Files
TRIMSP/tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.out
2026-06-25 09:42:41 +02:00

267 lines
18 KiB
Plaintext

1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 19.Jun. 2026 20:11:21
End: 19.Jun. 2026 20:11:38
Simulation needed for 50000 projectiles 17 seconds
* INPUT DATA * SiO2_Si_2lay
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
50000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 500.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Si_2lay
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 10500.000 3.9333 10504.596 -3.9333 10450.000 3.28 0 2 3
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
237809 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1051E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.5000E+03 2
2.LAYER 0.6723E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1050E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12246
0.13356 0.14757 0.13356
0.12246 0.13356 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.45186
1.08509 0.68953 1.08509
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 49535 ENERGY=0.3467E+09 EV
BACKSCATTERED PARTICLES= 465 ENERGY=0.9543E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 32817 32817
IMPLANTED PARTICLES (LAYER 2)= 16718 16718
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.048
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.270
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 4.4547E+02 1.2452E+04 -8.5804E-01 3.8660E+00 1.1159E+02 5.0137E-01 9.4712E+01 1.0898E-02
SPREAD 2.0569E+02 1.0292E+04 4.3970E-01 2.7857E+00 1.0145E+02 4.5581E-01 6.1793E+01 8.7701E-03
PATHLENGTH 7.0531E+02 1.1323E+03 1.4799E-01 2.9868E+00 3.3649E+01 1.5119E-01 7.1707E+00 1.0784E-02
ELASTIC LOSS 2.7173E+01 2.2067E+02 1.4855E+01 2.9989E-04
INEL. LOSS 6.9757E+03 2.0486E+05 4.5261E+02 9.1372E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.0043E-02 8.2291E-01 4.9160E+01 4.1255E+03 9.0714E-01 2.3325E-04 1.3589E-02 8.9033E-01
WEAK EL.LOSS 1.3847E-03 1.5500E-05 4.7042E+00 2.8259E+01 3.9370E-03 1.0123E-06 2.0808E-08 2.9142E-03
INELAST.LOSS 2.2993E+01 1.2040E+02 -5.5055E-01 1.9945E+00 1.0973E+01 2.8213E-03 3.0873E-02 4.1749E-04
SUBTHR.LOSS 8.2264E-02 3.7373E-01 2.2427E+01 6.9336E+02 6.1134E-01 1.5720E-04 2.5287E-03 6.8187E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 4.4547E+02 2.1089E+05 1.0385E+08 5.2679E+10 2.7375E+13 1.4519E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 34 0.6864E-03 0 1.6314E+07 2.2826E+04 2.2784E+04 6.2637E+03 1.6520E+04 4.6518E+03 106
20.- 40. 82 0.1655E-02 0 1.6390E+07 2.2822E+04 2.2755E+04 5.4040E+03 1.7351E+04 4.0028E+03 90
40.- 60. 94 0.1898E-02 0 1.6430E+07 2.5802E+04 2.5729E+04 6.9913E+03 1.8738E+04 5.1396E+03 111
60.- 80. 103 0.2079E-02 0 1.6414E+07 2.6856E+04 2.6771E+04 6.9417E+03 1.9830E+04 5.1487E+03 122
80.- 100. 138 0.2786E-02 0 1.6433E+07 2.7097E+04 2.6999E+04 5.7384E+03 2.1260E+04 4.2736E+03 106
100.- 120. 145 0.2927E-02 0 1.6368E+07 2.9711E+04 2.9598E+04 6.8375E+03 2.2760E+04 5.0782E+03 124
120.- 140. 186 0.3755E-02 0 1.6392E+07 3.1288E+04 3.1157E+04 6.8068E+03 2.4350E+04 5.0395E+03 121
140.- 160. 233 0.4704E-02 0 1.6287E+07 3.2163E+04 3.2006E+04 6.6269E+03 2.5379E+04 4.9262E+03 123
160.- 180. 340 0.6864E-02 0 1.6180E+07 3.6448E+04 3.6236E+04 7.4077E+03 2.8828E+04 5.5203E+03 141
180.- 200. 395 0.7974E-02 0 1.6066E+07 4.0119E+04 3.9870E+04 7.7539E+03 3.2116E+04 5.7997E+03 154
200.- 220. 481 0.9710E-02 0 1.5869E+07 4.1501E+04 4.1212E+04 5.9439E+03 3.5268E+04 4.4518E+03 125
220.- 240. 549 0.1108E-01 0 1.5581E+07 4.5247E+04 4.4913E+04 7.3889E+03 3.7524E+04 5.5533E+03 161
240.- 260. 674 0.1361E-01 0 1.5324E+07 4.9500E+04 4.9094E+04 7.1689E+03 4.1925E+04 5.4101E+03 166
260.- 280. 811 0.1637E-01 0 1.4986E+07 5.2681E+04 5.2201E+04 6.3416E+03 4.5860E+04 4.7770E+03 148
280.- 300. 1006 0.2031E-01 0 1.4507E+07 5.7174E+04 5.6593E+04 5.8995E+03 5.0693E+04 4.4352E+03 138
300.- 320. 1182 0.2386E-01 0 1.3934E+07 6.1300E+04 6.0614E+04 5.5758E+03 5.5039E+04 4.2047E+03 136
320.- 340. 1484 0.2996E-01 0 1.3363E+07 6.4951E+04 6.4112E+04 3.4975E+03 6.0615E+04 2.6374E+03 88
340.- 360. 1683 0.3398E-01 0 1.2624E+07 6.9771E+04 6.8795E+04 3.1659E+03 6.5629E+04 2.3899E+03 83
360.- 380. 2075 0.4189E-01 0 1.1791E+07 7.2497E+04 7.1348E+04 2.5621E+03 6.8786E+04 1.9270E+03 65
380.- 400. 2457 0.4960E-01 0 1.0919E+07 7.8692E+04 7.7322E+04 1.9333E+03 7.5389E+04 1.4604E+03 52
400.- 420. 2965 0.5986E-01 0 9.8676E+06 8.1598E+04 7.9988E+04 9.6095E+02 7.9027E+04 7.2671E+02 27
420.- 440. 3380 0.6823E-01 0 8.6607E+06 8.2625E+04 8.0802E+04 3.3143E+02 8.0471E+04 2.5007E+02 9
440.- 460. 3787 0.7645E-01 0 7.4168E+06 8.0206E+04 7.8197E+04 2.4835E+02 7.7948E+04 1.8774E+02 7
460.- 480. 4137 0.8352E-01 0 6.0946E+06 7.5259E+04 7.3095E+04 3.5351E+01 7.3060E+04 2.6752E+01 1
480.- 500. 4396 0.8875E-01 0 4.7497E+06 6.8772E+04 6.6583E+04 3.0002E+01 6.6553E+04 2.2888E+01 1
500.- 520. 3488 0.7041E-01 0 3.1657E+06 3.2904E+04 3.2227E+04 0.0000E+00 3.2227E+04 0.0000E+00 0
520.- 540. 3512 0.7090E-01 0 2.2748E+06 2.5519E+04 2.4932E+04 0.0000E+00 2.4932E+04 0.0000E+00 0
540.- 560. 3163 0.6385E-01 0 1.5341E+06 1.9284E+04 1.8757E+04 0.0000E+00 1.8757E+04 0.0000E+00 0
560.- 580. 2440 0.4926E-01 2 9.3871E+05 1.3160E+04 1.2759E+04 0.0000E+00 1.2759E+04 0.0000E+00 0
580.- 600. 1849 0.3733E-01 21 5.0813E+05 7.8940E+03 7.6083E+03 0.0000E+00 7.6083E+03 0.0000E+00 0
600.- 620. 1153 0.2328E-01 148 2.4999E+05 4.2296E+03 4.0524E+03 0.0000E+00 4.0524E+03 0.0000E+00 0
620.- 640. 675 0.1363E-01 896 1.0458E+05 1.9493E+03 1.8538E+03 0.0000E+00 1.8538E+03 0.0000E+00 0
640.- 660. 288 0.5814E-02 3114 3.8108E+04 7.6188E+02 7.2037E+02 0.0000E+00 7.2037E+02 0.0000E+00 0
660.- 680. 113 0.2281E-02 7243 1.1046E+04 2.3378E+02 2.1824E+02 0.0000E+00 2.1824E+02 0.0000E+00 0
680.- 700. 28 0.5653E-03 10849 2.7121E+03 6.3072E+01 5.8876E+01 0.0000E+00 5.8876E+01 0.0000E+00 0
700.- 720. 6 0.1211E-03 11246 4.2017E+02 1.1569E+01 1.0650E+01 0.0000E+00 1.0650E+01 0.0000E+00 0
720.- 740. 3 0.6056E-04 8441 6.5753E+01 2.6518E+00 2.4441E+00 0.0000E+00 2.4441E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 4753 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 2028 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 623 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 149 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- SUT 0 0.0000E+00
49535 1.0000E+00 49535 3.4779E+08 1.3829E+06 1.3620E+06 1.1786E+05 1.2441E+06 8.8041E+04 2405
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4295E+06 9.0343E+03 2.4965E+03 6.5378E+03 1.0884E+07 1.3749E+04 3.7672E+03 9.9820E+03 44 62
20.- 40. 5.4666E+06 9.0763E+03 1.9929E+03 7.0834E+03 1.0924E+07 1.3678E+04 3.4112E+03 1.0267E+04 37 53
40.- 60. 5.4777E+06 9.5680E+03 1.9689E+03 7.5990E+03 1.0952E+07 1.6161E+04 5.0223E+03 1.1139E+04 36 75
60.- 80. 5.4754E+06 1.0238E+04 2.4036E+03 7.8345E+03 1.0939E+07 1.6533E+04 4.5380E+03 1.1995E+04 47 75
80.- 100. 5.4774E+06 1.0518E+04 2.0831E+03 8.4346E+03 1.0955E+07 1.6481E+04 3.6553E+03 1.2826E+04 44 62
100.- 120. 5.4547E+06 1.1163E+04 2.1554E+03 9.0074E+03 1.0914E+07 1.8435E+04 4.6820E+03 1.3753E+04 44 80
120.- 140. 5.4625E+06 1.1838E+04 1.8834E+03 9.9547E+03 1.0929E+07 1.9319E+04 4.9234E+03 1.4395E+04 41 80
140.- 160. 5.4383E+06 1.2070E+04 1.7744E+03 1.0296E+04 1.0849E+07 1.9936E+04 4.8525E+03 1.5083E+04 39 84
160.- 180. 5.3893E+06 1.3752E+04 2.2980E+03 1.1454E+04 1.0791E+07 2.2484E+04 5.1097E+03 1.7374E+04 52 89
180.- 200. 5.3425E+06 1.4924E+04 2.4337E+03 1.2491E+04 1.0723E+07 2.4945E+04 5.3202E+03 1.9625E+04 55 99
200.- 220. 5.2716E+06 1.5130E+04 1.4749E+03 1.3655E+04 1.0598E+07 2.6082E+04 4.4691E+03 2.1613E+04 35 90
220.- 240. 5.1854E+06 1.6660E+04 2.0566E+03 1.4603E+04 1.0395E+07 2.8253E+04 5.3323E+03 2.2921E+04 50 111
240.- 260. 5.1103E+06 1.8104E+04 2.1109E+03 1.5993E+04 1.0214E+07 3.0989E+04 5.0580E+03 2.5931E+04 56 110
260.- 280. 4.9840E+06 1.8501E+04 1.3330E+03 1.7168E+04 1.0002E+07 3.3700E+04 5.0086E+03 2.8692E+04 35 113
280.- 300. 4.8573E+06 1.9779E+04 9.4119E+02 1.8838E+04 9.6494E+06 3.6813E+04 4.9584E+03 3.1855E+04 26 112
300.- 320. 4.6413E+06 2.1195E+04 9.8050E+02 2.0214E+04 9.2931E+06 3.9420E+04 4.5953E+03 3.4825E+04 28 108
320.- 340. 4.4596E+06 2.2084E+04 3.9963E+02 2.1684E+04 8.9036E+06 4.2028E+04 3.0979E+03 3.8931E+04 12 76
340.- 360. 4.1950E+06 2.3092E+04 2.2040E+02 2.2872E+04 8.4286E+06 4.5703E+04 2.9455E+03 4.2757E+04 7 76
360.- 380. 3.9235E+06 2.3563E+04 3.1586E+01 2.3531E+04 7.8675E+06 4.7785E+04 2.5305E+03 4.5255E+04 1 64
380.- 400. 3.6339E+06 2.5770E+04 9.7471E+01 2.5673E+04 7.2852E+06 5.1552E+04 1.8358E+03 4.9716E+04 3 49
400.- 420. 3.2807E+06 2.5186E+04 0.0000E+00 2.5186E+04 6.5869E+06 5.4802E+04 9.6095E+02 5.3841E+04 0 27
420.- 440. 2.8846E+06 2.5713E+04 0.0000E+00 2.5713E+04 5.7762E+06 5.5089E+04 3.3143E+02 5.4757E+04 0 9
440.- 460. 2.4558E+06 2.4428E+04 0.0000E+00 2.4428E+04 4.9609E+06 5.3768E+04 2.4835E+02 5.3520E+04 0 7
460.- 480. 2.0281E+06 2.2515E+04 0.0000E+00 2.2515E+04 4.0666E+06 5.0580E+04 3.5351E+01 5.0545E+04 0 1
480.- 500. 1.5633E+06 1.9988E+04 0.0000E+00 1.9988E+04 3.1438E+06 4.6022E+04 3.0002E+01 4.5992E+04 0 1
500.- 520. 8.9093E+04 9.6218E+02 0.0000E+00 9.6218E+02 1.7695E+05 2.3265E+03 0.0000E+00 2.3265E+03 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1298E+08 4.3485E+05 3.1136E+04 4.0372E+05 2.2621E+08 8.2664E+05 8.6719E+04 7.3992E+05 692 1713
DAMAGE IN LAYER 1 : 1.2588E+06
DAMAGE IN LAYER 2 : 1.0320E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 9.3000E-03 ENERGY REFL.COEF.= 2.7265E-03 REL.MEAN ENERGY = 2.9317E-01 MEAN ENERGY = 2.0522E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.0522E+03 3.1473E+06 8.8357E-01 2.7644E+00 1.7741E+03 8.2271E+01 1.9387E+05 8.2635E-02
PATHLENGTH 3.8099E+02 2.8674E+04 -3.1211E-01 2.1336E+00 1.6933E+02 7.8527E+00 1.4158E+03 6.9161E-02
ELASTIC LOSS 7.9321E+01 8.5892E+02 2.9307E+01 6.3027E-02
INEL. LOSS 4.8411E+03 3.2982E+06 1.8161E+03 3.9056E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.0522E+03 7.3587E+06 3.2953E+10 1.6514E+14 8.8618E+17 4.9806E+21
LOGENERGY 3.0782E+00 9.7707E+00 3.1713E+01 1.0478E+02 3.5133E+02 1.1926E+03
PATHLENGTH 3.8099E+02 1.7382E+05 8.6558E+07 4.5486E+10 2.4812E+13 1.3919E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 2 4 12 10 17 16 14 25 20 25 22 31 37 40 38 35 43 36 38
0.000 0.086 0.172 0.516 0.430 0.731 0.688 0.602 1.075 0.860 1.075 0.946 1.333 1.591 1.720 1.634 1.505 1.849 1.548 1.634