1 * TrimSPNL v1.3.1 * Start: 14.Jun. 2026 18:00:36 End: 14.Jun. 2026 18:00:37 Simulation needed for 5000 projectiles 1 seconds * INPUT DATA * SiO2_Si_2lay Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC 1.00 0.11 7000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00 NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL 5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0 DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5) 1.LAYER 500.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000 2.LAYER 10000.00 2.33 1.00 14. 0. 0. 0. 0. 28.09 0.00 0.00 0.00 0.00 1.000 0.000 0.000 0.000 0.000 *** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) *** 1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 2.LAYER 4.63 0.00 0.00 0.00 0.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 CH1 CH2 CH3 CH4 CH5 1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190 2.652000 3.000000 1920.000000 2000.000000 0.022300 2.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190 INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION 1 * OUTPUT DATA * SiO2_Si_2lay HLM HLMT SU SUT XC RT SFE INEL L LJ 0.0000 10500.000 3.9333 10504.596 -3.9333 10450.000 3.28 0 2 3 NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST 23954 0 0 0 0 0 0 0 0 EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I) 1.LAYER 0.1051E+02 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.5000E+03 2 2.LAYER 0.6723E+01 0.1400E+02 0.2809E+02 0.4996E-01 0.2715E+01 0.1532E+01 0.1356E+00 0.4630E+01 0.1050E+05 1 A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35) 0.19439 0.23425 0.19439 KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z) 1.07495 0.67216 1.07495 A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35) 0.12246 0.13356 0.12246 0.13356 0.14757 0.13356 0.12246 0.13356 0.12246 KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z) 1.45186 0.89903 1.45186 1.08509 0.68953 1.08509 1.45186 0.89903 1.45186 1 IMPLANTED PARTICLES= 4959 ENERGY=0.3471E+08 EV BACKSCATTERED PARTICLES= 41 ENERGY=0.7242E+05 EV TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV TRIED PARTICLES= 5000 PARTICLES with neg. E= 0 THOMAS FERMI RED. ENERGY= 0.0000E+00 SCALED PART. REFL. COEFF= 0.0000E+00 FROM BIN WIDTH FROM LAYER THICKNESS IMPLANTED PARTICLES (LAYER 1)= 3284 3284 IMPLANTED PARTICLES (LAYER 2)= 1675 1675 PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 302.8 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.047 MEAN NUMBER OF EL.COLL.(E > SB(1)) = 1.263 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M PENETRATION 4.4522E+02 1.2534E+04 -8.6874E-01 3.8943E+00 1.1196E+02 1.5898E+00 3.0280E+02 3.4538E-02 SPREAD 2.0714E+02 1.0313E+04 4.3449E-01 2.7922E+00 1.0155E+02 1.4421E+00 1.9606E+02 2.7165E-02 PATHLENGTH 7.0548E+02 1.1267E+03 1.1958E-01 2.9992E+00 3.3566E+01 4.7666E-01 2.2623E+01 3.5475E-02 ELASTIC LOSS 2.7109E+01 2.1728E+02 1.4740E+01 2.9724E-03 INEL. LOSS 6.9779E+03 2.0430E+05 4.5199E+02 9.1146E-02 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ELAST.LOSS 8.9466E-02 7.6995E-01 4.6154E+01 3.7695E+03 8.7747E-01 7.1310E-04 3.8412E-02 3.1180E+00 WEAK EL.LOSS 1.3855E-03 1.5510E-05 4.7001E+00 2.8207E+01 3.9383E-03 3.2006E-06 6.5746E-08 9.2001E-03 INELAST.LOSS 2.2993E+01 1.2041E+02 -5.5046E-01 1.9945E+00 1.0973E+01 8.9177E-03 9.7586E-02 1.3195E-03 SUBTHR.LOSS 8.2221E-02 3.7690E-01 2.2553E+01 7.0128E+02 6.1392E-01 4.9896E-04 8.1062E-03 2.1951E-01 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT PENETRATION 4.4522E+02 2.1076E+05 1.0378E+08 5.2640E+10 2.7353E+13 1.4506E+16 1 DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA -SU- 0. 0 0.0000E+00 0.- 20. 3 0.6050E-03 0 1.6284E+06 2.2052E+03 2.2013E+03 3.9344E+02 1.8078E+03 2.9255E+02 7 20.- 40. 12 0.2420E-02 0 1.6454E+06 2.3213E+03 2.3134E+03 4.7119E+02 1.8422E+03 3.5586E+02 8 40.- 60. 10 0.2017E-02 0 1.6388E+06 2.6042E+03 2.5966E+03 6.7871E+02 1.9179E+03 4.9540E+02 11 60.- 80. 10 0.2017E-02 0 1.6457E+06 2.6460E+03 2.6378E+03 5.2536E+02 2.1125E+03 3.9674E+02 11 80.- 100. 13 0.2621E-02 0 1.6495E+06 2.3444E+03 2.3346E+03 3.2229E+02 2.0123E+03 2.5032E+02 9 100.- 120. 10 0.2017E-02 0 1.6324E+06 3.0436E+03 3.0348E+03 9.3421E+02 2.1006E+03 6.8956E+02 15 120.- 140. 17 0.3428E-02 0 1.6359E+06 2.8743E+03 2.8618E+03 6.0921E+02 2.2526E+03 4.4962E+02 11 140.- 160. 25 0.5041E-02 0 1.6435E+06 3.7405E+03 3.7239E+03 1.0707E+03 2.6532E+03 7.9668E+02 20 160.- 180. 46 0.9276E-02 0 1.6211E+06 3.7456E+03 3.7196E+03 5.8176E+02 3.1378E+03 4.4726E+02 13 180.- 200. 38 0.7663E-02 0 1.6070E+06 4.0777E+03 4.0510E+03 8.8702E+02 3.1640E+03 6.6328E+02 18 200.- 220. 50 0.1008E-01 0 1.5884E+06 4.0602E+03 4.0323E+03 5.9882E+02 3.4334E+03 4.5104E+02 14 220.- 240. 57 0.1149E-01 0 1.5578E+06 4.2294E+03 4.1937E+03 5.5271E+02 3.6410E+03 4.1884E+02 13 240.- 260. 60 0.1210E-01 0 1.5331E+06 4.7568E+03 4.7183E+03 5.5875E+02 4.1595E+03 4.2609E+02 14 260.- 280. 74 0.1492E-01 0 1.5019E+06 5.0616E+03 5.0165E+03 4.0987E+02 4.6066E+03 3.0816E+02 10 280.- 300. 106 0.2138E-01 0 1.4515E+06 5.9487E+03 5.8894E+03 7.5922E+02 5.1302E+03 5.7218E+02 19 300.- 320. 127 0.2561E-01 0 1.3915E+06 6.1590E+03 6.0884E+03 5.5578E+02 5.5326E+03 4.1670E+02 13 320.- 340. 125 0.2521E-01 0 1.3338E+06 6.4832E+03 6.4069E+03 2.2200E+02 6.1849E+03 1.6832E+02 6 340.- 360. 166 0.3347E-01 0 1.2774E+06 7.3501E+03 7.2529E+03 3.0867E+02 6.9443E+03 2.3284E+02 8 360.- 380. 231 0.4658E-01 0 1.1893E+06 7.1193E+03 6.9944E+03 7.3171E+01 6.9212E+03 5.5273E+01 2 380.- 400. 237 0.4779E-01 0 1.0941E+06 7.8698E+03 7.7361E+03 2.2469E+02 7.5114E+03 1.7005E+02 6 400.- 420. 304 0.6130E-01 0 9.8158E+05 7.8798E+03 7.7171E+03 1.3928E+02 7.5778E+03 1.0544E+02 4 420.- 440. 342 0.6897E-01 0 8.6637E+05 8.3340E+03 8.1507E+03 3.1275E+01 8.1194E+03 2.3811E+01 1 440.- 460. 394 0.7945E-01 0 7.3487E+05 7.7710E+03 7.5663E+03 8.0944E+01 7.4854E+03 6.0730E+01 2 460.- 480. 397 0.8006E-01 0 6.0730E+05 7.4939E+03 7.2790E+03 0.0000E+00 7.2790E+03 0.0000E+00 0 480.- 500. 430 0.8671E-01 0 4.7547E+05 6.8657E+03 6.6521E+03 0.0000E+00 6.6521E+03 0.0000E+00 0 500.- 520. 344 0.6937E-01 0 3.1249E+05 3.1923E+03 3.1262E+03 0.0000E+00 3.1262E+03 0.0000E+00 0 520.- 540. 353 0.7118E-01 0 2.3072E+05 2.5627E+03 2.5036E+03 0.0000E+00 2.5036E+03 0.0000E+00 0 540.- 560. 322 0.6493E-01 0 1.5419E+05 1.9949E+03 1.9404E+03 0.0000E+00 1.9404E+03 0.0000E+00 0 560.- 580. 238 0.4799E-01 0 9.5105E+04 1.3720E+03 1.3320E+03 0.0000E+00 1.3320E+03 0.0000E+00 0 580.- 600. 189 0.3811E-01 4 4.7670E+04 7.2567E+02 6.9826E+02 0.0000E+00 6.9826E+02 0.0000E+00 0 600.- 620. 118 0.2380E-01 13 2.5352E+04 4.2472E+02 4.0624E+02 0.0000E+00 4.0624E+02 0.0000E+00 0 620.- 640. 67 0.1351E-01 85 1.0168E+04 1.9231E+02 1.8298E+02 0.0000E+00 1.8298E+02 0.0000E+00 0 640.- 660. 25 0.5041E-02 311 4.0274E+03 7.5953E+01 7.2138E+01 0.0000E+00 7.2138E+01 0.0000E+00 0 660.- 680. 18 0.3630E-02 733 1.4197E+03 2.9767E+01 2.7405E+01 0.0000E+00 2.7405E+01 0.0000E+00 0 680.- 700. 1 0.2017E-03 1042 1.3461E+02 2.8881E+00 2.7027E+00 0.0000E+00 2.7027E+00 0.0000E+00 0 700.- 720. 0 0.0000E+00 1170 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 720.- 740. 0 0.0000E+00 833 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 740.- 760. 0 0.0000E+00 496 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 760.- 780. 0 0.0000E+00 195 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 780.- 800. 0 0.0000E+00 60 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 800.- 820. 0 0.0000E+00 15 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 820.- 840. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 840.- 860. 0 0.0000E+00 1 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 860.- 880. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 880.- 900. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 900.- SUT 0 0.0000E+00 4959 1.0000E+00 4959 3.4813E+07 1.3756E+05 1.3546E+05 1.0989E+04 1.2447E+05 8.2468E+03 235 1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2) 0.- 20. 5.4037E+05 8.6173E+02 1.4257E+02 7.1917E+02 1.0881E+06 1.3395E+03 2.5088E+02 1.0887E+03 3 4 20.- 40. 5.4372E+05 1.1202E+03 3.4742E+02 7.7283E+02 1.1017E+06 1.1932E+03 1.2377E+02 1.0694E+03 6 2 40.- 60. 5.4888E+05 8.9131E+02 9.9577E+01 7.9173E+02 1.0899E+06 1.7053E+03 5.7913E+02 1.1262E+03 2 9 60.- 80. 5.5282E+05 1.1179E+03 2.3835E+02 8.7953E+02 1.0929E+06 1.5200E+03 2.8701E+02 1.2329E+03 5 6 80.- 100. 5.5019E+05 9.4069E+02 2.5434E+02 6.8634E+02 1.0993E+06 1.3939E+03 6.7949E+01 1.3260E+03 7 2 100.- 120. 5.4075E+05 1.1748E+03 3.4594E+02 8.2884E+02 1.0916E+06 1.8600E+03 5.8827E+02 1.2717E+03 7 8 120.- 140. 5.4009E+05 1.1230E+03 9.7118E+01 1.0259E+03 1.0958E+06 1.7388E+03 5.1210E+02 1.2267E+03 2 9 140.- 160. 5.5086E+05 1.3620E+03 2.7201E+02 1.0900E+03 1.0926E+06 2.3619E+03 7.9865E+02 1.5632E+03 6 14 160.- 180. 5.3848E+05 1.7183E+03 4.7969E+02 1.2387E+03 1.0826E+06 2.0012E+03 1.0207E+02 1.8992E+03 11 2 180.- 200. 5.3706E+05 1.3199E+03 1.8284E+02 1.1371E+03 1.0700E+06 2.7311E+03 7.0419E+02 2.0269E+03 4 14 200.- 220. 5.2248E+05 1.4758E+03 1.2498E+02 1.3508E+03 1.0659E+06 2.5565E+03 4.7384E+02 2.0826E+03 3 11 220.- 240. 5.1699E+05 1.7026E+03 1.9790E+02 1.5047E+03 1.0408E+06 2.4911E+03 3.5481E+02 2.1363E+03 5 8 240.- 260. 5.1506E+05 1.9175E+03 2.8620E+02 1.6313E+03 1.0180E+06 2.8008E+03 2.7255E+02 2.5282E+03 8 6 260.- 280. 5.0121E+05 1.7007E+03 3.3548E+01 1.6671E+03 1.0007E+06 3.3158E+03 3.7632E+02 2.9395E+03 1 9 280.- 300. 4.8183E+05 1.8700E+03 7.2375E+01 1.7976E+03 9.6963E+05 4.0194E+03 6.8685E+02 3.3326E+03 2 17 300.- 320. 4.6120E+05 2.0413E+03 6.1673E+01 1.9797E+03 9.3027E+05 4.0470E+03 4.9411E+02 3.5529E+03 2 11 320.- 340. 4.4702E+05 2.3569E+03 3.3385E+01 2.3235E+03 8.8677E+05 4.0500E+03 1.8862E+02 3.8614E+03 1 5 340.- 360. 4.2187E+05 2.4338E+03 3.1051E+01 2.4028E+03 8.5549E+05 4.8191E+03 2.7762E+02 4.5415E+03 1 7 360.- 380. 3.9521E+05 2.4257E+03 0.0000E+00 2.4257E+03 7.9414E+05 4.5687E+03 7.3171E+01 4.4956E+03 0 2 380.- 400. 3.6896E+05 2.5722E+03 3.3442E+01 2.5388E+03 7.2515E+05 5.1639E+03 1.9125E+02 4.9726E+03 1 5 400.- 420. 3.2733E+05 2.5520E+03 0.0000E+00 2.5520E+03 6.5424E+05 5.1651E+03 1.3928E+02 5.0258E+03 0 4 420.- 440. 2.9015E+05 2.6780E+03 0.0000E+00 2.6780E+03 5.7622E+05 5.4728E+03 3.1275E+01 5.4415E+03 0 1 440.- 460. 2.4198E+05 2.3927E+03 0.0000E+00 2.3927E+03 4.9289E+05 5.1736E+03 8.0944E+01 5.0927E+03 0 2 460.- 480. 2.0348E+05 2.3142E+03 0.0000E+00 2.3142E+03 4.0381E+05 4.9648E+03 0.0000E+00 4.9648E+03 0 0 480.- 500. 1.5484E+05 1.9602E+03 0.0000E+00 1.9602E+03 3.1625E+05 4.6370E+03 0.0000E+00 4.6370E+03 0 0 500.- 520. 8.5904E+03 9.4775E+01 0.0000E+00 9.4775E+01 1.7847E+04 2.3776E+02 0.0000E+00 2.3776E+02 0 0 520.- 540. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 540.- 560. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 1.1301E+07 4.4118E+04 3.3344E+03 4.0784E+04 2.2653E+07 8.1328E+04 7.6546E+03 7.3674E+04 77 158 DAMAGE IN LAYER 1 : 1.2517E+05 DAMAGE IN LAYER 2 : 1.0292E+04 1 BACKSCATTERING OF PROJECTILES PART.REFL.COEF.= 8.2000E-03 ENERGY REFL.COEF.= 2.0691E-03 REL.MEAN ENERGY = 2.5233E-01 MEAN ENERGY = 1.7663E+03 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ENERGY 1.7663E+03 2.5345E+06 1.2140E+00 3.6957E+00 1.5920E+03 2.4863E+02 6.4987E+05 3.2953E-01 PATHLENGTH 4.0317E+02 2.4071E+04 -5.6880E-01 2.4672E+00 1.5515E+02 2.4230E+01 4.5535E+03 2.6727E-01 ELASTIC LOSS 7.6256E+01 8.6197E+02 2.9359E+01 7.1608E-01 INEL. LOSS 5.1178E+03 2.7985E+06 1.6729E+03 4.0801E+01 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT ENERGY 1.7663E+03 5.6544E+06 2.3839E+10 1.1553E+14 6.0819E+17 3.3856E+21 LOGENERGY 3.0543E+00 9.5175E+00 3.0209E+01 9.7500E+01 3.1944E+02 1.0606E+03 PATHLENGTH 4.0317E+02 1.8662E+05 9.2524E+07 4.7901E+10 2.5536E+13 1.3904E+16 POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00 0 0 0 2 1 1 1 1 3 1 1 3 0 2 3 2 6 5 5 4 0.000 0.000 0.000 0.976 0.488 0.488 0.488 0.488 1.463 0.488 0.488 1.463 0.000 0.976 1.463 0.976 2.927 2.439 2.439 1.951