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Expose RNG selcetion from GUI

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salman
2026-06-25 09:42:41 +02:00
parent a19dd6b96b
commit d4cdb1dd65
602 changed files with 40220 additions and 29652 deletions
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 1000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.out
+80 -75
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:25
Start: 19.Jun. 2026 20:09:34
End: 18.Jun. 2026 09:50:25
End: 19.Jun. 2026 20:09:40
Simulation needed for 5000 projectiles 0 seconds
Simulation needed for 50000 projectiles 6 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 1000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
7888 0 0 0 0 0 0 0 0
78398 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,101 +162,105 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4476 ENERGY=0.4476E+07 EV
BACKSCATTERED PARTICLES= 524 ENERGY=0.1334E+06 EV
IMPLANTED PARTICLES= 44913 ENERGY=0.4491E+08 EV
BACKSCATTERED PARTICLES= 5087 ENERGY=0.1304E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5056
PARTICLES with neg. E= 56
TRIED PARTICLES= 50644
PARTICLES with neg. E= 644
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4476 4476
IMPLANTED PARTICLES (LAYER 1)= 44913 44913
IMPLANTED PARTICLES (LAYER 2)= 0 0
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4476 0
IMPLANTED PARTICLES (LAYER 4)= 44913 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.001
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.506
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.001
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.502
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5351E+01 2.5309E+03 3.8377E-01 2.6215E+00 5.0308E+01 7.5196E-01 4.8171E+01 2.7066E-02
SPREAD 6.9381E+01 1.3999E+03 6.3886E-01 3.2564E+00 3.7416E+01 5.5925E-01 3.1432E+01 4.0213E-02
PATHLENGTH 2.3340E+02 3.0389E+03 -4.4591E-01 3.3482E+00 5.5126E+01 8.2397E-01 6.9604E+01 3.9404E-02
ELASTIC LOSS 1.3570E+01 3.4833E+01 5.9020E+00 1.3186E-03
INEL. LOSS 1.0308E+03 1.8106E+05 4.2552E+02 9.5066E-02
PENETRATION 9.5458E+01 2.5168E+03 3.4863E-01 2.5924E+00 5.0168E+01 2.3672E-01 1.4986E+01 8.7238E-03
SPREAD 6.9160E+01 1.4012E+03 6.1937E-01 3.1300E+00 3.7433E+01 1.7663E-01 9.6495E+00 1.1240E-02
PATHLENGTH 2.3240E+02 3.0587E+03 -4.8034E-01 3.3400E+00 5.5306E+01 2.6097E-01 2.2078E+01 1.1811E-02
ELASTIC LOSS 1.3437E+01 3.3272E+01 5.7682E+00 1.2843E-04
INEL. LOSS 1.0231E+03 1.7931E+05 4.2345E+02 9.4281E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.3125E-01 3.3250E-01 1.6745E+01 4.8077E+02 5.7663E-01 8.2298E-04 1.0395E-02 6.2046E-01
WEAK EL.LOSS 4.6172E-03 4.7299E-05 2.1531E+00 7.3017E+00 6.8774E-03 9.8156E-06 1.6946E-07 5.2362E-03
INELAST.LOSS 9.9492E+00 3.7198E+01 2.1868E-01 2.0934E+00 6.0990E+00 8.7047E-03 5.5514E-02 2.1169E-03
SUBTHR.LOSS 1.3091E-01 3.2159E-01 1.5632E+01 3.9869E+02 5.6709E-01 8.0937E-04 9.1531E-03 4.3741E-01
ELAST.LOSS 1.3064E-01 3.2768E-01 1.6874E+01 5.0152E+02 5.7244E-01 2.5827E-04 3.3076E-03 2.4846E-01
WEAK EL.LOSS 4.6245E-03 4.7284E-05 2.1446E+00 7.2550E+00 6.8764E-03 3.1025E-06 5.3355E-08 1.6506E-03
INELAST.LOSS 9.9280E+00 3.7040E+01 2.1628E-01 2.0879E+00 6.0861E+00 2.7459E-03 1.7431E-02 6.6823E-04
SUBTHR.LOSS 1.3033E-01 3.1678E-01 1.5568E+01 3.9485E+02 5.6283E-01 2.5394E-04 2.8364E-03 1.3632E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5351E+01 1.1623E+04 1.6397E+06 2.5615E+08 4.3229E+10 7.7579E+12
PENETRATION 9.5458E+01 1.1629E+04 1.6346E+06 2.5386E+08 4.2551E+10 7.5851E+12
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 233 0.5206E-01 4 9.4449E+05 8.2685E+03 8.1236E+03 1.3384E+02 7.9897E+03 1.0155E+02 4
20.- 40. 422 0.9428E-01 4 9.3841E+05 9.9746E+03 9.7410E+03 0.0000E+00 9.7410E+03 0.0000E+00 0
40.- 60. 589 0.1316E+00 10 8.5622E+05 1.0773E+04 1.0466E+04 3.0111E+01 1.0436E+04 2.2967E+01 1
60.- 80. 614 0.1372E+00 19 7.1447E+05 1.0300E+04 9.9778E+03 0.0000E+00 9.9778E+03 0.0000E+00 0
80.- 100. 637 0.1423E+00 31 5.3407E+05 8.6689E+03 8.3487E+03 0.0000E+00 8.3487E+03 0.0000E+00 0
100.- 120. 593 0.1325E+00 74 3.8225E+05 6.8875E+03 6.5963E+03 0.0000E+00 6.5963E+03 0.0000E+00 0
120.- 140. 491 0.1097E+00 121 2.4755E+05 5.1476E+03 4.9036E+03 0.0000E+00 4.9036E+03 0.0000E+00 0
140.- 160. 406 0.9071E-01 185 1.4317E+05 3.2657E+03 3.0832E+03 0.0000E+00 3.0832E+03 0.0000E+00 0
160.- 180. 230 0.5139E-01 287 7.2324E+04 1.8872E+03 1.7789E+03 0.0000E+00 1.7789E+03 0.0000E+00 0
180.- 200. 143 0.3195E-01 403 3.3365E+04 9.0939E+02 8.4655E+02 0.0000E+00 8.4655E+02 0.0000E+00 0
200.- 220. 71 0.1586E-01 512 1.2772E+04 4.1379E+02 3.8170E+02 0.0000E+00 3.8170E+02 0.0000E+00 0
220.- 240. 32 0.7149E-02 629 4.1228E+03 1.5166E+02 1.3856E+02 0.0000E+00 1.3856E+02 0.0000E+00 0
240.- 260. 12 0.2681E-02 722 1.0205E+03 4.5449E+01 4.1023E+01 0.0000E+00 4.1023E+01 0.0000E+00 0
260.- 280. 3 0.6702E-03 615 6.2549E+01 4.6410E+00 3.8731E+00 0.0000E+00 3.8731E+00 0.0000E+00 0
280.- 300. 0 0.0000E+00 402 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
300.- 320. 0 0.0000E+00 266 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
320.- 340. 0 0.0000E+00 129 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
440.- SUT 0 0.0000E+00
0.- 20. 2367 0.5270E-01 16 9.4307E+06 8.3192E+04 8.1721E+04 1.0305E+03 8.0690E+04 7.7928E+02 29
20.- 40. 4391 0.9777E-01 51 9.4316E+06 9.9542E+04 9.7157E+04 3.6774E+02 9.6789E+04 2.7901E+02 11
40.- 60. 5480 0.1220E+00 124 8.5008E+06 1.0550E+05 1.0259E+05 1.3236E+02 1.0246E+05 1.0047E+02 4
60.- 80. 6290 0.1400E+00 231 7.0592E+06 1.0075E+05 9.7518E+04 0.0000E+00 9.7518E+04 0.0000E+00 0
80.- 100. 6295 0.1402E+00 434 5.4077E+06 8.7511E+04 8.4300E+04 0.0000E+00 8.4300E+04 0.0000E+00 0
100.- 120. 6023 0.1341E+00 691 3.8341E+06 7.0030E+04 6.7050E+04 0.0000E+00 6.7050E+04 0.0000E+00 0
120.- 140. 5227 0.1164E+00 1196 2.4566E+06 5.1185E+04 4.8697E+04 0.0000E+00 4.8697E+04 0.0000E+00 0
140.- 160. 3827 0.8521E-01 1836 1.4332E+06 3.3322E+04 3.1512E+04 0.0000E+00 3.1512E+04 0.0000E+00 0
160.- 180. 2493 0.5551E-01 2841 7.1605E+05 1.8557E+04 1.7421E+04 0.0000E+00 1.7421E+04 0.0000E+00 0
180.- 200. 1405 0.3128E-01 4111 3.2127E+05 9.0452E+03 8.4220E+03 0.0000E+00 8.4220E+03 0.0000E+00 0
200.- 220. 713 0.1588E-01 5380 1.2726E+05 3.9674E+03 3.6615E+03 0.0000E+00 3.6615E+03 0.0000E+00 0
220.- 240. 284 0.6323E-02 6473 4.0526E+04 1.4180E+03 1.2994E+03 0.0000E+00 1.2994E+03 0.0000E+00 0
240.- 260. 86 0.1915E-02 6908 1.0178E+04 3.8211E+02 3.4972E+02 0.0000E+00 3.4972E+02 0.0000E+00 0
260.- 280. 26 0.5789E-03 5941 2.1117E+03 8.3930E+01 7.4565E+01 0.0000E+00 7.4565E+01 0.0000E+00 0
280.- 300. 6 0.1336E-03 4358 3.5297E+02 1.8977E+01 1.6823E+01 0.0000E+00 1.6823E+01 0.0000E+00 0
300.- 320. 0 0.0000E+00 2605 9.2731E-01 5.6012E-02 4.0312E-02 0.0000E+00 4.0312E-02 0.0000E+00 0
320.- 340. 0 0.0000E+00 1159 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 413 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 124 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 16 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
440.- 460. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- SUT 0 0.0000E+00
4476 1.0000E+00 4476 4.8843E+06 6.6698E+04 6.4431E+04 1.6395E+02 6.4267E+04 1.2452E+02 5
44913 1.0000E+00 44913 4.8772E+07 6.6451E+05 6.4179E+05 1.5306E+03 6.4026E+05 1.1588E+03 44
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 3.1480E+05 2.6834E+03 0.0000E+00 2.6834E+03 6.2969E+05 5.4402E+03 1.3384E+02 5.3063E+03 0 4
20.- 40. 3.0957E+05 3.0120E+03 0.0000E+00 3.0120E+03 6.2885E+05 6.7290E+03 0.0000E+00 6.7290E+03 0 0
40.- 60. 2.8560E+05 3.2059E+03 0.0000E+00 3.2059E+03 5.7062E+05 7.2603E+03 3.0111E+01 7.2302E+03 0 1
60.- 80. 2.3725E+05 3.0150E+03 0.0000E+00 3.0150E+03 4.7722E+05 6.9629E+03 0.0000E+00 6.9629E+03 0 0
80.- 100. 1.7880E+05 2.6287E+03 0.0000E+00 2.6287E+03 3.5527E+05 5.7201E+03 0.0000E+00 5.7201E+03 0 0
100.- 120. 1.2746E+05 1.8583E+03 0.0000E+00 1.8583E+03 2.5479E+05 4.7380E+03 0.0000E+00 4.7380E+03 0 0
120.- 140. 8.1669E+04 1.4006E+03 0.0000E+00 1.4006E+03 1.6588E+05 3.5030E+03 0.0000E+00 3.5030E+03 0 0
140.- 160. 4.6600E+04 9.0954E+02 0.0000E+00 9.0954E+02 9.6572E+04 2.1737E+03 0.0000E+00 2.1737E+03 0 0
160.- 180. 2.4490E+04 5.3897E+02 0.0000E+00 5.3897E+02 4.7834E+04 1.2400E+03 0.0000E+00 1.2400E+03 0 0
180.- 200. 1.0826E+04 2.4643E+02 0.0000E+00 2.4643E+02 2.2539E+04 6.0012E+02 0.0000E+00 6.0012E+02 0 0
200.- 220. 4.1607E+03 9.2769E+01 0.0000E+00 9.2769E+01 8.6114E+03 2.8893E+02 0.0000E+00 2.8893E+02 0 0
220.- 240. 1.5486E+03 3.8853E+01 0.0000E+00 3.8853E+01 2.5742E+03 9.9702E+01 0.0000E+00 9.9702E+01 0 0
240.- 260. 3.9539E+02 1.0502E+01 0.0000E+00 1.0502E+01 6.2507E+02 3.0521E+01 0.0000E+00 3.0521E+01 0 0
260.- 280. 1.7782E+01 1.3350E+00 0.0000E+00 1.3350E+00 4.4768E+01 2.5381E+00 0.0000E+00 2.5381E+00 0 0
280.- 300. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
0.- 20. 3.1418E+06 2.6280E+04 0.0000E+00 2.6280E+04 6.2889E+06 5.5440E+04 1.0305E+03 5.4410E+04 0 29
20.- 40. 3.1399E+06 3.0333E+04 0.0000E+00 3.0333E+04 6.2917E+06 6.6824E+04 3.6774E+02 6.6456E+04 0 11
40.- 60. 2.8216E+06 3.1569E+04 0.0000E+00 3.1569E+04 5.6793E+06 7.1021E+04 1.3236E+02 7.0888E+04 0 4
60.- 80. 2.3448E+06 2.9403E+04 0.0000E+00 2.9403E+04 4.7144E+06 6.8115E+04 0.0000E+00 6.8115E+04 0 0
80.- 100. 1.7939E+06 2.5015E+04 0.0000E+00 2.5015E+04 3.6138E+06 5.9285E+04 0.0000E+00 5.9285E+04 0 0
100.- 120. 1.2679E+06 1.9744E+04 0.0000E+00 1.9744E+04 2.5662E+06 4.7305E+04 0.0000E+00 4.7305E+04 0 0
120.- 140. 8.1306E+05 1.4195E+04 0.0000E+00 1.4195E+04 1.6435E+06 3.4502E+04 0.0000E+00 3.4502E+04 0 0
140.- 160. 4.7373E+05 9.0931E+03 0.0000E+00 9.0931E+03 9.5950E+05 2.2419E+04 0.0000E+00 2.2419E+04 0 0
160.- 180. 2.3887E+05 4.9236E+03 0.0000E+00 4.9236E+03 4.7718E+05 1.2497E+04 0.0000E+00 1.2497E+04 0 0
180.- 200. 1.0513E+05 2.3650E+03 0.0000E+00 2.3650E+03 2.1615E+05 6.0571E+03 0.0000E+00 6.0571E+03 0 0
200.- 220. 4.2240E+04 1.0499E+03 0.0000E+00 1.0499E+03 8.5024E+04 2.6116E+03 0.0000E+00 2.6116E+03 0 0
220.- 240. 1.3483E+04 3.4978E+02 0.0000E+00 3.4978E+02 2.7043E+04 9.4961E+02 0.0000E+00 9.4961E+02 0 0
240.- 260. 3.4386E+03 9.8815E+01 0.0000E+00 9.8815E+01 6.7397E+03 2.5090E+02 0.0000E+00 2.5090E+02 0 0
260.- 280. 7.3074E+02 2.5137E+01 0.0000E+00 2.5137E+01 1.3809E+03 4.9428E+01 0.0000E+00 4.9428E+01 0 0
280.- 300. 1.0156E+02 4.0484E+00 0.0000E+00 4.0484E+00 2.5142E+02 1.2774E+01 0.0000E+00 1.2774E+01 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 9.2731E-01 4.0312E-02 0.0000E+00 4.0312E-02 0 0
320.- 340. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
340.- 360. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.6232E+06 1.9642E+04 0.0000E+00 1.9642E+04 3.2611E+06 4.4789E+04 1.6395E+02 4.4625E+04 0 5
1.6201E+07 1.9445E+05 0.0000E+00 1.9445E+05 3.2571E+07 4.4734E+05 1.5306E+03 4.4581E+05 0 44
DAMAGE IN LAYER 1 : 6.4431E+04
DAMAGE IN LAYER 1 : 6.4179E+05
DAMAGE IN LAYER 2 : 0.0000E+00
@@ -267,18 +272,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.0480E-01 ENERGY REFL.COEF.= 2.6688E-02 REL.MEAN ENERGY = 2.5466E-01 MEAN ENERGY = 2.5466E+02
PART.REFL.COEF.= 1.0174E-01 ENERGY REFL.COEF.= 2.6083E-02 REL.MEAN ENERGY = 2.5637E-01 MEAN ENERGY = 2.5637E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.5466E+02 6.3484E+04 1.8273E+00 7.3315E+00 2.5196E+02 1.1007E+01 6.9784E+03 1.8820E-01
PATHLENGTH 9.4975E+01 3.7083E+03 5.0645E-01 2.7761E+00 6.0896E+01 2.6602E+00 2.1589E+02 7.6825E-02
ELASTIC LOSS 1.1373E+01 5.3378E+01 7.3060E+00 1.3943E-02
INEL. LOSS 5.1633E+02 1.4105E+05 3.7556E+02 7.1672E-01
ENERGY 2.5637E+02 6.7249E+04 1.8492E+00 7.1547E+00 2.5932E+02 3.6359E+00 2.3392E+03 5.5395E-02
PATHLENGTH 1.0078E+02 3.8942E+03 3.9562E-01 2.4711E+00 6.2404E+01 8.7494E-01 6.6222E+01 2.3489E-02
ELASTIC LOSS 1.1989E+01 5.5833E+01 7.4722E+00 1.4689E-03
INEL. LOSS 5.5491E+02 1.5177E+05 3.8958E+02 7.6583E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.5466E+02 1.2833E+05 9.4244E+07 8.8229E+10 9.7151E+13 1.1923E+17
LOGENERGY 2.1534E+00 4.9494E+00 1.1818E+01 2.9048E+01 7.3078E+01 1.8744E+02
PATHLENGTH 9.4975E+01 1.2729E+04 2.0276E+06 3.6369E+08 7.1259E+10 1.4934E+13
ENERGY 2.5637E+02 1.3298E+05 1.0082E+08 9.6268E+10 1.0659E+14 1.3033E+17
LOGENERGY 2.1552E+00 4.9489E+00 1.1815E+01 2.9062E+01 7.3233E+01 1.8831E+02
PATHLENGTH 1.0078E+02 1.4051E+04 2.2971E+06 4.1670E+08 8.1552E+10 1.6925E+13
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -286,5 +291,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 4 6 8 8 19 14 26 15 29 36 35 60 49 37 57 55 66
0.000 0.000 0.000 0.153 0.229 0.305 0.305 0.725 0.534 0.992 0.573 1.107 1.374 1.336 2.290 1.870 1.412 2.176 2.099 2.519
0 2 6 29 49 70 116 144 171 232 223 278 329 369 421 458 484 523 537 646
0.000 0.008 0.024 0.114 0.193 0.275 0.456 0.566 0.672 0.912 0.877 1.093 1.293 1.451 1.655 1.801 1.903 2.056 2.111 2.540
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.rge
+17 -15
View File
@@ -1,19 +1,19 @@
DEPTH PARTICLES
10.0000 233
30.0000 422
50.0000 589
70.0000 614
90.0000 637
110.0000 593
130.0000 491
150.0000 406
170.0000 230
190.0000 143
210.0000 71
230.0000 32
250.0000 12
270.0000 3
290.0000 0
10.0000 2367
30.0000 4391
50.0000 5480
70.0000 6290
90.0000 6295
110.0000 6023
130.0000 5227
150.0000 3827
170.0000 2493
190.0000 1405
210.0000 713
230.0000 284
250.0000 86
270.0000 26
290.0000 6
310.0000 0
330.0000 0
350.0000 0
@@ -21,3 +21,5 @@
390.0000 0
410.0000 0
430.0000 0
450.0000 0
470.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
1.00 0.45 0.00 15.00 5000 4476 524 0 5056 56 0.9535E+02 0.5031E+02 0.2547E+03 0.2520E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4476 0 0 0
1.00 0.45 0.00 15.00 50000 44913 5087 0 50644 644 0.9546E+02 0.5017E+02 0.2564E+03 0.2593E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 44913 0 0 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 11000 450 0 15 0.5 0.0 0.0 0.0
5000 78746 78746 78746 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78746 78746 78746 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.out
+113 -112
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:26
Start: 19.Jun. 2026 20:09:44
End: 18.Jun. 2026 09:50:28
End: 19.Jun. 2026 20:10:05
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 50000 projectiles 21 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 11000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78746.00 78746.00 78746.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78746.00 78746.00 78746.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
29608 0 0 0 0 0 0 0 0
294027 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,144 +162,144 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4976 ENERGY=0.5474E+08 EV
BACKSCATTERED PARTICLES= 24 ENERGY=0.9374E+05 EV
IMPLANTED PARTICLES= 49747 ENERGY=0.5472E+09 EV
BACKSCATTERED PARTICLES= 253 ENERGY=0.9495E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 252 252
IMPLANTED PARTICLES (LAYER 1)= 2377 2377
IMPLANTED PARTICLES (LAYER 2)= 4458 4458
IMPLANTED PARTICLES (LAYER 2)= 44654 44654
IMPLANTED PARTICLES (LAYER 3)= 266 266
IMPLANTED PARTICLES (LAYER 3)= 2716 2716
IMPLANTED PARTICLES (LAYER 4)= 4867 0
IMPLANTED PARTICLES (LAYER 4)= 48648 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 374.7 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.070
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.562
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 374.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.069
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.550
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.8478E+02 1.0774E+04 -1.5672E+00 7.0354E+00 1.0380E+02 1.4714E+00 3.7522E+02 5.9041E-02
SPREAD 2.2555E+02 1.6321E+04 8.6528E-01 3.7355E+00 1.2775E+02 1.8111E+00 3.8268E+02 3.7356E-02
PATHLENGTH 8.1489E+02 1.6555E+03 1.6876E+00 6.5439E+00 4.0688E+01 5.7681E-01 5.5259E+01 4.1841E-02
ELASTIC LOSS 3.4215E+01 3.4787E+02 1.8651E+01 3.7482E-03
INEL. LOSS 1.0974E+04 2.0198E+05 4.4942E+02 9.0318E-02
PENETRATION 5.8594E+02 1.0295E+04 -1.4996E+00 6.9425E+00 1.0146E+02 4.5491E-01 1.1252E+02 2.0864E-02
SPREAD 2.2328E+02 1.5982E+04 9.0321E-01 3.9085E+00 1.2642E+02 5.6681E-01 1.2220E+02 1.2066E-02
PATHLENGTH 8.1408E+02 1.6182E+03 1.7295E+00 6.8538E+00 4.0227E+01 1.8036E-01 1.7554E+01 1.3566E-02
ELASTIC LOSS 3.3826E+01 3.2147E+02 1.7929E+01 3.6041E-04
INEL. LOSS 1.0967E+04 2.0242E+05 4.4991E+02 9.0439E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.0469E-02 1.1088E+00 6.4329E+01 7.2179E+03 1.0530E+00 7.6926E-04 6.8813E-02 4.3018E+00
WEAK EL.LOSS 1.9119E-03 3.4990E-05 4.6617E+00 2.7062E+01 5.9153E-03 4.3214E-06 1.3050E-07 8.1512E-03
INELAST.LOSS 2.9229E+01 1.1761E+02 -1.3302E+00 3.4506E+00 1.0845E+01 7.9227E-03 1.3450E-01 1.7267E-03
SUBTHR.LOSS 8.0180E-02 3.8148E-01 2.2987E+01 7.2377E+02 6.1764E-01 4.5126E-04 7.4930E-03 1.9398E-01
ELAST.LOSS 8.9739E-02 1.0990E+00 6.8717E+01 8.4620E+03 1.0483E+00 2.4228E-04 2.3363E-02 1.7120E+00
WEAK EL.LOSS 1.9156E-03 3.5144E-05 4.6659E+00 2.7107E+01 5.9283E-03 1.3701E-06 4.1501E-08 2.5775E-03
INELAST.LOSS 2.9235E+01 1.1756E+02 -1.3308E+00 3.4528E+00 1.0843E+01 2.5058E-03 4.2551E-02 5.4633E-04
SUBTHR.LOSS 7.9694E-02 3.7041E-01 2.2819E+01 7.1653E+02 6.0861E-01 1.4067E-04 2.2901E-03 6.3028E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.8478E+02 3.5274E+05 2.1712E+08 1.3576E+11 8.6023E+13 5.5145E+16
PENETRATION 5.8594E+02 3.5362E+05 2.1769E+08 1.3614E+11 8.6282E+13 5.5331E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.6164E+06 1.4812E+03 1.4796E+03 4.7833E+02 1.0013E+03 3.5441E+02 8
20.- 40. 4 0.8039E-03 0 1.6360E+06 2.2575E+03 2.2544E+03 9.5070E+02 1.3037E+03 6.8682E+02 13
40.- 60. 2 0.4019E-03 0 1.6414E+06 1.9539E+03 1.9511E+03 7.0051E+02 1.2505E+03 5.1220E+02 10
60.- 80. 3 0.6029E-03 0 1.6531E+06 1.6151E+03 1.6120E+03 3.5141E+02 1.2606E+03 2.6639E+02 8
80.- 100. 3 0.6029E-03 0 1.6642E+06 1.7956E+03 1.7921E+03 4.9888E+02 1.2932E+03 3.6610E+02 8
100.- 120. 6 0.1206E-02 0 1.6714E+06 1.8934E+03 1.8882E+03 4.7824E+02 1.4100E+03 3.6618E+02 10
120.- 140. 10 0.2010E-02 0 1.6755E+06 2.5099E+03 2.5034E+03 8.5429E+02 1.6491E+03 6.1059E+02 11
140.- 160. 5 0.1005E-02 0 1.6920E+06 2.0646E+03 2.0601E+03 6.1248E+02 1.4476E+03 4.3776E+02 8
160.- 180. 10 0.2010E-02 0 1.7076E+06 2.1649E+03 2.1578E+03 5.8367E+02 1.5741E+03 4.3626E+02 9
180.- 200. 11 0.2211E-02 0 1.7033E+06 2.1911E+03 2.1833E+03 4.9300E+02 1.6903E+03 3.7105E+02 10
200.- 220. 9 0.1809E-02 0 1.7133E+06 2.5369E+03 2.5299E+03 8.2054E+02 1.7094E+03 6.0328E+02 12
220.- 240. 12 0.2412E-02 0 1.7171E+06 2.2931E+03 2.2842E+03 4.0962E+02 1.8746E+03 3.1328E+02 9
240.- 260. 14 0.2814E-02 0 1.7322E+06 2.4066E+03 2.3967E+03 5.7484E+02 1.8218E+03 4.2094E+02 9
260.- 280. 16 0.3215E-02 0 1.7230E+06 2.7595E+03 2.7482E+03 8.9506E+02 1.8531E+03 6.6518E+02 14
280.- 300. 23 0.4622E-02 0 1.7121E+06 2.7899E+03 2.7778E+03 5.8317E+02 2.1946E+03 4.2192E+02 8
300.- 320. 10 0.2010E-02 0 1.7163E+06 3.0757E+03 3.0659E+03 6.6846E+02 2.3974E+03 4.9221E+02 10
320.- 340. 26 0.5225E-02 0 1.7061E+06 3.4263E+03 3.4098E+03 9.7297E+02 2.4368E+03 7.2091E+02 17
340.- 360. 28 0.5627E-02 0 1.6841E+06 3.0096E+03 2.9927E+03 4.0295E+02 2.5897E+03 3.0250E+02 9
360.- 380. 29 0.5828E-02 0 1.6855E+06 3.4519E+03 3.4325E+03 8.0308E+02 2.6295E+03 6.0574E+02 16
380.- 400. 31 0.6230E-02 0 1.6746E+06 3.5444E+03 3.5214E+03 6.3105E+02 2.8904E+03 4.6516E+02 11
400.- 420. 66 0.1326E-01 0 2.2619E+06 6.0129E+03 5.9579E+03 1.2411E+03 4.7167E+03 9.3024E+02 25
420.- 440. 82 0.1648E-01 0 2.2454E+06 6.1747E+03 6.1063E+03 9.5790E+02 5.1484E+03 7.1753E+02 18
440.- 460. 91 0.1829E-01 0 2.1540E+06 7.0064E+03 6.9241E+03 1.2175E+03 5.7066E+03 9.1715E+02 26
460.- 480. 115 0.2311E-01 0 2.0598E+06 7.1661E+03 7.0734E+03 7.1646E+02 6.3570E+03 5.3234E+02 14
480.- 500. 147 0.2954E-01 0 1.9876E+06 8.2279E+03 8.1054E+03 7.2207E+02 7.3833E+03 5.4281E+02 16
500.- 520. 231 0.4642E-01 0 1.9051E+06 9.6129E+03 9.4268E+03 6.8515E+02 8.7416E+03 5.1996E+02 17
520.- 540. 261 0.5245E-01 0 1.7420E+06 9.6905E+03 9.4884E+03 4.2390E+02 9.0645E+03 3.1779E+02 10
540.- 560. 306 0.6150E-01 0 1.5654E+06 1.0384E+04 1.0140E+04 2.7168E+02 9.8685E+03 2.0545E+02 7
560.- 580. 359 0.7215E-01 0 1.3865E+06 1.1244E+04 1.0962E+04 1.2945E+02 1.0833E+04 9.7107E+01 3
580.- 600. 447 0.8983E-01 0 1.1764E+06 1.1271E+04 1.0936E+04 1.4128E+02 1.0795E+04 1.0704E+02 4
600.- 620. 514 0.1033E+00 0 9.2119E+05 1.0400E+04 1.0017E+04 3.5740E+01 9.9809E+03 2.7091E+01 1
620.- 640. 525 0.1055E+00 0 6.8629E+05 9.0904E+03 8.7071E+03 0.0000E+00 8.7071E+03 0.0000E+00 0
640.- 660. 522 0.1049E+00 0 4.6592E+05 7.5531E+03 7.1852E+03 0.0000E+00 7.1852E+03 0.0000E+00 0
660.- 680. 439 0.8822E-01 0 2.7733E+05 5.3447E+03 5.0347E+03 0.0000E+00 5.0347E+03 0.0000E+00 0
680.- 700. 353 0.7094E-01 0 1.3709E+05 3.1908E+03 2.9650E+03 0.0000E+00 2.9650E+03 0.0000E+00 0
700.- 720. 89 0.1789E-01 0 3.4588E+04 6.7042E+02 6.4522E+02 0.0000E+00 6.4522E+02 0.0000E+00 0
720.- 740. 75 0.1507E-01 7 1.9108E+04 4.2998E+02 4.1328E+02 0.0000E+00 4.1328E+02 0.0000E+00 0
740.- 760. 57 0.1145E-01 98 9.9429E+03 2.4009E+02 2.2869E+02 0.0000E+00 2.2869E+02 0.0000E+00 0
760.- 780. 27 0.5426E-02 561 4.3175E+03 9.6897E+01 9.1529E+01 0.0000E+00 9.1529E+01 0.0000E+00 0
780.- 800. 12 0.2412E-02 1324 1.4925E+03 4.4538E+01 4.1990E+01 0.0000E+00 4.1990E+01 0.0000E+00 0
800.- 820. 4 0.8039E-03 1432 5.0086E+02 1.6370E+01 1.5538E+01 0.0000E+00 1.5538E+01 0.0000E+00 0
820.- 840. 1 0.2010E-03 723 1.3405E+02 3.8656E+00 3.6527E+00 0.0000E+00 3.6527E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 291 4.3949E+01 1.6862E+00 1.6624E+00 0.0000E+00 1.6624E+00 0.0000E+00 0
860.- 880. 1 0.2010E-03 138 3.3826E+01 1.2377E+00 1.0641E+00 0.0000E+00 1.0641E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 129 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 89 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 75 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 55 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 37 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 12 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 4 0.8041E-04 0 1.6138E+07 1.6334E+04 1.6316E+04 5.5476E+03 1.0768E+04 4.0242E+03 72
20.- 40. 27 0.5427E-03 0 1.6254E+07 1.6480E+04 1.6451E+04 5.0840E+03 1.1367E+04 3.7174E+03 72
40.- 60. 36 0.7237E-03 0 1.6368E+07 1.7409E+04 1.7378E+04 5.3869E+03 1.1991E+04 3.9205E+03 76
60.- 80. 36 0.7237E-03 0 1.6504E+07 1.8897E+04 1.8862E+04 6.1351E+03 1.2727E+04 4.4367E+03 81
80.- 100. 33 0.6634E-03 0 1.6615E+07 1.9667E+04 1.9632E+04 6.7604E+03 1.2872E+04 4.9203E+03 96
100.- 120. 37 0.7438E-03 0 1.6713E+07 1.8436E+04 1.8398E+04 5.4943E+03 1.2904E+04 4.0085E+03 78
120.- 140. 49 0.9850E-03 0 1.6784E+07 2.0280E+04 2.0236E+04 6.2562E+03 1.3980E+04 4.5481E+03 89
140.- 160. 57 0.1146E-02 0 1.6903E+07 1.9910E+04 1.9863E+04 5.3674E+03 1.4495E+04 3.9101E+03 82
160.- 180. 61 0.1226E-02 0 1.6976E+07 2.0521E+04 2.0468E+04 5.3565E+03 1.5111E+04 3.9325E+03 83
180.- 200. 86 0.1729E-02 0 1.7003E+07 2.2949E+04 2.2886E+04 6.9771E+03 1.5909E+04 5.1110E+03 106
200.- 220. 87 0.1749E-02 0 1.7059E+07 2.2350E+04 2.2283E+04 5.6823E+03 1.6601E+04 4.1964E+03 91
220.- 240. 90 0.1809E-02 0 1.7093E+07 2.4561E+04 2.4487E+04 6.6053E+03 1.7882E+04 4.8207E+03 100
240.- 260. 126 0.2533E-02 0 1.7163E+07 2.5747E+04 2.5659E+04 7.1318E+03 1.8527E+04 5.2421E+03 112
260.- 280. 161 0.3236E-02 0 1.7188E+07 2.6628E+04 2.6520E+04 6.5564E+03 1.9964E+04 4.8534E+03 110
280.- 300. 159 0.3196E-02 0 1.7149E+07 2.7673E+04 2.7564E+04 6.8267E+03 2.0737E+04 5.0268E+03 114
300.- 320. 192 0.3860E-02 0 1.7081E+07 2.9681E+04 2.9552E+04 7.1297E+03 2.2422E+04 5.3048E+03 131
320.- 340. 246 0.4945E-02 0 1.7044E+07 3.1273E+04 3.1116E+04 7.4346E+03 2.3682E+04 5.5395E+03 137
340.- 360. 250 0.5025E-02 0 1.6923E+07 3.3177E+04 3.3012E+04 7.4009E+03 2.5611E+04 5.5084E+03 137
360.- 380. 303 0.6091E-02 0 1.6808E+07 3.4087E+04 3.3891E+04 7.3762E+03 2.6515E+04 5.5111E+03 141
380.- 400. 337 0.6774E-02 0 1.6621E+07 3.6572E+04 3.6345E+04 6.8643E+03 2.9481E+04 5.1226E+03 132
400.- 420. 666 0.1339E-01 0 2.2430E+07 5.6753E+04 5.6190E+04 9.9786E+03 4.6211E+04 7.4767E+03 201
420.- 440. 789 0.1586E-01 0 2.2399E+07 6.1927E+04 6.1248E+04 9.3157E+03 5.1932E+04 6.9997E+03 191
440.- 460. 1001 0.2012E-01 0 2.1653E+07 6.8683E+04 6.7841E+04 9.1051E+03 5.8736E+04 6.8875E+03 205
460.- 480. 1277 0.2567E-01 0 2.0979E+07 7.5646E+04 7.4580E+04 8.1300E+03 6.6450E+04 6.1227E+03 179
480.- 500. 1594 0.3204E-01 0 2.0004E+07 8.3330E+04 8.2017E+04 7.2351E+03 7.4782E+04 5.4660E+03 171
500.- 520. 2031 0.4083E-01 0 1.8846E+07 8.8948E+04 8.7311E+04 5.7944E+03 8.1517E+04 4.3841E+03 142
520.- 540. 2548 0.5122E-01 0 1.7489E+07 9.7833E+04 9.5811E+04 4.7496E+03 9.1062E+04 3.5879E+03 119
540.- 560. 3064 0.6159E-01 0 1.5830E+07 1.0669E+05 1.0426E+05 3.3467E+03 1.0092E+05 2.5307E+03 88
560.- 580. 3785 0.7608E-01 0 1.3887E+07 1.0931E+05 1.0640E+05 2.0084E+03 1.0439E+05 1.5204E+03 55
580.- 600. 4475 0.8996E-01 0 1.1751E+07 1.1129E+05 1.0788E+05 9.9359E+02 1.0688E+05 7.5349E+02 28
600.- 620. 5055 0.1016E+00 0 9.3346E+06 1.0559E+05 1.0182E+05 2.3869E+02 1.0158E+05 1.8129E+02 7
620.- 640. 5196 0.1044E+00 0 6.8735E+06 9.2419E+04 8.8593E+04 3.1295E+01 8.8562E+04 2.3876E+01 1
640.- 660. 5223 0.1050E+00 0 4.6631E+06 7.5046E+04 7.1339E+04 3.4433E+01 7.1304E+04 2.6148E+01 1
660.- 680. 4491 0.9028E-01 0 2.7546E+06 5.3476E+04 5.0369E+04 0.0000E+00 5.0369E+04 0.0000E+00 0
680.- 700. 3459 0.6953E-01 0 1.3642E+06 3.1564E+04 2.9332E+04 0.0000E+00 2.9332E+04 0.0000E+00 0
700.- 720. 989 0.1988E-01 1 3.5152E+05 6.9188E+03 6.6481E+03 0.0000E+00 6.6481E+03 0.0000E+00 0
720.- 740. 768 0.1544E-01 80 1.8743E+05 3.9849E+03 3.8188E+03 0.0000E+00 3.8188E+03 0.0000E+00 0
740.- 760. 469 0.9428E-02 1012 9.5352E+04 2.1336E+03 2.0345E+03 0.0000E+00 2.0345E+03 0.0000E+00 0
760.- 780. 256 0.5146E-02 5743 4.3801E+04 1.0632E+03 1.0096E+03 0.0000E+00 1.0096E+03 0.0000E+00 0
780.- 800. 138 0.2774E-02 13474 1.9048E+04 4.9160E+02 4.6327E+02 0.0000E+00 4.6327E+02 0.0000E+00 0
800.- 820. 57 0.1146E-02 14084 6.3057E+03 1.8600E+02 1.7453E+02 0.0000E+00 1.7453E+02 0.0000E+00 0
820.- 840. 28 0.5628E-03 7449 2.2314E+03 6.8568E+01 6.3273E+01 0.0000E+00 6.3273E+01 0.0000E+00 0
840.- 860. 7 0.1407E-03 2852 4.9571E+02 1.9634E+01 1.8430E+01 0.0000E+00 1.8430E+01 0.0000E+00 0
860.- 880. 4 0.8041E-04 1372 1.3033E+02 4.5787E+00 4.0105E+00 0.0000E+00 4.0105E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 980 3.5409E+00 2.0882E-01 1.6842E-01 0.0000E+00 1.6842E-01 0.0000E+00 0
900.- 920. 0 0.0000E+00 877 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 724 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 563 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 351 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 131 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 46 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- SUT 0 0.0000E+00
4976 1.0000E+00 4976 5.4767E+07 1.7310E+05 1.6951E+05 1.9306E+04 1.5021E+05 1.4333E+04 351
49747 1.0000E+00 49747 5.4735E+08 1.7160E+06 1.6801E+06 1.8834E+05 1.4918E+06 1.3962E+05 3428
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3646E+05 5.8378E+02 1.2647E+02 4.5732E+02 1.0799E+06 8.9581E+02 3.5186E+02 5.4395E+02 2 6
20.- 40. 5.4077E+05 7.5055E+02 2.3858E+02 5.1198E+02 1.0952E+06 1.5038E+03 7.1213E+02 7.9170E+02 4 9
40.- 60. 5.4691E+05 8.6322E+02 3.2361E+02 5.3961E+02 1.0945E+06 1.0878E+03 3.7690E+02 7.1093E+02 6 4
60.- 80. 5.4908E+05 7.1803E+02 1.6743E+02 5.5059E+02 1.1041E+06 8.9401E+02 1.8397E+02 7.1004E+02 4 4
80.- 100. 5.5543E+05 6.5255E+02 1.4532E+02 5.0723E+02 1.1088E+06 1.1396E+03 3.5356E+02 7.8600E+02 3 5
100.- 120. 5.5597E+05 9.8150E+02 4.0682E+02 5.7468E+02 1.1154E+06 9.0671E+02 7.1418E+01 8.3529E+02 8 2
120.- 140. 5.5454E+05 9.4556E+02 2.9097E+02 6.5459E+02 1.1209E+06 1.5579E+03 5.6332E+02 9.9455E+02 5 6
140.- 160. 5.6622E+05 6.5441E+02 3.7104E+01 6.1731E+02 1.1258E+06 1.4056E+03 5.7538E+02 8.3026E+02 1 7
160.- 180. 5.6766E+05 9.3002E+02 3.6925E+02 5.6077E+02 1.1400E+06 1.2278E+03 2.1443E+02 1.0134E+03 5 4
180.- 200. 5.6691E+05 8.7820E+02 2.5181E+02 6.2639E+02 1.1364E+06 1.3051E+03 2.4119E+02 1.0639E+03 6 4
200.- 220. 5.6351E+05 9.9562E+02 3.9869E+02 5.9692E+02 1.1498E+06 1.5343E+03 4.2185E+02 1.1124E+03 6 6
220.- 240. 5.6774E+05 1.0392E+03 2.7678E+02 7.6239E+02 1.1493E+06 1.2451E+03 1.3284E+02 1.1122E+03 6 3
240.- 260. 5.7048E+05 8.9739E+02 1.7727E+02 7.2012E+02 1.1618E+06 1.4993E+03 3.9757E+02 1.1017E+03 4 5
260.- 280. 5.7884E+05 1.2085E+03 4.0984E+02 7.9866E+02 1.1442E+06 1.5397E+03 4.8522E+02 1.0545E+03 7 7
280.- 300. 5.6978E+05 1.0244E+03 1.7229E+02 8.5214E+02 1.1423E+06 1.7534E+03 4.1088E+02 1.3425E+03 4 4
300.- 320. 5.7021E+05 1.1157E+03 2.2413E+02 8.9156E+02 1.1461E+06 1.9502E+03 4.4432E+02 1.5059E+03 4 6
320.- 340. 5.6422E+05 1.1618E+03 2.8494E+02 8.7686E+02 1.1419E+06 2.2480E+03 6.8803E+02 1.5599E+03 7 10
340.- 360. 5.5970E+05 1.1287E+03 8.1116E+01 1.0476E+03 1.1244E+06 1.8640E+03 3.2183E+02 1.5422E+03 1 8
360.- 380. 5.6438E+05 1.4742E+03 4.4034E+02 1.0339E+03 1.1211E+06 1.9583E+03 3.6274E+02 1.5956E+03 10 6
380.- 400. 5.5877E+05 1.1848E+03 1.1816E+02 1.0666E+03 1.1113E+06 2.2827E+03 5.1289E+02 1.7698E+03 2 9
400.- 420. 5.3635E+04 2.3348E+02 1.1883E+02 1.1465E+02 1.0574E+05 1.2388E+02 0.0000E+00 1.2388E+02 2 0
0.- 20. 5.3737E+06 6.5875E+03 2.1222E+03 4.4654E+03 1.0765E+07 9.7281E+03 3.4255E+03 6.3026E+03 32 40
20.- 40. 5.4176E+06 6.8212E+03 2.0490E+03 4.7722E+03 1.0836E+07 9.6295E+03 3.0350E+03 6.5945E+03 31 41
40.- 60. 5.4549E+06 7.0754E+03 2.2808E+03 4.7946E+03 1.0913E+07 1.0302E+04 3.1060E+03 7.1961E+03 37 39
60.- 80. 5.4957E+06 7.6428E+03 2.2800E+03 5.3629E+03 1.1009E+07 1.1219E+04 3.8551E+03 7.3641E+03 39 42
80.- 100. 5.5299E+06 7.8016E+03 2.5679E+03 5.2338E+03 1.1085E+07 1.1830E+04 4.1925E+03 7.6379E+03 45 51
100.- 120. 5.5653E+06 7.4886E+03 2.1445E+03 5.3441E+03 1.1148E+07 1.0910E+04 3.3498E+03 7.5598E+03 37 41
120.- 140. 5.5877E+06 7.6355E+03 2.0099E+03 5.6257E+03 1.1197E+07 1.2600E+04 4.2463E+03 8.3542E+03 35 54
140.- 160. 5.6389E+06 7.4019E+03 1.5070E+03 5.8950E+03 1.1264E+07 1.2461E+04 3.8604E+03 8.6003E+03 28 54
160.- 180. 5.6617E+06 7.6236E+03 1.7442E+03 5.8793E+03 1.1314E+07 1.2844E+04 3.6123E+03 9.2319E+03 31 52
180.- 200. 5.6608E+06 8.6745E+03 2.3006E+03 6.3739E+03 1.1342E+07 1.4211E+04 4.6765E+03 9.5347E+03 41 65
200.- 220. 5.6785E+06 8.8480E+03 2.1538E+03 6.6943E+03 1.1380E+07 1.3435E+04 3.5285E+03 9.9063E+03 34 57
220.- 240. 5.7005E+06 8.8995E+03 1.8692E+03 7.0303E+03 1.1392E+07 1.5587E+04 4.7361E+03 1.0851E+04 36 64
240.- 260. 5.7106E+06 9.4516E+03 2.3509E+03 7.1008E+03 1.1452E+07 1.6207E+04 4.7810E+03 1.1427E+04 42 70
260.- 280. 5.7451E+06 1.0434E+04 2.5413E+03 7.8931E+03 1.1443E+07 1.6086E+04 4.0151E+03 1.2071E+04 49 61
280.- 300. 5.7075E+06 1.0236E+04 1.9276E+03 8.3083E+03 1.1442E+07 1.7328E+04 4.8992E+03 1.2429E+04 40 74
300.- 320. 5.6902E+06 1.0882E+04 2.4227E+03 8.4591E+03 1.1391E+07 1.8670E+04 4.7070E+03 1.3963E+04 49 82
320.- 340. 5.6647E+06 1.1826E+04 2.4792E+03 9.3468E+03 1.1379E+07 1.9290E+04 4.9554E+03 1.4335E+04 51 86
340.- 360. 5.6473E+06 1.2360E+04 2.2903E+03 1.0070E+04 1.1276E+07 2.0652E+04 5.1107E+03 1.5542E+04 47 90
360.- 380. 5.6067E+06 1.2826E+04 2.7735E+03 1.0053E+04 1.1201E+07 2.1065E+04 4.6027E+03 1.6462E+04 61 80
380.- 400. 5.5369E+06 1.3933E+04 2.2621E+03 1.1671E+04 1.1045E+07 2.2135E+04 4.6022E+03 1.7533E+04 49 83
400.- 420. 5.3125E+05 1.5161E+03 4.6814E+02 1.0479E+03 1.0644E+06 1.9682E+03 4.9062E+02 1.4776E+03 10 7
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1261E+07 1.9422E+04 5.0598E+03 1.4362E+04 2.2619E+07 2.9923E+04 7.8223E+03 2.2101E+04 97 115
1.1261E+08 1.8597E+05 4.4545E+04 1.4142E+05 2.2534E+08 2.9816E+05 8.3788E+04 2.1437E+05 824 1233
DAMAGE IN LAYER 1 : 4.9041E+04
DAMAGE IN LAYER 1 : 4.8092E+05
DAMAGE IN LAYER 2 : 1.1903E+05
DAMAGE IN LAYER 2 : 1.1850E+06
DAMAGE IN LAYER 3 : 1.4426E+03
DAMAGE IN LAYER 3 : 1.4235E+04
DAMAGE IN LAYER 4 : 0.0000E+00
1
@@ -306,18 +307,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.8000E-03 ENERGY REFL.COEF.= 1.7045E-03 REL.MEAN ENERGY = 3.5509E-01 MEAN ENERGY = 3.9060E+03
PART.REFL.COEF.= 5.0600E-03 ENERGY REFL.COEF.= 1.7263E-03 REL.MEAN ENERGY = 3.4117E-01 MEAN ENERGY = 3.7528E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.9060E+03 6.4366E+06 1.0542E-01 1.9203E+00 2.5370E+03 5.1787E+02 1.2604E+06 3.0119E-01
PATHLENGTH 4.7372E+02 4.3343E+04 2.7231E-01 2.0937E+00 2.0819E+02 4.2497E+01 9.2526E+03 2.8671E-01
ELASTIC LOSS 1.1830E+02 2.3277E+03 4.8246E+01 2.0102E+00
INEL. LOSS 6.7920E+03 6.4762E+06 2.5448E+03 1.0603E+02
ENERGY 3.7528E+03 9.6915E+06 6.1855E-01 2.1342E+00 3.1131E+03 1.9572E+02 6.4891E+05 1.0286E-01
PATHLENGTH 5.0326E+02 6.2043E+04 -2.4812E-01 1.9907E+00 2.4908E+02 1.5660E+01 3.8824E+03 8.9697E-02
ELASTIC LOSS 1.3155E+02 2.4632E+03 4.9631E+01 1.9617E-01
INEL. LOSS 7.0748E+03 9.8155E+06 3.1330E+03 1.2383E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.9060E+03 2.1694E+07 1.3674E+11 9.2845E+14 6.6496E+18 4.9634E+22
LOGENERGY 3.4180E+00 1.1913E+01 4.2164E+01 1.5105E+02 5.4634E+02 1.9912E+03
PATHLENGTH 4.7372E+02 2.6776E+05 1.7036E+08 1.1731E+11 8.5239E+13 6.4304E+16
ENERGY 3.7528E+03 2.3775E+07 1.8063E+11 1.4979E+15 1.3070E+19 1.1789E+23
LOGENERGY 3.3280E+00 1.1392E+01 3.9861E+01 1.4188E+02 5.1197E+02 1.8679E+03
PATHLENGTH 5.0326E+02 3.1531E+05 2.1729E+08 1.5837E+11 1.1991E+14 9.3369E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -325,5 +326,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 2 3 2 3 1 1 1 1 3 1 2 1 1 1 1
0.000 0.000 0.000 0.000 0.000 1.667 2.500 1.667 2.500 0.833 0.833 0.833 0.833 2.500 0.833 1.667 0.833 0.833 0.833 0.833
0 2 5 4 7 7 9 13 7 13 13 22 18 17 20 17 21 19 23 16
0.000 0.158 0.395 0.316 0.553 0.553 0.711 1.028 0.553 1.028 1.028 1.739 1.423 1.344 1.581 1.344 1.660 1.502 1.818 1.265
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.rge
+44 -44
View File
@@ -1,48 +1,48 @@
DEPTH PARTICLES
10.0000 0
30.0000 4
50.0000 2
70.0000 3
90.0000 3
110.0000 6
130.0000 10
150.0000 5
170.0000 10
190.0000 11
210.0000 9
230.0000 12
250.0000 14
270.0000 16
290.0000 23
310.0000 10
330.0000 26
350.0000 28
370.0000 29
390.0000 31
410.0000 66
430.0000 82
450.0000 91
470.0000 115
490.0000 147
510.0000 231
530.0000 261
550.0000 306
570.0000 359
590.0000 447
610.0000 514
630.0000 525
650.0000 522
670.0000 439
690.0000 353
710.0000 89
730.0000 75
750.0000 57
770.0000 27
790.0000 12
810.0000 4
830.0000 1
850.0000 0
870.0000 1
10.0000 4
30.0000 27
50.0000 36
70.0000 36
90.0000 33
110.0000 37
130.0000 49
150.0000 57
170.0000 61
190.0000 86
210.0000 87
230.0000 90
250.0000 126
270.0000 161
290.0000 159
310.0000 192
330.0000 246
350.0000 250
370.0000 303
390.0000 337
410.0000 666
430.0000 789
450.0000 1001
470.0000 1277
490.0000 1594
510.0000 2031
530.0000 2548
550.0000 3064
570.0000 3785
590.0000 4475
610.0000 5055
630.0000 5196
650.0000 5223
670.0000 4491
690.0000 3459
710.0000 989
730.0000 768
750.0000 469
770.0000 256
790.0000 138
810.0000 57
830.0000 28
850.0000 7
870.0000 4
890.0000 0
910.0000 0
930.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
11.00 0.45 0.00 15.00 5000 4976 24 0 5000 0 0.5848E+03 0.1038E+03 0.3906E+04 0.2537E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 252 4458 266 0
11.00 0.45 0.00 15.00 50000 49747 253 0 50000 0 0.5859E+03 0.1015E+03 0.3753E+04 0.3113E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 2377 44654 2716 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 13000 450 0 15 0.5 0.0 0.0 0.0
5000 78747 78747 78747 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78747 78747 78747 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.out
+127 -124
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:26
Start: 19.Jun. 2026 20:09:48
End: 18.Jun. 2026 09:50:29
End: 19.Jun. 2026 20:10:11
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 50000 projectiles 23 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 13000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78747.00 78747.00 78747.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78747.00 78747.00 78747.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
34339 0 0 0 0 0 0 0 0
341400 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,172 +162,174 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4983 ENERGY=0.6478E+08 EV
BACKSCATTERED PARTICLES= 17 ENERGY=0.5345E+05 EV
IMPLANTED PARTICLES= 49798 ENERGY=0.6474E+09 EV
BACKSCATTERED PARTICLES= 202 ENERGY=0.7830E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 130 130
IMPLANTED PARTICLES (LAYER 1)= 1254 1254
IMPLANTED PARTICLES (LAYER 2)= 2709 2709
IMPLANTED PARTICLES (LAYER 2)= 26714 26714
IMPLANTED PARTICLES (LAYER 3)= 2138 2138
IMPLANTED PARTICLES (LAYER 3)= 21793 21793
IMPLANTED PARTICLES (LAYER 4)= 2447 6
IMPLANTED PARTICLES (LAYER 4)= 24134 37
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 434.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.078
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.559
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 435.0 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.080
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.574
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 6.8552E+02 1.6817E+04 -7.6991E-01 4.9670E+00 1.2968E+02 1.8371E+00 4.7450E+02 6.2747E-02
SPREAD 2.5714E+02 1.7779E+04 7.9704E-01 3.9036E+00 1.3334E+02 1.8889E+00 4.2916E+02 4.1142E-02
PATHLENGTH 9.6653E+02 6.5423E+03 4.1867E-01 1.9431E+00 8.0884E+01 1.1458E+00 9.0006E+01 2.3877E-02
ELASTIC LOSS 3.4647E+01 4.3540E+02 2.0866E+01 4.1875E-03
INEL. LOSS 1.2956E+04 2.0563E+05 4.5346E+02 9.1001E-02
PENETRATION 6.8704E+02 1.6622E+04 -8.1072E-01 5.0696E+00 1.2893E+02 5.7774E-01 1.5026E+02 2.0309E-02
SPREAD 2.5658E+02 1.8028E+04 8.1034E-01 4.0104E+00 1.3427E+02 6.0168E-01 1.4017E+02 1.4409E-02
PATHLENGTH 9.6745E+02 6.5460E+03 4.2441E-01 1.9474E+00 8.0908E+01 3.6256E-01 2.8553E+01 7.5475E-03
ELASTIC LOSS 3.4709E+01 4.1950E+02 2.0482E+01 4.1129E-04
INEL. LOSS 1.2966E+04 2.0395E+05 4.5161E+02 9.0688E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 7.9135E-02 1.0615E+00 6.7718E+01 7.5440E+03 1.0303E+00 6.9868E-04 6.2518E-02 3.6282E+00
WEAK EL.LOSS 1.2617E-03 2.0298E-05 6.0758E+00 4.5976E+01 4.5053E-03 3.0553E-06 9.2314E-08 1.2120E-02
INELAST.LOSS 2.9769E+01 1.4401E+02 -1.1752E+00 3.0216E+00 1.2001E+01 8.1381E-03 1.3886E-01 1.5136E-03
SUBTHR.LOSS 6.9072E-02 3.3642E-01 2.4741E+01 8.2587E+02 5.8002E-01 3.9337E-04 6.5530E-03 2.0142E-01
ELAST.LOSS 7.9564E-02 1.0956E+00 7.3666E+01 9.5769E+03 1.0467E+00 2.2444E-04 2.2989E-02 2.0222E+00
WEAK EL.LOSS 1.2555E-03 2.0138E-05 6.1033E+00 4.6393E+01 4.4875E-03 9.6222E-07 2.9092E-08 3.8548E-03
INELAST.LOSS 2.9769E+01 1.4431E+02 -1.1739E+00 3.0174E+00 1.2013E+01 2.5758E-03 4.3950E-02 4.7848E-04
SUBTHR.LOSS 6.9328E-02 3.3367E-01 2.4550E+01 8.1859E+02 5.7764E-01 1.2387E-04 2.0460E-03 6.4402E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 6.8552E+02 4.8675E+05 3.5505E+08 2.6505E+11 2.0201E+14 1.5690E+17
PENETRATION 6.8704E+02 4.8865E+05 3.5682E+08 2.6651E+11 2.0311E+14 1.5764E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2007E-03 0 1.5659E+06 1.7546E+03 1.7527E+03 7.1003E+02 1.0427E+03 5.3135E+02 13
20.- 40. 1 0.2007E-03 0 1.5806E+06 1.1786E+03 1.1768E+03 2.2034E+02 9.5648E+02 1.6566E+02 4
40.- 60. 2 0.4014E-03 0 1.5874E+06 1.3401E+03 1.3377E+03 2.6598E+02 1.0717E+03 1.9690E+02 4
60.- 80. 1 0.2007E-03 0 1.6028E+06 1.3026E+03 1.3003E+03 2.3029E+02 1.0700E+03 1.7452E+02 4
80.- 100. 5 0.1003E-02 0 1.6226E+06 1.3438E+03 1.3406E+03 2.0435E+02 1.1362E+03 1.5354E+02 4
100.- 120. 2 0.4014E-03 0 1.6320E+06 1.4526E+03 1.4498E+03 4.4056E+02 1.0093E+03 3.3477E+02 10
120.- 140. 2 0.4014E-03 0 1.6435E+06 1.6511E+03 1.6487E+03 3.9612E+02 1.2526E+03 2.8786E+02 6
140.- 160. 5 0.1003E-02 0 1.6503E+06 1.6831E+03 1.6793E+03 4.6945E+02 1.2099E+03 3.3775E+02 6
160.- 180. 0 0.0000E+00 0 1.6648E+06 1.7751E+03 1.7728E+03 5.4523E+02 1.2276E+03 4.0547E+02 9
180.- 200. 5 0.1003E-02 0 1.6703E+06 1.5611E+03 1.5570E+03 3.9489E+02 1.1621E+03 2.9518E+02 7
200.- 220. 8 0.1605E-02 0 1.6991E+06 1.8466E+03 1.8414E+03 5.1089E+02 1.3305E+03 3.7410E+02 9
220.- 240. 7 0.1405E-02 0 1.7003E+06 1.7710E+03 1.7656E+03 5.5373E+02 1.2118E+03 4.0261E+02 7
240.- 260. 5 0.1003E-02 0 1.7112E+06 2.0273E+03 2.0228E+03 6.5459E+02 1.3682E+03 4.7689E+02 9
260.- 280. 9 0.1806E-02 0 1.7387E+06 2.2646E+03 2.2578E+03 6.8949E+02 1.5683E+03 5.1212E+02 13
280.- 300. 9 0.1806E-02 0 1.7488E+06 2.2685E+03 2.2614E+03 5.1683E+02 1.7445E+03 3.8058E+02 8
300.- 320. 14 0.2810E-02 0 1.7396E+06 2.7481E+03 2.7390E+03 1.0424E+03 1.6966E+03 7.5204E+02 13
320.- 340. 9 0.1806E-02 0 1.7376E+06 2.3622E+03 2.3546E+03 5.9104E+02 1.7635E+03 4.3714E+02 8
340.- 360. 18 0.3612E-02 0 1.7301E+06 2.5702E+03 2.5591E+03 7.7511E+02 1.7840E+03 5.6008E+02 10
360.- 380. 12 0.2408E-02 0 1.7300E+06 2.9656E+03 2.9561E+03 8.8080E+02 2.0753E+03 6.3309E+02 11
380.- 400. 15 0.3010E-02 0 1.7278E+06 3.0409E+03 3.0310E+03 9.8870E+02 2.0423E+03 7.2321E+02 15
400.- 420. 25 0.5017E-02 0 2.3207E+06 3.8517E+03 3.8272E+03 9.3736E+02 2.8898E+03 7.0148E+02 17
420.- 440. 35 0.7024E-02 0 2.3875E+06 4.7567E+03 4.7252E+03 1.1813E+03 3.5439E+03 8.8269E+02 22
440.- 460. 48 0.9633E-02 0 2.3692E+06 4.3068E+03 4.2668E+03 7.1377E+02 3.5531E+03 5.2991E+02 13
460.- 480. 36 0.7225E-02 0 2.3600E+06 5.1492E+03 5.1065E+03 7.7047E+02 4.3360E+03 5.7265E+02 14
480.- 500. 75 0.1505E-01 0 2.3138E+06 6.2643E+03 6.2053E+03 1.3686E+03 4.8367E+03 1.0213E+03 23
500.- 520. 84 0.1686E-01 0 2.2529E+06 6.0339E+03 5.9651E+03 7.9150E+02 5.1736E+03 5.9421E+02 16
520.- 540. 114 0.2288E-01 0 2.1994E+06 7.5961E+03 7.5011E+03 1.5341E+03 5.9671E+03 1.1422E+03 30
540.- 560. 139 0.2789E-01 0 2.1163E+06 6.9340E+03 6.8235E+03 6.6092E+02 6.1626E+03 4.9850E+02 14
560.- 580. 148 0.2970E-01 0 2.0404E+06 8.6536E+03 8.5219E+03 9.2772E+02 7.5941E+03 7.0114E+02 22
580.- 600. 194 0.3893E-01 0 1.9215E+06 8.8867E+03 8.7318E+03 5.1110E+02 8.2207E+03 3.8426E+02 12
600.- 620. 233 0.4676E-01 0 1.7391E+06 8.9135E+03 8.7295E+03 5.2870E+02 8.2008E+03 4.0119E+02 14
620.- 640. 286 0.5740E-01 0 1.6090E+06 1.0128E+04 9.9011E+03 3.7761E+02 9.5235E+03 2.8675E+02 11
640.- 660. 361 0.7245E-01 0 1.4231E+06 1.0403E+04 1.0133E+04 3.1585E+02 9.8175E+03 2.3787E+02 8
660.- 680. 399 0.8007E-01 0 1.2274E+06 1.0614E+04 1.0305E+04 6.4236E+01 1.0241E+04 4.8946E+01 2
680.- 700. 532 0.1068E+00 0 1.0035E+06 1.0523E+04 1.0151E+04 1.4449E+02 1.0006E+04 1.0945E+02 4
700.- 720. 233 0.4676E-01 0 4.3925E+05 3.9598E+03 3.8901E+03 0.0000E+00 3.8901E+03 0.0000E+00 0
720.- 740. 244 0.4897E-01 0 3.6666E+05 3.6800E+03 3.6181E+03 0.0000E+00 3.6181E+03 0.0000E+00 0
740.- 760. 257 0.5158E-01 0 3.0002E+05 3.1972E+03 3.1338E+03 0.0000E+00 3.1338E+03 0.0000E+00 0
760.- 780. 264 0.5298E-01 0 2.3977E+05 2.7733E+03 2.7124E+03 0.0000E+00 2.7124E+03 0.0000E+00 0
780.- 800. 223 0.4475E-01 0 1.8849E+05 2.3883E+03 2.3337E+03 0.0000E+00 2.3337E+03 0.0000E+00 0
800.- 820. 200 0.4014E-01 1 1.4067E+05 1.8797E+03 1.8326E+03 0.0000E+00 1.8326E+03 0.0000E+00 0
820.- 840. 192 0.3853E-01 22 1.0335E+05 1.6523E+03 1.6080E+03 0.0000E+00 1.6080E+03 0.0000E+00 0
840.- 860. 146 0.2930E-01 136 7.4658E+04 1.2200E+03 1.1852E+03 0.0000E+00 1.1852E+03 0.0000E+00 0
860.- 880. 124 0.2488E-01 501 4.7850E+04 8.1854E+02 7.9130E+02 0.0000E+00 7.9130E+02 0.0000E+00 0
880.- 900. 92 0.1846E-01 742 3.0738E+04 5.9446E+02 5.7302E+02 0.0000E+00 5.7302E+02 0.0000E+00 0
900.- 920. 82 0.1646E-01 633 1.7984E+04 4.2635E+02 4.0970E+02 0.0000E+00 4.0970E+02 0.0000E+00 0
920.- 940. 40 0.8027E-02 406 7.6578E+03 1.4293E+02 1.3513E+02 0.0000E+00 1.3513E+02 0.0000E+00 0
940.- 960. 18 0.3612E-02 237 4.2842E+03 8.9036E+01 8.4335E+01 0.0000E+00 8.4335E+01 0.0000E+00 0
960.- 980. 14 0.2810E-02 216 1.8885E+03 4.6925E+01 4.4105E+01 0.0000E+00 4.4105E+01 0.0000E+00 0
980.- 1000. 9 0.1806E-02 260 6.9570E+02 1.9196E+01 1.7648E+01 0.0000E+00 1.7648E+01 0.0000E+00 0
1000.- 1020. 5 0.1003E-02 293 3.5044E+02 9.8432E+00 9.1178E+00 0.0000E+00 9.1178E+00 0.0000E+00 0
1020.- 1040. 1 0.2007E-03 333 7.4774E+00 3.7169E-01 2.8773E-01 0.0000E+00 2.8773E-01 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 366 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 305 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 238 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 155 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 94 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 30 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 11 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 5 0.1004E-03 0 1.5706E+07 1.5500E+04 1.5484E+04 5.2707E+03 1.0213E+04 3.8024E+03 69
20.- 40. 14 0.2811E-03 0 1.5836E+07 1.4737E+04 1.4717E+04 4.4963E+03 1.0221E+04 3.2475E+03 57
40.- 60. 22 0.4418E-03 0 1.5941E+07 1.5586E+04 1.5562E+04 5.2096E+03 1.0352E+04 3.8183E+03 75
60.- 80. 21 0.4217E-03 0 1.6083E+07 1.5988E+04 1.5962E+04 5.1187E+03 1.0843E+04 3.7351E+03 70
80.- 100. 34 0.6828E-03 0 1.6209E+07 1.5721E+04 1.5692E+04 4.7307E+03 1.0961E+04 3.4589E+03 63
100.- 120. 27 0.5422E-03 0 1.6322E+07 1.5762E+04 1.5732E+04 4.6710E+03 1.1061E+04 3.4145E+03 69
120.- 140. 43 0.8635E-03 0 1.6448E+07 1.6442E+04 1.6410E+04 4.4685E+03 1.1941E+04 3.2671E+03 67
140.- 160. 27 0.5422E-03 0 1.6538E+07 1.7311E+04 1.7279E+04 5.2579E+03 1.2021E+04 3.8752E+03 83
160.- 180. 31 0.6225E-03 0 1.6637E+07 1.8123E+04 1.8089E+04 5.8937E+03 1.2195E+04 4.2837E+03 81
180.- 200. 43 0.8635E-03 0 1.6710E+07 1.7077E+04 1.7041E+04 4.8843E+03 1.2157E+04 3.6044E+03 79
200.- 220. 50 0.1004E-02 0 1.6827E+07 1.9401E+04 1.9357E+04 6.1796E+03 1.3178E+04 4.5101E+03 95
220.- 240. 60 0.1205E-02 0 1.6957E+07 1.8573E+04 1.8526E+04 5.3040E+03 1.3222E+04 3.9308E+03 88
240.- 260. 61 0.1225E-02 0 1.7033E+07 2.0407E+04 2.0357E+04 6.3091E+03 1.4048E+04 4.6358E+03 99
260.- 280. 76 0.1526E-02 0 1.7119E+07 2.0645E+04 2.0586E+04 6.1761E+03 1.4410E+04 4.5374E+03 98
280.- 300. 89 0.1787E-02 0 1.7235E+07 2.1760E+04 2.1696E+04 5.8143E+03 1.5882E+04 4.3179E+03 96
300.- 320. 96 0.1928E-02 0 1.7227E+07 2.4135E+04 2.4063E+04 7.2672E+03 1.6796E+04 5.3106E+03 111
320.- 340. 119 0.2390E-02 0 1.7289E+07 2.4300E+04 2.4216E+04 6.8460E+03 1.7370E+04 5.0502E+03 112
340.- 360. 136 0.2731E-02 0 1.7315E+07 2.5386E+04 2.5293E+04 6.9994E+03 1.8294E+04 5.1413E+03 108
360.- 380. 140 0.2811E-02 0 1.7371E+07 2.7232E+04 2.7131E+04 7.0100E+03 2.0121E+04 5.1672E+03 114
380.- 400. 160 0.3213E-02 0 1.7328E+07 2.7921E+04 2.7811E+04 7.4676E+03 2.0343E+04 5.5401E+03 123
400.- 420. 281 0.5643E-02 0 2.3476E+07 4.1858E+04 4.1593E+04 1.0022E+04 3.1571E+04 7.4171E+03 172
420.- 440. 366 0.7350E-02 0 2.3979E+07 4.7053E+04 4.6719E+04 1.1278E+04 3.5441E+04 8.3637E+03 195
440.- 460. 411 0.8253E-02 0 2.3794E+07 4.7312E+04 4.6933E+04 8.8396E+03 3.8094E+04 6.5538E+03 156
460.- 480. 488 0.9800E-02 0 2.3500E+07 5.3219E+04 5.2766E+04 9.9532E+03 4.2813E+04 7.4441E+03 190
480.- 500. 694 0.1394E-01 0 2.3139E+07 5.8095E+04 5.7506E+04 9.9740E+03 4.7532E+04 7.4699E+03 193
500.- 520. 797 0.1600E-01 0 2.2608E+07 6.3321E+04 6.2628E+04 9.2955E+03 5.3333E+04 6.9688E+03 187
520.- 540. 1031 0.2070E-01 0 2.1937E+07 6.9829E+04 6.8967E+04 1.0732E+04 5.8234E+04 8.0491E+03 218
540.- 560. 1249 0.2508E-01 0 2.1185E+07 7.3976E+04 7.2931E+04 8.6349E+03 6.4296E+04 6.5168E+03 197
560.- 580. 1511 0.3034E-01 0 2.0197E+07 8.1382E+04 8.0134E+04 8.4696E+03 7.1664E+04 6.4042E+03 199
580.- 600. 1869 0.3753E-01 0 1.9021E+07 8.6387E+04 8.4868E+04 6.6190E+03 7.8249E+04 4.9920E+03 158
600.- 620. 2340 0.4699E-01 0 1.7590E+07 9.3174E+04 9.1327E+04 5.3775E+03 8.5950E+04 4.0637E+03 134
620.- 640. 2907 0.5838E-01 0 1.6113E+07 9.9841E+04 9.7561E+04 3.6054E+03 9.3955E+04 2.7282E+03 93
640.- 660. 3521 0.7071E-01 0 1.4348E+07 1.0436E+05 1.0165E+05 2.2007E+03 9.9447E+04 1.6647E+03 59
660.- 680. 4139 0.8312E-01 0 1.2351E+07 1.0766E+05 1.0450E+05 1.5574E+03 1.0294E+05 1.1833E+03 45
680.- 700. 5110 0.1026E+00 0 1.0193E+07 1.0604E+05 1.0239E+05 7.3713E+02 1.0165E+05 5.5904E+02 21
700.- 720. 2319 0.4657E-01 0 4.4793E+06 4.0843E+04 4.0149E+04 2.4259E+02 3.9907E+04 1.8153E+02 7
720.- 740. 2586 0.5193E-01 0 3.6267E+06 3.5772E+04 3.5144E+04 0.0000E+00 3.5144E+04 0.0000E+00 0
740.- 760. 2577 0.5175E-01 0 3.0624E+06 3.2586E+04 3.1958E+04 0.0000E+00 3.1958E+04 0.0000E+00 0
760.- 780. 2568 0.5157E-01 0 2.4764E+06 2.8839E+04 2.8225E+04 0.0000E+00 2.8225E+04 0.0000E+00 0
780.- 800. 2326 0.4671E-01 0 1.9423E+06 2.4727E+04 2.4167E+04 0.0000E+00 2.4167E+04 0.0000E+00 0
800.- 820. 2218 0.4454E-01 6 1.4654E+06 2.0382E+04 1.9867E+04 0.0000E+00 1.9867E+04 0.0000E+00 0
820.- 840. 1891 0.3797E-01 182 1.0592E+06 1.6089E+04 1.5643E+04 0.0000E+00 1.5643E+04 0.0000E+00 0
840.- 860. 1591 0.3195E-01 1313 7.2220E+05 1.2114E+04 1.1749E+04 0.0000E+00 1.1749E+04 0.0000E+00 0
860.- 880. 1302 0.2615E-01 4722 4.6309E+05 8.4394E+03 8.1537E+03 0.0000E+00 8.1537E+03 0.0000E+00 0
880.- 900. 921 0.1849E-01 7505 2.8448E+05 5.4482E+03 5.2411E+03 0.0000E+00 5.2411E+03 0.0000E+00 0
900.- 920. 660 0.1325E-01 6396 1.6387E+05 3.4886E+03 3.3500E+03 0.0000E+00 3.3500E+03 0.0000E+00 0
920.- 940. 411 0.8253E-02 3973 8.7133E+04 1.8820E+03 1.7955E+03 0.0000E+00 1.7955E+03 0.0000E+00 0
940.- 960. 244 0.4900E-02 2550 4.1293E+04 9.7246E+02 9.2140E+02 0.0000E+00 9.2140E+02 0.0000E+00 0
960.- 980. 123 0.2470E-02 2201 1.8571E+04 4.7762E+02 4.5214E+02 0.0000E+00 4.5214E+02 0.0000E+00 0
980.- 1000. 56 0.1125E-02 2520 6.8384E+03 1.7587E+02 1.6493E+02 0.0000E+00 1.6493E+02 0.0000E+00 0
1000.- 1020. 22 0.4418E-03 2977 2.3530E+03 5.1885E+01 4.8768E+01 0.0000E+00 4.8768E+01 0.0000E+00 0
1020.- 1040. 13 0.2611E-03 3296 7.1611E+02 1.5428E+01 1.3793E+01 0.0000E+00 1.3793E+01 0.0000E+00 0
1040.- 1060. 1 0.2008E-04 3535 1.3895E+02 3.4082E+00 3.2130E+00 0.0000E+00 3.2130E+00 0.0000E+00 0
1060.- 1080. 1 0.2008E-04 3170 7.2268E+01 2.3874E+00 2.2601E+00 0.0000E+00 2.2601E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 2490 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 1559 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 858 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 370 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 132 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 32 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 10 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- SUT 0 0.0000E+00
1240.- 1260. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- SUT 0 0.0000E+00
4983 1.0000E+00 4983 6.4731E+07 1.7482E+05 1.7208E+05 2.1909E+04 1.5017E+05 1.6247E+04 392
49798 1.0000E+00 49798 6.4747E+08 1.7578E+06 1.7305E+06 2.2291E+05 1.5076E+06 1.6521E+05 3981
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1939E+05 7.2117E+02 3.0066E+02 4.2052E+02 1.0465E+06 1.0316E+03 4.0938E+02 6.2219E+02 5 8
20.- 40. 5.2757E+05 5.4186E+02 1.4065E+02 4.0121E+02 1.0530E+06 6.3496E+02 7.9690E+01 5.5527E+02 2 2
40.- 60. 5.2944E+05 5.7958E+02 1.3308E+02 4.4649E+02 1.0580E+06 7.5812E+02 1.3290E+02 6.2522E+02 1 3
60.- 80. 5.3520E+05 6.7365E+02 1.9483E+02 4.7882E+02 1.0676E+06 6.2663E+02 3.5461E+01 5.9117E+02 3 1
80.- 100. 5.4444E+05 5.5368E+02 9.1947E+01 4.6174E+02 1.0782E+06 7.8690E+02 1.1241E+02 6.7449E+02 2 2
100.- 120. 5.4572E+05 6.7521E+02 2.0649E+02 4.6872E+02 1.0862E+06 7.7461E+02 2.3407E+02 5.4054E+02 5 5
120.- 140. 5.4606E+05 5.6100E+02 3.8390E+01 5.2261E+02 1.0975E+06 1.0877E+03 3.5773E+02 7.2996E+02 1 5
140.- 160. 5.5131E+05 6.0888E+02 7.6504E+01 5.3237E+02 1.0990E+06 1.0704E+03 3.9294E+02 6.7748E+02 1 5
160.- 180. 5.5575E+05 7.4235E+02 2.4374E+02 4.9861E+02 1.1091E+06 1.0305E+03 3.0149E+02 7.2897E+02 4 5
180.- 200. 5.5640E+05 6.5131E+02 2.0706E+02 4.4425E+02 1.1139E+06 9.0565E+02 1.8783E+02 7.1782E+02 4 3
200.- 220. 5.6861E+05 7.0931E+02 1.0102E+02 6.0829E+02 1.1305E+06 1.1321E+03 4.0986E+02 7.2219E+02 2 7
220.- 240. 5.6955E+05 7.2378E+02 2.6067E+02 4.6311E+02 1.1308E+06 1.0418E+03 2.9306E+02 7.4872E+02 4 3
240.- 260. 5.6821E+05 7.4974E+02 1.7912E+02 5.7062E+02 1.1430E+06 1.2731E+03 4.7547E+02 7.9762E+02 3 6
260.- 280. 5.8036E+05 8.2903E+02 1.8986E+02 6.3917E+02 1.1584E+06 1.4288E+03 4.9963E+02 9.2916E+02 4 9
280.- 300. 5.8371E+05 8.5146E+02 1.6377E+02 6.8769E+02 1.1651E+06 1.4099E+03 3.5307E+02 1.0568E+03 3 5
300.- 320. 5.8175E+05 1.0524E+03 3.3551E+02 7.1694E+02 1.1579E+06 1.6866E+03 7.0688E+02 9.7971E+02 5 8
320.- 340. 5.7431E+05 1.0508E+03 3.8866E+02 6.6215E+02 1.1633E+06 1.3038E+03 2.0238E+02 1.1014E+03 6 2
340.- 360. 5.7722E+05 9.6130E+02 2.7178E+02 6.8952E+02 1.1529E+06 1.5978E+03 5.0333E+02 1.0945E+03 4 6
360.- 380. 5.7251E+05 1.1758E+03 2.4346E+02 9.3233E+02 1.1575E+06 1.7803E+03 6.3735E+02 1.1429E+03 4 7
380.- 400. 5.7237E+05 1.0138E+03 2.2309E+02 7.9074E+02 1.1526E+06 2.0058E+03 7.6560E+02 1.2402E+03 3 12
400.- 420. 5.6177E+04 4.6521E+01 0.0000E+00 4.6521E+01 1.1756E+05 1.5708E+02 3.3905E+01 1.2317E+02 0 1
0.- 20. 5.2337E+06 6.5311E+03 2.3021E+03 4.2290E+03 1.0473E+07 8.9529E+03 2.9685E+03 5.9843E+03 36 33
20.- 40. 5.2841E+06 5.6077E+03 1.3904E+03 4.2173E+03 1.0552E+07 9.1091E+03 3.1059E+03 6.0032E+03 19 38
40.- 60. 5.3087E+06 6.2164E+03 2.0326E+03 4.1838E+03 1.0633E+07 9.3455E+03 3.1770E+03 6.1686E+03 28 47
60.- 80. 5.3510E+06 6.6863E+03 2.2752E+03 4.4110E+03 1.0732E+07 9.2754E+03 2.8435E+03 6.4319E+03 29 41
80.- 100. 5.3873E+06 6.3953E+03 2.0884E+03 4.3068E+03 1.0822E+07 9.2965E+03 2.6423E+03 6.6542E+03 28 35
100.- 120. 5.4454E+06 6.4419E+03 1.8092E+03 4.6327E+03 1.0877E+07 9.2906E+03 2.8618E+03 6.4287E+03 29 40
120.- 140. 5.4834E+06 6.1125E+03 1.2851E+03 4.8274E+03 1.0965E+07 1.0297E+04 3.1835E+03 7.1136E+03 20 47
140.- 160. 5.5236E+06 6.9665E+03 2.1982E+03 4.7683E+03 1.1014E+07 1.0312E+04 3.0597E+03 7.2525E+03 35 48
160.- 180. 5.5653E+06 6.8485E+03 1.8323E+03 5.0162E+03 1.1072E+07 1.1240E+04 4.0614E+03 7.1790E+03 26 55
180.- 200. 5.5594E+06 7.1596E+03 2.1436E+03 5.0160E+03 1.1151E+07 9.8813E+03 2.7407E+03 7.1406E+03 35 44
200.- 220. 5.5964E+06 7.4185E+03 2.0751E+03 5.3434E+03 1.1231E+07 1.1939E+04 4.1045E+03 7.8345E+03 37 58
220.- 240. 5.6424E+06 7.7735E+03 2.3112E+03 5.4623E+03 1.1315E+07 1.0752E+04 2.9928E+03 7.7592E+03 41 47
240.- 260. 5.6823E+06 7.9774E+03 2.4306E+03 5.5468E+03 1.1351E+07 1.2380E+04 3.8785E+03 8.5014E+03 45 54
260.- 280. 5.6989E+06 8.1022E+03 2.1604E+03 5.9418E+03 1.1420E+07 1.2484E+04 4.0157E+03 8.4681E+03 41 57
280.- 300. 5.7384E+06 9.2126E+03 2.9108E+03 6.3019E+03 1.1497E+07 1.2484E+04 2.9036E+03 9.5801E+03 51 45
300.- 320. 5.7372E+06 9.0025E+03 1.9968E+03 7.0057E+03 1.1490E+07 1.5060E+04 5.2703E+03 9.7901E+03 36 75
320.- 340. 5.7411E+06 9.6298E+03 2.5986E+03 7.0312E+03 1.1548E+07 1.4586E+04 4.2474E+03 1.0339E+04 50 62
340.- 360. 5.7597E+06 9.9242E+03 2.7347E+03 7.1895E+03 1.1556E+07 1.5369E+04 4.2647E+03 1.1104E+04 49 59
360.- 380. 5.7554E+06 1.0971E+04 2.5586E+03 8.4128E+03 1.1616E+07 1.6160E+04 4.4513E+03 1.1709E+04 45 69
380.- 400. 5.7589E+06 1.1178E+04 3.2232E+03 7.9549E+03 1.1544E+07 1.6523E+04 4.2444E+03 1.2278E+04 58 65
400.- 420. 5.7916E+05 1.0281E+03 2.7854E+02 7.4954E+02 1.1692E+06 1.5865E+03 4.8075E+02 1.1058E+03 5 8
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1216E+07 1.5473E+04 3.9903E+03 1.1482E+04 2.2438E+07 2.3524E+04 7.1244E+03 1.6399E+04 66 105
1.1183E+08 1.5718E+05 4.4636E+04 1.1255E+05 2.2402E+08 2.3632E+05 7.1499E+04 1.6483E+05 743 1027
DAMAGE IN LAYER 1 : 3.8804E+04
DAMAGE IN LAYER 1 : 3.9100E+05
DAMAGE IN LAYER 2 : 1.1089E+05
DAMAGE IN LAYER 2 : 1.1125E+06
DAMAGE IN LAYER 3 : 2.2369E+04
DAMAGE IN LAYER 3 : 2.2698E+05
DAMAGE IN LAYER 4 : 9.4056E+00
DAMAGE IN LAYER 4 : 6.8033E+01
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.4000E-03 ENERGY REFL.COEF.= 8.2235E-04 REL.MEAN ENERGY = 2.4187E-01 MEAN ENERGY = 3.1443E+03
PART.REFL.COEF.= 4.0400E-03 ENERGY REFL.COEF.= 1.2047E-03 REL.MEAN ENERGY = 2.9819E-01 MEAN ENERGY = 3.8764E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.1443E+03 1.5720E+07 1.4933E+00 3.5992E+00 3.9649E+03 9.6163E+02 6.1469E+06 6.8014E-01
PATHLENGTH 7.1335E+02 8.4528E+04 -1.2383E+00 3.1766E+00 2.9074E+02 7.0514E+01 3.0246E+04 5.4770E-01
ELASTIC LOSS 1.2796E+02 2.2618E+03 4.7558E+01 2.7975E+00
INEL. LOSS 9.9634E+03 1.4748E+07 3.8403E+03 2.2590E+02
ENERGY 3.8764E+03 1.3320E+07 9.0678E-01 2.6260E+00 3.6496E+03 2.5679E+02 1.1950E+06 1.2563E-01
PATHLENGTH 6.2813E+02 8.0124E+04 -6.0896E-01 2.2711E+00 2.8306E+02 1.9916E+01 6.3559E+03 1.0993E-01
ELASTIC LOSS 1.4543E+02 3.1403E+03 5.6038E+01 2.7742E-01
INEL. LOSS 8.9269E+03 1.3721E+07 3.7041E+03 1.8337E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.1443E+03 2.5607E+07 2.7245E+11 3.0904E+15 3.5765E+19 4.1781E+23
LOGENERGY 3.1504E+00 1.0276E+01 3.4530E+01 1.1910E+02 4.2030E+02 1.5135E+03
PATHLENGTH 7.1335E+02 5.9340E+05 5.1346E+08 4.5289E+11 4.0519E+14 3.6695E+17
ENERGY 3.8764E+03 2.8346E+07 2.5723E+11 2.5761E+15 2.7270E+19 2.9885E+23
LOGENERGY 3.3169E+00 1.1316E+01 3.9524E+01 1.4076E+02 5.0951E+02 1.8693E+03
PATHLENGTH 6.2813E+02 4.7467E+05 3.8500E+08 3.2522E+11 2.8224E+14 2.4977E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -334,5 +337,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 0 1 4 1 0 1 1 3 1 1 2 0 0 1
0.000 0.000 0.000 0.000 0.000 1.176 0.000 1.176 4.706 1.176 0.000 1.176 1.176 3.529 1.176 1.176 2.353 0.000 0.000 1.176
0 2 2 3 4 7 8 7 19 11 9 9 20 13 12 14 17 10 15 20
0.000 0.198 0.198 0.297 0.396 0.693 0.792 0.693 1.881 1.089 0.891 0.891 1.980 1.287 1.188 1.386 1.683 0.990 1.485 1.980
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.rge
+56 -54
View File
@@ -1,58 +1,58 @@
DEPTH PARTICLES
10.0000 1
30.0000 1
50.0000 2
70.0000 1
90.0000 5
110.0000 2
130.0000 2
150.0000 5
170.0000 0
190.0000 5
210.0000 8
230.0000 7
250.0000 5
270.0000 9
290.0000 9
310.0000 14
330.0000 9
350.0000 18
370.0000 12
390.0000 15
410.0000 25
430.0000 35
450.0000 48
470.0000 36
490.0000 75
510.0000 84
530.0000 114
550.0000 139
570.0000 148
590.0000 194
610.0000 233
630.0000 286
650.0000 361
670.0000 399
690.0000 532
710.0000 233
730.0000 244
750.0000 257
770.0000 264
790.0000 223
810.0000 200
830.0000 192
850.0000 146
870.0000 124
890.0000 92
910.0000 82
930.0000 40
950.0000 18
970.0000 14
990.0000 9
1010.0000 5
1030.0000 1
1050.0000 0
1070.0000 0
10.0000 5
30.0000 14
50.0000 22
70.0000 21
90.0000 34
110.0000 27
130.0000 43
150.0000 27
170.0000 31
190.0000 43
210.0000 50
230.0000 60
250.0000 61
270.0000 76
290.0000 89
310.0000 96
330.0000 119
350.0000 136
370.0000 140
390.0000 160
410.0000 281
430.0000 366
450.0000 411
470.0000 488
490.0000 694
510.0000 797
530.0000 1031
550.0000 1249
570.0000 1511
590.0000 1869
610.0000 2340
630.0000 2907
650.0000 3521
670.0000 4139
690.0000 5110
710.0000 2319
730.0000 2586
750.0000 2577
770.0000 2568
790.0000 2326
810.0000 2218
830.0000 1891
850.0000 1591
870.0000 1302
890.0000 921
910.0000 660
930.0000 411
950.0000 244
970.0000 123
990.0000 56
1010.0000 22
1030.0000 13
1050.0000 1
1070.0000 1
1090.0000 0
1110.0000 0
1130.0000 0
@@ -62,3 +62,5 @@
1210.0000 0
1230.0000 0
1250.0000 0
1270.0000 0
1290.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
13.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.6855E+03 0.1297E+03 0.3144E+04 0.3965E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 2709 2138 6
13.00 0.45 0.00 15.00 50000 49798 202 0 50000 0 0.6870E+03 0.1289E+03 0.3876E+04 0.3650E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1254 26714 21793 37
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 15000 450 0 15 0.5 0.0 0.0 0.0
5000 78748 78748 78748 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78748 78748 78748 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.out
+135 -133
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:27
Start: 19.Jun. 2026 20:09:50
End: 18.Jun. 2026 09:50:29
End: 19.Jun. 2026 20:10:18
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 50000 projectiles 28 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 15000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78748.00 78748.00 78748.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78748.00 78748.00 78748.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
40065 0 0 0 0 0 0 0 0
398482 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,181 +162,182 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4985 ENERGY=0.7478E+08 EV
BACKSCATTERED PARTICLES= 15 ENERGY=0.9708E+05 EV
IMPLANTED PARTICLES= 49839 ENERGY=0.7476E+09 EV
BACKSCATTERED PARTICLES= 161 ENERGY=0.7805E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 63 63
IMPLANTED PARTICLES (LAYER 1)= 715 715
IMPLANTED PARTICLES (LAYER 2)= 1210 1210
IMPLANTED PARTICLES (LAYER 2)= 11765 11765
IMPLANTED PARTICLES (LAYER 3)= 2966 2966
IMPLANTED PARTICLES (LAYER 3)= 30147 30147
IMPLANTED PARTICLES (LAYER 4)= 758 746
IMPLANTED PARTICLES (LAYER 4)= 7315 7212
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 507.7 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.523
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 508.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.085
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.532
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 8.2168E+02 2.7797E+04 -6.2592E-01 3.5190E+00 1.6672E+02 2.3614E+00 6.2486E+02 4.7969E-02
SPREAD 3.1424E+02 2.2579E+04 5.3745E-01 3.4462E+00 1.5026E+02 2.1283E+00 5.0018E+02 4.2935E-02
PATHLENGTH 1.1717E+03 1.0133E+04 -7.5037E-01 2.3885E+00 1.0066E+02 1.4257E+00 1.6912E+02 2.4839E-02
ELASTIC LOSS 3.4007E+01 4.4577E+02 2.1113E+01 4.2354E-03
INEL. LOSS 1.4979E+04 2.0726E+05 4.5526E+02 9.1325E-02
PENETRATION 8.2197E+02 2.7710E+04 -6.9938E-01 3.7109E+00 1.6646E+02 7.4564E-01 2.0436E+02 1.5041E-02
SPREAD 3.1144E+02 2.2649E+04 5.1601E-01 3.3762E+00 1.5050E+02 6.7413E-01 1.5639E+02 1.3948E-02
PATHLENGTH 1.1733E+03 9.8662E+03 -7.7287E-01 2.4596E+00 9.9329E+01 4.4493E-01 5.3392E+01 7.8570E-03
ELASTIC LOSS 3.4292E+01 4.9437E+02 2.2234E+01 4.4613E-04
INEL. LOSS 1.4969E+04 2.0222E+05 4.4969E+02 9.0229E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.7284E-02 1.1065E+00 1.1468E+02 2.5912E+04 1.0519E+00 6.6020E-04 1.1179E-01 1.4867E+01
WEAK EL.LOSS 7.5921E-04 9.6895E-06 8.1165E+00 8.5540E+01 3.1128E-03 1.9537E-06 5.5916E-08 2.0847E-02
INELAST.LOSS 2.9465E+01 1.6520E+02 -8.5145E-01 2.3927E+00 1.2853E+01 8.0670E-03 1.2236E-01 1.1933E-03
SUBTHR.LOSS 5.7820E-02 2.7640E-01 2.7348E+01 1.0171E+03 5.2573E-01 3.3000E-04 5.5302E-03 2.2703E-01
ELAST.LOSS 6.7620E-02 1.0798E+00 9.2013E+01 1.5310E+04 1.0391E+00 2.0617E-04 2.6507E-02 3.0473E+00
WEAK EL.LOSS 7.5298E-04 9.5303E-06 8.1325E+00 8.6095E+01 3.0871E-03 6.1249E-07 1.7442E-08 6.7121E-03
INELAST.LOSS 2.9429E+01 1.6568E+02 -8.4721E-01 2.3804E+00 1.2872E+01 2.5537E-03 3.8620E-02 3.7718E-04
SUBTHR.LOSS 5.7787E-02 2.7626E-01 2.7136E+01 1.0030E+03 5.2560E-01 1.0429E-04 1.7351E-03 7.2599E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 8.2168E+02 7.0296E+05 6.2039E+08 5.6163E+11 5.1935E+14 4.8891E+17
PENETRATION 8.2197E+02 7.0334E+05 6.2045E+08 5.6105E+11 5.1791E+14 4.8648E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.5144E+06 1.4995E+03 1.4984E+03 6.2058E+02 8.7782E+02 4.2006E+02 6
20.- 40. 1 0.2006E-03 0 1.5258E+06 1.9168E+03 1.9152E+03 1.0401E+03 8.7513E+02 7.0801E+02 9
40.- 60. 2 0.4012E-03 0 1.5399E+06 1.2265E+03 1.2245E+03 2.6791E+02 9.5664E+02 1.9328E+02 4
60.- 80. 1 0.2006E-03 0 1.5530E+06 1.5009E+03 1.4993E+03 6.4066E+02 8.5865E+02 4.7318E+02 9
80.- 100. 1 0.2006E-03 0 1.5656E+06 1.4180E+03 1.4160E+03 5.5049E+02 8.6551E+02 3.6385E+02 5
100.- 120. 4 0.8024E-03 0 1.5752E+06 1.4704E+03 1.4674E+03 4.8810E+02 9.7926E+02 3.5337E+02 6
120.- 140. 3 0.6018E-03 0 1.5840E+06 1.0167E+03 1.0140E+03 3.1493E+01 9.8254E+02 2.4767E+01 1
140.- 160. 0 0.0000E+00 0 1.6117E+06 1.6407E+03 1.6393E+03 6.9790E+02 9.4135E+02 5.1848E+02 10
160.- 180. 1 0.2006E-03 0 1.6159E+06 1.3806E+03 1.3788E+03 4.5674E+02 9.2203E+02 3.3294E+02 6
180.- 200. 2 0.4012E-03 0 1.6233E+06 1.4498E+03 1.4477E+03 3.5630E+02 1.0914E+03 2.6505E+02 6
200.- 220. 0 0.0000E+00 0 1.6267E+06 1.7327E+03 1.7307E+03 6.6285E+02 1.0679E+03 4.6650E+02 9
220.- 240. 2 0.4012E-03 0 1.6438E+06 1.4048E+03 1.4021E+03 2.6068E+02 1.1414E+03 1.8693E+02 3
240.- 260. 4 0.8024E-03 0 1.6536E+06 1.4359E+03 1.4327E+03 2.9400E+02 1.1387E+03 2.2507E+02 7
260.- 280. 3 0.6018E-03 0 1.6715E+06 1.8158E+03 1.8124E+03 5.1446E+02 1.2979E+03 3.8387E+02 7
280.- 300. 3 0.6018E-03 0 1.6719E+06 1.6657E+03 1.6624E+03 2.9778E+02 1.3646E+03 2.2485E+02 6
300.- 320. 12 0.2407E-02 0 1.6832E+06 1.7427E+03 1.7359E+03 4.2994E+02 1.3059E+03 3.1813E+02 7
320.- 340. 9 0.1805E-02 0 1.7003E+06 1.8900E+03 1.8845E+03 5.1020E+02 1.3743E+03 3.6182E+02 6
340.- 360. 6 0.1204E-02 0 1.7121E+06 1.8358E+03 1.8303E+03 4.7636E+02 1.3540E+03 3.4637E+02 7
360.- 380. 2 0.4012E-03 0 1.7191E+06 1.9060E+03 1.9018E+03 5.4652E+02 1.3553E+03 4.0721E+02 10
380.- 400. 7 0.1404E-02 0 1.7174E+06 2.2061E+03 2.2003E+03 7.3856E+02 1.4617E+03 5.3075E+02 9
400.- 420. 19 0.3811E-02 0 2.3515E+06 2.8879E+03 2.8718E+03 4.4892E+02 2.4229E+03 3.3430E+02 9
420.- 440. 9 0.1805E-02 0 2.4136E+06 3.1588E+03 3.1457E+03 7.5573E+02 2.3900E+03 5.6069E+02 12
440.- 460. 16 0.3210E-02 0 2.4106E+06 3.6349E+03 3.6181E+03 8.8491E+02 2.7332E+03 6.5661E+02 14
460.- 480. 20 0.4012E-02 0 2.4117E+06 3.9844E+03 3.9623E+03 1.0978E+03 2.8645E+03 8.0240E+02 16
480.- 500. 33 0.6620E-02 0 2.4180E+06 4.0642E+03 4.0353E+03 9.9689E+02 3.0384E+03 7.5034E+02 20
500.- 520. 38 0.7623E-02 0 2.4197E+06 4.2809E+03 4.2465E+03 1.0076E+03 3.2389E+03 7.5057E+02 18
520.- 540. 44 0.8826E-02 0 2.3823E+06 4.2317E+03 4.1933E+03 7.6558E+02 3.4278E+03 5.7169E+02 15
540.- 560. 55 0.1103E-01 0 2.3655E+06 5.3623E+03 5.3150E+03 1.1473E+03 4.1676E+03 8.6184E+02 24
560.- 580. 59 0.1184E-01 0 2.3691E+06 5.7906E+03 5.7338E+03 1.0656E+03 4.6682E+03 7.9809E+02 21
580.- 600. 88 0.1765E-01 0 2.3054E+06 5.9998E+03 5.9270E+03 8.6121E+02 5.0658E+03 6.4918E+02 19
600.- 620. 112 0.2247E-01 0 2.2448E+06 7.0279E+03 6.9369E+03 1.1365E+03 5.8004E+03 8.5268E+02 22
620.- 640. 143 0.2869E-01 0 2.1632E+06 7.7043E+03 7.5912E+03 1.1852E+03 6.4060E+03 8.8505E+02 24
640.- 660. 164 0.3290E-01 0 2.0800E+06 7.8336E+03 7.7016E+03 6.6009E+02 7.0416E+03 5.0060E+02 15
660.- 680. 173 0.3470E-01 0 1.9632E+06 8.5359E+03 8.3921E+03 5.8404E+02 7.8081E+03 4.4336E+02 14
680.- 700. 237 0.4754E-01 0 1.8511E+06 9.1523E+03 8.9730E+03 5.2019E+02 8.4528E+03 3.9136E+02 11
700.- 720. 143 0.2869E-01 0 9.5108E+05 4.1991E+03 4.1588E+03 1.5844E+02 4.0003E+03 1.1882E+02 4
720.- 740. 142 0.2849E-01 0 8.5781E+05 4.3100E+03 4.2723E+03 3.7313E+02 3.8992E+03 2.7310E+02 8
740.- 760. 165 0.3310E-01 0 8.0205E+05 3.8303E+03 3.7890E+03 1.0196E+02 3.6871E+03 7.6008E+01 3
760.- 780. 177 0.3551E-01 0 7.4955E+05 4.2573E+03 4.2110E+03 1.1266E+02 4.0983E+03 8.3462E+01 3
780.- 800. 192 0.3852E-01 0 6.9392E+05 4.1348E+03 4.0877E+03 6.7139E+01 4.0206E+03 5.0103E+01 2
800.- 820. 190 0.3811E-01 0 6.3809E+05 4.0007E+03 3.9526E+03 6.7894E+01 3.8847E+03 5.0637E+01 2
820.- 840. 200 0.4012E-01 0 5.8471E+05 4.1796E+03 4.1296E+03 1.2593E+02 4.0036E+03 9.2647E+01 3
840.- 860. 210 0.4213E-01 0 5.2710E+05 4.0091E+03 3.9550E+03 0.0000E+00 3.9550E+03 0.0000E+00 0
860.- 880. 219 0.4393E-01 0 4.5986E+05 3.8086E+03 3.7529E+03 4.2554E+01 3.7103E+03 3.1343E+01 1
880.- 900. 228 0.4574E-01 0 4.0183E+05 3.5182E+03 3.4625E+03 0.0000E+00 3.4625E+03 0.0000E+00 0
900.- 920. 244 0.4895E-01 1 3.4206E+05 3.3059E+03 3.2461E+03 0.0000E+00 3.2461E+03 0.0000E+00 0
920.- 940. 237 0.4754E-01 11 2.7996E+05 2.6962E+03 2.6409E+03 0.0000E+00 2.6409E+03 0.0000E+00 0
940.- 960. 202 0.4052E-01 74 2.2112E+05 2.4613E+03 2.4109E+03 0.0000E+00 2.4109E+03 0.0000E+00 0
960.- 980. 210 0.4213E-01 154 1.8218E+05 2.3115E+03 2.2611E+03 0.0000E+00 2.2611E+03 0.0000E+00 0
980.- 1000. 207 0.4152E-01 259 1.3660E+05 1.8220E+03 1.7750E+03 0.0000E+00 1.7750E+03 0.0000E+00 0
1000.- 1020. 210 0.4213E-01 235 1.2502E+05 1.4698E+03 1.4343E+03 0.0000E+00 1.4343E+03 0.0000E+00 0
1020.- 1040. 189 0.3791E-01 153 8.3443E+04 1.0644E+03 1.0344E+03 0.0000E+00 1.0344E+03 0.0000E+00 0
1040.- 1060. 142 0.2849E-01 113 5.2446E+04 7.2228E+02 6.9961E+02 0.0000E+00 6.9961E+02 0.0000E+00 0
1060.- 1080. 89 0.1785E-01 92 2.7505E+04 4.0865E+02 3.9467E+02 0.0000E+00 3.9467E+02 0.0000E+00 0
1080.- 1100. 47 0.9428E-02 111 1.2942E+04 2.0827E+02 2.0024E+02 0.0000E+00 2.0024E+02 0.0000E+00 0
1100.- 1120. 38 0.7623E-02 124 7.1691E+03 1.2341E+02 1.1782E+02 0.0000E+00 1.1782E+02 0.0000E+00 0
1120.- 1140. 20 0.4012E-02 156 2.7676E+03 5.7665E+01 5.4746E+01 0.0000E+00 5.4746E+01 0.0000E+00 0
1140.- 1160. 7 0.1404E-02 188 8.7158E+02 1.6111E+01 1.5094E+01 0.0000E+00 1.5094E+01 0.0000E+00 0
1160.- 1180. 3 0.6018E-03 279 1.3757E+02 3.3575E+00 3.1106E+00 0.0000E+00 3.1106E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 409 1.1647E+02 4.2785E+00 4.2588E+00 0.0000E+00 4.2588E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 567 5.7251E+01 2.6388E+00 2.5310E+00 0.0000E+00 2.5310E+00 0.0000E+00 0
1220.- 1240. 1 0.2006E-03 629 5.3806E+00 2.3563E-01 1.8211E-01 0.0000E+00 1.8211E-01 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 583 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 433 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 251 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 103 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 4 0.8026E-04 0 1.5184E+07 1.3111E+04 1.3098E+04 4.6375E+03 8.4609E+03 3.3730E+03 64
20.- 40. 7 0.1405E-03 0 1.5293E+07 1.4201E+04 1.4185E+04 5.0188E+03 9.1666E+03 3.5644E+03 62
40.- 60. 16 0.3210E-03 0 1.5402E+07 1.3999E+04 1.3981E+04 5.0395E+03 8.9414E+03 3.6741E+03 67
60.- 80. 9 0.1806E-03 0 1.5562E+07 1.4050E+04 1.4033E+04 4.9569E+03 9.0761E+03 3.5945E+03 67
80.- 100. 13 0.2608E-03 0 1.5645E+07 1.4603E+04 1.4584E+04 5.0202E+03 9.5639E+03 3.5719E+03 64
100.- 120. 24 0.4816E-03 0 1.5784E+07 1.2712E+04 1.2688E+04 3.2013E+03 9.4872E+03 2.3602E+03 53
120.- 140. 21 0.4214E-03 0 1.5896E+07 1.4394E+04 1.4370E+04 4.5702E+03 9.8002E+03 3.2787E+03 55
140.- 160. 23 0.4615E-03 0 1.6021E+07 1.5676E+04 1.5652E+04 5.7365E+03 9.9157E+03 4.1529E+03 73
160.- 180. 20 0.4013E-03 0 1.6103E+07 1.3427E+04 1.3403E+04 3.4208E+03 9.9824E+03 2.5237E+03 52
180.- 200. 18 0.3612E-03 0 1.6219E+07 1.5566E+04 1.5543E+04 4.9183E+03 1.0625E+04 3.5606E+03 71
200.- 220. 32 0.6421E-03 0 1.6362E+07 1.7118E+04 1.7088E+04 5.6045E+03 1.1484E+04 4.0129E+03 73
220.- 240. 35 0.7023E-03 0 1.6463E+07 1.6109E+04 1.6076E+04 4.5296E+03 1.1547E+04 3.3245E+03 69
240.- 260. 38 0.7625E-03 0 1.6589E+07 1.8047E+04 1.8012E+04 6.0617E+03 1.1950E+04 4.3666E+03 85
260.- 280. 45 0.9029E-03 0 1.6744E+07 1.9173E+04 1.9135E+04 6.4868E+03 1.2648E+04 4.7515E+03 90
280.- 300. 55 0.1104E-02 0 1.6805E+07 1.8515E+04 1.8471E+04 5.7057E+03 1.2765E+04 4.1285E+03 72
300.- 320. 61 0.1224E-02 0 1.6943E+07 1.8839E+04 1.8791E+04 5.3657E+03 1.3425E+04 3.9372E+03 82
320.- 340. 67 0.1344E-02 0 1.7020E+07 1.9475E+04 1.9425E+04 5.7132E+03 1.3712E+04 4.1868E+03 80
340.- 360. 70 0.1405E-02 0 1.7111E+07 2.1525E+04 2.1470E+04 6.9554E+03 1.4515E+04 5.1170E+03 101
360.- 380. 72 0.1445E-02 0 1.7220E+07 2.0056E+04 1.9998E+04 5.4084E+03 1.4590E+04 3.9764E+03 84
380.- 400. 85 0.1705E-02 0 1.7257E+07 2.1323E+04 2.1258E+04 5.7147E+03 1.5544E+04 4.1616E+03 82
400.- 420. 141 0.2829E-02 0 2.3543E+07 3.0063E+04 2.9918E+04 7.5089E+03 2.2409E+04 5.5280E+03 121
420.- 440. 157 0.3150E-02 0 2.4227E+07 3.3936E+04 3.3768E+04 9.4297E+03 2.4338E+04 7.0105E+03 157
440.- 460. 200 0.4013E-02 0 2.4257E+07 3.7153E+04 3.6957E+04 1.0520E+04 2.6436E+04 7.7408E+03 165
460.- 480. 240 0.4816E-02 0 2.4253E+07 3.8090E+04 3.7855E+04 9.4432E+03 2.8411E+04 6.9887E+03 156
480.- 500. 285 0.5718E-02 0 2.4201E+07 4.1684E+04 4.1407E+04 9.5152E+03 3.1891E+04 7.0443E+03 162
500.- 520. 362 0.7263E-02 0 2.4009E+07 4.3353E+04 4.3025E+04 9.2624E+03 3.3762E+04 6.9005E+03 162
520.- 540. 433 0.8688E-02 0 2.3777E+07 4.6292E+04 4.5910E+04 9.6361E+03 3.6274E+04 7.1694E+03 169
540.- 560. 489 0.9812E-02 0 2.3506E+07 5.0788E+04 5.0337E+04 9.7226E+03 4.0615E+04 7.2951E+03 189
560.- 580. 664 0.1332E-01 0 2.3210E+07 5.6859E+04 5.6288E+04 1.0553E+04 4.5735E+04 7.8972E+03 207
580.- 600. 764 0.1533E-01 0 2.2772E+07 6.1050E+04 6.0392E+04 9.7608E+03 5.0631E+04 7.3103E+03 196
600.- 620. 954 0.1914E-01 0 2.2221E+07 6.5954E+04 6.5157E+04 1.0247E+04 5.4910E+04 7.7079E+03 211
620.- 640. 1249 0.2506E-01 0 2.1416E+07 7.0937E+04 6.9924E+04 8.7986E+03 6.1126E+04 6.6086E+03 185
640.- 660. 1516 0.3042E-01 0 2.0589E+07 7.7839E+04 7.6607E+04 8.4116E+03 6.8195E+04 6.3353E+03 190
660.- 680. 1908 0.3828E-01 0 1.9587E+07 8.5568E+04 8.4051E+04 7.2768E+03 7.6774E+04 5.4891E+03 165
680.- 700. 2403 0.4822E-01 0 1.8428E+07 9.3383E+04 9.1564E+04 6.8265E+03 8.4738E+04 5.1619E+03 164
700.- 720. 1248 0.2504E-01 0 9.5325E+06 4.2472E+04 4.2087E+04 2.0637E+03 4.0023E+04 1.5213E+03 46
720.- 740. 1490 0.2990E-01 0 8.5733E+06 3.9971E+04 3.9587E+04 1.3846E+03 3.8203E+04 1.0164E+03 32
740.- 760. 1654 0.3319E-01 0 8.1204E+06 4.1297E+04 4.0884E+04 1.2956E+03 3.9588E+04 9.5513E+02 32
760.- 780. 1713 0.3437E-01 0 7.5948E+06 4.1157E+04 4.0713E+04 1.3412E+03 3.9372E+04 9.8662E+02 32
780.- 800. 1873 0.3758E-01 0 7.0703E+06 4.1995E+04 4.1520E+04 6.6421E+02 4.0856E+04 4.9287E+02 18
800.- 820. 2064 0.4141E-01 0 6.5055E+06 4.1629E+04 4.1117E+04 8.1641E+02 4.0301E+04 6.0102E+02 20
820.- 840. 2125 0.4264E-01 0 5.8708E+06 4.1169E+04 4.0635E+04 9.1190E+02 3.9723E+04 6.7324E+02 23
840.- 860. 2195 0.4404E-01 0 5.2634E+06 3.9708E+04 3.9155E+04 1.2925E+02 3.9026E+04 9.6639E+01 4
860.- 880. 2333 0.4681E-01 0 4.6515E+06 3.7514E+04 3.6939E+04 2.5428E+02 3.6685E+04 1.8883E+02 7
880.- 900. 2276 0.4567E-01 0 4.0309E+06 3.5537E+04 3.4972E+04 7.9061E+01 3.4893E+04 5.8467E+01 2
900.- 920. 2454 0.4924E-01 11 3.4440E+06 3.2965E+04 3.2376E+04 7.3123E+01 3.2303E+04 5.4297E+01 2
920.- 940. 2373 0.4761E-01 92 2.8632E+06 2.9644E+04 2.9065E+04 3.0883E+01 2.9035E+04 2.3149E+01 1
940.- 960. 2278 0.4571E-01 596 2.3496E+06 2.6947E+04 2.6393E+04 0.0000E+00 2.6393E+04 0.0000E+00 0
960.- 980. 2190 0.4394E-01 1600 1.8371E+06 2.3258E+04 2.2734E+04 3.6111E+01 2.2698E+04 2.6843E+01 1
980.- 1000. 1881 0.3774E-01 2438 1.3623E+06 1.8250E+04 1.7808E+04 0.0000E+00 1.7808E+04 0.0000E+00 0
1000.- 1020. 2127 0.4268E-01 2322 1.1922E+06 1.4203E+04 1.3851E+04 0.0000E+00 1.3851E+04 0.0000E+00 0
1020.- 1040. 1698 0.3407E-01 1555 7.8623E+05 9.8978E+03 9.6196E+03 0.0000E+00 9.6196E+03 0.0000E+00 0
1040.- 1060. 1347 0.2703E-01 1052 4.7928E+05 6.7465E+03 6.5336E+03 0.0000E+00 6.5336E+03 0.0000E+00 0
1060.- 1080. 899 0.1804E-01 910 2.6390E+05 3.9774E+03 3.8344E+03 0.0000E+00 3.8344E+03 0.0000E+00 0
1080.- 1100. 565 0.1134E-01 1033 1.2940E+05 2.1042E+03 2.0193E+03 0.0000E+00 2.0193E+03 0.0000E+00 0
1100.- 1120. 318 0.6381E-02 1146 5.7437E+04 1.0168E+03 9.6821E+02 0.0000E+00 9.6821E+02 0.0000E+00 0
1120.- 1140. 169 0.3391E-02 1516 2.1954E+04 4.2418E+02 4.0083E+02 0.0000E+00 4.0083E+02 0.0000E+00 0
1140.- 1160. 61 0.1224E-02 2071 7.9136E+03 1.5489E+02 1.4595E+02 0.0000E+00 1.4595E+02 0.0000E+00 0
1160.- 1180. 21 0.4214E-03 2910 2.2412E+03 5.5679E+01 5.2967E+01 0.0000E+00 5.2967E+01 0.0000E+00 0
1180.- 1200. 5 0.1003E-03 4295 3.3803E+02 7.8252E+00 7.3091E+00 0.0000E+00 7.3091E+00 0.0000E+00 0
1200.- 1220. 2 0.4013E-04 5709 1.0324E+02 3.0075E+00 2.7230E+00 0.0000E+00 2.7230E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 6386 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 5802 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 4320 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 2315 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 1120 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 435 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 162 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 36 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- SUT 0 0.0000E+00
1440.- 1460. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- SUT 0 0.0000E+00
4985 1.0000E+00 4985 7.4799E+07 1.7273E+05 1.7080E+05 2.4049E+04 1.4675E+05 1.7689E+04 413
49839 1.0000E+00 49839 7.4763E+08 1.7370E+06 1.7178E+06 2.5006E+05 1.4678E+06 1.8450E+05 4265
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.0376E+05 3.8729E+02 3.2521E+01 3.5477E+02 1.0106E+06 1.1111E+03 5.8806E+02 5.2305E+02 1 5
20.- 40. 5.0928E+05 5.7833E+02 2.0145E+02 3.7688E+02 1.0166E+06 1.3369E+03 8.3867E+02 4.9825E+02 3 6
40.- 60. 5.2225E+05 4.2790E+02 3.2711E+01 3.9519E+02 1.0177E+06 7.9664E+02 2.3520E+02 5.6145E+02 1 3
60.- 80. 5.2341E+05 7.5525E+02 3.9427E+02 3.6098E+02 1.0295E+06 7.4406E+02 2.4639E+02 4.9767E+02 7 2
80.- 100. 5.1717E+05 4.2066E+02 6.6118E+01 3.5454E+02 1.0485E+06 9.9534E+02 4.8437E+02 5.1097E+02 2 3
100.- 120. 5.2391E+05 6.6718E+02 2.1501E+02 4.5216E+02 1.0513E+06 8.0018E+02 2.7308E+02 5.2710E+02 2 4
120.- 140. 5.3343E+05 4.2407E+02 3.1493E+01 3.9257E+02 1.0506E+06 5.8997E+02 0.0000E+00 5.8997E+02 1 0
140.- 160. 5.3703E+05 9.0967E+02 5.1037E+02 3.9930E+02 1.0746E+06 7.2958E+02 1.8753E+02 5.4205E+02 8 2
160.- 180. 5.4149E+05 5.2488E+02 1.7465E+02 3.5023E+02 1.0744E+06 8.5388E+02 2.8209E+02 5.7180E+02 2 4
180.- 200. 5.4191E+05 6.3321E+02 1.2408E+02 5.0912E+02 1.0814E+06 8.1451E+02 2.3222E+02 5.8228E+02 2 4
200.- 220. 5.4326E+05 4.1638E+02 0.0000E+00 4.1638E+02 1.0834E+06 1.3144E+03 6.6285E+02 6.5150E+02 0 9
220.- 240. 5.5138E+05 4.9001E+02 4.3328E+01 4.4668E+02 1.0924E+06 9.1212E+02 2.1735E+02 6.9477E+02 1 2
240.- 260. 5.5463E+05 6.8548E+02 1.7191E+02 5.1357E+02 1.0990E+06 7.4720E+02 1.2209E+02 6.2511E+02 4 3
260.- 280. 5.6015E+05 9.6280E+02 3.9251E+02 5.7029E+02 1.1113E+06 8.4956E+02 1.2195E+02 7.2761E+02 4 3
280.- 300. 5.5508E+05 7.1489E+02 1.4183E+02 5.7306E+02 1.1168E+06 9.4752E+02 1.5595E+02 7.9157E+02 3 3
300.- 320. 5.6403E+05 6.5522E+02 1.1494E+02 5.4029E+02 1.1192E+06 1.0806E+03 3.1500E+02 7.6564E+02 2 5
320.- 340. 5.6465E+05 6.0291E+02 5.9657E+01 5.4326E+02 1.1357E+06 1.2816E+03 4.5054E+02 8.3102E+02 1 5
340.- 360. 5.6922E+05 7.3472E+02 1.5524E+02 5.7948E+02 1.1429E+06 1.0956E+03 3.2112E+02 7.7447E+02 4 3
360.- 380. 5.7489E+05 6.9061E+02 1.7122E+02 5.1939E+02 1.1442E+06 1.2112E+03 3.7530E+02 8.3587E+02 3 7
380.- 400. 5.7864E+05 8.0930E+02 2.4480E+02 5.6450E+02 1.1372E+06 1.3831E+03 4.9376E+02 8.8931E+02 4 5
400.- 420. 5.8969E+04 1.3158E+02 3.1900E+01 9.9681E+01 1.2112E+05 7.0638E+01 0.0000E+00 7.0638E+01 1 0
0.- 20. 5.0601E+06 5.5168E+03 2.0032E+03 3.5136E+03 1.0124E+07 7.5817E+03 2.6343E+03 4.9473E+03 29 35
20.- 40. 5.1068E+06 5.4357E+03 1.5550E+03 3.8807E+03 1.0186E+07 8.7497E+03 3.4638E+03 5.2859E+03 27 35
40.- 60. 5.1499E+06 5.7176E+03 2.0197E+03 3.6979E+03 1.0252E+07 8.2633E+03 3.0199E+03 5.2435E+03 29 38
60.- 80. 5.1797E+06 5.6355E+03 1.8702E+03 3.7653E+03 1.0382E+07 8.3975E+03 3.0867E+03 5.3107E+03 29 38
80.- 100. 5.2220E+06 5.2364E+03 1.3756E+03 3.8608E+03 1.0423E+07 9.3477E+03 3.6446E+03 5.7030E+03 25 39
100.- 120. 5.2506E+06 5.7380E+03 1.6222E+03 4.1158E+03 1.0534E+07 6.9504E+03 1.5791E+03 5.3714E+03 27 26
120.- 140. 5.3099E+06 5.7002E+03 1.5640E+03 4.1361E+03 1.0586E+07 8.6703E+03 3.0062E+03 5.6641E+03 21 34
140.- 160. 5.3391E+06 6.5013E+03 2.3933E+03 4.1080E+03 1.0682E+07 9.1509E+03 3.3432E+03 5.8077E+03 33 40
160.- 180. 5.3755E+06 5.9937E+03 1.7563E+03 4.2374E+03 1.0728E+07 7.4095E+03 1.6645E+03 5.7450E+03 25 27
180.- 200. 5.3843E+06 6.3756E+03 1.8625E+03 4.5131E+03 1.0835E+07 9.1676E+03 3.0558E+03 6.1118E+03 34 37
200.- 220. 5.4610E+06 6.2187E+03 1.6804E+03 4.5384E+03 1.0901E+07 1.0869E+04 3.9241E+03 6.9453E+03 28 45
220.- 240. 5.5079E+06 6.4078E+03 1.7130E+03 4.6948E+03 1.0955E+07 9.6683E+03 2.8166E+03 6.8517E+03 29 40
240.- 260. 5.5344E+06 6.3572E+03 1.4288E+03 4.9283E+03 1.1055E+07 1.1655E+04 4.6329E+03 7.0219E+03 27 58
260.- 280. 5.5941E+06 8.2038E+03 3.0407E+03 5.1631E+03 1.1150E+07 1.0931E+04 3.4461E+03 7.4848E+03 44 46
280.- 300. 5.5953E+06 7.5972E+03 2.4091E+03 5.1881E+03 1.1210E+07 1.0874E+04 3.2967E+03 7.5771E+03 37 35
300.- 320. 5.6360E+06 7.6850E+03 2.0953E+03 5.5898E+03 1.1307E+07 1.1106E+04 3.2704E+03 7.8354E+03 35 47
320.- 340. 5.6820E+06 8.0582E+03 2.4864E+03 5.5718E+03 1.1338E+07 1.1367E+04 3.2267E+03 8.1404E+03 33 47
340.- 360. 5.6994E+06 9.3391E+03 3.0661E+03 6.2730E+03 1.1412E+07 1.2131E+04 3.8893E+03 8.2419E+03 44 57
360.- 380. 5.7318E+06 7.8465E+03 1.9553E+03 5.8912E+03 1.1489E+07 1.2152E+04 3.4530E+03 8.6985E+03 36 48
380.- 400. 5.7570E+06 8.0887E+03 1.9520E+03 6.1366E+03 1.1482E+07 1.3094E+04 3.7627E+03 9.3313E+03 35 47
400.- 420. 5.9452E+05 6.9886E+02 1.4270E+02 5.5616E+02 1.1985E+06 1.2834E+03 4.5394E+02 8.2946E+02 3 7
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0929E+07 1.2622E+04 3.3100E+03 9.3123E+03 2.1759E+07 1.9666E+04 6.6035E+03 1.3062E+04 56 78
1.0917E+08 1.3435E+05 3.9992E+04 9.4360E+04 2.1823E+08 1.9882E+05 6.4671E+04 1.3415E+05 630 826
DAMAGE IN LAYER 1 : 3.2094E+04
DAMAGE IN LAYER 1 : 3.3126E+05
DAMAGE IN LAYER 2 : 8.2644E+04
DAMAGE IN LAYER 2 : 8.2316E+05
DAMAGE IN LAYER 3 : 5.2105E+04
DAMAGE IN LAYER 3 : 5.2598E+05
DAMAGE IN LAYER 4 : 3.9609E+03
DAMAGE IN LAYER 4 : 3.7436E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.0000E-03 ENERGY REFL.COEF.= 1.2944E-03 REL.MEAN ENERGY = 4.3148E-01 MEAN ENERGY = 6.4721E+03
PART.REFL.COEF.= 3.2200E-03 ENERGY REFL.COEF.= 1.0407E-03 REL.MEAN ENERGY = 3.2319E-01 MEAN ENERGY = 4.8478E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 6.4721E+03 2.4378E+07 3.4209E-01 1.6305E+00 4.9374E+03 1.2748E+03 4.9981E+06 4.1215E-01
PATHLENGTH 5.8111E+02 1.1996E+05 -3.2140E-01 1.6536E+00 3.4635E+02 8.9427E+01 2.5040E+04 4.0870E-01
ELASTIC LOSS 2.1378E+02 1.0481E+04 1.0238E+02 6.8252E+00
INEL. LOSS 8.4628E+03 2.4060E+07 4.9051E+03 3.2701E+02
ENERGY 4.8478E+03 1.6736E+07 7.0915E-01 2.2961E+00 4.0909E+03 3.2241E+02 1.5016E+06 1.3236E-01
PATHLENGTH 6.8811E+02 9.0538E+04 -4.7083E-01 2.0894E+00 3.0089E+02 2.3714E+01 7.4477E+03 1.2127E-01
ELASTIC LOSS 1.7318E+02 4.9474E+03 7.0338E+01 4.3688E-01
INEL. LOSS 9.9795E+03 1.6902E+07 4.1112E+03 2.5536E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 6.4721E+03 6.6267E+07 7.8563E+11 9.9167E+15 1.2939E+20 1.7211E+24
LOGENERGY 3.6168E+00 1.3298E+01 4.9615E+01 1.8753E+02 7.1674E+02 2.7658E+03
PATHLENGTH 5.8111E+02 4.5765E+05 3.9201E+08 3.4984E+11 3.2030E+14 2.9845E+17
ENERGY 4.8478E+03 4.0237E+07 4.0587E+11 4.4967E+15 5.2626E+19 6.3854E+23
LOGENERGY 3.4574E+00 1.2223E+01 4.4022E+01 1.6104E+02 5.9685E+02 2.2366E+03
PATHLENGTH 6.8811E+02 5.6403E+05 4.9989E+08 4.6323E+11 4.4202E+14 4.3075E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -343,5 +345,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 1 0 0 1 1 1 1 0 0 2 2 2 1 0 2 1 0
0.000 0.000 0.000 1.333 0.000 0.000 1.333 1.333 1.333 1.333 0.000 0.000 2.667 2.667 2.667 1.333 0.000 2.667 1.333 0.000
0 1 5 5 4 6 8 7 4 8 6 9 11 11 12 16 9 17 8 14
0.000 0.124 0.621 0.621 0.497 0.745 0.994 0.870 0.497 0.994 0.745 1.118 1.366 1.366 1.491 1.988 1.118 2.112 0.994 1.739
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.rge
+63 -62
View File
@@ -1,66 +1,66 @@
DEPTH PARTICLES
10.0000 0
30.0000 1
50.0000 2
70.0000 1
90.0000 1
110.0000 4
130.0000 3
150.0000 0
170.0000 1
190.0000 2
210.0000 0
230.0000 2
250.0000 4
270.0000 3
290.0000 3
310.0000 12
330.0000 9
350.0000 6
370.0000 2
390.0000 7
410.0000 19
430.0000 9
450.0000 16
470.0000 20
490.0000 33
510.0000 38
530.0000 44
550.0000 55
570.0000 59
590.0000 88
610.0000 112
630.0000 143
650.0000 164
670.0000 173
690.0000 237
710.0000 143
730.0000 142
750.0000 165
770.0000 177
790.0000 192
810.0000 190
830.0000 200
850.0000 210
870.0000 219
890.0000 228
910.0000 244
930.0000 237
950.0000 202
970.0000 210
990.0000 207
1010.0000 210
1030.0000 189
1050.0000 142
1070.0000 89
1090.0000 47
1110.0000 38
1130.0000 20
1150.0000 7
1170.0000 3
1190.0000 0
1210.0000 0
1230.0000 1
10.0000 4
30.0000 7
50.0000 16
70.0000 9
90.0000 13
110.0000 24
130.0000 21
150.0000 23
170.0000 20
190.0000 18
210.0000 32
230.0000 35
250.0000 38
270.0000 45
290.0000 55
310.0000 61
330.0000 67
350.0000 70
370.0000 72
390.0000 85
410.0000 141
430.0000 157
450.0000 200
470.0000 240
490.0000 285
510.0000 362
530.0000 433
550.0000 489
570.0000 664
590.0000 764
610.0000 954
630.0000 1249
650.0000 1516
670.0000 1908
690.0000 2403
710.0000 1248
730.0000 1490
750.0000 1654
770.0000 1713
790.0000 1873
810.0000 2064
830.0000 2125
850.0000 2195
870.0000 2333
890.0000 2276
910.0000 2454
930.0000 2373
950.0000 2278
970.0000 2190
990.0000 1881
1010.0000 2127
1030.0000 1698
1050.0000 1347
1070.0000 899
1090.0000 565
1110.0000 318
1130.0000 169
1150.0000 61
1170.0000 21
1190.0000 5
1210.0000 2
1230.0000 0
1250.0000 0
1270.0000 0
1290.0000 0
@@ -71,3 +71,4 @@
1390.0000 0
1410.0000 0
1430.0000 0
1450.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
15.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.8217E+03 0.1667E+03 0.6472E+04 0.4937E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 63 1210 2966 746
15.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.8220E+03 0.1665E+03 0.4848E+04 0.4091E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 715 11765 30147 7212
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 17000 450 0 15 0.5 0.0 0.0 0.0
5000 78749 78749 78749 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78749 78749 78749 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.out
+144 -142
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:28
Start: 19.Jun. 2026 20:09:59
End: 18.Jun. 2026 09:50:31
End: 19.Jun. 2026 20:10:29
Simulation needed for 5000 projectiles 3 seconds
Simulation needed for 50000 projectiles 30 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 17000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78749.00 78749.00 78749.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78749.00 78749.00 78749.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
45105 0 0 0 0 0 0 0 0
447947 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,190 +162,191 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4985 ENERGY=0.8474E+08 EV
BACKSCATTERED PARTICLES= 15 ENERGY=0.8948E+05 EV
IMPLANTED PARTICLES= 49839 ENERGY=0.8473E+09 EV
BACKSCATTERED PARTICLES= 161 ENERGY=0.9655E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 48 48
IMPLANTED PARTICLES (LAYER 1)= 462 462
IMPLANTED PARTICLES (LAYER 2)= 528 528
IMPLANTED PARTICLES (LAYER 2)= 5536 5536
IMPLANTED PARTICLES (LAYER 3)= 1784 1784
IMPLANTED PARTICLES (LAYER 3)= 17341 17341
IMPLANTED PARTICLES (LAYER 4)= 2625 2625
IMPLANTED PARTICLES (LAYER 4)= 26500 26500
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 571.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.087
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.502
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 571.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.087
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.515
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.6564E+02 3.6864E+04 -1.0390E+00 4.1725E+00 1.9200E+02 2.7194E+00 9.2998E+02 4.5261E-02
SPREAD 3.7123E+02 3.1682E+04 3.6610E-01 2.7755E+00 1.7799E+02 2.5210E+00 5.9792E+02 3.3639E-02
PATHLENGTH 1.3537E+03 7.8646E+03 -1.5880E+00 5.6914E+00 8.8683E+01 1.2560E+00 2.4127E+02 3.1784E-02
ELASTIC LOSS 3.3743E+01 6.0085E+02 2.4512E+01 4.9172E-03
INEL. LOSS 1.6960E+04 2.0167E+05 4.4908E+02 9.0087E-02
PENETRATION 9.6589E+02 3.6969E+04 -9.9752E-01 3.9602E+00 1.9227E+02 8.6126E-01 2.8491E+02 1.3799E-02
SPREAD 3.6846E+02 3.1559E+04 3.6532E-01 2.7987E+00 1.7765E+02 7.9576E-01 1.8959E+02 1.0751E-02
PATHLENGTH 1.3529E+03 7.8460E+03 -1.5810E+00 5.5792E+00 8.8578E+01 3.9677E-01 7.5207E+01 9.8830E-03
ELASTIC LOSS 3.3819E+01 5.6900E+02 2.3854E+01 4.7861E-04
INEL. LOSS 1.6963E+04 2.0124E+05 4.4859E+02 9.0008E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.9457E-02 1.1591E+00 1.0592E+02 1.7559E+04 1.0766E+00 6.3687E-04 9.0852E-02 5.2495E+00
WEAK EL.LOSS 5.0200E-04 4.9712E-06 9.9124E+00 1.3801E+02 2.2296E-03 1.3189E-06 3.4422E-08 3.7896E-02
INELAST.LOSS 2.9642E+01 1.5422E+02 -6.9144E-01 2.4537E+00 1.2419E+01 7.3463E-03 1.1000E-01 9.3380E-04
SUBTHR.LOSS 4.9744E-02 2.4158E-01 2.9157E+01 1.1520E+03 4.9151E-01 2.9078E-04 4.8487E-03 2.4490E-01
ELAST.LOSS 5.9663E-02 1.1373E+00 1.1099E+02 2.1213E+04 1.0665E+00 1.9954E-04 3.0992E-02 3.2540E+00
WEAK EL.LOSS 5.0441E-04 5.0487E-06 9.8838E+00 1.3648E+02 2.2469E-03 4.2041E-07 1.0995E-08 1.1707E-02
INELAST.LOSS 2.9657E+01 1.5397E+02 -6.9159E-01 2.4554E+00 1.2408E+01 2.3216E-03 3.4754E-02 2.9543E-04
SUBTHR.LOSS 5.0067E-02 2.4016E-01 2.8820E+01 1.1303E+03 4.9006E-01 9.1698E-05 1.5102E-03 7.7782E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.6564E+02 9.6933E+05 9.9986E+08 1.0530E+12 1.1274E+15 1.2235E+18
PENETRATION 9.6589E+02 9.6992E+05 1.0012E+09 1.0553E+12 1.1311E+15 1.2289E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4651E+06 1.0567E+03 1.0557E+03 3.0698E+02 7.4873E+02 2.0984E+02 3
20.- 40. 1 0.2006E-03 0 1.4798E+06 1.1172E+03 1.1160E+03 4.0265E+02 7.1331E+02 2.8941E+02 4
40.- 60. 1 0.2006E-03 0 1.4954E+06 1.1943E+03 1.1928E+03 3.4408E+02 8.4874E+02 2.6065E+02 6
60.- 80. 1 0.2006E-03 0 1.5027E+06 1.6790E+03 1.6771E+03 8.2048E+02 8.5665E+02 5.7394E+02 7
80.- 100. 3 0.6018E-03 0 1.5123E+06 1.5988E+03 1.5967E+03 8.0092E+02 7.9581E+02 5.6250E+02 8
100.- 120. 0 0.0000E+00 0 1.5258E+06 1.4382E+03 1.4369E+03 5.9329E+02 8.4361E+02 4.3433E+02 10
120.- 140. 0 0.0000E+00 0 1.5330E+06 1.5831E+03 1.5817E+03 6.0044E+02 9.8123E+02 4.3601E+02 7
140.- 160. 3 0.6018E-03 0 1.5437E+06 1.1578E+03 1.1557E+03 3.1751E+02 8.3815E+02 2.3220E+02 4
160.- 180. 3 0.6018E-03 0 1.5573E+06 1.2080E+03 1.2052E+03 3.5557E+02 8.4959E+02 2.5952E+02 6
180.- 200. 3 0.6018E-03 0 1.5778E+06 1.3978E+03 1.3952E+03 4.2568E+02 9.6956E+02 2.9654E+02 5
200.- 220. 2 0.4012E-03 0 1.5826E+06 1.4579E+03 1.4556E+03 5.5434E+02 9.0128E+02 3.8673E+02 5
220.- 240. 2 0.4012E-03 0 1.5896E+06 1.9041E+03 1.9018E+03 9.7859E+02 9.2318E+02 6.7617E+02 9
240.- 260. 5 0.1003E-02 0 1.6047E+06 1.2134E+03 1.2102E+03 3.7300E+02 8.3725E+02 2.7944E+02 6
260.- 280. 0 0.0000E+00 0 1.6168E+06 1.5651E+03 1.5632E+03 5.2778E+02 1.0355E+03 3.8113E+02 7
280.- 300. 2 0.4012E-03 0 1.6185E+06 1.3440E+03 1.3413E+03 3.7131E+02 9.7003E+02 2.5866E+02 4
300.- 320. 2 0.4012E-03 0 1.6395E+06 1.8283E+03 1.8259E+03 7.2847E+02 1.0974E+03 5.1766E+02 8
320.- 340. 7 0.1404E-02 0 1.6416E+06 1.5767E+03 1.5725E+03 4.5808E+02 1.1144E+03 3.3306E+02 6
340.- 360. 5 0.1003E-02 0 1.6509E+06 1.2613E+03 1.2571E+03 1.5840E+02 1.0988E+03 1.1930E+02 3
360.- 380. 3 0.6018E-03 0 1.6566E+06 1.7573E+03 1.7541E+03 7.4257E+02 1.0116E+03 5.4495E+02 10
380.- 400. 5 0.1003E-02 0 1.6659E+06 1.6901E+03 1.6862E+03 4.4377E+02 1.2424E+03 3.3672E+02 8
400.- 420. 8 0.1605E-02 0 2.2826E+06 2.2315E+03 2.2216E+03 5.2318E+02 1.6985E+03 3.8405E+02 7
420.- 440. 6 0.1204E-02 0 2.3761E+06 3.1856E+03 3.1770E+03 1.2711E+03 1.9059E+03 9.4002E+02 22
440.- 460. 9 0.1805E-02 0 2.4010E+06 2.6597E+03 2.6478E+03 6.2949E+02 2.0184E+03 4.7149E+02 12
460.- 480. 20 0.4012E-02 0 2.4038E+06 3.1250E+03 3.1075E+03 9.3729E+02 2.1702E+03 6.8295E+02 14
480.- 500. 20 0.4012E-02 0 2.4355E+06 3.3601E+03 3.3413E+03 1.0328E+03 2.3085E+03 7.7097E+02 17
500.- 520. 19 0.3811E-02 0 2.4382E+06 3.6090E+03 3.5899E+03 9.0868E+02 2.6812E+03 6.7619E+02 15
520.- 540. 24 0.4814E-02 0 2.4351E+06 4.2684E+03 4.2475E+03 1.5492E+03 2.6983E+03 1.1138E+03 21
540.- 560. 22 0.4413E-02 0 2.4371E+06 3.7292E+03 3.7063E+03 1.0580E+03 2.6483E+03 7.7403E+02 13
560.- 580. 23 0.4614E-02 0 2.4242E+06 4.1684E+03 4.1456E+03 9.4373E+02 3.2019E+03 7.0130E+02 15
580.- 600. 35 0.7021E-02 0 2.4275E+06 4.2054E+03 4.1709E+03 9.2340E+02 3.2474E+03 6.9457E+02 19
600.- 620. 39 0.7823E-02 0 2.3771E+06 3.9801E+03 3.9453E+03 6.4189E+02 3.3034E+03 4.8961E+02 15
620.- 640. 57 0.1143E-01 0 2.3701E+06 4.9188E+03 4.8702E+03 9.1331E+02 3.9569E+03 6.8584E+02 17
640.- 660. 64 0.1284E-01 0 2.3458E+06 5.5467E+03 5.4914E+03 9.9362E+02 4.4978E+03 7.4096E+02 18
660.- 680. 77 0.1545E-01 0 2.2826E+06 5.9573E+03 5.8921E+03 1.3686E+03 4.5235E+03 1.0159E+03 25
680.- 700. 105 0.2106E-01 0 2.2633E+06 6.9007E+03 6.8192E+03 1.0786E+03 5.7405E+03 7.9880E+02 21
700.- 720. 52 0.1043E-01 0 1.2385E+06 3.1616E+03 3.1444E+03 3.7600E+02 2.7684E+03 2.7316E+02 7
720.- 740. 68 0.1364E-01 0 1.1481E+06 2.7060E+03 2.6875E+03 1.7053E+02 2.5170E+03 1.2331E+02 3
740.- 760. 82 0.1645E-01 0 1.1329E+06 3.5266E+03 3.5058E+03 2.6242E+02 3.2434E+03 1.9426E+02 6
760.- 780. 76 0.1525E-01 0 1.1060E+06 3.3635E+03 3.3434E+03 1.7448E+02 3.1689E+03 1.2539E+02 3
780.- 800. 75 0.1505E-01 0 1.0730E+06 3.2624E+03 3.2423E+03 1.5866E+02 3.0836E+03 1.2093E+02 4
800.- 820. 100 0.2006E-01 0 1.0480E+06 3.6133E+03 3.5878E+03 2.7680E+02 3.3110E+03 2.0409E+02 7
820.- 840. 119 0.2387E-01 0 1.0090E+06 3.5140E+03 3.4829E+03 1.1829E+02 3.3646E+03 8.7346E+01 3
840.- 860. 118 0.2367E-01 0 9.5887E+05 3.8637E+03 3.8335E+03 3.2062E+02 3.5129E+03 2.3087E+02 6
860.- 880. 124 0.2487E-01 0 9.1441E+05 3.7505E+03 3.7199E+03 2.2185E+02 3.4981E+03 1.6230E+02 5
880.- 900. 133 0.2668E-01 0 8.7992E+05 3.7528E+03 3.7175E+03 1.9505E+02 3.5224E+03 1.4422E+02 5
900.- 920. 127 0.2548E-01 0 8.2460E+05 3.6760E+03 3.6415E+03 3.7924E+01 3.6036E+03 2.8115E+01 1
920.- 940. 171 0.3430E-01 0 7.8735E+05 4.0610E+03 4.0182E+03 1.2997E+02 3.8883E+03 9.5596E+01 3
940.- 960. 170 0.3410E-01 0 7.3852E+05 3.9653E+03 3.9221E+03 1.0712E+02 3.8150E+03 7.9655E+01 3
960.- 980. 183 0.3671E-01 0 6.8009E+05 3.8850E+03 3.8383E+03 3.2267E+01 3.8060E+03 2.4131E+01 1
980.- 1000. 186 0.3731E-01 0 6.2535E+05 4.1423E+03 4.0945E+03 1.2033E+02 3.9742E+03 8.8885E+01 3
1000.- 1020. 243 0.4875E-01 0 6.7312E+05 3.9392E+03 3.8962E+03 0.0000E+00 3.8962E+03 0.0000E+00 0
1020.- 1040. 253 0.5075E-01 3 5.9020E+05 3.6143E+03 3.5691E+03 0.0000E+00 3.5691E+03 0.0000E+00 0
1040.- 1060. 234 0.4694E-01 27 5.0379E+05 3.4640E+03 3.4199E+03 0.0000E+00 3.4199E+03 0.0000E+00 0
1060.- 1080. 273 0.5476E-01 57 4.1529E+05 3.1709E+03 3.1238E+03 0.0000E+00 3.1238E+03 0.0000E+00 0
1080.- 1100. 282 0.5657E-01 88 3.4515E+05 2.8320E+03 2.7832E+03 0.0000E+00 2.7832E+03 0.0000E+00 0
1100.- 1120. 266 0.5336E-01 74 2.6771E+05 2.4694E+03 2.4242E+03 0.0000E+00 2.4242E+03 0.0000E+00 0
1120.- 1140. 236 0.4734E-01 60 1.9895E+05 1.9355E+03 1.8949E+03 0.0000E+00 1.8949E+03 0.0000E+00 0
1140.- 1160. 227 0.4554E-01 35 1.5127E+05 1.6599E+03 1.6217E+03 0.0000E+00 1.6217E+03 0.0000E+00 0
1160.- 1180. 194 0.3892E-01 41 1.0414E+05 1.2397E+03 1.2078E+03 0.0000E+00 1.2078E+03 0.0000E+00 0
1180.- 1200. 142 0.2849E-01 39 6.3114E+04 8.5862E+02 8.3442E+02 0.0000E+00 8.3442E+02 0.0000E+00 0
1200.- 1220. 128 0.2568E-01 33 3.5355E+04 5.0261E+02 4.8361E+02 0.0000E+00 4.8361E+02 0.0000E+00 0
1220.- 1240. 67 0.1344E-01 49 1.8200E+04 2.7666E+02 2.6587E+02 0.0000E+00 2.6587E+02 0.0000E+00 0
1240.- 1260. 34 0.6820E-02 41 8.9760E+03 1.4150E+02 1.3614E+02 0.0000E+00 1.3614E+02 0.0000E+00 0
1260.- 1280. 28 0.5617E-02 61 4.1230E+03 7.5140E+01 7.1158E+01 0.0000E+00 7.1158E+01 0.0000E+00 0
1280.- 1300. 13 0.2608E-02 102 1.5144E+03 3.5844E+01 3.4196E+01 0.0000E+00 3.4196E+01 0.0000E+00 0
1300.- 1320. 2 0.4012E-03 232 3.6952E+02 5.4484E+00 5.0801E+00 0.0000E+00 5.0801E+00 0.0000E+00 0
1320.- 1340. 2 0.4012E-03 440 8.9588E+01 2.9050E+00 2.6133E+00 0.0000E+00 2.6133E+00 0.0000E+00 0
1340.- 1360. 1 0.2006E-03 655 2.6486E+00 1.0786E-01 7.3905E-02 0.0000E+00 7.3905E-02 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 819 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 766 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 546 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 377 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 207 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 122 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 70 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 27 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 0 0.0000E+00 0 1.4619E+07 1.1934E+04 1.1924E+04 4.1780E+03 7.7458E+03 2.9527E+03 48
20.- 40. 9 0.1806E-03 0 1.4741E+07 1.2734E+04 1.2721E+04 4.7754E+03 7.9461E+03 3.4064E+03 55
40.- 60. 5 0.1003E-03 0 1.4849E+07 1.2540E+04 1.2526E+04 4.6613E+03 7.8651E+03 3.3994E+03 65
60.- 80. 10 0.2006E-03 0 1.4956E+07 1.4244E+04 1.4229E+04 6.0357E+03 8.1933E+03 4.1942E+03 57
80.- 100. 16 0.3210E-03 0 1.5081E+07 1.3252E+04 1.3235E+04 4.7833E+03 8.4518E+03 3.4456E+03 56
100.- 120. 13 0.2608E-03 0 1.5198E+07 1.3566E+04 1.3548E+04 4.7122E+03 8.8362E+03 3.3880E+03 61
120.- 140. 14 0.2809E-03 0 1.5319E+07 1.3095E+04 1.3077E+04 4.5568E+03 8.5205E+03 3.2238E+03 52
140.- 160. 18 0.3612E-03 0 1.5425E+07 1.3869E+04 1.3850E+04 4.6404E+03 9.2095E+03 3.3742E+03 61
160.- 180. 14 0.2809E-03 0 1.5573E+07 1.2723E+04 1.2704E+04 3.5790E+03 9.1250E+03 2.6269E+03 55
180.- 200. 13 0.2608E-03 0 1.5683E+07 1.2961E+04 1.2941E+04 4.1644E+03 8.7767E+03 3.0254E+03 55
200.- 220. 25 0.5016E-03 0 1.5805E+07 1.5342E+04 1.5318E+04 5.7396E+03 9.5783E+03 4.1467E+03 74
220.- 240. 20 0.4013E-03 0 1.5887E+07 1.5404E+04 1.5382E+04 5.5408E+03 9.8412E+03 3.9927E+03 68
240.- 260. 28 0.5618E-03 0 1.6031E+07 1.6968E+04 1.6943E+04 7.1634E+03 9.7794E+03 5.1506E+03 81
260.- 280. 30 0.6019E-03 0 1.6146E+07 1.4226E+04 1.4199E+04 4.1694E+03 1.0030E+04 3.0345E+03 57
280.- 300. 26 0.5217E-03 0 1.6240E+07 1.5839E+04 1.5810E+04 5.5627E+03 1.0248E+04 3.9797E+03 70
300.- 320. 31 0.6220E-03 0 1.6382E+07 1.6677E+04 1.6648E+04 5.4369E+03 1.1211E+04 3.9175E+03 69
320.- 340. 47 0.9430E-03 0 1.6492E+07 1.7820E+04 1.7782E+04 6.0276E+03 1.1755E+04 4.3056E+03 70
340.- 360. 47 0.9430E-03 0 1.6591E+07 1.7316E+04 1.7279E+04 5.6712E+03 1.1608E+04 4.1014E+03 73
360.- 380. 47 0.9430E-03 0 1.6659E+07 1.7632E+04 1.7592E+04 5.9430E+03 1.1649E+04 4.3312E+03 84
380.- 400. 49 0.9832E-03 0 1.6764E+07 1.6256E+04 1.6215E+04 4.1109E+03 1.2104E+04 3.0280E+03 65
400.- 420. 75 0.1505E-02 0 2.3005E+07 2.6282E+04 2.6191E+04 8.0408E+03 1.8150E+04 5.8502E+03 110
420.- 440. 84 0.1685E-02 0 2.3766E+07 2.8151E+04 2.8051E+04 8.6250E+03 1.9426E+04 6.2879E+03 126
440.- 460. 108 0.2167E-02 0 2.3971E+07 2.8045E+04 2.7924E+04 7.4558E+03 2.0468E+04 5.5262E+03 122
460.- 480. 132 0.2649E-02 0 2.4083E+07 3.2018E+04 3.1881E+04 1.0315E+04 2.1566E+04 7.5514E+03 148
480.- 500. 145 0.2909E-02 0 2.4187E+07 3.1759E+04 3.1610E+04 8.4989E+03 2.3111E+04 6.2521E+03 131
500.- 520. 171 0.3431E-02 0 2.4310E+07 3.5740E+04 3.5564E+04 1.0501E+04 2.5063E+04 7.7653E+03 168
520.- 540. 191 0.3832E-02 0 2.4271E+07 3.7425E+04 3.7233E+04 1.0373E+04 2.6861E+04 7.6118E+03 160
540.- 560. 237 0.4755E-02 0 2.4335E+07 3.8883E+04 3.8649E+04 9.9145E+03 2.8735E+04 7.3503E+03 163
560.- 580. 323 0.6481E-02 0 2.4264E+07 4.1573E+04 4.1279E+04 9.2559E+03 3.2023E+04 6.8801E+03 162
580.- 600. 390 0.7825E-02 0 2.4245E+07 4.3639E+04 4.3292E+04 9.9234E+03 3.3369E+04 7.4007E+03 183
600.- 620. 461 0.9250E-02 0 2.4031E+07 4.7716E+04 4.7311E+04 1.0919E+04 3.6391E+04 8.0751E+03 187
620.- 640. 601 0.1206E-01 0 2.3813E+07 5.0581E+04 5.0072E+04 9.8972E+03 4.0175E+04 7.3693E+03 179
640.- 660. 673 0.1350E-01 0 2.3557E+07 5.5298E+04 5.4721E+04 1.0441E+04 4.4280E+04 7.8243E+03 203
660.- 680. 842 0.1689E-01 0 2.3082E+07 6.0016E+04 5.9311E+04 1.0314E+04 4.8997E+04 7.6982E+03 193
680.- 700. 1103 0.2213E-01 0 2.2612E+07 6.3510E+04 6.2662E+04 8.9974E+03 5.3665E+04 6.7415E+03 181
700.- 720. 565 0.1134E-01 0 1.2353E+07 3.0888E+04 3.0707E+04 2.9542E+03 2.7752E+04 2.2003E+03 64
720.- 740. 633 0.1270E-01 0 1.1507E+07 2.9551E+04 2.9379E+04 2.6888E+03 2.6690E+04 1.9711E+03 54
740.- 760. 705 0.1415E-01 0 1.1309E+07 3.1977E+04 3.1792E+04 2.6770E+03 2.9115E+04 1.9671E+03 56
760.- 780. 755 0.1515E-01 0 1.1025E+07 3.2379E+04 3.2175E+04 2.5058E+03 2.9669E+04 1.8144E+03 46
780.- 800. 910 0.1826E-01 0 1.0742E+07 3.4057E+04 3.3821E+04 2.7035E+03 3.1118E+04 1.9721E+03 55
800.- 820. 972 0.1950E-01 0 1.0455E+07 3.5262E+04 3.5007E+04 2.3394E+03 3.2668E+04 1.7147E+03 52
820.- 840. 1071 0.2149E-01 0 1.0033E+07 3.5788E+04 3.5512E+04 1.4053E+03 3.4107E+04 1.0356E+03 34
840.- 860. 1122 0.2251E-01 0 9.6377E+06 3.7622E+04 3.7328E+04 2.2865E+03 3.5042E+04 1.6764E+03 51
860.- 880. 1230 0.2468E-01 0 9.2651E+06 3.8182E+04 3.7865E+04 1.8810E+03 3.5984E+04 1.3842E+03 45
880.- 900. 1353 0.2715E-01 0 8.8103E+06 3.9373E+04 3.9027E+04 2.3184E+03 3.6709E+04 1.6923E+03 50
900.- 920. 1416 0.2841E-01 0 8.3361E+06 3.9109E+04 3.8741E+04 1.1298E+03 3.7612E+04 8.3482E+02 29
920.- 940. 1544 0.3098E-01 0 7.8280E+06 3.9568E+04 3.9176E+04 1.6331E+03 3.7543E+04 1.2037E+03 40
940.- 960. 1624 0.3258E-01 0 7.2966E+06 3.9467E+04 3.9057E+04 1.1273E+03 3.7929E+04 8.3360E+02 29
960.- 980. 1653 0.3317E-01 0 6.7025E+06 3.9132E+04 3.8706E+04 8.3095E+02 3.7875E+04 6.1190E+02 20
980.- 1000. 1788 0.3588E-01 1 6.0628E+06 3.7837E+04 3.7388E+04 9.1268E+02 3.6475E+04 6.7408E+02 23
1000.- 1020. 2347 0.4709E-01 0 6.6533E+06 3.8371E+04 3.7943E+04 0.0000E+00 3.7943E+04 0.0000E+00 0
1020.- 1040. 2525 0.5066E-01 39 5.8992E+06 3.6340E+04 3.5886E+04 3.0136E+01 3.5855E+04 2.3459E+01 1
1040.- 1060. 2654 0.5325E-01 213 5.0258E+06 3.4663E+04 3.4194E+04 0.0000E+00 3.4194E+04 0.0000E+00 0
1060.- 1080. 2705 0.5427E-01 553 4.2177E+06 3.1739E+04 3.1262E+04 0.0000E+00 3.1262E+04 0.0000E+00 0
1080.- 1100. 2708 0.5433E-01 859 3.4509E+06 2.8796E+04 2.8324E+04 0.0000E+00 2.8324E+04 0.0000E+00 0
1100.- 1120. 2606 0.5229E-01 807 2.7139E+06 2.4988E+04 2.4536E+04 0.0000E+00 2.4536E+04 0.0000E+00 0
1120.- 1140. 2504 0.5024E-01 639 2.0323E+06 2.0112E+04 1.9685E+04 0.0000E+00 1.9685E+04 0.0000E+00 0
1140.- 1160. 2226 0.4466E-01 434 1.4805E+06 1.6455E+04 1.6080E+04 0.0000E+00 1.6080E+04 0.0000E+00 0
1160.- 1180. 1916 0.3844E-01 382 1.0061E+06 1.2246E+04 1.1929E+04 0.0000E+00 1.1929E+04 0.0000E+00 0
1180.- 1200. 1520 0.3050E-01 345 6.3313E+05 8.4409E+03 8.1938E+03 0.0000E+00 8.1938E+03 0.0000E+00 0
1200.- 1220. 1151 0.2309E-01 388 3.7289E+05 5.4330E+03 5.2528E+03 0.0000E+00 5.2528E+03 0.0000E+00 0
1220.- 1240. 803 0.1611E-01 432 1.9846E+05 3.2232E+03 3.0995E+03 0.0000E+00 3.0995E+03 0.0000E+00 0
1240.- 1260. 467 0.9370E-02 505 9.2095E+04 1.6747E+03 1.6048E+03 0.0000E+00 1.6048E+03 0.0000E+00 0
1260.- 1280. 228 0.4575E-02 655 3.5375E+04 6.8905E+02 6.5570E+02 0.0000E+00 6.5570E+02 0.0000E+00 0
1280.- 1300. 97 0.1946E-02 1169 1.1742E+04 2.5374E+02 2.3951E+02 0.0000E+00 2.3951E+02 0.0000E+00 0
1300.- 1320. 31 0.6220E-03 2173 2.7871E+03 5.3910E+01 5.0158E+01 0.0000E+00 5.0158E+01 0.0000E+00 0
1320.- 1340. 11 0.2207E-03 4339 6.2896E+02 1.6536E+01 1.5162E+01 0.0000E+00 1.5162E+01 0.0000E+00 0
1340.- 1360. 1 0.2006E-04 6719 7.3690E+01 1.5847E+00 1.5400E+00 0.0000E+00 1.5400E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 7982 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 7559 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 5701 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 3645 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 2161 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 1230 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 562 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 219 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 98 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 11 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- SUT 0 0.0000E+00
1620.- 1640. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- SUT 0 0.0000E+00
4985 1.0000E+00 4985 8.4705E+07 1.7134E+05 1.6991E+05 2.7779E+04 1.4213E+05 2.0311E+04 437
49839 1.0000E+00 49839 8.4716E+08 1.7187E+06 1.7043E+06 2.7435E+05 1.4300E+06 2.0082E+05 4341
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.8099E+05 3.5951E+02 0.0000E+00 3.5951E+02 9.8411E+05 6.9621E+02 3.0698E+02 3.8922E+02 0 3
20.- 40. 4.9551E+05 4.5895E+02 1.8289E+02 2.7606E+02 9.8426E+05 6.5701E+02 2.1976E+02 4.3725E+02 2 2
40.- 60. 4.9684E+05 6.7200E+02 2.7346E+02 3.9854E+02 9.9855E+05 5.2081E+02 7.0620E+01 4.5019E+02 4 2
60.- 80. 4.9996E+05 6.7562E+02 3.3708E+02 3.3854E+02 1.0027E+06 1.0015E+03 4.8340E+02 5.1811E+02 3 4
80.- 100. 5.1129E+05 6.0820E+02 2.5502E+02 3.5318E+02 1.0010E+06 9.8853E+02 5.4590E+02 4.4263E+02 4 4
100.- 120. 5.0184E+05 5.2825E+02 1.5601E+02 3.7224E+02 1.0240E+06 9.0865E+02 4.3729E+02 4.7137E+02 3 7
120.- 140. 5.1319E+05 7.7100E+02 3.4851E+02 4.2249E+02 1.0198E+06 8.1067E+02 2.5193E+02 5.5874E+02 2 5
140.- 160. 5.1622E+05 5.0468E+02 1.8739E+02 3.1729E+02 1.0275E+06 6.5097E+02 1.3012E+02 5.2086E+02 3 1
160.- 180. 5.1721E+05 3.8333E+02 7.8318E+01 3.0501E+02 1.0401E+06 8.2183E+02 2.7726E+02 5.4457E+02 2 4
180.- 200. 5.2419E+05 4.8230E+02 7.5639E+01 4.0667E+02 1.0536E+06 9.1294E+02 3.5004E+02 5.6289E+02 2 3
200.- 220. 5.2647E+05 5.1400E+02 6.8524E+01 4.4548E+02 1.0561E+06 9.4162E+02 4.8582E+02 4.5580E+02 1 4
220.- 240. 5.3186E+05 4.6896E+02 1.4068E+02 3.2828E+02 1.0578E+06 1.4328E+03 8.3791E+02 5.9489E+02 1 8
240.- 260. 5.3670E+05 5.4759E+02 2.0613E+02 3.4147E+02 1.0680E+06 6.6265E+02 1.6687E+02 4.9578E+02 3 3
260.- 280. 5.3434E+05 5.4888E+02 9.8782E+01 4.5010E+02 1.0825E+06 1.0144E+03 4.2900E+02 5.8536E+02 2 5
280.- 300. 5.4087E+05 3.4186E+02 3.5185E+01 3.0668E+02 1.0777E+06 9.9948E+02 3.3612E+02 6.6336E+02 1 3
300.- 320. 5.4734E+05 6.8344E+02 2.7528E+02 4.0816E+02 1.0922E+06 1.1424E+03 4.5319E+02 6.8923E+02 3 5
320.- 340. 5.5228E+05 6.4203E+02 1.6325E+02 4.7878E+02 1.0893E+06 9.3045E+02 2.9483E+02 6.3562E+02 3 3
340.- 360. 5.5614E+05 5.4022E+02 7.6286E+01 4.6393E+02 1.0948E+06 7.1693E+02 8.2110E+01 6.3482E+02 1 2
360.- 380. 5.5054E+05 8.1060E+02 4.7029E+02 3.4031E+02 1.1060E+06 9.4353E+02 2.7228E+02 6.7126E+02 6 4
380.- 400. 5.5168E+05 8.7159E+02 4.0983E+02 4.6175E+02 1.1132E+06 8.0830E+02 3.3940E+01 7.7436E+02 7 1
400.- 420. 5.9995E+04 3.6152E+01 0.0000E+00 3.6152E+01 1.1838E+05 1.5745E+02 8.1900E+01 7.5550E+01 0 1
0.- 20. 4.8662E+06 4.5364E+03 1.1860E+03 3.3504E+03 9.7528E+06 7.3874E+03 2.9920E+03 4.3954E+03 18 30
20.- 40. 4.9188E+06 5.1587E+03 1.8871E+03 3.2716E+03 9.8227E+06 7.5628E+03 2.8882E+03 4.6746E+03 26 29
40.- 60. 4.9530E+06 5.6618E+03 2.3939E+03 3.2679E+03 9.8956E+06 6.8646E+03 2.2675E+03 4.5972E+03 34 31
60.- 80. 5.0063E+06 5.2885E+03 1.8384E+03 3.4501E+03 9.9498E+06 8.9405E+03 4.1973E+03 4.7432E+03 21 36
80.- 100. 5.0417E+06 5.6529E+03 2.2106E+03 3.4422E+03 1.0040E+07 7.5823E+03 2.5727E+03 5.0096E+03 30 26
100.- 120. 5.0659E+06 5.5136E+03 1.8838E+03 3.6298E+03 1.0132E+07 8.0349E+03 2.8284E+03 5.2064E+03 25 36
120.- 140. 5.1105E+06 5.2187E+03 1.4005E+03 3.8182E+03 1.0208E+07 7.8585E+03 3.1563E+03 4.7023E+03 17 35
140.- 160. 5.1540E+06 5.8049E+03 2.0015E+03 3.8034E+03 1.0271E+07 8.0450E+03 2.6388E+03 5.4062E+03 30 31
160.- 180. 5.1859E+06 5.2915E+03 1.4834E+03 3.8081E+03 1.0387E+07 7.4125E+03 2.0956E+03 5.3169E+03 25 30
180.- 200. 5.2263E+06 5.7062E+03 2.0624E+03 3.6437E+03 1.0457E+07 7.2349E+03 2.1019E+03 5.1330E+03 28 27
200.- 220. 5.2735E+06 6.2174E+03 2.2673E+03 3.9501E+03 1.0532E+07 9.1005E+03 3.4723E+03 5.6282E+03 32 42
220.- 240. 5.2959E+06 6.3111E+03 2.3308E+03 3.9803E+03 1.0591E+07 9.0709E+03 3.2100E+03 5.8609E+03 29 39
240.- 260. 5.3359E+06 6.9323E+03 2.9632E+03 3.9691E+03 1.0695E+07 1.0011E+04 4.2002E+03 5.8104E+03 32 49
260.- 280. 5.3840E+06 6.0946E+03 1.9262E+03 4.1683E+03 1.0762E+07 8.1047E+03 2.2432E+03 5.8615E+03 29 28
280.- 300. 5.4260E+06 5.9084E+03 1.7208E+03 4.1876E+03 1.0814E+07 9.9019E+03 3.8419E+03 6.0600E+03 26 44
300.- 320. 5.4479E+06 6.5919E+03 2.0302E+03 4.5617E+03 1.0934E+07 1.0056E+04 3.4067E+03 6.6495E+03 32 37
320.- 340. 5.4765E+06 7.1038E+03 2.0275E+03 5.0762E+03 1.1015E+07 1.0679E+04 4.0001E+03 6.6786E+03 31 39
340.- 360. 5.5309E+06 6.6155E+03 1.9155E+03 4.7000E+03 1.1060E+07 1.0664E+04 3.7557E+03 6.9079E+03 26 47
360.- 380. 5.5550E+06 7.1017E+03 2.3673E+03 4.7344E+03 1.1104E+07 1.0490E+04 3.5757E+03 6.9147E+03 40 44
380.- 400. 5.5765E+06 6.5565E+03 1.7954E+03 4.7611E+03 1.1174E+07 9.6001E+03 2.3155E+03 7.2846E+03 31 34
400.- 420. 5.9389E+05 4.8748E+02 0.0000E+00 4.8748E+02 1.1799E+06 1.3471E+03 6.0550E+02 7.4160E+02 0 6
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0545E+07 1.1449E+04 3.8385E+03 7.6106E+03 2.1092E+07 1.7719E+04 6.5473E+03 1.1172E+04 53 74
1.0542E+08 1.1975E+05 3.9692E+04 8.0062E+04 2.1078E+08 1.7595E+05 6.2365E+04 1.1358E+05 562 720
DAMAGE IN LAYER 1 : 2.8981E+04
DAMAGE IN LAYER 1 : 2.9393E+05
DAMAGE IN LAYER 2 : 6.1374E+04
DAMAGE IN LAYER 2 : 6.1575E+05
DAMAGE IN LAYER 3 : 5.3780E+04
DAMAGE IN LAYER 3 : 5.3568E+05
DAMAGE IN LAYER 4 : 2.5774E+04
DAMAGE IN LAYER 4 : 2.5895E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.0000E-03 ENERGY REFL.COEF.= 1.0528E-03 REL.MEAN ENERGY = 3.5092E-01 MEAN ENERGY = 5.9656E+03
PART.REFL.COEF.= 3.2200E-03 ENERGY REFL.COEF.= 1.1359E-03 REL.MEAN ENERGY = 3.5276E-01 MEAN ENERGY = 5.9969E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 5.9656E+03 1.9090E+07 4.8367E-01 2.0110E+00 4.3692E+03 1.1281E+03 4.9561E+06 4.0310E-01
PATHLENGTH 7.2528E+02 9.9756E+04 -3.0704E-01 1.9288E+00 3.1584E+02 8.1550E+01 2.4823E+04 3.8529E-01
ELASTIC LOSS 2.0882E+02 1.9656E+03 4.4335E+01 2.9557E+00
INEL. LOSS 1.0669E+04 2.0691E+07 4.5487E+03 3.0325E+02
ENERGY 5.9969E+03 2.3154E+07 5.7205E-01 2.0899E+00 4.8119E+03 3.7923E+02 1.9051E+06 1.2686E-01
PATHLENGTH 7.4178E+02 1.1928E+05 -3.9440E-01 2.0355E+00 3.4537E+02 2.7219E+01 9.5661E+03 1.1710E-01
ELASTIC LOSS 2.0644E+02 6.2300E+03 7.8930E+01 4.9025E-01
INEL. LOSS 1.0804E+04 2.3811E+07 4.8796E+03 3.0308E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 5.9656E+03 5.4679E+07 5.9431E+11 7.0386E+15 8.7695E+19 1.1298E+24
LOGENERGY 3.5998E+00 1.3163E+01 4.8788E+01 1.8295E+02 6.9284E+02 2.6462E+03
PATHLENGTH 7.2528E+02 6.2578E+05 5.8889E+08 5.8268E+11 5.9542E+14 6.2221E+17
ENERGY 5.9969E+03 5.9117E+07 6.9596E+11 8.9388E+15 1.2089E+20 1.6920E+24
LOGENERGY 3.5466E+00 1.2885E+01 4.7671E+01 1.7895E+02 6.7972E+02 2.6072E+03
PATHLENGTH 7.4178E+02 6.6951E+05 6.5734E+08 6.7730E+11 7.2063E+14 7.8477E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -352,5 +354,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 1 1 1 2 2 0 2 1 1 2 0 1 0 0 0 1
0.000 0.000 0.000 0.000 1.333 1.333 1.333 2.667 2.667 0.000 2.667 1.333 1.333 2.667 0.000 1.333 0.000 0.000 0.000 1.333
0 2 1 7 5 5 5 8 10 7 7 7 9 11 15 17 7 16 9 13
0.000 0.248 0.124 0.870 0.621 0.621 0.621 0.994 1.242 0.870 0.870 0.870 1.118 1.366 1.863 2.112 0.870 1.988 1.118 1.615
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.rge
+67 -66
View File
@@ -1,71 +1,71 @@
DEPTH PARTICLES
10.0000 0
30.0000 1
50.0000 1
70.0000 1
90.0000 3
110.0000 0
130.0000 0
150.0000 3
170.0000 3
190.0000 3
210.0000 2
230.0000 2
250.0000 5
270.0000 0
290.0000 2
310.0000 2
330.0000 7
350.0000 5
370.0000 3
390.0000 5
410.0000 8
430.0000 6
450.0000 9
470.0000 20
490.0000 20
510.0000 19
530.0000 24
550.0000 22
570.0000 23
590.0000 35
610.0000 39
630.0000 57
650.0000 64
670.0000 77
690.0000 105
710.0000 52
730.0000 68
750.0000 82
770.0000 76
790.0000 75
810.0000 100
830.0000 119
850.0000 118
870.0000 124
890.0000 133
910.0000 127
930.0000 171
950.0000 170
970.0000 183
990.0000 186
1010.0000 243
1030.0000 253
1050.0000 234
1070.0000 273
1090.0000 282
1110.0000 266
1130.0000 236
1150.0000 227
1170.0000 194
1190.0000 142
1210.0000 128
1230.0000 67
1250.0000 34
1270.0000 28
1290.0000 13
1310.0000 2
1330.0000 2
30.0000 9
50.0000 5
70.0000 10
90.0000 16
110.0000 13
130.0000 14
150.0000 18
170.0000 14
190.0000 13
210.0000 25
230.0000 20
250.0000 28
270.0000 30
290.0000 26
310.0000 31
330.0000 47
350.0000 47
370.0000 47
390.0000 49
410.0000 75
430.0000 84
450.0000 108
470.0000 132
490.0000 145
510.0000 171
530.0000 191
550.0000 237
570.0000 323
590.0000 390
610.0000 461
630.0000 601
650.0000 673
670.0000 842
690.0000 1103
710.0000 565
730.0000 633
750.0000 705
770.0000 755
790.0000 910
810.0000 972
830.0000 1071
850.0000 1122
870.0000 1230
890.0000 1353
910.0000 1416
930.0000 1544
950.0000 1624
970.0000 1653
990.0000 1788
1010.0000 2347
1030.0000 2525
1050.0000 2654
1070.0000 2705
1090.0000 2708
1110.0000 2606
1130.0000 2504
1150.0000 2226
1170.0000 1916
1190.0000 1520
1210.0000 1151
1230.0000 803
1250.0000 467
1270.0000 228
1290.0000 97
1310.0000 31
1330.0000 11
1350.0000 1
1370.0000 0
1390.0000 0
@@ -80,3 +80,4 @@
1570.0000 0
1590.0000 0
1610.0000 0
1630.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
17.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.9656E+03 0.1920E+03 0.5966E+04 0.4369E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48 528 1784 2625
17.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.9659E+03 0.1923E+03 0.5997E+04 0.4812E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 462 5536 17341 26500
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 19000 450 0 15 0.5 0.0 0.0 0.0
5000 78750 78750 78750 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78750 78750 78750 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.out
+153 -151
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:28
Start: 19.Jun. 2026 20:10:05
End: 18.Jun. 2026 09:50:32
End: 19.Jun. 2026 20:10:38
Simulation needed for 5000 projectiles 4 seconds
Simulation needed for 50000 projectiles 33 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 19000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78750.00 78750.00 78750.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78750.00 78750.00 78750.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
49517 0 0 0 0 0 0 0 0
493090 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,199 +162,200 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4990 ENERGY=0.9481E+08 EV
BACKSCATTERED PARTICLES= 10 ENERGY=0.9359E+05 EV
IMPLANTED PARTICLES= 49888 ENERGY=0.9479E+09 EV
BACKSCATTERED PARTICLES= 112 ENERGY=0.7591E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 27 27
IMPLANTED PARTICLES (LAYER 1)= 286 286
IMPLANTED PARTICLES (LAYER 2)= 288 288
IMPLANTED PARTICLES (LAYER 2)= 2787 2787
IMPLANTED PARTICLES (LAYER 3)= 765 765
IMPLANTED PARTICLES (LAYER 3)= 7944 7944
IMPLANTED PARTICLES (LAYER 4)= 3910 3910
IMPLANTED PARTICLES (LAYER 4)= 38871 38871
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 628.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.085
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.522
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 629.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.084
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.518
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.1118E+03 4.3275E+04 -1.3400E+00 5.1470E+00 2.0803E+02 2.9449E+00 1.2475E+03 4.9381E-02
SPREAD 4.1753E+02 4.3611E+04 4.0586E-01 2.7338E+00 2.0883E+02 2.9563E+00 8.1293E+02 3.2988E-02
PATHLENGTH 1.5123E+03 5.8316E+03 -1.9968E+00 9.4694E+00 7.6365E+01 1.0810E+00 2.4025E+02 4.9149E-02
ELASTIC LOSS 3.3835E+01 6.3187E+02 2.5137E+01 5.0375E-03
INEL. LOSS 1.8958E+04 2.0357E+05 4.5119E+02 9.0419E-02
PENETRATION 1.1131E+03 4.3037E+04 -1.2842E+00 4.8915E+00 2.0745E+02 9.2880E-01 3.8010E+02 1.4837E-02
SPREAD 4.1787E+02 4.3976E+04 4.1872E-01 2.6861E+00 2.0970E+02 9.3887E-01 2.5565E+02 9.1369E-03
PATHLENGTH 1.5144E+03 5.7140E+03 -2.0077E+00 9.6761E+00 7.5591E+01 3.3843E-01 7.5354E+01 1.5810E-02
ELASTIC LOSS 3.3523E+01 5.9527E+02 2.4398E+01 4.8906E-04
INEL. LOSS 1.8969E+04 2.0317E+05 4.5074E+02 9.0350E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.4237E-02 1.1689E+00 1.3950E+02 3.3781E+04 1.0811E+00 6.0994E-04 1.2120E-01 1.3478E+01
WEAK EL.LOSS 3.8324E-04 3.1329E-06 1.0838E+01 1.7914E+02 1.7700E-03 9.9858E-07 2.3591E-08 6.0533E-02
INELAST.LOSS 3.0139E+01 1.3152E+02 -7.4860E-01 2.9999E+00 1.1468E+01 6.4699E-03 1.0493E-01 7.7325E-04
SUBTHR.LOSS 4.5408E-02 2.2827E-01 3.0371E+01 1.2398E+03 4.7777E-01 2.6956E-04 4.5330E-03 2.4857E-01
ELAST.LOSS 5.3591E-02 1.0417E+00 1.2258E+02 2.6441E+04 1.0206E+00 1.8198E-04 3.0202E-02 4.2040E+00
WEAK EL.LOSS 3.8116E-04 3.0807E-06 1.0773E+01 1.7733E+02 1.7552E-03 3.1296E-07 7.2944E-09 1.9276E-02
INELAST.LOSS 3.0130E+01 1.3143E+02 -7.4949E-01 3.0038E+00 1.1464E+01 2.0441E-03 3.3173E-02 2.4419E-04
SUBTHR.LOSS 4.5115E-02 2.2259E-01 3.0225E+01 1.2339E+03 4.7179E-01 8.4130E-05 1.3937E-03 7.9938E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.1118E+03 1.2794E+06 1.5067E+09 1.8050E+12 2.1920E+15 2.6919E+18
PENETRATION 1.1131E+03 1.2821E+06 1.5115E+09 1.8133E+12 2.2055E+15 2.7130E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4005E+06 1.4376E+03 1.4368E+03 7.3261E+02 7.0420E+02 4.9881E+02 7
20.- 40. 0 0.0000E+00 0 1.4124E+06 1.0419E+03 1.0411E+03 3.4614E+02 6.9496E+02 2.4595E+02 3
40.- 60. 1 0.2004E-03 0 1.4282E+06 1.0449E+03 1.0436E+03 3.0814E+02 7.3550E+02 2.2911E+02 5
60.- 80. 2 0.4008E-03 0 1.4346E+06 1.2175E+03 1.2158E+03 4.7701E+02 7.3879E+02 3.3834E+02 5
80.- 100. 1 0.2004E-03 0 1.4519E+06 1.3385E+03 1.3362E+03 5.0524E+02 8.3096E+02 3.4845E+02 4
100.- 120. 2 0.4008E-03 0 1.4569E+06 1.4760E+03 1.4747E+03 6.8226E+02 7.9248E+02 4.7949E+02 6
120.- 140. 2 0.4008E-03 0 1.4687E+06 1.0628E+03 1.0609E+03 2.7094E+02 7.8995E+02 2.0126E+02 4
140.- 160. 2 0.4008E-03 0 1.4743E+06 1.4428E+03 1.4410E+03 5.9787E+02 8.4315E+02 3.9324E+02 5
160.- 180. 1 0.2004E-03 0 1.4872E+06 1.0136E+03 1.0120E+03 1.9117E+02 8.2080E+02 1.4422E+02 4
180.- 200. 2 0.4008E-03 0 1.4999E+06 2.1039E+03 2.1016E+03 1.1756E+03 9.2606E+02 8.0321E+02 9
200.- 220. 3 0.6012E-03 0 1.5172E+06 1.4802E+03 1.4780E+03 6.0253E+02 8.7549E+02 4.3011E+02 8
220.- 240. 1 0.2004E-03 0 1.5262E+06 1.1822E+03 1.1806E+03 3.3089E+02 8.4975E+02 2.4160E+02 4
240.- 260. 0 0.0000E+00 0 1.5298E+06 1.4143E+03 1.4131E+03 5.9724E+02 8.1583E+02 4.4272E+02 9
260.- 280. 1 0.2004E-03 0 1.5421E+06 1.4954E+03 1.4938E+03 5.7667E+02 9.1716E+02 4.0576E+02 6
280.- 300. 2 0.4008E-03 0 1.5569E+06 1.1678E+03 1.1656E+03 1.4748E+02 1.0181E+03 1.1372E+02 3
300.- 320. 1 0.2004E-03 0 1.5736E+06 1.3135E+03 1.3119E+03 3.1302E+02 9.9887E+02 2.2886E+02 4
320.- 340. 0 0.0000E+00 0 1.5806E+06 1.1839E+03 1.1824E+03 3.6953E+02 8.1292E+02 2.7394E+02 7
340.- 360. 4 0.8016E-03 0 1.5897E+06 1.4105E+03 1.4074E+03 4.4339E+02 9.6404E+02 3.1246E+02 5
360.- 380. 1 0.2004E-03 0 1.5991E+06 1.2365E+03 1.2349E+03 1.1794E+02 1.1169E+03 9.0816E+01 3
380.- 400. 1 0.2004E-03 0 1.6126E+06 1.6260E+03 1.6236E+03 6.6932E+02 9.5424E+02 4.8257E+02 9
400.- 420. 8 0.1603E-02 0 2.2172E+06 1.9192E+03 1.9120E+03 2.5049E+02 1.6615E+03 1.8851E+02 4
420.- 440. 8 0.1603E-02 0 2.2968E+06 2.0004E+03 1.9916E+03 3.6440E+02 1.6272E+03 2.7794E+02 7
440.- 460. 4 0.8016E-03 0 2.3241E+06 2.5311E+03 2.5242E+03 8.8281E+02 1.6414E+03 6.2412E+02 10
460.- 480. 5 0.1002E-02 0 2.3440E+06 2.4944E+03 2.4871E+03 6.0717E+02 1.8799E+03 4.5823E+02 12
480.- 500. 10 0.2004E-02 0 2.3797E+06 3.4727E+03 3.4631E+03 1.5916E+03 1.8715E+03 1.1335E+03 17
500.- 520. 12 0.2405E-02 0 2.3760E+06 2.3791E+03 2.3675E+03 3.1638E+02 2.0511E+03 2.3777E+02 6
520.- 540. 7 0.1403E-02 0 2.3933E+06 2.8742E+03 2.8647E+03 7.6922E+02 2.0955E+03 5.8016E+02 15
540.- 560. 15 0.3006E-02 0 2.4215E+06 3.1028E+03 3.0869E+03 9.2366E+02 2.1632E+03 6.8116E+02 16
560.- 580. 18 0.3607E-02 0 2.4332E+06 3.3621E+03 3.3451E+03 9.8182E+02 2.3633E+03 7.3158E+02 16
580.- 600. 18 0.3607E-02 0 2.4499E+06 3.5176E+03 3.4975E+03 9.3292E+02 2.5645E+03 6.5699E+02 11
600.- 620. 34 0.6814E-02 0 2.4597E+06 4.2500E+03 4.2230E+03 1.4873E+03 2.7357E+03 1.0933E+03 22
620.- 640. 27 0.5411E-02 0 2.4545E+06 3.8123E+03 3.7861E+03 9.7931E+02 2.8068E+03 7.2529E+02 15
640.- 660. 34 0.6814E-02 0 2.4631E+06 4.1940E+03 4.1620E+03 1.0617E+03 3.1003E+03 7.8433E+02 18
660.- 680. 41 0.8216E-02 0 2.4896E+06 4.4921E+03 4.4561E+03 1.0093E+03 3.4467E+03 7.4262E+02 17
680.- 700. 47 0.9419E-02 0 2.4546E+06 4.9247E+03 4.8865E+03 1.1399E+03 3.7466E+03 8.4804E+02 19
700.- 720. 24 0.4810E-02 0 1.3999E+06 2.5103E+03 2.5019E+03 4.2784E+02 2.0741E+03 3.2517E+02 10
720.- 740. 31 0.6212E-02 0 1.3051E+06 2.0283E+03 2.0198E+03 1.1085E+02 1.9089E+03 8.5698E+01 3
740.- 760. 29 0.5812E-02 0 1.3035E+06 2.2229E+03 2.2144E+03 2.6050E+02 1.9539E+03 1.8693E+02 4
760.- 780. 41 0.8216E-02 0 1.2842E+06 2.4254E+03 2.4153E+03 3.6693E+02 2.0484E+03 2.7163E+02 7
780.- 800. 37 0.7415E-02 0 1.2705E+06 2.2079E+03 2.1970E+03 2.1116E+02 1.9858E+03 1.5895E+02 6
800.- 820. 45 0.9018E-02 0 1.2686E+06 2.5407E+03 2.5284E+03 3.1834E+02 2.2100E+03 2.3967E+02 8
820.- 840. 51 0.1022E-01 0 1.2463E+06 2.6667E+03 2.6537E+03 9.3430E+01 2.5603E+03 7.0130E+01 2
840.- 860. 45 0.9018E-02 0 1.2123E+06 2.9628E+03 2.9502E+03 4.4829E+02 2.5019E+03 3.3416E+02 10
860.- 880. 53 0.1062E-01 0 1.1839E+06 3.1442E+03 3.1306E+03 7.4274E+02 2.3878E+03 5.4075E+02 13
880.- 900. 55 0.1102E-01 0 1.1513E+06 2.6885E+03 2.6738E+03 1.3734E+02 2.5365E+03 1.0946E+02 4
900.- 920. 63 0.1263E-01 0 1.1396E+06 3.0666E+03 3.0494E+03 2.6647E+02 2.7830E+03 1.9561E+02 6
920.- 940. 54 0.1082E-01 0 1.1200E+06 3.0659E+03 3.0495E+03 1.8661E+02 2.8629E+03 1.4193E+02 5
940.- 960. 71 0.1423E-01 0 1.0773E+06 3.0801E+03 3.0606E+03 1.3404E+02 2.9266E+03 1.0051E+02 3
960.- 980. 73 0.1463E-01 0 1.0465E+06 3.3978E+03 3.3786E+03 3.9005E+02 2.9886E+03 2.8397E+02 8
980.- 1000. 93 0.1864E-01 0 1.0087E+06 3.3211E+03 3.2975E+03 3.4147E+02 2.9561E+03 2.4825E+02 7
1000.- 1020. 126 0.2525E-01 0 1.1544E+06 3.6853E+03 3.6617E+03 2.2321E+02 3.4385E+03 1.7068E+02 5
1020.- 1040. 133 0.2665E-01 0 1.1203E+06 3.2149E+03 3.1907E+03 3.4358E+01 3.1563E+03 2.6599E+01 1
1040.- 1060. 126 0.2525E-01 0 1.0500E+06 3.7634E+03 3.7381E+03 4.3276E+01 3.6948E+03 3.3164E+01 1
1060.- 1080. 173 0.3467E-01 0 9.9051E+05 3.9128E+03 3.8806E+03 1.0376E+02 3.7769E+03 8.0290E+01 3
1080.- 1100. 187 0.3747E-01 0 9.2209E+05 4.1715E+03 4.1365E+03 1.6331E+02 3.9732E+03 1.2669E+02 5
1100.- 1120. 225 0.4509E-01 0 8.6282E+05 4.2641E+03 4.2237E+03 0.0000E+00 4.2237E+03 0.0000E+00 0
1120.- 1140. 224 0.4489E-01 1 7.6935E+05 3.7284E+03 3.6887E+03 0.0000E+00 3.6887E+03 0.0000E+00 0
1140.- 1160. 213 0.4269E-01 9 6.9795E+05 3.8427E+03 3.8041E+03 0.0000E+00 3.8041E+03 0.0000E+00 0
1160.- 1180. 249 0.4990E-01 15 6.1779E+05 3.6165E+03 3.5716E+03 0.0000E+00 3.5716E+03 0.0000E+00 0
1180.- 1200. 269 0.5391E-01 36 5.4371E+05 3.5644E+03 3.5166E+03 0.0000E+00 3.5166E+03 0.0000E+00 0
1200.- 1220. 270 0.5411E-01 35 4.5280E+05 3.1439E+03 3.0959E+03 0.0000E+00 3.0959E+03 0.0000E+00 0
1220.- 1240. 252 0.5050E-01 27 3.7195E+05 2.9361E+03 2.8914E+03 0.0000E+00 2.8914E+03 0.0000E+00 0
1240.- 1260. 271 0.5431E-01 17 2.9678E+05 2.4940E+03 2.4492E+03 0.0000E+00 2.4492E+03 0.0000E+00 0
1260.- 1280. 239 0.4790E-01 22 2.3473E+05 2.0751E+03 2.0332E+03 0.0000E+00 2.0332E+03 0.0000E+00 0
1280.- 1300. 234 0.4689E-01 15 1.8009E+05 1.9026E+03 1.8627E+03 0.0000E+00 1.8627E+03 0.0000E+00 0
1300.- 1320. 198 0.3968E-01 20 1.2169E+05 1.3359E+03 1.3024E+03 0.0000E+00 1.3024E+03 0.0000E+00 0
1320.- 1340. 144 0.2886E-01 18 7.9475E+04 9.6004E+02 9.3449E+02 0.0000E+00 9.3449E+02 0.0000E+00 0
1340.- 1360. 142 0.2846E-01 19 4.9939E+04 6.7892E+02 6.5710E+02 0.0000E+00 6.5710E+02 0.0000E+00 0
1360.- 1380. 104 0.2084E-01 23 3.0181E+04 4.6067E+02 4.4510E+02 0.0000E+00 4.4510E+02 0.0000E+00 0
1380.- 1400. 65 0.1303E-01 14 1.7345E+04 2.9936E+02 2.8842E+02 0.0000E+00 2.8842E+02 0.0000E+00 0
1400.- 1420. 42 0.8417E-02 43 6.9797E+03 1.3684E+02 1.3107E+02 0.0000E+00 1.3107E+02 0.0000E+00 0
1420.- 1440. 12 0.2405E-02 86 2.2219E+03 5.0744E+01 4.8740E+01 0.0000E+00 4.8740E+01 0.0000E+00 0
1440.- 1460. 9 0.1804E-02 169 6.9683E+02 1.4709E+01 1.3680E+01 0.0000E+00 1.3680E+01 0.0000E+00 0
1460.- 1480. 3 0.6012E-03 390 2.2485E+02 6.4411E+00 6.1259E+00 0.0000E+00 6.1259E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 619 6.4661E+01 3.1164E+00 3.0599E+00 0.0000E+00 3.0599E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 874 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 840 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 704 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 448 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 253 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 136 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 73 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 16 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 3 0.6013E-04 0 1.4050E+07 1.0454E+04 1.0444E+04 3.7094E+03 6.7345E+03 2.6926E+03 55
20.- 40. 4 0.8018E-04 0 1.4147E+07 1.1054E+04 1.1043E+04 3.9645E+03 7.0788E+03 2.7490E+03 40
40.- 60. 7 0.1403E-03 0 1.4270E+07 1.1413E+04 1.1401E+04 4.3153E+03 7.0858E+03 3.0707E+03 52
60.- 80. 10 0.2004E-03 0 1.4358E+07 1.3354E+04 1.3340E+04 5.7313E+03 7.6090E+03 4.0446E+03 62
80.- 100. 8 0.1604E-03 0 1.4476E+07 1.2232E+04 1.2219E+04 4.5834E+03 7.6353E+03 3.3008E+03 54
100.- 120. 12 0.2405E-03 0 1.4603E+07 1.1841E+04 1.1826E+04 4.4249E+03 7.4014E+03 3.1401E+03 48
120.- 140. 12 0.2405E-03 0 1.4680E+07 1.2134E+04 1.2119E+04 3.9580E+03 8.1614E+03 2.9076E+03 58
140.- 160. 7 0.1403E-03 0 1.4775E+07 1.1128E+04 1.1114E+04 3.2014E+03 7.9131E+03 2.3036E+03 45
160.- 180. 17 0.3408E-03 0 1.4897E+07 1.2443E+04 1.2426E+04 4.4791E+03 7.9466E+03 3.1469E+03 50
180.- 200. 9 0.1804E-03 0 1.5008E+07 1.3082E+04 1.3067E+04 4.8986E+03 8.1681E+03 3.4585E+03 52
200.- 220. 15 0.3007E-03 0 1.5125E+07 1.1437E+04 1.1420E+04 3.0438E+03 8.3764E+03 2.2218E+03 45
220.- 240. 13 0.2606E-03 0 1.5239E+07 1.3184E+04 1.3166E+04 4.1679E+03 8.9980E+03 3.0356E+03 56
240.- 260. 10 0.2004E-03 0 1.5337E+07 1.2595E+04 1.2578E+04 4.0640E+03 8.5141E+03 2.9871E+03 57
260.- 280. 23 0.4610E-03 0 1.5459E+07 1.4602E+04 1.4581E+04 5.3160E+03 9.2649E+03 3.8432E+03 66
280.- 300. 17 0.3408E-03 0 1.5565E+07 1.2729E+04 1.2709E+04 3.7084E+03 9.0002E+03 2.7004E+03 56
300.- 320. 17 0.3408E-03 0 1.5684E+07 1.3959E+04 1.3938E+04 4.5627E+03 9.3756E+03 3.3524E+03 61
320.- 340. 21 0.4209E-03 0 1.5788E+07 1.4094E+04 1.4073E+04 4.5957E+03 9.4773E+03 3.3118E+03 62
340.- 360. 26 0.5212E-03 0 1.5913E+07 1.5065E+04 1.5041E+04 4.9728E+03 1.0068E+04 3.5414E+03 63
360.- 380. 27 0.5412E-03 0 1.6050E+07 1.5691E+04 1.5665E+04 4.9442E+03 1.0721E+04 3.6205E+03 73
380.- 400. 28 0.5613E-03 0 1.6128E+07 1.4924E+04 1.4895E+04 4.5907E+03 1.0305E+04 3.3901E+03 71
400.- 420. 41 0.8218E-03 0 2.2271E+07 1.9341E+04 1.9282E+04 4.0502E+03 1.5232E+04 3.0149E+03 70
420.- 440. 57 0.1143E-02 0 2.3068E+07 2.4031E+04 2.3961E+04 8.4287E+03 1.5533E+04 6.0997E+03 108
440.- 460. 54 0.1082E-02 0 2.3283E+07 2.5129E+04 2.5055E+04 8.5824E+03 1.6472E+04 6.1829E+03 108
460.- 480. 65 0.1303E-02 0 2.3441E+07 2.5850E+04 2.5767E+04 7.5743E+03 1.8193E+04 5.5518E+03 113
480.- 500. 86 0.1724E-02 0 2.3657E+07 2.5612E+04 2.5517E+04 7.4427E+03 1.8075E+04 5.4325E+03 108
500.- 520. 101 0.2025E-02 0 2.3839E+07 2.7627E+04 2.7518E+04 8.4625E+03 1.9055E+04 6.2137E+03 119
520.- 540. 117 0.2345E-02 0 2.3991E+07 2.8818E+04 2.8692E+04 8.0148E+03 2.0677E+04 5.9161E+03 127
540.- 560. 146 0.2927E-02 0 2.4149E+07 3.0804E+04 3.0658E+04 8.4199E+03 2.2238E+04 6.1728E+03 130
560.- 580. 159 0.3187E-02 0 2.4247E+07 3.1814E+04 3.1649E+04 8.7195E+03 2.2929E+04 6.4568E+03 139
580.- 600. 223 0.4470E-02 0 2.4414E+07 3.3723E+04 3.3520E+04 8.9189E+03 2.4601E+04 6.6081E+03 146
600.- 620. 243 0.4871E-02 0 2.4442E+07 3.7179E+04 3.6954E+04 1.0532E+04 2.6422E+04 7.7495E+03 164
620.- 640. 269 0.5392E-02 0 2.4461E+07 3.7240E+04 3.6987E+04 9.4348E+03 2.7552E+04 6.9293E+03 146
640.- 660. 343 0.6875E-02 0 2.4455E+07 3.9460E+04 3.9154E+04 8.9211E+03 3.0233E+04 6.5446E+03 138
660.- 680. 388 0.7777E-02 0 2.4460E+07 4.3968E+04 4.3617E+04 1.0418E+04 3.3199E+04 7.7643E+03 186
680.- 700. 495 0.9922E-02 0 2.4367E+07 4.6361E+04 4.5953E+04 1.0160E+04 3.5794E+04 7.5381E+03 171
700.- 720. 256 0.5131E-02 0 1.3965E+07 2.2045E+04 2.1958E+04 3.0268E+03 1.8931E+04 2.2608E+03 61
720.- 740. 268 0.5372E-02 0 1.3092E+07 2.1375E+04 2.1299E+04 3.2096E+03 1.8089E+04 2.3961E+03 64
740.- 760. 310 0.6214E-02 0 1.3016E+07 2.2229E+04 2.2145E+04 2.8432E+03 1.9301E+04 2.1256E+03 56
760.- 780. 368 0.7377E-02 0 1.2887E+07 2.4516E+04 2.4417E+04 3.8740E+03 2.0543E+04 2.8404E+03 71
780.- 800. 392 0.7858E-02 0 1.2778E+07 2.5093E+04 2.4984E+04 3.7684E+03 2.1215E+04 2.7870E+03 76
800.- 820. 453 0.9080E-02 0 1.2652E+07 2.5293E+04 2.5175E+04 3.0356E+03 2.2140E+04 2.2742E+03 67
820.- 840. 489 0.9802E-02 0 1.2517E+07 2.7807E+04 2.7676E+04 3.4154E+03 2.4260E+04 2.4910E+03 63
840.- 860. 507 0.1016E-01 0 1.2232E+07 2.7216E+04 2.7080E+04 2.4555E+03 2.4624E+04 1.8325E+03 56
860.- 880. 542 0.1086E-01 0 1.2004E+07 2.8711E+04 2.8564E+04 3.7732E+03 2.4791E+04 2.7939E+03 77
880.- 900. 615 0.1233E-01 0 1.1760E+07 2.9373E+04 2.9214E+04 3.0200E+03 2.6194E+04 2.2519E+03 66
900.- 920. 619 0.1241E-01 0 1.1472E+07 3.0409E+04 3.0239E+04 2.4113E+03 2.7828E+04 1.7573E+03 47
920.- 940. 669 0.1341E-01 0 1.1188E+07 3.2119E+04 3.1938E+04 2.8311E+03 2.9107E+04 2.0875E+03 61
940.- 960. 787 0.1578E-01 0 1.0818E+07 3.1641E+04 3.1435E+04 2.9328E+03 2.8503E+04 2.1465E+03 60
960.- 980. 820 0.1644E-01 0 1.0476E+07 3.3077E+04 3.2864E+04 2.7080E+03 3.0156E+04 1.9807E+03 55
980.- 1000. 849 0.1702E-01 0 1.0120E+07 3.3067E+04 3.2843E+04 1.7548E+03 3.1088E+04 1.2815E+03 37
1000.- 1020. 1214 0.2433E-01 0 1.1564E+07 3.6227E+04 3.5998E+04 1.9335E+03 3.4065E+04 1.4733E+03 48
1020.- 1040. 1311 0.2628E-01 0 1.1198E+07 3.6646E+04 3.6398E+04 1.1915E+03 3.5206E+04 9.1874E+02 32
1040.- 1060. 1480 0.2967E-01 0 1.0546E+07 3.8374E+04 3.8097E+04 1.3590E+03 3.6738E+04 1.0484E+03 37
1060.- 1080. 1664 0.3335E-01 0 9.9319E+06 3.9510E+04 3.9205E+04 7.5639E+02 3.8449E+04 5.8411E+02 21
1080.- 1100. 1786 0.3580E-01 0 9.2657E+06 3.8734E+04 3.8404E+04 6.0439E+02 3.7800E+04 4.6825E+02 18
1100.- 1120. 1929 0.3867E-01 0 8.5817E+06 4.0024E+04 3.9668E+04 2.6319E+02 3.9405E+04 2.0410E+02 8
1120.- 1140. 2057 0.4123E-01 8 7.8148E+06 3.8387E+04 3.8016E+04 9.4907E+01 3.7921E+04 7.3730E+01 3
1140.- 1160. 2165 0.4340E-01 62 7.0369E+06 3.8143E+04 3.7742E+04 1.9456E+02 3.7548E+04 1.5098E+02 6
1160.- 1180. 2412 0.4835E-01 165 6.1999E+06 3.5812E+04 3.5383E+04 0.0000E+00 3.5383E+04 0.0000E+00 0
1180.- 1200. 2530 0.5071E-01 341 5.4441E+06 3.5360E+04 3.4905E+04 0.0000E+00 3.4905E+04 0.0000E+00 0
1200.- 1220. 2625 0.5262E-01 325 4.6161E+06 3.2428E+04 3.1964E+04 0.0000E+00 3.1964E+04 0.0000E+00 0
1220.- 1240. 2728 0.5468E-01 266 3.8513E+06 3.0311E+04 2.9836E+04 0.0000E+00 2.9836E+04 0.0000E+00 0
1240.- 1260. 2566 0.5144E-01 210 3.0817E+06 2.6495E+04 2.6044E+04 0.0000E+00 2.6044E+04 0.0000E+00 0
1260.- 1280. 2568 0.5148E-01 179 2.3977E+06 2.2663E+04 2.2225E+04 0.0000E+00 2.2225E+04 0.0000E+00 0
1280.- 1300. 2364 0.4739E-01 161 1.8031E+06 1.8497E+04 1.8097E+04 0.0000E+00 1.8097E+04 0.0000E+00 0
1300.- 1320. 2050 0.4109E-01 183 1.2824E+06 1.4608E+04 1.4263E+04 0.0000E+00 1.4263E+04 0.0000E+00 0
1320.- 1340. 1656 0.3319E-01 168 8.4735E+05 1.0420E+04 1.0145E+04 0.0000E+00 1.0145E+04 0.0000E+00 0
1340.- 1360. 1405 0.2816E-01 177 5.3392E+05 7.1472E+03 6.9272E+03 0.0000E+00 6.9272E+03 0.0000E+00 0
1360.- 1380. 993 0.1990E-01 203 3.1395E+05 4.6908E+03 4.5337E+03 0.0000E+00 4.5337E+03 0.0000E+00 0
1380.- 1400. 685 0.1373E-01 187 1.6561E+05 2.6671E+03 2.5615E+03 0.0000E+00 2.5615E+03 0.0000E+00 0
1400.- 1420. 369 0.7397E-02 331 7.2246E+04 1.1946E+03 1.1411E+03 0.0000E+00 1.1411E+03 0.0000E+00 0
1420.- 1440. 157 0.3147E-02 686 3.0997E+04 5.5433E+02 5.2996E+02 0.0000E+00 5.2996E+02 0.0000E+00 0
1440.- 1460. 107 0.2145E-02 1641 1.1977E+04 2.3452E+02 2.2044E+02 0.0000E+00 2.2044E+02 0.0000E+00 0
1460.- 1480. 39 0.7818E-03 3574 3.8501E+03 7.8896E+01 7.3467E+01 0.0000E+00 7.3467E+01 0.0000E+00 0
1480.- 1500. 7 0.1403E-03 6460 8.5265E+02 1.8729E+01 1.7901E+01 0.0000E+00 1.7901E+01 0.0000E+00 0
1500.- 1520. 1 0.2004E-04 8507 3.5108E+02 5.1537E+00 4.9324E+00 0.0000E+00 4.9324E+00 0.0000E+00 0
1520.- 1540. 2 0.4009E-04 8797 2.1773E+02 4.2364E+00 3.9312E+00 0.0000E+00 3.9312E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 6947 4.8059E+01 8.7406E-01 8.3006E-01 0.0000E+00 8.3006E-01 0.0000E+00 0
1560.- 1580. 1 0.2004E-04 4591 1.0370E+01 2.5829E-01 1.6709E-01 0.0000E+00 1.6709E-01 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 2581 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 1426 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 795 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 487 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 229 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 119 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 57 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- SUT 0 0.0000E+00
1800.- 1820. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- SUT 0 0.0000E+00
4990 1.0000E+00 4990 9.4691E+07 1.7161E+05 1.7040E+05 2.7757E+04 1.4265E+05 2.0198E+04 426
49888 1.0000E+00 49888 9.4767E+08 1.6976E+06 1.6856E+06 2.6677E+05 1.4188E+06 1.9522E+05 4189
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.6925E+05 5.4169E+02 2.6810E+02 2.7358E+02 9.3123E+05 8.9512E+02 4.6451E+02 4.3061E+02 5 2
20.- 40. 4.7564E+05 4.4347E+02 1.2690E+02 3.1658E+02 9.3672E+05 5.9763E+02 2.1924E+02 3.7838E+02 1 2
40.- 60. 4.7480E+05 4.6557E+02 1.8279E+02 2.8279E+02 9.5341E+05 5.7806E+02 1.2535E+02 4.5271E+02 2 3
60.- 80. 4.8190E+05 3.9036E+02 1.1731E+02 2.7305E+02 9.5266E+05 8.2544E+02 3.5970E+02 4.6575E+02 2 3
80.- 100. 4.8633E+05 4.2092E+02 7.3007E+01 3.4791E+02 9.6554E+05 9.1529E+02 4.3224E+02 4.8305E+02 1 3
100.- 120. 4.8017E+05 6.4892E+02 3.2218E+02 3.2675E+02 9.7670E+05 8.2581E+02 3.6008E+02 4.6573E+02 3 3
120.- 140. 4.8765E+05 4.8265E+02 1.2234E+02 3.6031E+02 9.8110E+05 5.7825E+02 1.4860E+02 4.2964E+02 2 2
140.- 160. 4.9760E+05 3.4327E+02 0.0000E+00 3.4327E+02 9.7673E+05 1.0977E+03 5.9787E+02 4.9988E+02 0 5
160.- 180. 4.9585E+05 4.7732E+02 8.3767E+01 3.9355E+02 9.9139E+05 5.3465E+02 1.0741E+02 4.2725E+02 1 3
180.- 200. 5.0006E+05 6.9209E+02 3.0003E+02 3.9206E+02 9.9985E+05 1.4095E+03 8.7553E+02 5.3401E+02 2 7
200.- 220. 4.9923E+05 5.6707E+02 1.1473E+02 4.5235E+02 1.0180E+06 9.1095E+02 4.8781E+02 4.2315E+02 3 5
220.- 240. 5.0864E+05 4.7047E+02 1.2797E+02 3.4250E+02 1.0176E+06 7.1018E+02 2.0292E+02 5.0726E+02 2 2
240.- 260. 5.0450E+05 6.8702E+02 3.7235E+02 3.1468E+02 1.0253E+06 7.2605E+02 2.2489E+02 5.0115E+02 5 4
260.- 280. 5.1212E+05 4.5922E+02 1.4271E+02 3.1652E+02 1.0300E+06 1.0346E+03 4.3397E+02 6.0064E+02 2 4
280.- 300. 5.2029E+05 5.8694E+02 1.4748E+02 4.3946E+02 1.0366E+06 5.7864E+02 0.0000E+00 5.7864E+02 3 0
300.- 320. 5.2365E+05 6.1753E+02 1.7454E+02 4.4299E+02 1.0499E+06 6.9436E+02 1.3848E+02 5.5588E+02 1 3
320.- 340. 5.2260E+05 4.1977E+02 5.8882E+01 3.6089E+02 1.0580E+06 7.6268E+02 3.1065E+02 4.5203E+02 1 6
340.- 360. 5.2949E+05 5.5184E+02 1.3655E+02 4.1529E+02 1.0602E+06 8.5559E+02 3.0684E+02 5.4875E+02 2 3
360.- 380. 5.2964E+05 5.4732E+02 7.7542E+01 4.6978E+02 1.0694E+06 6.8756E+02 4.0400E+01 6.4716E+02 2 1
380.- 400. 5.3817E+05 6.9393E+02 2.8003E+02 4.1390E+02 1.0733E+06 9.2708E+02 3.8929E+02 5.3778E+02 5 4
400.- 420. 5.8204E+04 6.7943E+01 0.0000E+00 6.7943E+01 1.1530E+05 1.0298E+02 5.1905E+01 5.1071E+01 0 1
0.- 20. 4.6848E+06 4.6713E+03 1.6994E+03 2.9719E+03 9.3653E+06 5.7726E+03 2.0100E+03 3.7626E+03 27 28
20.- 40. 4.7219E+06 3.8304E+03 8.3778E+02 2.9926E+03 9.4255E+06 7.2129E+03 3.1267E+03 4.0862E+03 14 26
40.- 60. 4.7651E+06 4.2751E+03 1.3163E+03 2.9588E+03 9.5046E+06 7.1260E+03 2.9990E+03 4.1270E+03 19 33
60.- 80. 4.7891E+06 4.8144E+03 1.7408E+03 3.0736E+03 9.5691E+06 8.5260E+03 3.9905E+03 4.5354E+03 24 38
80.- 100. 4.8436E+06 5.1417E+03 1.9792E+03 3.1625E+03 9.6322E+06 7.0770E+03 2.6041E+03 4.4728E+03 24 30
100.- 120. 4.8583E+06 5.0696E+03 1.9419E+03 3.1276E+03 9.7443E+06 6.7567E+03 2.4830E+03 4.2738E+03 22 26
120.- 140. 4.8856E+06 5.3132E+03 1.7745E+03 3.5387E+03 9.7944E+06 6.8062E+03 2.1835E+03 4.6227E+03 25 33
140.- 160. 4.9335E+06 4.7463E+03 1.3572E+03 3.3891E+03 9.8411E+06 6.3682E+03 1.8442E+03 4.5240E+03 20 25
160.- 180. 4.9790E+06 4.8219E+03 1.3526E+03 3.4693E+03 9.9180E+06 7.6038E+03 3.1265E+03 4.4773E+03 18 32
180.- 200. 5.0163E+06 5.3902E+03 1.9669E+03 3.4234E+03 9.9920E+06 7.6765E+03 2.9318E+03 4.7447E+03 23 29
200.- 220. 5.0408E+06 4.8992E+03 1.4230E+03 3.4762E+03 1.0084E+07 6.5210E+03 1.6208E+03 4.9002E+03 23 22
220.- 240. 5.0672E+06 5.6359E+03 1.6914E+03 3.9445E+03 1.0171E+07 7.5300E+03 2.4765E+03 5.0535E+03 24 32
240.- 260. 5.1299E+06 5.9074E+03 2.1429E+03 3.7645E+03 1.0208E+07 6.6707E+03 1.9211E+03 4.7496E+03 25 32
260.- 280. 5.1524E+06 6.0260E+03 2.3444E+03 3.6816E+03 1.0307E+07 8.5549E+03 2.9716E+03 5.5833E+03 32 34
280.- 300. 5.1913E+06 5.0015E+03 1.1599E+03 3.8416E+03 1.0373E+07 7.7070E+03 2.5485E+03 5.1586E+03 20 36
300.- 320. 5.2321E+06 6.8670E+03 2.7103E+03 4.1567E+03 1.0452E+07 7.0713E+03 1.8524E+03 5.2189E+03 33 28
320.- 340. 5.2558E+06 5.2976E+03 1.1276E+03 4.1701E+03 1.0532E+07 8.7753E+03 3.4681E+03 5.3072E+03 19 43
340.- 360. 5.2925E+06 5.7626E+03 1.4396E+03 4.3230E+03 1.0620E+07 9.2784E+03 3.5332E+03 5.7452E+03 23 40
360.- 380. 5.3548E+06 6.9068E+03 2.4732E+03 4.4336E+03 1.0695E+07 8.7581E+03 2.4710E+03 6.2871E+03 38 35
380.- 400. 5.3686E+06 6.4400E+03 2.2611E+03 4.1789E+03 1.0750E+07 8.4184E+03 2.3296E+03 6.0889E+03 33 38
400.- 420. 5.7966E+05 6.8698E+02 1.1826E+02 5.6872E+02 1.1535E+06 1.0784E+03 3.7215E+02 7.0623E+02 3 5
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0096E+07 1.0575E+04 3.2292E+03 7.3461E+03 2.0219E+07 1.6248E+04 6.2777E+03 9.9705E+03 45 66
1.0114E+08 1.0751E+05 3.4858E+04 7.2647E+04 2.0213E+08 1.5129E+05 5.2864E+04 9.8425E+04 489 645
DAMAGE IN LAYER 1 : 2.6655E+04
DAMAGE IN LAYER 1 : 2.5707E+05
DAMAGE IN LAYER 2 : 4.9053E+04
DAMAGE IN LAYER 2 : 4.7429E+05
DAMAGE IN LAYER 3 : 4.1121E+04
DAMAGE IN LAYER 3 : 4.1183E+05
DAMAGE IN LAYER 4 : 5.3575E+04
DAMAGE IN LAYER 4 : 5.4240E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.0000E-03 ENERGY REFL.COEF.= 9.8517E-04 REL.MEAN ENERGY = 4.9259E-01 MEAN ENERGY = 9.3591E+03
PART.REFL.COEF.= 2.2400E-03 ENERGY REFL.COEF.= 7.9910E-04 REL.MEAN ENERGY = 3.5674E-01 MEAN ENERGY = 6.7780E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 9.3591E+03 3.3002E+07 -3.6876E-01 1.7272E+00 5.7447E+03 1.8166E+03 8.8997E+06 5.2968E-01
PATHLENGTH 6.3901E+02 1.6432E+05 3.8940E-01 1.8661E+00 4.0536E+02 1.2819E+02 4.8359E+04 5.0645E-01
ELASTIC LOSS 2.7707E+02 9.0211E+03 9.4979E+01 9.4979E+00
INEL. LOSS 9.2657E+03 3.4972E+07 5.9138E+03 5.9138E+02
ENERGY 6.7780E+03 3.1925E+07 4.6827E-01 1.8272E+00 5.6502E+03 5.3389E+02 2.7436E+06 1.5810E-01
PATHLENGTH 8.2117E+02 1.5760E+05 -3.6983E-01 1.9180E+00 3.9699E+02 3.7512E+01 1.4268E+04 1.4754E-01
ELASTIC LOSS 2.2463E+02 8.9248E+03 9.4471E+01 8.4349E-01
INEL. LOSS 1.1938E+04 3.2903E+07 5.7361E+03 5.1216E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 9.3591E+03 1.2059E+08 1.6765E+12 2.4281E+16 3.6250E+20 5.5525E+24
LOGENERGY 3.7631E+00 1.4471E+01 5.6581E+01 2.2399E+02 8.9501E+02 3.6011E+03
PATHLENGTH 6.3901E+02 5.7265E+05 6.0187E+08 6.8600E+11 8.1553E+14 9.9289E+17
ENERGY 6.7780E+03 7.7867E+07 1.0450E+12 1.5063E+16 2.2682E+20 3.5237E+24
LOGENERGY 3.5508E+00 1.3017E+01 4.8763E+01 1.8569E+02 7.1643E+02 2.7935E+03
PATHLENGTH 8.2117E+02 8.3192E+05 9.1885E+08 1.0640E+12 1.2700E+15 1.5491E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -361,5 +363,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 0 0 0 0 0 0 1 1 3 0 2 2 0 0
0.000 0.000 0.000 0.000 0.000 2.000 0.000 0.000 0.000 0.000 0.000 0.000 2.000 2.000 6.000 0.000 4.000 4.000 0.000 0.000
0 2 3 2 5 4 2 5 5 8 7 5 7 4 12 10 7 8 6 10
0.000 0.357 0.536 0.357 0.893 0.714 0.357 0.893 0.893 1.429 1.250 0.893 1.250 0.714 2.143 1.786 1.250 1.429 1.071 1.786
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.rge
+79 -78
View File
@@ -1,83 +1,83 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 2
90.0000 1
110.0000 2
130.0000 2
150.0000 2
170.0000 1
190.0000 2
210.0000 3
230.0000 1
250.0000 0
270.0000 1
290.0000 2
310.0000 1
330.0000 0
350.0000 4
370.0000 1
390.0000 1
410.0000 8
430.0000 8
450.0000 4
470.0000 5
490.0000 10
510.0000 12
530.0000 7
550.0000 15
570.0000 18
590.0000 18
610.0000 34
630.0000 27
650.0000 34
670.0000 41
690.0000 47
710.0000 24
730.0000 31
750.0000 29
770.0000 41
790.0000 37
810.0000 45
830.0000 51
850.0000 45
870.0000 53
890.0000 55
910.0000 63
930.0000 54
950.0000 71
970.0000 73
990.0000 93
1010.0000 126
1030.0000 133
1050.0000 126
1070.0000 173
1090.0000 187
1110.0000 225
1130.0000 224
1150.0000 213
1170.0000 249
1190.0000 269
1210.0000 270
1230.0000 252
1250.0000 271
1270.0000 239
1290.0000 234
1310.0000 198
1330.0000 144
1350.0000 142
1370.0000 104
1390.0000 65
1410.0000 42
1430.0000 12
1450.0000 9
1470.0000 3
1490.0000 0
1510.0000 0
1530.0000 0
10.0000 3
30.0000 4
50.0000 7
70.0000 10
90.0000 8
110.0000 12
130.0000 12
150.0000 7
170.0000 17
190.0000 9
210.0000 15
230.0000 13
250.0000 10
270.0000 23
290.0000 17
310.0000 17
330.0000 21
350.0000 26
370.0000 27
390.0000 28
410.0000 41
430.0000 57
450.0000 54
470.0000 65
490.0000 86
510.0000 101
530.0000 117
550.0000 146
570.0000 159
590.0000 223
610.0000 243
630.0000 269
650.0000 343
670.0000 388
690.0000 495
710.0000 256
730.0000 268
750.0000 310
770.0000 368
790.0000 392
810.0000 453
830.0000 489
850.0000 507
870.0000 542
890.0000 615
910.0000 619
930.0000 669
950.0000 787
970.0000 820
990.0000 849
1010.0000 1214
1030.0000 1311
1050.0000 1480
1070.0000 1664
1090.0000 1786
1110.0000 1929
1130.0000 2057
1150.0000 2165
1170.0000 2412
1190.0000 2530
1210.0000 2625
1230.0000 2728
1250.0000 2566
1270.0000 2568
1290.0000 2364
1310.0000 2050
1330.0000 1656
1350.0000 1405
1370.0000 993
1390.0000 685
1410.0000 369
1430.0000 157
1450.0000 107
1470.0000 39
1490.0000 7
1510.0000 1
1530.0000 2
1550.0000 0
1570.0000 0
1570.0000 1
1590.0000 0
1610.0000 0
1630.0000 0
@@ -89,3 +89,4 @@
1750.0000 0
1770.0000 0
1790.0000 0
1810.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
19.00 0.45 0.00 15.00 5000 4990 10 0 5000 0 0.1112E+04 0.2080E+03 0.9359E+04 0.5745E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 27 288 765 3910
19.00 0.45 0.00 15.00 50000 49888 112 0 50000 0 0.1113E+04 0.2075E+03 0.6778E+04 0.5650E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 286 2787 7944 38871
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 21000 450 0 15 0.5 0.0 0.0 0.0
5000 78751 78751 78751 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78751 78751 78751 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.out
+164 -160
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:29
Start: 19.Jun. 2026 20:10:12
End: 18.Jun. 2026 09:50:33
End: 19.Jun. 2026 20:10:48
Simulation needed for 5000 projectiles 4 seconds
Simulation needed for 50000 projectiles 36 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 21000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78751.00 78751.00 78751.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78751.00 78751.00 78751.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
54236 0 0 0 0 0 0 0 0
538716 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,207 +162,210 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4993 ENERGY=0.1049E+09 EV
BACKSCATTERED PARTICLES= 7 ENERGY=0.5580E+05 EV
IMPLANTED PARTICLES= 49883 ENERGY=0.1048E+10 EV
BACKSCATTERED PARTICLES= 117 ENERGY=0.9115E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 21 21
IMPLANTED PARTICLES (LAYER 1)= 212 212
IMPLANTED PARTICLES (LAYER 2)= 139 139
IMPLANTED PARTICLES (LAYER 2)= 1559 1559
IMPLANTED PARTICLES (LAYER 3)= 338 338
IMPLANTED PARTICLES (LAYER 3)= 3607 3607
IMPLANTED PARTICLES (LAYER 4)= 4495 4495
IMPLANTED PARTICLES (LAYER 4)= 44505 44505
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 687.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.080
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.517
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 687.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.088
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.520
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.2674E+03 4.6731E+04 -1.5271E+00 6.2189E+00 2.1617E+02 3.0593E+00 1.5108E+03 5.5033E-02
SPREAD 4.6460E+02 5.5882E+04 4.2361E-01 2.5806E+00 2.3639E+02 3.3455E+00 9.9426E+02 2.5293E-02
PATHLENGTH 1.6763E+03 4.3204E+03 -2.3483E+00 1.4733E+01 6.5730E+01 9.3022E-01 2.2658E+02 1.0396E-01
ELASTIC LOSS 3.3300E+01 5.5712E+02 2.3603E+01 4.7273E-03
INEL. LOSS 2.0963E+04 2.0082E+05 4.4813E+02 8.9752E-02
PENETRATION 1.2637E+03 4.9031E+04 -1.4925E+00 5.8425E+00 2.2143E+02 9.9142E-01 4.8309E+02 1.5451E-02
SPREAD 4.6105E+02 5.5897E+04 4.7055E-01 2.6965E+00 2.3643E+02 1.0586E+00 3.2597E+02 8.3530E-03
PATHLENGTH 1.6765E+03 4.5585E+03 -2.2664E+00 1.4014E+01 6.7517E+01 3.0230E-01 7.3630E+01 3.1298E-02
ELASTIC LOSS 3.3721E+01 6.1900E+02 2.4880E+01 4.9876E-04
INEL. LOSS 2.0964E+04 2.0391E+05 4.5156E+02 9.0524E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.8624E-02 9.3760E-01 1.4524E+02 3.9970E+04 9.6830E-01 5.2222E-04 1.0109E-01 2.2118E+01
WEAK EL.LOSS 3.1260E-04 2.1089E-06 1.0502E+01 1.8181E+02 1.4522E-03 7.8320E-07 1.5294E-08 8.3547E-02
INELAST.LOSS 3.0470E+01 1.1220E+02 -9.4712E-01 3.6670E+00 1.0592E+01 5.7126E-03 9.8819E-02 7.7121E-04
SUBTHR.LOSS 4.1338E-02 2.0454E-01 3.1485E+01 1.3358E+03 4.5226E-01 2.4392E-04 4.0303E-03 2.5903E-01
ELAST.LOSS 4.9496E-02 1.0500E+00 1.3957E+02 3.4373E+04 1.0247E+00 1.7478E-04 3.3204E-02 5.2633E+00
WEAK EL.LOSS 3.1590E-04 2.1975E-06 1.0777E+01 1.9053E+02 1.4824E-03 2.5284E-07 5.1600E-09 2.6521E-02
INELAST.LOSS 3.0467E+01 1.1218E+02 -9.4795E-01 3.6678E+00 1.0591E+01 1.8065E-03 3.1252E-02 2.4415E-04
SUBTHR.LOSS 4.1298E-02 2.0527E-01 3.1577E+01 1.3432E+03 4.5307E-01 7.7282E-05 1.2828E-03 8.2644E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.2674E+03 1.6531E+06 2.1983E+09 2.9664E+12 4.0504E+15 5.5857E+18
PENETRATION 1.2637E+03 1.6461E+06 2.1879E+09 2.9525E+12 4.0326E+15 5.5636E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.3485E+06 1.2665E+03 1.2657E+03 6.8943E+02 5.7626E+02 4.8249E+02 7
20.- 40. 0 0.0000E+00 0 1.3643E+06 9.7038E+02 9.6944E+02 3.6087E+02 6.0857E+02 2.6870E+02 7
40.- 60. 1 0.2003E-03 0 1.3767E+06 9.8256E+02 9.8132E+02 3.1521E+02 6.6611E+02 2.3571E+02 6
60.- 80. 1 0.2003E-03 0 1.3788E+06 8.8897E+02 8.8774E+02 2.5211E+02 6.3563E+02 1.8450E+02 4
80.- 100. 0 0.0000E+00 0 1.3828E+06 1.0913E+03 1.0904E+03 3.6984E+02 7.2060E+02 2.5958E+02 2
100.- 120. 1 0.2003E-03 0 1.3941E+06 8.5936E+02 8.5801E+02 1.7983E+02 6.7818E+02 1.3309E+02 2
120.- 140. 1 0.2003E-03 0 1.4043E+06 7.6978E+02 7.6862E+02 6.9123E+01 6.9950E+02 5.2498E+01 1
140.- 160. 1 0.2003E-03 0 1.4130E+06 1.0980E+03 1.0967E+03 3.9711E+02 6.9961E+02 2.8146E+02 5
160.- 180. 2 0.4006E-03 0 1.4205E+06 1.3702E+03 1.3686E+03 5.1847E+02 8.5010E+02 3.4994E+02 4
180.- 200. 1 0.2003E-03 0 1.4349E+06 1.1621E+03 1.1606E+03 4.2735E+02 7.3323E+02 3.1995E+02 6
200.- 220. 1 0.2003E-03 0 1.4465E+06 9.1269E+02 9.1142E+02 2.1939E+02 6.9204E+02 1.6744E+02 5
220.- 240. 0 0.0000E+00 0 1.4645E+06 1.0290E+03 1.0278E+03 1.7814E+02 8.4965E+02 1.3442E+02 3
240.- 260. 2 0.4006E-03 0 1.4705E+06 1.6301E+03 1.6285E+03 7.3354E+02 8.9497E+02 4.7593E+02 6
260.- 280. 1 0.2003E-03 0 1.4843E+06 1.3916E+03 1.3902E+03 5.9795E+02 7.9229E+02 4.2255E+02 6
280.- 300. 1 0.2003E-03 0 1.4863E+06 9.2038E+02 9.1890E+02 1.2320E+02 7.9570E+02 9.0404E+01 2
300.- 320. 2 0.4006E-03 0 1.5022E+06 1.1024E+03 1.1007E+03 2.3307E+02 8.6764E+02 1.7587E+02 5
320.- 340. 3 0.6008E-03 0 1.5308E+06 1.5353E+03 1.5327E+03 7.7448E+02 7.5825E+02 5.5007E+02 7
340.- 360. 0 0.0000E+00 0 1.5227E+06 8.2822E+02 8.2704E+02 1.0030E+02 7.2674E+02 7.1313E+01 1
360.- 380. 2 0.4006E-03 0 1.5306E+06 1.3504E+03 1.3486E+03 4.6051E+02 8.8812E+02 3.3537E+02 5
380.- 400. 1 0.2003E-03 0 1.5413E+06 1.4681E+03 1.4663E+03 5.0366E+02 9.6264E+02 3.4677E+02 4
400.- 420. 2 0.4006E-03 0 2.1391E+06 1.7744E+03 1.7710E+03 4.4875E+02 1.3223E+03 3.2035E+02 4
420.- 440. 1 0.2003E-03 0 2.2193E+06 1.9918E+03 1.9880E+03 7.3095E+02 1.2570E+03 5.3222E+02 10
440.- 460. 6 0.1202E-02 0 2.2390E+06 1.8312E+03 1.8248E+03 3.6807E+02 1.4567E+03 2.7178E+02 5
460.- 480. 4 0.8011E-03 0 2.2474E+06 2.3722E+03 2.3667E+03 8.5842E+02 1.5082E+03 6.1608E+02 10
480.- 500. 4 0.8011E-03 0 2.2782E+06 2.4077E+03 2.4017E+03 8.2899E+02 1.5727E+03 5.8707E+02 8
500.- 520. 10 0.2003E-02 0 2.3060E+06 1.7889E+03 1.7800E+03 1.5584E+02 1.6242E+03 1.1727E+02 2
520.- 540. 3 0.6008E-03 0 2.3249E+06 2.4023E+03 2.3955E+03 8.7419E+02 1.5213E+03 6.5293E+02 14
540.- 560. 7 0.1402E-02 0 2.3461E+06 2.2612E+03 2.2523E+03 4.5696E+02 1.7953E+03 3.3503E+02 7
560.- 580. 10 0.2003E-02 0 2.3628E+06 2.6538E+03 2.6434E+03 6.7357E+02 1.9699E+03 5.0137E+02 11
580.- 600. 9 0.1803E-02 0 2.3772E+06 2.6868E+03 2.6768E+03 9.0921E+02 1.7676E+03 6.8303E+02 16
600.- 620. 9 0.1803E-02 0 2.4150E+06 3.0633E+03 3.0512E+03 1.0856E+03 1.9656E+03 7.8524E+02 13
620.- 640. 22 0.4406E-02 0 2.4211E+06 2.4640E+03 2.4468E+03 4.0979E+02 2.0370E+03 3.0442E+02 8
640.- 660. 11 0.2203E-02 0 2.4271E+06 3.2423E+03 3.2294E+03 8.8494E+02 2.3444E+03 6.6145E+02 17
660.- 680. 16 0.3204E-02 0 2.4464E+06 2.8613E+03 2.8449E+03 6.1777E+02 2.2272E+03 4.5631E+02 11
680.- 700. 25 0.5007E-02 0 2.4605E+06 3.2754E+03 3.2537E+03 6.3371E+02 2.6200E+03 4.7069E+02 12
700.- 720. 7 0.1402E-02 0 1.4526E+06 1.8583E+03 1.8549E+03 3.9107E+02 1.4638E+03 2.9711E+02 7
720.- 740. 11 0.2203E-02 0 1.3608E+06 1.4625E+03 1.4592E+03 2.7006E+02 1.1891E+03 2.0672E+02 5
740.- 760. 23 0.4606E-02 0 1.3639E+06 1.4254E+03 1.4199E+03 1.0344E+02 1.3164E+03 7.9295E+01 3
760.- 780. 10 0.2003E-02 0 1.3625E+06 1.8220E+03 1.8185E+03 4.7736E+02 1.3412E+03 3.5335E+02 7
780.- 800. 12 0.2403E-02 0 1.3525E+06 1.6774E+03 1.6731E+03 2.9571E+02 1.3774E+03 2.2172E+02 5
800.- 820. 23 0.4606E-02 0 1.3468E+06 1.7181E+03 1.7119E+03 2.6470E+02 1.4472E+03 2.0090E+02 5
820.- 840. 16 0.3204E-02 0 1.3488E+06 1.9984E+03 1.9934E+03 4.0178E+02 1.5916E+03 2.9046E+02 7
840.- 860. 16 0.3204E-02 0 1.3502E+06 2.0451E+03 2.0401E+03 3.3594E+02 1.7042E+03 2.5461E+02 7
860.- 880. 29 0.5808E-02 0 1.3302E+06 2.2699E+03 2.2621E+03 4.9869E+02 1.7634E+03 3.6964E+02 9
880.- 900. 30 0.6008E-02 0 1.3244E+06 1.9297E+03 1.9220E+03 1.9267E+02 1.7293E+03 1.5282E+02 5
900.- 920. 28 0.5608E-02 0 1.3244E+06 2.3041E+03 2.2961E+03 3.6270E+02 1.9334E+03 2.7405E+02 8
920.- 940. 30 0.6008E-02 0 1.3046E+06 1.9327E+03 1.9241E+03 1.8377E+02 1.7404E+03 1.3427E+02 3
940.- 960. 26 0.5207E-02 0 1.2830E+06 2.4515E+03 2.4436E+03 1.3629E+02 2.3073E+03 1.0324E+02 3
960.- 980. 41 0.8211E-02 0 1.2682E+06 2.5195E+03 2.5094E+03 5.3001E+02 1.9793E+03 3.9567E+02 12
980.- 1000. 36 0.7210E-02 0 1.2257E+06 2.2954E+03 2.2845E+03 3.5251E+02 1.9320E+03 2.6140E+02 8
1000.- 1020. 55 0.1102E-01 0 1.3977E+06 2.8119E+03 2.8011E+03 3.0592E+02 2.4952E+03 2.3385E+02 7
1020.- 1040. 64 0.1282E-01 0 1.3923E+06 2.6794E+03 2.6675E+03 2.7814E+02 2.3894E+03 2.1222E+02 6
1040.- 1060. 65 0.1302E-01 0 1.3732E+06 2.8701E+03 2.8569E+03 3.9329E+02 2.4636E+03 3.0040E+02 9
1060.- 1080. 81 0.1622E-01 0 1.3494E+06 3.2108E+03 3.1961E+03 3.4610E+02 2.8500E+03 2.6490E+02 8
1080.- 1100. 77 0.1542E-01 0 1.3211E+06 3.4594E+03 3.4445E+03 4.5927E+02 2.9852E+03 3.5205E+02 11
1100.- 1120. 84 0.1682E-01 0 1.2867E+06 3.5083E+03 3.4918E+03 2.0463E+02 3.2872E+03 1.5708E+02 5
1120.- 1140. 113 0.2263E-01 0 1.2358E+06 3.6034E+03 3.5832E+03 1.6833E+02 3.4148E+03 1.3041E+02 5
1140.- 1160. 107 0.2143E-01 0 1.1872E+06 3.5337E+03 3.5115E+03 1.7085E+02 3.3406E+03 1.3066E+02 4
1160.- 1180. 122 0.2443E-01 0 1.1193E+06 3.5407E+03 3.5169E+03 1.5642E+02 3.3605E+03 1.1868E+02 3
1180.- 1200. 136 0.2724E-01 0 1.0772E+06 3.7154E+03 3.6907E+03 1.0642E+02 3.5842E+03 8.2245E+01 3
1200.- 1220. 157 0.3144E-01 0 1.0332E+06 3.7770E+03 3.7483E+03 7.4189E+01 3.6741E+03 5.7192E+01 2
1220.- 1240. 174 0.3485E-01 1 9.7443E+05 3.9207E+03 3.8881E+03 1.0309E+02 3.7850E+03 7.9800E+01 3
1240.- 1260. 190 0.3805E-01 3 8.9599E+05 3.7658E+03 3.7301E+03 3.1160E+01 3.6990E+03 2.4223E+01 1
1260.- 1280. 222 0.4446E-01 7 8.2418E+05 3.6793E+03 3.6398E+03 0.0000E+00 3.6398E+03 0.0000E+00 0
1280.- 1300. 204 0.4086E-01 6 7.4033E+05 3.8533E+03 3.8171E+03 3.0049E+01 3.7870E+03 2.3394E+01 1
1300.- 1320. 196 0.3925E-01 14 6.5433E+05 3.5453E+03 3.5097E+03 0.0000E+00 3.5097E+03 0.0000E+00 0
1320.- 1340. 228 0.4566E-01 13 5.9854E+05 3.4594E+03 3.4166E+03 0.0000E+00 3.4166E+03 0.0000E+00 0
1340.- 1360. 275 0.5508E-01 11 5.2536E+05 3.4965E+03 3.4500E+03 0.0000E+00 3.4500E+03 0.0000E+00 0
1360.- 1380. 228 0.4566E-01 9 4.3227E+05 2.8884E+03 2.8463E+03 0.0000E+00 2.8463E+03 0.0000E+00 0
1380.- 1400. 258 0.5167E-01 7 3.6970E+05 2.7465E+03 2.7035E+03 0.0000E+00 2.7035E+03 0.0000E+00 0
1400.- 1420. 239 0.4787E-01 8 3.0426E+05 2.5823E+03 2.5391E+03 0.0000E+00 2.5391E+03 0.0000E+00 0
1420.- 1440. 237 0.4747E-01 10 2.4198E+05 2.1850E+03 2.1452E+03 0.0000E+00 2.1452E+03 0.0000E+00 0
1440.- 1460. 226 0.4526E-01 6 1.7809E+05 1.7975E+03 1.7583E+03 0.0000E+00 1.7583E+03 0.0000E+00 0
1460.- 1480. 236 0.4727E-01 7 1.3062E+05 1.4918E+03 1.4535E+03 0.0000E+00 1.4535E+03 0.0000E+00 0
1480.- 1500. 169 0.3385E-01 8 8.8079E+04 1.0611E+03 1.0335E+03 0.0000E+00 1.0335E+03 0.0000E+00 0
1500.- 1520. 129 0.2584E-01 11 5.8375E+04 7.1577E+02 6.9470E+02 0.0000E+00 6.9470E+02 0.0000E+00 0
1520.- 1540. 81 0.1622E-01 8 3.1431E+04 4.4598E+02 4.3273E+02 0.0000E+00 4.3273E+02 0.0000E+00 0
1540.- 1560. 67 0.1342E-01 17 1.7351E+04 2.5871E+02 2.4792E+02 0.0000E+00 2.4792E+02 0.0000E+00 0
1560.- 1580. 33 0.6609E-02 29 8.2202E+03 1.2073E+02 1.1585E+02 0.0000E+00 1.1585E+02 0.0000E+00 0
1580.- 1600. 27 0.5408E-02 83 4.1384E+03 7.7176E+01 7.3484E+01 0.0000E+00 7.3484E+01 0.0000E+00 0
1600.- 1620. 9 0.1803E-02 186 1.1470E+03 2.2738E+01 2.1637E+01 0.0000E+00 2.1637E+01 0.0000E+00 0
1620.- 1640. 5 0.1001E-02 440 2.9476E+02 8.2016E+00 7.5967E+00 0.0000E+00 7.5967E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 691 6.8669E+01 6.6576E-01 6.1779E-01 0.0000E+00 6.1779E-01 0.0000E+00 0
1660.- 1680. 1 0.2003E-03 874 2.2453E+01 7.9576E-01 6.8738E-01 0.0000E+00 6.8738E-01 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 890 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 755 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 422 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 247 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 111 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 48 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 28 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 22 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 15 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- SUT 0 0.0000E+00
0.- 20. 1 0.2005E-04 0 1.3538E+07 1.1953E+04 1.1944E+04 5.9288E+03 6.0156E+03 4.1715E+03 61
20.- 40. 2 0.4009E-04 0 1.3626E+07 1.2570E+04 1.2561E+04 5.8424E+03 6.7185E+03 4.1210E+03 61
40.- 60. 4 0.8019E-04 0 1.3716E+07 1.0346E+04 1.0336E+04 3.5404E+03 6.7959E+03 2.5347E+03 46
60.- 80. 6 0.1203E-03 0 1.3803E+07 9.9356E+03 9.9252E+03 3.2289E+03 6.6963E+03 2.3494E+03 43
80.- 100. 3 0.6014E-04 0 1.3871E+07 1.1320E+04 1.1311E+04 4.5038E+03 6.8075E+03 3.2197E+03 48
100.- 120. 9 0.1804E-03 0 1.3976E+07 1.0117E+04 1.0105E+04 3.6203E+03 6.4847E+03 2.5254E+03 38
120.- 140. 7 0.1403E-03 0 1.4083E+07 1.0603E+04 1.0591E+04 3.4868E+03 7.1045E+03 2.5397E+03 47
140.- 160. 9 0.1804E-03 0 1.4172E+07 1.0873E+04 1.0860E+04 3.7223E+03 7.1378E+03 2.6848E+03 47
160.- 180. 8 0.1604E-03 0 1.4295E+07 1.1599E+04 1.1587E+04 3.5653E+03 8.0212E+03 2.5620E+03 42
180.- 200. 6 0.1203E-03 0 1.4411E+07 1.1796E+04 1.1784E+04 4.5714E+03 7.2127E+03 3.2527E+03 51
200.- 220. 14 0.2807E-03 0 1.4478E+07 1.0763E+04 1.0747E+04 3.5680E+03 7.1788E+03 2.5333E+03 44
220.- 240. 7 0.1403E-03 0 1.4563E+07 1.1236E+04 1.1224E+04 3.6805E+03 7.5434E+03 2.6660E+03 49
240.- 260. 13 0.2606E-03 0 1.4677E+07 1.2287E+04 1.2272E+04 4.5344E+03 7.7371E+03 3.1974E+03 50
260.- 280. 17 0.3408E-03 0 1.4759E+07 1.1034E+04 1.1016E+04 3.1704E+03 7.8452E+03 2.3181E+03 43
280.- 300. 19 0.3809E-03 0 1.4880E+07 1.0988E+04 1.0970E+04 3.2968E+03 7.6728E+03 2.3593E+03 43
300.- 320. 9 0.1804E-03 0 1.5022E+07 1.2211E+04 1.2196E+04 3.7128E+03 8.4830E+03 2.6078E+03 41
320.- 340. 21 0.4210E-03 0 1.5132E+07 1.2339E+04 1.2319E+04 4.4255E+03 7.8936E+03 3.2103E+03 60
340.- 360. 20 0.4009E-03 0 1.5244E+07 1.1699E+04 1.1679E+04 3.3148E+03 8.3638E+03 2.3362E+03 33
360.- 380. 18 0.3608E-03 0 1.5316E+07 1.4156E+04 1.4138E+04 5.3296E+03 8.8086E+03 3.8609E+03 62
380.- 400. 19 0.3809E-03 0 1.5456E+07 1.3551E+04 1.3529E+04 4.5933E+03 8.9357E+03 3.3480E+03 63
400.- 420. 23 0.4611E-03 0 2.1425E+07 1.9798E+04 1.9759E+04 6.9921E+03 1.2767E+04 4.9816E+03 81
420.- 440. 30 0.6014E-03 0 2.2218E+07 1.9542E+04 1.9492E+04 5.9875E+03 1.3505E+04 4.3503E+03 81
440.- 460. 45 0.9021E-03 0 2.2406E+07 1.9785E+04 1.9727E+04 6.1706E+03 1.3556E+04 4.4420E+03 77
460.- 480. 62 0.1243E-02 0 2.2590E+07 2.4013E+04 2.3943E+04 8.8118E+03 1.5131E+04 6.2990E+03 102
480.- 500. 70 0.1403E-02 0 2.2819E+07 2.2681E+04 2.2602E+04 7.1833E+03 1.5419E+04 5.1970E+03 99
500.- 520. 76 0.1524E-02 0 2.3093E+07 2.3063E+04 2.2978E+04 6.8780E+03 1.6100E+04 5.0523E+03 104
520.- 540. 60 0.1203E-02 0 2.3244E+07 2.5118E+04 2.5040E+04 8.8902E+03 1.6150E+04 6.4982E+03 119
540.- 560. 74 0.1483E-02 0 2.3444E+07 2.4128E+04 2.4039E+04 6.3495E+03 1.7690E+04 4.6960E+03 101
560.- 580. 92 0.1844E-02 0 2.3591E+07 2.5271E+04 2.5171E+04 7.6770E+03 1.7494E+04 5.6248E+03 108
580.- 600. 108 0.2165E-02 0 2.3771E+07 2.7043E+04 2.6926E+04 8.0704E+03 1.8856E+04 5.9245E+03 120
600.- 620. 131 0.2626E-02 0 2.3981E+07 2.8847E+04 2.8719E+04 8.7584E+03 1.9960E+04 6.4240E+03 126
620.- 640. 153 0.3067E-02 0 2.4142E+07 2.9906E+04 2.9752E+04 8.9248E+03 2.0828E+04 6.5423E+03 133
640.- 660. 212 0.4250E-02 0 2.4324E+07 3.1053E+04 3.0862E+04 7.8515E+03 2.3011E+04 5.8263E+03 124
660.- 680. 186 0.3729E-02 0 2.4401E+07 3.3845E+04 3.3660E+04 9.9820E+03 2.3678E+04 7.3102E+03 148
680.- 700. 237 0.4751E-02 0 2.4548E+07 3.4502E+04 3.4291E+04 9.3283E+03 2.4963E+04 6.8791E+03 151
700.- 720. 118 0.2366E-02 0 1.4532E+07 1.8489E+04 1.8446E+04 4.6120E+03 1.3834E+04 3.4674E+03 85
720.- 740. 114 0.2285E-02 0 1.3676E+07 1.7430E+04 1.7393E+04 4.5141E+03 1.2879E+04 3.3301E+03 76
740.- 760. 154 0.3087E-02 0 1.3717E+07 1.7257E+04 1.7214E+04 3.3492E+03 1.3864E+04 2.5265E+03 64
760.- 780. 161 0.3228E-02 0 1.3709E+07 1.8890E+04 1.8845E+04 4.4043E+03 1.4440E+04 3.2459E+03 75
780.- 800. 196 0.3929E-02 0 1.3605E+07 1.7339E+04 1.7285E+04 3.0667E+03 1.4218E+04 2.3031E+03 55
800.- 820. 198 0.3969E-02 0 1.3593E+07 1.8600E+04 1.8543E+04 3.2278E+03 1.5315E+04 2.4138E+03 63
820.- 840. 194 0.3889E-02 0 1.3522E+07 1.9591E+04 1.9534E+04 4.0397E+03 1.5494E+04 2.9953E+03 72
840.- 860. 219 0.4390E-02 0 1.3499E+07 2.0520E+04 2.0460E+04 3.4451E+03 1.7015E+04 2.5816E+03 69
860.- 880. 266 0.5332E-02 0 1.3361E+07 2.1159E+04 2.1087E+04 4.0648E+03 1.7022E+04 3.0542E+03 79
880.- 900. 270 0.5413E-02 0 1.3280E+07 2.1806E+04 2.1729E+04 3.6952E+03 1.8034E+04 2.7434E+03 72
900.- 920. 308 0.6174E-02 0 1.3165E+07 2.2323E+04 2.2238E+04 3.5718E+03 1.8666E+04 2.6924E+03 74
920.- 940. 336 0.6736E-02 0 1.2997E+07 2.2701E+04 2.2611E+04 3.8288E+03 1.8782E+04 2.8200E+03 70
940.- 960. 332 0.6656E-02 0 1.2795E+07 2.2876E+04 2.2784E+04 2.4908E+03 2.0293E+04 1.8419E+03 50
960.- 980. 359 0.7197E-02 0 1.2593E+07 2.3264E+04 2.3166E+04 2.6921E+03 2.0474E+04 2.0155E+03 60
980.- 1000. 382 0.7658E-02 0 1.2384E+07 2.4568E+04 2.4463E+04 2.7292E+03 2.1734E+04 2.0221E+03 56
1000.- 1020. 546 0.1095E-01 0 1.3961E+07 2.7004E+04 2.6897E+04 3.1802E+03 2.3717E+04 2.4231E+03 72
1020.- 1040. 620 0.1243E-01 0 1.3939E+07 2.9562E+04 2.9441E+04 4.1889E+03 2.5252E+04 3.2022E+03 95
1040.- 1060. 673 0.1349E-01 0 1.3704E+07 3.0039E+04 2.9907E+04 3.3534E+03 2.6554E+04 2.5718E+03 82
1060.- 1080. 768 0.1540E-01 0 1.3406E+07 3.0774E+04 3.0630E+04 2.6466E+03 2.7984E+04 2.0260E+03 62
1080.- 1100. 750 0.1504E-01 0 1.3055E+07 3.2181E+04 3.2030E+04 3.0748E+03 2.8956E+04 2.3584E+03 75
1100.- 1120. 861 0.1726E-01 0 1.2680E+07 3.2842E+04 3.2673E+04 2.1151E+03 3.0558E+04 1.6249E+03 53
1120.- 1140. 1117 0.2239E-01 0 1.2218E+07 3.3890E+04 3.3689E+04 2.1189E+03 3.1570E+04 1.6305E+03 55
1140.- 1160. 1083 0.2171E-01 0 1.1749E+07 3.4797E+04 3.4587E+04 2.0018E+03 3.2585E+04 1.5370E+03 50
1160.- 1180. 1228 0.2462E-01 0 1.1274E+07 3.6141E+04 3.5909E+04 1.7520E+03 3.4157E+04 1.3486E+03 46
1180.- 1200. 1334 0.2674E-01 0 1.0788E+07 3.6281E+04 3.6032E+04 1.1216E+03 3.4911E+04 8.6595E+02 31
1200.- 1220. 1450 0.2907E-01 0 1.0156E+07 3.7651E+04 3.7380E+04 1.0780E+03 3.6302E+04 8.3257E+02 30
1220.- 1240. 1645 0.3298E-01 3 9.6064E+06 3.8664E+04 3.8362E+04 8.2124E+02 3.7541E+04 6.3427E+02 23
1240.- 1260. 1823 0.3655E-01 25 8.9320E+06 3.8182E+04 3.7843E+04 5.9820E+02 3.7244E+04 4.6231E+02 17
1260.- 1280. 1949 0.3907E-01 65 8.1900E+06 3.7298E+04 3.6943E+04 3.6178E+02 3.6582E+04 2.7932E+02 10
1280.- 1300. 2030 0.4070E-01 101 7.4773E+06 3.7006E+04 3.6637E+04 2.1033E+02 3.6427E+04 1.6259E+02 6
1300.- 1320. 2194 0.4398E-01 134 6.7506E+06 3.6453E+04 3.6058E+04 6.4867E+01 3.5993E+04 5.0340E+01 2
1320.- 1340. 2341 0.4693E-01 130 6.0081E+06 3.5359E+04 3.4934E+04 6.4174E+01 3.4870E+04 4.9820E+01 2
1340.- 1360. 2460 0.4932E-01 112 5.2485E+06 3.4069E+04 3.3630E+04 0.0000E+00 3.3630E+04 0.0000E+00 0
1360.- 1380. 2535 0.5082E-01 111 4.4587E+06 3.1505E+04 3.1061E+04 0.0000E+00 3.1061E+04 0.0000E+00 0
1380.- 1400. 2540 0.5092E-01 82 3.7227E+06 2.8455E+04 2.8008E+04 0.0000E+00 2.8008E+04 0.0000E+00 0
1400.- 1420. 2526 0.5064E-01 105 3.0341E+06 2.5406E+04 2.4962E+04 0.0000E+00 2.4962E+04 0.0000E+00 0
1420.- 1440. 2479 0.4970E-01 97 2.3824E+06 2.2643E+04 2.2221E+04 0.0000E+00 2.2221E+04 0.0000E+00 0
1440.- 1460. 2246 0.4503E-01 71 1.7635E+06 1.8019E+04 1.7639E+04 0.0000E+00 1.7639E+04 0.0000E+00 0
1460.- 1480. 2010 0.4029E-01 75 1.2566E+06 1.4035E+04 1.3703E+04 0.0000E+00 1.3703E+04 0.0000E+00 0
1480.- 1500. 1629 0.3266E-01 90 8.5493E+05 1.0091E+04 9.8214E+03 0.0000E+00 9.8214E+03 0.0000E+00 0
1500.- 1520. 1309 0.2624E-01 86 5.4627E+05 7.0799E+03 6.8711E+03 0.0000E+00 6.8711E+03 0.0000E+00 0
1520.- 1540. 946 0.1896E-01 110 3.3044E+05 4.7363E+03 4.5856E+03 0.0000E+00 4.5856E+03 0.0000E+00 0
1540.- 1560. 662 0.1327E-01 154 1.7699E+05 2.7057E+03 2.6023E+03 0.0000E+00 2.6023E+03 0.0000E+00 0
1560.- 1580. 384 0.7698E-02 258 8.4919E+04 1.4409E+03 1.3834E+03 0.0000E+00 1.3834E+03 0.0000E+00 0
1580.- 1600. 209 0.4190E-02 814 3.8766E+04 6.8640E+02 6.5507E+02 0.0000E+00 6.5507E+02 0.0000E+00 0
1600.- 1620. 96 0.1925E-02 1964 1.5468E+04 2.8028E+02 2.6644E+02 0.0000E+00 2.6644E+02 0.0000E+00 0
1620.- 1640. 45 0.9021E-03 4099 4.4080E+03 9.8761E+01 9.3036E+01 0.0000E+00 9.3036E+01 0.0000E+00 0
1640.- 1660. 9 0.1804E-03 6839 1.0585E+03 2.0994E+01 1.9625E+01 0.0000E+00 1.9625E+01 0.0000E+00 0
1660.- 1680. 7 0.1403E-03 8876 3.0260E+02 7.1636E+00 6.3849E+00 0.0000E+00 6.3849E+00 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 8966 6.1361E+01 1.4509E+00 1.4410E+00 0.0000E+00 1.4410E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 7105 6.0186E+01 7.6895E-01 7.3596E-01 0.0000E+00 7.3596E-01 0.0000E+00 0
1720.- 1740. 1 0.2005E-04 4501 2.7309E+01 7.9752E-01 6.6839E-01 0.0000E+00 6.6839E-01 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 2415 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 1132 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 560 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 356 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 188 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 127 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 68 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 37 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 19 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- 1980. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1980.- 2000. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2000.- 2020. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- SUT 0 0.0000E+00
4993 1.0000E+00 4993 1.0476E+08 1.6825E+05 1.6717E+05 2.5065E+04 1.4211E+05 1.8396E+04 398
49883 1.0000E+00 49883 1.0473E+09 1.7122E+06 1.7013E+06 2.8198E+05 1.4194E+06 2.0656E+05 4377
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.4467E+05 4.1393E+02 1.3089E+02 2.8304E+02 9.0384E+05 8.5177E+02 5.5854E+02 2.9323E+02 2 5
20.- 40. 4.5317E+05 3.8933E+02 1.1392E+02 2.7542E+02 9.1114E+05 5.8011E+02 2.4695E+02 3.3315E+02 3 4
40.- 60. 4.5939E+05 4.3878E+02 1.1849E+02 3.2029E+02 9.1726E+05 5.4254E+02 1.9672E+02 3.4582E+02 3 3
60.- 80. 4.6079E+05 3.0639E+02 3.8639E+01 2.6775E+02 9.1797E+05 5.8135E+02 2.1347E+02 3.6788E+02 1 3
80.- 100. 4.6195E+05 6.0991E+02 2.5708E+02 3.5283E+02 9.2083E+05 4.8053E+02 1.1276E+02 3.6777E+02 1 1
100.- 120. 4.6249E+05 5.1913E+02 1.7983E+02 3.3930E+02 9.3164E+05 3.3888E+02 0.0000E+00 3.3888E+02 2 0
120.- 140. 4.7215E+05 3.6157E+02 6.9123E+01 2.9245E+02 9.3214E+05 4.0705E+02 0.0000E+00 4.0705E+02 1 0
140.- 160. 4.7130E+05 3.5444E+02 7.4265E+01 2.8017E+02 9.4174E+05 7.4229E+02 3.2285E+02 4.1944E+02 2 3
160.- 180. 4.6678E+05 4.3947E+02 1.0217E+02 3.3730E+02 9.5373E+05 9.2909E+02 4.1630E+02 5.1279E+02 2 2
180.- 200. 4.7699E+05 6.9175E+02 3.3946E+02 3.5229E+02 9.5795E+05 4.6884E+02 8.7893E+01 3.8095E+02 5 1
200.- 220. 4.8208E+05 4.4328E+02 1.3758E+02 3.0570E+02 9.6445E+05 4.6815E+02 8.1807E+01 3.8634E+02 3 2
220.- 240. 4.8231E+05 5.1722E+02 1.1861E+02 3.9861E+02 9.8222E+05 5.1057E+02 5.9538E+01 4.5103E+02 2 1
240.- 260. 4.8851E+05 3.9077E+02 0.0000E+00 3.9077E+02 9.8199E+05 1.2377E+03 7.3354E+02 5.0420E+02 0 6
260.- 280. 4.9753E+05 3.6093E+02 5.9117E+01 3.0181E+02 9.8680E+05 1.0293E+03 5.3884E+02 4.9048E+02 1 5
280.- 300. 4.9429E+05 3.3877E+02 0.0000E+00 3.3877E+02 9.9196E+05 5.8013E+02 1.2320E+02 4.5693E+02 0 2
300.- 320. 5.0292E+05 4.9838E+02 8.6915E+01 4.1147E+02 9.9926E+05 6.0233E+02 1.4615E+02 4.5617E+02 2 3
320.- 340. 5.1446E+05 7.4389E+02 4.6363E+02 2.8027E+02 1.0163E+06 7.8884E+02 3.1086E+02 4.7798E+02 4 3
340.- 360. 5.0501E+05 3.4055E+02 0.0000E+00 3.4055E+02 1.0177E+06 4.8649E+02 1.0030E+02 3.8619E+02 0 1
360.- 380. 5.0689E+05 6.5497E+02 2.8817E+02 3.6680E+02 1.0237E+06 6.9367E+02 1.7235E+02 5.2132E+02 3 2
380.- 400. 5.2284E+05 5.6787E+02 1.7645E+02 3.9142E+02 1.0176E+06 8.9804E+02 3.2721E+02 5.7082E+02 2 2
400.- 420. 5.4931E+04 1.9006E+02 1.3347E+02 5.6597E+01 1.1264E+05 8.5834E+01 0.0000E+00 8.5834E+01 1 0
0.- 20. 4.4996E+06 4.8337E+03 2.1975E+03 2.6362E+03 9.0386E+06 7.1107E+03 3.7313E+03 3.3794E+03 27 34
20.- 40. 4.5405E+06 5.2650E+03 2.3872E+03 2.8778E+03 9.0855E+06 7.2960E+03 3.4553E+03 3.8407E+03 27 34
40.- 60. 4.5926E+06 4.1818E+03 1.2428E+03 2.9389E+03 9.1237E+06 6.1546E+03 2.2976E+03 3.8570E+03 19 27
60.- 80. 4.5868E+06 4.3696E+03 1.4520E+03 2.9175E+03 9.2163E+06 5.5556E+03 1.7769E+03 3.7788E+03 22 21
80.- 100. 4.6232E+06 5.3363E+03 2.4174E+03 2.9189E+03 9.2473E+06 5.9751E+03 2.0864E+03 3.8886E+03 25 23
100.- 120. 4.6477E+06 4.0897E+03 1.2022E+03 2.8875E+03 9.3288E+06 6.0154E+03 2.4182E+03 3.5972E+03 18 20
120.- 140. 4.7104E+06 4.8963E+03 1.8916E+03 3.0046E+03 9.3729E+06 5.6950E+03 1.5952E+03 4.0998E+03 23 24
140.- 160. 4.7181E+06 4.4541E+03 1.4320E+03 3.0221E+03 9.4540E+06 6.4061E+03 2.2903E+03 4.1157E+03 22 25
160.- 180. 4.7688E+06 5.1840E+03 1.7352E+03 3.4488E+03 9.5261E+06 6.4026E+03 1.8301E+03 4.5724E+03 21 21
180.- 200. 4.8102E+06 4.6372E+03 1.5772E+03 3.0600E+03 9.6009E+06 7.1469E+03 2.9942E+03 4.1527E+03 22 29
200.- 220. 4.8412E+06 4.3705E+03 1.3758E+03 2.9947E+03 9.6367E+06 6.3763E+03 2.1922E+03 4.1841E+03 21 23
220.- 240. 4.8491E+06 4.3646E+03 1.1662E+03 3.1984E+03 9.7138E+06 6.8594E+03 2.5143E+03 4.3451E+03 18 31
240.- 260. 4.9044E+06 4.8152E+03 1.4436E+03 3.3716E+03 9.7730E+06 7.4564E+03 3.0909E+03 4.3655E+03 18 32
260.- 280. 4.9216E+06 5.0073E+03 1.7746E+03 3.2327E+03 9.8371E+06 6.0083E+03 1.3958E+03 4.6125E+03 22 21
280.- 300. 4.9655E+06 4.4182E+03 1.0456E+03 3.3726E+03 9.9146E+06 6.5515E+03 2.2512E+03 4.3002E+03 13 30
300.- 320. 5.0166E+06 4.7463E+03 1.1404E+03 3.6058E+03 1.0006E+07 7.4495E+03 2.5724E+03 4.8772E+03 16 25
320.- 340. 5.0366E+06 4.6657E+03 1.5031E+03 3.1627E+03 1.0095E+07 7.6534E+03 2.9224E+03 4.7309E+03 20 40
340.- 360. 5.0882E+06 4.7906E+03 1.3065E+03 3.4842E+03 1.0156E+07 6.8879E+03 2.0083E+03 4.8796E+03 14 19
360.- 380. 5.0948E+06 6.5123E+03 2.8198E+03 3.6925E+03 1.0221E+07 7.6259E+03 2.5098E+03 5.1161E+03 33 29
380.- 400. 5.1562E+06 5.8026E+03 2.2088E+03 3.5938E+03 1.0291E+07 7.7072E+03 2.3845E+03 5.3227E+03 31 32
400.- 420. 5.5052E+05 5.6813E+02 1.8570E+02 3.8243E+02 1.1180E+06 9.8431E+02 4.6301E+02 5.2130E+02 2 4
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
9.6815E+06 9.5714E+03 2.8878E+03 6.6836E+03 1.9383E+07 1.3304E+04 4.7493E+03 8.5543E+03 40 49
9.6923E+07 9.7309E+04 3.3505E+04 6.3804E+04 1.9376E+08 1.3532E+05 4.8780E+04 8.6538E+04 434 544
DAMAGE IN LAYER 1 : 2.2599E+04
DAMAGE IN LAYER 1 : 2.3109E+05
DAMAGE IN LAYER 2 : 3.6926E+04
DAMAGE IN LAYER 2 : 3.8696E+05
DAMAGE IN LAYER 3 : 2.9613E+04
DAMAGE IN LAYER 3 : 3.0580E+05
DAMAGE IN LAYER 4 : 7.8035E+04
DAMAGE IN LAYER 4 : 7.7748E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.4000E-03 ENERGY REFL.COEF.= 5.3146E-04 REL.MEAN ENERGY = 3.7961E-01 MEAN ENERGY = 7.9719E+03
PART.REFL.COEF.= 2.3400E-03 ENERGY REFL.COEF.= 8.6810E-04 REL.MEAN ENERGY = 3.7098E-01 MEAN ENERGY = 7.7907E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 7.9719E+03 3.6039E+07 1.1460E-01 1.5696E+00 6.0032E+03 2.2690E+03 1.0280E+07 5.9517E-01
PATHLENGTH 8.7927E+02 1.6394E+05 -8.9754E-02 1.6467E+00 4.0489E+02 1.5304E+02 4.9830E+04 5.7208E-01
ELASTIC LOSS 2.8264E+02 9.2851E+03 9.6359E+01 1.3766E+01
INEL. LOSS 1.3014E+04 4.1063E+07 6.4081E+03 9.1544E+02
ENERGY 7.7907E+03 4.2306E+07 5.2816E-01 1.8851E+00 6.5043E+03 6.0132E+02 3.6796E+06 1.5413E-01
PATHLENGTH 8.8808E+02 1.9517E+05 -4.3517E-01 2.0128E+00 4.4179E+02 4.0843E+01 1.8159E+04 1.4433E-01
ELASTIC LOSS 2.5711E+02 8.6790E+03 9.3161E+01 7.9625E-01
INEL. LOSS 1.2906E+04 4.2421E+07 6.5131E+03 5.5668E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 7.9719E+03 9.9589E+07 1.3933E+12 2.0609E+16 3.1707E+20 5.0261E+24
LOGENERGY 3.6564E+00 1.3691E+01 5.2265E+01 2.0262E+02 7.9525E+02 3.1517E+03
PATHLENGTH 8.7927E+02 9.3705E+05 1.1063E+09 1.3815E+12 1.7826E+15 2.3473E+18
ENERGY 7.7907E+03 1.0300E+08 1.6070E+12 2.6993E+16 4.7270E+20 8.5062E+24
LOGENERGY 3.6226E+00 1.3491E+01 5.1306E+01 1.9830E+02 7.7624E+02 3.0700E+03
PATHLENGTH 8.8808E+02 9.8386E+05 1.1829E+09 1.4890E+12 1.9345E+15 2.5756E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -369,5 +373,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 0 1 0 0 0 0 1 0 0 1 1 1 1 0 1
0.000 0.000 0.000 0.000 0.000 0.000 2.857 0.000 0.000 0.000 0.000 2.857 0.000 0.000 2.857 2.857 2.857 2.857 0.000 2.857
1 1 2 2 5 8 6 4 7 4 4 6 12 5 8 7 7 7 9 12
0.171 0.171 0.342 0.342 0.855 1.368 1.026 0.684 1.197 0.684 0.684 1.026 2.051 0.855 1.368 1.197 1.197 1.197 1.538 2.051
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.rge
+88 -85
View File
@@ -1,91 +1,91 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 1
90.0000 0
110.0000 1
130.0000 1
150.0000 1
170.0000 2
190.0000 1
210.0000 1
230.0000 0
250.0000 2
270.0000 1
290.0000 1
310.0000 2
330.0000 3
350.0000 0
370.0000 2
390.0000 1
410.0000 2
430.0000 1
450.0000 6
470.0000 4
490.0000 4
510.0000 10
530.0000 3
550.0000 7
570.0000 10
590.0000 9
610.0000 9
630.0000 22
650.0000 11
670.0000 16
690.0000 25
710.0000 7
730.0000 11
750.0000 23
770.0000 10
790.0000 12
810.0000 23
830.0000 16
850.0000 16
870.0000 29
890.0000 30
910.0000 28
930.0000 30
950.0000 26
970.0000 41
990.0000 36
1010.0000 55
1030.0000 64
1050.0000 65
1070.0000 81
1090.0000 77
1110.0000 84
1130.0000 113
1150.0000 107
1170.0000 122
1190.0000 136
1210.0000 157
1230.0000 174
1250.0000 190
1270.0000 222
1290.0000 204
1310.0000 196
1330.0000 228
1350.0000 275
1370.0000 228
1390.0000 258
1410.0000 239
1430.0000 237
1450.0000 226
1470.0000 236
1490.0000 169
1510.0000 129
1530.0000 81
1550.0000 67
1570.0000 33
1590.0000 27
1610.0000 9
1630.0000 5
1650.0000 0
1670.0000 1
10.0000 1
30.0000 2
50.0000 4
70.0000 6
90.0000 3
110.0000 9
130.0000 7
150.0000 9
170.0000 8
190.0000 6
210.0000 14
230.0000 7
250.0000 13
270.0000 17
290.0000 19
310.0000 9
330.0000 21
350.0000 20
370.0000 18
390.0000 19
410.0000 23
430.0000 30
450.0000 45
470.0000 62
490.0000 70
510.0000 76
530.0000 60
550.0000 74
570.0000 92
590.0000 108
610.0000 131
630.0000 153
650.0000 212
670.0000 186
690.0000 237
710.0000 118
730.0000 114
750.0000 154
770.0000 161
790.0000 196
810.0000 198
830.0000 194
850.0000 219
870.0000 266
890.0000 270
910.0000 308
930.0000 336
950.0000 332
970.0000 359
990.0000 382
1010.0000 546
1030.0000 620
1050.0000 673
1070.0000 768
1090.0000 750
1110.0000 861
1130.0000 1117
1150.0000 1083
1170.0000 1228
1190.0000 1334
1210.0000 1450
1230.0000 1645
1250.0000 1823
1270.0000 1949
1290.0000 2030
1310.0000 2194
1330.0000 2341
1350.0000 2460
1370.0000 2535
1390.0000 2540
1410.0000 2526
1430.0000 2479
1450.0000 2246
1470.0000 2010
1490.0000 1629
1510.0000 1309
1530.0000 946
1550.0000 662
1570.0000 384
1590.0000 209
1610.0000 96
1630.0000 45
1650.0000 9
1670.0000 7
1690.0000 0
1710.0000 0
1730.0000 0
1730.0000 1
1750.0000 0
1770.0000 0
1790.0000 0
@@ -97,3 +97,6 @@
1910.0000 0
1930.0000 0
1950.0000 0
1970.0000 0
1990.0000 0
2010.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
21.00 0.45 0.00 15.00 5000 4993 7 0 5000 0 0.1267E+04 0.2162E+03 0.7972E+04 0.6003E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 21 139 338 4495
21.00 0.45 0.00 15.00 50000 49883 117 0 50000 0 0.1264E+04 0.2214E+03 0.7791E+04 0.6504E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 212 1559 3607 44505
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 23000 450 0 15 0.5 0.0 0.0 0.0
5000 78752 78752 78752 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78752 78752 78752 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.out
+173 -168
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:30
Start: 19.Jun. 2026 20:10:18
End: 18.Jun. 2026 09:50:34
End: 19.Jun. 2026 20:10:57
Simulation needed for 5000 projectiles 4 seconds
Simulation needed for 50000 projectiles 39 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 23000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78752.00 78752.00 78752.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78752.00 78752.00 78752.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
59264 0 0 0 0 0 0 0 0
588419 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,216 +162,220 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4984 ENERGY=0.1146E+09 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.1298E+06 EV
IMPLANTED PARTICLES= 49880 ENERGY=0.1147E+10 EV
BACKSCATTERED PARTICLES= 120 ENERGY=0.1134E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 11 11
IMPLANTED PARTICLES (LAYER 1)= 157 157
IMPLANTED PARTICLES (LAYER 2)= 82 82
IMPLANTED PARTICLES (LAYER 2)= 1016 1016
IMPLANTED PARTICLES (LAYER 3)= 178 178
IMPLANTED PARTICLES (LAYER 3)= 1853 1853
IMPLANTED PARTICLES (LAYER 4)= 4713 4713
IMPLANTED PARTICLES (LAYER 4)= 46854 46854
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 751.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.092
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.544
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 751.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.096
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.554
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.4270E+03 5.4366E+04 -1.5449E+00 6.3525E+00 2.3317E+02 3.3028E+00 1.7816E+03 5.4374E-02
SPREAD 5.0936E+02 6.9237E+04 4.8281E-01 2.7213E+00 2.6313E+02 3.7272E+00 1.2867E+03 2.6358E-02
PATHLENGTH 1.8532E+03 3.8595E+03 -2.3547E+00 1.7160E+01 6.2125E+01 8.7998E-01 2.1977E+02 1.5950E-01
ELASTIC LOSS 3.4219E+01 6.5275E+02 2.5549E+01 5.1262E-03
INEL. LOSS 2.2974E+04 2.0393E+05 4.5158E+02 9.0607E-02
PENETRATION 1.4206E+03 5.8247E+04 -1.6002E+00 6.4830E+00 2.4134E+02 1.0806E+00 6.1069E+02 1.6826E-02
SPREAD 5.0921E+02 6.9527E+04 4.9545E-01 2.7430E+00 2.6368E+02 1.1806E+00 4.1100E+02 8.3680E-03
PATHLENGTH 1.8514E+03 4.2603E+03 -2.5393E+00 1.7865E+01 6.5271E+01 2.9225E-01 7.8338E+01 4.5992E-02
ELASTIC LOSS 3.4861E+01 7.1226E+02 2.6688E+01 5.3505E-04
INEL. LOSS 2.2965E+04 2.0126E+05 4.4862E+02 8.9941E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.6288E-02 1.1123E+00 1.6097E+02 4.3739E+04 1.0546E+00 5.4413E-04 1.2001E-01 1.5333E+01
WEAK EL.LOSS 2.7172E-04 1.6701E-06 1.0090E+01 1.7232E+02 1.2923E-03 6.6676E-07 1.1279E-08 9.6437E-02
INELAST.LOSS 3.0541E+01 9.6770E+01 -1.1773E+00 4.2951E+00 9.8372E+00 5.0753E-03 9.0629E-02 8.5524E-04
SUBTHR.LOSS 3.8175E-02 1.9163E-01 3.2911E+01 1.4548E+03 4.3776E-01 2.2587E-04 3.7700E-03 2.6633E-01
ELAST.LOSS 4.6961E-02 1.1616E+00 1.6006E+02 4.3800E+04 1.0778E+00 1.7587E-04 3.9670E-02 5.5584E+00
WEAK EL.LOSS 2.7514E-04 1.7546E-06 1.0543E+01 1.8876E+02 1.3246E-03 2.1615E-07 3.9232E-09 3.1232E-02
INELAST.LOSS 3.0544E+01 9.6938E+01 -1.1752E+00 4.2879E+00 9.8457E+00 1.6066E-03 2.8683E-02 2.7003E-04
SUBTHR.LOSS 3.8496E-02 1.9466E-01 3.2956E+01 1.4596E+03 4.4120E-01 7.2000E-05 1.2132E-03 8.4320E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.4270E+03 2.0907E+06 3.1189E+09 4.7177E+12 7.2167E+15 1.1145E+19
PENETRATION 1.4206E+03 2.0763E+06 3.0925E+09 4.6719E+12 7.1388E+15 1.1013E+19
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.3036E+06 1.2463E+03 1.2455E+03 5.1502E+02 7.3048E+02 3.7787E+02 8
20.- 40. 0 0.0000E+00 0 1.3125E+06 8.6856E+02 8.6772E+02 2.4686E+02 6.2086E+02 1.8727E+02 4
40.- 60. 1 0.2006E-03 0 1.3173E+06 8.0845E+02 8.0743E+02 1.3941E+02 6.6803E+02 1.0407E+02 2
60.- 80. 0 0.0000E+00 0 1.3277E+06 8.4533E+02 8.4461E+02 2.4117E+02 6.0344E+02 1.7780E+02 3
80.- 100. 0 0.0000E+00 0 1.3330E+06 1.6776E+03 1.6769E+03 1.1122E+03 5.6471E+02 7.6516E+02 6
100.- 120. 0 0.0000E+00 0 1.3406E+06 8.1095E+02 8.1021E+02 1.6838E+02 6.4183E+02 1.1971E+02 2
120.- 140. 0 0.0000E+00 0 1.3503E+06 1.4933E+03 1.4926E+03 8.6562E+02 6.2697E+02 6.0317E+02 8
140.- 160. 1 0.2006E-03 0 1.3598E+06 6.8275E+02 6.8149E+02 9.9501E+01 5.8199E+02 7.6678E+01 2
160.- 180. 1 0.2006E-03 0 1.3666E+06 8.3542E+02 8.3415E+02 1.9125E+02 6.4290E+02 1.4511E+02 4
180.- 200. 0 0.0000E+00 0 1.3791E+06 8.1931E+02 8.1849E+02 1.5690E+02 6.6160E+02 1.2000E+02 3
200.- 220. 0 0.0000E+00 0 1.3850E+06 1.3903E+03 1.3892E+03 6.2352E+02 7.6564E+02 4.2313E+02 6
220.- 240. 3 0.6019E-03 0 1.4014E+06 1.1246E+03 1.1229E+03 3.4609E+02 7.7681E+02 2.4889E+02 2
240.- 260. 0 0.0000E+00 0 1.4042E+06 1.0748E+03 1.0739E+03 4.4016E+02 6.3370E+02 3.0755E+02 4
260.- 280. 0 0.0000E+00 0 1.4168E+06 1.0008E+03 9.9995E+02 3.9334E+02 6.0661E+02 2.9622E+02 7
280.- 300. 1 0.2006E-03 0 1.4417E+06 2.0515E+03 2.0503E+03 1.2542E+03 7.9607E+02 8.7390E+02 10
300.- 320. 0 0.0000E+00 0 1.4590E+06 9.9683E+02 9.9587E+02 2.6597E+02 7.2990E+02 1.9912E+02 5
320.- 340. 0 0.0000E+00 0 1.4414E+06 8.3571E+02 8.3483E+02 1.9925E+02 6.3558E+02 1.4802E+02 4
340.- 360. 0 0.0000E+00 0 1.4517E+06 1.3276E+03 1.3265E+03 5.5664E+02 7.6989E+02 4.0840E+02 9
360.- 380. 2 0.4013E-03 0 1.4649E+06 1.0984E+03 1.0968E+03 2.7780E+02 8.1896E+02 2.0209E+02 3
380.- 400. 2 0.4013E-03 0 1.4733E+06 1.1691E+03 1.1673E+03 4.4246E+02 7.2486E+02 3.0781E+02 4
400.- 420. 1 0.2006E-03 0 2.0436E+06 2.3335E+03 2.3297E+03 1.2729E+03 1.0569E+03 8.5173E+02 7
420.- 440. 3 0.6019E-03 0 2.1221E+06 2.4209E+03 2.4167E+03 1.1129E+03 1.3039E+03 7.6491E+02 11
440.- 460. 6 0.1204E-02 0 2.1469E+06 1.8069E+03 1.8013E+03 4.1073E+02 1.3906E+03 3.1106E+02 8
460.- 480. 2 0.4013E-03 0 2.1642E+06 1.6380E+03 1.6339E+03 4.3881E+02 1.1950E+03 3.3315E+02 8
480.- 500. 3 0.6019E-03 0 2.1842E+06 1.8574E+03 1.8527E+03 6.4815E+02 1.2046E+03 4.7457E+02 9
500.- 520. 7 0.1404E-02 0 2.2168E+06 2.1883E+03 2.1811E+03 8.3837E+02 1.3427E+03 6.0230E+02 10
520.- 540. 3 0.6019E-03 0 2.2352E+06 2.1572E+03 2.1523E+03 6.8889E+02 1.4634E+03 5.0610E+02 8
540.- 560. 4 0.8026E-03 0 2.2580E+06 1.9989E+03 1.9933E+03 5.3941E+02 1.4539E+03 3.9873E+02 8
560.- 580. 5 0.1003E-02 0 2.2746E+06 2.0104E+03 2.0040E+03 5.1119E+02 1.4928E+03 3.8073E+02 9
580.- 600. 9 0.1806E-02 0 2.2933E+06 2.8372E+03 2.8286E+03 1.2144E+03 1.6142E+03 8.8252E+02 13
600.- 620. 6 0.1204E-02 0 2.3030E+06 2.6986E+03 2.6914E+03 9.0641E+02 1.7850E+03 6.6182E+02 11
620.- 640. 7 0.1404E-02 0 2.3153E+06 2.2464E+03 2.2386E+03 6.7659E+02 1.5620E+03 5.1095E+02 14
640.- 660. 4 0.8026E-03 0 2.3475E+06 2.7657E+03 2.7587E+03 1.1544E+03 1.6043E+03 8.3272E+02 15
660.- 680. 11 0.2207E-02 0 2.3742E+06 2.3928E+03 2.3824E+03 5.9001E+02 1.7924E+03 4.4311E+02 11
680.- 700. 11 0.2207E-02 0 2.3895E+06 2.5650E+03 2.5525E+03 5.8928E+02 1.9632E+03 4.4114E+02 11
700.- 720. 6 0.1204E-02 0 1.4423E+06 1.4412E+03 1.4386E+03 3.2228E+02 1.1163E+03 2.4756E+02 6
720.- 740. 9 0.1806E-02 0 1.3687E+06 1.2089E+03 1.2067E+03 1.9820E+02 1.0085E+03 1.5494E+02 4
740.- 760. 5 0.1003E-02 0 1.3704E+06 1.3610E+03 1.3588E+03 3.7040E+02 9.8838E+02 2.6708E+02 5
760.- 780. 4 0.8026E-03 0 1.3815E+06 1.1375E+03 1.1358E+03 2.0136E+02 9.3440E+02 1.5347E+02 4
780.- 800. 16 0.3210E-02 0 1.3811E+06 1.3783E+03 1.3741E+03 2.2541E+02 1.1487E+03 1.7101E+02 6
800.- 820. 8 0.1605E-02 0 1.3858E+06 1.2674E+03 1.2647E+03 2.5125E+02 1.0135E+03 1.8397E+02 4
820.- 840. 13 0.2608E-02 0 1.3833E+06 1.4054E+03 1.4019E+03 2.7845E+02 1.1235E+03 2.1319E+02 7
840.- 860. 14 0.2809E-02 0 1.3915E+06 1.3332E+03 1.3292E+03 1.9251E+02 1.1367E+03 1.3795E+02 3
860.- 880. 12 0.2408E-02 0 1.3900E+06 1.5769E+03 1.5732E+03 2.3199E+02 1.3412E+03 1.7577E+02 4
880.- 900. 11 0.2207E-02 0 1.3778E+06 1.3170E+03 1.3138E+03 6.5260E+01 1.2485E+03 5.0486E+01 2
900.- 920. 16 0.3210E-02 0 1.3657E+06 1.6244E+03 1.6203E+03 2.7185E+02 1.3485E+03 2.0467E+02 5
920.- 940. 12 0.2408E-02 0 1.3666E+06 1.7104E+03 1.7061E+03 3.3301E+02 1.3731E+03 2.4473E+02 6
940.- 960. 13 0.2608E-02 0 1.3610E+06 1.9066E+03 1.9028E+03 5.1159E+02 1.3912E+03 3.4420E+02 5
960.- 980. 21 0.4213E-02 0 1.3650E+06 1.6380E+03 1.6323E+03 1.0469E+02 1.5276E+03 7.9477E+01 2
980.- 1000. 18 0.3612E-02 0 1.3666E+06 2.0889E+03 2.0836E+03 4.2649E+02 1.6571E+03 3.2138E+02 9
1000.- 1020. 30 0.6019E-02 0 1.4640E+06 2.3282E+03 2.3221E+03 6.8142E+02 1.6407E+03 5.1133E+02 11
1020.- 1040. 33 0.6621E-02 0 1.4730E+06 2.0134E+03 2.0072E+03 3.9309E+02 1.6141E+03 2.9751E+02 8
1040.- 1060. 22 0.4414E-02 0 1.4613E+06 2.2647E+03 2.2592E+03 5.3165E+02 1.7275E+03 4.0372E+02 11
1060.- 1080. 24 0.4815E-02 0 1.4521E+06 2.0729E+03 2.0674E+03 2.8009E+02 1.7873E+03 2.1358E+02 6
1080.- 1100. 40 0.8026E-02 0 1.4410E+06 2.3453E+03 2.3381E+03 5.1916E+02 1.8189E+03 3.9288E+02 10
1100.- 1120. 36 0.7223E-02 0 1.4282E+06 2.3995E+03 2.3921E+03 2.8287E+02 2.1093E+03 2.1543E+02 6
1120.- 1140. 50 0.1003E-01 0 1.4237E+06 2.7086E+03 2.6988E+03 4.8362E+02 2.2152E+03 3.6777E+02 10
1140.- 1160. 51 0.1023E-01 0 1.4093E+06 2.6293E+03 2.6191E+03 3.0648E+02 2.3126E+03 2.3396E+02 7
1160.- 1180. 64 0.1284E-01 0 1.3899E+06 2.7669E+03 2.7547E+03 4.7990E+02 2.2748E+03 3.6695E+02 11
1180.- 1200. 59 0.1184E-01 0 1.3720E+06 2.5461E+03 2.5342E+03 1.8479E+02 2.3495E+03 1.4247E+02 5
1200.- 1220. 81 0.1625E-01 0 1.3535E+06 3.0371E+03 3.0225E+03 2.1625E+02 2.8062E+03 1.6553E+02 5
1220.- 1240. 72 0.1445E-01 0 1.3419E+06 3.1573E+03 3.1429E+03 4.0804E+02 2.7349E+03 3.1035E+02 9
1240.- 1260. 87 0.1746E-01 0 1.3019E+06 3.2593E+03 3.2426E+03 1.6972E+02 3.0728E+03 1.3006E+02 4
1260.- 1280. 81 0.1625E-01 0 1.2556E+06 3.0609E+03 3.0448E+03 9.0838E+01 2.9540E+03 6.9257E+01 2
1280.- 1300. 107 0.2147E-01 0 1.2248E+06 3.3154E+03 3.2955E+03 2.5024E+02 3.0453E+03 1.9329E+02 7
1300.- 1320. 104 0.2087E-01 0 1.1762E+06 3.5415E+03 3.5219E+03 2.5350E+02 3.2684E+03 1.9574E+02 7
1320.- 1340. 119 0.2388E-01 0 1.1129E+06 3.6432E+03 3.6206E+03 3.1004E+02 3.3105E+03 2.3865E+02 8
1340.- 1360. 131 0.2628E-01 0 1.0762E+06 3.6168E+03 3.5928E+03 2.5112E+02 3.3417E+03 1.9255E+02 6
1360.- 1380. 141 0.2829E-01 0 1.0199E+06 3.3387E+03 3.3121E+03 1.1964E+02 3.1924E+03 9.1940E+01 3
1380.- 1400. 166 0.3331E-01 0 9.6021E+05 3.4636E+03 3.4333E+03 7.3242E+01 3.3601E+03 5.6531E+01 2
1400.- 1420. 176 0.3531E-01 10 8.8481E+05 3.6022E+03 3.5696E+03 0.0000E+00 3.5696E+03 0.0000E+00 0
1420.- 1440. 179 0.3591E-01 7 8.3423E+05 3.7811E+03 3.7472E+03 6.8250E+01 3.6790E+03 5.2842E+01 2
1440.- 1460. 196 0.3933E-01 7 7.6231E+05 3.7462E+03 3.7110E+03 3.0551E+01 3.6804E+03 2.3769E+01 1
1460.- 1480. 208 0.4173E-01 4 6.8373E+05 3.3558E+03 3.3187E+03 0.0000E+00 3.3187E+03 0.0000E+00 0
1480.- 1500. 209 0.4193E-01 3 6.0590E+05 3.3518E+03 3.3152E+03 0.0000E+00 3.3152E+03 0.0000E+00 0
1500.- 1520. 205 0.4113E-01 7 5.3125E+05 3.0542E+03 3.0159E+03 0.0000E+00 3.0159E+03 0.0000E+00 0
1520.- 1540. 215 0.4314E-01 2 4.6505E+05 2.8575E+03 2.8207E+03 0.0000E+00 2.8207E+03 0.0000E+00 0
1540.- 1560. 200 0.4013E-01 4 4.0758E+05 2.7446E+03 2.7076E+03 0.0000E+00 2.7076E+03 0.0000E+00 0
1560.- 1580. 238 0.4775E-01 2 3.4355E+05 2.5585E+03 2.5154E+03 0.0000E+00 2.5154E+03 0.0000E+00 0
1580.- 1600. 247 0.4956E-01 9 2.8060E+05 2.3945E+03 2.3527E+03 0.0000E+00 2.3527E+03 0.0000E+00 0
1600.- 1620. 235 0.4715E-01 3 2.2155E+05 2.0190E+03 1.9789E+03 0.0000E+00 1.9789E+03 0.0000E+00 0
1620.- 1640. 230 0.4615E-01 4 1.6376E+05 1.6873E+03 1.6489E+03 0.0000E+00 1.6489E+03 0.0000E+00 0
1640.- 1660. 194 0.3892E-01 5 1.1899E+05 1.2438E+03 1.2121E+03 0.0000E+00 1.2121E+03 0.0000E+00 0
1660.- 1680. 146 0.2929E-01 4 8.1383E+04 9.6993E+02 9.4559E+02 0.0000E+00 9.4559E+02 0.0000E+00 0
1680.- 1700. 115 0.2307E-01 4 5.0146E+04 6.1784E+02 5.9914E+02 0.0000E+00 5.9914E+02 0.0000E+00 0
1700.- 1720. 99 0.1986E-01 7 3.2046E+04 4.4329E+02 4.2795E+02 0.0000E+00 4.2795E+02 0.0000E+00 0
1720.- 1740. 46 0.9230E-02 21 1.6417E+04 2.2197E+02 2.1403E+02 0.0000E+00 2.1403E+02 0.0000E+00 0
1740.- 1760. 38 0.7624E-02 47 9.1147E+03 1.5804E+02 1.5219E+02 0.0000E+00 1.5219E+02 0.0000E+00 0
1760.- 1780. 21 0.4213E-02 125 4.2972E+03 7.7642E+01 7.4401E+01 0.0000E+00 7.4401E+01 0.0000E+00 0
1780.- 1800. 12 0.2408E-02 303 1.9234E+03 3.6182E+01 3.4504E+01 0.0000E+00 3.4504E+01 0.0000E+00 0
1800.- 1820. 4 0.8026E-03 509 6.3523E+02 1.0266E+01 9.7685E+00 0.0000E+00 9.7685E+00 0.0000E+00 0
1820.- 1840. 1 0.2006E-03 696 1.4214E+02 1.9488E+00 1.8457E+00 0.0000E+00 1.8457E+00 0.0000E+00 0
1840.- 1860. 1 0.2006E-03 870 3.7835E+01 1.2345E+00 1.1176E+00 0.0000E+00 1.1176E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 826 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 650 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 429 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 233 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 95 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- 1980. 0 0.0000E+00 54 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1980.- 2000. 0 0.0000E+00 21 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2000.- 2020. 0 0.0000E+00 13 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 3 0.6014E-04 0 1.3035E+07 9.7073E+03 9.6995E+03 3.5503E+03 6.1492E+03 2.4796E+03 39
20.- 40. 1 0.2005E-04 0 1.3116E+07 1.0005E+04 9.9966E+03 3.6115E+03 6.3851E+03 2.6140E+03 44
40.- 60. 4 0.8019E-04 0 1.3199E+07 8.8312E+03 8.8223E+03 2.6236E+03 6.1987E+03 1.8985E+03 31
60.- 80. 5 0.1002E-03 0 1.3284E+07 8.3702E+03 8.3610E+03 2.1604E+03 6.2006E+03 1.5474E+03 26
80.- 100. 4 0.8019E-04 0 1.3362E+07 1.2408E+04 1.2399E+04 6.0126E+03 6.3860E+03 4.1617E+03 47
100.- 120. 9 0.1804E-03 0 1.3439E+07 1.1367E+04 1.1356E+04 4.6246E+03 6.7316E+03 3.3036E+03 52
120.- 140. 2 0.4010E-04 0 1.3521E+07 1.0160E+04 1.0151E+04 4.0344E+03 6.1169E+03 2.9401E+03 53
140.- 160. 10 0.2005E-03 0 1.3605E+07 1.2766E+04 1.2754E+04 5.9795E+03 6.7750E+03 4.1586E+03 56
160.- 180. 7 0.1403E-03 0 1.3694E+07 1.0860E+04 1.0849E+04 4.0392E+03 6.8097E+03 2.8474E+03 38
180.- 200. 6 0.1203E-03 0 1.3782E+07 1.1060E+04 1.1048E+04 4.1901E+03 6.8581E+03 2.9893E+03 44
200.- 220. 10 0.2005E-03 0 1.3872E+07 1.1368E+04 1.1356E+04 4.3486E+03 7.0073E+03 3.1350E+03 56
220.- 240. 11 0.2205E-03 0 1.3964E+07 1.0928E+04 1.0915E+04 3.9043E+03 7.0105E+03 2.8132E+03 46
240.- 260. 11 0.2205E-03 0 1.4065E+07 1.2410E+04 1.2396E+04 5.4338E+03 6.9623E+03 3.6778E+03 51
260.- 280. 7 0.1403E-03 0 1.4163E+07 1.1033E+04 1.1022E+04 3.9929E+03 7.0287E+03 2.8844E+03 50
280.- 300. 10 0.2005E-03 0 1.4249E+07 1.1508E+04 1.1495E+04 4.3922E+03 7.1026E+03 3.1337E+03 50
300.- 320. 12 0.2406E-03 0 1.4369E+07 1.1642E+04 1.1628E+04 4.1886E+03 7.4390E+03 3.0147E+03 51
320.- 340. 11 0.2205E-03 0 1.4455E+07 1.1472E+04 1.1457E+04 4.4493E+03 7.0082E+03 3.1847E+03 55
340.- 360. 3 0.6014E-04 0 1.4561E+07 1.1760E+04 1.1748E+04 4.2727E+03 7.4754E+03 3.0203E+03 52
360.- 380. 15 0.3007E-03 0 1.4664E+07 1.2632E+04 1.2615E+04 4.5519E+03 8.0635E+03 3.2859E+03 55
380.- 400. 16 0.3208E-03 0 1.4756E+07 1.3441E+04 1.3424E+04 5.4618E+03 7.9625E+03 3.8415E+03 60
400.- 420. 22 0.4411E-03 0 2.0554E+07 1.9113E+04 1.9076E+04 7.5618E+03 1.1514E+04 5.3588E+03 80
420.- 440. 27 0.5413E-03 0 2.1330E+07 1.8783E+04 1.8743E+04 6.5468E+03 1.2196E+04 4.7296E+03 79
440.- 460. 36 0.7217E-03 0 2.1533E+07 1.7571E+04 1.7526E+04 5.0489E+03 1.2478E+04 3.6311E+03 62
460.- 480. 24 0.4812E-03 0 2.1745E+07 2.1010E+04 2.0965E+04 8.2844E+03 1.2681E+04 5.9009E+03 88
480.- 500. 48 0.9623E-03 0 2.1988E+07 1.9235E+04 1.9178E+04 6.1322E+03 1.3046E+04 4.4455E+03 80
500.- 520. 51 0.1022E-02 0 2.2195E+07 2.0784E+04 2.0720E+04 7.4645E+03 1.3255E+04 5.2934E+03 86
520.- 540. 43 0.8621E-03 0 2.2380E+07 2.0190E+04 2.0131E+04 6.2636E+03 1.3867E+04 4.5439E+03 84
540.- 560. 54 0.1083E-02 0 2.2634E+07 2.1443E+04 2.1378E+04 6.7979E+03 1.4580E+04 4.9024E+03 87
560.- 580. 70 0.1403E-02 0 2.2825E+07 2.2959E+04 2.2879E+04 7.9164E+03 1.4963E+04 5.7454E+03 106
580.- 600. 85 0.1704E-02 0 2.3060E+07 2.6618E+04 2.6532E+04 1.0630E+04 1.5901E+04 7.6846E+03 130
600.- 620. 92 0.1844E-02 0 2.3200E+07 2.3465E+04 2.3370E+04 7.0291E+03 1.6341E+04 5.1391E+03 101
620.- 640. 89 0.1784E-02 0 2.3390E+07 2.5089E+04 2.4992E+04 8.2126E+03 1.6779E+04 6.0016E+03 119
640.- 660. 116 0.2326E-02 0 2.3594E+07 2.6819E+04 2.6701E+04 8.5573E+03 1.8143E+04 6.1503E+03 104
660.- 680. 119 0.2386E-02 0 2.3766E+07 2.6903E+04 2.6779E+04 7.8693E+03 1.8910E+04 5.7224E+03 112
680.- 700. 140 0.2807E-02 0 2.3962E+07 2.6636E+04 2.6502E+04 6.9744E+03 1.9528E+04 5.1359E+03 109
700.- 720. 65 0.1303E-02 0 1.4415E+07 1.4672E+04 1.4645E+04 3.8046E+03 1.0841E+04 2.7852E+03 57
720.- 740. 78 0.1564E-02 0 1.3651E+07 1.2970E+04 1.2947E+04 2.5757E+03 1.0371E+04 1.9357E+03 46
740.- 760. 80 0.1604E-02 0 1.3734E+07 1.3115E+04 1.3091E+04 2.4533E+03 1.0638E+04 1.8249E+03 42
760.- 780. 74 0.1484E-02 0 1.3807E+07 1.3772E+04 1.3747E+04 2.9890E+03 1.0758E+04 2.1800E+03 49
780.- 800. 89 0.1784E-02 0 1.3791E+07 1.5280E+04 1.5252E+04 4.1413E+03 1.1111E+04 3.0354E+03 68
800.- 820. 105 0.2105E-02 0 1.3877E+07 1.4566E+04 1.4535E+04 3.5923E+03 1.0942E+04 2.6468E+03 60
820.- 840. 124 0.2486E-02 0 1.3878E+07 1.5622E+04 1.5589E+04 3.8920E+03 1.1697E+04 2.8424E+03 61
840.- 860. 132 0.2646E-02 0 1.3876E+07 1.5454E+04 1.5416E+04 3.3042E+03 1.2111E+04 2.4572E+03 58
860.- 880. 139 0.2787E-02 0 1.3880E+07 1.5676E+04 1.5637E+04 2.9517E+03 1.2685E+04 2.1823E+03 50
880.- 900. 128 0.2566E-02 0 1.3831E+07 1.7252E+04 1.7213E+04 4.0828E+03 1.3130E+04 3.0621E+03 78
900.- 920. 134 0.2686E-02 0 1.3779E+07 1.6713E+04 1.6673E+04 3.3016E+03 1.3371E+04 2.4673E+03 57
920.- 940. 162 0.3248E-02 0 1.3724E+07 1.7239E+04 1.7193E+04 3.6383E+03 1.3554E+04 2.7091E+03 67
940.- 960. 160 0.3208E-02 0 1.3714E+07 1.8795E+04 1.8748E+04 4.2188E+03 1.4529E+04 3.0920E+03 70
960.- 980. 191 0.3829E-02 0 1.3636E+07 1.9019E+04 1.8966E+04 4.4845E+03 1.4481E+04 3.3019E+03 79
980.- 1000. 192 0.3849E-02 0 1.3523E+07 2.0369E+04 2.0315E+04 4.9233E+03 1.5391E+04 3.5571E+03 77
1000.- 1020. 264 0.5293E-02 0 1.4524E+07 2.1889E+04 2.1835E+04 4.7476E+03 1.7087E+04 3.5982E+03 94
1020.- 1040. 302 0.6055E-02 0 1.4631E+07 2.1813E+04 2.1753E+04 4.2139E+03 1.7539E+04 3.1974E+03 86
1040.- 1060. 300 0.6014E-02 0 1.4556E+07 2.3116E+04 2.3055E+04 4.4682E+03 1.8587E+04 3.3931E+03 92
1060.- 1080. 318 0.6375E-02 0 1.4529E+07 2.2460E+04 2.2392E+04 3.8188E+03 1.8573E+04 2.8945E+03 75
1080.- 1100. 406 0.8140E-02 0 1.4470E+07 2.3808E+04 2.3729E+04 4.0985E+03 1.9631E+04 3.1137E+03 84
1100.- 1120. 383 0.7678E-02 0 1.4302E+07 2.4327E+04 2.4249E+04 4.0881E+03 2.0160E+04 3.1109E+03 86
1120.- 1140. 463 0.9282E-02 0 1.4239E+07 2.5745E+04 2.5655E+04 4.1271E+03 2.1528E+04 3.1456E+03 89
1140.- 1160. 507 0.1016E-01 0 1.4078E+07 2.7244E+04 2.7143E+04 4.4474E+03 2.2695E+04 3.3771E+03 90
1160.- 1180. 590 0.1183E-01 0 1.3921E+07 2.8709E+04 2.8595E+04 4.3408E+03 2.4254E+04 3.3073E+03 93
1180.- 1200. 614 0.1231E-01 0 1.3673E+07 2.7906E+04 2.7786E+04 3.2192E+03 2.4566E+04 2.4571E+03 71
1200.- 1220. 717 0.1437E-01 0 1.3446E+07 2.9828E+04 2.9692E+04 3.8422E+03 2.5850E+04 2.9405E+03 89
1220.- 1240. 748 0.1500E-01 0 1.3142E+07 3.0691E+04 3.0546E+04 3.6063E+03 2.6940E+04 2.7586E+03 84
1240.- 1260. 846 0.1696E-01 0 1.2795E+07 3.1478E+04 3.1319E+04 2.9361E+03 2.8383E+04 2.2482E+03 69
1260.- 1280. 887 0.1778E-01 0 1.2477E+07 3.2642E+04 3.2472E+04 2.5585E+03 2.9914E+04 1.9637E+03 63
1280.- 1300. 944 0.1893E-01 0 1.2044E+07 3.3590E+04 3.3409E+04 3.0262E+03 3.0383E+04 2.3193E+03 72
1300.- 1320. 1053 0.2111E-01 0 1.1621E+07 3.4003E+04 3.3803E+04 1.8040E+03 3.1999E+04 1.3857E+03 45
1320.- 1340. 1182 0.2370E-01 2 1.1118E+07 3.4955E+04 3.4735E+04 2.1828E+03 3.2552E+04 1.6804E+03 57
1340.- 1360. 1291 0.2588E-01 3 1.0660E+07 3.4611E+04 3.4370E+04 1.2044E+03 3.3166E+04 9.2643E+02 31
1360.- 1380. 1468 0.2943E-01 19 1.0104E+07 3.5412E+04 3.5143E+04 1.2702E+03 3.3873E+04 9.7923E+02 34
1380.- 1400. 1545 0.3097E-01 55 9.5049E+06 3.5617E+04 3.5330E+04 1.0742E+03 3.4256E+04 8.2819E+02 29
1400.- 1420. 1736 0.3480E-01 80 8.9182E+06 3.6064E+04 3.5747E+04 4.4944E+02 3.5298E+04 3.4644E+02 12
1420.- 1440. 1792 0.3593E-01 68 8.2896E+06 3.6855E+04 3.6527E+04 5.5857E+02 3.5968E+04 4.3191E+02 16
1440.- 1460. 1908 0.3825E-01 71 7.6340E+06 3.6621E+04 3.6273E+04 2.0663E+02 3.6067E+04 1.5992E+02 6
1460.- 1480. 2050 0.4110E-01 55 6.9128E+06 3.5641E+04 3.5272E+04 6.6799E+01 3.5205E+04 5.1771E+01 2
1480.- 1500. 2092 0.4194E-01 43 6.1680E+06 3.4390E+04 3.4010E+04 1.6123E+02 3.3848E+04 1.2515E+02 5
1500.- 1520. 2252 0.4515E-01 48 5.4578E+06 3.2790E+04 3.2387E+04 3.5766E+01 3.2351E+04 2.7640E+01 1
1520.- 1540. 2336 0.4683E-01 38 4.7157E+06 3.0868E+04 3.0451E+04 6.0410E+01 3.0391E+04 4.7021E+01 2
1540.- 1560. 2365 0.4741E-01 45 4.0102E+06 2.9048E+04 2.8634E+04 0.0000E+00 2.8634E+04 0.0000E+00 0
1560.- 1580. 2335 0.4681E-01 49 3.3224E+06 2.5437E+04 2.5029E+04 0.0000E+00 2.5029E+04 0.0000E+00 0
1580.- 1600. 2340 0.4691E-01 61 2.6874E+06 2.2978E+04 2.2574E+04 0.0000E+00 2.2574E+04 0.0000E+00 0
1600.- 1620. 2221 0.4453E-01 43 2.0920E+06 1.9560E+04 1.9186E+04 0.0000E+00 1.9186E+04 0.0000E+00 0
1620.- 1640. 2025 0.4060E-01 53 1.5646E+06 1.5876E+04 1.5533E+04 0.0000E+00 1.5533E+04 0.0000E+00 0
1640.- 1660. 1817 0.3643E-01 45 1.1362E+06 1.2432E+04 1.2129E+04 0.0000E+00 1.2129E+04 0.0000E+00 0
1660.- 1680. 1413 0.2833E-01 56 7.5957E+05 8.9280E+03 8.6918E+03 0.0000E+00 8.6918E+03 0.0000E+00 0
1680.- 1700. 1175 0.2356E-01 47 4.9351E+05 6.2723E+03 6.0850E+03 0.0000E+00 6.0850E+03 0.0000E+00 0
1700.- 1720. 852 0.1708E-01 110 3.0281E+05 4.1846E+03 4.0495E+03 0.0000E+00 4.0495E+03 0.0000E+00 0
1720.- 1740. 549 0.1101E-01 213 1.7075E+05 2.5558E+03 2.4688E+03 0.0000E+00 2.4688E+03 0.0000E+00 0
1740.- 1760. 372 0.7458E-02 599 8.8802E+04 1.4622E+03 1.4056E+03 0.0000E+00 1.4056E+03 0.0000E+00 0
1760.- 1780. 201 0.4030E-02 1303 4.2463E+04 6.9730E+02 6.6646E+02 0.0000E+00 6.6646E+02 0.0000E+00 0
1780.- 1800. 118 0.2366E-02 2879 1.8262E+04 3.2127E+02 3.0533E+02 0.0000E+00 3.0533E+02 0.0000E+00 0
1800.- 1820. 49 0.9824E-03 5096 7.5128E+03 1.3478E+02 1.2820E+02 0.0000E+00 1.2820E+02 0.0000E+00 0
1820.- 1840. 16 0.3208E-03 7218 2.5180E+03 4.3835E+01 4.1360E+01 0.0000E+00 4.1360E+01 0.0000E+00 0
1840.- 1860. 10 0.2005E-03 8677 8.4815E+02 1.7610E+01 1.6308E+01 0.0000E+00 1.6308E+01 0.0000E+00 0
1860.- 1880. 2 0.4010E-04 8219 1.5061E+02 5.2278E+00 4.9511E+00 0.0000E+00 4.9511E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 6389 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 4149 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 2135 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 1046 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- 1980. 0 0.0000E+00 494 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1980.- 2000. 0 0.0000E+00 214 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2000.- 2020. 0 0.0000E+00 117 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 0 0.0000E+00 72 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 0 0.0000E+00 34 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 6 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2120.- 2140. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2140.- SUT 0 0.0000E+00
2140.- 2160. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2160.- 2180. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2180.- 2200. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2200.- 2220. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2220.- SUT 0 0.0000E+00
4984 1.0000E+00 4984 1.1473E+08 1.7491E+05 1.7389E+05 3.0497E+04 1.4339E+05 2.2304E+04 462
49880 1.0000E+00 49880 1.1471E+09 1.7739E+06 1.7636E+06 3.1808E+05 1.4455E+06 2.3221E+05 4779
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.3852E+05 4.5947E+02 1.4141E+02 3.1805E+02 8.6508E+05 7.8603E+02 3.7361E+02 4.1242E+02 1 7
20.- 40. 4.4147E+05 5.2451E+02 2.4686E+02 2.7765E+02 8.7106E+05 3.4321E+02 0.0000E+00 3.4321E+02 4 0
40.- 60. 4.4118E+05 4.2883E+02 8.2369E+01 3.4646E+02 8.7609E+05 3.7860E+02 5.7036E+01 3.2156E+02 1 1
60.- 80. 4.4644E+05 4.3668E+02 1.8312E+02 2.5356E+02 8.8127E+05 4.0793E+02 5.8054E+01 3.4988E+02 2 1
80.- 100. 4.4941E+05 8.3390E+02 6.0171E+02 2.3219E+02 8.8363E+05 8.4298E+02 5.1046E+02 3.3253E+02 3 3
100.- 120. 4.4229E+05 2.4416E+02 0.0000E+00 2.4416E+02 8.9828E+05 5.6605E+02 1.6838E+02 3.9767E+02 0 2
120.- 140. 4.5160E+05 5.2839E+02 2.6229E+02 2.6610E+02 8.9867E+05 9.6419E+02 6.0332E+02 3.6087E+02 4 4
140.- 160. 4.5477E+05 3.3509E+02 9.9501E+01 2.3558E+02 9.0499E+05 3.4641E+02 0.0000E+00 3.4641E+02 2 0
160.- 180. 4.5458E+05 3.9368E+02 1.1756E+02 2.7611E+02 9.1200E+05 4.4047E+02 7.3688E+01 3.6678E+02 3 1
180.- 200. 4.6036E+05 4.3482E+02 1.5690E+02 2.7793E+02 9.1876E+05 3.8367E+02 0.0000E+00 3.8367E+02 3 0
200.- 220. 4.6279E+05 4.2118E+02 7.1643E+01 3.4954E+02 9.2225E+05 9.6798E+02 5.5188E+02 4.1610E+02 1 5
220.- 240. 4.6748E+05 6.0304E+02 3.4609E+02 2.5695E+02 9.3395E+05 5.1986E+02 0.0000E+00 5.1986E+02 2 0
240.- 260. 4.7080E+05 3.7976E+02 1.3361E+02 2.4615E+02 9.3340E+05 6.9410E+02 3.0655E+02 3.8755E+02 1 3
260.- 280. 4.7300E+05 4.8718E+02 2.8195E+02 2.0523E+02 9.4382E+05 5.1276E+02 1.1138E+02 4.0138E+02 4 3
280.- 300. 4.8582E+05 9.0106E+02 5.6659E+02 3.3446E+02 9.5587E+05 1.1492E+03 6.8761E+02 4.6161E+02 4 6
300.- 320. 4.8947E+05 4.1977E+02 9.2115E+01 3.2766E+02 9.6955E+05 5.7610E+02 1.7386E+02 4.0224E+02 2 3
320.- 340. 4.8337E+05 3.5052E+02 4.3307E+01 3.0721E+02 9.5803E+05 4.8431E+02 1.5595E+02 3.2837E+02 1 3
340.- 360. 4.8144E+05 4.9441E+02 1.2870E+02 3.6572E+02 9.7031E+05 8.3212E+02 4.2795E+02 4.0417E+02 2 7
360.- 380. 4.9103E+05 5.5673E+02 2.3197E+02 3.2476E+02 9.7385E+05 5.4004E+02 4.5837E+01 4.9420E+02 2 1
380.- 400. 4.9245E+05 2.5722E+02 0.0000E+00 2.5722E+02 9.8021E+05 9.0862E+02 4.4246E+02 4.6615E+02 0 4
400.- 420. 5.2378E+04 4.6756E+01 0.0000E+00 4.6756E+01 1.0773E+05 5.3070E+01 0.0000E+00 5.3070E+01 0 0
0.- 20. 4.3449E+06 4.0071E+03 1.3083E+03 2.6988E+03 8.6898E+06 5.6923E+03 2.2420E+03 3.4504E+03 15 24
20.- 40. 4.3705E+06 4.8568E+03 2.2590E+03 2.5978E+03 8.7452E+06 5.1399E+03 1.3525E+03 3.7873E+03 25 19
40.- 60. 4.4019E+06 3.9253E+03 1.2277E+03 2.6976E+03 8.7976E+06 4.8969E+03 1.3958E+03 3.5011E+03 15 16
60.- 80. 4.4408E+06 3.5279E+03 8.1107E+02 2.7168E+03 8.8436E+06 4.8331E+03 1.3493E+03 3.4838E+03 8 18
80.- 100. 4.4417E+06 5.3149E+03 2.6550E+03 2.6599E+03 8.9208E+06 7.0838E+03 3.3576E+03 3.7261E+03 22 25
100.- 120. 4.4673E+06 4.6850E+03 1.9280E+03 2.7570E+03 8.9715E+06 6.6712E+03 2.6966E+03 3.9746E+03 24 28
120.- 140. 4.5142E+06 4.8905E+03 2.1770E+03 2.7135E+03 9.0072E+06 5.2608E+03 1.8574E+03 3.4034E+03 28 25
140.- 160. 4.5434E+06 5.1465E+03 2.1952E+03 2.9513E+03 9.0611E+06 7.6080E+03 3.7843E+03 3.8237E+03 22 34
160.- 180. 4.5561E+06 4.9831E+03 2.1871E+03 2.7960E+03 9.1383E+06 5.8658E+03 1.8521E+03 4.0137E+03 20 18
180.- 200. 4.6098E+06 5.3570E+03 2.3886E+03 2.9684E+03 9.1723E+06 5.6912E+03 1.8015E+03 3.8897E+03 28 16
200.- 220. 4.6318E+06 4.7055E+03 1.7602E+03 2.9453E+03 9.2400E+06 6.6504E+03 2.5884E+03 4.0620E+03 25 31
220.- 240. 4.6528E+06 4.9502E+03 2.1371E+03 2.8130E+03 9.3113E+06 5.9646E+03 1.7672E+03 4.1974E+03 22 24
240.- 260. 4.6972E+06 4.3449E+03 1.4118E+03 2.9331E+03 9.3677E+06 8.0512E+03 4.0220E+03 4.0292E+03 22 29
260.- 280. 4.7408E+06 4.5242E+03 1.6527E+03 2.8715E+03 9.4223E+06 6.4974E+03 2.3401E+03 4.1573E+03 20 30
280.- 300. 4.7667E+06 4.6793E+03 1.6808E+03 2.9986E+03 9.4818E+06 6.8155E+03 2.7114E+03 4.1040E+03 21 29
300.- 320. 4.7916E+06 5.0798E+03 1.8606E+03 3.2192E+03 9.5775E+06 6.5478E+03 2.3279E+03 4.2198E+03 21 30
320.- 340. 4.8224E+06 5.2216E+03 2.1176E+03 3.1040E+03 9.6323E+06 6.2358E+03 2.3316E+03 3.9042E+03 31 24
340.- 360. 4.8481E+06 4.4259E+03 1.0477E+03 3.3782E+03 9.7126E+06 7.3222E+03 3.2250E+03 4.0972E+03 18 34
360.- 380. 4.8976E+06 5.6451E+03 2.2434E+03 3.4017E+03 9.7666E+06 6.9703E+03 2.3085E+03 4.6618E+03 24 31
380.- 400. 4.9231E+06 4.8862E+03 1.7469E+03 3.1393E+03 9.8249E+06 8.4972E+03 3.7149E+03 4.7823E+03 26 34
400.- 420. 5.3533E+05 4.9933E+02 1.3019E+02 3.6914E+02 1.0675E+06 4.8818E+02 6.8988E+01 4.1920E+02 3 2
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
9.3306E+06 9.5372E+03 3.7877E+03 5.7494E+03 1.8559E+07 1.2698E+04 4.7480E+03 7.9497E+03 42 54
9.2998E+07 9.5656E+04 3.6926E+04 5.8730E+04 1.8575E+08 1.2878E+05 4.9095E+04 7.9688E+04 440 521
DAMAGE IN LAYER 1 : 2.2137E+04
DAMAGE IN LAYER 1 : 2.2349E+05
DAMAGE IN LAYER 2 : 3.3817E+04
DAMAGE IN LAYER 2 : 3.3547E+05
DAMAGE IN LAYER 3 : 2.2342E+04
DAMAGE IN LAYER 3 : 2.3997E+05
DAMAGE IN LAYER 4 : 9.5597E+04
DAMAGE IN LAYER 4 : 9.6462E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.1288E-03 REL.MEAN ENERGY = 3.5276E-01 MEAN ENERGY = 8.1134E+03
PART.REFL.COEF.= 2.4000E-03 ENERGY REFL.COEF.= 9.8588E-04 REL.MEAN ENERGY = 4.1078E-01 MEAN ENERGY = 9.4480E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.1134E+03 3.5450E+07 5.0353E-01 2.5820E+00 5.9540E+03 1.4885E+03 1.1147E+07 3.0434E-01
PATHLENGTH 1.0126E+03 1.5666E+05 -1.5891E-01 2.6014E+00 3.9580E+02 9.8949E+01 4.9560E+04 3.0580E-01
ELASTIC LOSS 2.7282E+02 9.6259E+03 9.8112E+01 6.1320E+00
INEL. LOSS 1.4466E+04 3.3028E+07 5.7470E+03 3.5919E+02
ENERGY 9.4480E+03 4.7512E+07 2.8179E-01 1.8183E+00 6.8929E+03 6.2923E+02 3.9235E+06 1.3891E-01
PATHLENGTH 9.1785E+02 2.0932E+05 -2.4249E-01 2.0262E+00 4.5751E+02 4.1765E+01 1.9357E+04 1.3480E-01
ELASTIC LOSS 2.9164E+02 1.1237E+04 1.0601E+02 8.8339E-01
INEL. LOSS 1.3202E+04 4.7028E+07 6.8577E+03 5.7148E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.1134E+03 1.0128E+08 1.5032E+12 2.5028E+16 4.4934E+20 8.4611E+24
LOGENERGY 3.6402E+00 1.3693E+01 5.2652E+01 2.0549E+02 8.1040E+02 3.2207E+03
PATHLENGTH 1.0126E+03 1.1821E+06 1.5044E+09 2.0393E+12 2.9001E+15 4.2759E+18
ENERGY 9.4480E+03 1.3678E+08 2.2823E+12 4.1008E+16 7.7203E+20 1.5022E+25
LOGENERGY 3.7385E+00 1.4341E+01 5.5993E+01 2.2148E+02 8.8488E+02 3.5638E+03
PATHLENGTH 9.1785E+02 1.0518E+06 1.3264E+09 1.7713E+12 2.4608E+15 3.5223E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -378,5 +383,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 1 2 0 0 0 1 0 3 2 1 0 0 0 3 0 3
0.000 0.000 0.000 0.000 1.250 2.500 0.000 0.000 0.000 1.250 0.000 3.750 2.500 1.250 0.000 0.000 0.000 3.750 0.000 3.750
0 0 1 1 4 8 3 6 4 6 9 10 13 5 4 7 11 8 8 12
0.000 0.000 0.167 0.167 0.667 1.333 0.500 1.000 0.667 1.000 1.500 1.667 2.167 0.833 0.667 1.167 1.833 1.333 1.333 2.000
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.rge
+98 -94
View File
@@ -1,98 +1,98 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 0
90.0000 0
110.0000 0
130.0000 0
150.0000 1
170.0000 1
190.0000 0
210.0000 0
230.0000 3
250.0000 0
270.0000 0
290.0000 1
310.0000 0
330.0000 0
350.0000 0
370.0000 2
390.0000 2
410.0000 1
430.0000 3
450.0000 6
470.0000 2
490.0000 3
510.0000 7
530.0000 3
550.0000 4
570.0000 5
590.0000 9
610.0000 6
630.0000 7
650.0000 4
670.0000 11
690.0000 11
710.0000 6
730.0000 9
750.0000 5
770.0000 4
790.0000 16
810.0000 8
830.0000 13
850.0000 14
870.0000 12
890.0000 11
910.0000 16
930.0000 12
950.0000 13
970.0000 21
990.0000 18
1010.0000 30
1030.0000 33
1050.0000 22
1070.0000 24
1090.0000 40
1110.0000 36
1130.0000 50
1150.0000 51
1170.0000 64
1190.0000 59
1210.0000 81
1230.0000 72
1250.0000 87
1270.0000 81
1290.0000 107
1310.0000 104
1330.0000 119
1350.0000 131
1370.0000 141
1390.0000 166
1410.0000 176
1430.0000 179
1450.0000 196
1470.0000 208
1490.0000 209
1510.0000 205
1530.0000 215
1550.0000 200
1570.0000 238
1590.0000 247
1610.0000 235
1630.0000 230
1650.0000 194
1670.0000 146
1690.0000 115
1710.0000 99
1730.0000 46
1750.0000 38
1770.0000 21
1790.0000 12
1810.0000 4
1830.0000 1
1850.0000 1
1870.0000 0
10.0000 3
30.0000 1
50.0000 4
70.0000 5
90.0000 4
110.0000 9
130.0000 2
150.0000 10
170.0000 7
190.0000 6
210.0000 10
230.0000 11
250.0000 11
270.0000 7
290.0000 10
310.0000 12
330.0000 11
350.0000 3
370.0000 15
390.0000 16
410.0000 22
430.0000 27
450.0000 36
470.0000 24
490.0000 48
510.0000 51
530.0000 43
550.0000 54
570.0000 70
590.0000 85
610.0000 92
630.0000 89
650.0000 116
670.0000 119
690.0000 140
710.0000 65
730.0000 78
750.0000 80
770.0000 74
790.0000 89
810.0000 105
830.0000 124
850.0000 132
870.0000 139
890.0000 128
910.0000 134
930.0000 162
950.0000 160
970.0000 191
990.0000 192
1010.0000 264
1030.0000 302
1050.0000 300
1070.0000 318
1090.0000 406
1110.0000 383
1130.0000 463
1150.0000 507
1170.0000 590
1190.0000 614
1210.0000 717
1230.0000 748
1250.0000 846
1270.0000 887
1290.0000 944
1310.0000 1053
1330.0000 1182
1350.0000 1291
1370.0000 1468
1390.0000 1545
1410.0000 1736
1430.0000 1792
1450.0000 1908
1470.0000 2050
1490.0000 2092
1510.0000 2252
1530.0000 2336
1550.0000 2365
1570.0000 2335
1590.0000 2340
1610.0000 2221
1630.0000 2025
1650.0000 1817
1670.0000 1413
1690.0000 1175
1710.0000 852
1730.0000 549
1750.0000 372
1770.0000 201
1790.0000 118
1810.0000 49
1830.0000 16
1850.0000 10
1870.0000 2
1890.0000 0
1910.0000 0
1930.0000 0
@@ -106,3 +106,7 @@
2090.0000 0
2110.0000 0
2130.0000 0
2150.0000 0
2170.0000 0
2190.0000 0
2210.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
23.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1427E+04 0.2332E+03 0.8113E+04 0.5954E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 11 82 178 4713
23.00 0.45 0.00 15.00 50000 49880 120 0 50000 0 0.1421E+04 0.2413E+03 0.9448E+04 0.6893E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 157 1016 1853 46854
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 25000 450 0 15 0.5 0.0 0.0 0.0
5000 78753 78753 78753 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78753 78753 78753 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.out
+178 -177
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:31
Start: 19.Jun. 2026 20:10:30
End: 18.Jun. 2026 09:50:35
End: 19.Jun. 2026 20:11:12
Simulation needed for 5000 projectiles 4 seconds
Simulation needed for 50000 projectiles 42 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 25000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78753.00 78753.00 78753.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78753.00 78753.00 78753.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
64805 0 0 0 0 0 0 0 0
643784 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,230 +162,230 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4992 ENERGY=0.1248E+09 EV
BACKSCATTERED PARTICLES= 8 ENERGY=0.9085E+05 EV
IMPLANTED PARTICLES= 49913 ENERGY=0.1248E+10 EV
BACKSCATTERED PARTICLES= 87 ENERGY=0.9612E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 10 10
IMPLANTED PARTICLES (LAYER 1)= 136 136
IMPLANTED PARTICLES (LAYER 2)= 60 60
IMPLANTED PARTICLES (LAYER 2)= 675 675
IMPLANTED PARTICLES (LAYER 3)= 104 104
IMPLANTED PARTICLES (LAYER 3)= 1003 1003
IMPLANTED PARTICLES (LAYER 4)= 4818 4818
IMPLANTED PARTICLES (LAYER 4)= 48099 48099
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 822.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.097
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.576
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 821.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.103
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.608
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.5992E+03 6.7094E+04 -1.7183E+00 7.1916E+00 2.5903E+02 3.6661E+00 2.3629E+03 6.0944E-02
SPREAD 5.5972E+02 8.6105E+04 5.2523E-01 2.8124E+00 2.9344E+02 4.1531E+00 1.6407E+03 2.7958E-02
PATHLENGTH 2.0457E+03 4.2972E+03 -2.3047E+00 1.8505E+01 6.5553E+01 9.2780E-01 2.5446E+02 2.2299E-01
ELASTIC LOSS 3.5568E+01 6.6675E+02 2.5822E+01 5.1726E-03
INEL. LOSS 2.4967E+04 2.0382E+05 4.5146E+02 9.0438E-02
PENETRATION 1.5935E+03 6.8823E+04 -1.7169E+00 7.1503E+00 2.6234E+02 1.1743E+00 7.6397E+02 1.7879E-02
SPREAD 5.5965E+02 8.5048E+04 5.2370E-01 2.7883E+00 2.9163E+02 1.3053E+00 5.0906E+02 8.4722E-03
PATHLENGTH 2.0446E+03 4.4277E+03 -2.4394E+00 1.8792E+01 6.6541E+01 2.9784E-01 8.3597E+01 6.4349E-02
ELASTIC LOSS 3.6089E+01 7.4648E+02 2.7322E+01 5.4739E-04
INEL. LOSS 2.4961E+04 2.0280E+05 4.5034E+02 9.0224E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.3514E-02 9.8968E-01 1.6171E+02 5.0849E+04 9.9483E-01 4.9067E-04 1.1007E-01 2.8806E+01
WEAK EL.LOSS 2.4324E-04 1.4463E-06 1.0100E+01 1.7265E+02 1.2026E-03 5.9315E-07 9.3459E-09 1.0227E-01
INELAST.LOSS 3.0346E+01 8.3511E+01 -1.3898E+00 4.9173E+00 9.1385E+00 4.5072E-03 8.1522E-02 9.3608E-04
SUBTHR.LOSS 3.5861E-02 1.8050E-01 3.3900E+01 1.5433E+03 4.2486E-01 2.0956E-04 3.4965E-03 2.7342E-01
ELAST.LOSS 4.4275E-02 1.0973E+00 1.7371E+02 5.5819E+04 1.0475E+00 1.6342E-04 4.0444E-02 8.1401E+00
WEAK EL.LOSS 2.4428E-04 1.4700E-06 1.0249E+01 1.7841E+02 1.2124E-03 1.8914E-07 3.0545E-09 3.2943E-02
INELAST.LOSS 3.0351E+01 8.3508E+01 -1.3904E+00 4.9209E+00 9.1383E+00 1.4256E-03 2.5796E-02 2.9600E-04
SUBTHR.LOSS 3.6136E-02 1.8524E-01 3.3947E+01 1.5427E+03 4.3039E-01 6.7147E-05 1.1347E-03 8.4630E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.5992E+03 2.6247E+06 4.3822E+09 7.4121E+12 1.2669E+16 2.1844E+19
PENETRATION 1.5935E+03 2.6079E+06 4.3440E+09 7.3319E+12 1.2508E+16 2.1530E+19
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.2593E+06 9.4482E+02 9.4418E+02 3.3015E+02 6.1403E+02 2.3898E+02 3
20.- 40. 0 0.0000E+00 0 1.2695E+06 1.1423E+03 1.1416E+03 5.2695E+02 6.1460E+02 3.8743E+02 5
40.- 60. 1 0.2003E-03 0 1.2797E+06 8.4808E+02 8.4699E+02 2.5107E+02 5.9592E+02 1.7222E+02 2
60.- 80. 0 0.0000E+00 0 1.2815E+06 1.3424E+03 1.3417E+03 6.3597E+02 7.0577E+02 4.4909E+02 5
80.- 100. 0 0.0000E+00 0 1.2780E+06 1.1437E+03 1.1431E+03 6.1306E+02 5.3000E+02 4.3033E+02 5
100.- 120. 1 0.2003E-03 0 1.2886E+06 1.1515E+03 1.1503E+03 6.0407E+02 5.4621E+02 4.3604E+02 7
120.- 140. 0 0.0000E+00 0 1.2949E+06 5.7178E+02 5.7107E+02 3.3482E+01 5.3759E+02 2.5406E+01 1
140.- 160. 0 0.0000E+00 0 1.3038E+06 1.0502E+03 1.0495E+03 5.1911E+02 5.3037E+02 3.5271E+02 3
160.- 180. 1 0.2003E-03 0 1.3162E+06 7.9295E+02 7.9173E+02 1.5322E+02 6.3850E+02 1.1063E+02 2
180.- 200. 2 0.4006E-03 0 1.3152E+06 7.3434E+02 7.3305E+02 1.4383E+02 5.8922E+02 1.0805E+02 3
200.- 220. 0 0.0000E+00 0 1.3213E+06 9.2138E+02 9.1998E+02 2.9130E+02 6.2868E+02 2.1200E+02 4
220.- 240. 3 0.6010E-03 0 1.3318E+06 8.2997E+02 8.2846E+02 2.0863E+02 6.1983E+02 1.5437E+02 3
240.- 260. 0 0.0000E+00 0 1.3387E+06 1.1771E+03 1.1762E+03 5.9903E+02 5.7712E+02 4.0998E+02 6
260.- 280. 1 0.2003E-03 0 1.3483E+06 1.6254E+03 1.6242E+03 9.6597E+02 6.5824E+02 6.0505E+02 5
280.- 300. 0 0.0000E+00 0 1.3656E+06 8.7683E+02 8.7604E+02 1.8277E+02 6.9326E+02 1.3510E+02 3
300.- 320. 1 0.2003E-03 0 1.3632E+06 7.2862E+02 7.2738E+02 7.2964E+01 6.5442E+02 5.5126E+01 2
320.- 340. 0 0.0000E+00 0 1.3752E+06 1.2372E+03 1.2365E+03 5.4822E+02 6.8823E+02 3.9460E+02 6
340.- 360. 0 0.0000E+00 0 1.3844E+06 9.7675E+02 9.7598E+02 2.5241E+02 7.2357E+02 1.8119E+02 3
360.- 380. 0 0.0000E+00 0 1.3992E+06 9.7093E+02 9.7013E+02 3.4673E+02 6.2340E+02 2.6253E+02 8
380.- 400. 0 0.0000E+00 0 1.4089E+06 1.0859E+03 1.0850E+03 4.3996E+02 6.4503E+02 3.2175E+02 6
400.- 420. 3 0.6010E-03 0 1.9798E+06 1.8573E+03 1.8535E+03 7.0780E+02 1.1457E+03 5.0422E+02 9
420.- 440. 2 0.4006E-03 0 2.0490E+06 1.6387E+03 1.6353E+03 5.2845E+02 1.1068E+03 3.8934E+02 7
440.- 460. 7 0.1402E-02 0 2.0718E+06 1.4592E+03 1.4530E+03 4.5667E+02 9.9630E+02 3.3543E+02 7
460.- 480. 3 0.6010E-03 0 2.0811E+06 1.5393E+03 1.5347E+03 4.4223E+02 1.0924E+03 3.1412E+02 5
480.- 500. 2 0.4006E-03 0 2.1079E+06 1.6840E+03 1.6805E+03 3.5935E+02 1.3211E+03 2.5984E+02 3
500.- 520. 2 0.4006E-03 0 2.1171E+06 1.7857E+03 1.7815E+03 5.9420E+02 1.1873E+03 4.3445E+02 8
520.- 540. 5 0.1002E-02 0 2.1256E+06 1.5152E+03 1.5108E+03 1.4262E+02 1.3682E+03 1.0684E+02 2
540.- 560. 1 0.2003E-03 0 2.1510E+06 1.5715E+03 1.5677E+03 3.6977E+02 1.1980E+03 2.7579E+02 5
560.- 580. 2 0.4006E-03 0 2.1795E+06 1.9212E+03 1.9174E+03 5.5121E+02 1.3662E+03 3.9156E+02 6
580.- 600. 2 0.4006E-03 0 2.1969E+06 1.5935E+03 1.5893E+03 2.4877E+02 1.3406E+03 1.8500E+02 5
600.- 620. 4 0.8013E-03 0 2.2324E+06 1.9645E+03 1.9590E+03 4.4962E+02 1.5094E+03 3.2955E+02 6
620.- 640. 9 0.1803E-02 0 2.2444E+06 2.2922E+03 2.2843E+03 7.7651E+02 1.5078E+03 5.3929E+02 7
640.- 660. 6 0.1202E-02 0 2.2605E+06 2.7631E+03 2.7549E+03 1.2419E+03 1.5130E+03 9.2117E+02 17
660.- 680. 9 0.1803E-02 0 2.2913E+06 2.0336E+03 2.0258E+03 4.9323E+02 1.5325E+03 3.5743E+02 7
680.- 700. 3 0.6010E-03 0 2.3076E+06 1.8027E+03 1.7964E+03 1.8895E+02 1.6074E+03 1.4329E+02 4
700.- 720. 2 0.4006E-03 0 1.4107E+06 1.2421E+03 1.2409E+03 3.3831E+02 9.0264E+02 2.4400E+02 4
720.- 740. 3 0.6010E-03 0 1.3353E+06 1.1775E+03 1.1763E+03 3.7732E+02 7.9901E+02 2.7822E+02 6
740.- 760. 2 0.4006E-03 0 1.3368E+06 1.3024E+03 1.3012E+03 4.5564E+02 8.4554E+02 3.4974E+02 7
760.- 780. 7 0.1402E-02 0 1.3398E+06 1.2065E+03 1.2047E+03 3.2494E+02 8.7974E+02 2.4667E+02 5
780.- 800. 6 0.1202E-02 0 1.3498E+06 1.4354E+03 1.4335E+03 6.0952E+02 8.2401E+02 4.3619E+02 7
800.- 820. 5 0.1002E-02 0 1.3615E+06 9.3108E+02 9.2920E+02 8.0625E+01 8.4857E+02 6.3880E+01 2
820.- 840. 11 0.2204E-02 0 1.3707E+06 1.5545E+03 1.5521E+03 5.3721E+02 1.0149E+03 4.1546E+02 9
840.- 860. 7 0.1402E-02 0 1.3623E+06 1.3295E+03 1.3272E+03 2.7013E+02 1.0571E+03 2.0803E+02 5
860.- 880. 7 0.1402E-02 0 1.3724E+06 1.0330E+03 1.0309E+03 1.7064E+02 8.6027E+02 1.3290E+02 4
880.- 900. 6 0.1202E-02 0 1.3772E+06 1.2891E+03 1.2873E+03 3.2552E+02 9.6178E+02 2.3676E+02 5
900.- 920. 8 0.1603E-02 0 1.3825E+06 1.3322E+03 1.3298E+03 2.0563E+02 1.1242E+03 1.6053E+02 4
920.- 940. 8 0.1603E-02 0 1.3820E+06 1.4346E+03 1.4316E+03 2.4285E+02 1.1887E+03 1.8853E+02 4
940.- 960. 8 0.1603E-02 0 1.3893E+06 1.3090E+03 1.3065E+03 4.0821E+02 8.9832E+02 2.9516E+02 7
960.- 980. 14 0.2804E-02 0 1.3771E+06 1.6369E+03 1.6333E+03 4.4745E+02 1.1858E+03 3.4092E+02 9
980.- 1000. 10 0.2003E-02 0 1.3996E+06 1.5207E+03 1.5174E+03 2.3733E+02 1.2801E+03 1.8674E+02 5
1000.- 1020. 12 0.2404E-02 0 1.4055E+06 1.6911E+03 1.6882E+03 5.0390E+02 1.1843E+03 3.8327E+02 10
1020.- 1040. 13 0.2604E-02 0 1.4017E+06 1.4515E+03 1.4486E+03 2.1481E+02 1.2338E+03 1.6011E+02 3
1040.- 1060. 23 0.4607E-02 0 1.4151E+06 1.6858E+03 1.6815E+03 2.2183E+02 1.4597E+03 1.6750E+02 4
1060.- 1080. 17 0.3405E-02 0 1.4325E+06 1.4942E+03 1.4905E+03 2.3439E+02 1.2561E+03 1.7722E+02 5
1080.- 1100. 14 0.2804E-02 0 1.4405E+06 1.7696E+03 1.7661E+03 3.2793E+02 1.4382E+03 2.5002E+02 7
1100.- 1120. 30 0.6010E-02 0 1.4423E+06 2.2699E+03 2.2648E+03 7.0034E+02 1.5645E+03 5.1975E+02 10
1120.- 1140. 21 0.4207E-02 0 1.4342E+06 1.7147E+03 1.7097E+03 2.5447E+02 1.4553E+03 1.9477E+02 6
1140.- 1160. 31 0.6210E-02 0 1.4348E+06 2.2584E+03 2.2528E+03 6.3351E+02 1.6192E+03 4.7575E+02 11
1160.- 1180. 26 0.5208E-02 0 1.4465E+06 2.3430E+03 2.3375E+03 7.1760E+02 1.6199E+03 5.3264E+02 10
1180.- 1200. 28 0.5609E-02 0 1.4450E+06 1.9545E+03 1.9493E+03 3.7158E+02 1.5777E+03 2.8131E+02 7
1200.- 1220. 27 0.5409E-02 0 1.4503E+06 2.0924E+03 2.0863E+03 2.7202E+02 1.8143E+03 2.0321E+02 4
1220.- 1240. 30 0.6010E-02 0 1.4396E+06 2.1005E+03 2.0943E+03 2.8421E+02 1.8101E+03 2.1493E+02 5
1240.- 1260. 24 0.4808E-02 0 1.4323E+06 2.6142E+03 2.6086E+03 7.5342E+02 1.8552E+03 5.6882E+02 14
1260.- 1280. 49 0.9816E-02 0 1.4299E+06 2.3963E+03 2.3879E+03 5.3002E+02 1.8579E+03 4.0200E+02 11
1280.- 1300. 35 0.7011E-02 0 1.4200E+06 2.7059E+03 2.6980E+03 6.5083E+02 2.0471E+03 4.9443E+02 13
1300.- 1320. 41 0.8213E-02 0 1.4075E+06 2.8169E+03 2.8082E+03 6.6582E+02 2.1424E+03 5.0629E+02 14
1320.- 1340. 46 0.9215E-02 0 1.3888E+06 2.4669E+03 2.4577E+03 3.0683E+02 2.1509E+03 2.3477E+02 7
1340.- 1360. 56 0.1122E-01 0 1.3712E+06 2.8696E+03 2.8589E+03 5.2100E+02 2.3379E+03 3.9440E+02 10
1360.- 1380. 61 0.1222E-01 0 1.3361E+06 2.7399E+03 2.7282E+03 4.5463E+02 2.2736E+03 3.4503E+02 9
1380.- 1400. 69 0.1382E-01 0 1.3294E+06 2.8838E+03 2.8706E+03 4.2909E+02 2.4415E+03 3.2449E+02 8
1400.- 1420. 82 0.1643E-01 0 1.2770E+06 2.7996E+03 2.7844E+03 3.5553E+02 2.4289E+03 2.7146E+02 8
1420.- 1440. 74 0.1482E-01 0 1.2423E+06 2.9708E+03 2.9566E+03 2.9034E+02 2.6663E+03 2.2240E+02 7
1440.- 1460. 93 0.1863E-01 1 1.2243E+06 3.1812E+03 3.1635E+03 3.1179E+02 2.8517E+03 2.3609E+02 6
1460.- 1480. 90 0.1803E-01 0 1.1969E+06 3.1426E+03 3.1240E+03 1.2173E+02 3.0023E+03 9.3447E+01 3
1480.- 1500. 101 0.2023E-01 2 1.1543E+06 3.2825E+03 3.2638E+03 1.1523E+02 3.1485E+03 8.8731E+01 3
1500.- 1520. 123 0.2464E-01 2 1.0831E+06 3.3498E+03 3.3281E+03 2.8516E+02 3.0429E+03 2.2030E+02 8
1520.- 1540. 128 0.2564E-01 4 1.0397E+06 3.1440E+03 3.1198E+03 1.4056E+02 2.9793E+03 1.0871E+02 4
1540.- 1560. 122 0.2444E-01 2 1.0033E+06 3.2242E+03 3.2016E+03 1.4691E+02 3.0546E+03 1.1338E+02 4
1560.- 1580. 141 0.2825E-01 1 9.3041E+05 3.2101E+03 3.1832E+03 1.2475E+02 3.0584E+03 9.6975E+01 4
1580.- 1600. 162 0.3245E-01 2 8.8349E+05 3.1504E+03 3.1212E+03 3.2091E+01 3.0891E+03 2.4916E+01 1
1600.- 1620. 174 0.3486E-01 2 8.3948E+05 3.6479E+03 3.6170E+03 1.0658E+02 3.5104E+03 8.2382E+01 3
1620.- 1640. 155 0.3105E-01 3 7.6882E+05 3.4576E+03 3.4267E+03 0.0000E+00 3.4267E+03 0.0000E+00 0
1640.- 1660. 198 0.3966E-01 4 6.8970E+05 3.3604E+03 3.3256E+03 6.3143E+01 3.2624E+03 4.9057E+01 2
1660.- 1680. 196 0.3926E-01 3 6.3414E+05 3.3222E+03 3.2867E+03 3.2237E+01 3.2545E+03 2.5024E+01 1
1680.- 1700. 200 0.4006E-01 5 5.8100E+05 3.3575E+03 3.3208E+03 0.0000E+00 3.3208E+03 0.0000E+00 0
1700.- 1720. 247 0.4948E-01 1 5.0742E+05 3.2416E+03 3.1990E+03 0.0000E+00 3.1990E+03 0.0000E+00 0
1720.- 1740. 251 0.5028E-01 4 4.4629E+05 3.0181E+03 2.9742E+03 0.0000E+00 2.9742E+03 0.0000E+00 0
1740.- 1760. 226 0.4527E-01 5 3.6251E+05 2.6575E+03 2.6171E+03 0.0000E+00 2.6171E+03 0.0000E+00 0
1760.- 1780. 209 0.4187E-01 3 2.9034E+05 2.1747E+03 2.1377E+03 0.0000E+00 2.1377E+03 0.0000E+00 0
1780.- 1800. 231 0.4627E-01 3 2.4133E+05 2.2262E+03 2.1859E+03 0.0000E+00 2.1859E+03 0.0000E+00 0
1800.- 1820. 218 0.4367E-01 2 1.8687E+05 1.7536E+03 1.7174E+03 0.0000E+00 1.7174E+03 0.0000E+00 0
1820.- 1840. 163 0.3265E-01 5 1.3787E+05 1.4028E+03 1.3740E+03 0.0000E+00 1.3740E+03 0.0000E+00 0
1840.- 1860. 164 0.3285E-01 4 9.6478E+04 1.0915E+03 1.0653E+03 0.0000E+00 1.0653E+03 0.0000E+00 0
1860.- 1880. 126 0.2524E-01 3 6.3290E+04 7.6346E+02 7.4270E+02 0.0000E+00 7.4270E+02 0.0000E+00 0
1880.- 1900. 114 0.2284E-01 9 4.1405E+04 5.4293E+02 5.2539E+02 0.0000E+00 5.2539E+02 0.0000E+00 0
1900.- 1920. 66 0.1322E-01 23 2.4236E+04 3.4670E+02 3.3567E+02 0.0000E+00 3.3567E+02 0.0000E+00 0
1920.- 1940. 46 0.9215E-02 51 1.4643E+04 1.9707E+02 1.9019E+02 0.0000E+00 1.9019E+02 0.0000E+00 0
1940.- 1960. 28 0.5609E-02 108 7.3434E+03 9.6429E+01 9.2201E+01 0.0000E+00 9.2201E+01 0.0000E+00 0
1960.- 1980. 23 0.4607E-02 223 4.5240E+03 7.9025E+01 7.5763E+01 0.0000E+00 7.5763E+01 0.0000E+00 0
1980.- 2000. 9 0.1803E-02 354 2.7142E+03 5.6940E+01 5.4759E+01 0.0000E+00 5.4759E+01 0.0000E+00 0
2000.- 2020. 4 0.8013E-03 578 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 0 0.0000E+00 706 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 0 0.0000E+00 846 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 1 0.2003E-03 712 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 551 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 358 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2120.- 2140. 0 0.0000E+00 209 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2140.- 2160. 0 0.0000E+00 113 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2160.- 2180. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2180.- 2200. 0 0.0000E+00 27 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2200.- 2220. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2220.- 2240. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2240.- 2260. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2260.- 2280. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2280.- 2300. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 0 0.0000E+00 0 1.2541E+07 1.0196E+04 1.0189E+04 4.7836E+03 5.4056E+03 3.3111E+03 42
20.- 40. 0 0.0000E+00 0 1.2631E+07 9.2003E+03 9.1939E+03 3.6994E+03 5.4945E+03 2.6911E+03 45
40.- 60. 3 0.6010E-04 0 1.2685E+07 8.9743E+03 8.9666E+03 3.1365E+03 5.8301E+03 2.1566E+03 27
60.- 80. 2 0.4007E-04 0 1.2753E+07 8.3283E+03 8.3209E+03 2.6309E+03 5.6900E+03 1.8949E+03 31
80.- 100. 6 0.1202E-03 0 1.2813E+07 9.7247E+03 9.7153E+03 3.6601E+03 6.0552E+03 2.6344E+03 43
100.- 120. 5 0.1002E-03 0 1.2889E+07 9.6485E+03 9.6395E+03 3.9908E+03 5.6487E+03 2.8087E+03 49
120.- 140. 5 0.1002E-03 0 1.2978E+07 1.0055E+04 1.0046E+04 4.1277E+03 5.9182E+03 2.9034E+03 48
140.- 160. 6 0.1202E-03 0 1.3070E+07 9.6977E+03 9.6883E+03 3.7185E+03 5.9698E+03 2.6427E+03 38
160.- 180. 8 0.1603E-03 0 1.3161E+07 1.0614E+04 1.0604E+04 4.7124E+03 5.8912E+03 3.3002E+03 46
180.- 200. 8 0.1603E-03 0 1.3213E+07 8.5003E+03 8.4896E+03 2.1571E+03 6.3326E+03 1.5541E+03 26
200.- 220. 4 0.8014E-04 0 1.3273E+07 9.9299E+03 9.9205E+03 3.7558E+03 6.1648E+03 2.7056E+03 46
220.- 240. 5 0.1002E-03 0 1.3356E+07 9.2176E+03 9.2079E+03 2.9108E+03 6.2972E+03 2.0742E+03 36
240.- 260. 9 0.1803E-03 0 1.3450E+07 1.0090E+04 1.0078E+04 3.5819E+03 6.4964E+03 2.5351E+03 41
260.- 280. 11 0.2204E-03 0 1.3553E+07 1.1959E+04 1.1947E+04 5.5202E+03 6.4266E+03 3.6940E+03 47
280.- 300. 8 0.1603E-03 0 1.3656E+07 1.1780E+04 1.1770E+04 5.5126E+03 6.2570E+03 3.7936E+03 52
300.- 320. 7 0.1402E-03 0 1.3718E+07 9.4676E+03 9.4562E+03 2.6106E+03 6.8456E+03 1.9255E+03 37
320.- 340. 12 0.2404E-03 0 1.3794E+07 1.1828E+04 1.1814E+04 4.6145E+03 7.1997E+03 3.2285E+03 49
340.- 360. 14 0.2805E-03 0 1.3888E+07 1.1728E+04 1.1714E+04 4.7094E+03 7.0047E+03 3.2613E+03 46
360.- 380. 9 0.1803E-03 0 1.3988E+07 9.3697E+03 9.3563E+03 2.7158E+03 6.6406E+03 1.9677E+03 40
380.- 400. 14 0.2805E-03 0 1.4064E+07 1.0156E+04 1.0141E+04 2.8916E+03 7.2498E+03 2.1379E+03 47
400.- 420. 28 0.5610E-03 0 1.9737E+07 1.5969E+04 1.5933E+04 5.5526E+03 1.0380E+04 4.0174E+03 68
420.- 440. 20 0.4007E-03 0 2.0484E+07 1.6098E+04 1.6063E+04 5.3557E+03 1.0707E+04 3.8293E+03 61
440.- 460. 24 0.4808E-03 0 2.0687E+07 1.7246E+04 1.7208E+04 6.6713E+03 1.0537E+04 4.6981E+03 71
460.- 480. 27 0.5409E-03 0 2.0899E+07 1.6725E+04 1.6687E+04 5.4431E+03 1.1244E+04 3.9440E+03 69
480.- 500. 29 0.5810E-03 0 2.1047E+07 1.8482E+04 1.8440E+04 6.7510E+03 1.1689E+04 4.8146E+03 79
500.- 520. 37 0.7413E-03 0 2.1245E+07 1.9402E+04 1.9354E+04 7.3948E+03 1.1959E+04 5.3377E+03 89
520.- 540. 43 0.8615E-03 0 2.1431E+07 1.8993E+04 1.8943E+04 6.4823E+03 1.2461E+04 4.6564E+03 74
540.- 560. 37 0.7413E-03 0 2.1637E+07 1.8913E+04 1.8861E+04 5.7411E+03 1.3120E+04 4.1878E+03 78
560.- 580. 40 0.8014E-03 0 2.1837E+07 1.9157E+04 1.9105E+04 6.0875E+03 1.3017E+04 4.4179E+03 82
580.- 600. 51 0.1022E-02 0 2.2059E+07 1.9951E+04 1.9892E+04 6.3311E+03 1.3561E+04 4.5572E+03 84
600.- 620. 48 0.9617E-03 0 2.2228E+07 2.0890E+04 2.0827E+04 6.9145E+03 1.3913E+04 5.0101E+03 89
620.- 640. 65 0.1302E-02 0 2.2450E+07 2.1876E+04 2.1804E+04 7.2708E+03 1.4533E+04 5.1754E+03 89
640.- 660. 63 0.1262E-02 0 2.2618E+07 2.2147E+04 2.2074E+04 7.3138E+03 1.4760E+04 5.3027E+03 99
660.- 680. 71 0.1422E-02 0 2.2855E+07 2.2027E+04 2.1949E+04 6.4944E+03 1.5454E+04 4.7623E+03 94
680.- 700. 92 0.1843E-02 0 2.3056E+07 2.2822E+04 2.2732E+04 6.5507E+03 1.6182E+04 4.7549E+03 93
700.- 720. 34 0.6812E-03 0 1.4029E+07 1.2180E+04 1.2163E+04 3.4832E+03 8.6803E+03 2.5818E+03 52
720.- 740. 45 0.9016E-03 0 1.3314E+07 1.0860E+04 1.0846E+04 2.5586E+03 8.2873E+03 1.9079E+03 43
740.- 760. 48 0.9617E-03 0 1.3429E+07 1.2326E+04 1.2308E+04 3.8242E+03 8.4839E+03 2.8084E+03 60
760.- 780. 66 0.1322E-02 0 1.3530E+07 1.2408E+04 1.2388E+04 3.8914E+03 8.4970E+03 2.9133E+03 67
780.- 800. 57 0.1142E-02 0 1.3587E+07 1.2645E+04 1.2626E+04 3.7448E+03 8.8813E+03 2.8126E+03 61
800.- 820. 75 0.1503E-02 0 1.3677E+07 1.2819E+04 1.2798E+04 3.6128E+03 9.1849E+03 2.7229E+03 62
820.- 840. 67 0.1342E-02 0 1.3673E+07 1.3256E+04 1.3236E+04 3.6982E+03 9.5373E+03 2.7499E+03 62
840.- 860. 61 0.1222E-02 0 1.3697E+07 1.3822E+04 1.3804E+04 4.0137E+03 9.7899E+03 2.9347E+03 60
860.- 880. 56 0.1122E-02 0 1.3739E+07 1.3432E+04 1.3413E+04 3.8921E+03 9.5214E+03 2.8721E+03 63
880.- 900. 61 0.1222E-02 0 1.3732E+07 1.3436E+04 1.3416E+04 3.5005E+03 9.9158E+03 2.6011E+03 55
900.- 920. 76 0.1523E-02 0 1.3785E+07 1.4464E+04 1.4441E+04 3.9498E+03 1.0491E+04 2.9472E+03 69
920.- 940. 78 0.1563E-02 0 1.3822E+07 1.3271E+04 1.3246E+04 2.9036E+03 1.0343E+04 2.1800E+03 49
940.- 960. 76 0.1523E-02 0 1.3864E+07 1.3718E+04 1.3693E+04 3.4238E+03 1.0270E+04 2.5168E+03 56
960.- 980. 102 0.2044E-02 0 1.3841E+07 1.4930E+04 1.4901E+04 3.6913E+03 1.1209E+04 2.7191E+03 59
980.- 1000. 101 0.2024E-02 0 1.3842E+07 1.4484E+04 1.4454E+04 2.9373E+03 1.1517E+04 2.2362E+03 54
1000.- 1020. 135 0.2705E-02 0 1.4080E+07 1.7418E+04 1.7389E+04 4.7158E+03 1.2673E+04 3.5295E+03 77
1020.- 1040. 137 0.2745E-02 0 1.4156E+07 1.6475E+04 1.6444E+04 3.4188E+03 1.3025E+04 2.5617E+03 55
1040.- 1060. 163 0.3266E-02 0 1.4184E+07 1.8807E+04 1.8773E+04 5.5211E+03 1.3252E+04 4.1357E+03 90
1060.- 1080. 172 0.3446E-02 0 1.4265E+07 1.7687E+04 1.7650E+04 4.2973E+03 1.3353E+04 3.2153E+03 69
1080.- 1100. 183 0.3666E-02 0 1.4339E+07 1.9229E+04 1.9189E+04 4.5442E+03 1.4644E+04 3.4223E+03 83
1100.- 1120. 230 0.4608E-02 0 1.4371E+07 2.0002E+04 1.9957E+04 5.2312E+03 1.4726E+04 3.9323E+03 92
1120.- 1140. 223 0.4468E-02 0 1.4387E+07 2.0442E+04 2.0393E+04 5.0682E+03 1.5325E+04 3.8277E+03 97
1140.- 1160. 260 0.5209E-02 0 1.4407E+07 2.1141E+04 2.1089E+04 5.2139E+03 1.5875E+04 3.9281E+03 93
1160.- 1180. 256 0.5129E-02 0 1.4419E+07 2.1932E+04 2.1880E+04 4.8914E+03 1.6989E+04 3.6857E+03 87
1180.- 1200. 266 0.5329E-02 0 1.4403E+07 2.0998E+04 2.0942E+04 4.1472E+03 1.6795E+04 3.1278E+03 75
1200.- 1220. 310 0.6211E-02 0 1.4429E+07 2.1746E+04 2.1683E+04 4.2789E+03 1.7404E+04 3.2299E+03 79
1220.- 1240. 335 0.6712E-02 0 1.4360E+07 2.1907E+04 2.1840E+04 3.8077E+03 1.8033E+04 2.8797E+03 71
1240.- 1260. 345 0.6912E-02 0 1.4311E+07 2.3984E+04 2.3913E+04 4.3132E+03 1.9600E+04 3.2721E+03 86
1260.- 1280. 412 0.8254E-02 0 1.4196E+07 2.5302E+04 2.5221E+04 4.9334E+03 2.0287E+04 3.7362E+03 96
1280.- 1300. 434 0.8695E-02 0 1.4103E+07 2.5419E+04 2.5332E+04 4.5231E+03 2.0809E+04 3.4439E+03 96
1300.- 1320. 524 0.1050E-01 0 1.3994E+07 2.5654E+04 2.5554E+04 4.0853E+03 2.1469E+04 3.1150E+03 90
1320.- 1340. 504 0.1010E-01 0 1.3816E+07 2.5342E+04 2.5242E+04 2.9180E+03 2.2324E+04 2.2226E+03 62
1340.- 1360. 543 0.1088E-01 0 1.3642E+07 2.6830E+04 2.6724E+04 3.3818E+03 2.3342E+04 2.5811E+03 75
1360.- 1380. 596 0.1194E-01 0 1.3402E+07 2.8120E+04 2.8005E+04 3.8439E+03 2.4161E+04 2.9280E+03 82
1380.- 1400. 717 0.1436E-01 0 1.3184E+07 2.9979E+04 2.9842E+04 4.1288E+03 2.5713E+04 3.1416E+03 87
1400.- 1420. 722 0.1447E-01 0 1.2880E+07 2.8649E+04 2.8509E+04 2.9433E+03 2.5566E+04 2.2588E+03 73
1420.- 1440. 810 0.1623E-01 0 1.2584E+07 3.1428E+04 3.1273E+04 3.4374E+03 2.7836E+04 2.6310E+03 80
1440.- 1460. 914 0.1831E-01 6 1.2278E+07 3.1539E+04 3.1364E+04 2.5359E+03 2.8828E+04 1.9384E+03 58
1460.- 1480. 999 0.2001E-01 5 1.1903E+07 3.2626E+04 3.2440E+04 2.7435E+03 2.9696E+04 2.1094E+03 70
1480.- 1500. 1062 0.2128E-01 12 1.1433E+07 3.2844E+04 3.2644E+04 2.4960E+03 3.0148E+04 1.9152E+03 61
1500.- 1520. 1135 0.2274E-01 26 1.0979E+07 3.3403E+04 3.3190E+04 2.2233E+03 3.0967E+04 1.7083E+03 56
1520.- 1540. 1288 0.2580E-01 44 1.0520E+07 3.4163E+04 3.3926E+04 1.8089E+03 3.2117E+04 1.3906E+03 46
1540.- 1560. 1338 0.2681E-01 35 1.0023E+07 3.4775E+04 3.4524E+04 1.3670E+03 3.3157E+04 1.0528E+03 36
1560.- 1580. 1540 0.3085E-01 26 9.4177E+06 3.3785E+04 3.3505E+04 6.4694E+02 3.2858E+04 4.9947E+02 18
1580.- 1600. 1586 0.3178E-01 33 8.8724E+06 3.5343E+04 3.5049E+04 7.1209E+02 3.4337E+04 5.5145E+02 21
1600.- 1620. 1752 0.3510E-01 20 8.2827E+06 3.6346E+04 3.6025E+04 6.9539E+02 3.5330E+04 5.3792E+02 20
1620.- 1640. 1779 0.3564E-01 34 7.6182E+06 3.4706E+04 3.4378E+04 2.6638E+02 3.4112E+04 2.0644E+02 8
1640.- 1660. 1930 0.3867E-01 24 6.9073E+06 3.4237E+04 3.3890E+04 2.4741E+02 3.3642E+04 1.9123E+02 7
1660.- 1680. 1976 0.3959E-01 29 6.2771E+06 3.3192E+04 3.2830E+04 1.6325E+02 3.2666E+04 1.2665E+02 5
1680.- 1700. 2198 0.4404E-01 25 5.6289E+06 3.2640E+04 3.2250E+04 1.0976E+02 3.2140E+04 8.4723E+01 3
1700.- 1720. 2252 0.4512E-01 30 4.9367E+06 3.1033E+04 3.0633E+04 0.0000E+00 3.0633E+04 0.0000E+00 0
1720.- 1740. 2340 0.4688E-01 25 4.2496E+06 2.8780E+04 2.8375E+04 0.0000E+00 2.8375E+04 0.0000E+00 0
1740.- 1760. 2110 0.4227E-01 45 3.5530E+06 2.6039E+04 2.5661E+04 3.3366E+01 2.5628E+04 2.5862E+01 1
1760.- 1780. 2150 0.4307E-01 27 2.9028E+06 2.3025E+04 2.2652E+04 0.0000E+00 2.2652E+04 0.0000E+00 0
1780.- 1800. 2121 0.4249E-01 44 2.3328E+06 2.0583E+04 2.0217E+04 0.0000E+00 2.0217E+04 0.0000E+00 0
1800.- 1820. 1999 0.4005E-01 34 1.8088E+06 1.7203E+04 1.6866E+04 0.0000E+00 1.6866E+04 0.0000E+00 0
1820.- 1840. 1770 0.3546E-01 50 1.3664E+06 1.3980E+04 1.3678E+04 0.0000E+00 1.3678E+04 0.0000E+00 0
1840.- 1860. 1497 0.2999E-01 41 9.5577E+05 1.0358E+04 1.0109E+04 0.0000E+00 1.0109E+04 0.0000E+00 0
1860.- 1880. 1267 0.2538E-01 63 6.4489E+05 7.6871E+03 7.4821E+03 0.0000E+00 7.4821E+03 0.0000E+00 0
1880.- 1900. 1027 0.2058E-01 112 4.2244E+05 5.3712E+03 5.2085E+03 0.0000E+00 5.2085E+03 0.0000E+00 0
1900.- 1920. 683 0.1368E-01 214 2.5537E+05 3.4957E+03 3.3865E+03 0.0000E+00 3.3865E+03 0.0000E+00 0
1920.- 1940. 443 0.8875E-02 519 1.4596E+05 1.9843E+03 1.9160E+03 0.0000E+00 1.9160E+03 0.0000E+00 0
1940.- 1960. 303 0.6071E-02 1119 8.0753E+04 1.1719E+03 1.1264E+03 0.0000E+00 1.1264E+03 0.0000E+00 0
1960.- 1980. 188 0.3767E-02 2300 4.2577E+04 7.0586E+02 6.7712E+02 0.0000E+00 6.7712E+02 0.0000E+00 0
1980.- 2000. 94 0.1883E-02 3793 3.0422E+04 5.6517E+02 5.3904E+02 0.0000E+00 5.3904E+02 0.0000E+00 0
2000.- 2020. 48 0.9617E-03 5725 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 24 0.4808E-03 7266 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 7 0.1402E-03 7839 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 2 0.4007E-04 7123 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 5599 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 3656 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2120.- 2140. 0 0.0000E+00 2106 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2140.- 2160. 0 0.0000E+00 1007 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2160.- 2180. 0 0.0000E+00 470 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2180.- 2200. 0 0.0000E+00 218 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2200.- 2220. 0 0.0000E+00 82 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2220.- 2240. 0 0.0000E+00 42 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2240.- 2260. 0 0.0000E+00 32 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2260.- 2280. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2280.- 2300. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2300.- 2320. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2320.- 2340. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2320.- 2340. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2340.- 2360. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2360.- 2380. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2380.- 2400. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2400.- 2420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2420.- SUT 0 0.0000E+00
4992 1.0000E+00 4992 1.2474E+08 1.7988E+05 1.7888E+05 3.1476E+04 1.4740E+05 2.3177E+04 485
49913 1.0000E+00 49913 1.2471E+09 1.8293E+06 1.8193E+06 3.3461E+05 1.4846E+06 2.4534E+05 5132
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.2288E+05 4.6114E+02 2.3118E+02 2.2996E+02 8.3643E+05 4.8304E+02 9.8964E+01 3.8408E+02 2 1
20.- 40. 4.2478E+05 7.5716E+02 4.8167E+02 2.7549E+02 8.4467E+05 3.8439E+02 4.5282E+01 3.3911E+02 4 1
40.- 60. 4.2832E+05 2.3935E+02 0.0000E+00 2.3935E+02 8.5133E+05 6.0764E+02 2.5107E+02 3.5657E+02 0 2
60.- 80. 4.2235E+05 6.3492E+02 3.7223E+02 2.6269E+02 8.5920E+05 7.0681E+02 2.6374E+02 4.4307E+02 3 2
80.- 100. 4.2536E+05 4.1367E+02 1.8192E+02 2.3176E+02 8.5261E+05 7.2939E+02 4.3114E+02 2.9824E+02 2 3
100.- 120. 4.3455E+05 6.5558E+02 3.7127E+02 2.8431E+02 8.5400E+05 4.9471E+02 2.3280E+02 2.6190E+02 3 4
120.- 140. 4.2863E+05 2.0219E+02 0.0000E+00 2.0219E+02 8.6631E+05 3.6888E+02 3.3482E+01 3.3540E+02 0 1
140.- 160. 4.3553E+05 3.0239E+02 8.3304E+01 2.1909E+02 8.6826E+05 7.4709E+02 4.3581E+02 3.1128E+02 1 2
160.- 180. 4.4068E+05 2.3628E+02 0.0000E+00 2.3628E+02 8.7550E+05 5.5545E+02 1.5322E+02 4.0222E+02 0 2
180.- 200. 4.3860E+05 2.5110E+02 3.9912E+01 2.1119E+02 8.7663E+05 4.8195E+02 1.0392E+02 3.7803E+02 1 2
200.- 220. 4.4349E+05 3.9103E+02 9.3955E+01 2.9708E+02 8.7784E+05 5.2895E+02 1.9735E+02 3.3160E+02 2 2
220.- 240. 4.4277E+05 4.2209E+02 1.3785E+02 2.8424E+02 8.8903E+05 4.0637E+02 7.0786E+01 3.3559E+02 1 2
240.- 260. 4.4542E+05 4.1587E+02 1.3177E+02 2.8409E+02 8.9324E+05 7.6029E+02 4.6726E+02 2.9303E+02 3 3
260.- 280. 4.4640E+05 3.1590E+02 8.3316E+01 2.3258E+02 9.0192E+05 1.3083E+03 8.8265E+02 4.2566E+02 2 3
280.- 300. 4.5204E+05 3.7808E+02 5.0817E+01 3.2727E+02 9.1357E+05 4.9795E+02 1.3196E+02 3.6600E+02 1 2
300.- 320. 4.5213E+05 2.2009E+02 0.0000E+00 2.2009E+02 9.1106E+05 5.0729E+02 7.2964E+01 4.3433E+02 0 2
320.- 340. 4.6311E+05 5.8529E+02 2.8281E+02 3.0247E+02 9.1205E+05 6.5117E+02 2.6541E+02 3.8576E+02 2 4
340.- 360. 4.6010E+05 3.6145E+02 3.9078E+01 3.2237E+02 9.2426E+05 6.1453E+02 2.1333E+02 4.0120E+02 1 2
360.- 380. 4.6527E+05 3.5753E+02 1.2426E+02 2.3327E+02 9.3394E+05 6.1259E+02 2.2247E+02 3.9013E+02 3 5
380.- 400. 4.6614E+05 6.2227E+02 3.1216E+02 3.1011E+02 9.4214E+05 4.6203E+02 1.2780E+02 3.3423E+02 3 3
400.- 420. 5.1126E+04 4.5747E+01 0.0000E+00 4.5747E+01 1.0328E+05 4.7386E+01 0.0000E+00 4.7386E+01 0 0
0.- 20. 4.1773E+06 4.2859E+03 2.0638E+03 2.2222E+03 8.3636E+06 5.9033E+03 2.7198E+03 3.1835E+03 23 19
20.- 40. 4.2178E+06 4.6207E+03 2.1112E+03 2.5095E+03 8.4132E+06 4.5732E+03 1.5882E+03 2.9850E+03 23 22
40.- 60. 4.2277E+06 3.9337E+03 1.5432E+03 2.3905E+03 8.4575E+06 5.0329E+03 1.5933E+03 3.4396E+03 15 12
60.- 80. 4.2404E+06 3.7463E+03 1.4498E+03 2.2965E+03 8.5127E+06 4.5746E+03 1.1811E+03 3.3935E+03 14 17
80.- 100. 4.2789E+06 4.3301E+03 1.7692E+03 2.5609E+03 8.5337E+06 5.3852E+03 1.8909E+03 3.4944E+03 24 19
100.- 120. 4.3005E+06 3.8688E+03 1.5369E+03 2.3319E+03 8.5883E+06 5.7707E+03 2.4540E+03 3.3167E+03 22 27
120.- 140. 4.3136E+06 4.1055E+03 1.7594E+03 2.3461E+03 8.6643E+06 5.9403E+03 2.3683E+03 3.5720E+03 25 23
140.- 160. 4.3591E+06 4.5728E+03 2.1179E+03 2.4549E+03 8.7106E+06 5.1156E+03 1.6006E+03 3.5149E+03 20 18
160.- 180. 4.4056E+06 4.1335E+03 1.7250E+03 2.4085E+03 8.7555E+06 6.4700E+03 2.9874E+03 3.4827E+03 20 26
180.- 200. 4.4181E+06 3.6095E+03 9.5692E+02 2.6526E+03 8.7952E+06 4.8801E+03 1.2001E+03 3.6800E+03 11 15
200.- 220. 4.4395E+06 4.3098E+03 1.6449E+03 2.6650E+03 8.8335E+06 5.6107E+03 2.1109E+03 3.4998E+03 25 21
220.- 240. 4.4530E+06 4.0224E+03 1.2563E+03 2.7661E+03 8.9034E+06 5.1855E+03 1.6544E+03 3.5311E+03 17 19
240.- 260. 4.4814E+06 4.1324E+03 1.3846E+03 2.7478E+03 8.9685E+06 5.9460E+03 2.1973E+03 3.7487E+03 21 20
260.- 280. 4.5127E+06 3.9653E+03 1.1927E+03 2.7726E+03 9.0406E+06 7.9816E+03 4.3275E+03 3.6541E+03 19 28
280.- 300. 4.5392E+06 3.9731E+03 1.3384E+03 2.6346E+03 9.1167E+06 7.7966E+03 4.1742E+03 3.6224E+03 17 35
300.- 320. 4.5773E+06 4.3766E+03 1.6894E+03 2.6871E+03 9.1407E+06 5.0796E+03 9.2116E+02 4.1584E+03 21 16
320.- 340. 4.5974E+06 4.5887E+03 1.5532E+03 3.0355E+03 9.1964E+06 7.2255E+03 3.0612E+03 4.1642E+03 21 28
340.- 360. 4.6363E+06 4.5323E+03 1.6914E+03 2.8409E+03 9.2514E+06 7.1817E+03 3.0180E+03 4.1637E+03 20 26
360.- 380. 4.6693E+06 3.9195E+03 1.0668E+03 2.8527E+03 9.3187E+06 5.4368E+03 1.6489E+03 3.7879E+03 17 23
380.- 400. 4.6900E+06 4.2793E+03 1.3381E+03 2.9413E+03 9.3676E+06 5.8377E+03 1.5535E+03 4.2842E+03 21 26
400.- 420. 5.1166E+05 4.0571E+02 1.4193E+02 2.6377E+02 1.0257E+06 6.4138E+02 4.2396E+01 5.9899E+02 1 1
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.8897E+06 8.2691E+03 3.0175E+03 5.2516E+03 1.7787E+07 1.1956E+04 4.7014E+03 7.2548E+03 34 48
8.9047E+07 8.3712E+04 3.1331E+04 5.2381E+04 1.7796E+08 1.1757E+05 4.4293E+04 7.3276E+04 397 441
DAMAGE IN LAYER 1 : 2.0133E+04
DAMAGE IN LAYER 1 : 2.0026E+05
DAMAGE IN LAYER 2 : 2.7344E+04
DAMAGE IN LAYER 2 : 2.8987E+05
DAMAGE IN LAYER 3 : 1.9702E+04
DAMAGE IN LAYER 3 : 1.9773E+05
DAMAGE IN LAYER 4 : 1.1170E+05
DAMAGE IN LAYER 4 : 1.1314E+06
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.6000E-03 ENERGY REFL.COEF.= 7.2681E-04 REL.MEAN ENERGY = 4.5426E-01 MEAN ENERGY = 1.1356E+04
PART.REFL.COEF.= 1.7400E-03 ENERGY REFL.COEF.= 7.6897E-04 REL.MEAN ENERGY = 4.4194E-01 MEAN ENERGY = 1.1048E+04
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.1356E+04 6.7202E+07 -1.7778E-01 1.5038E+00 8.1977E+03 2.8983E+03 1.6864E+07 5.6742E-01
PATHLENGTH 9.8231E+02 3.1163E+05 1.5290E-01 1.6489E+00 5.5824E+02 1.9737E+02 8.8751E+04 5.1824E-01
ELASTIC LOSS 2.9040E+02 1.5216E+04 1.2335E+02 1.5419E+01
INEL. LOSS 1.3480E+04 6.4376E+07 8.0234E+03 1.0029E+03
ENERGY 1.1048E+04 5.3640E+07 2.0988E-01 1.7861E+00 7.3239E+03 7.8521E+02 5.0989E+06 1.5783E-01
PATHLENGTH 9.6757E+02 2.4129E+05 -2.5250E-01 2.0282E+00 4.9121E+02 5.2663E+01 2.6231E+04 1.5407E-01
ELASTIC LOSS 3.2136E+02 1.5753E+04 1.2551E+02 1.4427E+00
INEL. LOSS 1.3709E+04 5.4748E+07 7.3992E+03 8.5048E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.1356E+04 1.9617E+08 3.6562E+12 7.0977E+16 1.4163E+21 2.8825E+25
LOGENERGY 3.7126E+00 1.4341E+01 5.6988E+01 2.3090E+02 9.4789E+02 3.9261E+03
PATHLENGTH 9.8231E+02 1.2766E+06 1.8928E+09 3.0000E+12 4.9371E+15 8.3131E+18
ENERGY 1.1048E+04 1.7571E+08 3.2090E+12 6.2970E+16 1.2906E+21 2.7228E+25
LOGENERGY 3.8441E+00 1.5116E+01 6.0276E+01 2.4271E+02 9.8463E+02 4.0188E+03
PATHLENGTH 9.6757E+02 1.1775E+06 1.5763E+09 2.2340E+12 3.2972E+15 5.0206E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -392,5 +393,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 0 1 0 1 1 2 0 0 0 0 1 0 2 0 0
0.000 0.000 0.000 0.000 0.000 0.000 2.500 0.000 2.500 2.500 5.000 0.000 0.000 0.000 0.000 2.500 0.000 5.000 0.000 0.000
0 1 1 2 5 5 2 2 4 10 7 5 7 3 2 4 11 8 4 4
0.000 0.230 0.230 0.460 1.149 1.149 0.460 0.460 0.920 2.299 1.609 1.149 1.609 0.690 0.460 0.920 2.529 1.839 0.920 0.920
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.rge
+102 -102
View File
@@ -1,108 +1,108 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 0
90.0000 0
110.0000 1
130.0000 0
150.0000 0
170.0000 1
190.0000 2
210.0000 0
230.0000 3
250.0000 0
270.0000 1
290.0000 0
310.0000 1
330.0000 0
350.0000 0
370.0000 0
390.0000 0
410.0000 3
430.0000 2
450.0000 7
470.0000 3
490.0000 2
510.0000 2
530.0000 5
550.0000 1
570.0000 2
590.0000 2
610.0000 4
630.0000 9
650.0000 6
670.0000 9
690.0000 3
710.0000 2
730.0000 3
750.0000 2
770.0000 7
790.0000 6
810.0000 5
830.0000 11
850.0000 7
870.0000 7
890.0000 6
910.0000 8
930.0000 8
950.0000 8
970.0000 14
990.0000 10
1010.0000 12
1030.0000 13
1050.0000 23
1070.0000 17
1090.0000 14
1110.0000 30
1130.0000 21
1150.0000 31
1170.0000 26
1190.0000 28
1210.0000 27
1230.0000 30
1250.0000 24
1270.0000 49
1290.0000 35
1310.0000 41
1330.0000 46
1350.0000 56
1370.0000 61
1390.0000 69
1410.0000 82
1430.0000 74
1450.0000 93
1470.0000 90
1490.0000 101
1510.0000 123
1530.0000 128
1550.0000 122
1570.0000 141
1590.0000 162
1610.0000 174
1630.0000 155
1650.0000 198
1670.0000 196
1690.0000 200
1710.0000 247
1730.0000 251
1750.0000 226
1770.0000 209
1790.0000 231
1810.0000 218
1830.0000 163
1850.0000 164
1870.0000 126
1890.0000 114
1910.0000 66
1930.0000 46
1950.0000 28
1970.0000 23
1990.0000 9
2010.0000 4
2030.0000 0
2050.0000 0
2070.0000 1
50.0000 3
70.0000 2
90.0000 6
110.0000 5
130.0000 5
150.0000 6
170.0000 8
190.0000 8
210.0000 4
230.0000 5
250.0000 9
270.0000 11
290.0000 8
310.0000 7
330.0000 12
350.0000 14
370.0000 9
390.0000 14
410.0000 28
430.0000 20
450.0000 24
470.0000 27
490.0000 29
510.0000 37
530.0000 43
550.0000 37
570.0000 40
590.0000 51
610.0000 48
630.0000 65
650.0000 63
670.0000 71
690.0000 92
710.0000 34
730.0000 45
750.0000 48
770.0000 66
790.0000 57
810.0000 75
830.0000 67
850.0000 61
870.0000 56
890.0000 61
910.0000 76
930.0000 78
950.0000 76
970.0000 102
990.0000 101
1010.0000 135
1030.0000 137
1050.0000 163
1070.0000 172
1090.0000 183
1110.0000 230
1130.0000 223
1150.0000 260
1170.0000 256
1190.0000 266
1210.0000 310
1230.0000 335
1250.0000 345
1270.0000 412
1290.0000 434
1310.0000 524
1330.0000 504
1350.0000 543
1370.0000 596
1390.0000 717
1410.0000 722
1430.0000 810
1450.0000 914
1470.0000 999
1490.0000 1062
1510.0000 1135
1530.0000 1288
1550.0000 1338
1570.0000 1540
1590.0000 1586
1610.0000 1752
1630.0000 1779
1650.0000 1930
1670.0000 1976
1690.0000 2198
1710.0000 2252
1730.0000 2340
1750.0000 2110
1770.0000 2150
1790.0000 2121
1810.0000 1999
1830.0000 1770
1850.0000 1497
1870.0000 1267
1890.0000 1027
1910.0000 683
1930.0000 443
1950.0000 303
1970.0000 188
1990.0000 94
2010.0000 48
2030.0000 24
2050.0000 7
2070.0000 2
2090.0000 0
2110.0000 0
2130.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
25.00 0.45 0.00 15.00 5000 4992 8 0 5000 0 0.1599E+04 0.2590E+03 0.1136E+05 0.8198E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 10 60 104 4818
25.00 0.45 0.00 15.00 50000 49913 87 0 50000 0 0.1593E+04 0.2623E+03 0.1105E+05 0.7324E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 136 675 1003 48099
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 3000 450 0 15 0.5 0.0 0.0 0.0
5000 78742 78742 78742 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78742 78742 78742 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.out
+87 -86
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:25
Start: 19.Jun. 2026 20:09:34
End: 18.Jun. 2026 09:50:26
End: 19.Jun. 2026 20:09:44
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 10 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 3000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78742.00 78742.00 78742.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78742.00 78742.00 78742.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
14536 0 0 0 0 0 0 0 0
144532 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,118 +162,118 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4854 ENERGY=0.1456E+08 EV
BACKSCATTERED PARTICLES= 146 ENERGY=0.1146E+06 EV
IMPLANTED PARTICLES= 48599 ENERGY=0.1458E+09 EV
BACKSCATTERED PARTICLES= 1401 ENERGY=0.1129E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4844 4844
IMPLANTED PARTICLES (LAYER 1)= 48541 48541
IMPLANTED PARTICLES (LAYER 2)= 10 10
IMPLANTED PARTICLES (LAYER 2)= 58 58
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4854 0
IMPLANTED PARTICLES (LAYER 4)= 48599 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.0 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.014
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.974
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.015
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.971
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 2.1911E+02 5.6423E+03 -3.5288E-01 2.7145E+00 7.5116E+01 1.0782E+00 1.0604E+02 2.5784E-02
SPREAD 1.2808E+02 3.8939E+03 3.5418E-01 2.6737E+00 6.2402E+01 8.9566E-01 7.2308E+01 2.7206E-02
PATHLENGTH 4.2087E+02 1.2224E+03 -1.2559E-01 3.0294E+00 3.4963E+01 5.0183E-01 2.4994E+01 3.4238E-02
ELASTIC LOSS 2.1281E+01 8.0284E+01 8.9601E+00 1.8459E-03
INEL. LOSS 2.9744E+03 1.9424E+05 4.4072E+02 9.0796E-02
PENETRATION 2.2019E+02 5.6302E+03 -3.8757E-01 2.7766E+00 7.5035E+01 3.4037E-01 3.4041E+01 8.0969E-03
SPREAD 1.2767E+02 3.7851E+03 3.7582E-01 2.7197E+00 6.1523E+01 2.7908E-01 2.2516E+01 8.7569E-03
PATHLENGTH 4.2100E+02 1.2597E+03 -1.5702E-01 3.0459E+00 3.5492E+01 1.6100E-01 8.1732E+00 1.1305E-02
ELASTIC LOSS 2.1287E+01 8.3772E+01 9.1527E+00 1.8833E-04
INEL. LOSS 2.9765E+03 1.9938E+05 4.4652E+02 9.1879E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.1529E-01 5.4130E-01 2.5051E+01 1.0227E+03 7.3573E-01 7.6915E-04 1.8088E-02 8.4821E-01
WEAK EL.LOSS 2.7650E-03 3.2121E-05 3.0457E+00 1.2635E+01 5.6675E-03 5.9250E-06 1.1454E-07 6.0035E-03
INELAST.LOSS 1.6116E+01 7.8845E+01 -1.6392E-01 1.7925E+00 8.8795E+00 9.2828E-03 7.3376E-02 1.5409E-03
SUBTHR.LOSS 1.1242E-01 4.2764E-01 1.8812E+01 5.0998E+02 6.5395E-01 6.8368E-04 1.0087E-02 2.4078E-01
ELAST.LOSS 1.1547E-01 5.7117E-01 2.7608E+01 1.3144E+03 7.5576E-01 2.4978E-04 6.8414E-03 4.2488E-01
WEAK EL.LOSS 2.7705E-03 3.2213E-05 3.0426E+00 1.2613E+01 5.6757E-03 1.8758E-06 3.6281E-08 1.8905E-03
INELAST.LOSS 1.6117E+01 7.8936E+01 -1.6286E-01 1.7922E+00 8.8846E+00 2.9364E-03 2.3220E-02 4.8712E-04
SUBTHR.LOSS 1.1213E-01 4.2853E-01 1.9016E+01 5.2210E+02 6.5462E-01 2.1636E-04 3.2332E-03 7.7496E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 2.1911E+02 5.3654E+04 1.4079E+07 3.8858E+09 1.1161E+12 3.3144E+14
PENETRATION 2.2019E+02 5.4113E+04 1.4231E+07 3.9322E+09 1.1300E+12 3.3546E+14
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 20 0.4120E-02 0 1.3532E+06 4.0074E+03 3.9907E+03 4.5987E+02 3.5308E+03 3.5262E+02 12
20.- 40. 43 0.8859E-02 0 1.3654E+06 4.4215E+03 4.3922E+03 3.9148E+02 4.0008E+03 2.9877E+02 10
40.- 60. 61 0.1257E-01 0 1.3727E+06 5.1032E+03 5.0612E+03 3.6764E+02 4.6936E+03 2.7693E+02 9
60.- 80. 111 0.2287E-01 0 1.3404E+06 6.1479E+03 6.0869E+03 5.4373E+02 5.5431E+03 4.1051E+02 14
80.- 100. 131 0.2699E-01 0 1.3334E+06 6.8406E+03 6.7646E+03 2.8608E+02 6.4785E+03 2.1446E+02 7
100.- 120. 179 0.3688E-01 0 1.2965E+06 7.5280E+03 7.4262E+03 2.5338E+02 7.1729E+03 1.9208E+02 7
120.- 140. 224 0.4615E-01 0 1.2166E+06 8.0520E+03 7.9226E+03 1.0834E+02 7.8143E+03 8.1877E+01 3
140.- 160. 293 0.6036E-01 0 1.1200E+06 8.3508E+03 8.1942E+03 6.6053E+01 8.1281E+03 5.0149E+01 2
160.- 180. 332 0.6840E-01 0 1.0257E+06 9.3576E+03 9.1737E+03 9.4331E+01 9.0794E+03 7.1796E+01 3
180.- 200. 405 0.8344E-01 0 8.8701E+05 9.4281E+03 9.2037E+03 6.2290E+01 9.1415E+03 4.7432E+01 2
200.- 220. 475 0.9786E-01 0 7.4369E+05 8.9843E+03 8.7392E+03 0.0000E+00 8.7392E+03 0.0000E+00 0
220.- 240. 490 0.1009E+00 0 5.8136E+05 8.2585E+03 8.0027E+03 0.0000E+00 8.0027E+03 0.0000E+00 0
240.- 260. 535 0.1102E+00 0 4.4269E+05 7.2213E+03 6.9487E+03 0.0000E+00 6.9487E+03 0.0000E+00 0
260.- 280. 493 0.1016E+00 0 3.0282E+05 5.6119E+03 5.3727E+03 0.0000E+00 5.3727E+03 0.0000E+00 0
280.- 300. 389 0.8014E-01 2 1.7931E+05 3.9568E+03 3.7669E+03 0.0000E+00 3.7669E+03 0.0000E+00 0
300.- 320. 319 0.6572E-01 10 1.0215E+05 2.4546E+03 2.3072E+03 0.0000E+00 2.3072E+03 0.0000E+00 0
320.- 340. 185 0.3811E-01 51 5.1861E+04 1.3486E+03 1.2631E+03 0.0000E+00 1.2631E+03 0.0000E+00 0
340.- 360. 96 0.1978E-01 161 2.0326E+04 5.8743E+02 5.4486E+02 0.0000E+00 5.4486E+02 0.0000E+00 0
360.- 380. 49 0.1009E-01 371 7.1590E+03 2.3126E+02 2.1218E+02 0.0000E+00 2.1218E+02 0.0000E+00 0
380.- 400. 14 0.2884E-02 707 2.6273E+03 8.9300E+01 8.2164E+01 0.0000E+00 8.2164E+01 0.0000E+00 0
400.- 420. 8 0.1648E-02 1055 8.1529E+02 3.1390E+01 2.7741E+01 0.0000E+00 2.7741E+01 0.0000E+00 0
420.- 440. 2 0.4120E-03 1051 8.3977E+01 3.9977E+00 3.1384E+00 0.0000E+00 3.1384E+00 0.0000E+00 0
440.- 460. 0 0.0000E+00 827 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 419 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 157 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 37 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 211 0.4342E-02 0 1.3562E+07 3.9525E+04 3.9342E+04 5.0959E+03 3.4246E+04 3.8445E+03 119
20.- 40. 490 0.1008E-01 0 1.3635E+07 4.6967E+04 4.6651E+04 5.8420E+03 4.0809E+04 4.3855E+03 132
40.- 60. 678 0.1395E-01 0 1.3605E+07 5.1192E+04 5.0763E+04 4.6078E+03 4.6155E+04 3.4726E+03 111
60.- 80. 995 0.2047E-01 0 1.3421E+07 5.7643E+04 5.7069E+04 4.4008E+03 5.2669E+04 3.3206E+03 112
80.- 100. 1226 0.2523E-01 0 1.3178E+07 6.5226E+04 6.4501E+04 4.0634E+03 6.0438E+04 3.0584E+03 103
100.- 120. 1647 0.3389E-01 0 1.2749E+07 7.2171E+04 7.1227E+04 2.4970E+03 6.8730E+04 1.8873E+03 69
120.- 140. 2186 0.4498E-01 0 1.2179E+07 8.0878E+04 7.9649E+04 1.7984E+03 7.7850E+04 1.3571E+03 49
140.- 160. 2756 0.5671E-01 0 1.1345E+07 8.6858E+04 8.5306E+04 1.2951E+03 8.4011E+04 9.8165E+02 38
160.- 180. 3404 0.7004E-01 0 1.0240E+07 9.2435E+04 9.0575E+04 6.9288E+02 8.9882E+04 5.2467E+02 20
180.- 200. 4123 0.8484E-01 0 8.9972E+06 9.4571E+04 9.2353E+04 2.9987E+02 9.2053E+04 2.2753E+02 9
200.- 220. 4715 0.9702E-01 0 7.5082E+06 9.3070E+04 9.0572E+04 7.4026E+01 9.0498E+04 5.5852E+01 2
220.- 240. 5139 0.1057E+00 0 5.9433E+06 8.4322E+04 8.1653E+04 3.0620E+01 8.1622E+04 2.3336E+01 1
240.- 260. 5160 0.1062E+00 2 4.4265E+06 7.2321E+04 6.9669E+04 0.0000E+00 6.9669E+04 0.0000E+00 0
260.- 280. 5086 0.1047E+00 8 3.0113E+06 5.6515E+04 5.4045E+04 0.0000E+00 5.4045E+04 0.0000E+00 0
280.- 300. 3958 0.8144E-01 25 1.8763E+06 4.0008E+04 3.8063E+04 0.0000E+00 3.8063E+04 0.0000E+00 0
300.- 320. 3100 0.6379E-01 125 1.0545E+06 2.5291E+04 2.3847E+04 0.0000E+00 2.3847E+04 0.0000E+00 0
320.- 340. 1984 0.4082E-01 543 5.1452E+05 1.3949E+04 1.3046E+04 0.0000E+00 1.3046E+04 0.0000E+00 0
340.- 360. 1070 0.2202E-01 1629 2.0710E+05 6.1711E+03 5.7084E+03 0.0000E+00 5.7084E+03 0.0000E+00 0
360.- 380. 437 0.8992E-02 3769 7.1017E+04 2.3934E+03 2.2035E+03 0.0000E+00 2.2035E+03 0.0000E+00 0
380.- 400. 176 0.3621E-02 7046 2.1099E+04 7.6744E+02 6.9598E+02 0.0000E+00 6.9598E+02 0.0000E+00 0
400.- 420. 53 0.1091E-02 10090 4.9864E+03 2.0386E+02 1.7795E+02 0.0000E+00 1.7795E+02 0.0000E+00 0
420.- 440. 5 0.1029E-03 10706 2.9766E+02 1.2908E+01 1.0038E+01 0.0000E+00 1.0038E+01 0.0000E+00 0
440.- 460. 0 0.0000E+00 8160 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 4395 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 1641 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 389 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 68 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- SUT 0 0.0000E+00
4854 1.0000E+00 4854 1.4746E+07 1.0802E+05 1.0549E+05 2.6332E+03 1.0285E+05 1.9966E+03 69
48599 1.0000E+00 48599 1.4755E+08 1.0825E+06 1.0571E+06 3.0698E+04 1.0264E+06 2.3139E+04 765
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.5096E+05 1.6181E+03 2.5264E+02 1.3654E+03 9.0228E+05 2.3726E+03 2.0723E+02 2.1654E+03 7 5
20.- 40. 4.5063E+05 1.5686E+03 1.5839E+02 1.4102E+03 9.1480E+05 2.8237E+03 2.3309E+02 2.5906E+03 4 6
40.- 60. 4.5668E+05 1.9845E+03 3.6532E+01 1.9480E+03 9.1606E+05 3.0767E+03 3.3111E+02 2.7456E+03 1 8
60.- 80. 4.4236E+05 2.1476E+03 6.3098E+01 2.0845E+03 8.9801E+05 3.9393E+03 4.8064E+02 3.4587E+03 2 12
80.- 100. 4.4342E+05 2.2979E+03 0.0000E+00 2.2979E+03 8.8994E+05 4.4667E+03 2.8608E+02 4.1806E+03 0 7
100.- 120. 4.3457E+05 2.4404E+03 3.0173E+01 2.4102E+03 8.6191E+05 4.9858E+03 2.2321E+02 4.7626E+03 1 6
120.- 140. 4.0252E+05 2.6772E+03 0.0000E+00 2.6772E+03 8.1404E+05 5.2454E+03 1.0834E+02 5.1370E+03 0 3
140.- 160. 3.7442E+05 2.6380E+03 0.0000E+00 2.6380E+03 7.4556E+05 5.5562E+03 6.6053E+01 5.4901E+03 0 2
160.- 180. 3.3633E+05 2.9161E+03 0.0000E+00 2.9161E+03 6.8934E+05 6.2577E+03 9.4331E+01 6.1633E+03 0 3
180.- 200. 2.9385E+05 2.9965E+03 0.0000E+00 2.9965E+03 5.9316E+05 6.2072E+03 6.2290E+01 6.1449E+03 0 2
200.- 220. 2.4626E+05 2.6820E+03 0.0000E+00 2.6820E+03 4.9742E+05 6.0572E+03 0.0000E+00 6.0572E+03 0 0
220.- 240. 1.9359E+05 2.4504E+03 0.0000E+00 2.4504E+03 3.8777E+05 5.5523E+03 0.0000E+00 5.5523E+03 0 0
240.- 260. 1.4563E+05 2.1083E+03 0.0000E+00 2.1083E+03 2.9706E+05 4.8403E+03 0.0000E+00 4.8403E+03 0 0
260.- 280. 1.0105E+05 1.5964E+03 0.0000E+00 1.5964E+03 2.0178E+05 3.7763E+03 0.0000E+00 3.7763E+03 0 0
280.- 300. 5.8979E+04 1.0649E+03 0.0000E+00 1.0649E+03 1.2033E+05 2.7020E+03 0.0000E+00 2.7020E+03 0 0
300.- 320. 3.4250E+04 6.8464E+02 0.0000E+00 6.8464E+02 6.7901E+04 1.6225E+03 0.0000E+00 1.6225E+03 0 0
320.- 340. 1.6934E+04 3.9054E+02 0.0000E+00 3.9054E+02 3.4927E+04 8.7260E+02 0.0000E+00 8.7260E+02 0 0
340.- 360. 6.5959E+03 1.4885E+02 0.0000E+00 1.4885E+02 1.3730E+04 3.9601E+02 0.0000E+00 3.9601E+02 0 0
360.- 380. 2.4091E+03 6.3007E+01 0.0000E+00 6.3007E+01 4.7499E+03 1.4918E+02 0.0000E+00 1.4918E+02 0 0
380.- 400. 8.5697E+02 2.0898E+01 0.0000E+00 2.0898E+01 1.7646E+03 6.0912E+01 0.0000E+00 6.0912E+01 0 0
400.- 420. 1.4502E+01 4.6452E-01 0.0000E+00 4.6452E-01 3.6690E+01 2.8592E-01 0.0000E+00 2.8592E-01 0 0
0.- 20. 4.5210E+06 1.4879E+04 1.4303E+03 1.3448E+04 9.0410E+06 2.4464E+04 3.6656E+03 2.0798E+04 38 81
20.- 40. 4.5227E+06 1.6616E+04 1.0618E+03 1.5555E+04 9.1119E+06 3.0035E+04 4.7802E+03 2.5255E+04 28 104
40.- 60. 4.5436E+06 1.8332E+04 7.4617E+02 1.7586E+04 9.0613E+06 3.2431E+04 3.8617E+03 2.8569E+04 21 90
60.- 80. 4.4596E+06 1.9582E+04 4.9873E+02 1.9083E+04 8.9609E+06 3.7487E+04 3.9020E+03 3.3585E+04 15 97
80.- 100. 4.3902E+06 2.1554E+04 1.7517E+02 2.1379E+04 8.7879E+06 4.2947E+04 3.8882E+03 3.9059E+04 5 98
100.- 120. 4.2539E+06 2.3673E+04 6.3618E+01 2.3609E+04 8.4956E+06 4.7554E+04 2.4334E+03 4.5120E+04 2 67
120.- 140. 4.0477E+06 2.6536E+04 0.0000E+00 2.6536E+04 8.1316E+06 5.3113E+04 1.7984E+03 5.1315E+04 0 49
140.- 160. 3.7800E+06 2.7649E+04 0.0000E+00 2.7649E+04 7.5652E+06 5.7657E+04 1.2951E+03 5.6362E+04 0 38
160.- 180. 3.4057E+06 2.8686E+04 0.0000E+00 2.8686E+04 6.8344E+06 6.1889E+04 6.9288E+02 6.1196E+04 0 20
180.- 200. 2.9888E+06 2.8862E+04 0.0000E+00 2.8862E+04 6.0084E+06 6.3491E+04 2.9987E+02 6.3191E+04 0 9
200.- 220. 2.4945E+06 2.8329E+04 0.0000E+00 2.8329E+04 5.0138E+06 6.2243E+04 7.4026E+01 6.2169E+04 0 2
220.- 240. 1.9731E+06 2.4675E+04 0.0000E+00 2.4675E+04 3.9702E+06 5.6978E+04 3.0620E+01 5.6948E+04 0 1
240.- 260. 1.4720E+06 2.0968E+04 0.0000E+00 2.0968E+04 2.9545E+06 4.8701E+04 0.0000E+00 4.8701E+04 0 0
260.- 280. 9.9663E+05 1.6114E+04 0.0000E+00 1.6114E+04 2.0147E+06 3.7931E+04 0.0000E+00 3.7931E+04 0 0
280.- 300. 6.2054E+05 1.1008E+04 0.0000E+00 1.1008E+04 1.2558E+06 2.7055E+04 0.0000E+00 2.7055E+04 0 0
300.- 320. 3.4969E+05 6.9025E+03 0.0000E+00 6.9025E+03 7.0484E+05 1.6945E+04 0.0000E+00 1.6945E+04 0 0
320.- 340. 1.7159E+05 3.7163E+03 0.0000E+00 3.7163E+03 3.4293E+05 9.3299E+03 0.0000E+00 9.3299E+03 0 0
340.- 360. 6.8379E+04 1.6036E+03 0.0000E+00 1.6036E+03 1.3872E+05 4.1048E+03 0.0000E+00 4.1048E+03 0 0
360.- 380. 2.3568E+04 6.0197E+02 0.0000E+00 6.0197E+02 4.7449E+04 1.6015E+03 0.0000E+00 1.6015E+03 0 0
380.- 400. 6.8258E+03 1.8430E+02 0.0000E+00 1.8430E+02 1.4085E+04 5.0461E+02 0.0000E+00 5.0461E+02 0 0
400.- 420. 1.7419E+02 4.2065E+00 0.0000E+00 4.2065E+00 2.7846E+02 1.1256E+01 0.0000E+00 1.1256E+01 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
4.8923E+06 3.4495E+04 5.4083E+02 3.3955E+04 9.8526E+06 7.0961E+04 2.0924E+03 6.8868E+04 15 54
4.9090E+07 3.4048E+05 3.9758E+03 3.3650E+05 9.8455E+07 7.1647E+05 2.6722E+04 6.8975E+05 109 656
DAMAGE IN LAYER 1 : 1.0546E+05
DAMAGE IN LAYER 1 : 1.0569E+06
DAMAGE IN LAYER 2 : 3.0879E+01
DAMAGE IN LAYER 2 : 1.8798E+02
DAMAGE IN LAYER 3 : 0.0000E+00
@@ -282,18 +283,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.9200E-02 ENERGY REFL.COEF.= 7.6433E-03 REL.MEAN ENERGY = 2.6176E-01 MEAN ENERGY = 7.8527E+02
PART.REFL.COEF.= 2.8020E-02 ENERGY REFL.COEF.= 7.5242E-03 REL.MEAN ENERGY = 2.6853E-01 MEAN ENERGY = 8.0559E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 7.8527E+02 5.5837E+05 1.2974E+00 3.9271E+00 7.4724E+02 6.1842E+01 7.9061E+04 1.8712E-01
PATHLENGTH 2.3025E+02 1.0499E+04 -3.8989E-01 2.3947E+00 1.0246E+02 8.4800E+00 1.0262E+03 1.1744E-01
ELASTIC LOSS 3.2323E+01 1.8056E+02 1.3437E+01 9.2035E-02
INEL. LOSS 2.1078E+03 6.6738E+05 8.1693E+02 5.5954E+00
ENERGY 8.0559E+02 5.6037E+05 1.2718E+00 4.0311E+00 7.4858E+02 2.0000E+01 2.6065E+04 6.4041E-02
PATHLENGTH 2.2573E+02 1.0144E+04 -3.1267E-01 2.2415E+00 1.0072E+02 2.6908E+00 3.0198E+02 3.9468E-02
ELASTIC LOSS 3.4230E+01 2.1087E+02 1.4521E+01 1.0365E-02
INEL. LOSS 2.0683E+03 6.3026E+05 7.9389E+02 5.6666E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 7.8527E+02 1.1750E+06 2.3410E+09 5.3708E+12 1.3392E+16 3.5362E+19
LOGENERGY 2.6618E+00 7.3480E+00 2.0859E+01 6.0573E+01 1.7926E+02 5.3917E+02
PATHLENGTH 2.3025E+02 6.3516E+04 1.9040E+07 6.0282E+09 1.9874E+12 6.7622E+14
ENERGY 8.0559E+02 1.2094E+06 2.4106E+09 5.5881E+12 1.4249E+16 3.8930E+19
LOGENERGY 2.6739E+00 7.4196E+00 2.1165E+01 6.1730E+01 1.8336E+02 5.5311E+02
PATHLENGTH 2.2573E+02 6.1099E+04 1.8052E+07 5.6400E+09 1.8351E+12 6.1640E+14
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -301,5 +302,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 0 0 3 5 7 3 7 7 10 5 9 14 13 20 11 19 12
0.000 0.000 0.137 0.000 0.000 0.411 0.685 0.959 0.411 0.959 0.959 1.370 0.685 1.233 1.918 1.781 2.740 1.507 2.603 1.644
0 1 10 15 17 34 47 45 55 65 69 87 92 95 112 110 111 126 164 146
0.000 0.014 0.143 0.214 0.243 0.485 0.671 0.642 0.785 0.928 0.985 1.242 1.313 1.356 1.599 1.570 1.585 1.799 2.341 2.084
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.rge
+22 -22
View File
@@ -1,26 +1,26 @@
DEPTH PARTICLES
10.0000 20
30.0000 43
50.0000 61
70.0000 111
90.0000 131
110.0000 179
130.0000 224
150.0000 293
170.0000 332
190.0000 405
210.0000 475
230.0000 490
250.0000 535
270.0000 493
290.0000 389
310.0000 319
330.0000 185
350.0000 96
370.0000 49
390.0000 14
410.0000 8
430.0000 2
10.0000 211
30.0000 490
50.0000 678
70.0000 995
90.0000 1226
110.0000 1647
130.0000 2186
150.0000 2756
170.0000 3404
190.0000 4123
210.0000 4715
230.0000 5139
250.0000 5160
270.0000 5086
290.0000 3958
310.0000 3100
330.0000 1984
350.0000 1070
370.0000 437
390.0000 176
410.0000 53
430.0000 5
450.0000 0
470.0000 0
490.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
3.00 0.45 0.00 15.00 5000 4854 146 0 5000 0 0.2191E+03 0.7512E+02 0.7853E+03 0.7472E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4844 10 0 0
3.00 0.45 0.00 15.00 50000 48599 1401 0 50000 0 0.2202E+03 0.7503E+02 0.8056E+03 0.7486E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48541 58 0 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 5000 450 0 15 0.5 0.0 0.0 0.0
5000 78743 78743 78743 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78743 78743 78743 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.out
+96 -94
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:25
Start: 19.Jun. 2026 20:09:34
End: 18.Jun. 2026 09:50:26
End: 19.Jun. 2026 20:09:48
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 14 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 5000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78743.00 78743.00 78743.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78743.00 78743.00 78743.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
19316 0 0 0 0 0 0 0 0
191794 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,124 +162,125 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4920 ENERGY=0.2460E+08 EV
BACKSCATTERED PARTICLES= 80 ENERGY=0.8400E+05 EV
IMPLANTED PARTICLES= 49264 ENERGY=0.2463E+09 EV
BACKSCATTERED PARTICLES= 736 ENERGY=0.1014E+07 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 3599 3599
IMPLANTED PARTICLES (LAYER 1)= 36517 36517
IMPLANTED PARTICLES (LAYER 2)= 1321 1321
IMPLANTED PARTICLES (LAYER 2)= 12747 12747
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4920 0
IMPLANTED PARTICLES (LAYER 4)= 49264 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 243.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.033
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.193
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 243.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.034
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.194
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 3.3224E+02 8.2750E+03 -1.0013E+00 3.7492E+00 9.0967E+01 1.2969E+00 1.9561E+02 2.9301E-02
SPREAD 1.6694E+02 6.9639E+03 3.9222E-01 2.6291E+00 8.3450E+01 1.1897E+00 1.2672E+02 2.6209E-02
PATHLENGTH 5.5640E+02 8.1065E+02 1.2842E-01 2.9192E+00 2.8472E+01 4.0591E-01 1.6011E+01 3.3403E-02
ELASTIC LOSS 2.5512E+01 1.4038E+02 1.1848E+01 2.4082E-03
INEL. LOSS 4.9835E+03 1.9741E+05 4.4431E+02 9.0307E-02
PENETRATION 3.3054E+02 8.1073E+03 -9.1935E-01 3.5536E+00 9.0040E+01 4.0567E-01 5.8369E+01 9.2219E-03
SPREAD 1.6680E+02 6.8758E+03 4.1382E-01 2.6687E+00 8.2920E+01 3.7359E-01 4.0017E+01 8.3356E-03
PATHLENGTH 5.5622E+02 8.2115E+02 1.2809E-01 3.0464E+00 2.8656E+01 1.2911E-01 5.2924E+00 1.1609E-02
ELASTIC LOSS 2.5634E+01 1.3970E+02 1.1819E+01 2.3992E-04
INEL. LOSS 4.9751E+03 2.0219E+05 4.4965E+02 9.1274E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.0404E-01 6.8689E-01 3.2860E+01 1.6800E+03 8.2879E-01 7.5058E-04 2.5490E-02 9.0274E-01
WEAK EL.LOSS 2.3258E-03 3.3676E-05 3.8212E+00 1.9544E+01 5.8031E-03 5.2555E-06 1.3133E-07 8.3062E-03
INELAST.LOSS 2.0365E+01 1.0433E+02 -3.8660E-01 1.8959E+00 1.0214E+01 9.2502E-03 8.9427E-02 1.3827E-03
SUBTHR.LOSS 9.8277E-02 4.2238E-01 2.0780E+01 6.0498E+02 6.4990E-01 5.8862E-04 9.4015E-03 2.1469E-01
ELAST.LOSS 1.0478E-01 7.3611E-01 3.8869E+01 2.6713E+03 8.5797E-01 2.4583E-04 1.0899E-02 7.2651E-01
WEAK EL.LOSS 2.3241E-03 3.3450E-05 3.8152E+00 1.9504E+01 5.7836E-03 1.6572E-06 4.1229E-08 2.6264E-03
INELAST.LOSS 2.0333E+01 1.0446E+02 -3.8349E-01 1.8914E+00 1.0221E+01 2.9285E-03 2.8259E-02 4.3741E-04
SUBTHR.LOSS 9.8552E-02 4.1739E-01 2.0407E+01 5.8553E+02 6.4606E-01 1.8512E-04 2.8916E-03 6.8570E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 3.3224E+02 1.1866E+05 4.4168E+07 1.6920E+10 6.6248E+12 2.6395E+15
PENETRATION 3.3054E+02 1.1736E+05 4.3482E+07 1.6598E+10 6.4816E+12 2.5775E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 9 0.1829E-02 0 1.5558E+06 2.9293E+03 2.9212E+03 4.6203E+02 2.4592E+03 3.4985E+02 11
20.- 40. 25 0.5081E-02 0 1.5684E+06 3.0607E+03 3.0449E+03 5.3077E+02 2.5142E+03 4.0033E+02 11
40.- 60. 24 0.4878E-02 0 1.5710E+06 3.3350E+03 3.3181E+03 6.2967E+02 2.6884E+03 4.7665E+02 14
60.- 80. 32 0.6504E-02 0 1.5510E+06 3.5631E+03 3.5423E+03 6.1828E+02 2.9240E+03 4.6488E+02 12
80.- 100. 33 0.6707E-02 0 1.5668E+06 3.9730E+03 3.9496E+03 5.4813E+02 3.4014E+03 4.2188E+02 15
100.- 120. 47 0.9553E-02 0 1.5187E+06 4.1202E+03 4.0934E+03 5.6060E+02 3.5328E+03 4.1820E+02 11
120.- 140. 46 0.9350E-02 0 1.4986E+06 4.6924E+03 4.6635E+03 7.8821E+02 3.8753E+03 5.9032E+02 17
140.- 160. 53 0.1077E-01 0 1.4718E+06 4.5396E+03 4.5018E+03 3.2927E+02 4.1725E+03 2.4958E+02 8
160.- 180. 90 0.1829E-01 0 1.4345E+06 5.1543E+03 5.1019E+03 5.5848E+02 4.5434E+03 4.1898E+02 12
180.- 200. 116 0.2358E-01 0 1.4056E+06 6.2486E+03 6.1828E+03 6.9230E+02 5.4905E+03 5.1881E+02 16
200.- 220. 125 0.2541E-01 0 1.3484E+06 6.6112E+03 6.5377E+03 4.7160E+02 6.0661E+03 3.5524E+02 12
220.- 240. 162 0.3293E-01 0 1.2749E+06 6.6966E+03 6.6061E+03 3.2253E+02 6.2836E+03 2.4378E+02 9
240.- 260. 184 0.3740E-01 0 1.2135E+06 7.6171E+03 7.5105E+03 1.8145E+02 7.3291E+03 1.3708E+02 5
260.- 280. 243 0.4939E-01 0 1.1200E+06 7.6776E+03 7.5447E+03 7.3985E+01 7.4708E+03 5.5849E+01 2
280.- 300. 294 0.5976E-01 0 1.0335E+06 8.5751E+03 8.4118E+03 2.0535E+02 8.2064E+03 1.5559E+02 6
300.- 320. 328 0.6667E-01 0 9.0231E+05 8.4495E+03 8.2706E+03 6.7043E+01 8.2036E+03 5.0866E+01 2
320.- 340. 412 0.8374E-01 0 7.8151E+05 8.8695E+03 8.6551E+03 0.0000E+00 8.6551E+03 0.0000E+00 0
340.- 360. 425 0.8638E-01 0 6.4320E+05 8.1535E+03 7.9242E+03 0.0000E+00 7.9242E+03 0.0000E+00 0
360.- 380. 508 0.1033E+00 0 5.0172E+05 7.5328E+03 7.2767E+03 0.0000E+00 7.2767E+03 0.0000E+00 0
380.- 400. 443 0.9004E-01 0 3.5284E+05 5.9255E+03 5.6899E+03 0.0000E+00 5.6899E+03 0.0000E+00 0
400.- 420. 627 0.1274E+00 0 3.1267E+05 6.4466E+03 6.0308E+03 0.0000E+00 6.0308E+03 0.0000E+00 0
420.- 440. 388 0.7886E-01 0 1.4142E+05 3.5773E+03 3.3181E+03 0.0000E+00 3.3181E+03 0.0000E+00 0
440.- 460. 221 0.4492E-01 1 4.8920E+04 1.4568E+03 1.3243E+03 0.0000E+00 1.3243E+03 0.0000E+00 0
460.- 480. 70 0.1423E-01 8 1.1823E+04 4.2555E+02 3.8248E+02 0.0000E+00 3.8248E+02 0.0000E+00 0
480.- 500. 14 0.2846E-02 80 1.3490E+03 4.8402E+01 4.1527E+01 0.0000E+00 4.1527E+01 0.0000E+00 0
500.- 520. 1 0.2033E-03 399 9.5506E+01 3.7948E+00 3.2400E+00 0.0000E+00 3.2400E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 950 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 1321 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1131 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 695 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 264 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 60 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 10 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 78 0.1583E-02 0 1.5502E+07 2.8927E+04 2.8847E+04 5.8387E+03 2.3008E+04 4.3525E+03 110
20.- 40. 147 0.2984E-02 0 1.5550E+07 3.0485E+04 3.0372E+04 6.2167E+03 2.4156E+04 4.6091E+03 112
40.- 60. 209 0.4242E-02 0 1.5497E+07 3.3620E+04 3.3471E+04 6.8144E+03 2.6657E+04 5.0772E+03 133
60.- 80. 293 0.5948E-02 0 1.5428E+07 3.4593E+04 3.4406E+04 6.2655E+03 2.8140E+04 4.6859E+03 127
80.- 100. 346 0.7023E-02 0 1.5378E+07 3.9335E+04 3.9106E+04 6.8614E+03 3.2245E+04 5.1375E+03 145
100.- 120. 456 0.9256E-02 0 1.5240E+07 4.2634E+04 4.2356E+04 7.0873E+03 3.5268E+04 5.3198E+03 152
120.- 140. 547 0.1110E-01 0 1.5028E+07 4.6410E+04 4.6074E+04 6.3573E+03 3.9716E+04 4.7757E+03 142
140.- 160. 689 0.1399E-01 0 1.4829E+07 5.0332E+04 4.9911E+04 5.6692E+03 4.4242E+04 4.2709E+03 131
160.- 180. 872 0.1770E-01 0 1.4534E+07 5.5101E+04 5.4577E+04 6.1997E+03 4.8377E+04 4.6710E+03 146
180.- 200. 1121 0.2275E-01 0 1.4094E+07 6.1624E+04 6.0983E+04 6.2288E+03 5.4755E+04 4.6962E+03 151
200.- 220. 1329 0.2698E-01 0 1.3578E+07 6.4916E+04 6.4147E+04 4.1263E+03 6.0020E+04 3.1148E+03 107
220.- 240. 1698 0.3447E-01 0 1.2955E+07 7.1015E+04 7.0047E+04 2.9851E+03 6.7062E+04 2.2506E+03 77
240.- 260. 2013 0.4086E-01 0 1.2211E+07 7.6854E+04 7.5713E+04 2.5272E+03 7.3185E+04 1.9055E+03 66
260.- 280. 2519 0.5113E-01 0 1.1276E+07 8.1403E+04 8.0012E+04 1.3164E+03 7.8695E+04 9.9491E+02 36
280.- 300. 3006 0.6102E-01 0 1.0262E+07 8.4327E+04 8.2673E+04 9.5169E+02 8.1721E+04 7.1848E+02 26
300.- 320. 3506 0.7117E-01 0 9.0349E+06 8.7688E+04 8.5787E+04 4.5800E+02 8.5329E+04 3.4789E+02 14
320.- 340. 4074 0.8270E-01 0 7.6835E+06 8.6057E+04 8.3887E+04 1.2748E+02 8.3760E+04 9.6963E+01 4
340.- 360. 4427 0.8986E-01 0 6.2564E+06 8.0779E+04 7.8451E+04 3.5875E+01 7.8415E+04 2.7128E+01 1
360.- 380. 4755 0.9652E-01 0 4.8535E+06 7.2402E+04 6.9964E+04 0.0000E+00 6.9964E+04 0.0000E+00 0
380.- 400. 4432 0.8996E-01 0 3.5025E+06 6.0084E+04 5.7772E+04 0.0000E+00 5.7772E+04 0.0000E+00 0
400.- 420. 5914 0.1200E+00 0 3.0056E+06 6.3411E+04 5.9465E+04 0.0000E+00 5.9465E+04 0.0000E+00 0
420.- 440. 3936 0.7990E-01 2 1.3880E+06 3.4454E+04 3.1867E+04 0.0000E+00 3.1867E+04 0.0000E+00 0
440.- 460. 2073 0.4208E-01 16 4.6441E+05 1.3686E+04 1.2429E+04 0.0000E+00 1.2429E+04 0.0000E+00 0
460.- 480. 656 0.1332E-01 154 1.0866E+05 3.8011E+03 3.4099E+03 0.0000E+00 3.4099E+03 0.0000E+00 0
480.- 500. 154 0.3126E-02 852 1.6223E+04 6.4193E+02 5.5693E+02 0.0000E+00 5.5693E+02 0.0000E+00 0
500.- 520. 14 0.2842E-03 3702 1.3018E+03 5.9970E+01 5.2336E+01 0.0000E+00 5.2336E+01 0.0000E+00 0
520.- 540. 0 0.0000E+00 9723 1.3711E+01 2.9104E-01 2.1865E-01 0.0000E+00 2.1865E-01 0.0000E+00 0
540.- 560. 0 0.0000E+00 13458 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 11308 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 6656 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 2651 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 609 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 120 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 11 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- SUT 0 0.0000E+00
720.- 740. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- SUT 0 0.0000E+00
4920 1.0000E+00 4920 2.4830E+07 1.2968E+05 1.2685E+05 7.0397E+03 1.1981E+05 5.3079E+03 163
49264 1.0000E+00 49264 2.4768E+08 1.3046E+06 1.2763E+06 7.6067E+04 1.2003E+06 5.7052E+04 1680
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1919E+05 1.0950E+03 1.3091E+02 9.6414E+02 1.0367E+06 1.8262E+03 3.3112E+02 1.4950E+03 3 8
20.- 40. 5.1879E+05 1.1895E+03 2.2739E+02 9.6207E+02 1.0496E+06 1.8555E+03 3.0338E+02 1.5521E+03 5 6
40.- 60. 5.2615E+05 1.3887E+03 2.7377E+02 1.1149E+03 1.0449E+06 1.9294E+03 3.5590E+02 1.5735E+03 7 7
60.- 80. 5.1427E+05 1.3311E+03 2.4646E+02 1.0847E+03 1.0368E+06 2.2111E+03 3.7183E+02 1.8393E+03 5 7
80.- 100. 5.1998E+05 1.6160E+03 2.9923E+02 1.3167E+03 1.0468E+06 2.3336E+03 2.4890E+02 2.0847E+03 8 7
100.- 120. 5.0950E+05 1.4442E+03 1.1345E+02 1.3307E+03 1.0092E+06 2.6492E+03 4.4715E+02 2.2021E+03 3 8
120.- 140. 5.0072E+05 1.5530E+03 1.2468E+02 1.4284E+03 9.9784E+05 3.1105E+03 6.6353E+02 2.4469E+03 3 14
140.- 160. 4.9426E+05 1.7450E+03 1.1286E+02 1.6322E+03 9.7752E+05 2.7567E+03 2.1640E+02 2.5403E+03 3 5
160.- 180. 4.7752E+05 1.7842E+03 1.2699E+02 1.6573E+03 9.5700E+05 3.3176E+03 4.3149E+02 2.8861E+03 3 9
180.- 200. 4.6361E+05 1.9708E+03 3.5955E+01 1.9348E+03 9.4195E+05 4.2121E+03 6.5635E+02 3.5557E+03 1 15
200.- 220. 4.4739E+05 2.1903E+03 3.0528E+01 2.1598E+03 9.0098E+05 4.3474E+03 4.4108E+02 3.9064E+03 1 11
220.- 240. 4.2771E+05 2.1217E+03 0.0000E+00 2.1217E+03 8.4722E+05 4.4845E+03 3.2253E+02 4.1620E+03 0 9
240.- 260. 4.0793E+05 2.4608E+03 0.0000E+00 2.4608E+03 8.0562E+05 5.0497E+03 1.8145E+02 4.8682E+03 0 5
260.- 280. 3.7433E+05 2.4203E+03 0.0000E+00 2.4203E+03 7.4569E+05 5.1244E+03 7.3985E+01 5.0505E+03 0 2
280.- 300. 3.4365E+05 2.5525E+03 0.0000E+00 2.5525E+03 6.8982E+05 5.8593E+03 2.0535E+02 5.6540E+03 0 6
300.- 320. 2.9965E+05 2.6011E+03 0.0000E+00 2.6011E+03 6.0266E+05 5.6696E+03 6.7043E+01 5.6025E+03 0 2
320.- 340. 2.5802E+05 2.6335E+03 0.0000E+00 2.6335E+03 5.2349E+05 6.0216E+03 0.0000E+00 6.0216E+03 0 0
340.- 360. 2.1469E+05 2.4070E+03 0.0000E+00 2.4070E+03 4.2852E+05 5.5172E+03 0.0000E+00 5.5172E+03 0 0
360.- 380. 1.6488E+05 2.1081E+03 0.0000E+00 2.1081E+03 3.3683E+05 5.1687E+03 0.0000E+00 5.1687E+03 0 0
380.- 400. 1.1422E+05 1.6505E+03 0.0000E+00 1.6505E+03 2.3427E+05 3.9331E+03 0.0000E+00 3.9331E+03 0 0
400.- 420. 6.5600E+03 8.7311E+01 0.0000E+00 8.7311E+01 1.2105E+04 1.7116E+02 0.0000E+00 1.7116E+02 0 0
0.- 20. 5.1763E+06 1.1095E+04 2.0873E+03 9.0079E+03 1.0326E+07 1.7752E+04 3.7514E+03 1.4000E+04 48 62
20.- 40. 5.1762E+06 1.0972E+04 1.6630E+03 9.3091E+03 1.0374E+07 1.9400E+04 4.5537E+03 1.4847E+04 36 76
40.- 60. 5.1576E+06 1.2120E+04 1.8381E+03 1.0282E+04 1.0339E+07 2.1351E+04 4.9763E+03 1.6374E+04 43 90
60.- 80. 5.1317E+06 1.2664E+04 1.7814E+03 1.0882E+04 1.0296E+07 2.1742E+04 4.4841E+03 1.7258E+04 42 85
80.- 100. 5.1235E+06 1.4342E+04 1.7904E+03 1.2552E+04 1.0254E+07 2.4764E+04 5.0710E+03 1.9693E+04 46 99
100.- 120. 5.0673E+06 1.5297E+04 1.8948E+03 1.3403E+04 1.0173E+07 2.7058E+04 5.1925E+03 2.1866E+04 46 106
120.- 140. 5.0054E+06 1.5974E+04 1.3960E+03 1.4578E+04 1.0022E+07 3.0099E+04 4.9613E+03 2.5138E+04 36 106
140.- 160. 4.9554E+06 1.7823E+04 1.4012E+03 1.6421E+04 9.8735E+06 3.2088E+04 4.2681E+03 2.7820E+04 38 93
160.- 180. 4.8537E+06 1.8584E+04 1.2089E+03 1.7375E+04 9.6801E+06 3.5993E+04 4.9909E+03 3.1002E+04 32 114
180.- 200. 4.6841E+06 2.1398E+04 1.0455E+03 2.0353E+04 9.4096E+06 3.9585E+04 5.1833E+03 3.4402E+04 29 122
200.- 220. 4.5255E+06 2.2041E+04 3.9456E+02 2.1646E+04 9.0526E+06 4.2106E+04 3.7318E+03 3.8374E+04 12 95
220.- 240. 4.3208E+06 2.4082E+04 1.6889E+02 2.3913E+04 8.6344E+06 4.5965E+04 2.8162E+03 4.3149E+04 5 72
240.- 260. 4.0515E+06 2.5332E+04 9.9799E+01 2.5232E+04 8.1591E+06 5.0381E+04 2.4274E+03 4.7953E+04 3 63
260.- 280. 3.7583E+06 2.7135E+04 3.5249E+01 2.7100E+04 7.5181E+06 5.2877E+04 1.2811E+03 5.1596E+04 1 35
280.- 300. 3.4152E+06 2.6586E+04 0.0000E+00 2.6586E+04 6.8466E+06 5.6087E+04 9.5169E+02 5.5135E+04 0 26
300.- 320. 3.0013E+06 2.6902E+04 0.0000E+00 2.6902E+04 6.0335E+06 5.8885E+04 4.5800E+02 5.8427E+04 0 14
320.- 340. 2.5571E+06 2.6292E+04 0.0000E+00 2.6292E+04 5.1263E+06 5.7595E+04 1.2748E+02 5.7468E+04 0 4
340.- 360. 2.0775E+06 2.4029E+04 0.0000E+00 2.4029E+04 4.1788E+06 5.4422E+04 3.5875E+01 5.4386E+04 0 1
360.- 380. 1.6062E+06 2.1095E+04 0.0000E+00 2.1095E+04 3.2473E+06 4.8869E+04 0.0000E+00 4.8869E+04 0 0
380.- 400. 1.1471E+06 1.6936E+04 0.0000E+00 1.6936E+04 2.3137E+06 3.9811E+04 0.0000E+00 3.9811E+04 0 0
400.- 420. 6.1035E+04 7.8089E+02 0.0000E+00 7.8089E+02 1.1805E+05 1.8782E+03 0.0000E+00 1.8782E+03 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.1030E+06 3.8350E+04 1.7222E+03 3.6628E+04 1.6225E+07 7.7549E+04 5.3175E+03 7.2231E+04 42 121
8.0853E+07 3.9148E+05 1.6805E+04 3.7467E+05 1.6198E+08 7.7871E+05 5.9262E+04 7.1945E+05 417 1263
DAMAGE IN LAYER 1 : 1.1575E+05
DAMAGE IN LAYER 1 : 1.1686E+06
DAMAGE IN LAYER 2 : 1.1100E+04
DAMAGE IN LAYER 2 : 1.0778E+05
DAMAGE IN LAYER 3 : 0.0000E+00
@@ -288,18 +290,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.6000E-02 ENERGY REFL.COEF.= 3.3599E-03 REL.MEAN ENERGY = 2.0999E-01 MEAN ENERGY = 1.0500E+03
PART.REFL.COEF.= 1.4720E-02 ENERGY REFL.COEF.= 4.0554E-03 REL.MEAN ENERGY = 2.7551E-01 MEAN ENERGY = 1.3775E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.0500E+03 1.0870E+06 1.6308E+00 5.3506E+00 1.0426E+03 1.1657E+02 2.5349E+05 3.3278E-01
PATHLENGTH 3.4839E+02 1.4181E+04 -7.9244E-01 3.0065E+00 1.1909E+02 1.3314E+01 2.2459E+03 2.0441E-01
ELASTIC LOSS 5.2026E+01 3.4046E+02 1.8452E+01 2.3064E-01
INEL. LOSS 3.8979E+03 1.2298E+06 1.1090E+03 1.3862E+01
ENERGY 1.3775E+03 1.6472E+06 1.0641E+00 3.1064E+00 1.2834E+03 4.7308E+01 8.8120E+04 7.0739E-02
PATHLENGTH 3.1211E+02 1.9762E+04 -4.1610E-01 2.2589E+00 1.4058E+02 5.1818E+00 8.1732E+02 5.4273E-02
ELASTIC LOSS 5.6801E+01 5.7263E+02 2.3930E+01 3.2513E-02
INEL. LOSS 3.5065E+03 1.7857E+06 1.3363E+03 1.8156E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.0500E+03 2.1894E+06 6.4297E+09 2.2490E+13 8.7829E+16 3.7116E+20
LOGENERGY 2.8141E+00 8.1197E+00 2.3957E+01 7.2109E+01 2.2098E+02 6.8821E+02
PATHLENGTH 3.4839E+02 1.3556E+05 5.5771E+07 2.3800E+10 1.0435E+13 4.6764E+15
ENERGY 1.3775E+03 3.5448E+06 1.1671E+10 4.3179E+13 1.7073E+17 7.0480E+20
LOGENERGY 2.8871E+00 8.6373E+00 2.6541E+01 8.3304E+01 2.6605E+02 8.6212E+02
PATHLENGTH 3.1211E+02 1.1718E+05 4.7752E+07 2.0479E+10 9.1112E+12 4.1706E+15
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -307,5 +309,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 1 1 2 3 4 3 3 6 6 7 7 5 11 8 8 3
0.000 0.000 0.000 0.500 0.250 0.250 0.500 0.750 1.000 0.750 0.750 1.500 1.500 1.750 1.750 1.250 2.750 2.000 2.000 0.750
0 1 5 10 17 19 24 33 34 26 44 41 48 56 43 59 55 73 72 76
0.000 0.027 0.136 0.272 0.462 0.516 0.652 0.897 0.924 0.707 1.196 1.114 1.304 1.522 1.168 1.603 1.495 1.984 1.957 2.065
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.rge
+27 -26
View File
@@ -1,30 +1,30 @@
DEPTH PARTICLES
10.0000 9
30.0000 25
50.0000 24
70.0000 32
90.0000 33
110.0000 47
130.0000 46
150.0000 53
170.0000 90
190.0000 116
210.0000 125
230.0000 162
250.0000 184
270.0000 243
290.0000 294
310.0000 328
330.0000 412
350.0000 425
370.0000 508
390.0000 443
410.0000 627
430.0000 388
450.0000 221
470.0000 70
490.0000 14
510.0000 1
10.0000 78
30.0000 147
50.0000 209
70.0000 293
90.0000 346
110.0000 456
130.0000 547
150.0000 689
170.0000 872
190.0000 1121
210.0000 1329
230.0000 1698
250.0000 2013
270.0000 2519
290.0000 3006
310.0000 3506
330.0000 4074
350.0000 4427
370.0000 4755
390.0000 4432
410.0000 5914
430.0000 3936
450.0000 2073
470.0000 656
490.0000 154
510.0000 14
530.0000 0
550.0000 0
570.0000 0
@@ -35,3 +35,4 @@
670.0000 0
690.0000 0
710.0000 0
730.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3322E+03 0.9097E+02 0.1050E+04 0.1043E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3599 1321 0 0
5.00 0.45 0.00 15.00 50000 49264 736 0 50000 0 0.3305E+03 0.9004E+02 0.1378E+04 0.1283E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 36517 12747 0 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 7000 450 0 15 0.5 0.0 0.0 0.0
5000 78744 78744 78744 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78744 78744 78744 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.out
+101 -99
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:25
Start: 19.Jun. 2026 20:09:34
End: 18.Jun. 2026 09:50:26
End: 19.Jun. 2026 20:09:50
Simulation needed for 5000 projectiles 1 seconds
Simulation needed for 50000 projectiles 16 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78744.00 78744.00 78744.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
22798 0 0 0 0 0 0 0 0
226592 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,129 +162,130 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4959 ENERGY=0.3471E+08 EV
BACKSCATTERED PARTICLES= 41 ENERGY=0.7948E+05 EV
IMPLANTED PARTICLES= 49486 ENERGY=0.3464E+09 EV
BACKSCATTERED PARTICLES= 514 ENERGY=0.9953E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 1444 1444
IMPLANTED PARTICLES (LAYER 1)= 14388 14388
IMPLANTED PARTICLES (LAYER 2)= 3515 3515
IMPLANTED PARTICLES (LAYER 2)= 35098 35098
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4959 0
IMPLANTED PARTICLES (LAYER 4)= 49486 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 288.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.052
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.309
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 288.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.048
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.333
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 4.2140E+02 8.5398E+03 -1.4178E+00 5.3545E+00 9.2411E+01 1.3123E+00 2.5306E+02 3.9668E-02
SPREAD 1.8897E+02 1.0246E+04 6.4619E-01 3.0720E+00 1.0122E+02 1.4374E+00 2.0943E+02 2.9091E-02
PATHLENGTH 6.4311E+02 1.3073E+03 6.4211E-01 3.0469E+00 3.6157E+01 5.1345E-01 2.6560E+01 2.7343E-02
ELASTIC LOSS 2.8725E+01 1.9827E+02 1.4081E+01 2.8395E-03
INEL. LOSS 6.9662E+03 2.0626E+05 4.5416E+02 9.1583E-02
PENETRATION 4.2145E+02 8.5496E+03 -1.3871E+00 5.2290E+00 9.2464E+01 4.1565E-01 7.9036E+01 1.2456E-02
SPREAD 1.8967E+02 1.0561E+04 6.2287E-01 2.9435E+00 1.0277E+02 4.6197E-01 6.6184E+01 8.7749E-03
PATHLENGTH 6.4379E+02 1.3080E+03 6.6631E-01 3.0651E+00 3.6166E+01 1.6258E-01 8.4495E+00 9.1005E-03
ELASTIC LOSS 2.8949E+01 1.9883E+02 1.4101E+01 2.8494E-04
INEL. LOSS 6.9720E+03 2.0183E+05 4.4925E+02 9.0784E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.8850E-02 8.6396E-01 4.6991E+01 3.8544E+03 9.2950E-01 7.7440E-04 4.4682E-02 3.2076E+00
WEAK EL.LOSS 2.3304E-03 4.0365E-05 4.0639E+00 2.1277E+01 6.3533E-03 5.2932E-06 1.5143E-07 7.5401E-03
INELAST.LOSS 2.4119E+01 1.0948E+02 -7.5795E-01 2.3918E+00 1.0463E+01 8.7174E-03 1.0761E-01 1.3917E-03
SUBTHR.LOSS 9.0207E-02 3.8277E-01 2.1140E+01 6.2533E+02 6.1869E-01 5.1550E-04 7.9690E-03 2.0805E-01
ELAST.LOSS 9.9868E-02 8.8928E-01 4.8210E+01 4.0827E+03 9.4302E-01 2.4844E-04 1.4968E-02 9.8474E-01
WEAK EL.LOSS 2.3256E-03 4.0370E-05 4.0722E+00 2.1355E+01 6.3537E-03 1.6739E-06 4.7985E-08 2.3952E-03
INELAST.LOSS 2.4123E+01 1.0956E+02 -7.5719E-01 2.3885E+00 1.0467E+01 2.7576E-03 3.4010E-02 4.4041E-04
SUBTHR.LOSS 9.1679E-02 4.0805E-01 2.1317E+01 6.3056E+02 6.3879E-01 1.6831E-04 2.6976E-03 6.4534E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 4.2140E+02 1.8612E+05 8.4508E+07 3.9137E+10 1.8407E+13 8.7693E+15
PENETRATION 4.2145E+02 1.8617E+05 8.4572E+07 3.9195E+10 1.8451E+13 8.7992E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 4 0.8066E-03 0 1.6258E+06 1.9018E+03 1.8972E+03 3.7936E+02 1.5178E+03 2.7492E+02 5
20.- 40. 7 0.1412E-02 0 1.6324E+06 2.2308E+03 2.2245E+03 5.4075E+02 1.6837E+03 3.9952E+02 8
40.- 60. 10 0.2017E-02 0 1.6369E+06 2.5000E+03 2.4925E+03 7.1275E+02 1.7797E+03 5.3374E+02 12
60.- 80. 14 0.2823E-02 0 1.6370E+06 2.8499E+03 2.8401E+03 7.4721E+02 2.0929E+03 5.4097E+02 11
80.- 100. 12 0.2420E-02 0 1.6420E+06 2.7954E+03 2.7863E+03 7.1388E+02 2.0724E+03 5.3250E+02 14
100.- 120. 15 0.3025E-02 0 1.6406E+06 2.9725E+03 2.9610E+03 6.9926E+02 2.2617E+03 5.1977E+02 12
120.- 140. 20 0.4033E-02 0 1.6406E+06 2.8431E+03 2.8298E+03 6.6832E+02 2.1614E+03 5.1110E+02 16
140.- 160. 29 0.5848E-02 0 1.6220E+06 2.9316E+03 2.9138E+03 4.2165E+02 2.4921E+03 3.2159E+02 10
160.- 180. 34 0.6856E-02 0 1.6145E+06 3.2300E+03 3.2076E+03 4.2148E+02 2.7861E+03 3.2034E+02 10
180.- 200. 37 0.7461E-02 0 1.6119E+06 4.2034E+03 4.1813E+03 1.1838E+03 2.9975E+03 8.7838E+02 22
200.- 220. 40 0.8066E-02 0 1.5751E+06 4.0899E+03 4.0632E+03 8.1858E+02 3.2447E+03 6.2778E+02 20
220.- 240. 54 0.1089E-01 0 1.5406E+06 4.2090E+03 4.1763E+03 6.4827E+02 3.5280E+03 4.8310E+02 13
240.- 260. 74 0.1492E-01 0 1.5240E+06 5.2848E+03 5.2405E+03 1.0654E+03 4.1751E+03 7.9410E+02 21
260.- 280. 79 0.1593E-01 0 1.5021E+06 5.7677E+03 5.7205E+03 1.0102E+03 4.7103E+03 7.6330E+02 23
280.- 300. 101 0.2037E-01 0 1.4623E+06 5.5507E+03 5.4929E+03 5.0361E+02 4.9893E+03 3.7841E+02 12
300.- 320. 111 0.2238E-01 0 1.4015E+06 6.0605E+03 5.9936E+03 3.6964E+02 5.6240E+03 2.7956E+02 9
320.- 340. 138 0.2783E-01 0 1.3292E+06 6.2650E+03 6.1846E+03 4.0070E+02 5.7839E+03 3.0486E+02 11
340.- 360. 177 0.3569E-01 0 1.2598E+06 6.8620E+03 6.7697E+03 4.2386E+02 6.3458E+03 3.1976E+02 11
360.- 380. 202 0.4073E-01 0 1.1790E+06 7.4828E+03 7.3653E+03 2.5086E+02 7.1145E+03 1.9031E+02 7
380.- 400. 286 0.5767E-01 0 1.1086E+06 7.9446E+03 7.7867E+03 1.4799E+02 7.6387E+03 1.1170E+02 4
400.- 420. 460 0.9276E-01 0 1.3739E+06 1.2020E+04 1.1676E+04 1.7585E+02 1.1501E+04 1.3320E+02 5
420.- 440. 492 0.9921E-01 0 1.1326E+06 1.2238E+04 1.1857E+04 1.7135E+02 1.1685E+04 1.3012E+02 5
440.- 460. 578 0.1166E+00 0 8.4860E+05 1.0915E+04 1.0482E+04 0.0000E+00 1.0482E+04 0.0000E+00 0
460.- 480. 637 0.1285E+00 0 5.8577E+05 9.2881E+03 8.8383E+03 0.0000E+00 8.8383E+03 0.0000E+00 0
480.- 500. 554 0.1117E+00 0 3.5554E+05 6.7438E+03 6.3496E+03 0.0000E+00 6.3496E+03 0.0000E+00 0
500.- 520. 400 0.8066E-01 0 1.7287E+05 3.9381E+03 3.6732E+03 0.0000E+00 3.6732E+03 0.0000E+00 0
520.- 540. 259 0.5223E-01 0 6.9265E+04 1.8757E+03 1.7146E+03 0.0000E+00 1.7146E+03 0.0000E+00 0
540.- 560. 105 0.2117E-01 8 1.9760E+04 6.4147E+02 5.7634E+02 0.0000E+00 5.7634E+02 0.0000E+00 0
560.- 580. 26 0.5243E-02 60 2.9835E+03 1.2163E+02 1.0727E+02 0.0000E+00 1.0727E+02 0.0000E+00 0
580.- 600. 4 0.8066E-03 357 1.9554E+02 1.0349E+01 8.3762E+00 0.0000E+00 8.3762E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 988 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 1279 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 887 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 539 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 400 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 277 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 117 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 40 0.8083E-03 0 1.6305E+07 2.2429E+04 2.2382E+04 5.9825E+03 1.6399E+04 4.4084E+03 92
20.- 40. 67 0.1354E-02 0 1.6359E+07 2.3521E+04 2.3459E+04 6.1319E+03 1.7328E+04 4.5644E+03 105
40.- 60. 92 0.1859E-02 0 1.6417E+07 2.4155E+04 2.4083E+04 5.2967E+03 1.8786E+04 3.9309E+03 91
60.- 80. 106 0.2142E-02 0 1.6430E+07 2.5996E+04 2.5911E+04 6.0245E+03 1.9886E+04 4.4329E+03 97
80.- 100. 145 0.2930E-02 0 1.6442E+07 2.9376E+04 2.9272E+04 7.4126E+03 2.1859E+04 5.4568E+03 123
100.- 120. 155 0.3132E-02 0 1.6421E+07 3.0690E+04 3.0576E+04 7.6159E+03 2.2960E+04 5.6582E+03 134
120.- 140. 192 0.3880E-02 0 1.6389E+07 3.2067E+04 3.1932E+04 7.4285E+03 2.4504E+04 5.5482E+03 143
140.- 160. 241 0.4870E-02 0 1.6271E+07 3.2223E+04 3.2059E+04 6.0385E+03 2.6021E+04 4.5180E+03 118
160.- 180. 330 0.6669E-02 0 1.6194E+07 3.6113E+04 3.5907E+04 6.8534E+03 2.9053E+04 5.1318E+03 135
180.- 200. 378 0.7639E-02 0 1.6032E+07 3.9256E+04 3.9017E+04 8.0913E+03 3.0926E+04 6.0377E+03 159
200.- 220. 476 0.9619E-02 0 1.5864E+07 4.2458E+04 4.2171E+04 7.7214E+03 3.4450E+04 5.7978E+03 163
220.- 240. 579 0.1170E-01 0 1.5594E+07 4.5185E+04 4.4837E+04 7.2373E+03 3.7600E+04 5.4019E+03 144
240.- 260. 650 0.1314E-01 0 1.5317E+07 4.9406E+04 4.9004E+04 6.9973E+03 4.2007E+04 5.2571E+03 155
260.- 280. 833 0.1683E-01 0 1.4950E+07 5.2782E+04 5.2290E+04 6.0020E+03 4.6288E+04 4.5231E+03 139
280.- 300. 975 0.1970E-01 0 1.4487E+07 5.7449E+04 5.6882E+04 5.8317E+03 5.1050E+04 4.3886E+03 137
300.- 320. 1168 0.2360E-01 0 1.3959E+07 6.0562E+04 5.9871E+04 4.3523E+03 5.5519E+04 3.2775E+03 105
320.- 340. 1492 0.3015E-01 0 1.3392E+07 6.5489E+04 6.4645E+04 3.9713E+03 6.0674E+04 2.9906E+03 98
340.- 360. 1777 0.3591E-01 0 1.2715E+07 7.1904E+04 7.0913E+04 3.7158E+03 6.7197E+04 2.7989E+03 94
360.- 380. 2142 0.4328E-01 0 1.1836E+07 7.5409E+04 7.4210E+04 2.0624E+03 7.2148E+04 1.5559E+03 55
380.- 400. 2550 0.5153E-01 0 1.0908E+07 7.8877E+04 7.7427E+04 1.6886E+03 7.5738E+04 1.2790E+03 48
400.- 420. 4398 0.8887E-01 0 1.3340E+07 1.1688E+05 1.1357E+05 1.1478E+03 1.1242E+05 8.7105E+02 33
420.- 440. 5081 0.1027E+00 0 1.1220E+07 1.1995E+05 1.1607E+05 4.9510E+02 1.1558E+05 3.7671E+02 15
440.- 460. 5849 0.1182E+00 0 8.5305E+06 1.1147E+05 1.0714E+05 9.6994E+01 1.0705E+05 7.3882E+01 3
460.- 480. 6134 0.1240E+00 0 5.9013E+06 9.2827E+04 8.8407E+04 0.0000E+00 8.8407E+04 0.0000E+00 0
480.- 500. 5532 0.1118E+00 0 3.5580E+06 6.7894E+04 6.4043E+04 0.0000E+00 6.4043E+04 0.0000E+00 0
500.- 520. 4228 0.8544E-01 0 1.7878E+06 4.1145E+04 3.8323E+04 0.0000E+00 3.8323E+04 0.0000E+00 0
520.- 540. 2515 0.5082E-01 0 6.9412E+05 1.8956E+04 1.7375E+04 0.0000E+00 1.7375E+04 0.0000E+00 0
540.- 560. 1051 0.2124E-01 36 1.9911E+05 6.3967E+03 5.7540E+03 0.0000E+00 5.7540E+03 0.0000E+00 0
560.- 580. 267 0.5395E-02 485 3.4605E+04 1.2937E+03 1.1441E+03 0.0000E+00 1.1441E+03 0.0000E+00 0
580.- 600. 37 0.7477E-03 3409 3.9304E+03 1.6119E+02 1.4071E+02 0.0000E+00 1.4071E+02 0.0000E+00 0
600.- 620. 5 0.1010E-03 9873 3.1185E+02 1.3135E+01 1.0777E+01 0.0000E+00 1.0777E+01 0.0000E+00 0
620.- 640. 1 0.2021E-04 12729 2.8073E+01 1.8796E+00 1.6027E+00 0.0000E+00 1.6027E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 8760 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 5553 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 4198 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 2737 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 1242 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 389 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 66 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- SUT 0 0.0000E+00
820.- 840. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- SUT 0 0.0000E+00
4959 1.0000E+00 4959 3.4747E+07 1.4577E+05 1.4241E+05 1.2475E+04 1.2994E+05 9.3490E+03 261
49486 1.0000E+00 49486 3.4755E+08 1.4723E+06 1.4388E+06 1.1820E+05 1.3206E+06 8.8279E+04 2386
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3733E+05 7.2456E+02 1.4589E+02 5.7867E+02 1.0885E+06 1.1726E+03 2.3348E+02 9.3916E+02 2 3
20.- 40. 5.4051E+05 9.8474E+02 2.1493E+02 7.6981E+02 1.0919E+06 1.2398E+03 3.2583E+02 9.1393E+02 3 5
40.- 60. 5.4816E+05 1.1243E+03 3.8161E+02 7.4268E+02 1.0888E+06 1.3682E+03 3.3114E+02 1.0370E+03 6 6
60.- 80. 5.4487E+05 9.0174E+02 0.0000E+00 9.0174E+02 1.0921E+06 1.9383E+03 7.4721E+02 1.1911E+03 0 11
80.- 100. 5.4407E+05 9.1696E+02 1.5254E+02 7.6442E+02 1.0979E+06 1.8693E+03 5.6134E+02 1.3079E+03 4 10
100.- 120. 5.4423E+05 1.2839E+03 2.8811E+02 9.9580E+02 1.0964E+06 1.6770E+03 4.1115E+02 1.2659E+03 6 6
120.- 140. 5.4979E+05 1.2899E+03 3.9585E+02 8.9408E+02 1.0908E+06 1.5398E+03 2.7247E+02 1.2674E+03 10 6
140.- 160. 5.4433E+05 1.1814E+03 2.0847E+02 9.7291E+02 1.0776E+06 1.7324E+03 2.1318E+02 1.5192E+03 4 6
160.- 180. 5.3055E+05 1.2381E+03 1.9789E+02 1.0402E+03 1.0840E+06 1.9694E+03 2.2360E+02 1.7458E+03 5 5
180.- 200. 5.3195E+05 1.3552E+03 2.5185E+02 1.1034E+03 1.0799E+06 2.8261E+03 9.3199E+02 1.8941E+03 5 17
200.- 220. 5.2410E+05 1.8293E+03 5.1802E+02 1.3113E+03 1.0510E+06 2.2339E+03 3.0056E+02 1.9334E+03 13 7
220.- 240. 5.1095E+05 1.4126E+03 1.3392E+02 1.2787E+03 1.0296E+06 2.7637E+03 5.1436E+02 2.2493E+03 3 10
240.- 260. 5.0612E+05 1.7547E+03 1.9439E+02 1.5603E+03 1.0179E+06 3.4858E+03 8.7105E+02 2.6147E+03 5 16
260.- 280. 5.0338E+05 2.0783E+03 3.5331E+02 1.7250E+03 9.9868E+05 3.6422E+03 6.5685E+02 2.9853E+03 9 14
280.- 300. 4.7987E+05 1.9748E+03 4.4769E+01 1.9300E+03 9.8242E+05 3.5181E+03 4.5884E+02 3.0593E+03 1 11
300.- 320. 4.6584E+05 2.3152E+03 8.3152E+01 2.2320E+03 9.3567E+05 3.6784E+03 2.8649E+02 3.3919E+03 2 7
320.- 340. 4.4352E+05 2.1463E+03 9.6273E+01 2.0500E+03 8.8565E+05 4.0383E+03 3.0442E+02 3.7339E+03 3 8
340.- 360. 4.1754E+05 2.1286E+03 3.0534E+01 2.0981E+03 8.4230E+05 4.6410E+03 3.9333E+02 4.2477E+03 1 10
360.- 380. 3.9232E+05 2.4664E+03 3.0010E+01 2.4364E+03 7.8664E+05 4.8989E+03 2.2085E+02 4.6781E+03 1 6
380.- 400. 3.6883E+05 2.6044E+03 0.0000E+00 2.6044E+03 7.3110E+05 5.0698E+03 1.4799E+02 4.9218E+03 0 4
400.- 420. 2.7226E+04 1.7375E+02 0.0000E+00 1.7375E+02 5.3231E+04 3.9976E+02 7.8675E+01 3.2109E+02 0 2
0.- 20. 5.4193E+06 9.0988E+03 2.6330E+03 6.4658E+03 1.0885E+07 1.3283E+04 3.3495E+03 9.9333E+03 47 45
20.- 40. 5.4490E+06 9.7435E+03 2.6249E+03 7.1186E+03 1.0910E+07 1.3716E+04 3.5071E+03 1.0209E+04 47 58
40.- 60. 5.4707E+06 9.4764E+03 1.8585E+03 7.6179E+03 1.0946E+07 1.4606E+04 3.4382E+03 1.1168E+04 35 56
60.- 80. 5.4579E+06 9.5399E+03 1.6589E+03 7.8810E+03 1.0972E+07 1.6371E+04 4.3656E+03 1.2005E+04 35 62
80.- 100. 5.4742E+06 1.0637E+04 2.1358E+03 8.5011E+03 1.0968E+07 1.8635E+04 5.2768E+03 1.3358E+04 45 78
100.- 120. 5.4687E+06 1.2455E+04 2.8663E+03 9.5891E+03 1.0952E+07 1.8121E+04 4.7496E+03 1.3371E+04 56 78
120.- 140. 5.4520E+06 1.2171E+04 2.4187E+03 9.7525E+03 1.0937E+07 1.9761E+04 5.0098E+03 1.4751E+04 52 91
140.- 160. 5.4330E+06 1.2327E+04 2.1519E+03 1.0175E+04 1.0838E+07 1.9733E+04 3.8866E+03 1.5846E+04 47 71
160.- 180. 5.3968E+06 1.3619E+04 2.4350E+03 1.1184E+04 1.0797E+07 2.2287E+04 4.4184E+03 1.7869E+04 55 80
180.- 200. 5.3232E+06 1.4057E+04 2.1809E+03 1.1876E+04 1.0709E+07 2.4960E+04 5.9105E+03 1.9050E+04 49 110
200.- 220. 5.2851E+06 1.5607E+04 2.4537E+03 1.3154E+04 1.0579E+07 2.6564E+04 5.2677E+03 2.1296E+04 60 103
220.- 240. 5.1921E+06 1.6133E+04 1.9611E+03 1.4172E+04 1.0402E+07 2.8704E+04 5.2763E+03 2.3427E+04 47 97
240.- 260. 5.1037E+06 1.7913E+04 1.6741E+03 1.6239E+04 1.0213E+07 3.1091E+04 5.3232E+03 2.5767E+04 44 111
260.- 280. 4.9817E+06 1.9126E+04 1.4124E+03 1.7713E+04 9.9684E+06 3.3164E+04 4.5896E+03 2.8575E+04 37 102
280.- 300. 4.8185E+06 2.0026E+04 1.1103E+03 1.8916E+04 9.6686E+06 3.6856E+04 4.7214E+03 3.2134E+04 30 107
300.- 320. 4.6483E+06 2.0578E+04 6.9903E+02 1.9879E+04 9.3109E+06 3.9293E+04 3.6533E+03 3.5640E+04 20 85
320.- 340. 4.4682E+06 2.1833E+04 4.6444E+02 2.1369E+04 8.9235E+06 4.2812E+04 3.5069E+03 3.9305E+04 14 84
340.- 360. 4.2322E+06 2.3780E+04 2.5700E+02 2.3523E+04 8.4823E+06 4.7132E+04 3.4588E+03 4.3674E+04 8 86
360.- 380. 3.9452E+06 2.4500E+04 6.4193E+01 2.4436E+04 7.8912E+06 4.9710E+04 1.9982E+03 4.7712E+04 2 53
380.- 400. 3.6008E+06 2.4624E+04 6.1638E+01 2.4563E+04 7.2214E+06 5.1513E+04 1.6270E+03 4.9886E+04 2 46
400.- 420. 2.6466E+05 1.6115E+03 0.0000E+00 1.6115E+03 5.3446E+05 3.3085E+03 2.1562E+02 3.0929E+03 0 6
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0055E+07 3.1885E+04 3.7215E+03 2.8164E+04 2.0202E+07 5.5703E+04 8.4848E+03 4.7218E+04 83 170
1.0089E+08 3.1886E+05 3.3122E+04 2.8574E+05 2.0211E+08 5.7162E+05 8.3550E+04 4.8807E+05 732 1609
DAMAGE IN LAYER 1 : 8.7127E+04
DAMAGE IN LAYER 1 : 8.8685E+05
DAMAGE IN LAYER 2 : 5.5283E+04
DAMAGE IN LAYER 2 : 5.5198E+05
DAMAGE IN LAYER 3 : 0.0000E+00
@@ -293,18 +295,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 8.2000E-03 ENERGY REFL.COEF.= 2.2709E-03 REL.MEAN ENERGY = 2.7693E-01 MEAN ENERGY = 1.9385E+03
PART.REFL.COEF.= 1.0280E-02 ENERGY REFL.COEF.= 2.8436E-03 REL.MEAN ENERGY = 2.7661E-01 MEAN ENERGY = 1.9363E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.9385E+03 3.1363E+06 1.1788E+00 3.2490E+00 1.7710E+03 2.7658E+02 7.3456E+05 3.1212E-01
PATHLENGTH 3.8723E+02 2.6176E+04 -7.0843E-01 2.6442E+00 1.6179E+02 2.5268E+01 5.2420E+03 2.3197E-01
ELASTIC LOSS 8.0965E+01 1.1751E+03 3.4280E+01 8.3609E-01
INEL. LOSS 4.9219E+03 3.2033E+06 1.7898E+03 4.3653E+01
ENERGY 1.9363E+03 3.4116E+06 1.0710E+00 3.1694E+00 1.8471E+03 8.1470E+01 2.2164E+05 8.3881E-02
PATHLENGTH 3.9408E+02 3.1079E+04 -4.8292E-01 2.2236E+00 1.7629E+02 7.7760E+00 1.5164E+03 6.6278E-02
ELASTIC LOSS 7.7397E+01 1.0496E+03 3.2398E+01 6.3031E-02
INEL. LOSS 4.9285E+03 3.5555E+06 1.8856E+03 3.6685E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.9385E+03 6.8943E+06 3.2072E+10 1.6757E+14 9.2395E+17 5.2403E+21
LOGENERGY 3.0829E+00 9.7157E+00 3.1216E+01 1.0202E+02 3.3844E+02 1.1377E+03
PATHLENGTH 3.8723E+02 1.7612E+05 8.5472E+07 4.3199E+10 2.2514E+13 1.2028E+16
ENERGY 1.9363E+03 7.1608E+06 3.3826E+10 1.7996E+14 1.0259E+18 6.1160E+21
LOGENERGY 3.0147E+00 9.4273E+00 3.0254E+01 9.9180E+01 3.3090E+02 1.1202E+03
PATHLENGTH 3.9408E+02 1.8638E+05 9.5296E+07 5.1053E+10 2.8238E+13 1.5993E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -312,5 +314,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 0 0 3 2 0 0 2 1 2 2 3 5 1 6 5 3 5
0.000 0.000 0.488 0.000 0.000 1.463 0.976 0.000 0.000 0.976 0.488 0.976 0.976 1.463 2.439 0.488 2.927 2.439 1.463 2.439
0 2 4 7 10 15 16 19 26 29 27 22 23 31 41 46 54 44 53 45
0.000 0.078 0.156 0.272 0.389 0.584 0.623 0.739 1.012 1.128 1.051 0.856 0.895 1.206 1.595 1.790 2.101 1.712 2.062 1.751
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.rge
+33 -32
View File
@@ -1,36 +1,36 @@
DEPTH PARTICLES
10.0000 4
30.0000 7
50.0000 10
70.0000 14
90.0000 12
110.0000 15
130.0000 20
150.0000 29
170.0000 34
190.0000 37
210.0000 40
230.0000 54
250.0000 74
270.0000 79
290.0000 101
310.0000 111
330.0000 138
350.0000 177
370.0000 202
390.0000 286
410.0000 460
430.0000 492
450.0000 578
470.0000 637
490.0000 554
510.0000 400
530.0000 259
550.0000 105
570.0000 26
590.0000 4
610.0000 0
630.0000 0
10.0000 40
30.0000 67
50.0000 92
70.0000 106
90.0000 145
110.0000 155
130.0000 192
150.0000 241
170.0000 330
190.0000 378
210.0000 476
230.0000 579
250.0000 650
270.0000 833
290.0000 975
310.0000 1168
330.0000 1492
350.0000 1777
370.0000 2142
390.0000 2550
410.0000 4398
430.0000 5081
450.0000 5849
470.0000 6134
490.0000 5532
510.0000 4228
530.0000 2515
550.0000 1051
570.0000 267
590.0000 37
610.0000 5
630.0000 1
650.0000 0
670.0000 0
690.0000 0
@@ -40,3 +40,4 @@
770.0000 0
790.0000 0
810.0000 0
830.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
7.00 0.45 0.00 15.00 5000 4959 41 0 5000 0 0.4214E+03 0.9241E+02 0.1939E+04 0.1771E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1444 3515 0 0
7.00 0.45 0.00 15.00 50000 49486 514 0 50000 0 0.4215E+03 0.9246E+02 0.1936E+04 0.1847E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 14388 35098 0 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.inp
+1 -1
View File
@@ -1,5 +1,5 @@
1 0.1134289259 9000 450 0 15 0.5 0.0 0.0 0.0
5000 78745 78745 78745 0 50.0 20 1.0 2 2 4 3 2 1 0
50000 78745 78745 78745 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.out
+108 -106
View File
@@ -1,11 +1,12 @@
1
* TrimSPNL v1.3.2 *
Random-number generator: RANLUX
Start: 18.Jun. 2026 09:50:25
Start: 19.Jun. 2026 20:09:40
End: 18.Jun. 2026 09:50:27
End: 19.Jun. 2026 20:09:58
Simulation needed for 5000 projectiles 2 seconds
Simulation needed for 50000 projectiles 18 seconds
* INPUT DATA * SiO2_Al2O3_T
@@ -15,7 +16,7 @@
1.00 0.11 9000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78745.00 78745.00 78745.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
50000 78745.00 78745.00 78745.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
@@ -79,7 +80,7 @@
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
26102 0 0 0 0 0 0 0 0
259275 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
@@ -161,136 +162,137 @@
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4975 ENERGY=0.4478E+08 EV
BACKSCATTERED PARTICLES= 25 ENERGY=0.6945E+05 EV
IMPLANTED PARTICLES= 49651 ENERGY=0.4469E+09 EV
BACKSCATTERED PARTICLES= 349 ENERGY=0.9545E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
TRIED PARTICLES= 50000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 539 539
IMPLANTED PARTICLES (LAYER 1)= 5425 5425
IMPLANTED PARTICLES (LAYER 2)= 4436 4436
IMPLANTED PARTICLES (LAYER 2)= 44226 44226
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4975 0
IMPLANTED PARTICLES (LAYER 4)= 49651 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 330.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.455
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 330.0 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.059
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.450
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.0352E+02 8.6683E+03 -1.4794E+00 6.2550E+00 9.3104E+01 1.3200E+00 2.8172E+02 5.1670E-02
SPREAD 2.0688E+02 1.3632E+04 8.4572E-01 3.5384E+00 1.1676E+02 1.6553E+00 3.0793E+02 3.1263E-02
PATHLENGTH 7.2399E+02 1.4019E+03 1.4069E+00 5.4780E+00 3.7442E+01 5.3084E-01 4.2059E+01 3.7623E-02
ELASTIC LOSS 3.1725E+01 2.4473E+02 1.5644E+01 3.1445E-03
INEL. LOSS 8.9679E+03 2.0370E+05 4.5133E+02 9.0720E-02
PENETRATION 5.0359E+02 9.1061E+03 -1.5804E+00 6.6010E+00 9.5426E+01 4.2826E-01 9.6717E+01 1.6094E-02
SPREAD 2.0565E+02 1.3353E+04 8.1523E-01 3.4992E+00 1.1556E+02 5.1860E-01 9.4738E+01 1.0137E-02
PATHLENGTH 7.2408E+02 1.3999E+03 1.4307E+00 5.5476E+00 3.7415E+01 1.6791E-01 1.3397E+01 1.1982E-02
ELASTIC LOSS 3.1723E+01 2.5927E+02 1.6102E+01 3.2430E-04
INEL. LOSS 8.9670E+03 2.0381E+05 4.5146E+02 9.0926E-03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.4930E-02 9.2583E-01 5.1922E+01 4.6212E+03 9.6220E-01 7.4886E-04 4.8978E-02 2.8280E+00
WEAK EL.LOSS 2.1817E-03 3.9978E-05 4.2878E+00 2.3170E+01 6.3228E-03 4.9209E-06 1.4650E-07 7.5416E-03
INELAST.LOSS 2.7116E+01 1.1176E+02 -1.1451E+00 3.0206E+00 1.0572E+01 8.2276E-03 1.2364E-01 1.6353E-03
SUBTHR.LOSS 8.6208E-02 3.9286E-01 2.2000E+01 6.6859E+02 6.2678E-01 4.8786E-04 7.9007E-03 1.9614E-01
ELAST.LOSS 9.5484E-02 1.0193E+00 5.8066E+01 5.9423E+03 1.0096E+00 2.4856E-04 1.9343E-02 1.3030E+00
WEAK EL.LOSS 2.1782E-03 3.9848E-05 4.2899E+00 2.3208E+01 6.3125E-03 1.5541E-06 4.6233E-08 2.3943E-03
INELAST.LOSS 2.7116E+01 1.1171E+02 -1.1453E+00 3.0218E+00 1.0569E+01 2.6022E-03 3.9108E-02 5.1725E-04
SUBTHR.LOSS 8.6039E-02 3.9382E-01 2.2014E+01 6.6828E+02 6.2755E-01 1.5452E-04 2.5048E-03 6.2334E-02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.0352E+02 2.6220E+05 1.3956E+08 7.5529E+10 4.1440E+13 2.3003E+16
PENETRATION 5.0359E+02 2.6271E+05 1.4010E+08 7.5951E+10 4.1732E+13 2.3194E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 2 0.4020E-03 0 1.6414E+06 1.6085E+03 1.6059E+03 3.7838E+02 1.2275E+03 2.8089E+02 6
20.- 40. 1 0.2010E-03 0 1.6508E+06 1.9877E+03 1.9850E+03 6.7040E+02 1.3146E+03 4.8757E+02 9
40.- 60. 3 0.6030E-03 0 1.6580E+06 2.2780E+03 2.2744E+03 7.3118E+02 1.5432E+03 5.2763E+02 9
60.- 80. 7 0.1407E-02 0 1.6621E+06 2.2694E+03 2.2646E+03 7.6077E+02 1.5038E+03 5.6249E+02 12
80.- 100. 5 0.1005E-02 0 1.6784E+06 2.0850E+03 2.0798E+03 3.7454E+02 1.7052E+03 2.8585E+02 8
100.- 120. 7 0.1407E-02 0 1.6808E+06 2.4959E+03 2.4902E+03 7.8231E+02 1.7079E+03 5.8627E+02 14
120.- 140. 5 0.1005E-02 0 1.6880E+06 2.1972E+03 2.1916E+03 3.8069E+02 1.8109E+03 2.8734E+02 7
140.- 160. 12 0.2412E-02 0 1.6813E+06 2.5004E+03 2.4923E+03 7.6816E+02 1.7242E+03 5.7075E+02 13
160.- 180. 17 0.3417E-02 0 1.6873E+06 2.3135E+03 2.3023E+03 3.5566E+02 1.9466E+03 2.7016E+02 8
180.- 200. 17 0.3417E-02 0 1.6923E+06 3.0955E+03 3.0843E+03 7.8486E+02 2.2994E+03 5.8065E+02 14
200.- 220. 13 0.2613E-02 0 1.6804E+06 2.7611E+03 2.7510E+03 7.0200E+02 2.0490E+03 5.0774E+02 10
220.- 240. 19 0.3819E-02 0 1.6716E+06 3.1090E+03 3.0943E+03 6.1660E+02 2.4777E+03 4.6117E+02 13
240.- 260. 34 0.6834E-02 0 1.6612E+06 2.8768E+03 2.8581E+03 4.8432E+02 2.3738E+03 3.6473E+02 10
260.- 280. 27 0.5427E-02 0 1.6501E+06 3.3368E+03 3.3194E+03 4.4786E+02 2.8716E+03 3.3757E+02 10
280.- 300. 28 0.5628E-02 0 1.6320E+06 3.4719E+03 3.4500E+03 3.2555E+02 3.1245E+03 2.4419E+02 7
300.- 320. 49 0.9849E-02 0 1.6260E+06 3.9629E+03 3.9340E+03 4.8594E+02 3.4481E+03 3.6040E+02 9
320.- 340. 44 0.8844E-02 0 1.5941E+06 4.4147E+03 4.3863E+03 7.6657E+02 3.6197E+03 5.7330E+02 15
340.- 360. 68 0.1367E-01 0 1.5589E+06 4.3670E+03 4.3291E+03 5.0176E+02 3.8273E+03 3.7753E+02 10
360.- 380. 85 0.1709E-01 0 1.5330E+06 5.2266E+03 5.1763E+03 9.1180E+02 4.2645E+03 6.8787E+02 22
380.- 400. 96 0.1930E-01 0 1.4952E+06 5.4739E+03 5.4176E+03 5.0046E+02 4.9172E+03 3.7113E+02 10
400.- 420. 173 0.3477E-01 0 1.9875E+06 8.8478E+03 8.7068E+03 8.5910E+02 7.8477E+03 6.4939E+02 21
420.- 440. 226 0.4543E-01 0 1.8886E+06 9.5373E+03 9.3583E+03 7.5248E+02 8.6058E+03 5.7199E+02 19
440.- 460. 268 0.5387E-01 0 1.7656E+06 1.0595E+04 1.0379E+04 5.8331E+02 9.7959E+03 4.4278E+02 16
460.- 480. 355 0.7136E-01 0 1.5737E+06 1.0917E+04 1.0647E+04 3.3222E+02 1.0315E+04 2.5283E+02 9
480.- 500. 402 0.8080E-01 0 1.3665E+06 1.1978E+04 1.1663E+04 7.0293E+01 1.1593E+04 5.3325E+01 2
500.- 520. 494 0.9930E-01 0 1.1309E+06 1.1466E+04 1.1089E+04 6.3460E+01 1.1025E+04 4.8384E+01 2
520.- 540. 510 0.1025E+00 0 8.6519E+05 1.0543E+04 1.0161E+04 0.0000E+00 1.0161E+04 0.0000E+00 0
540.- 560. 579 0.1164E+00 0 6.2576E+05 9.3214E+03 8.9067E+03 3.3932E+01 8.8728E+03 2.5786E+01 1
560.- 580. 507 0.1019E+00 0 3.9063E+05 7.1249E+03 6.7634E+03 0.0000E+00 6.7634E+03 0.0000E+00 0
580.- 600. 444 0.8925E-01 0 2.1561E+05 4.5037E+03 4.2038E+03 0.0000E+00 4.2038E+03 0.0000E+00 0
600.- 620. 276 0.5548E-01 0 9.4363E+04 2.4485E+03 2.2668E+03 0.0000E+00 2.2668E+03 0.0000E+00 0
620.- 640. 144 0.2894E-01 1 3.1104E+04 9.3936E+02 8.5291E+02 0.0000E+00 8.5291E+02 0.0000E+00 0
640.- 660. 42 0.8442E-02 21 6.9803E+03 2.2595E+02 2.0048E+02 0.0000E+00 2.0048E+02 0.0000E+00 0
660.- 680. 16 0.3216E-02 273 1.0704E+03 4.5383E+01 3.7973E+01 0.0000E+00 3.7973E+01 0.0000E+00 0
680.- 700. 0 0.0000E+00 933 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 1483 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 1141 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 488 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 193 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 151 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 116 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 90 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 55 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 25 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
0.- 20. 13 0.2618E-03 0 1.6419E+07 1.8753E+04 1.8726E+04 5.3692E+03 1.3357E+04 3.9418E+03 82
20.- 40. 45 0.9063E-03 0 1.6509E+07 2.0868E+04 2.0826E+04 6.4945E+03 1.4332E+04 4.7434E+03 91
40.- 60. 51 0.1027E-02 0 1.6600E+07 1.9857E+04 1.9812E+04 5.3448E+03 1.4467E+04 3.8958E+03 76
60.- 80. 62 0.1249E-02 0 1.6683E+07 2.1380E+04 2.1326E+04 5.8299E+03 1.5496E+04 4.2981E+03 87
80.- 100. 73 0.1470E-02 0 1.6730E+07 2.1952E+04 2.1891E+04 6.0731E+03 1.5818E+04 4.4743E+03 102
100.- 120. 93 0.1873E-02 0 1.6823E+07 2.4372E+04 2.4305E+04 6.5714E+03 1.7733E+04 4.8421E+03 107
120.- 140. 88 0.1772E-02 0 1.6846E+07 2.3767E+04 2.3695E+04 5.8425E+03 1.7852E+04 4.2952E+03 93
140.- 160. 122 0.2457E-02 0 1.6896E+07 2.6545E+04 2.6459E+04 8.1186E+03 1.8340E+04 5.9964E+03 133
160.- 180. 137 0.2759E-02 0 1.6901E+07 2.7147E+04 2.7049E+04 6.6710E+03 2.0378E+04 4.9067E+03 109
180.- 200. 155 0.3122E-02 0 1.6893E+07 2.8553E+04 2.8443E+04 7.0966E+03 2.1346E+04 5.2405E+03 118
200.- 220. 174 0.3504E-02 0 1.6874E+07 3.0956E+04 3.0836E+04 7.4114E+03 2.3425E+04 5.4803E+03 129
220.- 240. 211 0.4250E-02 0 1.6758E+07 3.2389E+04 3.2244E+04 7.7821E+03 2.4462E+04 5.7902E+03 140
240.- 260. 256 0.5156E-02 0 1.6666E+07 3.2966E+04 3.2798E+04 6.9515E+03 2.5847E+04 5.2028E+03 135
260.- 280. 320 0.6445E-02 0 1.6533E+07 3.6567E+04 3.6367E+04 7.5834E+03 2.8784E+04 5.6414E+03 140
280.- 300. 369 0.7432E-02 0 1.6379E+07 3.7026E+04 3.6792E+04 6.0119E+03 3.0780E+04 4.4693E+03 116
300.- 320. 451 0.9083E-02 0 1.6176E+07 4.0473E+04 4.0195E+04 6.9651E+03 3.3230E+04 5.1771E+03 133
320.- 340. 522 0.1051E-01 0 1.5946E+07 4.4231E+04 4.3912E+04 7.1226E+03 3.6790E+04 5.3418E+03 149
340.- 360. 650 0.1309E-01 0 1.5638E+07 4.7508E+04 4.7122E+04 7.4032E+03 3.9719E+04 5.5467E+03 151
360.- 380. 833 0.1678E-01 0 1.5281E+07 5.1349E+04 5.0870E+04 7.3834E+03 4.3487E+04 5.5502E+03 168
380.- 400. 800 0.1611E-01 0 1.4817E+07 5.5129E+04 5.4619E+04 6.3598E+03 4.8259E+04 4.7891E+03 145
400.- 420. 1617 0.3257E-01 0 1.9549E+07 8.2752E+04 8.1448E+04 6.5224E+03 7.4926E+04 4.9279E+03 156
420.- 440. 2108 0.4246E-01 0 1.8770E+07 9.2679E+04 9.0982E+04 5.4794E+03 8.5502E+04 4.1441E+03 134
440.- 460. 2682 0.5402E-01 0 1.7407E+07 1.0306E+05 1.0093E+05 4.7560E+03 9.6171E+04 3.6027E+03 124
460.- 480. 3446 0.6940E-01 0 1.5697E+07 1.0927E+05 1.0660E+05 2.9086E+03 1.0369E+05 2.2074E+03 80
480.- 500. 4005 0.8066E-01 0 1.3626E+07 1.1418E+05 1.1107E+05 1.6230E+03 1.0945E+05 1.2305E+03 46
500.- 520. 4695 0.9456E-01 0 1.1330E+07 1.1385E+05 1.1025E+05 2.4426E+02 1.1001E+05 1.8527E+02 7
520.- 540. 5428 0.1093E+00 0 8.7942E+06 1.0714E+05 1.0312E+05 9.9337E+01 1.0302E+05 7.5578E+01 3
540.- 560. 5626 0.1133E+00 0 6.2608E+06 9.2347E+04 8.8261E+04 6.4582E+01 8.8197E+04 4.9195E+01 2
560.- 580. 5380 0.1084E+00 0 3.9844E+06 7.0982E+04 6.7206E+04 0.0000E+00 6.7206E+04 0.0000E+00 0
580.- 600. 4384 0.8830E-01 0 2.1877E+06 4.6395E+04 4.3422E+04 0.0000E+00 4.3422E+04 0.0000E+00 0
600.- 620. 2871 0.5782E-01 0 9.7113E+05 2.4279E+04 2.2422E+04 0.0000E+00 2.2422E+04 0.0000E+00 0
620.- 640. 1398 0.2816E-01 18 3.2039E+05 9.4398E+03 8.5798E+03 0.0000E+00 8.5798E+03 0.0000E+00 0
640.- 660. 475 0.9567E-02 264 7.5417E+04 2.5830E+03 2.3076E+03 0.0000E+00 2.3076E+03 0.0000E+00 0
660.- 680. 100 0.2014E-02 2483 1.0312E+04 4.2389E+02 3.6700E+02 0.0000E+00 3.6700E+02 0.0000E+00 0
680.- 700. 11 0.2215E-03 9292 5.2375E+02 2.8653E+01 2.3784E+01 0.0000E+00 2.3784E+01 0.0000E+00 0
700.- 720. 0 0.0000E+00 15167 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 11367 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 4781 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 1880 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 1395 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 1219 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 941 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 575 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 211 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 48 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- SUT 0 0.0000E+00
960.- 980. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- SUT 0 0.0000E+00
4975 1.0000E+00 4975 4.4766E+07 1.6032E+05 1.5672E+05 1.4425E+04 1.4230E+05 1.0770E+04 286
49651 1.0000E+00 49651 4.4735E+08 1.6112E+06 1.5753E+06 1.5608E+05 1.4192E+06 1.1605E+05 2956
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4968E+05 6.5999E+02 1.6135E+02 4.9864E+02 1.0917E+06 9.4588E+02 2.1703E+02 7.2886E+02 3 3
20.- 40. 5.5250E+05 7.3406E+02 2.5480E+02 4.7926E+02 1.0983E+06 1.2509E+03 4.1560E+02 8.3534E+02 4 5
40.- 60. 5.5489E+05 7.5866E+02 1.6521E+02 5.9345E+02 1.1031E+06 1.5157E+03 5.6597E+02 9.4976E+02 2 7
60.- 80. 5.5212E+05 8.7108E+02 2.5936E+02 6.1172E+02 1.1100E+06 1.3935E+03 5.0141E+02 8.9207E+02 4 8
80.- 100. 5.5842E+05 8.7943E+02 2.6821E+02 6.1122E+02 1.1199E+06 1.2003E+03 1.0633E+02 1.0940E+03 5 3
100.- 120. 5.6565E+05 1.2773E+03 4.5736E+02 8.1994E+02 1.1152E+06 1.2129E+03 3.2495E+02 8.8796E+02 8 6
120.- 140. 5.6298E+05 1.0078E+03 2.2438E+02 7.8341E+02 1.1250E+06 1.1838E+03 1.5631E+02 1.0275E+03 4 3
140.- 160. 5.6164E+05 9.8137E+02 3.4056E+02 6.4081E+02 1.1197E+06 1.5110E+03 4.2760E+02 1.0834E+03 7 6
160.- 180. 5.6317E+05 9.2358E+02 1.6980E+02 7.5378E+02 1.1241E+06 1.3787E+03 1.8585E+02 1.1929E+03 4 4
180.- 200. 5.6480E+05 1.1847E+03 2.3851E+02 9.4622E+02 1.1275E+06 1.8995E+03 5.4635E+02 1.3532E+03 5 9
200.- 220. 5.6130E+05 8.9000E+02 4.1555E+01 8.4845E+02 1.1190E+06 1.8610E+03 6.6044E+02 1.2005E+03 1 9
220.- 240. 5.5217E+05 1.1891E+03 1.6018E+02 1.0289E+03 1.1194E+06 1.9052E+03 4.5642E+02 1.4488E+03 4 9
240.- 260. 5.5832E+05 1.0410E+03 1.8036E+02 8.6068E+02 1.1029E+06 1.8171E+03 3.0396E+02 1.5131E+03 4 6
260.- 280. 5.4976E+05 1.2070E+03 1.1639E+02 1.0906E+03 1.1003E+06 2.1124E+03 3.3147E+02 1.7809E+03 3 7
280.- 300. 5.4133E+05 1.3344E+03 8.6100E+01 1.2483E+03 1.0907E+06 2.1157E+03 2.3945E+02 1.8762E+03 2 5
300.- 320. 5.3763E+05 1.3229E+03 1.1285E+02 1.2101E+03 1.0884E+06 2.6111E+03 3.7309E+02 2.2380E+03 3 6
320.- 340. 5.3546E+05 1.6866E+03 2.6972E+02 1.4169E+03 1.0587E+06 2.6997E+03 4.9684E+02 2.2028E+03 7 8
340.- 360. 5.1970E+05 1.6980E+03 2.1070E+02 1.4873E+03 1.0391E+06 2.6311E+03 2.9105E+02 2.3400E+03 5 5
360.- 380. 5.1093E+05 1.7684E+03 1.6889E+02 1.5995E+03 1.0220E+06 3.4079E+03 7.4291E+02 2.6650E+03 4 18
380.- 400. 5.0011E+05 1.9119E+03 0.0000E+00 1.9119E+03 9.8887E+05 3.4543E+03 5.0046E+02 2.9538E+03 0 10
400.- 420. 4.3368E+04 1.7019E+02 3.3207E+01 1.3698E+02 8.7056E+04 2.0330E+02 4.2257E+01 1.6104E+02 1 1
0.- 20. 5.4616E+06 7.5635E+03 2.2458E+03 5.3177E+03 1.0958E+07 1.1163E+04 3.1234E+03 8.0395E+03 39 43
20.- 40. 5.5017E+06 8.1818E+03 2.3953E+03 5.7865E+03 1.1008E+07 1.2644E+04 4.0992E+03 8.5453E+03 38 53
40.- 60. 5.5398E+06 7.5559E+03 1.7969E+03 5.7590E+03 1.1060E+07 1.2256E+04 3.5479E+03 8.7083E+03 32 44
60.- 80. 5.5753E+06 8.8305E+03 2.6556E+03 6.1749E+03 1.1108E+07 1.2495E+04 3.1743E+03 9.3210E+03 42 45
80.- 100. 5.5664E+06 8.3242E+03 1.9259E+03 6.3984E+03 1.1164E+07 1.3567E+04 4.1473E+03 9.4199E+03 36 66
100.- 120. 5.6293E+06 9.5338E+03 2.3182E+03 7.2157E+03 1.1194E+07 1.4771E+04 4.2532E+03 1.0517E+04 44 63
120.- 140. 5.6153E+06 9.1571E+03 1.9431E+03 7.2140E+03 1.1230E+07 1.4538E+04 3.8994E+03 1.0638E+04 36 57
140.- 160. 5.6510E+06 1.0007E+04 2.6674E+03 7.3392E+03 1.1245E+07 1.6452E+04 5.4512E+03 1.1001E+04 50 83
160.- 180. 5.6268E+06 1.0117E+04 2.1164E+03 8.0006E+03 1.1275E+07 1.6932E+04 4.5545E+03 1.2377E+04 42 67
180.- 200. 5.6387E+06 1.1077E+04 2.5688E+03 8.5085E+03 1.1255E+07 1.7365E+04 4.5278E+03 1.2838E+04 51 67
200.- 220. 5.6230E+06 1.1262E+04 1.9711E+03 9.2905E+03 1.1251E+07 1.9575E+04 5.4403E+03 1.4134E+04 40 89
220.- 240. 5.5769E+06 1.2229E+04 2.8485E+03 9.3809E+03 1.1181E+07 2.0015E+04 4.9336E+03 1.5081E+04 57 83
240.- 260. 5.5610E+06 1.2720E+04 2.6803E+03 1.0040E+04 1.1105E+07 2.0078E+04 4.2712E+03 1.5807E+04 60 75
260.- 280. 5.5016E+06 1.3711E+04 2.6465E+03 1.1064E+04 1.1031E+07 2.2656E+04 4.9369E+03 1.7719E+04 60 80
280.- 300. 5.4508E+06 1.3282E+04 1.1507E+03 1.2131E+04 1.0928E+07 2.3509E+04 4.8612E+03 1.8648E+04 27 89
300.- 320. 5.3848E+06 1.4126E+04 1.6947E+03 1.2432E+04 1.0792E+07 2.6069E+04 5.2704E+03 2.0799E+04 41 92
320.- 340. 5.3158E+06 1.6057E+04 2.1231E+03 1.3933E+04 1.0630E+07 2.7856E+04 4.9995E+03 2.2856E+04 52 97
340.- 360. 5.1925E+06 1.7227E+04 2.1618E+03 1.5065E+04 1.0446E+07 2.9896E+04 5.2414E+03 2.4654E+04 50 101
360.- 380. 5.0778E+06 1.7829E+04 1.5609E+03 1.6269E+04 1.0203E+07 3.3041E+04 5.8225E+03 2.7218E+04 41 127
380.- 400. 4.9137E+06 1.9346E+04 1.5625E+03 1.7784E+04 9.8442E+06 3.4673E+04 4.7973E+03 2.9876E+04 42 103
400.- 420. 4.3070E+05 1.5727E+03 1.8349E+02 1.3892E+03 8.6338E+05 2.2714E+03 2.9562E+02 1.9758E+03 5 7
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0996E+07 2.3498E+04 3.9195E+03 1.9578E+04 2.1951E+07 3.8311E+04 7.8857E+03 3.0425E+04 80 138
1.0983E+08 2.3971E+05 4.3217E+04 1.9649E+05 2.1977E+08 4.0182E+05 9.1648E+04 3.1018E+05 885 1531
DAMAGE IN LAYER 1 : 6.1486E+04
DAMAGE IN LAYER 1 : 6.3829E+05
DAMAGE IN LAYER 2 : 9.5237E+04
DAMAGE IN LAYER 2 : 9.3698E+05
DAMAGE IN LAYER 3 : 0.0000E+00
@@ -300,18 +302,18 @@
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 5.0000E-03 ENERGY REFL.COEF.= 1.5434E-03 REL.MEAN ENERGY = 3.0868E-01 MEAN ENERGY = 2.7781E+03
PART.REFL.COEF.= 6.9800E-03 ENERGY REFL.COEF.= 2.1212E-03 REL.MEAN ENERGY = 3.0389E-01 MEAN ENERGY = 2.7350E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.7781E+03 5.9258E+06 7.1722E-01 1.9585E+00 2.4343E+03 4.8686E+02 1.1603E+06 3.7451E-01
PATHLENGTH 4.4485E+02 3.9948E+04 -4.4109E-01 1.7730E+00 1.9987E+02 3.9974E+01 7.0244E+03 3.2789E-01
ELASTIC LOSS 9.9809E+01 1.2474E+03 3.5318E+01 1.4127E+00
INEL. LOSS 6.0368E+03 5.7648E+06 2.4010E+03 9.6040E+01
ENERGY 2.7350E+03 5.8755E+06 8.9289E-01 2.6728E+00 2.4240E+03 1.2975E+02 4.0678E+05 9.6775E-02
PATHLENGTH 4.5265E+02 4.4087E+04 -3.8954E-01 2.1409E+00 2.0997E+02 1.1239E+01 2.5207E+03 7.8058E-02
ELASTIC LOSS 1.0353E+02 1.6513E+03 4.0637E+01 1.1644E-01
INEL. LOSS 6.1174E+03 6.2123E+06 2.4925E+03 7.1417E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.7781E+03 1.3644E+07 8.1176E+10 5.1773E+14 3.4079E+18 2.2823E+22
LOGENERGY 3.2318E+00 1.0661E+01 3.5834E+01 1.2248E+02 4.2486E+02 1.4929E+03
PATHLENGTH 4.4485E+02 2.3784E+05 1.3782E+08 8.3155E+10 5.1440E+13 3.2400E+16
ENERGY 2.7350E+03 1.3356E+07 8.1384E+10 5.5105E+14 3.9623E+18 2.9636E+22
LOGENERGY 3.1951E+00 1.0499E+01 3.5275E+01 1.2069E+02 4.1910E+02 1.4736E+03
PATHLENGTH 4.5265E+02 2.4898E+05 1.4901E+08 9.3815E+10 6.1187E+13 4.0983E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
@@ -319,5 +321,5 @@
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 2 1 2 1 1 1 6 1 1 2 0 1 4 1
0.000 0.000 0.000 0.000 0.000 0.800 1.600 0.800 1.600 0.800 0.800 0.800 4.800 0.800 0.800 1.600 0.000 0.800 3.200 0.800
0 2 5 7 8 5 13 18 20 15 15 24 26 25 27 24 24 30 35 26
0.000 0.115 0.287 0.401 0.458 0.287 0.745 1.032 1.146 0.860 0.860 1.375 1.490 1.433 1.547 1.375 1.375 1.719 2.006 1.490
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.rge
+36 -35
View File
@@ -1,39 +1,39 @@
DEPTH PARTICLES
10.0000 2
30.0000 1
50.0000 3
70.0000 7
90.0000 5
110.0000 7
130.0000 5
150.0000 12
170.0000 17
190.0000 17
210.0000 13
230.0000 19
250.0000 34
270.0000 27
290.0000 28
310.0000 49
330.0000 44
350.0000 68
370.0000 85
390.0000 96
410.0000 173
430.0000 226
450.0000 268
470.0000 355
490.0000 402
510.0000 494
530.0000 510
550.0000 579
570.0000 507
590.0000 444
610.0000 276
630.0000 144
650.0000 42
670.0000 16
690.0000 0
10.0000 13
30.0000 45
50.0000 51
70.0000 62
90.0000 73
110.0000 93
130.0000 88
150.0000 122
170.0000 137
190.0000 155
210.0000 174
230.0000 211
250.0000 256
270.0000 320
290.0000 369
310.0000 451
330.0000 522
350.0000 650
370.0000 833
390.0000 800
410.0000 1617
430.0000 2108
450.0000 2682
470.0000 3446
490.0000 4005
510.0000 4695
530.0000 5428
550.0000 5626
570.0000 5380
590.0000 4384
610.0000 2871
630.0000 1398
650.0000 475
670.0000 100
690.0000 11
710.0000 0
730.0000 0
750.0000 0
@@ -47,3 +47,4 @@
910.0000 0
930.0000 0
950.0000 0
970.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.seq
+1 -1
View File
@@ -1,2 +1,2 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
9.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.5035E+03 0.9310E+02 0.2778E+04 0.2434E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 539 4436 0 0
9.00 0.45 0.00 15.00 50000 49651 349 0 50000 0 0.5036E+03 0.9543E+02 0.2735E+04 0.2424E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 5425 44226 0 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_Seq_Results.dat
+13 -13
View File
@@ -1,14 +1,14 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
1.00 0.45 0.00 15.00 5000 4476 524 0 5056 56 0.9535E+02 0.5031E+02 0.2547E+03 0.2520E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4476 0 0 0
3.00 0.45 0.00 15.00 5000 4854 146 0 5000 0 0.2191E+03 0.7512E+02 0.7853E+03 0.7472E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4844 10 0 0
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3322E+03 0.9097E+02 0.1050E+04 0.1043E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3599 1321 0 0
7.00 0.45 0.00 15.00 5000 4959 41 0 5000 0 0.4214E+03 0.9241E+02 0.1939E+04 0.1771E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1444 3515 0 0
9.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.5035E+03 0.9310E+02 0.2778E+04 0.2434E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 539 4436 0 0
11.00 0.45 0.00 15.00 5000 4976 24 0 5000 0 0.5848E+03 0.1038E+03 0.3906E+04 0.2537E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 252 4458 266 0
13.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.6855E+03 0.1297E+03 0.3144E+04 0.3965E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 2709 2138 6
15.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.8217E+03 0.1667E+03 0.6472E+04 0.4937E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 63 1210 2966 746
17.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.9656E+03 0.1920E+03 0.5966E+04 0.4369E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48 528 1784 2625
19.00 0.45 0.00 15.00 5000 4990 10 0 5000 0 0.1112E+04 0.2080E+03 0.9359E+04 0.5745E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 27 288 765 3910
21.00 0.45 0.00 15.00 5000 4993 7 0 5000 0 0.1267E+04 0.2162E+03 0.7972E+04 0.6003E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 21 139 338 4495
23.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1427E+04 0.2332E+03 0.8113E+04 0.5954E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 11 82 178 4713
25.00 0.45 0.00 15.00 5000 4992 8 0 5000 0 0.1599E+04 0.2590E+03 0.1136E+05 0.8198E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 10 60 104 4818
1.00 0.45 0.00 15.00 50000 44913 5087 0 50644 644 0.9546E+02 0.5017E+02 0.2564E+03 0.2593E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 44913 0 0 0
3.00 0.45 0.00 15.00 50000 48599 1401 0 50000 0 0.2202E+03 0.7503E+02 0.8056E+03 0.7486E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48541 58 0 0
5.00 0.45 0.00 15.00 50000 49264 736 0 50000 0 0.3305E+03 0.9004E+02 0.1378E+04 0.1283E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 36517 12747 0 0
7.00 0.45 0.00 15.00 50000 49486 514 0 50000 0 0.4215E+03 0.9246E+02 0.1936E+04 0.1847E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 14388 35098 0 0
9.00 0.45 0.00 15.00 50000 49651 349 0 50000 0 0.5036E+03 0.9543E+02 0.2735E+04 0.2424E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 5425 44226 0 0
11.00 0.45 0.00 15.00 50000 49747 253 0 50000 0 0.5859E+03 0.1015E+03 0.3753E+04 0.3113E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 2377 44654 2716 0
13.00 0.45 0.00 15.00 50000 49798 202 0 50000 0 0.6870E+03 0.1289E+03 0.3876E+04 0.3650E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1254 26714 21793 37
15.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.8220E+03 0.1665E+03 0.4848E+04 0.4091E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 715 11765 30147 7212
17.00 0.45 0.00 15.00 50000 49839 161 0 50000 0 0.9659E+03 0.1923E+03 0.5997E+04 0.4812E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 462 5536 17341 26500
19.00 0.45 0.00 15.00 50000 49888 112 0 50000 0 0.1113E+04 0.2075E+03 0.6778E+04 0.5650E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 286 2787 7944 38871
21.00 0.45 0.00 15.00 50000 49883 117 0 50000 0 0.1264E+04 0.2214E+03 0.7791E+04 0.6504E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 212 1559 3607 44505
23.00 0.45 0.00 15.00 50000 49880 120 0 50000 0 0.1421E+04 0.2413E+03 0.9448E+04 0.6893E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 157 1016 1853 46854
25.00 0.45 0.00 15.00 50000 49913 87 0 50000 0 0.1593E+04 0.2623E+03 0.1105E+05 0.7324E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 136 675 1003 48099
tests/SiO2_Al2O3_TiN_Si_4layer/TrimSP.cfg
+1 -1
View File
@@ -17,7 +17,7 @@ L4rho=2.33
L4d=10000
[ProjectileParameters]
ProjType=muon
numberProj=5000
numberProj=50000
z0=0
dz=20
valEnergy=19000