Layer #CompositionDensity [g/cm3]Thickness [Å]
Projectile parameters
Projectile
Number of projectiles
Starting depth [Å]
Depth increment [Å]
Energy [eV]
Energy sigma [eV]
Angle [deg]
Angle sigma [deg]
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EF KK0
ESB KK0R
SHEATH KDEE1
ERC KDEE2
RD IPOT
CA IPOTR
IRL