Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Si 11.00 0.45 0.00 15.00 5000 4978 22 0 5000 0 0.6823E+03 0.1464E+03 0.3516E+04 0.3082E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 567 4411