#Tue Aug 18 18:06:23 CEST 2015 accessType=ReadWrite motor1=0.6016|0.6016|0.5089|0.5511 motor2=-133.7286|2.7588|-1.7617|0.5066 motor3=null motor4=null motor5=null motor6=null motor7=null motor8=null positions=Park|10um|30um|150um precision=-1