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Expose RNG selcetion from GUI

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salman
2026-06-25 09:42:41 +02:00
parent a19dd6b96b
commit d4cdb1dd65
602 changed files with 40220 additions and 29652 deletions
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tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 1000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.out
+79 -76
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:13
Start: 19.Jun. 2026 20:11:21
End: 19.Jun. 2026 18:18:13
End: 19.Jun. 2026 20:11:27
Simulation needed for 5000 projectiles 0 seconds
Simulation needed for 50000 projectiles 6 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 1000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
7930 0 0 0 0 0 0 0 0
78398 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,98 +110,101 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4525 ENERGY=0.4525E+07 EV
BACKSCATTERED PARTICLES= 475 ENERGY=0.1199E+06 EV
IMPLANTED PARTICLES= 44913 ENERGY=0.4491E+08 EV
BACKSCATTERED PARTICLES= 5087 ENERGY=0.1304E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5076
PARTICLES with neg. E= 76
TRIED PARTICLES= 50644
PARTICLES with neg. E= 644
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4525 4525
IMPLANTED PARTICLES (LAYER 1)= 44913 44913
IMPLANTED PARTICLES (LAYER 2)= 4525 0
IMPLANTED PARTICLES (LAYER 2)= 44913 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.000
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.494
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.001
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.502
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5888E+01 2.6004E+03 3.7352E-01 2.6126E+00 5.0994E+01 7.5807E-01 4.9090E+01 2.8410E-02
SPREAD 6.8879E+01 1.4309E+03 6.0430E-01 2.9906E+00 3.7827E+01 5.6233E-01 3.0012E+01 3.2866E-02
PATHLENGTH 2.3206E+02 3.1085E+03 -4.3907E-01 3.2404E+00 5.5754E+01 8.2883E-01 6.9168E+01 3.4820E-02
ELASTIC LOSS 1.3272E+01 3.1964E+01 5.6537E+00 1.2494E-03
INEL. LOSS 1.0210E+03 1.8304E+05 4.2783E+02 9.4548E-02
PENETRATION 9.5458E+01 2.5168E+03 3.4863E-01 2.5924E+00 5.0168E+01 2.3672E-01 1.4986E+01 8.7238E-03
SPREAD 6.9160E+01 1.4012E+03 6.1937E-01 3.1300E+00 3.7433E+01 1.7663E-01 9.6495E+00 1.1240E-02
PATHLENGTH 2.3240E+02 3.0587E+03 -4.8034E-01 3.3400E+00 5.5306E+01 2.6097E-01 2.2078E+01 1.1811E-02
ELASTIC LOSS 1.3437E+01 3.3272E+01 5.7682E+00 1.2843E-04
INEL. LOSS 1.0231E+03 1.7931E+05 4.2345E+02 9.4281E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.2869E-01 3.0466E-01 1.5682E+01 4.0680E+02 5.5196E-01 7.8593E-04 8.7389E-03 4.6643E-01
WEAK EL.LOSS 4.6435E-03 4.7759E-05 2.1437E+00 7.2445E+00 6.9108E-03 9.8402E-06 1.6993E-07 5.2010E-03
INELAST.LOSS 9.9223E+00 3.7179E+01 2.2166E-01 2.0913E+00 6.0975E+00 8.6821E-03 5.5303E-02 2.1151E-03
SUBTHR.LOSS 1.2869E-01 3.0466E-01 1.5682E+01 4.0680E+02 5.5196E-01 7.8593E-04 8.7389E-03 4.6643E-01
ELAST.LOSS 1.3064E-01 3.2768E-01 1.6874E+01 5.0152E+02 5.7244E-01 2.5827E-04 3.3076E-03 2.4846E-01
WEAK EL.LOSS 4.6245E-03 4.7284E-05 2.1446E+00 7.2550E+00 6.8764E-03 3.1025E-06 5.3355E-08 1.6506E-03
INELAST.LOSS 9.9280E+00 3.7040E+01 2.1628E-01 2.0879E+00 6.0861E+00 2.7459E-03 1.7431E-02 6.6823E-04
SUBTHR.LOSS 1.3033E-01 3.1678E-01 1.5568E+01 3.9485E+02 5.6283E-01 2.5394E-04 2.8364E-03 1.3632E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5888E+01 1.1795E+04 1.6792E+06 2.6466E+08 4.5107E+10 8.1950E+12
PENETRATION 9.5458E+01 1.1629E+04 1.6346E+06 2.5386E+08 4.2551E+10 7.5851E+12
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 229 0.5061E-01 1 9.4075E+05 8.0467E+03 7.9011E+03 0.0000E+00 7.9011E+03 0.0000E+00 0
20.- 40. 469 0.1036E+00 2 9.4852E+05 1.0034E+04 9.7870E+03 0.0000E+00 9.7870E+03 0.0000E+00 0
40.- 60. 568 0.1255E+00 10 8.4414E+05 1.0216E+04 9.9183E+03 0.0000E+00 9.9183E+03 0.0000E+00 0
60.- 80. 601 0.1328E+00 25 6.9882E+05 9.7784E+03 9.4626E+03 0.0000E+00 9.4626E+03 0.0000E+00 0
80.- 100. 604 0.1335E+00 52 5.4476E+05 8.7122E+03 8.3960E+03 0.0000E+00 8.3960E+03 0.0000E+00 0
100.- 120. 610 0.1348E+00 82 3.8986E+05 7.0432E+03 6.7453E+03 0.0000E+00 6.7453E+03 0.0000E+00 0
120.- 140. 529 0.1169E+00 124 2.5003E+05 5.0428E+03 4.7867E+03 0.0000E+00 4.7867E+03 0.0000E+00 0
140.- 160. 364 0.8044E-01 182 1.4360E+05 3.2386E+03 3.0683E+03 0.0000E+00 3.0683E+03 0.0000E+00 0
160.- 180. 281 0.6210E-01 246 7.9801E+04 2.1112E+03 1.9818E+03 0.0000E+00 1.9818E+03 0.0000E+00 0
180.- 200. 145 0.3204E-01 459 3.3315E+04 9.2822E+02 8.6576E+02 0.0000E+00 8.6576E+02 0.0000E+00 0
200.- 220. 77 0.1702E-01 563 1.3668E+04 3.9672E+02 3.6270E+02 0.0000E+00 3.6270E+02 0.0000E+00 0
220.- 240. 32 0.7072E-02 608 4.6394E+03 1.3755E+02 1.2618E+02 0.0000E+00 1.2618E+02 0.0000E+00 0
240.- 260. 8 0.1768E-02 711 1.7720E+03 6.2611E+01 5.8112E+01 0.0000E+00 5.8112E+01 0.0000E+00 0
260.- 280. 8 0.1768E-02 585 3.0113E+02 1.6924E+01 1.4408E+01 0.0000E+00 1.4408E+01 0.0000E+00 0
280.- 300. 0 0.0000E+00 451 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
300.- 320. 0 0.0000E+00 233 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
320.- 340. 0 0.0000E+00 123 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 50 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 14 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 2367 0.5270E-01 16 9.4307E+06 8.3192E+04 8.1721E+04 1.0305E+03 8.0690E+04 7.7928E+02 29
20.- 40. 4391 0.9777E-01 51 9.4316E+06 9.9542E+04 9.7157E+04 3.6774E+02 9.6789E+04 2.7901E+02 11
40.- 60. 5480 0.1220E+00 124 8.5008E+06 1.0550E+05 1.0259E+05 1.3236E+02 1.0246E+05 1.0047E+02 4
60.- 80. 6290 0.1400E+00 231 7.0592E+06 1.0075E+05 9.7518E+04 0.0000E+00 9.7518E+04 0.0000E+00 0
80.- 100. 6295 0.1402E+00 434 5.4077E+06 8.7511E+04 8.4300E+04 0.0000E+00 8.4300E+04 0.0000E+00 0
100.- 120. 6023 0.1341E+00 691 3.8341E+06 7.0030E+04 6.7050E+04 0.0000E+00 6.7050E+04 0.0000E+00 0
120.- 140. 5227 0.1164E+00 1196 2.4566E+06 5.1185E+04 4.8697E+04 0.0000E+00 4.8697E+04 0.0000E+00 0
140.- 160. 3827 0.8521E-01 1836 1.4332E+06 3.3322E+04 3.1512E+04 0.0000E+00 3.1512E+04 0.0000E+00 0
160.- 180. 2493 0.5551E-01 2841 7.1605E+05 1.8557E+04 1.7421E+04 0.0000E+00 1.7421E+04 0.0000E+00 0
180.- 200. 1405 0.3128E-01 4111 3.2127E+05 9.0452E+03 8.4220E+03 0.0000E+00 8.4220E+03 0.0000E+00 0
200.- 220. 713 0.1588E-01 5380 1.2726E+05 3.9674E+03 3.6615E+03 0.0000E+00 3.6615E+03 0.0000E+00 0
220.- 240. 284 0.6323E-02 6473 4.0526E+04 1.4180E+03 1.2994E+03 0.0000E+00 1.2994E+03 0.0000E+00 0
240.- 260. 86 0.1915E-02 6908 1.0178E+04 3.8211E+02 3.4972E+02 0.0000E+00 3.4972E+02 0.0000E+00 0
260.- 280. 26 0.5789E-03 5941 2.1117E+03 8.3930E+01 7.4565E+01 0.0000E+00 7.4565E+01 0.0000E+00 0
280.- 300. 6 0.1336E-03 4358 3.5297E+02 1.8977E+01 1.6823E+01 0.0000E+00 1.6823E+01 0.0000E+00 0
300.- 320. 0 0.0000E+00 2605 9.2731E-01 5.6012E-02 4.0312E-02 0.0000E+00 4.0312E-02 0.0000E+00 0
320.- 340. 0 0.0000E+00 1159 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 413 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 124 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 16 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
440.- 460. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- SUT 0 0.0000E+00
460.- 480. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- SUT 0 0.0000E+00
4525 1.0000E+00 4525 4.8940E+06 6.5765E+04 6.3474E+04 0.0000E+00 6.3474E+04 0.0000E+00 0
44913 1.0000E+00 44913 4.8772E+07 6.6451E+05 6.4179E+05 1.5306E+03 6.4026E+05 1.1588E+03 44
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 3.1254E+05 2.6369E+03 0.0000E+00 2.6369E+03 6.2821E+05 5.2642E+03 0.0000E+00 5.2642E+03 0 0
20.- 40. 3.1576E+05 2.9815E+03 0.0000E+00 2.9815E+03 6.3276E+05 6.8054E+03 0.0000E+00 6.8054E+03 0 0
40.- 60. 2.8293E+05 3.0552E+03 0.0000E+00 3.0552E+03 5.6121E+05 6.8630E+03 0.0000E+00 6.8630E+03 0 0
60.- 80. 2.3376E+05 2.9404E+03 0.0000E+00 2.9404E+03 4.6506E+05 6.5223E+03 0.0000E+00 6.5223E+03 0 0
80.- 100. 1.7950E+05 2.4502E+03 0.0000E+00 2.4502E+03 3.6526E+05 5.9459E+03 0.0000E+00 5.9459E+03 0 0
100.- 120. 1.2931E+05 1.9878E+03 0.0000E+00 1.9878E+03 2.6055E+05 4.7575E+03 0.0000E+00 4.7575E+03 0 0
120.- 140. 8.2513E+04 1.3987E+03 0.0000E+00 1.3987E+03 1.6752E+05 3.3880E+03 0.0000E+00 3.3880E+03 0 0
140.- 160. 4.7107E+04 8.6809E+02 0.0000E+00 8.6809E+02 9.6496E+04 2.2002E+03 0.0000E+00 2.2002E+03 0 0
160.- 180. 2.5954E+04 5.2644E+02 0.0000E+00 5.2644E+02 5.3847E+04 1.4554E+03 0.0000E+00 1.4554E+03 0 0
180.- 200. 1.0818E+04 2.3157E+02 0.0000E+00 2.3157E+02 2.2497E+04 6.3419E+02 0.0000E+00 6.3419E+02 0 0
200.- 220. 4.4681E+03 1.0671E+02 0.0000E+00 1.0671E+02 9.2002E+03 2.5599E+02 0.0000E+00 2.5599E+02 0 0
220.- 240. 1.4529E+03 4.0252E+01 0.0000E+00 4.0252E+01 3.1865E+03 8.5925E+01 0.0000E+00 8.5925E+01 0 0
240.- 260. 6.3302E+02 1.8790E+01 0.0000E+00 1.8790E+01 1.1390E+03 3.9322E+01 0.0000E+00 3.9322E+01 0 0
260.- 280. 9.4896E+01 3.4210E+00 0.0000E+00 3.4210E+00 2.0623E+02 1.0987E+01 0.0000E+00 1.0987E+01 0 0
280.- 300. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
0.- 20. 3.1418E+06 2.6280E+04 0.0000E+00 2.6280E+04 6.2889E+06 5.5440E+04 1.0305E+03 5.4410E+04 0 29
20.- 40. 3.1399E+06 3.0333E+04 0.0000E+00 3.0333E+04 6.2917E+06 6.6824E+04 3.6774E+02 6.6456E+04 0 11
40.- 60. 2.8216E+06 3.1569E+04 0.0000E+00 3.1569E+04 5.6793E+06 7.1021E+04 1.3236E+02 7.0888E+04 0 4
60.- 80. 2.3448E+06 2.9403E+04 0.0000E+00 2.9403E+04 4.7144E+06 6.8115E+04 0.0000E+00 6.8115E+04 0 0
80.- 100. 1.7939E+06 2.5015E+04 0.0000E+00 2.5015E+04 3.6138E+06 5.9285E+04 0.0000E+00 5.9285E+04 0 0
100.- 120. 1.2679E+06 1.9744E+04 0.0000E+00 1.9744E+04 2.5662E+06 4.7305E+04 0.0000E+00 4.7305E+04 0 0
120.- 140. 8.1306E+05 1.4195E+04 0.0000E+00 1.4195E+04 1.6435E+06 3.4502E+04 0.0000E+00 3.4502E+04 0 0
140.- 160. 4.7373E+05 9.0931E+03 0.0000E+00 9.0931E+03 9.5950E+05 2.2419E+04 0.0000E+00 2.2419E+04 0 0
160.- 180. 2.3887E+05 4.9236E+03 0.0000E+00 4.9236E+03 4.7718E+05 1.2497E+04 0.0000E+00 1.2497E+04 0 0
180.- 200. 1.0513E+05 2.3650E+03 0.0000E+00 2.3650E+03 2.1615E+05 6.0571E+03 0.0000E+00 6.0571E+03 0 0
200.- 220. 4.2240E+04 1.0499E+03 0.0000E+00 1.0499E+03 8.5024E+04 2.6116E+03 0.0000E+00 2.6116E+03 0 0
220.- 240. 1.3483E+04 3.4978E+02 0.0000E+00 3.4978E+02 2.7043E+04 9.4961E+02 0.0000E+00 9.4961E+02 0 0
240.- 260. 3.4386E+03 9.8815E+01 0.0000E+00 9.8815E+01 6.7397E+03 2.5090E+02 0.0000E+00 2.5090E+02 0 0
260.- 280. 7.3074E+02 2.5137E+01 0.0000E+00 2.5137E+01 1.3809E+03 4.9428E+01 0.0000E+00 4.9428E+01 0 0
280.- 300. 1.0156E+02 4.0484E+00 0.0000E+00 4.0484E+00 2.5142E+02 1.2774E+01 0.0000E+00 1.2774E+01 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 9.2731E-01 4.0312E-02 0.0000E+00 4.0312E-02 0 0
320.- 340. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
340.- 360. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.6268E+06 1.9246E+04 0.0000E+00 1.9246E+04 3.2671E+06 4.4228E+04 0.0000E+00 4.4228E+04 0 0
1.6201E+07 1.9445E+05 0.0000E+00 1.9445E+05 3.2571E+07 4.4734E+05 1.5306E+03 4.4581E+05 0 44
DAMAGE IN LAYER 1 : 6.3474E+04
DAMAGE IN LAYER 1 : 6.4179E+05
DAMAGE IN LAYER 2 : 0.0000E+00
1
@@ -209,18 +212,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 9.5000E-02 ENERGY REFL.COEF.= 2.3979E-02 REL.MEAN ENERGY = 2.5241E-01 MEAN ENERGY = 2.5241E+02
PART.REFL.COEF.= 1.0174E-01 ENERGY REFL.COEF.= 2.6083E-02 REL.MEAN ENERGY = 2.5637E-01 MEAN ENERGY = 2.5637E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.5241E+02 6.5796E+04 1.7889E+00 6.4771E+00 2.5651E+02 1.1769E+01 7.0653E+03 1.5328E-01
PATHLENGTH 1.0344E+02 4.0892E+03 3.3502E-01 2.2601E+00 6.3947E+01 2.9341E+00 2.1062E+02 7.3053E-02
ELASTIC LOSS 1.2020E+01 5.3044E+01 7.2831E+00 1.5333E-02
INEL. LOSS 5.7652E+02 1.5914E+05 3.9892E+02 8.3983E-01
ENERGY 2.5637E+02 6.7249E+04 1.8492E+00 7.1547E+00 2.5932E+02 3.6359E+00 2.3392E+03 5.5395E-02
PATHLENGTH 1.0078E+02 3.8942E+03 3.9562E-01 2.4711E+00 6.2404E+01 8.7494E-01 6.6222E+01 2.3489E-02
ELASTIC LOSS 1.1989E+01 5.5833E+01 7.4722E+00 1.4689E-03
INEL. LOSS 5.5491E+02 1.5177E+05 3.8958E+02 7.6583E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.5241E+02 1.2951E+05 9.6098E+07 8.7736E+10 9.1009E+13 1.0283E+17
LOGENERGY 2.1477E+00 4.9194E+00 1.1714E+01 2.8732E+01 7.2197E+01 1.8518E+02
PATHLENGTH 1.0344E+02 1.4789E+04 2.4634E+06 4.5105E+08 8.8335E+10 1.8215E+13
ENERGY 2.5637E+02 1.3298E+05 1.0082E+08 9.6268E+10 1.0659E+14 1.3033E+17
LOGENERGY 2.1552E+00 4.9489E+00 1.1815E+01 2.9062E+01 7.3233E+01 1.8831E+02
PATHLENGTH 1.0078E+02 1.4051E+04 2.2971E+06 4.1670E+08 8.1552E+10 1.6925E+13
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -228,5 +231,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 2 5 6 8 7 16 16 27 32 27 37 34 35 42 39 41 41 60
0.000 0.000 0.084 0.211 0.253 0.337 0.295 0.674 0.674 1.137 1.347 1.137 1.558 1.432 1.474 1.768 1.642 1.726 1.726 2.526
0 2 6 29 49 70 116 144 171 232 223 278 329 369 421 458 484 523 537 646
0.000 0.008 0.024 0.114 0.193 0.275 0.456 0.566 0.672 0.912 0.877 1.093 1.293 1.451 1.655 1.801 1.903 2.056 2.111 2.540
tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.rge
+16 -15
View File
@@ -1,19 +1,19 @@
DEPTH PARTICLES
10.0000 229
30.0000 469
50.0000 568
70.0000 601
90.0000 604
110.0000 610
130.0000 529
150.0000 364
170.0000 281
190.0000 145
210.0000 77
230.0000 32
250.0000 8
270.0000 8
290.0000 0
10.0000 2367
30.0000 4391
50.0000 5480
70.0000 6290
90.0000 6295
110.0000 6023
130.0000 5227
150.0000 3827
170.0000 2493
190.0000 1405
210.0000 713
230.0000 284
250.0000 86
270.0000 26
290.0000 6
310.0000 0
330.0000 0
350.0000 0
@@ -22,3 +22,4 @@
410.0000 0
430.0000 0
450.0000 0
470.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E1000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
1.00 0.45 0.00 15.00 5000 4525 475 0 5076 76 0.9589E+02 0.5099E+02 0.2524E+03 0.2565E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4525 0
1.00 0.45 0.00 15.00 50000 44913 5087 0 50644 644 0.9546E+02 0.5017E+02 0.2564E+03 0.2593E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 44913 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 11000 450 0 15 0.5 0.0 0.0 0.0
5000 78746 78746 78746 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78746 78746 78746 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.out
+122 -123
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:14
Start: 19.Jun. 2026 20:11:32
End: 19.Jun. 2026 18:18:15
End: 19.Jun. 2026 20:11:54
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 22 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 11000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78746.00 78746.00 78746.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78746.00 78746.00 78746.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
32088 0 0 0 0 0 0 0 0
319220 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,166 +110,165 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4978 ENERGY=0.5476E+08 EV
BACKSCATTERED PARTICLES= 22 ENERGY=0.7735E+05 EV
IMPLANTED PARTICLES= 49741 ENERGY=0.5472E+09 EV
BACKSCATTERED PARTICLES= 259 ENERGY=0.9788E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 567 567
IMPLANTED PARTICLES (LAYER 1)= 5696 5696
IMPLANTED PARTICLES (LAYER 2)= 4411 4411
IMPLANTED PARTICLES (LAYER 2)= 44045 44045
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 406.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.267
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 406.7 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.059
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.237
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 6.8228E+02 2.1436E+04 -1.1348E+00 4.7066E+00 1.4641E+02 2.0751E+00 5.8494E+02 4.2991E-02
SPREAD 2.8131E+02 1.9684E+04 4.5144E-01 2.7960E+00 1.4030E+02 1.9885E+00 3.7388E+02 2.8399E-02
PATHLENGTH 9.9834E+02 1.3681E+03 -1.3862E-01 3.2983E+00 3.6987E+01 5.2423E-01 2.9395E+01 4.0065E-02
ELASTIC LOSS 2.7010E+01 3.2354E+02 1.7987E+01 3.6133E-03
INEL. LOSS 1.0965E+04 2.0609E+05 4.5397E+02 9.1196E-02
PENETRATION 6.8437E+02 2.1539E+04 -1.1162E+00 4.5771E+00 1.4676E+02 6.5805E-01 1.8266E+02 1.3047E-02
SPREAD 2.8478E+02 2.0177E+04 4.2749E-01 2.7025E+00 1.4204E+02 6.3689E-01 1.1804E+02 8.4100E-03
PATHLENGTH 9.9873E+02 1.3582E+03 -1.2661E-01 3.0471E+00 3.6853E+01 1.6524E-01 8.7129E+00 1.0798E-02
ELASTIC LOSS 2.6773E+01 3.2593E+02 1.8054E+01 3.6295E-04
INEL. LOSS 1.0971E+04 2.0206E+05 4.4951E+02 9.0370E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.6924E-02 8.4994E-01 7.2533E+01 8.8044E+03 9.2192E-01 6.4656E-04 5.5928E-02 4.9066E+00
WEAK EL.LOSS 5.6077E-04 3.9800E-06 7.0678E+00 7.1762E+01 1.9950E-03 1.3991E-06 2.3480E-08 2.7610E-02
INELAST.LOSS 2.6924E+01 1.1819E+02 -1.0264E+00 2.7237E+00 1.0872E+01 7.6244E-03 1.0883E-01 1.4007E-03
SUBTHR.LOSS 5.9085E-02 2.8722E-01 2.6585E+01 9.6326E+02 5.3593E-01 3.7588E-04 6.2489E-03 2.4891E-01
ELAST.LOSS 6.6660E-02 9.3111E-01 8.6514E+01 1.3305E+04 9.6494E-01 2.1399E-04 2.3817E-02 2.6915E+00
WEAK EL.LOSS 5.6119E-04 3.9974E-06 7.0681E+00 7.1525E+01 1.9994E-03 4.4340E-07 7.4448E-09 8.5911E-03
INELAST.LOSS 2.6930E+01 1.1817E+02 -1.0274E+00 2.7260E+00 1.0870E+01 2.4107E-03 3.4429E-02 4.4311E-04
SUBTHR.LOSS 5.8278E-02 2.7585E-01 2.6792E+01 9.8178E+02 5.2521E-01 1.1648E-04 1.9160E-03 8.0656E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 6.8228E+02 4.8695E+05 3.5793E+08 2.6902E+11 2.0586E+14 1.5992E+17
PENETRATION 6.8437E+02 4.8991E+05 3.6123E+08 2.7236E+11 2.0907E+14 1.6291E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 3 0.6027E-03 0 1.6117E+06 1.5269E+03 1.5236E+03 3.5349E+02 1.1701E+03 2.5759E+02 5
20.- 40. 1 0.2009E-03 0 1.6234E+06 1.7533E+03 1.7511E+03 6.3698E+02 1.1142E+03 4.7766E+02 11
40.- 60. 3 0.6027E-03 0 1.6392E+06 1.7955E+03 1.7925E+03 7.4327E+02 1.0492E+03 5.3633E+02 10
60.- 80. 1 0.2009E-03 0 1.6400E+06 1.4999E+03 1.4975E+03 1.1428E+02 1.3832E+03 8.7487E+01 2
80.- 100. 6 0.1205E-02 0 1.6560E+06 2.4391E+03 2.4348E+03 1.0324E+03 1.4024E+03 7.6098E+02 15
100.- 120. 8 0.1607E-02 0 1.6678E+06 2.1768E+03 2.1716E+03 8.4712E+02 1.3245E+03 6.1633E+02 12
120.- 140. 6 0.1205E-02 0 1.6752E+06 1.8471E+03 1.8418E+03 4.3693E+02 1.4049E+03 3.2015E+02 7
140.- 160. 6 0.1205E-02 0 1.6894E+06 1.9725E+03 1.9675E+03 3.6994E+02 1.5976E+03 2.8461E+02 8
160.- 180. 7 0.1406E-02 0 1.7024E+06 2.5759E+03 2.5707E+03 9.5377E+02 1.6169E+03 6.9232E+02 14
180.- 200. 8 0.1607E-02 0 1.6986E+06 2.2648E+03 2.2588E+03 5.2899E+02 1.7298E+03 3.8773E+02 8
200.- 220. 11 0.2210E-02 0 1.6993E+06 2.5764E+03 2.5683E+03 7.1072E+02 1.8576E+03 5.2982E+02 12
220.- 240. 9 0.1808E-02 0 1.7111E+06 1.9976E+03 1.9896E+03 1.1292E+02 1.8767E+03 8.5968E+01 3
240.- 260. 16 0.3214E-02 0 1.7205E+06 2.7002E+03 2.6907E+03 7.2057E+02 1.9701E+03 5.2840E+02 10
260.- 280. 4 0.8035E-03 0 1.7190E+06 2.7101E+03 2.7039E+03 6.5898E+02 2.0450E+03 4.8551E+02 11
280.- 300. 15 0.3013E-02 0 1.7151E+06 2.3039E+03 2.2931E+03 4.7273E+02 1.8204E+03 3.6026E+02 10
300.- 320. 14 0.2812E-02 0 1.7019E+06 2.7830E+03 2.7734E+03 5.6587E+02 2.2075E+03 4.1138E+02 9
320.- 340. 19 0.3817E-02 0 1.6893E+06 2.9650E+03 2.9513E+03 7.4079E+02 2.2105E+03 5.4344E+02 13
340.- 360. 31 0.6227E-02 0 1.6799E+06 3.3752E+03 3.3582E+03 9.4946E+02 2.4088E+03 7.0249E+02 16
360.- 380. 39 0.7834E-02 0 1.6663E+06 3.0778E+03 3.0539E+03 4.1138E+02 2.6425E+03 3.0703E+02 8
380.- 400. 50 0.1004E-01 0 1.6643E+06 4.2402E+03 4.2124E+03 9.5857E+02 3.2538E+03 7.1516E+02 17
400.- 420. 40 0.8035E-02 0 1.6410E+06 3.7912E+03 3.7639E+03 5.8868E+02 3.1752E+03 4.4071E+02 11
420.- 440. 62 0.1245E-01 0 1.6259E+06 4.3531E+03 4.3196E+03 9.7652E+02 3.3431E+03 7.2737E+02 19
440.- 460. 65 0.1306E-01 0 1.5875E+06 4.3736E+03 4.3367E+03 3.0528E+02 4.0314E+03 2.2886E+02 7
460.- 480. 72 0.1446E-01 0 1.5516E+06 4.6988E+03 4.6563E+03 4.2920E+02 4.2270E+03 3.2299E+02 9
480.- 500. 71 0.1426E-01 0 1.5382E+06 5.0820E+03 5.0376E+03 4.2165E+02 4.6159E+03 3.1767E+02 10
500.- 520. 85 0.1708E-01 0 1.3237E+06 3.8108E+03 3.7932E+03 2.6763E+02 3.5255E+03 2.0771E+02 8
520.- 540. 90 0.1808E-01 0 1.2788E+06 3.6653E+03 3.6467E+03 3.4724E+01 3.6120E+03 2.6869E+01 1
540.- 560. 122 0.2451E-01 0 1.2374E+06 3.9735E+03 3.9508E+03 2.4693E+02 3.7039E+03 1.9090E+02 7
560.- 580. 153 0.3074E-01 0 1.1891E+06 4.3430E+03 4.3155E+03 1.0713E+02 4.2084E+03 8.2795E+01 3
580.- 600. 148 0.2973E-01 0 1.1233E+06 4.6301E+03 4.6006E+03 2.5672E+02 4.3439E+03 1.9815E+02 7
600.- 620. 177 0.3556E-01 0 1.0412E+06 4.4444E+03 4.4120E+03 0.0000E+00 4.4120E+03 0.0000E+00 0
620.- 640. 191 0.3837E-01 0 9.7334E+05 4.3756E+03 4.3392E+03 0.0000E+00 4.3392E+03 0.0000E+00 0
640.- 660. 232 0.4661E-01 0 8.9845E+05 4.4859E+03 4.4433E+03 0.0000E+00 4.4433E+03 0.0000E+00 0
660.- 680. 266 0.5344E-01 0 8.1217E+05 4.7399E+03 4.6911E+03 0.0000E+00 4.6911E+03 0.0000E+00 0
680.- 700. 305 0.6127E-01 0 7.2037E+05 4.1862E+03 4.1322E+03 0.0000E+00 4.1322E+03 0.0000E+00 0
700.- 720. 314 0.6308E-01 0 6.3820E+05 4.3443E+03 4.2875E+03 0.0000E+00 4.2875E+03 0.0000E+00 0
720.- 740. 336 0.6750E-01 0 5.5185E+05 4.4301E+03 4.3695E+03 0.0000E+00 4.3695E+03 0.0000E+00 0
740.- 760. 345 0.6930E-01 0 4.2232E+05 3.6284E+03 3.5687E+03 0.0000E+00 3.5687E+03 0.0000E+00 0
760.- 780. 324 0.6509E-01 0 3.2754E+05 3.0565E+03 3.0007E+03 0.0000E+00 3.0007E+03 0.0000E+00 0
780.- 800. 296 0.5946E-01 0 2.4472E+05 2.3996E+03 2.3483E+03 0.0000E+00 2.3483E+03 0.0000E+00 0
800.- 820. 262 0.5263E-01 0 1.7819E+05 2.0613E+03 2.0166E+03 0.0000E+00 2.0166E+03 0.0000E+00 0
820.- 840. 260 0.5223E-01 0 1.1932E+05 1.5404E+03 1.4991E+03 0.0000E+00 1.4991E+03 0.0000E+00 0
840.- 860. 192 0.3857E-01 0 7.1400E+04 1.0054E+03 9.7377E+02 0.0000E+00 9.7377E+02 0.0000E+00 0
860.- 880. 138 0.2772E-01 7 4.0829E+04 6.2100E+02 5.9984E+02 0.0000E+00 5.9984E+02 0.0000E+00 0
880.- 900. 84 0.1687E-01 35 2.0992E+04 3.4233E+02 3.2883E+02 0.0000E+00 3.2883E+02 0.0000E+00 0
900.- 920. 64 0.1286E-01 73 9.2520E+03 1.7731E+02 1.6841E+02 0.0000E+00 1.6841E+02 0.0000E+00 0
920.- 940. 20 0.4018E-02 177 2.4381E+03 4.7071E+01 4.4569E+01 0.0000E+00 4.4569E+01 0.0000E+00 0
940.- 960. 5 0.1004E-02 406 6.2240E+02 1.1654E+01 1.1039E+01 0.0000E+00 1.1039E+01 0.0000E+00 0
960.- 980. 2 0.4018E-03 802 2.7607E+02 7.0769E+00 6.7499E+00 0.0000E+00 6.7499E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 1031 1.4705E+01 8.8550E-01 8.3624E-01 0.0000E+00 8.3624E-01 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 1070 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 763 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 398 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 158 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 46 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 6 0.1206E-03 0 1.6154E+07 1.7265E+04 1.7246E+04 6.2784E+03 1.0968E+04 4.4641E+03 77
20.- 40. 16 0.3217E-03 0 1.6281E+07 1.7396E+04 1.7372E+04 5.5503E+03 1.1822E+04 4.0423E+03 75
40.- 60. 30 0.6031E-03 0 1.6399E+07 1.7711E+04 1.7680E+04 5.5773E+03 1.2103E+04 4.0526E+03 76
60.- 80. 37 0.7439E-03 0 1.6512E+07 1.8332E+04 1.8299E+04 6.2092E+03 1.2090E+04 4.5431E+03 87
80.- 100. 45 0.9047E-03 0 1.6626E+07 1.9190E+04 1.9150E+04 6.1401E+03 1.3010E+04 4.4603E+03 84
100.- 120. 58 0.1166E-02 0 1.6684E+07 2.0277E+04 2.0231E+04 6.8633E+03 1.3367E+04 4.9899E+03 98
120.- 140. 55 0.1106E-02 0 1.6842E+07 2.1740E+04 2.1691E+04 7.2757E+03 1.4415E+04 5.2711E+03 104
140.- 160. 53 0.1066E-02 0 1.6939E+07 2.0425E+04 2.0377E+04 5.7900E+03 1.4587E+04 4.2223E+03 85
160.- 180. 68 0.1367E-02 0 1.7009E+07 2.1829E+04 2.1774E+04 6.4724E+03 1.5302E+04 4.7447E+03 104
180.- 200. 83 0.1669E-02 0 1.7067E+07 2.2289E+04 2.2227E+04 5.9913E+03 1.6235E+04 4.4158E+03 96
200.- 220. 87 0.1749E-02 0 1.7126E+07 2.3471E+04 2.3404E+04 6.1684E+03 1.7235E+04 4.5616E+03 99
220.- 240. 99 0.1990E-02 0 1.7117E+07 2.4454E+04 2.4378E+04 6.3109E+03 1.8067E+04 4.6672E+03 109
240.- 260. 125 0.2513E-02 0 1.7186E+07 2.4690E+04 2.4600E+04 5.9178E+03 1.8682E+04 4.3823E+03 100
260.- 280. 150 0.3016E-02 0 1.7156E+07 2.4899E+04 2.4794E+04 5.4815E+03 1.9313E+04 4.0636E+03 99
280.- 300. 178 0.3579E-02 0 1.7124E+07 2.8629E+04 2.8511E+04 7.3633E+03 2.1148E+04 5.4438E+03 127
300.- 320. 178 0.3579E-02 0 1.7123E+07 2.9159E+04 2.9036E+04 7.0138E+03 2.2022E+04 5.1754E+03 112
320.- 340. 241 0.4845E-02 0 1.6996E+07 3.1477E+04 3.1324E+04 7.3037E+03 2.4020E+04 5.4076E+03 127
340.- 360. 273 0.5488E-02 0 1.6877E+07 3.2812E+04 3.2637E+04 6.7298E+03 2.5908E+04 5.0118E+03 125
360.- 380. 310 0.6232E-02 0 1.6759E+07 3.5704E+04 3.5507E+04 7.3244E+03 2.8182E+04 5.4525E+03 135
380.- 400. 375 0.7539E-02 0 1.6635E+07 3.7792E+04 3.7564E+04 7.4892E+03 3.0075E+04 5.5630E+03 137
400.- 420. 434 0.8725E-02 0 1.6462E+07 3.9172E+04 3.8897E+04 6.1541E+03 3.2743E+04 4.5948E+03 121
420.- 440. 536 0.1078E-01 0 1.6158E+07 4.2284E+04 4.1967E+04 7.0418E+03 3.4925E+04 5.2641E+03 141
440.- 460. 598 0.1202E-01 0 1.5841E+07 4.3941E+04 4.3581E+04 7.1929E+03 3.6388E+04 5.3763E+03 147
460.- 480. 708 0.1423E-01 0 1.5454E+07 4.7091E+04 4.6676E+04 6.4497E+03 4.0227E+04 4.8278E+03 135
480.- 500. 953 0.1916E-01 0 1.5092E+07 5.1576E+04 5.1057E+04 6.6113E+03 4.4446E+04 4.9610E+03 145
500.- 520. 862 0.1733E-01 0 1.3138E+07 3.6147E+04 3.5963E+04 2.0546E+03 3.3908E+04 1.5747E+03 53
520.- 540. 983 0.1976E-01 0 1.2662E+07 3.6900E+04 3.6707E+04 1.9859E+03 3.4721E+04 1.5335E+03 55
540.- 560. 1091 0.2193E-01 0 1.2196E+07 3.8164E+04 3.7952E+04 1.4254E+03 3.6526E+04 1.1013E+03 40
560.- 580. 1348 0.2710E-01 0 1.1755E+07 4.0587E+04 4.0331E+04 9.6839E+02 3.9363E+04 7.4924E+02 28
580.- 600. 1567 0.3150E-01 0 1.1207E+07 4.2423E+04 4.2130E+04 7.7820E+02 4.1352E+04 6.0276E+02 23
600.- 620. 1822 0.3663E-01 0 1.0535E+07 4.3075E+04 4.2736E+04 3.8843E+02 4.2347E+04 3.0031E+02 11
620.- 640. 2014 0.4049E-01 0 9.8041E+06 4.5196E+04 4.4818E+04 1.6489E+02 4.4653E+04 1.2786E+02 5
640.- 660. 2231 0.4485E-01 0 8.9708E+06 4.5604E+04 4.5194E+04 9.8579E+01 4.5096E+04 7.6444E+01 3
660.- 680. 2524 0.5074E-01 0 8.0789E+06 4.4991E+04 4.4531E+04 0.0000E+00 4.4531E+04 0.0000E+00 0
680.- 700. 2860 0.5750E-01 0 7.1956E+06 4.4492E+04 4.3980E+04 3.0080E+01 4.3950E+04 2.3417E+01 1
700.- 720. 2877 0.5784E-01 0 6.2160E+06 4.1636E+04 4.1105E+04 0.0000E+00 4.1105E+04 0.0000E+00 0
720.- 740. 3250 0.6534E-01 0 5.2675E+06 3.9356E+04 3.8783E+04 0.0000E+00 3.8783E+04 0.0000E+00 0
740.- 760. 3370 0.6775E-01 0 4.3473E+06 3.6402E+04 3.5811E+04 0.0000E+00 3.5811E+04 0.0000E+00 0
760.- 780. 3314 0.6663E-01 0 3.4302E+06 3.1904E+04 3.1329E+04 0.0000E+00 3.1329E+04 0.0000E+00 0
780.- 800. 3216 0.6465E-01 0 2.5753E+06 2.7015E+04 2.6460E+04 0.0000E+00 2.6460E+04 0.0000E+00 0
800.- 820. 2987 0.6005E-01 0 1.8346E+06 2.0948E+04 2.0449E+04 0.0000E+00 2.0449E+04 0.0000E+00 0
820.- 840. 2521 0.5068E-01 0 1.2263E+06 1.5653E+04 1.5238E+04 0.0000E+00 1.5238E+04 0.0000E+00 0
840.- 860. 1981 0.3983E-01 4 7.4450E+05 1.0471E+04 1.0149E+04 0.0000E+00 1.0149E+04 0.0000E+00 0
860.- 880. 1487 0.2989E-01 45 4.0439E+05 6.2022E+03 5.9762E+03 0.0000E+00 5.9762E+03 0.0000E+00 0
880.- 900. 860 0.1729E-01 230 2.0565E+05 3.4328E+03 3.2985E+03 0.0000E+00 3.2985E+03 0.0000E+00 0
900.- 920. 476 0.9570E-02 724 8.9386E+04 1.5779E+03 1.5067E+03 0.0000E+00 1.5067E+03 0.0000E+00 0
920.- 940. 245 0.4926E-02 1944 3.4131E+04 6.5406E+02 6.1973E+02 0.0000E+00 6.1973E+02 0.0000E+00 0
940.- 960. 105 0.2111E-02 4361 1.2146E+04 2.4796E+02 2.3327E+02 0.0000E+00 2.3327E+02 0.0000E+00 0
960.- 980. 42 0.8444E-03 7482 3.5679E+03 8.0156E+01 7.4729E+01 0.0000E+00 7.4729E+01 0.0000E+00 0
980.- 1000. 9 0.1809E-03 10242 9.1950E+02 2.5053E+01 2.4005E+01 0.0000E+00 2.4005E+01 0.0000E+00 0
1000.- 1020. 3 0.6031E-04 10624 9.0362E+01 3.0426E+00 2.7368E+00 0.0000E+00 2.7368E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 7716 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 4167 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 1633 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 473 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 84 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 12 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- SUT 0 0.0000E+00
1180.- SUT 0 0.0000E+00
4978 1.0000E+00 4978 5.4740E+07 1.3721E+05 1.3607E+05 1.5954E+04 1.2011E+05 1.1835E+04 283
49741 1.0000E+00 49741 5.4756E+08 1.3668E+06 1.3554E+06 1.7060E+05 1.1848E+06 1.2605E+05 2964
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3847E+05 5.5993E+02 1.0274E+02 4.5719E+02 1.0733E+06 9.6367E+02 2.5075E+02 7.1292E+02 2 3
20.- 40. 5.3795E+05 8.1611E+02 3.8792E+02 4.2819E+02 1.0855E+06 9.3503E+02 2.4906E+02 6.8596E+02 6 5
40.- 60. 5.4443E+05 6.2174E+02 1.6867E+02 4.5307E+02 1.0948E+06 1.1707E+03 5.7460E+02 5.9614E+02 2 8
60.- 80. 5.4008E+05 5.8319E+02 1.1428E+02 4.6892E+02 1.1000E+06 9.1430E+02 0.0000E+00 9.1430E+02 2 0
80.- 100. 5.4514E+05 1.0984E+03 5.0549E+02 5.9293E+02 1.1109E+06 1.3364E+03 5.2691E+02 8.0950E+02 9 6
100.- 120. 5.5315E+05 8.6471E+02 2.3043E+02 6.3428E+02 1.1146E+06 1.3069E+03 6.1670E+02 6.9021E+02 3 9
120.- 140. 5.5560E+05 7.7451E+02 1.2874E+02 6.4576E+02 1.1196E+06 1.0673E+03 3.0819E+02 7.5909E+02 3 4
140.- 160. 5.5736E+05 9.2775E+02 3.3253E+02 5.9522E+02 1.1321E+06 1.0398E+03 3.7404E+01 1.0024E+03 7 1
160.- 180. 5.6267E+05 1.0185E+03 2.9146E+02 7.2707E+02 1.1397E+06 1.5522E+03 6.6231E+02 8.8988E+02 5 9
180.- 200. 5.6699E+05 7.3216E+02 6.9542E+01 6.6262E+02 1.1317E+06 1.5266E+03 4.5944E+02 1.0672E+03 1 7
200.- 220. 5.7664E+05 1.0715E+03 3.4496E+02 7.2651E+02 1.1227E+06 1.4969E+03 3.6575E+02 1.1311E+03 7 5
220.- 240. 5.7423E+05 8.7925E+02 3.2972E+01 8.4628E+02 1.1369E+06 1.1103E+03 7.9943E+01 1.0304E+03 1 2
240.- 260. 5.7563E+05 9.9721E+02 2.0342E+02 7.9379E+02 1.1449E+06 1.6935E+03 5.1715E+02 1.1763E+03 3 7
260.- 280. 5.7618E+05 8.8255E+02 1.2713E+02 7.5543E+02 1.1428E+06 1.8214E+03 5.3186E+02 1.2895E+03 3 8
280.- 300. 5.7516E+05 1.0675E+03 3.1575E+02 7.5172E+02 1.1399E+06 1.2256E+03 1.5697E+02 1.0687E+03 6 4
300.- 320. 5.7603E+05 9.4511E+02 6.8951E+01 8.7616E+02 1.1259E+06 1.8283E+03 4.9692E+02 1.3313E+03 1 8
320.- 340. 5.6171E+05 9.4702E+02 1.1335E+02 8.3367E+02 1.1276E+06 2.0043E+03 6.2744E+02 1.3768E+03 3 10
340.- 360. 5.6084E+05 1.2159E+03 3.4336E+02 8.7254E+02 1.1190E+06 2.1423E+03 6.0610E+02 1.5362E+03 7 9
360.- 380. 5.5620E+05 1.1651E+03 1.6726E+02 9.9787E+02 1.1101E+06 1.8888E+03 2.4412E+02 1.6447E+03 4 4
380.- 400. 5.5280E+05 1.5405E+03 3.7434E+02 1.1662E+03 1.1115E+06 2.6719E+03 5.8423E+02 2.0877E+03 7 10
400.- 420. 5.4368E+05 1.3369E+03 2.3050E+02 1.1064E+03 1.0973E+06 2.4270E+03 3.5818E+02 2.0688E+03 5 6
420.- 440. 5.4054E+05 1.5764E+03 2.7827E+02 1.2982E+03 1.0854E+06 2.7432E+03 6.9824E+02 2.0450E+03 6 13
440.- 460. 5.3009E+05 1.4965E+03 3.1343E+01 1.4651E+03 1.0574E+06 2.8402E+03 2.7394E+02 2.5663E+03 1 6
460.- 480. 5.2157E+05 1.6672E+03 1.3051E+02 1.5367E+03 1.0300E+06 2.9891E+03 2.9869E+02 2.6904E+03 3 6
480.- 500. 5.1151E+05 1.9177E+03 6.9495E+01 1.8482E+03 1.0214E+06 3.0762E+03 3.5215E+02 2.7240E+03 2 8
500.- 520. 4.5468E+04 1.3754E+02 3.3808E+01 1.0373E+02 8.9299E+04 1.9045E+02 0.0000E+00 1.9045E+02 1 0
0.- 20. 5.3897E+06 6.1328E+03 1.5433E+03 4.5895E+03 1.0765E+07 1.1114E+04 4.7351E+03 6.3785E+03 23 54
20.- 40. 5.4398E+06 7.4664E+03 2.4374E+03 5.0290E+03 1.0841E+07 9.9056E+03 3.1129E+03 6.7927E+03 36 39
40.- 60. 5.4584E+06 6.9884E+03 2.2223E+03 4.7661E+03 1.0940E+07 1.0692E+04 3.3550E+03 7.3366E+03 33 43
60.- 80. 5.4904E+06 7.9853E+03 3.0146E+03 4.9706E+03 1.1022E+07 1.0314E+04 3.1945E+03 7.1194E+03 44 43
80.- 100. 5.5652E+06 7.6830E+03 2.3131E+03 5.3699E+03 1.1061E+07 1.1467E+04 3.8270E+03 7.6402E+03 36 48
100.- 120. 5.5727E+06 7.5966E+03 2.1830E+03 5.4136E+03 1.1111E+07 1.2634E+04 4.6803E+03 7.9537E+03 34 64
120.- 140. 5.6202E+06 8.0740E+03 2.1213E+03 5.9527E+03 1.1222E+07 1.3617E+04 5.1544E+03 8.4625E+03 42 62
140.- 160. 5.6630E+06 7.8757E+03 2.0734E+03 5.8023E+03 1.1276E+07 1.2501E+04 3.7166E+03 8.7849E+03 36 49
160.- 180. 5.6650E+06 8.0034E+03 1.9524E+03 6.0510E+03 1.1344E+07 1.3771E+04 4.5200E+03 9.2510E+03 36 68
180.- 200. 5.6990E+06 8.8625E+03 2.3927E+03 6.4698E+03 1.1368E+07 1.3364E+04 3.5986E+03 9.7654E+03 44 52
200.- 220. 5.7156E+06 9.6586E+03 2.6326E+03 7.0260E+03 1.1410E+07 1.3745E+04 3.5358E+03 1.0209E+04 50 49
220.- 240. 5.7053E+06 9.5736E+03 2.4917E+03 7.0818E+03 1.1412E+07 1.4805E+04 3.8192E+03 1.0985E+04 48 61
240.- 260. 5.7092E+06 9.9798E+03 2.4864E+03 7.4934E+03 1.1476E+07 1.4621E+04 3.4314E+03 1.1189E+04 44 56
260.- 280. 5.7072E+06 9.2607E+03 1.7111E+03 7.5496E+03 1.1449E+07 1.5534E+04 3.7704E+03 1.1763E+04 38 61
280.- 300. 5.7166E+06 1.1372E+04 2.3377E+03 9.0343E+03 1.1407E+07 1.7139E+04 5.0256E+03 1.2113E+04 49 78
300.- 320. 5.7161E+06 1.1194E+04 2.3679E+03 8.8259E+03 1.1407E+07 1.7842E+04 4.6459E+03 1.3196E+04 43 69
320.- 340. 5.6667E+06 1.1616E+04 2.1704E+03 9.4461E+03 1.1329E+07 1.9708E+04 5.1333E+03 1.4574E+04 44 83
340.- 360. 5.6173E+06 1.2618E+04 2.2660E+03 1.0352E+04 1.1260E+07 2.0019E+04 4.4638E+03 1.5555E+04 47 78
360.- 380. 5.5997E+06 1.3315E+04 2.2804E+03 1.1035E+04 1.1160E+07 2.2191E+04 5.0439E+03 1.7147E+04 46 89
380.- 400. 5.5484E+06 1.3804E+04 2.1350E+03 1.1669E+04 1.1087E+07 2.3760E+04 5.3542E+03 1.8406E+04 45 92
400.- 420. 5.4907E+06 1.4526E+04 1.9392E+03 1.2587E+04 1.0971E+07 2.4371E+04 4.2149E+03 2.0156E+04 46 75
420.- 440. 5.3878E+06 1.4857E+04 2.0292E+03 1.2828E+04 1.0770E+07 2.7110E+04 5.0126E+03 2.2097E+04 45 96
440.- 460. 5.2810E+06 1.5507E+04 1.8352E+03 1.3672E+04 1.0560E+07 2.8074E+04 5.3577E+03 2.2716E+04 47 100
460.- 480. 5.1388E+06 1.6301E+04 1.5900E+03 1.4711E+04 1.0316E+07 3.0376E+04 4.8597E+03 2.5516E+04 39 96
480.- 500. 5.0112E+06 1.7718E+04 1.5145E+03 1.6203E+04 1.0029E+07 3.3036E+04 5.0967E+03 2.7940E+04 38 107
500.- 520. 4.4488E+05 1.1836E+03 8.3591E+01 1.1000E+03 8.9294E+05 2.3013E+03 3.5289E+02 1.9484E+03 2 8
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3880E+07 2.6841E+04 5.1972E+03 2.1644E+04 2.7764E+07 4.3962E+04 9.8771E+03 3.4085E+04 100 158
1.3902E+08 2.6915E+05 5.4125E+04 2.1503E+05 2.7789E+08 4.4401E+05 1.0901E+05 3.3500E+05 1035 1720
DAMAGE IN LAYER 1 : 7.0519E+04
DAMAGE IN LAYER 1 : 7.0998E+05
DAMAGE IN LAYER 2 : 6.5549E+04
DAMAGE IN LAYER 2 : 6.4540E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.4000E-03 ENERGY REFL.COEF.= 1.4064E-03 REL.MEAN ENERGY = 3.1965E-01 MEAN ENERGY = 3.5161E+03
PART.REFL.COEF.= 5.1800E-03 ENERGY REFL.COEF.= 1.7796E-03 REL.MEAN ENERGY = 3.4355E-01 MEAN ENERGY = 3.7791E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.5161E+03 9.4957E+06 5.1846E-01 1.8866E+00 3.0815E+03 6.5698E+02 1.9062E+06 3.5179E-01
PATHLENGTH 5.1679E+02 6.2168E+04 -1.9602E-01 1.7294E+00 2.4934E+02 5.3159E+01 1.1320E+04 3.2644E-01
ELASTIC LOSS 1.2504E+02 1.9671E+03 4.4352E+01 2.0160E+00
INEL. LOSS 7.1673E+03 9.2335E+06 3.0387E+03 1.3812E+02
ENERGY 3.7791E+03 9.8776E+06 6.9286E-01 2.2323E+00 3.1429E+03 1.9529E+02 6.8135E+05 1.0687E-01
PATHLENGTH 4.9877E+02 5.9660E+04 -3.1167E-01 1.9331E+00 2.4425E+02 1.5177E+01 3.5810E+03 9.3846E-02
ELASTIC LOSS 1.3537E+02 3.0584E+03 5.5302E+01 2.1352E-01
INEL. LOSS 7.0497E+03 9.7796E+06 3.1272E+03 1.2074E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.5161E+03 2.1859E+07 1.5880E+11 1.2407E+15 1.0153E+19 8.5816E+22
LOGENERGY 3.2672E+00 1.1011E+01 3.8069E+01 1.3436E+02 4.8208E+02 1.7528E+03
PATHLENGTH 5.1679E+02 3.2924E+05 2.3137E+08 1.7135E+11 1.3094E+14 1.0212E+17
ENERGY 3.7791E+03 2.4159E+07 1.8746E+11 1.5933E+15 1.4282E+19 1.3272E+23
LOGENERGY 3.3530E+00 1.1519E+01 4.0341E+01 1.4349E+02 5.1704E+02 1.8834E+03
PATHLENGTH 4.9877E+02 3.0843E+05 2.0880E+08 1.4875E+11 1.0967E+14 8.2950E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -277,5 +276,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 0 0 1 1 4 0 2 2 1 1 1 6 0 2 1
0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.909 0.909 3.636 0.000 1.818 1.818 0.909 0.909 0.909 5.455 0.000 1.818 0.909
0 0 2 6 6 8 10 11 16 10 13 20 14 16 14 18 19 18 33 25
0.000 0.000 0.154 0.463 0.463 0.618 0.772 0.849 1.236 0.772 1.004 1.544 1.081 1.236 1.081 1.390 1.467 1.390 2.548 1.931
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.rge
+51 -52
View File
@@ -1,55 +1,55 @@
DEPTH PARTICLES
10.0000 3
30.0000 1
50.0000 3
70.0000 1
90.0000 6
110.0000 8
130.0000 6
150.0000 6
170.0000 7
190.0000 8
210.0000 11
230.0000 9
250.0000 16
270.0000 4
290.0000 15
310.0000 14
330.0000 19
350.0000 31
370.0000 39
390.0000 50
410.0000 40
430.0000 62
450.0000 65
470.0000 72
490.0000 71
510.0000 85
530.0000 90
550.0000 122
570.0000 153
590.0000 148
610.0000 177
630.0000 191
650.0000 232
670.0000 266
690.0000 305
710.0000 314
730.0000 336
750.0000 345
770.0000 324
790.0000 296
810.0000 262
830.0000 260
850.0000 192
870.0000 138
890.0000 84
910.0000 64
930.0000 20
950.0000 5
970.0000 2
990.0000 0
1010.0000 0
10.0000 6
30.0000 16
50.0000 30
70.0000 37
90.0000 45
110.0000 58
130.0000 55
150.0000 53
170.0000 68
190.0000 83
210.0000 87
230.0000 99
250.0000 125
270.0000 150
290.0000 178
310.0000 178
330.0000 241
350.0000 273
370.0000 310
390.0000 375
410.0000 434
430.0000 536
450.0000 598
470.0000 708
490.0000 953
510.0000 862
530.0000 983
550.0000 1091
570.0000 1348
590.0000 1567
610.0000 1822
630.0000 2014
650.0000 2231
670.0000 2524
690.0000 2860
710.0000 2877
730.0000 3250
750.0000 3370
770.0000 3314
790.0000 3216
810.0000 2987
830.0000 2521
850.0000 1981
870.0000 1487
890.0000 860
910.0000 476
930.0000 245
950.0000 105
970.0000 42
990.0000 9
1010.0000 3
1030.0000 0
1050.0000 0
1070.0000 0
@@ -58,4 +58,3 @@
1130.0000 0
1150.0000 0
1170.0000 0
1190.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E11000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
11.00 0.45 0.00 15.00 5000 4978 22 0 5000 0 0.6823E+03 0.1464E+03 0.3516E+04 0.3082E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 567 4411
11.00 0.45 0.00 15.00 50000 49741 259 0 50000 0 0.6844E+03 0.1468E+03 0.3779E+04 0.3143E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 5696 44045
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 13000 450 0 15 0.5 0.0 0.0 0.0
5000 78747 78747 78747 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78747 78747 78747 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.out
+128 -128
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:14
Start: 19.Jun. 2026 20:11:35
End: 19.Jun. 2026 18:18:15
End: 19.Jun. 2026 20:12:01
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 26 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 13000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78747.00 78747.00 78747.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78747.00 78747.00 78747.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
36397 0 0 0 0 0 0 0 0
362292 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,174 +110,174 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4975 ENERGY=0.6468E+08 EV
BACKSCATTERED PARTICLES= 25 ENERGY=0.1278E+06 EV
IMPLANTED PARTICLES= 49792 ENERGY=0.6473E+09 EV
BACKSCATTERED PARTICLES= 208 ENERGY=0.8856E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 282 282
IMPLANTED PARTICLES (LAYER 1)= 2659 2659
IMPLANTED PARTICLES (LAYER 2)= 4693 4693
IMPLANTED PARTICLES (LAYER 2)= 47133 47133
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 461.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.064
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.276
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 461.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.065
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.266
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 8.1209E+02 2.6631E+04 -1.1956E+00 4.8366E+00 1.6319E+02 2.3137E+00 7.3955E+02 4.2448E-02
SPREAD 3.2496E+02 2.7107E+04 4.5005E-01 2.6691E+00 1.6464E+02 2.3342E+00 4.9651E+02 2.4893E-02
PATHLENGTH 1.1517E+03 1.4640E+03 -1.1981E-01 3.1918E+00 3.8263E+01 5.4247E-01 3.0729E+01 3.9689E-02
ELASTIC LOSS 2.7692E+01 3.7626E+02 1.9397E+01 3.8990E-03
INEL. LOSS 1.2971E+04 2.0307E+05 4.5063E+02 9.0579E-02
PENETRATION 8.1442E+02 2.6924E+04 -1.2544E+00 5.0851E+00 1.6408E+02 7.3534E-01 2.4387E+02 1.4429E-02
SPREAD 3.2492E+02 2.6988E+04 4.5447E-01 2.7123E+00 1.6428E+02 7.3622E-01 1.5826E+02 8.2118E-03
PATHLENGTH 1.1517E+03 1.4843E+03 -1.5873E-01 3.1735E+00 3.8527E+01 1.7266E-01 9.8067E+00 1.1847E-02
ELASTIC LOSS 2.7580E+01 3.6244E+02 1.9038E+01 3.8235E-04
INEL. LOSS 1.2971E+04 2.0342E+05 4.5102E+02 9.0580E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.0979E-02 1.0129E+00 1.0423E+02 1.8522E+04 1.0065E+00 6.6258E-04 9.0753E-02 9.5845E+00
WEAK EL.LOSS 4.4657E-04 2.7812E-06 7.1441E+00 7.5489E+01 1.6677E-03 1.0979E-06 1.5802E-08 3.5852E-02
INELAST.LOSS 2.8053E+01 1.1150E+02 -1.2353E+00 3.1884E+00 1.0559E+01 6.9515E-03 1.0859E-01 1.4718E-03
SUBTHR.LOSS 5.2506E-02 2.5303E-01 2.8226E+01 1.0873E+03 5.0302E-01 3.3118E-04 5.4907E-03 2.6342E-01
ELAST.LOSS 6.0361E-02 9.0476E-01 9.1933E+01 1.4540E+04 9.5119E-01 1.9795E-04 2.2704E-02 2.5134E+00
WEAK EL.LOSS 4.4547E-04 2.7573E-06 7.1189E+00 7.5012E+01 1.6605E-03 3.4557E-07 4.9367E-09 1.1409E-02
INELAST.LOSS 2.8050E+01 1.1151E+02 -1.2347E+00 3.1872E+00 1.0560E+01 2.1976E-03 3.4320E-02 4.6507E-04
SUBTHR.LOSS 5.2181E-02 2.4945E-01 2.8116E+01 1.0776E+03 4.9945E-01 1.0395E-04 1.7035E-03 8.3753E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 8.1209E+02 6.8612E+05 5.9525E+08 5.2686E+11 4.7391E+14 4.3212E+17
PENETRATION 8.1442E+02 6.9020E+05 6.0043E+08 5.3272E+11 4.8019E+14 4.3862E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.5706E+06 1.5059E+03 1.5045E+03 5.1537E+02 9.8913E+02 3.7930E+02 8
20.- 40. 2 0.4020E-03 0 1.5798E+06 2.2300E+03 2.2280E+03 1.2705E+03 9.5756E+02 8.9088E+02 12
40.- 60. 1 0.2010E-03 0 1.5962E+06 1.4276E+03 1.4256E+03 3.5543E+02 1.0702E+03 2.6646E+02 6
60.- 80. 0 0.0000E+00 0 1.6102E+06 1.5492E+03 1.5476E+03 6.0784E+02 9.3972E+02 4.4823E+02 9
80.- 100. 1 0.2010E-03 0 1.6133E+06 1.3691E+03 1.3667E+03 4.0809E+02 9.5863E+02 2.9302E+02 6
100.- 120. 3 0.6030E-03 0 1.6244E+06 1.6191E+03 1.6168E+03 4.6639E+02 1.1504E+03 3.5428E+02 10
120.- 140. 5 0.1005E-02 0 1.6451E+06 1.4853E+03 1.4819E+03 4.1303E+02 1.0689E+03 3.0883E+02 6
140.- 160. 1 0.2010E-03 0 1.6646E+06 1.9626E+03 1.9601E+03 7.5930E+02 1.2008E+03 5.5156E+02 11
160.- 180. 2 0.4020E-03 0 1.6706E+06 2.0099E+03 2.0066E+03 6.1984E+02 1.3868E+03 4.3278E+02 7
180.- 200. 8 0.1608E-02 0 1.6772E+06 1.5000E+03 1.4947E+03 3.4464E+02 1.1501E+03 2.6161E+02 7
200.- 220. 8 0.1608E-02 0 1.6887E+06 1.7510E+03 1.7453E+03 4.7211E+02 1.2731E+03 3.5109E+02 5
220.- 240. 5 0.1005E-02 0 1.6912E+06 2.4157E+03 2.4114E+03 1.1311E+03 1.2803E+03 8.2129E+02 14
240.- 260. 7 0.1407E-02 0 1.7041E+06 2.1701E+03 2.1650E+03 6.9264E+02 1.4724E+03 4.8866E+02 8
260.- 280. 9 0.1809E-02 0 1.7255E+06 2.3669E+03 2.3598E+03 8.0975E+02 1.5501E+03 5.9688E+02 12
280.- 300. 6 0.1206E-02 0 1.7163E+06 2.1547E+03 2.1495E+03 6.5049E+02 1.4990E+03 4.7912E+02 10
300.- 320. 7 0.1407E-02 0 1.7325E+06 2.3660E+03 2.3593E+03 6.1774E+02 1.7415E+03 4.6092E+02 10
320.- 340. 16 0.3216E-02 0 1.7125E+06 2.3262E+03 2.3174E+03 6.9349E+02 1.6239E+03 5.1012E+02 10
340.- 360. 16 0.3216E-02 0 1.7339E+06 3.1102E+03 3.1000E+03 1.1135E+03 1.9865E+03 8.1158E+02 17
360.- 380. 14 0.2814E-02 0 1.7264E+06 2.7812E+03 2.7712E+03 7.7788E+02 1.9933E+03 5.6660E+02 12
380.- 400. 13 0.2613E-02 0 1.7423E+06 2.8545E+03 2.8434E+03 8.1931E+02 2.0241E+03 6.0342E+02 13
400.- 420. 29 0.5829E-02 0 1.7308E+06 2.6572E+03 2.6409E+03 5.4260E+02 2.0983E+03 3.9772E+02 9
420.- 440. 27 0.5427E-02 0 1.7164E+06 3.1831E+03 3.1671E+03 6.6519E+02 2.5019E+03 4.9060E+02 12
440.- 460. 26 0.5226E-02 0 1.7053E+06 3.2474E+03 3.2303E+03 7.3395E+02 2.4963E+03 5.3655E+02 12
460.- 480. 34 0.6834E-02 0 1.6824E+06 3.1895E+03 3.1680E+03 5.3099E+02 2.6370E+03 3.9736E+02 11
480.- 500. 42 0.8442E-02 0 1.6684E+06 3.4977E+03 3.4759E+03 7.7010E+02 2.7058E+03 5.7109E+02 13
500.- 520. 31 0.6231E-02 0 1.4512E+06 2.5480E+03 2.5403E+03 3.1277E+02 2.2276E+03 2.3876E+02 7
520.- 540. 47 0.9447E-02 0 1.4466E+06 3.0013E+03 2.9919E+03 4.9601E+02 2.4959E+03 3.8002E+02 12
540.- 560. 50 0.1005E-01 0 1.4397E+06 2.7420E+03 2.7323E+03 8.6642E+01 2.6457E+03 6.6240E+01 2
560.- 580. 51 0.1025E-01 0 1.4050E+06 3.2589E+03 3.2482E+03 5.4552E+02 2.7027E+03 4.1816E+02 13
580.- 600. 61 0.1226E-01 0 1.3775E+06 2.7605E+03 2.7483E+03 7.1514E+01 2.6768E+03 5.5258E+01 2
600.- 620. 65 0.1307E-01 0 1.3433E+06 3.2341E+03 3.2212E+03 3.4740E+02 2.8738E+03 2.6595E+02 8
620.- 640. 71 0.1427E-01 0 1.3215E+06 3.1466E+03 3.1317E+03 1.2024E+02 3.0115E+03 9.2408E+01 3
640.- 660. 99 0.1990E-01 0 1.2833E+06 3.5119E+03 3.4933E+03 3.5020E+02 3.1431E+03 2.6929E+02 9
660.- 680. 114 0.2291E-01 0 1.2529E+06 3.8967E+03 3.8757E+03 1.5024E+02 3.7255E+03 1.1578E+02 4
680.- 700. 121 0.2432E-01 0 1.2219E+06 3.9142E+03 3.8904E+03 1.3390E+02 3.7565E+03 1.0377E+02 4
700.- 720. 136 0.2734E-01 0 1.1505E+06 4.1267E+03 4.1010E+03 1.4057E+02 3.9604E+03 1.0866E+02 4
720.- 740. 161 0.3236E-01 0 1.0879E+06 4.1088E+03 4.0781E+03 0.0000E+00 4.0781E+03 0.0000E+00 0
740.- 760. 198 0.3980E-01 0 1.0290E+06 4.1187E+03 4.0832E+03 3.0174E+01 4.0530E+03 2.3488E+01 1
760.- 780. 179 0.3598E-01 0 9.7113E+05 4.3477E+03 4.3134E+03 0.0000E+00 4.3134E+03 0.0000E+00 0
780.- 800. 223 0.4482E-01 0 8.9158E+05 4.4440E+03 4.4027E+03 0.0000E+00 4.4027E+03 0.0000E+00 0
800.- 820. 264 0.5307E-01 0 8.0182E+05 4.3924E+03 4.3445E+03 0.0000E+00 4.3445E+03 0.0000E+00 0
820.- 840. 289 0.5809E-01 0 7.0740E+05 4.4078E+03 4.3570E+03 0.0000E+00 4.3570E+03 0.0000E+00 0
840.- 860. 280 0.5628E-01 0 6.1775E+05 4.3423E+03 4.2902E+03 0.0000E+00 4.2902E+03 0.0000E+00 0
860.- 880. 289 0.5809E-01 0 5.0811E+05 3.7732E+03 3.7209E+03 0.0000E+00 3.7209E+03 0.0000E+00 0
880.- 900. 316 0.6352E-01 0 4.1657E+05 3.4689E+03 3.4144E+03 0.0000E+00 3.4144E+03 0.0000E+00 0
900.- 920. 321 0.6452E-01 0 3.3348E+05 3.0023E+03 2.9481E+03 0.0000E+00 2.9481E+03 0.0000E+00 0
920.- 940. 280 0.5628E-01 0 2.5203E+05 2.4531E+03 2.4039E+03 0.0000E+00 2.4039E+03 0.0000E+00 0
940.- 960. 253 0.5085E-01 0 1.7985E+05 1.8988E+03 1.8561E+03 0.0000E+00 1.8561E+03 0.0000E+00 0
960.- 980. 222 0.4462E-01 0 1.2182E+05 1.4271E+03 1.3910E+03 0.0000E+00 1.3910E+03 0.0000E+00 0
980.- 1000. 188 0.3779E-01 1 8.2875E+04 1.0642E+03 1.0331E+03 0.0000E+00 1.0331E+03 0.0000E+00 0
1000.- 1020. 160 0.3216E-01 4 5.3015E+04 7.9526E+02 7.6955E+02 0.0000E+00 7.6955E+02 0.0000E+00 0
1020.- 1040. 107 0.2151E-01 10 2.8919E+04 4.4482E+02 4.2897E+02 0.0000E+00 4.2897E+02 0.0000E+00 0
1040.- 1060. 67 0.1347E-01 40 1.3602E+04 2.1510E+02 2.0563E+02 0.0000E+00 2.0563E+02 0.0000E+00 0
1060.- 1080. 25 0.5025E-02 106 5.5784E+03 9.4632E+01 9.0490E+01 0.0000E+00 9.0490E+01 0.0000E+00 0
1080.- 1100. 14 0.2814E-02 287 2.3455E+03 4.0227E+01 3.8033E+01 0.0000E+00 3.8033E+01 0.0000E+00 0
1100.- 1120. 10 0.2010E-02 524 9.4284E+02 1.5831E+01 1.4707E+01 0.0000E+00 1.4707E+01 0.0000E+00 0
1120.- 1140. 1 0.2010E-03 889 1.0601E+02 2.1345E+00 1.9523E+00 0.0000E+00 1.9523E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 1033 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 932 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 666 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 313 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 120 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 45 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 5 0.1004E-03 0 1.5721E+07 1.5289E+04 1.5274E+04 5.4933E+03 9.7806E+03 4.0009E+03 77
20.- 40. 23 0.4619E-03 0 1.5856E+07 1.4023E+04 1.4000E+04 4.0200E+03 9.9803E+03 2.9265E+03 60
40.- 60. 19 0.3816E-03 0 1.5966E+07 1.4442E+04 1.4418E+04 3.7673E+03 1.0650E+04 2.8209E+03 67
60.- 80. 19 0.3816E-03 0 1.6058E+07 1.7335E+04 1.7313E+04 6.9896E+03 1.0324E+04 5.0526E+03 87
80.- 100. 25 0.5021E-03 0 1.6169E+07 1.5922E+04 1.5896E+04 4.6535E+03 1.1242E+04 3.4035E+03 67
100.- 120. 28 0.5623E-03 0 1.6313E+07 1.5338E+04 1.5309E+04 4.3283E+03 1.0981E+04 3.1573E+03 64
120.- 140. 41 0.8234E-03 0 1.6421E+07 1.7159E+04 1.7125E+04 5.5320E+03 1.1593E+04 4.0085E+03 76
140.- 160. 36 0.7230E-03 0 1.6521E+07 1.7190E+04 1.7155E+04 5.2925E+03 1.1862E+04 3.8094E+03 73
160.- 180. 34 0.6828E-03 0 1.6645E+07 1.7945E+04 1.7910E+04 5.5270E+03 1.2383E+04 4.0733E+03 83
180.- 200. 43 0.8636E-03 0 1.6813E+07 2.0612E+04 2.0573E+04 7.0560E+03 1.3517E+04 5.0998E+03 90
200.- 220. 46 0.9238E-03 0 1.6861E+07 2.0148E+04 2.0105E+04 7.1541E+03 1.2951E+04 5.1947E+03 97
220.- 240. 54 0.1085E-02 0 1.6963E+07 2.0731E+04 2.0685E+04 7.2022E+03 1.3483E+04 5.2142E+03 95
240.- 260. 78 0.1567E-02 0 1.7035E+07 2.1677E+04 2.1621E+04 6.9836E+03 1.4637E+04 5.0857E+03 102
260.- 280. 69 0.1386E-02 0 1.7126E+07 1.9660E+04 1.9603E+04 4.8398E+03 1.4764E+04 3.5789E+03 75
280.- 300. 87 0.1747E-02 0 1.7201E+07 2.4246E+04 2.4182E+04 8.2954E+03 1.5887E+04 6.1058E+03 131
300.- 320. 109 0.2189E-02 0 1.7263E+07 2.2268E+04 2.2190E+04 5.4275E+03 1.6763E+04 4.0047E+03 93
320.- 340. 145 0.2912E-02 0 1.7281E+07 2.3771E+04 2.3677E+04 6.5139E+03 1.7163E+04 4.8144E+03 105
340.- 360. 138 0.2772E-02 0 1.7335E+07 2.5189E+04 2.5093E+04 6.7387E+03 1.8355E+04 5.0155E+03 119
360.- 380. 153 0.3073E-02 0 1.7346E+07 2.5908E+04 2.5804E+04 6.2519E+03 1.9552E+04 4.6083E+03 98
380.- 400. 159 0.3193E-02 0 1.7311E+07 2.7635E+04 2.7523E+04 7.2633E+03 2.0259E+04 5.3756E+03 125
400.- 420. 187 0.3756E-02 0 1.7278E+07 2.9186E+04 2.9060E+04 7.7355E+03 2.1325E+04 5.7072E+03 124
420.- 440. 203 0.4077E-02 0 1.7238E+07 2.9043E+04 2.8906E+04 6.0550E+03 2.2851E+04 4.4948E+03 107
440.- 460. 256 0.5141E-02 0 1.7123E+07 3.2568E+04 3.2403E+04 7.7624E+03 2.4641E+04 5.7577E+03 139
460.- 480. 319 0.6407E-02 0 1.7012E+07 3.4522E+04 3.4327E+04 8.0022E+03 2.6325E+04 5.9817E+03 159
480.- 500. 383 0.7692E-02 0 1.6905E+07 3.5777E+04 3.5556E+04 7.3653E+03 2.8191E+04 5.4752E+03 136
500.- 520. 370 0.7431E-02 0 1.4629E+07 2.7076E+04 2.6989E+04 4.6089E+03 2.2380E+04 3.4993E+03 95
520.- 540. 418 0.8395E-02 0 1.4389E+07 2.7464E+04 2.7379E+04 4.2107E+03 2.3168E+04 3.2093E+03 91
540.- 560. 483 0.9700E-02 0 1.4267E+07 2.8518E+04 2.8418E+04 3.4869E+03 2.4931E+04 2.6694E+03 82
560.- 580. 606 0.1217E-01 0 1.4089E+07 3.0187E+04 3.0074E+04 3.5568E+03 2.6517E+04 2.7274E+03 86
580.- 600. 627 0.1259E-01 0 1.3818E+07 3.2597E+04 3.2472E+04 3.7901E+03 2.8682E+04 2.9057E+03 91
600.- 620. 732 0.1470E-01 0 1.3546E+07 3.1950E+04 3.1809E+04 2.4015E+03 2.9408E+04 1.8433E+03 59
620.- 640. 784 0.1575E-01 0 1.3259E+07 3.3561E+04 3.3405E+04 2.4365E+03 3.0969E+04 1.8763E+03 64
640.- 660. 930 0.1868E-01 0 1.2886E+07 3.5878E+04 3.5697E+04 2.1010E+03 3.3596E+04 1.6193E+03 56
660.- 680. 1103 0.2215E-01 0 1.2505E+07 3.7749E+04 3.7540E+04 2.2118E+03 3.5329E+04 1.7032E+03 58
680.- 700. 1202 0.2414E-01 0 1.1980E+07 3.8226E+04 3.7994E+04 1.5810E+03 3.6413E+04 1.2224E+03 45
700.- 720. 1339 0.2689E-01 0 1.1450E+07 3.9113E+04 3.8858E+04 8.1135E+02 3.8046E+04 6.2712E+02 23
720.- 740. 1547 0.3107E-01 0 1.0865E+07 4.0503E+04 4.0216E+04 7.7405E+02 3.9442E+04 5.9710E+02 21
740.- 760. 1722 0.3458E-01 0 1.0235E+07 4.2086E+04 4.1760E+04 4.7458E+02 4.1285E+04 3.6756E+02 14
760.- 780. 1940 0.3896E-01 0 9.4682E+06 4.1674E+04 4.1320E+04 2.3644E+02 4.1083E+04 1.8312E+02 7
780.- 800. 2191 0.4400E-01 0 8.7277E+06 4.2442E+04 4.2039E+04 6.4525E+01 4.1975E+04 5.0083E+01 2
800.- 820. 2329 0.4677E-01 0 7.8874E+06 4.2737E+04 4.2300E+04 3.1132E+01 4.2269E+04 2.4201E+01 1
820.- 840. 2722 0.5467E-01 0 7.0368E+06 4.1527E+04 4.1043E+04 0.0000E+00 4.1043E+04 0.0000E+00 0
840.- 860. 2822 0.5668E-01 0 6.1285E+06 3.9802E+04 3.9289E+04 0.0000E+00 3.9289E+04 0.0000E+00 0
860.- 880. 2948 0.5921E-01 0 5.2231E+06 3.7800E+04 3.7271E+04 0.0000E+00 3.7271E+04 0.0000E+00 0
880.- 900. 3241 0.6509E-01 0 4.3001E+06 3.4436E+04 3.3881E+04 0.0000E+00 3.3881E+04 0.0000E+00 0
900.- 920. 3063 0.6152E-01 0 3.4598E+06 3.0805E+04 3.0266E+04 0.0000E+00 3.0266E+04 0.0000E+00 0
920.- 940. 3058 0.6142E-01 0 2.6518E+06 2.6426E+04 2.5900E+04 0.0000E+00 2.5900E+04 0.0000E+00 0
940.- 960. 2803 0.5629E-01 0 1.9424E+06 2.1395E+04 2.0920E+04 0.0000E+00 2.0920E+04 0.0000E+00 0
960.- 980. 2511 0.5043E-01 1 1.3258E+06 1.5935E+04 1.5524E+04 0.0000E+00 1.5524E+04 0.0000E+00 0
980.- 1000. 1996 0.4009E-01 4 8.4898E+05 1.1265E+04 1.0940E+04 0.0000E+00 1.0940E+04 0.0000E+00 0
1000.- 1020. 1467 0.2946E-01 28 4.9943E+05 7.2962E+03 7.0606E+03 0.0000E+00 7.0606E+03 0.0000E+00 0
1020.- 1040. 1012 0.2032E-01 153 2.6530E+05 4.1364E+03 3.9809E+03 0.0000E+00 3.9809E+03 0.0000E+00 0
1040.- 1060. 604 0.1213E-01 490 1.2764E+05 2.2112E+03 2.1188E+03 0.0000E+00 2.1188E+03 0.0000E+00 0
1060.- 1080. 352 0.7069E-02 1103 5.4696E+04 1.0240E+03 9.7290E+02 0.0000E+00 9.7290E+02 0.0000E+00 0
1080.- 1100. 148 0.2972E-02 2701 1.9549E+04 4.0049E+02 3.7996E+02 0.0000E+00 3.7996E+02 0.0000E+00 0
1100.- 1120. 47 0.9439E-03 5408 4.8794E+03 1.0804E+02 1.0123E+02 0.0000E+00 1.0123E+02 0.0000E+00 0
1120.- 1140. 13 0.2611E-03 8512 1.4099E+03 3.0482E+01 2.8804E+01 0.0000E+00 2.8804E+01 0.0000E+00 0
1140.- 1160. 3 0.6025E-04 10357 2.8289E+02 5.0367E+00 4.6447E+00 0.0000E+00 4.6447E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 9441 4.6596E+00 1.5770E-01 1.4942E-01 0.0000E+00 1.4942E-01 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 6641 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 3274 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 1257 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 316 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 83 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 22 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- SUT 0 0.0000E+00
4975 1.0000E+00 4975 6.4728E+07 1.4173E+05 1.4070E+05 1.9566E+04 1.2113E+05 1.4408E+04 319
49792 1.0000E+00 49792 6.4765E+08 1.4039E+06 1.3937E+06 1.8903E+05 1.2046E+06 1.3989E+05 3244
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.2778E+05 6.0101E+02 2.0561E+02 3.9540E+02 1.0428E+06 9.0349E+02 3.0976E+02 5.9373E+02 3 5
20.- 40. 5.2385E+05 8.5332E+02 4.8012E+02 3.7320E+02 1.0559E+06 1.3747E+03 7.9036E+02 5.8436E+02 5 7
40.- 60. 5.3529E+05 7.3994E+02 3.2330E+02 4.1664E+02 1.0609E+06 6.8564E+02 3.2127E+01 6.5351E+02 5 1
60.- 80. 5.3041E+05 7.0646E+02 3.4137E+02 3.6509E+02 1.0798E+06 8.4109E+02 2.6646E+02 5.7463E+02 4 5
80.- 100. 5.2925E+05 3.5030E+02 0.0000E+00 3.5030E+02 1.0841E+06 1.0164E+03 4.0809E+02 6.0833E+02 0 6
100.- 120. 5.3948E+05 7.4933E+02 2.6060E+02 4.8873E+02 1.0849E+06 8.6750E+02 2.0578E+02 6.6172E+02 5 5
120.- 140. 5.4588E+05 7.5573E+02 3.0830E+02 4.4744E+02 1.0993E+06 7.2621E+02 1.0473E+02 6.2147E+02 4 2
140.- 160. 5.5392E+05 6.6550E+02 2.3360E+02 4.3190E+02 1.1106E+06 1.2946E+03 5.2570E+02 7.6892E+02 5 6
160.- 180. 5.4721E+05 6.7687E+02 8.0848E+01 5.9602E+02 1.1234E+06 1.3298E+03 5.3900E+02 7.9077E+02 2 5
180.- 200. 5.5507E+05 6.8410E+02 2.2307E+02 4.6104E+02 1.1221E+06 8.1065E+02 1.2157E+02 6.8908E+02 4 3
200.- 220. 5.6281E+05 9.5652E+02 4.7211E+02 4.8441E+02 1.1259E+06 7.8873E+02 0.0000E+00 7.8873E+02 5 0
220.- 240. 5.5686E+05 1.0447E+03 5.7710E+02 4.6762E+02 1.1343E+06 1.3666E+03 5.5398E+02 8.1266E+02 8 6
240.- 260. 5.6964E+05 7.0954E+02 1.0441E+02 6.0512E+02 1.1345E+06 1.4555E+03 5.8823E+02 8.6723E+02 2 6
260.- 280. 5.7687E+05 9.8111E+02 4.0147E+02 5.7963E+02 1.1486E+06 1.3787E+03 4.0828E+02 9.7045E+02 7 5
280.- 300. 5.7663E+05 9.7404E+02 3.0868E+02 6.6536E+02 1.1396E+06 1.1755E+03 3.4180E+02 8.3366E+02 5 5
300.- 320. 5.8233E+05 1.0924E+03 3.7476E+02 7.1767E+02 1.1502E+06 1.2668E+03 2.4298E+02 1.0238E+03 6 4
320.- 340. 5.6988E+05 1.0059E+03 3.3799E+02 6.6789E+02 1.1426E+06 1.3115E+03 3.5551E+02 9.5599E+02 5 5
340.- 360. 5.7238E+05 1.0284E+03 2.5449E+02 7.7392E+02 1.1615E+06 2.0715E+03 8.5897E+02 1.2126E+03 5 12
360.- 380. 5.7790E+05 8.8689E+02 1.2984E+02 7.5705E+02 1.1485E+06 1.8843E+03 6.4804E+02 1.2363E+03 3 9
380.- 400. 5.8209E+05 1.0119E+03 2.6102E+02 7.5091E+02 1.1602E+06 1.8315E+03 5.5829E+02 1.2732E+03 5 8
400.- 420. 5.7452E+05 9.5896E+02 1.7081E+02 7.8816E+02 1.1563E+06 1.6819E+03 3.7179E+02 1.3101E+03 3 6
420.- 440. 5.6844E+05 1.1015E+03 1.1813E+02 9.8337E+02 1.1479E+06 2.0656E+03 5.4706E+02 1.5185E+03 3 9
440.- 460. 5.6465E+05 1.0118E+03 5.4143E+01 9.5762E+02 1.1407E+06 2.2185E+03 6.7981E+02 1.5387E+03 1 11
460.- 480. 5.5145E+05 1.1005E+03 1.9647E+02 9.0400E+02 1.1310E+06 2.0675E+03 3.3451E+02 1.7330E+03 5 6
480.- 500. 5.4988E+05 1.3085E+03 2.1176E+02 1.0967E+03 1.1151E+06 2.1576E+03 5.5834E+02 1.5993E+03 4 9
500.- 520. 5.5010E+04 6.1758E+01 0.0000E+00 6.1758E+01 1.0675E+05 1.1346E+02 0.0000E+00 1.1346E+02 0 0
0.- 20. 5.2330E+06 6.2073E+03 2.0925E+03 4.1148E+03 1.0488E+07 9.0666E+03 3.4008E+03 5.6659E+03 33 44
20.- 40. 5.2718E+06 5.3337E+03 1.2179E+03 4.1159E+03 1.0584E+07 8.6666E+03 2.8022E+03 5.8645E+03 24 36
40.- 60. 5.3218E+06 6.7815E+03 2.1527E+03 4.6287E+03 1.0644E+07 7.6362E+03 1.6146E+03 6.0215E+03 35 32
60.- 80. 5.3561E+06 6.9462E+03 2.8636E+03 4.0826E+03 1.0702E+07 1.0367E+04 4.1260E+03 6.2414E+03 40 47
80.- 100. 5.3874E+06 6.4916E+03 1.7898E+03 4.7018E+03 1.0782E+07 9.4041E+03 2.8637E+03 6.5405E+03 27 40
100.- 120. 5.4334E+06 6.1142E+03 1.6268E+03 4.4874E+03 1.0880E+07 9.1952E+03 2.7015E+03 6.4936E+03 28 36
120.- 140. 5.4632E+06 6.7794E+03 2.0511E+03 4.7283E+03 1.0957E+07 1.0346E+04 3.4809E+03 6.8648E+03 31 45
140.- 160. 5.4889E+06 6.4923E+03 1.5240E+03 4.9683E+03 1.1032E+07 1.0663E+04 3.7686E+03 6.8942E+03 25 48
160.- 180. 5.5390E+06 7.6429E+03 2.5655E+03 5.0774E+03 1.1106E+07 1.0267E+04 2.9614E+03 7.3055E+03 42 41
180.- 200. 5.6110E+06 7.9448E+03 2.2781E+03 5.6667E+03 1.1202E+07 1.2629E+04 4.7779E+03 7.8507E+03 34 56
200.- 220. 5.6227E+06 7.7115E+03 2.3818E+03 5.3297E+03 1.1239E+07 1.2394E+04 4.7723E+03 7.6213E+03 39 58
220.- 240. 5.6486E+06 7.7860E+03 2.3269E+03 5.4590E+03 1.1314E+07 1.2899E+04 4.8753E+03 8.0238E+03 39 56
240.- 260. 5.6635E+06 8.0118E+03 2.3533E+03 5.6585E+03 1.1372E+07 1.3609E+04 4.6303E+03 8.9786E+03 43 59
260.- 280. 5.7102E+06 8.3207E+03 2.3706E+03 5.9502E+03 1.1416E+07 1.1283E+04 2.4693E+03 8.8134E+03 37 38
280.- 300. 5.7461E+06 9.4387E+03 3.1746E+03 6.2641E+03 1.1455E+07 1.4743E+04 5.1208E+03 9.6225E+03 53 78
300.- 320. 5.7559E+06 8.7215E+03 1.8456E+03 6.8759E+03 1.1507E+07 1.3469E+04 3.5819E+03 9.8867E+03 40 53
320.- 340. 5.7571E+06 9.3879E+03 2.4571E+03 6.9308E+03 1.1524E+07 1.4289E+04 4.0568E+03 1.0232E+04 42 63
340.- 360. 5.7617E+06 1.0322E+04 3.0148E+03 7.3073E+03 1.1573E+07 1.4771E+04 3.7239E+03 1.1047E+04 58 61
360.- 380. 5.7793E+06 1.0412E+04 2.5588E+03 7.8532E+03 1.1567E+07 1.5392E+04 3.6931E+03 1.1699E+04 44 54
380.- 400. 5.7634E+06 1.0653E+04 2.4736E+03 8.1793E+03 1.1548E+07 1.6870E+04 4.7897E+03 1.2080E+04 46 79
400.- 420. 5.7629E+06 1.1427E+04 3.0251E+03 8.4021E+03 1.1515E+07 1.7633E+04 4.7104E+03 1.2923E+04 55 69
420.- 440. 5.7508E+06 1.1143E+04 2.0845E+03 9.0585E+03 1.1487E+07 1.7763E+04 3.9706E+03 1.3793E+04 42 65
440.- 460. 5.7219E+06 1.1775E+04 2.3409E+03 9.4342E+03 1.1401E+07 2.0628E+04 5.4215E+03 1.5207E+04 50 89
460.- 480. 5.6595E+06 1.2485E+04 2.6716E+03 9.8138E+03 1.1352E+07 2.1842E+04 5.3306E+03 1.6511E+04 59 100
480.- 500. 5.6116E+06 1.3020E+04 2.3073E+03 1.0713E+04 1.1256E+07 2.2359E+04 5.0580E+03 1.7300E+04 49 87
500.- 520. 5.4159E+05 1.2577E+03 2.5128E+02 1.0064E+03 1.0794E+06 1.8686E+03 3.8968E+02 1.4789E+03 5 6
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3979E+07 2.2017E+04 6.4300E+03 1.5587E+04 2.8108E+07 3.4685E+04 1.0351E+04 2.4334E+04 104 146
1.4036E+08 2.1861E+05 5.7800E+04 1.6081E+05 2.8098E+08 3.4005E+05 9.9092E+04 2.4096E+05 1020 1440
DAMAGE IN LAYER 1 : 5.6537E+04
DAMAGE IN LAYER 1 : 5.5571E+05
DAMAGE IN LAYER 2 : 8.4161E+04
DAMAGE IN LAYER 2 : 8.3795E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 5.0000E-03 ENERGY REFL.COEF.= 1.9664E-03 REL.MEAN ENERGY = 3.9328E-01 MEAN ENERGY = 5.1127E+03
PART.REFL.COEF.= 4.1600E-03 ENERGY REFL.COEF.= 1.3625E-03 REL.MEAN ENERGY = 3.2753E-01 MEAN ENERGY = 4.2578E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 5.1127E+03 1.4250E+07 6.2462E-01 2.1693E+00 3.7749E+03 7.5499E+02 3.0819E+06 3.2680E-01
PATHLENGTH 5.3768E+02 7.7278E+04 -2.2511E-01 2.1948E+00 2.7799E+02 5.5598E+01 1.6894E+04 2.6939E-01
ELASTIC LOSS 1.5849E+02 3.8852E+03 6.2332E+01 2.4933E+00
INEL. LOSS 7.8066E+03 1.3915E+07 3.7303E+03 1.4921E+02
ENERGY 4.2578E+03 1.1256E+07 5.6792E-01 2.1504E+00 3.3550E+03 2.3263E+02 8.3711E+05 1.1007E-01
PATHLENGTH 5.9327E+02 6.7445E+04 -2.2505E-01 1.9746E+00 2.5970E+02 1.8007E+01 4.6166E+03 1.0259E-01
ELASTIC LOSS 1.4752E+02 3.2364E+03 5.6889E+01 2.7351E-01
INEL. LOSS 8.5538E+03 1.1515E+07 3.3934E+03 1.6314E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 5.1127E+03 4.0390E+07 3.8581E+11 4.0459E+15 4.4479E+19 5.0203E+23
LOGENERGY 3.4886E+00 1.2525E+01 4.5788E+01 1.6945E+02 6.3289E+02 2.3813E+03
PATHLENGTH 5.3768E+02 3.6638E+05 2.7526E+08 2.2033E+11 1.8526E+14 1.6208E+17
ENERGY 4.2578E+03 2.9385E+07 2.4242E+11 2.1908E+15 2.0945E+19 2.0809E+23
LOGENERGY 3.4199E+00 1.1946E+01 4.2474E+01 1.5325E+02 5.5969E+02 2.0650E+03
PATHLENGTH 5.9327E+02 4.1941E+05 3.2491E+08 2.6594E+11 2.2574E+14 1.9664E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -285,5 +285,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 0 1 0 1 0 1 2 1 0 3 4 0 3 3 2 2
0.000 0.000 0.000 1.600 0.000 0.800 0.000 0.800 0.000 0.800 1.600 0.800 0.000 2.400 3.200 0.000 2.400 2.400 1.600 1.600
0 1 4 10 9 9 11 5 15 7 7 8 10 13 14 23 11 17 16 18
0.000 0.096 0.385 0.962 0.865 0.865 1.058 0.481 1.442 0.673 0.673 0.769 0.962 1.250 1.346 2.212 1.058 1.635 1.538 1.731
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.rge
+58 -58
View File
@@ -1,62 +1,62 @@
DEPTH PARTICLES
10.0000 0
30.0000 2
50.0000 1
70.0000 0
90.0000 1
110.0000 3
130.0000 5
150.0000 1
170.0000 2
190.0000 8
210.0000 8
230.0000 5
250.0000 7
270.0000 9
290.0000 6
310.0000 7
330.0000 16
350.0000 16
370.0000 14
390.0000 13
410.0000 29
430.0000 27
450.0000 26
470.0000 34
490.0000 42
510.0000 31
530.0000 47
550.0000 50
570.0000 51
590.0000 61
610.0000 65
630.0000 71
650.0000 99
670.0000 114
690.0000 121
710.0000 136
730.0000 161
750.0000 198
770.0000 179
790.0000 223
810.0000 264
830.0000 289
850.0000 280
870.0000 289
890.0000 316
910.0000 321
930.0000 280
950.0000 253
970.0000 222
990.0000 188
1010.0000 160
1030.0000 107
1050.0000 67
1070.0000 25
1090.0000 14
1110.0000 10
1130.0000 1
1150.0000 0
10.0000 5
30.0000 23
50.0000 19
70.0000 19
90.0000 25
110.0000 28
130.0000 41
150.0000 36
170.0000 34
190.0000 43
210.0000 46
230.0000 54
250.0000 78
270.0000 69
290.0000 87
310.0000 109
330.0000 145
350.0000 138
370.0000 153
390.0000 159
410.0000 187
430.0000 203
450.0000 256
470.0000 319
490.0000 383
510.0000 370
530.0000 418
550.0000 483
570.0000 606
590.0000 627
610.0000 732
630.0000 784
650.0000 930
670.0000 1103
690.0000 1202
710.0000 1339
730.0000 1547
750.0000 1722
770.0000 1940
790.0000 2191
810.0000 2329
830.0000 2722
850.0000 2822
870.0000 2948
890.0000 3241
910.0000 3063
930.0000 3058
950.0000 2803
970.0000 2511
990.0000 1996
1010.0000 1467
1030.0000 1012
1050.0000 604
1070.0000 352
1090.0000 148
1110.0000 47
1130.0000 13
1150.0000 3
1170.0000 0
1190.0000 0
1210.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E13000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
13.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.8121E+03 0.1632E+03 0.5113E+04 0.3775E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 282 4693
13.00 0.45 0.00 15.00 50000 49792 208 0 50000 0 0.8144E+03 0.1641E+03 0.4258E+04 0.3355E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 2659 47133
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 15000 450 0 15 0.5 0.0 0.0 0.0
5000 78748 78748 78748 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78748 78748 78748 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.out
+137 -137
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:14
Start: 19.Jun. 2026 20:11:38
End: 19.Jun. 2026 18:18:15
End: 19.Jun. 2026 20:12:06
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 28 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 15000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78748.00 78748.00 78748.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78748.00 78748.00 78748.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
41047 0 0 0 0 0 0 0 0
408505 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,183 +110,183 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4979 ENERGY=0.7468E+08 EV
BACKSCATTERED PARTICLES= 21 ENERGY=0.1208E+06 EV
IMPLANTED PARTICLES= 49839 ENERGY=0.7476E+09 EV
BACKSCATTERED PARTICLES= 161 ENERGY=0.8767E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 130 130
IMPLANTED PARTICLES (LAYER 1)= 1391 1391
IMPLANTED PARTICLES (LAYER 2)= 4849 4849
IMPLANTED PARTICLES (LAYER 2)= 48448 48448
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 520.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.068
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.342
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 520.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.070
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.318
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5263E+02 3.1766E+04 -1.3415E+00 5.6705E+00 1.7823E+02 2.5259E+00 9.7290E+02 5.3384E-02
SPREAD 3.6972E+02 3.5637E+04 4.3459E-01 2.6226E+00 1.8878E+02 2.6753E+00 6.4333E+02 2.5062E-02
PATHLENGTH 1.3140E+03 1.7116E+03 -2.0555E-01 3.4109E+00 4.1372E+01 5.8632E-01 3.7664E+01 4.4207E-02
ELASTIC LOSS 2.8893E+01 3.7487E+02 1.9362E+01 3.8886E-03
INEL. LOSS 1.4970E+04 2.0680E+05 4.5476E+02 9.1335E-02
PENETRATION 9.5526E+02 3.2740E+04 -1.3498E+00 5.5432E+00 1.8094E+02 8.1051E-01 3.1259E+02 1.6052E-02
SPREAD 3.6667E+02 3.5414E+04 4.9102E-01 2.7578E+00 1.8819E+02 8.4295E-01 2.1032E+02 8.2034E-03
PATHLENGTH 1.3141E+03 1.6939E+03 -1.7686E-01 3.3075E+00 4.1157E+01 1.8436E-01 1.1526E+01 1.2989E-02
ELASTIC LOSS 2.8707E+01 3.9533E+02 1.9883E+01 3.9894E-04
INEL. LOSS 1.4971E+04 2.0371E+05 4.5135E+02 9.0561E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.6596E-02 1.0324E+00 1.2210E+02 2.6195E+04 1.0160E+00 6.2981E-04 1.0357E-01 1.2024E+01
WEAK EL.LOSS 3.7561E-04 2.1477E-06 6.9664E+00 6.9655E+01 1.4655E-03 9.0840E-07 1.1030E-08 3.6249E-02
INELAST.LOSS 2.8710E+01 1.0179E+02 -1.4302E+00 3.7390E+00 1.0089E+01 6.2537E-03 1.0442E-01 1.5327E-03
SUBTHR.LOSS 4.8402E-02 2.4176E-01 2.9200E+01 1.1459E+03 4.9169E-01 3.0480E-04 5.0709E-03 2.5083E-01
ELAST.LOSS 5.5669E-02 9.1867E-01 1.0884E+02 2.1058E+04 9.5847E-01 1.8781E-04 2.6122E-02 3.6637E+00
WEAK EL.LOSS 3.7650E-04 2.1650E-06 7.0527E+00 7.2408E+01 1.4714E-03 2.8832E-07 3.5849E-09 1.2185E-02
INELAST.LOSS 2.8707E+01 1.0180E+02 -1.4299E+00 3.7376E+00 1.0090E+01 1.9771E-03 3.3006E-02 4.8445E-04
SUBTHR.LOSS 4.7714E-02 2.3204E-01 2.9362E+01 1.1698E+03 4.8170E-01 9.4397E-05 1.5545E-03 8.4445E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5263E+02 9.3927E+05 9.4771E+08 9.7332E+11 1.0142E+15 1.0699E+18
PENETRATION 9.5526E+02 9.4527E+05 9.5754E+08 9.8736E+11 1.0328E+15 1.0935E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2008E-03 0 1.5215E+06 1.4106E+03 1.4093E+03 4.7503E+02 9.3425E+02 3.5210E+02 8
20.- 40. 0 0.0000E+00 0 1.5328E+06 1.4217E+03 1.4203E+03 5.1333E+02 9.0701E+02 3.5920E+02 5
40.- 60. 1 0.2008E-03 0 1.5462E+06 1.5052E+03 1.5035E+03 5.1087E+02 9.9265E+02 3.4276E+02 4
60.- 80. 1 0.2008E-03 0 1.5583E+06 1.8870E+03 1.8847E+03 8.4135E+02 1.0434E+03 6.0358E+02 9
80.- 100. 3 0.6025E-03 0 1.5643E+06 1.9532E+03 1.9510E+03 9.8360E+02 9.6740E+02 6.5937E+02 7
100.- 120. 6 0.1205E-02 0 1.5792E+06 1.4154E+03 1.4115E+03 4.1879E+02 9.9273E+02 2.9301E+02 4
120.- 140. 1 0.2008E-03 0 1.5927E+06 1.1031E+03 1.1014E+03 2.9076E+02 8.1062E+02 2.1800E+02 5
140.- 160. 0 0.0000E+00 0 1.6031E+06 1.7317E+03 1.7300E+03 7.6590E+02 9.6411E+02 5.5649E+02 10
160.- 180. 3 0.6025E-03 0 1.6148E+06 1.6646E+03 1.6617E+03 4.8406E+02 1.1776E+03 3.4012E+02 4
180.- 200. 4 0.8034E-03 0 1.6241E+06 1.6271E+03 1.6243E+03 4.3876E+02 1.1855E+03 3.2440E+02 7
200.- 220. 0 0.0000E+00 0 1.6281E+06 1.2877E+03 1.2854E+03 1.9748E+02 1.0880E+03 1.4791E+02 4
220.- 240. 5 0.1004E-02 0 1.6398E+06 1.4848E+03 1.4818E+03 4.4597E+02 1.0358E+03 3.2957E+02 8
240.- 260. 3 0.6025E-03 0 1.6487E+06 1.7164E+03 1.7130E+03 5.4354E+02 1.1694E+03 4.0169E+02 8
260.- 280. 3 0.6025E-03 0 1.6631E+06 1.5371E+03 1.5340E+03 3.6076E+02 1.1732E+03 2.6653E+02 6
280.- 300. 6 0.1205E-02 0 1.6740E+06 1.7640E+03 1.7598E+03 5.7395E+02 1.1858E+03 4.0426E+02 6
300.- 320. 3 0.6025E-03 0 1.6947E+06 1.9457E+03 1.9418E+03 4.5012E+02 1.4916E+03 3.1804E+02 6
320.- 340. 7 0.1406E-02 0 1.6994E+06 2.1759E+03 2.1710E+03 6.8238E+02 1.4886E+03 4.8340E+02 8
340.- 360. 8 0.1607E-02 0 1.7038E+06 1.7759E+03 1.7701E+03 3.8212E+02 1.3879E+03 2.8006E+02 6
360.- 380. 3 0.6025E-03 0 1.7174E+06 2.4703E+03 2.4663E+03 1.0584E+03 1.4079E+03 7.5418E+02 13
380.- 400. 6 0.1205E-02 0 1.7357E+06 2.4522E+03 2.4466E+03 1.1374E+03 1.3093E+03 8.3214E+02 16
400.- 420. 15 0.3013E-02 0 1.7359E+06 2.4632E+03 2.4550E+03 8.4779E+02 1.6072E+03 6.2085E+02 12
420.- 440. 4 0.8034E-03 0 1.7381E+06 2.5375E+03 2.5312E+03 6.1148E+02 1.9198E+03 4.5424E+02 10
440.- 460. 15 0.3013E-02 0 1.7342E+06 2.2563E+03 2.2472E+03 4.7821E+02 1.7690E+03 3.5611E+02 9
460.- 480. 15 0.3013E-02 0 1.7606E+06 2.1061E+03 2.0963E+03 3.5158E+02 1.7447E+03 2.6694E+02 7
480.- 500. 17 0.3414E-02 0 1.7629E+06 3.2848E+03 3.2740E+03 1.1871E+03 2.0868E+03 8.8615E+02 20
500.- 520. 15 0.3013E-02 0 1.4707E+06 1.7108E+03 1.7068E+03 2.9629E+02 1.4105E+03 2.2269E+02 5
520.- 540. 18 0.3615E-02 0 1.4679E+06 1.9130E+03 1.9089E+03 2.5789E+02 1.6510E+03 1.9543E+02 5
540.- 560. 24 0.4820E-02 0 1.4520E+06 2.0184E+03 2.0135E+03 2.7784E+02 1.7357E+03 2.0943E+02 5
560.- 580. 24 0.4820E-02 0 1.4569E+06 2.0880E+03 2.0831E+03 4.1683E+02 1.6662E+03 3.1796E+02 9
580.- 600. 31 0.6226E-02 0 1.4640E+06 2.5889E+03 2.5827E+03 7.4347E+02 1.8392E+03 5.6373E+02 15
600.- 620. 29 0.5824E-02 0 1.4621E+06 2.6841E+03 2.6778E+03 6.6859E+02 2.0092E+03 5.1093E+02 15
620.- 640. 43 0.8636E-02 0 1.4554E+06 2.4193E+03 2.4119E+03 3.6055E+02 2.0514E+03 2.7551E+02 8
640.- 660. 31 0.6226E-02 0 1.4490E+06 2.5397E+03 2.5319E+03 3.2430E+02 2.2076E+03 2.4534E+02 6
660.- 680. 51 0.1024E-01 0 1.4354E+06 2.8600E+03 2.8505E+03 4.2313E+02 2.4273E+03 3.2034E+02 8
680.- 700. 63 0.1265E-01 0 1.4316E+06 2.8546E+03 2.8434E+03 2.5766E+02 2.5858E+03 1.9553E+02 5
700.- 720. 39 0.7833E-02 0 1.4038E+06 2.7524E+03 2.7433E+03 2.8617E+02 2.4572E+03 2.1768E+02 6
720.- 740. 58 0.1165E-01 0 1.3723E+06 3.1322E+03 3.1204E+03 2.8953E+02 2.8309E+03 2.2221E+02 7
740.- 760. 64 0.1285E-01 0 1.3528E+06 2.9808E+03 2.9683E+03 1.6776E+02 2.8005E+03 1.2854E+02 4
760.- 780. 65 0.1305E-01 0 1.3274E+06 3.3477E+03 3.3343E+03 4.0642E+02 2.9279E+03 3.1036E+02 9
780.- 800. 105 0.2109E-01 0 1.3051E+06 3.5141E+03 3.4949E+03 3.9155E+02 3.1034E+03 3.0113E+02 10
800.- 820. 121 0.2430E-01 0 1.2597E+06 3.6724E+03 3.6502E+03 1.1731E+02 3.5329E+03 9.0298E+01 3
820.- 840. 121 0.2430E-01 0 1.2099E+06 4.0800E+03 4.0565E+03 1.8089E+02 3.8756E+03 1.3969E+02 5
840.- 860. 127 0.2551E-01 0 1.1501E+06 3.8805E+03 3.8549E+03 1.5252E+02 3.7023E+03 1.1752E+02 4
860.- 880. 161 0.3234E-01 0 1.1073E+06 4.1746E+03 4.1438E+03 1.4755E+02 3.9962E+03 1.1383E+02 4
880.- 900. 188 0.3776E-01 0 1.0315E+06 4.2524E+03 4.2190E+03 6.6124E+01 4.1529E+03 5.1269E+01 2
900.- 920. 171 0.3434E-01 0 9.7124E+05 4.4849E+03 4.4515E+03 4.0112E+01 4.4114E+03 3.0844E+01 1
920.- 940. 235 0.4720E-01 0 8.9443E+05 4.6331E+03 4.5917E+03 3.8412E+01 4.5533E+03 2.9593E+01 1
940.- 960. 235 0.4720E-01 0 8.1874E+05 4.3640E+03 4.3205E+03 0.0000E+00 4.3205E+03 0.0000E+00 0
960.- 980. 261 0.5242E-01 0 7.1836E+05 3.9460E+03 3.8992E+03 0.0000E+00 3.8992E+03 0.0000E+00 0
980.- 1000. 265 0.5322E-01 0 6.3031E+05 4.0288E+03 3.9813E+03 0.0000E+00 3.9813E+03 0.0000E+00 0
1000.- 1020. 268 0.5383E-01 0 5.4242E+05 3.7081E+03 3.6601E+03 0.0000E+00 3.6601E+03 0.0000E+00 0
1020.- 1040. 275 0.5523E-01 0 4.5255E+05 3.2460E+03 3.1983E+03 0.0000E+00 3.1983E+03 0.0000E+00 0
1040.- 1060. 273 0.5483E-01 0 3.7675E+05 3.1245E+03 3.0761E+03 0.0000E+00 3.0761E+03 0.0000E+00 0
1060.- 1080. 273 0.5483E-01 0 3.0461E+05 2.7550E+03 2.7079E+03 0.0000E+00 2.7079E+03 0.0000E+00 0
1080.- 1100. 274 0.5503E-01 0 2.2853E+05 2.1562E+03 2.1099E+03 0.0000E+00 2.1099E+03 0.0000E+00 0
1100.- 1120. 223 0.4479E-01 0 1.6900E+05 1.8123E+03 1.7723E+03 0.0000E+00 1.7723E+03 0.0000E+00 0
1120.- 1140. 234 0.4700E-01 2 1.1346E+05 1.2870E+03 1.2511E+03 0.0000E+00 1.2511E+03 0.0000E+00 0
1140.- 1160. 162 0.3254E-01 0 7.4099E+04 9.7069E+02 9.4296E+02 0.0000E+00 9.4296E+02 0.0000E+00 0
1160.- 1180. 130 0.2611E-01 10 4.3500E+04 5.7311E+02 5.5313E+02 0.0000E+00 5.5313E+02 0.0000E+00 0
1180.- 1200. 75 0.1506E-01 21 2.4749E+04 3.8725E+02 3.7432E+02 0.0000E+00 3.7432E+02 0.0000E+00 0
1200.- 1220. 66 0.1326E-01 59 1.2331E+04 2.0075E+02 1.9148E+02 0.0000E+00 1.9148E+02 0.0000E+00 0
1220.- 1240. 29 0.5824E-02 117 5.6457E+03 1.0394E+02 9.9416E+01 0.0000E+00 9.9416E+01 0.0000E+00 0
1240.- 1260. 14 0.2812E-02 247 1.9516E+03 3.3570E+01 3.1650E+01 0.0000E+00 3.1650E+01 0.0000E+00 0
1260.- 1280. 4 0.8034E-03 525 6.8910E+02 1.0181E+01 9.5854E+00 0.0000E+00 9.5854E+00 0.0000E+00 0
1280.- 1300. 3 0.6025E-03 777 3.0529E+02 8.1802E+00 7.7892E+00 0.0000E+00 7.7892E+00 0.0000E+00 0
1300.- 1320. 1 0.2008E-03 959 2.0540E+01 8.2071E-01 6.7532E-01 0.0000E+00 6.7532E-01 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 938 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 692 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 396 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 166 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 50 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 13 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 5 0.1003E-03 0 1.5194E+07 1.3592E+04 1.3578E+04 4.8901E+03 8.6878E+03 3.4876E+03 54
20.- 40. 15 0.3010E-03 0 1.5304E+07 1.3352E+04 1.3333E+04 4.5119E+03 8.8216E+03 3.2947E+03 59
40.- 60. 14 0.2809E-03 0 1.5425E+07 1.4707E+04 1.4689E+04 5.0895E+03 9.5990E+03 3.6202E+03 60
60.- 80. 14 0.2809E-03 0 1.5559E+07 1.3242E+04 1.3223E+04 4.0676E+03 9.1558E+03 2.9291E+03 49
80.- 100. 18 0.3612E-03 0 1.5689E+07 1.5494E+04 1.5473E+04 5.7767E+03 9.6959E+03 4.1647E+03 70
100.- 120. 21 0.4214E-03 0 1.5784E+07 1.5538E+04 1.5517E+04 5.8442E+03 9.6724E+03 4.1730E+03 73
120.- 140. 19 0.3812E-03 0 1.5937E+07 1.6116E+04 1.6092E+04 6.1275E+03 9.9648E+03 4.3787E+03 79
140.- 160. 15 0.3010E-03 0 1.5998E+07 1.5498E+04 1.5476E+04 5.4135E+03 1.0063E+04 3.9629E+03 78
160.- 180. 36 0.7223E-03 0 1.6125E+07 1.5549E+04 1.5519E+04 5.2422E+03 1.0277E+04 3.8127E+03 73
180.- 200. 18 0.3612E-03 0 1.6255E+07 1.6179E+04 1.6155E+04 5.5451E+03 1.0610E+04 4.0070E+03 73
200.- 220. 26 0.5217E-03 0 1.6355E+07 1.7132E+04 1.7105E+04 5.8088E+03 1.1296E+04 4.1775E+03 75
220.- 240. 34 0.6822E-03 0 1.6494E+07 1.6346E+04 1.6316E+04 5.3598E+03 1.0956E+04 3.8965E+03 77
240.- 260. 33 0.6621E-03 0 1.6627E+07 1.8371E+04 1.8338E+04 6.4656E+03 1.1872E+04 4.6486E+03 81
260.- 280. 43 0.8628E-03 0 1.6695E+07 1.6369E+04 1.6332E+04 4.1944E+03 1.2137E+04 3.1137E+03 71
280.- 300. 40 0.8026E-03 0 1.6819E+07 1.7215E+04 1.7178E+04 4.4265E+03 1.2751E+04 3.2688E+03 70
300.- 320. 68 0.1364E-02 0 1.6883E+07 1.8347E+04 1.8299E+04 5.0288E+03 1.3270E+04 3.7228E+03 83
320.- 340. 60 0.1204E-02 0 1.7000E+07 1.9422E+04 1.9374E+04 5.8878E+03 1.3486E+04 4.3153E+03 92
340.- 360. 61 0.1224E-02 0 1.7057E+07 1.9767E+04 1.9716E+04 5.6225E+03 1.4094E+04 4.1281E+03 81
360.- 380. 78 0.1565E-02 0 1.7125E+07 2.0496E+04 2.0439E+04 5.5943E+03 1.4845E+04 4.0965E+03 84
380.- 400. 102 0.2047E-02 0 1.7248E+07 2.0474E+04 2.0405E+04 5.6991E+03 1.4706E+04 4.1683E+03 84
400.- 420. 91 0.1826E-02 0 1.7293E+07 2.2304E+04 2.2235E+04 6.7609E+03 1.5474E+04 4.9094E+03 97
420.- 440. 113 0.2267E-02 0 1.7342E+07 2.3102E+04 2.3021E+04 6.1238E+03 1.6897E+04 4.5038E+03 97
440.- 460. 146 0.2929E-02 0 1.7424E+07 2.3716E+04 2.3620E+04 6.7770E+03 1.6843E+04 4.9566E+03 105
460.- 480. 158 0.3170E-02 0 1.7481E+07 2.5450E+04 2.5346E+04 6.7820E+03 1.8564E+04 5.0004E+03 116
480.- 500. 163 0.3271E-02 0 1.7476E+07 2.6064E+04 2.5955E+04 6.6016E+03 1.9354E+04 4.9072E+03 117
500.- 520. 157 0.3150E-02 0 1.4709E+07 2.0799E+04 2.0759E+04 4.9434E+03 1.5816E+04 3.7408E+03 98
520.- 540. 201 0.4033E-02 0 1.4568E+07 2.1296E+04 2.1251E+04 4.9187E+03 1.6332E+04 3.7192E+03 92
540.- 560. 243 0.4876E-02 0 1.4598E+07 2.0779E+04 2.0729E+04 3.7520E+03 1.6977E+04 2.8421E+03 73
560.- 580. 241 0.4836E-02 0 1.4633E+07 2.1804E+04 2.1754E+04 4.4314E+03 1.7322E+04 3.3720E+03 94
580.- 600. 256 0.5137E-02 0 1.4617E+07 2.2493E+04 2.2438E+04 3.7978E+03 1.8640E+04 2.8853E+03 78
600.- 620. 298 0.5979E-02 0 1.4568E+07 2.3692E+04 2.3629E+04 4.1980E+03 1.9431E+04 3.1949E+03 89
620.- 640. 354 0.7103E-02 0 1.4545E+07 2.4675E+04 2.4606E+04 3.9587E+03 2.0647E+04 3.0071E+03 80
640.- 660. 384 0.7705E-02 0 1.4472E+07 2.6162E+04 2.6084E+04 4.5597E+03 2.1524E+04 3.4760E+03 98
660.- 680. 443 0.8889E-02 0 1.4367E+07 2.6813E+04 2.6723E+04 3.7686E+03 2.2955E+04 2.8743E+03 82
680.- 700. 509 0.1021E-01 0 1.4206E+07 2.8082E+04 2.7981E+04 3.9711E+03 2.4010E+04 3.0315E+03 89
700.- 720. 547 0.1098E-01 0 1.4069E+07 2.9737E+04 2.9629E+04 3.5733E+03 2.6056E+04 2.7366E+03 84
720.- 740. 623 0.1250E-01 0 1.3852E+07 3.0128E+04 3.0002E+04 3.0541E+03 2.6947E+04 2.3405E+03 73
740.- 760. 745 0.1495E-01 0 1.3508E+07 3.1731E+04 3.1588E+04 3.5691E+03 2.8019E+04 2.7367E+03 86
760.- 780. 792 0.1589E-01 0 1.3244E+07 3.3628E+04 3.3472E+04 2.8668E+03 3.0605E+04 2.2010E+03 71
780.- 800. 951 0.1908E-01 0 1.2863E+07 3.5305E+04 3.5125E+04 3.1754E+03 3.1950E+04 2.4392E+03 79
800.- 820. 1026 0.2059E-01 0 1.2468E+07 3.5325E+04 3.5127E+04 2.1978E+03 3.2929E+04 1.6942E+03 59
820.- 840. 1255 0.2518E-01 0 1.2057E+07 3.7372E+04 3.7139E+04 1.7519E+03 3.5387E+04 1.3508E+03 47
840.- 860. 1316 0.2641E-01 0 1.1535E+07 3.9823E+04 3.9575E+04 2.0151E+03 3.7560E+04 1.5557E+03 56
860.- 880. 1466 0.2941E-01 0 1.0946E+07 3.9890E+04 3.9614E+04 9.5918E+02 3.8655E+04 7.4132E+02 27
880.- 900. 1617 0.3244E-01 0 1.0291E+07 4.1156E+04 4.0852E+04 1.1331E+03 3.9719E+04 8.7576E+02 32
900.- 920. 1812 0.3636E-01 0 9.6139E+06 4.0590E+04 4.0255E+04 5.3955E+02 3.9716E+04 4.1791E+02 16
920.- 940. 1954 0.3921E-01 0 8.9112E+06 4.1317E+04 4.0954E+04 3.6731E+02 4.0586E+04 2.8468E+02 11
940.- 960. 2196 0.4406E-01 0 8.1560E+06 4.1244E+04 4.0843E+04 3.1431E+01 4.0812E+04 2.4425E+01 1
960.- 980. 2392 0.4799E-01 0 7.2942E+06 4.0755E+04 4.0319E+04 1.3319E+02 4.0186E+04 1.0323E+02 4
980.- 1000. 2553 0.5122E-01 0 6.4459E+06 3.8772E+04 3.8311E+04 3.2246E+01 3.8279E+04 2.5031E+01 1
1000.- 1020. 2724 0.5466E-01 0 5.5922E+06 3.6870E+04 3.6382E+04 0.0000E+00 3.6382E+04 0.0000E+00 0
1020.- 1040. 2858 0.5734E-01 0 4.7450E+06 3.4968E+04 3.4461E+04 0.0000E+00 3.4461E+04 0.0000E+00 0
1040.- 1060. 2931 0.5881E-01 0 3.9010E+06 3.1149E+04 3.0642E+04 0.0000E+00 3.0642E+04 0.0000E+00 0
1060.- 1080. 2843 0.5704E-01 0 3.1348E+06 2.7699E+04 2.7206E+04 0.0000E+00 2.7206E+04 0.0000E+00 0
1080.- 1100. 2810 0.5638E-01 0 2.4240E+06 2.3747E+04 2.3268E+04 0.0000E+00 2.3268E+04 0.0000E+00 0
1100.- 1120. 2553 0.5122E-01 2 1.7580E+06 1.9124E+04 1.8691E+04 0.0000E+00 1.8691E+04 0.0000E+00 0
1120.- 1140. 2124 0.4262E-01 5 1.2131E+06 1.4127E+04 1.3775E+04 0.0000E+00 1.3775E+04 0.0000E+00 0
1140.- 1160. 1825 0.3662E-01 19 7.9619E+05 1.0283E+04 9.9873E+03 0.0000E+00 9.9873E+03 0.0000E+00 0
1160.- 1180. 1375 0.2759E-01 87 4.7260E+05 6.6469E+03 6.4278E+03 0.0000E+00 6.4278E+03 0.0000E+00 0
1180.- 1200. 959 0.1924E-01 216 2.6261E+05 4.0167E+03 3.8683E+03 0.0000E+00 3.8683E+03 0.0000E+00 0
1200.- 1220. 558 0.1120E-01 488 1.2985E+05 2.1097E+03 2.0239E+03 0.0000E+00 2.0239E+03 0.0000E+00 0
1220.- 1240. 316 0.6340E-02 1122 5.6736E+04 1.0533E+03 1.0061E+03 0.0000E+00 1.0061E+03 0.0000E+00 0
1240.- 1260. 164 0.3291E-02 2582 2.1522E+04 4.2465E+02 4.0219E+02 0.0000E+00 4.0219E+02 0.0000E+00 0
1260.- 1280. 57 0.1144E-02 5150 7.3187E+03 1.5387E+02 1.4581E+02 0.0000E+00 1.4581E+02 0.0000E+00 0
1280.- 1300. 14 0.2809E-03 8103 1.5902E+03 3.0205E+01 2.8245E+01 0.0000E+00 2.8245E+01 0.0000E+00 0
1300.- 1320. 5 0.1003E-03 9738 4.2207E+02 1.2752E+01 1.2067E+01 0.0000E+00 1.2067E+01 0.0000E+00 0
1320.- 1340. 1 0.2006E-04 9159 4.1050E+01 9.0984E-01 7.8735E-01 0.0000E+00 7.8735E-01 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 6726 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 3908 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 1753 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 591 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 157 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 31 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- SUT 0 0.0000E+00
4979 1.0000E+00 4979 7.4722E+07 1.4828E+05 1.4730E+05 2.1342E+04 1.2596E+05 1.5661E+04 339
49839 1.0000E+00 49839 7.4764E+08 1.4596E+06 1.4498E+06 2.0734E+05 1.2425E+06 1.5331E+05 3518
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.0548E+05 5.3486E+02 1.7947E+02 3.5539E+02 1.0160E+06 8.7442E+02 2.9556E+02 5.7886E+02 4 4
20.- 40. 5.1488E+05 5.1971E+02 1.0808E+02 4.1163E+02 1.0179E+06 9.0063E+02 4.0525E+02 4.9538E+02 2 3
40.- 60. 5.1642E+05 4.3336E+02 0.0000E+00 4.3336E+02 1.0297E+06 1.0702E+03 5.1087E+02 5.5929E+02 0 4
60.- 80. 5.2399E+05 8.6697E+02 4.5300E+02 4.1397E+02 1.0343E+06 1.0178E+03 3.8835E+02 6.2943E+02 5 4
80.- 100. 5.2242E+05 6.1808E+02 2.2111E+02 3.9697E+02 1.0418E+06 1.3329E+03 7.6249E+02 5.7043E+02 3 4
100.- 120. 5.2893E+05 4.3621E+02 0.0000E+00 4.3621E+02 1.0503E+06 9.7530E+02 4.1879E+02 5.5652E+02 0 4
120.- 140. 5.3005E+05 5.3899E+02 1.8281E+02 3.5618E+02 1.0627E+06 5.6238E+02 1.0794E+02 4.5444E+02 3 2
140.- 160. 5.3220E+05 8.0760E+02 3.4619E+02 4.6141E+02 1.0709E+06 9.2241E+02 4.1971E+02 5.0270E+02 4 6
160.- 180. 5.4301E+05 7.2366E+02 2.1157E+02 5.1209E+02 1.0718E+06 9.3803E+02 2.7250E+02 6.6553E+02 2 2
180.- 200. 5.4712E+05 6.5952E+02 1.8770E+02 4.7182E+02 1.0770E+06 9.6478E+02 2.5107E+02 7.1371E+02 4 3
200.- 220. 5.3761E+05 5.5020E+02 5.2358E+01 4.9784E+02 1.0904E+06 7.3525E+02 1.4512E+02 5.9013E+02 1 3
220.- 240. 5.4541E+05 4.3863E+02 5.1292E+01 3.8734E+02 1.0944E+06 1.0431E+03 3.9468E+02 6.4846E+02 1 7
240.- 260. 5.4935E+05 8.0404E+02 2.9480E+02 5.0923E+02 1.0994E+06 9.0893E+02 2.4874E+02 6.6019E+02 4 4
260.- 280. 5.5935E+05 5.4762E+02 6.8068E+01 4.7955E+02 1.1037E+06 9.8635E+02 2.9270E+02 6.9365E+02 1 5
280.- 300. 5.5660E+05 4.9145E+02 0.0000E+00 4.9145E+02 1.1174E+06 1.2683E+03 5.7395E+02 6.9436E+02 0 6
300.- 320. 5.6658E+05 6.8618E+02 9.8657E+01 5.8753E+02 1.1281E+06 1.2556E+03 3.5146E+02 9.0411E+02 2 4
320.- 340. 5.6425E+05 7.8836E+02 1.6986E+02 6.1851E+02 1.1351E+06 1.3826E+03 5.1252E+02 8.7008E+02 3 5
340.- 360. 5.6876E+05 6.1980E+02 7.5226E+01 5.4457E+02 1.1351E+06 1.1503E+03 3.0689E+02 8.4337E+02 2 4
360.- 380. 5.7720E+05 8.5268E+02 2.6048E+02 5.9220E+02 1.1402E+06 1.6137E+03 7.9794E+02 8.1573E+02 6 7
380.- 400. 5.7876E+05 8.4928E+02 3.2426E+02 5.2502E+02 1.1569E+06 1.5974E+03 8.1313E+02 7.8423E+02 3 13
400.- 420. 5.8275E+05 1.0116E+03 3.1028E+02 7.0128E+02 1.1531E+06 1.4434E+03 5.3752E+02 9.0592E+02 5 7
420.- 440. 5.7092E+05 1.1700E+03 2.7505E+02 8.9500E+02 1.1672E+06 1.3612E+03 3.3642E+02 1.0248E+03 5 5
440.- 460. 5.7586E+05 9.7482E+02 1.8559E+02 7.8923E+02 1.1583E+06 1.2724E+03 2.9262E+02 9.7978E+02 4 5
460.- 480. 5.9245E+05 9.3805E+02 2.2235E+02 7.1570E+02 1.1681E+06 1.1583E+03 1.2923E+02 1.0290E+03 4 3
480.- 500. 5.8758E+05 1.4194E+03 5.8509E+02 8.3430E+02 1.1728E+06 1.8412E+03 6.0203E+02 1.2392E+03 10 10
500.- 520. 5.9012E+04 4.4581E+01 0.0000E+00 4.4581E+01 1.1705E+05 1.0521E+02 0.0000E+00 1.0521E+02 0 0
0.- 20. 5.0593E+06 5.5495E+03 1.7667E+03 3.7828E+03 1.0135E+07 8.0284E+03 3.1235E+03 4.9050E+03 19 35
20.- 40. 5.1102E+06 5.9837E+03 2.1536E+03 3.8301E+03 1.0194E+07 7.3498E+03 2.3583E+03 4.9914E+03 28 31
40.- 60. 5.1591E+06 6.0676E+03 1.9720E+03 4.0956E+03 1.0266E+07 8.6210E+03 3.1176E+03 5.5034E+03 31 29
60.- 80. 5.1832E+06 5.3746E+03 1.4756E+03 3.8990E+03 1.0376E+07 7.8488E+03 2.5920E+03 5.2568E+03 20 29
80.- 100. 5.2183E+06 6.6749E+03 2.7684E+03 3.9065E+03 1.0471E+07 8.7977E+03 3.0083E+03 5.7894E+03 36 34
100.- 120. 5.2634E+06 5.6887E+03 1.9404E+03 3.7482E+03 1.0520E+07 9.8280E+03 3.9038E+03 5.9242E+03 29 44
120.- 140. 5.3064E+06 5.7434E+03 1.7899E+03 3.9535E+03 1.0631E+07 1.0349E+04 4.3376E+03 6.0113E+03 31 48
140.- 160. 5.3307E+06 6.5906E+03 2.3945E+03 4.1961E+03 1.0667E+07 8.8858E+03 3.0190E+03 5.8668E+03 36 42
160.- 180. 5.3530E+06 6.5594E+03 2.0820E+03 4.4774E+03 1.0772E+07 8.9601E+03 3.1602E+03 5.7998E+03 30 43
180.- 200. 5.4088E+06 6.2630E+03 1.7549E+03 4.5081E+03 1.0846E+07 9.8921E+03 3.7902E+03 6.1018E+03 27 46
200.- 220. 5.4346E+06 6.5527E+03 1.7447E+03 4.8080E+03 1.0920E+07 1.0552E+04 4.0641E+03 6.4881E+03 29 46
220.- 240. 5.5012E+06 6.0059E+03 1.6798E+03 4.3262E+03 1.0993E+07 1.0310E+04 3.6800E+03 6.6302E+03 29 48
240.- 260. 5.5598E+06 7.0956E+03 2.0412E+03 5.0544E+03 1.1067E+07 1.1242E+04 4.4244E+03 6.8176E+03 31 50
260.- 280. 5.5647E+06 6.6349E+03 1.7384E+03 4.8965E+03 1.1131E+07 9.6967E+03 2.4560E+03 7.2407E+03 29 42
280.- 300. 5.6140E+06 7.6165E+03 2.3150E+03 5.3016E+03 1.1205E+07 9.5612E+03 2.1115E+03 7.4498E+03 39 31
300.- 320. 5.6235E+06 7.6808E+03 2.1946E+03 5.4862E+03 1.1260E+07 1.0618E+04 2.8342E+03 7.7840E+03 38 45
320.- 340. 5.6727E+06 7.5851E+03 2.0673E+03 5.5178E+03 1.1327E+07 1.1789E+04 3.8205E+03 7.9685E+03 38 54
340.- 360. 5.6792E+06 8.2412E+03 2.5795E+03 5.6616E+03 1.1377E+07 1.1475E+04 3.0429E+03 8.4321E+03 42 39
360.- 380. 5.6928E+06 8.3022E+03 2.1611E+03 6.1411E+03 1.1432E+07 1.2137E+04 3.4333E+03 8.7035E+03 36 48
380.- 400. 5.7522E+06 7.9619E+03 2.0450E+03 5.9169E+03 1.1496E+07 1.2443E+04 3.6541E+03 8.7887E+03 34 50
400.- 420. 5.7665E+06 8.4586E+03 2.0398E+03 6.4187E+03 1.1526E+07 1.3776E+04 4.7211E+03 9.0551E+03 33 64
420.- 440. 5.7857E+06 9.3557E+03 2.6854E+03 6.6703E+03 1.1556E+07 1.3665E+04 3.4384E+03 1.0227E+04 49 48
440.- 460. 5.8055E+06 8.7165E+03 1.9347E+03 6.7819E+03 1.1619E+07 1.4903E+04 4.8423E+03 1.0061E+04 36 69
460.- 480. 5.8311E+06 9.0925E+03 2.0657E+03 7.0268E+03 1.1650E+07 1.6254E+04 4.7163E+03 1.1537E+04 42 74
480.- 500. 5.8337E+06 1.0286E+04 2.7357E+03 7.5503E+03 1.1619E+07 1.5557E+04 3.8659E+03 1.1691E+04 49 68
500.- 520. 5.8355E+05 1.0565E+03 3.3940E+02 7.1708E+02 1.1740E+06 1.3865E+03 2.9220E+02 1.0943E+03 6 5
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3837E+07 1.8326E+04 4.8633E+03 1.3462E+04 2.7610E+07 2.8682E+04 1.0167E+04 1.8514E+04 78 124
1.3809E+08 1.8114E+05 5.2465E+04 1.2867E+05 2.7623E+08 2.7393E+05 8.7808E+04 1.8612E+05 847 1162
DAMAGE IN LAYER 1 : 4.6871E+04
DAMAGE IN LAYER 1 : 4.5273E+05
DAMAGE IN LAYER 2 : 1.0043E+05
DAMAGE IN LAYER 2 : 9.9709E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.2000E-03 ENERGY REFL.COEF.= 1.6107E-03 REL.MEAN ENERGY = 3.8349E-01 MEAN ENERGY = 5.7523E+03
PART.REFL.COEF.= 3.2200E-03 ENERGY REFL.COEF.= 1.1690E-03 REL.MEAN ENERGY = 3.6303E-01 MEAN ENERGY = 5.4454E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 5.7523E+03 1.8746E+07 1.6175E-01 1.4442E+00 4.3297E+03 9.4481E+02 2.7265E+06 3.6493E-01
PATHLENGTH 6.2081E+02 1.0124E+05 -2.4812E-02 1.5207E+00 3.1819E+02 6.9434E+01 1.5943E+04 3.4047E-01
ELASTIC LOSS 2.1040E+02 4.2519E+03 6.5207E+01 3.1051E+00
INEL. LOSS 8.9816E+03 1.8920E+07 4.3497E+03 2.0713E+02
ENERGY 5.4454E+03 2.0544E+07 6.0270E-01 1.9959E+00 4.5325E+03 3.5721E+02 1.6157E+06 1.3257E-01
PATHLENGTH 6.4719E+02 1.1243E+05 -3.6440E-01 1.9371E+00 3.3531E+02 2.6426E+01 8.5774E+03 1.2115E-01
ELASTIC LOSS 1.7951E+02 4.7667E+03 6.9041E+01 4.2883E-01
INEL. LOSS 9.3548E+03 2.1184E+07 4.6026E+03 2.8588E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 5.7523E+03 5.1835E+07 5.2697E+11 5.6263E+15 6.1774E+19 6.9137E+23
LOGENERGY 3.5477E+00 1.2836E+01 4.7241E+01 1.7640E+02 6.6667E+02 2.5449E+03
PATHLENGTH 6.2081E+02 4.8665E+05 4.2703E+08 3.9626E+11 3.7929E+14 3.7001E+17
ENERGY 5.4454E+03 5.0197E+07 5.5320E+11 6.5992E+15 8.2230E+19 1.0534E+24
LOGENERGY 3.4978E+00 1.2541E+01 4.5827E+01 1.7003E+02 6.3884E+02 2.4257E+03
PATHLENGTH 6.4719E+02 5.3129E+05 4.7564E+08 4.4692E+11 4.3421E+14 4.3289E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -294,5 +294,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 1 0 1 0 1 0 1 1 0 1 1 3 2 0 3 1 1 2 2
0.000 0.952 0.000 0.952 0.000 0.952 0.000 0.952 0.952 0.000 0.952 0.952 2.857 1.905 0.000 2.857 0.952 0.952 1.905 1.905
0 1 3 8 8 7 5 7 10 10 10 12 6 14 15 7 15 5 8 10
0.000 0.124 0.373 0.994 0.994 0.870 0.621 0.870 1.242 1.242 1.242 1.491 0.745 1.739 1.863 0.870 1.863 0.621 0.994 1.242
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.rge
+67 -67
View File
@@ -1,71 +1,71 @@
DEPTH PARTICLES
10.0000 1
30.0000 0
50.0000 1
70.0000 1
90.0000 3
110.0000 6
130.0000 1
150.0000 0
170.0000 3
190.0000 4
210.0000 0
230.0000 5
250.0000 3
270.0000 3
290.0000 6
310.0000 3
330.0000 7
350.0000 8
370.0000 3
390.0000 6
410.0000 15
430.0000 4
450.0000 15
470.0000 15
490.0000 17
510.0000 15
530.0000 18
550.0000 24
570.0000 24
590.0000 31
610.0000 29
630.0000 43
650.0000 31
670.0000 51
690.0000 63
710.0000 39
730.0000 58
750.0000 64
770.0000 65
790.0000 105
810.0000 121
830.0000 121
850.0000 127
870.0000 161
890.0000 188
910.0000 171
930.0000 235
950.0000 235
970.0000 261
990.0000 265
1010.0000 268
1030.0000 275
1050.0000 273
1070.0000 273
1090.0000 274
1110.0000 223
1130.0000 234
1150.0000 162
1170.0000 130
1190.0000 75
1210.0000 66
1230.0000 29
1250.0000 14
1270.0000 4
1290.0000 3
1310.0000 1
1330.0000 0
10.0000 5
30.0000 15
50.0000 14
70.0000 14
90.0000 18
110.0000 21
130.0000 19
150.0000 15
170.0000 36
190.0000 18
210.0000 26
230.0000 34
250.0000 33
270.0000 43
290.0000 40
310.0000 68
330.0000 60
350.0000 61
370.0000 78
390.0000 102
410.0000 91
430.0000 113
450.0000 146
470.0000 158
490.0000 163
510.0000 157
530.0000 201
550.0000 243
570.0000 241
590.0000 256
610.0000 298
630.0000 354
650.0000 384
670.0000 443
690.0000 509
710.0000 547
730.0000 623
750.0000 745
770.0000 792
790.0000 951
810.0000 1026
830.0000 1255
850.0000 1316
870.0000 1466
890.0000 1617
910.0000 1812
930.0000 1954
950.0000 2196
970.0000 2392
990.0000 2553
1010.0000 2724
1030.0000 2858
1050.0000 2931
1070.0000 2843
1090.0000 2810
1110.0000 2553
1130.0000 2124
1150.0000 1825
1170.0000 1375
1190.0000 959
1210.0000 558
1230.0000 316
1250.0000 164
1270.0000 57
1290.0000 14
1310.0000 5
1330.0000 1
1350.0000 0
1370.0000 0
1390.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E15000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
15.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.9526E+03 0.1782E+03 0.5752E+04 0.4330E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 4849
15.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.9553E+03 0.1809E+03 0.5445E+04 0.4533E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1391 48448
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 17000 450 0 15 0.5 0.0 0.0 0.0
5000 78749 78749 78749 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78749 78749 78749 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.out
+148 -147
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:15
Start: 19.Jun. 2026 20:11:47
End: 19.Jun. 2026 18:18:16
End: 19.Jun. 2026 20:12:17
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 30 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 17000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78749.00 78749.00 78749.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78749.00 78749.00 78749.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
46200 0 0 0 0 0 0 0 0
458547 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,190 +110,191 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4983 ENERGY=0.8471E+08 EV
BACKSCATTERED PARTICLES= 17 ENERGY=0.7709E+05 EV
IMPLANTED PARTICLES= 49859 ENERGY=0.8476E+09 EV
BACKSCATTERED PARTICLES= 141 ENERGY=0.9919E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 75 75
IMPLANTED PARTICLES (LAYER 1)= 804 804
IMPLANTED PARTICLES (LAYER 2)= 4908 4908
IMPLANTED PARTICLES (LAYER 2)= 49055 49055
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 585.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.071
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.363
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 584.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.076
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.383
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.1143E+03 3.8909E+04 -1.4722E+00 6.0884E+00 1.9725E+02 2.7943E+00 1.2433E+03 5.7287E-02
SPREAD 4.1158E+02 4.4931E+04 5.1771E-01 2.7608E+00 2.1197E+02 3.0028E+00 8.4462E+02 2.5306E-02
PATHLENGTH 1.4907E+03 2.0100E+03 -2.1924E-01 3.5130E+00 4.4833E+01 6.3512E-01 4.5139E+01 4.8529E-02
ELASTIC LOSS 2.9599E+01 4.1467E+02 2.0363E+01 4.0866E-03
INEL. LOSS 1.6986E+04 2.0641E+05 4.5433E+02 9.1176E-02
PENETRATION 1.1075E+03 3.9695E+04 -1.4908E+00 6.2444E+00 1.9924E+02 8.9227E-01 4.0711E+02 1.7984E-02
SPREAD 4.1365E+02 4.5662E+04 5.2185E-01 2.8054E+00 2.1369E+02 9.5698E-01 2.7477E+02 8.2378E-03
PATHLENGTH 1.4892E+03 1.9690E+03 -2.2231E-01 3.5519E+00 4.4373E+01 1.9872E-01 1.4087E+01 1.4933E-02
ELASTIC LOSS 3.0170E+01 4.3672E+02 2.0898E+01 4.1914E-04
INEL. LOSS 1.6973E+04 2.0372E+05 4.5135E+02 9.0525E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.1398E-02 9.7934E-01 1.3964E+02 3.4698E+04 9.8962E-01 5.7845E-04 1.0663E-01 1.5262E+01
WEAK EL.LOSS 3.2677E-04 1.8045E-06 7.0632E+00 6.9598E+01 1.3433E-03 7.8519E-07 8.7359E-09 3.7337E-02
INELAST.LOSS 2.8990E+01 8.9934E+01 -1.6382E+00 4.4249E+00 9.4834E+00 5.5432E-03 9.7284E-02 1.6114E-03
SUBTHR.LOSS 4.3723E-02 2.1075E-01 3.1019E+01 1.3136E+03 4.5908E-01 2.6835E-04 4.4634E-03 2.7706E-01
ELAST.LOSS 5.2118E-02 9.2550E-01 1.2007E+02 2.6519E+04 9.6203E-01 1.7790E-04 2.7871E-02 4.5549E+00
WEAK EL.LOSS 3.2792E-04 1.8198E-06 7.0896E+00 7.0234E+01 1.3490E-03 2.4947E-07 2.8002E-09 1.1685E-02
INELAST.LOSS 2.8987E+01 9.0076E+01 -1.6354E+00 4.4149E+00 9.4908E+00 1.7551E-03 3.0782E-02 5.0908E-04
SUBTHR.LOSS 4.4284E-02 2.2133E-01 3.0680E+01 1.2692E+03 4.7046E-01 8.7005E-05 1.4577E-03 8.3656E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.1143E+03 1.2807E+06 1.5025E+09 1.7907E+12 2.1614E+15 2.6365E+18
PENETRATION 1.1075E+03 1.2663E+06 1.4786E+09 1.7544E+12 2.1087E+15 2.5626E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4649E+06 1.0620E+03 1.0610E+03 3.4971E+02 7.1130E+02 2.6143E+02 6
20.- 40. 0 0.0000E+00 0 1.4746E+06 1.1919E+03 1.1909E+03 4.2204E+02 7.6889E+02 2.9441E+02 5
40.- 60. 2 0.4014E-03 0 1.4806E+06 1.2264E+03 1.2247E+03 4.4172E+02 7.8300E+02 3.3114E+02 8
60.- 80. 0 0.0000E+00 0 1.4911E+06 8.1722E+02 8.1606E+02 3.9017E+01 7.7704E+02 3.0414E+01 1
80.- 100. 2 0.4014E-03 0 1.5021E+06 1.2788E+03 1.2768E+03 4.1730E+02 8.5946E+02 3.0877E+02 8
100.- 120. 1 0.2007E-03 0 1.5144E+06 1.3999E+03 1.3984E+03 5.3558E+02 8.6284E+02 3.5996E+02 3
120.- 140. 4 0.8027E-03 0 1.5287E+06 1.7103E+03 1.7077E+03 8.8013E+02 8.2754E+02 5.9114E+02 7
140.- 160. 1 0.2007E-03 0 1.5401E+06 1.7449E+03 1.7431E+03 6.6772E+02 1.0753E+03 4.3378E+02 3
160.- 180. 1 0.2007E-03 0 1.5485E+06 1.2230E+03 1.2214E+03 3.8570E+02 8.3566E+02 2.8410E+02 6
180.- 200. 2 0.4014E-03 0 1.5590E+06 1.3603E+03 1.3583E+03 4.2413E+02 9.3415E+02 3.1103E+02 6
200.- 220. 1 0.2007E-03 0 1.5842E+06 1.5174E+03 1.5155E+03 6.3098E+02 8.8447E+02 4.4416E+02 6
220.- 240. 3 0.6020E-03 0 1.5871E+06 1.4176E+03 1.4147E+03 4.6876E+02 9.4592E+02 3.4375E+02 6
240.- 260. 3 0.6020E-03 0 1.5968E+06 1.5869E+03 1.5847E+03 4.9194E+02 1.0927E+03 3.4769E+02 5
260.- 280. 1 0.2007E-03 0 1.6040E+06 1.3097E+03 1.3077E+03 2.7302E+02 1.0347E+03 2.0801E+02 5
280.- 300. 3 0.6020E-03 0 1.6270E+06 1.5860E+03 1.5836E+03 5.6848E+02 1.0151E+03 3.9488E+02 6
300.- 320. 3 0.6020E-03 0 1.6371E+06 1.4333E+03 1.4301E+03 5.0033E+02 9.2975E+02 3.7484E+02 8
320.- 340. 3 0.6020E-03 0 1.6404E+06 1.6064E+03 1.6036E+03 6.4668E+02 9.5696E+02 4.6282E+02 8
340.- 360. 2 0.4014E-03 0 1.6573E+06 1.3710E+03 1.3683E+03 2.8635E+02 1.0820E+03 2.1346E+02 5
360.- 380. 4 0.8027E-03 0 1.6625E+06 1.9642E+03 1.9606E+03 8.3771E+02 1.1229E+03 6.1233E+02 10
380.- 400. 4 0.8027E-03 0 1.6749E+06 1.9694E+03 1.9657E+03 5.9277E+02 1.3729E+03 4.4380E+02 10
400.- 420. 10 0.2007E-02 0 1.6856E+06 1.6152E+03 1.6085E+03 4.1224E+02 1.1962E+03 3.0267E+02 6
420.- 440. 5 0.1003E-02 0 1.6874E+06 1.7613E+03 1.7575E+03 4.6952E+02 1.2880E+03 3.3214E+02 6
440.- 460. 3 0.6020E-03 0 1.7039E+06 2.1221E+03 2.1184E+03 7.3565E+02 1.3827E+03 5.2033E+02 8
460.- 480. 5 0.1003E-02 0 1.7117E+06 1.8901E+03 1.8857E+03 6.5576E+02 1.2300E+03 4.7732E+02 10
480.- 500. 12 0.2408E-02 0 1.7280E+06 1.7620E+03 1.7547E+03 4.4710E+02 1.3076E+03 3.3099E+02 8
500.- 520. 9 0.1806E-02 0 1.4010E+06 1.6156E+03 1.6129E+03 3.3670E+02 1.2762E+03 2.4979E+02 5
520.- 540. 7 0.1405E-02 0 1.3828E+06 1.4942E+03 1.4924E+03 4.9034E+02 1.0021E+03 3.6136E+02 6
540.- 560. 8 0.1605E-02 0 1.3984E+06 1.7571E+03 1.7551E+03 4.2115E+02 1.3339E+03 3.1291E+02 6
560.- 580. 9 0.1806E-02 0 1.4212E+06 1.3953E+03 1.3931E+03 2.0192E+02 1.1912E+03 1.5484E+02 5
580.- 600. 12 0.2408E-02 0 1.4153E+06 1.5676E+03 1.5652E+03 1.9107E+02 1.3741E+03 1.4459E+02 4
600.- 620. 6 0.1204E-02 0 1.4454E+06 1.7641E+03 1.7619E+03 5.0368E+02 1.2582E+03 3.7826E+02 8
620.- 640. 14 0.2810E-02 0 1.4515E+06 2.0293E+03 2.0260E+03 6.2528E+02 1.4007E+03 4.7103E+02 11
640.- 660. 18 0.3612E-02 0 1.4589E+06 2.2453E+03 2.2419E+03 5.8563E+02 1.6562E+03 4.3910E+02 9
660.- 680. 13 0.2609E-02 0 1.4598E+06 2.0294E+03 2.0256E+03 3.3574E+02 1.6899E+03 2.5354E+02 6
680.- 700. 27 0.5418E-02 0 1.4576E+06 1.9042E+03 1.8994E+03 3.5795E+02 1.5415E+03 2.7145E+02 7
700.- 720. 19 0.3813E-02 0 1.4757E+06 2.2506E+03 2.2458E+03 4.2640E+02 1.8194E+03 3.2030E+02 7
720.- 740. 28 0.5619E-02 0 1.4638E+06 2.6109E+03 2.6048E+03 7.3196E+02 1.8729E+03 5.5216E+02 13
740.- 760. 39 0.7827E-02 0 1.4639E+06 2.1374E+03 2.1305E+03 3.1706E+02 1.8134E+03 2.4196E+02 7
760.- 780. 51 0.1023E-01 0 1.4514E+06 2.2746E+03 2.2652E+03 2.2278E+02 2.0424E+03 1.7046E+02 5
780.- 800. 38 0.7626E-02 0 1.4525E+06 2.8306E+03 2.8224E+03 6.7811E+02 2.1443E+03 5.1607E+02 14
800.- 820. 45 0.9031E-02 0 1.4574E+06 2.6451E+03 2.6358E+03 1.8395E+02 2.4518E+03 1.4018E+02 4
820.- 840. 54 0.1084E-01 0 1.4372E+06 3.0299E+03 3.0195E+03 5.5774E+02 2.4617E+03 4.2081E+02 10
840.- 860. 54 0.1084E-01 0 1.4174E+06 2.5866E+03 2.5756E+03 3.3021E+02 2.2454E+03 2.5332E+02 8
860.- 880. 67 0.1345E-01 0 1.3898E+06 3.0682E+03 3.0561E+03 4.6101E+02 2.5951E+03 3.5152E+02 10
880.- 900. 63 0.1264E-01 0 1.3653E+06 3.0828E+03 3.0692E+03 2.6421E+02 2.8050E+03 2.0206E+02 6
900.- 920. 76 0.1525E-01 0 1.3331E+06 3.1043E+03 3.0908E+03 4.0691E+02 2.6839E+03 3.1375E+02 11
920.- 940. 81 0.1626E-01 0 1.3058E+06 3.5192E+03 3.5028E+03 4.2737E+02 3.0754E+03 3.2889E+02 11
940.- 960. 84 0.1686E-01 0 1.2639E+06 3.1608E+03 3.1445E+03 1.0819E+02 3.0363E+03 8.3558E+01 3
960.- 980. 109 0.2187E-01 0 1.2201E+06 3.5391E+03 3.5199E+03 3.2118E+02 3.1987E+03 2.4812E+02 9
980.- 1000. 96 0.1927E-01 0 1.1527E+06 3.2481E+03 3.2283E+03 1.0486E+02 3.1235E+03 8.1097E+01 3
1000.- 1020. 114 0.2288E-01 0 1.1049E+06 3.3601E+03 3.3387E+03 7.3250E+01 3.2654E+03 5.6549E+01 2
1020.- 1040. 129 0.2589E-01 0 1.0657E+06 3.5208E+03 3.4964E+03 1.5173E+02 3.3447E+03 1.1693E+02 4
1040.- 1060. 151 0.3030E-01 0 9.9347E+05 3.7055E+03 3.6775E+03 8.2919E+01 3.5946E+03 6.3659E+01 2
1060.- 1080. 152 0.3050E-01 0 9.3271E+05 3.2403E+03 3.2114E+03 0.0000E+00 3.2114E+03 0.0000E+00 0
1080.- 1100. 172 0.3452E-01 0 8.8717E+05 3.8055E+03 3.7740E+03 0.0000E+00 3.7740E+03 0.0000E+00 0
1100.- 1120. 200 0.4014E-01 0 8.1008E+05 3.8372E+03 3.8006E+03 0.0000E+00 3.8006E+03 0.0000E+00 0
1120.- 1140. 221 0.4435E-01 0 7.4367E+05 3.9883E+03 3.9476E+03 0.0000E+00 3.9476E+03 0.0000E+00 0
1140.- 1160. 222 0.4455E-01 0 6.7865E+05 3.7052E+03 3.6649E+03 0.0000E+00 3.6649E+03 0.0000E+00 0
1160.- 1180. 253 0.5077E-01 0 6.0950E+05 3.9184E+03 3.8725E+03 0.0000E+00 3.8725E+03 0.0000E+00 0
1180.- 1200. 275 0.5519E-01 0 5.2239E+05 3.4174E+03 3.3681E+03 0.0000E+00 3.3681E+03 0.0000E+00 0
1200.- 1220. 270 0.5418E-01 0 4.3319E+05 3.3548E+03 3.3069E+03 0.0000E+00 3.3069E+03 0.0000E+00 0
1220.- 1240. 296 0.5940E-01 0 3.5587E+05 3.0885E+03 3.0366E+03 0.0000E+00 3.0366E+03 0.0000E+00 0
1240.- 1260. 310 0.6221E-01 0 2.7102E+05 2.5764E+03 2.5250E+03 0.0000E+00 2.5250E+03 0.0000E+00 0
1260.- 1280. 276 0.5539E-01 1 2.0772E+05 2.0789E+03 2.0337E+03 0.0000E+00 2.0337E+03 0.0000E+00 0
1280.- 1300. 220 0.4415E-01 1 1.5369E+05 1.6561E+03 1.6179E+03 0.0000E+00 1.6179E+03 0.0000E+00 0
1300.- 1320. 192 0.3853E-01 5 1.0425E+05 1.2847E+03 1.2520E+03 0.0000E+00 1.2520E+03 0.0000E+00 0
1320.- 1340. 175 0.3512E-01 10 6.7658E+04 8.7310E+02 8.4710E+02 0.0000E+00 8.4710E+02 0.0000E+00 0
1340.- 1360. 95 0.1906E-01 10 3.7125E+04 5.3630E+02 5.2045E+02 0.0000E+00 5.2045E+02 0.0000E+00 0
1360.- 1380. 73 0.1465E-01 32 2.1014E+04 3.0381E+02 2.9228E+02 0.0000E+00 2.9228E+02 0.0000E+00 0
1380.- 1400. 41 0.8228E-02 55 1.0672E+04 1.8145E+02 1.7524E+02 0.0000E+00 1.7524E+02 0.0000E+00 0
1400.- 1420. 26 0.5218E-02 158 4.3916E+03 8.3653E+01 7.9886E+01 0.0000E+00 7.9886E+01 0.0000E+00 0
1420.- 1440. 13 0.2609E-02 324 2.0931E+03 4.4305E+01 4.2362E+01 0.0000E+00 4.2362E+01 0.0000E+00 0
1440.- 1460. 5 0.1003E-02 607 5.9291E+02 1.5252E+01 1.4441E+01 0.0000E+00 1.4441E+01 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 779 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 883 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 859 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 606 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 353 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 192 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 86 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 17 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 4 0.8023E-04 0 1.4603E+07 1.3017E+04 1.3006E+04 5.4232E+03 7.5826E+03 3.7638E+03 56
20.- 40. 15 0.3008E-03 0 1.4721E+07 1.2473E+04 1.2457E+04 4.7169E+03 7.7396E+03 3.4022E+03 56
40.- 60. 12 0.2407E-03 0 1.4840E+07 1.3727E+04 1.3712E+04 5.6399E+03 8.0720E+03 4.0144E+03 57
60.- 80. 10 0.2006E-03 0 1.4950E+07 1.2949E+04 1.2933E+04 4.5422E+03 8.3909E+03 3.2756E+03 67
80.- 100. 17 0.3410E-03 0 1.5042E+07 1.2344E+04 1.2326E+04 3.8440E+03 8.4823E+03 2.7920E+03 51
100.- 120. 16 0.3209E-03 0 1.5158E+07 1.3614E+04 1.3595E+04 4.9962E+03 8.5985E+03 3.5506E+03 58
120.- 140. 17 0.3410E-03 0 1.5269E+07 1.3303E+04 1.3283E+04 4.5962E+03 8.6872E+03 3.2840E+03 59
140.- 160. 12 0.2407E-03 0 1.5391E+07 1.3050E+04 1.3032E+04 3.9505E+03 9.0813E+03 2.8935E+03 63
160.- 180. 17 0.3410E-03 0 1.5517E+07 1.4524E+04 1.4505E+04 5.4374E+03 9.0672E+03 3.9267E+03 69
180.- 200. 17 0.3410E-03 0 1.5656E+07 1.3420E+04 1.3398E+04 4.2035E+03 9.1948E+03 3.0304E+03 52
200.- 220. 22 0.4412E-03 0 1.5767E+07 1.4614E+04 1.4591E+04 5.0443E+03 9.5467E+03 3.6445E+03 61
220.- 240. 26 0.5215E-03 0 1.5882E+07 1.4489E+04 1.4465E+04 4.6666E+03 9.7981E+03 3.3687E+03 62
240.- 260. 19 0.3811E-03 0 1.6038E+07 1.4314E+04 1.4293E+04 4.6212E+03 9.6718E+03 3.3914E+03 63
260.- 280. 21 0.4212E-03 0 1.6114E+07 1.3485E+04 1.3460E+04 3.0560E+03 1.0404E+04 2.2562E+03 48
280.- 300. 21 0.4212E-03 0 1.6240E+07 1.6396E+04 1.6373E+04 5.4949E+03 1.0878E+04 4.0105E+03 78
300.- 320. 35 0.7020E-03 0 1.6361E+07 1.6520E+04 1.6489E+04 4.8925E+03 1.1596E+04 3.5899E+03 69
320.- 340. 45 0.9025E-03 0 1.6488E+07 1.7207E+04 1.7171E+04 5.9982E+03 1.1173E+04 4.3907E+03 83
340.- 360. 44 0.8825E-03 0 1.6612E+07 1.8283E+04 1.8245E+04 6.0480E+03 1.2197E+04 4.3134E+03 76
360.- 380. 53 0.1063E-02 0 1.6707E+07 1.8241E+04 1.8200E+04 6.4175E+03 1.1782E+04 4.6477E+03 89
380.- 400. 62 0.1244E-02 0 1.6797E+07 1.8098E+04 1.8054E+04 5.8785E+03 1.2175E+04 4.2642E+03 82
400.- 420. 54 0.1083E-02 0 1.6904E+07 1.6720E+04 1.6674E+04 4.0963E+03 1.2578E+04 3.0391E+03 71
420.- 440. 60 0.1203E-02 0 1.6978E+07 1.8395E+04 1.8348E+04 4.9078E+03 1.3440E+04 3.6158E+03 73
440.- 460. 48 0.9627E-03 0 1.7087E+07 1.9255E+04 1.9210E+04 5.8625E+03 1.3347E+04 4.2663E+03 82
460.- 480. 69 0.1384E-02 0 1.7160E+07 1.9821E+04 1.9768E+04 5.4030E+03 1.4365E+04 3.9239E+03 72
480.- 500. 88 0.1765E-02 0 1.7249E+07 2.1633E+04 2.1571E+04 6.8050E+03 1.4766E+04 4.9708E+03 96
500.- 520. 83 0.1665E-02 0 1.4105E+07 1.6978E+04 1.6956E+04 4.7365E+03 1.2219E+04 3.5388E+03 75
520.- 540. 102 0.2046E-02 0 1.3913E+07 1.6132E+04 1.6109E+04 3.8314E+03 1.2278E+04 2.8716E+03 64
540.- 560. 125 0.2507E-02 0 1.4074E+07 1.6390E+04 1.6363E+04 3.7448E+03 1.2618E+04 2.8110E+03 64
560.- 580. 112 0.2246E-02 0 1.4261E+07 1.7430E+04 1.7403E+04 4.3672E+03 1.3036E+04 3.2958E+03 81
580.- 600. 153 0.3069E-02 0 1.4324E+07 1.8575E+04 1.8543E+04 4.9371E+03 1.3606E+04 3.7132E+03 86
600.- 620. 129 0.2587E-02 0 1.4438E+07 1.8814E+04 1.8783E+04 4.6581E+03 1.4125E+04 3.5232E+03 89
620.- 640. 157 0.3149E-02 0 1.4518E+07 2.0411E+04 2.0377E+04 5.5216E+03 1.4855E+04 4.1468E+03 93
640.- 660. 160 0.3209E-02 0 1.4584E+07 1.9088E+04 1.9051E+04 4.1953E+03 1.4856E+04 3.1761E+03 80
660.- 680. 178 0.3570E-02 0 1.4648E+07 2.0168E+04 2.0128E+04 3.8260E+03 1.6302E+04 2.8976E+03 74
680.- 700. 235 0.4713E-02 0 1.4594E+07 2.0545E+04 2.0497E+04 4.1792E+03 1.6318E+04 3.1580E+03 77
700.- 720. 248 0.4974E-02 0 1.4649E+07 2.2105E+04 2.2053E+04 4.8597E+03 1.7193E+04 3.6756E+03 91
720.- 740. 270 0.5415E-02 0 1.4635E+07 2.2560E+04 2.2505E+04 4.3655E+03 1.8139E+04 3.3138E+03 89
740.- 760. 324 0.6498E-02 0 1.4583E+07 2.2732E+04 2.2666E+04 3.9421E+03 1.8724E+04 2.9914E+03 79
760.- 780. 348 0.6980E-02 0 1.4635E+07 2.5489E+04 2.5418E+04 5.2973E+03 2.0121E+04 4.0330E+03 112
780.- 800. 391 0.7842E-02 0 1.4519E+07 2.5405E+04 2.5327E+04 4.4638E+03 2.0863E+04 3.4003E+03 95
800.- 820. 400 0.8023E-02 0 1.4404E+07 2.6494E+04 2.6411E+04 3.9611E+03 2.2450E+04 3.0124E+03 82
820.- 840. 483 0.9687E-02 0 1.4253E+07 2.7495E+04 2.7402E+04 3.9621E+03 2.3440E+04 3.0166E+03 84
840.- 860. 501 0.1005E-01 0 1.4047E+07 2.8164E+04 2.8063E+04 3.6433E+03 2.4420E+04 2.7804E+03 81
860.- 880. 610 0.1223E-01 0 1.3890E+07 2.9906E+04 2.9787E+04 3.3045E+03 2.6483E+04 2.5346E+03 80
880.- 900. 676 0.1356E-01 0 1.3691E+07 3.1018E+04 3.0887E+04 3.3269E+03 2.7560E+04 2.5435E+03 76
900.- 920. 719 0.1442E-01 0 1.3317E+07 3.1357E+04 3.1214E+04 3.4442E+03 2.7770E+04 2.6405E+03 83
920.- 940. 870 0.1745E-01 0 1.3029E+07 3.3142E+04 3.2977E+04 2.9719E+03 3.0005E+04 2.2799E+03 72
940.- 960. 914 0.1833E-01 0 1.2669E+07 3.3075E+04 3.2899E+04 1.9174E+03 3.0982E+04 1.4746E+03 49
960.- 980. 1071 0.2148E-01 0 1.2248E+07 3.5468E+04 3.5267E+04 2.0712E+03 3.3196E+04 1.5946E+03 54
980.- 1000. 1152 0.2311E-01 0 1.1808E+07 3.6094E+04 3.5872E+04 1.9258E+03 3.3947E+04 1.4806E+03 49
1000.- 1020. 1310 0.2627E-01 0 1.1305E+07 3.7864E+04 3.7623E+04 1.9279E+03 3.5696E+04 1.4880E+03 53
1020.- 1040. 1473 0.2954E-01 0 1.0743E+07 3.8162E+04 3.7888E+04 1.1704E+03 3.6718E+04 9.0329E+02 32
1040.- 1060. 1536 0.3081E-01 0 1.0158E+07 3.9174E+04 3.8883E+04 9.7134E+02 3.7912E+04 7.5137E+02 28
1060.- 1080. 1724 0.3458E-01 0 9.4898E+06 3.9205E+04 3.8884E+04 6.2400E+02 3.8260E+04 4.8279E+02 18
1080.- 1100. 1905 0.3821E-01 0 8.7954E+06 4.0019E+04 3.9665E+04 1.6780E+02 3.9497E+04 1.3000E+02 5
1100.- 1120. 2139 0.4290E-01 0 8.0381E+06 3.9811E+04 3.9425E+04 1.9313E+02 3.9232E+04 1.4992E+02 6
1120.- 1140. 2257 0.4527E-01 0 7.2514E+06 3.8496E+04 3.8080E+04 6.6826E+01 3.8013E+04 5.1794E+01 2
1140.- 1160. 2445 0.4904E-01 0 6.4663E+06 3.7794E+04 3.7356E+04 9.3054E+01 3.7263E+04 7.2349E+01 3
1160.- 1180. 2555 0.5124E-01 0 5.6756E+06 3.6740E+04 3.6277E+04 0.0000E+00 3.6277E+04 0.0000E+00 0
1180.- 1200. 2746 0.5508E-01 0 4.8825E+06 3.4417E+04 3.3937E+04 3.2357E+01 3.3904E+04 2.5113E+01 1
1200.- 1220. 2744 0.5504E-01 0 4.0464E+06 3.1028E+04 3.0543E+04 0.0000E+00 3.0543E+04 0.0000E+00 0
1220.- 1240. 2694 0.5403E-01 0 3.2547E+06 2.7690E+04 2.7223E+04 0.0000E+00 2.7223E+04 0.0000E+00 0
1240.- 1260. 2650 0.5315E-01 1 2.5717E+06 2.3876E+04 2.3421E+04 0.0000E+00 2.3421E+04 0.0000E+00 0
1260.- 1280. 2488 0.4990E-01 0 1.9466E+06 1.9521E+04 1.9101E+04 0.0000E+00 1.9101E+04 0.0000E+00 0
1280.- 1300. 2157 0.4326E-01 13 1.3638E+06 1.5177E+04 1.4818E+04 0.0000E+00 1.4818E+04 0.0000E+00 0
1300.- 1320. 1752 0.3514E-01 37 9.2160E+05 1.0891E+04 1.0600E+04 0.0000E+00 1.0600E+04 0.0000E+00 0
1320.- 1340. 1447 0.2902E-01 108 6.0006E+05 7.6798E+03 7.4450E+03 0.0000E+00 7.4450E+03 0.0000E+00 0
1340.- 1360. 1087 0.2180E-01 177 3.5913E+05 5.1238E+03 4.9555E+03 0.0000E+00 4.9555E+03 0.0000E+00 0
1360.- 1380. 670 0.1344E-01 278 1.9883E+05 3.0308E+03 2.9253E+03 0.0000E+00 2.9253E+03 0.0000E+00 0
1380.- 1400. 437 0.8765E-02 691 1.0047E+05 1.5866E+03 1.5205E+03 0.0000E+00 1.5205E+03 0.0000E+00 0
1400.- 1420. 224 0.4493E-02 1532 4.6042E+04 7.8969E+02 7.5650E+02 0.0000E+00 7.5650E+02 0.0000E+00 0
1420.- 1440. 129 0.2587E-02 3388 2.0970E+04 3.8333E+02 3.6549E+02 0.0000E+00 3.6549E+02 0.0000E+00 0
1440.- 1460. 47 0.9427E-03 5906 7.5162E+03 1.4222E+02 1.3512E+02 0.0000E+00 1.3512E+02 0.0000E+00 0
1460.- 1480. 15 0.3008E-03 8224 2.7816E+03 5.5665E+01 5.3409E+01 0.0000E+00 5.3409E+01 0.0000E+00 0
1480.- 1500. 8 0.1605E-03 9165 7.7377E+02 1.3752E+01 1.2800E+01 0.0000E+00 1.2800E+01 0.0000E+00 0
1500.- 1520. 4 0.8023E-04 8363 2.7226E+02 5.6950E+00 5.2495E+00 0.0000E+00 5.2495E+00 0.0000E+00 0
1520.- 1540. 1 0.2006E-04 6011 9.5739E+01 1.9512E+00 1.7901E+00 0.0000E+00 1.7901E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 3447 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 1629 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 623 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 199 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 59 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1680.- SUT 0 0.0000E+00
1680.- 1700. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- SUT 0 0.0000E+00
4983 1.0000E+00 4983 8.4852E+07 1.5139E+05 1.5044E+05 2.2480E+04 1.2796E+05 1.6514E+04 356
49859 1.0000E+00 49859 8.4762E+08 1.5336E+06 1.5240E+06 2.2924E+05 1.2948E+06 1.6959E+05 3800
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.8876E+05 5.2636E+02 1.9418E+02 3.3218E+02 9.7610E+05 5.3465E+02 1.5553E+02 3.7912E+02 3 3
20.- 40. 4.9428E+05 4.0805E+02 3.5868E+01 3.7218E+02 9.8036E+05 7.8288E+02 3.8617E+02 3.9671E+02 1 4
40.- 60. 4.9433E+05 6.1735E+02 2.7221E+02 3.4515E+02 9.8631E+05 6.0737E+02 1.6952E+02 4.3786E+02 6 2
60.- 80. 4.9410E+05 4.0496E+02 3.9017E+01 3.6595E+02 9.9697E+05 4.1110E+02 0.0000E+00 4.1110E+02 1 0
80.- 100. 5.0388E+05 3.8143E+02 3.9050E+01 3.4238E+02 9.9819E+05 8.9533E+02 3.7825E+02 5.1708E+02 1 7
100.- 120. 5.0817E+05 5.5610E+02 1.9805E+02 3.5805E+02 1.0062E+06 8.4232E+02 3.3754E+02 5.0479E+02 2 1
120.- 140. 5.1197E+05 4.4519E+02 1.2233E+02 3.2285E+02 1.0167E+06 1.2625E+03 7.5780E+02 5.0468E+02 1 6
140.- 160. 5.1291E+05 4.3631E+02 0.0000E+00 4.3631E+02 1.0271E+06 1.3068E+03 6.6772E+02 6.3903E+02 0 3
160.- 180. 5.1187E+05 4.9868E+02 1.2839E+02 3.7029E+02 1.0367E+06 7.2268E+02 2.5731E+02 4.6537E+02 3 3
180.- 200. 5.1726E+05 5.0486E+02 8.3315E+01 4.2155E+02 1.0417E+06 8.5342E+02 3.4082E+02 5.1260E+02 1 5
200.- 220. 5.2971E+05 5.4384E+02 1.6402E+02 3.7983E+02 1.0545E+06 9.7161E+02 4.6696E+02 5.0465E+02 2 4
220.- 240. 5.3356E+05 8.0340E+02 3.4028E+02 4.6312E+02 1.0535E+06 6.1128E+02 1.2848E+02 4.8280E+02 3 3
240.- 260. 5.3834E+05 5.2371E+02 1.0241E+02 4.2130E+02 1.0585E+06 1.0610E+03 3.8953E+02 6.7144E+02 2 3
260.- 280. 5.3559E+05 6.3636E+02 2.2554E+02 4.1082E+02 1.0684E+06 6.7132E+02 4.7480E+01 6.2384E+02 4 1
280.- 300. 5.4681E+05 5.4370E+02 1.0528E+02 4.3842E+02 1.0802E+06 1.0399E+03 4.6320E+02 5.7667E+02 2 4
300.- 320. 5.5424E+05 6.8979E+02 3.2336E+02 3.6643E+02 1.0829E+06 7.4029E+02 1.7696E+02 5.6332E+02 4 4
320.- 340. 5.4619E+05 5.3354E+02 1.7676E+02 3.5678E+02 1.0942E+06 1.0701E+03 4.6991E+02 6.0018E+02 4 4
340.- 360. 5.5046E+05 4.9464E+02 1.2451E+02 3.7013E+02 1.1068E+06 8.7366E+02 1.6184E+02 7.1183E+02 3 2
360.- 380. 5.5198E+05 9.9559E+02 5.4169E+02 4.5390E+02 1.1105E+06 9.6499E+02 2.9602E+02 6.6897E+02 7 3
380.- 400. 5.5657E+05 8.4173E+02 3.2443E+02 5.1730E+02 1.1183E+06 1.1239E+03 2.6834E+02 8.5561E+02 5 5
400.- 420. 5.5788E+05 6.6697E+02 1.5468E+02 5.1229E+02 1.1278E+06 9.4151E+02 2.5756E+02 6.8395E+02 1 5
420.- 440. 5.6254E+05 5.1850E+02 5.6296E+01 4.6220E+02 1.1249E+06 1.2390E+03 4.1322E+02 8.2580E+02 1 5
440.- 460. 5.6703E+05 6.9299E+02 9.0885E+01 6.0211E+02 1.1369E+06 1.4254E+03 6.4476E+02 7.8061E+02 1 7
460.- 480. 5.7419E+05 7.1182E+02 2.3098E+02 4.8084E+02 1.1375E+06 1.1739E+03 4.2478E+02 7.4912E+02 3 7
480.- 500. 5.7612E+05 6.5060E+02 1.3133E+02 5.1927E+02 1.1503E+06 1.1004E+03 3.1577E+02 7.8459E+02 3 5
500.- 520. 6.2002E+04 6.1303E+01 0.0000E+00 6.1303E+01 1.1663E+05 1.4888E+02 3.7063E+01 1.1181E+02 0 1
0.- 20. 4.8506E+06 4.5986E+03 1.4555E+03 3.1430E+03 9.7525E+06 8.4072E+03 3.9677E+03 4.4395E+03 23 33
20.- 40. 4.9029E+06 5.3392E+03 2.0820E+03 3.2572E+03 9.8184E+06 7.1174E+03 2.6349E+03 4.4825E+03 24 32
40.- 60. 4.9411E+06 5.4549E+03 2.1689E+03 3.2860E+03 9.8993E+06 8.2571E+03 3.4710E+03 4.7861E+03 21 36
60.- 80. 4.9714E+06 5.4133E+03 1.6743E+03 3.7390E+03 9.9784E+06 7.5198E+03 2.8679E+03 4.6519E+03 31 36
80.- 100. 5.0192E+06 5.1868E+03 1.6431E+03 3.5437E+03 1.0023E+07 7.1395E+03 2.2009E+03 4.9386E+03 20 31
100.- 120. 5.0526E+06 5.2031E+03 1.7509E+03 3.4522E+03 1.0106E+07 8.3916E+03 3.2453E+03 5.1463E+03 21 37
120.- 140. 5.0835E+06 5.4262E+03 1.6476E+03 3.7786E+03 1.0185E+07 7.8572E+03 2.9486E+03 4.9086E+03 22 37
140.- 160. 5.1343E+06 4.9204E+03 1.1117E+03 3.8088E+03 1.0257E+07 8.1113E+03 2.8388E+03 5.2725E+03 17 46
160.- 180. 5.1868E+06 6.0192E+03 2.1954E+03 3.8238E+03 1.0330E+07 8.4854E+03 3.2420E+03 5.2434E+03 28 41
180.- 200. 5.2290E+06 5.5651E+03 1.9568E+03 3.6083E+03 1.0427E+07 7.8333E+03 2.2467E+03 5.5866E+03 25 27
200.- 220. 5.2587E+06 6.3034E+03 2.1934E+03 4.1100E+03 1.0508E+07 8.2876E+03 2.8509E+03 5.4367E+03 25 36
220.- 240. 5.2939E+06 5.8300E+03 1.7949E+03 4.0350E+03 1.0588E+07 8.6348E+03 2.8717E+03 5.7631E+03 28 34
240.- 260. 5.3383E+06 6.5414E+03 2.6261E+03 3.9154E+03 1.0699E+07 7.7516E+03 1.9952E+03 5.7564E+03 33 30
260.- 280. 5.3717E+06 5.5153E+03 1.3067E+03 4.2086E+03 1.0742E+07 7.9445E+03 1.7493E+03 6.1952E+03 21 27
280.- 300. 5.3957E+06 7.0946E+03 2.4366E+03 4.6580E+03 1.0845E+07 9.2785E+03 3.0583E+03 6.2202E+03 42 36
300.- 320. 5.4459E+06 7.3597E+03 2.2785E+03 5.0812E+03 1.0915E+07 9.1292E+03 2.6141E+03 6.5151E+03 32 37
320.- 340. 5.4815E+06 7.6379E+03 2.7068E+03 4.9311E+03 1.1007E+07 9.5335E+03 3.2915E+03 6.2421E+03 34 49
340.- 360. 5.5552E+06 7.0043E+03 1.7758E+03 5.2285E+03 1.1057E+07 1.1240E+04 4.2723E+03 6.9681E+03 31 45
360.- 380. 5.5431E+06 6.7639E+03 2.1335E+03 4.6305E+03 1.1163E+07 1.1436E+04 4.2840E+03 7.1520E+03 39 50
380.- 400. 5.6041E+06 6.7897E+03 1.8976E+03 4.8921E+03 1.1193E+07 1.1264E+04 3.9809E+03 7.2830E+03 29 53
400.- 420. 5.6152E+06 6.6080E+03 1.5345E+03 5.0735E+03 1.1289E+07 1.0066E+04 2.5617E+03 7.5045E+03 27 44
420.- 440. 5.6565E+06 8.1238E+03 2.6070E+03 5.5167E+03 1.1321E+07 1.0224E+04 2.3008E+03 7.9231E+03 40 33
440.- 460. 5.7034E+06 7.4943E+03 2.0225E+03 5.4718E+03 1.1384E+07 1.1715E+04 3.8399E+03 7.8755E+03 34 48
460.- 480. 5.7167E+06 7.9118E+03 1.8941E+03 6.0177E+03 1.1444E+07 1.1856E+04 3.5089E+03 8.3469E+03 28 44
480.- 500. 5.7500E+06 8.5067E+03 2.6631E+03 5.8436E+03 1.1482E+07 1.3020E+04 4.1420E+03 8.8781E+03 40 56
500.- 520. 5.9231E+05 7.5523E+02 2.1030E+02 5.4493E+02 1.2008E+06 1.1196E+03 1.3618E+02 9.8340E+02 5 3
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3381E+07 1.4688E+04 4.2049E+03 1.0483E+04 2.6688E+07 2.3376E+04 8.4125E+03 1.4964E+04 64 97
1.3369E+08 1.5937E+05 4.9768E+04 1.0960E+05 2.6761E+08 2.3162E+05 7.7121E+04 1.5450E+05 720 981
DAMAGE IN LAYER 1 : 3.7857E+04
DAMAGE IN LAYER 1 : 3.8916E+05
DAMAGE IN LAYER 2 : 1.1258E+05
DAMAGE IN LAYER 2 : 1.1349E+06
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.4000E-03 ENERGY REFL.COEF.= 9.0690E-04 REL.MEAN ENERGY = 2.6674E-01 MEAN ENERGY = 4.5345E+03
PART.REFL.COEF.= 2.8200E-03 ENERGY REFL.COEF.= 1.1669E-03 REL.MEAN ENERGY = 4.1381E-01 MEAN ENERGY = 7.0348E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 4.5345E+03 1.7418E+07 1.0554E+00 2.5564E+00 4.1735E+03 1.0122E+03 5.2704E+06 5.3771E-01
PATHLENGTH 8.5340E+02 9.1546E+04 -8.0169E-01 2.3717E+00 3.0257E+02 7.3383E+01 2.6004E+04 4.3996E-01
ELASTIC LOSS 2.2965E+02 8.2810E+03 9.1000E+01 5.3529E+00
INEL. LOSS 1.2310E+04 1.7488E+07 4.1819E+03 2.4599E+02
ENERGY 7.0348E+03 2.8652E+07 2.5027E-01 1.6103E+00 5.3528E+03 4.5078E+02 1.8851E+06 1.3525E-01
PATHLENGTH 6.7908E+02 1.5213E+05 -9.0662E-02 1.7089E+00 3.9004E+02 3.2848E+01 1.0787E+04 1.2713E-01
ELASTIC LOSS 2.0820E+02 5.8533E+03 7.6507E+01 5.4260E-01
INEL. LOSS 9.7437E+03 2.9071E+07 5.3918E+03 3.8239E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 4.5345E+03 3.7980E+07 4.0691E+11 4.7389E+15 5.6990E+19 6.9676E+23
LOGENERGY 3.4471E+00 1.2110E+01 4.3237E+01 1.5654E+02 5.7388E+02 2.1275E+03
PATHLENGTH 8.5340E+02 8.1984E+05 8.3370E+08 8.7452E+11 9.3671E+14 1.0202E+18
ENERGY 7.0348E+03 7.8141E+07 9.9121E+11 1.3359E+16 1.8656E+20 2.6693E+24
LOGENERGY 3.6004E+00 1.3309E+01 5.0180E+01 1.9208E+02 7.4391E+02 2.9081E+03
PATHLENGTH 6.7908E+02 6.1328E+05 6.1771E+08 6.5854E+11 7.2758E+14 8.2448E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -301,5 +302,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 2 0 0 0 0 1 2 2 0 1 1 1 3 0 1 3
0.000 0.000 0.000 0.000 2.353 0.000 0.000 0.000 0.000 1.176 2.353 2.353 0.000 1.176 1.176 1.176 3.529 0.000 1.176 3.529
1 0 4 4 3 5 4 10 8 4 9 7 9 6 9 14 10 9 13 12
0.142 0.000 0.567 0.567 0.426 0.709 0.567 1.418 1.135 0.567 1.277 0.993 1.277 0.851 1.277 1.986 1.418 1.277 1.844 1.702
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.rge
+78 -77
View File
@@ -1,81 +1,81 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 2
70.0000 0
90.0000 2
110.0000 1
130.0000 4
150.0000 1
170.0000 1
190.0000 2
210.0000 1
230.0000 3
250.0000 3
270.0000 1
290.0000 3
310.0000 3
330.0000 3
350.0000 2
370.0000 4
390.0000 4
410.0000 10
430.0000 5
450.0000 3
470.0000 5
490.0000 12
510.0000 9
530.0000 7
550.0000 8
570.0000 9
590.0000 12
610.0000 6
630.0000 14
650.0000 18
670.0000 13
690.0000 27
710.0000 19
730.0000 28
750.0000 39
770.0000 51
790.0000 38
810.0000 45
830.0000 54
850.0000 54
870.0000 67
890.0000 63
910.0000 76
930.0000 81
950.0000 84
970.0000 109
990.0000 96
1010.0000 114
1030.0000 129
1050.0000 151
1070.0000 152
1090.0000 172
1110.0000 200
1130.0000 221
1150.0000 222
1170.0000 253
1190.0000 275
1210.0000 270
1230.0000 296
1250.0000 310
1270.0000 276
1290.0000 220
1310.0000 192
1330.0000 175
1350.0000 95
1370.0000 73
1390.0000 41
1410.0000 26
1430.0000 13
1450.0000 5
1470.0000 0
1490.0000 0
1510.0000 0
1530.0000 0
10.0000 4
30.0000 15
50.0000 12
70.0000 10
90.0000 17
110.0000 16
130.0000 17
150.0000 12
170.0000 17
190.0000 17
210.0000 22
230.0000 26
250.0000 19
270.0000 21
290.0000 21
310.0000 35
330.0000 45
350.0000 44
370.0000 53
390.0000 62
410.0000 54
430.0000 60
450.0000 48
470.0000 69
490.0000 88
510.0000 83
530.0000 102
550.0000 125
570.0000 112
590.0000 153
610.0000 129
630.0000 157
650.0000 160
670.0000 178
690.0000 235
710.0000 248
730.0000 270
750.0000 324
770.0000 348
790.0000 391
810.0000 400
830.0000 483
850.0000 501
870.0000 610
890.0000 676
910.0000 719
930.0000 870
950.0000 914
970.0000 1071
990.0000 1152
1010.0000 1310
1030.0000 1473
1050.0000 1536
1070.0000 1724
1090.0000 1905
1110.0000 2139
1130.0000 2257
1150.0000 2445
1170.0000 2555
1190.0000 2746
1210.0000 2744
1230.0000 2694
1250.0000 2650
1270.0000 2488
1290.0000 2157
1310.0000 1752
1330.0000 1447
1350.0000 1087
1370.0000 670
1390.0000 437
1410.0000 224
1430.0000 129
1450.0000 47
1470.0000 15
1490.0000 8
1510.0000 4
1530.0000 1
1550.0000 0
1570.0000 0
1590.0000 0
@@ -83,3 +83,4 @@
1630.0000 0
1650.0000 0
1670.0000 0
1690.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E17000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
17.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1114E+04 0.1973E+03 0.4535E+04 0.4174E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 75 4908
17.00 0.45 0.00 15.00 50000 49859 141 0 50000 0 0.1108E+04 0.1992E+03 0.7035E+04 0.5353E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 804 49055
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 19000 450 0 15 0.5 0.0 0.0 0.0
5000 78750 78750 78750 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78750 78750 78750 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.out
+160 -158
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:15
Start: 19.Jun. 2026 20:11:54
End: 19.Jun. 2026 18:18:17
End: 19.Jun. 2026 20:12:28
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 50000 projectiles 34 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 19000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78750.00 78750.00 78750.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78750.00 78750.00 78750.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
51499 0 0 0 0 0 0 0 0
512492 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,200 +110,202 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4984 ENERGY=0.9470E+08 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.1313E+06 EV
IMPLANTED PARTICLES= 49857 ENERGY=0.9473E+09 EV
BACKSCATTERED PARTICLES= 143 ENERGY=0.9421E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 53 53
IMPLANTED PARTICLES (LAYER 1)= 546 546
IMPLANTED PARTICLES (LAYER 2)= 4931 4931
IMPLANTED PARTICLES (LAYER 2)= 49311 49311
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 653.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.454
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 653.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.432
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.2728E+03 4.8940E+04 -1.6457E+00 6.8918E+00 2.2122E+02 3.1336E+00 1.6827E+03 5.8455E-02
SPREAD 4.6449E+02 5.8431E+04 5.3165E-01 2.7808E+00 2.4172E+02 3.4240E+00 1.1045E+03 2.5211E-02
PATHLENGTH 1.6771E+03 2.2833E+03 -2.2917E-01 3.6962E+00 4.7784E+01 6.7685E-01 5.3107E+01 5.5548E-02
ELASTIC LOSS 3.1606E+01 5.2227E+02 2.2853E+01 4.5853E-03
INEL. LOSS 1.8966E+04 2.0548E+05 4.5330E+02 9.0950E-02
PENETRATION 1.2744E+03 4.7726E+04 -1.5964E+00 6.7695E+00 2.1846E+02 9.7839E-01 5.1340E+02 1.9011E-02
SPREAD 4.6254E+02 5.8768E+04 5.2910E-01 2.7894E+00 2.4242E+02 1.0857E+00 3.5207E+02 8.0705E-03
PATHLENGTH 1.6775E+03 2.2692E+03 -2.8223E-01 3.8421E+00 4.7637E+01 2.1334E-01 1.7133E+01 1.8703E-02
ELASTIC LOSS 3.1530E+01 4.9123E+02 2.2164E+01 4.4455E-04
INEL. LOSS 1.8971E+04 2.0252E+05 4.5002E+02 9.0262E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.9218E-02 1.1423E+00 1.6901E+02 5.0616E+04 1.0688E+00 5.9129E-04 1.4218E-01 1.9276E+01
WEAK EL.LOSS 2.9036E-04 1.5899E-06 7.3005E+00 7.2152E+01 1.2609E-03 6.9757E-07 7.4192E-09 3.4957E-02
INELAST.LOSS 2.8983E+01 7.8180E+01 -1.8405E+00 5.2024E+00 8.8419E+00 4.8917E-03 8.8665E-02 1.6901E-03
SUBTHR.LOSS 4.1014E-02 2.0837E-01 3.2110E+01 1.3927E+03 4.5647E-01 2.5255E-04 4.3007E-03 2.6930E-01
ELAST.LOSS 4.8715E-02 9.3361E-01 1.3088E+02 3.1869E+04 9.6623E-01 1.6898E-04 2.9147E-02 5.3787E+00
WEAK EL.LOSS 2.9036E-04 1.5900E-06 7.2880E+00 7.1533E+01 1.2609E-03 2.2052E-07 2.3353E-09 1.0779E-02
INELAST.LOSS 2.8982E+01 7.8172E+01 -1.8408E+00 5.2036E+00 8.8415E+00 1.5463E-03 2.8030E-02 5.3431E-04
SUBTHR.LOSS 4.0944E-02 2.0528E-01 3.1828E+01 1.3638E+03 4.5308E-01 7.9242E-05 1.3254E-03 8.5016E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.2728E+03 1.6690E+06 2.2311E+09 3.0261E+12 4.1528E+15 5.7560E+18
PENETRATION 1.2744E+03 1.6718E+06 2.2355E+09 3.0332E+12 4.1647E+15 5.7758E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4059E+06 1.1514E+03 1.1504E+03 5.6170E+02 5.8866E+02 3.8687E+02 6
20.- 40. 0 0.0000E+00 0 1.4129E+06 1.4613E+03 1.4604E+03 7.3171E+02 7.2872E+02 4.7015E+02 5
40.- 60. 1 0.2006E-03 0 1.4216E+06 1.5201E+03 1.5189E+03 6.5580E+02 8.6306E+02 4.3477E+02 6
60.- 80. 2 0.4013E-03 0 1.4357E+06 1.3356E+03 1.3339E+03 7.1336E+02 6.2058E+02 5.1573E+02 9
80.- 100. 2 0.4013E-03 0 1.4513E+06 1.5208E+03 1.5192E+03 8.3975E+02 6.7943E+02 6.0864E+02 9
100.- 120. 0 0.0000E+00 0 1.4550E+06 1.0629E+03 1.0617E+03 3.2029E+02 7.4136E+02 2.4010E+02 7
120.- 140. 1 0.2006E-03 0 1.4640E+06 1.1760E+03 1.1747E+03 4.0622E+02 7.6848E+02 2.9592E+02 4
140.- 160. 4 0.8026E-03 0 1.4759E+06 9.6253E+02 9.5954E+02 1.0556E+02 8.5398E+02 7.4774E+01 1
160.- 180. 2 0.4013E-03 0 1.4875E+06 1.3742E+03 1.3723E+03 5.8238E+02 7.8994E+02 3.8859E+02 4
180.- 200. 1 0.2006E-03 0 1.4963E+06 1.2913E+03 1.2895E+03 4.0637E+02 8.8311E+02 2.9789E+02 7
200.- 220. 0 0.0000E+00 0 1.5092E+06 1.3837E+03 1.3826E+03 4.7359E+02 9.0905E+02 3.3030E+02 5
220.- 240. 2 0.4013E-03 0 1.5198E+06 1.4856E+03 1.4837E+03 6.4278E+02 8.4091E+02 4.3504E+02 5
240.- 260. 2 0.4013E-03 0 1.5316E+06 1.3528E+03 1.3510E+03 4.7344E+02 8.7755E+02 3.3662E+02 4
260.- 280. 1 0.2006E-03 0 1.5454E+06 1.7543E+03 1.7523E+03 8.5074E+02 9.0155E+02 6.0024E+02 9
280.- 300. 3 0.6019E-03 0 1.5556E+06 1.0323E+03 1.0299E+03 1.2853E+02 9.0138E+02 9.7705E+01 3
300.- 320. 2 0.4013E-03 0 1.5740E+06 1.3809E+03 1.3784E+03 6.2025E+02 7.5818E+02 4.1514E+02 6
320.- 340. 4 0.8026E-03 0 1.6018E+06 1.7854E+03 1.7828E+03 7.0138E+02 1.0814E+03 4.9600E+02 6
340.- 360. 2 0.4013E-03 0 1.5945E+06 1.6413E+03 1.6385E+03 5.2072E+02 1.1178E+03 3.7502E+02 6
360.- 380. 3 0.6019E-03 0 1.6006E+06 1.5174E+03 1.5150E+03 4.8888E+02 1.0261E+03 3.5677E+02 5
380.- 400. 2 0.4013E-03 0 1.6035E+06 1.4681E+03 1.4655E+03 3.8261E+02 1.0828E+03 2.8317E+02 7
400.- 420. 2 0.4013E-03 0 1.6226E+06 1.1305E+03 1.1285E+03 1.6473E+02 9.6374E+02 1.2695E+02 4
420.- 440. 1 0.2006E-03 0 1.6540E+06 2.0478E+03 2.0457E+03 9.0075E+02 1.1450E+03 6.3650E+02 10
440.- 460. 4 0.8026E-03 0 1.6504E+06 1.1932E+03 1.1900E+03 2.1754E+02 9.7250E+02 1.6537E+02 4
460.- 480. 5 0.1003E-02 0 1.6551E+06 2.0963E+03 2.0922E+03 7.7655E+02 1.3156E+03 5.6591E+02 9
480.- 500. 7 0.1404E-02 0 1.6659E+06 1.4435E+03 1.4388E+03 4.6146E+02 9.7729E+02 3.4264E+02 8
500.- 520. 4 0.8026E-03 0 1.3222E+06 1.6883E+03 1.6869E+03 6.6811E+02 1.0188E+03 4.8535E+02 9
520.- 540. 11 0.2207E-02 0 1.3134E+06 9.4336E+02 9.4112E+02 0.0000E+00 9.4112E+02 0.0000E+00 0
540.- 560. 4 0.8026E-03 0 1.3246E+06 1.4945E+03 1.4932E+03 5.1860E+02 9.7464E+02 3.8863E+02 8
560.- 580. 5 0.1003E-02 0 1.3426E+06 1.2469E+03 1.2454E+03 2.4077E+02 1.0046E+03 1.8344E+02 5
580.- 600. 4 0.8026E-03 0 1.3603E+06 1.5428E+03 1.5414E+03 3.2110E+02 1.2203E+03 2.3997E+02 5
600.- 620. 14 0.2809E-02 0 1.3670E+06 1.7269E+03 1.7246E+03 5.3020E+02 1.1944E+03 3.9573E+02 8
620.- 640. 11 0.2207E-02 0 1.3735E+06 2.0802E+03 2.0776E+03 1.0043E+03 1.0732E+03 7.4320E+02 13
640.- 660. 16 0.3210E-02 0 1.3717E+06 1.8251E+03 1.8219E+03 4.8289E+02 1.3390E+03 3.5591E+02 6
660.- 680. 14 0.2809E-02 0 1.3857E+06 1.5335E+03 1.5306E+03 3.2545E+02 1.2051E+03 2.4803E+02 7
680.- 700. 11 0.2207E-02 0 1.4060E+06 1.7995E+03 1.7964E+03 5.2863E+02 1.2678E+03 3.9646E+02 9
700.- 720. 21 0.4213E-02 0 1.4253E+06 1.6558E+03 1.6521E+03 3.4351E+02 1.3086E+03 2.6058E+02 7
720.- 740. 17 0.3411E-02 0 1.4289E+06 1.6419E+03 1.6382E+03 3.0371E+02 1.3345E+03 2.3242E+02 7
740.- 760. 8 0.1605E-02 0 1.4286E+06 1.9099E+03 1.9073E+03 4.9099E+02 1.4163E+03 3.6419E+02 7
760.- 780. 15 0.3010E-02 0 1.4439E+06 1.8202E+03 1.8170E+03 4.7700E+02 1.3400E+03 3.5905E+02 8
780.- 800. 18 0.3612E-02 0 1.4489E+06 1.9432E+03 1.9395E+03 4.7366E+02 1.4658E+03 3.5851E+02 9
800.- 820. 11 0.2207E-02 0 1.4554E+06 1.7796E+03 1.7764E+03 2.9431E+02 1.4821E+03 2.2523E+02 7
820.- 840. 25 0.5016E-02 0 1.4511E+06 1.7206E+03 1.7161E+03 2.8734E+02 1.4287E+03 2.1781E+02 6
840.- 860. 23 0.4615E-02 0 1.4588E+06 2.0068E+03 2.0018E+03 4.6335E+02 1.5385E+03 3.4997E+02 9
860.- 880. 27 0.5417E-02 0 1.4484E+06 2.1071E+03 2.1018E+03 3.5554E+02 1.7463E+03 2.7006E+02 7
880.- 900. 21 0.4213E-02 0 1.4620E+06 2.4212E+03 2.4161E+03 5.2092E+02 1.8952E+03 3.9445E+02 10
900.- 920. 32 0.6421E-02 0 1.4497E+06 2.0671E+03 2.0611E+03 3.7082E+02 1.6903E+03 2.8069E+02 7
920.- 940. 21 0.4213E-02 0 1.4408E+06 2.4299E+03 2.4242E+03 4.7732E+02 1.9469E+03 3.6287E+02 10
940.- 960. 34 0.6822E-02 0 1.4401E+06 2.4809E+03 2.4741E+03 3.9055E+02 2.0836E+03 2.9870E+02 9
960.- 980. 36 0.7223E-02 0 1.4242E+06 2.3672E+03 2.3602E+03 1.2488E+02 2.2353E+03 9.5766E+01 3
980.- 1000. 40 0.8026E-02 0 1.4011E+06 2.2599E+03 2.2512E+03 1.4294E+02 2.1082E+03 1.0856E+02 3
1000.- 1020. 49 0.9831E-02 0 1.3836E+06 2.7789E+03 2.7688E+03 3.8377E+02 2.3850E+03 2.9543E+02 10
1020.- 1040. 64 0.1284E-01 0 1.3836E+06 2.8711E+03 2.8594E+03 4.8098E+02 2.3784E+03 3.6934E+02 12
1040.- 1060. 55 0.1104E-01 0 1.3521E+06 3.1955E+03 3.1843E+03 4.6455E+02 2.7197E+03 3.5403E+02 10
1060.- 1080. 54 0.1083E-01 0 1.3291E+06 2.8871E+03 2.8758E+03 2.7804E+02 2.5978E+03 2.1210E+02 6
1080.- 1100. 86 0.1726E-01 0 1.3133E+06 3.1053E+03 3.0899E+03 2.2077E+02 2.8691E+03 1.6877E+02 5
1100.- 1120. 93 0.1866E-01 0 1.2729E+06 3.0814E+03 3.0639E+03 3.3863E+02 2.7253E+03 2.5793E+02 7
1120.- 1140. 108 0.2167E-01 0 1.2218E+06 3.2651E+03 3.2450E+03 2.4205E+02 3.0030E+03 1.8577E+02 6
1140.- 1160. 103 0.2067E-01 0 1.1851E+06 3.5029E+03 3.4835E+03 2.5652E+02 3.2270E+03 1.9796E+02 7
1160.- 1180. 118 0.2368E-01 0 1.1363E+06 3.5974E+03 3.5753E+03 1.9633E+02 3.3790E+03 1.5108E+02 5
1180.- 1200. 104 0.2087E-01 0 1.0891E+06 3.3421E+03 3.3206E+03 1.2290E+02 3.1977E+03 9.4386E+01 3
1200.- 1220. 135 0.2709E-01 0 1.0380E+06 3.7724E+03 3.7470E+03 2.6269E+02 3.4843E+03 2.0249E+02 7
1220.- 1240. 169 0.3391E-01 0 9.7596E+05 3.8278E+03 3.7984E+03 1.1418E+02 3.6842E+03 8.7938E+01 3
1240.- 1260. 169 0.3391E-01 0 9.2484E+05 3.9994E+03 3.9662E+03 3.3629E+01 3.9326E+03 2.6058E+01 1
1260.- 1280. 212 0.4254E-01 0 8.5375E+05 3.8660E+03 3.8277E+03 9.6247E+01 3.7315E+03 7.4724E+01 3
1280.- 1300. 223 0.4474E-01 0 7.7872E+05 3.7933E+03 3.7533E+03 0.0000E+00 3.7533E+03 0.0000E+00 0
1300.- 1320. 236 0.4735E-01 0 7.1160E+05 3.8322E+03 3.7886E+03 3.0113E+01 3.7585E+03 2.3442E+01 1
1320.- 1340. 262 0.5257E-01 0 6.2507E+05 3.8375E+03 3.7928E+03 0.0000E+00 3.7928E+03 0.0000E+00 0
1340.- 1360. 237 0.4755E-01 0 5.4413E+05 3.4805E+03 3.4368E+03 3.5362E+01 3.4015E+03 2.7342E+01 1
1360.- 1380. 274 0.5498E-01 0 4.7517E+05 3.2772E+03 3.2306E+03 0.0000E+00 3.2306E+03 0.0000E+00 0
1380.- 1400. 242 0.4856E-01 0 3.9304E+05 3.0803E+03 3.0368E+03 0.0000E+00 3.0368E+03 0.0000E+00 0
1400.- 1420. 245 0.4916E-01 0 3.1579E+05 2.6424E+03 2.5992E+03 0.0000E+00 2.5992E+03 0.0000E+00 0
1420.- 1440. 242 0.4856E-01 1 2.4690E+05 2.2189E+03 2.1788E+03 0.0000E+00 2.1788E+03 0.0000E+00 0
1440.- 1460. 191 0.3832E-01 2 1.8649E+05 1.8228E+03 1.7878E+03 0.0000E+00 1.7878E+03 0.0000E+00 0
1460.- 1480. 208 0.4173E-01 3 1.3982E+05 1.4525E+03 1.4180E+03 0.0000E+00 1.4180E+03 0.0000E+00 0
1480.- 1500. 183 0.3672E-01 5 9.7680E+04 1.0849E+03 1.0553E+03 0.0000E+00 1.0553E+03 0.0000E+00 0
1500.- 1520. 137 0.2749E-01 9 6.5443E+04 7.8653E+02 7.6434E+02 0.0000E+00 7.6434E+02 0.0000E+00 0
1520.- 1540. 101 0.2026E-01 9 4.2055E+04 5.5230E+02 5.3518E+02 0.0000E+00 5.3518E+02 0.0000E+00 0
1540.- 1560. 82 0.1645E-01 21 2.3999E+04 3.5206E+02 3.3985E+02 0.0000E+00 3.3985E+02 0.0000E+00 0
1560.- 1580. 56 0.1124E-01 60 1.3887E+04 2.1287E+02 2.0454E+02 0.0000E+00 2.0454E+02 0.0000E+00 0
1580.- 1600. 24 0.4815E-02 139 6.1865E+03 9.4452E+01 9.0312E+01 0.0000E+00 9.0312E+01 0.0000E+00 0
1600.- 1620. 13 0.2608E-02 298 2.4255E+03 3.8897E+01 3.7217E+01 0.0000E+00 3.7217E+01 0.0000E+00 0
1620.- 1640. 7 0.1404E-02 494 1.2562E+03 2.3364E+01 2.2460E+01 0.0000E+00 2.2460E+01 0.0000E+00 0
1640.- 1660. 2 0.4013E-03 684 8.8602E+02 1.3374E+01 1.2770E+01 0.0000E+00 1.2770E+01 0.0000E+00 0
1660.- 1680. 2 0.4013E-03 888 1.6695E+02 3.4410E+00 3.2261E+00 0.0000E+00 3.2261E+00 0.0000E+00 0
1680.- 1700. 1 0.2006E-03 784 7.1796E+01 2.0048E+00 1.8502E+00 0.0000E+00 1.8502E+00 0.0000E+00 0
1700.- 1720. 1 0.2006E-03 698 1.5929E+01 5.1138E-01 4.1383E-01 0.0000E+00 4.1383E-01 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 446 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 249 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 121 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 52 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 20 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- SUT 0 0.0000E+00
0.- 20. 1 0.2006E-04 0 1.4051E+07 1.1523E+04 1.1514E+04 4.2619E+03 7.2519E+03 3.0073E+03 43
20.- 40. 2 0.4011E-04 0 1.4161E+07 1.1663E+04 1.1654E+04 4.5619E+03 7.0917E+03 3.2147E+03 44
40.- 60. 8 0.1605E-03 0 1.4284E+07 1.1287E+04 1.1274E+04 4.2592E+03 7.0152E+03 3.0112E+03 45
60.- 80. 12 0.2407E-03 0 1.4397E+07 1.1079E+04 1.1064E+04 4.0708E+03 6.9931E+03 2.9332E+03 51
80.- 100. 11 0.2206E-03 0 1.4488E+07 1.1754E+04 1.1740E+04 4.2556E+03 7.4841E+03 3.0206E+03 47
100.- 120. 11 0.2206E-03 0 1.4576E+07 1.2178E+04 1.2163E+04 4.4853E+03 7.6782E+03 3.2336E+03 59
120.- 140. 9 0.1805E-03 0 1.4684E+07 1.2322E+04 1.2307E+04 4.5468E+03 7.7598E+03 3.2593E+03 55
140.- 160. 12 0.2407E-03 0 1.4824E+07 1.2796E+04 1.2781E+04 4.6583E+03 8.1228E+03 3.4098E+03 60
160.- 180. 17 0.3410E-03 0 1.4932E+07 1.3015E+04 1.2999E+04 5.3862E+03 7.6126E+03 3.9039E+03 64
180.- 200. 14 0.2808E-03 0 1.5037E+07 1.4420E+04 1.4403E+04 5.7939E+03 8.6092E+03 4.1036E+03 64
200.- 220. 20 0.4011E-03 0 1.5133E+07 1.3183E+04 1.3164E+04 4.8236E+03 8.3408E+03 3.4259E+03 53
220.- 240. 12 0.2407E-03 0 1.5222E+07 1.2869E+04 1.2852E+04 4.3848E+03 8.4669E+03 3.1948E+03 66
240.- 260. 13 0.2607E-03 0 1.5359E+07 1.3759E+04 1.3741E+04 5.1600E+03 8.5807E+03 3.6319E+03 56
260.- 280. 20 0.4011E-03 0 1.5457E+07 1.2232E+04 1.2210E+04 3.4174E+03 8.7928E+03 2.4973E+03 48
280.- 300. 28 0.5616E-03 0 1.5563E+07 1.4698E+04 1.4674E+04 5.4347E+03 9.2392E+03 3.8545E+03 61
300.- 320. 26 0.5215E-03 0 1.5673E+07 1.3868E+04 1.3843E+04 4.1868E+03 9.6564E+03 3.0095E+03 50
320.- 340. 24 0.4814E-03 0 1.5802E+07 1.3918E+04 1.3896E+04 4.4948E+03 9.4013E+03 3.2558E+03 62
340.- 360. 26 0.5215E-03 0 1.5902E+07 1.3215E+04 1.3189E+04 3.6797E+03 9.5092E+03 2.7025E+03 53
360.- 380. 33 0.6619E-03 0 1.6038E+07 1.4203E+04 1.4173E+04 4.0662E+03 1.0107E+04 2.9974E+03 57
380.- 400. 27 0.5415E-03 0 1.6126E+07 1.5519E+04 1.5491E+04 5.1917E+03 1.0300E+04 3.7980E+03 74
400.- 420. 41 0.8224E-03 0 1.6246E+07 1.5411E+04 1.5379E+04 4.9067E+03 1.0472E+04 3.5982E+03 69
420.- 440. 37 0.7421E-03 0 1.6359E+07 1.5674E+04 1.5640E+04 4.9542E+03 1.0686E+04 3.6039E+03 70
440.- 460. 44 0.8825E-03 0 1.6472E+07 1.4839E+04 1.4804E+04 4.2736E+03 1.0531E+04 3.1401E+03 68
460.- 480. 57 0.1143E-02 0 1.6608E+07 1.7533E+04 1.7491E+04 5.7534E+03 1.1737E+04 4.1688E+03 76
480.- 500. 41 0.8224E-03 0 1.6776E+07 1.8068E+04 1.8031E+04 5.7060E+03 1.2325E+04 4.1428E+03 81
500.- 520. 41 0.8224E-03 0 1.3311E+07 1.3902E+04 1.3888E+04 3.7531E+03 1.0135E+04 2.7941E+03 58
520.- 540. 61 0.1223E-02 0 1.3090E+07 1.3909E+04 1.3895E+04 4.5054E+03 9.3896E+03 3.3554E+03 71
540.- 560. 44 0.8825E-03 0 1.3156E+07 1.3698E+04 1.3686E+04 4.3103E+03 9.3761E+03 3.2032E+03 64
560.- 580. 49 0.9828E-03 0 1.3333E+07 1.3363E+04 1.3349E+04 3.6101E+03 9.7390E+03 2.7127E+03 64
580.- 600. 64 0.1284E-02 0 1.3411E+07 1.3710E+04 1.3693E+04 3.2131E+03 1.0480E+04 2.3908E+03 49
600.- 620. 67 0.1344E-02 0 1.3554E+07 1.4274E+04 1.4257E+04 3.9116E+03 1.0345E+04 2.9285E+03 63
620.- 640. 89 0.1785E-02 0 1.3712E+07 1.6563E+04 1.6542E+04 5.1616E+03 1.1381E+04 3.8628E+03 85
640.- 660. 86 0.1725E-02 0 1.3780E+07 1.5900E+04 1.5879E+04 4.1894E+03 1.1690E+04 3.1300E+03 68
660.- 680. 99 0.1986E-02 0 1.3903E+07 1.6695E+04 1.6673E+04 4.8107E+03 1.1862E+04 3.6040E+03 80
680.- 700. 111 0.2226E-02 0 1.4002E+07 1.7338E+04 1.7313E+04 5.5366E+03 1.1777E+04 4.1445E+03 90
700.- 720. 113 0.2266E-02 0 1.4114E+07 1.7677E+04 1.7651E+04 4.8114E+03 1.2839E+04 3.6139E+03 82
720.- 740. 117 0.2347E-02 0 1.4234E+07 1.7914E+04 1.7887E+04 4.8593E+03 1.3028E+04 3.6526E+03 85
740.- 760. 153 0.3069E-02 0 1.4259E+07 1.8414E+04 1.8382E+04 4.7306E+03 1.3651E+04 3.5491E+03 79
760.- 780. 147 0.2948E-02 0 1.4353E+07 1.7741E+04 1.7707E+04 4.2884E+03 1.3418E+04 3.2224E+03 73
780.- 800. 187 0.3751E-02 0 1.4427E+07 1.8665E+04 1.8627E+04 4.1996E+03 1.4427E+04 3.1565E+03 72
800.- 820. 179 0.3590E-02 0 1.4482E+07 2.0513E+04 2.0472E+04 4.3229E+03 1.6149E+04 3.2707E+03 83
820.- 840. 218 0.4373E-02 0 1.4562E+07 2.0112E+04 2.0068E+04 4.0507E+03 1.6017E+04 3.0660E+03 78
840.- 860. 236 0.4734E-02 0 1.4587E+07 2.0781E+04 2.0733E+04 4.2131E+03 1.6520E+04 3.1974E+03 85
860.- 880. 259 0.5195E-02 0 1.4609E+07 2.1659E+04 2.1605E+04 3.6857E+03 1.7920E+04 2.7948E+03 73
880.- 900. 272 0.5456E-02 0 1.4558E+07 2.1361E+04 2.1304E+04 3.7943E+03 1.7509E+04 2.8803E+03 77
900.- 920. 324 0.6499E-02 0 1.4556E+07 2.2719E+04 2.2656E+04 4.4088E+03 1.8247E+04 3.3406E+03 86
920.- 940. 293 0.5877E-02 0 1.4536E+07 2.3377E+04 2.3310E+04 3.7696E+03 1.9541E+04 2.8691E+03 79
940.- 960. 406 0.8143E-02 0 1.4424E+07 2.4756E+04 2.4677E+04 3.6467E+03 2.1030E+04 2.7632E+03 71
960.- 980. 409 0.8203E-02 0 1.4305E+07 2.5670E+04 2.5588E+04 4.4605E+03 2.1128E+04 3.3955E+03 93
980.- 1000. 453 0.9086E-02 0 1.4195E+07 2.5719E+04 2.5626E+04 3.7677E+03 2.1858E+04 2.8728E+03 82
1000.- 1020. 584 0.1171E-01 0 1.4023E+07 2.8043E+04 2.7935E+04 3.6981E+03 2.4237E+04 2.8228E+03 82
1020.- 1040. 583 0.1169E-01 0 1.3862E+07 2.8965E+04 2.8850E+04 4.2405E+03 2.4609E+04 3.2417E+03 97
1040.- 1060. 610 0.1223E-01 0 1.3620E+07 2.9294E+04 2.9173E+04 3.3224E+03 2.5850E+04 2.5383E+03 75
1060.- 1080. 666 0.1336E-01 0 1.3335E+07 2.9463E+04 2.9331E+04 2.8091E+03 2.6522E+04 2.1471E+03 64
1080.- 1100. 818 0.1641E-01 0 1.3027E+07 3.1735E+04 3.1582E+04 2.9820E+03 2.8600E+04 2.2847E+03 71
1100.- 1120. 842 0.1689E-01 0 1.2717E+07 3.1894E+04 3.1730E+04 2.5197E+03 2.9211E+04 1.9327E+03 61
1120.- 1140. 974 0.1954E-01 0 1.2350E+07 3.4605E+04 3.4418E+04 2.7578E+03 3.1661E+04 2.1112E+03 64
1140.- 1160. 1067 0.2140E-01 0 1.1946E+07 3.5097E+04 3.4894E+04 2.2001E+03 3.2694E+04 1.6945E+03 58
1160.- 1180. 1174 0.2355E-01 0 1.1448E+07 3.5002E+04 3.4780E+04 1.6173E+03 3.3163E+04 1.2450E+03 42
1180.- 1200. 1324 0.2656E-01 0 1.0947E+07 3.6582E+04 3.6332E+04 1.8664E+03 3.4466E+04 1.4372E+03 49
1200.- 1220. 1504 0.3017E-01 0 1.0391E+07 3.7506E+04 3.7228E+04 9.5557E+02 3.6272E+04 7.3830E+02 27
1220.- 1240. 1547 0.3103E-01 0 9.7470E+06 3.7349E+04 3.7060E+04 9.9022E+02 3.6069E+04 7.6530E+02 28
1240.- 1260. 1776 0.3562E-01 0 9.1137E+06 3.7596E+04 3.7273E+04 5.9426E+02 3.6678E+04 4.6077E+02 18
1260.- 1280. 1896 0.3803E-01 0 8.4573E+06 3.7557E+04 3.7208E+04 5.0476E+02 3.6704E+04 3.8968E+02 14
1280.- 1300. 2010 0.4032E-01 0 7.7409E+06 3.8273E+04 3.7903E+04 2.6060E+02 3.7643E+04 2.0219E+02 8
1300.- 1320. 2174 0.4360E-01 0 6.9807E+06 3.7052E+04 3.6661E+04 3.1144E+01 3.6630E+04 2.4210E+01 1
1320.- 1340. 2301 0.4615E-01 0 6.2332E+06 3.5519E+04 3.5103E+04 1.6031E+02 3.4943E+04 1.2447E+02 5
1340.- 1360. 2431 0.4876E-01 0 5.4995E+06 3.4604E+04 3.4168E+04 0.0000E+00 3.4168E+04 0.0000E+00 0
1360.- 1380. 2566 0.5147E-01 0 4.7143E+06 3.1895E+04 3.1445E+04 0.0000E+00 3.1445E+04 0.0000E+00 0
1380.- 1400. 2525 0.5064E-01 0 3.9559E+06 2.9443E+04 2.8995E+04 0.0000E+00 2.8995E+04 0.0000E+00 0
1400.- 1420. 2477 0.4968E-01 2 3.2706E+06 2.6931E+04 2.6497E+04 0.0000E+00 2.6497E+04 0.0000E+00 0
1420.- 1440. 2461 0.4936E-01 6 2.5631E+06 2.2721E+04 2.2296E+04 0.0000E+00 2.2296E+04 0.0000E+00 0
1440.- 1460. 2306 0.4625E-01 26 1.9710E+06 1.9368E+04 1.8977E+04 0.0000E+00 1.8977E+04 0.0000E+00 0
1460.- 1480. 2180 0.4373E-01 33 1.4670E+06 1.5591E+04 1.5229E+04 0.0000E+00 1.5229E+04 0.0000E+00 0
1480.- 1500. 1732 0.3474E-01 55 1.0136E+06 1.1739E+04 1.1449E+04 0.0000E+00 1.1449E+04 0.0000E+00 0
1500.- 1520. 1435 0.2878E-01 77 6.6863E+05 8.3719E+03 8.1387E+03 0.0000E+00 8.1387E+03 0.0000E+00 0
1520.- 1540. 1108 0.2222E-01 134 4.0899E+05 5.4473E+03 5.2726E+03 0.0000E+00 5.2726E+03 0.0000E+00 0
1540.- 1560. 726 0.1456E-01 233 2.3204E+05 3.2930E+03 3.1778E+03 0.0000E+00 3.1778E+03 0.0000E+00 0
1560.- 1580. 496 0.9948E-02 574 1.2762E+05 1.9709E+03 1.8967E+03 0.0000E+00 1.8967E+03 0.0000E+00 0
1580.- 1600. 282 0.5656E-02 1333 6.0992E+04 1.0264E+03 9.8445E+02 0.0000E+00 9.8445E+02 0.0000E+00 0
1600.- 1620. 144 0.2888E-02 2772 2.9051E+04 5.2018E+02 4.9757E+02 0.0000E+00 4.9757E+02 0.0000E+00 0
1620.- 1640. 76 0.1524E-02 4861 1.1069E+04 2.0873E+02 1.9853E+02 0.0000E+00 1.9853E+02 0.0000E+00 0
1640.- 1660. 29 0.5817E-03 7102 4.3602E+03 9.2220E+01 8.8062E+01 0.0000E+00 8.8062E+01 0.0000E+00 0
1660.- 1680. 7 0.1404E-03 8418 1.3056E+03 2.4132E+01 2.2842E+01 0.0000E+00 2.2842E+01 0.0000E+00 0
1680.- 1700. 3 0.6017E-04 8322 1.2558E+02 3.3766E+00 3.0147E+00 0.0000E+00 3.0147E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 6815 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 4719 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 2585 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 1142 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 454 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 135 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 48 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 10 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- SUT 0 0.0000E+00
4984 1.0000E+00 4984 9.4695E+07 1.6176E+05 1.6081E+05 2.6821E+04 1.3399E+05 1.9621E+04 415
49857 1.0000E+00 49857 9.4756E+08 1.6022E+06 1.5927E+06 2.5423E+05 1.3385E+06 1.8805E+05 4130
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.6571E+05 2.7660E+02 3.4172E+01 2.4242E+02 9.4017E+05 8.7376E+02 5.2752E+02 3.4623E+02 1 5
20.- 40. 4.7434E+05 3.4739E+02 8.3172E+01 2.6422E+02 9.3853E+05 1.1130E+03 6.4854E+02 4.6450E+02 2 3
40.- 60. 4.6565E+05 4.6135E+02 1.0440E+02 3.5695E+02 9.5598E+05 1.0575E+03 5.5140E+02 5.0611E+02 2 4
60.- 80. 4.7603E+05 6.7543E+02 4.3070E+02 2.4473E+02 9.5971E+05 6.5851E+02 2.8266E+02 3.7584E+02 4 5
80.- 100. 4.8650E+05 7.6893E+02 4.5998E+02 3.0895E+02 9.6483E+05 7.5026E+02 3.7977E+02 3.7048E+02 4 5
100.- 120. 4.8990E+05 3.2144E+02 5.6038E+01 2.6540E+02 9.6514E+05 7.4021E+02 2.6426E+02 4.7595E+02 1 6
120.- 140. 4.9219E+05 5.9361E+02 2.8152E+02 3.1208E+02 9.7185E+05 5.8110E+02 1.2470E+02 4.5640E+02 3 1
140.- 160. 4.8537E+05 3.5382E+02 0.0000E+00 3.5382E+02 9.9055E+05 6.0572E+02 1.0556E+02 5.0017E+02 0 1
160.- 180. 4.9559E+05 4.5241E+02 1.2548E+02 3.2693E+02 9.9194E+05 9.1991E+02 4.5691E+02 4.6300E+02 2 2
180.- 200. 5.0051E+05 4.0522E+02 4.0448E+01 3.6477E+02 9.9578E+05 8.8426E+02 3.6592E+02 5.1834E+02 1 6
200.- 220. 5.0598E+05 5.0674E+02 5.1683E+01 4.5505E+02 1.0032E+06 8.7590E+02 4.2191E+02 4.5399E+02 1 4
220.- 240. 5.0671E+05 4.9070E+02 1.5877E+02 3.3194E+02 1.0131E+06 9.9299E+02 4.8401E+02 5.0897E+02 2 3
240.- 260. 5.0957E+05 5.3338E+02 1.6825E+02 3.6512E+02 1.0220E+06 8.1762E+02 3.0519E+02 5.1243E+02 1 3
260.- 280. 5.1296E+05 5.7788E+02 2.2946E+02 3.4842E+02 1.0324E+06 1.1744E+03 6.2128E+02 5.5312E+02 5 4
280.- 300. 5.2004E+05 4.2255E+02 5.2192E+01 3.7036E+02 1.0355E+06 6.0737E+02 7.6342E+01 5.3102E+02 1 2
300.- 320. 5.2538E+05 3.9102E+02 7.7886E+01 3.1314E+02 1.0486E+06 9.8741E+02 5.4237E+02 4.4504E+02 1 5
320.- 340. 5.2828E+05 7.3583E+02 2.7607E+02 4.5976E+02 1.0736E+06 1.0469E+03 4.2531E+02 6.2163E+02 2 4
340.- 360. 5.3598E+05 7.3633E+02 2.3445E+02 5.0188E+02 1.0585E+06 9.0218E+02 2.8627E+02 6.1591E+02 3 3
360.- 380. 5.3240E+05 7.0837E+02 3.1836E+02 3.9002E+02 1.0682E+06 8.0658E+02 1.7052E+02 6.3606E+02 3 2
380.- 400. 5.3155E+05 6.2181E+02 1.7448E+02 4.4733E+02 1.0719E+06 8.4365E+02 2.0813E+02 6.3552E+02 4 3
400.- 420. 5.4271E+05 4.9270E+02 1.2389E+02 3.6880E+02 1.0799E+06 6.3577E+02 4.0840E+01 5.9494E+02 3 1
420.- 440. 5.5801E+05 6.9105E+02 2.3305E+02 4.5800E+02 1.0960E+06 1.3547E+03 6.6770E+02 6.8696E+02 3 7
440.- 460. 5.4936E+05 5.4500E+02 1.6359E+02 3.8141E+02 1.1011E+06 6.4503E+02 5.3943E+01 5.9109E+02 3 1
460.- 480. 5.5131E+05 1.0603E+03 4.4434E+02 6.1601E+02 1.1038E+06 1.0318E+03 3.3222E+02 6.9963E+02 3 6
480.- 500. 5.5054E+05 5.9317E+02 1.9617E+02 3.9700E+02 1.1143E+06 8.4425E+02 2.6529E+02 5.7895E+02 3 5
500.- 520. 5.8777E+04 1.3577E+02 6.2954E+01 7.2820E+01 1.1754E+05 2.6324E+02 2.0681E+02 5.6438E+01 1 1
0.- 20. 4.6733E+06 5.0159E+03 2.0307E+03 2.9852E+03 9.3782E+06 6.4979E+03 2.2312E+03 4.2667E+03 21 22
20.- 40. 4.7010E+06 4.9234E+03 1.8900E+03 3.0333E+03 9.4603E+06 6.7302E+03 2.6718E+03 4.0584E+03 20 24
40.- 60. 4.7577E+06 4.9442E+03 1.8587E+03 3.0854E+03 9.5261E+06 6.3302E+03 2.4004E+03 3.9297E+03 23 22
60.- 80. 4.8012E+06 4.7171E+03 1.8140E+03 2.9031E+03 9.5956E+06 6.3468E+03 2.2568E+03 4.0900E+03 23 28
80.- 100. 4.8096E+06 5.1204E+03 2.0266E+03 3.0938E+03 9.6782E+06 6.6192E+03 2.2290E+03 4.3903E+03 27 20
100.- 120. 4.8506E+06 5.4311E+03 2.0373E+03 3.3938E+03 9.7259E+06 6.7324E+03 2.4479E+03 4.2844E+03 27 32
120.- 140. 4.9033E+06 5.2676E+03 2.1146E+03 3.1531E+03 9.7810E+06 7.0390E+03 2.4322E+03 4.6068E+03 28 27
140.- 160. 4.9393E+06 5.9796E+03 2.5353E+03 3.4443E+03 9.8850E+06 6.8015E+03 2.1229E+03 4.6785E+03 31 29
160.- 180. 4.9758E+06 6.1011E+03 2.7236E+03 3.3775E+03 9.9563E+06 6.8978E+03 2.6627E+03 4.2351E+03 35 29
180.- 200. 5.0035E+06 6.0817E+03 2.4265E+03 3.6552E+03 1.0034E+07 8.3214E+03 3.3674E+03 4.9540E+03 30 34
200.- 220. 5.0382E+06 5.5358E+03 2.0973E+03 3.4385E+03 1.0095E+07 7.6286E+03 2.7263E+03 4.9022E+03 27 26
220.- 240. 5.0654E+06 5.1529E+03 1.7730E+03 3.3799E+03 1.0156E+07 7.6989E+03 2.6118E+03 5.0871E+03 31 35
240.- 260. 5.1162E+06 4.7374E+03 1.1407E+03 3.5966E+03 1.0242E+07 9.0034E+03 4.0193E+03 4.9841E+03 18 38
260.- 280. 5.1761E+06 5.4579E+03 1.7377E+03 3.7202E+03 1.0281E+07 6.7523E+03 1.6797E+03 5.0726E+03 24 24
280.- 300. 5.1771E+06 5.9894E+03 2.0860E+03 3.9034E+03 1.0385E+07 8.6844E+03 3.3487E+03 5.3358E+03 30 31
300.- 320. 5.1998E+06 5.7910E+03 1.5540E+03 4.2369E+03 1.0473E+07 8.0522E+03 2.6327E+03 5.4195E+03 22 28
320.- 340. 5.2669E+06 5.2684E+03 1.4799E+03 3.7885E+03 1.0535E+07 8.6277E+03 3.0149E+03 5.6128E+03 24 38
340.- 360. 5.3205E+06 5.1985E+03 1.5909E+03 3.6077E+03 1.0581E+07 7.9903E+03 2.0889E+03 5.9015E+03 24 29
360.- 380. 5.3360E+06 6.5440E+03 2.3621E+03 4.1819E+03 1.0702E+07 7.6291E+03 1.7041E+03 5.9250E+03 31 26
380.- 400. 5.3692E+06 6.6870E+03 2.3620E+03 4.3249E+03 1.0757E+07 8.8045E+03 2.8296E+03 5.9749E+03 37 37
400.- 420. 5.4194E+06 7.0873E+03 2.6281E+03 4.4592E+03 1.0827E+07 8.2914E+03 2.2786E+03 6.0128E+03 41 28
420.- 440. 5.4701E+06 6.4002E+03 1.8156E+03 4.5846E+03 1.0889E+07 9.2397E+03 3.1386E+03 6.1011E+03 27 43
440.- 460. 5.4836E+06 5.9599E+03 1.7484E+03 4.2115E+03 1.0989E+07 8.8443E+03 2.5252E+03 6.3191E+03 27 41
460.- 480. 5.5262E+06 6.9613E+03 2.4686E+03 4.4927E+03 1.1082E+07 1.0529E+04 3.2848E+03 7.2447E+03 40 36
480.- 500. 5.5873E+06 6.5828E+03 1.6775E+03 4.9053E+03 1.1175E+07 1.1428E+04 4.0284E+03 7.3997E+03 30 51
500.- 520. 5.8978E+05 5.4270E+02 9.5813E+01 4.4689E+02 1.1769E+06 1.1873E+03 3.8917E+02 7.9817E+02 2 4
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.2851E+07 1.3899E+04 4.5815E+03 9.3173E+03 2.5714E+07 2.2014E+04 8.8154E+03 1.3199E+04 59 92
1.2856E+08 1.4348E+05 5.0075E+04 9.3404E+04 2.5737E+08 1.9871E+05 6.7123E+04 1.3158E+05 700 782
DAMAGE IN LAYER 1 : 3.5515E+04
DAMAGE IN LAYER 1 : 3.4048E+05
DAMAGE IN LAYER 2 : 1.2529E+05
DAMAGE IN LAYER 2 : 1.2523E+06
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.3819E-03 REL.MEAN ENERGY = 4.3185E-01 MEAN ENERGY = 8.2051E+03
PART.REFL.COEF.= 2.8600E-03 ENERGY REFL.COEF.= 9.9167E-04 REL.MEAN ENERGY = 3.4674E-01 MEAN ENERGY = 6.5880E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.2051E+03 3.9588E+07 3.6004E-01 1.6659E+00 6.2919E+03 1.5730E+03 8.0761E+06 4.0463E-01
PATHLENGTH 7.3480E+02 2.1592E+05 -1.2062E-01 1.8263E+00 4.6467E+02 1.1617E+02 4.9069E+04 3.5249E-01
ELASTIC LOSS 2.6448E+02 1.4015E+04 1.1839E+02 7.3991E+00
INEL. LOSS 1.0450E+04 4.1144E+07 6.4143E+03 4.0090E+02
ENERGY 6.5880E+03 3.7489E+07 6.1452E-01 1.8699E+00 6.1228E+03 5.1202E+02 2.9239E+06 1.5050E-01
PATHLENGTH 8.6557E+02 2.0251E+05 -4.7626E-01 1.8338E+00 4.5002E+02 3.7632E+01 1.5464E+04 1.3848E-01
ELASTIC LOSS 2.1156E+02 7.7762E+03 8.8183E+01 6.1666E-01
INEL. LOSS 1.2180E+04 3.7953E+07 6.1606E+03 4.3081E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.2051E+03 1.0691E+08 1.6165E+12 2.6078E+16 4.3401E+20 7.3445E+24
LOGENERGY 3.6080E+00 1.3588E+01 5.2392E+01 2.0493E+02 8.0960E+02 3.2226E+03
PATHLENGTH 7.3480E+02 7.5585E+05 8.6060E+08 1.0406E+12 1.3162E+15 1.7240E+18
ENERGY 6.5880E+03 8.0891E+07 1.1679E+12 1.7991E+16 2.8739E+20 4.7048E+24
LOGENERGY 3.4859E+00 1.2617E+01 4.6894E+01 1.7782E+02 6.8499E+02 2.6725E+03
PATHLENGTH 8.6557E+02 9.5173E+05 1.1310E+09 1.3966E+12 1.7660E+15 2.2708E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -311,5 +313,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 1 1 0 0 1 0 0 1 2 2 3 0 1 1 1 1 1
0.000 0.000 0.000 1.250 1.250 0.000 0.000 1.250 0.000 0.000 1.250 2.500 2.500 3.750 0.000 1.250 1.250 1.250 1.250 1.250
0 0 3 4 3 5 4 6 6 10 7 12 8 9 11 16 9 10 11 9
0.000 0.000 0.420 0.559 0.420 0.699 0.559 0.839 0.839 1.399 0.979 1.678 1.119 1.259 1.538 2.238 1.259 1.399 1.538 1.259
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.rge
+88 -86
View File
@@ -1,90 +1,90 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 2
90.0000 2
110.0000 0
130.0000 1
150.0000 4
170.0000 2
190.0000 1
210.0000 0
230.0000 2
250.0000 2
270.0000 1
290.0000 3
310.0000 2
330.0000 4
350.0000 2
370.0000 3
390.0000 2
410.0000 2
430.0000 1
450.0000 4
470.0000 5
490.0000 7
510.0000 4
530.0000 11
550.0000 4
570.0000 5
590.0000 4
610.0000 14
630.0000 11
650.0000 16
670.0000 14
690.0000 11
710.0000 21
730.0000 17
750.0000 8
770.0000 15
790.0000 18
810.0000 11
830.0000 25
850.0000 23
870.0000 27
890.0000 21
910.0000 32
930.0000 21
950.0000 34
970.0000 36
990.0000 40
1010.0000 49
1030.0000 64
1050.0000 55
1070.0000 54
1090.0000 86
1110.0000 93
1130.0000 108
1150.0000 103
1170.0000 118
1190.0000 104
1210.0000 135
1230.0000 169
1250.0000 169
1270.0000 212
1290.0000 223
1310.0000 236
1330.0000 262
1350.0000 237
1370.0000 274
1390.0000 242
1410.0000 245
1430.0000 242
1450.0000 191
1470.0000 208
1490.0000 183
1510.0000 137
1530.0000 101
1550.0000 82
1570.0000 56
1590.0000 24
1610.0000 13
1630.0000 7
1650.0000 2
1670.0000 2
1690.0000 1
1710.0000 1
10.0000 1
30.0000 2
50.0000 8
70.0000 12
90.0000 11
110.0000 11
130.0000 9
150.0000 12
170.0000 17
190.0000 14
210.0000 20
230.0000 12
250.0000 13
270.0000 20
290.0000 28
310.0000 26
330.0000 24
350.0000 26
370.0000 33
390.0000 27
410.0000 41
430.0000 37
450.0000 44
470.0000 57
490.0000 41
510.0000 41
530.0000 61
550.0000 44
570.0000 49
590.0000 64
610.0000 67
630.0000 89
650.0000 86
670.0000 99
690.0000 111
710.0000 113
730.0000 117
750.0000 153
770.0000 147
790.0000 187
810.0000 179
830.0000 218
850.0000 236
870.0000 259
890.0000 272
910.0000 324
930.0000 293
950.0000 406
970.0000 409
990.0000 453
1010.0000 584
1030.0000 583
1050.0000 610
1070.0000 666
1090.0000 818
1110.0000 842
1130.0000 974
1150.0000 1067
1170.0000 1174
1190.0000 1324
1210.0000 1504
1230.0000 1547
1250.0000 1776
1270.0000 1896
1290.0000 2010
1310.0000 2174
1330.0000 2301
1350.0000 2431
1370.0000 2566
1390.0000 2525
1410.0000 2477
1430.0000 2461
1450.0000 2306
1470.0000 2180
1490.0000 1732
1510.0000 1435
1530.0000 1108
1550.0000 726
1570.0000 496
1590.0000 282
1610.0000 144
1630.0000 76
1650.0000 29
1670.0000 7
1690.0000 3
1710.0000 0
1730.0000 0
1750.0000 0
1770.0000 0
@@ -93,3 +93,5 @@
1830.0000 0
1850.0000 0
1870.0000 0
1890.0000 0
1910.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E19000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
19.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1273E+04 0.2212E+03 0.8205E+04 0.6292E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 53 4931
19.00 0.45 0.00 15.00 50000 49857 143 0 50000 0 0.1274E+04 0.2185E+03 0.6588E+04 0.6123E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 546 49311
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 3000 450 0 15 0.5 0.0 0.0 0.0
5000 78742 78742 78742 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78742 78742 78742 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.out
+93 -90
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:13
Start: 19.Jun. 2026 20:11:21
End: 19.Jun. 2026 18:18:13
End: 19.Jun. 2026 20:11:32
Simulation needed for 5000 projectiles 0 seconds
Simulation needed for 50000 projectiles 11 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 3000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78742.00 78742.00 78742.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78742.00 78742.00 78742.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
14519 0 0 0 0 0 0 0 0
144662 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,113 +110,116 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4857 ENERGY=0.1457E+08 EV
BACKSCATTERED PARTICLES= 143 ENERGY=0.1267E+06 EV
IMPLANTED PARTICLES= 48581 ENERGY=0.1457E+09 EV
BACKSCATTERED PARTICLES= 1419 ENERGY=0.1141E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4857 4857
IMPLANTED PARTICLES (LAYER 1)= 48581 48581
IMPLANTED PARTICLES (LAYER 2)= 3418 0
IMPLANTED PARTICLES (LAYER 2)= 33710 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 182.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.017
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.988
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.016
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.979
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 2.1906E+02 5.8087E+03 -4.2100E-01 2.7761E+00 7.6215E+01 1.0936E+00 1.1108E+02 2.4606E-02
SPREAD 1.2860E+02 3.7677E+03 3.4498E-01 2.6500E+00 6.1382E+01 8.8076E-01 6.9445E+01 2.6897E-02
PATHLENGTH 4.2075E+02 1.2657E+03 -1.4347E-01 3.0654E+00 3.5577E+01 5.1049E-01 2.6101E+01 3.6371E-02
ELASTIC LOSS 2.1404E+01 8.7378E+01 9.3476E+00 1.9246E-03
INEL. LOSS 2.9731E+03 1.9989E+05 4.4709E+02 9.2051E-02
PENETRATION 2.2027E+02 5.7085E+03 -4.0113E-01 2.7658E+00 7.5555E+01 3.4279E-01 3.4416E+01 7.9937E-03
SPREAD 1.2743E+02 3.8079E+03 3.8059E-01 2.7297E+00 6.1708E+01 2.7997E-01 2.2721E+01 8.8224E-03
PATHLENGTH 4.2153E+02 1.2637E+03 -1.6717E-01 3.1304E+00 3.5548E+01 1.6128E-01 8.3684E+00 1.2161E-02
ELASTIC LOSS 2.1376E+01 8.5038E+01 9.2216E+00 1.8982E-04
INEL. LOSS 2.9830E+03 1.9962E+05 4.4679E+02 9.1969E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.1645E-01 5.9432E-01 2.7764E+01 1.3026E+03 7.7092E-01 8.0641E-04 2.2429E-02 1.2301E+00
WEAK EL.LOSS 2.7690E-03 3.2146E-05 3.0433E+00 1.2616E+01 5.6697E-03 5.9307E-06 1.1460E-07 5.9581E-03
INELAST.LOSS 1.6112E+01 7.8896E+01 -1.6288E-01 1.7922E+00 8.8824E+00 9.2912E-03 7.3457E-02 1.5418E-03
SUBTHR.LOSS 1.1271E-01 4.3504E-01 1.8939E+01 5.1744E+02 6.5957E-01 6.8997E-04 1.0342E-02 2.4220E-01
ELAST.LOSS 1.1584E-01 5.7816E-01 2.7742E+01 1.3465E+03 7.6037E-01 2.5118E-04 7.0056E-03 4.7079E-01
WEAK EL.LOSS 2.7654E-03 3.2133E-05 3.0441E+00 1.2615E+01 5.6686E-03 1.8726E-06 3.6176E-08 1.8819E-03
INELAST.LOSS 1.6134E+01 7.9067E+01 -1.6376E-01 1.7919E+00 8.8920E+00 2.9373E-03 2.3243E-02 4.8698E-04
SUBTHR.LOSS 1.1241E-01 4.3085E-01 1.8800E+01 5.0838E+02 6.5640E-01 2.1684E-04 3.2061E-03 7.5832E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 2.1906E+02 5.3798E+04 1.4144E+07 3.9059E+09 1.1213E+12 3.3239E+14
PENETRATION 2.2027E+02 5.4225E+04 1.4286E+07 3.9533E+09 1.1373E+12 3.3785E+14
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 27 0.5559E-02 0 1.3541E+06 4.1656E+03 4.1469E+03 7.2371E+02 3.4232E+03 5.4340E+02 16
20.- 40. 63 0.1297E-01 0 1.3711E+06 4.8990E+03 4.8623E+03 7.0736E+02 4.1549E+03 5.3515E+02 17
40.- 60. 77 0.1585E-01 0 1.3707E+06 5.5221E+03 5.4751E+03 6.4620E+02 4.8288E+03 4.8624E+02 15
60.- 80. 100 0.2059E-01 0 1.3511E+06 6.0789E+03 6.0165E+03 4.9732E+02 5.5192E+03 3.7907E+02 14
80.- 100. 133 0.2738E-01 0 1.3162E+06 6.6614E+03 6.5848E+03 4.0020E+02 6.1846E+03 3.0309E+02 11
100.- 120. 167 0.3438E-01 0 1.2766E+06 7.3410E+03 7.2451E+03 2.3695E+02 7.0082E+03 1.7911E+02 6
120.- 140. 213 0.4385E-01 0 1.2061E+06 7.9407E+03 7.8215E+03 1.1703E+02 7.7045E+03 8.8050E+01 3
140.- 160. 248 0.5106E-01 0 1.1382E+06 8.9439E+03 8.8024E+03 3.2899E+01 8.7695E+03 2.4985E+01 1
160.- 180. 352 0.7247E-01 0 1.0090E+06 9.0258E+03 8.8383E+03 3.3284E+01 8.8050E+03 2.5263E+01 1
180.- 200. 400 0.8236E-01 0 8.9233E+05 9.2281E+03 9.0115E+03 3.0266E+01 8.9812E+03 2.3079E+01 1
200.- 220. 465 0.9574E-01 0 7.4231E+05 9.0052E+03 8.7593E+03 0.0000E+00 8.7593E+03 0.0000E+00 0
220.- 240. 533 0.1097E+00 0 5.9426E+05 8.4774E+03 8.1997E+03 0.0000E+00 8.1997E+03 0.0000E+00 0
240.- 260. 509 0.1048E+00 0 4.3887E+05 7.0773E+03 6.8105E+03 0.0000E+00 6.8105E+03 0.0000E+00 0
260.- 280. 490 0.1009E+00 1 2.9744E+05 5.6736E+03 5.4365E+03 0.0000E+00 5.4365E+03 0.0000E+00 0
280.- 300. 411 0.8462E-01 2 1.8178E+05 4.0558E+03 3.8568E+03 0.0000E+00 3.8568E+03 0.0000E+00 0
300.- 320. 291 0.5991E-01 12 1.0173E+05 2.4635E+03 2.3292E+03 0.0000E+00 2.3292E+03 0.0000E+00 0
320.- 340. 192 0.3953E-01 64 5.2131E+04 1.3841E+03 1.2959E+03 0.0000E+00 1.2959E+03 0.0000E+00 0
340.- 360. 126 0.2594E-01 154 2.3774E+04 7.4293E+02 6.8788E+02 0.0000E+00 6.8788E+02 0.0000E+00 0
360.- 380. 45 0.9265E-02 387 5.9647E+03 2.1360E+02 1.9482E+02 0.0000E+00 1.9482E+02 0.0000E+00 0
380.- 400. 10 0.2059E-02 695 1.0164E+03 3.6547E+01 3.2685E+01 0.0000E+00 3.2685E+01 0.0000E+00 0
400.- 420. 5 0.1029E-02 1016 3.0697E+02 1.6176E+01 1.4297E+01 0.0000E+00 1.4297E+01 0.0000E+00 0
420.- 440. 0 0.0000E+00 1087 4.1985E-01 2.8665E-02 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0
440.- 460. 0 0.0000E+00 812 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 418 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 156 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 45 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 211 0.4343E-02 0 1.3592E+07 4.1036E+04 4.0850E+04 5.6820E+03 3.5168E+04 4.2623E+03 128
20.- 40. 519 0.1068E-01 0 1.3671E+07 4.5436E+04 4.5114E+04 4.8855E+03 4.0228E+04 3.6825E+03 114
40.- 60. 714 0.1470E-01 0 1.3601E+07 5.1634E+04 5.1194E+04 4.9654E+03 4.6228E+04 3.7513E+03 125
60.- 80. 1013 0.2085E-01 0 1.3492E+07 5.8730E+04 5.8139E+04 4.5502E+03 5.3589E+04 3.4269E+03 110
80.- 100. 1268 0.2610E-01 0 1.3213E+07 6.5685E+04 6.4943E+04 3.9067E+03 6.1036E+04 2.9500E+03 103
100.- 120. 1624 0.3343E-01 0 1.2773E+07 7.2660E+04 7.1719E+04 3.0664E+03 6.8653E+04 2.3081E+03 79
120.- 140. 2145 0.4415E-01 0 1.2188E+07 8.1831E+04 8.0622E+04 2.2051E+03 7.8417E+04 1.6654E+03 59
140.- 160. 2674 0.5504E-01 0 1.1322E+07 8.6373E+04 8.4878E+04 1.0945E+03 8.3783E+04 8.2931E+02 32
160.- 180. 3421 0.7042E-01 0 1.0318E+07 9.2766E+04 9.0885E+04 6.8201E+02 9.0203E+04 5.1680E+02 20
180.- 200. 4130 0.8501E-01 0 8.9595E+06 9.4508E+04 9.2289E+04 3.0365E+02 9.1986E+04 2.3028E+02 9
200.- 220. 4697 0.9668E-01 0 7.4727E+06 9.0797E+04 8.8302E+04 1.6856E+02 8.8134E+04 1.2785E+02 5
220.- 240. 5032 0.1036E+00 0 5.9479E+06 8.4475E+04 8.1852E+04 6.3640E+01 8.1788E+04 4.8411E+01 2
240.- 260. 5131 0.1056E+00 2 4.4409E+06 7.2565E+04 6.9939E+04 0.0000E+00 6.9939E+04 0.0000E+00 0
260.- 280. 4868 0.1002E+00 13 3.0540E+06 5.7326E+04 5.4918E+04 0.0000E+00 5.4918E+04 0.0000E+00 0
280.- 300. 4245 0.8738E-01 33 1.9173E+06 4.1378E+04 3.9343E+04 0.0000E+00 3.9343E+04 0.0000E+00 0
300.- 320. 3035 0.6247E-01 145 1.0677E+06 2.5687E+04 2.4251E+04 0.0000E+00 2.4251E+04 0.0000E+00 0
320.- 340. 2101 0.4325E-01 490 5.1863E+05 1.4378E+04 1.3437E+04 0.0000E+00 1.3437E+04 0.0000E+00 0
340.- 360. 1084 0.2231E-01 1554 2.1213E+05 6.4539E+03 5.9807E+03 0.0000E+00 5.9807E+03 0.0000E+00 0
360.- 380. 459 0.9448E-02 3716 7.1322E+04 2.4585E+03 2.2605E+03 0.0000E+00 2.2605E+03 0.0000E+00 0
380.- 400. 164 0.3376E-02 6866 1.6132E+04 5.8556E+02 5.2434E+02 0.0000E+00 5.2434E+02 0.0000E+00 0
400.- 420. 32 0.6587E-03 10063 3.9817E+03 1.4096E+02 1.2699E+02 0.0000E+00 1.2699E+02 0.0000E+00 0
420.- 440. 11 0.2264E-03 10828 7.3157E+02 3.4968E+01 3.1187E+01 0.0000E+00 3.1187E+01 0.0000E+00 0
440.- 460. 2 0.4117E-04 8229 8.9047E+01 3.7954E+00 3.0370E+00 0.0000E+00 3.0370E+00 0.0000E+00 0
460.- 480. 1 0.2058E-04 4441 1.6697E+01 1.4783E+00 1.2819E+00 0.0000E+00 1.2819E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 1693 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 423 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 79 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- SUT 0 0.0000E+00
600.- 620. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- SUT 0 0.0000E+00
4857 1.0000E+00 4857 1.4725E+07 1.0895E+05 1.0642E+05 3.4252E+03 1.0300E+05 2.5874E+03 85
48581 1.0000E+00 48581 1.4785E+08 1.0869E+06 1.0616E+06 3.1574E+04 1.0300E+06 2.3799E+04 786
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.4804E+05 1.3741E+03 1.4968E+02 1.2244E+03 9.0609E+05 2.7728E+03 5.7403E+02 2.1988E+03 4 12
20.- 40. 4.6000E+05 1.6978E+03 1.8607E+02 1.5117E+03 9.1109E+05 3.1645E+03 5.2129E+02 2.6432E+03 5 12
40.- 60. 4.5386E+05 1.9388E+03 1.3745E+02 1.8013E+03 9.1681E+05 3.5363E+03 5.0876E+02 3.0275E+03 4 11
60.- 80. 4.5328E+05 2.1452E+03 1.2824E+02 2.0170E+03 8.9779E+05 3.8713E+03 3.6908E+02 3.5022E+03 4 10
80.- 100. 4.3710E+05 2.2575E+03 3.4094E+01 2.2234E+03 8.7905E+05 4.3273E+03 3.6611E+02 3.9612E+03 1 10
100.- 120. 4.2632E+05 2.3770E+03 3.5240E+01 2.3417E+03 8.5026E+05 4.8682E+03 2.0171E+02 4.6664E+03 1 5
120.- 140. 4.0331E+05 2.5136E+03 0.0000E+00 2.5136E+03 8.0282E+05 5.3079E+03 1.1703E+02 5.1909E+03 0 3
140.- 160. 3.7830E+05 2.8527E+03 0.0000E+00 2.8527E+03 7.5989E+05 5.9497E+03 3.2899E+01 5.9168E+03 0 1
160.- 180. 3.3518E+05 2.7628E+03 0.0000E+00 2.7628E+03 6.7386E+05 6.0755E+03 3.3284E+01 6.0422E+03 0 1
180.- 200. 2.9380E+05 2.8077E+03 0.0000E+00 2.8077E+03 5.9853E+05 6.2038E+03 3.0266E+01 6.1735E+03 0 1
200.- 220. 2.4259E+05 2.6196E+03 0.0000E+00 2.6196E+03 4.9973E+05 6.1397E+03 0.0000E+00 6.1397E+03 0 0
220.- 240. 1.9632E+05 2.5112E+03 0.0000E+00 2.5112E+03 3.9793E+05 5.6885E+03 0.0000E+00 5.6885E+03 0 0
240.- 260. 1.4776E+05 2.1222E+03 0.0000E+00 2.1222E+03 2.9111E+05 4.6883E+03 0.0000E+00 4.6883E+03 0 0
260.- 280. 9.7696E+04 1.5764E+03 0.0000E+00 1.5764E+03 1.9974E+05 3.8601E+03 0.0000E+00 3.8601E+03 0 0
280.- 300. 5.9678E+04 1.1219E+03 0.0000E+00 1.1219E+03 1.2210E+05 2.7349E+03 0.0000E+00 2.7349E+03 0 0
300.- 320. 3.3728E+04 6.7248E+02 0.0000E+00 6.7248E+02 6.8004E+04 1.6567E+03 0.0000E+00 1.6567E+03 0 0
320.- 340. 1.7228E+04 3.5739E+02 0.0000E+00 3.5739E+02 3.4903E+04 9.3852E+02 0.0000E+00 9.3852E+02 0 0
340.- 360. 8.0718E+03 2.0314E+02 0.0000E+00 2.0314E+02 1.5702E+04 4.8474E+02 0.0000E+00 4.8474E+02 0 0
360.- 380. 1.9762E+03 5.0995E+01 0.0000E+00 5.0995E+01 3.9885E+03 1.4383E+02 0.0000E+00 1.4383E+02 0 0
380.- 400. 3.0700E+02 1.0313E+01 0.0000E+00 1.0313E+01 7.0943E+02 2.2372E+01 0.0000E+00 2.2372E+01 0 0
400.- 420. 1.2611E+02 4.0839E+00 0.0000E+00 4.0839E+00 1.8086E+02 1.0213E+01 0.0000E+00 1.0213E+01 0 0
420.- 440. 4.1985E-01 1.3998E-02 0.0000E+00 1.3998E-02 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
460.- 480. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
0.- 20. 4.5404E+06 1.4693E+04 1.0088E+03 1.3684E+04 9.0521E+06 2.6157E+04 4.6732E+03 2.1484E+04 27 101
20.- 40. 4.5471E+06 1.6644E+04 1.2075E+03 1.5436E+04 9.1237E+06 2.8470E+04 3.6780E+03 2.4792E+04 34 80
40.- 60. 4.5152E+06 1.7839E+04 8.9332E+02 1.6945E+04 9.0861E+06 3.3355E+04 4.0721E+03 2.9283E+04 26 99
60.- 80. 4.4923E+06 2.0432E+04 7.0375E+02 1.9728E+04 8.9996E+06 3.7707E+04 3.8464E+03 3.3861E+04 21 89
80.- 100. 4.3910E+06 2.2561E+04 2.9520E+02 2.2266E+04 8.8219E+06 4.2382E+04 3.6115E+03 3.8770E+04 9 94
100.- 120. 4.2531E+06 2.3999E+04 6.7495E+01 2.3932E+04 8.5201E+06 4.7720E+04 2.9989E+03 4.4721E+04 2 77
120.- 140. 4.0557E+06 2.6572E+04 1.0166E+02 2.6470E+04 8.1327E+06 5.4050E+04 2.1035E+03 5.1947E+04 3 56
140.- 160. 3.7786E+06 2.7814E+04 0.0000E+00 2.7814E+04 7.5433E+06 5.7064E+04 1.0945E+03 5.5969E+04 0 32
160.- 180. 3.4245E+06 2.8965E+04 0.0000E+00 2.8965E+04 6.8932E+06 6.1921E+04 6.8201E+02 6.1239E+04 0 20
180.- 200. 2.9717E+06 2.9183E+04 0.0000E+00 2.9183E+04 5.9878E+06 6.3107E+04 3.0365E+02 6.2803E+04 0 9
200.- 220. 2.4842E+06 2.7318E+04 0.0000E+00 2.7318E+04 4.9885E+06 6.0985E+04 1.6856E+02 6.0816E+04 0 5
220.- 240. 1.9735E+06 2.4936E+04 0.0000E+00 2.4936E+04 3.9744E+06 5.6915E+04 6.3640E+01 5.6852E+04 0 2
240.- 260. 1.4772E+06 2.0958E+04 0.0000E+00 2.0958E+04 2.9637E+06 4.8981E+04 0.0000E+00 4.8981E+04 0 0
260.- 280. 1.0116E+06 1.6279E+04 0.0000E+00 1.6279E+04 2.0425E+06 3.8639E+04 0.0000E+00 3.8639E+04 0 0
280.- 300. 6.3163E+05 1.1456E+04 0.0000E+00 1.1456E+04 1.2857E+06 2.7888E+04 0.0000E+00 2.7888E+04 0 0
300.- 320. 3.5286E+05 6.9468E+03 0.0000E+00 6.9468E+03 7.1485E+05 1.7304E+04 0.0000E+00 1.7304E+04 0 0
320.- 340. 1.7134E+05 3.8373E+03 0.0000E+00 3.8373E+03 3.4729E+05 9.6001E+03 0.0000E+00 9.6001E+03 0 0
340.- 360. 6.9677E+04 1.6390E+03 0.0000E+00 1.6390E+03 1.4245E+05 4.3418E+03 0.0000E+00 4.3418E+03 0 0
360.- 380. 2.3348E+04 6.1483E+02 0.0000E+00 6.1483E+02 4.7973E+04 1.6456E+03 0.0000E+00 1.6456E+03 0 0
380.- 400. 5.4672E+03 1.4354E+02 0.0000E+00 1.4354E+02 1.0665E+04 3.8080E+02 0.0000E+00 3.8080E+02 0 0
400.- 420. 1.1894E+03 2.8289E+01 0.0000E+00 2.8289E+01 2.7923E+03 9.8705E+01 0.0000E+00 9.8705E+01 0 0
420.- 440. 2.3867E+02 6.0792E+00 0.0000E+00 6.0792E+00 4.9290E+02 2.5107E+01 0.0000E+00 2.5107E+01 0 0
440.- 460. 2.0664E+01 7.7895E-01 0.0000E+00 7.7895E-01 6.8383E+01 2.2580E+00 0.0000E+00 2.2580E+00 0 0
460.- 480. 5.0327E+00 2.5038E-01 0.0000E+00 2.5038E-01 1.1664E+01 1.0315E+00 0.0000E+00 1.0315E+00 0 0
480.- 500. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
500.- 520. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
4.8947E+06 3.3977E+04 6.7077E+02 3.3306E+04 9.8303E+06 7.2445E+04 2.7544E+03 6.9691E+04 19 66
4.9172E+07 3.4286E+05 4.2777E+03 3.3859E+05 9.8682E+07 7.1874E+05 2.7296E+04 6.9145E+05 122 664
DAMAGE IN LAYER 1 : 1.0642E+05
DAMAGE IN LAYER 1 : 1.0616E+06
DAMAGE IN LAYER 2 : 0.0000E+00
1
@@ -224,18 +227,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.8600E-02 ENERGY REFL.COEF.= 8.4499E-03 REL.MEAN ENERGY = 2.9545E-01 MEAN ENERGY = 8.8635E+02
PART.REFL.COEF.= 2.8380E-02 ENERGY REFL.COEF.= 7.6078E-03 REL.MEAN ENERGY = 2.6807E-01 MEAN ENERGY = 8.0421E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.8635E+02 6.1152E+05 1.1259E+00 3.4515E+00 7.8200E+02 6.5394E+01 8.0069E+04 1.6306E-01
PATHLENGTH 2.1399E+02 9.9029E+03 -3.5218E-01 2.0818E+00 9.9513E+01 8.3217E+00 8.6132E+02 1.2601E-01
ELASTIC LOSS 3.4934E+01 2.2564E+02 1.5021E+01 1.0504E-01
INEL. LOSS 1.9902E+03 6.5831E+05 8.1137E+02 5.6739E+00
ENERGY 8.0421E+02 5.3116E+05 1.2095E+00 4.0470E+00 7.2881E+02 1.9347E+01 2.4614E+04 7.7436E-02
PATHLENGTH 2.2571E+02 1.0232E+04 -2.2512E-01 2.2777E+00 1.0115E+02 2.6853E+00 3.0703E+02 3.9392E-02
ELASTIC LOSS 3.4155E+01 2.0591E+02 1.4349E+01 1.0112E-02
INEL. LOSS 2.0710E+03 6.3098E+05 7.9435E+02 5.5979E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.8635E+02 1.3971E+06 2.8608E+09 6.6994E+12 1.6993E+16 4.5424E+19
LOGENERGY 2.7485E+00 7.7631E+00 2.2443E+01 6.6183E+01 1.9852E+02 6.0424E+02
PATHLENGTH 2.1399E+02 5.5694E+04 1.5809E+07 4.7247E+09 1.4630E+12 4.6533E+14
ENERGY 8.0421E+02 1.1779E+06 2.2699E+09 5.1275E+12 1.2963E+16 3.5968E+19
LOGENERGY 2.6691E+00 7.4159E+00 2.1184E+01 6.1843E+01 1.8375E+02 5.5404E+02
PATHLENGTH 2.2571E+02 6.1176E+04 1.8194E+07 5.7510E+09 1.9011E+12 6.5081E+14
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -243,5 +246,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 2 4 3 4 4 7 7 7 10 8 13 9 11 10 14 16 13
0.000 0.000 0.140 0.280 0.559 0.420 0.559 0.559 0.979 0.979 0.979 1.399 1.119 1.818 1.259 1.538 1.399 1.958 2.238 1.818
0 1 6 18 36 28 40 50 41 64 73 89 101 109 110 140 107 126 138 142
0.000 0.014 0.085 0.254 0.507 0.395 0.564 0.705 0.578 0.902 1.029 1.254 1.424 1.536 1.550 1.973 1.508 1.776 1.945 2.001
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.rge
+25 -24
View File
@@ -1,31 +1,32 @@
DEPTH PARTICLES
10.0000 27
30.0000 63
50.0000 77
70.0000 100
90.0000 133
110.0000 167
130.0000 213
150.0000 248
170.0000 352
190.0000 400
210.0000 465
230.0000 533
250.0000 509
270.0000 490
290.0000 411
310.0000 291
330.0000 192
350.0000 126
370.0000 45
390.0000 10
410.0000 5
430.0000 0
450.0000 0
470.0000 0
10.0000 211
30.0000 519
50.0000 714
70.0000 1013
90.0000 1268
110.0000 1624
130.0000 2145
150.0000 2674
170.0000 3421
190.0000 4130
210.0000 4697
230.0000 5032
250.0000 5131
270.0000 4868
290.0000 4245
310.0000 3035
330.0000 2101
350.0000 1084
370.0000 459
390.0000 164
410.0000 32
430.0000 11
450.0000 2
470.0000 1
490.0000 0
510.0000 0
530.0000 0
550.0000 0
570.0000 0
590.0000 0
610.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E3000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
3.00 0.45 0.00 15.00 5000 4857 143 0 5000 0 0.2191E+03 0.7622E+02 0.8864E+03 0.7820E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4857 0
3.00 0.45 0.00 15.00 50000 48581 1419 0 50000 0 0.2203E+03 0.7555E+02 0.8042E+03 0.7288E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48581 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 5000 450 0 15 0.5 0.0 0.0 0.0
5000 78743 78743 78743 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78743 78743 78743 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.out
+100 -99
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:13
Start: 19.Jun. 2026 20:11:21
End: 19.Jun. 2026 18:18:14
End: 19.Jun. 2026 20:11:35
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 14 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 5000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78743.00 78743.00 78743.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78743.00 78743.00 78743.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
19523 0 0 0 0 0 0 0 0
193975 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,143 +110,144 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4920 ENERGY=0.2460E+08 EV
BACKSCATTERED PARTICLES= 80 ENERGY=0.1048E+06 EV
IMPLANTED PARTICLES= 49234 ENERGY=0.2462E+09 EV
BACKSCATTERED PARTICLES= 766 ENERGY=0.1134E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4880 4880
IMPLANTED PARTICLES (LAYER 1)= 48830 48830
IMPLANTED PARTICLES (LAYER 2)= 40 40
IMPLANTED PARTICLES (LAYER 2)= 407 404
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 246.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.032
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 246.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.033
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.192
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 3.3431E+02 9.1123E+03 -7.5591E-01 3.3696E+00 9.5458E+01 1.3609E+00 1.9998E+02 2.8724E-02
SPREAD 1.6707E+02 6.8868E+03 4.1445E-01 2.7291E+00 8.2987E+01 1.1831E+00 1.2911E+02 2.6580E-02
PATHLENGTH 5.6671E+02 9.5456E+02 -2.5698E-02 3.0454E+00 3.0896E+01 4.4047E-01 1.9463E+01 3.6776E-02
ELASTIC LOSS 2.5362E+01 1.4389E+02 1.1996E+01 2.4381E-03
INEL. LOSS 4.9754E+03 2.0238E+05 4.4987E+02 9.1437E-02
PENETRATION 3.3293E+02 8.9454E+03 -7.4139E-01 3.3880E+00 9.4580E+01 4.2625E-01 6.2299E+01 9.2945E-03
SPREAD 1.6906E+02 6.8507E+03 4.1258E-01 2.7180E+00 8.2769E+01 3.7302E-01 4.0468E+01 8.4647E-03
PATHLENGTH 5.6667E+02 9.5248E+02 -3.4928E-02 3.1504E+00 3.0862E+01 1.3909E-01 6.2949E+00 1.2402E-02
ELASTIC LOSS 2.5525E+01 1.3778E+02 1.1738E+01 2.3841E-04
INEL. LOSS 4.9749E+03 2.0176E+05 4.4918E+02 9.1233E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.0271E-01 7.2104E-01 4.0273E+01 2.8546E+03 8.4914E-01 7.6499E-04 3.4700E-02 2.1798E+00
WEAK EL.LOSS 2.0954E-03 2.5373E-05 3.6104E+00 1.6988E+01 5.0372E-03 4.5380E-06 9.1401E-08 6.6128E-03
INELAST.LOSS 2.0098E+01 1.0722E+02 -3.5686E-01 1.8386E+00 1.0355E+01 9.3286E-03 8.8454E-02 1.3817E-03
SUBTHR.LOSS 9.6721E-02 4.0552E-01 2.0417E+01 5.8991E+02 6.3680E-01 5.7374E-04 8.8662E-03 2.2868E-01
ELAST.LOSS 1.0347E-01 7.3835E-01 4.0171E+01 2.8415E+03 8.5928E-01 2.4482E-04 1.1212E-02 7.3035E-01
WEAK EL.LOSS 2.0972E-03 2.5392E-05 3.6084E+00 1.6975E+01 5.0391E-03 1.4357E-06 2.8915E-08 2.0914E-03
INELAST.LOSS 2.0095E+01 1.0724E+02 -3.5652E-01 1.8381E+00 1.0356E+01 2.9504E-03 2.7970E-02 4.3696E-04
SUBTHR.LOSS 9.7313E-02 4.1406E-01 2.0610E+01 5.9701E+02 6.4348E-01 1.8335E-04 2.8802E-03 6.9250E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 3.3431E+02 1.2087E+05 4.5844E+07 1.8001E+10 7.2652E+12 2.9998E+15
PENETRATION 3.3293E+02 1.1978E+05 4.5208E+07 1.7670E+10 7.1014E+12 2.9210E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 6 0.1220E-02 0 1.5486E+06 2.7100E+03 2.7028E+03 4.6180E+02 2.2410E+03 3.5044E+02 10
20.- 40. 15 0.3049E-02 0 1.5568E+06 2.8122E+03 2.7998E+03 2.7768E+02 2.5222E+03 2.0642E+02 5
40.- 60. 27 0.5488E-02 0 1.5504E+06 3.2218E+03 3.2061E+03 7.8139E+02 2.4247E+03 5.7603E+02 13
60.- 80. 36 0.7317E-02 0 1.5368E+06 3.6710E+03 3.6495E+03 7.6659E+02 2.8829E+03 5.7589E+02 16
80.- 100. 37 0.7520E-02 0 1.5349E+06 3.9104E+03 3.8855E+03 6.4358E+02 3.2419E+03 4.7769E+02 12
100.- 120. 40 0.8130E-02 0 1.5325E+06 4.4587E+03 4.4327E+03 8.9359E+02 3.5391E+03 6.7317E+02 20
120.- 140. 51 0.1037E-01 0 1.5040E+06 4.3310E+03 4.2971E+03 4.2155E+02 3.8756E+03 3.1969E+02 10
140.- 160. 64 0.1301E-01 0 1.4728E+06 5.1490E+03 5.1092E+03 6.1711E+02 4.4921E+03 4.6544E+02 14
160.- 180. 101 0.2053E-01 0 1.4530E+06 5.6202E+03 5.5656E+03 7.6148E+02 4.8041E+03 5.6672E+02 16
180.- 200. 113 0.2297E-01 0 1.4198E+06 6.5173E+03 6.4504E+03 8.5762E+02 5.5928E+03 6.3932E+02 19
200.- 220. 146 0.2967E-01 0 1.3764E+06 6.5568E+03 6.4747E+03 2.4463E+02 6.2301E+03 1.8696E+02 7
220.- 240. 154 0.3130E-01 0 1.2893E+06 6.7289E+03 6.6380E+03 1.4847E+02 6.4895E+03 1.1191E+02 4
240.- 260. 205 0.4167E-01 0 1.2071E+06 7.4390E+03 7.3263E+03 2.3686E+02 7.0894E+03 1.7811E+02 6
260.- 280. 240 0.4878E-01 0 1.1224E+06 7.7480E+03 7.6139E+03 1.0976E+02 7.5042E+03 8.2910E+01 3
280.- 300. 297 0.6037E-01 0 1.0111E+06 8.6354E+03 8.4741E+03 1.1063E+02 8.3635E+03 8.3456E+01 3
300.- 320. 317 0.6443E-01 0 8.9999E+05 8.5029E+03 8.3233E+03 3.4308E+01 8.2890E+03 2.6002E+01 1
320.- 340. 385 0.7825E-01 0 7.6180E+05 8.2272E+03 8.0210E+03 3.1879E+01 7.9891E+03 2.4248E+01 1
340.- 360. 448 0.9106E-01 0 6.2373E+05 8.1328E+03 7.9003E+03 0.0000E+00 7.9003E+03 0.0000E+00 0
360.- 380. 463 0.9411E-01 0 4.8160E+05 7.1319E+03 6.8937E+03 0.0000E+00 6.8937E+03 0.0000E+00 0
380.- 400. 472 0.9593E-01 0 3.6677E+05 6.3623E+03 6.1213E+03 0.0000E+00 6.1213E+03 0.0000E+00 0
400.- 420. 436 0.8862E-01 0 2.3627E+05 4.6441E+03 4.4305E+03 0.0000E+00 4.4305E+03 0.0000E+00 0
420.- 440. 341 0.6931E-01 0 1.4278E+05 3.0678E+03 2.9053E+03 0.0000E+00 2.9053E+03 0.0000E+00 0
440.- 460. 241 0.4898E-01 2 7.9414E+04 2.0268E+03 1.9166E+03 0.0000E+00 1.9166E+03 0.0000E+00 0
460.- 480. 156 0.3171E-01 14 3.5830E+04 1.0060E+03 9.3386E+02 0.0000E+00 9.3386E+02 0.0000E+00 0
480.- 500. 89 0.1809E-01 56 1.2781E+04 4.0605E+02 3.7119E+02 0.0000E+00 3.7119E+02 0.0000E+00 0
500.- 520. 22 0.4472E-02 244 3.7514E+03 8.1530E+01 7.7013E+01 0.0000E+00 7.7013E+01 0.0000E+00 0
520.- 540. 14 0.2846E-02 608 1.2422E+03 2.5275E+01 2.3272E+01 0.0000E+00 2.3272E+01 0.0000E+00 0
540.- 560. 3 0.6098E-03 1116 3.1018E+02 5.9354E+00 5.6338E+00 0.0000E+00 5.6338E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1225 1.1604E+02 2.8306E+00 2.6952E+00 0.0000E+00 2.6952E+00 0.0000E+00 0
580.- 600. 1 0.2033E-03 973 2.9102E+00 1.3337E-01 9.4219E-02 0.0000E+00 9.4219E-02 0.0000E+00 0
600.- 620. 0 0.0000E+00 480 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 160 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 33 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 93 0.1889E-02 0 1.5549E+07 3.0746E+04 3.0662E+04 8.5794E+03 2.2082E+04 6.3734E+03 152
20.- 40. 147 0.2986E-02 0 1.5550E+07 3.0628E+04 3.0511E+04 6.5086E+03 2.4002E+04 4.8466E+03 124
40.- 60. 219 0.4448E-02 0 1.5538E+07 3.4299E+04 3.4148E+04 7.2750E+03 2.6873E+04 5.4379E+03 143
60.- 80. 298 0.6053E-02 0 1.5466E+07 3.6002E+04 3.5808E+04 6.4904E+03 2.9318E+04 4.8496E+03 127
80.- 100. 359 0.7292E-02 0 1.5403E+07 3.9933E+04 3.9699E+04 6.8716E+03 3.2827E+04 5.1333E+03 137
100.- 120. 473 0.9607E-02 0 1.5274E+07 4.1343E+04 4.1058E+04 5.9171E+03 3.5141E+04 4.4186E+03 120
120.- 140. 549 0.1115E-01 0 1.5082E+07 4.6197E+04 4.5850E+04 5.4734E+03 4.0377E+04 4.1241E+03 124
140.- 160. 701 0.1424E-01 0 1.4792E+07 5.1255E+04 5.0831E+04 6.1864E+03 4.4645E+04 4.6543E+03 142
160.- 180. 941 0.1911E-01 0 1.4469E+07 5.5383E+04 5.4847E+04 5.9599E+03 4.8888E+04 4.4849E+03 139
180.- 200. 1084 0.2202E-01 0 1.4111E+07 5.9874E+04 5.9224E+04 4.3278E+03 5.4896E+04 3.2609E+03 107
200.- 220. 1348 0.2738E-01 0 1.3559E+07 6.5069E+04 6.4296E+04 3.7716E+03 6.0524E+04 2.8411E+03 95
220.- 240. 1695 0.3443E-01 0 1.2968E+07 7.1461E+04 7.0503E+04 3.7276E+03 6.6775E+04 2.8104E+03 97
240.- 260. 2044 0.4152E-01 0 1.2184E+07 7.7066E+04 7.5918E+04 2.3455E+03 7.3572E+04 1.7697E+03 63
260.- 280. 2482 0.5041E-01 0 1.1290E+07 8.1262E+04 7.9868E+04 1.4767E+03 7.8392E+04 1.1183E+03 42
280.- 300. 3034 0.6162E-01 0 1.0188E+07 8.4761E+04 8.3105E+04 6.2413E+02 8.2481E+04 4.7253E+02 18
300.- 320. 3554 0.7219E-01 0 8.9595E+06 8.6652E+04 8.4734E+04 3.3301E+02 8.4401E+04 2.5266E+02 10
320.- 340. 3912 0.7946E-01 0 7.6067E+06 8.4792E+04 8.2698E+04 7.0049E+01 8.2628E+04 5.3024E+01 2
340.- 360. 4428 0.8994E-01 0 6.2213E+06 7.9795E+04 7.7464E+04 3.1971E+01 7.7432E+04 2.4315E+01 1
360.- 380. 4719 0.9585E-01 0 4.8228E+06 7.2192E+04 6.9790E+04 0.0000E+00 6.9790E+04 0.0000E+00 0
380.- 400. 4506 0.9152E-01 0 3.5012E+06 6.0001E+04 5.7709E+04 0.0000E+00 5.7709E+04 0.0000E+00 0
400.- 420. 4235 0.8602E-01 1 2.3566E+06 4.6495E+04 4.4425E+04 0.0000E+00 4.4425E+04 0.0000E+00 0
420.- 440. 3334 0.6772E-01 2 1.3972E+06 3.1457E+04 2.9849E+04 0.0000E+00 2.9849E+04 0.0000E+00 0
440.- 460. 2397 0.4869E-01 21 7.4429E+05 1.8985E+04 1.7870E+04 0.0000E+00 1.7870E+04 0.0000E+00 0
460.- 480. 1511 0.3069E-01 149 3.3874E+05 9.6839E+03 9.0125E+03 0.0000E+00 9.0125E+03 0.0000E+00 0
480.- 500. 767 0.1558E-01 649 1.2610E+05 4.0102E+03 3.6937E+03 0.0000E+00 3.6937E+03 0.0000E+00 0
500.- 520. 261 0.5301E-02 2345 3.8748E+04 7.8469E+02 7.3986E+02 0.0000E+00 7.3986E+02 0.0000E+00 0
520.- 540. 90 0.1828E-02 6242 1.1106E+04 2.1830E+02 2.0583E+02 0.0000E+00 2.0583E+02 0.0000E+00 0
540.- 560. 37 0.7515E-03 10817 3.9427E+03 9.3714E+01 8.8493E+01 0.0000E+00 8.8493E+01 0.0000E+00 0
560.- 580. 13 0.2640E-03 12652 1.0734E+03 2.4377E+01 2.2405E+01 0.0000E+00 2.2405E+01 0.0000E+00 0
580.- 600. 2 0.4062E-04 9614 7.7319E+01 2.4677E+00 2.2811E+00 0.0000E+00 2.2811E+00 0.0000E+00 0
600.- 620. 1 0.2031E-04 4699 2.4402E+01 5.7612E-01 4.6932E-01 0.0000E+00 4.6932E-01 0.0000E+00 0
620.- 640. 0 0.0000E+00 1604 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 362 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 68 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- SUT 0 0.0000E+00
740.- 760. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- SUT 0 0.0000E+00
4920 1.0000E+00 4920 2.4762E+07 1.2913E+05 1.2655E+05 7.3989E+03 1.1915E+05 5.5444E+03 160
49234 1.0000E+00 49234 2.4755E+08 1.3005E+06 1.2746E+06 7.5970E+04 1.1987E+06 5.6926E+04 1643
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1486E+05 1.0721E+03 2.1632E+02 8.5583E+02 1.0338E+06 1.6306E+03 2.4548E+02 1.3851E+03 4 6
20.- 40. 5.1538E+05 1.0649E+03 9.0520E+01 9.7438E+02 1.0414E+06 1.7349E+03 1.8716E+02 1.5478E+03 2 3
40.- 60. 5.1456E+05 1.1280E+03 1.9288E+02 9.3510E+02 1.0358E+06 2.0781E+03 5.8851E+02 1.4896E+03 5 8
60.- 80. 5.1492E+05 1.3796E+03 2.9313E+02 1.0864E+03 1.0219E+06 2.2700E+03 4.7346E+02 1.7965E+03 7 9
80.- 100. 5.0681E+05 1.4653E+03 1.5713E+02 1.3082E+03 1.0281E+06 2.4201E+03 4.8644E+02 1.9337E+03 4 8
100.- 120. 5.0863E+05 1.7589E+03 2.9608E+02 1.4628E+03 1.0239E+06 2.6738E+03 5.9751E+02 2.0763E+03 8 12
120.- 140. 4.9884E+05 1.7609E+03 1.5813E+02 1.6028E+03 1.0051E+06 2.5362E+03 2.6342E+02 2.2728E+03 4 6
140.- 160. 4.8936E+05 1.8486E+03 2.1144E+02 1.6371E+03 9.8343E+05 3.2606E+03 4.0566E+02 2.8550E+03 6 8
160.- 180. 4.8072E+05 2.0130E+03 7.3077E+01 1.9399E+03 9.7228E+05 3.5526E+03 6.8840E+02 2.8642E+03 2 14
180.- 200. 4.7787E+05 2.1644E+03 0.0000E+00 2.1644E+03 9.4191E+05 4.2861E+03 8.5762E+02 3.4284E+03 0 19
200.- 220. 4.5961E+05 2.3311E+03 7.1035E+01 2.2600E+03 9.1677E+05 4.1437E+03 1.7360E+02 3.9701E+03 2 5
220.- 240. 4.3134E+05 2.3922E+03 0.0000E+00 2.3922E+03 8.5796E+05 4.2458E+03 1.4847E+02 4.0973E+03 0 4
240.- 260. 3.9687E+05 2.4265E+03 0.0000E+00 2.4265E+03 8.1026E+05 4.8998E+03 2.3686E+02 4.6630E+03 0 6
260.- 280. 3.7284E+05 2.3985E+03 0.0000E+00 2.3985E+03 7.4956E+05 5.2155E+03 1.0976E+02 5.1057E+03 0 3
280.- 300. 3.3638E+05 2.6301E+03 0.0000E+00 2.6301E+03 6.7468E+05 5.8441E+03 1.1063E+02 5.7334E+03 0 3
300.- 320. 3.0004E+05 2.6123E+03 0.0000E+00 2.6123E+03 5.9996E+05 5.7110E+03 3.4308E+01 5.6767E+03 0 1
320.- 340. 2.5621E+05 2.4674E+03 0.0000E+00 2.4674E+03 5.0558E+05 5.5536E+03 3.1879E+01 5.5217E+03 0 1
340.- 360. 2.0414E+05 2.4392E+03 0.0000E+00 2.4392E+03 4.1959E+05 5.4611E+03 0.0000E+00 5.4611E+03 0 0
360.- 380. 1.6085E+05 2.0462E+03 0.0000E+00 2.0462E+03 3.2075E+05 4.8475E+03 0.0000E+00 4.8475E+03 0 0
380.- 400. 1.2219E+05 1.7378E+03 0.0000E+00 1.7378E+03 2.4458E+05 4.3835E+03 0.0000E+00 4.3835E+03 0 0
400.- 420. 7.8978E+04 1.3191E+03 0.0000E+00 1.3191E+03 1.5730E+05 3.1114E+03 0.0000E+00 3.1114E+03 0 0
420.- 440. 4.7315E+04 8.4491E+02 0.0000E+00 8.4491E+02 9.5469E+04 2.0604E+03 0.0000E+00 2.0604E+03 0 0
440.- 460. 2.6211E+04 5.1854E+02 0.0000E+00 5.1854E+02 5.3203E+04 1.3980E+03 0.0000E+00 1.3980E+03 0 0
460.- 480. 1.1401E+04 2.5344E+02 0.0000E+00 2.5344E+02 2.4429E+04 6.8041E+02 0.0000E+00 6.8041E+02 0 0
480.- 500. 4.0204E+03 9.4733E+01 0.0000E+00 9.4733E+01 8.6432E+03 2.7437E+02 0.0000E+00 2.7437E+02 0 0
500.- 520. 1.3266E+02 4.4402E+00 0.0000E+00 4.4402E+00 2.2936E+02 7.2359E+00 0.0000E+00 7.2359E+00 0 0
0.- 20. 5.1909E+06 1.1700E+04 2.9225E+03 8.7776E+03 1.0359E+07 1.8961E+04 5.6569E+03 1.3305E+04 60 92
20.- 40. 5.1574E+06 1.1349E+04 1.9200E+03 9.4295E+03 1.0392E+07 1.9161E+04 4.5886E+03 1.4572E+04 43 81
40.- 60. 5.1784E+06 1.2925E+04 2.3864E+03 1.0539E+04 1.0360E+07 2.1223E+04 4.8885E+03 1.6334E+04 56 87
60.- 80. 5.1696E+06 1.3661E+04 2.0582E+03 1.1603E+04 1.0296E+07 2.2147E+04 4.4323E+03 1.7715E+04 48 79
80.- 100. 5.1465E+06 1.4847E+04 1.8956E+03 1.2951E+04 1.0256E+07 2.4852E+04 4.9760E+03 1.9876E+04 46 91
100.- 120. 5.0966E+06 1.4975E+04 1.3301E+03 1.3645E+04 1.0177E+07 2.6084E+04 4.5870E+03 2.1497E+04 33 87
120.- 140. 5.0304E+06 1.7048E+04 1.6147E+03 1.5434E+04 1.0051E+07 2.8802E+04 3.8586E+03 2.4943E+04 43 81
140.- 160. 4.9234E+06 1.8050E+04 1.4074E+03 1.6643E+04 9.8682E+06 3.2781E+04 4.7790E+03 2.8002E+04 38 104
160.- 180. 4.8056E+06 1.9150E+04 1.1503E+03 1.8000E+04 9.6638E+06 3.5697E+04 4.8096E+03 3.0887E+04 33 106
180.- 200. 4.6952E+06 2.0728E+04 5.8766E+02 2.0141E+04 9.4154E+06 3.8495E+04 3.7402E+03 3.4755E+04 17 90
200.- 220. 4.5073E+06 2.1914E+04 3.3030E+02 2.1583E+04 9.0519E+06 4.2382E+04 3.4413E+03 3.8941E+04 10 85
220.- 240. 4.3242E+06 2.2842E+04 1.9817E+02 2.2644E+04 8.6437E+06 4.7661E+04 3.5294E+03 4.4131E+04 6 91
240.- 260. 4.0562E+06 2.5500E+04 3.5171E+01 2.5465E+04 8.1279E+06 5.0417E+04 2.3104E+03 4.8107E+04 1 62
260.- 280. 3.7549E+06 2.6402E+04 3.2810E+01 2.6369E+04 7.5353E+06 5.3467E+04 1.4439E+03 5.2023E+04 1 41
280.- 300. 3.3837E+06 2.6839E+04 0.0000E+00 2.6839E+04 6.8044E+06 5.6266E+04 6.2413E+02 5.5642E+04 0 18
300.- 320. 2.9846E+06 2.7076E+04 0.0000E+00 2.7076E+04 5.9749E+06 5.7658E+04 3.3301E+02 5.7325E+04 0 10
320.- 340. 2.5261E+06 2.5790E+04 0.0000E+00 2.5790E+04 5.0806E+06 5.6908E+04 7.0049E+01 5.6838E+04 0 2
340.- 360. 2.0653E+06 2.4005E+04 0.0000E+00 2.4005E+04 4.1560E+06 5.3458E+04 3.1971E+01 5.3426E+04 0 1
360.- 380. 1.5999E+06 2.1148E+04 0.0000E+00 2.1148E+04 3.2229E+06 4.8641E+04 0.0000E+00 4.8641E+04 0 0
380.- 400. 1.1638E+06 1.7249E+04 0.0000E+00 1.7249E+04 2.3374E+06 4.0460E+04 0.0000E+00 4.0460E+04 0 0
400.- 420. 7.7835E+05 1.3021E+04 0.0000E+00 1.3021E+04 1.5783E+06 3.1403E+04 0.0000E+00 3.1403E+04 0 0
420.- 440. 4.6181E+05 8.5133E+03 0.0000E+00 8.5133E+03 9.3542E+05 2.1336E+04 0.0000E+00 2.1336E+04 0 0
440.- 460. 2.4586E+05 5.1353E+03 0.0000E+00 5.1353E+03 4.9843E+05 1.2734E+04 0.0000E+00 1.2734E+04 0 0
460.- 480. 1.1158E+05 2.5686E+03 0.0000E+00 2.5686E+03 2.2716E+05 6.4439E+03 0.0000E+00 6.4439E+03 0 0
480.- 500. 4.1511E+04 1.0381E+03 0.0000E+00 1.0381E+03 8.3506E+04 2.6338E+03 0.0000E+00 2.6338E+03 0 0
500.- 520. 1.3724E+03 2.1455E+01 0.0000E+00 2.1455E+01 2.5492E+03 6.3840E+01 0.0000E+00 6.3840E+01 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.2305E+06 4.2172E+04 1.7598E+03 4.0412E+04 1.6527E+07 8.4280E+04 5.6392E+03 7.8641E+04 44 116
8.2400E+07 4.2350E+05 1.7869E+04 4.0563E+05 1.6510E+08 8.5014E+05 5.8101E+04 7.9204E+05 435 1208
DAMAGE IN LAYER 1 : 1.2644E+05
DAMAGE IN LAYER 1 : 1.2736E+06
DAMAGE IN LAYER 2 : 1.0871E+02
DAMAGE IN LAYER 2 : 1.0593E+03
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.6000E-02 ENERGY REFL.COEF.= 4.1940E-03 REL.MEAN ENERGY = 2.6212E-01 MEAN ENERGY = 1.3106E+03
PART.REFL.COEF.= 1.5320E-02 ENERGY REFL.COEF.= 4.5362E-03 REL.MEAN ENERGY = 2.9610E-01 MEAN ENERGY = 1.4805E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.3106E+03 1.3964E+06 8.7869E-01 2.6557E+00 1.1817E+03 1.3212E+02 2.0088E+05 1.9292E-01
PATHLENGTH 3.1656E+02 1.8701E+04 -2.9976E-01 2.1365E+00 1.3675E+02 1.5289E+01 2.2290E+03 1.7249E-01
ELASTIC LOSS 5.4382E+01 5.8157E+02 2.4116E+01 3.0145E-01
INEL. LOSS 3.5387E+03 1.5784E+06 1.2563E+03 1.5704E+01
ENERGY 1.4805E+03 1.8198E+06 1.0060E+00 3.0559E+00 1.3490E+03 4.8741E+01 9.4278E+04 6.6800E-02
PATHLENGTH 3.0281E+02 2.1001E+04 -3.2590E-01 2.1646E+00 1.4492E+02 5.2361E+00 8.1886E+02 5.2664E-02
ELASTIC LOSS 5.7166E+01 5.7902E+02 2.4063E+01 3.1414E-02
INEL. LOSS 3.4157E+03 1.9162E+06 1.3843E+03 1.8071E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.3106E+03 3.1141E+06 9.1914E+09 3.0121E+13 1.0486E+17 3.7930E+20
LOGENERGY 2.8631E+00 8.5014E+00 2.5962E+01 8.1052E+01 2.5755E+02 8.3024E+02
PATHLENGTH 3.1656E+02 1.1891E+05 4.8717E+07 2.1063E+10 9.4648E+12 4.3838E+15
ENERGY 1.4805E+03 4.0116E+06 1.3797E+10 5.3481E+13 2.2247E+17 9.6934E+20
LOGENERGY 2.9153E+00 8.8186E+00 2.7386E+01 8.6837E+01 2.8005E+02 9.1583E+02
PATHLENGTH 3.0281E+02 1.1270E+05 4.5853E+07 1.9716E+10 8.8146E+12 4.0597E+15
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -254,5 +255,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 1 1 2 7 3 1 5 6 7 4 3 7 10 6 7 8
0.000 0.000 0.000 0.500 0.250 0.250 0.500 1.750 0.750 0.250 1.250 1.500 1.750 1.000 0.750 1.750 2.500 1.500 1.750 2.000
0 2 7 12 16 19 28 29 37 40 45 38 43 55 49 61 75 64 67 79
0.000 0.052 0.183 0.313 0.418 0.496 0.731 0.757 0.966 1.044 1.175 0.992 1.123 1.436 1.279 1.593 1.958 1.671 1.749 2.063
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.rge
+32 -31
View File
@@ -1,38 +1,39 @@
DEPTH PARTICLES
10.0000 6
30.0000 15
50.0000 27
70.0000 36
90.0000 37
110.0000 40
130.0000 51
150.0000 64
170.0000 101
190.0000 113
210.0000 146
230.0000 154
250.0000 205
270.0000 240
290.0000 297
310.0000 317
330.0000 385
350.0000 448
370.0000 463
390.0000 472
410.0000 436
430.0000 341
450.0000 241
470.0000 156
490.0000 89
510.0000 22
530.0000 14
550.0000 3
570.0000 0
590.0000 1
610.0000 0
10.0000 93
30.0000 147
50.0000 219
70.0000 298
90.0000 359
110.0000 473
130.0000 549
150.0000 701
170.0000 941
190.0000 1084
210.0000 1348
230.0000 1695
250.0000 2044
270.0000 2482
290.0000 3034
310.0000 3554
330.0000 3912
350.0000 4428
370.0000 4719
390.0000 4506
410.0000 4235
430.0000 3334
450.0000 2397
470.0000 1511
490.0000 767
510.0000 261
530.0000 90
550.0000 37
570.0000 13
590.0000 2
610.0000 1
630.0000 0
650.0000 0
670.0000 0
690.0000 0
710.0000 0
730.0000 0
750.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E5000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3343E+03 0.9546E+02 0.1311E+04 0.1182E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4880 40
5.00 0.45 0.00 15.00 50000 49234 766 0 50000 0 0.3329E+03 0.9458E+02 0.1480E+04 0.1349E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48830 404
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 7000 450 0 15 0.5 0.0 0.0 0.0
5000 78744 78744 78744 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78744 78744 78744 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.out
+108 -107
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:13
Start: 19.Jun. 2026 20:11:21
End: 19.Jun. 2026 18:18:14
End: 19.Jun. 2026 20:11:38
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 17 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
23902 0 0 0 0 0 0 0 0
237809 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,150 +110,151 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4947 ENERGY=0.3463E+08 EV
BACKSCATTERED PARTICLES= 53 ENERGY=0.1125E+06 EV
IMPLANTED PARTICLES= 49535 ENERGY=0.3467E+09 EV
BACKSCATTERED PARTICLES= 465 ENERGY=0.9543E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 3258 3258
IMPLANTED PARTICLES (LAYER 1)= 32817 32817
IMPLANTED PARTICLES (LAYER 2)= 1689 1689
IMPLANTED PARTICLES (LAYER 2)= 16718 16718
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.051
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.289
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.048
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.270
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 4.4508E+02 1.2595E+04 -8.3747E-01 3.8142E+00 1.1223E+02 1.5956E+00 3.0041E+02 3.3802E-02
SPREAD 2.0711E+02 1.0412E+04 4.4098E-01 2.7968E+00 1.0204E+02 1.4508E+00 1.9844E+02 2.7761E-02
PATHLENGTH 7.0542E+02 1.1087E+03 1.3878E-01 2.9587E+00 3.3298E+01 4.7341E-01 2.2062E+01 3.5561E-02
ELASTIC LOSS 2.7345E+01 2.3243E+02 1.5246E+01 3.0818E-03
INEL. LOSS 6.9768E+03 1.9965E+05 4.4682E+02 9.0322E-02
PENETRATION 4.4547E+02 1.2452E+04 -8.5804E-01 3.8660E+00 1.1159E+02 5.0137E-01 9.4712E+01 1.0898E-02
SPREAD 2.0569E+02 1.0292E+04 4.3970E-01 2.7857E+00 1.0145E+02 4.5581E-01 6.1793E+01 8.7701E-03
PATHLENGTH 7.0531E+02 1.1323E+03 1.4799E-01 2.9868E+00 3.3649E+01 1.5119E-01 7.1707E+00 1.0784E-02
ELASTIC LOSS 2.7173E+01 2.2067E+02 1.4855E+01 2.9989E-04
INEL. LOSS 6.9757E+03 2.0486E+05 4.5261E+02 9.1372E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.0980E-02 8.9234E-01 5.4035E+01 5.1635E+03 9.4464E-01 7.6835E-04 5.2150E-02 3.7070E+00
WEAK EL.LOSS 1.3812E-03 1.5431E-05 4.7036E+00 2.8225E+01 3.9282E-03 3.1951E-06 6.5490E-08 9.1939E-03
INELAST.LOSS 2.2999E+01 1.2033E+02 -5.5110E-01 1.9953E+00 1.0970E+01 8.9224E-03 9.7646E-02 1.3209E-03
SUBTHR.LOSS 8.2495E-02 3.7317E-01 2.2017E+01 6.6445E+02 6.1088E-01 4.9692E-04 7.8189E-03 2.0984E-01
ELAST.LOSS 9.0043E-02 8.2291E-01 4.9160E+01 4.1255E+03 9.0714E-01 2.3325E-04 1.3589E-02 8.9033E-01
WEAK EL.LOSS 1.3847E-03 1.5500E-05 4.7042E+00 2.8259E+01 3.9370E-03 1.0123E-06 2.0808E-08 2.9142E-03
INELAST.LOSS 2.2993E+01 1.2040E+02 -5.5055E-01 1.9945E+00 1.0973E+01 2.8213E-03 3.0873E-02 4.1749E-04
SUBTHR.LOSS 8.2264E-02 3.7373E-01 2.2427E+01 6.9336E+02 6.1134E-01 1.5720E-04 2.5287E-03 6.8187E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 4.4508E+02 2.1069E+05 1.0380E+08 5.2711E+10 2.7432E+13 1.4576E+16
PENETRATION 4.4547E+02 2.1089E+05 1.0385E+08 5.2679E+10 2.7375E+13 1.4519E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2021E-03 0 1.6295E+06 2.6724E+03 2.6687E+03 8.2398E+02 1.8447E+03 6.2119E+02 16
20.- 40. 7 0.1415E-02 0 1.6348E+06 2.5644E+03 2.5583E+03 7.7784E+02 1.7805E+03 5.6222E+02 11
40.- 60. 12 0.2426E-02 0 1.6462E+06 2.5546E+03 2.5469E+03 7.1778E+02 1.8291E+03 5.2914E+02 12
60.- 80. 10 0.2021E-02 0 1.6496E+06 2.6654E+03 2.6576E+03 6.7105E+02 1.9865E+03 4.8977E+02 11
80.- 100. 18 0.3639E-02 0 1.6506E+06 3.4851E+03 3.4717E+03 1.0543E+03 2.4174E+03 7.7931E+02 18
100.- 120. 17 0.3436E-02 0 1.6482E+06 3.0395E+03 3.0279E+03 5.8166E+02 2.4462E+03 4.3804E+02 12
120.- 140. 24 0.4851E-02 0 1.6471E+06 3.1102E+03 3.0956E+03 4.9367E+02 2.6020E+03 3.7054E+02 10
140.- 160. 20 0.4043E-02 0 1.6359E+06 3.8526E+03 3.8373E+03 1.1263E+03 2.7109E+03 8.2687E+02 18
160.- 180. 24 0.4851E-02 0 1.6236E+06 3.7349E+03 3.7172E+03 8.1875E+02 2.8985E+03 6.0636E+02 16
180.- 200. 49 0.9905E-02 0 1.5999E+06 3.5792E+03 3.5521E+03 2.9587E+02 3.2562E+03 2.2435E+02 7
200.- 220. 42 0.8490E-02 0 1.5842E+06 4.6310E+03 4.6040E+03 1.1383E+03 3.4657E+03 8.4759E+02 23
220.- 240. 48 0.9703E-02 0 1.5588E+06 4.6493E+03 4.6185E+03 7.3288E+02 3.8856E+03 5.4977E+02 15
240.- 260. 68 0.1375E-01 0 1.5338E+06 4.6861E+03 4.6456E+03 6.8045E+02 3.9652E+03 5.0840E+02 14
260.- 280. 93 0.1880E-01 0 1.4793E+06 4.6446E+03 4.5911E+03 3.1185E+02 4.2792E+03 2.3780E+02 8
280.- 300. 99 0.2001E-01 0 1.4317E+06 5.7856E+03 5.7279E+03 7.0203E+02 5.0259E+03 5.3074E+02 17
300.- 320. 121 0.2446E-01 0 1.3821E+06 6.2546E+03 6.1875E+03 7.6131E+02 5.4262E+03 5.6837E+02 16
320.- 340. 150 0.3032E-01 0 1.3246E+06 6.2494E+03 6.1635E+03 3.7844E+02 5.7850E+03 2.8341E+02 9
340.- 360. 190 0.3841E-01 0 1.2790E+06 7.0546E+03 6.9508E+03 2.5842E+02 6.6924E+03 1.9496E+02 7
360.- 380. 211 0.4265E-01 0 1.1901E+06 7.6217E+03 7.5028E+03 2.4108E+02 7.2617E+03 1.8333E+02 7
380.- 400. 217 0.4386E-01 0 1.0987E+06 7.8974E+03 7.7706E+03 1.0065E+02 7.6699E+03 7.6341E+01 3
400.- 420. 305 0.6165E-01 0 9.9716E+05 8.2265E+03 8.0607E+03 1.5028E+02 7.9104E+03 1.1421E+02 4
420.- 440. 325 0.6570E-01 0 8.5089E+05 8.1099E+03 7.9319E+03 0.0000E+00 7.9319E+03 0.0000E+00 0
440.- 460. 383 0.7742E-01 0 7.2232E+05 7.7254E+03 7.5297E+03 3.0026E+01 7.4997E+03 2.2905E+01 1
460.- 480. 395 0.7985E-01 0 6.0820E+05 7.5397E+03 7.3312E+03 0.0000E+00 7.3312E+03 0.0000E+00 0
480.- 500. 429 0.8672E-01 0 4.7402E+05 6.6950E+03 6.4743E+03 0.0000E+00 6.4743E+03 0.0000E+00 0
500.- 520. 377 0.7621E-01 0 3.1895E+05 3.3557E+03 3.2849E+03 0.0000E+00 3.2849E+03 0.0000E+00 0
520.- 540. 355 0.7176E-01 0 2.3144E+05 2.6485E+03 2.5890E+03 0.0000E+00 2.5890E+03 0.0000E+00 0
540.- 560. 303 0.6125E-01 1 1.4730E+05 1.7766E+03 1.7276E+03 0.0000E+00 1.7276E+03 0.0000E+00 0
560.- 580. 236 0.4771E-01 0 9.1202E+04 1.2822E+03 1.2430E+03 0.0000E+00 1.2430E+03 0.0000E+00 0
580.- 600. 189 0.3820E-01 0 5.1509E+04 7.6899E+02 7.3943E+02 0.0000E+00 7.3943E+02 0.0000E+00 0
600.- 620. 96 0.1941E-01 12 2.5029E+04 4.0093E+02 3.8532E+02 0.0000E+00 3.8532E+02 0.0000E+00 0
620.- 640. 78 0.1577E-01 78 1.2332E+04 2.2374E+02 2.1295E+02 0.0000E+00 2.1295E+02 0.0000E+00 0
640.- 660. 35 0.7075E-02 312 4.7366E+03 8.7428E+01 8.2330E+01 0.0000E+00 8.2330E+01 0.0000E+00 0
660.- 680. 14 0.2830E-02 714 1.2578E+03 2.7084E+01 2.5334E+01 0.0000E+00 2.5334E+01 0.0000E+00 0
680.- 700. 6 0.1213E-02 1090 2.7678E+02 7.1445E+00 6.5566E+00 0.0000E+00 6.5566E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 1138 7.5616E+00 2.4918E-01 2.1383E-01 0.0000E+00 2.1383E-01 0.0000E+00 0
720.- 740. 0 0.0000E+00 859 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 463 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 202 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 67 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 34 0.6864E-03 0 1.6314E+07 2.2826E+04 2.2784E+04 6.2637E+03 1.6520E+04 4.6518E+03 106
20.- 40. 82 0.1655E-02 0 1.6390E+07 2.2822E+04 2.2755E+04 5.4040E+03 1.7351E+04 4.0028E+03 90
40.- 60. 94 0.1898E-02 0 1.6430E+07 2.5802E+04 2.5729E+04 6.9913E+03 1.8738E+04 5.1396E+03 111
60.- 80. 103 0.2079E-02 0 1.6414E+07 2.6856E+04 2.6771E+04 6.9417E+03 1.9830E+04 5.1487E+03 122
80.- 100. 138 0.2786E-02 0 1.6433E+07 2.7097E+04 2.6999E+04 5.7384E+03 2.1260E+04 4.2736E+03 106
100.- 120. 145 0.2927E-02 0 1.6368E+07 2.9711E+04 2.9598E+04 6.8375E+03 2.2760E+04 5.0782E+03 124
120.- 140. 186 0.3755E-02 0 1.6392E+07 3.1288E+04 3.1157E+04 6.8068E+03 2.4350E+04 5.0395E+03 121
140.- 160. 233 0.4704E-02 0 1.6287E+07 3.2163E+04 3.2006E+04 6.6269E+03 2.5379E+04 4.9262E+03 123
160.- 180. 340 0.6864E-02 0 1.6180E+07 3.6448E+04 3.6236E+04 7.4077E+03 2.8828E+04 5.5203E+03 141
180.- 200. 395 0.7974E-02 0 1.6066E+07 4.0119E+04 3.9870E+04 7.7539E+03 3.2116E+04 5.7997E+03 154
200.- 220. 481 0.9710E-02 0 1.5869E+07 4.1501E+04 4.1212E+04 5.9439E+03 3.5268E+04 4.4518E+03 125
220.- 240. 549 0.1108E-01 0 1.5581E+07 4.5247E+04 4.4913E+04 7.3889E+03 3.7524E+04 5.5533E+03 161
240.- 260. 674 0.1361E-01 0 1.5324E+07 4.9500E+04 4.9094E+04 7.1689E+03 4.1925E+04 5.4101E+03 166
260.- 280. 811 0.1637E-01 0 1.4986E+07 5.2681E+04 5.2201E+04 6.3416E+03 4.5860E+04 4.7770E+03 148
280.- 300. 1006 0.2031E-01 0 1.4507E+07 5.7174E+04 5.6593E+04 5.8995E+03 5.0693E+04 4.4352E+03 138
300.- 320. 1182 0.2386E-01 0 1.3934E+07 6.1300E+04 6.0614E+04 5.5758E+03 5.5039E+04 4.2047E+03 136
320.- 340. 1484 0.2996E-01 0 1.3363E+07 6.4951E+04 6.4112E+04 3.4975E+03 6.0615E+04 2.6374E+03 88
340.- 360. 1683 0.3398E-01 0 1.2624E+07 6.9771E+04 6.8795E+04 3.1659E+03 6.5629E+04 2.3899E+03 83
360.- 380. 2075 0.4189E-01 0 1.1791E+07 7.2497E+04 7.1348E+04 2.5621E+03 6.8786E+04 1.9270E+03 65
380.- 400. 2457 0.4960E-01 0 1.0919E+07 7.8692E+04 7.7322E+04 1.9333E+03 7.5389E+04 1.4604E+03 52
400.- 420. 2965 0.5986E-01 0 9.8676E+06 8.1598E+04 7.9988E+04 9.6095E+02 7.9027E+04 7.2671E+02 27
420.- 440. 3380 0.6823E-01 0 8.6607E+06 8.2625E+04 8.0802E+04 3.3143E+02 8.0471E+04 2.5007E+02 9
440.- 460. 3787 0.7645E-01 0 7.4168E+06 8.0206E+04 7.8197E+04 2.4835E+02 7.7948E+04 1.8774E+02 7
460.- 480. 4137 0.8352E-01 0 6.0946E+06 7.5259E+04 7.3095E+04 3.5351E+01 7.3060E+04 2.6752E+01 1
480.- 500. 4396 0.8875E-01 0 4.7497E+06 6.8772E+04 6.6583E+04 3.0002E+01 6.6553E+04 2.2888E+01 1
500.- 520. 3488 0.7041E-01 0 3.1657E+06 3.2904E+04 3.2227E+04 0.0000E+00 3.2227E+04 0.0000E+00 0
520.- 540. 3512 0.7090E-01 0 2.2748E+06 2.5519E+04 2.4932E+04 0.0000E+00 2.4932E+04 0.0000E+00 0
540.- 560. 3163 0.6385E-01 0 1.5341E+06 1.9284E+04 1.8757E+04 0.0000E+00 1.8757E+04 0.0000E+00 0
560.- 580. 2440 0.4926E-01 2 9.3871E+05 1.3160E+04 1.2759E+04 0.0000E+00 1.2759E+04 0.0000E+00 0
580.- 600. 1849 0.3733E-01 21 5.0813E+05 7.8940E+03 7.6083E+03 0.0000E+00 7.6083E+03 0.0000E+00 0
600.- 620. 1153 0.2328E-01 148 2.4999E+05 4.2296E+03 4.0524E+03 0.0000E+00 4.0524E+03 0.0000E+00 0
620.- 640. 675 0.1363E-01 896 1.0458E+05 1.9493E+03 1.8538E+03 0.0000E+00 1.8538E+03 0.0000E+00 0
640.- 660. 288 0.5814E-02 3114 3.8108E+04 7.6188E+02 7.2037E+02 0.0000E+00 7.2037E+02 0.0000E+00 0
660.- 680. 113 0.2281E-02 7243 1.1046E+04 2.3378E+02 2.1824E+02 0.0000E+00 2.1824E+02 0.0000E+00 0
680.- 700. 28 0.5653E-03 10849 2.7121E+03 6.3072E+01 5.8876E+01 0.0000E+00 5.8876E+01 0.0000E+00 0
700.- 720. 6 0.1211E-03 11246 4.2017E+02 1.1569E+01 1.0650E+01 0.0000E+00 1.0650E+01 0.0000E+00 0
720.- 740. 3 0.6056E-04 8441 6.5753E+01 2.6518E+00 2.4441E+00 0.0000E+00 2.4441E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 4753 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 2028 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 623 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 149 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- SUT 0 0.0000E+00
880.- 900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- SUT 0 0.0000E+00
4947 1.0000E+00 4947 3.4764E+07 1.3961E+05 1.3752E+05 1.2847E+04 1.2467E+05 9.5656E+03 255
49535 1.0000E+00 49535 3.4779E+08 1.3829E+06 1.3620E+06 1.1786E+05 1.2441E+06 8.8041E+04 2405
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4128E+05 1.1936E+03 4.2730E+02 7.6634E+02 1.0882E+06 1.4751E+03 3.9668E+02 1.0784E+03 8 8
20.- 40. 5.4193E+05 8.4074E+02 1.1404E+02 7.2669E+02 1.0929E+06 1.7176E+03 6.6380E+02 1.0538E+03 2 9
40.- 60. 5.5227E+05 9.2427E+02 2.4887E+02 6.7541E+02 1.0939E+06 1.6226E+03 4.6891E+02 1.1537E+03 6 6
60.- 80. 5.4861E+05 9.2809E+02 1.1479E+02 8.1330E+02 1.1010E+06 1.7295E+03 5.5625E+02 1.1732E+03 2 9
80.- 100. 5.4832E+05 1.3033E+03 3.6996E+02 9.3333E+02 1.1023E+06 2.1684E+03 6.8431E+02 1.4841E+03 8 10
100.- 120. 5.4294E+05 1.2916E+03 2.3619E+02 1.0554E+03 1.1053E+06 1.7363E+03 3.4547E+02 1.3908E+03 5 7
120.- 140. 5.5491E+05 1.2478E+03 1.5532E+02 1.0925E+03 1.0922E+06 1.8478E+03 3.3835E+02 1.5095E+03 3 7
140.- 160. 5.4550E+05 1.3215E+03 2.8249E+02 1.0390E+03 1.0904E+06 2.5158E+03 8.4385E+02 1.6719E+03 6 12
160.- 180. 5.4252E+05 1.2418E+03 6.1443E+01 1.1804E+03 1.0811E+06 2.4754E+03 7.5731E+02 1.7181E+03 2 14
180.- 200. 5.3231E+05 1.2693E+03 9.8397E+01 1.1709E+03 1.0675E+06 2.2828E+03 1.9747E+02 2.0853E+03 2 5
200.- 220. 5.3174E+05 1.4407E+03 1.9323E+02 1.2475E+03 1.0524E+06 3.1633E+03 9.4509E+02 2.2182E+03 5 18
220.- 240. 5.2111E+05 1.7369E+03 2.1232E+02 1.5246E+03 1.0377E+06 2.8816E+03 5.2056E+02 2.3610E+03 4 11
240.- 260. 5.0599E+05 1.6104E+03 1.3080E+02 1.4796E+03 1.0279E+06 3.0352E+03 5.4965E+02 2.4855E+03 3 11
260.- 280. 4.9652E+05 1.7986E+03 1.4094E+02 1.6576E+03 9.8278E+05 2.7925E+03 1.7092E+02 2.6216E+03 4 4
280.- 300. 4.7250E+05 1.9552E+03 1.9674E+02 1.7585E+03 9.5922E+05 3.7727E+03 5.0529E+02 3.2674E+03 6 11
300.- 320. 4.6490E+05 2.2727E+03 1.0691E+02 2.1658E+03 9.1725E+05 3.9148E+03 6.5440E+02 3.2604E+03 3 13
320.- 340. 4.3891E+05 2.0570E+03 0.0000E+00 2.0570E+03 8.8572E+05 4.1065E+03 3.7844E+02 3.7280E+03 0 9
340.- 360. 4.2511E+05 2.3122E+03 0.0000E+00 2.3122E+03 8.5393E+05 4.6386E+03 2.5842E+02 4.3802E+03 0 7
360.- 380. 3.9242E+05 2.4981E+03 3.0400E+01 2.4677E+03 7.9768E+05 5.0047E+03 2.1068E+02 4.7940E+03 1 6
380.- 400. 3.6768E+05 2.5551E+03 0.0000E+00 2.5551E+03 7.3102E+05 5.2154E+03 1.0065E+02 5.1148E+03 0 3
400.- 420. 3.3181E+05 2.5597E+03 3.3385E+01 2.5263E+03 6.6535E+05 5.5010E+03 1.1689E+02 5.3841E+03 1 3
420.- 440. 2.8596E+05 2.6002E+03 0.0000E+00 2.6002E+03 5.6493E+05 5.3317E+03 0.0000E+00 5.3317E+03 0 0
440.- 460. 2.3882E+05 2.3535E+03 0.0000E+00 2.3535E+03 4.8349E+05 5.1762E+03 3.0026E+01 5.1462E+03 0 1
460.- 480. 2.0171E+05 2.2363E+03 0.0000E+00 2.2363E+03 4.0649E+05 5.0949E+03 0.0000E+00 5.0949E+03 0 0
480.- 500. 1.5553E+05 1.8662E+03 0.0000E+00 1.8662E+03 3.1429E+05 4.5534E+03 0.0000E+00 4.5534E+03 0 0
500.- 520. 8.8336E+03 8.4734E+01 0.0000E+00 8.4734E+01 1.8194E+04 2.4063E+02 0.0000E+00 2.4063E+02 0 0
0.- 20. 5.4295E+06 9.0343E+03 2.4965E+03 6.5378E+03 1.0884E+07 1.3749E+04 3.7672E+03 9.9820E+03 44 62
20.- 40. 5.4666E+06 9.0763E+03 1.9929E+03 7.0834E+03 1.0924E+07 1.3678E+04 3.4112E+03 1.0267E+04 37 53
40.- 60. 5.4777E+06 9.5680E+03 1.9689E+03 7.5990E+03 1.0952E+07 1.6161E+04 5.0223E+03 1.1139E+04 36 75
60.- 80. 5.4754E+06 1.0238E+04 2.4036E+03 7.8345E+03 1.0939E+07 1.6533E+04 4.5380E+03 1.1995E+04 47 75
80.- 100. 5.4774E+06 1.0518E+04 2.0831E+03 8.4346E+03 1.0955E+07 1.6481E+04 3.6553E+03 1.2826E+04 44 62
100.- 120. 5.4547E+06 1.1163E+04 2.1554E+03 9.0074E+03 1.0914E+07 1.8435E+04 4.6820E+03 1.3753E+04 44 80
120.- 140. 5.4625E+06 1.1838E+04 1.8834E+03 9.9547E+03 1.0929E+07 1.9319E+04 4.9234E+03 1.4395E+04 41 80
140.- 160. 5.4383E+06 1.2070E+04 1.7744E+03 1.0296E+04 1.0849E+07 1.9936E+04 4.8525E+03 1.5083E+04 39 84
160.- 180. 5.3893E+06 1.3752E+04 2.2980E+03 1.1454E+04 1.0791E+07 2.2484E+04 5.1097E+03 1.7374E+04 52 89
180.- 200. 5.3425E+06 1.4924E+04 2.4337E+03 1.2491E+04 1.0723E+07 2.4945E+04 5.3202E+03 1.9625E+04 55 99
200.- 220. 5.2716E+06 1.5130E+04 1.4749E+03 1.3655E+04 1.0598E+07 2.6082E+04 4.4691E+03 2.1613E+04 35 90
220.- 240. 5.1854E+06 1.6660E+04 2.0566E+03 1.4603E+04 1.0395E+07 2.8253E+04 5.3323E+03 2.2921E+04 50 111
240.- 260. 5.1103E+06 1.8104E+04 2.1109E+03 1.5993E+04 1.0214E+07 3.0989E+04 5.0580E+03 2.5931E+04 56 110
260.- 280. 4.9840E+06 1.8501E+04 1.3330E+03 1.7168E+04 1.0002E+07 3.3700E+04 5.0086E+03 2.8692E+04 35 113
280.- 300. 4.8573E+06 1.9779E+04 9.4119E+02 1.8838E+04 9.6494E+06 3.6813E+04 4.9584E+03 3.1855E+04 26 112
300.- 320. 4.6413E+06 2.1195E+04 9.8050E+02 2.0214E+04 9.2931E+06 3.9420E+04 4.5953E+03 3.4825E+04 28 108
320.- 340. 4.4596E+06 2.2084E+04 3.9963E+02 2.1684E+04 8.9036E+06 4.2028E+04 3.0979E+03 3.8931E+04 12 76
340.- 360. 4.1950E+06 2.3092E+04 2.2040E+02 2.2872E+04 8.4286E+06 4.5703E+04 2.9455E+03 4.2757E+04 7 76
360.- 380. 3.9235E+06 2.3563E+04 3.1586E+01 2.3531E+04 7.8675E+06 4.7785E+04 2.5305E+03 4.5255E+04 1 64
380.- 400. 3.6339E+06 2.5770E+04 9.7471E+01 2.5673E+04 7.2852E+06 5.1552E+04 1.8358E+03 4.9716E+04 3 49
400.- 420. 3.2807E+06 2.5186E+04 0.0000E+00 2.5186E+04 6.5869E+06 5.4802E+04 9.6095E+02 5.3841E+04 0 27
420.- 440. 2.8846E+06 2.5713E+04 0.0000E+00 2.5713E+04 5.7762E+06 5.5089E+04 3.3143E+02 5.4757E+04 0 9
440.- 460. 2.4558E+06 2.4428E+04 0.0000E+00 2.4428E+04 4.9609E+06 5.3768E+04 2.4835E+02 5.3520E+04 0 7
460.- 480. 2.0281E+06 2.2515E+04 0.0000E+00 2.2515E+04 4.0666E+06 5.0580E+04 3.5351E+01 5.0545E+04 0 1
480.- 500. 1.5633E+06 1.9988E+04 0.0000E+00 1.9988E+04 3.1438E+06 4.6022E+04 3.0002E+01 4.5992E+04 0 1
500.- 520. 8.9093E+04 9.6218E+02 0.0000E+00 9.6218E+02 1.7695E+05 2.3265E+03 0.0000E+00 2.3265E+03 0 0
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1290E+07 4.3500E+04 3.1535E+03 4.0346E+04 2.2613E+07 8.3994E+04 9.6934E+03 7.4301E+04 71 184
1.1298E+08 4.3485E+05 3.1136E+04 4.0372E+05 2.2621E+08 8.2664E+05 8.6719E+04 7.3992E+05 692 1713
DAMAGE IN LAYER 1 : 1.2722E+05
DAMAGE IN LAYER 1 : 1.2588E+06
DAMAGE IN LAYER 2 : 1.0297E+04
DAMAGE IN LAYER 2 : 1.0320E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.0600E-02 ENERGY REFL.COEF.= 3.2144E-03 REL.MEAN ENERGY = 3.0325E-01 MEAN ENERGY = 2.1227E+03
PART.REFL.COEF.= 9.3000E-03 ENERGY REFL.COEF.= 2.7265E-03 REL.MEAN ENERGY = 2.9317E-01 MEAN ENERGY = 2.0522E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.1227E+03 3.6343E+06 9.3506E-01 2.6653E+00 1.9064E+03 2.6186E+02 6.4421E+05 2.5573E-01
PATHLENGTH 3.7439E+02 2.9958E+04 -3.5040E-01 2.2749E+00 1.7308E+02 2.3775E+01 4.6465E+03 1.7920E-01
ELASTIC LOSS 8.1694E+01 1.0422E+03 3.2284E+01 6.0913E-01
INEL. LOSS 4.7215E+03 3.4151E+06 1.8480E+03 3.4868E+01
ENERGY 2.0522E+03 3.1473E+06 8.8357E-01 2.7644E+00 1.7741E+03 8.2271E+01 1.9387E+05 8.2635E-02
PATHLENGTH 3.8099E+02 2.8674E+04 -3.1211E-01 2.1336E+00 1.6933E+02 7.8527E+00 1.4158E+03 6.9161E-02
ELASTIC LOSS 7.9321E+01 8.5892E+02 2.9307E+01 6.3027E-02
INEL. LOSS 4.8411E+03 3.2982E+06 1.8161E+03 3.9056E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.1227E+03 8.1402E+06 3.9187E+10 2.0877E+14 1.1713E+18 6.7812E+21
LOGENERGY 3.0590E+00 9.7274E+00 3.1737E+01 1.0551E+02 3.5605E+02 1.2164E+03
PATHLENGTH 3.7439E+02 1.7013E+05 8.4310E+07 4.4163E+10 2.4086E+13 1.3542E+16
ENERGY 2.0522E+03 7.3587E+06 3.2953E+10 1.6514E+14 8.8618E+17 4.9806E+21
LOGENERGY 3.0782E+00 9.7707E+00 3.1713E+01 1.0478E+02 3.5133E+02 1.1926E+03
PATHLENGTH 3.8099E+02 1.7382E+05 8.6558E+07 4.5486E+10 2.4812E+13 1.3919E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -261,5 +262,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 4 3 1 0 3 4 2 2 3 2 3 5 2 5 5 3 5
0.000 0.000 0.377 1.509 1.132 0.377 0.000 1.132 1.509 0.755 0.755 1.132 0.755 1.132 1.887 0.755 1.887 1.887 1.132 1.887
0 2 4 12 10 17 16 14 25 20 25 22 31 37 40 38 35 43 36 38
0.000 0.086 0.172 0.516 0.430 0.731 0.688 0.602 1.075 0.860 1.075 0.946 1.333 1.591 1.720 1.634 1.505 1.849 1.548 1.634
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.rge
+38 -37
View File
@@ -1,41 +1,41 @@
DEPTH PARTICLES
10.0000 1
30.0000 7
50.0000 12
70.0000 10
90.0000 18
110.0000 17
130.0000 24
150.0000 20
170.0000 24
190.0000 49
210.0000 42
230.0000 48
250.0000 68
270.0000 93
290.0000 99
310.0000 121
330.0000 150
350.0000 190
370.0000 211
390.0000 217
410.0000 305
430.0000 325
450.0000 383
470.0000 395
490.0000 429
510.0000 377
530.0000 355
550.0000 303
570.0000 236
590.0000 189
610.0000 96
630.0000 78
650.0000 35
670.0000 14
690.0000 6
710.0000 0
730.0000 0
10.0000 34
30.0000 82
50.0000 94
70.0000 103
90.0000 138
110.0000 145
130.0000 186
150.0000 233
170.0000 340
190.0000 395
210.0000 481
230.0000 549
250.0000 674
270.0000 811
290.0000 1006
310.0000 1182
330.0000 1484
350.0000 1683
370.0000 2075
390.0000 2457
410.0000 2965
430.0000 3380
450.0000 3787
470.0000 4137
490.0000 4396
510.0000 3488
530.0000 3512
550.0000 3163
570.0000 2440
590.0000 1849
610.0000 1153
630.0000 675
650.0000 288
670.0000 113
690.0000 28
710.0000 6
730.0000 3
750.0000 0
770.0000 0
790.0000 0
@@ -43,3 +43,4 @@
830.0000 0
850.0000 0
870.0000 0
890.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E7000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
7.00 0.45 0.00 15.00 5000 4947 53 0 5000 0 0.4451E+03 0.1122E+03 0.2123E+04 0.1906E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3258 1689
7.00 0.45 0.00 15.00 50000 49535 465 0 50000 0 0.4455E+03 0.1116E+03 0.2052E+04 0.1774E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 32817 16718
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 9000 450 0 15 0.5 0.0 0.0 0.0
5000 78745 78745 78745 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78745 78745 78745 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=2
SiO2 500 2.65 1 2
14 8
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.out
+115 -114
View File
@@ -1,12 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: PCG32
Random-number generator: RANLUX
Start: 19.Jun. 2026 18:18:13
Start: 19.Jun. 2026 20:11:27
End: 19.Jun. 2026 18:18:14
End: 19.Jun. 2026 20:11:47
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 20 seconds
* INPUT DATA * SiO2_Si_2lay
@@ -16,7 +16,7 @@
1.00 0.11 9000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78745.00 78745.00 78745.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78745.00 78745.00 78745.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -64,7 +64,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
27998 0 0 0 0 0 0 0 0
278363 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -110,157 +110,158 @@
1.45186 0.89903 1.45186
1
IMPLANTED PARTICLES= 4979 ENERGY=0.4481E+08 EV
BACKSCATTERED PARTICLES= 21 ENERGY=0.8817E+05 EV
IMPLANTED PARTICLES= 49668 ENERGY=0.4470E+09 EV
BACKSCATTERED PARTICLES= 332 ENERGY=0.9374E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 1363 1363
IMPLANTED PARTICLES (LAYER 1)= 13482 13482
IMPLANTED PARTICLES (LAYER 2)= 3616 3616
IMPLANTED PARTICLES (LAYER 2)= 36186 36186
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 354.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.050
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.245
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 354.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.238
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.6230E+02 1.6327E+04 -9.7242E-01 4.3736E+00 1.2778E+02 1.8108E+00 4.2498E+02 4.2985E-02
SPREAD 2.4441E+02 1.4089E+04 4.1541E-01 2.7296E+00 1.1870E+02 1.6822E+00 2.6260E+02 2.5823E-02
PATHLENGTH 8.5033E+02 1.2683E+03 -2.4036E-02 2.9289E+00 3.5614E+01 5.0472E-01 2.4964E+01 3.2240E-02
ELASTIC LOSS 2.6640E+01 2.7697E+02 1.6642E+01 3.3425E-03
INEL. LOSS 8.9651E+03 1.9947E+05 4.4662E+02 8.9702E-02
PENETRATION 5.6271E+02 1.6787E+04 -9.7463E-01 4.1755E+00 1.2956E+02 5.8136E-01 1.3422E+02 1.2079E-02
SPREAD 2.4436E+02 1.4566E+04 4.2719E-01 2.7738E+00 1.2069E+02 5.4154E-01 8.7047E+01 8.7503E-03
PATHLENGTH 8.5101E+02 1.2920E+03 -2.4478E-02 2.9064E+00 3.5944E+01 1.6128E-01 8.0042E+00 1.0371E-02
ELASTIC LOSS 2.6684E+01 2.9294E+02 1.7116E+01 3.4460E-04
INEL. LOSS 8.9738E+03 2.0194E+05 4.4938E+02 9.0476E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 7.5338E-02 8.1216E-01 6.7131E+01 8.8289E+03 9.0120E-01 6.7702E-04 5.7326E-02 7.7969E+00
WEAK EL.LOSS 8.0696E-04 7.1934E-06 6.3337E+00 5.3457E+01 2.6821E-03 2.0149E-06 3.9140E-08 1.6317E-02
INELAST.LOSS 2.5248E+01 1.2180E+02 -7.8485E-01 2.3107E+00 1.1036E+01 8.2909E-03 1.0476E-01 1.3268E-03
SUBTHR.LOSS 6.7999E-02 3.2808E-01 2.5180E+01 8.6528E+02 5.7279E-01 4.3033E-04 7.2464E-03 2.3208E-01
ELAST.LOSS 7.5881E-02 8.7926E-01 6.5923E+01 7.8062E+03 9.3769E-01 2.2276E-04 1.8454E-02 1.8817E+00
WEAK EL.LOSS 8.0490E-04 7.1538E-06 6.3227E+00 5.3298E+01 2.6747E-03 6.3540E-07 1.2290E-08 5.1624E-03
INELAST.LOSS 2.5267E+01 1.2168E+02 -7.8751E-01 2.3156E+00 1.1031E+01 2.6205E-03 3.3156E-02 4.1995E-04
SUBTHR.LOSS 6.7340E-02 3.1452E-01 2.4841E+01 8.4601E+02 5.6082E-01 1.3324E-04 2.1721E-03 7.5768E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.6230E+02 3.3251E+05 2.0331E+08 1.2755E+11 8.1724E+13 5.3302E+16
PENETRATION 5.6271E+02 3.3343E+05 2.0439E+08 1.2856E+11 8.2553E+13 5.3938E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 6 0.1205E-02 0 1.6363E+06 2.1243E+03 2.1198E+03 6.3121E+02 1.4886E+03 4.6623E+02 8
20.- 40. 6 0.1205E-02 0 1.6448E+06 1.9153E+03 1.9105E+03 5.4010E+02 1.3704E+03 3.8459E+02 6
40.- 60. 4 0.8034E-03 0 1.6560E+06 2.2348E+03 2.2308E+03 7.7818E+02 1.4526E+03 5.4397E+02 8
60.- 80. 3 0.6025E-03 0 1.6583E+06 1.9012E+03 1.8976E+03 3.6674E+02 1.5309E+03 2.6633E+02 5
80.- 100. 4 0.8034E-03 0 1.6712E+06 1.8778E+03 1.8727E+03 4.6268E+02 1.4100E+03 3.4354E+02 8
100.- 120. 11 0.2209E-02 0 1.6777E+06 2.1019E+03 2.0947E+03 5.0416E+02 1.5906E+03 3.6548E+02 6
120.- 140. 7 0.1406E-02 0 1.6764E+06 2.3837E+03 2.3769E+03 4.7740E+02 1.8995E+03 3.5884E+02 10
140.- 160. 14 0.2812E-02 0 1.6759E+06 2.2703E+03 2.2615E+03 4.0967E+02 1.8518E+03 3.0769E+02 7
160.- 180. 9 0.1808E-02 0 1.6823E+06 2.2624E+03 2.2550E+03 4.8780E+02 1.7672E+03 3.6700E+02 9
180.- 200. 12 0.2410E-02 0 1.6896E+06 2.6469E+03 2.6378E+03 5.6285E+02 2.0749E+03 4.2029E+02 11
200.- 220. 17 0.3414E-02 0 1.6765E+06 2.5995E+03 2.5875E+03 6.3735E+02 1.9501E+03 4.8200E+02 14
220.- 240. 17 0.3414E-02 0 1.6712E+06 3.2622E+03 3.2508E+03 9.4766E+02 2.3031E+03 7.0983E+02 19
240.- 260. 19 0.3816E-02 0 1.6635E+06 3.2289E+03 3.2151E+03 5.5381E+02 2.6613E+03 4.2164E+02 14
260.- 280. 27 0.5423E-02 0 1.6468E+06 3.1652E+03 3.1460E+03 4.4081E+02 2.7052E+03 3.2815E+02 8
280.- 300. 34 0.6829E-02 0 1.6400E+06 3.6042E+03 3.5828E+03 6.2716E+02 2.9556E+03 4.6836E+02 12
300.- 320. 46 0.9239E-02 0 1.6340E+06 4.3701E+03 4.3425E+03 6.6331E+02 3.6792E+03 4.9586E+02 13
320.- 340. 55 0.1105E-01 0 1.6155E+06 4.2259E+03 4.1915E+03 3.2655E+02 3.8649E+03 2.4290E+02 6
340.- 360. 59 0.1185E-01 0 1.5901E+06 5.2636E+03 5.2263E+03 5.3607E+02 4.6902E+03 4.0750E+02 13
360.- 380. 77 0.1546E-01 0 1.5468E+06 5.0205E+03 4.9747E+03 6.4744E+02 4.3273E+03 4.8032E+02 13
380.- 400. 87 0.1747E-01 0 1.4708E+06 5.3802E+03 5.3290E+03 6.8430E+02 4.6447E+03 5.1585E+02 16
400.- 420. 111 0.2229E-01 0 1.4172E+06 5.5412E+03 5.4772E+03 3.7791E+02 5.0993E+03 2.8667E+02 10
420.- 440. 143 0.2872E-01 0 1.3679E+06 6.3385E+03 6.2616E+03 7.9032E+02 5.4713E+03 5.9521E+02 19
440.- 460. 167 0.3354E-01 0 1.3129E+06 6.9719E+03 6.8759E+03 2.3257E+02 6.6433E+03 1.7499E+02 6
460.- 480. 193 0.3876E-01 0 1.2340E+06 7.2489E+03 7.1422E+03 3.3396E+02 6.8082E+03 2.5282E+02 9
480.- 500. 235 0.4720E-01 0 1.1452E+06 7.0496E+03 6.9282E+03 0.0000E+00 6.9282E+03 0.0000E+00 0
500.- 520. 210 0.4218E-01 0 9.6116E+05 5.0747E+03 5.0303E+03 0.0000E+00 5.0303E+03 0.0000E+00 0
520.- 540. 274 0.5503E-01 0 8.8096E+05 4.8965E+03 4.8464E+03 0.0000E+00 4.8464E+03 0.0000E+00 0
540.- 560. 302 0.6065E-01 0 7.9012E+05 4.9714E+03 4.9173E+03 0.0000E+00 4.9173E+03 0.0000E+00 0
560.- 580. 315 0.6327E-01 0 6.7031E+05 4.5278E+03 4.4707E+03 0.0000E+00 4.4707E+03 0.0000E+00 0
580.- 600. 310 0.6226E-01 0 5.6132E+05 4.1521E+03 4.0960E+03 0.0000E+00 4.0960E+03 0.0000E+00 0
600.- 620. 357 0.7170E-01 0 4.5825E+05 3.8518E+03 3.7905E+03 0.0000E+00 3.7905E+03 0.0000E+00 0
620.- 640. 340 0.6829E-01 0 3.5903E+05 3.2640E+03 3.2027E+03 0.0000E+00 3.2027E+03 0.0000E+00 0
640.- 660. 354 0.7110E-01 0 2.7819E+05 2.8714E+03 2.8115E+03 0.0000E+00 2.8115E+03 0.0000E+00 0
660.- 680. 314 0.6306E-01 0 1.9342E+05 2.2848E+03 2.2306E+03 0.0000E+00 2.2306E+03 0.0000E+00 0
680.- 700. 294 0.5905E-01 0 1.2719E+05 1.6049E+03 1.5585E+03 0.0000E+00 1.5585E+03 0.0000E+00 0
700.- 720. 211 0.4238E-01 0 7.9189E+04 1.1549E+03 1.1209E+03 0.0000E+00 1.1209E+03 0.0000E+00 0
720.- 740. 144 0.2892E-01 4 4.3473E+04 6.9619E+02 6.7291E+02 0.0000E+00 6.7291E+02 0.0000E+00 0
740.- 760. 97 0.1948E-01 22 1.9909E+04 3.2393E+02 3.0964E+02 0.0000E+00 3.0964E+02 0.0000E+00 0
760.- 780. 49 0.9841E-02 96 8.9890E+03 1.4445E+02 1.3734E+02 0.0000E+00 1.3734E+02 0.0000E+00 0
780.- 800. 28 0.5624E-02 284 3.7336E+03 7.7027E+01 7.2985E+01 0.0000E+00 7.2985E+01 0.0000E+00 0
800.- 820. 13 0.2611E-02 566 1.2377E+03 3.1724E+01 3.0083E+01 0.0000E+00 3.0083E+01 0.0000E+00 0
820.- 840. 3 0.6025E-03 965 1.6369E+02 4.6169E+00 4.2180E+00 0.0000E+00 4.2180E+00 0.0000E+00 0
840.- 860. 1 0.2008E-03 1079 2.4893E+01 7.0395E-01 6.1125E-01 0.0000E+00 6.1125E-01 0.0000E+00 0
860.- 880. 0 0.0000E+00 954 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 621 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 262 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 100 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 20 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 16 0.3221E-03 0 1.6406E+07 1.9738E+04 1.9710E+04 5.9691E+03 1.3741E+04 4.3336E+03 83
20.- 40. 34 0.6845E-03 0 1.6537E+07 2.0968E+04 2.0931E+04 6.8327E+03 1.4098E+04 4.9139E+03 86
40.- 60. 61 0.1228E-02 0 1.6629E+07 2.1357E+04 2.1307E+04 7.2454E+03 1.4062E+04 5.2934E+03 107
60.- 80. 57 0.1148E-02 0 1.6728E+07 2.2620E+04 2.2570E+04 6.8201E+03 1.5750E+04 5.0438E+03 112
80.- 100. 57 0.1148E-02 0 1.6796E+07 2.1939E+04 2.1885E+04 5.9555E+03 1.5929E+04 4.4299E+03 103
100.- 120. 94 0.1893E-02 0 1.6861E+07 2.3303E+04 2.3235E+04 6.3704E+03 1.6865E+04 4.7244E+03 108
120.- 140. 93 0.1872E-02 0 1.6879E+07 2.5730E+04 2.5658E+04 7.4979E+03 1.8160E+04 5.5377E+03 125
140.- 160. 96 0.1933E-02 0 1.6865E+07 2.4528E+04 2.4452E+04 6.6616E+03 1.7790E+04 4.9450E+03 115
160.- 180. 129 0.2597E-02 0 1.6895E+07 2.6629E+04 2.6535E+04 6.6639E+03 1.9871E+04 4.9484E+03 117
180.- 200. 162 0.3262E-02 0 1.6850E+07 2.7592E+04 2.7480E+04 6.0689E+03 2.1411E+04 4.5124E+03 108
200.- 220. 204 0.4107E-02 0 1.6823E+07 2.9112E+04 2.8978E+04 6.4962E+03 2.2482E+04 4.8367E+03 121
220.- 240. 221 0.4450E-02 0 1.6755E+07 3.2040E+04 3.1896E+04 6.7274E+03 2.5169E+04 5.0119E+03 125
240.- 260. 258 0.5194E-02 0 1.6659E+07 3.2936E+04 3.2767E+04 7.4261E+03 2.5341E+04 5.5346E+03 139
260.- 280. 293 0.5899E-02 0 1.6539E+07 3.5490E+04 3.5289E+04 6.8423E+03 2.8447E+04 5.1139E+03 137
280.- 300. 401 0.8074E-02 0 1.6366E+07 3.7242E+04 3.7001E+04 6.3820E+03 3.0619E+04 4.7801E+03 130
300.- 320. 424 0.8537E-02 0 1.6174E+07 4.0247E+04 3.9982E+04 6.6483E+03 3.3334E+04 4.9794E+03 134
320.- 340. 512 0.1031E-01 0 1.5897E+07 4.2922E+04 4.2606E+04 6.3540E+03 3.6252E+04 4.7585E+03 132
340.- 360. 633 0.1274E-01 0 1.5594E+07 4.5805E+04 4.5424E+04 6.4135E+03 3.9011E+04 4.8029E+03 135
360.- 380. 754 0.1518E-01 0 1.5215E+07 5.0213E+04 4.9766E+04 6.4401E+03 4.3326E+04 4.8405E+03 140
380.- 400. 915 0.1842E-01 0 1.4782E+07 5.4648E+04 5.4111E+04 6.7710E+03 4.7340E+04 5.0819E+03 149
400.- 420. 1132 0.2279E-01 0 1.4272E+07 5.6781E+04 5.6144E+04 5.2691E+03 5.0875E+04 3.9524E+03 121
420.- 440. 1297 0.2611E-01 0 1.3708E+07 6.0575E+04 5.9824E+04 4.1462E+03 5.5678E+04 3.1291E+03 103
440.- 460. 1500 0.3020E-01 0 1.3047E+07 6.5046E+04 6.4192E+04 3.7200E+03 6.0472E+04 2.7918E+03 90
460.- 480. 1858 0.3741E-01 0 1.2291E+07 7.0383E+04 6.9340E+04 3.4304E+03 6.5909E+04 2.5819E+03 87
480.- 500. 2281 0.4592E-01 0 1.1442E+07 7.2330E+04 7.1126E+04 2.2411E+03 6.8885E+04 1.6954E+03 61
500.- 520. 2174 0.4377E-01 0 9.6147E+06 4.8368E+04 4.7926E+04 1.1147E+02 4.7815E+04 8.4119E+01 3
520.- 540. 2495 0.5023E-01 0 8.6550E+06 4.7756E+04 4.7297E+04 3.0685E+01 4.7267E+04 2.3868E+01 1
540.- 560. 2723 0.5482E-01 0 7.7638E+06 4.6748E+04 4.6245E+04 0.0000E+00 4.6245E+04 0.0000E+00 0
560.- 580. 3098 0.6237E-01 0 6.7765E+06 4.5402E+04 4.4842E+04 0.0000E+00 4.4842E+04 0.0000E+00 0
580.- 600. 3312 0.6668E-01 0 5.7447E+06 4.3051E+04 4.2456E+04 0.0000E+00 4.2456E+04 0.0000E+00 0
600.- 620. 3577 0.7202E-01 0 4.7174E+06 3.9653E+04 3.9020E+04 0.0000E+00 3.9020E+04 0.0000E+00 0
620.- 640. 3538 0.7123E-01 0 3.7099E+06 3.4776E+04 3.4161E+04 0.0000E+00 3.4161E+04 0.0000E+00 0
640.- 660. 3439 0.6924E-01 0 2.7911E+06 2.8896E+04 2.8306E+04 0.0000E+00 2.8306E+04 0.0000E+00 0
660.- 680. 3226 0.6495E-01 0 1.9813E+06 2.2498E+04 2.1959E+04 0.0000E+00 2.1959E+04 0.0000E+00 0
680.- 700. 2831 0.5700E-01 1 1.3327E+06 1.6925E+04 1.6460E+04 0.0000E+00 1.6460E+04 0.0000E+00 0
700.- 720. 2187 0.4403E-01 3 8.0787E+05 1.1435E+04 1.1078E+04 0.0000E+00 1.1078E+04 0.0000E+00 0
720.- 740. 1684 0.3391E-01 39 4.4604E+05 6.8737E+03 6.6143E+03 0.0000E+00 6.6143E+03 0.0000E+00 0
740.- 760. 984 0.1981E-01 217 2.1956E+05 3.6693E+03 3.5182E+03 0.0000E+00 3.5182E+03 0.0000E+00 0
760.- 780. 561 0.1129E-01 959 8.9018E+04 1.6928E+03 1.6118E+03 0.0000E+00 1.6118E+03 0.0000E+00 0
780.- 800. 243 0.4892E-02 2778 3.1660E+04 6.4887E+02 6.1438E+02 0.0000E+00 6.1438E+02 0.0000E+00 0
800.- 820. 80 0.1611E-02 5794 8.6929E+03 1.9240E+02 1.8120E+02 0.0000E+00 1.8120E+02 0.0000E+00 0
820.- 840. 23 0.4631E-03 8992 1.8475E+03 3.8057E+01 3.5171E+01 0.0000E+00 3.5171E+01 0.0000E+00 0
840.- 860. 10 0.2013E-03 10674 7.0362E+02 1.7783E+01 1.6579E+01 0.0000E+00 1.6579E+01 0.0000E+00 0
860.- 880. 0 0.0000E+00 9642 5.1952E+01 1.1091E+00 9.7572E-01 0.0000E+00 9.7572E-01 0.0000E+00 0
880.- 900. 1 0.2013E-04 6326 8.9029E+00 3.5673E-01 2.9219E-01 0.0000E+00 2.9219E-01 0.0000E+00 0
900.- 920. 0 0.0000E+00 2930 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 1020 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 254 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 33 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- SUT 0 0.0000E+00
1020.- 1040. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- SUT 0 0.0000E+00
4979 1.0000E+00 4979 4.4737E+07 1.3492E+05 1.3349E+05 1.3020E+04 1.2047E+05 9.6861E+03 250
49668 1.0000E+00 49668 4.4770E+08 1.3588E+06 1.3446E+06 1.5154E+05 1.1930E+06 1.1268E+05 2872
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4529E+05 9.8851E+02 3.6798E+02 6.2053E+02 1.0911E+06 1.1313E+03 2.6323E+02 8.6805E+02 4 4
20.- 40. 5.5284E+05 6.3368E+02 5.3843E+01 5.7984E+02 1.0919E+06 1.2768E+03 4.8626E+02 7.9059E+02 1 5
40.- 60. 5.5460E+05 8.2755E+02 1.1538E+02 7.1217E+02 1.1014E+06 1.4033E+03 6.6280E+02 7.4047E+02 3 5
60.- 80. 5.5359E+05 8.0290E+02 1.3263E+02 6.7027E+02 1.1047E+06 1.0947E+03 2.3411E+02 8.6063E+02 2 3
80.- 100. 5.6416E+05 7.7501E+02 1.7760E+02 5.9740E+02 1.1070E+06 1.0977E+03 2.8508E+02 8.1258E+02 3 5
100.- 120. 5.5734E+05 8.5398E+02 1.7516E+02 6.7882E+02 1.1203E+06 1.2408E+03 3.2901E+02 9.1176E+02 3 3
120.- 140. 5.4935E+05 9.5252E+02 2.2794E+02 7.2458E+02 1.1271E+06 1.4244E+03 2.4946E+02 1.1749E+03 5 5
140.- 160. 5.6004E+05 1.0604E+03 2.3313E+02 8.2729E+02 1.1158E+06 1.2011E+03 1.7653E+02 1.0246E+03 3 4
160.- 180. 5.6181E+05 9.1788E+02 2.4929E+02 6.6859E+02 1.1205E+06 1.3371E+03 2.3852E+02 1.0986E+03 4 5
180.- 200. 5.6106E+05 9.4153E+02 1.5280E+02 7.8873E+02 1.1285E+06 1.6962E+03 4.1006E+02 1.2862E+03 3 8
200.- 220. 5.5901E+05 1.0028E+03 2.5916E+02 7.4367E+02 1.1175E+06 1.5846E+03 3.7818E+02 1.2065E+03 6 8
220.- 240. 5.5723E+05 1.2807E+03 2.8157E+02 9.9911E+02 1.1140E+06 1.9701E+03 6.6609E+02 1.3040E+03 6 13
240.- 260. 5.5812E+05 1.2366E+03 2.3390E+02 1.0027E+03 1.1054E+06 1.9786E+03 3.1991E+02 1.6587E+03 6 8
260.- 280. 5.5015E+05 1.1355E+03 1.3612E+02 9.9940E+02 1.0966E+06 2.0105E+03 3.0469E+02 1.7058E+03 3 5
280.- 300. 5.4578E+05 1.3830E+03 1.8901E+02 1.1940E+03 1.0942E+06 2.1998E+03 4.3816E+02 1.7617E+03 4 8
300.- 320. 5.4464E+05 1.5375E+03 1.5004E+02 1.3874E+03 1.0894E+06 2.8051E+03 5.1327E+02 2.2918E+03 3 10
320.- 340. 5.3797E+05 1.4798E+03 8.5608E+01 1.3942E+03 1.0775E+06 2.7117E+03 2.4095E+02 2.4707E+03 2 4
340.- 360. 5.2669E+05 1.8555E+03 2.1401E+02 1.6415E+03 1.0634E+06 3.3708E+03 3.2206E+02 3.0487E+03 6 7
360.- 380. 5.2279E+05 1.7141E+03 4.8969E+01 1.6651E+03 1.0240E+06 3.2607E+03 5.9847E+02 2.6622E+03 1 12
380.- 400. 4.8810E+05 1.8251E+03 1.7182E+02 1.6533E+03 9.8269E+05 3.5039E+03 5.1248E+02 2.9914E+03 5 11
400.- 420. 4.7235E+05 1.8867E+03 6.7486E+01 1.8192E+03 9.4485E+05 3.5905E+03 3.1042E+02 3.2801E+03 2 8
420.- 440. 4.5786E+05 2.1479E+03 1.0701E+02 2.0409E+03 9.0999E+05 4.1137E+03 6.8331E+02 3.4304E+03 3 16
440.- 460. 4.3894E+05 2.3010E+03 0.0000E+00 2.3010E+03 8.7391E+05 4.5749E+03 2.3257E+02 4.3423E+03 0 6
460.- 480. 4.1330E+05 2.4737E+03 3.1766E+01 2.4419E+03 8.2070E+05 4.6685E+03 3.0219E+02 4.3663E+03 1 8
480.- 500. 3.7872E+05 2.1675E+03 0.0000E+00 2.1675E+03 7.5934E+05 4.6836E+03 0.0000E+00 4.6836E+03 0 0
500.- 520. 2.8749E+04 1.3207E+02 0.0000E+00 1.3207E+02 5.8504E+04 3.3922E+02 0.0000E+00 3.3922E+02 0 0
0.- 20. 5.4757E+06 7.6239E+03 1.9232E+03 5.7007E+03 1.0930E+07 1.2086E+04 4.0459E+03 8.0404E+03 32 51
20.- 40. 5.5265E+06 8.1536E+03 2.1964E+03 5.9572E+03 1.1010E+07 1.2777E+04 4.6363E+03 8.1406E+03 36 50
40.- 60. 5.5211E+06 8.3238E+03 2.4961E+03 5.8277E+03 1.1108E+07 1.2983E+04 4.7494E+03 8.2338E+03 46 61
60.- 80. 5.5803E+06 8.8349E+03 2.4476E+03 6.3874E+03 1.1147E+07 1.3735E+04 4.3725E+03 9.3624E+03 44 68
80.- 100. 5.6067E+06 8.8840E+03 2.5085E+03 6.3754E+03 1.1190E+07 1.3001E+04 3.4469E+03 9.5540E+03 43 60
100.- 120. 5.5997E+06 9.4416E+03 2.4421E+03 6.9995E+03 1.1261E+07 1.3794E+04 3.9283E+03 9.8653E+03 44 64
120.- 140. 5.6179E+06 1.0284E+04 2.8430E+03 7.4406E+03 1.1261E+07 1.5374E+04 4.6549E+03 1.0719E+04 56 69
140.- 160. 5.6169E+06 9.8198E+03 2.6369E+03 7.1829E+03 1.1248E+07 1.4632E+04 4.0247E+03 1.0608E+04 50 65
160.- 180. 5.6340E+06 1.0574E+04 2.4303E+03 8.1433E+03 1.1261E+07 1.5961E+04 4.2336E+03 1.1728E+04 48 69
180.- 200. 5.6071E+06 1.0964E+04 2.3047E+03 8.6596E+03 1.1243E+07 1.6516E+04 3.7642E+03 1.2752E+04 45 63
200.- 220. 5.6103E+06 1.1272E+04 2.3885E+03 8.8832E+03 1.1212E+07 1.7706E+04 4.1078E+03 1.3599E+04 51 70
220.- 240. 5.5904E+06 1.2023E+04 2.2760E+03 9.7474E+03 1.1165E+07 1.9873E+04 4.4514E+03 1.5422E+04 49 76
240.- 260. 5.5527E+06 1.2320E+04 2.4353E+03 9.8846E+03 1.1106E+07 2.0447E+04 4.9908E+03 1.5456E+04 50 89
260.- 280. 5.5021E+06 1.3124E+04 2.0065E+03 1.1117E+04 1.1037E+07 2.2165E+04 4.8358E+03 1.7330E+04 45 92
280.- 300. 5.4446E+06 1.3223E+04 1.9000E+03 1.1323E+04 1.0922E+07 2.3779E+04 4.4821E+03 1.9297E+04 44 86
300.- 320. 5.3800E+06 1.4865E+04 2.1524E+03 1.2712E+04 1.0794E+07 2.5117E+04 4.4959E+03 2.0621E+04 48 86
320.- 340. 5.2933E+06 1.5437E+04 1.6839E+03 1.3753E+04 1.0603E+07 2.7169E+04 4.6701E+03 2.2499E+04 41 91
340.- 360. 5.2121E+06 1.6462E+04 1.5608E+03 1.4902E+04 1.0382E+07 2.8962E+04 4.8527E+03 2.4109E+04 38 97
360.- 380. 5.0730E+06 1.8224E+04 1.7820E+03 1.6442E+04 1.0142E+07 3.1542E+04 4.6581E+03 2.6884E+04 45 95
380.- 400. 4.9163E+06 1.8994E+04 1.5467E+03 1.7447E+04 9.8658E+06 3.5117E+04 5.2243E+03 2.9893E+04 42 107
400.- 420. 4.7580E+06 1.9392E+04 6.5669E+02 1.8735E+04 9.5143E+06 3.6753E+04 4.6124E+03 3.2140E+04 18 103
420.- 440. 4.5793E+06 2.0500E+04 6.8434E+02 1.9816E+04 9.1283E+06 3.9324E+04 3.4619E+03 3.5862E+04 19 84
440.- 460. 4.3408E+06 2.1662E+04 1.6067E+02 2.1501E+04 8.7065E+06 4.2530E+04 3.5593E+03 3.8971E+04 5 85
460.- 480. 4.0981E+06 2.2833E+04 1.4006E+02 2.2693E+04 8.1926E+06 4.6506E+04 3.2904E+03 4.3216E+04 4 83
480.- 500. 3.7885E+06 2.3875E+04 1.6540E+02 2.3709E+04 7.5837E+06 4.6671E+04 2.0757E+03 4.4595E+04 5 56
500.- 520. 2.8995E+05 1.4985E+03 0.0000E+00 1.4985E+03 5.8230E+05 2.9590E+03 1.1147E+02 2.8476E+03 0 3
520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.3140E+07 3.4313E+04 3.8622E+03 3.0451E+04 2.6240E+07 6.0270E+04 9.1578E+03 5.1112E+04 79 171
1.3122E+08 3.4861E+05 4.5768E+04 3.0284E+05 2.6260E+08 6.0748E+05 1.0574E+05 5.0174E+05 948 1923
DAMAGE IN LAYER 1 : 9.4189E+04
DAMAGE IN LAYER 1 : 9.5221E+05
DAMAGE IN LAYER 2 : 3.9303E+04
DAMAGE IN LAYER 2 : 3.9234E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.2000E-03 ENERGY REFL.COEF.= 1.9594E-03 REL.MEAN ENERGY = 4.6653E-01 MEAN ENERGY = 4.1988E+03
PART.REFL.COEF.= 6.6400E-03 ENERGY REFL.COEF.= 2.0832E-03 REL.MEAN ENERGY = 3.1374E-01 MEAN ENERGY = 2.8236E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 4.1988E+03 7.0880E+06 1.9527E-01 1.7554E+00 2.6623E+03 5.8097E+02 1.3444E+06 3.3228E-01
PATHLENGTH 3.3650E+02 3.9972E+04 1.1807E-01 1.8638E+00 1.9993E+02 4.3628E+01 8.1072E+03 3.0587E-01
ELASTIC LOSS 1.0852E+02 2.1892E+03 4.6789E+01 2.2281E+00
INEL. LOSS 4.7700E+03 6.6347E+06 2.5758E+03 1.2266E+02
ENERGY 2.8236E+03 6.3269E+06 8.2679E-01 2.3919E+00 2.5153E+03 1.3805E+02 4.0967E+05 9.8048E-02
PATHLENGTH 4.4450E+02 4.4951E+04 -4.5929E-01 2.0752E+00 2.1202E+02 1.1636E+01 2.5581E+03 8.1917E-02
ELASTIC LOSS 1.0089E+02 1.8501E+03 4.3012E+01 1.2956E-01
INEL. LOSS 6.0039E+03 6.4675E+06 2.5431E+03 7.6600E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 4.1988E+03 2.4718E+07 1.6699E+11 1.2107E+15 9.1529E+18 7.1173E+22
LOGENERGY 3.4881E+00 1.2322E+01 4.4013E+01 1.5872E+02 5.7706E+02 2.1129E+03
PATHLENGTH 3.3650E+02 1.5321E+05 7.9399E+07 4.4227E+10 2.5818E+13 1.5574E+16
ENERGY 2.8236E+03 1.4300E+07 8.9264E+10 6.1058E+14 4.3842E+18 3.2431E+22
LOGENERGY 3.2097E+00 1.0583E+01 3.5668E+01 1.2242E+02 4.2660E+02 1.5056E+03
PATHLENGTH 4.4450E+02 2.4253E+05 1.4339E+08 8.8736E+10 5.6648E+13 3.7008E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -268,5 +269,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 2 2 0 0 0 3 1 2 1 0 1 1 1 3 2 0 1
0.000 0.000 0.952 1.905 1.905 0.000 0.000 0.000 2.857 0.952 1.905 0.952 0.000 0.952 0.952 0.952 2.857 1.905 0.000 0.952
0 1 3 6 6 13 11 14 21 17 13 15 22 27 24 30 32 27 23 27
0.000 0.060 0.181 0.361 0.361 0.783 0.663 0.843 1.265 1.024 0.783 0.904 1.325 1.627 1.446 1.807 1.928 1.627 1.386 1.627
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.rge
+45 -44
View File
@@ -1,52 +1,53 @@
DEPTH PARTICLES
10.0000 6
30.0000 6
50.0000 4
70.0000 3
90.0000 4
110.0000 11
130.0000 7
150.0000 14
170.0000 9
190.0000 12
210.0000 17
230.0000 17
250.0000 19
270.0000 27
290.0000 34
310.0000 46
330.0000 55
350.0000 59
370.0000 77
390.0000 87
410.0000 111
430.0000 143
450.0000 167
470.0000 193
490.0000 235
510.0000 210
530.0000 274
550.0000 302
570.0000 315
590.0000 310
610.0000 357
630.0000 340
650.0000 354
670.0000 314
690.0000 294
710.0000 211
730.0000 144
750.0000 97
770.0000 49
790.0000 28
810.0000 13
830.0000 3
850.0000 1
10.0000 16
30.0000 34
50.0000 61
70.0000 57
90.0000 57
110.0000 94
130.0000 93
150.0000 96
170.0000 129
190.0000 162
210.0000 204
230.0000 221
250.0000 258
270.0000 293
290.0000 401
310.0000 424
330.0000 512
350.0000 633
370.0000 754
390.0000 915
410.0000 1132
430.0000 1297
450.0000 1500
470.0000 1858
490.0000 2281
510.0000 2174
530.0000 2495
550.0000 2723
570.0000 3098
590.0000 3312
610.0000 3577
630.0000 3538
650.0000 3439
670.0000 3226
690.0000 2831
710.0000 2187
730.0000 1684
750.0000 984
770.0000 561
790.0000 243
810.0000 80
830.0000 23
850.0000 10
870.0000 0
890.0000 0
890.0000 1
910.0000 0
930.0000 0
950.0000 0
970.0000 0
990.0000 0
1010.0000 0
1030.0000 0
tests/SiO2_Si_2layer/SiO2_Si_2layer_E9000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
9.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.5623E+03 0.1278E+03 0.4199E+04 0.2662E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1363 3616
9.00 0.45 0.00 15.00 50000 49668 332 0 50000 0 0.5627E+03 0.1296E+03 0.2824E+04 0.2515E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 13482 36186
tests/SiO2_Si_2layer/SiO2_Si_2layer_Seq_Results.dat
+10 -10
View File
@@ -1,11 +1,11 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si
1.00 0.45 0.00 15.00 5000 4525 475 0 5076 76 0.9589E+02 0.5099E+02 0.2524E+03 0.2565E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4525 0
3.00 0.45 0.00 15.00 5000 4857 143 0 5000 0 0.2191E+03 0.7622E+02 0.8864E+03 0.7820E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4857 0
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3343E+03 0.9546E+02 0.1311E+04 0.1182E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4880 40
7.00 0.45 0.00 15.00 5000 4947 53 0 5000 0 0.4451E+03 0.1122E+03 0.2123E+04 0.1906E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3258 1689
9.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.5623E+03 0.1278E+03 0.4199E+04 0.2662E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1363 3616
11.00 0.45 0.00 15.00 5000 4978 22 0 5000 0 0.6823E+03 0.1464E+03 0.3516E+04 0.3082E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 567 4411
13.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.8121E+03 0.1632E+03 0.5113E+04 0.3775E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 282 4693
15.00 0.45 0.00 15.00 5000 4979 21 0 5000 0 0.9526E+03 0.1782E+03 0.5752E+04 0.4330E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 4849
17.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.1114E+04 0.1973E+03 0.4535E+04 0.4174E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 75 4908
19.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1273E+04 0.2212E+03 0.8205E+04 0.6292E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 53 4931
1.00 0.45 0.00 15.00 50000 44913 5087 0 50644 644 0.9546E+02 0.5017E+02 0.2564E+03 0.2593E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 44913 0
3.00 0.45 0.00 15.00 50000 48581 1419 0 50000 0 0.2203E+03 0.7555E+02 0.8042E+03 0.7288E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48581 0
5.00 0.45 0.00 15.00 50000 49234 766 0 50000 0 0.3329E+03 0.9458E+02 0.1480E+04 0.1349E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48830 404
7.00 0.45 0.00 15.00 50000 49535 465 0 50000 0 0.4455E+03 0.1116E+03 0.2052E+04 0.1774E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 32817 16718
9.00 0.45 0.00 15.00 50000 49668 332 0 50000 0 0.5627E+03 0.1296E+03 0.2824E+04 0.2515E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 13482 36186
11.00 0.45 0.00 15.00 50000 49741 259 0 50000 0 0.6844E+03 0.1468E+03 0.3779E+04 0.3143E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 5696 44045
13.00 0.45 0.00 15.00 50000 49792 208 0 50000 0 0.8144E+03 0.1641E+03 0.4258E+04 0.3355E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 2659 47133
15.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.9553E+03 0.1809E+03 0.5445E+04 0.4533E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1391 48448
17.00 0.45 0.00 15.00 50000 49859 141 0 50000 0 0.1108E+04 0.1992E+03 0.7035E+04 0.5353E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 804 49055
19.00 0.45 0.00 15.00 50000 49857 143 0 50000 0 0.1274E+04 0.2185E+03 0.6588E+04 0.6123E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 546 49311
tests/SiO2_Si_2layer/TrimSP.cfg
+1 -1
View File
@@ -11,7 +11,7 @@ L2rho=2.33
L2d=10000
[ProjectileParameters]
ProjType=muon
numberProj=5000
numberProj=50000
z0=0
dz=20
valEnergy=19000