2.5 KiB
2.5 KiB
Guide and electronics
The electronics and operation of the PBPS units are currently being updated. Further info to follow
Drawings
Target history
10.08.21
- Upper window: 50 nm SiN
- Middle window: 200 nm SiN
- Lower window: 30 um CVD
Alignment
07.12.21
With the device set to 0, 0 on external scales, the three targets were seen within the circular aperture. The targets look approx 100 um to the offset to the right looking from the front.
- 30 um CVD: -35 mm
- 200 nm SiN: -70 mm
- 50 nm SiN: -109 mm
Device motion
The following motors are used to scan the device position used to calibrate the device.
- SAROP31-PBPS149:MOTOR_X1
- SAROP31-PBPS149:MOTOR_Y1
Value
- SAROP31-PBPS149:MOTOR_X1.VAL
- SAROP31-PBPS149:MOTOR_Y1.VAL
BS config
bs config SAROP31-CVME-PBPS149 -u
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD0 1 0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD1 1 0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD2 1 0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD3 1 0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD4 1 0
SAROP31-PBPS149:Lnk9Ch0-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch1-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch2-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch3-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch4-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch5-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch6-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch7-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch8-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch9-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch10-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch11-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch12-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch13-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch14-WF-DATA 1 0
SAROP31-PBPS149:Lnk9Ch15-WF-DATA 1 0