Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN W TiN Al2O3 Si 17.00 0.45 0.00 15.00 50000 49840 160 0 50000 0 0.9322E+03 0.1682E+03 0.5847E+04 0.4894E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 416 5550 21410 18452 3987 25 0