Energy SigmaE Alpha SigAlpha ntot imp backsc trans tried negE range straggeling Eback sigEback Etrans SigEtrans red._E PRC SiO2 Al2O3 TiN W TiN Al2O3 Si 13.00 0.45 0.00 15.00 50000 49812 188 0 50000 0 0.6887E+03 0.1282E+03 0.4619E+04 0.3642E+04 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 1181 26680 21916 35 0 0 0