1 * TrimSPNL v1.3.2 * Random-number generator: RANLUX Start: 19.Jun. 2026 20:11:21 End: 19.Jun. 2026 20:11:38 Simulation needed for 50000 projectiles 17 seconds * INPUT DATA * SiO2_Si_2lay Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC 1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00 NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL 50000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0 DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5) 1.LAYER 500.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000 2.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000 *** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) *** 1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 2.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 CH1 CH2 CH3 CH4 CH5 1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190 2.652000 3.000000 1920.000000 2000.000000 0.022300 2.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190 INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION 1 * OUTPUT DATA * SiO2_Si_2lay HLM HLMT SU SUT XC RT SFE INEL L LJ 0.0000 10500.000 3.9333 10504.596 -3.9333 10450.000 3.28 0 2 3 NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST 237809 0 0 0 0 0 0 0 0 EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I) 1.LAYER 0.1051E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.5000E+03 2 2.LAYER 0.6723E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1050E+05 1 A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35) 0.19439 0.23425 0.19439 KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z) 1.07495 0.67216 1.07495 A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35) 0.12246 0.13356 0.12246 0.13356 0.14757 0.13356 0.12246 0.13356 0.12246 KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z) 1.45186 0.89903 1.45186 1.08509 0.68953 1.08509 1.45186 0.89903 1.45186 1 IMPLANTED PARTICLES= 49535 ENERGY=0.3467E+09 EV BACKSCATTERED PARTICLES= 465 ENERGY=0.9543E+06 EV TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV TRIED PARTICLES= 50000 PARTICLES with neg. E= 0 THOMAS FERMI RED. ENERGY= 0.0000E+00 SCALED PART. REFL. COEFF= 0.0000E+00 FROM BIN WIDTH FROM LAYER THICKNESS IMPLANTED PARTICLES (LAYER 1)= 32817 32817 IMPLANTED PARTICLES (LAYER 2)= 16718 16718 PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.048 MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.270 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M PENETRATION 4.4547E+02 1.2452E+04 -8.5804E-01 3.8660E+00 1.1159E+02 5.0137E-01 9.4712E+01 1.0898E-02 SPREAD 2.0569E+02 1.0292E+04 4.3970E-01 2.7857E+00 1.0145E+02 4.5581E-01 6.1793E+01 8.7701E-03 PATHLENGTH 7.0531E+02 1.1323E+03 1.4799E-01 2.9868E+00 3.3649E+01 1.5119E-01 7.1707E+00 1.0784E-02 ELASTIC LOSS 2.7173E+01 2.2067E+02 1.4855E+01 2.9989E-04 INEL. LOSS 6.9757E+03 2.0486E+05 4.5261E+02 9.1372E-03 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ELAST.LOSS 9.0043E-02 8.2291E-01 4.9160E+01 4.1255E+03 9.0714E-01 2.3325E-04 1.3589E-02 8.9033E-01 WEAK EL.LOSS 1.3847E-03 1.5500E-05 4.7042E+00 2.8259E+01 3.9370E-03 1.0123E-06 2.0808E-08 2.9142E-03 INELAST.LOSS 2.2993E+01 1.2040E+02 -5.5055E-01 1.9945E+00 1.0973E+01 2.8213E-03 3.0873E-02 4.1749E-04 SUBTHR.LOSS 8.2264E-02 3.7373E-01 2.2427E+01 6.9336E+02 6.1134E-01 1.5720E-04 2.5287E-03 6.8187E-02 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT PENETRATION 4.4547E+02 2.1089E+05 1.0385E+08 5.2679E+10 2.7375E+13 1.4519E+16 1 DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA -SU- 0. 0 0.0000E+00 0.- 20. 34 0.6864E-03 0 1.6314E+07 2.2826E+04 2.2784E+04 6.2637E+03 1.6520E+04 4.6518E+03 106 20.- 40. 82 0.1655E-02 0 1.6390E+07 2.2822E+04 2.2755E+04 5.4040E+03 1.7351E+04 4.0028E+03 90 40.- 60. 94 0.1898E-02 0 1.6430E+07 2.5802E+04 2.5729E+04 6.9913E+03 1.8738E+04 5.1396E+03 111 60.- 80. 103 0.2079E-02 0 1.6414E+07 2.6856E+04 2.6771E+04 6.9417E+03 1.9830E+04 5.1487E+03 122 80.- 100. 138 0.2786E-02 0 1.6433E+07 2.7097E+04 2.6999E+04 5.7384E+03 2.1260E+04 4.2736E+03 106 100.- 120. 145 0.2927E-02 0 1.6368E+07 2.9711E+04 2.9598E+04 6.8375E+03 2.2760E+04 5.0782E+03 124 120.- 140. 186 0.3755E-02 0 1.6392E+07 3.1288E+04 3.1157E+04 6.8068E+03 2.4350E+04 5.0395E+03 121 140.- 160. 233 0.4704E-02 0 1.6287E+07 3.2163E+04 3.2006E+04 6.6269E+03 2.5379E+04 4.9262E+03 123 160.- 180. 340 0.6864E-02 0 1.6180E+07 3.6448E+04 3.6236E+04 7.4077E+03 2.8828E+04 5.5203E+03 141 180.- 200. 395 0.7974E-02 0 1.6066E+07 4.0119E+04 3.9870E+04 7.7539E+03 3.2116E+04 5.7997E+03 154 200.- 220. 481 0.9710E-02 0 1.5869E+07 4.1501E+04 4.1212E+04 5.9439E+03 3.5268E+04 4.4518E+03 125 220.- 240. 549 0.1108E-01 0 1.5581E+07 4.5247E+04 4.4913E+04 7.3889E+03 3.7524E+04 5.5533E+03 161 240.- 260. 674 0.1361E-01 0 1.5324E+07 4.9500E+04 4.9094E+04 7.1689E+03 4.1925E+04 5.4101E+03 166 260.- 280. 811 0.1637E-01 0 1.4986E+07 5.2681E+04 5.2201E+04 6.3416E+03 4.5860E+04 4.7770E+03 148 280.- 300. 1006 0.2031E-01 0 1.4507E+07 5.7174E+04 5.6593E+04 5.8995E+03 5.0693E+04 4.4352E+03 138 300.- 320. 1182 0.2386E-01 0 1.3934E+07 6.1300E+04 6.0614E+04 5.5758E+03 5.5039E+04 4.2047E+03 136 320.- 340. 1484 0.2996E-01 0 1.3363E+07 6.4951E+04 6.4112E+04 3.4975E+03 6.0615E+04 2.6374E+03 88 340.- 360. 1683 0.3398E-01 0 1.2624E+07 6.9771E+04 6.8795E+04 3.1659E+03 6.5629E+04 2.3899E+03 83 360.- 380. 2075 0.4189E-01 0 1.1791E+07 7.2497E+04 7.1348E+04 2.5621E+03 6.8786E+04 1.9270E+03 65 380.- 400. 2457 0.4960E-01 0 1.0919E+07 7.8692E+04 7.7322E+04 1.9333E+03 7.5389E+04 1.4604E+03 52 400.- 420. 2965 0.5986E-01 0 9.8676E+06 8.1598E+04 7.9988E+04 9.6095E+02 7.9027E+04 7.2671E+02 27 420.- 440. 3380 0.6823E-01 0 8.6607E+06 8.2625E+04 8.0802E+04 3.3143E+02 8.0471E+04 2.5007E+02 9 440.- 460. 3787 0.7645E-01 0 7.4168E+06 8.0206E+04 7.8197E+04 2.4835E+02 7.7948E+04 1.8774E+02 7 460.- 480. 4137 0.8352E-01 0 6.0946E+06 7.5259E+04 7.3095E+04 3.5351E+01 7.3060E+04 2.6752E+01 1 480.- 500. 4396 0.8875E-01 0 4.7497E+06 6.8772E+04 6.6583E+04 3.0002E+01 6.6553E+04 2.2888E+01 1 500.- 520. 3488 0.7041E-01 0 3.1657E+06 3.2904E+04 3.2227E+04 0.0000E+00 3.2227E+04 0.0000E+00 0 520.- 540. 3512 0.7090E-01 0 2.2748E+06 2.5519E+04 2.4932E+04 0.0000E+00 2.4932E+04 0.0000E+00 0 540.- 560. 3163 0.6385E-01 0 1.5341E+06 1.9284E+04 1.8757E+04 0.0000E+00 1.8757E+04 0.0000E+00 0 560.- 580. 2440 0.4926E-01 2 9.3871E+05 1.3160E+04 1.2759E+04 0.0000E+00 1.2759E+04 0.0000E+00 0 580.- 600. 1849 0.3733E-01 21 5.0813E+05 7.8940E+03 7.6083E+03 0.0000E+00 7.6083E+03 0.0000E+00 0 600.- 620. 1153 0.2328E-01 148 2.4999E+05 4.2296E+03 4.0524E+03 0.0000E+00 4.0524E+03 0.0000E+00 0 620.- 640. 675 0.1363E-01 896 1.0458E+05 1.9493E+03 1.8538E+03 0.0000E+00 1.8538E+03 0.0000E+00 0 640.- 660. 288 0.5814E-02 3114 3.8108E+04 7.6188E+02 7.2037E+02 0.0000E+00 7.2037E+02 0.0000E+00 0 660.- 680. 113 0.2281E-02 7243 1.1046E+04 2.3378E+02 2.1824E+02 0.0000E+00 2.1824E+02 0.0000E+00 0 680.- 700. 28 0.5653E-03 10849 2.7121E+03 6.3072E+01 5.8876E+01 0.0000E+00 5.8876E+01 0.0000E+00 0 700.- 720. 6 0.1211E-03 11246 4.2017E+02 1.1569E+01 1.0650E+01 0.0000E+00 1.0650E+01 0.0000E+00 0 720.- 740. 3 0.6056E-04 8441 6.5753E+01 2.6518E+00 2.4441E+00 0.0000E+00 2.4441E+00 0.0000E+00 0 740.- 760. 0 0.0000E+00 4753 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 760.- 780. 0 0.0000E+00 2028 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 780.- 800. 0 0.0000E+00 623 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 800.- 820. 0 0.0000E+00 149 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 820.- 840. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 840.- 860. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 860.- 880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 880.- 900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 900.- SUT 0 0.0000E+00 49535 1.0000E+00 49535 3.4779E+08 1.3829E+06 1.3620E+06 1.1786E+05 1.2441E+06 8.8041E+04 2405 1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2) 0.- 20. 5.4295E+06 9.0343E+03 2.4965E+03 6.5378E+03 1.0884E+07 1.3749E+04 3.7672E+03 9.9820E+03 44 62 20.- 40. 5.4666E+06 9.0763E+03 1.9929E+03 7.0834E+03 1.0924E+07 1.3678E+04 3.4112E+03 1.0267E+04 37 53 40.- 60. 5.4777E+06 9.5680E+03 1.9689E+03 7.5990E+03 1.0952E+07 1.6161E+04 5.0223E+03 1.1139E+04 36 75 60.- 80. 5.4754E+06 1.0238E+04 2.4036E+03 7.8345E+03 1.0939E+07 1.6533E+04 4.5380E+03 1.1995E+04 47 75 80.- 100. 5.4774E+06 1.0518E+04 2.0831E+03 8.4346E+03 1.0955E+07 1.6481E+04 3.6553E+03 1.2826E+04 44 62 100.- 120. 5.4547E+06 1.1163E+04 2.1554E+03 9.0074E+03 1.0914E+07 1.8435E+04 4.6820E+03 1.3753E+04 44 80 120.- 140. 5.4625E+06 1.1838E+04 1.8834E+03 9.9547E+03 1.0929E+07 1.9319E+04 4.9234E+03 1.4395E+04 41 80 140.- 160. 5.4383E+06 1.2070E+04 1.7744E+03 1.0296E+04 1.0849E+07 1.9936E+04 4.8525E+03 1.5083E+04 39 84 160.- 180. 5.3893E+06 1.3752E+04 2.2980E+03 1.1454E+04 1.0791E+07 2.2484E+04 5.1097E+03 1.7374E+04 52 89 180.- 200. 5.3425E+06 1.4924E+04 2.4337E+03 1.2491E+04 1.0723E+07 2.4945E+04 5.3202E+03 1.9625E+04 55 99 200.- 220. 5.2716E+06 1.5130E+04 1.4749E+03 1.3655E+04 1.0598E+07 2.6082E+04 4.4691E+03 2.1613E+04 35 90 220.- 240. 5.1854E+06 1.6660E+04 2.0566E+03 1.4603E+04 1.0395E+07 2.8253E+04 5.3323E+03 2.2921E+04 50 111 240.- 260. 5.1103E+06 1.8104E+04 2.1109E+03 1.5993E+04 1.0214E+07 3.0989E+04 5.0580E+03 2.5931E+04 56 110 260.- 280. 4.9840E+06 1.8501E+04 1.3330E+03 1.7168E+04 1.0002E+07 3.3700E+04 5.0086E+03 2.8692E+04 35 113 280.- 300. 4.8573E+06 1.9779E+04 9.4119E+02 1.8838E+04 9.6494E+06 3.6813E+04 4.9584E+03 3.1855E+04 26 112 300.- 320. 4.6413E+06 2.1195E+04 9.8050E+02 2.0214E+04 9.2931E+06 3.9420E+04 4.5953E+03 3.4825E+04 28 108 320.- 340. 4.4596E+06 2.2084E+04 3.9963E+02 2.1684E+04 8.9036E+06 4.2028E+04 3.0979E+03 3.8931E+04 12 76 340.- 360. 4.1950E+06 2.3092E+04 2.2040E+02 2.2872E+04 8.4286E+06 4.5703E+04 2.9455E+03 4.2757E+04 7 76 360.- 380. 3.9235E+06 2.3563E+04 3.1586E+01 2.3531E+04 7.8675E+06 4.7785E+04 2.5305E+03 4.5255E+04 1 64 380.- 400. 3.6339E+06 2.5770E+04 9.7471E+01 2.5673E+04 7.2852E+06 5.1552E+04 1.8358E+03 4.9716E+04 3 49 400.- 420. 3.2807E+06 2.5186E+04 0.0000E+00 2.5186E+04 6.5869E+06 5.4802E+04 9.6095E+02 5.3841E+04 0 27 420.- 440. 2.8846E+06 2.5713E+04 0.0000E+00 2.5713E+04 5.7762E+06 5.5089E+04 3.3143E+02 5.4757E+04 0 9 440.- 460. 2.4558E+06 2.4428E+04 0.0000E+00 2.4428E+04 4.9609E+06 5.3768E+04 2.4835E+02 5.3520E+04 0 7 460.- 480. 2.0281E+06 2.2515E+04 0.0000E+00 2.2515E+04 4.0666E+06 5.0580E+04 3.5351E+01 5.0545E+04 0 1 480.- 500. 1.5633E+06 1.9988E+04 0.0000E+00 1.9988E+04 3.1438E+06 4.6022E+04 3.0002E+01 4.5992E+04 0 1 500.- 520. 8.9093E+04 9.6218E+02 0.0000E+00 9.6218E+02 1.7695E+05 2.3265E+03 0.0000E+00 2.3265E+03 0 0 520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 1.1298E+08 4.3485E+05 3.1136E+04 4.0372E+05 2.2621E+08 8.2664E+05 8.6719E+04 7.3992E+05 692 1713 DAMAGE IN LAYER 1 : 1.2588E+06 DAMAGE IN LAYER 2 : 1.0320E+05 1 BACKSCATTERING OF PROJECTILES PART.REFL.COEF.= 9.3000E-03 ENERGY REFL.COEF.= 2.7265E-03 REL.MEAN ENERGY = 2.9317E-01 MEAN ENERGY = 2.0522E+03 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ENERGY 2.0522E+03 3.1473E+06 8.8357E-01 2.7644E+00 1.7741E+03 8.2271E+01 1.9387E+05 8.2635E-02 PATHLENGTH 3.8099E+02 2.8674E+04 -3.1211E-01 2.1336E+00 1.6933E+02 7.8527E+00 1.4158E+03 6.9161E-02 ELASTIC LOSS 7.9321E+01 8.5892E+02 2.9307E+01 6.3027E-02 INEL. LOSS 4.8411E+03 3.2982E+06 1.8161E+03 3.9056E+00 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT ENERGY 2.0522E+03 7.3587E+06 3.2953E+10 1.6514E+14 8.8618E+17 4.9806E+21 LOGENERGY 3.0782E+00 9.7707E+00 3.1713E+01 1.0478E+02 3.5133E+02 1.1926E+03 PATHLENGTH 3.8099E+02 1.7382E+05 8.6558E+07 4.5486E+10 2.4812E+13 1.3919E+16 POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00 0 2 4 12 10 17 16 14 25 20 25 22 31 37 40 38 35 43 36 38 0.000 0.086 0.172 0.516 0.430 0.731 0.688 0.602 1.075 0.860 1.075 0.946 1.333 1.591 1.720 1.634 1.505 1.849 1.548 1.634