#Tue Sep 01 10:46:53 CEST 2015 accessType=ReadWrite motor1=0.6016|0.6153|0.5168|0.5599 motor2=-133.7286|2.758|-1.7844|0.4822 motor3=null motor4=null motor5=null motor6=null motor7=null motor8=null positions=Park|10um|30um|150um precision=1