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EF +
+ EF + Cutoff energy of projectiles (in eV);
+ must be greater than zero. +
+
KK0 +
+ KK0 + Maximum order of weak (simultaneous) collisions between projectiles and target atoms;
+ must be between 0 and 4 (0 means no weak collisions included). +
+
ESB +
+ ESB + Surface binding energy for projectiles (in eV). +
+
KK0R +
+ KK0R + Maximum order of weak (simultaneous) collisions between target atoms;
+ must be between 0 and 4 (0 means no weak collisions included). +
+
SHEATH +
+ SHEATH + Sheath potential (in eV); typically 3 * kT (i.e., 3 * |projectile energy|). +
+
KDEE1 +
+ KDEE1 + Inelastic energy loss model for projectiles:
+ 1 = nonlocal (Lindhard-Scharff);
+ 2 = local (Oen-Robinson);
+ 3 = equipartition of 1 & 2;
+ 4 = nonlocal (Anderson-Ziegler tables for hydrogen);
+ 5 = nonlocal (Ziegler tables for helium). +
+
ERC +
+ ERC + Recoil cutoff energy (in eV);
+ usually equal to the surface binding energy. +
+
KDEE2 +
+ KDEE2 + Inelastic energy loss for target atoms:
+ 1 = nonlocal (Lindhard-Scharff);
+ 2 = local (Oen-Robinson);
+ 3 = equipartition of 1 and 2. +
+
RD +
+ RD + Depth (in Å) to which recoils are followed.
+ RD = 50 is usually sufficient for sputtering
+ (if the projectile energy is not too high).
+ Use RD = 100 * CW (i.e., the depth increment) for following the full cascade. +
+
IPOT +
+ IPOT + Interaction potential between projectiles and target atoms:
+ 1 = krypton-carbon (Kr-C) potential;
+ 2 = Molière potential;
+ 3 = Ziegler-Biersack-Littmark (ZBL) potential.
CA +
+ CA + Correction factor to the Firsov screening length for collisions between projectile and target atoms
+ (only for application of the Molière potential);
+ usually on the order of ~1.0. +
+
IPOTR +
+ IPOTR + Interaction potential between target atoms:
+ 1 = krypton-carbon (Kr-C) potential;
+ 2 = Molière potential;
+ 3 = Ziegler-Biersack-Littmark (ZBL) potential. +
+
IRL +
+ IRL + 0 = no recoils are generated (i.e., no sputtering effects);
+ used to speed up the calculation if only projectile ranges are of interest. +
+
+

+ For further details see: +

+

+ W. Eckstein, Computer Simulation of Ion-Solid Interactions,
+ Springer Series in Materials Science, Vol. 10 (Springer-Verlag, Berlin, 1991).
+ + https://doi.org/10.1007/978-3-642-73513-4 + +