diff --git a/trimsp/src/trimsp7l.F b/trimsp/src/trimsp7l.F index a8eb93e..4344e1d 100644 --- a/trimsp/src/trimsp7l.F +++ b/trimsp/src/trimsp7l.F @@ -3005,30 +3005,27 @@ C WRITE(21,1496) 1496 FORMAT(1H1,/,5X,'RECOILS') WRITE(21,1597) - 1597 FORMAT(///,5X,8HDEPTH(A), - 1 5X,10HINLOSS(EV),3X,10HTELOSS(EV),3X,10HELLOSS(EV), - 2 3X,10HDAMAGE(EV),3X,10HPHONON(EV),5X,3HDPA, -c 3 2X,6HDPA(1),2X,6HDPA(2)/) - 3 2X,6HDPA(1),2X,6HDPA(2), - 4 1X,5H(1-1),1X,5H(1-2),1X,5H(2-1),1X,5H(2-2)/) + 1597 FORMAT(///,5X,8HDEPTH(A), 5X,10HINLOSS(EV),3X,10HTELOSS(EV),3X + & ,10HELLOSS(EV), 3X,10HDAMAGE(EV),3X,10HPHONON(EV),5X,3HDPA, + & 2X,6HDPA(1),2X,6HDPA(2), 1X,5H(1-1),1X,5H(1-2),1X,5H(2-1),1X + & ,5H(2-2)/) D1=0.D0 D2=CW do im3=100,1,-1 if (.not.equal(ionr(im3),0.D0)) go to 31 -C if(ionr(im3).ne.0.) goto 31 enddo im3=1 - 31 im3=MIN0(im3+2,100) - DO 1594 I=1,im3 - WRITE(21,1595) D1,D2,IONR(I),DENTR(I),DMGNR(I),ELGDR(I),PHONR(I) - 1 ,ICDTR(I),ICDIRN(I,1),ICDIRN(I,2) - 2 ,ICDIRI(I,1,1),ICDIRI(I,1,2),ICDIRI(I,2,1),ICDIRI(I,2,2) -c1595 FORMAT(1X,F6.0,1H-,F6.0,1P1E14.4,4E13.4,3I8) - 1595 FORMAT(1X,F6.0,1H-,F6.0,1P1E14.4,4E13.4,3I8,4I6) - D1=D2 - 1594 D2=D2+CW + 31 im3=MIN0(im3+2,100) + DO I=1,im3 + WRITE(21,1595) D1,D2,IONR(I),DENTR(I),DMGNR(I),ELGDR(I), + & PHONR(I),ICDTR(I),ICDIRN(I,1),ICDIRN(I,2) + & ,ICDIRI(I,1,1),ICDIRI(I,1,2),ICDIRI(I,2,1),ICDIRI(I,2,2) + 1595 FORMAT(1X,F6.0,1H-,F6.0,1P1E14.4,4E13.4,3I8,4I6) + D1=D2 + D2=D2+CW + ENDDO WRITE(21,1596) TIONR,TDENTR,TDMGNR,TELGDR,TPHONR - 1,ICDTTR,ICDITR(1),ICDITR(2) + & ,ICDTTR,ICDITR(1),ICDITR(2) 1596 FORMAT(/14X,1P1E14.4,4E13.4,3I8) 1497 continue C @@ -3045,7 +3042,6 @@ C EMEAN=EB/BI AVEB=EMEAN IF (equal(BI,1.0d0))GO TO 1506 -C IF(BI.EQ.1.) GO TO 1506 AVNLB=ENUCLB/BI VANLB=ENL2B/BI-AVNLB*AVNLB SIGNLB=DSQRT(VANLB) @@ -3056,20 +3052,19 @@ C IF(BI.EQ.1.) GO TO 1506 DFIILB=SIGILB/BI 1506 WRITE(21,1508) RN,RE,EMEANR,EMEAN 1508 FORMAT(/5X,'PART.REFL.COEF.=',1PE11.4,' ENERGY REFL.COEF.=' - 1 ,1E11.4,' REL.MEAN ENERGY =',1E11.4,' MEAN ENERGY =' - 2 ,1E11.4) + & ,1E11.4,' REL.MEAN ENERGY =',1E11.4,' MEAN ENERGY =' + & ,1E11.4) IF(IB.EQ.0) GO TO 1512 - CALL MOMENT(EB1B,EB2B,EB3B,EB4B,EB5B,EB6B - 1 ,EB,EB2SUM,EB3SUM,EB4SUM,EB5SUM,EB6SUM,BI) - CALL MOMENT(EB1BL,EB2BL,EB3BL,EB4BL,EB5BL,EB6BL - 1 ,EB1SUL,EB2SUL,EB3SUL,EB4SUL,EB5SUL,EB6SUL,BIL) - CALL MOMENTS(FIB0,SEB,THB,FOB,FIB,SIB,SIGMAB,DFIB0,DSEB,DTHB, - 1 EB,EB2SUM,EB3SUM,EB4SUM,EB5SUM,EB6SUM,BI) - CALL MOMENT(PL1S,PL2S,PL3S,PL4S,PL5S,PL6S - 1 ,PLSB,PL2SB,PL3SB,PL4SB,PL5SB,PL6SB,BI) - CALL MOMENTS(FIPB0,SEPB,THPB,FOPB,FIPB,SIPB,SIGMPB - 1 ,DFIPB0,DSEPB,DTHPB, - 2 PLSB,PL2SB,PL3SB,PL4SB,PL5SB,PL6SB,BI) + CALL MOMENT(EB1B,EB2B,EB3B,EB4B,EB5B,EB6B,EB,EB2SUM,EB3SUM,EB4SUM + & ,EB5SUM,EB6SUM,BI) + CALL MOMENT(EB1BL,EB2BL,EB3BL,EB4BL,EB5BL,EB6BL,EB1SUL,EB2SUL + & ,EB3SUL,EB4SUL,EB5SUL,EB6SUL,BIL) + CALL MOMENTS(FIB0,SEB,THB,FOB,FIB,SIB,SIGMAB,DFIB0,DSEB,DTHB,EB + & ,EB2SUM,EB3SUM,EB4SUM,EB5SUM,EB6SUM,BI) + CALL MOMENT(PL1S,PL2S,PL3S,PL4S,PL5S,PL6S,PLSB,PL2SB,PL3SB,PL4SB + & ,PL5SB,PL6SB,BI) + CALL MOMENTS(FIPB0,SEPB,THPB,FOPB,FIPB,SIPB,SIGMPB,DFIPB0,DSEPB + & ,DTHPB, PLSB,PL2SB,PL3SB,PL4SB,PL5SB,PL6SB,BI) WRITE(21,7117) WRITE(21,7241) FIB0,SEB,THB,FOB,SIGMAB,DFIB0,DSEB,DTHB 7241 FORMAT(1X,' ENERGY',5X,1P1E12.4,7E14.4) @@ -3089,11 +3084,10 @@ C IF(BI.EQ.1.) GO TO 1506 IF(IB.EQ.0) GO TO 1512 WRITE(21,1514) 1514 FORMAT(//5X,'POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED ', - 1 'PROJECTILES'//) -cTR 1514 FORMAT(//5X,'POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTIL -cTR 1ES'//) - DO 1516 I=1,20 - 1516 RKADB(I)=DBLE(KADB(I))*20.D0/DBLE(IB) + & 'PROJECTILES'//) + DO I=1,20 + RKADB(I)=DBLE(KADB(I))*20.D0/DBLE(IB) + ENDDO WRITE(21,1518)(AI(I),I=1,20),(KADB(I),I=1,20),(RKADB(I),I=1,20) 1518 FORMAT(5X,20F6.2//,5X,20I6/5X,20F6.3) 1512 CONTINUE @@ -3109,7 +3103,6 @@ C TMEANR=TE/TN EMEANT=TMEANR*E0 IF (equal(TIT,1.0D0)) GO TO 1520 -C IF(TIT.EQ.1.) GO TO 1520 AVNLT=ENUCLT/TIT VANLT=ENL2T/TIT-AVNLT*AVNLT SIGNLT=DSQRT(VANLT) @@ -3120,13 +3113,12 @@ C IF(TIT.EQ.1.) GO TO 1520 DFIILT=SIGILT/TIT 1520 WRITE(21,1522) TN,TE,TMEANR,EMEANT 1522 FORMAT(//5X,'PART.TRANSM.COEF.=',1PE11.4,' ENERGY TRANSM.COEF.=' - 1 ,1E11.4,' REL.MEAN ENERGY =',1E11.4,' MEAN ENERGY =' - 2 ,1E11.4) - CALL MOMENTS(FIT0,SET,THT,FOT,FIT,SIT,SIGMAT,DFIT0,DSET,DTHT, - 1 ET,ET2SUM,ET3SUM,ET4SUM,ET5SUM,ET6SUM,TIT) - CALL MOMENTS(FIPT0,SEPT,THPT,FOPT,FIPT,SIPT,SIGMPT - 1 ,DFIPT0,DSEPT,DTHPT, - 2 PLST,PL2ST,PL3ST,PL4ST,PL5ST,PL6ST,TIT) + & ,1E11.4,' REL.MEAN ENERGY =',1E11.4,' MEAN ENERGY =' + & ,1E11.4) + CALL MOMENTS(FIT0,SET,THT,FOT,FIT,SIT,SIGMAT,DFIT0,DSET,DTHT,ET + & ,ET2SUM,ET3SUM,ET4SUM,ET5SUM,ET6SUM,TIT) + CALL MOMENTS(FIPT0,SEPT,THPT,FOPT,FIPT,SIPT,SIGMPT,DFIPT0,DSEPT + & ,DTHPT, PLST,PL2ST,PL3ST,PL4ST,PL5ST,PL6ST,TIT) WRITE(21,7117) WRITE(21,7241) FIT0,SET,THT,FOT,SIGMAT,DFIT0,DSET,DTHT WRITE(21,7242) FIPT0,SEPT,THPT,FOPT,SIGMPT,DFIPT0,DSEPT,DTHPT @@ -3134,11 +3126,10 @@ C IF(TIT.EQ.1.) GO TO 1520 WRITE(21,7238) AVILT,VAILT,SIGILT,DFIILT WRITE(21,1526) 1526 FORMAT(//5X,'POLAR ANGULAR DISTRIBUTION OF TRANSMITTED ', - 1 'PARTICLES'//) -cTR 1526 FORMAT(//5X,'POLAR ANGULAR DISTRIBUTION OF TRANSMITTED PARTICLES' -cTR 1//) - DO 1528 I=1,20 - 1528 RKADT(I)=DBLE(KADT(I))*20.D0/DBLE(IT) + & 'PARTICLES'//) + DO I=1,20 + RKADT(I)=DBLE(KADT(I))*20.D0/DBLE(IT) + ENDDO WRITE(21,1530) (AI(I),I=1,20),(KADT(I),I=1,20),(RKADT(I),I=1,20) 1530 FORMAT(5X,20F6.2//,5X,20I6/5X,20F6.3) 1524 CONTINUE @@ -3148,267 +3139,253 @@ C IF(ISPA.EQ.0) GO TO 1700 WRITE(21,1548) 1548 FORMAT(1H1,5X,'BACKWARD SPUTTERING') - DO 1552 J=1,NJ(1) - ISPAL(1) = ISPAL(1)+IBSP(J) - 1552 ESPAL(1) = ESPAL(1)+EBSP(J) - DO 1554 J=NJ(1)+1,JT(3) - ISPAL(2) = ISPAL(2)+IBSP(J) - 1554 ESPAL(2) = ESPAL(2)+EBSP(J) - DO 1556 J=JT(3)+1,LJ - ISPAL(3) = ISPAL(3)+IBSP(J) - 1556 ESPAL(3) = ESPAL(3)+EBSP(J) + DO J=1,NJ(1) + ISPAL(1) = ISPAL(1)+IBSP(J) + ESPAL(1) = ESPAL(1)+EBSP(J) + ENDDO + DO J=NJ(1)+1,JT(3) + ISPAL(2) = ISPAL(2)+IBSP(J) + ESPAL(2) = ESPAL(2)+EBSP(J) + ENDDO + DO J=JT(3)+1,LJ + ISPAL(3) = ISPAL(3)+IBSP(J) + ESPAL(3) = ESPAL(3)+EBSP(J) + ENDDO WRITE(21,1558) ISPA,ESPA 1558 FORMAT(///,8X,'ALL SPUTTERED PARTICLES = ',I7,3X - 1 ,'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//) + & ,'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//) DO 1557 J=1,L - WRITE(21,1559) J,ISPAL(J),ESPAL(J) - 1559 FORMAT(8X,'SPUTTERED PARTICLES (',I1,'.LAYER) = ',I7,3X - 1 ,'SPUTTERED ENERGY = ',E10.4,3H EV) + WRITE(21,1559) J,ISPAL(J),ESPAL(J) + 1559 FORMAT(8X,'SPUTTERED PARTICLES (',I1,'.LAYER) = ',I7,3X + & ,'SPUTTERED ENERGY = ',E10.4,3H EV) 1557 CONTINUE WRITE(21,1560) 1560 FORMAT(//1X,'1.LAYER') DO 1562 J=1,NJ(1) - WRITE(21,1564) J,IBSP(J),J,EBSP(J) - 1564 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X - 1 ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') + WRITE(21,1564) J,IBSP(J),J,EBSP(J) + 1564 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X + & ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') 1562 CONTINUE IF(ISPA.EQ.0) GO TO 1700 - DO 1572 J=1,LJ - RIP(J)=DBLE(ISPIP(J))/DBLE(ISPA) - RIS(J)=DBLE(ISPIS(J))/DBLE(ISPA) - ROP(J)=DBLE(ISPOP(J))/DBLE(ISPA) - ROS(J)=DBLE(ISPOS(J))/DBLE(ISPA) - REIP(J)=ESPIP(J)/ESPA - REIS(J)=ESPIS(J)/ESPA - REOP(J)=ESPOP(J)/ESPA - REOS(J)=ESPOS(J)/ESPA - 1572 CONTINUE + DO J=1,LJ + RIP(J)=DBLE(ISPIP(J))/DBLE(ISPA) + RIS(J)=DBLE(ISPIS(J))/DBLE(ISPA) + ROP(J)=DBLE(ISPOP(J))/DBLE(ISPA) + ROS(J)=DBLE(ISPOS(J))/DBLE(ISPA) + REIP(J)=ESPIP(J)/ESPA + REIS(J)=ESPIS(J)/ESPA + REOP(J)=ESPOP(J)/ESPA + REOS(J)=ESPOS(J)/ESPA + ENDDO DO 1584 J=1,LJ - IF(IBSP(J).EQ.0) GO TO 1584 - RIPJ(J)=DBLE(ISPIP(J))/DBLE(IBSP(J)) - RISJ(J)=DBLE(ISPIS(J))/DBLE(IBSP(J)) - ROPJ(J)=DBLE(ISPOP(J))/DBLE(IBSP(J)) - ROSJ(J)=DBLE(ISPOS(J))/DBLE(IBSP(J)) - REIPJ(J)=ESPIP(J)/EBSP(J) - REISJ(J)=ESPIS(J)/EBSP(J) - REOPJ(J)=ESPOP(J)/EBSP(J) - REOSJ(J)=ESPOS(J)/EBSP(J) + IF(IBSP(J).EQ.0) GO TO 1584 + RIPJ(J)=DBLE(ISPIP(J))/DBLE(IBSP(J)) + RISJ(J)=DBLE(ISPIS(J))/DBLE(IBSP(J)) + ROPJ(J)=DBLE(ISPOP(J))/DBLE(IBSP(J)) + ROSJ(J)=DBLE(ISPOS(J))/DBLE(IBSP(J)) + REIPJ(J)=ESPIP(J)/EBSP(J) + REISJ(J)=ESPIS(J)/EBSP(J) + REOPJ(J)=ESPOP(J)/EBSP(J) + REOSJ(J)=ESPOS(J)/EBSP(J) 1584 CONTINUE DO 1571 J=1,LJ - IF(ISPIP(J).EQ.0) GO TO 3571 - ESPMIP(J)=ESPIP(J)/DBLE(ISPIP(J)) - 3571 IF(ISPIS(J).EQ.0) GO TO 3572 - ESPMIS(J)=ESPIS(J)/DBLE(ISPIS(J)) - 3572 IF(ISPOP(J).EQ.0) GO TO 3573 - ESPMOP(J)=ESPOP(J)/DBLE(ISPOP(J)) - 3573 IF(ISPOS(J).EQ.0) GO TO 1571 - ESPMOS(J)=ESPOS(J)/DBLE(ISPOS(J)) + IF(ISPIP(J).EQ.0) GO TO 3571 + ESPMIP(J)=ESPIP(J)/DBLE(ISPIP(J)) + 3571 IF(ISPIS(J).EQ.0) GO TO 3572 + ESPMIS(J)=ESPIS(J)/DBLE(ISPIS(J)) + 3572 IF(ISPOP(J).EQ.0) GO TO 3573 + ESPMOP(J)=ESPOP(J)/DBLE(ISPOP(J)) + 3573 IF(ISPOS(J).EQ.0) GO TO 1571 + ESPMOS(J)=ESPOS(J)/DBLE(ISPOS(J)) 1571 CONTINUE 1573 CONTINUE - DO 1578 J=1,LJ - SPY(J)=DBLE(IBSP(J))/HN - 1578 SPE(J)=EBSP(J)/(HN*EMV) + DO J=1,LJ + SPY(J)=DBLE(IBSP(J))/HN + SPE(J)=EBSP(J)/(HN*EMV) + ENDDO DO 1579 J=1,LJ - IF (equal(SPY(J),0.0D0))GO TO 1579 -C IF(SPY(J).EQ.0.0) GO TO 1579 - REY(J)=SPE(J)/SPY(J) - EMSP(J)=EBSP(J)/IBSP(J) + IF (equal(SPY(J),0.0D0))GO TO 1579 + REY(J)=SPE(J)/SPY(J) + EMSP(J)=EBSP(J)/IBSP(J) 1579 CONTINUE IF(ISPAL(1).EQ.0) GO TO 1575 - DO 1574 J=1,NJ(1) - WRITE(21,1576) J,ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J),REIPJ(J) - 1 ,ESPMIP(J) - 2 ,J,ISPIS(J),RIS(J),RISJ(J),ESPIS(J),REIS(J),REISJ(J) - 3 ,ESPMIS(J) - 4 ,J,ISPOP(J),ROP(J),ROPJ(J),ESPOP(J),REOP(J),REOPJ(J) - 5 ,ESPMOP(J) - 6 ,J,ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J),REOSJ(J) - 7 ,ESPMOS(J) - 1576 FORMAT(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,2F9.4,4X - 1 ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ - 2 9X,'ION IN , SECOND. KO(',I1,') = ',I7,2F9.4,4X - 3 ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ - 4 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,2F9.4,4X - 5 ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ - 6 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,2F9.4,4X - 7 ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4) - 1574 CONTINUE + DO J=1,NJ(1) + WRITE(21,1576) J,ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J) + & ,REIPJ(J),ESPMIP(J) ,J,ISPIS(J),RIS(J),RISJ(J),ESPIS(J) + & ,REIS(J),REISJ(J) ,ESPMIS(J) ,J,ISPOP(J),ROP(J),ROPJ(J) + & ,ESPOP(J),REOP(J),REOPJ(J) ,ESPMOP(J) ,J,ISPOS(J),ROS(J) + & ,ROSJ(J),ESPOS(J),REOS(J),REOSJ(J) ,ESPMOS(J) + 1576 FORMAT(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,2F9.4,4X + & ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 9X,'ION IN , SECOND. KO(',I1,') = ',I7,2F9.4,4X + & ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,2F9.4,4X + & ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,2F9.4,4X + & ,'ENERGY = ',E10.4,' EV',2F9.4,4X,'MEAN ENERGY = ',E10.4) + ENDDO 1575 CONTINUE WRITE(21,1577) 1577 FORMAT(/) DO 1580 J=1,NJ(1) - WRITE(21,1582) J,SPY(J),J,SPE(J),J,REY(J),J,EMSP(J) - 1582 FORMAT(5X,'SPUTTERING YIELD(',I1,') = ',1PE10.3, - 1 ' SPUTTERED ENERGY(',I1,') = ',1E10.3, - 2 ' REL.MEAN ENERGY(',I1,') = ',1E10.3, - 3 ' MEAN ENERGY(',I1,') = ',1E10.3) + WRITE(21,1582) J,SPY(J),J,SPE(J),J,REY(J),J,EMSP(J) + 1582 FORMAT(5X,'SPUTTERING YIELD(',I1,') = ',1PE10.3, + & ' SPUTTERED ENERGY(',I1,') = ',1E10.3, + & ' REL.MEAN ENERGY(',I1,') = ',1E10.3, + & ' MEAN ENERGY(',I1,') = ',1E10.3) 1580 CONTINUE DO 7260 J=1,NJ(1) - IF(IBSP(J).LE.1) GO TO 7260 - YSP=IBSP(J) - YSPL=IBSPL(J) - CALL MOMENTN(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES - 1 ,DFIES0,DSEES,DTHES, - 2 EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6 - 3 ,EBSP(J),SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J) - 4 ,SPE6S(J),YSP) - CALL MOMENTN(FIES0L,SEESL,THESL,FOESL,FIESL,SIESL,SIGMSL - 1 ,DFIESL,DSEESL,DTHESL, - 2 EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,EBSP6L - 3 ,SPE1SL(J),SPE2SL(J),SPE3SL(J),SPE4SL(J),SPE5SL(J) - 4 ,SPE6SL(J),YSPL) - WRITE(21,7117) - WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES - 7261 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,7E14.4) - WRITE(21,7263) J,FIES0L,SEESL,THESL,FOESL,SIGMSL - 1 ,DFIESL,DSEESL,DTHESL - 7263 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,7E14.4) - WRITE(21,7118) - 7118 FORMAT(/20X,' 1.MOMENT ',4X,' 2.MOMENT ',4X,' 3.MOMENT ' - 1 ,4X,' 4.MOMENT ',4X,' 5.MOMENT ',4X,' 6.MOMENT ') - WRITE(21,7265) J,EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6 - 7265 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,5E14.4) - WRITE(21,7267) J,EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,EBSP6L - 7267 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,5E14.4) - FIESB(J)=FIES0 - SEESB(J)=SEES - THESB(J)=THES - FOESB(J)=FOES - SGMESB(J)=SIGMES - DFIESB(J)=DFIES0 - DSEESB(J)=DSEES - DTHESB(J)=DTHES + IF(IBSP(J).LE.1) GO TO 7260 + YSP=IBSP(J) + YSPL=IBSPL(J) + CALL MOMENTN(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES ,DFIES0 + & ,DSEES,DTHES, EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6 ,EBSP(J) + & ,SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J) ,SPE6S(J),YSP) + CALL MOMENTN(FIES0L,SEESL,THESL,FOESL,FIESL,SIESL,SIGMSL + & ,DFIESL,DSEESL,DTHESL, EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L + & ,EBSP6L ,SPE1SL(J),SPE2SL(J),SPE3SL(J),SPE4SL(J),SPE5SL(J) + & ,SPE6SL(J),YSPL) + WRITE(21,7117) + WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES + 7261 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,7E14.4) + WRITE(21,7263) J,FIES0L,SEESL,THESL,FOESL,SIGMSL,DFIESL,DSEESL + & ,DTHESL + 7263 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,7E14.4) + WRITE(21,7118) + 7118 FORMAT(/20X,' 1.MOMENT ',4X,' 2.MOMENT ',4X,' 3.MOMENT ' + & ,4X,' 4.MOMENT ',4X,' 5.MOMENT ',4X,' 6.MOMENT ') + WRITE(21,7265) J,EBSP1,EBSP2,EBSP3,EBSP4,EBSP5,EBSP6 + 7265 FORMAT(1X,' ENERGY(',I1,')',5X,1P1E12.4,5E14.4) + WRITE(21,7267) J,EBSP1L,EBSP2L,EBSP3L,EBSP4L,EBSP5L,EBSP6L + 7267 FORMAT(1X,'LOGENERGY(',I1,')',5X,1P1E12.4,5E14.4) + FIESB(J)=FIES0 + SEESB(J)=SEES + THESB(J)=THES + FOESB(J)=FOES + SGMESB(J)=SIGMES + DFIESB(J)=DFIES0 + DSEESB(J)=DSEES + DTHESB(J)=DTHES 7260 CONTINUE IF(L.EQ.1) GO TO 1593 IF(ISPAL(2).EQ.0) GO TO 1593 WRITE(21,1566) 1566 FORMAT(//1X,'2.LAYER') DO 1568 J=NJ(1)+1,JT(3) - WRITE(21,1570) J-NJ(1),IBSP(J),J-NJ(1),EBSP(J) - 1570 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X - 1 ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') + WRITE(21,1570) J-NJ(1),IBSP(J),J-NJ(1),EBSP(J) + 1570 FORMAT(9X,'SPUTTERED PARTICLES(',I1,') = ',I7,5X + & ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') 1568 CONTINUE DO 1586 J=NJ(1)+1,JT(3) - WRITE(21,1576) J-NJ(1),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J) - 1 ,REIPJ(J),ESPMIP(J) - 2 ,J-NJ(1),ISPIS(J),RIS(J),RISJ(J),ESPIS(J),REIS(J) - 3 ,REISJ(J),ESPMIS(J) - 4 ,J-NJ(1),ISPOP(J),ROP(J),ROPJ(J),ESPOP(J),REOP(J) - 5 ,REOPJ(J),ESPMOP(J) - 6 ,J-NJ(1),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J) - 7 ,REOSJ(J),ESPMOS(J) + WRITE(21,1576) J-NJ(1),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J) + & ,REIPJ(J),ESPMIP(J),J-NJ(1),ISPIS(J),RIS(J),RISJ(J) + & ,ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-NJ(1),ISPOP(J) + & ,ROP(J),ROPJ(J),ESPOP(J),REOP(J) ,REOPJ(J),ESPMOP(J),J + & -NJ(1),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J),REOSJ(J) + & ,ESPMOS(J) 1586 CONTINUE WRITE(21,1577) - DO 1592 J=NJ(1)+1,JT(3) - WRITE(21,1582) J-NJ(1),SPY(J),J,SPE(J),J,REY(J),J,EMSP(J) - 1592 CONTINUE + DO J=NJ(1)+1,JT(3) + WRITE(21,1582) J-NJ(1),SPY(J),J,SPE(J),J,REY(J),J,EMSP(J) + ENDDO 1593 CONTINUE DO 7262 J=NJ(1)+1,JT(3) - IF(IBSP(J).LE.1) GO TO 7262 - YSP=IBSP(J) - CALL MOMENTS(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES - 1 ,DFIES0,DSEES,DTHES, - 2 EBSP(J),SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J) - 3 ,SPE6S(J),YSP) - WRITE(21,7117) - WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES - FIESB(J)=FIES0 - SEESB(J)=SEES - THESB(J)=THES - FOESB(J)=FOES - SGMESB(J)=SIGMES - DFIESB(J)=DFIES0 - DSEESB(J)=DSEES - DTHESB(J)=DTHES + IF(IBSP(J).LE.1) GO TO 7262 + YSP=IBSP(J) + CALL MOMENTS(FIES0,SEES,THES,FOES,FIES,SIES,SIGMES ,DFIES0 + & ,DSEES,DTHES, EBSP(J),SPE2S(J),SPE3S(J),SPE4S(J),SPE5S(J) + & ,SPE6S(J),YSP) + WRITE(21,7117) + WRITE(21,7261) J,FIES0,SEES,THES,FOES,SIGMES,DFIES0,DSEES,DTHES + FIESB(J)=FIES0 + SEESB(J)=SEES + THESB(J)=THES + FOESB(J)=FOES + SGMESB(J)=SIGMES + DFIESB(J)=DFIES0 + DSEESB(J)=DSEES + DTHESB(J)=DTHES 7262 CONTINUE IF(L.EQ.2) GO TO 1532 IF(ISPAL(3).EQ.0) GO TO 1532 WRITE(21,1534) 1534 FORMAT(//1X,'3.LAYER') DO 1536 J=JT(3)+1,LJ - WRITE(21,1538) J-JT(3),IBSP(J),J-JT(3),EBSP(J) - 1538 FORMAT(10X,'SPUTTERED PARTICLES(',I1,') = ',I7,6X - 1 ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') + WRITE(21,1538) J-JT(3),IBSP(J),J-JT(3),EBSP(J) + 1538 FORMAT(10X,'SPUTTERED PARTICLES(',I1,') = ',I7,6X + & ,'SPUTTERED ENERGY(',I1,') = ',E10.4,' EV') 1536 CONTINUE - DO 1540 J=JT(3)+1,LJ - WRITE(21,1576) J-JT(3),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J) - 1 ,REIPJ(J),ESPMIP(J) - 2 ,J-JT(3),ISPIS(J),RIS(J),RISJ(J),ESPIS(J),REIS(J) - 3 ,REISJ(J),ESPMIS(J) - 4 ,J-JT(3),ISPOP(J),ROP(J),ROPJ(J),ESPOP(J),REOP(J) - 5 ,REOPJ(J),ESPMOP(J) - 6 ,J-JT(3),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J) - 7 ,REOSJ(J),ESPMOS(J) - 1540 CONTINUE + DO J=JT(3)+1,LJ + WRITE(21,1576) J-JT(3),ISPIP(J),RIP(J),RIPJ(J),ESPIP(J),REIP(J) + & ,REIPJ(J),ESPMIP(J),J-JT(3),ISPIS(J),RIS(J),RISJ(J) + & ,ESPIS(J),REIS(J),REISJ(J),ESPMIS(J),J-JT(3),ISPOP(J) + & ,ROP(J),ROPJ(J),ESPOP(J),REOP(J),REOPJ(J),ESPMOP(J), + & J-JT(3),ISPOS(J),ROS(J),ROSJ(J),ESPOS(J),REOS(J),REOSJ(J) + & ,ESPMOS(J) + ENDDO WRITE(21,1577) - DO 1542 J=JT(3)+1,LJ - WRITE(21,1582) J-JT(3),SPY(J),J-JT(3),SPE(J),J-JT(3),REY(J) - 1 ,J-JT(3),EMSP(J) - 1542 CONTINUE + DO J=JT(3)+1,LJ + WRITE(21,1582) J-JT(3),SPY(J),J-JT(3),SPE(J),J-JT(3),REY(J), + & J-JT(3),EMSP(J) + ENDDO 1532 CONTINUE C C BACKWARD SPUTTERING : ANGULAR DISTRIBUTIONS C WRITE(21,1601) 1601 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF ALL BACKWARD ', - 1 'SPUTTERED PARTICLES'//) -cTR 1601 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF ALL BACKWARD SPUTTERED -cTR 1 PARTICLES'//) + & 'SPUTTERED PARTICLES'//) DO 1603 I=1,20 1603 RKADS(I)=KADS(I)*20.D0/ISPA WRITE(21,1518) (AI(I),I=1,20),(KADS(I),I=1,20),(RKADS(I),I=1,20) - DO 1602 I=1,20 - DO 1602 J=1,NJ(1) - 1602 KADSL(I,1)=KADSL(I,1)+KADSJ(I,J) - DO 1604 I=1,20 - DO 1604 J=NJ(1)+1,JT(3) - 1604 KADSL(I,2)=KADSL(I,2)+KADSJ(I,J) + DO I=1,20 + DO J=1,NJ(1) + KADSL(I,1)=KADSL(I,1)+KADSJ(I,J) + ENDDO + ENDDO + DO I=1,20 + DO J=NJ(1)+1,JT(3) + KADSL(I,2)=KADSL(I,2)+KADSJ(I,J) + ENDDO + ENDDO IF(ISPAL(1).EQ.0) GO TO 1614 IF(NJ(1).EQ.1) GO TO 1614 WRITE(21,1606) 1606 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', - 1 'PARTICLES ; LAYER 1'//) -cTR 1606 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES ; -cTR 1LAYER 1'//) + & 'PARTICLES ; LAYER 1'//) DO 1608 I=1,20 1608 RKADSL(I,1)=KADSL(I,1)*20.D0/ISPAL(1) - WRITE(21,1518) (AI(I),I=1,20),(KADSL(I,1),I=1,20) - 1 ,(RKADSL(I,1),I=1,20) + WRITE(21,1518) (AI(I),I=1,20),(KADSL(I,1),I=1,20),(RKADSL(I,1),I + & =1,20) DO 1618 J=1,NJ(1) - IF(IBSP(J).EQ.0) GO TO 1618 - WRITE(21,1616) J - 1616 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', - 1 'PARTICLES ; LAYER 1 ; SPECIES ',I1//) -cTR 1616 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES ; -cTR 1LAYER 1 ; SPECIES ',I1//) - DO 1620 I=1,20 - 1620 RKADSJ(I,J)=KADSJ(I,J)*20.D0/IBSP(J) - WRITE(21,1518) (AI(I),I=1,20),(KADSJ(I,J),I=1,20) - 1 ,(RKADSJ(I,J),I=1,20) + IF(IBSP(J).EQ.0) GO TO 1618 + WRITE(21,1616) J + 1616 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', + & 'PARTICLES ; LAYER 1 ; SPECIES ',I1//) + DO 1620 I=1,20 + 1620 RKADSJ(I,J)=KADSJ(I,J)*20.D0/IBSP(J) + WRITE(21,1518) (AI(I),I=1,20),(KADSJ(I,J),I=1,20),(RKADSJ(I,J) + & ,I=1,20) 1618 CONTINUE 1614 IF(L.EQ.1) GO TO 1622 IF(ISPAL(2).EQ.0) GO TO 1622 WRITE(21,1610) 1610 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', - 1 'PARTICLES ; LAYER 2'//) -c 1610 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES ; -c 1LAYER 2'//) + & 'PARTICLES ; LAYER 2'//) DO 1612 I=1,20 1612 RKADSL(I,2)=KADSL(I,2)*20.D0/ISPAL(2) WRITE(21,1518) (AI(I),I=1,20),(KADSL(I,2),I=1,20) - 1 ,(RKADSL(I,2),I=1,20) + & ,(RKADSL(I,2),I=1,20) IF(NJ(2).EQ.1) GO TO 1622 DO 1624 J=NJ(1)+1,JT(3) - IF(IBSP(J).EQ.0) GO TO 1624 - WRITE(21,1626) J-NJ(1) - 1626 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', - 1 'PARTICLES ; LAYER 2 ; SPECIES ',I1//) -cTR 1626 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES ; -cTR 1LAYER 2 ; SPECIES ',I1//) + IF(IBSP(J).EQ.0) GO TO 1624 + WRITE(21,1626) J-NJ(1) + 1626 FORMAT(///5X,'POLAR ANGULAR DISTRIBUTION OF SPUTTERED ', + & 'PARTICLES ; LAYER 2 ; SPECIES ',I1//) DO 1628 I=1,20 1628 RKADSJ(I,J)=KADSJ(I,J)*20.D0/IBSP(J) WRITE(21,1518) (AI(I),I=1,20),(KADSJ(I,J),I=1,20) - 1 ,(RKADSJ(I,J),I=1,20) + & ,(RKADSJ(I,J),I=1,20) 1624 CONTINUE 1622 CONTINUE C @@ -3417,72 +3394,77 @@ C 1700 IF(ISPAT.EQ.0) GO TO 1800 WRITE(21,1704) 1704 FORMAT(1H1,5X,'TRANSMISSION SPUTTERING') - DO 1706 J=1,NJ(1) - ISPALT(1) = ISPALT(1)+ITSP(J) - 1706 ESPALT(1) = ESPALT(1)+ETSP(J) - DO 1708 J=NJ(1)+1,JT(3) - ISPALT(2) = ISPALT(2)+ITSP(J) - 1708 ESPALT(2) = ESPALT(2)+ETSP(J) - DO 1710 J=JT(3)+1,LJ - ISPALT(3) = ISPALT(3)+ITSP(J) - 1710 ESPALT(3) = ESPALT(3)+ETSP(J) + DO J=1,NJ(1) + ISPALT(1) = ISPALT(1)+ITSP(J) + ESPALT(1) = ESPALT(1)+ETSP(J) + ENDDO + DO J=NJ(1)+1,JT(3) + ISPALT(2) = ISPALT(2)+ITSP(J) + ESPALT(2) = ESPALT(2)+ETSP(J) + ENDDO + DO J=JT(3)+1,LJ + ISPALT(3) = ISPALT(3)+ITSP(J) + ESPALT(3) = ESPALT(3)+ETSP(J) + ENDDO WRITE(21,1712) ISPAT,ESPAT 1712 FORMAT(///,8X,'ALL SPUTTERED PARTICLES = ',I7,3X - 1 ,'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//) - DO 1711 J=1,L - WRITE(21,1713) J,ISPALT(J),ESPALT(J) - 1713 FORMAT(8X,'SPUTTERED PARTICLES (LAYER ',I1,') = ',I7,3X - 1 ,'SPUTTERED ENERGY = ',E10.4,3H EV) - 1711 CONTINUE - DO 1732 J=1,LJ - RIPT(J)=DBLE(ISPIPT(J))/DBLE(ISPAT) - RIST(J)=DBLE(ISPIST(J))/DBLE(ISPAT) - ROPT(J)=DBLE(ISPOPT(J))/DBLE(ISPAT) - ROST(J)=DBLE(ISPOST(J))/DBLE(ISPAT) - REIPT(J)=ESPIPT(J)/ESPAT - REIST(J)=ESPIST(J)/ESPAT - REOPT(J)=ESPOPT(J)/ESPAT - 1732 REOST(J)=ESPOST(J)/ESPAT + & ,'TOTAL SPUTTERED ENERGY = ',E10.4,3H EV//) + DO J=1,L + WRITE(21,1713) J,ISPALT(J),ESPALT(J) + 1713 FORMAT(8X,'SPUTTERED PARTICLES (LAYER ',I1,') = ',I7,3X + & ,'SPUTTERED ENERGY = ',E10.4,3H EV) + ENDDO + DO J=1,LJ + RIPT(J)=DBLE(ISPIPT(J))/DBLE(ISPAT) + RIST(J)=DBLE(ISPIST(J))/DBLE(ISPAT) + ROPT(J)=DBLE(ISPOPT(J))/DBLE(ISPAT) + ROST(J)=DBLE(ISPOST(J))/DBLE(ISPAT) + REIPT(J)=ESPIPT(J)/ESPAT + REIST(J)=ESPIST(J)/ESPAT + REOPT(J)=ESPOPT(J)/ESPAT + REOST(J)=ESPOST(J)/ESPAT + ENDDO 1715 CONTINUE DO 1717 J=1,LJ - IF(ISPIPT(J).EQ.0) GO TO 4571 - ESPMIPT(J)=ESPIPT(J)/DBLE(ISPIPT(J)) - 4571 IF(ISPIST(J).EQ.0) GO TO 4572 - ESPMIST(J)=ESPIST(J)/DBLE(ISPIST(J)) - 4572 IF(ISPOPT(J).EQ.0) GO TO 4573 - ESPMOPT(J)=ESPOPT(J)/DBLE(ISPOPT(J)) - 4573 IF(ISPOST(J).EQ.0) GO TO 1717 - ESPMOST(J)=ESPOST(J)/DBLE(ISPOST(J)) + IF(ISPIPT(J).EQ.0) GO TO 4571 + ESPMIPT(J)=ESPIPT(J)/DBLE(ISPIPT(J)) + 4571 IF(ISPIST(J).EQ.0) GO TO 4572 + ESPMIST(J)=ESPIST(J)/DBLE(ISPIST(J)) + 4572 IF(ISPOPT(J).EQ.0) GO TO 4573 + ESPMOPT(J)=ESPOPT(J)/DBLE(ISPOPT(J)) + 4573 IF(ISPOST(J).EQ.0) GO TO 1717 + ESPMOST(J)=ESPOST(J)/DBLE(ISPOST(J)) 1717 CONTINUE - DO 1736 J=1,LJ - SPYT(J)=DBLE(ITSP(J))/DBLE(NH) - 1736 SPET(J)=ETSP(J)/(NH*E0) + DO J=1,LJ + SPYT(J)=DBLE(ITSP(J))/DBLE(NH) + SPET(J)=ETSP(J)/(NH*E0) + ENDDO DO 1737 J=1,LJ - IF (equal(SPYT(J),0.0D0))GO TO 1737 -C IF(SPYT(J).EQ.0.0) GO TO 1737 - REYT(J)=SPET(J)/SPYT(J) - EMSPT(J)=REYT(J)*E0 + IF (equal(SPYT(J),0.0D0))GO TO 1737 + REYT(J)=SPET(J)/SPYT(J) + EMSPT(J)=REYT(J)*E0 1737 CONTINUE IF(ISPALT(1).EQ.0) GO TO 1719 WRITE(21,1714) 1714 FORMAT(//1X,'1.LAYER') - DO 1716 J=1,NJ(1) - WRITE(21,1564) J,ITSP(J),J,ETSP(J) - 1716 CONTINUE + DO J=1,NJ(1) + WRITE(21,1564) J,ITSP(J),J,ETSP(J) + ENDDO DO 1734 J=1,NJ(1) - WRITE(21,1581) J,ISPIPT(J),RIPT(J),ESPIPT(J),REIPT(J),ESPMIPT(J) - 1 ,J,ISPIST(J),RIST(J),ESPIST(J),REIST(J),ESPMIST(J) - 2 ,J,ISPOPT(J),ROPT(J),ESPOPT(J),REOPT(J),ESPMOPT(J) - 3 ,J,ISPOST(J),ROST(J),ESPOST(J),REOST(J),ESPMOST(J) + WRITE(21,1581) J,ISPIPT(J),RIPT(J),ESPIPT(J),REIPT(J) + & ,ESPMIPT(J),J,ISPIST(J),RIST(J),ESPIST(J),REIST(J) + & ,ESPMIST(J),J,ISPOPT(J),ROPT(J),ESPOPT(J),REOPT(J) + & ,ESPMOPT(J),J,ISPOST(J),ROST(J),ESPOST(J),REOST(J) + & ,ESPMOST(J) 1734 CONTINUE - 1581 FORMAT(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,1F9.4,4X - 1 ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ - 2 9X,'ION IN , SECOND. KO(',I1,') = ',I7,1F9.4,4X - 3 ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ - 4 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,1F9.4,4X - 5 ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ - 6 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,1F9.4,4X - 7 ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4) + 1581 FORMAT(/9X,'ION IN , PRIMARY KO(',I1,') = ',I7,1F9.4,4X + & ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 9X,'ION IN , SECOND. KO(',I1,') = ',I7,1F9.4,4X + & ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 8X,'ION OUT , PRIMARY KO(',I1,') = ',I7,1F9.4,4X + & ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4/ + & 8X,'ION OUT , SECOND. KO(',I1,') = ',I7,1F9.4,4X + & ,'ENERGY = ',E10.4,' EV',1F9.4,4X,'MEAN ENERGY = ',E10.4) WRITE(21,1577) DO 1738 J=1,NJ(1) WRITE(21,1582) J,SPYT(J),J,SPET(J),J,REYT(J),J,EMSPT(J)