name=ILL5_M     ! name (15 char.max.,will be converted to uppercase)
sens=x10045     ! sensor no (max.10 char.)
unit=Ohm        ! sensor format (mV,V,Ohm), log formats are choosen automatically
!tlim=325       ! setpoint limit (automatic if omitted)
type=cernox     ! sensor type (Special,Si,GaAlAs,Pt250,Pt500,Pt2500,RhFe,C,Cernox,RuOx,Ge) (special if omitted)
!excit=300uA    ! (off,30nA,100nA,300nA,1uA,3uA,10uA,30uA,100uA,300uA,1mA,10mV,1mV) (if omitted: default from sensor type)
!range=0        ! range in sensor units (if rang=0: determine range from table, if omitted: default from sensor type)
curv            ! curve (sensor,temp/K) follows, must be ordered, but can be increasing or decreasing	
74663.91424	0.833452742
60860.05098	0.94945966
49551.87681	1.077803432
35363.88586	1.32313617
27025.56488	1.558155166
21164.07675	1.807418904
17439.43364	2.03304067
14660.90306	2.26104489
12674.48887	2.474474502
11040.01571	2.699494433
9785.229203	2.916614022
8788.251677	3.12854605
7989.704459	3.332865003
7286.655618	3.552242447
6732.86304	3.758944594
6251.098886	3.968357998
5847.432327	4.16875188
5191.478606	4.561898582
4648.86278	4.968968542
4096.7535	5.492187484
3531.813507	6.205857585
3061.567702	7.009732318
2632.586667	8.013117487
2308.809844	9.034165571
2050.115691	10.10054065
1856.065086	11.11342812
1697.939632	12.11838913
1566.241253	13.12607813
1456.905801	14.10203743
1361.213594	15.09700775
1277.653195	16.0933466
1205.321893	17.06789303
1140.225621	18.05500221
1082.497021	19.03311348
1029.299845	20.03519344
978.7301404	21.09197235
909.7052218	22.72586918
853.6474417	24.24230862
800.4013622	25.88646126
754.2905397	27.49036598
712.4078269	29.14169598
670.7126389	30.97229099
627.7691435	33.09676743
575.1713405	36.13175392
530.9271979	39.13507843
493.6372768	42.07116508
460.4204351	45.08211136
431.344044	48.07953453
413.5443388	50.11058044
375.6941402	55.06404877
343.7844255	60.05997467
316.5557099	65.08597946
293.3070433	70.08469391
273.2720797	75.05005646
255.8364317	79.95571518
240.2177908	84.94446182
226.3417365	89.90671921
213.7399247	94.94441986
202.290575	100.0309563
182.836437	110.0102921
166.6070332	120.016922
152.8936908	130.0197296
141.1122505	140.0428009
130.9833926	150.0209808
122.1217608	160.0074768
114.3245474	170.0121689
107.4602859	179.9772949
101.3318808	189.9621048
95.84227734	199.9853439
90.91929929	209.9731979
87.21012645	218.2335968
82.43730345	229.9926758
78.78173797	239.9560928
75.43740052	249.9537582
72.39056663	259.9496765
69.58110202	269.9509277
66.99775356	279.9595947
64.61902665	289.9429169
62.42460824	299.9438019
60.37761496	309.9502869
59.41308694	314.9428101
58.49246424	319.9327393
57.41458757	325.8934326
56.75585142	329.7308502

name=ILL5_T     ! name (15 char.max.,will be converted to uppercase)
sens=x13090     ! sensor no (max.10 char.)
unit=Ohm        ! sensor format (mV,V,Ohm), log formats are choosen automatically
!tlim=325       ! setpoint limit (automatic if omitted)
type=cernox     ! sensor type (Special,Si,GaAlAs,Pt250,Pt500,Pt2500,RhFe,C,Cernox,RuOx,Ge) (special if omitted)
!excit=300uA    ! (off,30nA,100nA,300nA,1uA,3uA,10uA,30uA,100uA,300uA,1mA,10mV,1mV) (if omitted: default from sensor type)
!range=0        ! range in sensor units (if rang=0: determine range from table, if omitted: default from sensor type)
curv            ! curve (sensor,temp/K) follows, must be ordered, but can be increasing or decreasing
17567.87648	1.201366951
14456.91319	1.302862619
12318.44286	1.398092685
9269.380756	1.596958259
7344.684998	1.797326926
6085.680579	1.99159442
5139.052338	2.197274569
4451.500522	2.398702837
3949.487228	2.590664118
3517.826085	2.799921785
3186.625233	3.000394356
2918.648758	3.198511655
2682.019504	3.408070547
2506.09826	3.592113857
2335.93761	3.79924143
2201.478624	3.98818411
2066.622624	4.205386724
1853.180966	4.622492963
1691.598232	5.025609187
1528.363648	5.532537741
1354.239931	6.241173787
1204.801541	7.052924483
1066.439601	8.066313222
961.6540911	9.084471548
879.739935	10.10172926
813.9899552	11.11426358
759.5276654	12.12693966
713.75932	13.13219241
674.7297442	14.13019832
640.6012119	15.12792955
610.800334	16.11502493
584.155119	17.10573197
560.2563531	18.09046006
538.6713548	19.07448296
518.935928	20.05723879
499.0815475	21.13868801
473.0276046	22.72352506
449.9217476	24.31285101
428.6705654	25.9434019
409.4784335	27.58167715
392.1591011	29.2183984
374.5988053	31.03853152
356.3344353	33.15331734
333.3134754	36.16111773
313.4358598	39.16051532
295.8657258	42.15603267
280.4155859	45.14697453
266.4453231	48.14962387
258.0607089	50.14646139
239.0870297	55.14961906
222.9183156	60.14920991
208.8952652	65.1429801
196.5938527	70.14636425
185.6994357	75.14756889
176.0294407	80.14633986
167.3142547	85.14293465
159.4617491	90.14215397
152.3314065	95.13894766
145.8157304	100.1335855
134.3188267	110.1315292
124.5154172	120.1437255
116.0660846	130.1527898
108.6755652	140.1586574
102.2012563	150.1654138
96.45301562	160.170481
91.31824148	170.1750129
86.72731251	180.1773922
82.5798662	190.1782318
78.82235604	200.1880453
75.40375573	210.2018025
72.30526311	220.2043004
69.47473293	230.2003122
66.86851231	240.14454
64.48339454	250.0538287
62.2722194	260.0092416
60.22026932	270.0083784
58.31241678	279.9985487
56.54399696	290.0247998
54.89903782	300.0458261
53.35356358	310.065352
52.62386051	315.0655902
51.92029427	320.0639526
51.10076883	326.0873737
50.55494992	330.2364089

name=ILL5_S     ! name (15 char.max.,will be converted to uppercase)
sens=x09882     ! sensor no (max.10 char.)
unit=Ohm        ! sensor format (mV,V,Ohm), log formats are choosen automatically
!tlim=325       ! setpoint limit (automatic if omitted)
type=cernox     ! sensor type (Special,Si,GaAlAs,Pt250,Pt500,Pt2500,RhFe,C,Cernox,RuOx,Ge) (special if omitted)
!excit=300uA    ! (off,30nA,100nA,300nA,1uA,3uA,10uA,30uA,100uA,300uA,1mA,10mV,1mV) (if omitted: default from sensor type)
!range=0        ! range in sensor units (if rang=0: determine range from table, if omitted: default from sensor type)
curv            ! curve (sensor,temp/K) follows, must be ordered, but can be increasing or decreasing
14797.9	1.19193
12448.4	1.29974
10982.6	1.38715
8547.47	1.59428
7041.63	1.79221
5911	2.00599
5115.55	2.21219
4531.17	2.41069
4078.98	2.6051
3727.92	2.79063
3402.6	2.99993
3128.16	3.21371
2913.34	3.41252
2734.11	3.60403
2569.37	3.80774
2431.76	4.0002
2312.38	4.1892
2096.39	4.59514
1922.56	4.99537
1744.81	5.50526
1549.77	6.22335
1383.86	7.02472
1222.31	8.06177
1100.15	9.09066
1002.21	10.1355
924.021	11.1589
859.364	12.1735
804.651	13.185
758.845	14.162
718.001	15.1556
681.881	16.1464
650.369	17.1142
621.743	18.0865
596.067	19.0522
572.129	20.0353
548.69	21.0945
516.935	22.695
490.347	24.2048
465.176	25.8072
442.439	27.4145
422.126	29.018
401.43	30.8186
379.561	32.9565
352.698	35.9509
329.394	38.968
309.122	41.9784
291.451	44.9523
275.567	47.9705
266.007	49.9734
244.814	54.9644
226.895	59.9372
211.835	64.8041
198.257	69.8265
186.421	74.8073
175.994	79.76
166.615	84.7645
158.17	89.757
150.595	94.7278
143.445	99.88
131.348	109.891
121.126	119.886
112.336	129.879
104.767	139.858
98.1002	149.874
92.2394	159.86
87.0447	169.871
82.4096	179.84
78.2514	189.848
74.5122	199.87
71.1115	209.86
68.0321	219.844
65.2143	229.889
62.6401	239.915
60.2922	249.884
58.1205	259.897
56.124	269.929
54.28	279.941
52.5664	289.964
50.9743	300.009
49.4965	310.068
48.7925	315.086
48.1168	320.089
47.3448	326.091
46.8369	330.089