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TRIMSP/tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.out
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1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Start: 19.Jun. 2026 18:18:13
End: 19.Jun. 2026 18:18:13
Simulation needed for 5000 projectiles 0 seconds
* INPUT DATA * SiO2_Si_2lay
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 3000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78742.00 78742.00 78742.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 500.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
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* OUTPUT DATA * SiO2_Si_2lay
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 10500.000 3.9333 10504.596 -3.9333 10450.000 3.28 0 2 3
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
14519 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.4505E+01 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.5000E+03 2
2.LAYER 0.2881E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1050E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12246
0.13356 0.14757 0.13356
0.12246 0.13356 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.45186
1.08509 0.68953 1.08509
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4857 ENERGY=0.1457E+08 EV
BACKSCATTERED PARTICLES= 143 ENERGY=0.1267E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4857 4857
IMPLANTED PARTICLES (LAYER 2)= 3418 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 182.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.017
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.988
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 2.1906E+02 5.8087E+03 -4.2100E-01 2.7761E+00 7.6215E+01 1.0936E+00 1.1108E+02 2.4606E-02
SPREAD 1.2860E+02 3.7677E+03 3.4498E-01 2.6500E+00 6.1382E+01 8.8076E-01 6.9445E+01 2.6897E-02
PATHLENGTH 4.2075E+02 1.2657E+03 -1.4347E-01 3.0654E+00 3.5577E+01 5.1049E-01 2.6101E+01 3.6371E-02
ELASTIC LOSS 2.1404E+01 8.7378E+01 9.3476E+00 1.9246E-03
INEL. LOSS 2.9731E+03 1.9989E+05 4.4709E+02 9.2051E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.1645E-01 5.9432E-01 2.7764E+01 1.3026E+03 7.7092E-01 8.0641E-04 2.2429E-02 1.2301E+00
WEAK EL.LOSS 2.7690E-03 3.2146E-05 3.0433E+00 1.2616E+01 5.6697E-03 5.9307E-06 1.1460E-07 5.9581E-03
INELAST.LOSS 1.6112E+01 7.8896E+01 -1.6288E-01 1.7922E+00 8.8824E+00 9.2912E-03 7.3457E-02 1.5418E-03
SUBTHR.LOSS 1.1271E-01 4.3504E-01 1.8939E+01 5.1744E+02 6.5957E-01 6.8997E-04 1.0342E-02 2.4220E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 2.1906E+02 5.3798E+04 1.4144E+07 3.9059E+09 1.1213E+12 3.3239E+14
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 27 0.5559E-02 0 1.3541E+06 4.1656E+03 4.1469E+03 7.2371E+02 3.4232E+03 5.4340E+02 16
20.- 40. 63 0.1297E-01 0 1.3711E+06 4.8990E+03 4.8623E+03 7.0736E+02 4.1549E+03 5.3515E+02 17
40.- 60. 77 0.1585E-01 0 1.3707E+06 5.5221E+03 5.4751E+03 6.4620E+02 4.8288E+03 4.8624E+02 15
60.- 80. 100 0.2059E-01 0 1.3511E+06 6.0789E+03 6.0165E+03 4.9732E+02 5.5192E+03 3.7907E+02 14
80.- 100. 133 0.2738E-01 0 1.3162E+06 6.6614E+03 6.5848E+03 4.0020E+02 6.1846E+03 3.0309E+02 11
100.- 120. 167 0.3438E-01 0 1.2766E+06 7.3410E+03 7.2451E+03 2.3695E+02 7.0082E+03 1.7911E+02 6
120.- 140. 213 0.4385E-01 0 1.2061E+06 7.9407E+03 7.8215E+03 1.1703E+02 7.7045E+03 8.8050E+01 3
140.- 160. 248 0.5106E-01 0 1.1382E+06 8.9439E+03 8.8024E+03 3.2899E+01 8.7695E+03 2.4985E+01 1
160.- 180. 352 0.7247E-01 0 1.0090E+06 9.0258E+03 8.8383E+03 3.3284E+01 8.8050E+03 2.5263E+01 1
180.- 200. 400 0.8236E-01 0 8.9233E+05 9.2281E+03 9.0115E+03 3.0266E+01 8.9812E+03 2.3079E+01 1
200.- 220. 465 0.9574E-01 0 7.4231E+05 9.0052E+03 8.7593E+03 0.0000E+00 8.7593E+03 0.0000E+00 0
220.- 240. 533 0.1097E+00 0 5.9426E+05 8.4774E+03 8.1997E+03 0.0000E+00 8.1997E+03 0.0000E+00 0
240.- 260. 509 0.1048E+00 0 4.3887E+05 7.0773E+03 6.8105E+03 0.0000E+00 6.8105E+03 0.0000E+00 0
260.- 280. 490 0.1009E+00 1 2.9744E+05 5.6736E+03 5.4365E+03 0.0000E+00 5.4365E+03 0.0000E+00 0
280.- 300. 411 0.8462E-01 2 1.8178E+05 4.0558E+03 3.8568E+03 0.0000E+00 3.8568E+03 0.0000E+00 0
300.- 320. 291 0.5991E-01 12 1.0173E+05 2.4635E+03 2.3292E+03 0.0000E+00 2.3292E+03 0.0000E+00 0
320.- 340. 192 0.3953E-01 64 5.2131E+04 1.3841E+03 1.2959E+03 0.0000E+00 1.2959E+03 0.0000E+00 0
340.- 360. 126 0.2594E-01 154 2.3774E+04 7.4293E+02 6.8788E+02 0.0000E+00 6.8788E+02 0.0000E+00 0
360.- 380. 45 0.9265E-02 387 5.9647E+03 2.1360E+02 1.9482E+02 0.0000E+00 1.9482E+02 0.0000E+00 0
380.- 400. 10 0.2059E-02 695 1.0164E+03 3.6547E+01 3.2685E+01 0.0000E+00 3.2685E+01 0.0000E+00 0
400.- 420. 5 0.1029E-02 1016 3.0697E+02 1.6176E+01 1.4297E+01 0.0000E+00 1.4297E+01 0.0000E+00 0
420.- 440. 0 0.0000E+00 1087 4.1985E-01 2.8665E-02 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0
440.- 460. 0 0.0000E+00 812 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 418 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 156 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 45 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- SUT 0 0.0000E+00
4857 1.0000E+00 4857 1.4725E+07 1.0895E+05 1.0642E+05 3.4252E+03 1.0300E+05 2.5874E+03 85
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.4804E+05 1.3741E+03 1.4968E+02 1.2244E+03 9.0609E+05 2.7728E+03 5.7403E+02 2.1988E+03 4 12
20.- 40. 4.6000E+05 1.6978E+03 1.8607E+02 1.5117E+03 9.1109E+05 3.1645E+03 5.2129E+02 2.6432E+03 5 12
40.- 60. 4.5386E+05 1.9388E+03 1.3745E+02 1.8013E+03 9.1681E+05 3.5363E+03 5.0876E+02 3.0275E+03 4 11
60.- 80. 4.5328E+05 2.1452E+03 1.2824E+02 2.0170E+03 8.9779E+05 3.8713E+03 3.6908E+02 3.5022E+03 4 10
80.- 100. 4.3710E+05 2.2575E+03 3.4094E+01 2.2234E+03 8.7905E+05 4.3273E+03 3.6611E+02 3.9612E+03 1 10
100.- 120. 4.2632E+05 2.3770E+03 3.5240E+01 2.3417E+03 8.5026E+05 4.8682E+03 2.0171E+02 4.6664E+03 1 5
120.- 140. 4.0331E+05 2.5136E+03 0.0000E+00 2.5136E+03 8.0282E+05 5.3079E+03 1.1703E+02 5.1909E+03 0 3
140.- 160. 3.7830E+05 2.8527E+03 0.0000E+00 2.8527E+03 7.5989E+05 5.9497E+03 3.2899E+01 5.9168E+03 0 1
160.- 180. 3.3518E+05 2.7628E+03 0.0000E+00 2.7628E+03 6.7386E+05 6.0755E+03 3.3284E+01 6.0422E+03 0 1
180.- 200. 2.9380E+05 2.8077E+03 0.0000E+00 2.8077E+03 5.9853E+05 6.2038E+03 3.0266E+01 6.1735E+03 0 1
200.- 220. 2.4259E+05 2.6196E+03 0.0000E+00 2.6196E+03 4.9973E+05 6.1397E+03 0.0000E+00 6.1397E+03 0 0
220.- 240. 1.9632E+05 2.5112E+03 0.0000E+00 2.5112E+03 3.9793E+05 5.6885E+03 0.0000E+00 5.6885E+03 0 0
240.- 260. 1.4776E+05 2.1222E+03 0.0000E+00 2.1222E+03 2.9111E+05 4.6883E+03 0.0000E+00 4.6883E+03 0 0
260.- 280. 9.7696E+04 1.5764E+03 0.0000E+00 1.5764E+03 1.9974E+05 3.8601E+03 0.0000E+00 3.8601E+03 0 0
280.- 300. 5.9678E+04 1.1219E+03 0.0000E+00 1.1219E+03 1.2210E+05 2.7349E+03 0.0000E+00 2.7349E+03 0 0
300.- 320. 3.3728E+04 6.7248E+02 0.0000E+00 6.7248E+02 6.8004E+04 1.6567E+03 0.0000E+00 1.6567E+03 0 0
320.- 340. 1.7228E+04 3.5739E+02 0.0000E+00 3.5739E+02 3.4903E+04 9.3852E+02 0.0000E+00 9.3852E+02 0 0
340.- 360. 8.0718E+03 2.0314E+02 0.0000E+00 2.0314E+02 1.5702E+04 4.8474E+02 0.0000E+00 4.8474E+02 0 0
360.- 380. 1.9762E+03 5.0995E+01 0.0000E+00 5.0995E+01 3.9885E+03 1.4383E+02 0.0000E+00 1.4383E+02 0 0
380.- 400. 3.0700E+02 1.0313E+01 0.0000E+00 1.0313E+01 7.0943E+02 2.2372E+01 0.0000E+00 2.2372E+01 0 0
400.- 420. 1.2611E+02 4.0839E+00 0.0000E+00 4.0839E+00 1.8086E+02 1.0213E+01 0.0000E+00 1.0213E+01 0 0
420.- 440. 4.1985E-01 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
460.- 480. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
4.8947E+06 3.3977E+04 6.7077E+02 3.3306E+04 9.8303E+06 7.2445E+04 2.7544E+03 6.9691E+04 19 66
DAMAGE IN LAYER 1 : 1.0642E+05
DAMAGE IN LAYER 2 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.8600E-02 ENERGY REFL.COEF.= 8.4499E-03 REL.MEAN ENERGY = 2.9545E-01 MEAN ENERGY = 8.8635E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.8635E+02 6.1152E+05 1.1259E+00 3.4515E+00 7.8200E+02 6.5394E+01 8.0069E+04 1.6306E-01
PATHLENGTH 2.1399E+02 9.9029E+03 -3.5218E-01 2.0818E+00 9.9513E+01 8.3217E+00 8.6132E+02 1.2601E-01
ELASTIC LOSS 3.4934E+01 2.2564E+02 1.5021E+01 1.0504E-01
INEL. LOSS 1.9902E+03 6.5831E+05 8.1137E+02 5.6739E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.8635E+02 1.3971E+06 2.8608E+09 6.6994E+12 1.6993E+16 4.5424E+19
LOGENERGY 2.7485E+00 7.7631E+00 2.2443E+01 6.6183E+01 1.9852E+02 6.0424E+02
PATHLENGTH 2.1399E+02 5.5694E+04 1.5809E+07 4.7247E+09 1.4630E+12 4.6533E+14
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 2 4 3 4 4 7 7 7 10 8 13 9 11 10 14 16 13
0.000 0.000 0.140 0.280 0.559 0.420 0.559 0.559 0.979 0.979 0.979 1.399 1.119 1.818 1.259 1.538 1.399 1.958 2.238 1.818
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