EF
Cutoff energy of projectiles (in eV);
must be greater than zero.
KK0
Maximum order of weak (simultaneous) collisions between projectiles and target atoms;
must be between 0 and 4 (0 means no weak collisions included).
ESB
Surface binding energy for projectiles (in eV).
KK0R
Maximum order of weak (simultaneous) collisions between target atoms;
must be between 0 and 4 (0 means no weak collisions included).
SHEATH
Sheath potential (in eV); typically 3 * kT (i.e., 3 * |projectile energy|).
KDEE1
Inelastic energy loss model for projectiles:
1 = nonlocal (Lindhard-Scharff);
2 = local (Oen-Robinson);
3 = equipartition of 1 & 2;
4 = nonlocal (Anderson-Ziegler tables for hydrogen);
5 = nonlocal (Ziegler tables for helium).
ERC
Recoil cutoff energy (in eV);
usually equal to the surface binding energy.
KDEE2
Inelastic energy loss for target atoms:
1 = nonlocal (Lindhard-Scharff);
2 = local (Oen-Robinson);
3 = equipartition of 1 and 2.
RD
Depth (in Å) to which recoils are followed.
RD = 50 is usually sufficient for sputtering
(if the projectile energy is not too high).
Use RD = 100 * CW (i.e., the depth increment) for following the full cascade.
CA
Correction factor to the Firsov screening length for collisions between projectile and target atoms
(only for application of the Molière potential);
usually on the order of ~1.0.
IRL
0 = no recoils are generated (i.e., no sputtering effects);
used to speed up the calculation if only projectile ranges are of interest.
For further details see:
W. Eckstein, Computer Simulation of Ion-Solid Interactions,
Springer Series in Materials Science, Vol. 10 (Springer-Verlag, Berlin, 1991).
https://doi.org/10.1007/978-3-642-73513-4