TRIMSP-NL Workbench

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Target

Layer stack

Layers

Layer

Composition

Density [g/cm³]

Thickness [Å]

Beam

Projectile

Projectile Projectiles Energy [eV] Energy sigma [eV] Angle [deg] Angle sigma [deg] Starting depth [Å] Depth increment [Å] RNG Seed

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Single simulation using the Layers settings.

Transport model

Advanced parameters

EF Cutoff energy of projectiles (in eV); must be greater than zero. Used for low projectile energies (< 1000 eV) and ESB = 0. EF should be of the order of ~0.2 eV, but not above SBE (for sputtering data). With increasing projectile energy, EF can be increased to save computing time.		KK0 Maximum order of weak (simultaneous) collisions between projectile and target atoms: No weak collisions included. ??? Sufficient for most calculations. Only useful for very heavy particles; increases computing time. Only useful for very heavy particles; increases computing time.
ESB Surface binding energy for projectiles (in eV). This value is zero for the noble gases, but ESB should be larger than zero if the projectile is an active chemically species. ESB = SBE for self-sputtering calculations.		KK0R Maximum order of weak (simultaneous) collisions between target atoms: No weak collisions included. ??? Sufficient for most calculations. Only useful for very heavy particles; increases computing time. Only useful for very heavy particles; increases computing time.
SHEATH Sheath potential (in eV); typically 3 * kT (i.e., 3 * \|projectile energy\|).		KDEE1 Inelastic energy loss model for projectiles: Nonlocal (Lindhard-Scharff). Local (Oen-Robinson). Equipartition of local and nonlocal models (i.e., options 1 & 2). Nonlocal (Anderson-Ziegler tables for hydrogen); must be used for hydrogen-like projectile with energies > 10 keV. Nonlocal (Ziegler tables for helium); must be used for helium-like projectiles with energies > 50 keV. Note: options 1, 2, and 3 can only be used at energies below the stopping power maximum.
ERC Recoil cutoff energy (in eV); usually equal to the surface binding energy.		KDEE2 Inelastic energy loss for target atoms: Nonlocal (Lindhard-Scharff). Local (Oen-Robinson). Equipartition of local and nonlocal models (i.e., options 1 & 2). Note: options 1, 2, and 3 can only be used at energies below the stopping power maximum.
RD Depth (in Å) to which recoils are followed. RD = 50 is usually sufficient for sputtering (if the projectile energy is not too high). Use RD = 100 * CW (i.e., the depth increment) for following the full collision cascade.		IPOT Interaction potential between projectile and target atoms: Krypton-Carbon (Kr-C) potential. Molière potential. Ziegler-Biersack-Littmark (ZBL) potential.
CA Correction factor to the Firsov screening length for collisions between projectile and target atoms (only used in the application of the Molière potential); usually on the order of ~1.0.		IPOTR Interaction potential between target atoms: Krypton-Carbon (Kr-C) potential. Molière potential. Ziegler-Biersack-Littmark (ZBL) potential.
Stopping Power Coefficients Data source for the Varelas-Biersack parameterization of electronic stopping cross-sections for proton-like projectiles implanted in elemental targets: Table 1 in Anderson & Ziegler (1977). Table 3.1 in ICRU Report 49 (1993). Table II in McFadden et al. (2023) and McFadden et al. (unpublished). Note: While option 3 contains the most up-to-date values, it currently does not contain entries for every target element. For elements with missing data, values from option 2 are taken instead.		IRL Collision recoils: No recoils are generated (i.e., no sputtering effects); used to speed up the calculation if only projectile ranges are of interest. Calculate collision recoils.