diff --git a/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr b/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr new file mode 100644 index 00000000..4d815bc2 --- /dev/null +++ b/src/external/DepthProfile/test/1300Ar_5G_260K_diaFrac.msr @@ -0,0 +1,57 @@ +n/a +############################################################### +FITPARAMETER +# Nr. Name Value Step Pos_Error Boundaries + 1 f1 0.379 -0.014 0.014 + 2 f2 0.1866 -0.0034 0.0034 + 3 f3 0.0201 -0.0024 0.0024 + 4 x1 55.9 1.1 none + 5 x2 103.80 0.19 none + +############################################################### +THEORY +userFcn libPDepthProfile PDepthProfile 1 2 3 4 5 + +############################################################### +RUN data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac MUE4 PSI DAT (name beamline institute data-file-format) +fittype 8 (non muSR fit) +map 0 0 0 0 0 0 0 0 0 0 +xy-data dataE DiaFrac +fit 1 25 +packing 1 + +############################################################### +COMMANDS +MINIMIZE +#HESSE +MINOS +SAVE + +############################################################### +PLOT 8 (non muSR plot) +runs 1 +range 0 25 + +############################################################### +STATISTIC --- 2023-02-16 15:20:11 + chisq = 28.3, NDF = 10, chisq/NDF = 2.831612 + + + + + + + + + + + + + + + + + + + + diff --git a/src/external/DepthProfile/test/TRIMSP/SiC1300x.png b/src/external/DepthProfile/test/TRIMSP/SiC1300x.png new file mode 100644 index 00000000..73156d02 Binary files /dev/null and b/src/external/DepthProfile/test/TRIMSP/SiC1300x.png differ diff --git a/src/external/DepthProfile/test/TRIMSP/SiC1300x_fraction.png b/src/external/DepthProfile/test/TRIMSP/SiC1300x_fraction.png new file mode 100644 index 00000000..9e55bb90 Binary files /dev/null and b/src/external/DepthProfile/test/TRIMSP/SiC1300x_fraction.png differ diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E1000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E1000.rge new file mode 100644 index 00000000..c09adc3a --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E1000.rge @@ -0,0 +1,55 @@ + DEPTH PARTICLES + 5. 1085 + 15. 2257 + 25. 2936 + 35. 3431 + 45. 3826 + 55. 4232 + 65. 4472 + 75. 4777 + 85. 4907 + 95. 5151 + 105. 5117 + 115. 5205 + 125. 5038 + 135. 4803 + 145. 4568 + 155. 4366 + 165. 3973 + 175. 3570 + 185. 3174 + 195. 2766 + 205. 2294 + 215. 1932 + 225. 1520 + 235. 1279 + 245. 950 + 255. 737 + 265. 503 + 275. 374 + 285. 243 + 295. 181 + 305. 126 + 315. 75 + 325. 45 + 335. 27 + 345. 15 + 355. 8 + 365. 2 + 375. 2 + 385. 0 + 395. 0 + 405. 0 + 415. 0 + 425. 0 + 435. 0 + 445. 0 + 455. 0 + 465. 0 + 475. 0 + 485. 0 + 495. 0 + 505. 0 + 515. 0 + 525. 0 + 535. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E10000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E10000.rge new file mode 100644 index 00000000..247b4216 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E10000.rge @@ -0,0 +1,128 @@ + DEPTH PARTICLES + 5. 7 + 15. 12 + 25. 20 + 35. 19 + 45. 23 + 55. 38 + 65. 23 + 75. 29 + 85. 33 + 95. 34 + 105. 33 + 115. 48 + 125. 38 + 135. 64 + 145. 47 + 155. 60 + 165. 48 + 175. 58 + 185. 65 + 195. 83 + 205. 80 + 215. 72 + 225. 74 + 235. 84 + 245. 87 + 255. 108 + 265. 90 + 275. 115 + 285. 126 + 295. 104 + 305. 163 + 315. 153 + 325. 150 + 335. 158 + 345. 142 + 355. 195 + 365. 204 + 375. 183 + 385. 208 + 395. 211 + 405. 251 + 415. 245 + 425. 291 + 435. 294 + 445. 340 + 455. 338 + 465. 382 + 475. 398 + 485. 420 + 495. 475 + 505. 480 + 515. 505 + 525. 578 + 535. 637 + 545. 677 + 555. 752 + 565. 746 + 575. 816 + 585. 879 + 595. 1020 + 605. 1000 + 615. 1153 + 625. 1192 + 635. 1417 + 645. 1402 + 655. 1478 + 665. 1644 + 675. 1717 + 685. 1749 + 695. 1958 + 705. 2029 + 715. 2156 + 725. 2277 + 735. 2460 + 745. 2549 + 755. 2666 + 765. 2914 + 775. 2952 + 785. 3034 + 795. 3217 + 805. 3201 + 815. 3337 + 825. 3326 + 835. 3339 + 845. 3243 + 855. 3202 + 865. 3113 + 875. 3013 + 885. 2849 + 895. 2628 + 905. 2448 + 915. 2155 + 925. 1858 + 935. 1584 + 945. 1306 + 955. 1036 + 965. 854 + 975. 626 + 985. 437 + 995. 324 + 1005. 307 + 1015. 165 + 1025. 77 + 1035. 27 + 1045. 5 + 1055. 2 + 1065. 0 + 1075. 0 + 1085. 0 + 1095. 0 + 1105. 0 + 1115. 0 + 1125. 0 + 1135. 0 + 1145. 0 + 1155. 0 + 1165. 0 + 1175. 0 + 1185. 0 + 1195. 0 + 1205. 0 + 1215. 0 + 1225. 0 + 1235. 0 + 1245. 0 + 1255. 0 + 1265. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E11000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E11000.rge new file mode 100644 index 00000000..00a197f4 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E11000.rge @@ -0,0 +1,137 @@ + DEPTH PARTICLES + 5. 5 + 15. 5 + 25. 15 + 35. 15 + 45. 28 + 55. 23 + 65. 23 + 75. 27 + 85. 21 + 95. 37 + 105. 24 + 115. 29 + 125. 28 + 135. 44 + 145. 48 + 155. 46 + 165. 44 + 175. 45 + 185. 50 + 195. 53 + 205. 48 + 215. 59 + 225. 67 + 235. 51 + 245. 73 + 255. 85 + 265. 67 + 275. 79 + 285. 73 + 295. 95 + 305. 84 + 315. 88 + 325. 101 + 335. 107 + 345. 100 + 355. 126 + 365. 144 + 375. 120 + 385. 171 + 395. 146 + 405. 147 + 415. 175 + 425. 184 + 435. 205 + 445. 232 + 455. 238 + 465. 218 + 475. 237 + 485. 265 + 495. 279 + 505. 322 + 515. 334 + 525. 380 + 535. 426 + 545. 443 + 555. 424 + 565. 497 + 575. 544 + 585. 561 + 595. 561 + 605. 693 + 615. 714 + 625. 740 + 635. 832 + 645. 864 + 655. 924 + 665. 1018 + 675. 1108 + 685. 1094 + 695. 1197 + 705. 1264 + 715. 1357 + 725. 1570 + 735. 1600 + 745. 1650 + 755. 1817 + 765. 1924 + 775. 1936 + 785. 2128 + 795. 2243 + 805. 2346 + 815. 2541 + 825. 2609 + 835. 2766 + 845. 2827 + 855. 2990 + 865. 2999 + 875. 3090 + 885. 3040 + 895. 3146 + 905. 3202 + 915. 3192 + 925. 3114 + 935. 3080 + 945. 2964 + 955. 2814 + 965. 2629 + 975. 2340 + 985. 2091 + 995. 1843 + 1005. 2635 + 1015. 1996 + 1025. 1345 + 1035. 931 + 1045. 577 + 1055. 310 + 1065. 155 + 1075. 74 + 1085. 22 + 1095. 15 + 1105. 3 + 1115. 1 + 1125. 0 + 1135. 0 + 1145. 0 + 1155. 0 + 1165. 0 + 1175. 0 + 1185. 0 + 1195. 0 + 1205. 0 + 1215. 0 + 1225. 0 + 1235. 0 + 1245. 0 + 1255. 0 + 1265. 0 + 1275. 0 + 1285. 0 + 1295. 0 + 1305. 0 + 1315. 0 + 1325. 0 + 1335. 0 + 1345. 0 + 1355. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E12000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E12000.rge new file mode 100644 index 00000000..ad2408ae --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E12000.rge @@ -0,0 +1,144 @@ + DEPTH PARTICLES + 5. 1 + 15. 13 + 25. 11 + 35. 8 + 45. 18 + 55. 13 + 65. 12 + 75. 14 + 85. 16 + 95. 24 + 105. 23 + 115. 24 + 125. 28 + 135. 29 + 145. 29 + 155. 35 + 165. 25 + 175. 33 + 185. 37 + 195. 37 + 205. 30 + 215. 40 + 225. 52 + 235. 47 + 245. 49 + 255. 60 + 265. 59 + 275. 54 + 285. 51 + 295. 64 + 305. 60 + 315. 69 + 325. 62 + 335. 71 + 345. 48 + 355. 98 + 365. 97 + 375. 105 + 385. 91 + 395. 112 + 405. 130 + 415. 112 + 425. 134 + 435. 137 + 445. 155 + 455. 132 + 465. 165 + 475. 170 + 485. 192 + 495. 213 + 505. 228 + 515. 174 + 525. 229 + 535. 262 + 545. 286 + 555. 320 + 565. 319 + 575. 352 + 585. 378 + 595. 373 + 605. 396 + 615. 419 + 625. 466 + 635. 476 + 645. 560 + 655. 582 + 665. 605 + 675. 651 + 685. 675 + 695. 797 + 705. 796 + 715. 823 + 725. 942 + 735. 958 + 745. 1037 + 755. 1140 + 765. 1195 + 775. 1213 + 785. 1281 + 795. 1426 + 805. 1510 + 815. 1668 + 825. 1782 + 835. 1778 + 845. 1945 + 855. 2077 + 865. 2153 + 875. 2311 + 885. 2403 + 895. 2502 + 905. 2556 + 915. 2782 + 925. 2869 + 935. 2994 + 945. 2953 + 955. 3105 + 965. 2947 + 975. 3057 + 985. 2977 + 995. 2806 + 1005. 4704 + 1015. 4484 + 1025. 4038 + 1035. 3583 + 1045. 3104 + 1055. 2517 + 1065. 1902 + 1075. 1395 + 1085. 927 + 1095. 540 + 1105. 307 + 1115. 154 + 1125. 65 + 1135. 20 + 1145. 6 + 1155. 0 + 1165. 2 + 1175. 0 + 1185. 0 + 1195. 0 + 1205. 0 + 1215. 0 + 1225. 0 + 1235. 0 + 1245. 0 + 1255. 0 + 1265. 0 + 1275. 0 + 1285. 0 + 1295. 0 + 1305. 0 + 1315. 0 + 1325. 0 + 1335. 0 + 1345. 0 + 1355. 0 + 1365. 0 + 1375. 0 + 1385. 0 + 1395. 0 + 1405. 0 + 1415. 0 + 1425. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E13000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E13000.rge new file mode 100644 index 00000000..2d89c42d --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E13000.rge @@ -0,0 +1,151 @@ + DEPTH PARTICLES + 5. 3 + 15. 5 + 25. 10 + 35. 9 + 45. 14 + 55. 10 + 65. 5 + 75. 15 + 85. 18 + 95. 15 + 105. 30 + 115. 21 + 125. 15 + 135. 19 + 145. 28 + 155. 32 + 165. 30 + 175. 19 + 185. 27 + 195. 35 + 205. 25 + 215. 27 + 225. 32 + 235. 32 + 245. 27 + 255. 36 + 265. 34 + 275. 37 + 285. 32 + 295. 42 + 305. 43 + 315. 53 + 325. 55 + 335. 43 + 345. 62 + 355. 62 + 365. 60 + 375. 78 + 385. 66 + 395. 69 + 405. 81 + 415. 79 + 425. 84 + 435. 99 + 445. 83 + 455. 79 + 465. 108 + 475. 108 + 485. 112 + 495. 122 + 505. 146 + 515. 142 + 525. 163 + 535. 154 + 545. 149 + 555. 179 + 565. 199 + 575. 219 + 585. 211 + 595. 243 + 605. 305 + 615. 293 + 625. 320 + 635. 298 + 645. 299 + 655. 323 + 665. 383 + 675. 410 + 685. 423 + 695. 494 + 705. 531 + 715. 504 + 725. 578 + 735. 614 + 745. 610 + 755. 688 + 765. 709 + 775. 809 + 785. 848 + 795. 888 + 805. 1009 + 815. 1027 + 825. 1091 + 835. 1228 + 845. 1288 + 855. 1275 + 865. 1435 + 875. 1466 + 885. 1535 + 895. 1725 + 905. 1754 + 915. 1868 + 925. 1920 + 935. 2067 + 945. 2168 + 955. 2280 + 965. 2337 + 975. 2390 + 985. 2442 + 995. 2404 + 1005. 4622 + 1015. 4594 + 1025. 4645 + 1035. 4742 + 1045. 4683 + 1055. 4587 + 1065. 4305 + 1075. 4175 + 1085. 3515 + 1095. 3009 + 1105. 2458 + 1115. 1837 + 1125. 1301 + 1135. 909 + 1145. 573 + 1155. 290 + 1165. 179 + 1175. 79 + 1185. 30 + 1195. 12 + 1205. 3 + 1215. 0 + 1225. 0 + 1235. 0 + 1245. 0 + 1255. 0 + 1265. 0 + 1275. 0 + 1285. 0 + 1295. 0 + 1305. 0 + 1315. 0 + 1325. 0 + 1335. 0 + 1345. 0 + 1355. 0 + 1365. 0 + 1375. 0 + 1385. 0 + 1395. 0 + 1405. 0 + 1415. 0 + 1425. 0 + 1435. 0 + 1445. 0 + 1455. 0 + 1465. 0 + 1475. 0 + 1485. 0 + 1495. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E14000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E14000.rge new file mode 100644 index 00000000..5fa0832a --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E14000.rge @@ -0,0 +1,160 @@ + DEPTH PARTICLES + 5. 4 + 15. 0 + 25. 13 + 35. 12 + 45. 3 + 55. 13 + 65. 12 + 75. 13 + 85. 16 + 95. 19 + 105. 8 + 115. 16 + 125. 9 + 135. 8 + 145. 21 + 155. 22 + 165. 20 + 175. 16 + 185. 23 + 195. 23 + 205. 23 + 215. 26 + 225. 25 + 235. 28 + 245. 37 + 255. 26 + 265. 27 + 275. 39 + 285. 51 + 295. 38 + 305. 31 + 315. 32 + 325. 28 + 335. 48 + 345. 42 + 355. 57 + 365. 55 + 375. 56 + 385. 62 + 395. 57 + 405. 60 + 415. 60 + 425. 60 + 435. 74 + 445. 81 + 455. 77 + 465. 83 + 475. 72 + 485. 86 + 495. 110 + 505. 86 + 515. 104 + 525. 106 + 535. 108 + 545. 122 + 555. 145 + 565. 167 + 575. 145 + 585. 142 + 595. 161 + 605. 177 + 615. 186 + 625. 207 + 635. 213 + 645. 239 + 655. 237 + 665. 266 + 675. 306 + 685. 304 + 695. 315 + 705. 314 + 715. 362 + 725. 354 + 735. 372 + 745. 392 + 755. 438 + 765. 493 + 775. 472 + 785. 530 + 795. 557 + 805. 545 + 815. 649 + 825. 730 + 835. 656 + 845. 727 + 855. 841 + 865. 861 + 875. 895 + 885. 940 + 895. 988 + 905. 1116 + 915. 1141 + 925. 1188 + 935. 1309 + 945. 1335 + 955. 1446 + 965. 1534 + 975. 1560 + 985. 1651 + 995. 1722 + 1005. 3264 + 1015. 3379 + 1025. 3688 + 1035. 3695 + 1045. 4036 + 1055. 4218 + 1065. 4500 + 1075. 4620 + 1085. 4648 + 1095. 4579 + 1105. 4502 + 1115. 4213 + 1125. 3958 + 1135. 3524 + 1145. 3046 + 1155. 2451 + 1165. 2001 + 1175. 1364 + 1185. 1009 + 1195. 619 + 1205. 316 + 1215. 189 + 1225. 89 + 1235. 42 + 1245. 13 + 1255. 5 + 1265. 3 + 1275. 0 + 1285. 0 + 1295. 0 + 1305. 0 + 1315. 0 + 1325. 0 + 1335. 0 + 1345. 0 + 1355. 0 + 1365. 0 + 1375. 0 + 1385. 0 + 1395. 0 + 1405. 0 + 1415. 0 + 1425. 0 + 1435. 0 + 1445. 0 + 1455. 0 + 1465. 0 + 1475. 0 + 1485. 0 + 1495. 0 + 1505. 0 + 1515. 0 + 1525. 0 + 1535. 0 + 1545. 0 + 1555. 0 + 1565. 0 + 1575. 0 + 1585. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E15000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E15000.rge new file mode 100644 index 00000000..f4b795fd --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E15000.rge @@ -0,0 +1,171 @@ + DEPTH PARTICLES + 5. 1 + 15. 4 + 25. 10 + 35. 11 + 45. 16 + 55. 11 + 65. 6 + 75. 13 + 85. 6 + 95. 18 + 105. 15 + 115. 16 + 125. 14 + 135. 14 + 145. 11 + 155. 15 + 165. 15 + 175. 17 + 185. 15 + 195. 18 + 205. 21 + 215. 18 + 225. 23 + 235. 17 + 245. 17 + 255. 27 + 265. 24 + 275. 23 + 285. 38 + 295. 21 + 305. 23 + 315. 22 + 325. 26 + 335. 29 + 345. 28 + 355. 40 + 365. 44 + 375. 30 + 385. 40 + 395. 37 + 405. 57 + 415. 43 + 425. 24 + 435. 41 + 445. 47 + 455. 55 + 465. 54 + 475. 64 + 485. 67 + 495. 64 + 505. 69 + 515. 72 + 525. 72 + 535. 94 + 545. 92 + 555. 85 + 565. 100 + 575. 101 + 585. 99 + 595. 118 + 605. 104 + 615. 140 + 625. 120 + 635. 132 + 645. 159 + 655. 139 + 665. 181 + 675. 178 + 685. 174 + 695. 202 + 705. 218 + 715. 254 + 725. 229 + 735. 234 + 745. 254 + 755. 308 + 765. 273 + 775. 297 + 785. 347 + 795. 370 + 805. 409 + 815. 385 + 825. 451 + 835. 470 + 845. 477 + 855. 458 + 865. 568 + 875. 619 + 885. 605 + 895. 650 + 905. 690 + 915. 746 + 925. 784 + 935. 815 + 945. 876 + 955. 874 + 965. 989 + 975. 1010 + 985. 1113 + 995. 1146 + 1005. 2027 + 1015. 2185 + 1025. 2309 + 1035. 2646 + 1045. 2743 + 1055. 3051 + 1065. 3262 + 1075. 3511 + 1085. 3716 + 1095. 3893 + 1105. 4147 + 1115. 4266 + 1125. 4356 + 1135. 4592 + 1145. 4520 + 1155. 4354 + 1165. 4075 + 1175. 3994 + 1185. 3577 + 1195. 3044 + 1205. 2582 + 1215. 2073 + 1225. 1482 + 1235. 1061 + 1245. 679 + 1255. 430 + 1265. 227 + 1275. 124 + 1285. 65 + 1295. 22 + 1305. 6 + 1315. 3 + 1325. 0 + 1335. 0 + 1345. 0 + 1355. 0 + 1365. 0 + 1375. 0 + 1385. 0 + 1395. 0 + 1405. 0 + 1415. 0 + 1425. 0 + 1435. 0 + 1445. 0 + 1455. 0 + 1465. 0 + 1475. 0 + 1485. 0 + 1495. 0 + 1505. 0 + 1515. 0 + 1525. 0 + 1535. 0 + 1545. 0 + 1555. 0 + 1565. 0 + 1575. 0 + 1585. 0 + 1595. 0 + 1605. 0 + 1615. 0 + 1625. 0 + 1635. 0 + 1645. 0 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E16000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E16000.rge new file mode 100644 index 00000000..4c0d88a1 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E16000.rge @@ -0,0 +1,178 @@ + DEPTH PARTICLES + 5. 0 + 15. 3 + 25. 8 + 35. 5 + 45. 4 + 55. 10 + 65. 6 + 75. 9 + 85. 8 + 95. 9 + 105. 10 + 115. 7 + 125. 11 + 135. 13 + 145. 19 + 155. 14 + 165. 10 + 175. 16 + 185. 16 + 195. 23 + 205. 14 + 215. 22 + 225. 17 + 235. 22 + 245. 19 + 255. 18 + 265. 16 + 275. 21 + 285. 23 + 295. 22 + 305. 19 + 315. 28 + 325. 36 + 335. 18 + 345. 23 + 355. 32 + 365. 32 + 375. 31 + 385. 28 + 395. 38 + 405. 37 + 415. 33 + 425. 33 + 435. 33 + 445. 44 + 455. 40 + 465. 49 + 475. 39 + 485. 43 + 495. 57 + 505. 46 + 515. 47 + 525. 61 + 535. 63 + 545. 66 + 555. 72 + 565. 77 + 575. 83 + 585. 78 + 595. 87 + 605. 80 + 615. 98 + 625. 102 + 635. 106 + 645. 103 + 655. 116 + 665. 118 + 675. 149 + 685. 141 + 695. 137 + 705. 150 + 715. 165 + 725. 130 + 735. 154 + 745. 175 + 755. 194 + 765. 179 + 775. 201 + 785. 223 + 795. 246 + 805. 229 + 815. 239 + 825. 250 + 835. 301 + 845. 320 + 855. 326 + 865. 355 + 875. 362 + 885. 374 + 895. 411 + 905. 437 + 915. 436 + 925. 451 + 935. 513 + 945. 541 + 955. 563 + 965. 589 + 975. 600 + 985. 643 + 995. 673 + 1005. 1320 + 1015. 1335 + 1025. 1475 + 1035. 1612 + 1045. 1760 + 1055. 1976 + 1065. 2166 + 1075. 2333 + 1085. 2472 + 1095. 2763 + 1105. 2836 + 1115. 3142 + 1125. 3328 + 1135. 3592 + 1145. 3795 + 1155. 4133 + 1165. 4215 + 1175. 4289 + 1185. 4387 + 1195. 4246 + 1205. 4430 + 1215. 4063 + 1225. 4026 + 1235. 3637 + 1245. 3269 + 1255. 2724 + 1265. 2188 + 1275. 1656 + 1285. 1178 + 1295. 867 + 1305. 508 + 1315. 335 + 1325. 163 + 1335. 89 + 1345. 37 + 1355. 9 + 1365. 6 + 1375. 0 + 1385. 0 + 1395. 1 + 1405. 0 + 1415. 0 + 1425. 0 + 1435. 0 + 1445. 0 + 1455. 0 + 1465. 0 + 1475. 0 + 1485. 0 + 1495. 0 + 1505. 0 + 1515. 0 + 1525. 0 + 1535. 0 + 1545. 0 + 1555. 0 + 1565. 0 + 1575. 0 + 1585. 0 + 1595. 0 + 1605. 0 + 1615. 0 + 1625. 0 + 1635. 0 + 1645. 0 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E17000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E17000.rge new file mode 100644 index 00000000..e7f5bc4d --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E17000.rge @@ -0,0 +1,185 @@ + DEPTH PARTICLES + 5. 3 + 15. 3 + 25. 8 + 35. 6 + 45. 10 + 55. 8 + 65. 8 + 75. 6 + 85. 7 + 95. 7 + 105. 11 + 115. 7 + 125. 5 + 135. 8 + 145. 12 + 155. 18 + 165. 8 + 175. 12 + 185. 11 + 195. 17 + 205. 11 + 215. 18 + 225. 10 + 235. 10 + 245. 13 + 255. 12 + 265. 15 + 275. 22 + 285. 17 + 295. 11 + 305. 15 + 315. 27 + 325. 27 + 335. 22 + 345. 21 + 355. 24 + 365. 22 + 375. 32 + 385. 23 + 395. 13 + 405. 31 + 415. 24 + 425. 28 + 435. 33 + 445. 32 + 455. 33 + 465. 26 + 475. 27 + 485. 34 + 495. 35 + 505. 35 + 515. 38 + 525. 41 + 535. 51 + 545. 36 + 555. 48 + 565. 55 + 575. 63 + 585. 72 + 595. 58 + 605. 71 + 615. 67 + 625. 74 + 635. 69 + 645. 73 + 655. 73 + 665. 99 + 675. 89 + 685. 95 + 695. 83 + 705. 91 + 715. 103 + 725. 128 + 735. 109 + 745. 119 + 755. 118 + 765. 123 + 775. 128 + 785. 155 + 795. 156 + 805. 171 + 815. 192 + 825. 221 + 835. 224 + 845. 175 + 855. 225 + 865. 231 + 875. 223 + 885. 255 + 895. 234 + 905. 276 + 915. 325 + 925. 284 + 935. 321 + 945. 351 + 955. 365 + 965. 393 + 975. 397 + 985. 442 + 995. 442 + 1005. 804 + 1015. 870 + 1025. 973 + 1035. 980 + 1045. 1093 + 1055. 1255 + 1065. 1314 + 1075. 1492 + 1085. 1552 + 1095. 1700 + 1105. 1845 + 1115. 2058 + 1125. 2218 + 1135. 2442 + 1145. 2541 + 1155. 2768 + 1165. 3028 + 1175. 3267 + 1185. 3480 + 1195. 3737 + 1205. 3937 + 1215. 4003 + 1225. 4200 + 1235. 4187 + 1245. 4320 + 1255. 4206 + 1265. 4140 + 1275. 3963 + 1285. 3653 + 1295. 3389 + 1305. 2748 + 1315. 2467 + 1325. 1935 + 1335. 1425 + 1345. 1047 + 1355. 655 + 1365. 411 + 1375. 235 + 1385. 158 + 1395. 69 + 1405. 36 + 1415. 7 + 1425. 7 + 1435. 1 + 1445. 0 + 1455. 0 + 1465. 0 + 1475. 0 + 1485. 0 + 1495. 0 + 1505. 0 + 1515. 0 + 1525. 0 + 1535. 0 + 1545. 0 + 1555. 0 + 1565. 0 + 1575. 0 + 1585. 0 + 1595. 0 + 1605. 0 + 1615. 0 + 1625. 0 + 1635. 0 + 1645. 0 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E18000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E18000.rge new file mode 100644 index 00000000..79969059 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E18000.rge @@ -0,0 +1,197 @@ + DEPTH PARTICLES + 5. 2 + 15. 1 + 25. 1 + 35. 4 + 45. 3 + 55. 9 + 65. 9 + 75. 2 + 85. 10 + 95. 10 + 105. 6 + 115. 3 + 125. 5 + 135. 14 + 145. 9 + 155. 15 + 165. 10 + 175. 9 + 185. 4 + 195. 8 + 205. 10 + 215. 10 + 225. 12 + 235. 12 + 245. 7 + 255. 12 + 265. 17 + 275. 12 + 285. 15 + 295. 12 + 305. 20 + 315. 18 + 325. 14 + 335. 15 + 345. 19 + 355. 5 + 365. 21 + 375. 21 + 385. 20 + 395. 23 + 405. 12 + 415. 19 + 425. 24 + 435. 34 + 445. 25 + 455. 21 + 465. 20 + 475. 26 + 485. 29 + 495. 30 + 505. 18 + 515. 39 + 525. 43 + 535. 32 + 545. 33 + 555. 35 + 565. 42 + 575. 28 + 585. 41 + 595. 35 + 605. 47 + 615. 43 + 625. 46 + 635. 69 + 645. 34 + 655. 63 + 665. 60 + 675. 52 + 685. 59 + 695. 78 + 705. 63 + 715. 81 + 725. 79 + 735. 84 + 745. 91 + 755. 86 + 765. 87 + 775. 104 + 785. 110 + 795. 121 + 805. 108 + 815. 114 + 825. 122 + 835. 117 + 845. 130 + 855. 157 + 865. 141 + 875. 160 + 885. 165 + 895. 179 + 905. 201 + 915. 200 + 925. 203 + 935. 205 + 945. 212 + 955. 231 + 965. 245 + 975. 280 + 985. 296 + 995. 260 + 1005. 531 + 1015. 536 + 1025. 591 + 1035. 651 + 1045. 689 + 1055. 756 + 1065. 870 + 1075. 935 + 1085. 966 + 1095. 1111 + 1105. 1177 + 1115. 1216 + 1125. 1388 + 1135. 1448 + 1145. 1572 + 1155. 1859 + 1165. 1996 + 1175. 2155 + 1185. 2277 + 1195. 2516 + 1205. 2680 + 1215. 2940 + 1225. 3063 + 1235. 3276 + 1245. 3471 + 1255. 3667 + 1265. 3803 + 1275. 3880 + 1285. 4168 + 1295. 4167 + 1305. 4319 + 1315. 3979 + 1325. 4171 + 1335. 3878 + 1345. 3426 + 1355. 3159 + 1365. 2706 + 1375. 2207 + 1385. 1691 + 1395. 1260 + 1405. 926 + 1415. 626 + 1425. 379 + 1435. 229 + 1445. 110 + 1455. 60 + 1465. 27 + 1475. 11 + 1485. 5 + 1495. 2 + 1505. 0 + 1515. 0 + 1525. 0 + 1535. 0 + 1545. 0 + 1555. 0 + 1565. 0 + 1575. 0 + 1585. 0 + 1595. 0 + 1605. 0 + 1615. 0 + 1625. 0 + 1635. 0 + 1645. 0 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 + 1845. 0 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E19000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E19000.rge new file mode 100644 index 00000000..1a3490f7 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E19000.rge @@ -0,0 +1,203 @@ + DEPTH PARTICLES + 5. 1 + 15. 5 + 25. 2 + 35. 8 + 45. 5 + 55. 5 + 65. 4 + 75. 6 + 85. 6 + 95. 9 + 105. 11 + 115. 5 + 125. 5 + 135. 8 + 145. 5 + 155. 7 + 165. 4 + 175. 12 + 185. 8 + 195. 12 + 205. 11 + 215. 12 + 225. 11 + 235. 8 + 245. 7 + 255. 8 + 265. 8 + 275. 11 + 285. 14 + 295. 11 + 305. 8 + 315. 17 + 325. 17 + 335. 5 + 345. 12 + 355. 23 + 365. 19 + 375. 19 + 385. 9 + 395. 13 + 405. 15 + 415. 13 + 425. 16 + 435. 13 + 445. 15 + 455. 16 + 465. 14 + 475. 21 + 485. 28 + 495. 15 + 505. 23 + 515. 17 + 525. 29 + 535. 20 + 545. 29 + 555. 27 + 565. 31 + 575. 34 + 585. 42 + 595. 37 + 605. 39 + 615. 29 + 625. 41 + 635. 57 + 645. 41 + 655. 31 + 665. 44 + 675. 50 + 685. 51 + 695. 52 + 705. 52 + 715. 54 + 725. 56 + 735. 51 + 745. 66 + 755. 59 + 765. 71 + 775. 59 + 785. 67 + 795. 88 + 805. 75 + 815. 78 + 825. 102 + 835. 91 + 845. 97 + 855. 102 + 865. 124 + 875. 112 + 885. 122 + 895. 119 + 905. 141 + 915. 136 + 925. 127 + 935. 125 + 945. 166 + 955. 158 + 965. 188 + 975. 165 + 985. 177 + 995. 192 + 1005. 345 + 1015. 367 + 1025. 405 + 1035. 439 + 1045. 450 + 1055. 448 + 1065. 528 + 1075. 652 + 1085. 614 + 1095. 687 + 1105. 717 + 1115. 840 + 1125. 902 + 1135. 992 + 1145. 1025 + 1155. 1115 + 1165. 1267 + 1175. 1318 + 1185. 1427 + 1195. 1578 + 1205. 1764 + 1215. 1762 + 1225. 2022 + 1235. 2187 + 1245. 2270 + 1255. 2518 + 1265. 2696 + 1275. 2911 + 1285. 3090 + 1295. 3202 + 1305. 3494 + 1315. 3725 + 1325. 3828 + 1335. 3881 + 1345. 3990 + 1355. 4101 + 1365. 4127 + 1375. 4030 + 1385. 3921 + 1395. 3674 + 1405. 3282 + 1415. 2889 + 1425. 2549 + 1435. 2105 + 1445. 1637 + 1455. 1230 + 1465. 873 + 1475. 606 + 1485. 358 + 1495. 205 + 1505. 124 + 1515. 66 + 1525. 30 + 1535. 17 + 1545. 9 + 1555. 0 + 1565. 1 + 1575. 0 + 1585. 0 + 1595. 0 + 1605. 0 + 1615. 0 + 1625. 0 + 1635. 0 + 1645. 0 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 + 1845. 0 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 + 1965. 0 + 1975. 0 + 1985. 0 + 1995. 0 + 2005. 0 + 2015. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E2000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E2000.rge new file mode 100644 index 00000000..ddc6896a --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E2000.rge @@ -0,0 +1,66 @@ + DEPTH PARTICLES + 5. 232 + 15. 535 + 25. 712 + 35. 913 + 45. 1012 + 55. 1271 + 65. 1431 + 75. 1604 + 85. 1828 + 95. 2037 + 105. 2178 + 115. 2547 + 125. 2861 + 135. 3030 + 145. 3383 + 155. 3769 + 165. 3942 + 175. 4109 + 185. 4356 + 195. 4519 + 205. 4366 + 215. 4539 + 225. 4489 + 235. 4474 + 245. 4256 + 255. 4081 + 265. 3849 + 275. 3453 + 285. 3098 + 295. 2620 + 305. 2335 + 315. 1837 + 325. 1513 + 335. 1216 + 345. 917 + 355. 712 + 365. 467 + 375. 327 + 385. 251 + 395. 133 + 405. 92 + 415. 59 + 425. 37 + 435. 12 + 445. 9 + 455. 3 + 465. 2 + 475. 2 + 485. 1 + 495. 0 + 505. 0 + 515. 0 + 525. 0 + 535. 0 + 545. 0 + 555. 0 + 565. 0 + 575. 0 + 585. 0 + 595. 0 + 605. 0 + 615. 0 + 625. 0 + 635. 0 + 645. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E20000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E20000.rge new file mode 100644 index 00000000..54aeca02 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E20000.rge @@ -0,0 +1,215 @@ + DEPTH PARTICLES + 5. 1 + 15. 1 + 25. 1 + 35. 2 + 45. 2 + 55. 6 + 65. 5 + 75. 6 + 85. 8 + 95. 7 + 105. 12 + 115. 5 + 125. 4 + 135. 4 + 145. 9 + 155. 3 + 165. 7 + 175. 9 + 185. 4 + 195. 13 + 205. 6 + 215. 12 + 225. 8 + 235. 13 + 245. 7 + 255. 6 + 265. 10 + 275. 5 + 285. 12 + 295. 8 + 305. 12 + 315. 8 + 325. 9 + 335. 6 + 345. 19 + 355. 11 + 365. 12 + 375. 21 + 385. 17 + 395. 13 + 405. 19 + 415. 16 + 425. 22 + 435. 21 + 445. 20 + 455. 13 + 465. 21 + 475. 22 + 485. 16 + 495. 22 + 505. 25 + 515. 17 + 525. 21 + 535. 14 + 545. 22 + 555. 33 + 565. 26 + 575. 30 + 585. 21 + 595. 23 + 605. 26 + 615. 21 + 625. 30 + 635. 28 + 645. 30 + 655. 34 + 665. 32 + 675. 44 + 685. 47 + 695. 36 + 705. 48 + 715. 37 + 725. 37 + 735. 59 + 745. 52 + 755. 50 + 765. 48 + 775. 49 + 785. 45 + 795. 68 + 805. 51 + 815. 63 + 825. 68 + 835. 51 + 845. 72 + 855. 60 + 865. 71 + 875. 72 + 885. 89 + 895. 98 + 905. 86 + 915. 94 + 925. 113 + 935. 110 + 945. 95 + 955. 109 + 965. 110 + 975. 124 + 985. 112 + 995. 133 + 1005. 251 + 1015. 256 + 1025. 252 + 1035. 298 + 1045. 313 + 1055. 340 + 1065. 335 + 1075. 391 + 1085. 423 + 1095. 461 + 1105. 492 + 1115. 517 + 1125. 589 + 1135. 638 + 1145. 639 + 1155. 736 + 1165. 808 + 1175. 813 + 1185. 937 + 1195. 1011 + 1205. 1067 + 1215. 1176 + 1225. 1264 + 1235. 1302 + 1245. 1486 + 1255. 1578 + 1265. 1741 + 1275. 1855 + 1285. 1979 + 1295. 2103 + 1305. 2377 + 1315. 2546 + 1325. 2636 + 1335. 2834 + 1345. 3077 + 1355. 3227 + 1365. 3420 + 1375. 3650 + 1385. 3655 + 1395. 3809 + 1405. 3927 + 1415. 4062 + 1425. 3909 + 1435. 3911 + 1445. 3718 + 1455. 3544 + 1465. 3202 + 1475. 2855 + 1485. 2480 + 1495. 2132 + 1505. 1654 + 1515. 1274 + 1525. 911 + 1535. 621 + 1545. 401 + 1555. 270 + 1565. 145 + 1575. 71 + 1585. 34 + 1595. 16 + 1605. 3 + 1615. 1 + 1625. 0 + 1635. 0 + 1645. 1 + 1655. 0 + 1665. 0 + 1675. 0 + 1685. 0 + 1695. 0 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 + 1845. 0 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 + 1965. 0 + 1975. 0 + 1985. 0 + 1995. 0 + 2005. 0 + 2015. 0 + 2025. 0 + 2035. 0 + 2045. 0 + 2055. 0 + 2065. 0 + 2075. 0 + 2085. 0 + 2095. 0 + 2105. 0 + 2115. 0 + 2125. 0 + 2135. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E21000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E21000.rge new file mode 100644 index 00000000..5b4b5767 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E21000.rge @@ -0,0 +1,225 @@ + DEPTH PARTICLES + 5. 0 + 15. 4 + 25. 5 + 35. 1 + 45. 10 + 55. 7 + 65. 2 + 75. 2 + 85. 7 + 95. 6 + 105. 5 + 115. 0 + 125. 4 + 135. 4 + 145. 4 + 155. 7 + 165. 8 + 175. 5 + 185. 3 + 195. 10 + 205. 6 + 215. 12 + 225. 4 + 235. 4 + 245. 9 + 255. 6 + 265. 8 + 275. 4 + 285. 6 + 295. 8 + 305. 8 + 315. 11 + 325. 7 + 335. 7 + 345. 5 + 355. 4 + 365. 11 + 375. 13 + 385. 6 + 395. 9 + 405. 17 + 415. 18 + 425. 13 + 435. 11 + 445. 12 + 455. 12 + 465. 13 + 475. 10 + 485. 18 + 495. 20 + 505. 13 + 515. 18 + 525. 11 + 535. 16 + 545. 12 + 555. 19 + 565. 20 + 575. 19 + 585. 20 + 595. 26 + 605. 28 + 615. 21 + 625. 25 + 635. 28 + 645. 40 + 655. 16 + 665. 28 + 675. 27 + 685. 31 + 695. 37 + 705. 29 + 715. 38 + 725. 25 + 735. 35 + 745. 31 + 755. 35 + 765. 43 + 775. 36 + 785. 39 + 795. 51 + 805. 42 + 815. 40 + 825. 44 + 835. 49 + 845. 56 + 855. 61 + 865. 40 + 875. 62 + 885. 61 + 895. 54 + 905. 67 + 915. 75 + 925. 73 + 935. 89 + 945. 67 + 955. 91 + 965. 78 + 975. 79 + 985. 89 + 995. 95 + 1005. 162 + 1015. 170 + 1025. 173 + 1035. 190 + 1045. 205 + 1055. 236 + 1065. 219 + 1075. 266 + 1085. 255 + 1095. 297 + 1105. 318 + 1115. 327 + 1125. 379 + 1135. 401 + 1145. 389 + 1155. 409 + 1165. 485 + 1175. 550 + 1185. 577 + 1195. 528 + 1205. 640 + 1215. 754 + 1225. 766 + 1235. 871 + 1245. 920 + 1255. 1030 + 1265. 1080 + 1275. 1147 + 1285. 1237 + 1295. 1430 + 1305. 1468 + 1315. 1633 + 1325. 1709 + 1335. 1758 + 1345. 2049 + 1355. 2205 + 1365. 2278 + 1375. 2600 + 1385. 2673 + 1395. 2854 + 1405. 3043 + 1415. 3121 + 1425. 3394 + 1435. 3482 + 1445. 3553 + 1455. 3721 + 1465. 3959 + 1475. 3878 + 1485. 3842 + 1495. 3866 + 1505. 3611 + 1515. 3592 + 1525. 3299 + 1535. 2778 + 1545. 2497 + 1555. 2064 + 1565. 1703 + 1575. 1413 + 1585. 984 + 1595. 693 + 1605. 449 + 1615. 290 + 1625. 180 + 1635. 94 + 1645. 43 + 1655. 29 + 1665. 10 + 1675. 4 + 1685. 1 + 1695. 1 + 1705. 0 + 1715. 0 + 1725. 0 + 1735. 0 + 1745. 0 + 1755. 0 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 + 1845. 0 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 + 1965. 0 + 1975. 0 + 1985. 0 + 1995. 0 + 2005. 0 + 2015. 0 + 2025. 0 + 2035. 0 + 2045. 0 + 2055. 0 + 2065. 0 + 2075. 0 + 2085. 0 + 2095. 0 + 2105. 0 + 2115. 0 + 2125. 0 + 2135. 0 + 2145. 0 + 2155. 0 + 2165. 0 + 2175. 0 + 2185. 0 + 2195. 0 + 2205. 0 + 2215. 0 + 2225. 0 + 2235. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E22000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E22000.rge new file mode 100644 index 00000000..d2f54d3e --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E22000.rge @@ -0,0 +1,233 @@ + DEPTH PARTICLES + 5. 0 + 15. 4 + 25. 1 + 35. 3 + 45. 3 + 55. 3 + 65. 2 + 75. 5 + 85. 4 + 95. 7 + 105. 6 + 115. 4 + 125. 5 + 135. 3 + 145. 4 + 155. 5 + 165. 3 + 175. 9 + 185. 6 + 195. 4 + 205. 4 + 215. 13 + 225. 4 + 235. 3 + 245. 10 + 255. 4 + 265. 9 + 275. 11 + 285. 6 + 295. 5 + 305. 10 + 315. 9 + 325. 13 + 335. 7 + 345. 8 + 355. 5 + 365. 7 + 375. 7 + 385. 7 + 395. 9 + 405. 10 + 415. 11 + 425. 5 + 435. 11 + 445. 12 + 455. 9 + 465. 12 + 475. 19 + 485. 9 + 495. 12 + 505. 16 + 515. 10 + 525. 15 + 535. 12 + 545. 14 + 555. 4 + 565. 17 + 575. 13 + 585. 12 + 595. 19 + 605. 19 + 615. 18 + 625. 16 + 635. 24 + 645. 24 + 655. 19 + 665. 31 + 675. 25 + 685. 21 + 695. 22 + 705. 40 + 715. 25 + 725. 24 + 735. 26 + 745. 28 + 755. 39 + 765. 23 + 775. 34 + 785. 34 + 795. 38 + 805. 27 + 815. 26 + 825. 37 + 835. 35 + 845. 49 + 855. 42 + 865. 49 + 875. 43 + 885. 48 + 895. 40 + 905. 43 + 915. 47 + 925. 58 + 935. 54 + 945. 54 + 955. 50 + 965. 58 + 975. 71 + 985. 59 + 995. 59 + 1005. 120 + 1015. 130 + 1025. 122 + 1035. 133 + 1045. 128 + 1055. 176 + 1065. 183 + 1075. 204 + 1085. 194 + 1095. 220 + 1105. 188 + 1115. 258 + 1125. 271 + 1135. 237 + 1145. 268 + 1155. 323 + 1165. 320 + 1175. 362 + 1185. 410 + 1195. 401 + 1205. 443 + 1215. 544 + 1225. 518 + 1235. 526 + 1245. 608 + 1255. 589 + 1265. 689 + 1275. 708 + 1285. 807 + 1295. 843 + 1305. 918 + 1315. 976 + 1325. 1077 + 1335. 1157 + 1345. 1284 + 1355. 1418 + 1365. 1491 + 1375. 1530 + 1385. 1649 + 1395. 1824 + 1405. 1953 + 1415. 2094 + 1425. 2268 + 1435. 2361 + 1445. 2522 + 1455. 2683 + 1465. 2878 + 1475. 3087 + 1485. 3272 + 1495. 3397 + 1505. 3520 + 1515. 3700 + 1525. 3630 + 1535. 3792 + 1545. 3889 + 1555. 3819 + 1565. 3629 + 1575. 3451 + 1585. 3224 + 1595. 2950 + 1605. 2581 + 1615. 2220 + 1625. 1843 + 1635. 1487 + 1645. 1117 + 1655. 812 + 1665. 547 + 1675. 364 + 1685. 225 + 1695. 124 + 1705. 82 + 1715. 32 + 1725. 17 + 1735. 5 + 1745. 1 + 1755. 2 + 1765. 0 + 1775. 0 + 1785. 0 + 1795. 0 + 1805. 0 + 1815. 0 + 1825. 0 + 1835. 0 + 1845. 0 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 + 1965. 0 + 1975. 0 + 1985. 0 + 1995. 0 + 2005. 0 + 2015. 0 + 2025. 0 + 2035. 0 + 2045. 0 + 2055. 0 + 2065. 0 + 2075. 0 + 2085. 0 + 2095. 0 + 2105. 0 + 2115. 0 + 2125. 0 + 2135. 0 + 2145. 0 + 2155. 0 + 2165. 0 + 2175. 0 + 2185. 0 + 2195. 0 + 2205. 0 + 2215. 0 + 2225. 0 + 2235. 0 + 2245. 0 + 2255. 0 + 2265. 0 + 2275. 0 + 2285. 0 + 2295. 0 + 2305. 0 + 2315. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E23000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E23000.rge new file mode 100644 index 00000000..31055c4b --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E23000.rge @@ -0,0 +1,241 @@ + DEPTH PARTICLES + 5. 1 + 15. 4 + 25. 2 + 35. 3 + 45. 3 + 55. 2 + 65. 2 + 75. 3 + 85. 3 + 95. 9 + 105. 6 + 115. 3 + 125. 4 + 135. 4 + 145. 3 + 155. 8 + 165. 4 + 175. 6 + 185. 4 + 195. 1 + 205. 5 + 215. 8 + 225. 8 + 235. 5 + 245. 7 + 255. 8 + 265. 6 + 275. 4 + 285. 6 + 295. 5 + 305. 10 + 315. 11 + 325. 4 + 335. 7 + 345. 4 + 355. 9 + 365. 7 + 375. 11 + 385. 9 + 395. 6 + 405. 11 + 415. 7 + 425. 7 + 435. 9 + 445. 13 + 455. 9 + 465. 9 + 475. 13 + 485. 13 + 495. 13 + 505. 5 + 515. 15 + 525. 6 + 535. 20 + 545. 15 + 555. 14 + 565. 9 + 575. 13 + 585. 12 + 595. 17 + 605. 17 + 615. 18 + 625. 20 + 635. 19 + 645. 17 + 655. 14 + 665. 22 + 675. 22 + 685. 18 + 695. 20 + 705. 25 + 715. 19 + 725. 25 + 735. 11 + 745. 25 + 755. 31 + 765. 25 + 775. 15 + 785. 21 + 795. 25 + 805. 30 + 815. 28 + 825. 26 + 835. 27 + 845. 30 + 855. 30 + 865. 36 + 875. 31 + 885. 33 + 895. 36 + 905. 32 + 915. 22 + 925. 35 + 935. 33 + 945. 32 + 955. 27 + 965. 41 + 975. 38 + 985. 45 + 995. 51 + 1005. 90 + 1015. 104 + 1025. 101 + 1035. 120 + 1045. 89 + 1055. 116 + 1065. 102 + 1075. 107 + 1085. 113 + 1095. 129 + 1105. 162 + 1115. 170 + 1125. 189 + 1135. 186 + 1145. 167 + 1155. 187 + 1165. 230 + 1175. 247 + 1185. 234 + 1195. 258 + 1205. 328 + 1215. 345 + 1225. 322 + 1235. 356 + 1245. 362 + 1255. 406 + 1265. 462 + 1275. 465 + 1285. 537 + 1295. 490 + 1305. 580 + 1315. 588 + 1325. 642 + 1335. 698 + 1345. 785 + 1355. 835 + 1365. 929 + 1375. 917 + 1385. 1032 + 1395. 1146 + 1405. 1260 + 1415. 1295 + 1425. 1386 + 1435. 1553 + 1445. 1661 + 1455. 1725 + 1465. 1938 + 1475. 2080 + 1485. 2177 + 1495. 2244 + 1505. 2472 + 1515. 2513 + 1525. 2814 + 1535. 2976 + 1545. 3205 + 1555. 3321 + 1565. 3413 + 1575. 3455 + 1585. 3566 + 1595. 3788 + 1605. 3627 + 1615. 3705 + 1625. 3724 + 1635. 3500 + 1645. 3270 + 1655. 2979 + 1665. 2751 + 1675. 2481 + 1685. 2087 + 1695. 1689 + 1705. 1299 + 1715. 1050 + 1725. 724 + 1735. 461 + 1745. 319 + 1755. 219 + 1765. 108 + 1775. 75 + 1785. 23 + 1795. 22 + 1805. 4 + 1815. 2 + 1825. 0 + 1835. 0 + 1845. 1 + 1855. 0 + 1865. 0 + 1875. 0 + 1885. 0 + 1895. 0 + 1905. 0 + 1915. 0 + 1925. 0 + 1935. 0 + 1945. 0 + 1955. 0 + 1965. 0 + 1975. 0 + 1985. 0 + 1995. 0 + 2005. 0 + 2015. 0 + 2025. 0 + 2035. 0 + 2045. 0 + 2055. 0 + 2065. 0 + 2075. 0 + 2085. 0 + 2095. 0 + 2105. 0 + 2115. 0 + 2125. 0 + 2135. 0 + 2145. 0 + 2155. 0 + 2165. 0 + 2175. 0 + 2185. 0 + 2195. 0 + 2205. 0 + 2215. 0 + 2225. 0 + 2235. 0 + 2245. 0 + 2255. 0 + 2265. 0 + 2275. 0 + 2285. 0 + 2295. 0 + 2305. 0 + 2315. 0 + 2325. 0 + 2335. 0 + 2345. 0 + 2355. 0 + 2365. 0 + 2375. 0 + 2385. 0 + 2395. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E3000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E3000.rge new file mode 100644 index 00000000..a7ce7473 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E3000.rge @@ -0,0 +1,74 @@ + DEPTH PARTICLES + 5. 91 + 15. 231 + 25. 307 + 35. 380 + 45. 433 + 55. 559 + 65. 571 + 75. 666 + 85. 728 + 95. 886 + 105. 920 + 115. 1065 + 125. 1156 + 135. 1276 + 145. 1386 + 155. 1618 + 165. 1735 + 175. 1882 + 185. 2106 + 195. 2318 + 205. 2507 + 215. 2768 + 225. 2888 + 235. 3171 + 245. 3410 + 255. 3488 + 265. 3805 + 275. 3999 + 285. 4017 + 295. 4088 + 305. 4222 + 315. 4200 + 325. 4119 + 335. 4013 + 345. 3761 + 355. 3637 + 365. 3336 + 375. 3020 + 385. 2613 + 395. 2190 + 405. 1923 + 415. 1474 + 425. 1269 + 435. 871 + 445. 684 + 455. 499 + 465. 331 + 475. 207 + 485. 131 + 495. 88 + 505. 45 + 515. 26 + 525. 11 + 535. 7 + 545. 3 + 555. 0 + 565. 0 + 575. 0 + 585. 0 + 595. 0 + 605. 0 + 615. 0 + 625. 0 + 635. 0 + 645. 0 + 655. 0 + 665. 0 + 675. 0 + 685. 0 + 695. 0 + 705. 0 + 715. 0 + 725. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E4000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E4000.rge new file mode 100644 index 00000000..559c4a3f --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E4000.rge @@ -0,0 +1,82 @@ + DEPTH PARTICLES + 5. 53 + 15. 125 + 25. 165 + 35. 186 + 45. 228 + 55. 293 + 65. 335 + 75. 323 + 85. 353 + 95. 396 + 105. 493 + 115. 494 + 125. 564 + 135. 614 + 145. 708 + 155. 714 + 165. 855 + 175. 880 + 185. 953 + 195. 1139 + 205. 1213 + 215. 1415 + 225. 1444 + 235. 1639 + 245. 1719 + 255. 1882 + 265. 2091 + 275. 2249 + 285. 2493 + 295. 2568 + 305. 2897 + 315. 3020 + 325. 3065 + 335. 3373 + 345. 3435 + 355. 3782 + 365. 3844 + 375. 3909 + 385. 3950 + 395. 3968 + 405. 3944 + 415. 3861 + 425. 3723 + 435. 3490 + 445. 3258 + 455. 2875 + 465. 2556 + 475. 2219 + 485. 1957 + 495. 1616 + 505. 1279 + 515. 992 + 525. 812 + 535. 607 + 545. 399 + 555. 262 + 565. 148 + 575. 100 + 585. 47 + 595. 25 + 605. 13 + 615. 6 + 625. 4 + 635. 1 + 645. 0 + 655. 0 + 665. 0 + 675. 0 + 685. 0 + 695. 0 + 705. 0 + 715. 0 + 725. 0 + 735. 0 + 745. 0 + 755. 0 + 765. 0 + 775. 0 + 785. 0 + 795. 0 + 805. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E5000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E5000.rge new file mode 100644 index 00000000..77335236 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E5000.rge @@ -0,0 +1,91 @@ + DEPTH PARTICLES + 5. 36 + 15. 86 + 25. 84 + 35. 131 + 45. 125 + 55. 157 + 65. 160 + 75. 202 + 85. 195 + 95. 239 + 105. 300 + 115. 301 + 125. 299 + 135. 332 + 145. 410 + 155. 392 + 165. 431 + 175. 511 + 185. 521 + 195. 612 + 205. 637 + 215. 679 + 225. 769 + 235. 831 + 245. 952 + 255. 997 + 265. 1116 + 275. 1175 + 285. 1338 + 295. 1376 + 305. 1504 + 315. 1713 + 325. 1836 + 335. 1944 + 345. 2157 + 355. 2275 + 365. 2436 + 375. 2643 + 385. 2784 + 395. 3001 + 405. 2979 + 415. 3258 + 425. 3329 + 435. 3471 + 445. 3662 + 455. 3627 + 465. 3838 + 475. 3756 + 485. 3792 + 495. 3620 + 505. 3403 + 515. 3270 + 525. 3305 + 535. 3004 + 545. 2598 + 555. 2334 + 565. 1892 + 575. 1534 + 585. 1229 + 595. 921 + 605. 663 + 615. 520 + 625. 292 + 635. 216 + 645. 118 + 655. 100 + 665. 45 + 675. 27 + 685. 13 + 695. 3 + 705. 2 + 715. 1 + 725. 0 + 735. 1 + 745. 0 + 755. 0 + 765. 0 + 775. 0 + 785. 0 + 795. 0 + 805. 0 + 815. 0 + 825. 0 + 835. 0 + 845. 0 + 855. 0 + 865. 0 + 875. 0 + 885. 0 + 895. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E6000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E6000.rge new file mode 100644 index 00000000..82b8156d --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E6000.rge @@ -0,0 +1,99 @@ + DEPTH PARTICLES + 5. 28 + 15. 54 + 25. 72 + 35. 88 + 45. 79 + 55. 94 + 65. 117 + 75. 115 + 85. 150 + 95. 147 + 105. 161 + 115. 161 + 125. 199 + 135. 217 + 145. 209 + 155. 222 + 165. 257 + 175. 283 + 185. 329 + 195. 357 + 205. 385 + 215. 401 + 225. 483 + 235. 448 + 245. 536 + 255. 538 + 265. 637 + 275. 636 + 285. 667 + 295. 807 + 305. 815 + 315. 884 + 325. 1033 + 335. 1112 + 345. 1167 + 355. 1344 + 365. 1391 + 375. 1501 + 385. 1612 + 395. 1758 + 405. 1958 + 415. 2032 + 425. 2119 + 435. 2350 + 445. 2452 + 455. 2610 + 465. 2812 + 475. 2902 + 485. 3072 + 495. 3226 + 505. 3331 + 515. 3445 + 525. 3633 + 535. 3679 + 545. 3793 + 555. 3690 + 565. 3655 + 575. 3597 + 585. 3497 + 595. 3203 + 605. 2868 + 615. 2629 + 625. 2321 + 635. 1991 + 645. 1665 + 655. 1387 + 665. 1067 + 675. 755 + 685. 571 + 695. 409 + 705. 244 + 715. 179 + 725. 119 + 735. 55 + 745. 34 + 755. 15 + 765. 8 + 775. 4 + 785. 0 + 795. 3 + 805. 0 + 815. 0 + 825. 0 + 835. 1 + 845. 0 + 855. 0 + 865. 0 + 875. 0 + 885. 0 + 895. 0 + 905. 0 + 915. 0 + 925. 0 + 935. 0 + 945. 0 + 955. 0 + 965. 0 + 975. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E7000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E7000.rge new file mode 100644 index 00000000..2c4f3c0c --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E7000.rge @@ -0,0 +1,106 @@ + DEPTH PARTICLES + 5. 13 + 15. 29 + 25. 37 + 35. 50 + 45. 58 + 55. 86 + 65. 56 + 75. 80 + 85. 87 + 95. 96 + 105. 119 + 115. 111 + 125. 130 + 135. 133 + 145. 139 + 155. 161 + 165. 184 + 175. 190 + 185. 189 + 195. 213 + 205. 250 + 215. 247 + 225. 284 + 235. 285 + 245. 312 + 255. 313 + 265. 372 + 275. 348 + 285. 424 + 295. 497 + 305. 443 + 315. 539 + 325. 580 + 335. 614 + 345. 676 + 355. 697 + 365. 825 + 375. 905 + 385. 955 + 395. 1047 + 405. 1088 + 415. 1118 + 425. 1255 + 435. 1321 + 445. 1436 + 455. 1574 + 465. 1697 + 475. 1813 + 485. 1955 + 495. 2059 + 505. 2230 + 515. 2325 + 525. 2672 + 535. 2806 + 545. 2918 + 555. 2990 + 565. 3283 + 575. 3371 + 585. 3459 + 595. 3582 + 605. 3646 + 615. 3633 + 625. 3736 + 635. 3623 + 645. 3345 + 655. 3265 + 665. 3140 + 675. 2927 + 685. 2551 + 695. 2283 + 705. 2112 + 715. 1794 + 725. 1421 + 735. 1120 + 745. 867 + 755. 634 + 765. 465 + 775. 294 + 785. 168 + 795. 131 + 805. 79 + 815. 54 + 825. 22 + 835. 10 + 845. 3 + 855. 3 + 865. 0 + 875. 0 + 885. 1 + 895. 0 + 905. 0 + 915. 0 + 925. 0 + 935. 0 + 945. 0 + 955. 0 + 965. 0 + 975. 0 + 985. 0 + 995. 0 + 1005. 0 + 1015. 0 + 1025. 0 + 1035. 0 + 1045. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E8000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E8000.rge new file mode 100644 index 00000000..02764d70 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E8000.rge @@ -0,0 +1,113 @@ + DEPTH PARTICLES + 5. 10 + 15. 26 + 25. 43 + 35. 41 + 45. 43 + 55. 56 + 65. 47 + 75. 59 + 85. 71 + 95. 70 + 105. 84 + 115. 78 + 125. 74 + 135. 109 + 145. 92 + 155. 94 + 165. 119 + 175. 104 + 185. 137 + 195. 146 + 205. 162 + 215. 155 + 225. 176 + 235. 162 + 245. 193 + 255. 192 + 265. 189 + 275. 268 + 285. 226 + 295. 279 + 305. 309 + 315. 330 + 325. 370 + 335. 368 + 345. 446 + 355. 411 + 365. 491 + 375. 495 + 385. 499 + 395. 605 + 405. 605 + 415. 708 + 425. 744 + 435. 771 + 445. 909 + 455. 932 + 465. 1087 + 475. 1094 + 485. 1085 + 495. 1289 + 505. 1377 + 515. 1394 + 525. 1587 + 535. 1745 + 545. 1874 + 555. 2016 + 565. 2219 + 575. 2251 + 585. 2383 + 595. 2552 + 605. 2598 + 615. 2877 + 625. 2982 + 635. 3073 + 645. 3266 + 655. 3327 + 665. 3406 + 675. 3617 + 685. 3474 + 695. 3420 + 705. 3526 + 715. 3317 + 725. 3177 + 735. 3131 + 745. 2889 + 755. 2645 + 765. 2391 + 775. 2060 + 785. 1773 + 795. 1505 + 805. 1152 + 815. 875 + 825. 735 + 835. 522 + 845. 384 + 855. 233 + 865. 155 + 875. 130 + 885. 65 + 895. 27 + 905. 10 + 915. 14 + 925. 7 + 935. 2 + 945. 0 + 955. 1 + 965. 0 + 975. 0 + 985. 0 + 995. 0 + 1005. 0 + 1015. 0 + 1025. 0 + 1035. 0 + 1045. 0 + 1055. 0 + 1065. 0 + 1075. 0 + 1085. 0 + 1095. 0 + 1105. 0 + 1115. 0 diff --git a/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E9000.rge b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E9000.rge new file mode 100644 index 00000000..3e74dbe7 --- /dev/null +++ b/src/external/DepthProfile/test/TRIMSP/SiC_1300x_52nm_48nm_E9000.rge @@ -0,0 +1,120 @@ + DEPTH PARTICLES + 5. 9 + 15. 14 + 25. 24 + 35. 22 + 45. 36 + 55. 35 + 65. 39 + 75. 43 + 85. 51 + 95. 51 + 105. 67 + 115. 55 + 125. 54 + 135. 62 + 145. 67 + 155. 73 + 165. 76 + 175. 93 + 185. 83 + 195. 100 + 205. 100 + 215. 108 + 225. 107 + 235. 141 + 245. 144 + 255. 127 + 265. 147 + 275. 139 + 285. 172 + 295. 201 + 305. 187 + 315. 230 + 325. 199 + 335. 267 + 345. 243 + 355. 273 + 365. 303 + 375. 323 + 385. 351 + 395. 385 + 405. 396 + 415. 383 + 425. 449 + 435. 480 + 445. 513 + 455. 574 + 465. 552 + 475. 618 + 485. 706 + 495. 804 + 505. 786 + 515. 833 + 525. 979 + 535. 1034 + 545. 1121 + 555. 1257 + 565. 1262 + 575. 1403 + 585. 1494 + 595. 1660 + 605. 1703 + 615. 1838 + 625. 1958 + 635. 2151 + 645. 2320 + 655. 2288 + 665. 2599 + 675. 2626 + 685. 2786 + 695. 2916 + 705. 3020 + 715. 3219 + 725. 3298 + 735. 3256 + 745. 3243 + 755. 3372 + 765. 3421 + 775. 3475 + 785. 3214 + 795. 3099 + 805. 3019 + 815. 2845 + 825. 2586 + 835. 2474 + 845. 2130 + 855. 1820 + 865. 1487 + 875. 1285 + 885. 987 + 895. 744 + 905. 564 + 915. 392 + 925. 277 + 935. 186 + 945. 129 + 955. 72 + 965. 29 + 975. 27 + 985. 10 + 995. 6 + 1005. 3 + 1015. 0 + 1025. 0 + 1035. 0 + 1045. 0 + 1055. 0 + 1065. 0 + 1075. 0 + 1085. 0 + 1095. 0 + 1105. 0 + 1115. 0 + 1125. 0 + 1135. 0 + 1145. 0 + 1155. 0 + 1165. 0 + 1175. 0 + 1185. 0 diff --git a/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat b/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat new file mode 100644 index 00000000..b1ee3b9c --- /dev/null +++ b/src/external/DepthProfile/test/data/1300Ar_PECVD_Escan_260K_5G_withDiaFrac.dat @@ -0,0 +1,16 @@ +dataT dataTErr dataB dataE dataTr dataRALRAR dataRATRAB dataSpinRot Asym_Mu Asym_MuPosErr Asym_MuNegErr Lambda_Mu Lambda_MuPosErr Lambda_MuNegErr freq_Mu1 freq_Mu1PosErr freq_Mu1NegErr Asym_muon Asym_muonPosErr Asym_muonNegErr Sigma_muon Sigma_muonPosErr Sigma_muonNegErr field fieldPosErr fieldNegErr ph_LR ph_LRPosErr ph_LRNegErr Alpha_LR Alpha_LRPosErr Alpha_LRNegErr relph_TB relph_TBPosErr relph_TBNegErr relph_TB_Mu relph_TB_MuPosErr relph_TB_MuNegErr Alpha_TB Alpha_TBPosErr Alpha_TBNegErr Zero ZeroPosErr ZeroNegErr freqMu2 freqMu2PosErr freqMu2NegErr Asym_MuSiO2 Asym_MuSiO2PosErr Asym_MuSiO2NegErr Lambda_MuSiO2 Lambda_MuSiO2PosErr Lambda_MuSiO2NegErr freqMuSiO2 freqMuSiO2PosErr freqMuSiO2NegErr CHISQ NDF CHISQred RUN AsymCorrected AsymCorrectedErr AsymAg DiaFrac DiaFracErr + 260.0000 0.0060 4.4400 6.9980 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0730 0.0012 0.0011 0.1359 0.0079 0.0080 7.0900 0.0270 0.0310 363.4600 0.8000 0.7800 1.0099 0.0019 0.0019 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9959 0.0017 0.0017 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0813 0.0102 0.0090 2.1300 0.3700 0.3200 0.0000 0.0000 0.0000 2320.3999 2224.0000 1.0433 3817.0000 0.0565 0.0012 0.2019 0.2797 0.0059 + 260.0000 0.0050 4.4500 8.9961 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0608 0.0011 0.0011 0.1190 0.0097 0.0100 7.1670 0.0110 0.0120 359.4000 0.7900 0.7900 1.0072 0.0018 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9898 0.0016 0.0016 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0765 0.0058 0.0055 1.1400 0.1400 0.1300 0.0000 0.0000 0.0000 2366.3999 2224.0000 1.0640 3818.0000 0.0462 0.0011 0.2110 0.2190 0.0052 + 260.0000 0.0060 4.4510 9.9949 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0586 0.0011 0.0011 0.1100 0.0110 0.0110 7.1628 0.0096 0.0101 358.3500 0.8000 0.8000 1.0097 0.0018 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9877 0.0016 0.0016 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0781 0.0054 0.0051 1.1600 0.1200 0.1100 0.0000 0.0000 0.0000 2404.7000 2224.0000 1.0812 3819.0000 0.0445 0.0011 0.2139 0.2080 0.0051 + 260.0000 0.0050 4.4480 10.9940 16.4946 -0.0100 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0565 0.0011 0.0011 0.1060 0.0110 0.0110 7.0730 0.0200 0.0210 358.7500 0.9000 0.9000 1.0121 0.0018 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9882 0.0016 0.0016 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0910 0.0081 0.0075 1.9600 0.2400 0.2100 0.0000 0.0000 0.0000 2387.1001 2224.0000 1.0733 3820.0000 0.0427 0.0011 0.2161 0.1977 0.0051 + 260.0000 0.0050 4.4500 11.9930 16.4946 -0.0090 -0.0090 -10.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 9.2100 0.0000 0.0000 0.0548 0.0011 0.0011 0.1210 0.0100 0.0110 7.1610 0.0140 0.0160 358.4900 0.8800 0.8700 1.0151 0.0018 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9912 0.0016 0.0016 0.0000 0.0000 0.0000 10.8000 0.0000 0.0000 0.0470 0.0053 0.0048 1.0500 0.2000 0.1600 0.0000 0.0000 0.0000 2299.3000 2224.0000 1.0339 3821.0000 0.0412 0.0011 0.2178 0.1893 0.0051 + 260.0000 0.0060 4.4500 12.9921 16.4946 -0.0090 -0.0090 -10.0000 0.0237 0.0039 0.0037 0.7300 0.1600 0.1400 0.0000 0.0000 0.0000 0.0432 0.0013 0.0013 0.1090 0.0150 0.0160 6.6470 0.0520 0.0520 362.9000 1.5000 1.5000 1.0200 0.0022 0.0022 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9875 0.0018 0.0018 0.0000 0.0000 0.0000 9.9840 0.0260 0.0270 0.0650 0.0180 0.0140 3.5200 0.9800 0.7700 0.0000 0.0000 0.0000 2256.7000 2221.0000 1.0161 3822.0000 0.0298 0.0013 0.2191 0.1358 0.0059 + 260.0000 0.0050 4.4520 13.9909 16.4946 -0.0100 -0.0090 -10.0000 0.0320 0.0058 0.0049 2.0300 0.6100 0.4500 9.1330 0.0770 0.0820 0.0375 0.0011 0.0010 0.0950 0.0170 0.0190 7.5000 0.0000 0.0000 -5.9000 1.1000 1.1000 1.0125 0.0017 0.0017 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9840 0.0015 0.0015 0.0000 0.0000 0.0000 9.9900 0.0530 0.0610 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2252.0000 2223.0000 1.0130 3823.0000 0.0241 0.0011 0.2200 0.1097 0.0050 + 260.0000 0.0050 4.4500 14.9898 16.4946 -0.0100 -0.0090 -10.0000 0.0550 0.0160 0.0110 4.2000 1.6000 1.0000 9.1090 0.0940 0.1010 0.0329 0.0011 0.0011 0.1240 0.0170 0.0180 7.5000 0.0000 0.0000 -4.6000 1.4000 1.3000 1.0149 0.0017 0.0017 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9859 0.0015 0.0015 0.0000 0.0000 0.0000 10.1400 0.1000 0.1300 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2219.8000 2223.0000 0.9986 3824.0000 0.0196 0.0011 0.2208 0.0888 0.0050 + 260.0000 0.0060 4.4500 15.9972 16.4946 -0.0100 -0.0090 -10.0000 0.0240 0.0050 0.0040 1.6400 0.5900 0.3800 9.0870 0.0610 0.0620 0.0293 0.0011 0.0011 0.1460 0.0190 0.0200 7.5000 0.0000 0.0000 -8.4000 1.6000 1.6000 1.0168 0.0019 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9807 0.0015 0.0015 0.0000 0.0000 0.0000 10.0240 0.0520 0.0600 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2290.2000 2223.0000 1.0302 3825.0000 0.0160 0.0011 0.2214 0.0724 0.0050 + 260.0000 0.0060 4.4600 16.9959 16.4946 -0.0100 -0.0090 -10.0000 0.0455 0.0110 0.0081 2.8000 1.0000 0.7200 0.0000 0.0000 0.0000 0.0212 0.0011 0.0011 0.0770 0.0320 0.0500 7.5000 0.0000 0.0000 -12.3000 2.2000 2.2000 1.0182 0.0019 0.0018 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9827 0.0014 0.0014 0.0000 0.0000 0.0000 9.2480 0.0670 0.0590 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2312.0000 2224.0000 1.0396 3826.0000 0.0080 0.0011 0.2218 0.0359 0.0050 + 260.0000 0.0060 4.4590 17.9950 16.4946 -0.0090 -0.0090 -10.0000 0.0850 0.0250 0.0190 7.0000 1.7000 1.4000 0.0000 0.0000 0.0000 0.0194 0.0013 0.0012 0.0950 0.0320 0.0420 6.9900 0.3200 0.3400 355.5000 5.2000 5.0000 1.0173 0.0019 0.0019 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9846 0.0023 0.0021 0.0000 0.0000 0.0000 9.5800 0.1700 0.1700 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2096.3999 2223.0000 0.9431 3827.0000 0.0062 0.0013 0.2221 0.0278 0.0059 + 260.0000 0.0060 4.4600 18.9939 16.4946 -0.0100 -0.0090 -10.0000 0.0540 0.0250 0.0160 5.3000 2.4000 1.7000 0.0000 0.0000 0.0000 0.0205 0.0020 0.0017 0.1080 0.0400 0.0490 6.6700 0.4100 0.4500 358.4000 6.6000 6.3000 1.0209 0.0027 0.0025 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9832 0.0033 0.0028 0.0000 0.0000 0.0000 9.1400 0.2100 0.1900 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2133.8000 2223.0000 0.9599 3828.0000 0.0073 0.0020 0.2224 0.0327 0.0090 + 260.0000 0.0040 4.4500 19.9932 16.4946 -0.0100 -0.0090 -10.0000 0.0920 0.0550 0.0330 8.7000 3.5000 2.9000 0.0000 0.0000 0.0000 0.0173 0.0014 0.0014 0.1050 0.0420 0.0570 7.1600 0.0000 0.0000 -9.5000 3.4000 3.4000 1.0189 0.0024 0.0023 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9887 0.0018 0.0018 0.0000 0.0000 0.0000 9.3800 0.2100 0.2000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2261.3999 2224.0000 1.0168 3829.0000 0.0041 0.0014 0.2226 0.0184 0.0063 + 260.0000 0.0040 4.4500 20.9920 16.4946 -0.0090 -0.0090 -10.0000 0.0292 0.0101 0.0076 2.0900 0.9000 0.6500 9.0670 0.0830 0.0790 0.0199 0.0015 0.0014 0.1640 0.0380 0.0370 7.1600 0.0000 0.0000 -12.2000 2.7000 2.7000 1.0147 0.0024 0.0022 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9891 0.0018 0.0018 0.0000 0.0000 0.0000 10.8640 0.0700 0.0610 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2157.5000 2223.0000 0.9705 3830.0000 0.0067 0.0015 0.2228 0.0300 0.0067 + 260.0000 0.0060 4.4490 21.9912 16.4946 -0.0090 -0.0090 -10.0000 0.0364 0.0094 0.0090 2.7000 0.8300 0.8000 9.1320 0.0840 0.0800 0.0193 0.0014 0.0013 0.1550 0.0350 0.0350 7.1600 0.0000 0.0000 -7.6000 2.7000 2.7000 1.0140 0.0022 0.0021 -90.0000 0.0000 0.0000 90.0000 0.0000 0.0000 0.9907 0.0017 0.0017 0.0000 0.0000 0.0000 10.8540 0.0830 0.1010 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 2162.2000 2223.0000 0.9726 3831.0000 0.0061 0.0014 0.2229 0.0273 0.0063 diff --git a/src/external/DepthProfile/test/depth_profile_startup.xml b/src/external/DepthProfile/test/depth_profile_startup.xml index ef9e27e0..cb212a36 100644 --- a/src/external/DepthProfile/test/depth_profile_startup.xml +++ b/src/external/DepthProfile/test/depth_profile_startup.xml @@ -4,8 +4,32 @@ TrimSp information - ./Trimsp/Si10/ - Si10_100nm_2.2_E - + ./TRIMSP/ + SiC_1300x_52nm_48nm_E + + 1000 + 2000 + 3000 + 4000 + 5000 + 6000 + 7000 + 8000 + 9000 + 10000 + 11000 + 12000 + 13000 + 14000 + 15000 + 16000 + 17000 + 17000 + 18000 + 19000 + 20000 + 21000 + 22000 +