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FAT X02SA-OP-SL1 / SH1 Mechatronic Systems

Overview

Overview Optics

Overview Device

3DExperience assembly numbers

Assembly Desription
PRD-00647002 3D Slits with Main Shutter
PRD-00644871 Zusam. Slit I-Tomcat
PRD-00667897 Zusam. Einsatz SH/ST Aktuator
PRD-00667918 Zusam. Pneumatikplatte

PRD-00647002

PRD-00667918

PRD-00644871

PRD-00644871

X02SA-OP-SH1

Timing chart valve and limit switches

Scope valve timing

The shutter will be closed when the valve is activated (+24V DC). This behaviour could be inverted by switching the pneumatik tubes on the valve output. The positive limit switch is activated (+24V signal) when the shutter is open, the negative limit switch is activated when the shutter is closed.

X02SA-OP-SL1

General settings for all slits motors

General Settings

General Settings 2

Axis specific settings

X02SA-OP-SH1:TRXW

Item Value
positive direction slit opening
X min @ negative limit switch 0.0 mm
X max @ positive limit switch +34.5 mm
Invert motor polarity TRUE
Invert encoder polarity TRUE
Invert limit switches *) FALSE
Encoder bias offset 51.5093 mm

X02SA-OP-SH1:TRXR

Item Value
positive direction slit closing
X min @ negative limit switch 0.0 mm
X max @ positive limit switch +33.6 mm
Invert motor polarity FALSE
Invert encoder polarity FALSE
Invert limit switches *) TRUE
Encoder bias offset -26.6784 mm

X02SA-OP-SH1:TRYB

Item Value
positive direction slit closing
X min @ negative limit switch 0.0 mm
X max @ positive limit switch +34.9 mm
Invert motor polarity FALSE
Invert encoder polarity FALSE
Invert limit switches *) TRUE
Encoder bias offset -30.7059 mm

X02SA-OP-SH1:TRYT

Item Value
positive direction slit opening
X min @ negative limit switch 0.0 mm
X max @ positive limit switch +35.3 mm
Invert motor polarity TRUE
Invert encoder polarity TRUE
Invert limit switches *) FALSE
Encoder bias offset 51.2801 mm

*) Inverted limit switches: This is not an official TwinCat setting. It means that the negative limit switch is mounted in the positive travel direction and vice versa.

Additional functional tests

All axis were tested with 100 cycles from 2.0 mm to 32.0 mm @ 10mm/s (no vacuum applied).

All thermocouples (4x slits, 2x shutter) were insulation tested @ 100 V. The resistance on all thermocouples is > 110 MOhm. All couples showed a reasonable temperature.

Additional data

Twincat data

Shutter TwinCat project: X02SA-OP-SH1/X02SA-OP-SH1.sln

Shutter TwinCat Scope project: X02SA-OP-SH1/ScopeProject/ScopeProject.tcmproj

Slits TwinCat project: X02SA-OP-SL1/X02SA-OP-SL1.sln

Vacuum leakage test

Leaktest

Description
FAT I-TOMCAT Optic Filter and Slits
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