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Add baseline tests before major changes to fortran code.

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Zaher Salman
2026-06-12 16:26:42 +02:00
parent fffa9e4dd3
commit 21976f7ccf
396 changed files with 41696 additions and 0 deletions
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer.png
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.inp
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1 0.1134289259 1000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:20
End: 12.Jun. 2026 16:18:21
Simulation needed for 5000 muons 1 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 1000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
7888 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1502E+01 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.1502E+01 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.9168E+00 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.9604E+00 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4476 ENERGY=0.4476E+07 EV
BACKSCATTERED PARTICLES= 524 ENERGY=0.1334E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5056
PARTICLES with neg. E= 56
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4476 4476
IMPLANTED PARTICLES (LAYER 2)= 0 0
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4476 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 98.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.001
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.506
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.5351E+01 2.5309E+03 3.8377E-01 2.6215E+00 5.0308E+01 7.5196E-01 4.8171E+01 2.7066E-02
SPREAD 6.9381E+01 1.3999E+03 6.3886E-01 3.2564E+00 3.7416E+01 5.5925E-01 3.1432E+01 4.0213E-02
PATHLENGTH 2.3340E+02 3.0389E+03 -4.4591E-01 3.3482E+00 5.5126E+01 8.2397E-01 6.9604E+01 3.9404E-02
ELASTIC LOSS 1.3570E+01 3.4833E+01 5.9020E+00 1.3186E-03
INEL. LOSS 1.0308E+03 1.8106E+05 4.2552E+02 9.5066E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.3125E-01 3.3250E-01 1.6745E+01 4.8077E+02 5.7663E-01 8.2298E-04 1.0395E-02 6.2046E-01
WEAK EL.LOSS 4.6172E-03 4.7299E-05 2.1531E+00 7.3017E+00 6.8774E-03 9.8156E-06 1.6946E-07 5.2362E-03
INELAST.LOSS 9.9492E+00 3.7198E+01 2.1868E-01 2.0934E+00 6.0990E+00 8.7047E-03 5.5514E-02 2.1169E-03
SUBTHR.LOSS 1.3091E-01 3.2159E-01 1.5632E+01 3.9869E+02 5.6709E-01 8.0937E-04 9.1531E-03 4.3741E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.5351E+01 1.1623E+04 1.6397E+06 2.5615E+08 4.3229E+10 7.7579E+12
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 233 0.5206E-01 4 9.4449E+05 8.2685E+03 8.1236E+03 1.3384E+02 7.9897E+03 1.0155E+02 4
20.- 40. 422 0.9428E-01 4 9.3841E+05 9.9746E+03 9.7410E+03 0.0000E+00 9.7410E+03 0.0000E+00 0
40.- 60. 589 0.1316E+00 10 8.5622E+05 1.0773E+04 1.0466E+04 3.0111E+01 1.0436E+04 2.2967E+01 1
60.- 80. 614 0.1372E+00 19 7.1447E+05 1.0300E+04 9.9778E+03 0.0000E+00 9.9778E+03 0.0000E+00 0
80.- 100. 637 0.1423E+00 31 5.3407E+05 8.6689E+03 8.3487E+03 0.0000E+00 8.3487E+03 0.0000E+00 0
100.- 120. 593 0.1325E+00 74 3.8225E+05 6.8875E+03 6.5963E+03 0.0000E+00 6.5963E+03 0.0000E+00 0
120.- 140. 491 0.1097E+00 121 2.4755E+05 5.1476E+03 4.9036E+03 0.0000E+00 4.9036E+03 0.0000E+00 0
140.- 160. 406 0.9071E-01 185 1.4317E+05 3.2657E+03 3.0832E+03 0.0000E+00 3.0832E+03 0.0000E+00 0
160.- 180. 230 0.5139E-01 287 7.2324E+04 1.8872E+03 1.7789E+03 0.0000E+00 1.7789E+03 0.0000E+00 0
180.- 200. 143 0.3195E-01 403 3.3365E+04 9.0939E+02 8.4655E+02 0.0000E+00 8.4655E+02 0.0000E+00 0
200.- 220. 71 0.1586E-01 512 1.2772E+04 4.1379E+02 3.8170E+02 0.0000E+00 3.8170E+02 0.0000E+00 0
220.- 240. 32 0.7149E-02 629 4.1228E+03 1.5166E+02 1.3856E+02 0.0000E+00 1.3856E+02 0.0000E+00 0
240.- 260. 12 0.2681E-02 722 1.0205E+03 4.5449E+01 4.1023E+01 0.0000E+00 4.1023E+01 0.0000E+00 0
260.- 280. 3 0.6702E-03 615 6.2549E+01 4.6410E+00 3.8731E+00 0.0000E+00 3.8731E+00 0.0000E+00 0
280.- 300. 0 0.0000E+00 402 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
300.- 320. 0 0.0000E+00 266 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
320.- 340. 0 0.0000E+00 129 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
340.- 360. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
360.- 380. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
380.- 400. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
400.- 420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
420.- 440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
440.- SUT 0 0.0000E+00
4476 1.0000E+00 4476 4.8843E+06 6.6698E+04 6.4431E+04 1.6395E+02 6.4267E+04 1.2452E+02 5
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 3.1480E+05 2.6834E+03 0.0000E+00 2.6834E+03 6.2969E+05 5.4402E+03 1.3384E+02 5.3063E+03 0 4
20.- 40. 3.0957E+05 3.0120E+03 0.0000E+00 3.0120E+03 6.2885E+05 6.7290E+03 0.0000E+00 6.7290E+03 0 0
40.- 60. 2.8560E+05 3.2059E+03 0.0000E+00 3.2059E+03 5.7062E+05 7.2603E+03 3.0111E+01 7.2302E+03 0 1
60.- 80. 2.3725E+05 3.0150E+03 0.0000E+00 3.0150E+03 4.7722E+05 6.9629E+03 0.0000E+00 6.9629E+03 0 0
80.- 100. 1.7880E+05 2.6287E+03 0.0000E+00 2.6287E+03 3.5527E+05 5.7201E+03 0.0000E+00 5.7201E+03 0 0
100.- 120. 1.2746E+05 1.8583E+03 0.0000E+00 1.8583E+03 2.5479E+05 4.7380E+03 0.0000E+00 4.7380E+03 0 0
120.- 140. 8.1669E+04 1.4006E+03 0.0000E+00 1.4006E+03 1.6588E+05 3.5030E+03 0.0000E+00 3.5030E+03 0 0
140.- 160. 4.6600E+04 9.0954E+02 0.0000E+00 9.0954E+02 9.6572E+04 2.1737E+03 0.0000E+00 2.1737E+03 0 0
160.- 180. 2.4490E+04 5.3897E+02 0.0000E+00 5.3897E+02 4.7834E+04 1.2400E+03 0.0000E+00 1.2400E+03 0 0
180.- 200. 1.0826E+04 2.4643E+02 0.0000E+00 2.4643E+02 2.2539E+04 6.0012E+02 0.0000E+00 6.0012E+02 0 0
200.- 220. 4.1607E+03 9.2769E+01 0.0000E+00 9.2769E+01 8.6114E+03 2.8893E+02 0.0000E+00 2.8893E+02 0 0
220.- 240. 1.5486E+03 3.8853E+01 0.0000E+00 3.8853E+01 2.5742E+03 9.9702E+01 0.0000E+00 9.9702E+01 0 0
240.- 260. 3.9539E+02 1.0502E+01 0.0000E+00 1.0502E+01 6.2507E+02 3.0521E+01 0.0000E+00 3.0521E+01 0 0
260.- 280. 1.7782E+01 1.3350E+00 0.0000E+00 1.3350E+00 4.4768E+01 2.5381E+00 0.0000E+00 2.5381E+00 0 0
280.- 300. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
300.- 320. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.6232E+06 1.9642E+04 0.0000E+00 1.9642E+04 3.2611E+06 4.4789E+04 1.6395E+02 4.4625E+04 0 5
DAMAGE IN LAYER 1 : 6.4431E+04
DAMAGE IN LAYER 2 : 0.0000E+00
DAMAGE IN LAYER 3 : 0.0000E+00
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.0480E-01 ENERGY REFL.COEF.= 2.6688E-02 REL.MEAN ENERGY = 2.5466E-01 MEAN ENERGY = 2.5466E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.5466E+02 6.3484E+04 1.8273E+00 7.3315E+00 2.5196E+02 1.1007E+01 6.9784E+03 1.8820E-01
PATHLENGTH 9.4975E+01 3.7083E+03 5.0645E-01 2.7761E+00 6.0896E+01 2.6602E+00 2.1589E+02 7.6825E-02
ELASTIC LOSS 1.1373E+01 5.3378E+01 7.3060E+00 1.3943E-02
INEL. LOSS 5.1633E+02 1.4105E+05 3.7556E+02 7.1672E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.5466E+02 1.2833E+05 9.4244E+07 8.8229E+10 9.7151E+13 1.1923E+17
LOGENERGY 2.1534E+00 4.9494E+00 1.1818E+01 2.9048E+01 7.3078E+01 1.8744E+02
PATHLENGTH 9.4975E+01 1.2729E+04 2.0276E+06 3.6369E+08 7.1259E+10 1.4934E+13
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 4 6 8 8 19 14 26 15 29 36 35 60 49 37 57 55 66
0.000 0.000 0.000 0.153 0.229 0.305 0.305 0.725 0.534 0.992 0.573 1.107 1.374 1.336 2.290 1.870 1.412 2.176 2.099 2.519
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E1000.rge
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DEPTH PARTICLES
10.0000 233
30.0000 422
50.0000 589
70.0000 614
90.0000 637
110.0000 593
130.0000 491
150.0000 406
170.0000 230
190.0000 143
210.0000 71
230.0000 32
250.0000 12
270.0000 3
290.0000 0
310.0000 0
330.0000 0
350.0000 0
370.0000 0
390.0000 0
410.0000 0
430.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.inp
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1 0.1134289259 11000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:27
End: 12.Jun. 2026 16:18:28
Simulation needed for 5000 muons 1 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 11000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
29608 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1652E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.1652E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1008E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.1056E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4976 ENERGY=0.5474E+08 EV
BACKSCATTERED PARTICLES= 24 ENERGY=0.9374E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 252 252
IMPLANTED PARTICLES (LAYER 2)= 4458 4458
IMPLANTED PARTICLES (LAYER 3)= 266 266
IMPLANTED PARTICLES (LAYER 4)= 4867 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 374.7 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.070
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.562
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.8478E+02 1.0774E+04 -1.5672E+00 7.0354E+00 1.0380E+02 1.4714E+00 3.7522E+02 5.9041E-02
SPREAD 2.2555E+02 1.6321E+04 8.6528E-01 3.7355E+00 1.2775E+02 1.8111E+00 3.8268E+02 3.7356E-02
PATHLENGTH 8.1489E+02 1.6555E+03 1.6876E+00 6.5439E+00 4.0688E+01 5.7681E-01 5.5259E+01 4.1841E-02
ELASTIC LOSS 3.4215E+01 3.4787E+02 1.8651E+01 3.7482E-03
INEL. LOSS 1.0974E+04 2.0198E+05 4.4942E+02 9.0318E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.0469E-02 1.1088E+00 6.4329E+01 7.2179E+03 1.0530E+00 7.6926E-04 6.8813E-02 4.3018E+00
WEAK EL.LOSS 1.9119E-03 3.4990E-05 4.6617E+00 2.7062E+01 5.9153E-03 4.3214E-06 1.3050E-07 8.1512E-03
INELAST.LOSS 2.9229E+01 1.1761E+02 -1.3302E+00 3.4506E+00 1.0845E+01 7.9227E-03 1.3450E-01 1.7267E-03
SUBTHR.LOSS 8.0180E-02 3.8148E-01 2.2987E+01 7.2377E+02 6.1764E-01 4.5126E-04 7.4930E-03 1.9398E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.8478E+02 3.5274E+05 2.1712E+08 1.3576E+11 8.6023E+13 5.5145E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.6164E+06 1.4812E+03 1.4796E+03 4.7833E+02 1.0013E+03 3.5441E+02 8
20.- 40. 4 0.8039E-03 0 1.6360E+06 2.2575E+03 2.2544E+03 9.5070E+02 1.3037E+03 6.8682E+02 13
40.- 60. 2 0.4019E-03 0 1.6414E+06 1.9539E+03 1.9511E+03 7.0051E+02 1.2505E+03 5.1220E+02 10
60.- 80. 3 0.6029E-03 0 1.6531E+06 1.6151E+03 1.6120E+03 3.5141E+02 1.2606E+03 2.6639E+02 8
80.- 100. 3 0.6029E-03 0 1.6642E+06 1.7956E+03 1.7921E+03 4.9888E+02 1.2932E+03 3.6610E+02 8
100.- 120. 6 0.1206E-02 0 1.6714E+06 1.8934E+03 1.8882E+03 4.7824E+02 1.4100E+03 3.6618E+02 10
120.- 140. 10 0.2010E-02 0 1.6755E+06 2.5099E+03 2.5034E+03 8.5429E+02 1.6491E+03 6.1059E+02 11
140.- 160. 5 0.1005E-02 0 1.6920E+06 2.0646E+03 2.0601E+03 6.1248E+02 1.4476E+03 4.3776E+02 8
160.- 180. 10 0.2010E-02 0 1.7076E+06 2.1649E+03 2.1578E+03 5.8367E+02 1.5741E+03 4.3626E+02 9
180.- 200. 11 0.2211E-02 0 1.7033E+06 2.1911E+03 2.1833E+03 4.9300E+02 1.6903E+03 3.7105E+02 10
200.- 220. 9 0.1809E-02 0 1.7133E+06 2.5369E+03 2.5299E+03 8.2054E+02 1.7094E+03 6.0328E+02 12
220.- 240. 12 0.2412E-02 0 1.7171E+06 2.2931E+03 2.2842E+03 4.0962E+02 1.8746E+03 3.1328E+02 9
240.- 260. 14 0.2814E-02 0 1.7322E+06 2.4066E+03 2.3967E+03 5.7484E+02 1.8218E+03 4.2094E+02 9
260.- 280. 16 0.3215E-02 0 1.7230E+06 2.7595E+03 2.7482E+03 8.9506E+02 1.8531E+03 6.6518E+02 14
280.- 300. 23 0.4622E-02 0 1.7121E+06 2.7899E+03 2.7778E+03 5.8317E+02 2.1946E+03 4.2192E+02 8
300.- 320. 10 0.2010E-02 0 1.7163E+06 3.0757E+03 3.0659E+03 6.6846E+02 2.3974E+03 4.9221E+02 10
320.- 340. 26 0.5225E-02 0 1.7061E+06 3.4263E+03 3.4098E+03 9.7297E+02 2.4368E+03 7.2091E+02 17
340.- 360. 28 0.5627E-02 0 1.6841E+06 3.0096E+03 2.9927E+03 4.0295E+02 2.5897E+03 3.0250E+02 9
360.- 380. 29 0.5828E-02 0 1.6855E+06 3.4519E+03 3.4325E+03 8.0308E+02 2.6295E+03 6.0574E+02 16
380.- 400. 31 0.6230E-02 0 1.6746E+06 3.5444E+03 3.5214E+03 6.3105E+02 2.8904E+03 4.6516E+02 11
400.- 420. 66 0.1326E-01 0 2.2619E+06 6.0129E+03 5.9579E+03 1.2411E+03 4.7167E+03 9.3024E+02 25
420.- 440. 82 0.1648E-01 0 2.2454E+06 6.1747E+03 6.1063E+03 9.5790E+02 5.1484E+03 7.1753E+02 18
440.- 460. 91 0.1829E-01 0 2.1540E+06 7.0064E+03 6.9241E+03 1.2175E+03 5.7066E+03 9.1715E+02 26
460.- 480. 115 0.2311E-01 0 2.0598E+06 7.1661E+03 7.0734E+03 7.1646E+02 6.3570E+03 5.3234E+02 14
480.- 500. 147 0.2954E-01 0 1.9876E+06 8.2279E+03 8.1054E+03 7.2207E+02 7.3833E+03 5.4281E+02 16
500.- 520. 231 0.4642E-01 0 1.9051E+06 9.6129E+03 9.4268E+03 6.8515E+02 8.7416E+03 5.1996E+02 17
520.- 540. 261 0.5245E-01 0 1.7420E+06 9.6905E+03 9.4884E+03 4.2390E+02 9.0645E+03 3.1779E+02 10
540.- 560. 306 0.6150E-01 0 1.5654E+06 1.0384E+04 1.0140E+04 2.7168E+02 9.8685E+03 2.0545E+02 7
560.- 580. 359 0.7215E-01 0 1.3865E+06 1.1244E+04 1.0962E+04 1.2945E+02 1.0833E+04 9.7107E+01 3
580.- 600. 447 0.8983E-01 0 1.1764E+06 1.1271E+04 1.0936E+04 1.4128E+02 1.0795E+04 1.0704E+02 4
600.- 620. 514 0.1033E+00 0 9.2119E+05 1.0400E+04 1.0017E+04 3.5740E+01 9.9809E+03 2.7091E+01 1
620.- 640. 525 0.1055E+00 0 6.8629E+05 9.0904E+03 8.7071E+03 0.0000E+00 8.7071E+03 0.0000E+00 0
640.- 660. 522 0.1049E+00 0 4.6592E+05 7.5531E+03 7.1852E+03 0.0000E+00 7.1852E+03 0.0000E+00 0
660.- 680. 439 0.8822E-01 0 2.7733E+05 5.3447E+03 5.0347E+03 0.0000E+00 5.0347E+03 0.0000E+00 0
680.- 700. 353 0.7094E-01 0 1.3709E+05 3.1908E+03 2.9650E+03 0.0000E+00 2.9650E+03 0.0000E+00 0
700.- 720. 89 0.1789E-01 0 3.4588E+04 6.7042E+02 6.4522E+02 0.0000E+00 6.4522E+02 0.0000E+00 0
720.- 740. 75 0.1507E-01 7 1.9108E+04 4.2998E+02 4.1328E+02 0.0000E+00 4.1328E+02 0.0000E+00 0
740.- 760. 57 0.1145E-01 98 9.9429E+03 2.4009E+02 2.2869E+02 0.0000E+00 2.2869E+02 0.0000E+00 0
760.- 780. 27 0.5426E-02 561 4.3175E+03 9.6897E+01 9.1529E+01 0.0000E+00 9.1529E+01 0.0000E+00 0
780.- 800. 12 0.2412E-02 1324 1.4925E+03 4.4538E+01 4.1990E+01 0.0000E+00 4.1990E+01 0.0000E+00 0
800.- 820. 4 0.8039E-03 1432 5.0086E+02 1.6370E+01 1.5538E+01 0.0000E+00 1.5538E+01 0.0000E+00 0
820.- 840. 1 0.2010E-03 723 1.3405E+02 3.8656E+00 3.6527E+00 0.0000E+00 3.6527E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 291 4.3949E+01 1.6862E+00 1.6624E+00 0.0000E+00 1.6624E+00 0.0000E+00 0
860.- 880. 1 0.2010E-03 138 3.3826E+01 1.2377E+00 1.0641E+00 0.0000E+00 1.0641E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 129 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 89 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 75 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 55 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- 980. 0 0.0000E+00 37 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
980.- 1000. 0 0.0000E+00 12 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1000.- 1020. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1020.- 1040. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- SUT 0 0.0000E+00
4976 1.0000E+00 4976 5.4767E+07 1.7310E+05 1.6951E+05 1.9306E+04 1.5021E+05 1.4333E+04 351
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3646E+05 5.8378E+02 1.2647E+02 4.5732E+02 1.0799E+06 8.9581E+02 3.5186E+02 5.4395E+02 2 6
20.- 40. 5.4077E+05 7.5055E+02 2.3858E+02 5.1198E+02 1.0952E+06 1.5038E+03 7.1213E+02 7.9170E+02 4 9
40.- 60. 5.4691E+05 8.6322E+02 3.2361E+02 5.3961E+02 1.0945E+06 1.0878E+03 3.7690E+02 7.1093E+02 6 4
60.- 80. 5.4908E+05 7.1803E+02 1.6743E+02 5.5059E+02 1.1041E+06 8.9401E+02 1.8397E+02 7.1004E+02 4 4
80.- 100. 5.5543E+05 6.5255E+02 1.4532E+02 5.0723E+02 1.1088E+06 1.1396E+03 3.5356E+02 7.8600E+02 3 5
100.- 120. 5.5597E+05 9.8150E+02 4.0682E+02 5.7468E+02 1.1154E+06 9.0671E+02 7.1418E+01 8.3529E+02 8 2
120.- 140. 5.5454E+05 9.4556E+02 2.9097E+02 6.5459E+02 1.1209E+06 1.5579E+03 5.6332E+02 9.9455E+02 5 6
140.- 160. 5.6622E+05 6.5441E+02 3.7104E+01 6.1731E+02 1.1258E+06 1.4056E+03 5.7538E+02 8.3026E+02 1 7
160.- 180. 5.6766E+05 9.3002E+02 3.6925E+02 5.6077E+02 1.1400E+06 1.2278E+03 2.1443E+02 1.0134E+03 5 4
180.- 200. 5.6691E+05 8.7820E+02 2.5181E+02 6.2639E+02 1.1364E+06 1.3051E+03 2.4119E+02 1.0639E+03 6 4
200.- 220. 5.6351E+05 9.9562E+02 3.9869E+02 5.9692E+02 1.1498E+06 1.5343E+03 4.2185E+02 1.1124E+03 6 6
220.- 240. 5.6774E+05 1.0392E+03 2.7678E+02 7.6239E+02 1.1493E+06 1.2451E+03 1.3284E+02 1.1122E+03 6 3
240.- 260. 5.7048E+05 8.9739E+02 1.7727E+02 7.2012E+02 1.1618E+06 1.4993E+03 3.9757E+02 1.1017E+03 4 5
260.- 280. 5.7884E+05 1.2085E+03 4.0984E+02 7.9866E+02 1.1442E+06 1.5397E+03 4.8522E+02 1.0545E+03 7 7
280.- 300. 5.6978E+05 1.0244E+03 1.7229E+02 8.5214E+02 1.1423E+06 1.7534E+03 4.1088E+02 1.3425E+03 4 4
300.- 320. 5.7021E+05 1.1157E+03 2.2413E+02 8.9156E+02 1.1461E+06 1.9502E+03 4.4432E+02 1.5059E+03 4 6
320.- 340. 5.6422E+05 1.1618E+03 2.8494E+02 8.7686E+02 1.1419E+06 2.2480E+03 6.8803E+02 1.5599E+03 7 10
340.- 360. 5.5970E+05 1.1287E+03 8.1116E+01 1.0476E+03 1.1244E+06 1.8640E+03 3.2183E+02 1.5422E+03 1 8
360.- 380. 5.6438E+05 1.4742E+03 4.4034E+02 1.0339E+03 1.1211E+06 1.9583E+03 3.6274E+02 1.5956E+03 10 6
380.- 400. 5.5877E+05 1.1848E+03 1.1816E+02 1.0666E+03 1.1113E+06 2.2827E+03 5.1289E+02 1.7698E+03 2 9
400.- 420. 5.3635E+04 2.3348E+02 1.1883E+02 1.1465E+02 1.0574E+05 1.2388E+02 0.0000E+00 1.2388E+02 2 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1261E+07 1.9422E+04 5.0598E+03 1.4362E+04 2.2619E+07 2.9923E+04 7.8223E+03 2.2101E+04 97 115
DAMAGE IN LAYER 1 : 4.9041E+04
DAMAGE IN LAYER 2 : 1.1903E+05
DAMAGE IN LAYER 3 : 1.4426E+03
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 4.8000E-03 ENERGY REFL.COEF.= 1.7045E-03 REL.MEAN ENERGY = 3.5509E-01 MEAN ENERGY = 3.9060E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.9060E+03 6.4366E+06 1.0542E-01 1.9203E+00 2.5370E+03 5.1787E+02 1.2604E+06 3.0119E-01
PATHLENGTH 4.7372E+02 4.3343E+04 2.7231E-01 2.0937E+00 2.0819E+02 4.2497E+01 9.2526E+03 2.8671E-01
ELASTIC LOSS 1.1830E+02 2.3277E+03 4.8246E+01 2.0102E+00
INEL. LOSS 6.7920E+03 6.4762E+06 2.5448E+03 1.0603E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.9060E+03 2.1694E+07 1.3674E+11 9.2845E+14 6.6496E+18 4.9634E+22
LOGENERGY 3.4180E+00 1.1913E+01 4.2164E+01 1.5105E+02 5.4634E+02 1.9912E+03
PATHLENGTH 4.7372E+02 2.6776E+05 1.7036E+08 1.1731E+11 8.5239E+13 6.4304E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 2 3 2 3 1 1 1 1 3 1 2 1 1 1 1
0.000 0.000 0.000 0.000 0.000 1.667 2.500 1.667 2.500 0.833 0.833 0.833 0.833 2.500 0.833 1.667 0.833 0.833 0.833 0.833
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E11000.rge
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DEPTH PARTICLES
10.0000 0
30.0000 4
50.0000 2
70.0000 3
90.0000 3
110.0000 6
130.0000 10
150.0000 5
170.0000 10
190.0000 11
210.0000 9
230.0000 12
250.0000 14
270.0000 16
290.0000 23
310.0000 10
330.0000 26
350.0000 28
370.0000 29
390.0000 31
410.0000 66
430.0000 82
450.0000 91
470.0000 115
490.0000 147
510.0000 231
530.0000 261
550.0000 306
570.0000 359
590.0000 447
610.0000 514
630.0000 525
650.0000 522
670.0000 439
690.0000 353
710.0000 89
730.0000 75
750.0000 57
770.0000 27
790.0000 12
810.0000 4
830.0000 1
850.0000 0
870.0000 1
890.0000 0
910.0000 0
930.0000 0
950.0000 0
970.0000 0
990.0000 0
1010.0000 0
1030.0000 0
1050.0000 0
1070.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.inp
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1 0.1134289259 13000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:28
End: 12.Jun. 2026 16:18:31
Simulation needed for 5000 muons 3 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 13000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
34339 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1952E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.1952E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1192E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.1248E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4983 ENERGY=0.6478E+08 EV
BACKSCATTERED PARTICLES= 17 ENERGY=0.5345E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 130 130
IMPLANTED PARTICLES (LAYER 2)= 2709 2709
IMPLANTED PARTICLES (LAYER 3)= 2138 2138
IMPLANTED PARTICLES (LAYER 4)= 2447 6
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 434.9 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.078
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.559
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 6.8552E+02 1.6817E+04 -7.6991E-01 4.9670E+00 1.2968E+02 1.8371E+00 4.7450E+02 6.2747E-02
SPREAD 2.5714E+02 1.7779E+04 7.9704E-01 3.9036E+00 1.3334E+02 1.8889E+00 4.2916E+02 4.1142E-02
PATHLENGTH 9.6653E+02 6.5423E+03 4.1867E-01 1.9431E+00 8.0884E+01 1.1458E+00 9.0006E+01 2.3877E-02
ELASTIC LOSS 3.4647E+01 4.3540E+02 2.0866E+01 4.1875E-03
INEL. LOSS 1.2956E+04 2.0563E+05 4.5346E+02 9.1001E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 7.9135E-02 1.0615E+00 6.7718E+01 7.5440E+03 1.0303E+00 6.9868E-04 6.2518E-02 3.6282E+00
WEAK EL.LOSS 1.2617E-03 2.0298E-05 6.0758E+00 4.5976E+01 4.5053E-03 3.0553E-06 9.2314E-08 1.2120E-02
INELAST.LOSS 2.9769E+01 1.4401E+02 -1.1752E+00 3.0216E+00 1.2001E+01 8.1381E-03 1.3886E-01 1.5136E-03
SUBTHR.LOSS 6.9072E-02 3.3642E-01 2.4741E+01 8.2587E+02 5.8002E-01 3.9337E-04 6.5530E-03 2.0142E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 6.8552E+02 4.8675E+05 3.5505E+08 2.6505E+11 2.0201E+14 1.5690E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 1 0.2007E-03 0 1.5659E+06 1.7546E+03 1.7527E+03 7.1003E+02 1.0427E+03 5.3135E+02 13
20.- 40. 1 0.2007E-03 0 1.5806E+06 1.1786E+03 1.1768E+03 2.2034E+02 9.5648E+02 1.6566E+02 4
40.- 60. 2 0.4014E-03 0 1.5874E+06 1.3401E+03 1.3377E+03 2.6598E+02 1.0717E+03 1.9690E+02 4
60.- 80. 1 0.2007E-03 0 1.6028E+06 1.3026E+03 1.3003E+03 2.3029E+02 1.0700E+03 1.7452E+02 4
80.- 100. 5 0.1003E-02 0 1.6226E+06 1.3438E+03 1.3406E+03 2.0435E+02 1.1362E+03 1.5354E+02 4
100.- 120. 2 0.4014E-03 0 1.6320E+06 1.4526E+03 1.4498E+03 4.4056E+02 1.0093E+03 3.3477E+02 10
120.- 140. 2 0.4014E-03 0 1.6435E+06 1.6511E+03 1.6487E+03 3.9612E+02 1.2526E+03 2.8786E+02 6
140.- 160. 5 0.1003E-02 0 1.6503E+06 1.6831E+03 1.6793E+03 4.6945E+02 1.2099E+03 3.3775E+02 6
160.- 180. 0 0.0000E+00 0 1.6648E+06 1.7751E+03 1.7728E+03 5.4523E+02 1.2276E+03 4.0547E+02 9
180.- 200. 5 0.1003E-02 0 1.6703E+06 1.5611E+03 1.5570E+03 3.9489E+02 1.1621E+03 2.9518E+02 7
200.- 220. 8 0.1605E-02 0 1.6991E+06 1.8466E+03 1.8414E+03 5.1089E+02 1.3305E+03 3.7410E+02 9
220.- 240. 7 0.1405E-02 0 1.7003E+06 1.7710E+03 1.7656E+03 5.5373E+02 1.2118E+03 4.0261E+02 7
240.- 260. 5 0.1003E-02 0 1.7112E+06 2.0273E+03 2.0228E+03 6.5459E+02 1.3682E+03 4.7689E+02 9
260.- 280. 9 0.1806E-02 0 1.7387E+06 2.2646E+03 2.2578E+03 6.8949E+02 1.5683E+03 5.1212E+02 13
280.- 300. 9 0.1806E-02 0 1.7488E+06 2.2685E+03 2.2614E+03 5.1683E+02 1.7445E+03 3.8058E+02 8
300.- 320. 14 0.2810E-02 0 1.7396E+06 2.7481E+03 2.7390E+03 1.0424E+03 1.6966E+03 7.5204E+02 13
320.- 340. 9 0.1806E-02 0 1.7376E+06 2.3622E+03 2.3546E+03 5.9104E+02 1.7635E+03 4.3714E+02 8
340.- 360. 18 0.3612E-02 0 1.7301E+06 2.5702E+03 2.5591E+03 7.7511E+02 1.7840E+03 5.6008E+02 10
360.- 380. 12 0.2408E-02 0 1.7300E+06 2.9656E+03 2.9561E+03 8.8080E+02 2.0753E+03 6.3309E+02 11
380.- 400. 15 0.3010E-02 0 1.7278E+06 3.0409E+03 3.0310E+03 9.8870E+02 2.0423E+03 7.2321E+02 15
400.- 420. 25 0.5017E-02 0 2.3207E+06 3.8517E+03 3.8272E+03 9.3736E+02 2.8898E+03 7.0148E+02 17
420.- 440. 35 0.7024E-02 0 2.3875E+06 4.7567E+03 4.7252E+03 1.1813E+03 3.5439E+03 8.8269E+02 22
440.- 460. 48 0.9633E-02 0 2.3692E+06 4.3068E+03 4.2668E+03 7.1377E+02 3.5531E+03 5.2991E+02 13
460.- 480. 36 0.7225E-02 0 2.3600E+06 5.1492E+03 5.1065E+03 7.7047E+02 4.3360E+03 5.7265E+02 14
480.- 500. 75 0.1505E-01 0 2.3138E+06 6.2643E+03 6.2053E+03 1.3686E+03 4.8367E+03 1.0213E+03 23
500.- 520. 84 0.1686E-01 0 2.2529E+06 6.0339E+03 5.9651E+03 7.9150E+02 5.1736E+03 5.9421E+02 16
520.- 540. 114 0.2288E-01 0 2.1994E+06 7.5961E+03 7.5011E+03 1.5341E+03 5.9671E+03 1.1422E+03 30
540.- 560. 139 0.2789E-01 0 2.1163E+06 6.9340E+03 6.8235E+03 6.6092E+02 6.1626E+03 4.9850E+02 14
560.- 580. 148 0.2970E-01 0 2.0404E+06 8.6536E+03 8.5219E+03 9.2772E+02 7.5941E+03 7.0114E+02 22
580.- 600. 194 0.3893E-01 0 1.9215E+06 8.8867E+03 8.7318E+03 5.1110E+02 8.2207E+03 3.8426E+02 12
600.- 620. 233 0.4676E-01 0 1.7391E+06 8.9135E+03 8.7295E+03 5.2870E+02 8.2008E+03 4.0119E+02 14
620.- 640. 286 0.5740E-01 0 1.6090E+06 1.0128E+04 9.9011E+03 3.7761E+02 9.5235E+03 2.8675E+02 11
640.- 660. 361 0.7245E-01 0 1.4231E+06 1.0403E+04 1.0133E+04 3.1585E+02 9.8175E+03 2.3787E+02 8
660.- 680. 399 0.8007E-01 0 1.2274E+06 1.0614E+04 1.0305E+04 6.4236E+01 1.0241E+04 4.8946E+01 2
680.- 700. 532 0.1068E+00 0 1.0035E+06 1.0523E+04 1.0151E+04 1.4449E+02 1.0006E+04 1.0945E+02 4
700.- 720. 233 0.4676E-01 0 4.3925E+05 3.9598E+03 3.8901E+03 0.0000E+00 3.8901E+03 0.0000E+00 0
720.- 740. 244 0.4897E-01 0 3.6666E+05 3.6800E+03 3.6181E+03 0.0000E+00 3.6181E+03 0.0000E+00 0
740.- 760. 257 0.5158E-01 0 3.0002E+05 3.1972E+03 3.1338E+03 0.0000E+00 3.1338E+03 0.0000E+00 0
760.- 780. 264 0.5298E-01 0 2.3977E+05 2.7733E+03 2.7124E+03 0.0000E+00 2.7124E+03 0.0000E+00 0
780.- 800. 223 0.4475E-01 0 1.8849E+05 2.3883E+03 2.3337E+03 0.0000E+00 2.3337E+03 0.0000E+00 0
800.- 820. 200 0.4014E-01 1 1.4067E+05 1.8797E+03 1.8326E+03 0.0000E+00 1.8326E+03 0.0000E+00 0
820.- 840. 192 0.3853E-01 22 1.0335E+05 1.6523E+03 1.6080E+03 0.0000E+00 1.6080E+03 0.0000E+00 0
840.- 860. 146 0.2930E-01 136 7.4658E+04 1.2200E+03 1.1852E+03 0.0000E+00 1.1852E+03 0.0000E+00 0
860.- 880. 124 0.2488E-01 501 4.7850E+04 8.1854E+02 7.9130E+02 0.0000E+00 7.9130E+02 0.0000E+00 0
880.- 900. 92 0.1846E-01 742 3.0738E+04 5.9446E+02 5.7302E+02 0.0000E+00 5.7302E+02 0.0000E+00 0
900.- 920. 82 0.1646E-01 633 1.7984E+04 4.2635E+02 4.0970E+02 0.0000E+00 4.0970E+02 0.0000E+00 0
920.- 940. 40 0.8027E-02 406 7.6578E+03 1.4293E+02 1.3513E+02 0.0000E+00 1.3513E+02 0.0000E+00 0
940.- 960. 18 0.3612E-02 237 4.2842E+03 8.9036E+01 8.4335E+01 0.0000E+00 8.4335E+01 0.0000E+00 0
960.- 980. 14 0.2810E-02 216 1.8885E+03 4.6925E+01 4.4105E+01 0.0000E+00 4.4105E+01 0.0000E+00 0
980.- 1000. 9 0.1806E-02 260 6.9570E+02 1.9196E+01 1.7648E+01 0.0000E+00 1.7648E+01 0.0000E+00 0
1000.- 1020. 5 0.1003E-02 293 3.5044E+02 9.8432E+00 9.1178E+00 0.0000E+00 9.1178E+00 0.0000E+00 0
1020.- 1040. 1 0.2007E-03 333 7.4774E+00 3.7169E-01 2.8773E-01 0.0000E+00 2.8773E-01 0.0000E+00 0
1040.- 1060. 0 0.0000E+00 366 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1060.- 1080. 0 0.0000E+00 305 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1080.- 1100. 0 0.0000E+00 238 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1100.- 1120. 0 0.0000E+00 155 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1120.- 1140. 0 0.0000E+00 94 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1140.- 1160. 0 0.0000E+00 30 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1160.- 1180. 0 0.0000E+00 11 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1220.- 1240. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- SUT 0 0.0000E+00
4983 1.0000E+00 4983 6.4731E+07 1.7482E+05 1.7208E+05 2.1909E+04 1.5017E+05 1.6247E+04 392
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1939E+05 7.2117E+02 3.0066E+02 4.2052E+02 1.0465E+06 1.0316E+03 4.0938E+02 6.2219E+02 5 8
20.- 40. 5.2757E+05 5.4186E+02 1.4065E+02 4.0121E+02 1.0530E+06 6.3496E+02 7.9690E+01 5.5527E+02 2 2
40.- 60. 5.2944E+05 5.7958E+02 1.3308E+02 4.4649E+02 1.0580E+06 7.5812E+02 1.3290E+02 6.2522E+02 1 3
60.- 80. 5.3520E+05 6.7365E+02 1.9483E+02 4.7882E+02 1.0676E+06 6.2663E+02 3.5461E+01 5.9117E+02 3 1
80.- 100. 5.4444E+05 5.5368E+02 9.1947E+01 4.6174E+02 1.0782E+06 7.8690E+02 1.1241E+02 6.7449E+02 2 2
100.- 120. 5.4572E+05 6.7521E+02 2.0649E+02 4.6872E+02 1.0862E+06 7.7461E+02 2.3407E+02 5.4054E+02 5 5
120.- 140. 5.4606E+05 5.6100E+02 3.8390E+01 5.2261E+02 1.0975E+06 1.0877E+03 3.5773E+02 7.2996E+02 1 5
140.- 160. 5.5131E+05 6.0888E+02 7.6504E+01 5.3237E+02 1.0990E+06 1.0704E+03 3.9294E+02 6.7748E+02 1 5
160.- 180. 5.5575E+05 7.4235E+02 2.4374E+02 4.9861E+02 1.1091E+06 1.0305E+03 3.0149E+02 7.2897E+02 4 5
180.- 200. 5.5640E+05 6.5131E+02 2.0706E+02 4.4425E+02 1.1139E+06 9.0565E+02 1.8783E+02 7.1782E+02 4 3
200.- 220. 5.6861E+05 7.0931E+02 1.0102E+02 6.0829E+02 1.1305E+06 1.1321E+03 4.0986E+02 7.2219E+02 2 7
220.- 240. 5.6955E+05 7.2378E+02 2.6067E+02 4.6311E+02 1.1308E+06 1.0418E+03 2.9306E+02 7.4872E+02 4 3
240.- 260. 5.6821E+05 7.4974E+02 1.7912E+02 5.7062E+02 1.1430E+06 1.2731E+03 4.7547E+02 7.9762E+02 3 6
260.- 280. 5.8036E+05 8.2903E+02 1.8986E+02 6.3917E+02 1.1584E+06 1.4288E+03 4.9963E+02 9.2916E+02 4 9
280.- 300. 5.8371E+05 8.5146E+02 1.6377E+02 6.8769E+02 1.1651E+06 1.4099E+03 3.5307E+02 1.0568E+03 3 5
300.- 320. 5.8175E+05 1.0524E+03 3.3551E+02 7.1694E+02 1.1579E+06 1.6866E+03 7.0688E+02 9.7971E+02 5 8
320.- 340. 5.7431E+05 1.0508E+03 3.8866E+02 6.6215E+02 1.1633E+06 1.3038E+03 2.0238E+02 1.1014E+03 6 2
340.- 360. 5.7722E+05 9.6130E+02 2.7178E+02 6.8952E+02 1.1529E+06 1.5978E+03 5.0333E+02 1.0945E+03 4 6
360.- 380. 5.7251E+05 1.1758E+03 2.4346E+02 9.3233E+02 1.1575E+06 1.7803E+03 6.3735E+02 1.1429E+03 4 7
380.- 400. 5.7237E+05 1.0138E+03 2.2309E+02 7.9074E+02 1.1526E+06 2.0058E+03 7.6560E+02 1.2402E+03 3 12
400.- 420. 5.6177E+04 4.6521E+01 0.0000E+00 4.6521E+01 1.1756E+05 1.5708E+02 3.3905E+01 1.2317E+02 0 1
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.1216E+07 1.5473E+04 3.9903E+03 1.1482E+04 2.2438E+07 2.3524E+04 7.1244E+03 1.6399E+04 66 105
DAMAGE IN LAYER 1 : 3.8804E+04
DAMAGE IN LAYER 2 : 1.1089E+05
DAMAGE IN LAYER 3 : 2.2369E+04
DAMAGE IN LAYER 4 : 9.4056E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.4000E-03 ENERGY REFL.COEF.= 8.2235E-04 REL.MEAN ENERGY = 2.4187E-01 MEAN ENERGY = 3.1443E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 3.1443E+03 1.5720E+07 1.4933E+00 3.5992E+00 3.9649E+03 9.6163E+02 6.1469E+06 6.8014E-01
PATHLENGTH 7.1335E+02 8.4528E+04 -1.2383E+00 3.1766E+00 2.9074E+02 7.0514E+01 3.0246E+04 5.4770E-01
ELASTIC LOSS 1.2796E+02 2.2618E+03 4.7558E+01 2.7975E+00
INEL. LOSS 9.9634E+03 1.4748E+07 3.8403E+03 2.2590E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 3.1443E+03 2.5607E+07 2.7245E+11 3.0904E+15 3.5765E+19 4.1781E+23
LOGENERGY 3.1504E+00 1.0276E+01 3.4530E+01 1.1910E+02 4.2030E+02 1.5135E+03
PATHLENGTH 7.1335E+02 5.9340E+05 5.1346E+08 4.5289E+11 4.0519E+14 3.6695E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 0 1 4 1 0 1 1 3 1 1 2 0 0 1
0.000 0.000 0.000 0.000 0.000 1.176 0.000 1.176 4.706 1.176 0.000 1.176 1.176 3.529 1.176 1.176 2.353 0.000 0.000 1.176
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E13000.rge
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DEPTH PARTICLES
10.0000 1
30.0000 1
50.0000 2
70.0000 1
90.0000 5
110.0000 2
130.0000 2
150.0000 5
170.0000 0
190.0000 5
210.0000 8
230.0000 7
250.0000 5
270.0000 9
290.0000 9
310.0000 14
330.0000 9
350.0000 18
370.0000 12
390.0000 15
410.0000 25
430.0000 35
450.0000 48
470.0000 36
490.0000 75
510.0000 84
530.0000 114
550.0000 139
570.0000 148
590.0000 194
610.0000 233
630.0000 286
650.0000 361
670.0000 399
690.0000 532
710.0000 233
730.0000 244
750.0000 257
770.0000 264
790.0000 223
810.0000 200
830.0000 192
850.0000 146
870.0000 124
890.0000 92
910.0000 82
930.0000 40
950.0000 18
970.0000 14
990.0000 9
1010.0000 5
1030.0000 1
1050.0000 0
1070.0000 0
1090.0000 0
1110.0000 0
1130.0000 0
1150.0000 0
1170.0000 0
1190.0000 0
1210.0000 0
1230.0000 0
1250.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.inp
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1 0.1134289259 15000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:31
End: 12.Jun. 2026 16:18:33
Simulation needed for 5000 muons 2 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 15000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
40065 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.2253E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.2253E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1375E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.1441E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4985 ENERGY=0.7478E+08 EV
BACKSCATTERED PARTICLES= 15 ENERGY=0.9708E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 63 63
IMPLANTED PARTICLES (LAYER 2)= 1210 1210
IMPLANTED PARTICLES (LAYER 3)= 2966 2966
IMPLANTED PARTICLES (LAYER 4)= 758 746
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 507.7 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.083
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.523
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 8.2168E+02 2.7797E+04 -6.2592E-01 3.5190E+00 1.6672E+02 2.3614E+00 6.2486E+02 4.7969E-02
SPREAD 3.1424E+02 2.2579E+04 5.3745E-01 3.4462E+00 1.5026E+02 2.1283E+00 5.0018E+02 4.2935E-02
PATHLENGTH 1.1717E+03 1.0133E+04 -7.5037E-01 2.3885E+00 1.0066E+02 1.4257E+00 1.6912E+02 2.4839E-02
ELASTIC LOSS 3.4007E+01 4.4577E+02 2.1113E+01 4.2354E-03
INEL. LOSS 1.4979E+04 2.0726E+05 4.5526E+02 9.1325E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 6.7284E-02 1.1065E+00 1.1468E+02 2.5912E+04 1.0519E+00 6.6020E-04 1.1179E-01 1.4867E+01
WEAK EL.LOSS 7.5921E-04 9.6895E-06 8.1165E+00 8.5540E+01 3.1128E-03 1.9537E-06 5.5916E-08 2.0847E-02
INELAST.LOSS 2.9465E+01 1.6520E+02 -8.5145E-01 2.3927E+00 1.2853E+01 8.0670E-03 1.2236E-01 1.1933E-03
SUBTHR.LOSS 5.7820E-02 2.7640E-01 2.7348E+01 1.0171E+03 5.2573E-01 3.3000E-04 5.5302E-03 2.2703E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 8.2168E+02 7.0296E+05 6.2039E+08 5.6163E+11 5.1935E+14 4.8891E+17
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.5144E+06 1.4995E+03 1.4984E+03 6.2058E+02 8.7782E+02 4.2006E+02 6
20.- 40. 1 0.2006E-03 0 1.5258E+06 1.9168E+03 1.9152E+03 1.0401E+03 8.7513E+02 7.0801E+02 9
40.- 60. 2 0.4012E-03 0 1.5399E+06 1.2265E+03 1.2245E+03 2.6791E+02 9.5664E+02 1.9328E+02 4
60.- 80. 1 0.2006E-03 0 1.5530E+06 1.5009E+03 1.4993E+03 6.4066E+02 8.5865E+02 4.7318E+02 9
80.- 100. 1 0.2006E-03 0 1.5656E+06 1.4180E+03 1.4160E+03 5.5049E+02 8.6551E+02 3.6385E+02 5
100.- 120. 4 0.8024E-03 0 1.5752E+06 1.4704E+03 1.4674E+03 4.8810E+02 9.7926E+02 3.5337E+02 6
120.- 140. 3 0.6018E-03 0 1.5840E+06 1.0167E+03 1.0140E+03 3.1493E+01 9.8254E+02 2.4767E+01 1
140.- 160. 0 0.0000E+00 0 1.6117E+06 1.6407E+03 1.6393E+03 6.9790E+02 9.4135E+02 5.1848E+02 10
160.- 180. 1 0.2006E-03 0 1.6159E+06 1.3806E+03 1.3788E+03 4.5674E+02 9.2203E+02 3.3294E+02 6
180.- 200. 2 0.4012E-03 0 1.6233E+06 1.4498E+03 1.4477E+03 3.5630E+02 1.0914E+03 2.6505E+02 6
200.- 220. 0 0.0000E+00 0 1.6267E+06 1.7327E+03 1.7307E+03 6.6285E+02 1.0679E+03 4.6650E+02 9
220.- 240. 2 0.4012E-03 0 1.6438E+06 1.4048E+03 1.4021E+03 2.6068E+02 1.1414E+03 1.8693E+02 3
240.- 260. 4 0.8024E-03 0 1.6536E+06 1.4359E+03 1.4327E+03 2.9400E+02 1.1387E+03 2.2507E+02 7
260.- 280. 3 0.6018E-03 0 1.6715E+06 1.8158E+03 1.8124E+03 5.1446E+02 1.2979E+03 3.8387E+02 7
280.- 300. 3 0.6018E-03 0 1.6719E+06 1.6657E+03 1.6624E+03 2.9778E+02 1.3646E+03 2.2485E+02 6
300.- 320. 12 0.2407E-02 0 1.6832E+06 1.7427E+03 1.7359E+03 4.2994E+02 1.3059E+03 3.1813E+02 7
320.- 340. 9 0.1805E-02 0 1.7003E+06 1.8900E+03 1.8845E+03 5.1020E+02 1.3743E+03 3.6182E+02 6
340.- 360. 6 0.1204E-02 0 1.7121E+06 1.8358E+03 1.8303E+03 4.7636E+02 1.3540E+03 3.4637E+02 7
360.- 380. 2 0.4012E-03 0 1.7191E+06 1.9060E+03 1.9018E+03 5.4652E+02 1.3553E+03 4.0721E+02 10
380.- 400. 7 0.1404E-02 0 1.7174E+06 2.2061E+03 2.2003E+03 7.3856E+02 1.4617E+03 5.3075E+02 9
400.- 420. 19 0.3811E-02 0 2.3515E+06 2.8879E+03 2.8718E+03 4.4892E+02 2.4229E+03 3.3430E+02 9
420.- 440. 9 0.1805E-02 0 2.4136E+06 3.1588E+03 3.1457E+03 7.5573E+02 2.3900E+03 5.6069E+02 12
440.- 460. 16 0.3210E-02 0 2.4106E+06 3.6349E+03 3.6181E+03 8.8491E+02 2.7332E+03 6.5661E+02 14
460.- 480. 20 0.4012E-02 0 2.4117E+06 3.9844E+03 3.9623E+03 1.0978E+03 2.8645E+03 8.0240E+02 16
480.- 500. 33 0.6620E-02 0 2.4180E+06 4.0642E+03 4.0353E+03 9.9689E+02 3.0384E+03 7.5034E+02 20
500.- 520. 38 0.7623E-02 0 2.4197E+06 4.2809E+03 4.2465E+03 1.0076E+03 3.2389E+03 7.5057E+02 18
520.- 540. 44 0.8826E-02 0 2.3823E+06 4.2317E+03 4.1933E+03 7.6558E+02 3.4278E+03 5.7169E+02 15
540.- 560. 55 0.1103E-01 0 2.3655E+06 5.3623E+03 5.3150E+03 1.1473E+03 4.1676E+03 8.6184E+02 24
560.- 580. 59 0.1184E-01 0 2.3691E+06 5.7906E+03 5.7338E+03 1.0656E+03 4.6682E+03 7.9809E+02 21
580.- 600. 88 0.1765E-01 0 2.3054E+06 5.9998E+03 5.9270E+03 8.6121E+02 5.0658E+03 6.4918E+02 19
600.- 620. 112 0.2247E-01 0 2.2448E+06 7.0279E+03 6.9369E+03 1.1365E+03 5.8004E+03 8.5268E+02 22
620.- 640. 143 0.2869E-01 0 2.1632E+06 7.7043E+03 7.5912E+03 1.1852E+03 6.4060E+03 8.8505E+02 24
640.- 660. 164 0.3290E-01 0 2.0800E+06 7.8336E+03 7.7016E+03 6.6009E+02 7.0416E+03 5.0060E+02 15
660.- 680. 173 0.3470E-01 0 1.9632E+06 8.5359E+03 8.3921E+03 5.8404E+02 7.8081E+03 4.4336E+02 14
680.- 700. 237 0.4754E-01 0 1.8511E+06 9.1523E+03 8.9730E+03 5.2019E+02 8.4528E+03 3.9136E+02 11
700.- 720. 143 0.2869E-01 0 9.5108E+05 4.1991E+03 4.1588E+03 1.5844E+02 4.0003E+03 1.1882E+02 4
720.- 740. 142 0.2849E-01 0 8.5781E+05 4.3100E+03 4.2723E+03 3.7313E+02 3.8992E+03 2.7310E+02 8
740.- 760. 165 0.3310E-01 0 8.0205E+05 3.8303E+03 3.7890E+03 1.0196E+02 3.6871E+03 7.6008E+01 3
760.- 780. 177 0.3551E-01 0 7.4955E+05 4.2573E+03 4.2110E+03 1.1266E+02 4.0983E+03 8.3462E+01 3
780.- 800. 192 0.3852E-01 0 6.9392E+05 4.1348E+03 4.0877E+03 6.7139E+01 4.0206E+03 5.0103E+01 2
800.- 820. 190 0.3811E-01 0 6.3809E+05 4.0007E+03 3.9526E+03 6.7894E+01 3.8847E+03 5.0637E+01 2
820.- 840. 200 0.4012E-01 0 5.8471E+05 4.1796E+03 4.1296E+03 1.2593E+02 4.0036E+03 9.2647E+01 3
840.- 860. 210 0.4213E-01 0 5.2710E+05 4.0091E+03 3.9550E+03 0.0000E+00 3.9550E+03 0.0000E+00 0
860.- 880. 219 0.4393E-01 0 4.5986E+05 3.8086E+03 3.7529E+03 4.2554E+01 3.7103E+03 3.1343E+01 1
880.- 900. 228 0.4574E-01 0 4.0183E+05 3.5182E+03 3.4625E+03 0.0000E+00 3.4625E+03 0.0000E+00 0
900.- 920. 244 0.4895E-01 1 3.4206E+05 3.3059E+03 3.2461E+03 0.0000E+00 3.2461E+03 0.0000E+00 0
920.- 940. 237 0.4754E-01 11 2.7996E+05 2.6962E+03 2.6409E+03 0.0000E+00 2.6409E+03 0.0000E+00 0
940.- 960. 202 0.4052E-01 74 2.2112E+05 2.4613E+03 2.4109E+03 0.0000E+00 2.4109E+03 0.0000E+00 0
960.- 980. 210 0.4213E-01 154 1.8218E+05 2.3115E+03 2.2611E+03 0.0000E+00 2.2611E+03 0.0000E+00 0
980.- 1000. 207 0.4152E-01 259 1.3660E+05 1.8220E+03 1.7750E+03 0.0000E+00 1.7750E+03 0.0000E+00 0
1000.- 1020. 210 0.4213E-01 235 1.2502E+05 1.4698E+03 1.4343E+03 0.0000E+00 1.4343E+03 0.0000E+00 0
1020.- 1040. 189 0.3791E-01 153 8.3443E+04 1.0644E+03 1.0344E+03 0.0000E+00 1.0344E+03 0.0000E+00 0
1040.- 1060. 142 0.2849E-01 113 5.2446E+04 7.2228E+02 6.9961E+02 0.0000E+00 6.9961E+02 0.0000E+00 0
1060.- 1080. 89 0.1785E-01 92 2.7505E+04 4.0865E+02 3.9467E+02 0.0000E+00 3.9467E+02 0.0000E+00 0
1080.- 1100. 47 0.9428E-02 111 1.2942E+04 2.0827E+02 2.0024E+02 0.0000E+00 2.0024E+02 0.0000E+00 0
1100.- 1120. 38 0.7623E-02 124 7.1691E+03 1.2341E+02 1.1782E+02 0.0000E+00 1.1782E+02 0.0000E+00 0
1120.- 1140. 20 0.4012E-02 156 2.7676E+03 5.7665E+01 5.4746E+01 0.0000E+00 5.4746E+01 0.0000E+00 0
1140.- 1160. 7 0.1404E-02 188 8.7158E+02 1.6111E+01 1.5094E+01 0.0000E+00 1.5094E+01 0.0000E+00 0
1160.- 1180. 3 0.6018E-03 279 1.3757E+02 3.3575E+00 3.1106E+00 0.0000E+00 3.1106E+00 0.0000E+00 0
1180.- 1200. 0 0.0000E+00 409 1.1647E+02 4.2785E+00 4.2588E+00 0.0000E+00 4.2588E+00 0.0000E+00 0
1200.- 1220. 0 0.0000E+00 567 5.7251E+01 2.6388E+00 2.5310E+00 0.0000E+00 2.5310E+00 0.0000E+00 0
1220.- 1240. 1 0.2006E-03 629 5.3806E+00 2.3563E-01 1.8211E-01 0.0000E+00 1.8211E-01 0.0000E+00 0
1240.- 1260. 0 0.0000E+00 583 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1260.- 1280. 0 0.0000E+00 433 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1280.- 1300. 0 0.0000E+00 251 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1300.- 1320. 0 0.0000E+00 103 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1320.- 1340. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1340.- 1360. 0 0.0000E+00 9 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- SUT 0 0.0000E+00
4985 1.0000E+00 4985 7.4799E+07 1.7273E+05 1.7080E+05 2.4049E+04 1.4675E+05 1.7689E+04 413
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.0376E+05 3.8729E+02 3.2521E+01 3.5477E+02 1.0106E+06 1.1111E+03 5.8806E+02 5.2305E+02 1 5
20.- 40. 5.0928E+05 5.7833E+02 2.0145E+02 3.7688E+02 1.0166E+06 1.3369E+03 8.3867E+02 4.9825E+02 3 6
40.- 60. 5.2225E+05 4.2790E+02 3.2711E+01 3.9519E+02 1.0177E+06 7.9664E+02 2.3520E+02 5.6145E+02 1 3
60.- 80. 5.2341E+05 7.5525E+02 3.9427E+02 3.6098E+02 1.0295E+06 7.4406E+02 2.4639E+02 4.9767E+02 7 2
80.- 100. 5.1717E+05 4.2066E+02 6.6118E+01 3.5454E+02 1.0485E+06 9.9534E+02 4.8437E+02 5.1097E+02 2 3
100.- 120. 5.2391E+05 6.6718E+02 2.1501E+02 4.5216E+02 1.0513E+06 8.0018E+02 2.7308E+02 5.2710E+02 2 4
120.- 140. 5.3343E+05 4.2407E+02 3.1493E+01 3.9257E+02 1.0506E+06 5.8997E+02 0.0000E+00 5.8997E+02 1 0
140.- 160. 5.3703E+05 9.0967E+02 5.1037E+02 3.9930E+02 1.0746E+06 7.2958E+02 1.8753E+02 5.4205E+02 8 2
160.- 180. 5.4149E+05 5.2488E+02 1.7465E+02 3.5023E+02 1.0744E+06 8.5388E+02 2.8209E+02 5.7180E+02 2 4
180.- 200. 5.4191E+05 6.3321E+02 1.2408E+02 5.0912E+02 1.0814E+06 8.1451E+02 2.3222E+02 5.8228E+02 2 4
200.- 220. 5.4326E+05 4.1638E+02 0.0000E+00 4.1638E+02 1.0834E+06 1.3144E+03 6.6285E+02 6.5150E+02 0 9
220.- 240. 5.5138E+05 4.9001E+02 4.3328E+01 4.4668E+02 1.0924E+06 9.1212E+02 2.1735E+02 6.9477E+02 1 2
240.- 260. 5.5463E+05 6.8548E+02 1.7191E+02 5.1357E+02 1.0990E+06 7.4720E+02 1.2209E+02 6.2511E+02 4 3
260.- 280. 5.6015E+05 9.6280E+02 3.9251E+02 5.7029E+02 1.1113E+06 8.4956E+02 1.2195E+02 7.2761E+02 4 3
280.- 300. 5.5508E+05 7.1489E+02 1.4183E+02 5.7306E+02 1.1168E+06 9.4752E+02 1.5595E+02 7.9157E+02 3 3
300.- 320. 5.6403E+05 6.5522E+02 1.1494E+02 5.4029E+02 1.1192E+06 1.0806E+03 3.1500E+02 7.6564E+02 2 5
320.- 340. 5.6465E+05 6.0291E+02 5.9657E+01 5.4326E+02 1.1357E+06 1.2816E+03 4.5054E+02 8.3102E+02 1 5
340.- 360. 5.6922E+05 7.3472E+02 1.5524E+02 5.7948E+02 1.1429E+06 1.0956E+03 3.2112E+02 7.7447E+02 4 3
360.- 380. 5.7489E+05 6.9061E+02 1.7122E+02 5.1939E+02 1.1442E+06 1.2112E+03 3.7530E+02 8.3587E+02 3 7
380.- 400. 5.7864E+05 8.0930E+02 2.4480E+02 5.6450E+02 1.1372E+06 1.3831E+03 4.9376E+02 8.8931E+02 4 5
400.- 420. 5.8969E+04 1.3158E+02 3.1900E+01 9.9681E+01 1.2112E+05 7.0638E+01 0.0000E+00 7.0638E+01 1 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0929E+07 1.2622E+04 3.3100E+03 9.3123E+03 2.1759E+07 1.9666E+04 6.6035E+03 1.3062E+04 56 78
DAMAGE IN LAYER 1 : 3.2094E+04
DAMAGE IN LAYER 2 : 8.2644E+04
DAMAGE IN LAYER 3 : 5.2105E+04
DAMAGE IN LAYER 4 : 3.9609E+03
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.0000E-03 ENERGY REFL.COEF.= 1.2944E-03 REL.MEAN ENERGY = 4.3148E-01 MEAN ENERGY = 6.4721E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 6.4721E+03 2.4378E+07 3.4209E-01 1.6305E+00 4.9374E+03 1.2748E+03 4.9981E+06 4.1215E-01
PATHLENGTH 5.8111E+02 1.1996E+05 -3.2140E-01 1.6536E+00 3.4635E+02 8.9427E+01 2.5040E+04 4.0870E-01
ELASTIC LOSS 2.1378E+02 1.0481E+04 1.0238E+02 6.8252E+00
INEL. LOSS 8.4628E+03 2.4060E+07 4.9051E+03 3.2701E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 6.4721E+03 6.6267E+07 7.8563E+11 9.9167E+15 1.2939E+20 1.7211E+24
LOGENERGY 3.6168E+00 1.3298E+01 4.9615E+01 1.8753E+02 7.1674E+02 2.7658E+03
PATHLENGTH 5.8111E+02 4.5765E+05 3.9201E+08 3.4984E+11 3.2030E+14 2.9845E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 1 0 0 1 1 1 1 0 0 2 2 2 1 0 2 1 0
0.000 0.000 0.000 1.333 0.000 0.000 1.333 1.333 1.333 1.333 0.000 0.000 2.667 2.667 2.667 1.333 0.000 2.667 1.333 0.000
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E15000.rge
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@@ -0,0 +1,73 @@
DEPTH PARTICLES
10.0000 0
30.0000 1
50.0000 2
70.0000 1
90.0000 1
110.0000 4
130.0000 3
150.0000 0
170.0000 1
190.0000 2
210.0000 0
230.0000 2
250.0000 4
270.0000 3
290.0000 3
310.0000 12
330.0000 9
350.0000 6
370.0000 2
390.0000 7
410.0000 19
430.0000 9
450.0000 16
470.0000 20
490.0000 33
510.0000 38
530.0000 44
550.0000 55
570.0000 59
590.0000 88
610.0000 112
630.0000 143
650.0000 164
670.0000 173
690.0000 237
710.0000 143
730.0000 142
750.0000 165
770.0000 177
790.0000 192
810.0000 190
830.0000 200
850.0000 210
870.0000 219
890.0000 228
910.0000 244
930.0000 237
950.0000 202
970.0000 210
990.0000 207
1010.0000 210
1030.0000 189
1050.0000 142
1070.0000 89
1090.0000 47
1110.0000 38
1130.0000 20
1150.0000 7
1170.0000 3
1190.0000 0
1210.0000 0
1230.0000 1
1250.0000 0
1270.0000 0
1290.0000 0
1310.0000 0
1330.0000 0
1350.0000 0
1370.0000 0
1390.0000 0
1410.0000 0
1430.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.err
View File
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.inp
+51
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@@ -0,0 +1,51 @@
1 0.1134289259 17000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:33
End: 12.Jun. 2026 16:18:36
Simulation needed for 5000 muons 3 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 17000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
45105 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.2553E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.2553E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1559E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.1633E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4985 ENERGY=0.8474E+08 EV
BACKSCATTERED PARTICLES= 15 ENERGY=0.8948E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 48 48
IMPLANTED PARTICLES (LAYER 2)= 528 528
IMPLANTED PARTICLES (LAYER 3)= 1784 1784
IMPLANTED PARTICLES (LAYER 4)= 2625 2625
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 571.5 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.087
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.502
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 9.6564E+02 3.6864E+04 -1.0390E+00 4.1725E+00 1.9200E+02 2.7194E+00 9.2998E+02 4.5261E-02
SPREAD 3.7123E+02 3.1682E+04 3.6610E-01 2.7755E+00 1.7799E+02 2.5210E+00 5.9792E+02 3.3639E-02
PATHLENGTH 1.3537E+03 7.8646E+03 -1.5880E+00 5.6914E+00 8.8683E+01 1.2560E+00 2.4127E+02 3.1784E-02
ELASTIC LOSS 3.3743E+01 6.0085E+02 2.4512E+01 4.9172E-03
INEL. LOSS 1.6960E+04 2.0167E+05 4.4908E+02 9.0087E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.9457E-02 1.1591E+00 1.0592E+02 1.7559E+04 1.0766E+00 6.3687E-04 9.0852E-02 5.2495E+00
WEAK EL.LOSS 5.0200E-04 4.9712E-06 9.9124E+00 1.3801E+02 2.2296E-03 1.3189E-06 3.4422E-08 3.7896E-02
INELAST.LOSS 2.9642E+01 1.5422E+02 -6.9144E-01 2.4537E+00 1.2419E+01 7.3463E-03 1.1000E-01 9.3380E-04
SUBTHR.LOSS 4.9744E-02 2.4158E-01 2.9157E+01 1.1520E+03 4.9151E-01 2.9078E-04 4.8487E-03 2.4490E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 9.6564E+02 9.6933E+05 9.9986E+08 1.0530E+12 1.1274E+15 1.2235E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4651E+06 1.0567E+03 1.0557E+03 3.0698E+02 7.4873E+02 2.0984E+02 3
20.- 40. 1 0.2006E-03 0 1.4798E+06 1.1172E+03 1.1160E+03 4.0265E+02 7.1331E+02 2.8941E+02 4
40.- 60. 1 0.2006E-03 0 1.4954E+06 1.1943E+03 1.1928E+03 3.4408E+02 8.4874E+02 2.6065E+02 6
60.- 80. 1 0.2006E-03 0 1.5027E+06 1.6790E+03 1.6771E+03 8.2048E+02 8.5665E+02 5.7394E+02 7
80.- 100. 3 0.6018E-03 0 1.5123E+06 1.5988E+03 1.5967E+03 8.0092E+02 7.9581E+02 5.6250E+02 8
100.- 120. 0 0.0000E+00 0 1.5258E+06 1.4382E+03 1.4369E+03 5.9329E+02 8.4361E+02 4.3433E+02 10
120.- 140. 0 0.0000E+00 0 1.5330E+06 1.5831E+03 1.5817E+03 6.0044E+02 9.8123E+02 4.3601E+02 7
140.- 160. 3 0.6018E-03 0 1.5437E+06 1.1578E+03 1.1557E+03 3.1751E+02 8.3815E+02 2.3220E+02 4
160.- 180. 3 0.6018E-03 0 1.5573E+06 1.2080E+03 1.2052E+03 3.5557E+02 8.4959E+02 2.5952E+02 6
180.- 200. 3 0.6018E-03 0 1.5778E+06 1.3978E+03 1.3952E+03 4.2568E+02 9.6956E+02 2.9654E+02 5
200.- 220. 2 0.4012E-03 0 1.5826E+06 1.4579E+03 1.4556E+03 5.5434E+02 9.0128E+02 3.8673E+02 5
220.- 240. 2 0.4012E-03 0 1.5896E+06 1.9041E+03 1.9018E+03 9.7859E+02 9.2318E+02 6.7617E+02 9
240.- 260. 5 0.1003E-02 0 1.6047E+06 1.2134E+03 1.2102E+03 3.7300E+02 8.3725E+02 2.7944E+02 6
260.- 280. 0 0.0000E+00 0 1.6168E+06 1.5651E+03 1.5632E+03 5.2778E+02 1.0355E+03 3.8113E+02 7
280.- 300. 2 0.4012E-03 0 1.6185E+06 1.3440E+03 1.3413E+03 3.7131E+02 9.7003E+02 2.5866E+02 4
300.- 320. 2 0.4012E-03 0 1.6395E+06 1.8283E+03 1.8259E+03 7.2847E+02 1.0974E+03 5.1766E+02 8
320.- 340. 7 0.1404E-02 0 1.6416E+06 1.5767E+03 1.5725E+03 4.5808E+02 1.1144E+03 3.3306E+02 6
340.- 360. 5 0.1003E-02 0 1.6509E+06 1.2613E+03 1.2571E+03 1.5840E+02 1.0988E+03 1.1930E+02 3
360.- 380. 3 0.6018E-03 0 1.6566E+06 1.7573E+03 1.7541E+03 7.4257E+02 1.0116E+03 5.4495E+02 10
380.- 400. 5 0.1003E-02 0 1.6659E+06 1.6901E+03 1.6862E+03 4.4377E+02 1.2424E+03 3.3672E+02 8
400.- 420. 8 0.1605E-02 0 2.2826E+06 2.2315E+03 2.2216E+03 5.2318E+02 1.6985E+03 3.8405E+02 7
420.- 440. 6 0.1204E-02 0 2.3761E+06 3.1856E+03 3.1770E+03 1.2711E+03 1.9059E+03 9.4002E+02 22
440.- 460. 9 0.1805E-02 0 2.4010E+06 2.6597E+03 2.6478E+03 6.2949E+02 2.0184E+03 4.7149E+02 12
460.- 480. 20 0.4012E-02 0 2.4038E+06 3.1250E+03 3.1075E+03 9.3729E+02 2.1702E+03 6.8295E+02 14
480.- 500. 20 0.4012E-02 0 2.4355E+06 3.3601E+03 3.3413E+03 1.0328E+03 2.3085E+03 7.7097E+02 17
500.- 520. 19 0.3811E-02 0 2.4382E+06 3.6090E+03 3.5899E+03 9.0868E+02 2.6812E+03 6.7619E+02 15
520.- 540. 24 0.4814E-02 0 2.4351E+06 4.2684E+03 4.2475E+03 1.5492E+03 2.6983E+03 1.1138E+03 21
540.- 560. 22 0.4413E-02 0 2.4371E+06 3.7292E+03 3.7063E+03 1.0580E+03 2.6483E+03 7.7403E+02 13
560.- 580. 23 0.4614E-02 0 2.4242E+06 4.1684E+03 4.1456E+03 9.4373E+02 3.2019E+03 7.0130E+02 15
580.- 600. 35 0.7021E-02 0 2.4275E+06 4.2054E+03 4.1709E+03 9.2340E+02 3.2474E+03 6.9457E+02 19
600.- 620. 39 0.7823E-02 0 2.3771E+06 3.9801E+03 3.9453E+03 6.4189E+02 3.3034E+03 4.8961E+02 15
620.- 640. 57 0.1143E-01 0 2.3701E+06 4.9188E+03 4.8702E+03 9.1331E+02 3.9569E+03 6.8584E+02 17
640.- 660. 64 0.1284E-01 0 2.3458E+06 5.5467E+03 5.4914E+03 9.9362E+02 4.4978E+03 7.4096E+02 18
660.- 680. 77 0.1545E-01 0 2.2826E+06 5.9573E+03 5.8921E+03 1.3686E+03 4.5235E+03 1.0159E+03 25
680.- 700. 105 0.2106E-01 0 2.2633E+06 6.9007E+03 6.8192E+03 1.0786E+03 5.7405E+03 7.9880E+02 21
700.- 720. 52 0.1043E-01 0 1.2385E+06 3.1616E+03 3.1444E+03 3.7600E+02 2.7684E+03 2.7316E+02 7
720.- 740. 68 0.1364E-01 0 1.1481E+06 2.7060E+03 2.6875E+03 1.7053E+02 2.5170E+03 1.2331E+02 3
740.- 760. 82 0.1645E-01 0 1.1329E+06 3.5266E+03 3.5058E+03 2.6242E+02 3.2434E+03 1.9426E+02 6
760.- 780. 76 0.1525E-01 0 1.1060E+06 3.3635E+03 3.3434E+03 1.7448E+02 3.1689E+03 1.2539E+02 3
780.- 800. 75 0.1505E-01 0 1.0730E+06 3.2624E+03 3.2423E+03 1.5866E+02 3.0836E+03 1.2093E+02 4
800.- 820. 100 0.2006E-01 0 1.0480E+06 3.6133E+03 3.5878E+03 2.7680E+02 3.3110E+03 2.0409E+02 7
820.- 840. 119 0.2387E-01 0 1.0090E+06 3.5140E+03 3.4829E+03 1.1829E+02 3.3646E+03 8.7346E+01 3
840.- 860. 118 0.2367E-01 0 9.5887E+05 3.8637E+03 3.8335E+03 3.2062E+02 3.5129E+03 2.3087E+02 6
860.- 880. 124 0.2487E-01 0 9.1441E+05 3.7505E+03 3.7199E+03 2.2185E+02 3.4981E+03 1.6230E+02 5
880.- 900. 133 0.2668E-01 0 8.7992E+05 3.7528E+03 3.7175E+03 1.9505E+02 3.5224E+03 1.4422E+02 5
900.- 920. 127 0.2548E-01 0 8.2460E+05 3.6760E+03 3.6415E+03 3.7924E+01 3.6036E+03 2.8115E+01 1
920.- 940. 171 0.3430E-01 0 7.8735E+05 4.0610E+03 4.0182E+03 1.2997E+02 3.8883E+03 9.5596E+01 3
940.- 960. 170 0.3410E-01 0 7.3852E+05 3.9653E+03 3.9221E+03 1.0712E+02 3.8150E+03 7.9655E+01 3
960.- 980. 183 0.3671E-01 0 6.8009E+05 3.8850E+03 3.8383E+03 3.2267E+01 3.8060E+03 2.4131E+01 1
980.- 1000. 186 0.3731E-01 0 6.2535E+05 4.1423E+03 4.0945E+03 1.2033E+02 3.9742E+03 8.8885E+01 3
1000.- 1020. 243 0.4875E-01 0 6.7312E+05 3.9392E+03 3.8962E+03 0.0000E+00 3.8962E+03 0.0000E+00 0
1020.- 1040. 253 0.5075E-01 3 5.9020E+05 3.6143E+03 3.5691E+03 0.0000E+00 3.5691E+03 0.0000E+00 0
1040.- 1060. 234 0.4694E-01 27 5.0379E+05 3.4640E+03 3.4199E+03 0.0000E+00 3.4199E+03 0.0000E+00 0
1060.- 1080. 273 0.5476E-01 57 4.1529E+05 3.1709E+03 3.1238E+03 0.0000E+00 3.1238E+03 0.0000E+00 0
1080.- 1100. 282 0.5657E-01 88 3.4515E+05 2.8320E+03 2.7832E+03 0.0000E+00 2.7832E+03 0.0000E+00 0
1100.- 1120. 266 0.5336E-01 74 2.6771E+05 2.4694E+03 2.4242E+03 0.0000E+00 2.4242E+03 0.0000E+00 0
1120.- 1140. 236 0.4734E-01 60 1.9895E+05 1.9355E+03 1.8949E+03 0.0000E+00 1.8949E+03 0.0000E+00 0
1140.- 1160. 227 0.4554E-01 35 1.5127E+05 1.6599E+03 1.6217E+03 0.0000E+00 1.6217E+03 0.0000E+00 0
1160.- 1180. 194 0.3892E-01 41 1.0414E+05 1.2397E+03 1.2078E+03 0.0000E+00 1.2078E+03 0.0000E+00 0
1180.- 1200. 142 0.2849E-01 39 6.3114E+04 8.5862E+02 8.3442E+02 0.0000E+00 8.3442E+02 0.0000E+00 0
1200.- 1220. 128 0.2568E-01 33 3.5355E+04 5.0261E+02 4.8361E+02 0.0000E+00 4.8361E+02 0.0000E+00 0
1220.- 1240. 67 0.1344E-01 49 1.8200E+04 2.7666E+02 2.6587E+02 0.0000E+00 2.6587E+02 0.0000E+00 0
1240.- 1260. 34 0.6820E-02 41 8.9760E+03 1.4150E+02 1.3614E+02 0.0000E+00 1.3614E+02 0.0000E+00 0
1260.- 1280. 28 0.5617E-02 61 4.1230E+03 7.5140E+01 7.1158E+01 0.0000E+00 7.1158E+01 0.0000E+00 0
1280.- 1300. 13 0.2608E-02 102 1.5144E+03 3.5844E+01 3.4196E+01 0.0000E+00 3.4196E+01 0.0000E+00 0
1300.- 1320. 2 0.4012E-03 232 3.6952E+02 5.4484E+00 5.0801E+00 0.0000E+00 5.0801E+00 0.0000E+00 0
1320.- 1340. 2 0.4012E-03 440 8.9588E+01 2.9050E+00 2.6133E+00 0.0000E+00 2.6133E+00 0.0000E+00 0
1340.- 1360. 1 0.2006E-03 655 2.6486E+00 1.0786E-01 7.3905E-02 0.0000E+00 7.3905E-02 0.0000E+00 0
1360.- 1380. 0 0.0000E+00 819 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1380.- 1400. 0 0.0000E+00 766 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1400.- 1420. 0 0.0000E+00 546 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1420.- 1440. 0 0.0000E+00 377 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1440.- 1460. 0 0.0000E+00 207 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1460.- 1480. 0 0.0000E+00 122 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 70 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 27 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- SUT 0 0.0000E+00
4985 1.0000E+00 4985 8.4705E+07 1.7134E+05 1.6991E+05 2.7779E+04 1.4213E+05 2.0311E+04 437
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.8099E+05 3.5951E+02 0.0000E+00 3.5951E+02 9.8411E+05 6.9621E+02 3.0698E+02 3.8922E+02 0 3
20.- 40. 4.9551E+05 4.5895E+02 1.8289E+02 2.7606E+02 9.8426E+05 6.5701E+02 2.1976E+02 4.3725E+02 2 2
40.- 60. 4.9684E+05 6.7200E+02 2.7346E+02 3.9854E+02 9.9855E+05 5.2081E+02 7.0620E+01 4.5019E+02 4 2
60.- 80. 4.9996E+05 6.7562E+02 3.3708E+02 3.3854E+02 1.0027E+06 1.0015E+03 4.8340E+02 5.1811E+02 3 4
80.- 100. 5.1129E+05 6.0820E+02 2.5502E+02 3.5318E+02 1.0010E+06 9.8853E+02 5.4590E+02 4.4263E+02 4 4
100.- 120. 5.0184E+05 5.2825E+02 1.5601E+02 3.7224E+02 1.0240E+06 9.0865E+02 4.3729E+02 4.7137E+02 3 7
120.- 140. 5.1319E+05 7.7100E+02 3.4851E+02 4.2249E+02 1.0198E+06 8.1067E+02 2.5193E+02 5.5874E+02 2 5
140.- 160. 5.1622E+05 5.0468E+02 1.8739E+02 3.1729E+02 1.0275E+06 6.5097E+02 1.3012E+02 5.2086E+02 3 1
160.- 180. 5.1721E+05 3.8333E+02 7.8318E+01 3.0501E+02 1.0401E+06 8.2183E+02 2.7726E+02 5.4457E+02 2 4
180.- 200. 5.2419E+05 4.8230E+02 7.5639E+01 4.0667E+02 1.0536E+06 9.1294E+02 3.5004E+02 5.6289E+02 2 3
200.- 220. 5.2647E+05 5.1400E+02 6.8524E+01 4.4548E+02 1.0561E+06 9.4162E+02 4.8582E+02 4.5580E+02 1 4
220.- 240. 5.3186E+05 4.6896E+02 1.4068E+02 3.2828E+02 1.0578E+06 1.4328E+03 8.3791E+02 5.9489E+02 1 8
240.- 260. 5.3670E+05 5.4759E+02 2.0613E+02 3.4147E+02 1.0680E+06 6.6265E+02 1.6687E+02 4.9578E+02 3 3
260.- 280. 5.3434E+05 5.4888E+02 9.8782E+01 4.5010E+02 1.0825E+06 1.0144E+03 4.2900E+02 5.8536E+02 2 5
280.- 300. 5.4087E+05 3.4186E+02 3.5185E+01 3.0668E+02 1.0777E+06 9.9948E+02 3.3612E+02 6.6336E+02 1 3
300.- 320. 5.4734E+05 6.8344E+02 2.7528E+02 4.0816E+02 1.0922E+06 1.1424E+03 4.5319E+02 6.8923E+02 3 5
320.- 340. 5.5228E+05 6.4203E+02 1.6325E+02 4.7878E+02 1.0893E+06 9.3045E+02 2.9483E+02 6.3562E+02 3 3
340.- 360. 5.5614E+05 5.4022E+02 7.6286E+01 4.6393E+02 1.0948E+06 7.1693E+02 8.2110E+01 6.3482E+02 1 2
360.- 380. 5.5054E+05 8.1060E+02 4.7029E+02 3.4031E+02 1.1060E+06 9.4353E+02 2.7228E+02 6.7126E+02 6 4
380.- 400. 5.5168E+05 8.7159E+02 4.0983E+02 4.6175E+02 1.1132E+06 8.0830E+02 3.3940E+01 7.7436E+02 7 1
400.- 420. 5.9995E+04 3.6152E+01 0.0000E+00 3.6152E+01 1.1838E+05 1.5745E+02 8.1900E+01 7.5550E+01 0 1
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0545E+07 1.1449E+04 3.8385E+03 7.6106E+03 2.1092E+07 1.7719E+04 6.5473E+03 1.1172E+04 53 74
DAMAGE IN LAYER 1 : 2.8981E+04
DAMAGE IN LAYER 2 : 6.1374E+04
DAMAGE IN LAYER 3 : 5.3780E+04
DAMAGE IN LAYER 4 : 2.5774E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.0000E-03 ENERGY REFL.COEF.= 1.0528E-03 REL.MEAN ENERGY = 3.5092E-01 MEAN ENERGY = 5.9656E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 5.9656E+03 1.9090E+07 4.8367E-01 2.0110E+00 4.3692E+03 1.1281E+03 4.9561E+06 4.0310E-01
PATHLENGTH 7.2528E+02 9.9756E+04 -3.0704E-01 1.9288E+00 3.1584E+02 8.1550E+01 2.4823E+04 3.8529E-01
ELASTIC LOSS 2.0882E+02 1.9656E+03 4.4335E+01 2.9557E+00
INEL. LOSS 1.0669E+04 2.0691E+07 4.5487E+03 3.0325E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 5.9656E+03 5.4679E+07 5.9431E+11 7.0386E+15 8.7695E+19 1.1298E+24
LOGENERGY 3.5998E+00 1.3163E+01 4.8788E+01 1.8295E+02 6.9284E+02 2.6462E+03
PATHLENGTH 7.2528E+02 6.2578E+05 5.8889E+08 5.8268E+11 5.9542E+14 6.2221E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 1 1 1 2 2 0 2 1 1 2 0 1 0 0 0 1
0.000 0.000 0.000 0.000 1.333 1.333 1.333 2.667 2.667 0.000 2.667 1.333 1.333 2.667 0.000 1.333 0.000 0.000 0.000 1.333
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E17000.rge
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DEPTH PARTICLES
10.0000 0
30.0000 1
50.0000 1
70.0000 1
90.0000 3
110.0000 0
130.0000 0
150.0000 3
170.0000 3
190.0000 3
210.0000 2
230.0000 2
250.0000 5
270.0000 0
290.0000 2
310.0000 2
330.0000 7
350.0000 5
370.0000 3
390.0000 5
410.0000 8
430.0000 6
450.0000 9
470.0000 20
490.0000 20
510.0000 19
530.0000 24
550.0000 22
570.0000 23
590.0000 35
610.0000 39
630.0000 57
650.0000 64
670.0000 77
690.0000 105
710.0000 52
730.0000 68
750.0000 82
770.0000 76
790.0000 75
810.0000 100
830.0000 119
850.0000 118
870.0000 124
890.0000 133
910.0000 127
930.0000 171
950.0000 170
970.0000 183
990.0000 186
1010.0000 243
1030.0000 253
1050.0000 234
1070.0000 273
1090.0000 282
1110.0000 266
1130.0000 236
1150.0000 227
1170.0000 194
1190.0000 142
1210.0000 128
1230.0000 67
1250.0000 34
1270.0000 28
1290.0000 13
1310.0000 2
1330.0000 2
1350.0000 1
1370.0000 0
1390.0000 0
1410.0000 0
1430.0000 0
1450.0000 0
1470.0000 0
1490.0000 0
1510.0000 0
1530.0000 0
1550.0000 0
1570.0000 0
1590.0000 0
1610.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.inp
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1 0.1134289259 19000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:36
End: 12.Jun. 2026 16:18:39
Simulation needed for 5000 muons 3 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 19000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
49517 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.2853E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.2853E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1742E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.1825E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4990 ENERGY=0.9481E+08 EV
BACKSCATTERED PARTICLES= 10 ENERGY=0.9359E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 27 27
IMPLANTED PARTICLES (LAYER 2)= 288 288
IMPLANTED PARTICLES (LAYER 3)= 765 765
IMPLANTED PARTICLES (LAYER 4)= 3910 3910
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 628.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.085
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.522
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.1118E+03 4.3275E+04 -1.3400E+00 5.1470E+00 2.0803E+02 2.9449E+00 1.2475E+03 4.9381E-02
SPREAD 4.1753E+02 4.3611E+04 4.0586E-01 2.7338E+00 2.0883E+02 2.9563E+00 8.1293E+02 3.2988E-02
PATHLENGTH 1.5123E+03 5.8316E+03 -1.9968E+00 9.4694E+00 7.6365E+01 1.0810E+00 2.4025E+02 4.9149E-02
ELASTIC LOSS 3.3835E+01 6.3187E+02 2.5137E+01 5.0375E-03
INEL. LOSS 1.8958E+04 2.0357E+05 4.5119E+02 9.0419E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 5.4237E-02 1.1689E+00 1.3950E+02 3.3781E+04 1.0811E+00 6.0994E-04 1.2120E-01 1.3478E+01
WEAK EL.LOSS 3.8324E-04 3.1329E-06 1.0838E+01 1.7914E+02 1.7700E-03 9.9858E-07 2.3591E-08 6.0533E-02
INELAST.LOSS 3.0139E+01 1.3152E+02 -7.4860E-01 2.9999E+00 1.1468E+01 6.4699E-03 1.0493E-01 7.7325E-04
SUBTHR.LOSS 4.5408E-02 2.2827E-01 3.0371E+01 1.2398E+03 4.7777E-01 2.6956E-04 4.5330E-03 2.4857E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.1118E+03 1.2794E+06 1.5067E+09 1.8050E+12 2.1920E+15 2.6919E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.4005E+06 1.4376E+03 1.4368E+03 7.3261E+02 7.0420E+02 4.9881E+02 7
20.- 40. 0 0.0000E+00 0 1.4124E+06 1.0419E+03 1.0411E+03 3.4614E+02 6.9496E+02 2.4595E+02 3
40.- 60. 1 0.2004E-03 0 1.4282E+06 1.0449E+03 1.0436E+03 3.0814E+02 7.3550E+02 2.2911E+02 5
60.- 80. 2 0.4008E-03 0 1.4346E+06 1.2175E+03 1.2158E+03 4.7701E+02 7.3879E+02 3.3834E+02 5
80.- 100. 1 0.2004E-03 0 1.4519E+06 1.3385E+03 1.3362E+03 5.0524E+02 8.3096E+02 3.4845E+02 4
100.- 120. 2 0.4008E-03 0 1.4569E+06 1.4760E+03 1.4747E+03 6.8226E+02 7.9248E+02 4.7949E+02 6
120.- 140. 2 0.4008E-03 0 1.4687E+06 1.0628E+03 1.0609E+03 2.7094E+02 7.8995E+02 2.0126E+02 4
140.- 160. 2 0.4008E-03 0 1.4743E+06 1.4428E+03 1.4410E+03 5.9787E+02 8.4315E+02 3.9324E+02 5
160.- 180. 1 0.2004E-03 0 1.4872E+06 1.0136E+03 1.0120E+03 1.9117E+02 8.2080E+02 1.4422E+02 4
180.- 200. 2 0.4008E-03 0 1.4999E+06 2.1039E+03 2.1016E+03 1.1756E+03 9.2606E+02 8.0321E+02 9
200.- 220. 3 0.6012E-03 0 1.5172E+06 1.4802E+03 1.4780E+03 6.0253E+02 8.7549E+02 4.3011E+02 8
220.- 240. 1 0.2004E-03 0 1.5262E+06 1.1822E+03 1.1806E+03 3.3089E+02 8.4975E+02 2.4160E+02 4
240.- 260. 0 0.0000E+00 0 1.5298E+06 1.4143E+03 1.4131E+03 5.9724E+02 8.1583E+02 4.4272E+02 9
260.- 280. 1 0.2004E-03 0 1.5421E+06 1.4954E+03 1.4938E+03 5.7667E+02 9.1716E+02 4.0576E+02 6
280.- 300. 2 0.4008E-03 0 1.5569E+06 1.1678E+03 1.1656E+03 1.4748E+02 1.0181E+03 1.1372E+02 3
300.- 320. 1 0.2004E-03 0 1.5736E+06 1.3135E+03 1.3119E+03 3.1302E+02 9.9887E+02 2.2886E+02 4
320.- 340. 0 0.0000E+00 0 1.5806E+06 1.1839E+03 1.1824E+03 3.6953E+02 8.1292E+02 2.7394E+02 7
340.- 360. 4 0.8016E-03 0 1.5897E+06 1.4105E+03 1.4074E+03 4.4339E+02 9.6404E+02 3.1246E+02 5
360.- 380. 1 0.2004E-03 0 1.5991E+06 1.2365E+03 1.2349E+03 1.1794E+02 1.1169E+03 9.0816E+01 3
380.- 400. 1 0.2004E-03 0 1.6126E+06 1.6260E+03 1.6236E+03 6.6932E+02 9.5424E+02 4.8257E+02 9
400.- 420. 8 0.1603E-02 0 2.2172E+06 1.9192E+03 1.9120E+03 2.5049E+02 1.6615E+03 1.8851E+02 4
420.- 440. 8 0.1603E-02 0 2.2968E+06 2.0004E+03 1.9916E+03 3.6440E+02 1.6272E+03 2.7794E+02 7
440.- 460. 4 0.8016E-03 0 2.3241E+06 2.5311E+03 2.5242E+03 8.8281E+02 1.6414E+03 6.2412E+02 10
460.- 480. 5 0.1002E-02 0 2.3440E+06 2.4944E+03 2.4871E+03 6.0717E+02 1.8799E+03 4.5823E+02 12
480.- 500. 10 0.2004E-02 0 2.3797E+06 3.4727E+03 3.4631E+03 1.5916E+03 1.8715E+03 1.1335E+03 17
500.- 520. 12 0.2405E-02 0 2.3760E+06 2.3791E+03 2.3675E+03 3.1638E+02 2.0511E+03 2.3777E+02 6
520.- 540. 7 0.1403E-02 0 2.3933E+06 2.8742E+03 2.8647E+03 7.6922E+02 2.0955E+03 5.8016E+02 15
540.- 560. 15 0.3006E-02 0 2.4215E+06 3.1028E+03 3.0869E+03 9.2366E+02 2.1632E+03 6.8116E+02 16
560.- 580. 18 0.3607E-02 0 2.4332E+06 3.3621E+03 3.3451E+03 9.8182E+02 2.3633E+03 7.3158E+02 16
580.- 600. 18 0.3607E-02 0 2.4499E+06 3.5176E+03 3.4975E+03 9.3292E+02 2.5645E+03 6.5699E+02 11
600.- 620. 34 0.6814E-02 0 2.4597E+06 4.2500E+03 4.2230E+03 1.4873E+03 2.7357E+03 1.0933E+03 22
620.- 640. 27 0.5411E-02 0 2.4545E+06 3.8123E+03 3.7861E+03 9.7931E+02 2.8068E+03 7.2529E+02 15
640.- 660. 34 0.6814E-02 0 2.4631E+06 4.1940E+03 4.1620E+03 1.0617E+03 3.1003E+03 7.8433E+02 18
660.- 680. 41 0.8216E-02 0 2.4896E+06 4.4921E+03 4.4561E+03 1.0093E+03 3.4467E+03 7.4262E+02 17
680.- 700. 47 0.9419E-02 0 2.4546E+06 4.9247E+03 4.8865E+03 1.1399E+03 3.7466E+03 8.4804E+02 19
700.- 720. 24 0.4810E-02 0 1.3999E+06 2.5103E+03 2.5019E+03 4.2784E+02 2.0741E+03 3.2517E+02 10
720.- 740. 31 0.6212E-02 0 1.3051E+06 2.0283E+03 2.0198E+03 1.1085E+02 1.9089E+03 8.5698E+01 3
740.- 760. 29 0.5812E-02 0 1.3035E+06 2.2229E+03 2.2144E+03 2.6050E+02 1.9539E+03 1.8693E+02 4
760.- 780. 41 0.8216E-02 0 1.2842E+06 2.4254E+03 2.4153E+03 3.6693E+02 2.0484E+03 2.7163E+02 7
780.- 800. 37 0.7415E-02 0 1.2705E+06 2.2079E+03 2.1970E+03 2.1116E+02 1.9858E+03 1.5895E+02 6
800.- 820. 45 0.9018E-02 0 1.2686E+06 2.5407E+03 2.5284E+03 3.1834E+02 2.2100E+03 2.3967E+02 8
820.- 840. 51 0.1022E-01 0 1.2463E+06 2.6667E+03 2.6537E+03 9.3430E+01 2.5603E+03 7.0130E+01 2
840.- 860. 45 0.9018E-02 0 1.2123E+06 2.9628E+03 2.9502E+03 4.4829E+02 2.5019E+03 3.3416E+02 10
860.- 880. 53 0.1062E-01 0 1.1839E+06 3.1442E+03 3.1306E+03 7.4274E+02 2.3878E+03 5.4075E+02 13
880.- 900. 55 0.1102E-01 0 1.1513E+06 2.6885E+03 2.6738E+03 1.3734E+02 2.5365E+03 1.0946E+02 4
900.- 920. 63 0.1263E-01 0 1.1396E+06 3.0666E+03 3.0494E+03 2.6647E+02 2.7830E+03 1.9561E+02 6
920.- 940. 54 0.1082E-01 0 1.1200E+06 3.0659E+03 3.0495E+03 1.8661E+02 2.8629E+03 1.4193E+02 5
940.- 960. 71 0.1423E-01 0 1.0773E+06 3.0801E+03 3.0606E+03 1.3404E+02 2.9266E+03 1.0051E+02 3
960.- 980. 73 0.1463E-01 0 1.0465E+06 3.3978E+03 3.3786E+03 3.9005E+02 2.9886E+03 2.8397E+02 8
980.- 1000. 93 0.1864E-01 0 1.0087E+06 3.3211E+03 3.2975E+03 3.4147E+02 2.9561E+03 2.4825E+02 7
1000.- 1020. 126 0.2525E-01 0 1.1544E+06 3.6853E+03 3.6617E+03 2.2321E+02 3.4385E+03 1.7068E+02 5
1020.- 1040. 133 0.2665E-01 0 1.1203E+06 3.2149E+03 3.1907E+03 3.4358E+01 3.1563E+03 2.6599E+01 1
1040.- 1060. 126 0.2525E-01 0 1.0500E+06 3.7634E+03 3.7381E+03 4.3276E+01 3.6948E+03 3.3164E+01 1
1060.- 1080. 173 0.3467E-01 0 9.9051E+05 3.9128E+03 3.8806E+03 1.0376E+02 3.7769E+03 8.0290E+01 3
1080.- 1100. 187 0.3747E-01 0 9.2209E+05 4.1715E+03 4.1365E+03 1.6331E+02 3.9732E+03 1.2669E+02 5
1100.- 1120. 225 0.4509E-01 0 8.6282E+05 4.2641E+03 4.2237E+03 0.0000E+00 4.2237E+03 0.0000E+00 0
1120.- 1140. 224 0.4489E-01 1 7.6935E+05 3.7284E+03 3.6887E+03 0.0000E+00 3.6887E+03 0.0000E+00 0
1140.- 1160. 213 0.4269E-01 9 6.9795E+05 3.8427E+03 3.8041E+03 0.0000E+00 3.8041E+03 0.0000E+00 0
1160.- 1180. 249 0.4990E-01 15 6.1779E+05 3.6165E+03 3.5716E+03 0.0000E+00 3.5716E+03 0.0000E+00 0
1180.- 1200. 269 0.5391E-01 36 5.4371E+05 3.5644E+03 3.5166E+03 0.0000E+00 3.5166E+03 0.0000E+00 0
1200.- 1220. 270 0.5411E-01 35 4.5280E+05 3.1439E+03 3.0959E+03 0.0000E+00 3.0959E+03 0.0000E+00 0
1220.- 1240. 252 0.5050E-01 27 3.7195E+05 2.9361E+03 2.8914E+03 0.0000E+00 2.8914E+03 0.0000E+00 0
1240.- 1260. 271 0.5431E-01 17 2.9678E+05 2.4940E+03 2.4492E+03 0.0000E+00 2.4492E+03 0.0000E+00 0
1260.- 1280. 239 0.4790E-01 22 2.3473E+05 2.0751E+03 2.0332E+03 0.0000E+00 2.0332E+03 0.0000E+00 0
1280.- 1300. 234 0.4689E-01 15 1.8009E+05 1.9026E+03 1.8627E+03 0.0000E+00 1.8627E+03 0.0000E+00 0
1300.- 1320. 198 0.3968E-01 20 1.2169E+05 1.3359E+03 1.3024E+03 0.0000E+00 1.3024E+03 0.0000E+00 0
1320.- 1340. 144 0.2886E-01 18 7.9475E+04 9.6004E+02 9.3449E+02 0.0000E+00 9.3449E+02 0.0000E+00 0
1340.- 1360. 142 0.2846E-01 19 4.9939E+04 6.7892E+02 6.5710E+02 0.0000E+00 6.5710E+02 0.0000E+00 0
1360.- 1380. 104 0.2084E-01 23 3.0181E+04 4.6067E+02 4.4510E+02 0.0000E+00 4.4510E+02 0.0000E+00 0
1380.- 1400. 65 0.1303E-01 14 1.7345E+04 2.9936E+02 2.8842E+02 0.0000E+00 2.8842E+02 0.0000E+00 0
1400.- 1420. 42 0.8417E-02 43 6.9797E+03 1.3684E+02 1.3107E+02 0.0000E+00 1.3107E+02 0.0000E+00 0
1420.- 1440. 12 0.2405E-02 86 2.2219E+03 5.0744E+01 4.8740E+01 0.0000E+00 4.8740E+01 0.0000E+00 0
1440.- 1460. 9 0.1804E-02 169 6.9683E+02 1.4709E+01 1.3680E+01 0.0000E+00 1.3680E+01 0.0000E+00 0
1460.- 1480. 3 0.6012E-03 390 2.2485E+02 6.4411E+00 6.1259E+00 0.0000E+00 6.1259E+00 0.0000E+00 0
1480.- 1500. 0 0.0000E+00 619 6.4661E+01 3.1164E+00 3.0599E+00 0.0000E+00 3.0599E+00 0.0000E+00 0
1500.- 1520. 0 0.0000E+00 874 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1520.- 1540. 0 0.0000E+00 840 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1540.- 1560. 0 0.0000E+00 704 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1560.- 1580. 0 0.0000E+00 448 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1580.- 1600. 0 0.0000E+00 253 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1600.- 1620. 0 0.0000E+00 136 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1620.- 1640. 0 0.0000E+00 73 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1660.- 1680. 0 0.0000E+00 18 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 16 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- SUT 0 0.0000E+00
4990 1.0000E+00 4990 9.4691E+07 1.7161E+05 1.7040E+05 2.7757E+04 1.4265E+05 2.0198E+04 426
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.6925E+05 5.4169E+02 2.6810E+02 2.7358E+02 9.3123E+05 8.9512E+02 4.6451E+02 4.3061E+02 5 2
20.- 40. 4.7564E+05 4.4347E+02 1.2690E+02 3.1658E+02 9.3672E+05 5.9763E+02 2.1924E+02 3.7838E+02 1 2
40.- 60. 4.7480E+05 4.6557E+02 1.8279E+02 2.8279E+02 9.5341E+05 5.7806E+02 1.2535E+02 4.5271E+02 2 3
60.- 80. 4.8190E+05 3.9036E+02 1.1731E+02 2.7305E+02 9.5266E+05 8.2544E+02 3.5970E+02 4.6575E+02 2 3
80.- 100. 4.8633E+05 4.2092E+02 7.3007E+01 3.4791E+02 9.6554E+05 9.1529E+02 4.3224E+02 4.8305E+02 1 3
100.- 120. 4.8017E+05 6.4892E+02 3.2218E+02 3.2675E+02 9.7670E+05 8.2581E+02 3.6008E+02 4.6573E+02 3 3
120.- 140. 4.8765E+05 4.8265E+02 1.2234E+02 3.6031E+02 9.8110E+05 5.7825E+02 1.4860E+02 4.2964E+02 2 2
140.- 160. 4.9760E+05 3.4327E+02 0.0000E+00 3.4327E+02 9.7673E+05 1.0977E+03 5.9787E+02 4.9988E+02 0 5
160.- 180. 4.9585E+05 4.7732E+02 8.3767E+01 3.9355E+02 9.9139E+05 5.3465E+02 1.0741E+02 4.2725E+02 1 3
180.- 200. 5.0006E+05 6.9209E+02 3.0003E+02 3.9206E+02 9.9985E+05 1.4095E+03 8.7553E+02 5.3401E+02 2 7
200.- 220. 4.9923E+05 5.6707E+02 1.1473E+02 4.5235E+02 1.0180E+06 9.1095E+02 4.8781E+02 4.2315E+02 3 5
220.- 240. 5.0864E+05 4.7047E+02 1.2797E+02 3.4250E+02 1.0176E+06 7.1018E+02 2.0292E+02 5.0726E+02 2 2
240.- 260. 5.0450E+05 6.8702E+02 3.7235E+02 3.1468E+02 1.0253E+06 7.2605E+02 2.2489E+02 5.0115E+02 5 4
260.- 280. 5.1212E+05 4.5922E+02 1.4271E+02 3.1652E+02 1.0300E+06 1.0346E+03 4.3397E+02 6.0064E+02 2 4
280.- 300. 5.2029E+05 5.8694E+02 1.4748E+02 4.3946E+02 1.0366E+06 5.7864E+02 0.0000E+00 5.7864E+02 3 0
300.- 320. 5.2365E+05 6.1753E+02 1.7454E+02 4.4299E+02 1.0499E+06 6.9436E+02 1.3848E+02 5.5588E+02 1 3
320.- 340. 5.2260E+05 4.1977E+02 5.8882E+01 3.6089E+02 1.0580E+06 7.6268E+02 3.1065E+02 4.5203E+02 1 6
340.- 360. 5.2949E+05 5.5184E+02 1.3655E+02 4.1529E+02 1.0602E+06 8.5559E+02 3.0684E+02 5.4875E+02 2 3
360.- 380. 5.2964E+05 5.4732E+02 7.7542E+01 4.6978E+02 1.0694E+06 6.8756E+02 4.0400E+01 6.4716E+02 2 1
380.- 400. 5.3817E+05 6.9393E+02 2.8003E+02 4.1390E+02 1.0733E+06 9.2708E+02 3.8929E+02 5.3778E+02 5 4
400.- 420. 5.8204E+04 6.7943E+01 0.0000E+00 6.7943E+01 1.1530E+05 1.0298E+02 5.1905E+01 5.1071E+01 0 1
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0096E+07 1.0575E+04 3.2292E+03 7.3461E+03 2.0219E+07 1.6248E+04 6.2777E+03 9.9705E+03 45 66
DAMAGE IN LAYER 1 : 2.6655E+04
DAMAGE IN LAYER 2 : 4.9053E+04
DAMAGE IN LAYER 3 : 4.1121E+04
DAMAGE IN LAYER 4 : 5.3575E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.0000E-03 ENERGY REFL.COEF.= 9.8517E-04 REL.MEAN ENERGY = 4.9259E-01 MEAN ENERGY = 9.3591E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 9.3591E+03 3.3002E+07 -3.6876E-01 1.7272E+00 5.7447E+03 1.8166E+03 8.8997E+06 5.2968E-01
PATHLENGTH 6.3901E+02 1.6432E+05 3.8940E-01 1.8661E+00 4.0536E+02 1.2819E+02 4.8359E+04 5.0645E-01
ELASTIC LOSS 2.7707E+02 9.0211E+03 9.4979E+01 9.4979E+00
INEL. LOSS 9.2657E+03 3.4972E+07 5.9138E+03 5.9138E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 9.3591E+03 1.2059E+08 1.6765E+12 2.4281E+16 3.6250E+20 5.5525E+24
LOGENERGY 3.7631E+00 1.4471E+01 5.6581E+01 2.2399E+02 8.9501E+02 3.6011E+03
PATHLENGTH 6.3901E+02 5.7265E+05 6.0187E+08 6.8600E+11 8.1553E+14 9.9289E+17
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 0 0 0 0 0 0 1 1 3 0 2 2 0 0
0.000 0.000 0.000 0.000 0.000 2.000 0.000 0.000 0.000 0.000 0.000 0.000 2.000 2.000 6.000 0.000 4.000 4.000 0.000 0.000
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E19000.rge
+91
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@@ -0,0 +1,91 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 2
90.0000 1
110.0000 2
130.0000 2
150.0000 2
170.0000 1
190.0000 2
210.0000 3
230.0000 1
250.0000 0
270.0000 1
290.0000 2
310.0000 1
330.0000 0
350.0000 4
370.0000 1
390.0000 1
410.0000 8
430.0000 8
450.0000 4
470.0000 5
490.0000 10
510.0000 12
530.0000 7
550.0000 15
570.0000 18
590.0000 18
610.0000 34
630.0000 27
650.0000 34
670.0000 41
690.0000 47
710.0000 24
730.0000 31
750.0000 29
770.0000 41
790.0000 37
810.0000 45
830.0000 51
850.0000 45
870.0000 53
890.0000 55
910.0000 63
930.0000 54
950.0000 71
970.0000 73
990.0000 93
1010.0000 126
1030.0000 133
1050.0000 126
1070.0000 173
1090.0000 187
1110.0000 225
1130.0000 224
1150.0000 213
1170.0000 249
1190.0000 269
1210.0000 270
1230.0000 252
1250.0000 271
1270.0000 239
1290.0000 234
1310.0000 198
1330.0000 144
1350.0000 142
1370.0000 104
1390.0000 65
1410.0000 42
1430.0000 12
1450.0000 9
1470.0000 3
1490.0000 0
1510.0000 0
1530.0000 0
1550.0000 0
1570.0000 0
1590.0000 0
1610.0000 0
1630.0000 0
1650.0000 0
1670.0000 0
1690.0000 0
1710.0000 0
1730.0000 0
1750.0000 0
1770.0000 0
1790.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.err
View File
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.inp
+51
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@@ -0,0 +1,51 @@
1 0.1134289259 21000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:39
End: 12.Jun. 2026 16:18:42
Simulation needed for 5000 muons 3 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 21000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
54236 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.3154E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.3154E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.1925E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.2017E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4993 ENERGY=0.1049E+09 EV
BACKSCATTERED PARTICLES= 7 ENERGY=0.5580E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 21 21
IMPLANTED PARTICLES (LAYER 2)= 139 139
IMPLANTED PARTICLES (LAYER 3)= 338 338
IMPLANTED PARTICLES (LAYER 4)= 4495 4495
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 687.6 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.080
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.517
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.2674E+03 4.6731E+04 -1.5271E+00 6.2189E+00 2.1617E+02 3.0593E+00 1.5108E+03 5.5033E-02
SPREAD 4.6460E+02 5.5882E+04 4.2361E-01 2.5806E+00 2.3639E+02 3.3455E+00 9.9426E+02 2.5293E-02
PATHLENGTH 1.6763E+03 4.3204E+03 -2.3483E+00 1.4733E+01 6.5730E+01 9.3022E-01 2.2658E+02 1.0396E-01
ELASTIC LOSS 3.3300E+01 5.5712E+02 2.3603E+01 4.7273E-03
INEL. LOSS 2.0963E+04 2.0082E+05 4.4813E+02 8.9752E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.8624E-02 9.3760E-01 1.4524E+02 3.9970E+04 9.6830E-01 5.2222E-04 1.0109E-01 2.2118E+01
WEAK EL.LOSS 3.1260E-04 2.1089E-06 1.0502E+01 1.8181E+02 1.4522E-03 7.8320E-07 1.5294E-08 8.3547E-02
INELAST.LOSS 3.0470E+01 1.1220E+02 -9.4712E-01 3.6670E+00 1.0592E+01 5.7126E-03 9.8819E-02 7.7121E-04
SUBTHR.LOSS 4.1338E-02 2.0454E-01 3.1485E+01 1.3358E+03 4.5226E-01 2.4392E-04 4.0303E-03 2.5903E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.2674E+03 1.6531E+06 2.1983E+09 2.9664E+12 4.0504E+15 5.5857E+18
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.3485E+06 1.2665E+03 1.2657E+03 6.8943E+02 5.7626E+02 4.8249E+02 7
20.- 40. 0 0.0000E+00 0 1.3643E+06 9.7038E+02 9.6944E+02 3.6087E+02 6.0857E+02 2.6870E+02 7
40.- 60. 1 0.2003E-03 0 1.3767E+06 9.8256E+02 9.8132E+02 3.1521E+02 6.6611E+02 2.3571E+02 6
60.- 80. 1 0.2003E-03 0 1.3788E+06 8.8897E+02 8.8774E+02 2.5211E+02 6.3563E+02 1.8450E+02 4
80.- 100. 0 0.0000E+00 0 1.3828E+06 1.0913E+03 1.0904E+03 3.6984E+02 7.2060E+02 2.5958E+02 2
100.- 120. 1 0.2003E-03 0 1.3941E+06 8.5936E+02 8.5801E+02 1.7983E+02 6.7818E+02 1.3309E+02 2
120.- 140. 1 0.2003E-03 0 1.4043E+06 7.6978E+02 7.6862E+02 6.9123E+01 6.9950E+02 5.2498E+01 1
140.- 160. 1 0.2003E-03 0 1.4130E+06 1.0980E+03 1.0967E+03 3.9711E+02 6.9961E+02 2.8146E+02 5
160.- 180. 2 0.4006E-03 0 1.4205E+06 1.3702E+03 1.3686E+03 5.1847E+02 8.5010E+02 3.4994E+02 4
180.- 200. 1 0.2003E-03 0 1.4349E+06 1.1621E+03 1.1606E+03 4.2735E+02 7.3323E+02 3.1995E+02 6
200.- 220. 1 0.2003E-03 0 1.4465E+06 9.1269E+02 9.1142E+02 2.1939E+02 6.9204E+02 1.6744E+02 5
220.- 240. 0 0.0000E+00 0 1.4645E+06 1.0290E+03 1.0278E+03 1.7814E+02 8.4965E+02 1.3442E+02 3
240.- 260. 2 0.4006E-03 0 1.4705E+06 1.6301E+03 1.6285E+03 7.3354E+02 8.9497E+02 4.7593E+02 6
260.- 280. 1 0.2003E-03 0 1.4843E+06 1.3916E+03 1.3902E+03 5.9795E+02 7.9229E+02 4.2255E+02 6
280.- 300. 1 0.2003E-03 0 1.4863E+06 9.2038E+02 9.1890E+02 1.2320E+02 7.9570E+02 9.0404E+01 2
300.- 320. 2 0.4006E-03 0 1.5022E+06 1.1024E+03 1.1007E+03 2.3307E+02 8.6764E+02 1.7587E+02 5
320.- 340. 3 0.6008E-03 0 1.5308E+06 1.5353E+03 1.5327E+03 7.7448E+02 7.5825E+02 5.5007E+02 7
340.- 360. 0 0.0000E+00 0 1.5227E+06 8.2822E+02 8.2704E+02 1.0030E+02 7.2674E+02 7.1313E+01 1
360.- 380. 2 0.4006E-03 0 1.5306E+06 1.3504E+03 1.3486E+03 4.6051E+02 8.8812E+02 3.3537E+02 5
380.- 400. 1 0.2003E-03 0 1.5413E+06 1.4681E+03 1.4663E+03 5.0366E+02 9.6264E+02 3.4677E+02 4
400.- 420. 2 0.4006E-03 0 2.1391E+06 1.7744E+03 1.7710E+03 4.4875E+02 1.3223E+03 3.2035E+02 4
420.- 440. 1 0.2003E-03 0 2.2193E+06 1.9918E+03 1.9880E+03 7.3095E+02 1.2570E+03 5.3222E+02 10
440.- 460. 6 0.1202E-02 0 2.2390E+06 1.8312E+03 1.8248E+03 3.6807E+02 1.4567E+03 2.7178E+02 5
460.- 480. 4 0.8011E-03 0 2.2474E+06 2.3722E+03 2.3667E+03 8.5842E+02 1.5082E+03 6.1608E+02 10
480.- 500. 4 0.8011E-03 0 2.2782E+06 2.4077E+03 2.4017E+03 8.2899E+02 1.5727E+03 5.8707E+02 8
500.- 520. 10 0.2003E-02 0 2.3060E+06 1.7889E+03 1.7800E+03 1.5584E+02 1.6242E+03 1.1727E+02 2
520.- 540. 3 0.6008E-03 0 2.3249E+06 2.4023E+03 2.3955E+03 8.7419E+02 1.5213E+03 6.5293E+02 14
540.- 560. 7 0.1402E-02 0 2.3461E+06 2.2612E+03 2.2523E+03 4.5696E+02 1.7953E+03 3.3503E+02 7
560.- 580. 10 0.2003E-02 0 2.3628E+06 2.6538E+03 2.6434E+03 6.7357E+02 1.9699E+03 5.0137E+02 11
580.- 600. 9 0.1803E-02 0 2.3772E+06 2.6868E+03 2.6768E+03 9.0921E+02 1.7676E+03 6.8303E+02 16
600.- 620. 9 0.1803E-02 0 2.4150E+06 3.0633E+03 3.0512E+03 1.0856E+03 1.9656E+03 7.8524E+02 13
620.- 640. 22 0.4406E-02 0 2.4211E+06 2.4640E+03 2.4468E+03 4.0979E+02 2.0370E+03 3.0442E+02 8
640.- 660. 11 0.2203E-02 0 2.4271E+06 3.2423E+03 3.2294E+03 8.8494E+02 2.3444E+03 6.6145E+02 17
660.- 680. 16 0.3204E-02 0 2.4464E+06 2.8613E+03 2.8449E+03 6.1777E+02 2.2272E+03 4.5631E+02 11
680.- 700. 25 0.5007E-02 0 2.4605E+06 3.2754E+03 3.2537E+03 6.3371E+02 2.6200E+03 4.7069E+02 12
700.- 720. 7 0.1402E-02 0 1.4526E+06 1.8583E+03 1.8549E+03 3.9107E+02 1.4638E+03 2.9711E+02 7
720.- 740. 11 0.2203E-02 0 1.3608E+06 1.4625E+03 1.4592E+03 2.7006E+02 1.1891E+03 2.0672E+02 5
740.- 760. 23 0.4606E-02 0 1.3639E+06 1.4254E+03 1.4199E+03 1.0344E+02 1.3164E+03 7.9295E+01 3
760.- 780. 10 0.2003E-02 0 1.3625E+06 1.8220E+03 1.8185E+03 4.7736E+02 1.3412E+03 3.5335E+02 7
780.- 800. 12 0.2403E-02 0 1.3525E+06 1.6774E+03 1.6731E+03 2.9571E+02 1.3774E+03 2.2172E+02 5
800.- 820. 23 0.4606E-02 0 1.3468E+06 1.7181E+03 1.7119E+03 2.6470E+02 1.4472E+03 2.0090E+02 5
820.- 840. 16 0.3204E-02 0 1.3488E+06 1.9984E+03 1.9934E+03 4.0178E+02 1.5916E+03 2.9046E+02 7
840.- 860. 16 0.3204E-02 0 1.3502E+06 2.0451E+03 2.0401E+03 3.3594E+02 1.7042E+03 2.5461E+02 7
860.- 880. 29 0.5808E-02 0 1.3302E+06 2.2699E+03 2.2621E+03 4.9869E+02 1.7634E+03 3.6964E+02 9
880.- 900. 30 0.6008E-02 0 1.3244E+06 1.9297E+03 1.9220E+03 1.9267E+02 1.7293E+03 1.5282E+02 5
900.- 920. 28 0.5608E-02 0 1.3244E+06 2.3041E+03 2.2961E+03 3.6270E+02 1.9334E+03 2.7405E+02 8
920.- 940. 30 0.6008E-02 0 1.3046E+06 1.9327E+03 1.9241E+03 1.8377E+02 1.7404E+03 1.3427E+02 3
940.- 960. 26 0.5207E-02 0 1.2830E+06 2.4515E+03 2.4436E+03 1.3629E+02 2.3073E+03 1.0324E+02 3
960.- 980. 41 0.8211E-02 0 1.2682E+06 2.5195E+03 2.5094E+03 5.3001E+02 1.9793E+03 3.9567E+02 12
980.- 1000. 36 0.7210E-02 0 1.2257E+06 2.2954E+03 2.2845E+03 3.5251E+02 1.9320E+03 2.6140E+02 8
1000.- 1020. 55 0.1102E-01 0 1.3977E+06 2.8119E+03 2.8011E+03 3.0592E+02 2.4952E+03 2.3385E+02 7
1020.- 1040. 64 0.1282E-01 0 1.3923E+06 2.6794E+03 2.6675E+03 2.7814E+02 2.3894E+03 2.1222E+02 6
1040.- 1060. 65 0.1302E-01 0 1.3732E+06 2.8701E+03 2.8569E+03 3.9329E+02 2.4636E+03 3.0040E+02 9
1060.- 1080. 81 0.1622E-01 0 1.3494E+06 3.2108E+03 3.1961E+03 3.4610E+02 2.8500E+03 2.6490E+02 8
1080.- 1100. 77 0.1542E-01 0 1.3211E+06 3.4594E+03 3.4445E+03 4.5927E+02 2.9852E+03 3.5205E+02 11
1100.- 1120. 84 0.1682E-01 0 1.2867E+06 3.5083E+03 3.4918E+03 2.0463E+02 3.2872E+03 1.5708E+02 5
1120.- 1140. 113 0.2263E-01 0 1.2358E+06 3.6034E+03 3.5832E+03 1.6833E+02 3.4148E+03 1.3041E+02 5
1140.- 1160. 107 0.2143E-01 0 1.1872E+06 3.5337E+03 3.5115E+03 1.7085E+02 3.3406E+03 1.3066E+02 4
1160.- 1180. 122 0.2443E-01 0 1.1193E+06 3.5407E+03 3.5169E+03 1.5642E+02 3.3605E+03 1.1868E+02 3
1180.- 1200. 136 0.2724E-01 0 1.0772E+06 3.7154E+03 3.6907E+03 1.0642E+02 3.5842E+03 8.2245E+01 3
1200.- 1220. 157 0.3144E-01 0 1.0332E+06 3.7770E+03 3.7483E+03 7.4189E+01 3.6741E+03 5.7192E+01 2
1220.- 1240. 174 0.3485E-01 1 9.7443E+05 3.9207E+03 3.8881E+03 1.0309E+02 3.7850E+03 7.9800E+01 3
1240.- 1260. 190 0.3805E-01 3 8.9599E+05 3.7658E+03 3.7301E+03 3.1160E+01 3.6990E+03 2.4223E+01 1
1260.- 1280. 222 0.4446E-01 7 8.2418E+05 3.6793E+03 3.6398E+03 0.0000E+00 3.6398E+03 0.0000E+00 0
1280.- 1300. 204 0.4086E-01 6 7.4033E+05 3.8533E+03 3.8171E+03 3.0049E+01 3.7870E+03 2.3394E+01 1
1300.- 1320. 196 0.3925E-01 14 6.5433E+05 3.5453E+03 3.5097E+03 0.0000E+00 3.5097E+03 0.0000E+00 0
1320.- 1340. 228 0.4566E-01 13 5.9854E+05 3.4594E+03 3.4166E+03 0.0000E+00 3.4166E+03 0.0000E+00 0
1340.- 1360. 275 0.5508E-01 11 5.2536E+05 3.4965E+03 3.4500E+03 0.0000E+00 3.4500E+03 0.0000E+00 0
1360.- 1380. 228 0.4566E-01 9 4.3227E+05 2.8884E+03 2.8463E+03 0.0000E+00 2.8463E+03 0.0000E+00 0
1380.- 1400. 258 0.5167E-01 7 3.6970E+05 2.7465E+03 2.7035E+03 0.0000E+00 2.7035E+03 0.0000E+00 0
1400.- 1420. 239 0.4787E-01 8 3.0426E+05 2.5823E+03 2.5391E+03 0.0000E+00 2.5391E+03 0.0000E+00 0
1420.- 1440. 237 0.4747E-01 10 2.4198E+05 2.1850E+03 2.1452E+03 0.0000E+00 2.1452E+03 0.0000E+00 0
1440.- 1460. 226 0.4526E-01 6 1.7809E+05 1.7975E+03 1.7583E+03 0.0000E+00 1.7583E+03 0.0000E+00 0
1460.- 1480. 236 0.4727E-01 7 1.3062E+05 1.4918E+03 1.4535E+03 0.0000E+00 1.4535E+03 0.0000E+00 0
1480.- 1500. 169 0.3385E-01 8 8.8079E+04 1.0611E+03 1.0335E+03 0.0000E+00 1.0335E+03 0.0000E+00 0
1500.- 1520. 129 0.2584E-01 11 5.8375E+04 7.1577E+02 6.9470E+02 0.0000E+00 6.9470E+02 0.0000E+00 0
1520.- 1540. 81 0.1622E-01 8 3.1431E+04 4.4598E+02 4.3273E+02 0.0000E+00 4.3273E+02 0.0000E+00 0
1540.- 1560. 67 0.1342E-01 17 1.7351E+04 2.5871E+02 2.4792E+02 0.0000E+00 2.4792E+02 0.0000E+00 0
1560.- 1580. 33 0.6609E-02 29 8.2202E+03 1.2073E+02 1.1585E+02 0.0000E+00 1.1585E+02 0.0000E+00 0
1580.- 1600. 27 0.5408E-02 83 4.1384E+03 7.7176E+01 7.3484E+01 0.0000E+00 7.3484E+01 0.0000E+00 0
1600.- 1620. 9 0.1803E-02 186 1.1470E+03 2.2738E+01 2.1637E+01 0.0000E+00 2.1637E+01 0.0000E+00 0
1620.- 1640. 5 0.1001E-02 440 2.9476E+02 8.2016E+00 7.5967E+00 0.0000E+00 7.5967E+00 0.0000E+00 0
1640.- 1660. 0 0.0000E+00 691 6.8669E+01 6.6576E-01 6.1779E-01 0.0000E+00 6.1779E-01 0.0000E+00 0
1660.- 1680. 1 0.2003E-03 874 2.2453E+01 7.9576E-01 6.8738E-01 0.0000E+00 6.8738E-01 0.0000E+00 0
1680.- 1700. 0 0.0000E+00 890 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1700.- 1720. 0 0.0000E+00 755 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1720.- 1740. 0 0.0000E+00 422 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1740.- 1760. 0 0.0000E+00 247 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1760.- 1780. 0 0.0000E+00 111 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1780.- 1800. 0 0.0000E+00 48 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1800.- 1820. 0 0.0000E+00 28 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1820.- 1840. 0 0.0000E+00 22 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1840.- 1860. 0 0.0000E+00 15 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- SUT 0 0.0000E+00
4993 1.0000E+00 4993 1.0476E+08 1.6825E+05 1.6717E+05 2.5065E+04 1.4211E+05 1.8396E+04 398
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.4467E+05 4.1393E+02 1.3089E+02 2.8304E+02 9.0384E+05 8.5177E+02 5.5854E+02 2.9323E+02 2 5
20.- 40. 4.5317E+05 3.8933E+02 1.1392E+02 2.7542E+02 9.1114E+05 5.8011E+02 2.4695E+02 3.3315E+02 3 4
40.- 60. 4.5939E+05 4.3878E+02 1.1849E+02 3.2029E+02 9.1726E+05 5.4254E+02 1.9672E+02 3.4582E+02 3 3
60.- 80. 4.6079E+05 3.0639E+02 3.8639E+01 2.6775E+02 9.1797E+05 5.8135E+02 2.1347E+02 3.6788E+02 1 3
80.- 100. 4.6195E+05 6.0991E+02 2.5708E+02 3.5283E+02 9.2083E+05 4.8053E+02 1.1276E+02 3.6777E+02 1 1
100.- 120. 4.6249E+05 5.1913E+02 1.7983E+02 3.3930E+02 9.3164E+05 3.3888E+02 0.0000E+00 3.3888E+02 2 0
120.- 140. 4.7215E+05 3.6157E+02 6.9123E+01 2.9245E+02 9.3214E+05 4.0705E+02 0.0000E+00 4.0705E+02 1 0
140.- 160. 4.7130E+05 3.5444E+02 7.4265E+01 2.8017E+02 9.4174E+05 7.4229E+02 3.2285E+02 4.1944E+02 2 3
160.- 180. 4.6678E+05 4.3947E+02 1.0217E+02 3.3730E+02 9.5373E+05 9.2909E+02 4.1630E+02 5.1279E+02 2 2
180.- 200. 4.7699E+05 6.9175E+02 3.3946E+02 3.5229E+02 9.5795E+05 4.6884E+02 8.7893E+01 3.8095E+02 5 1
200.- 220. 4.8208E+05 4.4328E+02 1.3758E+02 3.0570E+02 9.6445E+05 4.6815E+02 8.1807E+01 3.8634E+02 3 2
220.- 240. 4.8231E+05 5.1722E+02 1.1861E+02 3.9861E+02 9.8222E+05 5.1057E+02 5.9538E+01 4.5103E+02 2 1
240.- 260. 4.8851E+05 3.9077E+02 0.0000E+00 3.9077E+02 9.8199E+05 1.2377E+03 7.3354E+02 5.0420E+02 0 6
260.- 280. 4.9753E+05 3.6093E+02 5.9117E+01 3.0181E+02 9.8680E+05 1.0293E+03 5.3884E+02 4.9048E+02 1 5
280.- 300. 4.9429E+05 3.3877E+02 0.0000E+00 3.3877E+02 9.9196E+05 5.8013E+02 1.2320E+02 4.5693E+02 0 2
300.- 320. 5.0292E+05 4.9838E+02 8.6915E+01 4.1147E+02 9.9926E+05 6.0233E+02 1.4615E+02 4.5617E+02 2 3
320.- 340. 5.1446E+05 7.4389E+02 4.6363E+02 2.8027E+02 1.0163E+06 7.8884E+02 3.1086E+02 4.7798E+02 4 3
340.- 360. 5.0501E+05 3.4055E+02 0.0000E+00 3.4055E+02 1.0177E+06 4.8649E+02 1.0030E+02 3.8619E+02 0 1
360.- 380. 5.0689E+05 6.5497E+02 2.8817E+02 3.6680E+02 1.0237E+06 6.9367E+02 1.7235E+02 5.2132E+02 3 2
380.- 400. 5.2284E+05 5.6787E+02 1.7645E+02 3.9142E+02 1.0176E+06 8.9804E+02 3.2721E+02 5.7082E+02 2 2
400.- 420. 5.4931E+04 1.9006E+02 1.3347E+02 5.6597E+01 1.1264E+05 8.5834E+01 0.0000E+00 8.5834E+01 1 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
9.6815E+06 9.5714E+03 2.8878E+03 6.6836E+03 1.9383E+07 1.3304E+04 4.7493E+03 8.5543E+03 40 49
DAMAGE IN LAYER 1 : 2.2599E+04
DAMAGE IN LAYER 2 : 3.6926E+04
DAMAGE IN LAYER 3 : 2.9613E+04
DAMAGE IN LAYER 4 : 7.8035E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.4000E-03 ENERGY REFL.COEF.= 5.3146E-04 REL.MEAN ENERGY = 3.7961E-01 MEAN ENERGY = 7.9719E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 7.9719E+03 3.6039E+07 1.1460E-01 1.5696E+00 6.0032E+03 2.2690E+03 1.0280E+07 5.9517E-01
PATHLENGTH 8.7927E+02 1.6394E+05 -8.9754E-02 1.6467E+00 4.0489E+02 1.5304E+02 4.9830E+04 5.7208E-01
ELASTIC LOSS 2.8264E+02 9.2851E+03 9.6359E+01 1.3766E+01
INEL. LOSS 1.3014E+04 4.1063E+07 6.4081E+03 9.1544E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 7.9719E+03 9.9589E+07 1.3933E+12 2.0609E+16 3.1707E+20 5.0261E+24
LOGENERGY 3.6564E+00 1.3691E+01 5.2265E+01 2.0262E+02 7.9525E+02 3.1517E+03
PATHLENGTH 8.7927E+02 9.3705E+05 1.1063E+09 1.3815E+12 1.7826E+15 2.3473E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 0 1 0 0 0 0 1 0 0 1 1 1 1 0 1
0.000 0.000 0.000 0.000 0.000 0.000 2.857 0.000 0.000 0.000 0.000 2.857 0.000 0.000 2.857 2.857 2.857 2.857 0.000 2.857
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E21000.rge
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DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 1
90.0000 0
110.0000 1
130.0000 1
150.0000 1
170.0000 2
190.0000 1
210.0000 1
230.0000 0
250.0000 2
270.0000 1
290.0000 1
310.0000 2
330.0000 3
350.0000 0
370.0000 2
390.0000 1
410.0000 2
430.0000 1
450.0000 6
470.0000 4
490.0000 4
510.0000 10
530.0000 3
550.0000 7
570.0000 10
590.0000 9
610.0000 9
630.0000 22
650.0000 11
670.0000 16
690.0000 25
710.0000 7
730.0000 11
750.0000 23
770.0000 10
790.0000 12
810.0000 23
830.0000 16
850.0000 16
870.0000 29
890.0000 30
910.0000 28
930.0000 30
950.0000 26
970.0000 41
990.0000 36
1010.0000 55
1030.0000 64
1050.0000 65
1070.0000 81
1090.0000 77
1110.0000 84
1130.0000 113
1150.0000 107
1170.0000 122
1190.0000 136
1210.0000 157
1230.0000 174
1250.0000 190
1270.0000 222
1290.0000 204
1310.0000 196
1330.0000 228
1350.0000 275
1370.0000 228
1390.0000 258
1410.0000 239
1430.0000 237
1450.0000 226
1470.0000 236
1490.0000 169
1510.0000 129
1530.0000 81
1550.0000 67
1570.0000 33
1590.0000 27
1610.0000 9
1630.0000 5
1650.0000 0
1670.0000 1
1690.0000 0
1710.0000 0
1730.0000 0
1750.0000 0
1770.0000 0
1790.0000 0
1810.0000 0
1830.0000 0
1850.0000 0
1870.0000 0
1890.0000 0
1910.0000 0
1930.0000 0
1950.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.inp
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1 0.1134289259 23000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:42
End: 12.Jun. 2026 16:18:46
Simulation needed for 5000 muons 4 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 23000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
59264 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.3454E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.3454E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.2109E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.2209E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4984 ENERGY=0.1146E+09 EV
BACKSCATTERED PARTICLES= 16 ENERGY=0.1298E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 11 11
IMPLANTED PARTICLES (LAYER 2)= 82 82
IMPLANTED PARTICLES (LAYER 3)= 178 178
IMPLANTED PARTICLES (LAYER 4)= 4713 4713
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 751.3 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.092
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.544
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.4270E+03 5.4366E+04 -1.5449E+00 6.3525E+00 2.3317E+02 3.3028E+00 1.7816E+03 5.4374E-02
SPREAD 5.0936E+02 6.9237E+04 4.8281E-01 2.7213E+00 2.6313E+02 3.7272E+00 1.2867E+03 2.6358E-02
PATHLENGTH 1.8532E+03 3.8595E+03 -2.3547E+00 1.7160E+01 6.2125E+01 8.7998E-01 2.1977E+02 1.5950E-01
ELASTIC LOSS 3.4219E+01 6.5275E+02 2.5549E+01 5.1262E-03
INEL. LOSS 2.2974E+04 2.0393E+05 4.5158E+02 9.0607E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.6288E-02 1.1123E+00 1.6097E+02 4.3739E+04 1.0546E+00 5.4413E-04 1.2001E-01 1.5333E+01
WEAK EL.LOSS 2.7172E-04 1.6701E-06 1.0090E+01 1.7232E+02 1.2923E-03 6.6676E-07 1.1279E-08 9.6437E-02
INELAST.LOSS 3.0541E+01 9.6770E+01 -1.1773E+00 4.2951E+00 9.8372E+00 5.0753E-03 9.0629E-02 8.5524E-04
SUBTHR.LOSS 3.8175E-02 1.9163E-01 3.2911E+01 1.4548E+03 4.3776E-01 2.2587E-04 3.7700E-03 2.6633E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.4270E+03 2.0907E+06 3.1189E+09 4.7177E+12 7.2167E+15 1.1145E+19
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.3036E+06 1.2463E+03 1.2455E+03 5.1502E+02 7.3048E+02 3.7787E+02 8
20.- 40. 0 0.0000E+00 0 1.3125E+06 8.6856E+02 8.6772E+02 2.4686E+02 6.2086E+02 1.8727E+02 4
40.- 60. 1 0.2006E-03 0 1.3173E+06 8.0845E+02 8.0743E+02 1.3941E+02 6.6803E+02 1.0407E+02 2
60.- 80. 0 0.0000E+00 0 1.3277E+06 8.4533E+02 8.4461E+02 2.4117E+02 6.0344E+02 1.7780E+02 3
80.- 100. 0 0.0000E+00 0 1.3330E+06 1.6776E+03 1.6769E+03 1.1122E+03 5.6471E+02 7.6516E+02 6
100.- 120. 0 0.0000E+00 0 1.3406E+06 8.1095E+02 8.1021E+02 1.6838E+02 6.4183E+02 1.1971E+02 2
120.- 140. 0 0.0000E+00 0 1.3503E+06 1.4933E+03 1.4926E+03 8.6562E+02 6.2697E+02 6.0317E+02 8
140.- 160. 1 0.2006E-03 0 1.3598E+06 6.8275E+02 6.8149E+02 9.9501E+01 5.8199E+02 7.6678E+01 2
160.- 180. 1 0.2006E-03 0 1.3666E+06 8.3542E+02 8.3415E+02 1.9125E+02 6.4290E+02 1.4511E+02 4
180.- 200. 0 0.0000E+00 0 1.3791E+06 8.1931E+02 8.1849E+02 1.5690E+02 6.6160E+02 1.2000E+02 3
200.- 220. 0 0.0000E+00 0 1.3850E+06 1.3903E+03 1.3892E+03 6.2352E+02 7.6564E+02 4.2313E+02 6
220.- 240. 3 0.6019E-03 0 1.4014E+06 1.1246E+03 1.1229E+03 3.4609E+02 7.7681E+02 2.4889E+02 2
240.- 260. 0 0.0000E+00 0 1.4042E+06 1.0748E+03 1.0739E+03 4.4016E+02 6.3370E+02 3.0755E+02 4
260.- 280. 0 0.0000E+00 0 1.4168E+06 1.0008E+03 9.9995E+02 3.9334E+02 6.0661E+02 2.9622E+02 7
280.- 300. 1 0.2006E-03 0 1.4417E+06 2.0515E+03 2.0503E+03 1.2542E+03 7.9607E+02 8.7390E+02 10
300.- 320. 0 0.0000E+00 0 1.4590E+06 9.9683E+02 9.9587E+02 2.6597E+02 7.2990E+02 1.9912E+02 5
320.- 340. 0 0.0000E+00 0 1.4414E+06 8.3571E+02 8.3483E+02 1.9925E+02 6.3558E+02 1.4802E+02 4
340.- 360. 0 0.0000E+00 0 1.4517E+06 1.3276E+03 1.3265E+03 5.5664E+02 7.6989E+02 4.0840E+02 9
360.- 380. 2 0.4013E-03 0 1.4649E+06 1.0984E+03 1.0968E+03 2.7780E+02 8.1896E+02 2.0209E+02 3
380.- 400. 2 0.4013E-03 0 1.4733E+06 1.1691E+03 1.1673E+03 4.4246E+02 7.2486E+02 3.0781E+02 4
400.- 420. 1 0.2006E-03 0 2.0436E+06 2.3335E+03 2.3297E+03 1.2729E+03 1.0569E+03 8.5173E+02 7
420.- 440. 3 0.6019E-03 0 2.1221E+06 2.4209E+03 2.4167E+03 1.1129E+03 1.3039E+03 7.6491E+02 11
440.- 460. 6 0.1204E-02 0 2.1469E+06 1.8069E+03 1.8013E+03 4.1073E+02 1.3906E+03 3.1106E+02 8
460.- 480. 2 0.4013E-03 0 2.1642E+06 1.6380E+03 1.6339E+03 4.3881E+02 1.1950E+03 3.3315E+02 8
480.- 500. 3 0.6019E-03 0 2.1842E+06 1.8574E+03 1.8527E+03 6.4815E+02 1.2046E+03 4.7457E+02 9
500.- 520. 7 0.1404E-02 0 2.2168E+06 2.1883E+03 2.1811E+03 8.3837E+02 1.3427E+03 6.0230E+02 10
520.- 540. 3 0.6019E-03 0 2.2352E+06 2.1572E+03 2.1523E+03 6.8889E+02 1.4634E+03 5.0610E+02 8
540.- 560. 4 0.8026E-03 0 2.2580E+06 1.9989E+03 1.9933E+03 5.3941E+02 1.4539E+03 3.9873E+02 8
560.- 580. 5 0.1003E-02 0 2.2746E+06 2.0104E+03 2.0040E+03 5.1119E+02 1.4928E+03 3.8073E+02 9
580.- 600. 9 0.1806E-02 0 2.2933E+06 2.8372E+03 2.8286E+03 1.2144E+03 1.6142E+03 8.8252E+02 13
600.- 620. 6 0.1204E-02 0 2.3030E+06 2.6986E+03 2.6914E+03 9.0641E+02 1.7850E+03 6.6182E+02 11
620.- 640. 7 0.1404E-02 0 2.3153E+06 2.2464E+03 2.2386E+03 6.7659E+02 1.5620E+03 5.1095E+02 14
640.- 660. 4 0.8026E-03 0 2.3475E+06 2.7657E+03 2.7587E+03 1.1544E+03 1.6043E+03 8.3272E+02 15
660.- 680. 11 0.2207E-02 0 2.3742E+06 2.3928E+03 2.3824E+03 5.9001E+02 1.7924E+03 4.4311E+02 11
680.- 700. 11 0.2207E-02 0 2.3895E+06 2.5650E+03 2.5525E+03 5.8928E+02 1.9632E+03 4.4114E+02 11
700.- 720. 6 0.1204E-02 0 1.4423E+06 1.4412E+03 1.4386E+03 3.2228E+02 1.1163E+03 2.4756E+02 6
720.- 740. 9 0.1806E-02 0 1.3687E+06 1.2089E+03 1.2067E+03 1.9820E+02 1.0085E+03 1.5494E+02 4
740.- 760. 5 0.1003E-02 0 1.3704E+06 1.3610E+03 1.3588E+03 3.7040E+02 9.8838E+02 2.6708E+02 5
760.- 780. 4 0.8026E-03 0 1.3815E+06 1.1375E+03 1.1358E+03 2.0136E+02 9.3440E+02 1.5347E+02 4
780.- 800. 16 0.3210E-02 0 1.3811E+06 1.3783E+03 1.3741E+03 2.2541E+02 1.1487E+03 1.7101E+02 6
800.- 820. 8 0.1605E-02 0 1.3858E+06 1.2674E+03 1.2647E+03 2.5125E+02 1.0135E+03 1.8397E+02 4
820.- 840. 13 0.2608E-02 0 1.3833E+06 1.4054E+03 1.4019E+03 2.7845E+02 1.1235E+03 2.1319E+02 7
840.- 860. 14 0.2809E-02 0 1.3915E+06 1.3332E+03 1.3292E+03 1.9251E+02 1.1367E+03 1.3795E+02 3
860.- 880. 12 0.2408E-02 0 1.3900E+06 1.5769E+03 1.5732E+03 2.3199E+02 1.3412E+03 1.7577E+02 4
880.- 900. 11 0.2207E-02 0 1.3778E+06 1.3170E+03 1.3138E+03 6.5260E+01 1.2485E+03 5.0486E+01 2
900.- 920. 16 0.3210E-02 0 1.3657E+06 1.6244E+03 1.6203E+03 2.7185E+02 1.3485E+03 2.0467E+02 5
920.- 940. 12 0.2408E-02 0 1.3666E+06 1.7104E+03 1.7061E+03 3.3301E+02 1.3731E+03 2.4473E+02 6
940.- 960. 13 0.2608E-02 0 1.3610E+06 1.9066E+03 1.9028E+03 5.1159E+02 1.3912E+03 3.4420E+02 5
960.- 980. 21 0.4213E-02 0 1.3650E+06 1.6380E+03 1.6323E+03 1.0469E+02 1.5276E+03 7.9477E+01 2
980.- 1000. 18 0.3612E-02 0 1.3666E+06 2.0889E+03 2.0836E+03 4.2649E+02 1.6571E+03 3.2138E+02 9
1000.- 1020. 30 0.6019E-02 0 1.4640E+06 2.3282E+03 2.3221E+03 6.8142E+02 1.6407E+03 5.1133E+02 11
1020.- 1040. 33 0.6621E-02 0 1.4730E+06 2.0134E+03 2.0072E+03 3.9309E+02 1.6141E+03 2.9751E+02 8
1040.- 1060. 22 0.4414E-02 0 1.4613E+06 2.2647E+03 2.2592E+03 5.3165E+02 1.7275E+03 4.0372E+02 11
1060.- 1080. 24 0.4815E-02 0 1.4521E+06 2.0729E+03 2.0674E+03 2.8009E+02 1.7873E+03 2.1358E+02 6
1080.- 1100. 40 0.8026E-02 0 1.4410E+06 2.3453E+03 2.3381E+03 5.1916E+02 1.8189E+03 3.9288E+02 10
1100.- 1120. 36 0.7223E-02 0 1.4282E+06 2.3995E+03 2.3921E+03 2.8287E+02 2.1093E+03 2.1543E+02 6
1120.- 1140. 50 0.1003E-01 0 1.4237E+06 2.7086E+03 2.6988E+03 4.8362E+02 2.2152E+03 3.6777E+02 10
1140.- 1160. 51 0.1023E-01 0 1.4093E+06 2.6293E+03 2.6191E+03 3.0648E+02 2.3126E+03 2.3396E+02 7
1160.- 1180. 64 0.1284E-01 0 1.3899E+06 2.7669E+03 2.7547E+03 4.7990E+02 2.2748E+03 3.6695E+02 11
1180.- 1200. 59 0.1184E-01 0 1.3720E+06 2.5461E+03 2.5342E+03 1.8479E+02 2.3495E+03 1.4247E+02 5
1200.- 1220. 81 0.1625E-01 0 1.3535E+06 3.0371E+03 3.0225E+03 2.1625E+02 2.8062E+03 1.6553E+02 5
1220.- 1240. 72 0.1445E-01 0 1.3419E+06 3.1573E+03 3.1429E+03 4.0804E+02 2.7349E+03 3.1035E+02 9
1240.- 1260. 87 0.1746E-01 0 1.3019E+06 3.2593E+03 3.2426E+03 1.6972E+02 3.0728E+03 1.3006E+02 4
1260.- 1280. 81 0.1625E-01 0 1.2556E+06 3.0609E+03 3.0448E+03 9.0838E+01 2.9540E+03 6.9257E+01 2
1280.- 1300. 107 0.2147E-01 0 1.2248E+06 3.3154E+03 3.2955E+03 2.5024E+02 3.0453E+03 1.9329E+02 7
1300.- 1320. 104 0.2087E-01 0 1.1762E+06 3.5415E+03 3.5219E+03 2.5350E+02 3.2684E+03 1.9574E+02 7
1320.- 1340. 119 0.2388E-01 0 1.1129E+06 3.6432E+03 3.6206E+03 3.1004E+02 3.3105E+03 2.3865E+02 8
1340.- 1360. 131 0.2628E-01 0 1.0762E+06 3.6168E+03 3.5928E+03 2.5112E+02 3.3417E+03 1.9255E+02 6
1360.- 1380. 141 0.2829E-01 0 1.0199E+06 3.3387E+03 3.3121E+03 1.1964E+02 3.1924E+03 9.1940E+01 3
1380.- 1400. 166 0.3331E-01 0 9.6021E+05 3.4636E+03 3.4333E+03 7.3242E+01 3.3601E+03 5.6531E+01 2
1400.- 1420. 176 0.3531E-01 10 8.8481E+05 3.6022E+03 3.5696E+03 0.0000E+00 3.5696E+03 0.0000E+00 0
1420.- 1440. 179 0.3591E-01 7 8.3423E+05 3.7811E+03 3.7472E+03 6.8250E+01 3.6790E+03 5.2842E+01 2
1440.- 1460. 196 0.3933E-01 7 7.6231E+05 3.7462E+03 3.7110E+03 3.0551E+01 3.6804E+03 2.3769E+01 1
1460.- 1480. 208 0.4173E-01 4 6.8373E+05 3.3558E+03 3.3187E+03 0.0000E+00 3.3187E+03 0.0000E+00 0
1480.- 1500. 209 0.4193E-01 3 6.0590E+05 3.3518E+03 3.3152E+03 0.0000E+00 3.3152E+03 0.0000E+00 0
1500.- 1520. 205 0.4113E-01 7 5.3125E+05 3.0542E+03 3.0159E+03 0.0000E+00 3.0159E+03 0.0000E+00 0
1520.- 1540. 215 0.4314E-01 2 4.6505E+05 2.8575E+03 2.8207E+03 0.0000E+00 2.8207E+03 0.0000E+00 0
1540.- 1560. 200 0.4013E-01 4 4.0758E+05 2.7446E+03 2.7076E+03 0.0000E+00 2.7076E+03 0.0000E+00 0
1560.- 1580. 238 0.4775E-01 2 3.4355E+05 2.5585E+03 2.5154E+03 0.0000E+00 2.5154E+03 0.0000E+00 0
1580.- 1600. 247 0.4956E-01 9 2.8060E+05 2.3945E+03 2.3527E+03 0.0000E+00 2.3527E+03 0.0000E+00 0
1600.- 1620. 235 0.4715E-01 3 2.2155E+05 2.0190E+03 1.9789E+03 0.0000E+00 1.9789E+03 0.0000E+00 0
1620.- 1640. 230 0.4615E-01 4 1.6376E+05 1.6873E+03 1.6489E+03 0.0000E+00 1.6489E+03 0.0000E+00 0
1640.- 1660. 194 0.3892E-01 5 1.1899E+05 1.2438E+03 1.2121E+03 0.0000E+00 1.2121E+03 0.0000E+00 0
1660.- 1680. 146 0.2929E-01 4 8.1383E+04 9.6993E+02 9.4559E+02 0.0000E+00 9.4559E+02 0.0000E+00 0
1680.- 1700. 115 0.2307E-01 4 5.0146E+04 6.1784E+02 5.9914E+02 0.0000E+00 5.9914E+02 0.0000E+00 0
1700.- 1720. 99 0.1986E-01 7 3.2046E+04 4.4329E+02 4.2795E+02 0.0000E+00 4.2795E+02 0.0000E+00 0
1720.- 1740. 46 0.9230E-02 21 1.6417E+04 2.2197E+02 2.1403E+02 0.0000E+00 2.1403E+02 0.0000E+00 0
1740.- 1760. 38 0.7624E-02 47 9.1147E+03 1.5804E+02 1.5219E+02 0.0000E+00 1.5219E+02 0.0000E+00 0
1760.- 1780. 21 0.4213E-02 125 4.2972E+03 7.7642E+01 7.4401E+01 0.0000E+00 7.4401E+01 0.0000E+00 0
1780.- 1800. 12 0.2408E-02 303 1.9234E+03 3.6182E+01 3.4504E+01 0.0000E+00 3.4504E+01 0.0000E+00 0
1800.- 1820. 4 0.8026E-03 509 6.3523E+02 1.0266E+01 9.7685E+00 0.0000E+00 9.7685E+00 0.0000E+00 0
1820.- 1840. 1 0.2006E-03 696 1.4214E+02 1.9488E+00 1.8457E+00 0.0000E+00 1.8457E+00 0.0000E+00 0
1840.- 1860. 1 0.2006E-03 870 3.7835E+01 1.2345E+00 1.1176E+00 0.0000E+00 1.1176E+00 0.0000E+00 0
1860.- 1880. 0 0.0000E+00 826 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1880.- 1900. 0 0.0000E+00 650 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1900.- 1920. 0 0.0000E+00 429 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1920.- 1940. 0 0.0000E+00 233 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1940.- 1960. 0 0.0000E+00 95 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1960.- 1980. 0 0.0000E+00 54 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
1980.- 2000. 0 0.0000E+00 21 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2000.- 2020. 0 0.0000E+00 13 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2120.- 2140. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2140.- SUT 0 0.0000E+00
4984 1.0000E+00 4984 1.1473E+08 1.7491E+05 1.7389E+05 3.0497E+04 1.4339E+05 2.2304E+04 462
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.3852E+05 4.5947E+02 1.4141E+02 3.1805E+02 8.6508E+05 7.8603E+02 3.7361E+02 4.1242E+02 1 7
20.- 40. 4.4147E+05 5.2451E+02 2.4686E+02 2.7765E+02 8.7106E+05 3.4321E+02 0.0000E+00 3.4321E+02 4 0
40.- 60. 4.4118E+05 4.2883E+02 8.2369E+01 3.4646E+02 8.7609E+05 3.7860E+02 5.7036E+01 3.2156E+02 1 1
60.- 80. 4.4644E+05 4.3668E+02 1.8312E+02 2.5356E+02 8.8127E+05 4.0793E+02 5.8054E+01 3.4988E+02 2 1
80.- 100. 4.4941E+05 8.3390E+02 6.0171E+02 2.3219E+02 8.8363E+05 8.4298E+02 5.1046E+02 3.3253E+02 3 3
100.- 120. 4.4229E+05 2.4416E+02 0.0000E+00 2.4416E+02 8.9828E+05 5.6605E+02 1.6838E+02 3.9767E+02 0 2
120.- 140. 4.5160E+05 5.2839E+02 2.6229E+02 2.6610E+02 8.9867E+05 9.6419E+02 6.0332E+02 3.6087E+02 4 4
140.- 160. 4.5477E+05 3.3509E+02 9.9501E+01 2.3558E+02 9.0499E+05 3.4641E+02 0.0000E+00 3.4641E+02 2 0
160.- 180. 4.5458E+05 3.9368E+02 1.1756E+02 2.7611E+02 9.1200E+05 4.4047E+02 7.3688E+01 3.6678E+02 3 1
180.- 200. 4.6036E+05 4.3482E+02 1.5690E+02 2.7793E+02 9.1876E+05 3.8367E+02 0.0000E+00 3.8367E+02 3 0
200.- 220. 4.6279E+05 4.2118E+02 7.1643E+01 3.4954E+02 9.2225E+05 9.6798E+02 5.5188E+02 4.1610E+02 1 5
220.- 240. 4.6748E+05 6.0304E+02 3.4609E+02 2.5695E+02 9.3395E+05 5.1986E+02 0.0000E+00 5.1986E+02 2 0
240.- 260. 4.7080E+05 3.7976E+02 1.3361E+02 2.4615E+02 9.3340E+05 6.9410E+02 3.0655E+02 3.8755E+02 1 3
260.- 280. 4.7300E+05 4.8718E+02 2.8195E+02 2.0523E+02 9.4382E+05 5.1276E+02 1.1138E+02 4.0138E+02 4 3
280.- 300. 4.8582E+05 9.0106E+02 5.6659E+02 3.3446E+02 9.5587E+05 1.1492E+03 6.8761E+02 4.6161E+02 4 6
300.- 320. 4.8947E+05 4.1977E+02 9.2115E+01 3.2766E+02 9.6955E+05 5.7610E+02 1.7386E+02 4.0224E+02 2 3
320.- 340. 4.8337E+05 3.5052E+02 4.3307E+01 3.0721E+02 9.5803E+05 4.8431E+02 1.5595E+02 3.2837E+02 1 3
340.- 360. 4.8144E+05 4.9441E+02 1.2870E+02 3.6572E+02 9.7031E+05 8.3212E+02 4.2795E+02 4.0417E+02 2 7
360.- 380. 4.9103E+05 5.5673E+02 2.3197E+02 3.2476E+02 9.7385E+05 5.4004E+02 4.5837E+01 4.9420E+02 2 1
380.- 400. 4.9245E+05 2.5722E+02 0.0000E+00 2.5722E+02 9.8021E+05 9.0862E+02 4.4246E+02 4.6615E+02 0 4
400.- 420. 5.2378E+04 4.6756E+01 0.0000E+00 4.6756E+01 1.0773E+05 5.3070E+01 0.0000E+00 5.3070E+01 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
9.3306E+06 9.5372E+03 3.7877E+03 5.7494E+03 1.8559E+07 1.2698E+04 4.7480E+03 7.9497E+03 42 54
DAMAGE IN LAYER 1 : 2.2137E+04
DAMAGE IN LAYER 2 : 3.3817E+04
DAMAGE IN LAYER 3 : 2.2342E+04
DAMAGE IN LAYER 4 : 9.5597E+04
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 3.2000E-03 ENERGY REFL.COEF.= 1.1288E-03 REL.MEAN ENERGY = 3.5276E-01 MEAN ENERGY = 8.1134E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 8.1134E+03 3.5450E+07 5.0353E-01 2.5820E+00 5.9540E+03 1.4885E+03 1.1147E+07 3.0434E-01
PATHLENGTH 1.0126E+03 1.5666E+05 -1.5891E-01 2.6014E+00 3.9580E+02 9.8949E+01 4.9560E+04 3.0580E-01
ELASTIC LOSS 2.7282E+02 9.6259E+03 9.8112E+01 6.1320E+00
INEL. LOSS 1.4466E+04 3.3028E+07 5.7470E+03 3.5919E+02
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 8.1134E+03 1.0128E+08 1.5032E+12 2.5028E+16 4.4934E+20 8.4611E+24
LOGENERGY 3.6402E+00 1.3693E+01 5.2652E+01 2.0549E+02 8.1040E+02 3.2207E+03
PATHLENGTH 1.0126E+03 1.1821E+06 1.5044E+09 2.0393E+12 2.9001E+15 4.2759E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 1 2 0 0 0 1 0 3 2 1 0 0 0 3 0 3
0.000 0.000 0.000 0.000 1.250 2.500 0.000 0.000 0.000 1.250 0.000 3.750 2.500 1.250 0.000 0.000 0.000 3.750 0.000 3.750
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E23000.rge
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DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 0
90.0000 0
110.0000 0
130.0000 0
150.0000 1
170.0000 1
190.0000 0
210.0000 0
230.0000 3
250.0000 0
270.0000 0
290.0000 1
310.0000 0
330.0000 0
350.0000 0
370.0000 2
390.0000 2
410.0000 1
430.0000 3
450.0000 6
470.0000 2
490.0000 3
510.0000 7
530.0000 3
550.0000 4
570.0000 5
590.0000 9
610.0000 6
630.0000 7
650.0000 4
670.0000 11
690.0000 11
710.0000 6
730.0000 9
750.0000 5
770.0000 4
790.0000 16
810.0000 8
830.0000 13
850.0000 14
870.0000 12
890.0000 11
910.0000 16
930.0000 12
950.0000 13
970.0000 21
990.0000 18
1010.0000 30
1030.0000 33
1050.0000 22
1070.0000 24
1090.0000 40
1110.0000 36
1130.0000 50
1150.0000 51
1170.0000 64
1190.0000 59
1210.0000 81
1230.0000 72
1250.0000 87
1270.0000 81
1290.0000 107
1310.0000 104
1330.0000 119
1350.0000 131
1370.0000 141
1390.0000 166
1410.0000 176
1430.0000 179
1450.0000 196
1470.0000 208
1490.0000 209
1510.0000 205
1530.0000 215
1550.0000 200
1570.0000 238
1590.0000 247
1610.0000 235
1630.0000 230
1650.0000 194
1670.0000 146
1690.0000 115
1710.0000 99
1730.0000 46
1750.0000 38
1770.0000 21
1790.0000 12
1810.0000 4
1830.0000 1
1850.0000 1
1870.0000 0
1890.0000 0
1910.0000 0
1930.0000 0
1950.0000 0
1970.0000 0
1990.0000 0
2010.0000 0
2030.0000 0
2050.0000 0
2070.0000 0
2090.0000 0
2110.0000 0
2130.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.inp
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1 0.1134289259 25000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:46
End: 12.Jun. 2026 16:18:50
Simulation needed for 5000 muons 4 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 25000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
64805 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.3754E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.3755E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.2292E+02 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.2401E+02 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4992 ENERGY=0.1248E+09 EV
BACKSCATTERED PARTICLES= 8 ENERGY=0.9085E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 10 10
IMPLANTED PARTICLES (LAYER 2)= 60 60
IMPLANTED PARTICLES (LAYER 3)= 104 104
IMPLANTED PARTICLES (LAYER 4)= 4818 4818
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 822.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.097
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.576
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 1.5992E+03 6.7094E+04 -1.7183E+00 7.1916E+00 2.5903E+02 3.6661E+00 2.3629E+03 6.0944E-02
SPREAD 5.5972E+02 8.6105E+04 5.2523E-01 2.8124E+00 2.9344E+02 4.1531E+00 1.6407E+03 2.7958E-02
PATHLENGTH 2.0457E+03 4.2972E+03 -2.3047E+00 1.8505E+01 6.5553E+01 9.2780E-01 2.5446E+02 2.2299E-01
ELASTIC LOSS 3.5568E+01 6.6675E+02 2.5822E+01 5.1726E-03
INEL. LOSS 2.4967E+04 2.0382E+05 4.5146E+02 9.0438E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 4.3514E-02 9.8968E-01 1.6171E+02 5.0849E+04 9.9483E-01 4.9067E-04 1.1007E-01 2.8806E+01
WEAK EL.LOSS 2.4324E-04 1.4463E-06 1.0100E+01 1.7265E+02 1.2026E-03 5.9315E-07 9.3459E-09 1.0227E-01
INELAST.LOSS 3.0346E+01 8.3511E+01 -1.3898E+00 4.9173E+00 9.1385E+00 4.5072E-03 8.1522E-02 9.3608E-04
SUBTHR.LOSS 3.5861E-02 1.8050E-01 3.3900E+01 1.5433E+03 4.2486E-01 2.0956E-04 3.4965E-03 2.7342E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 1.5992E+03 2.6247E+06 4.3822E+09 7.4121E+12 1.2669E+16 2.1844E+19
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 0 0.0000E+00 0 1.2593E+06 9.4482E+02 9.4418E+02 3.3015E+02 6.1403E+02 2.3898E+02 3
20.- 40. 0 0.0000E+00 0 1.2695E+06 1.1423E+03 1.1416E+03 5.2695E+02 6.1460E+02 3.8743E+02 5
40.- 60. 1 0.2003E-03 0 1.2797E+06 8.4808E+02 8.4699E+02 2.5107E+02 5.9592E+02 1.7222E+02 2
60.- 80. 0 0.0000E+00 0 1.2815E+06 1.3424E+03 1.3417E+03 6.3597E+02 7.0577E+02 4.4909E+02 5
80.- 100. 0 0.0000E+00 0 1.2780E+06 1.1437E+03 1.1431E+03 6.1306E+02 5.3000E+02 4.3033E+02 5
100.- 120. 1 0.2003E-03 0 1.2886E+06 1.1515E+03 1.1503E+03 6.0407E+02 5.4621E+02 4.3604E+02 7
120.- 140. 0 0.0000E+00 0 1.2949E+06 5.7178E+02 5.7107E+02 3.3482E+01 5.3759E+02 2.5406E+01 1
140.- 160. 0 0.0000E+00 0 1.3038E+06 1.0502E+03 1.0495E+03 5.1911E+02 5.3037E+02 3.5271E+02 3
160.- 180. 1 0.2003E-03 0 1.3162E+06 7.9295E+02 7.9173E+02 1.5322E+02 6.3850E+02 1.1063E+02 2
180.- 200. 2 0.4006E-03 0 1.3152E+06 7.3434E+02 7.3305E+02 1.4383E+02 5.8922E+02 1.0805E+02 3
200.- 220. 0 0.0000E+00 0 1.3213E+06 9.2138E+02 9.1998E+02 2.9130E+02 6.2868E+02 2.1200E+02 4
220.- 240. 3 0.6010E-03 0 1.3318E+06 8.2997E+02 8.2846E+02 2.0863E+02 6.1983E+02 1.5437E+02 3
240.- 260. 0 0.0000E+00 0 1.3387E+06 1.1771E+03 1.1762E+03 5.9903E+02 5.7712E+02 4.0998E+02 6
260.- 280. 1 0.2003E-03 0 1.3483E+06 1.6254E+03 1.6242E+03 9.6597E+02 6.5824E+02 6.0505E+02 5
280.- 300. 0 0.0000E+00 0 1.3656E+06 8.7683E+02 8.7604E+02 1.8277E+02 6.9326E+02 1.3510E+02 3
300.- 320. 1 0.2003E-03 0 1.3632E+06 7.2862E+02 7.2738E+02 7.2964E+01 6.5442E+02 5.5126E+01 2
320.- 340. 0 0.0000E+00 0 1.3752E+06 1.2372E+03 1.2365E+03 5.4822E+02 6.8823E+02 3.9460E+02 6
340.- 360. 0 0.0000E+00 0 1.3844E+06 9.7675E+02 9.7598E+02 2.5241E+02 7.2357E+02 1.8119E+02 3
360.- 380. 0 0.0000E+00 0 1.3992E+06 9.7093E+02 9.7013E+02 3.4673E+02 6.2340E+02 2.6253E+02 8
380.- 400. 0 0.0000E+00 0 1.4089E+06 1.0859E+03 1.0850E+03 4.3996E+02 6.4503E+02 3.2175E+02 6
400.- 420. 3 0.6010E-03 0 1.9798E+06 1.8573E+03 1.8535E+03 7.0780E+02 1.1457E+03 5.0422E+02 9
420.- 440. 2 0.4006E-03 0 2.0490E+06 1.6387E+03 1.6353E+03 5.2845E+02 1.1068E+03 3.8934E+02 7
440.- 460. 7 0.1402E-02 0 2.0718E+06 1.4592E+03 1.4530E+03 4.5667E+02 9.9630E+02 3.3543E+02 7
460.- 480. 3 0.6010E-03 0 2.0811E+06 1.5393E+03 1.5347E+03 4.4223E+02 1.0924E+03 3.1412E+02 5
480.- 500. 2 0.4006E-03 0 2.1079E+06 1.6840E+03 1.6805E+03 3.5935E+02 1.3211E+03 2.5984E+02 3
500.- 520. 2 0.4006E-03 0 2.1171E+06 1.7857E+03 1.7815E+03 5.9420E+02 1.1873E+03 4.3445E+02 8
520.- 540. 5 0.1002E-02 0 2.1256E+06 1.5152E+03 1.5108E+03 1.4262E+02 1.3682E+03 1.0684E+02 2
540.- 560. 1 0.2003E-03 0 2.1510E+06 1.5715E+03 1.5677E+03 3.6977E+02 1.1980E+03 2.7579E+02 5
560.- 580. 2 0.4006E-03 0 2.1795E+06 1.9212E+03 1.9174E+03 5.5121E+02 1.3662E+03 3.9156E+02 6
580.- 600. 2 0.4006E-03 0 2.1969E+06 1.5935E+03 1.5893E+03 2.4877E+02 1.3406E+03 1.8500E+02 5
600.- 620. 4 0.8013E-03 0 2.2324E+06 1.9645E+03 1.9590E+03 4.4962E+02 1.5094E+03 3.2955E+02 6
620.- 640. 9 0.1803E-02 0 2.2444E+06 2.2922E+03 2.2843E+03 7.7651E+02 1.5078E+03 5.3929E+02 7
640.- 660. 6 0.1202E-02 0 2.2605E+06 2.7631E+03 2.7549E+03 1.2419E+03 1.5130E+03 9.2117E+02 17
660.- 680. 9 0.1803E-02 0 2.2913E+06 2.0336E+03 2.0258E+03 4.9323E+02 1.5325E+03 3.5743E+02 7
680.- 700. 3 0.6010E-03 0 2.3076E+06 1.8027E+03 1.7964E+03 1.8895E+02 1.6074E+03 1.4329E+02 4
700.- 720. 2 0.4006E-03 0 1.4107E+06 1.2421E+03 1.2409E+03 3.3831E+02 9.0264E+02 2.4400E+02 4
720.- 740. 3 0.6010E-03 0 1.3353E+06 1.1775E+03 1.1763E+03 3.7732E+02 7.9901E+02 2.7822E+02 6
740.- 760. 2 0.4006E-03 0 1.3368E+06 1.3024E+03 1.3012E+03 4.5564E+02 8.4554E+02 3.4974E+02 7
760.- 780. 7 0.1402E-02 0 1.3398E+06 1.2065E+03 1.2047E+03 3.2494E+02 8.7974E+02 2.4667E+02 5
780.- 800. 6 0.1202E-02 0 1.3498E+06 1.4354E+03 1.4335E+03 6.0952E+02 8.2401E+02 4.3619E+02 7
800.- 820. 5 0.1002E-02 0 1.3615E+06 9.3108E+02 9.2920E+02 8.0625E+01 8.4857E+02 6.3880E+01 2
820.- 840. 11 0.2204E-02 0 1.3707E+06 1.5545E+03 1.5521E+03 5.3721E+02 1.0149E+03 4.1546E+02 9
840.- 860. 7 0.1402E-02 0 1.3623E+06 1.3295E+03 1.3272E+03 2.7013E+02 1.0571E+03 2.0803E+02 5
860.- 880. 7 0.1402E-02 0 1.3724E+06 1.0330E+03 1.0309E+03 1.7064E+02 8.6027E+02 1.3290E+02 4
880.- 900. 6 0.1202E-02 0 1.3772E+06 1.2891E+03 1.2873E+03 3.2552E+02 9.6178E+02 2.3676E+02 5
900.- 920. 8 0.1603E-02 0 1.3825E+06 1.3322E+03 1.3298E+03 2.0563E+02 1.1242E+03 1.6053E+02 4
920.- 940. 8 0.1603E-02 0 1.3820E+06 1.4346E+03 1.4316E+03 2.4285E+02 1.1887E+03 1.8853E+02 4
940.- 960. 8 0.1603E-02 0 1.3893E+06 1.3090E+03 1.3065E+03 4.0821E+02 8.9832E+02 2.9516E+02 7
960.- 980. 14 0.2804E-02 0 1.3771E+06 1.6369E+03 1.6333E+03 4.4745E+02 1.1858E+03 3.4092E+02 9
980.- 1000. 10 0.2003E-02 0 1.3996E+06 1.5207E+03 1.5174E+03 2.3733E+02 1.2801E+03 1.8674E+02 5
1000.- 1020. 12 0.2404E-02 0 1.4055E+06 1.6911E+03 1.6882E+03 5.0390E+02 1.1843E+03 3.8327E+02 10
1020.- 1040. 13 0.2604E-02 0 1.4017E+06 1.4515E+03 1.4486E+03 2.1481E+02 1.2338E+03 1.6011E+02 3
1040.- 1060. 23 0.4607E-02 0 1.4151E+06 1.6858E+03 1.6815E+03 2.2183E+02 1.4597E+03 1.6750E+02 4
1060.- 1080. 17 0.3405E-02 0 1.4325E+06 1.4942E+03 1.4905E+03 2.3439E+02 1.2561E+03 1.7722E+02 5
1080.- 1100. 14 0.2804E-02 0 1.4405E+06 1.7696E+03 1.7661E+03 3.2793E+02 1.4382E+03 2.5002E+02 7
1100.- 1120. 30 0.6010E-02 0 1.4423E+06 2.2699E+03 2.2648E+03 7.0034E+02 1.5645E+03 5.1975E+02 10
1120.- 1140. 21 0.4207E-02 0 1.4342E+06 1.7147E+03 1.7097E+03 2.5447E+02 1.4553E+03 1.9477E+02 6
1140.- 1160. 31 0.6210E-02 0 1.4348E+06 2.2584E+03 2.2528E+03 6.3351E+02 1.6192E+03 4.7575E+02 11
1160.- 1180. 26 0.5208E-02 0 1.4465E+06 2.3430E+03 2.3375E+03 7.1760E+02 1.6199E+03 5.3264E+02 10
1180.- 1200. 28 0.5609E-02 0 1.4450E+06 1.9545E+03 1.9493E+03 3.7158E+02 1.5777E+03 2.8131E+02 7
1200.- 1220. 27 0.5409E-02 0 1.4503E+06 2.0924E+03 2.0863E+03 2.7202E+02 1.8143E+03 2.0321E+02 4
1220.- 1240. 30 0.6010E-02 0 1.4396E+06 2.1005E+03 2.0943E+03 2.8421E+02 1.8101E+03 2.1493E+02 5
1240.- 1260. 24 0.4808E-02 0 1.4323E+06 2.6142E+03 2.6086E+03 7.5342E+02 1.8552E+03 5.6882E+02 14
1260.- 1280. 49 0.9816E-02 0 1.4299E+06 2.3963E+03 2.3879E+03 5.3002E+02 1.8579E+03 4.0200E+02 11
1280.- 1300. 35 0.7011E-02 0 1.4200E+06 2.7059E+03 2.6980E+03 6.5083E+02 2.0471E+03 4.9443E+02 13
1300.- 1320. 41 0.8213E-02 0 1.4075E+06 2.8169E+03 2.8082E+03 6.6582E+02 2.1424E+03 5.0629E+02 14
1320.- 1340. 46 0.9215E-02 0 1.3888E+06 2.4669E+03 2.4577E+03 3.0683E+02 2.1509E+03 2.3477E+02 7
1340.- 1360. 56 0.1122E-01 0 1.3712E+06 2.8696E+03 2.8589E+03 5.2100E+02 2.3379E+03 3.9440E+02 10
1360.- 1380. 61 0.1222E-01 0 1.3361E+06 2.7399E+03 2.7282E+03 4.5463E+02 2.2736E+03 3.4503E+02 9
1380.- 1400. 69 0.1382E-01 0 1.3294E+06 2.8838E+03 2.8706E+03 4.2909E+02 2.4415E+03 3.2449E+02 8
1400.- 1420. 82 0.1643E-01 0 1.2770E+06 2.7996E+03 2.7844E+03 3.5553E+02 2.4289E+03 2.7146E+02 8
1420.- 1440. 74 0.1482E-01 0 1.2423E+06 2.9708E+03 2.9566E+03 2.9034E+02 2.6663E+03 2.2240E+02 7
1440.- 1460. 93 0.1863E-01 1 1.2243E+06 3.1812E+03 3.1635E+03 3.1179E+02 2.8517E+03 2.3609E+02 6
1460.- 1480. 90 0.1803E-01 0 1.1969E+06 3.1426E+03 3.1240E+03 1.2173E+02 3.0023E+03 9.3447E+01 3
1480.- 1500. 101 0.2023E-01 2 1.1543E+06 3.2825E+03 3.2638E+03 1.1523E+02 3.1485E+03 8.8731E+01 3
1500.- 1520. 123 0.2464E-01 2 1.0831E+06 3.3498E+03 3.3281E+03 2.8516E+02 3.0429E+03 2.2030E+02 8
1520.- 1540. 128 0.2564E-01 4 1.0397E+06 3.1440E+03 3.1198E+03 1.4056E+02 2.9793E+03 1.0871E+02 4
1540.- 1560. 122 0.2444E-01 2 1.0033E+06 3.2242E+03 3.2016E+03 1.4691E+02 3.0546E+03 1.1338E+02 4
1560.- 1580. 141 0.2825E-01 1 9.3041E+05 3.2101E+03 3.1832E+03 1.2475E+02 3.0584E+03 9.6975E+01 4
1580.- 1600. 162 0.3245E-01 2 8.8349E+05 3.1504E+03 3.1212E+03 3.2091E+01 3.0891E+03 2.4916E+01 1
1600.- 1620. 174 0.3486E-01 2 8.3948E+05 3.6479E+03 3.6170E+03 1.0658E+02 3.5104E+03 8.2382E+01 3
1620.- 1640. 155 0.3105E-01 3 7.6882E+05 3.4576E+03 3.4267E+03 0.0000E+00 3.4267E+03 0.0000E+00 0
1640.- 1660. 198 0.3966E-01 4 6.8970E+05 3.3604E+03 3.3256E+03 6.3143E+01 3.2624E+03 4.9057E+01 2
1660.- 1680. 196 0.3926E-01 3 6.3414E+05 3.3222E+03 3.2867E+03 3.2237E+01 3.2545E+03 2.5024E+01 1
1680.- 1700. 200 0.4006E-01 5 5.8100E+05 3.3575E+03 3.3208E+03 0.0000E+00 3.3208E+03 0.0000E+00 0
1700.- 1720. 247 0.4948E-01 1 5.0742E+05 3.2416E+03 3.1990E+03 0.0000E+00 3.1990E+03 0.0000E+00 0
1720.- 1740. 251 0.5028E-01 4 4.4629E+05 3.0181E+03 2.9742E+03 0.0000E+00 2.9742E+03 0.0000E+00 0
1740.- 1760. 226 0.4527E-01 5 3.6251E+05 2.6575E+03 2.6171E+03 0.0000E+00 2.6171E+03 0.0000E+00 0
1760.- 1780. 209 0.4187E-01 3 2.9034E+05 2.1747E+03 2.1377E+03 0.0000E+00 2.1377E+03 0.0000E+00 0
1780.- 1800. 231 0.4627E-01 3 2.4133E+05 2.2262E+03 2.1859E+03 0.0000E+00 2.1859E+03 0.0000E+00 0
1800.- 1820. 218 0.4367E-01 2 1.8687E+05 1.7536E+03 1.7174E+03 0.0000E+00 1.7174E+03 0.0000E+00 0
1820.- 1840. 163 0.3265E-01 5 1.3787E+05 1.4028E+03 1.3740E+03 0.0000E+00 1.3740E+03 0.0000E+00 0
1840.- 1860. 164 0.3285E-01 4 9.6478E+04 1.0915E+03 1.0653E+03 0.0000E+00 1.0653E+03 0.0000E+00 0
1860.- 1880. 126 0.2524E-01 3 6.3290E+04 7.6346E+02 7.4270E+02 0.0000E+00 7.4270E+02 0.0000E+00 0
1880.- 1900. 114 0.2284E-01 9 4.1405E+04 5.4293E+02 5.2539E+02 0.0000E+00 5.2539E+02 0.0000E+00 0
1900.- 1920. 66 0.1322E-01 23 2.4236E+04 3.4670E+02 3.3567E+02 0.0000E+00 3.3567E+02 0.0000E+00 0
1920.- 1940. 46 0.9215E-02 51 1.4643E+04 1.9707E+02 1.9019E+02 0.0000E+00 1.9019E+02 0.0000E+00 0
1940.- 1960. 28 0.5609E-02 108 7.3434E+03 9.6429E+01 9.2201E+01 0.0000E+00 9.2201E+01 0.0000E+00 0
1960.- 1980. 23 0.4607E-02 223 4.5240E+03 7.9025E+01 7.5763E+01 0.0000E+00 7.5763E+01 0.0000E+00 0
1980.- 2000. 9 0.1803E-02 354 2.7142E+03 5.6940E+01 5.4759E+01 0.0000E+00 5.4759E+01 0.0000E+00 0
2000.- 2020. 4 0.8013E-03 578 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2020.- 2040. 0 0.0000E+00 706 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2040.- 2060. 0 0.0000E+00 846 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2060.- 2080. 1 0.2003E-03 712 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2080.- 2100. 0 0.0000E+00 551 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2100.- 2120. 0 0.0000E+00 358 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2120.- 2140. 0 0.0000E+00 209 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2140.- 2160. 0 0.0000E+00 113 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2160.- 2180. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2180.- 2200. 0 0.0000E+00 27 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2200.- 2220. 0 0.0000E+00 8 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2220.- 2240. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2240.- 2260. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2260.- 2280. 0 0.0000E+00 2 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2280.- 2300. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2300.- 2320. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2320.- 2340. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2340.- 2360. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2360.- 2380. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2380.- 2400. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2400.- 2420. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
2420.- SUT 0 0.0000E+00
4992 1.0000E+00 4992 1.2474E+08 1.7988E+05 1.7888E+05 3.1476E+04 1.4740E+05 2.3177E+04 485
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.2288E+05 4.6114E+02 2.3118E+02 2.2996E+02 8.3643E+05 4.8304E+02 9.8964E+01 3.8408E+02 2 1
20.- 40. 4.2478E+05 7.5716E+02 4.8167E+02 2.7549E+02 8.4467E+05 3.8439E+02 4.5282E+01 3.3911E+02 4 1
40.- 60. 4.2832E+05 2.3935E+02 0.0000E+00 2.3935E+02 8.5133E+05 6.0764E+02 2.5107E+02 3.5657E+02 0 2
60.- 80. 4.2235E+05 6.3492E+02 3.7223E+02 2.6269E+02 8.5920E+05 7.0681E+02 2.6374E+02 4.4307E+02 3 2
80.- 100. 4.2536E+05 4.1367E+02 1.8192E+02 2.3176E+02 8.5261E+05 7.2939E+02 4.3114E+02 2.9824E+02 2 3
100.- 120. 4.3455E+05 6.5558E+02 3.7127E+02 2.8431E+02 8.5400E+05 4.9471E+02 2.3280E+02 2.6190E+02 3 4
120.- 140. 4.2863E+05 2.0219E+02 0.0000E+00 2.0219E+02 8.6631E+05 3.6888E+02 3.3482E+01 3.3540E+02 0 1
140.- 160. 4.3553E+05 3.0239E+02 8.3304E+01 2.1909E+02 8.6826E+05 7.4709E+02 4.3581E+02 3.1128E+02 1 2
160.- 180. 4.4068E+05 2.3628E+02 0.0000E+00 2.3628E+02 8.7550E+05 5.5545E+02 1.5322E+02 4.0222E+02 0 2
180.- 200. 4.3860E+05 2.5110E+02 3.9912E+01 2.1119E+02 8.7663E+05 4.8195E+02 1.0392E+02 3.7803E+02 1 2
200.- 220. 4.4349E+05 3.9103E+02 9.3955E+01 2.9708E+02 8.7784E+05 5.2895E+02 1.9735E+02 3.3160E+02 2 2
220.- 240. 4.4277E+05 4.2209E+02 1.3785E+02 2.8424E+02 8.8903E+05 4.0637E+02 7.0786E+01 3.3559E+02 1 2
240.- 260. 4.4542E+05 4.1587E+02 1.3177E+02 2.8409E+02 8.9324E+05 7.6029E+02 4.6726E+02 2.9303E+02 3 3
260.- 280. 4.4640E+05 3.1590E+02 8.3316E+01 2.3258E+02 9.0192E+05 1.3083E+03 8.8265E+02 4.2566E+02 2 3
280.- 300. 4.5204E+05 3.7808E+02 5.0817E+01 3.2727E+02 9.1357E+05 4.9795E+02 1.3196E+02 3.6600E+02 1 2
300.- 320. 4.5213E+05 2.2009E+02 0.0000E+00 2.2009E+02 9.1106E+05 5.0729E+02 7.2964E+01 4.3433E+02 0 2
320.- 340. 4.6311E+05 5.8529E+02 2.8281E+02 3.0247E+02 9.1205E+05 6.5117E+02 2.6541E+02 3.8576E+02 2 4
340.- 360. 4.6010E+05 3.6145E+02 3.9078E+01 3.2237E+02 9.2426E+05 6.1453E+02 2.1333E+02 4.0120E+02 1 2
360.- 380. 4.6527E+05 3.5753E+02 1.2426E+02 2.3327E+02 9.3394E+05 6.1259E+02 2.2247E+02 3.9013E+02 3 5
380.- 400. 4.6614E+05 6.2227E+02 3.1216E+02 3.1011E+02 9.4214E+05 4.6203E+02 1.2780E+02 3.3423E+02 3 3
400.- 420. 5.1126E+04 4.5747E+01 0.0000E+00 4.5747E+01 1.0328E+05 4.7386E+01 0.0000E+00 4.7386E+01 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.8897E+06 8.2691E+03 3.0175E+03 5.2516E+03 1.7787E+07 1.1956E+04 4.7014E+03 7.2548E+03 34 48
DAMAGE IN LAYER 1 : 2.0133E+04
DAMAGE IN LAYER 2 : 2.7344E+04
DAMAGE IN LAYER 3 : 1.9702E+04
DAMAGE IN LAYER 4 : 1.1170E+05
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.6000E-03 ENERGY REFL.COEF.= 7.2681E-04 REL.MEAN ENERGY = 4.5426E-01 MEAN ENERGY = 1.1356E+04
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.1356E+04 6.7202E+07 -1.7778E-01 1.5038E+00 8.1977E+03 2.8983E+03 1.6864E+07 5.6742E-01
PATHLENGTH 9.8231E+02 3.1163E+05 1.5290E-01 1.6489E+00 5.5824E+02 1.9737E+02 8.8751E+04 5.1824E-01
ELASTIC LOSS 2.9040E+02 1.5216E+04 1.2335E+02 1.5419E+01
INEL. LOSS 1.3480E+04 6.4376E+07 8.0234E+03 1.0029E+03
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.1356E+04 1.9617E+08 3.6562E+12 7.0977E+16 1.4163E+21 2.8825E+25
LOGENERGY 3.7126E+00 1.4341E+01 5.6988E+01 2.3090E+02 9.4789E+02 3.9261E+03
PATHLENGTH 9.8231E+02 1.2766E+06 1.8928E+09 3.0000E+12 4.9371E+15 8.3131E+18
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 0 1 0 1 1 2 0 0 0 0 1 0 2 0 0
0.000 0.000 0.000 0.000 0.000 0.000 2.500 0.000 2.500 2.500 5.000 0.000 0.000 0.000 0.000 2.500 0.000 5.000 0.000 0.000
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E25000.rge
+122
View File
@@ -0,0 +1,122 @@
DEPTH PARTICLES
10.0000 0
30.0000 0
50.0000 1
70.0000 0
90.0000 0
110.0000 1
130.0000 0
150.0000 0
170.0000 1
190.0000 2
210.0000 0
230.0000 3
250.0000 0
270.0000 1
290.0000 0
310.0000 1
330.0000 0
350.0000 0
370.0000 0
390.0000 0
410.0000 3
430.0000 2
450.0000 7
470.0000 3
490.0000 2
510.0000 2
530.0000 5
550.0000 1
570.0000 2
590.0000 2
610.0000 4
630.0000 9
650.0000 6
670.0000 9
690.0000 3
710.0000 2
730.0000 3
750.0000 2
770.0000 7
790.0000 6
810.0000 5
830.0000 11
850.0000 7
870.0000 7
890.0000 6
910.0000 8
930.0000 8
950.0000 8
970.0000 14
990.0000 10
1010.0000 12
1030.0000 13
1050.0000 23
1070.0000 17
1090.0000 14
1110.0000 30
1130.0000 21
1150.0000 31
1170.0000 26
1190.0000 28
1210.0000 27
1230.0000 30
1250.0000 24
1270.0000 49
1290.0000 35
1310.0000 41
1330.0000 46
1350.0000 56
1370.0000 61
1390.0000 69
1410.0000 82
1430.0000 74
1450.0000 93
1470.0000 90
1490.0000 101
1510.0000 123
1530.0000 128
1550.0000 122
1570.0000 141
1590.0000 162
1610.0000 174
1630.0000 155
1650.0000 198
1670.0000 196
1690.0000 200
1710.0000 247
1730.0000 251
1750.0000 226
1770.0000 209
1790.0000 231
1810.0000 218
1830.0000 163
1850.0000 164
1870.0000 126
1890.0000 114
1910.0000 66
1930.0000 46
1950.0000 28
1970.0000 23
1990.0000 9
2010.0000 4
2030.0000 0
2050.0000 0
2070.0000 1
2090.0000 0
2110.0000 0
2130.0000 0
2150.0000 0
2170.0000 0
2190.0000 0
2210.0000 0
2230.0000 0
2250.0000 0
2270.0000 0
2290.0000 0
2310.0000 0
2330.0000 0
2350.0000 0
2370.0000 0
2390.0000 0
2410.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.inp
+51
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@@ -0,0 +1,51 @@
1 0.1134289259 3000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:21
End: 12.Jun. 2026 16:18:22
Simulation needed for 5000 muons 1 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 3000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
14536 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.4505E+01 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.4505E+01 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.2750E+01 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.2881E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4854 ENERGY=0.1456E+08 EV
BACKSCATTERED PARTICLES= 146 ENERGY=0.1146E+06 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 4844 4844
IMPLANTED PARTICLES (LAYER 2)= 10 10
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4854 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.0 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.014
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.974
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 2.1911E+02 5.6423E+03 -3.5288E-01 2.7145E+00 7.5116E+01 1.0782E+00 1.0604E+02 2.5784E-02
SPREAD 1.2808E+02 3.8939E+03 3.5418E-01 2.6737E+00 6.2402E+01 8.9566E-01 7.2308E+01 2.7206E-02
PATHLENGTH 4.2087E+02 1.2224E+03 -1.2559E-01 3.0294E+00 3.4963E+01 5.0183E-01 2.4994E+01 3.4238E-02
ELASTIC LOSS 2.1281E+01 8.0284E+01 8.9601E+00 1.8459E-03
INEL. LOSS 2.9744E+03 1.9424E+05 4.4072E+02 9.0796E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.1529E-01 5.4130E-01 2.5051E+01 1.0227E+03 7.3573E-01 7.6915E-04 1.8088E-02 8.4821E-01
WEAK EL.LOSS 2.7650E-03 3.2121E-05 3.0457E+00 1.2635E+01 5.6675E-03 5.9250E-06 1.1454E-07 6.0035E-03
INELAST.LOSS 1.6116E+01 7.8845E+01 -1.6392E-01 1.7925E+00 8.8795E+00 9.2828E-03 7.3376E-02 1.5409E-03
SUBTHR.LOSS 1.1242E-01 4.2764E-01 1.8812E+01 5.0998E+02 6.5395E-01 6.8368E-04 1.0087E-02 2.4078E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 2.1911E+02 5.3654E+04 1.4079E+07 3.8858E+09 1.1161E+12 3.3144E+14
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 20 0.4120E-02 0 1.3532E+06 4.0074E+03 3.9907E+03 4.5987E+02 3.5308E+03 3.5262E+02 12
20.- 40. 43 0.8859E-02 0 1.3654E+06 4.4215E+03 4.3922E+03 3.9148E+02 4.0008E+03 2.9877E+02 10
40.- 60. 61 0.1257E-01 0 1.3727E+06 5.1032E+03 5.0612E+03 3.6764E+02 4.6936E+03 2.7693E+02 9
60.- 80. 111 0.2287E-01 0 1.3404E+06 6.1479E+03 6.0869E+03 5.4373E+02 5.5431E+03 4.1051E+02 14
80.- 100. 131 0.2699E-01 0 1.3334E+06 6.8406E+03 6.7646E+03 2.8608E+02 6.4785E+03 2.1446E+02 7
100.- 120. 179 0.3688E-01 0 1.2965E+06 7.5280E+03 7.4262E+03 2.5338E+02 7.1729E+03 1.9208E+02 7
120.- 140. 224 0.4615E-01 0 1.2166E+06 8.0520E+03 7.9226E+03 1.0834E+02 7.8143E+03 8.1877E+01 3
140.- 160. 293 0.6036E-01 0 1.1200E+06 8.3508E+03 8.1942E+03 6.6053E+01 8.1281E+03 5.0149E+01 2
160.- 180. 332 0.6840E-01 0 1.0257E+06 9.3576E+03 9.1737E+03 9.4331E+01 9.0794E+03 7.1796E+01 3
180.- 200. 405 0.8344E-01 0 8.8701E+05 9.4281E+03 9.2037E+03 6.2290E+01 9.1415E+03 4.7432E+01 2
200.- 220. 475 0.9786E-01 0 7.4369E+05 8.9843E+03 8.7392E+03 0.0000E+00 8.7392E+03 0.0000E+00 0
220.- 240. 490 0.1009E+00 0 5.8136E+05 8.2585E+03 8.0027E+03 0.0000E+00 8.0027E+03 0.0000E+00 0
240.- 260. 535 0.1102E+00 0 4.4269E+05 7.2213E+03 6.9487E+03 0.0000E+00 6.9487E+03 0.0000E+00 0
260.- 280. 493 0.1016E+00 0 3.0282E+05 5.6119E+03 5.3727E+03 0.0000E+00 5.3727E+03 0.0000E+00 0
280.- 300. 389 0.8014E-01 2 1.7931E+05 3.9568E+03 3.7669E+03 0.0000E+00 3.7669E+03 0.0000E+00 0
300.- 320. 319 0.6572E-01 10 1.0215E+05 2.4546E+03 2.3072E+03 0.0000E+00 2.3072E+03 0.0000E+00 0
320.- 340. 185 0.3811E-01 51 5.1861E+04 1.3486E+03 1.2631E+03 0.0000E+00 1.2631E+03 0.0000E+00 0
340.- 360. 96 0.1978E-01 161 2.0326E+04 5.8743E+02 5.4486E+02 0.0000E+00 5.4486E+02 0.0000E+00 0
360.- 380. 49 0.1009E-01 371 7.1590E+03 2.3126E+02 2.1218E+02 0.0000E+00 2.1218E+02 0.0000E+00 0
380.- 400. 14 0.2884E-02 707 2.6273E+03 8.9300E+01 8.2164E+01 0.0000E+00 8.2164E+01 0.0000E+00 0
400.- 420. 8 0.1648E-02 1055 8.1529E+02 3.1390E+01 2.7741E+01 0.0000E+00 2.7741E+01 0.0000E+00 0
420.- 440. 2 0.4120E-03 1051 8.3977E+01 3.9977E+00 3.1384E+00 0.0000E+00 3.1384E+00 0.0000E+00 0
440.- 460. 0 0.0000E+00 827 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
460.- 480. 0 0.0000E+00 419 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
480.- 500. 0 0.0000E+00 157 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
500.- 520. 0 0.0000E+00 37 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 5 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- SUT 0 0.0000E+00
4854 1.0000E+00 4854 1.4746E+07 1.0802E+05 1.0549E+05 2.6332E+03 1.0285E+05 1.9966E+03 69
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 4.5096E+05 1.6181E+03 2.5264E+02 1.3654E+03 9.0228E+05 2.3726E+03 2.0723E+02 2.1654E+03 7 5
20.- 40. 4.5063E+05 1.5686E+03 1.5839E+02 1.4102E+03 9.1480E+05 2.8237E+03 2.3309E+02 2.5906E+03 4 6
40.- 60. 4.5668E+05 1.9845E+03 3.6532E+01 1.9480E+03 9.1606E+05 3.0767E+03 3.3111E+02 2.7456E+03 1 8
60.- 80. 4.4236E+05 2.1476E+03 6.3098E+01 2.0845E+03 8.9801E+05 3.9393E+03 4.8064E+02 3.4587E+03 2 12
80.- 100. 4.4342E+05 2.2979E+03 0.0000E+00 2.2979E+03 8.8994E+05 4.4667E+03 2.8608E+02 4.1806E+03 0 7
100.- 120. 4.3457E+05 2.4404E+03 3.0173E+01 2.4102E+03 8.6191E+05 4.9858E+03 2.2321E+02 4.7626E+03 1 6
120.- 140. 4.0252E+05 2.6772E+03 0.0000E+00 2.6772E+03 8.1404E+05 5.2454E+03 1.0834E+02 5.1370E+03 0 3
140.- 160. 3.7442E+05 2.6380E+03 0.0000E+00 2.6380E+03 7.4556E+05 5.5562E+03 6.6053E+01 5.4901E+03 0 2
160.- 180. 3.3633E+05 2.9161E+03 0.0000E+00 2.9161E+03 6.8934E+05 6.2577E+03 9.4331E+01 6.1633E+03 0 3
180.- 200. 2.9385E+05 2.9965E+03 0.0000E+00 2.9965E+03 5.9316E+05 6.2072E+03 6.2290E+01 6.1449E+03 0 2
200.- 220. 2.4626E+05 2.6820E+03 0.0000E+00 2.6820E+03 4.9742E+05 6.0572E+03 0.0000E+00 6.0572E+03 0 0
220.- 240. 1.9359E+05 2.4504E+03 0.0000E+00 2.4504E+03 3.8777E+05 5.5523E+03 0.0000E+00 5.5523E+03 0 0
240.- 260. 1.4563E+05 2.1083E+03 0.0000E+00 2.1083E+03 2.9706E+05 4.8403E+03 0.0000E+00 4.8403E+03 0 0
260.- 280. 1.0105E+05 1.5964E+03 0.0000E+00 1.5964E+03 2.0178E+05 3.7763E+03 0.0000E+00 3.7763E+03 0 0
280.- 300. 5.8979E+04 1.0649E+03 0.0000E+00 1.0649E+03 1.2033E+05 2.7020E+03 0.0000E+00 2.7020E+03 0 0
300.- 320. 3.4250E+04 6.8464E+02 0.0000E+00 6.8464E+02 6.7901E+04 1.6225E+03 0.0000E+00 1.6225E+03 0 0
320.- 340. 1.6934E+04 3.9054E+02 0.0000E+00 3.9054E+02 3.4927E+04 8.7260E+02 0.0000E+00 8.7260E+02 0 0
340.- 360. 6.5959E+03 1.4885E+02 0.0000E+00 1.4885E+02 1.3730E+04 3.9601E+02 0.0000E+00 3.9601E+02 0 0
360.- 380. 2.4091E+03 6.3007E+01 0.0000E+00 6.3007E+01 4.7499E+03 1.4918E+02 0.0000E+00 1.4918E+02 0 0
380.- 400. 8.5697E+02 2.0898E+01 0.0000E+00 2.0898E+01 1.7646E+03 6.0912E+01 0.0000E+00 6.0912E+01 0 0
400.- 420. 1.4502E+01 4.6452E-01 0.0000E+00 4.6452E-01 3.6690E+01 2.8592E-01 0.0000E+00 2.8592E-01 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
4.8923E+06 3.4495E+04 5.4083E+02 3.3955E+04 9.8526E+06 7.0961E+04 2.0924E+03 6.8868E+04 15 54
DAMAGE IN LAYER 1 : 1.0546E+05
DAMAGE IN LAYER 2 : 3.0879E+01
DAMAGE IN LAYER 3 : 0.0000E+00
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 2.9200E-02 ENERGY REFL.COEF.= 7.6433E-03 REL.MEAN ENERGY = 2.6176E-01 MEAN ENERGY = 7.8527E+02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 7.8527E+02 5.5837E+05 1.2974E+00 3.9271E+00 7.4724E+02 6.1842E+01 7.9061E+04 1.8712E-01
PATHLENGTH 2.3025E+02 1.0499E+04 -3.8989E-01 2.3947E+00 1.0246E+02 8.4800E+00 1.0262E+03 1.1744E-01
ELASTIC LOSS 3.2323E+01 1.8056E+02 1.3437E+01 9.2035E-02
INEL. LOSS 2.1078E+03 6.6738E+05 8.1693E+02 5.5954E+00
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 7.8527E+02 1.1750E+06 2.3410E+09 5.3708E+12 1.3392E+16 3.5362E+19
LOGENERGY 2.6618E+00 7.3480E+00 2.0859E+01 6.0573E+01 1.7926E+02 5.3917E+02
PATHLENGTH 2.3025E+02 6.3516E+04 1.9040E+07 6.0282E+09 1.9874E+12 6.7622E+14
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 0 0 3 5 7 3 7 7 10 5 9 14 13 20 11 19 12
0.000 0.000 0.137 0.000 0.000 0.411 0.685 0.959 0.411 0.959 0.959 1.370 0.685 1.233 1.918 1.781 2.740 1.507 2.603 1.644
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E3000.rge
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DEPTH PARTICLES
10.0000 20
30.0000 43
50.0000 61
70.0000 111
90.0000 131
110.0000 179
130.0000 224
150.0000 293
170.0000 332
190.0000 405
210.0000 475
230.0000 490
250.0000 535
270.0000 493
290.0000 389
310.0000 319
330.0000 185
350.0000 96
370.0000 49
390.0000 14
410.0000 8
430.0000 2
450.0000 0
470.0000 0
490.0000 0
510.0000 0
530.0000 0
550.0000 0
570.0000 0
590.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.inp
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1 0.1134289259 5000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:22
End: 12.Jun. 2026 16:18:23
Simulation needed for 5000 muons 1 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 5000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
19316 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.7508E+01 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.7509E+01 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.4584E+01 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.4802E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4920 ENERGY=0.2460E+08 EV
BACKSCATTERED PARTICLES= 80 ENERGY=0.8400E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 3599 3599
IMPLANTED PARTICLES (LAYER 2)= 1321 1321
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4920 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 243.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.033
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.193
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 3.3224E+02 8.2750E+03 -1.0013E+00 3.7492E+00 9.0967E+01 1.2969E+00 1.9561E+02 2.9301E-02
SPREAD 1.6694E+02 6.9639E+03 3.9222E-01 2.6291E+00 8.3450E+01 1.1897E+00 1.2672E+02 2.6209E-02
PATHLENGTH 5.5640E+02 8.1065E+02 1.2842E-01 2.9192E+00 2.8472E+01 4.0591E-01 1.6011E+01 3.3403E-02
ELASTIC LOSS 2.5512E+01 1.4038E+02 1.1848E+01 2.4082E-03
INEL. LOSS 4.9835E+03 1.9741E+05 4.4431E+02 9.0307E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 1.0404E-01 6.8689E-01 3.2860E+01 1.6800E+03 8.2879E-01 7.5058E-04 2.5490E-02 9.0274E-01
WEAK EL.LOSS 2.3258E-03 3.3676E-05 3.8212E+00 1.9544E+01 5.8031E-03 5.2555E-06 1.3133E-07 8.3062E-03
INELAST.LOSS 2.0365E+01 1.0433E+02 -3.8660E-01 1.8959E+00 1.0214E+01 9.2502E-03 8.9427E-02 1.3827E-03
SUBTHR.LOSS 9.8277E-02 4.2238E-01 2.0780E+01 6.0498E+02 6.4990E-01 5.8862E-04 9.4015E-03 2.1469E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 3.3224E+02 1.1866E+05 4.4168E+07 1.6920E+10 6.6248E+12 2.6395E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 9 0.1829E-02 0 1.5558E+06 2.9293E+03 2.9212E+03 4.6203E+02 2.4592E+03 3.4985E+02 11
20.- 40. 25 0.5081E-02 0 1.5684E+06 3.0607E+03 3.0449E+03 5.3077E+02 2.5142E+03 4.0033E+02 11
40.- 60. 24 0.4878E-02 0 1.5710E+06 3.3350E+03 3.3181E+03 6.2967E+02 2.6884E+03 4.7665E+02 14
60.- 80. 32 0.6504E-02 0 1.5510E+06 3.5631E+03 3.5423E+03 6.1828E+02 2.9240E+03 4.6488E+02 12
80.- 100. 33 0.6707E-02 0 1.5668E+06 3.9730E+03 3.9496E+03 5.4813E+02 3.4014E+03 4.2188E+02 15
100.- 120. 47 0.9553E-02 0 1.5187E+06 4.1202E+03 4.0934E+03 5.6060E+02 3.5328E+03 4.1820E+02 11
120.- 140. 46 0.9350E-02 0 1.4986E+06 4.6924E+03 4.6635E+03 7.8821E+02 3.8753E+03 5.9032E+02 17
140.- 160. 53 0.1077E-01 0 1.4718E+06 4.5396E+03 4.5018E+03 3.2927E+02 4.1725E+03 2.4958E+02 8
160.- 180. 90 0.1829E-01 0 1.4345E+06 5.1543E+03 5.1019E+03 5.5848E+02 4.5434E+03 4.1898E+02 12
180.- 200. 116 0.2358E-01 0 1.4056E+06 6.2486E+03 6.1828E+03 6.9230E+02 5.4905E+03 5.1881E+02 16
200.- 220. 125 0.2541E-01 0 1.3484E+06 6.6112E+03 6.5377E+03 4.7160E+02 6.0661E+03 3.5524E+02 12
220.- 240. 162 0.3293E-01 0 1.2749E+06 6.6966E+03 6.6061E+03 3.2253E+02 6.2836E+03 2.4378E+02 9
240.- 260. 184 0.3740E-01 0 1.2135E+06 7.6171E+03 7.5105E+03 1.8145E+02 7.3291E+03 1.3708E+02 5
260.- 280. 243 0.4939E-01 0 1.1200E+06 7.6776E+03 7.5447E+03 7.3985E+01 7.4708E+03 5.5849E+01 2
280.- 300. 294 0.5976E-01 0 1.0335E+06 8.5751E+03 8.4118E+03 2.0535E+02 8.2064E+03 1.5559E+02 6
300.- 320. 328 0.6667E-01 0 9.0231E+05 8.4495E+03 8.2706E+03 6.7043E+01 8.2036E+03 5.0866E+01 2
320.- 340. 412 0.8374E-01 0 7.8151E+05 8.8695E+03 8.6551E+03 0.0000E+00 8.6551E+03 0.0000E+00 0
340.- 360. 425 0.8638E-01 0 6.4320E+05 8.1535E+03 7.9242E+03 0.0000E+00 7.9242E+03 0.0000E+00 0
360.- 380. 508 0.1033E+00 0 5.0172E+05 7.5328E+03 7.2767E+03 0.0000E+00 7.2767E+03 0.0000E+00 0
380.- 400. 443 0.9004E-01 0 3.5284E+05 5.9255E+03 5.6899E+03 0.0000E+00 5.6899E+03 0.0000E+00 0
400.- 420. 627 0.1274E+00 0 3.1267E+05 6.4466E+03 6.0308E+03 0.0000E+00 6.0308E+03 0.0000E+00 0
420.- 440. 388 0.7886E-01 0 1.4142E+05 3.5773E+03 3.3181E+03 0.0000E+00 3.3181E+03 0.0000E+00 0
440.- 460. 221 0.4492E-01 1 4.8920E+04 1.4568E+03 1.3243E+03 0.0000E+00 1.3243E+03 0.0000E+00 0
460.- 480. 70 0.1423E-01 8 1.1823E+04 4.2555E+02 3.8248E+02 0.0000E+00 3.8248E+02 0.0000E+00 0
480.- 500. 14 0.2846E-02 80 1.3490E+03 4.8402E+01 4.1527E+01 0.0000E+00 4.1527E+01 0.0000E+00 0
500.- 520. 1 0.2033E-03 399 9.5506E+01 3.7948E+00 3.2400E+00 0.0000E+00 3.2400E+00 0.0000E+00 0
520.- 540. 0 0.0000E+00 950 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
540.- 560. 0 0.0000E+00 1321 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
560.- 580. 0 0.0000E+00 1131 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
580.- 600. 0 0.0000E+00 695 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 264 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 60 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 10 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- SUT 0 0.0000E+00
4920 1.0000E+00 4920 2.4830E+07 1.2968E+05 1.2685E+05 7.0397E+03 1.1981E+05 5.3079E+03 163
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.1919E+05 1.0950E+03 1.3091E+02 9.6414E+02 1.0367E+06 1.8262E+03 3.3112E+02 1.4950E+03 3 8
20.- 40. 5.1879E+05 1.1895E+03 2.2739E+02 9.6207E+02 1.0496E+06 1.8555E+03 3.0338E+02 1.5521E+03 5 6
40.- 60. 5.2615E+05 1.3887E+03 2.7377E+02 1.1149E+03 1.0449E+06 1.9294E+03 3.5590E+02 1.5735E+03 7 7
60.- 80. 5.1427E+05 1.3311E+03 2.4646E+02 1.0847E+03 1.0368E+06 2.2111E+03 3.7183E+02 1.8393E+03 5 7
80.- 100. 5.1998E+05 1.6160E+03 2.9923E+02 1.3167E+03 1.0468E+06 2.3336E+03 2.4890E+02 2.0847E+03 8 7
100.- 120. 5.0950E+05 1.4442E+03 1.1345E+02 1.3307E+03 1.0092E+06 2.6492E+03 4.4715E+02 2.2021E+03 3 8
120.- 140. 5.0072E+05 1.5530E+03 1.2468E+02 1.4284E+03 9.9784E+05 3.1105E+03 6.6353E+02 2.4469E+03 3 14
140.- 160. 4.9426E+05 1.7450E+03 1.1286E+02 1.6322E+03 9.7752E+05 2.7567E+03 2.1640E+02 2.5403E+03 3 5
160.- 180. 4.7752E+05 1.7842E+03 1.2699E+02 1.6573E+03 9.5700E+05 3.3176E+03 4.3149E+02 2.8861E+03 3 9
180.- 200. 4.6361E+05 1.9708E+03 3.5955E+01 1.9348E+03 9.4195E+05 4.2121E+03 6.5635E+02 3.5557E+03 1 15
200.- 220. 4.4739E+05 2.1903E+03 3.0528E+01 2.1598E+03 9.0098E+05 4.3474E+03 4.4108E+02 3.9064E+03 1 11
220.- 240. 4.2771E+05 2.1217E+03 0.0000E+00 2.1217E+03 8.4722E+05 4.4845E+03 3.2253E+02 4.1620E+03 0 9
240.- 260. 4.0793E+05 2.4608E+03 0.0000E+00 2.4608E+03 8.0562E+05 5.0497E+03 1.8145E+02 4.8682E+03 0 5
260.- 280. 3.7433E+05 2.4203E+03 0.0000E+00 2.4203E+03 7.4569E+05 5.1244E+03 7.3985E+01 5.0505E+03 0 2
280.- 300. 3.4365E+05 2.5525E+03 0.0000E+00 2.5525E+03 6.8982E+05 5.8593E+03 2.0535E+02 5.6540E+03 0 6
300.- 320. 2.9965E+05 2.6011E+03 0.0000E+00 2.6011E+03 6.0266E+05 5.6696E+03 6.7043E+01 5.6025E+03 0 2
320.- 340. 2.5802E+05 2.6335E+03 0.0000E+00 2.6335E+03 5.2349E+05 6.0216E+03 0.0000E+00 6.0216E+03 0 0
340.- 360. 2.1469E+05 2.4070E+03 0.0000E+00 2.4070E+03 4.2852E+05 5.5172E+03 0.0000E+00 5.5172E+03 0 0
360.- 380. 1.6488E+05 2.1081E+03 0.0000E+00 2.1081E+03 3.3683E+05 5.1687E+03 0.0000E+00 5.1687E+03 0 0
380.- 400. 1.1422E+05 1.6505E+03 0.0000E+00 1.6505E+03 2.3427E+05 3.9331E+03 0.0000E+00 3.9331E+03 0 0
400.- 420. 6.5600E+03 8.7311E+01 0.0000E+00 8.7311E+01 1.2105E+04 1.7116E+02 0.0000E+00 1.7116E+02 0 0
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
8.1030E+06 3.8350E+04 1.7222E+03 3.6628E+04 1.6225E+07 7.7549E+04 5.3175E+03 7.2231E+04 42 121
DAMAGE IN LAYER 1 : 1.1575E+05
DAMAGE IN LAYER 2 : 1.1100E+04
DAMAGE IN LAYER 3 : 0.0000E+00
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 1.6000E-02 ENERGY REFL.COEF.= 3.3599E-03 REL.MEAN ENERGY = 2.0999E-01 MEAN ENERGY = 1.0500E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.0500E+03 1.0870E+06 1.6308E+00 5.3506E+00 1.0426E+03 1.1657E+02 2.5349E+05 3.3278E-01
PATHLENGTH 3.4839E+02 1.4181E+04 -7.9244E-01 3.0065E+00 1.1909E+02 1.3314E+01 2.2459E+03 2.0441E-01
ELASTIC LOSS 5.2026E+01 3.4046E+02 1.8452E+01 2.3064E-01
INEL. LOSS 3.8979E+03 1.2298E+06 1.1090E+03 1.3862E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.0500E+03 2.1894E+06 6.4297E+09 2.2490E+13 8.7829E+16 3.7116E+20
LOGENERGY 2.8141E+00 8.1197E+00 2.3957E+01 7.2109E+01 2.2098E+02 6.8821E+02
PATHLENGTH 3.4839E+02 1.3556E+05 5.5771E+07 2.3800E+10 1.0435E+13 4.6764E+15
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 2 1 1 2 3 4 3 3 6 6 7 7 5 11 8 8 3
0.000 0.000 0.000 0.500 0.250 0.250 0.500 0.750 1.000 0.750 0.750 1.500 1.500 1.750 1.750 1.250 2.750 2.000 2.000 0.750
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E5000.rge
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DEPTH PARTICLES
10.0000 9
30.0000 25
50.0000 24
70.0000 32
90.0000 33
110.0000 47
130.0000 46
150.0000 53
170.0000 90
190.0000 116
210.0000 125
230.0000 162
250.0000 184
270.0000 243
290.0000 294
310.0000 328
330.0000 412
350.0000 425
370.0000 508
390.0000 443
410.0000 627
430.0000 388
450.0000 221
470.0000 70
490.0000 14
510.0000 1
530.0000 0
550.0000 0
570.0000 0
590.0000 0
610.0000 0
630.0000 0
650.0000 0
670.0000 0
690.0000 0
710.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.inp
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1 0.1134289259 7000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:23
End: 12.Jun. 2026 16:18:25
Simulation needed for 5000 muons 2 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
22798 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1051E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.1051E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.6418E+01 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.6723E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4959 ENERGY=0.3471E+08 EV
BACKSCATTERED PARTICLES= 41 ENERGY=0.7948E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 1444 1444
IMPLANTED PARTICLES (LAYER 2)= 3515 3515
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4959 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 288.1 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.052
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.309
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 4.2140E+02 8.5398E+03 -1.4178E+00 5.3545E+00 9.2411E+01 1.3123E+00 2.5306E+02 3.9668E-02
SPREAD 1.8897E+02 1.0246E+04 6.4619E-01 3.0720E+00 1.0122E+02 1.4374E+00 2.0943E+02 2.9091E-02
PATHLENGTH 6.4311E+02 1.3073E+03 6.4211E-01 3.0469E+00 3.6157E+01 5.1345E-01 2.6560E+01 2.7343E-02
ELASTIC LOSS 2.8725E+01 1.9827E+02 1.4081E+01 2.8395E-03
INEL. LOSS 6.9662E+03 2.0626E+05 4.5416E+02 9.1583E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.8850E-02 8.6396E-01 4.6991E+01 3.8544E+03 9.2950E-01 7.7440E-04 4.4682E-02 3.2076E+00
WEAK EL.LOSS 2.3304E-03 4.0365E-05 4.0639E+00 2.1277E+01 6.3533E-03 5.2932E-06 1.5143E-07 7.5401E-03
INELAST.LOSS 2.4119E+01 1.0948E+02 -7.5795E-01 2.3918E+00 1.0463E+01 8.7174E-03 1.0761E-01 1.3917E-03
SUBTHR.LOSS 9.0207E-02 3.8277E-01 2.1140E+01 6.2533E+02 6.1869E-01 5.1550E-04 7.9690E-03 2.0805E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 4.2140E+02 1.8612E+05 8.4508E+07 3.9137E+10 1.8407E+13 8.7693E+15
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 4 0.8066E-03 0 1.6258E+06 1.9018E+03 1.8972E+03 3.7936E+02 1.5178E+03 2.7492E+02 5
20.- 40. 7 0.1412E-02 0 1.6324E+06 2.2308E+03 2.2245E+03 5.4075E+02 1.6837E+03 3.9952E+02 8
40.- 60. 10 0.2017E-02 0 1.6369E+06 2.5000E+03 2.4925E+03 7.1275E+02 1.7797E+03 5.3374E+02 12
60.- 80. 14 0.2823E-02 0 1.6370E+06 2.8499E+03 2.8401E+03 7.4721E+02 2.0929E+03 5.4097E+02 11
80.- 100. 12 0.2420E-02 0 1.6420E+06 2.7954E+03 2.7863E+03 7.1388E+02 2.0724E+03 5.3250E+02 14
100.- 120. 15 0.3025E-02 0 1.6406E+06 2.9725E+03 2.9610E+03 6.9926E+02 2.2617E+03 5.1977E+02 12
120.- 140. 20 0.4033E-02 0 1.6406E+06 2.8431E+03 2.8298E+03 6.6832E+02 2.1614E+03 5.1110E+02 16
140.- 160. 29 0.5848E-02 0 1.6220E+06 2.9316E+03 2.9138E+03 4.2165E+02 2.4921E+03 3.2159E+02 10
160.- 180. 34 0.6856E-02 0 1.6145E+06 3.2300E+03 3.2076E+03 4.2148E+02 2.7861E+03 3.2034E+02 10
180.- 200. 37 0.7461E-02 0 1.6119E+06 4.2034E+03 4.1813E+03 1.1838E+03 2.9975E+03 8.7838E+02 22
200.- 220. 40 0.8066E-02 0 1.5751E+06 4.0899E+03 4.0632E+03 8.1858E+02 3.2447E+03 6.2778E+02 20
220.- 240. 54 0.1089E-01 0 1.5406E+06 4.2090E+03 4.1763E+03 6.4827E+02 3.5280E+03 4.8310E+02 13
240.- 260. 74 0.1492E-01 0 1.5240E+06 5.2848E+03 5.2405E+03 1.0654E+03 4.1751E+03 7.9410E+02 21
260.- 280. 79 0.1593E-01 0 1.5021E+06 5.7677E+03 5.7205E+03 1.0102E+03 4.7103E+03 7.6330E+02 23
280.- 300. 101 0.2037E-01 0 1.4623E+06 5.5507E+03 5.4929E+03 5.0361E+02 4.9893E+03 3.7841E+02 12
300.- 320. 111 0.2238E-01 0 1.4015E+06 6.0605E+03 5.9936E+03 3.6964E+02 5.6240E+03 2.7956E+02 9
320.- 340. 138 0.2783E-01 0 1.3292E+06 6.2650E+03 6.1846E+03 4.0070E+02 5.7839E+03 3.0486E+02 11
340.- 360. 177 0.3569E-01 0 1.2598E+06 6.8620E+03 6.7697E+03 4.2386E+02 6.3458E+03 3.1976E+02 11
360.- 380. 202 0.4073E-01 0 1.1790E+06 7.4828E+03 7.3653E+03 2.5086E+02 7.1145E+03 1.9031E+02 7
380.- 400. 286 0.5767E-01 0 1.1086E+06 7.9446E+03 7.7867E+03 1.4799E+02 7.6387E+03 1.1170E+02 4
400.- 420. 460 0.9276E-01 0 1.3739E+06 1.2020E+04 1.1676E+04 1.7585E+02 1.1501E+04 1.3320E+02 5
420.- 440. 492 0.9921E-01 0 1.1326E+06 1.2238E+04 1.1857E+04 1.7135E+02 1.1685E+04 1.3012E+02 5
440.- 460. 578 0.1166E+00 0 8.4860E+05 1.0915E+04 1.0482E+04 0.0000E+00 1.0482E+04 0.0000E+00 0
460.- 480. 637 0.1285E+00 0 5.8577E+05 9.2881E+03 8.8383E+03 0.0000E+00 8.8383E+03 0.0000E+00 0
480.- 500. 554 0.1117E+00 0 3.5554E+05 6.7438E+03 6.3496E+03 0.0000E+00 6.3496E+03 0.0000E+00 0
500.- 520. 400 0.8066E-01 0 1.7287E+05 3.9381E+03 3.6732E+03 0.0000E+00 3.6732E+03 0.0000E+00 0
520.- 540. 259 0.5223E-01 0 6.9265E+04 1.8757E+03 1.7146E+03 0.0000E+00 1.7146E+03 0.0000E+00 0
540.- 560. 105 0.2117E-01 8 1.9760E+04 6.4147E+02 5.7634E+02 0.0000E+00 5.7634E+02 0.0000E+00 0
560.- 580. 26 0.5243E-02 60 2.9835E+03 1.2163E+02 1.0727E+02 0.0000E+00 1.0727E+02 0.0000E+00 0
580.- 600. 4 0.8066E-03 357 1.9554E+02 1.0349E+01 8.3762E+00 0.0000E+00 8.3762E+00 0.0000E+00 0
600.- 620. 0 0.0000E+00 988 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
620.- 640. 0 0.0000E+00 1279 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
640.- 660. 0 0.0000E+00 887 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
660.- 680. 0 0.0000E+00 539 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
680.- 700. 0 0.0000E+00 400 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 277 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 117 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 44 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 3 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- SUT 0 0.0000E+00
4959 1.0000E+00 4959 3.4747E+07 1.4577E+05 1.4241E+05 1.2475E+04 1.2994E+05 9.3490E+03 261
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.3733E+05 7.2456E+02 1.4589E+02 5.7867E+02 1.0885E+06 1.1726E+03 2.3348E+02 9.3916E+02 2 3
20.- 40. 5.4051E+05 9.8474E+02 2.1493E+02 7.6981E+02 1.0919E+06 1.2398E+03 3.2583E+02 9.1393E+02 3 5
40.- 60. 5.4816E+05 1.1243E+03 3.8161E+02 7.4268E+02 1.0888E+06 1.3682E+03 3.3114E+02 1.0370E+03 6 6
60.- 80. 5.4487E+05 9.0174E+02 0.0000E+00 9.0174E+02 1.0921E+06 1.9383E+03 7.4721E+02 1.1911E+03 0 11
80.- 100. 5.4407E+05 9.1696E+02 1.5254E+02 7.6442E+02 1.0979E+06 1.8693E+03 5.6134E+02 1.3079E+03 4 10
100.- 120. 5.4423E+05 1.2839E+03 2.8811E+02 9.9580E+02 1.0964E+06 1.6770E+03 4.1115E+02 1.2659E+03 6 6
120.- 140. 5.4979E+05 1.2899E+03 3.9585E+02 8.9408E+02 1.0908E+06 1.5398E+03 2.7247E+02 1.2674E+03 10 6
140.- 160. 5.4433E+05 1.1814E+03 2.0847E+02 9.7291E+02 1.0776E+06 1.7324E+03 2.1318E+02 1.5192E+03 4 6
160.- 180. 5.3055E+05 1.2381E+03 1.9789E+02 1.0402E+03 1.0840E+06 1.9694E+03 2.2360E+02 1.7458E+03 5 5
180.- 200. 5.3195E+05 1.3552E+03 2.5185E+02 1.1034E+03 1.0799E+06 2.8261E+03 9.3199E+02 1.8941E+03 5 17
200.- 220. 5.2410E+05 1.8293E+03 5.1802E+02 1.3113E+03 1.0510E+06 2.2339E+03 3.0056E+02 1.9334E+03 13 7
220.- 240. 5.1095E+05 1.4126E+03 1.3392E+02 1.2787E+03 1.0296E+06 2.7637E+03 5.1436E+02 2.2493E+03 3 10
240.- 260. 5.0612E+05 1.7547E+03 1.9439E+02 1.5603E+03 1.0179E+06 3.4858E+03 8.7105E+02 2.6147E+03 5 16
260.- 280. 5.0338E+05 2.0783E+03 3.5331E+02 1.7250E+03 9.9868E+05 3.6422E+03 6.5685E+02 2.9853E+03 9 14
280.- 300. 4.7987E+05 1.9748E+03 4.4769E+01 1.9300E+03 9.8242E+05 3.5181E+03 4.5884E+02 3.0593E+03 1 11
300.- 320. 4.6584E+05 2.3152E+03 8.3152E+01 2.2320E+03 9.3567E+05 3.6784E+03 2.8649E+02 3.3919E+03 2 7
320.- 340. 4.4352E+05 2.1463E+03 9.6273E+01 2.0500E+03 8.8565E+05 4.0383E+03 3.0442E+02 3.7339E+03 3 8
340.- 360. 4.1754E+05 2.1286E+03 3.0534E+01 2.0981E+03 8.4230E+05 4.6410E+03 3.9333E+02 4.2477E+03 1 10
360.- 380. 3.9232E+05 2.4664E+03 3.0010E+01 2.4364E+03 7.8664E+05 4.8989E+03 2.2085E+02 4.6781E+03 1 6
380.- 400. 3.6883E+05 2.6044E+03 0.0000E+00 2.6044E+03 7.3110E+05 5.0698E+03 1.4799E+02 4.9218E+03 0 4
400.- 420. 2.7226E+04 1.7375E+02 0.0000E+00 1.7375E+02 5.3231E+04 3.9976E+02 7.8675E+01 3.2109E+02 0 2
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0055E+07 3.1885E+04 3.7215E+03 2.8164E+04 2.0202E+07 5.5703E+04 8.4848E+03 4.7218E+04 83 170
DAMAGE IN LAYER 1 : 8.7127E+04
DAMAGE IN LAYER 2 : 5.5283E+04
DAMAGE IN LAYER 3 : 0.0000E+00
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 8.2000E-03 ENERGY REFL.COEF.= 2.2709E-03 REL.MEAN ENERGY = 2.7693E-01 MEAN ENERGY = 1.9385E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 1.9385E+03 3.1363E+06 1.1788E+00 3.2490E+00 1.7710E+03 2.7658E+02 7.3456E+05 3.1212E-01
PATHLENGTH 3.8723E+02 2.6176E+04 -7.0843E-01 2.6442E+00 1.6179E+02 2.5268E+01 5.2420E+03 2.3197E-01
ELASTIC LOSS 8.0965E+01 1.1751E+03 3.4280E+01 8.3609E-01
INEL. LOSS 4.9219E+03 3.2033E+06 1.7898E+03 4.3653E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 1.9385E+03 6.8943E+06 3.2072E+10 1.6757E+14 9.2395E+17 5.2403E+21
LOGENERGY 3.0829E+00 9.7157E+00 3.1216E+01 1.0202E+02 3.3844E+02 1.1377E+03
PATHLENGTH 3.8723E+02 1.7612E+05 8.5472E+07 4.3199E+10 2.2514E+13 1.2028E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 1 0 0 3 2 0 0 2 1 2 2 3 5 1 6 5 3 5
0.000 0.000 0.488 0.000 0.000 1.463 0.976 0.000 0.000 0.976 0.488 0.976 0.976 1.463 2.439 0.488 2.927 2.439 1.463 2.439
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E7000.rge
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DEPTH PARTICLES
10.0000 4
30.0000 7
50.0000 10
70.0000 14
90.0000 12
110.0000 15
130.0000 20
150.0000 29
170.0000 34
190.0000 37
210.0000 40
230.0000 54
250.0000 74
270.0000 79
290.0000 101
310.0000 111
330.0000 138
350.0000 177
370.0000 202
390.0000 286
410.0000 460
430.0000 492
450.0000 578
470.0000 637
490.0000 554
510.0000 400
530.0000 259
550.0000 105
570.0000 26
590.0000 4
610.0000 0
630.0000 0
650.0000 0
670.0000 0
690.0000 0
710.0000 0
730.0000 0
750.0000 0
770.0000 0
790.0000 0
810.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.err
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tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.inp
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1 0.1134289259 9000 450 0 15 0.5 0.0 0.0 0.0
5000 78741 78741 78741 0 50.0 20 1.0 2 2 4 3 2 1 0
N_Layers=4
SiO2 400 2.65 1 2
14 8
28.086 15.999
0.3333333333333333 0.6666666666666666
4.63 2.6
30 30
0 0
4.914 2.652
5.598 3
3193 1920
232.7 2000
0.01419 0.0223
Al2O3 300 3.98 1 2
13 8
26.982 15.999
0.4 0.6
3.39 2.6
30 30
0 0
4.154 2.652
4.739 3
2766 1920
164.5 2000
0.02023 0.0223
TiN 300 2.563469767405616 1 2
22 7
47.9 14.007
0.5 0.5
4.85 4.92
30 30
0 0
4.858 2.954
5.489 3.35
5260 1683
651.1 1900
0.00893 0.02513
Si 10000 2.33 1 1
14
28.086
1
4.63
30
0
4.914
5.598
3193
232.7
0.01419
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.out
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1
* TrimSPNL v1.1.0 *
Start: 12.Jun. 2026 16:18:25
End: 12.Jun. 2026 16:18:26
Simulation needed for 5000 muons 1 seconds
* INPUT DATA * SiO2_Al2O3_T
Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC
1.00 0.11 9000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00
NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL
5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0
DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5)
1.LAYER 400.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000
2.LAYER 300.00 3.98 1.00 13. 8. 0. 0. 0. 26.98 16.00 0.00 0.00 0.00 0.400 0.600 0.000 0.000 0.000
3.LAYER 300.00 2.56 1.00 22. 7. 0. 0. 0. 47.90 14.01 0.00 0.00 0.00 0.500 0.500 0.000 0.000 0.000
4.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000
*** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) ***
1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
2.LAYER 3.39 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
3.LAYER 4.85 4.92 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
4.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00
CH1 CH2 CH3 CH4 CH5
1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
2.652000 3.000000 1920.000000 2000.000000 0.022300
2.LAYER 4.154000 4.739000 2766.000000 164.500000 0.020230
2.652000 3.000000 1920.000000 2000.000000 0.022300
3.LAYER 4.858000 5.489000 5260.000000 651.100000 0.008930
2.954000 3.350000 1683.000000 1900.000000 0.025130
4.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190
INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL
INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR
PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION
PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION
1
* OUTPUT DATA * SiO2_Al2O3_T
HLM HLMT SU SUT XC RT SFE INEL L LJ
0.0000 11000.000 3.9333 11004.596 -3.9333 10950.000 3.28 0 4 7
NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST
26102 0 0 0 0 0 0 0 0
EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I)
1.LAYER 0.1352E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.4000E+03 2
2.LAYER 0.1352E+02 0.1000E+02 0.2039E+02 0.1175E+00 0.2041E+01 0.1152E+01 0.2399E+00 0.2916E+01 0.7000E+03 2
3.LAYER 0.8251E+01 0.1450E+02 0.3095E+02 0.4987E-01 0.2717E+01 0.1533E+01 0.1355E+00 0.4885E+01 0.1000E+04 2
4.LAYER 0.8643E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1100E+05 1
A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35)
0.19439
0.23425
0.19925
0.23425
0.16720
0.24491
0.19439
KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z)
1.07495
0.67216
1.01182
0.67216
1.54039
0.59813
1.07495
A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35)
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.12396 0.13543 0.12552 0.13543 0.11432 0.13806 0.12396
0.13356 0.14757 0.13543 0.14757 0.12207 0.15083 0.13356
0.11309 0.12207 0.11432 0.12207 0.10533 0.12409 0.11309
0.13609 0.15083 0.13806 0.15083 0.12409 0.15429 0.13609
0.12246 0.13356 0.12396 0.13356 0.11309 0.13609 0.12246
KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z)
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.37515 0.85443 1.29309 0.85443 1.98178 0.75985 1.37515
1.08509 0.68953 1.02336 0.68953 1.53686 0.61646 1.08509
1.73229 1.05132 1.62370 1.05132 2.54610 0.93004 1.73229
1.00782 0.64434 0.95122 0.64434 1.42105 0.57691 1.00782
1.45186 0.89903 1.36460 0.89903 2.09811 0.79888 1.45186
1
IMPLANTED PARTICLES= 4975 ENERGY=0.4478E+08 EV
BACKSCATTERED PARTICLES= 25 ENERGY=0.6945E+05 EV
TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV
BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV
TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV
TRIED PARTICLES= 5000
PARTICLES with neg. E= 0
THOMAS FERMI RED. ENERGY= 0.0000E+00
SCALED PART. REFL. COEFF= 0.0000E+00
FROM BIN WIDTH FROM LAYER THICKNESS
IMPLANTED PARTICLES (LAYER 1)= 539 539
IMPLANTED PARTICLES (LAYER 2)= 4436 4436
IMPLANTED PARTICLES (LAYER 3)= 0 0
IMPLANTED PARTICLES (LAYER 4)= 4975 0
PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 330.2 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.057
MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.455
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
PENETRATION 5.0352E+02 8.6683E+03 -1.4794E+00 6.2550E+00 9.3104E+01 1.3200E+00 2.8172E+02 5.1670E-02
SPREAD 2.0688E+02 1.3632E+04 8.4572E-01 3.5384E+00 1.1676E+02 1.6553E+00 3.0793E+02 3.1263E-02
PATHLENGTH 7.2399E+02 1.4019E+03 1.4069E+00 5.4780E+00 3.7442E+01 5.3084E-01 4.2059E+01 3.7623E-02
ELASTIC LOSS 3.1725E+01 2.4473E+02 1.5644E+01 3.1445E-03
INEL. LOSS 8.9679E+03 2.0370E+05 4.5133E+02 9.0720E-02
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ELAST.LOSS 9.4930E-02 9.2583E-01 5.1922E+01 4.6212E+03 9.6220E-01 7.4886E-04 4.8978E-02 2.8280E+00
WEAK EL.LOSS 2.1817E-03 3.9978E-05 4.2878E+00 2.3170E+01 6.3228E-03 4.9209E-06 1.4650E-07 7.5416E-03
INELAST.LOSS 2.7116E+01 1.1176E+02 -1.1451E+00 3.0206E+00 1.0572E+01 8.2276E-03 1.2364E-01 1.6353E-03
SUBTHR.LOSS 8.6208E-02 3.9286E-01 2.2000E+01 6.6859E+02 6.2678E-01 4.8786E-04 7.9007E-03 1.9614E-01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
PENETRATION 5.0352E+02 2.6220E+05 1.3956E+08 7.5529E+10 4.1440E+13 2.3003E+16
1
DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA
-SU- 0. 0 0.0000E+00
0.- 20. 2 0.4020E-03 0 1.6414E+06 1.6085E+03 1.6059E+03 3.7838E+02 1.2275E+03 2.8089E+02 6
20.- 40. 1 0.2010E-03 0 1.6508E+06 1.9877E+03 1.9850E+03 6.7040E+02 1.3146E+03 4.8757E+02 9
40.- 60. 3 0.6030E-03 0 1.6580E+06 2.2780E+03 2.2744E+03 7.3118E+02 1.5432E+03 5.2763E+02 9
60.- 80. 7 0.1407E-02 0 1.6621E+06 2.2694E+03 2.2646E+03 7.6077E+02 1.5038E+03 5.6249E+02 12
80.- 100. 5 0.1005E-02 0 1.6784E+06 2.0850E+03 2.0798E+03 3.7454E+02 1.7052E+03 2.8585E+02 8
100.- 120. 7 0.1407E-02 0 1.6808E+06 2.4959E+03 2.4902E+03 7.8231E+02 1.7079E+03 5.8627E+02 14
120.- 140. 5 0.1005E-02 0 1.6880E+06 2.1972E+03 2.1916E+03 3.8069E+02 1.8109E+03 2.8734E+02 7
140.- 160. 12 0.2412E-02 0 1.6813E+06 2.5004E+03 2.4923E+03 7.6816E+02 1.7242E+03 5.7075E+02 13
160.- 180. 17 0.3417E-02 0 1.6873E+06 2.3135E+03 2.3023E+03 3.5566E+02 1.9466E+03 2.7016E+02 8
180.- 200. 17 0.3417E-02 0 1.6923E+06 3.0955E+03 3.0843E+03 7.8486E+02 2.2994E+03 5.8065E+02 14
200.- 220. 13 0.2613E-02 0 1.6804E+06 2.7611E+03 2.7510E+03 7.0200E+02 2.0490E+03 5.0774E+02 10
220.- 240. 19 0.3819E-02 0 1.6716E+06 3.1090E+03 3.0943E+03 6.1660E+02 2.4777E+03 4.6117E+02 13
240.- 260. 34 0.6834E-02 0 1.6612E+06 2.8768E+03 2.8581E+03 4.8432E+02 2.3738E+03 3.6473E+02 10
260.- 280. 27 0.5427E-02 0 1.6501E+06 3.3368E+03 3.3194E+03 4.4786E+02 2.8716E+03 3.3757E+02 10
280.- 300. 28 0.5628E-02 0 1.6320E+06 3.4719E+03 3.4500E+03 3.2555E+02 3.1245E+03 2.4419E+02 7
300.- 320. 49 0.9849E-02 0 1.6260E+06 3.9629E+03 3.9340E+03 4.8594E+02 3.4481E+03 3.6040E+02 9
320.- 340. 44 0.8844E-02 0 1.5941E+06 4.4147E+03 4.3863E+03 7.6657E+02 3.6197E+03 5.7330E+02 15
340.- 360. 68 0.1367E-01 0 1.5589E+06 4.3670E+03 4.3291E+03 5.0176E+02 3.8273E+03 3.7753E+02 10
360.- 380. 85 0.1709E-01 0 1.5330E+06 5.2266E+03 5.1763E+03 9.1180E+02 4.2645E+03 6.8787E+02 22
380.- 400. 96 0.1930E-01 0 1.4952E+06 5.4739E+03 5.4176E+03 5.0046E+02 4.9172E+03 3.7113E+02 10
400.- 420. 173 0.3477E-01 0 1.9875E+06 8.8478E+03 8.7068E+03 8.5910E+02 7.8477E+03 6.4939E+02 21
420.- 440. 226 0.4543E-01 0 1.8886E+06 9.5373E+03 9.3583E+03 7.5248E+02 8.6058E+03 5.7199E+02 19
440.- 460. 268 0.5387E-01 0 1.7656E+06 1.0595E+04 1.0379E+04 5.8331E+02 9.7959E+03 4.4278E+02 16
460.- 480. 355 0.7136E-01 0 1.5737E+06 1.0917E+04 1.0647E+04 3.3222E+02 1.0315E+04 2.5283E+02 9
480.- 500. 402 0.8080E-01 0 1.3665E+06 1.1978E+04 1.1663E+04 7.0293E+01 1.1593E+04 5.3325E+01 2
500.- 520. 494 0.9930E-01 0 1.1309E+06 1.1466E+04 1.1089E+04 6.3460E+01 1.1025E+04 4.8384E+01 2
520.- 540. 510 0.1025E+00 0 8.6519E+05 1.0543E+04 1.0161E+04 0.0000E+00 1.0161E+04 0.0000E+00 0
540.- 560. 579 0.1164E+00 0 6.2576E+05 9.3214E+03 8.9067E+03 3.3932E+01 8.8728E+03 2.5786E+01 1
560.- 580. 507 0.1019E+00 0 3.9063E+05 7.1249E+03 6.7634E+03 0.0000E+00 6.7634E+03 0.0000E+00 0
580.- 600. 444 0.8925E-01 0 2.1561E+05 4.5037E+03 4.2038E+03 0.0000E+00 4.2038E+03 0.0000E+00 0
600.- 620. 276 0.5548E-01 0 9.4363E+04 2.4485E+03 2.2668E+03 0.0000E+00 2.2668E+03 0.0000E+00 0
620.- 640. 144 0.2894E-01 1 3.1104E+04 9.3936E+02 8.5291E+02 0.0000E+00 8.5291E+02 0.0000E+00 0
640.- 660. 42 0.8442E-02 21 6.9803E+03 2.2595E+02 2.0048E+02 0.0000E+00 2.0048E+02 0.0000E+00 0
660.- 680. 16 0.3216E-02 273 1.0704E+03 4.5383E+01 3.7973E+01 0.0000E+00 3.7973E+01 0.0000E+00 0
680.- 700. 0 0.0000E+00 933 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
700.- 720. 0 0.0000E+00 1483 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
720.- 740. 0 0.0000E+00 1141 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
740.- 760. 0 0.0000E+00 488 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
760.- 780. 0 0.0000E+00 193 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
780.- 800. 0 0.0000E+00 151 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
800.- 820. 0 0.0000E+00 116 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
820.- 840. 0 0.0000E+00 90 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
840.- 860. 0 0.0000E+00 55 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
860.- 880. 0 0.0000E+00 25 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
880.- 900. 0 0.0000E+00 4 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
900.- 920. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
920.- 940. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
940.- 960. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0
960.- SUT 0 0.0000E+00
4975 1.0000E+00 4975 4.4766E+07 1.6032E+05 1.5672E+05 1.4425E+04 1.4230E+05 1.0770E+04 286
1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2)
0.- 20. 5.4968E+05 6.5999E+02 1.6135E+02 4.9864E+02 1.0917E+06 9.4588E+02 2.1703E+02 7.2886E+02 3 3
20.- 40. 5.5250E+05 7.3406E+02 2.5480E+02 4.7926E+02 1.0983E+06 1.2509E+03 4.1560E+02 8.3534E+02 4 5
40.- 60. 5.5489E+05 7.5866E+02 1.6521E+02 5.9345E+02 1.1031E+06 1.5157E+03 5.6597E+02 9.4976E+02 2 7
60.- 80. 5.5212E+05 8.7108E+02 2.5936E+02 6.1172E+02 1.1100E+06 1.3935E+03 5.0141E+02 8.9207E+02 4 8
80.- 100. 5.5842E+05 8.7943E+02 2.6821E+02 6.1122E+02 1.1199E+06 1.2003E+03 1.0633E+02 1.0940E+03 5 3
100.- 120. 5.6565E+05 1.2773E+03 4.5736E+02 8.1994E+02 1.1152E+06 1.2129E+03 3.2495E+02 8.8796E+02 8 6
120.- 140. 5.6298E+05 1.0078E+03 2.2438E+02 7.8341E+02 1.1250E+06 1.1838E+03 1.5631E+02 1.0275E+03 4 3
140.- 160. 5.6164E+05 9.8137E+02 3.4056E+02 6.4081E+02 1.1197E+06 1.5110E+03 4.2760E+02 1.0834E+03 7 6
160.- 180. 5.6317E+05 9.2358E+02 1.6980E+02 7.5378E+02 1.1241E+06 1.3787E+03 1.8585E+02 1.1929E+03 4 4
180.- 200. 5.6480E+05 1.1847E+03 2.3851E+02 9.4622E+02 1.1275E+06 1.8995E+03 5.4635E+02 1.3532E+03 5 9
200.- 220. 5.6130E+05 8.9000E+02 4.1555E+01 8.4845E+02 1.1190E+06 1.8610E+03 6.6044E+02 1.2005E+03 1 9
220.- 240. 5.5217E+05 1.1891E+03 1.6018E+02 1.0289E+03 1.1194E+06 1.9052E+03 4.5642E+02 1.4488E+03 4 9
240.- 260. 5.5832E+05 1.0410E+03 1.8036E+02 8.6068E+02 1.1029E+06 1.8171E+03 3.0396E+02 1.5131E+03 4 6
260.- 280. 5.4976E+05 1.2070E+03 1.1639E+02 1.0906E+03 1.1003E+06 2.1124E+03 3.3147E+02 1.7809E+03 3 7
280.- 300. 5.4133E+05 1.3344E+03 8.6100E+01 1.2483E+03 1.0907E+06 2.1157E+03 2.3945E+02 1.8762E+03 2 5
300.- 320. 5.3763E+05 1.3229E+03 1.1285E+02 1.2101E+03 1.0884E+06 2.6111E+03 3.7309E+02 2.2380E+03 3 6
320.- 340. 5.3546E+05 1.6866E+03 2.6972E+02 1.4169E+03 1.0587E+06 2.6997E+03 4.9684E+02 2.2028E+03 7 8
340.- 360. 5.1970E+05 1.6980E+03 2.1070E+02 1.4873E+03 1.0391E+06 2.6311E+03 2.9105E+02 2.3400E+03 5 5
360.- 380. 5.1093E+05 1.7684E+03 1.6889E+02 1.5995E+03 1.0220E+06 3.4079E+03 7.4291E+02 2.6650E+03 4 18
380.- 400. 5.0011E+05 1.9119E+03 0.0000E+00 1.9119E+03 9.8887E+05 3.4543E+03 5.0046E+02 2.9538E+03 0 10
400.- 420. 4.3368E+04 1.7019E+02 3.3207E+01 1.3698E+02 8.7056E+04 2.0330E+02 4.2257E+01 1.6104E+02 1 1
420.- 440. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0
1.0996E+07 2.3498E+04 3.9195E+03 1.9578E+04 2.1951E+07 3.8311E+04 7.8857E+03 3.0425E+04 80 138
DAMAGE IN LAYER 1 : 6.1486E+04
DAMAGE IN LAYER 2 : 9.5237E+04
DAMAGE IN LAYER 3 : 0.0000E+00
DAMAGE IN LAYER 4 : 0.0000E+00
1
BACKSCATTERING OF PROJECTILES
PART.REFL.COEF.= 5.0000E-03 ENERGY REFL.COEF.= 1.5434E-03 REL.MEAN ENERGY = 3.0868E-01 MEAN ENERGY = 2.7781E+03
MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M
ENERGY 2.7781E+03 5.9258E+06 7.1722E-01 1.9585E+00 2.4343E+03 4.8686E+02 1.1603E+06 3.7451E-01
PATHLENGTH 4.4485E+02 3.9948E+04 -4.4109E-01 1.7730E+00 1.9987E+02 3.9974E+01 7.0244E+03 3.2789E-01
ELASTIC LOSS 9.9809E+01 1.2474E+03 3.5318E+01 1.4127E+00
INEL. LOSS 6.0368E+03 5.7648E+06 2.4010E+03 9.6040E+01
1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT
ENERGY 2.7781E+03 1.3644E+07 8.1176E+10 5.1773E+14 3.4079E+18 2.2823E+22
LOGENERGY 3.2318E+00 1.0661E+01 3.5834E+01 1.2248E+02 4.2486E+02 1.4929E+03
PATHLENGTH 4.4485E+02 2.3784E+05 1.3782E+08 8.3155E+10 5.1440E+13 3.2400E+16
POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES
0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00
0 0 0 0 0 1 2 1 2 1 1 1 6 1 1 2 0 1 4 1
0.000 0.000 0.000 0.000 0.000 0.800 1.600 0.800 1.600 0.800 0.800 0.800 4.800 0.800 0.800 1.600 0.000 0.800 3.200 0.800
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_E9000.rge
+49
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@@ -0,0 +1,49 @@
DEPTH PARTICLES
10.0000 2
30.0000 1
50.0000 3
70.0000 7
90.0000 5
110.0000 7
130.0000 5
150.0000 12
170.0000 17
190.0000 17
210.0000 13
230.0000 19
250.0000 34
270.0000 27
290.0000 28
310.0000 49
330.0000 44
350.0000 68
370.0000 85
390.0000 96
410.0000 173
430.0000 226
450.0000 268
470.0000 355
490.0000 402
510.0000 494
530.0000 510
550.0000 579
570.0000 507
590.0000 444
610.0000 276
630.0000 144
650.0000 42
670.0000 16
690.0000 0
710.0000 0
730.0000 0
750.0000 0
770.0000 0
790.0000 0
810.0000 0
830.0000 0
850.0000 0
870.0000 0
890.0000 0
910.0000 0
930.0000 0
950.0000 0
tests/SiO2_Al2O3_TiN_Si_4layer/SiO2_Al2O3_TiN_Si_4layer_Seq_Results.dat
+14
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@@ -0,0 +1,14 @@
Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN Si
1.00 0.45 0.00 15.00 5000 4476 524 0 5056 56 0.9535E+02 0.5031E+02 0.2547E+03 0.2520E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4476 0 0 0
3.00 0.45 0.00 15.00 5000 4854 146 0 5000 0 0.2191E+03 0.7512E+02 0.7853E+03 0.7472E+03 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 4844 10 0 0
5.00 0.45 0.00 15.00 5000 4920 80 0 5000 0 0.3322E+03 0.9097E+02 0.1050E+04 0.1043E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 3599 1321 0 0
7.00 0.45 0.00 15.00 5000 4959 41 0 5000 0 0.4214E+03 0.9241E+02 0.1939E+04 0.1771E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1444 3515 0 0
9.00 0.45 0.00 15.00 5000 4975 25 0 5000 0 0.5035E+03 0.9310E+02 0.2778E+04 0.2434E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 539 4436 0 0
11.00 0.45 0.00 15.00 5000 4976 24 0 5000 0 0.5848E+03 0.1038E+03 0.3906E+04 0.2537E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 252 4458 266 0
13.00 0.45 0.00 15.00 5000 4983 17 0 5000 0 0.6855E+03 0.1297E+03 0.3144E+04 0.3965E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 130 2709 2138 6
15.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.8217E+03 0.1667E+03 0.6472E+04 0.4937E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 63 1210 2966 746
17.00 0.45 0.00 15.00 5000 4985 15 0 5000 0 0.9656E+03 0.1920E+03 0.5966E+04 0.4369E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 48 528 1784 2625
19.00 0.45 0.00 15.00 5000 4990 10 0 5000 0 0.1112E+04 0.2080E+03 0.9359E+04 0.5745E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 27 288 765 3910
21.00 0.45 0.00 15.00 5000 4993 7 0 5000 0 0.1267E+04 0.2162E+03 0.7972E+04 0.6003E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 21 139 338 4495
23.00 0.45 0.00 15.00 5000 4984 16 0 5000 0 0.1427E+04 0.2332E+03 0.8113E+04 0.5954E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 11 82 178 4713
25.00 0.45 0.00 15.00 5000 4992 8 0 5000 0 0.1599E+04 0.2590E+03 0.1136E+05 0.8198E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 10 60 104 4818
tests/SiO2_Al2O3_TiN_Si_4layer/TrimSP.cfg
+38
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@@ -0,0 +1,38 @@
[Files]
fileNamePrefix=SiO2_Al2O3_TiN_Si_4layer
workPath=/home/zaher/LEM/git/trimsp/tests/SiO2_Al2O3_TiN_Si_4layer
[Layers]
numLayer=4
L1Comp=SiO2
L1rho=2.65
L1d=400
L2Comp=Al2O3
L2rho=3.98
L2d=300
L3Comp=TiN
L3rho=2.563469767405616
L3d=300
L4Comp=Si
L4rho=2.33
L4d=10000
[ProjectileParameters]
workPath=/home/zaher/LEM/git/trimsp/tests/SiO2_Al2O3_TiN_Si_4layer
fileNamePrefix=SiO2_Al2O3_TiN_Si_4layer
ProjType=muon
numberProj=5000
z0=0
dz=20
valEnergy=19000
sigEnergy=450
valAngle=0
sigAngle=15
ranSeed=78741
[ScanSequence]
scanSeq=1
comboScan=EScan
scanType=scanLoop
scanFrom=1000
scanStep=2000
scanTo=25000
scanList=1000
scanListdz=