From b2cbd4b4602d25f02ee7b1102bf2becf62f55829 Mon Sep 17 00:00:00 2001 From: Andreas Suter Date: Thu, 16 Feb 2023 16:00:48 +0100 Subject: [PATCH] add a full example to the test folder. --- .../test/1300Ar_5G_260K_diaFrac.msr | 57 +++++ .../DepthProfile/test/TRIMSP/SiC1300x.png | Bin 0 -> 35172 bytes .../test/TRIMSP/SiC1300x_fraction.png | Bin 0 -> 14237 bytes .../test/TRIMSP/SiC_1300x_52nm_48nm_E1000.rge | 55 ++++ .../TRIMSP/SiC_1300x_52nm_48nm_E10000.rge | 128 ++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E11000.rge | 137 ++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E12000.rge | 144 +++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E13000.rge | 151 +++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E14000.rge | 160 ++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E15000.rge | 171 +++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E16000.rge | 178 +++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E17000.rge | 185 ++++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E18000.rge | 197 ++++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E19000.rge | 203 +++++++++++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E2000.rge | 66 +++++ .../TRIMSP/SiC_1300x_52nm_48nm_E20000.rge | 215 ++++++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E21000.rge | 225 ++++++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E22000.rge | 233 +++++++++++++++++ .../TRIMSP/SiC_1300x_52nm_48nm_E23000.rge | 241 ++++++++++++++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E3000.rge | 74 ++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E4000.rge | 82 ++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E5000.rge | 91 +++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E6000.rge | 99 +++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E7000.rge | 106 ++++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E8000.rge | 113 ++++++++ .../test/TRIMSP/SiC_1300x_52nm_48nm_E9000.rge | 120 +++++++++ ...1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat | 16 ++ .../test/depth_profile_startup.xml | 30 ++- 28 files changed, 3474 insertions(+), 3 deletions(-) create mode 100644 src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC1300x.png create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC1300x_fraction.png create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E1000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E10000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E11000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E12000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E13000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E14000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E15000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E16000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E17000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E18000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E19000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E2000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E20000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E21000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E22000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E23000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E3000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E4000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E5000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E6000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E7000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E8000.rge create mode 100644 src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E9000.rge create mode 100644 src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat diff --git a/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr b/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr new file mode 100644 index 00000000..4d815bc2 --- /dev/null +++ b/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr @@ -0,0 +1,57 @@ +n/a +############################################################### +FITPARAMETER +# Nr. Name Value Step Pos_Error Boundaries + 1 f1 0.379 -0.014 0.014 + 2 f2 0.1866 -0.0034 0.0034 + 3 f3 0.0201 -0.0024 0.0024 + 4 x1 55.9 1.1 none + 5 x2 103.80 0.19 none + +############################################################### +THEORY +userFcn libPDepthProfile PDepthProfile 1 2 3 4 5 + +############################################################### +RUN data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac MUE4 PSI DAT (name beamline institute data-file-format) +fittype 8 (non muSR fit) +map 0 0 0 0 0 0 0 0 0 0 +xy-data dataE DiaFrac +fit 1 25 +packing 1 + +############################################################### +COMMANDS +MINIMIZE +#HESSE +MINOS +SAVE + +############################################################### +PLOT 8 (non muSR plot) +runs 1 +range 0 25 + +############################################################### +STATISTIC --- 2023-02-16 15:20:11 + chisq = 28.3, NDF = 10, chisq/NDF = 2.831612 + + + + + + + + + + + + + + + + + + + + diff --git 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a/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat b/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat new file mode 100644 index 00000000..b1ee3b9c --- /dev/null +++ b/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat @@ -0,0 +1,16 @@ +dataT dataTErr dataB dataE dataTr dataRALRAR dataRATRAB dataSpinRot Asym_Mu Asym_MuPosErr Asym_MuNegErr Lambda_Mu Lambda_MuPosErr Lambda_MuNegErr freq_Mu1 freq_Mu1PosErr freq_Mu1NegErr Asym_muon Asym_muonPosErr Asym_muonNegErr Sigma_muon Sigma_muonPosErr Sigma_muonNegErr field fieldPosErr fieldNegErr ph_LR ph_LRPosErr ph_LRNegErr Alpha_LR Alpha_LRPosErr Alpha_LRNegErr relph_TB relph_TBPosErr relph_TBNegErr relph_TB_Mu relph_TB_MuPosErr relph_TB_MuNegErr Alpha_TB Alpha_TBPosErr Alpha_TBNegErr Zero ZeroPosErr ZeroNegErr freqMu2 freqMu2PosErr freqMu2NegErr Asym_MuSiO2 Asym_MuSiO2PosErr Asym_MuSiO2NegErr Lambda_MuSiO2 Lambda_MuSiO2PosErr Lambda_MuSiO2NegErr freqMuSiO2 freqMuSiO2PosErr freqMuSiO2NegErr CHISQ NDF CHISQred RUN AsymCorrected AsymCorrectedErr AsymAg DiaFrac DiaFracErr + 260.0000 0.0060 4.4400 6.9980 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0730 0.0012 0.0011 0.1359 0.0079 0.0080 7.0900 0.0270 0.0310 363.4600 0.8000 0.7800 1.0099 0.0019 0.0019 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9959 0.0017 0.0017 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0813 0.0102 0.0090 2.1300 0.3700 0.3200 0.0000 0.0000 0.0000 2320.3999 2224.0000 1.0433 3817.0000 0.0565 0.0012 0.2019 0.2797 0.0059 + 260.0000 0.0050 4.4500 8.9961 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0608 0.0011 0.0011 0.1190 0.0097 0.0100 7.1670 0.0110 0.0120 359.4000 0.7900 0.7900 1.0072 0.0018 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9898 0.0016 0.0016 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0765 0.0058 0.0055 1.1400 0.1400 0.1300 0.0000 0.0000 0.0000 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260.0000 0.0050 4.4520 13.9909 16.4946 -0.0100 -0.0090 -10.0000 0.0320 0.0058 0.0049 2.0300 0.6100 0.4500 9.1330 0.0770 0.0820 0.0375 0.0011 0.0010 0.0950 0.0170 0.0190 7.5000 0.0000 0.0000 -5.9000 1.1000 1.1000 1.0125 0.0017 0.0017 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9840 0.0015 0.0015 0.0000 0.0000 0.0000 9.9900 0.0530 0.0610 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2252.0000 2223.0000 1.0130 3823.0000 0.0241 0.0011 0.2200 0.1097 0.0050 + 260.0000 0.0050 4.4500 14.9898 16.4946 -0.0100 -0.0090 -10.0000 0.0550 0.0160 0.0110 4.2000 1.6000 1.0000 9.1090 0.0940 0.1010 0.0329 0.0011 0.0011 0.1240 0.0170 0.0180 7.5000 0.0000 0.0000 -4.6000 1.4000 1.3000 1.0149 0.0017 0.0017 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9859 0.0015 0.0015 0.0000 0.0000 0.0000 10.1400 0.1000 0.1300 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2219.8000 2223.0000 0.9986 3824.0000 0.0196 0.0011 0.2208 0.0888 0.0050 + 260.0000 0.0060 4.4500 15.9972 16.4946 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0.0000 0.0173 0.0014 0.0014 0.1050 0.0420 0.0570 7.1600 0.0000 0.0000 -9.5000 3.4000 3.4000 1.0189 0.0024 0.0023 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9887 0.0018 0.0018 0.0000 0.0000 0.0000 9.3800 0.2100 0.2000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2261.3999 2224.0000 1.0168 3829.0000 0.0041 0.0014 0.2226 0.0184 0.0063 + 260.0000 0.0040 4.4500 20.9920 16.4946 -0.0090 -0.0090 -10.0000 0.0292 0.0101 0.0076 2.0900 0.9000 0.6500 9.0670 0.0830 0.0790 0.0199 0.0015 0.0014 0.1640 0.0380 0.0370 7.1600 0.0000 0.0000 -12.2000 2.7000 2.7000 1.0147 0.0024 0.0022 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9891 0.0018 0.0018 0.0000 0.0000 0.0000 10.8640 0.0700 0.0610 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2157.5000 2223.0000 0.9705 3830.0000 0.0067 0.0015 0.2228 0.0300 0.0067 + 260.0000 0.0060 4.4490 21.9912 16.4946 -0.0090 -0.0090 -10.0000 0.0364 0.0094 0.0090 2.7000 0.8300 0.8000 9.1320 0.0840 0.0800 0.0193 0.0014 0.0013 0.1550 0.0350 0.0350 7.1600 0.0000 0.0000 -7.6000 2.7000 2.7000 1.0140 0.0022 0.0021 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9907 0.0017 0.0017 0.0000 0.0000 0.0000 10.8540 0.0830 0.1010 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2162.2000 2223.0000 0.9726 3831.0000 0.0061 0.0014 0.2229 0.0273 0.0063 diff --git a/src/external/DepthProfile/test/depth_profile_startup.xml b/src/external/DepthProfile/test/depth_profile_startup.xml index ef9e27e0..cb212a36 100644 --- a/src/external/DepthProfile/test/depth_profile_startup.xml +++ b/src/external/DepthProfile/test/depth_profile_startup.xml @@ -4,8 +4,32 @@ TrimSp information - ./Trimsp/Si10/ - Si10_100nm_2.2_E - + ./TRIMSP/ + SiC_1300x_52nm_48nm_E + + 1000 + 2000 + 3000 + 4000 + 5000 + 6000 + 7000 + 8000 + 9000 + 10000 + 11000 + 12000 + 13000 + 14000 + 15000 + 16000 + 17000 + 17000 + 18000 + 19000 + 20000 + 21000 + 22000 +