Energy    SigmaE     Alpha  SigAlpha    ntot     imp  backsc   trans   tried    negE   range      straggeling  Eback       sigEback    Etrans      SigEtrans   red._E      PRC   SiO2                 Al2O3                TiN                  W                    TiN                  Al2O3                Si                  
       21.00      0.45      0.00     15.00    5000    4990      10       0    5000       0   0.1160E+04  0.2221E+03  0.7854E+04  0.4839E+04  0.0000E+00  0.0000E+00  0.0000E+00  0.0000E+00     20     215     797     787    1302    1865       4