EF
- Cutoff energy of projectiles (in eV);
+ Cutoff energy of projectiles (in eV);
must be greater than zero.
+ Used for low projectile energies (< 1000 eV) and ESB = 0.
+ EF should be of the order of ~0.2 eV,
+ but not above SBE (for sputtering data).
+ With increasing projectile energy,
+ EF can be increased to save computing time.
@@ -148,8 +153,14 @@
KK0
- Maximum order of weak (simultaneous) collisions between projectiles and target atoms;
- must be between 0 and 4 (0 means no weak collisions included).
+ Maximum order of weak (simultaneous) collisions between projectile and target atoms:
+
+
No weak collisions included.
+
???
+
Sufficient for most calculations.
+
Only useful for very heavy particles; increases computing time.
+
Only useful for very heavy particles; increases computing time.
+
@@ -161,6 +172,10 @@
ESB
Surface binding energy for projectiles (in eV).
+ This value is zero for the noble gases,
+ but ESB should be larger than zero if the projectile is an active
+ chemically species.
+ ESB = SBE for self-sputtering calculations.
@@ -169,8 +184,14 @@
KK0R
- Maximum order of weak (simultaneous) collisions between target atoms;
- must be between 0 and 4 (0 means no weak collisions included).
+ Maximum order of weak (simultaneous) collisions between target atoms:
+
+
No weak collisions included.
+
???
+
Sufficient for most calculations.
+
Only useful for very heavy particles; increases computing time.
+
Only useful for very heavy particles; increases computing time.
+
@@ -181,7 +202,8 @@
SHEATH
- Sheath potential (in eV); typically 3 * kT (i.e., 3 * |projectile energy|).
+ Sheath potential (in eV);
+ typically 3 * kT (i.e., 3 * |projectile energy|).
@@ -190,12 +212,23 @@
KDEE1
- Inelastic energy loss model for projectiles:
- 1 = nonlocal (Lindhard-Scharff);
- 2 = local (Oen-Robinson);
- 3 = equipartition of 1 & 2;
- 4 = nonlocal (Anderson-Ziegler tables for hydrogen);
- 5 = nonlocal (Ziegler tables for helium).
+ Inelastic energy loss model for projectiles:
+
+
Nonlocal (Lindhard-Scharff).
+
Local (Oen-Robinson).
+
+ Equipartition of local and nonlocal models (i.e., options 1 & 2).
+
+
+ Nonlocal (Anderson-Ziegler tables for hydrogen);
+ must be used for hydrogen-like projectile with energies > 10 keV.
+
+
+ Nonlocal (Ziegler tables for helium);
+ must be used for helium-like projectiles with energies > 50 keV.
+
+
+ Note: options 1, 2, and 3 can only be used at energies below the stopping power maximum.
@@ -206,7 +239,7 @@
ERC
- Recoil cutoff energy (in eV);
+ Recoil cutoff energy (in eV);
usually equal to the surface binding energy.
@@ -216,10 +249,15 @@
KDEE2
- Inelastic energy loss for target atoms:
- 1 = nonlocal (Lindhard-Scharff);
- 2 = local (Oen-Robinson);
- 3 = equipartition of 1 and 2.
+ Inelastic energy loss for target atoms:
+
+
Nonlocal (Lindhard-Scharff).
+
Local (Oen-Robinson).
+
+ Equipartition of local and nonlocal models (i.e., options 1 & 2).
+
+
+ Note: options 1, 2, and 3 can only be used at energies below the stopping power maximum.
@@ -230,10 +268,11 @@
RD
- Depth (in Å) to which recoils are followed.
- RD = 50 is usually sufficient for sputtering
- (if the projectile energy is not too high).
- Use RD = 100 * CW (i.e., the depth increment) for following the full cascade.
+ Depth (in Å) to which recoils are followed.
+ RD = 50 is usually sufficient for sputtering
+ (if the projectile energy is not too high).
+ Use RD = 100 * CW (i.e., the depth increment)
+ for following the full collision cascade.
+ Interaction potential between projectile and target atoms:
+
+
Krypton-Carbon (Kr-C) potential.
+
Molière potential.
+
Ziegler-Biersack-Littmark (ZBL) potential.
+
+
+
@@ -254,8 +297,9 @@
CA
- Correction factor to the Firsov screening length for collisions between projectile and target atoms
- (only for application of the Molière potential);
+ Correction factor to the Firsov screening length for
+ collisions between projectile and target atoms
+ (only used in the application of the Molière potential);
usually on the order of ~1.0.
IRL
- 0 = no recoils are generated (i.e., no sputtering effects);
- used to speed up the calculation if only projectile ranges are of interest.
+ Collision recoils:
+
+
+ No recoils are generated (i.e., no sputtering effects);
+ used to speed up the calculation if only projectile ranges are of interest.
+