E+03 3.2151E+03 5.5381E+02 2.6613E+03 4.2164E+02 14
260.- 280. 27 0.5423E-02 0 1.6468E+06 3.1652E+03 3.1460E+03 4.4081E+02 2.7052E+03 3.2815E+02 8
280.- 300. 34 0.6829E-02 0 1.6400E+06 3.6042E+03 3.5828E+03 6.2716E+02 2.9556E+03 4.6836E+02 12
300.- 320. 46 0.9239E-02 0 1.6340E+06 4.3701E+03 4.3425E+03 6.6331E+02 3.6792E+03 4.9586E+02 13
320.- 340. 55 0.1105E-01 0 1.6155E+06 4.2259E+03 4.1915E+03 3.2655E+02 3.8649E+03 2.4290E+02 6
340.- 360. 59 0.1185E-01 0 1.5901E+06 5.2636E+03 5.2263E+03 5.3607E+02 4.6902E+03 4.0750E+02 13
360.- 380. 77 0.1546E-01 0 1.5468E+06 5.0205E+03 4.9747E+03 6.4744E+02 4.3273E+03 4.8032E+02 13
380.- 400. 87 0.1747E-01 0 1.4708E+06 5.3802E+03 5.3290E+03 6.8430E+02 4.6447E+03 5.1585E+02 16
400.- 420. 111 0.2229E-01 0 1.4172E+06 5.5412E+03 5.4772E+03 3.7791E+02 5.0993E+03 2.8667E+02 10
420.- 440. 143 0.2872E-01 0 1.3679E+06 6.3385E+03 6.2616E+03 7.9032E+02 5.4713E+03 5.9521E+02 19
440.- 460. 167 0.3354E-01 0 1.3129E+06 6.9719E+03 6.8759E+03 2.3257E+02 6.6433E+03 1.7499E+02 6
460.- 480. 193 0.3876E-01 0 1.2340E+06 7.2489E+03 7.1422E+03 3.3396E+02 6.8082E+03 2.5282E+02 9
480.- 500. 235 0.4720E-01 0 1.1452E+06 7.0496E+03 6.9282E+03 0.0000E+00 6.9282E+03 0.0000E+00 0
500.- 520. 210 0.4218E-01 0 9.6116E+05 5.0747E+03 5.0303E+03 0.0000E+00 5.0303E+03 0.0000E+00 0
520.- 540. 274 0.5503E-01 0 8.8096E+05 4.8965E+03 4.8464E+03 0.0000E+00 4.8464E+03 0.0000E+00 0
540.- 560. 302 0.6065E-01 0 7.9012E+05 4.9714E+03 4.9173E+03 0.0000E+00 4.9173E+03 0.0000E+00 0
560.- 580. 315 0.6327E-01 0 6.7031E+05 4.5278E+03 4.4707E+03 0.0000E+00 4.4707E+03 0.0000E+00 0
580.- 600. 310 0.6226E-01 0 5.6132E+05 4.1521E+03 4.0960E+03 0.0000E+00 4.0960E+03 0.0000E+00 0
600.- 620. 357 0.7170E-01 0 4.5825E+05 3.8518E+03 3.7905E+03 0.0000E+00 3.7905E+03 0.0000E+00 0
620.- 640. 340 0.6829E-01 0 3.5903E+05 3.2640E+03 3.2027E+03 0.0000E+00 3.2027E+03 0.0000E+00 0
640.- 660. 354 0.7110E-01 0 2.7819E+05 2.8714E+03 2.8115E+03 0.0000E+00 2.8115E+03 0.0000E+00 0
660.- 680. 314 0.6306E-01 0 1.9342E+05 2.2848E+03 2.2306E+03 0.0000E+00 2.2306E+03 0.0000E+00 0
680.- 700. 294 0.5905E-01 0 1.2719E+05 1.6049E+03 1.5585E+03 0.0000E+00 1.5585E+03 0.0000E+00 0
700.- 720. 211 0.4238E-01 0 7.9189E+04 1.1549E+03 1.1209E+03 0.0000E+00 1.1209E+03 0.0000E+00 0
720.- 740. 144 0.2892E-01 4 4.3473E+04 6.9619E+02 6.7291E+02 0.0000E+00 6.7291E+02 0.0000E+00 0
740.- 760. 97 0.1948E-01 22 1.9909E+04 3.2393E+02 3.0964E+02 0.0000E+00 3.0964E+02 0.0000E+00 0
760.- 780. 49 0.9841E-02 96 8.9890E+03 1.4445E+02 1.3734E+02 0.0000E+00 1.3734E+02 0.0000E+00 0
780.- 800. 28 0.5624E-02 284 3.7336E+03 7.7027E+01 7.2985E+01 0.0000E+00 7.2985E+01 0.0000E+00 0
800.- 820. 13 0.2611E-02 566 1.2377E+03 3.1724E+01 3.0083E+01 0.0000E+00 3.0083E+01 0.0000E+00 0
820.- 840. 3 0.6025E-03 965 1.6369E+02 4.6169E+00 4.2180E+00 0.0000E+00 4.2180E+00 0.0000E+00 0
840.- 860. 1 0.2008E-03 1079 2.4893E+01 7.0395E-01 6.1125E-01 0.0000E+00 6.1125E-01 0.0000E+00 0
860.- 880. 0 0.0000E+00 954 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 621 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 262 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 100 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 20 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- SUT 0 0.0000E+00
1020.- SUT 0 0.0000E+00
4964 1.0000E+00 4964 4.4843E+07 1.3448E+05 1.3305E+05 1.4434E+04 1.1862E+05 1.0780E+04 285
4979 1.0000E+00 4979 4.4737E+07 1.3492E+05 1.3349E+05 1.3020E+04 1.2047E+05 9.6861E+03 250
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4811E+05 6.9824E+02 1.1182E+02 5.8642E+02 1.0990E+06 1.1184E+03 4.2286E+02 6.9556E+02 3 8
20.- 40. 5.5062E+05 5.7890E+02 0.0000E+00 5.7890E+02 1.0997E+06 1.0483E+03 2.2626E+02 8.2207E+02 0 5
40.- 60. 5.4881E+05 9.7462E+02 4.3052E+02 5.4410E+02 1.1120E+06 9.7528E+02 1.5687E+02 8.1841E+02 7 3
60.- 80. 5.5505E+05 6.9860E+02 1.1320E+02 5.8540E+02 1.1126E+06 1.2695E+03 4.5152E+02 8.1795E+02 2 7
80.- 100. 5.6899E+05 8.6451E+02 2.2307E+02 6.4144E+02 1.1194E+06 1.2679E+03 3.1934E+02 9.4853E+02 4 6
100.- 120. 5.6179E+05 1.0883E+03 4.6847E+02 6.1983E+02 1.1275E+06 1.5173E+03 4.2535E+02 1.0919E+03 9 7
120.- 140. 5.6924E+05 1.0366E+03 3.3674E+02 6.9988E+02 1.1272E+06 1.7186E+03 6.6172E+02 1.0569E+03 6 8
140.- 160. 5.5538E+05 8.8520E+02 2.4789E+02 6.3730E+02 1.1324E+06 1.6114E+03 5.0300E+02 1.1084E+03 5 6
160.- 180. 5.6489E+05 1.1277E+03 3.6828E+02 7.5942E+02 1.1232E+06 1.6778E+03 3.9834E+02 1.2795E+03 7 6
180.- 200. 5.5792E+05 1.0339E+03 1.3304E+02 9.0081E+02 1.1322E+06 1.8080E+03 4.0391E+02 1.4041E+03 3 8
200.- 220. 5.7152E+05 1.1579E+03 2.4247E+02 9.1545E+02 1.1204E+06 1.4364E+03 1.7192E+02 1.2645E+03 5 3
220.- 240. 5.6386E+05 1.0959E+03 1.7586E+02 9.2007E+02 1.1225E+06 1.8469E+03 3.1629E+02 1.5306E+03 4 6
240.- 260. 5.6112E+05 1.1817E+03 2.5700E+02 9.2472E+02 1.1216E+06 1.9501E+03 5.0796E+02 1.4422E+03 5 9
260.- 280. 5.4708E+05 1.3622E+03 1.6425E+02 1.1979E+03 1.1110E+06 2.3946E+03 7.2991E+02 1.6647E+03 4 12
280.- 300. 5.5118E+05 1.5398E+03 2.4841E+02 1.2914E+03 1.0891E+06 2.4391E+03 4.1090E+02 2.0282E+03 5 9
300.- 320. 5.4302E+05 1.5273E+03 1.6286E+02 1.3644E+03 1.0798E+06 2.5222E+03 3.6629E+02 2.1559E+03 4 10
320.- 340. 5.3202E+05 1.4431E+03 7.6472E+01 1.3667E+03 1.0621E+06 2.7140E+03 5.1486E+02 2.1992E+03 2 9
340.- 360. 5.2251E+05 1.6252E+03 9.8307E+01 1.5268E+03 1.0324E+06 2.6387E+03 3.9302E+02 2.2457E+03 3 9
360.- 380. 5.0725E+05 1.9872E+03 1.9665E+02 1.7905E+03 1.0115E+06 3.3624E+03 5.8558E+02 2.7768E+03 5 12
380.- 400. 4.8584E+05 1.8034E+03 2.6089E+02 1.5425E+03 9.8148E+05 3.6248E+03 6.9726E+02 2.9275E+03 7 16
400.- 420. 4.7815E+05 1.8622E+03 3.1603E+01 1.8306E+03 9.5912E+05 3.4917E+03 2.8090E+02 3.2108E+03 1 6
420.- 440. 4.6469E+05 2.0179E+03 7.5553E+01 1.9424E+03 9.1504E+05 3.6895E+03 2.2952E+02 3.4599E+03 2 6
440.- 460. 4.3204E+05 2.0658E+03 0.0000E+00 2.0658E+03 8.6583E+05 4.5963E+03 3.0434E+02 4.2919E+03 0 7
460.- 480. 4.0559E+05 2.2446E+03 3.9336E+01 2.2052E+03 8.1090E+05 4.2104E+03 1.8353E+02 4.0269E+03 1 5
480.- 500. 3.7831E+05 2.2992E+03 0.0000E+00 2.2992E+03 7.4274E+05 4.5453E+03 2.0696E+02 4.3383E+03 0 5
500.- 520. 2.9810E+04 1.1184E+02 0.0000E+00 1.1184E+02 5.6693E+04 3.6225E+02 7.2652E+01 2.8960E+02 0 2
0.- 20. 5.4529E+05 9.8851E+02 3.6798E+02 6.2053E+02 1.0911E+06 1.1313E+03 2.6323E+02 8.6805E+02 4 4
20.- 40. 5.5284E+05 6.3368E+02 5.3843E+01 5.7984E+02 1.0919E+06 1.2768E+03 4.8626E+02 7.9059E+02 1 5
40.- 60. 5.5460E+05 8.2755E+02 1.1538E+02 7.1217E+02 1.1014E+06 1.4033E+03 6.6280E+02 7.4047E+02 3 5
60.- 80. 5.5359E+05 8.0290E+02 1.3263E+02 6.7027E+02 1.1047E+06 1.0947E+03 2.3411E+02 8.6063E+02 2 3
80.- 100. 5.6416E+05 7.7501E+02 1.7760E+02 5.9740E+02 1.1070E+06 1.0977E+03 2.8508E+02 8.1258E+02 3 5
100.- 120. 5.5734E+05 8.5398E+02 1.7516E+02 6.7882E+02 1.1203E+06 1.2408E+03 3.2901E+02 9.1176E+02 3 3
120.- 140. 5.4935E+05 9.5252E+02 2.2794E+02 7.2458E+02 1.1271E+06 1.4244E+03 2.4946E+02 1.1749E+03 5 5
140.- 160. 5.6004E+05 1.0604E+03 2.3313E+02 8.2729E+02 1.1158E+06 1.2011E+03 1.7653E+02 1.0246E+03 3 4
160.- 180. 5.6181E+05 9.1788E+02 2.4929E+02 6.6859E+02 1.1205E+06 1.3371E+03 2.3852E+02 1.0986E+03 4 5
180.- 200. 5.6106E+05 9.4153E+02 1.5280E+02 7.8873E+02 1.1285E+06 1.6962E+03 4.1006E+02 1.2862E+03 3 8
200.- 220. 5.5901E+05 1.0028E+03 2.5916E+02 7.4367E+02 1.1175E+06 1.5846E+03 3.7818E+02 1.2065E+03 6 8
220.- 240. 5.5723E+05 1.2807E+03 2.8157E+02 9.9911E+02 1.1140E+06 1.9701E+03 6.6609E+02 1.3040E+03 6 13
240.- 260. 5.5812E+05 1.2366E+03 2.3390E+02 1.0027E+03 1.1054E+06 1.9786E+03 3.1991E+02 1.6587E+03 6 8
260.- 280. 5.5015E+05 1.1355E+03 1.3612E+02 9.9940E+02 1.0966E+06 2.0105E+03 3.0469E+02 1.7058E+03 3 5
280.- 300. 5.4578E+05 1.3830E+03 1.8901E+02 1.1940E+03 1.0942E+06 2.1998E+03 4.3816E+02 1.7617E+03 4 8
300.- 320. 5.4464E+05 1.5375E+03 1.5004E+02 1.3874E+03 1.0894E+06 2.8051E+03 5.1327E+02 2.2918E+03 3 10
320.- 340. 5.3797E+05 1.4798E+03 8.5608E+01 1.3942E+03 1.0775E+06 2.7117E+03 2.4095E+02 2.4707E+03 2 4
340.- 360. 5.2669E+05 1.8555E+03 2.1401E+02 1.6415E+03 1.0634E+06 3.3708E+03 3.2206E+02 3.0487E+03 6 7
360.- 380. 5.2279E+05 1.7141E+03 4.8969E+01 1.6651E+03 1.0240E+06 3.2607E+03 5.9847E+02 2.6622E+03 1 12
380.- 400. 4.8810E+05 1.8251E+03 1.7182E+02 1.6533E+03 9.8269E+05 3.5039E+03 5.1248E+02 2.9914E+03 5 11
400.- 420. 4.7235E+05 1.8867E+03 6.7486E+01 1.8192E+03 9.4485E+05 3.5905E+03 3.1042E+02 3.2801E+03 2 8
420.- 440. 4.5786E+05 2.1479E+03 1.0701E+02 2.0409E+03 9.0999E+05 4.1137E+03 6.8331E+02 3.4304E+03 3 16
440.- 460. 4.3894E+05 2.3010E+03 0.0000E+00 2.3010E+03 8.7391E+05 4.5749E+03 2.3257E+02 4.3423E+03 0 6
460.- 480. 4.1330E+05 2.4737E+03 3.1766E+01 2.4419E+03 8.2070E+05 4.6685E+03 3.0219E+02 4.3663E+03 1 8
480.- 500. 3.7872E+05 2.1675E+03 0.0000E+00 2.1675E+03 7.5934E+05 4.6836E+03 0.0000E+00 4.6836E+03 0 0
500.- 520. 2.8749E+04 1.3207E+02 0.0000E+00 1.3207E+02 5.8504E+04 3.3922E+02 0.0000E+00 3.3922E+02 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3155E+07 3.4312E+04 4.4627E+03 2.9849E+04 2.6267E+07 5.9837E+04 9.9411E+03 4.9896E+04 94 190
1.3140E+07 3.4313E+04 3.8622E+03 3.0451E+04 2.6240E+07 6.0270E+04 9.1578E+03 5.1112E+04 79 171
DAMAGE IN LAYER 1 : 9.3728E+04
DAMAGE IN LAYER 1 : 9.4189E+04
DAMAGE IN LAYER 2 : 3.9325E+04
DAMAGE IN LAYER 2 : 3.9303E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 7.2000E-03 ENERGY REFL.COEF.= 1.8275E-03 REL.MEAN ENERGY = 2.5381E-01 MEAN ENERGY = 2.2843E+03
PART.REFL.COEF.= 4.2000E-03 ENERGY REFL.COEF.= 1.9594E-03 REL.MEAN ENERGY = 4.6653E-01 MEAN ENERGY = 4.1988E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.2843E+03 4.5933E+06 8.4095E-01 2.4329E+00 2.1432E+03 3.5720E+02 9.1640E+05 2.9729E-01
PATHLENGTH 4.9315E+02 3.6386E+04 -4.9147E-01 1.9145E+00 1.9075E+02 3.1792E+01 5.7992E+03 2.7706E-01
ELASTIC LOSS 9.0632E+01 9.2143E+02 3.0355E+01 8.4320E-01
INEL. LOSS 6.5611E+03 4.4751E+06 2.1155E+03 5.8763E+01
ENERGY 4.1988E+03 7.0880E+06 1.9527E-01 1.7554E+00 2.6623E+03 5.8097E+02 1.3444E+06 3.3228E-01
PATHLENGTH 3.3650E+02 3.9972E+04 1.1807E-01 1.8638E+00 1.9993E+02 4.3628E+01 8.1072E+03 3.0587E-01
ELASTIC LOSS 1.0852E+02 2.1892E+03 4.6789E+01 2.2281E+00
INEL. LOSS 4.7700E+03 6.6347E+06 2.5758E+03 1.2266E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.2843E+03 9.8115E+06 5.1676E+10 2.9802E+14 1.8099E+18 1.1362E+22
LOGENERGY 3.0804E+00 9.8246E+00 3.2188E+01 1.0775E+02 3.6709E+02 1.2688E+03
PATHLENGTH 4.9315E+02 2.7958E+05 1.7035E+08 1.0805E+11 7.0228E+13 4.6404E+16
ENERGY 4.1988E+03 2.4718E+07 1.6699E+11 1.2107E+15 9.1529E+18 7.1173E+22
LOGENERGY 3.4881E+00 1.2322E+01 4.4013E+01 1.5872E+02 5.7706E+02 2.1129E+03
PATHLENGTH 3.3650E+02 1.5321E+05 7.9399E+07 4.4227E+10 2.5818E+13 1.5574E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -268,5 +268,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 1 0 0 3 1 0 0 2 4 1 0 5 2 2 3 1 4 3 4
0.000 0.556 0.000 0.000 1.667 0.556 0.000 0.000 1.111 2.222 0.556 0.000 2.778 1.111 1.111 1.667 0.556 2.222 1.667 2.222
0 0 1 2 2 0 0 0 3 1 2 1 0 1 1 1 3 2 0 1
0.000 0.000 0.952 1.905 1.905 0.000 0.000 0.000 2.857 0.952 1.905 0.952 0.000 0.952 0.952 0.952 2.857 1.905 0.000 0.952
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.rge
+39 -40
View File
@@ -1,47 +1,47 @@
DEPTH PARTICLES
10.0000 2
30.0000 3
50.0000 2
70.0000 2
90.0000 3
10.0000 6
30.0000 6
50.0000 4
70.0000 3
90.0000 4
110.0000 11
130.0000 11
150.0000 17
170.0000 10
190.0000 13
130.0000 7
150.0000 14
170.0000 9
190.0000 12
210.0000 17
230.0000 17
250.0000 34
270.0000 29
290.0000 45
310.0000 45
330.0000 42
350.0000 73
370.0000 75
390.0000 95
410.0000 116
430.0000 139
450.0000 155
470.0000 173
490.0000 237
510.0000 214
530.0000 250
550.0000 272
570.0000 298
590.0000 343
610.0000 352
630.0000 324
650.0000 355
670.0000 352
690.0000 278
710.0000 208
730.0000 160
750.0000 105
770.0000 47
790.0000 23
250.0000 19
270.0000 27
290.0000 34
310.0000 46
330.0000 55
350.0000 59
370.0000 77
390.0000 87
410.0000 111
430.0000 143
450.0000 167
470.0000 193
490.0000 235
510.0000 210
530.0000 274
550.0000 302
570.0000 315
590.0000 310
610.0000 357
630.0000 340
650.0000 354
670.0000 314
690.0000 294
710.0000 211
730.0000 144
750.0000 97
770.0000 49
790.0000 28
810.0000 13
830.0000 1
850.0000 3
830.0000 3
850.0000 1
870.0000 0
890.0000 0
910.0000 0
@@ -50,4 +50,3 @@
970.0000 0
990.0000 0
1010.0000 0
1030.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
9.00 0.45 0.00 15.00 5000 4964 36 0 5000 0 0.5624E+03 0.1288E+03 0.2284E+04 0.2143E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1366 3598
9.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.5623E+03 0.1278E+03 0.4199E+04 0.2662E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1363 3616
tests/SiO2_Si_2layer/SiO2_Si_2layer_Seq_Results.dat
+10 -10
View File
@@ -1,11 +1,11 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
1.00 0.45 0.00 15.00 5000 4476 524 0 5056 56 0.9535E+02 0.5031E+02 0.2547E+03 0.2520E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4476 0
3.00 0.45 0.00 15.00 5000 4853 147 0 5000 0 0.2207E+03 0.7526E+02 0.8249E+03 0.7667E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4853 0
5.00 0.45 0.00 15.00 5000 4931 69 0 5000 0 0.3335E+03 0.9409E+02 0.1611E+04 0.1294E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4893 38
7.00 0.45 0.00 15.00 5000 4959 41 0 5000 0 0.4452E+03 0.1120E+03 0.1766E+04 0.1592E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3284 1675
9.00 0.45 0.00 15.00 5000 4964 36 0 5000 0 0.5624E+03 0.1288E+03 0.2284E+04 0.2143E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1366 3598
11.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.6851E+03 0.1459E+03 0.3222E+04 0.3249E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 569 4410
13.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.8165E+03 0.1637E+03 0.4626E+04 0.2884E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 253 4731
15.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.9528E+03 0.1802E+03 0.5107E+04 0.3793E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 137 4847
17.00 0.45 0.00 15.00 5000 4986 14 0 5000 0 0.1105E+04 0.2027E+03 0.4788E+04 0.4719E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 79 4907
19.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1270E+04 0.2207E+03 0.8063E+04 0.5817E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 56 4927
1.00 0.45 0.00 15.00 5000 4525 475 0 5076 76 0.9589E+02 0.5099E+02 0.2524E+03 0.2565E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4525 0
3.00 0.45 0.00 15.00 5000 4857 143 0 5000 0 0.2191E+03 0.7622E+02 0.8864E+03 0.7820E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4857 0
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3343E+03 0.9546E+02 0.1311E+04 0.1182E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4880 40
7.00 0.45 0.00 15.00 5000 4947 53 0 5000 0 0.4451E+03 0.1122E+03 0.2123E+04 0.1906E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3258 1689
9.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.5623E+03 0.1278E+03 0.4199E+04 0.2662E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1363 3616
11.00 0.45 0.00 15.00 5000 4978 22 0 5000 0 0.6823E+03 0.1464E+03 0.3516E+04 0.3082E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 567 4411
13.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.8121E+03 0.1632E+03 0.5113E+04 0.3775E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 282 4693
15.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.9526E+03 0.1782E+03 0.5752E+04 0.4330E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 4849
17.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1114E+04 0.1973E+03 0.4535E+04 0.4174E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 75 4908
19.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1273E+04 0.2212E+03 0.8205E+04 0.6292E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 53 4931