Energy    SigmaE     Alpha  SigAlpha    ntot     imp  backsc   trans   tried    negE   range      straggeling  Eback       sigEback    Etrans      SigEtrans   red._E      PRC   SiO2                 Al2O3                TiN                  W                    TiN                  Al2O3                Si                  
       13.00      0.45      0.00     15.00    5000    4984      16       0    5000       0   0.6861E+03  0.1307E+03  0.5013E+04  0.4169E+04  0.0000E+00  0.0000E+00  0.0000E+00  0.0000E+00    128    2673    2181       2       0       0       0