2.5 KiB

Guide and electronics

The electronics and operation of the PBPS units are currently being updated. Further info to follow

Drawings

Target history

10.08.21

  • Upper window: 50 nm SiN
  • Middle window: 200 nm SiN
  • Lower window: 30 um CVD

Alignment

07.12.21
With the device set to 0, 0 on external scales, the three targets were seen within the circular aperture. The targets look approx 100 um to the offset to the right looking from the front.

  • 30 um CVD: -35 mm
  • 200 nm SiN: -70 mm
  • 50 nm SiN: -109 mm

Device motion

The following motors are used to scan the device position used to calibrate the device.

  • SAROP31-PBPS149:MOTOR_X1
  • SAROP31-PBPS149:MOTOR_Y1

Value

  • SAROP31-PBPS149:MOTOR_X1.VAL
  • SAROP31-PBPS149:MOTOR_Y1.VAL

BS config

bs config  SAROP31-CVME-PBPS149 -u
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD0                      1      0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD1                      1      0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD2                      1      0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD3                      1      0
SAROP31-PBPS149:Lnk9Ch0-PP_VAL_PD4                      1      0
SAROP31-PBPS149:Lnk9Ch0-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch1-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch2-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch3-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch4-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch5-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch6-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch7-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch8-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch9-WF-DATA				1      0
SAROP31-PBPS149:Lnk9Ch10-WF-DATA			1      0
SAROP31-PBPS149:Lnk9Ch11-WF-DATA			1      0
SAROP31-PBPS149:Lnk9Ch12-WF-DATA			1      0
SAROP31-PBPS149:Lnk9Ch13-WF-DATA			1      0
SAROP31-PBPS149:Lnk9Ch14-WF-DATA			1      0
SAROP31-PBPS149:Lnk9Ch15-WF-DATA			1      0