diff --git a/writer/HDF5DataFile.cpp b/writer/HDF5DataFile.cpp
index 3117565c..49626a9f 100644
--- a/writer/HDF5DataFile.cpp
+++ b/writer/HDF5DataFile.cpp
@@ -78,11 +78,22 @@ std::optional<HDF5DataFileStatistics> HDF5DataFile::Close() {
         data_set->Close();
         data_set.reset();
     }
-    data_file->Close();
-    data_file.reset();
 
-    if (manage_file && (!std::filesystem::exists(filename.c_str()) || overwrite))
-        std::rename(tmp_filename.c_str(), filename.c_str());
+    if (manage_file ) {
+        data_file->Close();
+        data_file.reset();
+
+        if (std::filesystem::exists(filename) && !overwrite)
+            throw JFJochException(JFJochExceptionCategory::FileWriteError, "File already exists");
+        std::error_code ec;
+        std::filesystem::rename(tmp_filename, filename, ec);
+        if (ec)
+            throw JFJochException(JFJochExceptionCategory::FileWriteError,
+                                  "Cannot rename temporary HDF5 file " + tmp_filename +
+                                  " to " + filename + ": " + ec.message());
+    } else {
+        data_file.reset();
+    }
 
     closed = true;
 
@@ -92,16 +103,19 @@ std::optional<HDF5DataFileStatistics> HDF5DataFile::Close() {
     ret.filename = filename;
     ret.file_number = file_number + 1;
 
-
     return ret;
 }
 
 HDF5DataFile::~HDF5DataFile() {
     if (data_file) {
         try {
-            data_set->Close();
-            data_file->Close();
-            std::filesystem::remove(tmp_filename);
+            data_set.reset();
+            data_set_image_number.reset();
+            data_file.reset();
+            if (manage_file) {
+                std::error_code ec;
+                std::filesystem::remove(tmp_filename, ec);
+            }
         } catch (const std::exception &e) {
             std::cerr << "HDF5DataFile::~HDF5DataFile: " << e.what() << std::endl;
         } catch (...) {
diff --git a/writer/HDF5NXmx.cpp b/writer/HDF5NXmx.cpp
index 605ffdae..64efcb90 100644
--- a/writer/HDF5NXmx.cpp
+++ b/writer/HDF5NXmx.cpp
@@ -52,8 +52,13 @@ NXmx::NXmx(const StartMessage &start)
 }
 
 NXmx::~NXmx() {
-    if (!std::filesystem::exists(filename.c_str()) || overwrite)
-        std::rename(tmp_filename.c_str(), filename.c_str());
+    try {
+        if (hdf5_file) {
+            hdf5_file.reset();
+            std::error_code ec;
+            std::filesystem::remove(tmp_filename, ec);
+        }
+    } catch (...) {}
 }
 
 
@@ -643,6 +648,9 @@ void NXmx::Attenuator(const StartMessage &start) {
 }
 
 void NXmx::WriteCalibration(const CompressedImage &image) {
+    if (!hdf5_file)
+        throw JFJochException(JFJochExceptionCategory::FileWriteError, "HDF5 file already closed");
+
     if (!calibration_group_created) {
         calibration_group_created = true;
         HDF5Group(*hdf5_file, "/entry/instrument/detector/calibration").NXClass("NXcollection");
@@ -668,6 +676,8 @@ void NXmx::SaveCBORImage(const std::string &hdf5_path, const CompressedImage &im
         dataset->Write(data_type, image.GetCompressed());
     else
         dataset->WriteDirectChunk(image.GetCompressed(), image.GetCompressedSize(), {0, 0});
+
+    dataset->Close();
 }
 
 void NXmx::AzimuthalIntegration(const StartMessage &start, const EndMessage &end) {
@@ -702,6 +712,8 @@ void NXmx::ADUHistogram(const EndMessage &end) {
 }
 
 void NXmx::Finalize(const EndMessage &end) {
+    if (!hdf5_file)
+        throw JFJochException(JFJochExceptionCategory::FileWriteError, "HDF5 file already closed");
     if (end.end_date) {
         hdf5_file->Attr("file_time", end.end_date.value());
         hdf5_file->SaveScalar("/entry/end_time", end.end_date.value());
@@ -746,6 +758,19 @@ void NXmx::Finalize(const EndMessage &end) {
 
     if (!end.scale_factor.empty())
         SaveVector(*hdf5_file, "/entry/MX/imageScaleFactor", end.scale_factor);
+
+    hdf5_file->Close();
+    hdf5_file.reset();
+
+    if (std::filesystem::exists(filename) && !overwrite)
+        throw JFJochException(JFJochExceptionCategory::FileWriteError, "File already exists");
+
+    std::error_code ec;
+    std::filesystem::rename(tmp_filename, filename, ec);
+    if (ec)
+        throw JFJochException(JFJochExceptionCategory::FileWriteError,
+                              "Cannot rename temporary HDF5 master file " + tmp_filename +
+                              " to " + filename + ": " + ec.message());
 }
 
 void NXmx::UserData(const StartMessage &start) {