1 * TrimSPNL v1.3.1 * Start: 14.Jun. 2026 17:59:40 End: 14.Jun. 2026 17:59:41 Simulation needed for 5000 projectiles 1 seconds * INPUT DATA * SiO2_1layer_ Z1 M1 E0 Esig ALPHA ALPHASIG EF ESB SHEATH ERC 1.00 0.11 3000.00 450.00 0.00 15.00 0.50 0.00 0.00 0.00 NH RI RI2 RI3 X0 RD CW CA KK0 KK0R KDEE1 KDEE2 IPOT IPOTR IRL 5000 78741.00 78741.00 78741.00 0.00 50.00 20.00 1.00 2 2 4 3 2 1 0 DX RHO CK Z(,1) Z(,2) Z(,3) Z(,4) Z(,5) M(,1) M(,2) M(,3) M(,4) M(,5) C(,1) C(,2) C(,3) C(,4) C(,5) 1.LAYER 10000.00 2.65 1.00 14. 8. 0. 0. 0. 28.09 16.00 0.00 0.00 0.00 0.333 0.667 0.000 0.000 0.000 *** SBE(LAYER,ELEMENT) *** *** ED(LAYER,ELEMENT) *** *** BE(LAYER,ELEMENT) *** 1.LAYER 4.63 2.60 0.00 0.00 0.00 30.00 30.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 0.00 CH1 CH2 CH3 CH4 CH5 1.LAYER 4.914000 5.598000 3193.000000 232.700000 0.014190 2.652000 3.000000 1920.000000 2000.000000 0.022300 INTERACTION POTENTIAL : PROJECTILE-TARGET : mod. MOLIERE TARGET-TARGET : KR-C POTENTIAL INELASTIC LOSS MODEL : PROJECTILE-TARGET : AZ nach ICRU49 TARGET-TARGET : 50% LS 50% OR PROJECTILE ENERGY has GAUSSIAN DISTRIBUTION PROJECTILE ANGLE has 1D GAUSSIAN DISTRIBUTION 1 * OUTPUT DATA * SiO2_1layer_ HLM HLMT SU SUT XC RT SFE INEL L LJ 0.0000 10000.000 3.9333 10003.933 -3.9333 9950.000 3.28 0 1 2 NPROJ KIB KIT MAXA NALL NPA NSA KIS KIST 14591 0 0 0 0 0 0 0 0 EPS0(I) Z2(I) M2(I) ARHO(I) LM(I) PDMAX(I) ASIG(I) SB(I) XX(I) NJ(I) 1.LAYER 0.4505E+01 0.1000E+02 0.2003E+02 0.7968E-01 0.2324E+01 0.1311E+01 0.1852E+00 0.3277E+01 0.1000E+05 2 A1(1) A1(2) A1(3) A1(4) A1(5) A1(6) A1(7) A1(8) A1(9) A1(10) A1(11) A1(12) A1(13) A1(14) A1(15) A1(16) A1(17) A1(18) A1(19) A1(20) A1(21) A1(22) A1(23) A1(24) A1(25) A1(26) A1(27) A1(28) A1(29) A1(30) A1(31) A1(32) A1(33) A1(34) A1(35) 0.19439 0.23425 KOR1(1) KOR1(2) KOR1(3) KOR1(4) KOR1(5) KOR1(6) KOR1(7) KOR1(8) KOR1(9) KOR1(A) KOR1(B) KOR1(C) KOR1(D) KOR1(E) KOR1(F) KOR1(G) KOR1(H) KOR1(I) KOR1(J) KOR1(K) KOR1(L) KOR1(M) KOR1(N) KOR1(O) KOR1(P) KOR1(Q) KOR1(R) KOR1(S) KOR1(T) KOR1(U) KOR1(V) KOR1(W) KOR1(X) KOR1(Y) KOR1(Z) 1.07495 0.67216 A(I,1) A(I,2) A(I,3) A(I,4) A(I,5) A(I,6) A(I,7) A(I,8) A(I,9) A(I,10) A(I,11) A(I,12) A(I,13) A(I,14) A(I,15) A(I,16) A(I,17) A(I,18) A(I,19) A(I,20) A(I,21) A(I,22) A(I,23) A(I,24) A(I,25) A(I,26) A(I,27) A(I,28) A(I,29) A(I,30) A(I,31) A(I,32) A(I,33) A(I,34) A(I,35) 0.12246 0.13356 0.13356 0.14757 KOR(,1) KOR(,2) KOR(,3) KOR(,4) KOR(,5) KOR(,6) KOR(,7) KOR(,8) KOR(,9) KOR(,A) KOR(,B) KOR(,C) KOR(,D) KOR(,E) KOR(,F) KOR(,G) KOR(,H) KOR(,I) KOR(,J) KOR(,K) KOR(,L) KOR(,M) KOR(,N) KOR(,O) KOR(,P) KOR(,Q) KOR(,R) KOR(,S) KOR(,T) KOR(,U) KOR(,V) KOR(,W) KOR(,X) KOR(,Y) KOR(,Z) 1.45186 0.89903 1.08509 0.68953 1 IMPLANTED PARTICLES= 4853 ENERGY=0.1456E+08 EV BACKSCATTERED PARTICLES= 147 ENERGY=0.1213E+06 EV TRANSMITTED PARTICLES= 0 ENERGY=0.0000E+00 EV BACKSPUTTERED PARTICLES= 0 ENERGY=0.0000E+00 EV TRANSM. SPUTT. PARTICLES= 0 ENERGY=0.0000E+00 EV TRIED PARTICLES= 5000 PARTICLES with neg. E= 0 THOMAS FERMI RED. ENERGY= 0.0000E+00 SCALED PART. REFL. COEFF= 0.0000E+00 PROJECTILES : MEAN NUMBER OF ELASTIC COLLISIONS = 183.4 MEAN NUMBER OF EL.COLL.(E > EDISPL.) = 0.016 MEAN NUMBER OF EL.COLL.(E > SB(1)) = 0.976 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M PENETRATION 2.2069E+02 5.6640E+03 -4.1399E-01 2.8531E+00 7.5260E+01 1.0803E+00 1.1068E+02 2.5973E-02 SPREAD 1.2783E+02 3.8760E+03 4.1592E-01 2.7779E+00 6.2257E+01 8.9369E-01 7.4188E+01 2.9208E-02 PATHLENGTH 4.2188E+02 1.1917E+03 -1.2663E-01 3.0404E+00 3.4522E+01 4.9555E-01 2.4436E+01 3.5505E-02 ELASTIC LOSS 2.1339E+01 8.6471E+01 9.2990E+00 1.9161E-03 INEL. LOSS 2.9866E+03 1.8880E+05 4.3451E+02 8.9535E-02 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ELAST.LOSS 1.1565E-01 5.8401E-01 2.8525E+01 1.4339E+03 7.6420E-01 7.9814E-04 2.3089E-02 1.4252E+00 WEAK EL.LOSS 2.7632E-03 3.2150E-05 3.0444E+00 1.2605E+01 5.6701E-03 5.9218E-06 1.1438E-07 5.9493E-03 INELAST.LOSS 1.6144E+01 7.9049E+01 -1.6559E-01 1.7910E+00 8.8910E+00 9.2857E-03 7.3425E-02 1.5402E-03 SUBTHR.LOSS 1.1205E-01 4.2653E-01 1.8606E+01 4.9888E+02 6.5310E-01 6.8212E-04 9.9404E-03 2.4433E-01 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT PENETRATION 2.2069E+02 5.4369E+04 1.4322E+07 3.9631E+09 1.1405E+12 3.3915E+14 1 DEPTH(A) PARTICLES NORM.DEPTH PATHLENGTH INLOSS(EV) TELOSS(EV) ELLOSS(EV) DAMAGE(EV) PHONON(EV) CASCAD(EV) DPA -SU- 0. 0 0.0000E+00 0.- 20. 21 0.4327E-02 0 1.3585E+06 4.1043E+03 4.0844E+03 5.9306E+02 3.4914E+03 4.4360E+02 13 20.- 40. 56 0.1154E-01 0 1.3650E+06 4.7576E+03 4.7243E+03 5.2789E+02 4.1964E+03 3.9766E+02 12 40.- 60. 69 0.1422E-01 0 1.3668E+06 5.0550E+03 5.0117E+03 4.6088E+02 4.5508E+03 3.4830E+02 11 60.- 80. 88 0.1813E-01 0 1.3604E+06 5.8951E+03 5.8398E+03 4.7733E+02 5.3624E+03 3.5968E+02 12 80.- 100. 126 0.2596E-01 0 1.3300E+06 6.5825E+03 6.5101E+03 3.8596E+02 6.1241E+03 2.9101E+02 10 100.- 120. 168 0.3462E-01 0 1.2856E+06 7.3418E+03 7.2485E+03 4.1980E+02 6.8287E+03 3.1588E+02 11 120.- 140. 195 0.4018E-01 0 1.2188E+06 7.9481E+03 7.8341E+03 2.5706E+02 7.5771E+03 1.9397E+02 7 140.- 160. 260 0.5358E-01 0 1.1245E+06 8.3794E+03 8.2347E+03 8.0536E+01 8.1541E+03 6.0535E+01 2 160.- 180. 334 0.6882E-01 0 1.0233E+06 9.5738E+03 9.3855E+03 9.9811E+01 9.2857E+03 7.5754E+01 3 180.- 200. 452 0.9314E-01 0 8.9962E+05 9.6538E+03 9.4197E+03 0.0000E+00 9.4197E+03 0.0000E+00 0 200.- 220. 456 0.9396E-01 0 7.4759E+05 8.8801E+03 8.6369E+03 0.0000E+00 8.6369E+03 0.0000E+00 0 220.- 240. 517 0.1065E+00 0 6.0420E+05 8.6260E+03 8.3543E+03 0.0000E+00 8.3543E+03 0.0000E+00 0 240.- 260. 518 0.1067E+00 0 4.3733E+05 7.1553E+03 6.8864E+03 0.0000E+00 6.8864E+03 0.0000E+00 0 260.- 280. 506 0.1043E+00 0 3.0681E+05 5.8045E+03 5.5596E+03 0.0000E+00 5.5596E+03 0.0000E+00 0 280.- 300. 405 0.8345E-01 2 1.8677E+05 3.9507E+03 3.7516E+03 0.0000E+00 3.7516E+03 0.0000E+00 0 300.- 320. 313 0.6450E-01 12 1.0185E+05 2.4595E+03 2.3175E+03 0.0000E+00 2.3175E+03 0.0000E+00 0 320.- 340. 183 0.3771E-01 33 4.9853E+04 1.3426E+03 1.2592E+03 0.0000E+00 1.2592E+03 0.0000E+00 0 340.- 360. 112 0.2308E-01 158 2.3435E+04 7.0375E+02 6.5256E+02 0.0000E+00 6.5256E+02 0.0000E+00 0 360.- 380. 54 0.1113E-01 360 7.5808E+03 2.5507E+02 2.3318E+02 0.0000E+00 2.3318E+02 0.0000E+00 0 380.- 400. 14 0.2885E-02 672 1.8993E+03 6.8180E+01 6.1869E+01 0.0000E+00 6.1869E+01 0.0000E+00 0 400.- 420. 4 0.8242E-03 1055 3.7501E+02 1.3805E+01 1.2423E+01 0.0000E+00 1.2423E+01 0.0000E+00 0 420.- 440. 2 0.4121E-03 1070 6.5950E+01 4.1147E+00 3.4922E+00 0.0000E+00 3.4922E+00 0.0000E+00 0 440.- 460. 0 0.0000E+00 846 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 460.- 480. 0 0.0000E+00 440 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 480.- 500. 0 0.0000E+00 155 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 500.- 520. 0 0.0000E+00 43 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 520.- 540. 0 0.0000E+00 7 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 540.- 560. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 560.- 580. 0 0.0000E+00 0 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 580.- SUT 0 0.0000E+00 4853 1.0000E+00 4853 1.4800E+07 1.0855E+05 1.0602E+05 3.3023E+03 1.0272E+05 2.4864E+03 81 1 DEPTH(A) INLOSS(1) ELLOSS(1) DAMAGE(1) PHONON(1) INLOSS(2) ELLOSS(2) DAMAGE(2) PHONON(2) DPA(1) DPA(2) 0.- 20. 4.5557E+05 1.4368E+03 7.9712E+01 1.3571E+03 9.0289E+05 2.6476E+03 5.1335E+02 2.1343E+03 2 11 20.- 40. 4.5388E+05 1.6486E+03 1.5027E+02 1.4984E+03 9.1115E+05 3.0757E+03 3.7762E+02 2.6980E+03 4 8 40.- 60. 4.5293E+05 1.9645E+03 1.3952E+02 1.8250E+03 9.1385E+05 3.0472E+03 3.2136E+02 2.7259E+03 4 7 60.- 80. 4.5454E+05 1.9964E+03 3.5721E+01 1.9607E+03 9.0587E+05 3.8434E+03 4.4161E+02 3.4017E+03 1 11 80.- 100. 4.4238E+05 2.3330E+03 3.0218E+01 2.3028E+03 8.8765E+05 4.1771E+03 3.5574E+02 3.8213E+03 1 9 100.- 120. 4.2827E+05 2.5356E+03 0.0000E+00 2.5356E+03 8.5731E+05 4.7129E+03 4.1980E+02 4.2931E+03 0 11 120.- 140. 4.0602E+05 2.5894E+03 0.0000E+00 2.5894E+03 8.1280E+05 5.2447E+03 2.5706E+02 4.9877E+03 0 7 140.- 160. 3.7674E+05 2.6931E+03 0.0000E+00 2.6931E+03 7.4780E+05 5.5415E+03 8.0536E+01 5.4610E+03 0 2 160.- 180. 3.3596E+05 2.9576E+03 0.0000E+00 2.9576E+03 6.8730E+05 6.4279E+03 9.9811E+01 6.3281E+03 0 3 180.- 200. 2.9765E+05 3.0338E+03 0.0000E+00 3.0338E+03 6.0197E+05 6.3859E+03 0.0000E+00 6.3859E+03 0 0 200.- 220. 2.4955E+05 2.5735E+03 0.0000E+00 2.5735E+03 4.9804E+05 6.0634E+03 0.0000E+00 6.0634E+03 0 0 220.- 240. 1.9967E+05 2.5070E+03 0.0000E+00 2.5070E+03 4.0453E+05 5.8473E+03 0.0000E+00 5.8473E+03 0 0 240.- 260. 1.4557E+05 2.0893E+03 0.0000E+00 2.0893E+03 2.9177E+05 4.7971E+03 0.0000E+00 4.7971E+03 0 0 260.- 280. 1.0154E+05 1.6792E+03 0.0000E+00 1.6792E+03 2.0527E+05 3.8804E+03 0.0000E+00 3.8804E+03 0 0 280.- 300. 6.1141E+04 1.1296E+03 0.0000E+00 1.1296E+03 1.2563E+05 2.6219E+03 0.0000E+00 2.6219E+03 0 0 300.- 320. 3.4472E+04 6.7523E+02 0.0000E+00 6.7523E+02 6.7377E+04 1.6423E+03 0.0000E+00 1.6423E+03 0 0 320.- 340. 1.5710E+04 3.5948E+02 0.0000E+00 3.5948E+02 3.4143E+04 8.9974E+02 0.0000E+00 8.9974E+02 0 0 340.- 360. 7.4334E+03 1.6335E+02 0.0000E+00 1.6335E+02 1.6002E+04 4.8921E+02 0.0000E+00 4.8921E+02 0 0 360.- 380. 2.4262E+03 5.5587E+01 0.0000E+00 5.5587E+01 5.1547E+03 1.7759E+02 0.0000E+00 1.7759E+02 0 0 380.- 400. 6.6378E+02 1.7883E+01 0.0000E+00 1.7883E+01 1.2355E+03 4.3987E+01 0.0000E+00 4.3987E+01 0 0 400.- 420. 9.6318E+01 1.6786E+00 0.0000E+00 1.6786E+00 2.7869E+02 1.0744E+01 0.0000E+00 1.0744E+01 0 0 420.- 440. 1.7338E+01 4.1269E-01 0.0000E+00 4.1269E-01 4.8613E+01 3.0795E+00 0.0000E+00 3.0795E+00 0 0 440.- 460. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 460.- 480. 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 0 0 4.9222E+06 3.4441E+04 4.3544E+02 3.4006E+04 9.8781E+06 7.1581E+04 2.8669E+03 6.8714E+04 12 69 DAMAGE IN LAYER 1 : 1.0602E+05 1 BACKSCATTERING OF PROJECTILES PART.REFL.COEF.= 2.9400E-02 ENERGY REFL.COEF.= 8.0839E-03 REL.MEAN ENERGY = 2.7496E-01 MEAN ENERGY = 8.2489E+02 MEAN VARIANCE SKEWNESS KURTOSIS SIGMA ERROR 1.M ERROR 2.M ERROR 3.M ENERGY 8.2489E+02 5.8790E+05 1.0046E+00 2.9362E+00 7.6674E+02 6.3240E+01 6.7470E+04 1.5483E-01 PATHLENGTH 2.2793E+02 1.1951E+04 -2.3345E-01 2.1539E+00 1.0932E+02 9.0164E+00 1.0588E+03 1.2957E-01 ELASTIC LOSS 3.4002E+01 2.0435E+02 1.4295E+01 9.7247E-02 INEL. LOSS 2.0828E+03 7.5604E+05 8.6950E+02 5.9150E+00 1.MOMENT 2.MOMENT 3.MOMENT 4.MOMENT 5.MOMENT 6.MOMENT ENERGY 8.2489E+02 1.2683E+06 2.4690E+09 5.3721E+12 1.2462E+16 3.0146E+19 LOGENERGY 2.6567E+00 7.3698E+00 2.1105E+01 6.1927E+01 1.8524E+02 5.6286E+02 PATHLENGTH 2.2793E+02 6.3902E+04 1.9708E+07 6.4537E+09 2.2085E+12 7.8320E+14 POLAR ANGULAR DISTRIBUTION OF BACKSCATTERED PROJECTILES 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00 0 0 0 1 4 1 3 6 2 3 10 5 11 9 14 12 15 19 17 15 0.000 0.000 0.000 0.136 0.544 0.136 0.408 0.816 0.272 0.408 1.361 0.680 1.497 1.224 1.905 1.633 2.041 2.585 2.313 2.041