From a9140ecd74b8e67f41a3d38ace4e7fc41a639639 Mon Sep 17 00:00:00 2001 From: Andreas Suter Date: Fri, 17 Feb 2023 09:35:04 +0100 Subject: [PATCH] changed from energy_list to energy_vect in depth_profile_startup.xml. --- .../1300Ar/depth_profile_startup.xml | 26 +------------------ .../1300x/depth_profile_startup.xml | 26 +------------------ .../PECVD_Si/depth_profile_startup.xml | 26 +------------------ .../depth_profile_startup.xml | 26 +------------------ 4 files changed, 4 insertions(+), 100 deletions(-) diff --git a/doc/examples/DepthProfiles/1300Ar/depth_profile_startup.xml b/doc/examples/DepthProfiles/1300Ar/depth_profile_startup.xml index cb212a36..16381d33 100644 --- a/doc/examples/DepthProfiles/1300Ar/depth_profile_startup.xml +++ b/doc/examples/DepthProfiles/1300Ar/depth_profile_startup.xml @@ -6,30 +6,6 @@ ./TRIMSP/ SiC_1300x_52nm_48nm_E - - 1000 - 2000 - 3000 - 4000 - 5000 - 6000 - 7000 - 8000 - 9000 - 10000 - 11000 - 12000 - 13000 - 14000 - 15000 - 16000 - 17000 - 17000 - 18000 - 19000 - 20000 - 21000 - 22000 - + diff --git a/doc/examples/DepthProfiles/1300x/depth_profile_startup.xml b/doc/examples/DepthProfiles/1300x/depth_profile_startup.xml index cb212a36..16381d33 100644 --- a/doc/examples/DepthProfiles/1300x/depth_profile_startup.xml +++ b/doc/examples/DepthProfiles/1300x/depth_profile_startup.xml @@ -6,30 +6,6 @@ ./TRIMSP/ SiC_1300x_52nm_48nm_E - - 1000 - 2000 - 3000 - 4000 - 5000 - 6000 - 7000 - 8000 - 9000 - 10000 - 11000 - 12000 - 13000 - 14000 - 15000 - 16000 - 17000 - 17000 - 18000 - 19000 - 20000 - 21000 - 22000 - + diff --git a/doc/examples/DepthProfiles/PECVD_Si/depth_profile_startup.xml b/doc/examples/DepthProfiles/PECVD_Si/depth_profile_startup.xml index bc083af0..e3c8bc27 100644 --- a/doc/examples/DepthProfiles/PECVD_Si/depth_profile_startup.xml +++ b/doc/examples/DepthProfiles/PECVD_Si/depth_profile_startup.xml @@ -6,30 +6,6 @@ ./TRIMSP/ Si10_2.0_E - - 1000 - 2000 - 3000 - 4000 - 5000 - 6000 - 7000 - 8000 - 9000 - 10000 - 11000 - 12000 - 13000 - 14000 - 15000 - 16000 - 17000 - 17000 - 18000 - 19000 - 20000 - 21000 - 22000 - + diff --git a/doc/examples/DepthProfiles/PECVD_thermal_SiC/depth_profile_startup.xml b/doc/examples/DepthProfiles/PECVD_thermal_SiC/depth_profile_startup.xml index 02294594..8fd0840f 100644 --- a/doc/examples/DepthProfiles/PECVD_thermal_SiC/depth_profile_startup.xml +++ b/doc/examples/DepthProfiles/PECVD_thermal_SiC/depth_profile_startup.xml @@ -6,30 +6,6 @@ ./TRIMSP/ SiO2_70nm2.0_30nm2.2_SiC_E - - 1000 - 2000 - 3000 - 4000 - 5000 - 6000 - 7000 - 8000 - 9000 - 10000 - 11000 - 12000 - 13000 - 14000 - 15000 - 16000 - 17000 - 17000 - 18000 - 19000 - 20000 - 21000 - 22000 - +