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Vacuum Panels Test
Sven Augustin edited this page 2025-06-12 15:34:08 +02:00

All Chambers

All Chambers with 2|3 -> last Tests 6.08.2024

Valve's:

Definition Date Gauge 1 Gauge 2 Test OK
KB - Incoupling ATOP21-VVPG165-A010
Chamber - Chamber SATES21-VVPG-VT1010 16.08.24 SATES21-VM-I010 SATES21-VM-VT1010 OK
Chamber - Chamber SATES21-VVPG-VT2010 16.08.24 SATES21-VM-VT1010 SATES21-VM-VT2010 OK
Chamber - Chamber SATES21-VVPG-VT3020 16.08.24 SATES21-VM-2010 SATES21-VM-VT3020 OK
Chamber - Chamber SATES21-VVPG-VT3010 16.08.24 SATES21-VM-VT3020 SATES21-VM-VT3010 OK
Chamber - Chamber SATES21-VVPG-VT4010 16.08.24 SATES21-VM-VT3010 SATES21-VM-VT4010 OK
Roughing - Chamber SATES21-VVPP-VT2010 15.08.24 SATES-VM-VT2050 SATES21-VM-RP015 OK
Roughing- Chamber SATES21-VVPP-VT2020 15.08.24 SATES-VM-VT2060 SATES21-VM-RP025 OK
Roughing - Chamber SATES21-VVPP-VT3020 14.08.24 SATES21-VM-VT3060 SATES21-VM-RP025 OK
Roughing - Chamber SATES21-VVPP-VT3010 14.08.24 SATES21-VM-VT3050 SATES21-VM-RP015 OK
Roughing - Chamber SATES21-VVPP-VT4010 14.08.24 SATES21-VM-VT4050 SATES21-VM-RP015 OK
Roughing - Chamber SATES21-VVPP-VT4020 14.08.24 SATES21-VM-VT4060 SATES21-VM-RP025 OK
Pump - Roughing ATES21-VVPP-I010 15.08.24 Schaut nur auf Pumpe on OK
Roughing - Chamber SATES21-VVPP-VT1010 14.08.24 SATES21-VM-VT1050 SATES21-VM-RP015 OK
Roughing - Chamber SATES21-VVPP-VT1020 14.08.24 SATES21-VM-VT1060 SATES21-VM-RP025 OK
Chamber - Chamber SATES21-VVPG-VT4010 SATES21-VM-VT4010 SATES21-VM-VT3010
Chamber - Chamber SATES21-VVPG-VT3010 SATES21-VM-VT3010 SATES21-VM-VT3020
Chamber - Chamber SATES21-VVPG-VT3020 SATES21-VM-VT2010 SATES21-VM-VT3020
Chamber- Chamber SATES21-VVPG-VT2010 SATES21-VM-VT2010 SATES21-VM-VT1010
Chamber - Chamber SATES21-VVPG-VT1010 SATES21-VM-I010 SATES21-VM-VT1010
Chamber - Chamber SATES21-VM-VT3060
Chamber - Chamber SATES21-VM-VT4050
Roughing - Chamber SATES21-VM-VT4060
Pump - Roughing SATES21-VVPP-RP010 14.08.24 Schaut nur auf Pumpe on OK
Pump - Roughing SATES21-VVPP-RP020 14.08.24 Schaut nur auf Pumpe on OK
Pump - Roughing SATES21-VVPP-RP030 14.08.24 Schaut nur auf Pumpe on OK

Interlock's:

Definition Date GaugeSet Test
Chamber 1 15.08.24 SATES21-VM-VT1010 OK
Chamber 2 15.08.24 SATES21-VM-VT2010 OK
Chamber 3 14.08.24 SATES21-VM-VT3010 OK
Chamber 4 14.08.24 SATES21-VM-VT4010 OK
HV Interlook

All Chambers with 3|4

All Chambers with 2|3 3|4

All Chambers with 2|3 3|4 JF

Settings that are panel independent

Pump Configuration's:

Gaughes Configuration's:

Mode Active Change: