TrimSp information ./Trimsp/SiC_70_30_SiO2/ SiO2_70nm2.0_30nm2.2_SiC_E 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000 11000 12000 13000 14000 15000 16000 17000 17000 18000 19000 20000 21000 22000 23000 24000