Extract the backward sputtering yields and energies

This commit is contained in:
2026-06-18 11:23:27 +02:00
parent 8a6ead44a4
commit 1ded610f99
+267 -191
View File
@@ -2598,199 +2598,25 @@ C
C
C BACKWARD SPUTTERING : YIELDS AND ENERGIES
C
call writeBackwardSputterYieldSummary(ISPA,L,NJ,JT,LJ,HN,EMV,
& IBSP,IBSPL,EBSP,ISPAL,ESPAL,ESPA,ISPIP,ISPIS,ISPOP,
& ISPOS,ESPIP,ESPIS,ESPOP,ESPOS,RIP,RIS,ROP,ROS,REIP,
& REIS,REOP,REOS,RIPJ,RISJ,ROPJ,ROSJ,REIPJ,REISJ,
& REOPJ,REOSJ,ESPMIP,ESPMIS,ESPMOP,ESPMOS,SPY,SPE,
& REY,EMSP,SPE2S,SPE3S,SPE4S,SPE5S,SPE6S,SPE1SL,
& SPE2SL,SPE3SL,SPE4SL,SPE5SL,SPE6SL,FIESB,SEESB,
& THESB,FOESB,SGMESB,DFIESB,DSEESB,DTHESB,MAXNL,
& MAXNL5,MAXNLm15)
IF(ISPA.EQ.0) GO TO 1700
WRITE(21,1548)
1548 FORMAT(1H1,5X,'BACKWARD SPUTTERING')
DO J=1,NJ(1)
ISPAL(1) = ISPAL(1)+IBSP(J)
ESPAL(1) = ESPAL(1)+EBSP(J)
ENDDO
DO J=NJ(1)+1,JT(3)
ISPAL(2) = ISPAL(2)+IBSP(J)
ESPAL(2) = ESPAL(2)+EBSP(J)
ENDDO
DO J=JT(3)+1,LJ
ISPAL(3) = ISPAL(3)+IBSP(J)
ESPAL(3) = ESPAL(3)+EBSP(J)
ENDDO
WRITE(21,1558) ISPA,ESPA
1558 FORMAT(///,8X,'ALL SPUTTERED PARTICLES = ',I7,3X
& ,'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//)
DO 1557 J=1,L
WRITE(21,1559) J,ISPAL(J),ESPAL(J)
1559 FORMAT(8X,'SPUTTERED PARTICLES (',I3,'.LAYER) = ',I7,3X
& ,'SPUTTERED ENERGY = ',E10.4,3H EV)
1557 CONTINUE
WRITE(21,1560)
1560 FORMAT(//1X,'1.LAYER')
DO 1562 J=1,NJ(1)
WRITE(21,1564) J,IBSP(J),J,EBSP(J)
1564 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X
& ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1562 CONTINUE
IF(ISPA.EQ.0) GO TO 1700
DO J=1,LJ
RIP(J)=DBLE(ISPIP(J))/DBLE(ISPA)
RIS(J)=DBLE(ISPIS(J))/DBLE(ISPA)
ROP(J)=DBLE(ISPOP(J))/DBLE(ISPA)
ROS(J)=DBLE(ISPOS(J))/DBLE(ISPA)
REIP(J)=ESPIP(J)/ESPA
REIS(J)=ESPIS(J)/ESPA
REOP(J)=ESPOP(J)/ESPA
REOS(J)=ESPOS(J)/ESPA
ENDDO
DO 1584 J=1,LJ
IF(IBSP(J).EQ.0) GO TO 1584
RIPJ(J)=DBLE(ISPIP(J))/DBLE(IBSP(J))
RISJ(J)=DBLE(ISPIS(J))/DBLE(IBSP(J))
ROPJ(J)=DBLE(ISPOP(J))/DBLE(IBSP(J))
ROSJ(J)=DBLE(ISPOS(J))/DBLE(IBSP(J))
REIPJ(J)=ESPIP(J)/EBSP(J)
REISJ(J)=ESPIS(J)/EBSP(J)
REOPJ(J)=ESPOP(J)/EBSP(J)
REOSJ(J)=ESPOS(J)/EBSP(J)
1584 CONTINUE
DO 1571 J=1,LJ
IF(ISPIP(J).EQ.0) GO TO 3571
ESPMIP(J)=ESPIP(J)/DBLE(ISPIP(J))
3571 IF(ISPIS(J).EQ.0) GO TO 3572
ESPMIS(J)=ESPIS(J)/DBLE(ISPIS(J))
3572 IF(ISPOP(J).EQ.0) GO TO 3573
ESPMOP(J)=ESPOP(J)/DBLE(ISPOP(J))
3573 IF(ISPOS(J).EQ.0) GO TO 1571
ESPMOS(J)=ESPOS(J)/DBLE(ISPOS(J))
1571 CONTINUE
1573 CONTINUE
DO J=1,LJ
SPY(J)=DBLE(IBSP(J))/HN
SPE(J)=EBSP(J)/(HN*EMV)
ENDDO
DO 1579 J=1,LJ
IF (equal(SPY(J),0.0D0))GO TO 1579
REY(J)=SPE(J)/SPY(J)
EMSP(J)=EBSP(J)/IBSP(J)
1579 CONTINUE
IF(ISPAL(1).EQ.0) GO TO 1575
DO J=1,NJ(1)
WRITE(21,1576) J,ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J)
& ,REIPJ(J),ESPMIP(J) ,J,ISPIS(J),RIS(J),RISJ(J),ESPIS(J)
& ,REIS(J),REISJ(J) ,ESPMIS(J) ,J,ISPOP(J),ROP(J),ROPJ(J)
& ,ESPOP(J),REOP(J),REOPJ(J) ,ESPMOP(J) ,J,ISPOS(J),ROS(J)
& ,ROSJ(J),ESPOS(J),REOS(J),REOSJ(J) ,ESPMOS(J)
1576 FORMAT(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,2F9.4,4X
& ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 9X,'ION IN , SECOND. KO(',I1,') = ',I7,2F9.4,4X
& ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,2F9.4,4X
& ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,2F9.4,4X
& ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4)
ENDDO
1575 CONTINUE
WRITE(21,1577)
1564 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X,
& 'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1577 FORMAT(/)
DO 1580 J=1,NJ(1)
WRITE(21,1582) J,SPY(J),J,SPE(J),J,REY(J),J,EMSP(J)
1582 FORMAT(5X,'SPUTTERING YIELD(',I1,') = ',1PE10.3,
& ' SPUTTERED ENERGY(',I1,') = ',1E10.3,
& ' REL.MEAN ENERGY(',I1,') = ',1E10.3,
& ' MEAN ENERGY(',I1,') = ',1E10.3)
1580 CONTINUE
DO 7260 J=1,NJ(1)
IF(IBSP(J).LE.1) GO TO 7260
YSP=IBSP(J)
YSPL=IBSPL(J)
CALL MOMENTN(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES ,DFIES0
& ,DSEES,DTHES, EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6 ,EBSP(J)
& ,SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J) ,SPE6S(J),YSP)
CALL MOMENTN(FIES0L,SEESL,THESL,FOESL,FIESL,SIESL,SIGMSL
& ,DFIESL,DSEESL,DTHESL, EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L
& ,EBSP6L ,SPE1SL(J),SPE2SL(J),SPE3SL(J),SPE4SL(J),SPE5SL(J)
& ,SPE6SL(J),YSPL)
WRITE(21,7117)
WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES
7261 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,7E14.4)
WRITE(21,7263) J,FIES0L,SEESL,THESL,FOESL,SIGMSL,DFIESL,DSEESL
& ,DTHESL
7263 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,7E14.4)
WRITE(21,7118)
7118 FORMAT(/20X,' 1.MOMENT ',4X,' 2.MOMENT ',4X,' 3.MOMENT '
& ,4X,' 4.MOMENT ',4X,' 5.MOMENT ',4X,' 6.MOMENT ')
WRITE(21,7265) J,EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6
7265 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,5E14.4)
WRITE(21,7267) J,EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,EBSP6L
7267 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,5E14.4)
FIESB(J)=FIES0
SEESB(J)=SEES
THESB(J)=THES
FOESB(J)=FOES
SGMESB(J)=SIGMES
DFIESB(J)=DFIES0
DSEESB(J)=DSEES
DTHESB(J)=DTHES
7260 CONTINUE
IF(L.EQ.1) GO TO 1593
IF(ISPAL(2).EQ.0) GO TO 1593
WRITE(21,1566)
1566 FORMAT(//1X,'2.LAYER')
DO 1568 J=NJ(1)+1,JT(3)
WRITE(21,1570) J-NJ(1),IBSP(J),J-NJ(1),EBSP(J)
1570 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X
& ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1568 CONTINUE
DO 1586 J=NJ(1)+1,JT(3)
WRITE(21,1576) J-NJ(1),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J)
& ,REIPJ(J),ESPMIP(J),J-NJ(1),ISPIS(J),RIS(J),RISJ(J)
& ,ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-NJ(1),ISPOP(J)
& ,ROP(J),ROPJ(J),ESPOP(J),REOP(J) ,REOPJ(J),ESPMOP(J),J
& -NJ(1),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J),REOSJ(J)
& ,ESPMOS(J)
1586 CONTINUE
WRITE(21,1577)
DO J=NJ(1)+1,JT(3)
WRITE(21,1582) J-NJ(1),SPY(J),J,SPE(J),J,REY(J),J,EMSP(J)
ENDDO
1593 CONTINUE
DO 7262 J=NJ(1)+1,JT(3)
IF(IBSP(J).LE.1) GO TO 7262
YSP=IBSP(J)
CALL MOMENTS(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES ,DFIES0
& ,DSEES,DTHES, EBSP(J),SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J)
& ,SPE6S(J),YSP)
WRITE(21,7117)
WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES
FIESB(J)=FIES0
SEESB(J)=SEES
THESB(J)=THES
FOESB(J)=FOES
SGMESB(J)=SIGMES
DFIESB(J)=DFIES0
DSEESB(J)=DSEES
DTHESB(J)=DTHES
7262 CONTINUE
IF(L.EQ.2) GO TO 1532
IF(ISPAL(3).EQ.0) GO TO 1532
WRITE(21,1534)
1534 FORMAT(//1X,'3.LAYER')
DO 1536 J=JT(3)+1,LJ
WRITE(21,1538) J-JT(3),IBSP(J),J-JT(3),EBSP(J)
1538 FORMAT(10X,'SPUTTERED PARTICLES(',I1,') = ',I7,6X
& ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1536 CONTINUE
DO J=JT(3)+1,LJ
WRITE(21,1576) J-JT(3),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J)
& ,REIPJ(J),ESPMIP(J),J-JT(3),ISPIS(J),RIS(J),RISJ(J)
& ,ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-JT(3),ISPOP(J)
& ,ROP(J),ROPJ(J),ESPOP(J),REOP(J),REOPJ(J),ESPMOP(J),
& J-JT(3),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J),REOSJ(J)
& ,ESPMOS(J)
ENDDO
WRITE(21,1577)
DO J=JT(3)+1,LJ
WRITE(21,1582) J-JT(3),SPY(J),J-JT(3),SPE(J),J-JT(3),REY(J),
& J-JT(3),EMSP(J)
ENDDO
1532 CONTINUE
1582 FORMAT(5X,'SPUTTERING YIELD(',I1,') = ',1PE10.3,
& ' SPUTTERED ENERGY(',I1,') = ',1E10.3,
& ' REL.MEAN ENERGY(',I1,') = ',1E10.3,
& ' MEAN ENERGY(',I1,') = ',1E10.3)
7118 FORMAT(/20X,' 1.MOMENT ',4X,' 2.MOMENT ',4X,' 3.MOMENT ',
& 4X,' 4.MOMENT ',4X,' 5.MOMENT ',4X,' 6.MOMENT ')
C
C BACKWARD SPUTTERING : ANGULAR DISTRIBUTIONS
C
@@ -3561,6 +3387,256 @@ C OUTPUT WRITER SUBROUTINES
C=======================================================================
C=======================================================================
C=======================================================================
C WRITE BACKWARD SPUTTERING YIELD SUMMARY
C=======================================================================
subroutine writeBackwardSputterYieldSummary(ISPA,L,NJ,JT,LJ,HN,
& EMV,IBSP,IBSPL,EBSP,ISPAL,ESPAL,ESPA,ISPIP,ISPIS,ISPOP,
& ISPOS,ESPIP,ESPIS,ESPOP,ESPOS,RIP,RIS,ROP,ROS,REIP,
& REIS,REOP,REOS,RIPJ,RISJ,ROPJ,ROSJ,REIPJ,REISJ,
& REOPJ,REOSJ,ESPMIP,ESPMIS,ESPMOP,ESPMOS,SPY,SPE,
& REY,EMSP,SPE2S,SPE3S,SPE4S,SPE5S,SPE6S,SPE1SL,
& SPE2SL,SPE3SL,SPE4SL,SPE5SL,SPE6SL,FIESB,SEESB,
& THESB,FOESB,SGMESB,DFIESB,DSEESB,DTHESB,MAXNL,
& MAXNL5,MAXNLm15)
implicit none
integer ISPA,L,LJ,MAXNL,MAXNL5,MAXNLm15
integer NJ(MAXNL),JT(MAXNL)
integer IBSP(MAXNL5),IBSPL(MAXNL5),ISPAL(MAXNL)
integer ISPIP(MAXNL5),ISPIS(MAXNL5),ISPOP(MAXNL5)
integer ISPOS(MAXNL5)
integer J
real*8 HN,EMV,ESPA
real*8 EBSP(MAXNL5),ESPAL(MAXNL)
real*8 ESPIP(MAXNL5),ESPIS(MAXNL5),ESPOP(MAXNL5)
real*8 ESPOS(MAXNL5)
real*8 RIP(MAXNL5),RIS(MAXNL5),ROP(MAXNL5),ROS(MAXNL5)
real*8 REIP(MAXNL5),REIS(MAXNL5),REOP(MAXNL5),REOS(MAXNL5)
real*8 RIPJ(MAXNL5),RISJ(MAXNL5),ROPJ(MAXNL5),ROSJ(MAXNL5)
real*8 REIPJ(MAXNL5),REISJ(MAXNL5),REOPJ(MAXNL5)
real*8 REOSJ(MAXNL5)
real*8 ESPMIP(MAXNL5),ESPMIS(MAXNL5),ESPMOP(MAXNL5)
real*8 ESPMOS(MAXNL5)
real*8 SPY(MAXNL5),SPE(MAXNL5),REY(MAXNL5),EMSP(MAXNL5)
real*8 SPE2S(MAXNL5),SPE3S(MAXNL5),SPE4S(MAXNL5)
real*8 SPE5S(MAXNL5),SPE6S(MAXNL5)
real*8 SPE1SL(MAXNL5),SPE2SL(MAXNL5),SPE3SL(MAXNL5)
real*8 SPE4SL(MAXNL5),SPE5SL(MAXNL5),SPE6SL(MAXNL5)
real*8 FIESB(MAXNLm15),SEESB(MAXNLm15),THESB(MAXNLm15)
real*8 FOESB(MAXNLm15),SGMESB(MAXNLm15),DFIESB(MAXNLm15)
real*8 DSEESB(MAXNLm15),DTHESB(MAXNLm15)
real*8 FIES0,SEES,THES,FOES,FIES,SIES,SIGMES
real*8 DFIES0,DSEES,DTHES
real*8 FIES0L,SEESL,THESL,FOESL,FIESL,SIESL,SIGMSL
real*8 DFIESL,DSEESL,DTHESL
real*8 EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6
real*8 EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,EBSP6L
real*8 YSP,YSPL
logical equal
if(ISPA.eq.0) return
write(21,1548)
1548 format(1H1,5X,'BACKWARD SPUTTERING')
do J=1,NJ(1)
ISPAL(1) = ISPAL(1)+IBSP(J)
ESPAL(1) = ESPAL(1)+EBSP(J)
enddo
do J=NJ(1)+1,JT(3)
ISPAL(2) = ISPAL(2)+IBSP(J)
ESPAL(2) = ESPAL(2)+EBSP(J)
enddo
do J=JT(3)+1,LJ
ISPAL(3) = ISPAL(3)+IBSP(J)
ESPAL(3) = ESPAL(3)+EBSP(J)
enddo
write(21,1558) ISPA,ESPA
1558 format(///,8X,'ALL SPUTTERED PARTICLES = ',I7,3X,
& 'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//)
do 1557 J=1,L
write(21,1559) J,ISPAL(J),ESPAL(J)
1559 format(8X,'SPUTTERED PARTICLES (',I3,'.LAYER) = ',I7,3X,
& 'SPUTTERED ENERGY = ',E10.4,3H EV)
1557 continue
write(21,1560)
1560 format(//1X,'1.LAYER')
do 1562 J=1,NJ(1)
write(21,1564) J,IBSP(J),J,EBSP(J)
1564 format(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X,
& 'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1562 continue
if(ISPA.eq.0) return
do J=1,LJ
RIP(J)=dble(ISPIP(J))/dble(ISPA)
RIS(J)=dble(ISPIS(J))/dble(ISPA)
ROP(J)=dble(ISPOP(J))/dble(ISPA)
ROS(J)=dble(ISPOS(J))/dble(ISPA)
REIP(J)=ESPIP(J)/ESPA
REIS(J)=ESPIS(J)/ESPA
REOP(J)=ESPOP(J)/ESPA
REOS(J)=ESPOS(J)/ESPA
enddo
do 1584 J=1,LJ
if(IBSP(J).eq.0) go to 1584
RIPJ(J)=dble(ISPIP(J))/dble(IBSP(J))
RISJ(J)=dble(ISPIS(J))/dble(IBSP(J))
ROPJ(J)=dble(ISPOP(J))/dble(IBSP(J))
ROSJ(J)=dble(ISPOS(J))/dble(IBSP(J))
REIPJ(J)=ESPIP(J)/EBSP(J)
REISJ(J)=ESPIS(J)/EBSP(J)
REOPJ(J)=ESPOP(J)/EBSP(J)
REOSJ(J)=ESPOS(J)/EBSP(J)
1584 continue
do 1571 J=1,LJ
if(ISPIP(J).eq.0) go to 3571
ESPMIP(J)=ESPIP(J)/dble(ISPIP(J))
3571 if(ISPIS(J).eq.0) go to 3572
ESPMIS(J)=ESPIS(J)/dble(ISPIS(J))
3572 if(ISPOP(J).eq.0) go to 3573
ESPMOP(J)=ESPOP(J)/dble(ISPOP(J))
3573 if(ISPOS(J).eq.0) go to 1571
ESPMOS(J)=ESPOS(J)/dble(ISPOS(J))
1571 continue
1573 continue
do J=1,LJ
SPY(J)=dble(IBSP(J))/HN
SPE(J)=EBSP(J)/(HN*EMV)
enddo
do 1579 J=1,LJ
if (equal(SPY(J),0.0D0)) go to 1579
REY(J)=SPE(J)/SPY(J)
EMSP(J)=EBSP(J)/IBSP(J)
1579 continue
if(ISPAL(1).eq.0) go to 1575
do J=1,NJ(1)
write(21,1576) J,ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J),
& REIPJ(J),ESPMIP(J),J,ISPIS(J),RIS(J),RISJ(J),ESPIS(J),
& REIS(J),REISJ(J),ESPMIS(J),J,ISPOP(J),ROP(J),ROPJ(J),
& ESPOP(J),REOP(J),REOPJ(J),ESPMOP(J),J,ISPOS(J),ROS(J),
& ROSJ(J),ESPOS(J),REOS(J),REOSJ(J),ESPMOS(J)
1576 format(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,2F9.4,4X,
& 'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 9X,'ION IN , SECOND. KO(',I1,') = ',I7,2F9.4,4X,
& 'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,2F9.4,4X,
& 'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/
& 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,2F9.4,4X,
& 'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4)
enddo
1575 continue
write(21,1577)
1577 format(/)
do 1580 J=1,NJ(1)
write(21,1582) J,SPY(J),J,SPE(J),J,REY(J),J,EMSP(J)
1582 format(5X,'SPUTTERING YIELD(',I1,') = ',1PE10.3,
& ' SPUTTERED ENERGY(',I1,') = ',1E10.3,
& ' REL.MEAN ENERGY(',I1,') = ',1E10.3,
& ' MEAN ENERGY(',I1,') = ',1E10.3)
1580 continue
do 7260 J=1,NJ(1)
if(IBSP(J).le.1) go to 7260
YSP=IBSP(J)
YSPL=IBSPL(J)
call MOMENTN(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES,
& DFIES0,DSEES,DTHES,EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,
& EBSP6,EBSP(J),SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J),
& SPE6S(J),YSP)
call MOMENTN(FIES0L,SEESL,THESL,FOESL,FIESL,SIESL,
& SIGMSL,DFIESL,DSEESL,DTHESL,EBSP1L,EBSP2L,EBSP3L,
& EBSP4L,EBSP5L,EBSP6L,SPE1SL(J),SPE2SL(J),SPE3SL(J),
& SPE4SL(J),SPE5SL(J),SPE6SL(J),YSPL)
write(21,7117)
write(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,
& DSEES,DTHES
7261 format(1X,' ENERGY(',I1,')',5X,1P1E12.4,7E14.4)
write(21,7263) J,FIES0L,SEESL,THESL,FOESL,SIGMSL,
& DFIESL,DSEESL,DTHESL
7263 format(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,7E14.4)
write(21,7118)
7118 format(/20X,' 1.MOMENT ',4X,' 2.MOMENT ',4X,' 3.MOMENT ',
& 4X,' 4.MOMENT ',4X,' 5.MOMENT ',4X,' 6.MOMENT ')
write(21,7265) J,EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6
7265 format(1X,' ENERGY(',I1,')',5X,1P1E12.4,5E14.4)
write(21,7267) J,EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,
& EBSP6L
7267 format(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,5E14.4)
FIESB(J)=FIES0
SEESB(J)=SEES
THESB(J)=THES
FOESB(J)=FOES
SGMESB(J)=SIGMES
DFIESB(J)=DFIES0
DSEESB(J)=DSEES
DTHESB(J)=DTHES
7260 continue
if(L.eq.1) go to 1593
if(ISPAL(2).eq.0) go to 1593
write(21,1566)
1566 format(//1X,'2.LAYER')
do 1568 J=NJ(1)+1,JT(3)
write(21,1570) J-NJ(1),IBSP(J),J-NJ(1),EBSP(J)
1570 format(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X,
& 'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1568 continue
do 1586 J=NJ(1)+1,JT(3)
write(21,1576) J-NJ(1),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),
& REIP(J),REIPJ(J),ESPMIP(J),J-NJ(1),ISPIS(J),RIS(J),
& RISJ(J),ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-NJ(1),
& ISPOP(J),ROP(J),ROPJ(J),ESPOP(J),REOP(J),REOPJ(J),
& ESPMOP(J),J-NJ(1),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),
& REOS(J),REOSJ(J),ESPMOS(J)
1586 continue
write(21,1577)
do J=NJ(1)+1,JT(3)
write(21,1582) J-NJ(1),SPY(J),J,SPE(J),J,REY(J),J,EMSP(J)
enddo
1593 continue
do 7262 J=NJ(1)+1,JT(3)
if(IBSP(J).le.1) go to 7262
YSP=IBSP(J)
call MOMENTS(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES,
& DFIES0,DSEES,DTHES,EBSP(J),SPE2S(J),SPE3S(J),
& SPE4S(J),SPE5S(J),SPE6S(J),YSP)
write(21,7117)
write(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,
& DSEES,DTHES
FIESB(J)=FIES0
SEESB(J)=SEES
THESB(J)=THES
FOESB(J)=FOES
SGMESB(J)=SIGMES
DFIESB(J)=DFIES0
DSEESB(J)=DSEES
DTHESB(J)=DTHES
7262 continue
if(L.eq.2) go to 1532
if(ISPAL(3).eq.0) go to 1532
write(21,1534)
1534 format(//1X,'3.LAYER')
do 1536 J=JT(3)+1,LJ
write(21,1538) J-JT(3),IBSP(J),J-JT(3),EBSP(J)
1538 format(10X,'SPUTTERED PARTICLES(',I1,') = ',I7,6X,
& 'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV')
1536 continue
do J=JT(3)+1,LJ
write(21,1576) J-JT(3),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),
& REIP(J),REIPJ(J),ESPMIP(J),J-JT(3),ISPIS(J),RIS(J),
& RISJ(J),ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-JT(3),
& ISPOP(J),ROP(J),ROPJ(J),ESPOP(J),REOP(J),REOPJ(J),
& ESPMOP(J),J-JT(3),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),
& REOS(J),REOSJ(J),ESPMOS(J)
enddo
write(21,1577)
do J=JT(3)+1,LJ
write(21,1582) J-JT(3),SPY(J),J-JT(3),SPE(J),
& J-JT(3),REY(J),J-JT(3),EMSP(J)
enddo
1532 continue
return
7117 format(/20X,' MEAN ',4X,' VARIANCE ',4X,' SKEWNESS ',
& 4X,' KURTOSIS ',5X,' SIGMA ',3X,' ERROR 1.M ',
& 3X,' ERROR 2.M ',3X,' ERROR 3.M ')
end
C WRITE TRANSMISSION SUMMARY
C=======================================================================
subroutine writeTransmissionSummary(nTrans,nPrimary,transEnergy,