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example files for depthProfile

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Maria Martins
2023-02-15 13:41:27 +01:00
parent db358591e9
commit d37cb4add1
1313 changed files with 450166 additions and 11300 deletions
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doc/examples/DepthProfiles/PECVD_thermal_SiC/.DS_Store vendored Normal file
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doc/examples/DepthProfiles/PECVD_thermal_SiC/MINUIT2.OUTPUT Normal file
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*************************************************************************
musrfit MINUIT2 output file from SiC_PECVD_thermal_100G_260K_asym.msr - 2023-01-30 14:29:23
*************************************************************************
elapsed times:
Minimize: 0.004 sec
Minos: 0.055 sec
*************************************************************************
Fval() = 24.8674, Edm() = 0.0856233, NFcn() = 644
*************************************************************************
PARAMETERS
-------------------------------------------------------------------------
Parabolic Minos
No Name Value Error Negative Positive Limits
1 f1 0.100399 0.000195206 --- --- --- ---
2 f2 0.052146 0.000312547 --- --- --- ---
3 f3 0.0119881 0.000273972 --- --- --- ---
4 x1 66.4265 0.362403 --- --- --- ---
5 x2 102.52 0.892732 --- --- --- ---
*************************************************************************
COVARIANCE MATRIX
-------------------------------------------------------------------------
no covariance matrix available
*************************************************************************
CORRELATION COEFFICIENTS
-------------------------------------------------------------------------
no correlation coefficients available
*************************************************************************
chisq/maxLH RESULT
*************************************************************************
Time Range: 0x1p+0, 0x1.9p+4
chisq = 24.8674, NDF = 10, chisq/NDF = 2.486737
*************************************************************************
DONE
*************************************************************************

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doc/examples/DepthProfiles/PECVD_thermal_SiC/MINUIT2.root Normal file
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doc/examples/DepthProfiles/PECVD_thermal_SiC/SiC_PECVD_thermal_100G_10K_diaFrac.msr Normal file
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n/a
###############################################################
FITPARAMETER
# Nr. Name Value Step Pos_Error Boundaries
1 f1 0.4836 0.0012 none 0 1
2 f2 0.22428 0.00088 none
3 f3 0.00002 0.00014 none 0 1
4 x1 64.4 3.2 none
5 x2 102.0 5.0 none
###############################################################
THEORY
userFcn libPDepthProfile PDepthProfile 1 2 3 4 5
###############################################################
RUN data/70nmPECVD-30nmThermalSiO2-SiC_9_010K_100GTF_withDiaFrac PIM3 PSI DAT (name beamline institute data-file-format)
fittype 8 (non muSR fit)
map 0 0 0 0 0 0 0 0 0 0
xy-data 3 30
fit 1 22
packing 1
########################################64#######################
COMMANDS
MINIMIZE
#HESSE
MINOS
SAVE
###############################################################
PLOT 8 (non muSR plot)
runs 1
range 0 25
###############################################################
STATISTIC --- 2023-01-27 21:03:40
chisq = 30.7, NDF = 9, chisq/NDF = 3.415023

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doc/examples/DepthProfiles/PECVD_thermal_SiC/SiC_PECVD_thermal_100G_260K_asym.msr Normal file
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n/a
###############################################################
FITPARAMETER
# Nr. Name Value Step Pos_Error Boundaries
1 f1 0.10040 0.00020 none
2 f2 0.05215 0.00031 none
3 f3 0.01199 0.00027 none
4 x1 66.43 0.36 none
5 x2 102.52 0.89 none
###############################################################
THEORY
userFcn libPDepthProfile PDepthProfile 1 2 3 4 5
###############################################################
RUN data/70nmPECVD-30nmThermalSiO2-SiC_9_260K_100GTF_withDiaFrac PIM3 PSI DAT (name beamline institute data-file-format)
fittype 8 (non muSR fit)
map 0 0 0 0 0 0 0 0 0 0
xy-data 3 28
fit 1 25
packing 1
########################################64#######################
COMMANDS
MINIMIZE
#HESSE
MINOS
SAVE
###############################################################
PLOT 8 (non muSR plot)
runs 1
range 0 25
###############################################################
STATISTIC --- 2023-01-30 14:29:23
chisq = 24.9, NDF = 10, chisq/NDF = 2.486737

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doc/examples/DepthProfiles/PECVD_thermal_SiC/SiC_PECVD_thermal_100G_260K_diaFrac.msr Normal file
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n/a
###############################################################
FITPARAMETER
# Nr. Name Value Step Pos_Error Boundaries
1 f1 0.54540 0.00071 none 0 1
2 f2 0.23947 0.00047 none
3 f3 0.05615 0.00046 none 0 1
4 x1 63.5000 0.0093 none
5 x2 101.5001 0.0093 none
###############################################################
THEORY
userFcn libPDepthProfile PDepthProfile 1 2 3 4 5
###############################################################
RUN data/70nmPECVD-30nmThermalSiO2-SiC_9_260K_100GTF_withDiaFrac PIM3 PSI DAT (name beamline institute data-file-format)
fittype 8 (non muSR fit)
map 0 0 0 0 0 0 0 0 0 0
xy-data 3 30
fit 3 22
packing 1
########################################64#######################
COMMANDS
MINIMIZE
#HESSE
MINOS
SAVE
###############################################################
PLOT 8 (non muSR plot)
runs 1
range 0 25
###############################################################
STATISTIC --- 2023-01-30 14:28:54
chisq = 24.8, NDF = 10, chisq/NDF = 2.481557

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doc/examples/DepthProfiles/PECVD_thermal_SiC/TRIMSP/SiO2_70nm2.0_30nm2.2_SiC_E1000.rge Normal file
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DEPTH PARTICLES
5. 975
15. 2134
25. 2721
35. 3261
45. 3483
55. 3856
65. 4319
75. 4624
85. 4648
95. 4763
105. 5040
115. 4887
125. 4984
135. 4785
145. 4622
155. 4232
165. 4170
175. 3704
185. 3292
195. 3031
205. 2664
215. 2206
225. 1907
235. 1487
245. 1142
255. 896
265. 733
275. 527
285. 340
295. 270
305. 196
315. 125
325. 76
335. 49
345. 23
355. 15
365. 11
375. 4
385. 6
395. 2
405. 2
415. 0
425. 0
435. 0
445. 0
455. 0
465. 0
475. 0
485. 0
495. 0
505. 0
515. 0
525. 0
535. 0
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555. 0
565. 0
575. 0

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doc/examples/DepthProfiles/PECVD_thermal_SiC/TRIMSP/SiO2_70nm2.0_30nm2.2_SiC_E10000.rge Normal file
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DEPTH PARTICLES
5. 6
15. 13
25. 14
35. 13
45. 17
55. 21
65. 29
75. 34
85. 28
95. 27
105. 29
115. 43
125. 45
135. 50
145. 53
155. 39
165. 54
175. 55
185. 60
195. 73
205. 71
215. 66
225. 78
235. 72
245. 77
255. 90
265. 93
275. 80
285. 107
295. 128
305. 113
315. 126
325. 120
335. 149
345. 123
355. 148
365. 152
375. 196
385. 176
395. 184
405. 196
415. 253
425. 254
435. 227
445. 270
455. 299
465. 335
475. 360
485. 372
495. 398
505. 382
515. 396
525. 465
535. 483
545. 532
555. 557
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575. 587
585. 672
595. 700
605. 780
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625. 833
635. 922
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doc/examples/DepthProfiles/PECVD_thermal_SiC/TRIMSP/SiO2_70nm2.0_30nm2.2_SiC_E11000.rge Normal file
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@ -0,0 +1,145 @@
DEPTH PARTICLES
5. 5
15. 4
25. 14
35. 13
45. 22
55. 24
65. 16
75. 26
85. 26
95. 25
105. 31
115. 33
125. 34
135. 25
145. 35
155. 37
165. 45
175. 39
185. 46
195. 48
205. 49
215. 44
225. 46
235. 61
245. 57
255. 60
265. 71
275. 67
285. 67
295. 85
305. 77
315. 72
325. 88
335. 77
345. 119
355. 102
365. 110
375. 132
385. 133
395. 143
405. 115
415. 136
425. 153
435. 168
445. 170
455. 182
465. 189
475. 186
485. 229
495. 235
505. 245
515. 275
525. 290
535. 305
545. 309
555. 299
565. 367
575. 389
585. 410
595. 413
605. 497
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635. 603
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655. 661
665. 712
675. 768
685. 820
695. 827
705. 948
715. 1097
725. 1089
735. 1222
745. 1322
755. 1408
765. 1459
775. 1577
785. 1666
795. 1787
805. 1959
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835. 2311
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855. 2562
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955. 3117
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995. 2645
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doc/examples/DepthProfiles/PECVD_thermal_SiC/TRIMSP/SiO2_70nm2.0_30nm2.2_SiC_E12000.rge Normal file
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@ -0,0 +1,153 @@
DEPTH PARTICLES
5. 3
15. 5
25. 12
35. 2
45. 15
55. 14
65. 11
75. 12
85. 20
95. 23
105. 23
115. 29
125. 22
135. 19
145. 31
155. 38
165. 25
175. 41
185. 37
195. 27
205. 34
215. 34
225. 32
235. 45
245. 43
255. 49
265. 46
275. 43
285. 52
295. 50
305. 70
315. 71
325. 53
335. 58
345. 79
355. 60
365. 83
375. 78
385. 95
395. 75
405. 106
415. 100
425. 118
435. 119
445. 139
455. 126
465. 146
475. 144
485. 147
495. 149
505. 185
515. 145
525. 202
535. 197
545. 199
555. 250
565. 230
575. 266
585. 271
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605. 343
615. 313
625. 361
635. 330
645. 347
655. 390
665. 408
675. 471
685. 494
695. 516
705. 607
715. 684
725. 665
735. 713
745. 814
755. 817
765. 901
775. 947
785. 1072
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805. 1185
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825. 1346
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DEPTH PARTICLES
5. 4
15. 7
25. 13
35. 12
45. 18
55. 18
65. 14
75. 22
85. 12
95. 18
105. 24
115. 18
125. 15
135. 31
145. 11
155. 28
165. 25
175. 13
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195. 33
205. 37
215. 34
225. 36
235. 36
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255. 34
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285. 39
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305. 34
315. 55
325. 47
335. 46
345. 52
355. 70
365. 56
375. 65
385. 64
395. 48
405. 67
415. 66
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435. 69
445. 79
455. 84
465. 89
475. 93
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495. 116
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595. 175
605. 195
615. 217
625. 193
635. 233
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655. 254
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DEPTH PARTICLES
5. 0
15. 6
25. 9
35. 10
45. 9
55. 11
65. 7
75. 7
85. 12
95. 14
105. 12
115. 21
125. 16
135. 16
145. 12
155. 23
165. 22
175. 15
185. 20
195. 20
205. 25
215. 21
225. 24
235. 23
245. 22
255. 24
265. 22
275. 24
285. 32
295. 37
305. 31
315. 40
325. 32
335. 33
345. 42
355. 48
365. 38
375. 51
385. 50
395. 38
405. 42
415. 36
425. 58
435. 73
445. 50
455. 60
465. 66
475. 76
485. 73
495. 83
505. 85
515. 81
525. 110
535. 83
545. 86
555. 85
565. 110
575. 122
585. 110
595. 113
605. 124
615. 154
625. 142
635. 151
645. 189
655. 181
665. 200
675. 164
685. 202
695. 215
705. 204
715. 244
725. 312
735. 306
745. 319
755. 374
765. 372
775. 396
785. 377
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805. 465
815. 513
825. 527
835. 545
845. 585
855. 662
865. 676
875. 713
885. 735
895. 829
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915. 903
925. 975
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1025. 2953
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DEPTH PARTICLES
5. 0
15. 2
25. 3
35. 5
45. 7
55. 4
65. 11
75. 13
85. 18
95. 7
105. 13
115. 19
125. 13
135. 16
145. 20
155. 26
165. 23
175. 20
185. 16
195. 15
205. 11
215. 11
225. 13
235. 21
245. 13
255. 25
265. 28
275. 18
285. 22
295. 32
305. 33
315. 34
325. 24
335. 39
345. 36
355. 26
365. 34
375. 34
385. 30
395. 37
405. 35
415. 49
425. 47
435. 41
445. 49
455. 46
465. 48
475. 64
485. 48
495. 52
505. 75
515. 53
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535. 68
545. 73
555. 81
565. 68
575. 82
585. 63
595. 89
605. 85
615. 92
625. 107
635. 114
645. 106
655. 123
665. 134
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695. 149
705. 157
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725. 172
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DEPTH PARTICLES
5. 2
15. 3
25. 4
35. 8
45. 7
55. 6
65. 6
75. 9
85. 9
95. 14
105. 16
115. 8
125. 6
135. 10
145. 16
155. 12
165. 12
175. 14
185. 10
195. 17
205. 24
215. 15
225. 14
235. 17
245. 18
255. 14
265. 16
275. 19
285. 17
295. 13
305. 19
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15
doc/examples/DepthProfiles/PECVD_thermal_SiC/data/70nmPECVD-30nmThermalSiO2-SiC_9_010K_100GTF_withDiaFrac.dat Executable file
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dataT dataTErr dataB dataE dataTr dataRALRAR dataRATRAB dataSpinRot Asy AsyPosErr AsyNegErr Lambda LambdaPosErr LambdaNegErr Ph PhPosErr PhNegErr Field FieldPosErr FieldNegErr RelPh_L RelPh_LPosErr RelPh_LNegErr N0_L N0_LPosErr N0_LNegErr N_bkg_L N_bkg_LPosErr N_bkg_LNegErr RelPh_T RelPh_TPosErr RelPh_TNegErr N0_T N0_TPosErr N0_TNegErr N_bkg_T N_bkg_TPosErr N_bkg_TNegErr RelPh_R RelPh_RPosErr RelPh_RNegErr alpha_LR alpha_LRPosErr alpha_LRNegErr N_bkg_R N_bkg_RPosErr N_bkg_RNegErr RelPh_B RelPh_BPosErr RelPh_BNegErr alpha_TB alpha_TBPosErr alpha_TBNegErr N_bkg_B N_bkg_BPosErr N_bkg_BNegErr CHISQ NDF CHISQred RUN AsymCorrected AsymCorrectedErr AsymAg DiaFrac DiaFracErr
10.0010 0.0040 99.4750 3.9799 15.0030 -0.0090 -0.0060 -10.0000 0.1099 0.0026 0.0026 0.2380 0.0160 0.0160 23.0000 1.3000 1.3000 102.3100 0.1800 0.1700 0.0000 0.0000 0.0000 165.8600 0.3500 0.3500 2.2920 0.0500 0.0510 -90.0000 0.0000 0.0000 175.8400 0.3600 0.3600 2.3350 0.0520 0.0520 180.0000 0.0000 0.0000 1.0321 0.0031 0.0031 2.5410 0.0520 0.0520 90.0000 0.0000 0.0000 0.9439 0.0028 0.0028 2.3310 0.0510 0.0510 3603.1001 3648.0000 0.9877 2644.0000 0.0890 0.0026 0.1770 0.5031 0.0147
10.0000 0.0040 99.4730 4.9812 15.0030 -0.0070 -0.0060 -10.0000 0.1034 0.0026 0.0026 0.2450 0.0170 0.0170 26.5000 1.4000 1.4000 102.0900 0.1900 0.1900 0.0000 0.0000 0.0000 169.7300 0.3600 0.3500 2.3230 0.0510 0.0510 -90.0000 0.0000 0.0000 178.9500 0.3600 0.3600 2.4290 0.0520 0.0530 180.0000 0.0000 0.0000 1.0168 0.0030 0.0030 2.6130 0.0520 0.0530 90.0000 0.0000 0.0000 0.9431 0.0027 0.0028 2.3600 0.0510 0.0510 3789.6001 3648.0000 1.0388 2643.0000 0.0873 0.0026 0.1888 0.4625 0.0138
10.0000 0.0030 99.4750 5.9810 15.0030 -0.0080 -0.0060 -10.0000 0.1006 0.0021 0.0021 0.2150 0.0140 0.0130 23.8000 1.2000 1.2000 102.4200 0.1500 0.1500 0.0000 0.0000 0.0000 235.3900 0.4200 0.4200 3.1400 0.0600 0.0600 -90.0000 0.0000 0.0000 246.7300 0.4200 0.4300 3.4510 0.0620 0.0620 180.0000 0.0000 0.0000 1.0191 0.0025 0.0026 3.6300 0.0620 0.0620 90.0000 0.0000 0.0000 0.9477 0.0024 0.0024 3.4000 0.0610 0.0610 3527.2000 3648.0000 0.9669 2642.0000 0.0873 0.0021 0.1971 0.4429 0.0107
9.9990 0.0030 99.4700 6.9823 15.0030 -0.0080 -0.0060 -10.0000 0.0931 0.0022 0.0022 0.1990 0.0150 0.0150 23.6000 1.3000 1.3000 102.4500 0.1600 0.1600 0.0000 0.0000 0.0000 208.3500 0.3900 0.3900 2.8440 0.0570 0.0560 -90.0000 0.0000 0.0000 218.1600 0.4000 0.4000 3.0880 0.0580 0.0590 180.0000 0.0000 0.0000 1.0190 0.0027 0.0027 3.1900 0.0580 0.0580 90.0000 0.0000 0.0000 0.9546 0.0025 0.0025 2.8410 0.0570 0.0570 3722.1001 3648.0000 1.0203 2641.0000 0.0814 0.0022 0.2029 0.4011 0.0108
10.0000 0.0030 99.4760 8.9827 15.0030 -0.0080 -0.0060 -10.0000 0.0755 0.0019 0.0019 0.1220 0.0130 0.0130 22.1000 1.4000 1.4000 102.5300 0.1500 0.1500 0.0000 0.0000 0.0000 239.0600 0.4200 0.4200 3.2200 0.0610 0.0610 -90.0000 0.0000 0.0000 250.5500 0.4300 0.4300 3.4680 0.0620 0.0620 180.0000 0.0000 0.0000 1.0225 0.0025 0.0025 3.6170 0.0620 0.0620 90.0000 0.0000 0.0000 0.9531 0.0024 0.0023 3.3410 0.0610 0.0610 3711.7000 3648.0000 1.0175 2645.0000 0.0653 0.0019 0.2103 0.3103 0.0090
10.0000 0.0030 99.4760 9.9817 15.0030 -0.0090 -0.0060 -10.0000 0.0632 0.0018 0.0018 0.0670 0.0130 0.0130 20.9000 1.5000 1.5000 102.5200 0.1400 0.1400 0.0000 0.0000 0.0000 239.4600 0.4200 0.4200 3.1800 0.0600 0.0610 -90.0000 0.0000 0.0000 250.1500 0.4300 0.4300 3.3600 0.0620 0.0620 180.0000 0.0000 0.0000 1.0200 0.0025 0.0025 3.6390 0.0620 0.0620 90.0000 0.0000 0.0000 0.9557 0.0024 0.0023 3.3800 0.0610 0.0610 3630.3999 3648.0000 0.9952 2646.0000 0.0533 0.0018 0.2126 0.2506 0.0085
10.0000 0.0030 99.4760 10.9845 15.0030 -0.0080 -0.0060 -10.0000 0.0575 0.0018 0.0018 0.0940 0.0160 0.0150 18.3000 1.8000 1.8000 102.7200 0.1700 0.1700 0.0000 0.0000 0.0000 238.2600 0.4200 0.4200 3.3830 0.0610 0.0610 -90.0000 0.0000 0.0000 251.0000 0.4300 0.4300 3.3660 0.0620 0.0620 180.0000 0.0000 0.0000 1.0206 0.0025 0.0025 3.6970 0.0620 0.0620 90.0000 0.0000 0.0000 0.9563 0.0024 0.0023 3.3280 0.0610 0.0610 3713.3999 3648.0000 1.0179 2647.0000 0.0478 0.0018 0.2143 0.2228 0.0084
10.0010 0.0040 99.4800 11.9821 15.0030 -0.0080 -0.0060 -10.0000 0.0495 0.0018 0.0018 0.0880 0.0170 0.0170 23.6000 2.1000 2.1000 102.2800 0.2000 0.2000 0.0000 0.0000 0.0000 238.5600 0.4200 0.4200 3.2410 0.0600 0.0610 -90.0000 0.0000 0.0000 249.5000 0.4300 0.4300 3.5760 0.0630 0.0620 180.0000 0.0000 0.0000 1.0228 0.0025 0.0026 3.6970 0.0620 0.0620 90.0000 0.0000 0.0000 0.9586 0.0024 0.0024 3.4770 0.0610 0.0610 3697.2000 3648.0000 1.0135 2648.0000 0.0399 0.0018 0.2156 0.1848 0.0083
10.0000 0.0030 99.4780 12.9825 15.0030 -0.0080 -0.0060 -10.0000 0.0394 0.0018 0.0018 0.0960 0.0230 0.0220 20.8000 2.6000 2.6000 102.1700 0.2600 0.2500 0.0000 0.0000 0.0000 238.0300 0.4200 0.4200 3.2820 0.0610 0.0610 -90.0000 0.0000 0.0000 249.4000 0.4300 0.4300 3.4520 0.0620 0.0620 180.0000 0.0000 0.0000 1.0244 0.0025 0.0026 3.6620 0.0620 0.0620 90.0000 0.0000 0.0000 0.9662 0.0024 0.0024 3.3090 0.0610 0.0610 3644.5000 3648.0000 0.9990 2649.0000 0.0298 0.0018 0.2166 0.1376 0.0083
10.0000 0.0030 99.4780 13.9949 15.0030 -0.0080 -0.0060 -10.0000 0.0265 0.0018 0.0017 0.0770 0.0320 0.0300 15.6000 3.7000 3.7000 102.7500 0.3500 0.3500 0.0000 0.0000 0.0000 238.7600 0.4200 0.4200 3.1930 0.0600 0.0610 -90.0000 0.0000 0.0000 249.1900 0.4300 0.4300 3.5080 0.0620 0.0630 180.0000 0.0000 0.0000 1.0208 0.0025 0.0025 3.6070 0.0620 0.0620 90.0000 0.0000 0.0000 0.9665 0.0024 0.0024 3.3260 0.0610 0.0610 3904.8000 3648.0000 1.0704 2650.0000 0.0170 0.0018 0.2174 0.0780 0.0083
10.0000 0.0030 99.4770 14.9953 15.0030 -0.0070 -0.0060 -10.0000 0.0216 0.0019 0.0019 0.0980 0.0460 0.0420 28.6000 4.6000 4.6000 102.2500 0.4400 0.4400 0.0000 0.0000 0.0000 238.4200 0.4200 0.4200 3.3370 0.0610 0.0600 -90.0000 0.0000 0.0000 249.7100 0.4300 0.4300 3.3970 0.0620 0.0620 180.0000 0.0000 0.0000 1.0228 0.0026 0.0025 3.6170 0.0620 0.0620 90.0000 0.0000 0.0000 0.9642 0.0024 0.0024 3.2790 0.0610 0.0610 3790.8999 3648.0000 1.0392 2651.0000 0.0121 0.0019 0.2180 0.0554 0.0087
10.0010 0.0040 99.4770 15.9944 15.0030 -0.0080 -0.0060 -10.0000 0.0176 0.0019 0.0018 0.1000 0.0560 0.0490 17.9000 5.8000 5.8000 102.8200 0.5800 0.5700 0.0000 0.0000 0.0000 238.4800 0.4200 0.4200 3.2330 0.0610 0.0600 -90.0000 0.0000 0.0000 249.0200 0.4300 0.4300 3.5080 0.0620 0.0620 180.0000 0.0000 0.0000 1.0217 0.0025 0.0025 3.6830 0.0620 0.0620 90.0000 0.0000 0.0000 0.9639 0.0024 0.0024 3.4050 0.0620 0.0610 3657.2000 3648.0000 1.0025 2652.0000 0.0081 0.0019 0.2185 0.0370 0.0087
10.0010 0.0030 99.4780 17.9929 15.0030 -0.0070 -0.0060 -10.0000 0.0141 0.0020 0.0019 0.1480 0.0830 0.0690 22.6000 7.9000 7.8000 101.6900 0.8900 0.8700 0.0000 0.0000 0.0000 238.1800 0.4200 0.4200 3.1350 0.0600 0.0600 -90.0000 0.0000 0.0000 247.2900 0.4300 0.4300 3.5020 0.0620 0.0620 180.0000 0.0000 0.0000 1.0183 0.0025 0.0025 3.6580 0.0620 0.0620 90.0000 0.0000 0.0000 0.9718 0.0024 0.0024 3.2330 0.0610 0.0610 3702.1001 3648.0000 1.0148 2653.0000 0.0046 0.0020 0.2191 0.0210 0.0091
10.0000 0.0040 99.4800 19.9956 15.0030 -0.0080 -0.0060 -10.0000 0.0061 0.0015 0.0010 0.0000 0.0962 0.0000 19.8000 14.6000 14.6000 101.8000 1.1000 1.1000 0.0000 0.0000 0.0000 238.1600 0.4200 0.4200 3.1670 0.0600 0.0600 -90.0000 0.0000 0.0000 248.5800 0.4300 0.4300 3.4460 0.0620 0.0620 180.0000 0.0000 0.0000 1.0187 0.0025 0.0025 3.5690 0.0620 0.0620 90.0000 0.0000 0.0000 0.9699 0.0024 0.0024 3.2180 0.0610 0.0610 3674.3000 3648.0000 1.0072 2654.0000 -0.0034 0.0015 0.2194 -0.0155 0.0068

16
doc/examples/DepthProfiles/PECVD_thermal_SiC/data/70nmPECVD-30nmThermalSiO2-SiC_9_260K_100GTF_withDiaFrac.dat Normal file
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@ -0,0 +1,16 @@
dataT dataTErr dataB dataE dataTr dataRALRAR dataRATRAB dataSpinRot Asy AsyPosErr AsyNegErr Lambda LambdaPosErr LambdaNegErr Ph PhPosErr PhNegErr Field FieldPosErr FieldNegErr RelPh_L RelPh_LPosErr RelPh_LNegErr N0_L N0_LPosErr N0_LNegErr N_bkg_L N_bkg_LPosErr N_bkg_LNegErr RelPh_T RelPh_TPosErr RelPh_TNegErr N0_T N0_TPosErr N0_TNegErr N_bkg_T N_bkg_TPosErr N_bkg_TNegErr RelPh_R RelPh_RPosErr RelPh_RNegErr alpha_LR alpha_LRPosErr alpha_LRNegErr N_bkg_R N_bkg_RPosErr N_bkg_RNegErr RelPh_B RelPh_BPosErr RelPh_BNegErr alpha_TB alpha_TBPosErr alpha_TBNegErr N_bkg_B N_bkg_BPosErr N_bkg_BNegErr CHISQ NDF CHISQred RUN AsymCorrected AsymCorrectedErr AsymAg DiaFrac DiaFracErr
260.0000 0.0070 99.4760 3.9812 15.0030 -0.0080 -0.0060 -10.0000 0.1180 0.0017 0.0017 0.1445 0.0078 0.0077 22.1000 0.8100 0.8100 101.1640 0.0890 0.0900 0.0000 0.0000 0.0000 308.1400 0.4800 0.4800 4.4450 0.0690 0.0700 -90.0000 0.0000 0.0000 325.4300 0.4900 0.4900 4.6390 0.0710 0.0710 180.0000 0.0000 0.0000 1.0406 0.0023 0.0023 4.9270 0.0720 0.0710 90.0000 0.0000 0.0000 0.9551 0.0021 0.0021 4.5930 0.0700 0.0700 3547.8999 3648.0000 0.9726 2629.0000 0.0971 0.0017 0.1770 0.5488 0.0096
260.0000 0.0060 99.4780 4.9810 15.0030 -0.0090 -0.0060 -10.0000 0.1174 0.0017 0.0017 0.1593 0.0083 0.0082 23.3100 0.8300 0.8300 101.0830 0.0950 0.0950 0.0000 0.0000 0.0000 310.3100 0.4800 0.4800 4.3600 0.0700 0.0700 -90.0000 0.0000 0.0000 324.8800 0.4900 0.4900 4.8120 0.0720 0.0710 180.0000 0.0000 0.0000 1.0274 0.0022 0.0022 5.0930 0.0720 0.0720 90.0000 0.0000 0.0000 0.9566 0.0021 0.0021 4.6660 0.0700 0.0700 3599.7000 3648.0000 0.9868 2628.0000 0.1013 0.0017 0.1888 0.5366 0.0090
260.0000 0.0070 99.4810 5.9812 15.0030 -0.0080 -0.0060 -10.0000 0.1110 0.0017 0.0017 0.1469 0.0084 0.0084 22.6600 0.8700 0.8600 101.1260 0.0950 0.0960 0.0000 0.0000 0.0000 310.2000 0.4800 0.4800 4.3540 0.0700 0.0700 -90.0000 0.0000 0.0000 325.1800 0.4900 0.4900 4.7460 0.0720 0.0710 180.0000 0.0000 0.0000 1.0269 0.0022 0.0022 5.0250 0.0710 0.0710 90.0000 0.0000 0.0000 0.9577 0.0021 0.0021 4.6320 0.0700 0.0700 3755.8000 3648.0000 1.0295 2627.0000 0.0977 0.0017 0.1971 0.4957 0.0086
259.9990 0.0050 99.4830 6.9821 15.0030 -0.0080 -0.0060 -10.0000 0.0983 0.0017 0.0016 0.1198 0.0090 0.0086 22.2900 0.9300 0.9300 101.1010 0.0960 0.0960 0.0000 0.0000 0.0000 310.3400 0.4800 0.4800 4.5260 0.0700 0.0700 -90.0000 0.0000 0.0000 325.7600 0.4900 0.4900 4.8910 0.0720 0.0720 180.0000 0.0000 0.0000 1.0252 0.0022 0.0022 5.0870 0.0720 0.0710 90.0000 0.0000 0.0000 0.9575 0.0021 0.0021 4.6520 0.0710 0.0700 3616.6001 3648.0000 0.9914 2626.0000 0.0866 0.0017 0.2029 0.4267 0.0084
10.0100 0.0400 99.4740 7.9801 15.0027 -0.0080 -0.0060 -10.0000 0.0831 0.0024 0.0024 0.1670 0.0170 0.0160 23.1000 1.6000 1.6000 102.3600 0.1800 0.1800 0.0000 0.0000 0.0000 167.6700 0.3500 0.3500 2.4090 0.0510 0.0510 -90.0000 0.0000 0.0000 176.5000 0.3600 0.3600 2.4160 0.0520 0.0520 180.0000 0.0000 0.0000 1.0223 0.0030 0.0030 2.5500 0.0520 0.0520 90.0000 0.0000 0.0000 0.9552 0.0028 0.0028 2.3550 0.0510 0.0510 3730.8000 3648.0000 1.0227 2640.0000 0.0723 0.0024 0.2072 0.3491 0.0116
259.9990 0.0080 99.4740 8.9849 15.0030 -0.0090 -0.0060 -10.0000 0.0774 0.0015 0.0015 0.0635 0.0089 0.0087 22.1000 1.1000 1.1000 101.2200 0.1000 0.1000 0.0000 0.0000 0.0000 309.9800 0.4800 0.4800 4.4990 0.0690 0.0700 -90.0000 0.0000 0.0000 323.8300 0.4900 0.4900 4.7200 0.0710 0.0710 180.0000 0.0000 0.0000 1.0304 0.0022 0.0022 4.9100 0.0710 0.0710 90.0000 0.0000 0.0000 0.9637 0.0021 0.0021 4.5550 0.0700 0.0700 3675.8000 3648.0000 1.0076 2630.0000 0.0672 0.0015 0.2103 0.3194 0.0071
260.0000 0.0100 99.4770 9.9839 15.0030 -0.0080 -0.0060 -10.0000 0.0709 0.0015 0.0015 0.0625 0.0097 0.0095 20.4000 1.2000 1.2000 101.3000 0.1100 0.1100 0.0000 0.0000 0.0000 310.1500 0.4800 0.4800 4.3740 0.0700 0.0690 -90.0000 0.0000 0.0000 324.2800 0.4900 0.4900 4.7100 0.0720 0.0710 180.0000 0.0000 0.0000 1.0261 0.0022 0.0022 5.0150 0.0710 0.0710 90.0000 0.0000 0.0000 0.9656 0.0021 0.0021 4.4570 0.0700 0.0700 3678.1001 3648.0000 1.0082 2631.0000 0.0610 0.0015 0.2126 0.2868 0.0071
260.0000 0.0090 99.4750 10.9817 15.0030 -0.0090 -0.0060 -10.0000 0.0625 0.0015 0.0015 0.0550 0.0110 0.0110 18.8000 1.3000 1.3000 101.2900 0.1200 0.1200 0.0000 0.0000 0.0000 311.0400 0.4800 0.4800 4.4080 0.0700 0.0700 -90.0000 0.0000 0.0000 325.0600 0.4900 0.4900 4.6600 0.0710 0.0720 180.0000 0.0000 0.0000 1.0234 0.0022 0.0022 4.9210 0.0710 0.0710 90.0000 0.0000 0.0000 0.9647 0.0021 0.0021 4.6150 0.0710 0.0700 3539.2000 3648.0000 0.9702 2632.0000 0.0528 0.0015 0.2143 0.2461 0.0070
260.0000 0.0080 99.4700 11.9838 15.0030 -0.0090 -0.0060 -10.0000 0.0555 0.0016 0.0016 0.0490 0.0130 0.0130 14.7000 1.7000 1.7000 101.4400 0.1500 0.1500 0.0000 0.0000 0.0000 253.2900 0.4300 0.4300 3.4660 0.0630 0.0630 -90.0000 0.0000 0.0000 264.6800 0.4400 0.4400 3.7640 0.0640 0.0640 180.0000 0.0000 0.0000 1.0219 0.0025 0.0025 4.0230 0.0640 0.0640 90.0000 0.0000 0.0000 0.9658 0.0023 0.0023 3.5760 0.0630 0.0630 3602.8000 3648.0000 0.9876 2633.0000 0.0459 0.0016 0.2156 0.2126 0.0074
260.0000 0.0060 99.4740 12.9836 15.0030 -0.0080 -0.0060 -10.0000 0.0487 0.0017 0.0017 0.0620 0.0160 0.0160 14.9000 2.0000 2.0000 101.2700 0.1800 0.1800 0.0000 0.0000 0.0000 238.1100 0.4200 0.4200 3.3230 0.0600 0.0610 -90.0000 0.0000 0.0000 249.4200 0.4300 0.4300 3.4720 0.0630 0.0620 180.0000 0.0000 0.0000 1.0269 0.0025 0.0026 3.7710 0.0620 0.0620 90.0000 0.0000 0.0000 0.9616 0.0024 0.0024 3.5140 0.0610 0.0620 3732.0000 3648.0000 1.0230 2634.0000 0.0391 0.0017 0.2166 0.1806 0.0078
260.0000 0.0100 99.4700 13.9955 15.0030 -0.0080 -0.0060 -10.0000 0.0410 0.0017 0.0017 0.0640 0.0190 0.0190 17.8000 2.4000 2.4000 101.0100 0.2200 0.2200 0.0000 0.0000 0.0000 237.7600 0.4200 0.4200 3.2880 0.0610 0.0610 -90.0000 0.0000 0.0000 248.4200 0.4300 0.4300 3.4830 0.0620 0.0620 180.0000 0.0000 0.0000 1.0245 0.0026 0.0025 3.6960 0.0620 0.0620 90.0000 0.0000 0.0000 0.9687 0.0024 0.0024 3.4890 0.0620 0.0610 3679.6001 3648.0000 1.0087 2635.0000 0.0315 0.0017 0.2174 0.1447 0.0078
259.9990 0.0080 99.4710 14.9947 15.0027 -0.0080 -0.0060 -10.0000 0.0354 0.0018 0.0018 0.0560 0.0230 0.0220 12.9000 2.6000 2.7000 101.4800 0.2300 0.2300 0.0000 0.0000 0.0000 237.6200 0.4200 0.4200 3.2510 0.0600 0.0610 -90.0000 0.0000 0.0000 248.8500 0.4300 0.4300 3.4200 0.0620 0.0620 180.0000 0.0000 0.0000 1.0283 0.0025 0.0026 3.6870 0.0620 0.0620 90.0000 0.0000 0.0000 0.9682 0.0024 0.0024 3.4070 0.0610 0.0610 3662.6001 3648.0000 1.0040 2636.0000 0.0259 0.0018 0.2180 0.1187 0.0083
260.0000 0.0100 99.4700 15.9950 15.0030 -0.0080 -0.0060 -10.0000 0.0258 0.0017 0.0014 0.0091 0.0257 0.0091 14.0000 3.4000 3.4000 101.1800 0.2700 0.2700 0.0000 0.0000 0.0000 238.6200 0.4200 0.4200 3.2630 0.0610 0.0600 -90.0000 0.0000 0.0000 248.8100 0.4300 0.4300 3.6110 0.0620 0.0630 180.0000 0.0000 0.0000 1.0247 0.0026 0.0025 3.6920 0.0620 0.0620 90.0000 0.0000 0.0000 0.9681 0.0024 0.0024 3.4680 0.0610 0.0610 3583.1001 3648.0000 0.9822 2637.0000 0.0163 0.0017 0.2185 0.0745 0.0078
260.0000 0.0090 99.4750 17.9948 15.0030 -0.0080 -0.0060 -10.0000 0.0252 0.0019 0.0019 0.1140 0.0410 0.0370 11.2000 4.1000 4.1000 101.3700 0.4200 0.4200 0.0000 0.0000 0.0000 237.6800 0.4200 0.4200 3.1000 0.0600 0.0600 -90.0000 0.0000 0.0000 248.1700 0.4300 0.4300 3.4630 0.0620 0.0620 180.0000 0.0000 0.0000 1.0196 0.0025 0.0025 3.6730 0.0620 0.0620 90.0000 0.0000 0.0000 0.9684 0.0024 0.0024 3.3500 0.0610 0.0610 3669.3999 3648.0000 1.0059 2638.0000 0.0157 0.0019 0.2191 0.0716 0.0087
260.0010 0.0060 99.4700 19.9966 15.0030 -0.0090 -0.0060 -10.0000 0.0203 0.0016 0.0011 0.0018 0.0313 0.0018 -3.5000 4.4000 4.3000 102.0100 0.3300 0.3400 0.0000 0.0000 0.0000 237.2900 0.4200 0.4200 3.2420 0.0600 0.0610 -90.0000 0.0000 0.0000 248.0700 0.4300 0.4300 3.4040 0.0620 0.0620 180.0000 0.0000 0.0000 1.0254 0.0025 0.0026 3.6910 0.0620 0.0620 90.0000 0.0000 0.0000 0.9709 0.0024 0.0024 3.3310 0.0610 0.0610 3621.7000 3648.0000 0.9928 2639.0000 0.0108 0.0016 0.2194 0.0492 0.0073

35
doc/examples/DepthProfiles/PECVD_thermal_SiC/depth_profile_startup.xml Normal file
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@ -0,0 +1,35 @@
<?xml version="1.0" encoding="UTF-8"?>
<nonlocal xmlns="http://nemu.web.psi.ch/musrfit/nonlocal">
<comment>
TrimSp information
</comment>
<trim_sp>
<data_path>./TRIMSP/</data_path>
<rge_fln_pre>SiO2_70nm2.0_30nm2.2_SiC_E</rge_fln_pre>
<energy_list>
<energy>1000</energy>
<energy>2000</energy>
<energy>3000</energy>
<energy>4000</energy>
<energy>5000</energy>
<energy>6000</energy>
<energy>7000</energy>
<energy>8000</energy>
<energy>9000</energy>
<energy>10000</energy>
<energy>11000</energy>
<energy>12000</energy>
<energy>13000</energy>
<energy>14000</energy>
<energy>15000</energy>
<energy>16000</energy>
<energy>17000</energy>
<energy>17000</energy>
<energy>18000</energy>
<energy>19000</energy>
<energy>20000</energy>
<energy>21000</energy>
<energy>22000</energy>
</energy_list>
</trim_sp>
</nonlocal>